TWI624891B - Substrate holding device - Google Patents

Abstract

The present invention provides a substrate fixing device that securely fixes a substrate without causing complication of the device configuration and increasing the size of the entire device.

The substrate fixing device of the present invention is provided with a platform 10 and a gripping mechanism 20, wherein the gripping mechanism 20 includes a plurality of jigs 21 which are provided corresponding to the respective sides of the substrate W and which can fix the substrate W. The fixed position X is moved between the release position Y for releasing the substrate W; and the power transmission mechanism 22 is provided with one side clamp 21 corresponding to one of the opposite sides of the substrate W, and corresponding thereto The driving force for moving the jig 21 is transmitted between the other side jigs 21 provided on the other side, and the power transmission mechanism 22 has a sliding member 7 which is moved with the aforementioned side jig 21 or The side-side jig 21 transmits the driving force by moving the member that transmits the driving force to the predetermined direction, thereby transmitting the driving force to the other side jig 21.

Description

Substrate fixing device

The present invention relates to a substrate fixing device for fixing a substrate.

In the substrate fixing device of the above type, there is a substrate fixing device as disclosed in Patent Document 1, which is an ion beam irradiation device for irradiating an ion beam to a substrate, and has a platform on which a substrate having a substantially rectangular shape is placed, and a gripping mechanism; the gripping mechanism fixes the substrate between the gripping mechanism and the platform.

Specifically, the gripping mechanism includes a pair of clamps and an actuator corresponding to the opposite sides of the substrate, and the actuators are disposed corresponding to the respective clamps so that the clamps are fixed on the substrate The fixed position moves between the fixed position and the release position of the release substrate.

However, in the substrate fixing device having the above configuration, since the substrate is fixed only to the opposite sides, the substrate is displaced in the direction orthogonal to the opposing direction.

The above problem is particularly remarkable in the case where the ion beam implantation apparatus erects the substrate placed horizontally and injects the ion beam, and scans the substrate in the direction intersecting the ion beam.

On the other hand, if a jig is provided corresponding to each side of the substrate, an actuator corresponding to the number of clamps to be added is required, which complicates the configuration of the device and increases the size of the entire device.

[Previous Technical Literature] [Patent Literature]

Patent Document 1: Japanese Laid-Open Patent Publication No. 2001-107235

Therefore, the present invention has been made in order to solve the above problems, and a main object of the present invention is to reliably fix a substrate without causing complication of the device configuration and increasing the size of the entire device.

That is, the substrate fixing device of the present invention is provided with a platform on which a substrate having a substantially rectangular shape is placed, and a gripping mechanism that fixes the substrate between the gripping mechanism and the platform; wherein the clip is The grasping mechanism includes: a plurality of clamps disposed corresponding to respective sides of the substrate, and movable between a fixed position at which the substrate is fixed and a release position at which the substrate is released; and a power transmission mechanism; And a driving force for moving the jig is transmitted between one of the opposite sides of the opposite substrate and the other side of the opposite side of the substrate; and the power transmission is The mechanism includes a sliding member that moves along with the movement of the one side clamp or the member that transmits the driving force to the one side clamp. The sliding force is moved in a predetermined direction to convey the driving force to the other side jig.

According to the above substrate fixing device, due to the fixture system and the base Since the respective sides of the plate are provided correspondingly, the substrate can be surely fixed, and the sliding member is slidably moved in accordance with the movement of the one side jig or the movement of the member that transmits the driving force to the one side jig. Since the driving force is transmitted to the one side jig, the common side actuator can be used to move the one side jig and the other side jig, and the device configuration can be simplified and the entire device can be downsized.

The substrate fixing device of the present invention preferably has a front structure The opposing direction of the one side clamp and the other side clamp substantially coincides with the substrate loading/unloading direction in which the substrate is carried in and out of the platform.

With this configuration, the actuator that is commonly used by the one side clamp and the other side clamp can be disposed so as to avoid the substrate loading/unloading side, and the actuator does not hinder the substrate from being carried in and out.

On the other hand, in the conventional configuration in which the actuators are provided corresponding to the respective jigs, the direction in which the one side clamp and the other side clamp are to be aligned with the substrate loading/unloading direction is arranged on the substrate loading/unloading side. The actuator hinders the loading and unloading of the substrate.

In the substrate fixing device of the present invention, preferably, the one side clamp or the other side clamp is configured to be placed on the substrate loading/unloading side, and is disposed below the substrate mounting surface of the stage in the release position. The location.

With this configuration, since the loading and unloading of the substrate is not hindered by the jig, the height of the substrate loaded and unloaded can be maintained at an existing setting, in other words, the substrate can be carried in and out without changing the setting of the transport robot for transporting the substrate.

The substrate fixing device of the present invention is preferably: the aforementioned power The communication means includes: a first transmission element that transmits the driving force to the side jig, and the side jig is provided corresponding to at least one of the opposite sides of the substrate; and the second communication The element transmits the driving force to the one side jig, and transmits the driving force to the side jig, the side jig, and the other via the first transmission element, the second transmission element, and the sliding member. Side clamp.

According to this configuration, the jig provided corresponding to at least three sides of the substrate can be moved by the driving force from the common actuator, so that the simplification of the device configuration and the downsizing of the entire device can be achieved.

The substrate fixing device of the present invention is preferably the aforementioned clamp system And the clamp and the power transmission mechanism are configured to be pushed by the elastic member to the fixed position and moved from the fixed position to the release position by the driving force, and in a state where the clamp is located at the fixed position, the clamp and the power transmission mechanism A gap is formed between the aforementioned jigs without causing the aforementioned driving force to be applied.

With this configuration, since each of the jigs located at the fixed position individually fixes the substrate in a state in which it is not subjected to the driving force (that is, in a state independent of each other), even if it is assumed that one jig is sandwiched by the particles existing on the substrate Wait The self-fixed position is slightly floated, and the substrate can be surely fixed by other jigs.

The substrate fixing device of the present invention preferably has a substrate fixed The device further includes a stopper protruding upward from the substrate mounting surface of the platform, and the stopper is disposed to be movable between a stop position and a withdrawal position, the stop position being contacted on the substrate The outer edge of the substrate is placed to stop the movement of the substrate, and the exit position is withdrawn to the outer side of the stop position relative to the substrate.

With this configuration, it is possible to prevent excessive substrate displacement or drop of the substrate by the stopper located at the stop position contacting the outer edge of the substrate, and to cause the stopper when the substrate is lifted by the transfer robot Moving from the stop position to the exit position causes the stopper to be non-contact with the substrate, thereby preventing the substrate end surface from rubbing against the stopper to generate fine particles.

On the other hand, when the stopper is fixed to the predetermined position, when the substrate is lifted by the transport robot, the end surface of the substrate rubs against the stopper to generate fine particles.

The substrate fixing device of the present invention is preferably: the aforementioned platform In order to move between a horizontal posture in which the substrate is delivered and a standing posture in which the horizontal posture is raised, the stopper is disposed on a lower side of the platform located in the standing posture.

With this configuration, it is possible to prevent the substrate from falling from the platform when the platform is moved from the horizontal posture to the posture.

The substrate fixing device of the present invention is preferably: the above substrate The fixing device further includes: a rotating member that is slidable with the sliding member Moving in conjunction with rotation about a predetermined center of rotation; and a switching mechanism for converting a rotational driving force of the rotating member into a linear driving force along a moving direction of the stopper; and configured to be by the aforementioned switching mechanism The aforementioned linear driving force is converted to the aforementioned stopper.

According to this configuration, since the linear driving force is transmitted to the stopper in conjunction with the movement of the stopper, the clamp can be interlocked with the stopper without requiring a dedicated actuator for moving the stopper.

The substrate fixing device of the present invention is preferably: the aforementioned conversion The mechanism includes a sliding body provided on one of the rotating member or the fixing plate that fixes the stopper, and a sliding space formed on the other side to slide the sliding body, and configured to rotate in accordance with the rotation of the rotating member. The sliding body slides in the sliding space, and the fixing plate moves along the moving direction of the stopper, and is configured to move the platform to the standing posture when the stopper is located at the stopping position. The sliding system is located vertically above the center of rotation.

With this configuration, when the platform is raised, even if the load is applied to the fixed plate in a state where the stopper is at the stop position, since the slider is positioned vertically above the center of rotation, the slider does not rotate. And the fixed plate does not move. Thereby, even if the substrate is dropped, the stopper can be prevented from shifting downward.

According to the present invention configured as described above, the substrate can be reliably fixed without complication of the device configuration and an increase in size of the entire device.

3‧‧‧Longitudinal sliding parts

4‧‧‧ horizontal slides

5‧‧‧ Directional conversion mechanism

6‧‧‧Fixed components

7‧‧‧Sliding members

8‧‧‧stops

9‧‧‧ linkage agency

9h1, 9h2‧‧‧ sliding space

10‧‧‧ platform

11‧‧‧ comb teeth

12‧‧‧Substrate placement surface

20‧‧‧Clamping mechanism

21‧‧‧Clamp

21a‧‧‧1st fixture

21b‧‧‧2nd fixture

21bl‧‧‧2nd fixture on the left

21br‧‧‧2nd right clamp

21c‧‧‧3rd fixture

22‧‧‧Power transmission agency

22a‧‧‧1st communication element

22b‧‧‧2nd communication element

22c‧‧‧3rd communication element

41, 61‧‧‧ inner circumference

51‧‧‧ oblique hole

52‧‧‧Sliding section

81‧‧‧ fixed plate

90‧‧‧Rotating components

91‧‧‧1st linear rotation conversion mechanism

92‧‧‧2nd linear rotation conversion mechanism

93‧‧‧Fixed components

94‧‧‧1st sliding body

95‧‧‧2nd sliding body

100‧‧‧Substrate fixing device

211‧‧‧Apartment

B‧‧‧Flexible components

G‧‧‧Guide members

H‧‧‧through hole

I‧‧‧ axis

L, La, Lb, Lc‧‧‧ rotating shaft

Ma, Mb, Mc‧‧‧ hooks

Na, Nb, Nc‧‧‧ was hooked

O, Oz‧‧‧ Rotation Center

P‧‧‧ stop position

Q‧‧‧ Exit location

R‧‧·guide roller

Sa, Sb, Sc‧‧ gap

V‧‧‧ housing recess

W‧‧‧Substrate

X‧‧‧ fixed position

Y‧‧‧ release position

Z‧‧‧ rod

Fig. 1 is a schematic view of the substrate fixing device of the embodiment as seen from the front side.

Fig. 2 is a schematic view of the substrate fixing device of the embodiment as seen from the back side.

Fig. 3 (a) and (b) are schematic views for explaining the first transmission mechanism of the embodiment.

Fig. 4 (a) to (c) are views for explaining the operation of the first jig of the present embodiment (A1-A1' sectional view).

Fig. 5 is a schematic view for explaining a second transmission mechanism of the embodiment.

Fig. 6 (a) to (c) are views for explaining the operation of the second jig of the embodiment (A2-A2' sectional view).

Fig. 7 (a) and (b) are schematic views for explaining a third transmission mechanism of the embodiment.

Fig. 8 (a) and (b) are schematic views for explaining the operation of the stopper of the embodiment.

Fig. 9 (a) to (d) are schematic views for explaining the interlocking mechanism of the embodiment.

Fig. 10 (a) to (c) are schematic views for explaining the interlocking mechanism of the modified embodiment.

The following relates to the substrate fixing device of the present invention One embodiment will be described.

The substrate fixing device 100 of the present embodiment is used, for example, In the ion beam irradiation apparatus, the substrate W to be processed is fixed, and as shown in FIGS. 1 and 2, a stage 10 on which a substrate W having a substantially rectangular shape is placed, and a gripping mechanism 20 are provided. The gripping mechanism 20 fixes the substrate W between the gripping mechanism 20 and the platform 10.

The platform 10 is connected to a handling robot (not shown). The substrate W is delivered between the two, and is configured to be rotatable about the axis I between a horizontal posture in which the substrate W is placed and a standing posture in which the substrate W is raised.

In addition, the horizontal posture here includes a posture that is inclined from the horizontal direction, and the standing posture includes a posture that rises in the vertical direction and a posture that is inclined from the vertical direction.

In the present embodiment, the substrate W is irradiated with an ion beam. In the processing chamber, the transport robot transports the substrate in a predetermined substrate loading/unloading direction on the platform 10 in the horizontal posture and mounts the substrate. Then, when the stage 10 is in the standing posture from the horizontal posture and the ion beam is irradiated to the substrate W in the processing chamber, the stage 10 is scanned by the ion beam in a direction in which the ion beam is staggered.

Hereinafter, for convenience of explanation, as shown in FIG. 2, the substrate loading/unloading direction is set to the vertical direction, and the direction orthogonal to the vertical direction is defined as the left-right direction. Further, the upper side in the up-and-down direction is the substrate loading/unloading side, and the left side and the right side in the left-right direction are the left side and the right side when the stage is viewed from the back side.

Specifically, as shown in FIG. 1, the platform 10 is A plurality of combs (here, four) comb teeth 11 are arranged at predetermined intervals to form a comb shape, and the surface thereof is set as the substrate mounting surface 12 on which the substrate W is placed.

Further, the shape of the stage 10 is not limited to the above shape, and may be a substantially rectangular shape.

Further, the substrate mounting surface 12 does not have to be set on the surface of the stage 10. For example, when the platform 10 has a plurality of height adjusting members such as pins mounted on the surface, the front ends of the plurality of height adjusting members can be provided. The formed virtual plane is set as the substrate mounting surface 12.

As shown in FIGS. 1 and 2, the aforementioned gripping mechanism 20 The plurality of jigs 21 provided corresponding to the respective sides of the substrate W and the power transmission mechanism 22 that transmits the driving force input from the outside between the plurality of jigs 21 are provided.

As shown in Fig. 1 and Fig. 2, in the present embodiment, The left side portion, the right side portion, the upper side portion, and the lower side portion of the platform 10 are respectively provided with a plurality of jigs 21 which are disposed apart from each other.

When the jigs 21 provided in the respective side portions are to be distinguished from each other, the jigs 21 facing each other in the left-right direction are referred to as a first jig 21a, and the jigs 21 facing each other in the vertical direction are formed, and the lower side is The jig 21 is referred to as a second jig 21b, and the upper jig 21 is referred to as a third jig 21c.

As shown in Figures 3 to 7, the aforementioned clamp 21 system It is movable between a fixed position X at which the substrate W is fixed between the jig 21 and the stage 10, and a release position Y of the release substrate W, and is configured to be disposed around the platform 10 in a horizontal posture. The substrate mounting surface 12 is further below (the back side of the platform 10 is closer to the substrate mounting surface 12) The rotation axis L rotates. In the present embodiment, for example, the elastic member B such as a torsion spring is provided on the rotating shaft L, and the respective clamps 21 are pushed toward the fixed position X by the elastic member B.

More specifically, especially as shown in Figures 4 and 6, Each of the jigs 21 has a pair of abutting portions 211 that abut against the substrate W at the fixed position.

Here, the first jig 21a and the third jig 21c are formed in the same shape, and have a columnar abutting portion 211, and the second jig 21b has a flat abutting portion 211.

Further, the shape of each of the jigs 21 and the shape of the abutting portion 211 can be variously changed.

In this embodiment, the platform 10 is in a horizontal posture. In the state in which the substrate W is carried in and out of the third jig 21c, the third jig 21c does not interfere with the loading and unloading of the substrate W. Therefore, the third jig 21c located at the release position Y is placed. The position is lower than the substrate mounting surface 12 of the stage 10 (the back side of the stage 10 of the substrate mounting surface 12).

Here, the opening angle X of the third jig 21c and the release position Y are set such that the third jig 21c located at the release position Y is located lower than the substrate mounting surface 12 (more than the substrate carrying The position of the face 12 is further to the back side of the platform 10.

Next, the power transmission mechanism 22 will be described.

The power transmission mechanism 22 is provided with a driving force for moving the jig 21 by an actuator (not shown), and the driving force is The jig 21 provided corresponding to one side of the substrate W and the jig 21 provided corresponding to at least one of the other sides are communicated with each other, and the first jig 21a, the second jig 21b, and the third jig 21c are configured. The aforementioned driving force is conveyed.

In the present embodiment, as shown in Fig. 2, the pair of power transmission mechanisms 22 are independently provided on the left and right sides of the stage 10, and each of the power transmission mechanisms 22 is configured to be provided corresponding to the three sides of the substrate W. The driving force is transmitted between the jig 21 (the first jig 21a, the second jig 21b, and the third jig 21c on the left and right sides).

Here, the pair of power transmission mechanisms 22 are configured to be bilaterally symmetrical. In the following description, the power transmission mechanism 22 on the left side will be described to represent the power transmission mechanisms.

As shown in FIG. 2, the aforementioned power transmission mechanism 22 is equipped with The first transmission element 22a that transmits the driving force to the first jig 21a, the second transmission element 22b that transmits the driving force to the second jig 21b, and the third transmission element 22c that transmits the driving force to the third jig 21c are provided.

As shown in Fig. 3, the first communication element 22a is made The first jig 21a rotates around the rotation axis La and moves from the fixed position X to the release position Y, and has the vertical slider 3 that slides in the vertical direction by the driving force, and moves to the left and right direction with the movement of the vertical slider 3. The lateral slider 4 that slides and moves, and the direction changing mechanism 5 that is located between the vertical slider 3 and the lateral slider 4 for converting the driving force in the vertical direction into the driving force in the left-right direction.

The vertical slider 3 is attached to the back side of the platform 10 from the upper end The member is provided in a rod shape along the vertical direction at the lower end portion, and a rod Z that is rotated around the rotation center Oz by a driving force that transmits an actuator (not shown) is connected thereto. The rod Z of the present embodiment is connected between the upper side and the lower side of the vertical slider 3 between the first jigs 21a, but may be connected to the lower side of the first jig 21a above or below the upper first jig 21a.

Further, a part of the vertical slider 3 is clamped to the pair of guide rollers R.

The horizontal slider 4 is provided between the vertical slider 3 and the first jig 21a, and the member that moves the first jig 21a from the fixed position X to the release position Y is provided in plural as shown in FIG. The first jig 21a corresponds to each position.

More specifically, as shown in FIG. 4, the hook portion Ma is provided on one of the horizontal slider 4 or the first clamp 21a, and the hook portion Ma is hooked on the other hook portion Ma. Na. Further, a gap Sa is formed between the hook portion Ma and the hooked portion Na, and the gap Sa is used to prevent the driving force from acting on the first jig 21a while the first jig 21a is at the fixed position X. .

In the present embodiment, the horizontal slider 4 is formed with a groove having a substantially U-shaped cross section as the hook portion Ma, and a rod body parallel to the rotation axis La is provided in the first jig 21a as the hook portion. Na is formed with the above-described gap Sa between the inner circumferential surface 41 of the groove and the outer circumferential surface of the rod.

As shown in FIG. 3, the direction changing mechanism 5 is a member for converting the driving force transmitted in the vertical direction of the vertical slider 3 into the left-right direction, and specifically, is provided on the vertical slider 3 or the aforementioned Cross slide One of the movable members 4 has an inclined hole 51 extending in an oblique direction crossing the vertical direction and the horizontal direction, and a sliding portion 52 provided on the other side and slidable in the inclined hole 51.

In the present embodiment, the lateral slider 4 is formed with, for example, a slanted hole 51 which is inclined by 45 degrees from the vertical direction and the horizontal direction, and a projection portion belonging to the sliding portion 52 is provided in the vertical slider 3.

In addition, the inclined hole 51 does not have to be a through hole, and may be a groove.

Next, the operation of the first transmission element 22a and the first jig 21a will be described with reference to FIGS. 3 and 4.

First, as shown in Fig. 3 (a), when the first jig 21a is pushed by the elastic member B to the fixed position X, when a driving force from an actuator (not shown) is applied to the lever Z, The rod Z is rotated about the rotation center Oz, and the vertical slider 3 is slidably moved from the upper side to the lower side.

At this time, in conjunction with the sliding movement of the vertical slider 3, the sliding portion 52 moves along the inclined hole 51, whereby the horizontal slider 4 slides from the left side to the right side (from the outside to the inside of the stage 10). mobile.

Further, as shown in Fig. 4, with the sliding movement of the horizontal slider 4, the inner peripheral surface 41 belonging to the groove of the hook portion Ma is a rod belonging to the hook portion Na from the left side to the right side. By pulling, the first jig 21a is rotated about the rotation axis La.

In the present embodiment, since the gap Sa is formed, the hook portion Ma and the hooked portion Na are not in contact with each other in a state where the first jig 21a is at the fixed position X (Fig. 4(a)). And by that from The sliding member 4 is slidably moved from the left side to the right side, and the hook portion Ma is in contact with the hooked portion Na (Fig. 4(b)), and the horizontal sliding portion 4 is further slid from the left side to the right side. By moving, the driving force is applied to the hooked portion Na from the hook portion Ma, and the first jig 21a is moved to the release position Y (Fig. 4(c)).

On the other hand, when driving from an actuator not shown When the force is blocked, as shown in Fig. 3(b), the first jig 21a is moved from the release position Y to the fixed position X by the elastic force of the elastic member B.

Next, the second communication element 22b will be described.

As shown in Fig. 5, the second transmission element 22b moves the second jig 21b around the rotation axis Lb and moves from the fixed position X to the release position Y.

In the present embodiment, the first transmission element 22a is configured to transmit a driving force to at least one of the second jigs 21b, and the second transmission element 22b is configured to transmit a driving force to the other second jigs 21b.

More specifically, as shown in FIG. 5, the pair of second jigs 21b are rotated about the common rotation axis Lb, and the first transmission element 22a is paired with the second of the pair of second jigs 21b. The jig 21b (hereinafter also referred to as the left second jig 21b1) transmits the driving force, and the second transmission element 22b transmits the driving force to the second jig 21b (hereinafter also referred to as the right second jig 21br) on the right side.

First, the relationship between the second second jig 21b1 and the first communication element 22a will be described. As shown in Fig. 5, the left second clamp 21b is configured to be disposed in the vicinity of the lower end portion of the vertical slider 3 of the first transmission element 22a, and is fixed at the fixed position X with the sliding movement of the vertical slider 3. Move between the release positions Y.

More specifically, as shown in Figure 6, on the left side The second jig 21b1 or one of the vertical sliders 3 is provided with a hook portion Mb, and the other is provided with a hook portion Nb hooked by the hook portion Mb. Further, a gap Sb is formed between the hook portion Mb and the hooked portion Nb, and the gap Sb is in a state where the left second clamp 21b1 is at the fixed position X for not applying the driving force to the left second clamp. 21bl.

In the present embodiment, the fixing member 6 fixed to the lower end portion of the vertical slider 3 is formed with a groove having a substantially U-shaped cross section as the hook portion Mb, and is provided on the left second clamp 21b1. The rod parallel to the rotation axis Lb is the hook portion Nb, and the gap Sb is formed between the inner circumferential surface 61 of the groove and the outer circumferential surface of the rod.

With the above configuration, as shown in Fig. 6, when the vertical sliding member When slidingly moving from the upper side to the lower side, the inner peripheral surface 61 of the groove belonging to the hook portion Mb lowers the rod belonging to the hooked portion Nb from the upper side to the lower side (from the inner side of the platform 10 to the outer side) By pulling, the left second clamp 21b1 is rotated about the rotation axis Lb.

In the present embodiment, since the above-described void Sb is formed, Therefore, in a state where the left second jig 21b1 is at the fixed position X, the hook portion Mb is not in contact with the hooked portion Nb (Fig. 6a). Further, by sliding the longitudinal slider 3 from the upper side to the lower side from the position, the hook portion Mb And contacting the hooked portion Nb (Fig. 6b), and further sliding the vertical slider 3 from the upper side to the lower side, thereby causing the driving force to act on the hooked portion from the hook portion Mb. In the portion Nb, the left second clamp 21b1 is moved to the release position Y (Fig. 6c).

Next, the second communication element 22b and the second right side The relationship of the jig 21br will be described.

As shown in Fig. 5, in the second transmission element 22b of the present embodiment, the driving force transmitted to the left second clamp 21b1 is transmitted to the right second clamp 21br. Here, the second clamps 21b1, The rotating shaft Lb to which 21br is connected.

With this configuration, the right second clamp 21br is moved in conjunction with the left second clamp 21b1 by the above-described driving force, and moves between the fixed position X and the release position Y.

Next, the third communication element 22c will be described.

As shown in Fig. 7, the third transmission element 22c is a sliding member that moves the fixed position X to the release position Y by rotating the third jig 21c about the rotation axis Lc, and has a sliding member that moves in a predetermined direction. 7.

As shown in FIGS. 5 and 7, the sliding member 7 is located between the right second clamp 21br and the third clamp 21c, and transmits the driving force from the second clamp 21br to the third clamp 21c. This is a rod that is disposed in parallel with the vertical slider 3 described above.

More specifically, as shown in Fig. 6, a hook is provided on one of the lower end portion of the sliding member 7 or the second right clamp 21br. The part Mb is provided with the hooked portion Nb hooked by the hook portion Mb on the other side.

Further, as shown in Fig. 7, the hook portion Mc is provided on one of the upper end portion of the sliding member 7 or the third jig 21c, and the hook portion Mc is hooked on the other side. Department Nc.

In the present embodiment, the lower end portion and the right side of the sliding member 7 The configuration of the second second jig 21br is the same as the configuration of the vertical slider 3 and the left second jig 21b1, and the upper end portion of the sliding member 7 and the third jig 21c are configured to be the first jig 21a and the horizontal slider 4, respectively. For the same composition.

That is, as shown in FIG. 6, it is fixed to the sliding member 7 The fixing member 6 at the lower end portion is formed with a groove having a substantially U-shaped cross section as the hook portion Mb, and the second clamp 21b on the right side is provided with a rod body parallel to the rotation axis Lb as the hooked portion Nb.

Further, as shown in Fig. 7, a groove having a substantially U-shaped cross section is formed as a hook portion Mc at the upper end portion of the sliding member 7, and a rod parallel to the rotation axis Lc is provided in the third jig 21c. The body comes as a hooked part Nc.

In addition, in the aforementioned hook portions Mb, Mc and the aforementioned hooks The gaps Sb and Sc are formed between the portions Nb and Nc, and the gaps Sb and Sc are used to prevent the driving force from acting on the right side in a state where the right second clamp 21br and the third clamp 21c are at the fixed position X. 2 clamp 21br and third clamp 21c.

With the above configuration, along with the right second clamp 21br In the movement between the fixed position X and the release position Y, the sliding member 7 is slidably moved in the up and down direction, and the third jig 21c is in the fixed position X and the release position Y as the sliding member 7 slides. Move between.

More specifically, by making the right second clamp 21br from The fixed position X moves to the release position Y, and the rod system belonging to the hooked portion Nb pushes the inner circumferential surface 61 of the groove belonging to the hook portion Mb from the upper side to the lower side (from the inner side to the outer side of the platform 10). Thereby, the sliding member 7 is slidably moved from the upper side to the lower side.

And, by sliding the sliding member 7 from the upper side to the lower side The inner peripheral surface of the groove belonging to the hook portion Mc is pulled from the upper side to the lower side (from the inner side to the outer side of the platform 10), whereby the third jig 21c is pulled. It rotates around the rotation axis Lc.

By the above-described power transmission mechanism 22, in the present embodiment In the state, the left second jig 21b1 is rotated in conjunction with the first jig 21a, and the second second jig 21br is rotated in conjunction with the left second jig 21b1, and is interlocked with the right second jig 21br to make the third The jig 31c is rotated. In other words, the first jig 21a, the second jig 21b, and the third jig 21c are moved between the fixed position X and the release position Y in conjunction with each other, and in the present embodiment, each of the jigs 21a to 21c reaches the fixed position at the same time. X, and at the same time reach the release position Y.

Moreover, the substrate fixing device 100 of the present embodiment is more The stopper 8 that is placed on the movement of the substrate W of the stage 10 is limited.

Here, in order to prevent the substrate W from being in the standing posture The platform 10 is dropped. As shown in FIG. 2, a plurality of the stoppers 8 are provided on the lower side of the platform 10 in the standing posture, and specifically, are disposed near the lower end of the vertical slider 3 and are slidable. Near the lower end of the member 7.

Each of the foregoing stoppers 8 is in the horizontal posture of the platform 10 In this state, the substrate mounting surface 12 is protruded upward (the surface side of the platform 10 from the substrate mounting surface 12), and as shown in FIG. 8, it is set at the stop position P and the exit position. When the Q is moved, the stop position P contacts the substrate W placed on the substrate mounting surface 12 to stop the movement of the substrate W, and the exit position Q is withdrawn from the substrate W to be more than the stop position P. The position on the outside.

The stop position P is located at a position where the substrate W is placed at the position of the stage 10 by the transfer robot, and is not in contact with the stopper 8, and the exit position Q is the stopper 8 from the substrate. It is separated to a position outside the aforementioned stop position P.

As shown in Figures 9(a) and (b), the stoppers 8 are The fixing plate 81 is fixed to the fixing plate 81, and is configured to move in the vertical direction, for example, while being guided by the guiding member G.

The fixing plate 81 is erected and provided with the aforementioned stopper 8, and for example, integrally formed with the aforementioned stoppers 8. In the present embodiment, the fixing plate 81 is provided on the back side of the stage 10, and the stopper 8 is inserted through the through hole H from the back side to the front side, and the through hole H is for sliding the platform 10 and the vertical sliding portion. The piece 3 or the platform 10 and the sliding member 7 are formed therethrough.

In this embodiment, as shown in FIG. 9, the substrate is fixed. The device 100 further includes an interlocking mechanism 9 that interlocks the stopper 8 with the power transmission mechanism 22, and the stopper 8 is configured to be stopped by the driving force transmitted from the power transmission mechanism 22. The position P moves between the exit position Q and the aforementioned exit position.

The interlocking mechanism 9 corresponds to each of the stoppers 8 respectively. Settings.

In the following description, the configuration of the interlocking mechanism 9 between the stopper 8 and the sliding member 7 will be described, but the configuration of the interlocking mechanism 9 between the stopper 8 and the vertical slider 3 is also the same. .

The linkage mechanism 9 is provided in a rotatable manner The rotating member 90 of the stage 10, the first linear rotation conversion mechanism 91 that converts the linear movement driving force along the moving direction of the sliding member 7 into the rotational driving force of the rotating member 90, and the rotational driving force of the rotating member 90 The second linear rotation conversion mechanism 92 that converts the driving force into a straight line along the moving direction of the stopper 8 is converted.

The rotating member 90 is rotatable about the center of rotation O Here, the pair of rotating members 90 are provided on the right and left sides of the sliding member 7.

As shown in the figure 9(c) and (d), the aforementioned first linear rotation The conversion mechanism 91 includes a first sliding body 94 provided on one of the fixing member 93 or the rotating member 90 fixed to the sliding member 7, and a sliding space 9h1 formed on the other side to slide the first sliding body 94.

Further, the ninth (c) and (d) drawings show the state in which the fixing plates 81 of the ninth (a) and (b) drawings are removed.

In the embodiment, the rotating member 90 is provided The first sliding body 94 is formed as a rotating roller that rotates around the rotation center O, and a pair of notches are formed on the left and right sides of the fixing member 93 as the first sliding space 9h1.

According to the above configuration, the fixing member 93 and the sliding structure are The member 7 slides in the vertical direction in conjunction with the movement, and the first slider 94 moves in the first sliding space 9h1 and simultaneously rotates around the rotation center O, and the pair of rotating members 90 rotate in opposite directions.

As shown in Figure 9(a) and (b), the aforementioned second linear rotation The conversion mechanism 92 includes a second sliding body 95 provided on one of the rotating member 90 or the fixed plate 81, and a sliding space 9h2 formed on the other side to slide the second sliding body 95.

In the present embodiment, the rotation member 90 is The first sliding body 94 is provided with a rotating roller that rotates around the rotation center O as the second sliding body 95, and a long hole is formed in the left and right sides of the fixing plate 81 as the second sliding. Space 9h2.

With the above configuration, the second sliding body 95 and the rotation The rotation of the member 90 rotates in conjunction with each other, and simultaneously slides in the second sliding space 9h2, and the fixed plate 81 slides in the vertical direction.

In this embodiment, it is configured by: sliding structure The member 7 is moved from the upper side to the lower side, and the fixing plate 81 is moved from the upper side to the lower side (from the inner side to the outer side of the stage 10) by the above-described interlocking mechanism 9. That is, when the clamp 21 is moved from the fixed position X to the release position Y by the power transmission mechanism 22, the stopper 8 moves in conjunction with the movement of the clamp 21 from the stop position P to the exit position Q, and when When the jig 21 moves from the release position Y to the fixed position X, the stopper 8 moves in conjunction with the operation of the jig 21 from the exit position Q to the stop position P.

Here, the second slider 95 is configured to be The stopper 8 is in the state of the restraining position P, and moves on the platform 10 to stand up The posture is at a position vertically above the rotation center O of the rotating member 90. That is, when the stopper 8 is moved to the restraining position P, the center of gravity of the second slider 95 and the center of rotation O of the rotating member 90 are located on the vertical line.

Further, in the present embodiment, as shown in Fig. 2 and the like, The power transmission mechanism 22 and the interlocking mechanism 9 are housed in the housing recess V formed on the back surface of the stage 10, and the components constituting the power transmission mechanism 22 and the interlocking mechanism 9 are formed in a state where the platform 10 is in the horizontal posture. Each member is not exposed from the back of the platform 10.

The housing recess V is configured to be closed by a cover member (not shown).

According to the substrate fixing device of the embodiment constructed thereby In the case of 100, since the jig 21 is provided corresponding to each side of the substrate W, the substrate W can be surely fixed, and the power transmission mechanism 22 communicates between the first jig 21a, the second jig 21b, and the third jig 21c. Since the driving force is used, a common actuator can be used for each of the jigs 21, and the simplification of the device configuration and the miniaturization of the entire device can be achieved.

Furthermore, since common actuation can be used for each clamp 21 Therefore, the actuator is disposed on, for example, the lower side or the left and right sides of the stage 10 without hindering the loading and unloading of the substrate W.

Furthermore, since the third jig 21c is located at the release position Y The entire system is located below the substrate mounting surface 12 of the stage 10 (the back side of the substrate 10 on the substrate mounting surface 12) in a state where the platform 10 is in the horizontal posture, so that the third jig 21c does not interfere The substrate W is carried in and out, and the height position of the substrate W loaded and unloaded can maintain the existing design. In other words, the substrate W can be carried in and out without changing the setting of the transfer robot or the like for transporting the substrate W on the platform 10.

And, in each of the hook portions Ma to Mc and each of the hooked portions Between Na and Nc, since the gaps Sa to Sc are formed so as not to cause the driving force to act on the jig 21, the respective jigs 21 are individually pushed toward the fixed position X even if a jig 21 is assumed to sandwich the substrate W. The particles or the like existing are slightly floated from the fixed position X, and the substrate W can be surely fixed by the other jigs 21.

Moreover, since a plurality of the lower sides of the platform 10 are provided The movable stopper 8 prevents the substrate W from falling by the stopper 8 at the restraining position P, and causes the stopper 8 to move from the restraining position P to the exit position Q when the carrier robot lifts the substrate W. When the stopper 8 is brought into contact with the substrate W, the stopper 8 does not rub against the substrate W, and generation of particles can be prevented.

In the case where the substrate is transported in a state where the substrate is displaced with respect to the position of the transfer robot, the substrate W placed on the substrate mounting surface 12 may be displaced from the predetermined placement position. In this case, by moving the stopper 8 from the exit position Q to the stop position P, the outer edge of the substrate W can be pushed by the stopper 8 to adjust the position of the substrate W.

And, in a state where the stopper member 8 is located at the restraining position P When the platform 10 is moved to the standing posture, the center of gravity of the second slider 95 is positioned vertically above the center of rotation O of the rotating member 90. Therefore, even if a load is applied to the fixing plate 81, the second slider 95 does not rotate. It is possible to prevent the stopper 8 from coming down from the restraining position P due to the falling of the substrate W or the like. Party deviation.

Furthermore, due to the power transmission mechanism 22 and the linkage mechanism 9 Since it is accommodated in the accommodation recess V formed in the back surface of the platform 10, the whole apparatus can be made more compact in the thickness direction of the stage 10.

Further, since the housing recess V is configured to be closed by a cover member (not shown), even if the members constituting the power transmission member 22 or the interlocking member 9 are friction-producing particles, the particles can be prevented from scattering in the processing chamber.

Further, the present invention is not limited to the above embodiment.

For example, in the above-described embodiment, the power transmission mechanism is configured to transmit a driving force between the jigs provided corresponding to the three sides of the substrate, but may be configured as a jig corresponding to the four sides of the substrate (in the left-right direction) The driving force is transmitted to both the first jig, the second jig, and the third jig. In order to achieve a specific embodiment of the above configuration, a plurality of second jigs 21b can be moved by one rotation axis Lb without providing a plurality of rotation axes Lb as in the above-described embodiment. Further, in this case, it is only necessary to set the rod Z to the left and right sides.

According to this configuration, since the jigs provided corresponding to the four sides of the substrate are moved in conjunction with each other, one actuator can be used to move all the jigs, and the entire device can be made more compact.

In addition, although the power transmission means is provided with the first communication element, the second communication element, and the third communication element, the number of the communication elements and the components constituting the communication element are not limited.

Furthermore, in the above embodiment, the rod is connected to the first communication element, and the rod may be connected to the second communication element and the third communication element. That is, The driving force of the actuator (not shown) is given to the rotating shaft that constitutes the second transmission element via the lever, and the sliding force of the actuator can be applied to the third transmission element via the lever.

The first transmission element of the above embodiment is the second The jig transmits the driving force, but may be configured to transmit the driving force to the second communication element without passing through the second jig.

Specifically, for example, a rack and a pinion gear are used to engage a rack of a vertical slider provided in the first transmission element with a gear provided on a rotating shaft of the second jig, thereby causing The linear driving force of the moving direction of the vertical slider is converted into a rotational driving force and transmitted to the aforementioned rotating shaft.

In the above embodiment, the pair of second clamps are configured. Rotating around a common rotating shaft, but a plurality of second jigs can be interlocked with the horizontal sliding members that slide in the left-right direction.

In this case, the second transmission element may have the horizontal sliding member, and the direction changing mechanism or the like of the above-described embodiment may be provided between the vertical sliding member of the first communication element and the horizontal sliding member of the second communication element.

The third transmission element of the above embodiment is configured as self The second jig transmits the driving force, but the driving force can be transmitted from the member that transmits power to the second jig (that is, from the second communication element).

Specifically, for example, the above-described rack and pinion configuration can be used. In other words, the gear of the rotating shaft provided in the second transmission element is engaged with the rack of the sliding member provided in the third transmission element, and the rotational driving force of the rotating shaft is converted into a linear driving force and transmitted to the gear. The structure of the aforementioned sliding member.

Since the composition of the power transmission mechanism can be considered According to the configuration, the power transmission mechanism provided on one of the left and right sides does not need to be bilaterally symmetrical as in the above embodiment, and may be configured differently from each other.

Furthermore, in the above embodiment, each of the sliding movements Although the member moves in the up-and-down direction or the left-right direction, it may move in a direction inclined from the up-down direction or the left-right direction.

Furthermore, in the above embodiment, although under the platform The stoppers are provided on the side, but the stoppers may be provided on the upper side and the left and right sides or the left and right sides of the platform.

According to this configuration, the position of the substrate placed on the platform in the horizontal posture can be adjusted in the vertical direction and the horizontal direction.

Furthermore, in the above embodiment, it is configured to be in the block. When the stopper is in the restraining position, when the platform is moved to the upright position, the second sliding system is located vertically above the center of rotation of the rotating member, but as shown in FIG. 10, the stopper 8 can also be moved. When the passing position R passes through the stop position P and the exit position Q, the second slider 95 is positioned vertically above the rotation center O of the rotating member 90.

As described above, when the jig 21 is moved from the release position Y to the fixed position X, the fixed plate 81 moves outward while moving relative to the platform 10 in accordance with the rotation of the second slider 95. Thereby, the stopper 8 is moved from the exit position Q closer to the passage position R of the substrate W than the exit position Q, and is moved further away from the stop position P of the substrate W than the passage position R.

As a result, as shown in the above-described embodiment, even when the stage 10 is in the standing posture, even if the position of the substrate W is deviated and the stopper 8 is touched, the substrate W is lifted by the transfer robot while the stage 10 is in the horizontal posture. At the time of the lifting, the stopper 8 is moved to the exit position Q which is not in contact with the substrate W, so that the stopper 8 does not rub against the substrate W, and generation of particles can be prevented.

Further, even if the substrate W is placed at a position shifted from the predetermined mounting position of the substrate mounting surface 12, since the stopper 8 is moved to the stopping position P after passing through the passing position R, it can be blocked by The stopper 8 is moved to the passing position R to move the substrate W to the predetermined placement position, and the substrate W can be surely gripped at the predetermined placement position.

Furthermore, in the above embodiment, it is configured as a jig. It can be interlocked with the stopper, but it can also be configured to independently move the clamp and the stopper independently.

As a specific embodiment, for example, a configuration in which the stopper is connected to the electric motor and moved between the stop position and the exit position can be exemplified. In this case, the interlocking mechanism of the above embodiment is not required.

Furthermore, although the power transmission mechanism of the above embodiment is The driving force is transmitted between the first jig, the second jig, and the third jig, but the driving force may be transmitted only between the jigs (the second jig and the third jig) on the upper and lower sides. In this case, the power transmission mechanism may have at least the sliding member of the above-described embodiment, and the clamps on the upper and lower sides may be moved between the fixed position and the release position in conjunction with the movement of the slide member.

Of course, the power transmission mechanism can also transmit the driving force only between the left and right jigs (relative to the first jig).

In the above-described embodiment, the second jig and the third jig are opposed to each other in the vertical direction (the loading/unloading direction), but may be opposed to each other in a direction slightly inclined from the vertical direction.

In addition, the first clamps on the right and left sides are also the same, and the left and right first clamps may be opposed to each other in a direction slightly inclined from the left-right direction.

In addition, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit and scope of the invention.

Claims (9)

A substrate fixing device includes a platform on which a substrate having a rectangular shape is placed, and a gripping mechanism that fixes the substrate between the gripping mechanism and the platform; wherein the gripping mechanism comprises: a plurality of jigs disposed corresponding to respective sides of the substrate, and movable between a fixed position at which the substrate is fixed and a release position at which the substrate is released; and a power transmission mechanism corresponding to the foregoing One side of the opposite side of the substrate is provided with one side jig, and the other side side jig provided corresponding to the other side transmits a driving force for moving the jig; and the power transmission mechanism has a sliding The member is slidably moved in a predetermined direction in accordance with the movement of the one side jig or the movement of the member that transmits the driving force to the one side jig, and transmits the driving force to the other side jig. The communication mechanism is housed in a housing recess formed on the back surface of the platform. The substrate fixing device according to claim 1, wherein a direction in which the one side clamp and the other side clamp are opposed to each other is a direction in which the substrate is loaded and unloaded with respect to the substrate. The substrate fixing device according to claim 2, wherein The jig of the substrate loading/unloading side of the one side jig and the other side jig is configured to be located below the substrate mounting surface of the stage in the release position. The substrate fixing device according to any one of claims 1 to 3, wherein the power transmission mechanism includes: a first communication element that transmits the driving force to the side jig, the side The side clamp is provided corresponding to at least one of the two opposite sides of the substrate; and the second transmission element transmits the driving force to the one side clamp; and the first transmission element and the second The transmission element and the sliding member transmit the driving force to the side clamp, the one side clamp, and the other side clamp, respectively. The substrate fixing device according to any one of claims 1 to 3, wherein the jig is configured to be elastically urged toward the fixed position by the elastic member, and is driven from the fixed position to the aforementioned by the driving force. The release position is moved; and in a state where the jig is located at the fixed position, a gap is formed between the jig and the power transmission mechanism so that the driving force does not act on the jig. The substrate fixing device according to any one of claims 1 to 3, further comprising: a stopper protruding upward from a substrate mounting surface of the platform; wherein the stopper is configured to be Stop position and exit position During the movement, the stopping position is a position for stopping the movement of the substrate placed on the substrate mounting surface, and the exiting position is withdrawn to a position outside the stopping position with respect to the substrate. The substrate fixing device according to claim 6, wherein the platform is movable between a horizontal posture for delivering the substrate and a standing posture rising from the horizontal posture; and the stopper is provided Located on the lower side of the aforementioned platform in the aforementioned standing posture. The substrate fixing device according to claim 6, further comprising: a rotating member that rotates around a predetermined rotation center in conjunction with sliding movement of the sliding member; and a switching mechanism that rotationally drives the rotating member The force is converted into a linear driving force along the moving direction of the stopper; and the linear driving force converted by the switching mechanism is transmitted to the stopper. The substrate fixing device according to claim 8, wherein the conversion mechanism includes one of a sliding member provided on the rotating member or a fixing plate that fixes the stopper, and is formed on the other side for the sliding a sliding space of the body sliding body, wherein the sliding body slides in the sliding space along with the rotation of the rotating member, and the fixing plate moves along a moving direction of the stopper, and is configured to be located at the stopper In the state of the stop position, when the platform moves to the standing posture, the sliding system bit At a position vertically above the center of rotation.