JP6248977B2 - Substrate holding device - Google Patents

Description

  The present invention relates to a substrate holding apparatus that holds a substrate.

  As this type of substrate holding apparatus, as shown in Patent Document 1, it is used in an ion beam irradiation apparatus that irradiates a substrate with an ion beam, and a platen on which a substantially rectangular substrate is placed, and the platen And a clamping mechanism for holding the substrate between them.

  Specifically, the clamping mechanism includes a pair of clampers provided corresponding to two opposite sides of the substrate, a holding position for holding the substrate, and a release position for releasing the substrate. And an actuator for moving each clamper between them.

However, in the substrate holding apparatus having the above-described configuration, the substrate is only held by the two opposing sides, so that the substrate may be displaced in a direction orthogonal to the facing direction.
This is particularly noticeable when the ion beam implantation apparatus stands up a horizontally mounted substrate and scans the substrate in a direction crossing the ion beam when the ion beam is implanted.

  On the other hand, if a clamper is provided corresponding to each side of the substrate, an actuator is required for the increase in the number of clampers, leading to a complicated apparatus configuration and an increase in the size of the entire apparatus.

JP 2001-107235 A

  Therefore, the present invention has been made to solve the above-mentioned problems, and its main problem is to securely hold the substrate without causing the complexity of the device configuration and the enlargement of the entire device. is there.

  That is, a substrate holding apparatus according to the present invention includes a platen on which a substantially rectangular substrate is placed, and a clamp mechanism that holds the substrate between the platens, and the clamp mechanism includes A plurality of clampers provided corresponding to each side of the substrate and movable between a holding position for holding the substrate and a release position for releasing the substrate, and a driving force for moving the clamper. A power transmission mechanism for transmitting between one side clamper provided corresponding to one side of the two opposing sides of the substrate and another side clamper provided corresponding to the other side; The power transmission mechanism slides in a predetermined direction along with the movement of the one-side clamper or the member that transmits the driving force to the one-side clamper, and transmits the driving force to the other-side clamper. It has a sliding member is characterized in.

  In such a substrate holding device, since the clamper is provided corresponding to each side of the substrate, the substrate can be securely held, and the slide member can move the one side clamper or this one side. As the member that transmits the driving force to the clamper slides and moves to the other side clamper, the one side clamper and the other side clamper can be moved using a common actuator. Simplification of the configuration and downsizing of the entire apparatus can be achieved.

It is preferable that the facing direction of the one-side clamper and the other-side clamper substantially coincides with the substrate loading / unloading direction in which the substrate is loaded / unloaded with respect to the platen.
With this configuration, the actuator used in common for the one-side clamper and the other-side clamper can be arranged avoiding the substrate loading / unloading side, and the actuator does not hinder the loading / unloading of the substrate.
On the other hand, in the conventional configuration in which the actuator is provided corresponding to each clamper, if the opposing direction of the one-side clamper and the other-side clamper and the substrate loading / unloading direction are made to coincide, The actuator arranged in the block prevents the substrate from being carried in and out.

It is preferable that the clamper on the substrate carry-in / out side of the one-side clamper or the other-side clamper is positioned below the substrate placement surface of the platen at the release position.
With this configuration, loading and unloading of the substrate is not hindered by the clamper, so the setting of the transfer robot or the like that transfers the substrate to the platen is changed with the existing height position of the substrate being loaded and unloaded. The substrate can be carried in and out without doing so.

The power transmission mechanism includes a first transmission element that transmits the driving force to a side clamper provided corresponding to at least one side different from the two opposing sides of the substrate, and the one side clamper. A second transmission element that transmits a driving force, and the driving force is transmitted through the first transmission element, the second transmission element, and the slide member so that the driving force is on the side clamper, the one side clamper, and the other side. It is preferably transmitted to each side clamper.
With this configuration, the clamper provided corresponding to each of at least three sides of the substrate can be moved by a driving force from a common actuator, further simplifying the device configuration and reducing the size of the entire device. Can be planned.

The clamper is urged to the holding position by an elastic member, and is configured to move from the holding position to the release position by the driving force. In the state where the clamper is in the holding position It is preferable that a clearance for preventing the driving force from acting on the clamper is formed between the clamper and the power transmission mechanism.
With this configuration, each clamper in the holding position holds the substrate separately in a state where the driving force is not applied, that is, in an independent state, so that one clamper sandwiches particles or the like on the substrate. Even if it is slightly lifted from the holding position, the substrate can be reliably held by another clamper.

The substrate holding device further includes a stopper protruding upward from the substrate placement surface of the platen, and the stopper contacts the outer edge of the substrate placed on the substrate placement surface to move the substrate. It is preferable to be provided so as to be movable between a stopping position for stopping and a retracted position retracted to the outside of the stopping position with respect to the substrate.
With such a configuration, the stopper at the stop position contacts the outer edge of the substrate, so that it is possible to prevent an excessive displacement of the substrate and a fall of the substrate, and when the substrate is lifted by the transfer robot, the stopper By moving the stopper from the stop position to the retracted position so that the stopper and the substrate are not in contact with each other, it is possible to prevent particles from being generated due to friction between the substrate end surface and the stopper.
On the other hand, when the stopper is fixed at a predetermined position in advance, when the substrate is lifted by the transfer robot, there is a possibility that particles are generated by rubbing the substrate end surface and the stopper.

The platen is movable between a horizontal posture for delivering the substrate and a standing posture standing up from the horizontal posture, and the stopper is provided on the lower side of the platen in the standing posture. Preferably it is.
With this configuration, the substrate can be prevented from dropping from the platen when the platen is moved from the horizontal posture to the standing posture.

The substrate holding device converts a rotation member that rotates around a predetermined rotation center in conjunction with the slide movement of the slide member, and converts the rotation driving force of the rotation member into a linear driving force along the movement direction of the stopper. It is preferable that the linear driving force converted by the conversion mechanism is transmitted to the stopper.
With this configuration, since the linear driving force is transmitted to the stopper in conjunction with the movement of the slide member, the clamper and the stopper can be interlocked, and a dedicated actuator for moving the stopper is unnecessary. Can do.

The conversion mechanism includes a sliding body provided on one side of the rotating member or the holding plate that holds the stopper and a slide space formed on the other side in which the sliding body slides, and with the rotation of the rotating member. The sliding body slides in the slide space, and the holding plate moves along the moving direction of the stopper. When the stopper is in the stop position, the platen is in the standing posture. It is preferable that the sliding body is configured to be positioned vertically above the center of rotation when moved.
With this configuration, when the platen is erected, even if a load is applied to the holding plate while the stopper is at the stop position, the sliding body is positioned vertically above the rotation center. Does not rotate and the holding plate does not move. Thereby, for example, even when the substrate falls, the stopper can be prevented from shifting downward.

  According to the present invention configured as described above, the substrate can be reliably held without complicating the apparatus configuration and increasing the size of the entire apparatus.

The schematic diagram which looked at the substrate holding device of this embodiment from the front side. The schematic diagram which looked at the substrate holding device of this embodiment from the back side. The schematic diagram explaining the 1st transmission mechanism of this embodiment. The figure explaining operation | movement of the 1st clamper of this embodiment (A1-A1 'sectional drawing). The schematic diagram explaining the 2nd transmission mechanism of this embodiment. The figure explaining operation | movement of the 2nd clamper of this embodiment (A2-A2 'sectional drawing). The schematic diagram explaining the 3rd transmission mechanism of this embodiment. The schematic diagram explaining operation | movement of the stopper of this embodiment. The schematic diagram explaining the interlocking mechanism of this embodiment. The schematic diagram explaining the interlocking mechanism of deformation | transformation embodiment.

  Hereinafter, an embodiment of a substrate holding apparatus according to the present invention will be described with reference to the drawings.

  The substrate holding apparatus 100 according to the present embodiment is used in, for example, an ion beam irradiation apparatus, and holds a substrate W to be processed. As shown in FIGS. 1 and 2, the substrate holding apparatus 100 is a thin plate having a substantially rectangular shape. The platen 10 on which the substrate W is placed and the clamp mechanism 20 that holds the substrate W between the platen 10 and the platen 10 are provided.

The platen 10 is for transferring the substrate W to and from a transfer robot (not shown), and the axis I is set between the horizontal posture on which the substrate W is placed and the standing posture standing up from the horizontal posture. It is configured to be rotatable.
Here, the horizontal posture includes a posture tilted from the horizontal direction, and the standing posture includes a posture standing along the vertical direction and a posture tilted from the vertical direction.

In the present embodiment, in the processing chamber in which the substrate W is irradiated with the ion beam, the transport robot transports and places the substrate W on the platen 10 in the horizontal posture in a predetermined substrate carry-in / out direction. The platen 10 changes from a horizontal posture to a standing posture in the processing chamber, and is scanned in a direction intersecting the ion beam when the substrate W is irradiated with the ion beam.
In the following, for convenience of explanation, as shown in FIG. 2, the substrate loading / unloading direction is defined as the vertical direction, and the direction orthogonal to the vertical direction is defined as the horizontal direction. The upper side in the vertical direction is the substrate loading / unloading side, and the left side and right side in the left / right direction are the left side and right side when the platen is viewed from the back side.

Specifically, as shown in FIG. 1, the platen 10 has a comb shape in which a plurality of (four in this case) comb teeth 11 are arranged at a predetermined interval, and the surface of the platen 10 is placed on the substrate W. It is set as the substrate mounting surface 12.
The shape of the platen 10 is not limited to that described above, and may be a substantially rectangular shape.
Further, the substrate mounting surface 12 is not necessarily set on the surface of the platen 10, and for example, when the platen 10 has a plurality of height adjusting members such as pins attached to the surface, these A virtual plane formed by the tips of the plurality of height adjusting members is set as the substrate placement surface 12.

  As shown in FIGS. 1 and 2, the clamp mechanism 20 includes a plurality of clampers 21 provided corresponding to each side of the substrate W and a driving force input from the outside between the plurality of clampers 21. And a power transmission mechanism 22 for transmission.

In the present embodiment, as shown in FIGS. 1 and 2, a plurality of clampers 21 are provided on the left side, the right side, the upper side, and the lower side of the platen 10 so as to be separated from each other.
Hereinafter, when distinguishing the clampers 21 provided on each side, the clampers 21 facing each other along the left-right direction are referred to as first clampers 21a, and the lower side of the clampers 21 facing each other along the up-down direction. The clamper 21 is called a second clamper 21b, and the upper clamper 21 is called a third clamper 21c.

  As shown in FIGS. 3 to 7, the clamper 21 is configured to be movable between a holding position X for holding the substrate W with the platen 10 and a release position Y for releasing the substrate W. Here, it is configured to be rotatable around a rotation axis L provided below the substrate placement surface 12 of the platen 10 in a horizontal posture (lower side of the platen 10 relative to the substrate placement surface 12). . In the present embodiment, for example, an elastic member B such as a torsion spring is provided on the rotating shaft L, and each clamper 21 is biased to the holding position X by the elastic member B.

More specifically, each clamper 21 has a pair of abutting portions 211 that abut against the substrate W at the holding position X, as shown particularly in FIGS.
Here, the first clamper 21a and the third clamper 21c have the same shape and have a columnar contact portion 211, and the second clamper 21b has a flat plate-shaped contact portion 211. is there.
The shape of each clamper 21 and the shape of the contact portion 211 may be variously changed.

In this embodiment, since the substrate W is loaded / unloaded above the third clamper 21c in a state where the platen 10 is in a horizontal posture, the release is performed so that the loading / unloading of the substrate W is not hindered by the third clamper 21c. The third clamper 21c at the position Y is configured to be positioned below the substrate placement surface 12 of the platen 10 (on the back side of the platen 10 relative to the substrate placement surface 12).
Here, the opening angle between the holding position X and the release position Y of the third clamper 21c is such that the entire third clamper 21c at the release position Y is lower than the substrate placement surface 12 (from the substrate placement surface 12). Is also set to be located on the back side of the platen 10.

  Next, the power transmission mechanism 22 will be described.

The power transmission mechanism 22 is given a driving force for moving the clamper 21 from an actuator (not shown), and this driving force is applied to the clamper 21 provided corresponding to one side of the substrate W and at least one other. In this embodiment, the driving force is transmitted between the first clamper 21a, the second clamper 21b, and the third clamper 21c. Has been.
In the present embodiment, as shown in FIG. 2, a pair of power transmission mechanisms 22 are provided independently on both the left and right sides of the platen 10, and each power transmission mechanism 22 corresponds to three sides of the substrate W. The driving force is transmitted between the provided clampers 21 (first clamper 21a on the left and right sides, second clamper 21b, and third clamper 21c).
Here, the pair of power transmission mechanisms 22 has a bilaterally symmetric configuration, and in the following, the left power transmission mechanism 22 will be described as a representative thereof.

  As shown in FIG. 2, the power transmission mechanism 22 includes a first transmission element 22a that transmits driving force to the first clamper 21a, a second transmission element 22b that transmits driving force to the second clamper 21b, and a third clamper. And a third transmission element 22c that transmits the driving force to 21c.

  As shown in FIG. 3, the first transmission element 22a rotates the first clamper 21a around the rotation axis La to move from the holding position X to the release position Y, and slides up and down by the driving force. The vertical slider 3, the horizontal slider 4 that slides in the horizontal direction as the vertical slider 3 moves, and the vertical slider 3 and the horizontal slider 4 are interposed between the vertical slider 3 and the horizontal slider 4. And a direction changing mechanism 5 for converting into a direction.

The vertical slider 3 has a rod-like shape provided in the vertical direction from the upper end to the lower end on the back side of the platen 10, and here, the driving force of an actuator (not shown) is transmitted to the rotation center Oz. A lever Z that rotates around is connected. The lever Z of the present embodiment is connected between the upper and lower first clampers 21a of the vertical slider 3, but is connected above the upper first clamper 21a and below the lower first clamper 21a. It does not matter.
A part of the vertical slider 3 is sandwiched between a pair of guide rollers R.

  The horizontal slider 4 is interposed between the vertical slider 3 and the first clamper 21a, and moves the first clamper 21a from the holding position X to the release position Y. As shown in FIG. It is provided at a position corresponding to each clamper 21a.

More specifically, as shown in FIG. 4, a hooking portion Ma is provided on one of the horizontal slider 4 or the first clamper 21a, and a hooked portion Na on which the hooking portion Ma is hooked is provided on the other. It has been. In addition, a clearance Sa is formed between the hooked portion Ma and the hooked portion Na to prevent the driving force from acting on the first clamper 21a when the first clamper 21a is in the holding position X.
In the present embodiment, a concave groove having a substantially U-shaped cross section is formed in the horizontal slider 4 as the hooking portion Ma, and a rod body parallel to the rotation axis La is provided in the first clamper 21a as the hooked portion Na. The clearance Sa described above is formed between the inner peripheral surface 41 of the concave groove and the outer peripheral surface of the rod body.

As shown in FIG. 3, the direction changing mechanism 5 converts the vertical driving force transmitted to the vertical slider 3 into the left and right directions. Specifically, the direction changing mechanism 5 includes the vertical slider 3 or the horizontal slider 4. An oblique hole 51 provided on one side and extending in an oblique direction intersecting the vertical direction and the left and right direction, and a sliding portion 52 provided on the other side and capable of sliding in the oblique hole 51 are provided.
In the present embodiment, the horizontal slider 4 is formed with, for example, an oblique hole 51 that is inclined 45 degrees from the vertical direction and the horizontal direction, and the vertical slider 3 is provided with a protruding portion that is a sliding portion 52.
The oblique hole 51 is not necessarily a through hole, and may be a concave groove.

  Next, operations of the first transmission element 22a and the first clamper 21a described above will be described with reference to FIGS.

  First, as shown in FIG. 3A, when a driving force from an actuator (not shown) is applied to the lever Z while the first clamper 21a is biased to the holding position X by the elastic member B, the lever Z Rotates around the rotation center Oz, and the vertical slider 3 slides from the upper side to the lower side.

  At this time, the sliding portion 52 moves along the oblique hole 51 in conjunction with the sliding movement of the vertical slider 3, whereby the horizontal slider 4 moves from the left side to the right side (from the outside of the platen 10 to the inside). Move towards the slide.

  Then, as shown in FIG. 4, along with the sliding movement of the horizontal slider 4, the inner peripheral surface 41 of the concave groove as the hooking portion Ma draws the rod body as the hooked portion Na from the left side to the right side, Thus, the first clamper 21a rotates around the rotation axis La.

  In the present embodiment, since the clearance Sa described above is formed, the hooked portion Ma and the hooked portion Na are not in contact with each other when the first clamper 21a is in the holding position X (FIG. 4a). Then, when the horizontal slider 4 slides from the left side to the right side from this state, the hooking portion Ma comes into contact with the hooked portion Na (FIG. 4b), and the horizontal slider 4 slides from the left side to the right side. Thus, the driving force acts on the hooked portion Na from the hooking portion Ma, and the first clamper 21a moves to the release position Y (FIG. 4c).

  On the other hand, when the driving force from the actuator (not shown) is interrupted, the first clamper 21a is moved from the release position Y to the holding position X by the urging force of the elastic member B as shown in FIG.

  Next, the second transfer element 22b will be described.

  As shown in FIG. 5, the second transmission element 22 b rotates the second clamper 21 b around the rotation axis Lb and moves it from the holding position X to the release position Y.

  Here, in the present embodiment, the first transmission element 22a is configured to transmit driving force to at least one second clamper 21b, and the second transmission element 22b is configured to transmit the other second clamper 21b. It is comprised so that a driving force may be transmitted to.

  More specifically, as shown in FIG. 5, the pair of second clampers 21b are configured to rotate around a common rotation axis Lb, and the first transmission element 22a includes the pair of second clampers 21b. The driving force is transmitted to the left second clamper 21b (hereinafter also referred to as the left second clamper 21bl), and the second transmission element 22b is transmitted to the right second clamper 21b (hereinafter also referred to as the right second clamper 21br). Transmits driving force.

First, the relationship between the left second clamper 21bl and the first transmission element 22a will be described.
As shown in FIG. 5, the left second clamper 21bl is disposed in the vicinity of the lower end of the vertical slider 3 of the first transmission element 22a. It is configured to move between positions Y.

More specifically, as shown in FIG. 6, a hooking portion Mb is provided on one of the left second clamper 21bl or the vertical slider 3, and a hooked portion Nb on which the hooking portion Mb is hooked is provided on the other side. Is provided. Further, a clearance Sb is formed between the hooked portion Mb and the hooked portion Nb so that the driving force does not act on the left second clamper 21bl when the left second clamper 21bl is in the holding position X. .
In the present embodiment, a concave groove having a substantially U-shaped cross section is formed in the fixing member 6 fixed to the lower end of the vertical slider 3 as the hooked portion Mb, and the left second clamper is used as the hooked portion Nb. A rod body parallel to the rotation axis Lb is provided at 21bl, and the clearance Sb is formed between the inner circumferential surface 61 of the concave groove and the outer circumferential surface of the rod body.

  With the configuration described above, as shown in FIG. 6, when the vertical slider 3 slides from the upper side to the lower side, the inner peripheral surface 61 of the concave groove serving as the hooked portion Mb moves the rod body serving as the hooked portion Nb upward. From the inside toward the outside (from the inside to the outside of the platen 10), whereby the left second clamper 21bl rotates around the rotation axis Lb.

  In the present embodiment, since the clearance Sb described above is formed, the hooked portion Mb and the hooked portion Nb are not in contact with each other when the left second clamper 21bl is in the holding position X (FIG. 6a). Then, when the vertical slider 3 slides from the upper side to the lower side from this position, the hooking portion Mb comes into contact with the hooked portion Nb (FIG. 6b), and the vertical slider 3 slides from the upper side to the lower side. As a result, the driving force acts on the hooked portion Nb from the hooked portion Mb, and the left second clamper 21bl moves to the release position Y (FIG. 6c).

Next, the relationship between the second transfer element 22b and the right second clamper 21br will be described.
As shown in FIG. 5, the second transmission element 22b of the present embodiment transmits the driving force transmitted to the left second clamper 21bl to the right second clamper 21br. A rotation axis Lb connecting the clampers 21bl and 21br.
With this configuration, the right second clamper 21br rotates in conjunction with the left second clamper 21bl by the driving force and moves between the holding position X and the release position Y.

  Next, the third transfer element 22c will be described.

  As shown in FIG. 7, the third transmission element 22c rotates the third clamper 21c around the rotation axis Lc to move from the holding position X to the release position Y, and slides along a predetermined direction. A slide member 7 is provided.

  As shown in FIGS. 5 and 7, the slide member 7 is interposed between the right second clamper 21br and the third clamper 21c, and transmits the driving force from the right second clamper 21br to the third clamper 21c. Here, it is in the form of a bar provided in parallel with the above-described vertical slider 3.

More specifically, as shown in FIG. 6, a hooked portion Mb is provided at one of the lower end portion of the slide member 7 or the right second clamper 21br, and the hooked portion Mb is hooked at the other. Nb is provided.
Further, as shown in FIG. 7, a hooking portion Mc is provided on one end of the slide member 7 or the third clamper 21c, and a hooked portion Nc on which the hooking portion Mc is hooked is provided on the other side. .

  In this embodiment, the configuration of the lower end portion of the slide member 7 and the right second clamper 21br is the same as the configuration of the vertical slider 3 and the left second clamper 21bl described above, and the upper end portion of the slide member 7 and the third clamper 21c. The configuration is the same as that of the first clamper 21a and the horizontal slider 4 described above.

That is, as shown in FIG. 6, a concave groove having a substantially U-shaped cross section is formed in the fixing member 6 fixed to the lower end portion of the slide member 7 as the hooking portion Mb, and the right-hand side as the hooked portion Nb. The 2 clamper 21br is provided with a rod parallel to the rotation axis Lb.
Further, as shown in FIG. 7, a concave groove having a substantially U-shaped cross section is formed at the upper end portion of the slide member 7 as the hooking portion Mc, and the third clamper 21c is connected to the rotation axis Lc as the hooked portion Nc. Parallel bars are provided.

  Note that the right second clamper 21br is applied to the right second clamper 21br between the hooked portions Mb and Mc and the hooked portions Nb and Nc in a state where the right second clamper 21br and the third clamper 21c are in the holding position X. And clearances Sb and Sc for preventing the third clamper 21c from acting.

  With the configuration described above, the slide member 7 slides in the vertical direction as the right second clamper 21br moves between the holding position X and the release position Y, and as the slide member 7 slides. The third clamper 21c moves between the holding position X and the release position Y.

  More specifically, the right second clamper 21br moves from the holding position X to the release position Y, so that the rod body as the hooked portion Nb moves from the upper side to the lower side (from the inside to the outside of the platen 10). The sliding member 7 is slid from the upper side to the lower side by being pressed against the inner peripheral surface 61 of the concave groove which is the hooking portion Mb.

  Then, the sliding member 7 slides from the upper side to the lower side, so that the inner peripheral surface of the concave groove that is the hooking portion Mc moves the rod body that is the hooking portion Nc from the upper side to the lower side (from the outside of the platen 10 to the inner side). ), Whereby the third clamper 21c rotates around the rotation axis Lc.

  In the present embodiment, the power transmission mechanism 22 described above causes the left second clamper 21bl to rotate in conjunction with the first clamper 21a, the right second clamper 21br to rotate in conjunction with the left second clamper 21bl, and the right second clamper 21bl. The third clamper 21c rotates in conjunction with the second clamper 21br. That is, the first clamper 21a, the second clamper 21b, and the third clamper 21c move in conjunction with each other between the holding position X and the release position Y. In the present embodiment, the clampers 21a to 21c are simultaneously The holding position X is reached and simultaneously the release position Y is reached.

  Thus, the substrate holding device 100 of this embodiment further includes a stopper 8 that regulates the movement of the substrate W placed on the platen 10.

  Here, in order to prevent the substrate W from falling from the platen 10 in the standing posture, as shown in FIG. 2, a plurality of the stoppers 8 are provided below the platen 10 in the standing posture. They are arranged near the lower end of the vertical slider 3 and near the lower end of the slide member 7.

Each of the stoppers 8 protrudes above the substrate placement surface 12 (on the surface side of the platen 10 relative to the substrate placement surface 12) when the platen 10 is in a horizontal posture, as shown in FIG. In addition, a stop position P that comes into contact with the substrate W placed on the substrate placement surface 12 and stops the movement of the substrate W, and a retreat position Q that retreats outside the stop position P with respect to the substrate W. It is provided to be movable between.
The restraining position P is a position where the substrate W and the stopper 8 at a position (placement position) where the substrate W is placed on the platen 10 by the transfer robot are not in contact with each other, and the retracted position Q is the stopper. Reference numeral 8 denotes a position farther away from the substrate W than the stop position P.

  As shown in FIGS. 9A and 9B, the stopper 8 is held by a holding plate 81 so that the holding plate 81 moves up and down while being guided by a guide member G, for example. It is configured.

  The holding plate 81 is provided with the stopper 8 upright, and is integrally molded with the stopper 8, for example. In the present embodiment, the holding plate 81 is provided on the back side of the platen 10, and the stopper 8 has a through hole H formed through the platen 10 and the vertical slider 3 or the platen 10 and the slide member 7. It penetrates from the back side to the front side.

  In the present embodiment, as shown in FIG. 9, the substrate holding device 100 further includes an interlocking mechanism 9 that interlocks the stopper 8 and the power transmission mechanism 22 described above, and the stopper 8 transmits the power transmission. The driving force transmitted from the mechanism 22 is configured to move between the stop position P and the retracted position Q.

The interlocking mechanism 9 is provided corresponding to each stopper 8.
Below, although the structure of the interlocking mechanism 9 interposed between the stopper 8 and the slide member 7 is demonstrated, the structure of the interlocking mechanism 9 interposed between the stopper 8 and the vertical slider 3 is also the same.

  The interlocking mechanism 9 includes a rotating member 90 that is rotatably provided on the platen 10 and a first linear rotation conversion that converts a linear driving force along the moving direction of the slide member 7 into a rotating driving force of the rotating member 90. A mechanism 91 and a second linear rotation conversion mechanism 92 that converts the rotational driving force of the rotating member 90 into a linear driving force along the moving direction of the stopper 8 are provided.

  The rotating member 90 is rotatable around the rotation center O. Here, the pair of rotating members 90 are provided on both the left and right sides of the slide member 7.

As shown in FIGS. 9 (c) and 9 (d), the first straight rotation conversion mechanism 91 is a first sliding body provided on one of the fixed member 93 fixed to the slide member 7 or the rotating member 90. 94 and a slide space 9h1 formed on the other side in which the first sliding body 94 slides.
9C and 9D show a state where the holding plate 81 in FIGS. 9A and 9B is removed.

  In the present embodiment, a rotating roller that rotates around the rotation center O is provided as the first sliding body 94 on the rotating member 90, and the first slide space 9 h 1 is provided on both the left and right sides of the fixing member 93. A pair of notches are formed.

  With the above-described configuration, the fixed member 93 slides in the vertical direction in conjunction with the slide member 7, so that the first slide body 94 rotates around the rotation center O while moving in the first slide space 9 h 1. The rotating members 90 rotate in opposite directions.

  As shown in FIGS. 9A and 9B, the second straight rotation conversion mechanism 92 is formed on the second sliding body 95 provided on one of the rotating member 90 or the holding plate 81 and the other. And a slide space 9h2 in which the second sliding body 95 slides.

  In the present embodiment, as the second sliding body 95, a rotating roller that rotates around the rotation center O is provided at a position different from the first sliding body 94 in the rotating member 90, and the second slide. As the space 9h2, long holes are formed in the holding plate 81 on both the left and right sides.

  With the above-described configuration, the second sliding body 95 is slid in the second slide space 9h2 in conjunction with the rotation of the rotating member 90, and the holding plate 81 is slid up and down.

  In this embodiment, when the slide member 7 moves from the upper side to the lower side, the holding plate 81 moves from the upper side to the lower side (from the inner side to the outer side of the platen 10) via the interlocking mechanism 9 described above. Is configured to do. That is, when the clamper 21 is moved from the holding position X to the release position Y by the power transmission mechanism 22, the stopper 8 moves from the stop position P to the retracted position Q in conjunction with the movement of the clamper 21, and the clamper 21 is moved to the release position. When moved from Y to the holding position X, the stopper 8 moves from the retracted position Q to the stopping position P in conjunction with the movement of the clamper 21.

  Here, the second sliding body 95 is configured to be positioned vertically above the rotation center O of the rotating member 90 when the platen 10 is moved to the standing posture in a state where the stopper 8 is at the stopping position P. Yes. That is, when the stopper 8 moves to the stop position P, the center of gravity of the second sliding body 95 and the rotation center O of the rotating member 90 are positioned on the vertical line.

In the present embodiment, the power transmission mechanism 22 and the interlocking mechanism 9 described above are accommodated in an accommodation recess V formed on the back surface of the platen 10 as shown in FIG. In a certain state, each member constituting the power transmission mechanism 22 and each member constituting the interlocking mechanism 9 are prevented from protruding from the back surface of the platen 10.
The housing recess V is configured to be closed by a cover member (not shown).

  According to the substrate holding apparatus 100 according to the present embodiment configured as described above, since the clamper 21 is provided corresponding to each side of the substrate W, the substrate W can be reliably held and power can be increased. Since the transmission mechanism 22 transmits the driving force among the first clamper 21a, the second clamper 21b, and the third clamper 21c, a common actuator can be used for each clamper 21, simplifying the apparatus configuration and the entire apparatus Can be miniaturized.

  In addition, since a common actuator can be used for each clamper 21, the loading / unloading of the substrate W is not hindered by providing this actuator, for example, on the lower side or the left / right side of the platen 10.

  Furthermore, the entire third clamper 21c at the release position Y is below the substrate placement surface 12 of the platen 10 (the back side of the platen 10 relative to the substrate placement surface 12) in a state where the platen 10 is in a horizontal posture. Therefore, the third clamper 21c does not hinder the loading / unloading of the substrate W, and the height position of the loaded / unloaded substrate W is set to the existing setting, that is, the transfer robot transfers the substrate W to the platen 10. The substrate W can be loaded and unloaded without changing the setting such as.

  In addition, since the clearances Sa to c for preventing the driving force from acting on the clamper 21 are formed between the hook portions Ma to c and the hooked portions Na to c, the individual clampers 21 are separately provided. Even if one clamper 21 sandwiches particles or the like on the substrate W and slightly floats from the holding position X, the substrate W is reliably held by the other clampers 21. can do.

In addition, since a plurality of movable stoppers 8 are provided on the lower side of the platen 10, the stopper 8 at the stopping position P can prevent the substrate W from dropping, and the transfer robot lifts the substrate W. At this time, by moving the stopper 8 from the stop position P to the retracted position Q so that the stopper 8 and the substrate W are not in contact with each other, the stopper 8 and the substrate W are not rubbed, and generation of particles can be prevented.
In addition, if the substrate W is transported in a state of being displaced with respect to the transport robot, the substrate W placed on the substrate placing surface 12 may be displaced from a predetermined placement position. In such a case, by moving the stopper 8 from the retracted position Q to the stop position P, the outer edge of the substrate W can be pushed by the stopper 8 to adjust the position of the substrate W.

  In addition, when the platen 10 is moved to the standing posture in a state where the stopper 8 is at the stop position P, the center of gravity of the second sliding body 95 is positioned vertically above the rotation center O of the rotating member 90. Therefore, even if a load is applied to the holding plate 81, the second sliding body 95 does not rotate, and the stopper 8 can be prevented from shifting downward from the stop position P due to the substrate W dropping or the like.

Furthermore, since the power transmission mechanism 22 and the interlocking mechanism 9 are housed in the housing recess V formed on the back surface of the platen 10, the entire apparatus can be made compact in the thickness direction of the platen 10.
In addition, since the receiving recess V is configured to be closed by a cover member (not shown), even if particles are generated by rubbing the members constituting the power transmission mechanism 22 and the interlocking mechanism 9, the particles are generated. Can be prevented from scattering into the processing chamber.

  The present invention is not limited to the above embodiment.

For example, in the above embodiment, the power transmission mechanism is configured to transmit the driving force between the clampers provided corresponding to the three sides of the substrate. However, the power transmission mechanism is provided corresponding to the four sides of the substrate. The driving force may be transmitted between the clampers (both the first clamper, the second clamper, and the third clamper facing in the left-right direction). As a specific embodiment for this purpose, there is a configuration in which a plurality of second clampers 21b are moved by one rotation axis Lb without providing a plurality of rotation axes Lb as in the above-described embodiment. In this case, the lever Z may be provided on the left and right sides.
With this configuration, since the clampers provided corresponding to the four sides of the substrate move in conjunction with each other, all the clampers can be moved using one actuator, and the entire apparatus can be made more compact. .

Further, the power transmission mechanism includes the first transmission element, the second transmission element, and the third transmission element, but the number of the transmission elements and the members constituting each transmission element is not limited.
Furthermore, in the said embodiment, although the lever was connected to the 1st transmission element, the lever may be connected to the 2nd transmission element or the 3rd transmission element. That is, the driving force of an actuator (not shown) may be applied to the rotating shaft constituting the second transmission element via the lever, or the driving force of the actuator may be applied to the slide member of the third transmission element via the lever. It may be given.

The first transmission element of the above embodiment transmits the driving force to the second clamper. However, the first transmission element may be configured to transmit the driving force to the second transmission element without passing through the second clamper. good.
Specifically, for example, by using a rack and pinion, a rack provided on the vertical slider of the first transmission element and a gear provided on the rotating shaft of the second clamper are engaged to move the vertical slider. A configuration in which a linear driving force along the line is converted into a rotational driving force and transmitted to the rotating shaft.

In the embodiment, the pair of second clampers are configured to rotate around a common rotation axis. However, the plurality of second clampers may be interlocked with a horizontal slider member that slides in the left-right direction.
In this case, the second transmission element has the horizontal slider member, and the direction changing mechanism in the embodiment is provided between the vertical slider of the first transmission element and the horizontal slider member of the second transmission element. It should be provided.

The third transmission element of the above-described embodiment is configured so that the driving force is transmitted from the second clamper. However, the driving force is transmitted from the member that transmits power to the second clamper, that is, the second transmission element. You may do it.
Specifically, the structure using the rack and pinion mentioned above is mentioned, for example. That is, by engaging a gear provided on the rotation shaft of the second transmission element and a rack provided on the slide member of the third transmission element, the rotational driving force of the rotation shaft is converted into a linear driving force, and the The structure which transmits to a slide member is mentioned.

  Since various configurations of the power transmission mechanism can be considered as described above, the pair of power transmission mechanisms provided on both the left and right sides do not need to be bilaterally symmetric as in the above embodiment, and are different from each other. It may be a configuration.

  Further, in the above-described embodiment, each member that slides moves along the up-down direction or the left-right direction, but may move along a direction inclined from the up-down direction or the left-right direction.

Furthermore, in the embodiment, the stopper is provided on the lower side of the platen. However, the stopper may be provided on the upper side, the left and right sides, or the left and right sides of the platen.
With this configuration, the position of the substrate placed on the platen in the horizontal posture can be adjusted along the vertical direction and the horizontal direction.

In addition, in the above-described embodiment, the second sliding body is configured to be positioned vertically above the rotation center of the rotating member when the platen moves to the standing posture in a state where the stopper is in the stop position. For example, as shown in FIG. 10, when the stopper 8 moves to a passing position R that is halfway between the stopping position P and the retracted position Q, the second sliding body 95 is perpendicular to the rotation center O of the rotating member 90. It may be located above.
With the configuration described above, when the clamper 21 is moved from the release position Y to the holding position X, the holding plate 81 moves inward with respect to the platen 10 as the second sliding body 95 rotates. Move towards the outside. From this, the stopper 8 moves from the retracted position Q to the stop position P that is further away from the substrate W than the via position R through the via position R that is closer to the substrate W than the retracted position Q.
Thus, as in the above-described embodiment, even when the substrate W is in the standing posture and the substrate W is displaced and contacts the stopper 8, the substrate W is lifted by the transfer robot with the platen 10 in the horizontal posture. At this time, since the stopper 8 is moved to the retracted position Q which is not in contact with the substrate W, the stopper 8 and the substrate W are not rubbed, and generation of particles can be prevented.
In addition, even if the substrate W is placed out of the predetermined placement position on the substrate placement surface 12, the stopper 8 moves to the stop position P after passing through the transit position R. By moving to R, the substrate W can be moved to the predetermined placement position, and the substrate W can be reliably clamped at the predetermined placement position.

Moreover, in the said embodiment, although the clamper and the stopper were comprised so that it might interlock | cooperate, you may comprise so that a clamper and a stopper may move separately independently.
As a specific embodiment, for example, there is a configuration in which a stopper is connected to an electric motor or the like to move between a stop position and a retracted position. In this case, the interlocking mechanism of the above embodiment is unnecessary. is there.

In the power transmission mechanism of the above embodiment, the driving force is transmitted between the first clamper, the second clamper, and the third clamper, but the upper and lower clampers (second clamper and third clamper) The driving force may be transmitted only between the two. In this case, the power transmission mechanism only needs to have at least the slide member of the above-described embodiment, and the upper and lower clampers move between the holding position and the release position in conjunction with the movement of the slide member. What is necessary is just to comprise.
Of course, the power transmission mechanism may transmit the driving force only between the left and right clampers (opposing first clampers).

Further, the second clamper and the third clamper are provided so as to face each other along the vertical direction (carrying-in / out direction) in the above-described embodiment, but are opposed to each other along a direction slightly inclined from the vertical direction. May be provided.
The same applies to the left and right first clampers, and the left and right first clampers may be provided to face each other along a direction slightly inclined from the left and right direction.

  In addition, it goes without saying that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 100 ... Substrate holding device W ... Substrate 10 ... Platen 12 ... Substrate mounting surface 20 ... Clamp mechanism 21 ... Clamper 22 ... Power transmission mechanism X ... Holding position Y ... Release position 7 ... Slide member 8 ... Stopper

Claims (11)

A substrate holding device comprising: a platen on which a substantially rectangular substrate is placed; and a clamp mechanism for holding the substrate between the platens,
The clamping mechanism is
A plurality of clampers provided corresponding to each side of the substrate and movable between a holding position for holding the substrate and a release position for releasing the substrate;
The driving force for moving the clamper is transmitted between one side clamper provided corresponding to one of the two opposing sides of the substrate and the other side clamper provided corresponding to the other side. Power transmission mechanism to
The power transmission mechanism slides in a predetermined direction along with the movement of the one-side clamper or the member that transmits the driving force to the one-side clamper, and transmits the driving force to the other-side clamper. Having a slide member ,
The substrate holding device , wherein the slide member is provided on the back surface of the platen opposite to the substrate mounting surface .   The substrate holding apparatus according to claim 1, wherein a facing direction of the one-side clamper and the other-side clamper substantially coincides with a substrate loading / unloading direction in which the substrate is loaded / unloaded with respect to the platen.   3. The substrate according to claim 2, wherein a clamper on a substrate loading / unloading side of the one-side clamper or the other-side clamper is configured to be positioned below a substrate placement surface of the platen at the release position. Holding device. The power transmission mechanism is
A first transmission element for transmitting the driving force to a side clamper provided corresponding to at least one side different from the two opposite sides of the substrate;
A second transmission element that transmits the driving force to the one side clamper,
4. The device according to claim 1, wherein the driving force is transmitted to the side clamper, the one side clamper, and the other side clamper through the first transmission element, the second transmission element, and the slide member. 5. The substrate holding device according to any one of the above. The clamper is biased to the holding position by an elastic member, and is configured to move from the holding position to the release position by the driving force;
5. The clearance according to claim 1, wherein a clearance for preventing the driving force from acting on the clamper is formed between the clamper and the power transmission mechanism in a state where the clamper is in the holding position. A substrate holding apparatus according to the above. It further comprises a stopper protruding upward from the substrate placement surface of the platen,
The stopper is provided so as to be movable between a stop position for stopping the movement of the substrate placed on the substrate placement surface and a retreat position retracted to the outside of the stop position with respect to the substrate. The substrate holding device according to claim 1, wherein The platen is movable between a horizontal posture that delivers the substrate and a standing posture that stands up from the horizontal posture,
The substrate holding apparatus according to claim 6, wherein the stopper is provided on a lower side of the platen in the standing posture. A rotating member that rotates around a predetermined center of rotation in conjunction with the sliding movement of the slide member;
A conversion mechanism that converts the rotational driving force of the rotating member into a linear driving force along the moving direction of the stopper;
8. The substrate holding apparatus according to claim 6, wherein the linear driving force converted by the conversion mechanism is transmitted to the stopper. The conversion mechanism is composed of a sliding body provided on one of the holding member that holds the rotating member or the stopper and a slide space formed on the other and sliding the sliding body,
As the rotating member rotates, the sliding body slides in the slide space, and the holding plate moves along the moving direction of the stopper.
9. The substrate holding apparatus according to claim 8, wherein the sliding body is positioned vertically above the rotation center when the platen moves to a standing posture in a state where the stopper is in the stop position. .   A substrate holding device comprising: a platen on which a substantially rectangular substrate is placed; and a clamp mechanism for holding the substrate between the platens,
  The clamping mechanism is
  A plurality of clampers provided corresponding to each side of the substrate and movable between a holding position for holding the substrate and a release position for releasing the substrate;
  The driving force for moving the clamper is transmitted between one side clamper provided corresponding to one of the two opposing sides of the substrate and the other side clamper provided corresponding to the other side. Power transmission mechanism to
  The power transmission mechanism slides in a predetermined direction along with the movement of the one-side clamper or the member that transmits the driving force to the one-side clamper, and transmits the driving force to the other-side clamper. Having a slide member,
  The facing direction of the one-side clamper and the other-side clamper is substantially coincident with the substrate loading / unloading direction in which the substrate is loaded / unloaded with respect to the platen,
  A substrate holding device configured such that a clamper on a substrate carry-in / out side of the one-side clamper or the other-side clamper is positioned below a substrate placement surface of the platen at the release position.   A substrate holding device comprising: a platen on which a substantially rectangular substrate is placed; and a clamp mechanism for holding the substrate between the platens,
  The clamping mechanism is
  A plurality of clampers provided corresponding to each side of the substrate and movable between a holding position for holding the substrate and a release position for releasing the substrate;
  The driving force for moving the clamper is transmitted between one side clamper provided corresponding to one of the two opposing sides of the substrate and the other side clamper provided corresponding to the other side. Power transmission mechanism to
  The power transmission mechanism slides in a predetermined direction along with the movement of the one-side clamper or the member that transmits the driving force to the one-side clamper, and transmits the driving force to the other-side clamper. A slide member;
  A first transmission element for transmitting the driving force to a side clamper provided corresponding to at least one side different from the two opposite sides of the substrate;
  A second transmission element that transmits the driving force to the one side clamper,
  A substrate holding device in which the driving force is transmitted to the side clamper, the one side clamper, and the other side clamper via the first transmission element, the second transmission element, and the slide member.