CN103668102B - For the clamping device of chemical deposition equipment - Google Patents
For the clamping device of chemical deposition equipment Download PDFInfo
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- CN103668102B CN103668102B CN201210372104.6A CN201210372104A CN103668102B CN 103668102 B CN103668102 B CN 103668102B CN 201210372104 A CN201210372104 A CN 201210372104A CN 103668102 B CN103668102 B CN 103668102B
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- jig arm
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- chemical deposition
- deposition equipment
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Abstract
For a clamping device for chemical deposition equipment, chemical deposition equipment has cover body and substrate, and clamping device comprises actuating mechanism and multiple clamping device, and actuating mechanism is disposed on cover body; Each multiple clamping device is connected to cover body, each clamping device comprise be arranged on cover body permanent seat, pivot joint permanent seat jig arm and be fixed in the press part of jig arm, one end of each jig arm connects actuating mechanism respectively and is driven by it, thus makes each jig arm make each press part press from both sides in swing mode to pull and be fixed on substrate.Substrate promptly can press from both sides and pull in cover body to carry out electroless plating by the present invention, also can unload fast from cover body and improve productive efficiency.
Description
Technical field
The present invention relates to a kind of clamping device, particularly a kind of clamping device for chemical deposition equipment.
Background technology
In industry manufactures now, utilize the production unit of automatization to have many benefits, first can reduce human cost, only needs the cost of delivery operation personnel.Second can utilize machine to replace manpower to go to do the dangerous work of tool, to avoid public unexpected generation.3rd utilizes machine production precision high, can avoid manually manufacturing mistake.Because having above-mentioned advantage, automatic production has become industrial indispensable sharp weapon.
In the process of semiconductor manufacturing; especially in CIGS photovoltaic panel technique; physical vapor deposition or chemical vapour deposition mode often need be utilized on a substrate to form a plated film; the technology category of certain semi-conductor is many completely; cannot count accurately one by one; but often need to transmit substrate to next technique by roller in technique; when how to guarantee to transmit; utilize clamp structure that one substrate is clamped on the bottom of a cover body (Hood) really; and the leakage of chemical liquid in the structure not making substrate and cover body combine, be the target of the present invention's research and development and protection.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of clamping device for chemical deposition equipment, it is by the assembly of actuating mechanism and each clamping device, substrate promptly can be pressed from both sides and pull to carry out electroless plating in cover body, also can unload fast from cover body and under to improve productive efficiency.
To achieve these goals, the invention provides a kind of clamping device for chemical deposition equipment, described chemical deposition equipment has a cover body and a substrate, and wherein, this clamping device comprises:
One actuating mechanism, is disposed on described cover body; And
Multiple clamping device, be connected to described cover body, each this clamping device comprises the press part being arranged on a permanent seat of described cover body, a jig arm of this permanent seat of pivot joint and being fixed in this jig arm, respectively one end of this jig arm connects this actuating mechanism respectively and is driven by it, thus makes respectively this jig arm make respectively this press part folder pull and be fixed on described substrate in swing mode.
The above-mentioned clamping device for chemical deposition equipment, wherein, this actuating mechanism comprises a dull and stereotyped and multiple connecting rod assembly, this flat board is the top position being erected at described cover body, each this connecting rod assembly comprises a stationary links and is articulated in a movable rod of this stationary links, one end of this stationary links is fixed on this flat board, and this movable rod is articulated in this jig arm away from one end of this stationary links.
The above-mentioned clamping device for chemical deposition equipment, wherein, this jig arm comprises a L shape bar and from the outward-dipping extension rod of this L shape boom end, and this extension rod is away from one end of this L shape bar and this movable rod pivot joint, and this L shape bar then supplies this press part affixed away from one end of this extension rod.
The above-mentioned clamping device for chemical deposition equipment, wherein, this actuating mechanism comprises a dull and stereotyped and multiple inserted link, corresponding respectively this inserted link position rack of this flat board is located at the top of described cover body, and this permanent seat is formed with the slot plugging connection for this inserted link, this jig arm comprises a L shape bar and from the intilted extension rod of this L shape boom end, this extension rod abuts with this inserted link mutually away from one end of this L shape bar, and this L shape bar then supplies this press part affixed away from one end of this extension rod.
The above-mentioned clamping device for chemical deposition equipment, wherein, this actuating mechanism comprises multipair driven unit, each this driven unit comprises multiple supporting seat, one tommy bar, multiple connecting rod, one swing axle and multiple swing arm, respectively this supporting seat interval is fixed on described cover body, a guide groove is offered at each this supporting seat, this tommy bar cross-under is in each this guide groove and can move back and forth, respectively the two ends of this connecting rod are articulated in this tommy bar and this swing axle, respectively one end of this swing arm is articulated in this swing axle, the other end is then articulated in this jig arm, each this clamping device also comprises a rocking bar, two ends this permanent seat of pivot joint and this swing arm respectively of this rocking bar.
In order to realize above-mentioned purpose better, present invention also offers a kind of clamping device for chemical deposition equipment, described chemical deposition equipment has a cover body and a substrate, and wherein, this clamping device comprises:
One actuating mechanism, is disposed on described cover body; And
Multiple clamping device, be connected to described cover body, each this clamping device comprises a permanent seat, a jig arm, a press part and a rocking bar, this permanent seat is arranged on described cover body, one end of this jig arm connects this actuating mechanism and is driven by it, this press part is fixed in the other end of this jig arm, and the two ends of this rocking bar are this permanent seat of pivot joint and this jig arm respectively, thus makes respectively this jig arm drive respectively this press part folder to pull to be fixed on described substrate.
The above-mentioned clamping device for chemical deposition equipment, wherein, this actuating mechanism comprises a movement cylinders and an elastomerics, this movement cylinders comprises a cylinder body and a carriage release lever, this cylinder body is fixed on the end face of described cover body, this carriage release lever to be contained in this cylinder body and can Linear-moving, and this elastomerics is contained in this cylinder body and its two ends elasticity compresses between this cylinder body and this carriage release lever, one end of this carriage release lever and this jig arm pivot joint.
The above-mentioned clamping device for chemical deposition equipment, wherein, this carriage release lever offers an elongated slot, and this cylinder body is connected with the directed projection wearing this elongated slot.
The above-mentioned clamping device for chemical deposition equipment, wherein, this actuating mechanism also comprises the snap arm being articulated in this carriage release lever, and one end of this snap arm offers a draw-in groove, and this draw-in groove is optionally fixed as clip this directed projection.
The above-mentioned clamping device for chemical deposition equipment, wherein, this movement cylinders also comprises a whisker, and this whisker is pulled between this snap arm and this carriage release lever by elastic clip.
The above-mentioned clamping device for chemical deposition equipment, wherein, this actuating mechanism comprises multiple trigger piece, and the two ends of each this trigger piece are articulated in this permanent seat and this jig arm respectively.
In order to realize above-mentioned purpose better, present invention also offers a kind of clamping device for chemical deposition equipment, described chemical deposition equipment has a cover body and a substrate, and wherein, this clamping device comprises:
One actuating mechanism, be disposed on described cover body, this actuating mechanism comprises:
Axle in one, has at least one trip, and one end of this interior axle has an end face;
One elastic component, is connected with one end of this interior axle, and one end of this elastic component is held in this end face of this interior axle, and provides the stress of deformation resilience;
One inner sleeve, have a cavity, an inclined-plane, a draw-in groove and a sliding ditch, it is outside that this inner sleeve is placed on this interior axle, and one end of this inner sleeve holds this elastic component; And
One outer sleeve, there is a cavity, this cavity wall arranges at least one interior salient point, this cavity is accommodating for the unitized construction of this interior axle, this elastic component and this inner sleeve, this end face of this interior axle is held in the bottom surface of this outer sleeve, and this interior salient point is sticked in this cunning ditch of this inner sleeve, to form the slide construction of this inner sleeve and this outer sleeve, this outer sleeve holds this trip being contacted with this interior axle, thus makes this interior axle do a spinning movement; And
Multiple clamping device, be connected to described cover body, each this clamping device comprises a permanent seat, a jig arm, a press part and a rocking bar, this permanent seat is arranged on described cover body, one end of this jig arm connects this interior axle of this actuating mechanism and is driven by it, this press part is fixed in the other end of this jig arm, and the two ends of this rocking bar are this permanent seat of pivot joint and this jig arm respectively, thus makes respectively this jig arm drive respectively this press part folder to pull to be fixed on described substrate.
The above-mentioned clamping device for chemical deposition equipment, wherein, this draw-in groove of this inner sleeve has a dead point, and this trip for this interior axle engages, and this inclined-plane of this inner sleeve has a stuck point, and this trip for this interior axle engages.
The above-mentioned clamping device for chemical deposition equipment, wherein, described substrate and this jig arm are respectively provided with a magnetic part, and respectively this magnetic part each other can magnetic mutually, to strengthen the stress that this jig arm is immobilizated in described substrate.
Technique effect of the present invention is: by the assembly of actuating mechanism and each clamping device, substrate promptly can be pressed from both sides and pull to carry out electroless plating in cover body, also can unload fast from cover body and under to improve productive efficiency.It is applicable to continuity and a large amount of quick production.By being provided with magnetic part, to improve the ability of gripping at substrate and jig arm or cover body and jig arm.Utilize each jig arm to activated the snap arm locking of mechanism, can avoid by the situation of accidentally opening in the process of conveying.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Accompanying drawing explanation
Fig. 1 is the combination appearance figure of first embodiment of the invention and depositing device;
Fig. 2 is the relative movement figure of first embodiment of the invention and depositing device;
Fig. 3 is the clamping side-view at substrate of the press part of first embodiment of the invention;
Fig. 4 is the side-view of the jig arm upwards spin-up of first embodiment of the invention;
Fig. 5 is the combination appearance figure of second embodiment of the invention and depositing device;
Fig. 6 is the relative movement figure of second embodiment of the invention and depositing device;
Fig. 7 is the clamping side-view at substrate of the press part of second embodiment of the invention;
Fig. 8 is the side-view of the jig arm upwards spin-up of second embodiment of the invention;
Fig. 9 is the combination appearance figure of third embodiment of the invention and depositing device;
Figure 10 is the relative movement figure of third embodiment of the invention and depositing device;
Figure 11 is the clamping side-view at substrate of the press part of third embodiment of the invention;
Figure 12 is the side-view of the jig arm upwards spin-up of third embodiment of the invention;
The combination of side view of Figure 13 A-13C fourth embodiment of the invention and depositing device and motion diagram;
The combination of side view of Figure 14 A-14E fifth embodiment of the invention and depositing device and motion diagram;
The combination of side view of Figure 15 A-15E sixth embodiment of the invention and depositing device and motion diagram.
Wherein, Reference numeral
The present invention
1,1a, 1b, 1c, 1d, 1e clamping device
10,10a, 10b, 10c, 10d, 10e actuating mechanism
11,11a is dull and stereotyped
11b supporting seat
111b guide groove
11c trigger piece
11d movement cylinders
111d cylinder body
112d carriage release lever
113d whisker
114d elongated slot
The directed projection of 115d
Axle in 11e
111e trip
112e flange
12 cylinders
12a inserted link
12b tommy bar
12d snap arm
121d draw-in groove
122d scarp
12e elastic component
13 connecting rod assemblies
131 stationary links
132 movable rods
13b connecting rod
13d elastomerics
13e inner sleeve
131e inclined-plane
132e draw-in groove
The sliding ditch of 133e
134e dead point
135e stuck point
14b swing axle
14d drive member
14e outer sleeve
Salient point 141e in 141e
15b swing arm
20,20a, 20b, 20c, 20d, 20e clamping device
21,21a, 21b, 21c, 21d, 21e permanent seat
211a slot
22,22a, 22b, 22c, 22d, 22e jig arm
221,221a, 221d, 221eL shape bar
222,222a, 222d, 222e extension rod
23,23a, 23b, 23c, 23d, 23e press part
24b, 24c, 24d, 24e rocking bar
25,25a, 25c, 25e magnetic part
9 chemical deposition equipments
91 cover bodies
911 openings
912 cavity volumes
92 substrates
93 chemical liquids
94 bolsters
941 magnetic parts
Embodiment
Below in conjunction with accompanying drawing, structural principle of the present invention and principle of work are described in detail:
Refer to Fig. 1-4, the present embodiment provides a kind of clamping device for chemical deposition equipment, this chemical deposition equipment 9 is with continuity and a large amount of purposes of producing product, it mainly comprises a cover body 91, one substrate 92 and a chemical liquid 93, this cover body 91 is roughly rectangular-shaped in one, its face of deciding what is right and what is wrong is the U-shaped body of a handstand, and be the kenel of flat-top, cover body 91 has opening 911 and a cavity volume 912, cavity volume 912 can inject for afore mentioned chemical liquid 93, opening 911 can connect for aforesaid substrate 92 involution, this substrate 92 can be glass material, utilize chemical liquid 93 can produce chemical reaction with substrate 92, a plated film is formed in substrate 92 surface.
The clamping device 1 of the present embodiment mainly comprises an actuating mechanism 10 and multiple clamping device 20.The actuating mechanism 10 of the present embodiment is disposed on described cover body 91, it mainly comprises flat board 11, cylinder 12 and a multiple connecting rod assembly 13, this flat board 11 is erected at position directly over cover body 91, cylinder 12 is connected to the mid-way of dull and stereotyped 11, each connecting rod assembly 13 comprises a stationary links 131 and is articulated in the movable rod 132 of one end of stationary links 131 through pivot, each stationary links 131 with interval mode solder bond on the edge of dull and stereotyped 11.
Each clamping device 20 is that corresponding each connecting rod assembly 13 arranges on cover body 91, each clamping device 20 comprises a permanent seat 21, one jig arm 22 and a press part 23, permanent seat 21 is mounted on the side of cover body 91, jig arm 22 formed by a L shape bar 221 and from the extension rod 222 that L shape bar 221 end is outward-dipping, at the bonding station of L shape bar 221 and extension rod 222 through pivot pivot joint permanent seat 21, extension rod 222 is articulated in movable rod 132 away from one end of L shape bar 221 through pivot, L shape bar 221 then supplies press part 23 affixed away from one end of extension rod 222, each jig arm 22 makes each press part 23 folder pull be fixed on substrate 92 in rotary oscillation mode.
In addition, bolster 94 can be arranged between substrate 92 and press part 23, and bolster 94 inside is provided with a magnetic part 941, a magnetic part 25 of the mutual magnetic absorption with aforementioned magnetic part 941 is separately also provided with in the position of the contiguous press part 23 of the L shape bar 221 of jig arm 22 or press part 23 inside, when jig arm 22 is with press part 23 fixing substrate 92, grip ability by the magnetic attraction of each magnetic part 941,25 to improve.
Utensil (scheming not shown) is utilized to be pulled upwardly by cylinder 12 during use, dull and stereotyped 11 will follow cylinder 12 and move up, and make movable rod 132 pull jig arm 22, each jig arm 22 by with the articulated section of itself and permanent seat 21 for rotation center, produce clockwise rotation, to make each press part 23 depart from clamping to substrate 92, and substrate 92 and chemical liquid 93 is allowed to be unloaded fast (as shown in Figure 4) from cover body 91.Otherwise, cylinder 12 is pressed downwards, dull and stereotyped 11 will follow cylinder 12 and move down, now each jig arm 22 is subject to the driving of movable rod 132, by with the articulated section of jig arm 22 and permanent seat 21 for rotation center, and make each jig arm 22 produce anticlockwise rotation, to make each press part 23 pairs of substrates 92 clamp rapidly (as shown in Figure 3), then chemical liquid 93 is injected in cover body 91 to impose coating film treatment to substrate 92.If it is in rotary moving outside cover body that press part 23 is subject to unexpected external force, then stop because the action with said mechanism is subject to dull and stereotyped 11 by this rotary motion, therefore make cover body 91 and substrate 92 can not be subject to unexpected separation in time carrying.
Refer to Fig. 5-8, for the clamping device of second embodiment of the invention, the key distinction of the clamping device 1 of this clamping device 1a and the first embodiment is: its actuating mechanism 10a comprises a dull and stereotyped 11a and most inserted link 12a, and the corresponding each inserted link 12a position rack of this dull and stereotyped 11a is located at directly over cover body 91.
Each clamping device 20a comprises a permanent seat 21a, an one jig arm 22a and press part 23a, permanent seat 21a be fixed in cover body 91 side on and be formed with a slot 211a in intermediate position, this slot 211a plugs connection for aforesaid inserted link 12a, jig arm 22a formed by a L shape bar 221a and from the intilted extension rod 222a in L shape bar 221a end, at the bonding station of L shape bar 221a and extension rod 222a through pivot pivot joint permanent seat 21a, extension rod 222a abuts with inserted link 12a mutually away from one end of L shape bar 221a, L shape bar 221a then supplies press part 23a affixed away from one end of extension rod 222a.
In addition, bolster 94 can be arranged between substrate 92 and press part 23a, and bolster 94 inside is provided with a magnetic part 941, a magnetic part 25a of the mutual magnetic absorption with aforementioned magnetic part 921 is separately also provided with in the position of the contiguous press part 23a of the L shape bar 221a of jig arm 22a or press part 23a inside, when jig arm 22a is with press part 23a fixing substrate 92, grip ability by the magnetic attraction of each magnetic part 941,25a to improve.
During use, dull and stereotyped 11a is imposed and press downwards, each inserted link 12a will follow dull and stereotyped 11a and move down, now the extension rod 222a of each jig arm 22a is subject to pushing of inserted link 12a, by with the articulated section of jig arm 22a and permanent seat 21a for rotation center, and make each jig arm 22a produce anticlockwise rotation, to make the clamping of each press part 23a disengaging to substrate 92, substrate 92 and chemical liquid 93 is allowed to be unloaded fast (as shown in Figure 8) from cover body 91.Otherwise, also can clamp rapidly.If it is in rotary moving outside cover body 91 that press part 23a is subject to unexpected external force, then stop because the action with said mechanism is subject to dull and stereotyped 11a by this rotary motion, therefore make cover body 91 and substrate 92 can not be subject to unexpected separation in time carrying.
Refer to Fig. 9-12, for the clamping device of third embodiment of the invention, the key distinction of this clamping device 1b and foregoing embodiments is: its actuating mechanism 10b comprises multiple to driven unit, each driven unit comprises multiple supporting seat 11b, one tommy bar 12b, multiple connecting rod 13b, one swing axle 14b and multiple swing arm 15b, wherein each supporting seat 11b interval is fixed on aforesaid cover body 91 end face, and a guide groove 111b is offered on each supporting seat 11b, tommy bar 12b cross-under also can move back and forth in each guide groove 111b in guide groove 111b, the two ends of each connecting rod 13b are articulated in tommy bar 12b and swing axle 14b through pivot respectively, one end of each swing arm 15b is articulated in swing axle 14b through pivot.
Each clamping device 20b comprises a permanent seat 21b, a jig arm 22b, a press part 23b and a rocking bar 24b, permanent seat 21b and is fixed on the side of cover body 91, and the other end of each swing arm 15b is articulated on rocking bar 24b and jig arm 22b through pivot.Jig arm 22b is roughly in a L-shaped, and the other end that its one end is articulated in permanent seat 21b and swing arm 15b, jig arm 22b through pivot then supplies press part 23b affixed.And rocking bar 24b two ends respectively pivot be articulated on permanent seat 21b and swing arm 15b.
During use, tommy bar 12b thruster is outwardly gone out, connecting rod 13b will drive swing arm 15b to swing, drive rocking bar 24b and jig arm 22b motion simultaneously, each jig arm 22b now by with the articulated section of itself and permanent seat 21b for rotation center, and make each jig arm 22b produce anticlockwise rotation, to make the clamping of each press part 23b disengaging to substrate 92, substrate 92 and chemical liquid 93 is allowed to be unloaded fast (as shown in figure 12) from cover body 91.Otherwise, tommy bar 12b is inwards pushed, connecting rod 13b will drive swing arm 15b to swing, drive rocking bar 24b and jig arm 22b motion simultaneously, each jig arm 22b now by with the articulated section of itself and permanent seat 21b for rotation center, and make each jig arm 22b produce clockwise rotation, to make each press part 23b, substrate 92 is clamped rapidly (as shown in figure 11).If it is in rotary moving outside cover body that press part 23b is subject to unexpected external force, then because the action with said mechanism to be subject to the stop between permanent seat 21b and swing arm 15b by this rotary motion, therefore make cover body 91 and substrate 92 can not be subject to unexpected separation in time carrying.
Refer to Figure 13 A-13C, be the clamping device of fourth embodiment of the invention, the key distinction of this clamping device 1c and foregoing embodiments is: its actuating mechanism 10c comprises multiple trigger piece 11c.Each clamping device 20c comprises a permanent seat 21c, a jig arm 22c, a press part 23c and a rocking bar 24c, permanent seat 21c is fixed on the side of cover body 91, the two ends of each trigger piece 11c are articulated in permanent seat 21c and jig arm 22c through pivot respectively, the two ends of rocking bar 24c are articulated in permanent seat 21c and jig arm 22c through pivot respectively, and the other end of jig arm 22c then supplies press part 23c affixed.
By trigger piece 11c spin-up in a clockwise direction during use, jig arm 22c is subject to the restraining function of rocking bar 24c and upwards turn, clamps rapidly (as shown in fig. 13 c) substrate 92 to make each press part 23c.Otherwise during by trigger piece 11c counterclockwise to screw in, jig arm 22c is subject to the restraining function of rocking bar 24c and turn downwards, and each press part 23c is made to depart from clamping (as shown in FIG. 13A) to substrate 92.In addition, bolster 94 can be arranged between substrate 92 and press part 23c, and bolster 94 inside is provided with a magnetic part 941, another press part 23c inside is also provided with a magnetic part 25c of the mutual magnetic absorption with aforementioned magnetic part 941, when jig arm 22c is with press part 23c fixing substrate 92, grip ability by the magnetic attraction of each magnetic part 941,25c to improve.
Refer to Figure 14 A-14E, for the clamping device of fifth embodiment of the invention, the key distinction of this clamping device 1d and foregoing embodiments is: its actuating mechanism 10d comprises a movement cylinders 11d, an one snap arm 12d and elastomerics 13d, movement cylinders 11d comprises a cylinder body 111d, an one carriage release lever 112d and whisker 113d, cylinder body 111d is fixed on the end face of cover body 91, carriage release lever 112d then part to be contained in cylinder body 111d and to can extend through cylinder body 111d and elastomerics 13d so that Linear-moving, elastomerics 13d is contained in cylinder body 111d and its two ends elasticity compresses cylinder body 111d and carriage release lever 112d, carriage release lever 112d offers an elongated slot 114d, and cylinder body 111d is connected with the directed projection 115d wearing elongated slot 114d.Snap arm 12d is articulated on carriage release lever 112d through pivot, and offers a draw-in groove 121d at the two ends of snap arm 12d and form a scarp 122d, and whisker 113d is pulled between the side that snap arm 12d is close to scarp 122d and carriage release lever 112d by elastic clip.In addition, the actuating mechanism 10d of the present embodiment also comprises a drive member 14d, is disposed in the top of cover body 91 in order to promote carriage release lever 112d.
Each clamping device 20d comprises a permanent seat 21d, one jig arm 22d, an one press part 23d and rocking bar 24d, permanent seat 21d is fixed on the side of cover body 91, jig arm 22d formed by a L shape bar 221d and from the extension rod 222d that L shape bar 221d end is outward-dipping, at the bonding station of L shape bar 221d and extension rod 222d through one end of pivot pivot joint rocking bar 24d, the other end of rocking bar 24d is then articulated in permanent seat 21d through pivot, extension rod 222d is away from one end of L shape bar 221d and carriage release lever 112d pivot joint, L shape bar 221d then supplies press part 23d affixed away from one end of extension rod 222d.
In the process that during use, drive member 14d progressively stretches out, the carriage release lever 112d promoting movement cylinders 11d is moved towards left side, and make the leading section of snap arm 12d be directed projection 115d upwards promoting, whisker 113d then press by snap arm 12d (as shown in Figure 14 C), simultaneously carriage release lever 112d will promote jig arm 22d with the articulated section of itself and rocking bar 24d and permanent seat 21d for rotation center, and make each jig arm 22d produce anticlockwise rotation, to make each press part 23d, substrate 92 is clamped rapidly, under now snap arm 12d is subject to the elastic-restoring force effect of whisker 113d, directed projection 115d (as shown in fig. 14d) will be fixed on its draw-in groove 121d clip, because each jig arm 22d has activated the snap arm 12d locking of mechanism 10d, therefore can avoid by the situation of accidentally opening in the process of conveying.Otherwise, in the process that drive member 14d retracts, make directed projection 115d depart from the clip of snap arm 12d by touching scarp 122d, and utilize the elastic-restoring force of elastomerics 13d to move to make carriage release lever 112d towards right side, now jig arm 22d with the articulated section of itself and rocking bar 24d and permanent seat 21d for rotation center, and make each jig arm 22d produce clockwise rotation, to make the clamping of each press part 23d disengaging to substrate 92, substrate 92 and chemical liquid 93 is allowed to be unloaded fast (as shown in Figure 14 A) from cover body 91.
Refer to Figure 15 A-15E, for the clamping device of sixth embodiment of the invention, the key distinction of this clamping device 1e and foregoing embodiments is: its actuating mechanism 10e comprises axle 11e in, an elastic component 12e, an inner sleeve 13e and an outer sleeve 14e, interior axle 11e is provided with at least one trip 111e, and the end of interior axle 11e has a flange 112e.One end that elastic component 12e has flange 112e with interior axle 11e is connected, and elastic component 12e one end is held in the flange 112e of interior axle 11e, and provides the stress of deformation resilience, and elastic component 12e can be the element that a spring or elastic caoutchouc etc. can provide resilience stress.
Inner sleeve 13e has a cavity (not shown), an inclined-plane 131e, a draw-in groove 132e and a sliding ditch 133e, it is outside that inner sleeve 13e is placed on interior axle 11e, and its one end holds elastic component 12e, the sliding ditch 133e of inner sleeve 13e has a dead point 134e, trip 111e for interior axle 11e engages, and the inclined-plane 131e of inner sleeve 13e has a stuck point 135e, the trip 111e for interior axle 11e engages.
Outer sleeve 14e has a cavity (not shown), cavity wall arranges at least one interior salient point 141e, cavity can accommodating interior axle 11e, elastic component 12e and inner sleeve 13e unitized construction, and the flange 112e of interior axle 11e is held in the bottom surface of outer sleeve 14e, and interior salient point 141e is sticked in the draw-in groove 132e of inner sleeve 13e, form the slide construction of inner sleeve 13e and outer sleeve 14e, when outer sleeve 14e holds the trip 111e being contacted with interior axle 11e, interior axle 11e can be made to do spinning movement.
Each clamping device 20e comprises a permanent seat 21e, one jig arm 22e, an one press part 23e and rocking bar 24e, permanent seat 21e is fixed on the side of cover body 91, jig arm 22e formed by a L shape bar 221e and from the extension rod 222e that L shape bar 221e end is outward-dipping, at the bonding station of L shape bar 221e and extension rod 222e through one end of pivot pivot joint rocking bar 24e, the other end of rocking bar 24e is then articulated in permanent seat 21e through pivot, extension rod 222e is away from one end of L shape bar 221e and interior axle 11e pivot joint, L shape bar 221e then supplies press part 23e affixed away from one end of extension rod 222e.
In addition, bolster 94 can be arranged between substrate 92 and press part 23e, and bolster 94 inside is provided with a magnetic part 941, a magnetic part 25e of the mutual magnetic absorption with aforementioned magnetic part 941 is separately also provided with in the position of the contiguous press part 23e of the L shape bar 221e of jig arm 22e or press part 23e inside, when jig arm 22e is with press part 23e fixing substrate 92, grip ability by the magnetic attraction of each magnetic part 941,25e to improve.
Due in the force side institute interlock of jig arm 22e axle 11e protrude at a distance of in outer sleeve 14e be the shortest distance, and elastic component 12e is not by the state (as shown in Figure 15 B, 15D) of any stress for growing most, each trip 111e of interior axle 11e is the dead point 134e of the draw-in groove 133e being sticked in corresponding inner sleeve 13e.Outer sleeve 14e to accept from rear end a stress (stress can be common mechanical stress) afterwards forward end move, and the elastic component 12e being held in the flange 112e of interior axle 11e compresses by the stress of outer sleeve 14e, simultaneously, axle 11e stretches out by stress forward end, and trip 111e also skids off from the dead point 134e of the draw-in groove 133e of inner sleeve 13e, but because now interior axle 11e extrusion is not the state grown most, therefore can be considered it is the transient state that mechanical arm stretches out.Be pushed into the end at outer sleeve 14e by stress, and elastic component 12e is also compressed into the shortest, the length that interior axle 11e stretches out also reaches the longest (as shown in Figure 15 C, 15E), and the trip 111e of interior axle 11e departs from draw-in groove 133e completely.When trip 111e on interior axle 11e contacts with outer sleeve 14e, interior axle 11e can be made to do an anticlockwise spinning movement, now this trip 111e just produces along the inclined-plane 131e of inner sleeve 13e and slides.The stress of outer sleeve 14e rear end is being removed, elastic component 12e produces the stress of replying to be continued to slide along the inclined-plane 131e of inner sleeve 13e by the trip 111e of interior axle 11e, to the stuck point 135e of inclined-plane 131e, form fastening state, the interior axle 11e state of stretching out is fixed simultaneously.In addition, if it is in rotary moving outside cover body 91 that press part 23e is subject to unexpected external force, then because the action with said mechanism to be subject to the stop of actuating mechanism 10e by this rotary motion, therefore make cover body 91 and substrate 92 can not be subject to unexpected separation in time carrying.
Certainly; the present invention also can have other various embodiments; when not deviating from the present invention's spirit and essence thereof; those of ordinary skill in the art are when making various corresponding change and distortion according to the present invention, but these change accordingly and are out of shape the protection domain that all should belong to the claim appended by the present invention.
Claims (14)
1., for a clamping device for chemical deposition equipment, described chemical deposition equipment has a cover body and a substrate, it is characterized in that, this clamping device comprises:
One actuating mechanism, is disposed on described cover body; And
Multiple clamping device, be connected to described cover body, each this clamping device comprises the press part being arranged on a permanent seat of described cover body, a jig arm of this permanent seat of pivot joint and being fixed in this jig arm, respectively one end of this jig arm connects this actuating mechanism respectively and is driven by it, thus makes respectively this jig arm make respectively this press part folder pull and be fixed on described substrate in swing mode.
2. as claimed in claim 1 for the clamping device of chemical deposition equipment, it is characterized in that, this actuating mechanism comprises a dull and stereotyped and multiple connecting rod assembly, this flat board is the top position being erected at described cover body, each this connecting rod assembly comprises a stationary links and is articulated in a movable rod of this stationary links, one end of this stationary links is fixed on this flat board, and this movable rod is articulated in this jig arm away from one end of this stationary links.
3. as claimed in claim 2 for the clamping device of chemical deposition equipment, it is characterized in that, this jig arm comprises a L shape bar and from the outward-dipping extension rod of this L shape boom end, this extension rod is away from one end of this L shape bar and this movable rod pivot joint, and this L shape bar then supplies this press part affixed away from one end of this extension rod.
4. as claimed in claim 1 for the clamping device of chemical deposition equipment, it is characterized in that, this actuating mechanism comprises a dull and stereotyped and multiple inserted link, corresponding respectively this inserted link position rack of this flat board is located at the top of described cover body, and this permanent seat is formed with the slot plugging connection for this inserted link, this jig arm comprises a L shape bar and from the intilted extension rod of this L shape boom end, this extension rod abuts with this inserted link mutually away from one end of this L shape bar, and this L shape bar then supplies this press part affixed away from one end of this extension rod.
5. as claimed in claim 1 for the clamping device of chemical deposition equipment, it is characterized in that, this actuating mechanism comprises multipair driven unit, each this driven unit comprises multiple supporting seat, one tommy bar, multiple connecting rod, one swing axle and multiple swing arm, respectively this supporting seat interval is fixed on described cover body, a guide groove is offered at each this supporting seat, this tommy bar cross-under is in each this guide groove and can move back and forth, respectively the two ends of this connecting rod are articulated in this tommy bar and this swing axle, respectively one end of this swing arm is articulated in this swing axle, the other end is then articulated in this jig arm, each this clamping device also comprises a rocking bar, two ends this permanent seat of pivot joint and this swing arm respectively of this rocking bar.
6., for a clamping device for chemical deposition equipment, described chemical deposition equipment has a cover body and a substrate, it is characterized in that, this clamping device comprises:
One actuating mechanism, is disposed on described cover body; And
Multiple clamping device, be connected to described cover body, each this clamping device comprises a permanent seat, a jig arm, a press part and a rocking bar, this permanent seat is arranged on described cover body, one end of this jig arm connects this actuating mechanism and is driven by it, this press part is fixed in the other end of this jig arm, and the two ends of this rocking bar are this permanent seat of pivot joint and this jig arm respectively, thus makes respectively this jig arm drive respectively this press part folder to pull to be fixed on described substrate.
7. as claimed in claim 6 for the clamping device of chemical deposition equipment, it is characterized in that, this actuating mechanism comprises a movement cylinders and an elastomerics, this movement cylinders comprises a cylinder body and a carriage release lever, this cylinder body is fixed on the end face of described cover body, this carriage release lever to be contained in this cylinder body and can Linear-moving, and this elastomerics is contained in this cylinder body and its two ends elasticity compresses between this cylinder body and this carriage release lever, one end of this carriage release lever and this jig arm pivot joint.
8., as claimed in claim 7 for the clamping device of chemical deposition equipment, it is characterized in that, this carriage release lever offers an elongated slot, and this cylinder body is connected with the directed projection wearing this elongated slot.
9. as claimed in claim 8 for the clamping device of chemical deposition equipment, it is characterized in that, this actuating mechanism also comprises the snap arm being articulated in this carriage release lever, and one end of this snap arm offers a draw-in groove, and this draw-in groove is optionally fixed as clip this directed projection.
10., as claimed in claim 9 for the clamping device of chemical deposition equipment, it is characterized in that, this movement cylinders also comprises a whisker, and this whisker is pulled between this snap arm and this carriage release lever by elastic clip.
11. as claimed in claim 6 for the clamping device of chemical deposition equipment, and it is characterized in that, this actuating mechanism comprises multiple trigger piece, and the two ends of each this trigger piece are articulated in this permanent seat and this jig arm respectively.
12. 1 kinds of clamping devices for chemical deposition equipment, described chemical deposition equipment has a cover body and a substrate, it is characterized in that, this clamping device comprises:
One actuating mechanism, be disposed on described cover body, this actuating mechanism comprises:
Axle in one, has at least one trip, and one end of this interior axle has an end face;
One elastic component, is connected with one end of this interior axle, and one end of this elastic component is held in this end face of this interior axle, and provides the stress of deformation resilience;
One inner sleeve, have a cavity, an inclined-plane, a draw-in groove and a sliding ditch, it is outside that this inner sleeve is placed on this interior axle, and one end of this inner sleeve holds this elastic component; And
One outer sleeve, there is a cavity, this cavity wall arranges at least one interior salient point, this cavity is accommodating for the unitized construction of this interior axle, this elastic component and this inner sleeve, this end face of this interior axle is held in the bottom surface of this outer sleeve, and this interior salient point is sticked in this cunning ditch of this inner sleeve, to form the slide construction of this inner sleeve and this outer sleeve, this outer sleeve holds this trip being contacted with this interior axle, thus makes this interior axle do a spinning movement; And
Multiple clamping device, be connected to described cover body, each this clamping device comprises a permanent seat, a jig arm, a press part and a rocking bar, this permanent seat is arranged on described cover body, one end of this jig arm connects this interior axle of this actuating mechanism and is driven by it, this press part is fixed in the other end of this jig arm, and the two ends of this rocking bar are this permanent seat of pivot joint and this jig arm respectively, thus makes respectively this jig arm drive respectively this press part folder to pull to be fixed on described substrate.
13. as claimed in claim 12 for the clamping device of chemical deposition equipment, it is characterized in that, this draw-in groove of this inner sleeve has a dead point, and this trip for this interior axle engages, and this inclined-plane of this inner sleeve has a stuck point, this trip for this interior axle engages.
14. as claimed in claim 12 for the clamping device of chemical deposition equipment, it is characterized in that, a bolster is provided with between described substrate and this press part, described bolster inside is provided with a magnetic part, this jig arm formed by a L shape bar and from the extension rod that this L shape boom end is outward-dipping, position or this press part inside of this L shape bar this press part contiguous of this jig arm are also provided with a magnetic part, respectively this magnetic part each other can magnetic mutually, to strengthen the stress that this jig arm is immobilizated in described substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210372104.6A CN103668102B (en) | 2012-09-09 | 2012-09-28 | For the clamping device of chemical deposition equipment |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220455962 | 2012-09-09 | ||
| CN201220455962.2 | 2012-09-09 | ||
| CN201210372104.6A CN103668102B (en) | 2012-09-09 | 2012-09-28 | For the clamping device of chemical deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103668102A CN103668102A (en) | 2014-03-26 |
| CN103668102B true CN103668102B (en) | 2015-12-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210372104.6A Active CN103668102B (en) | 2012-09-09 | 2012-09-28 | For the clamping device of chemical deposition equipment |
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| CN (1) | CN103668102B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6248977B2 (en) * | 2015-05-08 | 2017-12-20 | 日新イオン機器株式会社 | Substrate holding device |
| CN109215512B (en) * | 2018-11-01 | 2021-02-26 | 信利（惠州）智能显示有限公司 | Manufacturing equipment, ejector pin and positioning method |
| CN112251729B (en) * | 2020-10-23 | 2022-08-30 | 凯盛信息显示材料(黄山)有限公司 | Glass substrate frame for vacuum coating, coating system thereof and transmission method of coating system |
| CN112934630A (en) * | 2021-01-25 | 2021-06-11 | 深圳和力纳米科技有限公司 | Composite bi-component nano waterproof film and preparation method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5536322A (en) * | 1995-10-27 | 1996-07-16 | Specialty Coating Systems, Inc. | Parylene deposition apparatus including a heated and cooled support platen and an electrostatic clamping device |
| CN102104016A (en) * | 2009-11-05 | 2011-06-22 | S.O.I.Tec绝缘体上硅技术公司 | Substrate holder and clipping device |
| CN102424957A (en) * | 2011-12-07 | 2012-04-25 | 山东国晶新材料有限公司 | Multi-layer product support for vapor deposition, and chemical vapor deposition reaction chamber |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1192929A (en) * | 1997-09-16 | 1999-04-06 | Nippon Telegr & Teleph Corp <Ntt> | Fixture and formation of vapor-deposited film using the same |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5536322A (en) * | 1995-10-27 | 1996-07-16 | Specialty Coating Systems, Inc. | Parylene deposition apparatus including a heated and cooled support platen and an electrostatic clamping device |
| CN102104016A (en) * | 2009-11-05 | 2011-06-22 | S.O.I.Tec绝缘体上硅技术公司 | Substrate holder and clipping device |
| CN102424957A (en) * | 2011-12-07 | 2012-04-25 | 山东国晶新材料有限公司 | Multi-layer product support for vapor deposition, and chemical vapor deposition reaction chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103668102A (en) | 2014-03-26 |
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Effective date of registration: 20170307 Address after: 74523 Germany schwbisch hall, arford Lakein Street No. twenty-fifth Patentee after: Menzies CIGS technology limited liability company Address before: Taiwan County of Zhongli City, Taoyuan Road No. 3 China Ziqiang three Patentee before: Intech Machines Co., Ltd. |
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Address after: 74523 Germany schwbisch hall, arford Lakein Street No. twenty-fifth Patentee after: Nice Solar Co.,Ltd. Address before: 74523 Germany schwbisch hall, arford Lakein Street No. twenty-fifth Patentee before: Menzies CIGS technology LLC |