KR101901000B1 - Substrate holding apparatus - Google Patents

Substrate holding apparatus Download PDF

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Publication number
KR101901000B1
KR101901000B1 KR1020150130346A KR20150130346A KR101901000B1 KR 101901000 B1 KR101901000 B1 KR 101901000B1 KR 1020150130346 A KR1020150130346 A KR 1020150130346A KR 20150130346 A KR20150130346 A KR 20150130346A KR 101901000 B1 KR101901000 B1 KR 101901000B1
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South Korea
Prior art keywords
clamper
substrate
driving force
platen
holding
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KR1020150130346A
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Korean (ko)
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KR20160131834A (en
Inventor
요시유키 나카자와
마사토시 오노다
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닛신 이온기기 가부시기가이샤
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Publication of KR20160131834A publication Critical patent/KR20160131834A/en
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Publication of KR101901000B1 publication Critical patent/KR101901000B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support

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  • Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Manipulator (AREA)

Abstract

The present invention is to provide a substrate holding apparatus which reliably holds a substrate (W) without causing complication of the apparatus configuration or enlargement of the entire apparatus.
This substrate holding apparatus is provided with a platen 10 and a clamping mechanism 22 and a clamping mechanism 20 is provided corresponding to each side of the substrate W and held at a holding position A plurality of clamper 21 movable between a release position Y for releasing the substrate W and a release position Y for releasing the substrate W and a drive force for moving the clamper 21 to one side And a power transmitting mechanism 22 for transmitting the power transmitted from the one side clamper 21 provided in correspondence with the one side clamper 21 and the other side side clamper 21 provided corresponding to the other side, Side clamper 21 and a slide member 7 that slides in a predetermined direction and transmits a driving force to the other-side clamper 21 with the movement of the member that transmits the driving force to the one-side clamper 21 have.

Description

SUBSTRATE HOLDING APPARATUS

The present invention relates to a substrate holding apparatus for holding a substrate.

As this type of substrate holding apparatus, there is known a substrate holding apparatus, which is used in an ion beam irradiating apparatus for irradiating an ion beam to a substrate, a platen on which a substrate having a generally rectangular shape is arranged, And a clamp mechanism for holding the substrate in the clamping mechanism.

Specifically, the clamp mechanism comprises: a pair of clamper provided corresponding to each of two opposing sides of the substrate; and a clamping mechanism provided corresponding to each clamper, for moving the clamper between the holding position for holding the substrate and the releasing position for releasing the substrate, And an actuator for moving the actuator.

However, in the above-described substrate holding apparatus, since the substrate is held only at two opposing sides, the substrate may be displaced in the direction orthogonal to the opposed direction.

This is particularly remarkable when the ion beam implanting apparatus straddles horizontally arranged substrates and scans the substrate in a direction crossing the ion beam when the ion beam is injected.

On the other hand, if a clamper is provided corresponding to each side of the substrate, an actuator is required for an increased amount of the clamper, resulting in complication of the device configuration and enlargement of the entire device.

Patent Document 1: Japanese Patent Application Laid-Open No. 2001-107235

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and its main object is to maintain the substrate securely without causing complication of the apparatus configuration or enlargement of the entire apparatus.

That is, the substrate holding apparatus according to the present invention comprises a platen on which a substrate having a generally rectangular shape is disposed, and a clamping mechanism for holding the substrate between the platen and the clamping mechanism, A plurality of clamper moveable between a holding position for holding the substrate and a releasing position for releasing the substrate and a driving force for moving the clamper are provided on two opposing sides of the substrate And a power transmission mechanism for transmitting the power between the one side clamper provided corresponding to one side and the other side side clamper provided corresponding to the other side, wherein the power transmission mechanism is configured to move the one side clamper or the one side clamper The slider is slid in a predetermined direction together with the movement of the transmitting member, That has a slide member for transmitting force is characterized.

In this substrate holding apparatus, since the clamper is provided corresponding to each side of the substrate, it is possible to reliably hold the substrate, and in addition, the slide member is capable of moving the one side clamper or moving the driving force transmitting member to the one side clamper And the driving force is transmitted to the other side clamper. Therefore, the one side clamper and the other side clamper can be moved by using the common actuator, so that the device configuration can be simplified and the entire device can be miniaturized .

The opposite direction of the one side clamper and the other side clamper substantially coincides with the substrate loading / unloading direction in which the substrate is loaded / unloaded with respect to the platen.

With this configuration, the actuators commonly used for the one-side clamper and the other-side clamper can be disposed to avoid the substrate carry-out side, and the actuator does not interfere with the substrate loading / unloading.

On the other hand, in the configuration in which the actuator is provided corresponding to each clamper as in the prior art, when the opposite direction of the one side clamper and the other side clamper is made to coincide with the substrate loading / unloading direction, Interfere with the outflow.

It is preferable that the one side clamper or the clamper on the substrate carry-out side of the other side clamper is located below the substrate placement surface of the platen in the release position.

In this configuration, since the clamper does not interfere with the loading / unloading of the substrate, the height position of the substrate to be loaded / unloaded is set to the existing setting, in other words, the setting of the carrying robot for carrying the substrate to the platen is changed The substrate can be carried in and out without fail.

Wherein the power transmission mechanism includes a first transmission element that transmits the driving force to a side-surface-side clamper provided corresponding to at least one side different from the two opposite sides of the substrate, and a second transmission element that transmits the driving force to the side- And the driving force is transmitted to each of the side-surface side clamper, the one-side clamper, and the other side clamper via the first transmission element, the second transmission element, and the slide member.

With this configuration, the clamper provided corresponding to each of at least three sides of the substrate can be moved by the driving force from the common actuator, so that the simplification of the additional device configuration and the miniaturization of the entire device can be achieved.

Wherein the clamper is configured to be deflected to the holding position by an elastic member and to move from the holding position to the releasing position by the driving force, and in a state where the clamper is in the holding position, It is preferable that a clearance is formed between the transmission mechanisms so as not to apply the driving force to the clamper.

With this configuration, since each clamper in the holding position holds the substrate separately in a state in which no driving force is applied, that is, in an independent state, if one clamper inserts particles or the like on the substrate, It is possible to securely hold the substrate by the other clamper even if it slightly floats.

Wherein the substrate holding apparatus further comprises a stopper protruding upward from the substrate placement surface of the platen, wherein the stopper contacts the outer edge of the substrate disposed on the substrate placement surface to inhibit movement of the substrate, And a retracted position retracted outward beyond the papermaking position with respect to the substrate.

With such a configuration, the stopper at the retreated position is brought into contact with the outer edge of the substrate, thereby preventing excessive displacement of the substrate and falling of the substrate. In addition, when the substrate is lifted by the transport robot, Position, the stopper and the substrate are brought into noncontact with each other, so that the end face of the substrate and the stopper can be prevented from being generated and particles are generated.

On the other hand, when the stopper is fixed at a predetermined position, there is a possibility that the end face of the substrate and the stopper are torn to generate particles when the substrate is lifted by the transport robot.

It is preferable that the platen is movable between a horizontal posture for transmitting the substrate and an upright posture standing from the horizontal posture and the stopper is provided below the platen in the standing posture.

With this configuration, it is possible to prevent the substrate from falling off the platen, for example, when the platen is moved from the horizontal posture to the standing posture.

The substrate holding apparatus further includes a rotating member that rotates around a predetermined rotation center in association with the slide movement of the slide member and a conversion mechanism that converts the rotational driving force of the rotating member into a linear driving force along the moving direction of the stopper And the linear driving force converted by the converting mechanism is transmitted to the stopper.

With this configuration, since the linear driving force is transmitted to the stopper in conjunction with the movement of the slide member, the clamper and the stopper can be interlocked with each other, and a dedicated actuator for moving the stopper can be dispensed with.

Wherein the switching mechanism comprises a sliding body provided on one side of the rotating member or a holding plate for holding the stopper and a slide space formed on the other side to slide the sliding body, and in accordance with rotation of the rotating body, Is configured to slide in the slide space to move the retaining plate along the movement direction of the stopper, and in a state in which the stopper is in the papermaking position, when the platen moves to the standing posture, It is preferable that the sliding body is configured to be positioned vertically above the rotation center.

With this configuration, even if a load is applied to the holding plate in a state where the stopper is in the paper-holding position when the platen is raised, since the sliding body is located vertically above the rotation center, the sliding body does not rotate , The retaining plate does not move. Thus, even when the substrate is dropped, for example, the stopper can be prevented from deviating downward.

According to the present invention constructed as described above, it is possible to reliably hold the substrate without causing complication of the apparatus configuration or enlargement of the whole apparatus.

1 is a schematic view showing the substrate holding apparatus of the present embodiment viewed from the front side.
2 is a schematic view of the substrate holding apparatus of the present embodiment viewed from the back side.
3 is a schematic diagram illustrating the first transmission mechanism of the present embodiment.
4 is a view (A1-A1 'sectional view) for explaining the operation of the first clamper of the present embodiment.
5 is a schematic diagram for explaining a second transmission mechanism of the present embodiment.
6 is a view (A2-A2 'sectional view) for explaining the operation of the second clamper of the present embodiment.
7 is a schematic diagram for explaining the third transmission mechanism of the present embodiment.
8 is a schematic diagram for explaining the operation of the stopper of the present embodiment.
9 is a schematic diagram for explaining the interlocking mechanism of the present embodiment.
10 is a schematic diagram for explaining an interlocking mechanism of a modified embodiment.

Hereinafter, one embodiment of the substrate holding apparatus according to the present invention will be described with reference to the drawings.

The substrate holding apparatus 100 according to the present embodiment is used, for example, in an ion beam irradiating apparatus to hold a substrate W to be processed. As shown in Figs. 1 and 2, the substrate holding apparatus 100 includes a thin plate- And a clamp mechanism 20 for holding the substrate W between the platen 10 and the platen 10 on which the substrate W is disposed.

The platen 10 transfers a substrate W to and from a transfer robot not shown and is disposed between a horizontal posture in which the substrate W is disposed and a standing posture standing from the horizontal posture, As shown in Fig.

The horizontal posture referred to here includes an auspicious posture from the horizontal direction, and the standing posture includes an auspicious posture from an upright posture or a vertical posture along the vertical direction.

In the present embodiment, in the processing chamber in which the ion beam is irradiated to the substrate W, the carrying robot conveys the substrate W in a predetermined substrate loading / unloading direction with respect to the platen 10 in the horizontal position . Then, the platen 10 assumes a standing posture from the horizontal posture in the treatment chamber, and is scanned in a direction intersecting the ion beam when the ion beam is irradiated on the substrate W.

Hereinafter, for convenience of explanation, as shown in Fig. 2, the substrate loading / unloading direction is referred to as an up / down direction, and a direction orthogonal to the up / down direction is defined as a left / right direction. The upper side in the vertical direction is the substrate carry-in / out side, and the left side and the right side in the left-right direction are the left side and the right side when the platen is viewed from the back side.

Specifically, as shown in Fig. 1, the platen 10 has a comb-like shape in which a plurality of (here, four) comb teeth 11 are arranged at predetermined intervals, As shown in Fig.

In addition, the shape of the platen 10 is not limited to the above-described shape, and may be a substantially rectangular shape or the like.

When the platen 10 has a plurality of height adjusting members such as pins attached to its surface, it is not necessary to set the substrate placing surface 12 on the surface of the platen 10, And a virtual plane formed by the tips of the plurality of height adjusting members is set as the substrate placing surface 12. [

1 and 2, the clamping mechanism 20 includes a plurality of clamper 21 provided corresponding to each side of the substrate W, and a plurality of clamper- And a power transmission mechanism (22) for transmitting the power transmission mechanism (22).

In the present embodiment, as shown in Figs. 1 and 2, a plurality of clamper 21 are provided on the left side portion, the right side portion, the upper side portion, and the lower side portion of the platen 10, respectively.

Hereinafter, when the clamper 21 provided at each side is distinguished, the clamper 21 facing each other along the left and right direction is referred to as a first clamper 21a, and among the clamper 21 facing each other along the vertical direction, The lower clamper 21 is referred to as a second clamper 21b and the upper clamper 21 is referred to as a third clamper 21c.

The clamper 21 has a holding position X for holding the substrate W with respect to the platen 10 and a releasing position X for releasing the substrate W Y) of the platen 10 in the horizontal posture (hereinafter referred to as a " front side of the platen 10 ") provided below the substrate placement surface 12 of the platen 10 (L). In this embodiment, for example, an elastic member B such as a torsion spring is provided on the rotating shaft L, and the elastic members B press the clamper 21 against the holding position X. [

More specifically, as shown in Figs. 4 and 6, each of the clamper 21 has a pair of contact portions 211 which are in contact with the substrate W at the holding position X. As shown in Fig.

Here, the first clamper 21a and the third clamper 21c have the same shape and have a columnar contact portion 211, and the second clamper 21b has the contact portion 211 having a flat plate shape will be.

The shape of each clamper 21 and the shape of the contact portion 211 may be variously changed.

Since the substrate W is carried in and out above the third clamper 21c in the state in which the platen 10 is in the horizontal posture in this embodiment, The third clamper 21c at the release position Y is positioned below the substrate placement surface 12 of the platen 10 (the substrate placement surface 12 is closer to the platen 10 than the substrate placement surface 12) ) On the back side of the light guide plate.

The third clamper 21c located at the release position Y is positioned so that the entirety of the third clamper 21c is positioned closer to the substrate placement surface 12 than the substrate placement surface 12 (The back side of the platen 10 than the substrate placement surface 12).

Next, the power transmission mechanism 22 will be described.

The power transmission mechanism 22 is provided with a driving force for moving the clamper 21 from an actuator not shown and the driving force is transmitted to the clamper 21 provided on one side of the substrate W, And transmits the driving force between the first clamper 21a, the second clamper 21b, and the third clamper 21c. The first clamper 21a, the second clamper 21b, and the third clamper 21c communicate with each other.

2, a pair of power transmission mechanisms 22 are independently provided on both left and right sides of the platen 10, and each of the power transmission mechanisms 22 is provided with a pair of power transmission mechanisms 22, (The first clamper 21a, the second clamper 21b, and the third clamper 21c on the left and right sides) provided corresponding to the three sides of the first clamper 21a and the second clamper 21b.

Here, the above-described pair of power transmission mechanisms 22 are symmetrical in the left and right, and the power transmission mechanism 22 on the left side will be described below as an example.

2, the power transmission mechanism 22 includes a first transmitting element 22a for transmitting a driving force to the first clamper 21a, a second transmitting element 22b for transmitting a driving force to the second clamper 21b, And a third transmission element 22c for transmitting a driving force to the third clamper 21c.

3, the first transmitting element 22a rotates the first clamper 21a around the rotation axis La to move from the holding position X to the releasing position Y, A vertical slider 3 slidable in the vertical direction by the vertical slider 3 and a horizontal slider 4 slid in the lateral direction in accordance with the movement of the vertical slider 3 and a vertical slider 4 interposed between the vertical slider 3 and the horizontal slider 4. [ And has a direction changing mechanism 5 for converting the driving force in the up and down direction into the driving force in the left and right direction.

The vertical slider 3 is a bar shape provided along the vertical direction from the upper end portion to the lower end portion on the back surface side of the platen 10. Here, a driving force of an actuator (not shown) is transmitted to the rotary center Oz And a lever Z that rotates is connected. The lever Z of the present embodiment is connected between the upper and lower first clamper 21a of the vertical slider 3 but the lever Z of the upper clamper 21a is located above and below the upper first clamper 21a, Or may be connected to the lower side of the first housing 21a.

Further, a part of the vertical slider 3 is sandwiched between the pair of guide rollers R.

The horizontal slider 4 is interposed between the vertical slider 3 and the first clamper 21a to move the first clamper 21a from the holding position X to the releasing position Y, Are provided at positions corresponding to each of the plurality of first clamper 21a.

More specifically, as shown in Fig. 4, a latching portion Ma is provided on one side of the lateral slider 4 or the first clamper 21a, and a latching portion Ma on the other side And a latching portion Na is provided. The first clamper 21a is held at the holding position X and a clearance for preventing the driving force from acting on the first clamper 21a is established between the engaging portion Ma and the engaged portion Na Sa are formed.

In the present embodiment, as the engaging portion Ma, a recess having a substantially U-shaped cross section is formed on the transverse slider 4, and as the engaging portion Na, the first clamper 21a is provided with a rotation axis La And the clearance Sa described above is formed between the inner circumferential surface 41 of the groove and the outer circumferential surface of the bar body.

3, the direction changing mechanism 5 is for converting the driving force in the vertical direction transmitted to the vertical slider 3 to the horizontal direction. More specifically, the vertical slider 3 or the horizontal slider 3 4 and includes an inclined hole 51 extending in an oblique direction intersecting with the up and down direction and the left and right direction and a sliding portion 52 provided on the other side and slidable in the inclined hole 51 Have.

In the present embodiment, the horizontal slider 4 is provided with inclined holes 51, for example, inclined at an angle of 45 degrees from the vertical direction and from the horizontal direction, and the vertical slider 3 is provided with the projecting portion as the sliding portion 52 have.

The inclined hole 51 is not necessarily a through hole, but may be a groove.

Next, the operation of the first transmitting element 22a and the first clamper 21a will be described with reference to Figs. 3 and 4. Fig.

3 (a), the first clamper 21a is deflected to the holding position X by the elastic member B, and a driving force from an actuator (not shown) is transmitted to the lever Z The lever Z rotates around the rotation center Oz and the vertical slider 3 slides from the upper side to the lower side.

At this time, the slider 52 moves along the inclined hole 51 in conjunction with the sliding movement of the vertical slider 3, whereby the horizontal slider 4 is moved from the left side to the right side (From the outside to the inside of the housing 10).

4, as the lateral slider 4 is slid, the inner circumferential surface 41 of the groove as the engaging portion Ma is moved from the left side to the right side as the engaging portion Na Whereby the first clamper 21a is rotated around the rotation axis La.

In this embodiment, since the clearance Sa described above is formed, in the state where the first clamper 21a is at the holding position X, the latching portion Ma and the latching portion Na are not in contact with each other 4 (a)). In this state, the horizontal slider 4 slides from the left side to the right side so that the latching portion Ma comes into contact with the engaged portion Na (Fig. 4 (b)), The sliding force of the driving force acts on the engaged portion Na from the engaging portion Ma to move the first clamper 21a to the releasing position Y )].

On the other hand, when the driving force from the actuator (not shown) is interrupted, the first clamper 21a is displaced from the releasing position Y to the retracted position (second position) by the urging force of the elastic member B X).

Next, the second transmitting element 22b will be described.

The second transmitting element 22b rotates the second clamper 21b around the rotation axis Lb to move from the holding position X to the releasing position Y as shown in Fig.

Here, in the present embodiment, the first transmitting element 22a is configured to transmit driving force to at least one second clamper 21b, and the second transmitting element 22b is configured to transmit a driving force to at least one second clamper 21b, (21b).

More specifically, as shown in Fig. 5, the pair of second clamper 21b is configured to rotate around a common rotation axis Lb, and the first transmission element 22a is configured to rotate about the common rotation axis Lb, The second transmitting element 22b transmits the driving force to the left second clamper 21b (hereinafter also referred to as the left second clamper 21b1) and the second transmitting element 22b transmits the driving force to the left second clamper 21b (Hereinafter also referred to as the right second clamper 21br).

First, the relationship between the left second clamper 21bl and the first transmitting element 22a will be described.

5, the left second clamper 21bl is disposed in the vicinity of the lower end of the vertical slider 3 of the first transmission element 22a. As the vertical slider 3 slides, And moves between the holding position (X) and the releasing position (Y).

More specifically, as shown in Fig. 6, the latch portion Mb is provided on one of the left second clamper 21bl or the longitudinal slider 3, and the latch portion Mb is caught on the other side And a hooked portion Nb is provided. The left second clamper 21bl is held at the holding position X between the engaging portion Mb and the engaged portion Nb so that the driving force is not applied to the left second clamper 21bl A clearance Sb is formed.

In this embodiment, as the engaging portion Mb, there is formed a groove having a substantially U-shaped cross section in the fixing member 6 fixed to the lower end of the vertical slider 3, and as the engaging portion Nb, The left second clamper 21bl is provided with a seal parallel to the rotation axis Lb and the clearance Sb is formed between the inner circumferential surface 61 of the groove and the outer circumferential surface of the rod.

6, when the vertical slider 3 is slid downward from the upper side, the inner peripheral surface 61 of the groove, which is the engagement portion Mb, becomes the engaged portion Nb The plunger 10 is pulled from the upper side toward the outside (from the inside to the outside of the platen 10), whereby the left second clamper 21bl rotates about the rotation axis Lb.

Since the clearance Sb is formed in the present embodiment, the engaging portion Mb and the engaged portion Nb are not in contact with each other in the state in which the left second clamper 21bl is at the retention position X (Fig. 6 (a)). Then, the vertical slider 3 slides from the upper side to the lower side from this position so that the engaging portion Mb comes into contact with the engaged portion Nb (Fig. 6 (b)), The driving force acts on the engaged portion Mb to the engaged portion Nb to move the left second clamper 21bl to the released position Y c)].

Next, the relationship between the second transmitting element 22b and the right second clamper 21br will be described.

As shown in Fig. 5, the second transmitting element 22b of the present embodiment transmits the driving force transmitted to the left second clamper 21bl to the right second clamper 21br. Here, And a rotary shaft Lb connecting the clamper 21bl and 21br.

With this configuration, the right second clamper 21br rotates in conjunction with the left second clamper 21bl by the driving force, and moves between the holding position X and the releasing position Y. [

Next, the third transmitting element 22c will be described.

The third transmitting element 22c rotates the third clamper 21c around the rotation axis Lc to move from the holding position X to the releasing position Y as shown in Fig. And a slide member (7) for sliding along the direction.

5 and 7, the slide member 7 is interposed between the right second clamper 21br and the third clamper 21c and extends from the right second clamper 21br to the third clamper 21c ). In this case, the driving force is transmitted to the vertical slider 3 in the form of a rod provided in parallel with the vertical slider 3 described above.

More specifically, as shown in Fig. 6, a locking portion Mb is provided on the lower end of the slide member 7 or on one side of the right second clamper 21br, and a locking portion Mb is provided on the other side And a hooked engagement portion Nb is provided.

7, the engaging portion Mc is provided on the upper end of the slide member 7 or on one side of the third clamper 21c and the engaged portion Mc is engaged with the engaging portion Mc on the other side Nc are provided.

The configuration of the lower end portion of the slide member 7 and the configuration of the right second clamper 21br are the same as those of the longitudinal slider 3 and the left second clamper 21bl described above, And the configuration of the third clamper 21c are the same as those of the first clamper 21a and the lateral slider 4 described above.

6, the holding member 6 fixed to the lower end of the slide member 7 is provided with a groove having a substantially U-shape in cross section, And the right side second clamper 21br is provided with a seal parallel to the rotation axis Lb.

7, a substantially U-shaped groove is formed in the upper end portion of the slide member 7 as the latching portion Mc, and the third clamper 21c is provided as the engaged portion Nc, A seal parallel to the rotation axis Lc is provided.

In a state in which the right second clamper 21br and the third clamper 21c are in the holding position X between the engaging portions Mb and Mc and the engaged portions Nb and Nc, Clearances Sb and Sc for preventing the driving force from being applied to the right second clamper 21br and the third clamper 21c are formed.

With the above-described configuration, the slide member 7 is slid along the vertical direction in accordance with the movement between the holding position X and the release position Y of the right second clamper 21br, The third clamper 21c is moved between the holding position X and the releasing position Y in accordance with the slide movement of the second clamper 7.

More specifically, as the right second clamper 21br moves from the holding position X to the releasing position Y, the rod as the engaged portion Nb moves from the upper side to the lower side (from the inner side of the platen 10) Is pressed against the inner circumferential surface (61) of the groove as the engaging portion (Mb) so that the slide member (7) slides downward from the upper side.

When the slide member 7 is slid downward from the upper side, the inner circumferential surface of the groove, which is the engagement portion Mc, moves from the upper side to the lower side (the inner side from the outside of the platen 10 , Whereby the third clamper 21c is rotated around the rotation axis Lc.

In the present embodiment, the left second clamper 21bl rotates in conjunction with the first clamper 21a and the right second clamper 21bl interlocks with the left second clamper 21bl by the power transmission mechanism 22 described above, The second clamper 21br rotates, and the third clamper 21c rotates in conjunction with the right second clamper 21br. That is, the first clamper 21a, the second clamper 21b and the third clamper 21c move between the holding position X and the releasing position Y in cooperation with each other. In this embodiment, (21a to 21c) reach the holding position (X) at the same time and reach the releasing position (Y) at the same time.

The substrate holding apparatus 100 according to the present embodiment further includes a stopper 8 for restricting the movement of the substrate W disposed on the platen 10.

Here, in order to prevent the substrate W from falling down from the platen 10 in the standing position, as shown in Fig. 2, a plurality of the stoppers 8 are provided below the platen 10 in the standing position Specifically, in the vicinity of the lower end of the vertical slider 3 and in the vicinity of the lower end of the slide member 7.

Each of the stoppers 8 protrudes above the substrate placing surface 12 (the surface side of the platen 10 than the substrate placing surface 12) in a state in which the platen 10 is in a horizontal posture A holding position P for restricting the movement of the substrate W in contact with the substrate W placed on the substrate placing surface 12 and a holding position P for restricting the movement of the substrate W, And a retracted position Q retracted outward beyond the paper-rest position P.

The papermaking position P is a position where the substrate W in a position (placement position) where the substrate W is placed on the platen 10 by the carrying robot and the stopper 8 are in a non-contact position, The position Q is a position where the stopper 8 moves away from the substrate W to the outside of the substrate W.

9 (a) and 9 (b), the stopper 8 is held by a holding plate 81. When the holding plate 81 is guided by, for example, a guide member G As shown in Fig.

The retaining plate 81 is formed by erecting the stopper 8 and integrally molding the stopper 8 with the stopper 8, for example. In this embodiment, the holding plate 81 is provided on the back side of the platen 10, and the platen 10 and the vertical slider 3, or the platen 10 and the slide member 7, And the through hole H formed by the stopper 8 penetrates from the back surface side to the surface side.

9, the substrate holding apparatus 100 further includes an interlocking mechanism 9 for interlocking the stopper 8 with the power transmission mechanism 22 described above, and the stopper 8 8 are configured to move between the papermaking position P and the retracted position Q by a driving force transmitted from the power transmission mechanism 22. [

The interlocking mechanism 9 is provided corresponding to each of the stoppers 8.

The structure of the interlocking mechanism 9 interposed between the stopper 8 and the slide member 7 will be described below. However, the structure of the interlocking mechanism 9 interposed between the stopper 8 and the vertical slider 3 .

The interlocking mechanism 9 includes a rotary member 90 rotatably provided on the platen 10 and a rotary member 90 that converts a direct drive force along the movement direction of the slide member 7 into a rotary drive force of the rotary member 90. [ And a second linear rotation converting mechanism 92 for converting the rotational driving force of the rotating member 90 into a linear driving force in the moving direction of the stopper 8 do.

The rotary member 90 is rotatable around the rotation center O. Here, a pair of the rotary members 90 are provided on the left and right sides of the slide member 7.

9 (c) and 9 (d), the first direct rotation converting mechanism 91 is provided with a fixing member 93 fixed to the slide member 7 or a fixing member 93 fixed to one side of the rotary member 90 And a slide space 9h1 which is formed on the other side of the first sliding body 94 and on which the first sliding body 94 slides.

9 (c) and 9 (d) show a state in which the holding plate 81 is removed in FIGS. 9 (a) and 9 (b).

In the present embodiment, as the first sliding body 94, a rotary roller rotating around the rotation center O is provided on the rotary member 90, and as the first slide space 9h1, A pair of notches are formed on the right and left sides of the member 93.

The fixing member 93 is moved in the vertical direction in conjunction with the slide member 7 so that the first sliding member 94 moves in the first slide space 9h1 and the rotation center O , And the pair of rotary members 90 rotate in opposite directions to each other.

9 (a) and 9 (b), the second linear turning / changing mechanism 92 is provided with a second sliding movement body (not shown) provided on one side of the rotary member 90 or the above- And a slide space 9h2 formed on the other side of the second sliding body 95 to slide.

In this embodiment, as the second sliding body 95, a rotating roller rotating around the rotational center O at a position different from the first sliding body 94 of the rotating member 90 And as the second slide space 9h2, elongated holes are formed on both left and right sides of the holding plate 81. As shown in Fig.

The second sliding body 95 is rotated while being interlocked with the rotation of the rotary member 90 to slide in the second slide space 9h2 so that the holding plate 81 slides in the vertical direction Move.

In the present embodiment, the slide member 7 is moved from the upper side to the lower side so that the retaining plate 81 is moved downward (from the inner side to the inner side of the platen 10) from the upper side through the interlocking mechanism 9 As shown in Fig. That is, when the clamper 21 is moved from the holding position X to the releasing position Y by the power transmission mechanism 22, the stopper 8 is moved to the paper-rest position P in interlock with the movement of the clamper 21, When the clamper 21 is moved from the release position Y to the retention position X and the stopper 8 moves in the retracted position Q in conjunction with the movement of the clamper 21, To the papermaking position (P).

When the platen 10 is moved to the standing posture in the state where the stopper 8 is in the pawl position P, the second sliding body 95 rotates the rotation center 90 of the rotation member 90, (O). That is, when the stopper 8 is moved to the papermaking position P, the center of gravity of the second sliding body 95 and the center of rotation O of the rotary member 90 are positioned on a vertical line .

2 and the like, the power transmitting mechanism 22 and the interlocking mechanism 9 described above are accommodated in the accommodating concave portion V formed on the back surface of the platen 10 in the present embodiment, The respective members constituting the power transmitting mechanism 22 and the members constituting the linking mechanism 9 are not pushed out from the back surface of the platen 10 while the platen 10 is in the horizontal posture have.

The accommodating concave portion (V) is configured to be closed by a cover member (not shown).

According to the substrate holding apparatus 100 configured as described above, since the clamper 21 is provided corresponding to each side of the substrate W, it is possible to reliably hold the substrate W, Since the mechanism 22 transmits the driving force between the first clamper 21a, the second clamper 21b and the third clamper 21c, it is possible to use an actuator common to each clamper 21, It is possible to simplify and downsize the entire device.

Since the actuators common to the respective clamper 21 can be used, the actuators are provided on the lower side or the left and right sides of the platen 10, for example, so that the loading / unloading of the substrate W is not hindered.

The entire third clamper 21c at the release position Y is positioned below the substrate placement surface 12 of the platen 10 in a state in which the platen 10 is in a horizontal posture The third clamper 21c does not interfere with the carrying-in and-out of the substrate W so that the height of the substrate W to be brought in and out of the substrate W The substrate W can be loaded and unloaded without changing the setting of the transfer robot or the like for transferring the substrate W to the platen 10 while maintaining the existing setting.

In addition, since the clearances Sa to c for preventing the driving force from being applied to the clamper 21 are formed between the engaging portions Ma to c and the engaged portions Na to c, Even if one clamper 21 is slightly lifted from the holding position X by putting the particles or the like on the substrate W into the clamping position X, 21 can surely hold the substrate W.

In addition, since a plurality of movable stoppers 8 are provided on the lower side of the platen 10, it is possible to prevent the substrate W from falling down by the stopper 8 at the paper-holding position P, , The stopper 8 is moved from the retreat position P to the retreat position Q so that the stopper 8 and the substrate W are not in contact with each other when the carrier robot lifts the substrate W, And the substrate W are not spoiled, and generation of particles can be prevented.

Further, if the substrate W is transported in a state where the substrate W is displaced with respect to the transport robot, the substrate W disposed on the substrate placement surface 12 may be displaced from a predetermined arrangement position. In this case, the position of the substrate W can be adjusted by pressing the outer edge of the substrate W with the stopper 8 by moving the stopper 8 from the retreat position Q to the retreat position P .

The center of gravity of the second sliding body 95 is shifted from the center of gravity of the second sliding body 95 to the center of gravity of the rotary member 90 when the platen 10 is moved to the standing posture in the state where the stopper 8 is in the paper- Even if a load is applied to the holding plate 81, the second sliding body 95 does not rotate and the stopper 8 Can be prevented from deviating downward from the papermaking position P. [

Since the power transmitting mechanism 22 and the interlocking mechanism 9 are accommodated in the accommodating concave portion V formed on the back surface of the platen 10, It can be made compact.

In addition, since the accommodating concave portion V is structured to be closed by a cover member (not shown), even if the members constituting the power transmitting mechanism 22 and the interlocking mechanism 9 are made to have grained particles, It is possible to prevent the particles from scattering in the processing chamber.

The present invention is not limited to the above-described embodiments.

For example, in the above embodiment, the power transmission mechanism is configured to transmit the driving force between the clamper provided corresponding to the three sides of the substrate. However, the clamper provided corresponding to the four sides of the substrate (the first clamper opposed to the left- , The second clamper, and the third clamper). As a concrete embodiment for this purpose, there is a configuration in which a plurality of second shafts 21b are moved by one rotation axis Lb without providing a plurality of shafts Lb like the above embodiment. In this case, the lever Z may be provided on the right and left sides.

With this configuration, since the clamper provided corresponding to the four sides of the substrate moves in conjunction with each other, all the clamper can be moved by using one actuator, and the whole apparatus can be made more compact.

Further, although the power transmitting mechanism has the first transmitting element, the second transmitting element, and the third transmitting element, the number of the transmitting elements and the members constituting each transmitting element is not limited.

Further, in the above embodiment, the lever is connected to the first transmission element, but the lever may be connected to the second transmission element or the third transmission element. That is, a driving force of an actuator (not shown) may be applied to the rotating shaft constituting the second transmitting element through the lever, or the driving force of the actuator may be given to the slide member of the third transmitting element via the lever.

The first transmitting element of the above-described embodiment transmits the driving force to the second clamper, but may be configured to transmit the driving force to the second transmitting element without passing through the second clamper.

More specifically, for example, a rack provided on the vertical slider of the first transmitting element and a gear provided on the rotary shaft of the second clamper are engaged with each other using a rack and pinion, so that the linear driving force along the moving direction of the vertical slider And transmits the converted signal to the rotation shaft.

In the above-described embodiment, the pair of second clamper is configured to rotate around a common rotation axis. However, a plurality of second clamper may be interlocked with a lateral slider member slidable in the left-right direction.

In this case, the second transmission element has the lateral slider member, and a direction changing mechanism or the like in the above-described embodiment may be provided between the longitudinal slider of the first transmitting element and the lateral slider member of the second transmitting element .

The third transmitting element of the above embodiment is configured such that the driving force is transmitted from the second clamper. However, the driving force may be transmitted from the member that transmits the power to the second clamper, that is, the second transmitting element.

Concretely, for example, a configuration using the aforementioned rack and pinion can be mentioned. That is, the gear provided on the rotary shaft of the second transmission element and the rack provided on the slide member of the third transmission element are engaged with each other to convert the rotary driving force of the rotary shaft into a linear driving force and transmit it to the slide member .

Since the configuration of the power transmission mechanism is variously considered as described above, the pair of power transmission mechanisms provided on the left and right sides are not necessarily symmetrical and may be different from each other as in the above embodiment.

In the above embodiment, the sliding members move in the vertical direction or in the lateral direction. However, they may be moved in the vertical direction or the horizontal direction.

Further, in the above embodiment, the stopper is provided on the lower side of the platen, but a stopper may be provided on the upper side, left side, right side, or both left and right sides of the platen.

With this configuration, the position of the substrate arranged on the platen in the horizontal posture can be adjusted along the vertical direction and the lateral direction.

In addition, in the above-described embodiment, the second sliding body is configured to be positioned above the rotational center of the rotary member when the platen is moved to the standing posture in the state where the stopper is in the papermaking position. However, 10, when the stopper 8 is moved to the neutral position R via the middle of the papermaking position P and the retreat position Q, the second sliding body 95 is rotated by the rotation member 90 Of the rotation center O of the rotating shaft.

When the clamper 21 is moved from the releasing position Y to the holding position X by the above-described structure, the holding plate 81 is pressed against the platen (not shown) by the rotation of the second sliding body 95 10, and then moves toward the outside. The stopper 8 is moved from the retracted position Q to the substrate W via the dirt position R approaching the substrate W from the retracted position Q, To a papermaking position P spaced apart from the papermaking machine.

As a result, even if the substrate W is displaced to come into contact with the stopper 8 while the platen 10 is in the standing posture as in the above embodiment, the platen 10 can be moved in the horizontal posture The stopper 8 and the substrate W are prevented from moving in the retracted position Q when the substrate W is lifted by the transport robot and the stopper 8 is moved to the retracted position Q not in contact with the substrate W. Therefore, Can be prevented.

In addition, even if the substrate W is shifted from the predetermined placement position on the substrate placement surface 12, since the stopper 8 moves to the pawl position P after passing through the light oil position R , The substrate W can be moved to the predetermined arrangement position by moving the stopper 8 to the light oil position R so that the substrate W can be reliably clamped at the predetermined arrangement position.

In the above embodiment, the clamper and the stopper are interlocked. However, the clamper and the stopper may be independently moved separately.

As a specific embodiment, for example, there is a configuration in which the stopper is connected to an electric motor or the like to move between a retreated position and a retreated position. In this case, the interlocking mechanism of the above-described embodiment is unnecessary.

In addition, although the power transmission mechanism of the embodiment transmits the driving force between the first clamper, the second clamper and the third clamper, the power transmission mechanism transmits the driving force only between the upper and lower clamper (the second clamper and the third clamper) It may be. In this case, the power transmission mechanism may have at least the slide member of the above embodiment, and the upper and lower clamper may move between the holding position and the release position in association with the movement of the slide member.

Of course, the power transmission mechanism may transmit the driving force only between the left and right clamper (first clamper opposed to each other).

The second clamper and the third clamper are provided so as to face each other along the up-and-down direction (the direction of entry and exit) in the above-described embodiment, but they may be arranged so as to face each other in the upward and downward directions.

The first clamper on the left and right sides is also the same, and the first clamper on the left and right sides may be arranged so as to face each other along the direction of slightly leaning from the left and right direction.

It is needless to say that the present invention is not limited to the above-described embodiment, and that various modifications are possible without departing from the spirit of the present invention.

100: substrate holding apparatus W: substrate
10: Platen 12: Substrate placement surface
20: clamp mechanism 21: clamper
22: Power transmission mechanism X: Holding position
Y: release position 7: slide member
8: Stopper

Claims (11)

A substrate holding apparatus comprising a platen on which a substrate having a rectangular shape is arranged and a clamping mechanism for holding the substrate between the platen,
The clamp mechanism includes:
A plurality of clamper provided corresponding to each side of the substrate and movable between a holding position for holding the substrate and a releasing position for releasing the substrate,
A driving force for moving the clamper is transmitted between a one side clamper provided corresponding to one side of two opposite sides of the substrate and a side clamper provided corresponding to the other side,
And,
The power transmission mechanism slides in a predetermined direction in conjunction with the movement of the one side clamper or the member for transmitting the driving force to the one side clamper and transmits the driving force to the other side clamper And,
Wherein the slide member is provided on the back surface opposite to the substrate arrangement surface of the platen. The substrate holding apparatus according to claim 1, wherein the opposing direction of the one side clamper and the other side clamper coincides with a substrate loading / unloading direction in which the substrate is loaded / unloaded with respect to the platen. The substrate holding apparatus according to claim 2, wherein the clamper on the substrate carry-out side of the one side clamper or the other side clamper is located below the substrate placement surface of the platen at the release position. The power transmission device according to any one of claims 1 to 3,
A first transmission element for transmitting the driving force to a side-surface-side clamper provided corresponding to at least one side different from the two opposite sides of the substrate;
And a second transmitting element for transmitting the driving force to the one-side clamper,
Wherein the driving force is transmitted to each of the side-surface side clamper, the one-side clamper, and the other side clamper through the first transmission element, the second transmission element, and the slide member. 4. The clamper according to any one of claims 1 to 3, wherein the clamper is configured to be deflected to the holding position by an elastic member, and to move from the holding position to the releasing position by the driving force,
Wherein a clearance is formed between the clamper and the power transmission mechanism so that the driving force is not applied to the clamper when the clamper is in the holding position. 4. The method according to any one of claims 1 to 3,
Further comprising a stopper protruding upward from the substrate arrangement surface of the platen,
Wherein the stopper is provided so as to be movable between a papermaking position for restricting movement of the substrate disposed on the substrate placing surface and a retreat position retracting outside the papermaking position with respect to the substrate. The apparatus according to claim 6, wherein the platen is movable between a horizontal posture for transmitting the substrate and an upright posture standing from the horizontal posture,
Wherein the stopper is provided on a lower side of the platen in the standing posture. The method according to claim 6,
A rotating member that rotates around a predetermined rotation center in association with slide movement of the slide member,
Further comprising a converting mechanism for converting the rotational driving force of the rotating member into a linear driving force along the moving direction of the stopper,
And the linear driving force converted by the conversion mechanism is transmitted to the stopper. The slide apparatus according to claim 8, wherein the conversion mechanism comprises a sliding body provided on one side of the rotary member or a holding plate for holding the stopper, and a slide space formed on the other side to slide the sliding body,
The sliding member slides on the slide space in accordance with the rotation of the rotating member so that the holding plate moves along the moving direction of the stopper,
Wherein when the platen is moved to the standing posture in a state where the stopper is in the papermaking position, the sliding body is positioned vertically above the rotation center. A substrate holding apparatus comprising a platen on which a substrate having a rectangular shape is arranged and a clamping mechanism for holding the substrate between the platen,
The clamp mechanism includes:
A plurality of clamper provided corresponding to each side of the substrate and movable between a holding position for holding the substrate and a releasing position for releasing the substrate,
A driving force for moving the clamper is transmitted between a one side clamper provided corresponding to one side of two opposite sides of the substrate and a side clamper provided corresponding to the other side,
And,
The power transmission mechanism slides in a predetermined direction in conjunction with the movement of the one side clamper or the member for transmitting the driving force to the one side clamper and transmits the driving force to the other side clamper And,
Wherein the opposing direction of the one side clamper and the other side clamper coincides with a substrate loading / unloading direction in which the substrate is loaded / unloaded with respect to the platen,
Wherein the one side clamper or the other side clamper is configured so that the clamper on the substrate carry-out side is positioned below the substrate placement surface of the platen in the release position. A substrate holding apparatus comprising a platen on which a substrate having a rectangular shape is arranged and a clamping mechanism for holding the substrate between the platen,
The clamp mechanism includes:
A plurality of clamper provided corresponding to each side of the substrate and movable between a holding position for holding the substrate and a releasing position for releasing the substrate,
A driving force for moving the clamper is transmitted between a one side clamper provided corresponding to one side of two opposite sides of the substrate and a side clamper provided corresponding to the other side,
And,
The power transmission mechanism includes:
A slide member that slides in a predetermined direction with the movement of the one side clamper or the member that transmits the driving force to the one side clamper and transmits the driving force to the other side clamper;
A first transmission element for transmitting the driving force to a side-surface-side clamper provided corresponding to at least one side different from the two opposite sides of the substrate;
And a second transmitting element for transmitting the driving force to the one-side clamper,
Wherein the driving force is transmitted to each of the side-surface side clamper, the one-side clamper, and the other side clamper through the first transmission element, the second transmission element, and the slide member.
KR1020150130346A 2015-05-08 2015-09-15 Substrate holding apparatus KR101901000B1 (en)

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JP4679307B2 (en) * 2005-09-02 2011-04-27 平田機工株式会社 Single-wafer workpiece gripping device
TWI315288B (en) * 2005-12-08 2009-10-01 Chunghwa Picture Tubes Ltd Substrate buffer clamp
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JP2006195062A (en) * 2005-01-12 2006-07-27 Fuji Photo Film Co Ltd Clamping device and image forming apparatus
JP2008091568A (en) * 2006-09-29 2008-04-17 Fujifilm Corp Device and method for mounting substrate
JP2009042010A (en) * 2007-08-08 2009-02-26 Daifuku Co Ltd Plate member inspection equipment
JP2009274813A (en) * 2008-05-14 2009-11-26 Ihi Corp Substrate conveying device

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CN106128929B (en) 2019-06-04
TW201640603A (en) 2016-11-16
TWI624891B (en) 2018-05-21
JP2016213331A (en) 2016-12-15
KR20160131834A (en) 2016-11-16
JP6248977B2 (en) 2017-12-20

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