JP4130218B1 - Vacuum welding processing equipment - Google Patents

Abstract

The present invention provides an in-vacuum welding processing apparatus capable of reducing the size of a vacuum chamber as compared with the prior art.
An in-vacuum welding processing apparatus (1) includes a vacuum chamber (100) that keeps its inside in a vacuum atmosphere, and a carrier (400) that is disposed in the vacuum chamber (100) and can move in the X direction by placing a workpiece. Carrier driving means disposed outside the vacuum chamber 100, a welding head 300 disposed within the vacuum chamber and movable in the Y direction perpendicular to the X direction, and welding disposed outside the vacuum chamber 400. The head driving means 540 and the welding head 300 can be relatively moved in the Z direction perpendicular to the X direction and the Y direction, and are disposed in the vacuum chamber 100 in parallel with the Y direction in the welding roller 210 for welding the workpiece. The first roller driving shaft 600, the first roller driving shaft driving means 620 disposed outside the vacuum chamber 100, and the first roller driving shaft 60 disposed in the welding head 300. A first conversion unit 360 that converts the power in the Z-direction moving power of the welding rollers, and the like comprising a.
[Selection] Figure 1

Description

  The present invention relates to an in-vacuum welding processing apparatus that performs various processes such as seam welding in a vacuum atmosphere.

  Conventionally, a seam welding apparatus has been used as means for welding packages and lids of electronic components such as piezoelectric vibrators and semiconductor elements. This seam welding apparatus welds a package and a lid by applying a pulsed voltage while pressing and rolling a pair of welding rollers against a contact portion between the package and the lid. Such seam welding of electronic component packages is generally performed in a nitrogen gas atmosphere. However, in recent years, it has become necessary to keep the interior of the package in a vacuum as electronic components become smaller and more accurate. The number of cases where seam welding is performed in a vacuum atmosphere is increasing.

  On the other hand, in a conventional apparatus that performs processing such as seam welding in a vacuum atmosphere, together with a processing apparatus such as a seam welding apparatus, an XY stage that arranges a package on which a lid is placed in a matrix, and the X-Y stage. The Y stage driving means is housed in a large vacuum chamber, and the processing is performed in a state where the vacuum chamber is kept in a vacuum atmosphere.

  However, when such a large vacuum chamber is adopted, a very high strength is required to keep the inside in a vacuum atmosphere, so that the external dimensions of the vacuum chamber become very large and the cost increases. There was a problem. Furthermore, there is a problem that if a driving means such as a motor is housed in a vacuum chamber and used, heat generation cannot be dissipated, so that an expensive vacuum must be used. For this reason, the conventional apparatus was very large, and the manufacturing cost and the maintenance management cost were very high.

On the other hand, a positioning mechanism in the vacuum chamber has been proposed that aims to reduce the size of the vacuum chamber by disposing driving means for driving the XY stage outside the vacuum chamber (for example, Patent Document 1). reference).
Japanese Patent Laid-Open No. 2005-5543

  However, in addition to the XY stage that requires a large movable range, it is necessary to mount electronic components thereon in a matrix form, so a large bottom area is actually required, and the vacuum chamber is downsized. There was a problem that I could not. In particular, another movable member for engaging with the XY stage and moving in the X direction needs to be provided in the XY stage.

  In the case of using an XY stage, after the carrier is loaded onto the XY stage in the vacuum chamber, the carrier is positioned at the reference position (zero point) in both the X direction and the Y direction before welding. There is a problem that preparation time becomes long because it is necessary to start.

  The present invention has been made in view of such problems, and an object of the present invention is to provide an in-vacuum welding processing apparatus in which the vacuum chamber can be made smaller than before and the welding efficiency is high. .

  The above object can be achieved by the following means based on the earnest studies of the inventors.

(1) A vacuum chamber that keeps its inside in a vacuum atmosphere, a carrier that is disposed in the vacuum chamber and that can be moved in the X direction by placing a workpiece, and is disposed outside the vacuum chamber and the carrier. A carrier driving means for moving the welding head, a welding head disposed in the vacuum chamber and movable in the Y direction perpendicular to the X direction, and a welding head disposed outside the vacuum chamber for moving the welding head. A head driving means; two welding rollers which are movable relative to the welding head in the Z direction perpendicular to the X direction and the Y direction ; and the Y direction; and parallel to the Y direction. A first roller driving shaft disposed in the vacuum chamber; first roller driving shaft driving means disposed outside the vacuum chamber for driving the first roller driving shaft; A first conversion means disposed in the head by converting the power of the first roller driving shaft in the Z direction moving power of the welding roller, the second roller being disposed in the Y direction parallel to the vacuum chamber A driving shaft; second roller driving shaft driving means disposed outside the vacuum chamber for driving the second roller driving shaft; and power of the second roller driving shaft in the welding head in the Y direction of the welding roller. A second converting means for converting the distance between the two welding rollers by converting to a moving power; a holding means for detachably holding the welding roller by an opening / closing member provided on the welding head; and An attachment / detachment switching member that opens and closes the opening / closing member, and a third variation that is disposed on the welding head and converts the power of the first roller drive shaft or the second roller drive shaft to the power of the attachment / detachment switching member. Characterized in that it comprises means, a vacuum welding apparatus.

(2) The third conversion means is adapted to convert the power of the second roller drive shaft, and the second conversion means moves the welding roller in the Y direction according to the rotational phase of the second roller drive shaft. And a Y-direction stationary region in which the welding roller is not moved in the Y direction regardless of the rotational phase of the second roller drive shaft. An opening region that opens the welding roller according to a rotation phase of the roller drive shaft, and a holding region that maintains the welding roller in a holding state according to the rotation phase of the second roller drive shaft. The range of the Y direction guiding area is included in the range of the holding area of the third conversion means, and the range of the open area of the third conversion means is the range of the second conversion means. Characterized in that it adapted to be included within the scope of the direction static region, vacuum welding apparatus according to (1).

(3) The in-vacuum welding processing apparatus according to (1) or (2) , wherein the second conversion means and the third conversion means are cams that rotate together with the second roller drive shaft. .

(4) The third conversion means converts the power of the first roller drive shaft, and the first conversion means can weld the welding roller according to the rotational phase of the first roller drive shaft. A welding execution area where the welding roller is lowered to a state, and a welding non-execution area where the welding roller is raised to a state where welding is impossible due to the rotational phase of the first roller drive shaft. An opening region for maintaining the welding roller in an open state by a rotational phase of one roller driving shaft, and a holding region for maintaining the welding roller in a holding state by a rotational phase of the first roller driving shaft, The range of the welding execution area of one conversion means is included in the range of the holding area of the third conversion means, and the range of the open area of the third conversion means is Characterized in that it adapted to be included within the scope of the welding non-execution region of the first conversion means, vacuum welding apparatus according to (1).

(5) The in-vacuum welding processing apparatus according to (1) or (4) , wherein the first conversion means and the third conversion means are cams that rotate together with the first roller drive shaft. .

(6) The replacement welding roller is disposed in the vacuum chamber, the welding roller held by the holding means, and the replacement welding roller disposed in the vacuum chamber. The in-vacuum welding processing apparatus according to any one of the above (1) to (5) , wherein automatic replacement is performed.

(7) The in-vacuum welding processing apparatus according to (6) , wherein the replacement welding roller is mounted on an exchange table movable in the X direction by the carrier driving means.

  According to the in-vacuum welding processing apparatus according to the present invention, the vacuum chamber can be reduced in size and the cost can be reduced.

  Hereinafter, an example of an embodiment of the present invention will be described in detail with reference to the drawings. In the following description, directions are described with reference to the X, Y, and Z axes shown in the drawings. The X-axis direction is the X direction according to the present invention, the Y-axis direction is the Y direction according to the present invention, and the Z-axis direction is the Z direction according to the present invention, but the present invention is not limited to this. is not.

  1 is a front view of an in-vacuum welding processing apparatus 1 according to an embodiment of the present invention, FIG. 2 is a plan view of the in-vacuum welding processing apparatus 1, and FIG. FIG. In addition, in FIGS. 1-3, the inside of the vacuum chamber 100 is shown with the cross section. As shown in these drawings, the in-vacuum welding processing apparatus 1 includes a box-shaped vacuum chamber 100 capable of keeping the inside in a vacuum atmosphere, a welding head 300 including a pair of seam welding roller units 200, a workpiece 10 is provided.

  The seam welding roller unit 200 includes a rotating roller-shaped welding electrode (referred to as a welding roller) and performs seam welding. Therefore, the in-vacuum welding processing apparatus 1 according to the present embodiment is an apparatus for seam welding an electronic component package or the like in a vacuum atmosphere.

  The welding head 300 holds the pair of seam welding roller units 200 so as to be movable and detachable in the Z-axis direction. Further, the welding head 300 is configured to be able to change the interval in the Y-axis direction of the pair of seam welding roller units 200. Details of the structure of the welding head 300 will be described later.

  The welding head 300 is disposed on the side surface of the beam 110 formed inside the vacuum chamber 100 so as to be linearly movable in the Y-axis direction. Specifically, two guide rails 500 arranged in parallel to each other along the Y-axis direction are arranged on the side surface of the beam 110, and the two guide rails 500 include Two sliders 510 that linearly move along are combined. The welding head 300 is fixed to a total of four sliders 510 and can move linearly in the Y-axis direction along the guide rail 500 together with the sliders 510.

  Further, a welding head drive shaft 520 having a screw formed on the outer peripheral surface is disposed in parallel with the guide rail 500 between the two guide rails 500. The welding head drive shaft 520 is rotatably supported by bearings 522 and 524 disposed on opposite side walls of the vacuum chamber 100. One end of the welding head drive shaft 520 passes through the side wall of the vacuum chamber 100 and is exposed to the outside, and is connected to welding head driving means 540 disposed outside the vacuum chamber 100. In the bearing 524 at the penetrating portion, the gap between the welding head drive shaft 520 and the vacuum chamber 100 is sealed with a magnetic fluid seal or the like. For this reason, it is possible to keep the inside of the vacuum chamber 100 substantially vacuum while rotating the welding head drive shaft 520 by driving by the external welding head drive means 540. The welding head driving means 540 is a stepping motor in this embodiment.

  The welding head 300 is provided with a nut 530 that is screwed with the welding head drive shaft 520. The nut 530 is a so-called ball screw provided with a ball at the threaded portion, and the sliding resistance is reduced. Therefore, the welding head 300 linearly moves in the Y-axis direction together with the nut 530 as the welding head driving shaft 520 driven by the welding head driving means 540 rotates.

  Further, a first roller drive shaft 600 and a second roller drive shaft 610 disposed in the vacuum chamber 100 along the Y-axis direction are connected to the welding head 300 so as to penetrate therethrough. The first roller drive shaft 600 and the second roller drive shaft 610 are spline shafts and are arranged in parallel in the X-axis direction. The first roller driving shaft 600 and the second roller driving shaft 610 are constituted by a bearing 602 and a bearing 612 disposed on one side wall of the vacuum chamber 100, and a bearing 604 and a bearing 614 disposed on the other side wall. Each is rotatably supported. One end of the first roller driving shaft 600 and the second roller driving shaft 610 penetrates the side wall of the vacuum chamber 100 and is exposed to the outside, and first roller driving shaft driving means disposed outside the vacuum chamber 100. 620 and the second roller drive shaft drive means 630 are connected to each other. Similar to the welding head drive shaft 520, a magnetic fluid seal or the like is provided on each of the bearings 604 and 614 in the penetrating portion. The first roller driving shaft driving unit 620 and the second roller driving shaft driving unit 630 are stepping motors in this embodiment.

  The first roller drive shaft 600 and the second roller drive shaft 610 are respectively connected to first conversion means 360 and second conversion means 370 (details will be described later) provided in the welding head 300. The first conversion means 360 and the second conversion means 370 are slidable along the respective axes while the rotational force is transmitted by the first roller drive shaft 600 and the second roller drive shaft 610 that are splines. Yes.

  The carrier 400 is disposed on the bottom surface inside the vacuum chamber 100 so as to be linearly movable in the X-axis direction. Two guide rails 700 disposed in parallel to each other along the X-axis direction are disposed on the bottom surface of the vacuum chamber 100, and the two guide rails 700 are arranged along the guide rails 700. Two sliders 710 that move linearly are combined. The carrier 400 is mounted on the four sliders 710 in total, and can move linearly in the X-axis direction along the guide rail 700 together with the sliders 710.

  Between the two guide rails 700, a carrier driving shaft 720 having a screw formed on the outer peripheral surface is disposed in parallel with the guide rails 700. One end of the carrier driving shaft 720 passes through the side wall of the vacuum chamber 100 and is exposed to the outside, and is connected to carrier driving means 740 disposed outside the vacuum chamber 100. A nut 730 that is screwed with the carrier drive shaft 720 is disposed on the lower surface of the carrier 400. Therefore, the carrier 400 linearly moves in the X-axis direction together with the nut 730 as the carrier driving shaft 720 driven by the carrier driving means 740 rotates.

  The carrier drive shaft 720 is rotatably supported by a bearing 722 disposed on the bottom surface of the vacuum chamber 100 and a bearing 724 disposed on the bottom of the side wall. Similar to the welding head drive shaft 520, a magnetic fluid seal or the like is provided on the bearing 724 in the penetrating portion. The carrier driving means 740 is a stepping motor in this embodiment.

  On the upper surface of the carrier 400, a work tray 410 holding a plurality of works 10 in a matrix in the X-axis and Y-axis directions is placed. The work tray 410 is transported into the vacuum chamber 100 from the previous process while holding a plurality of works 10 and placed on the carrier 400. In addition, an exchange table 420 that holds the replacement seam welding roller unit 201 is provided at one end of the carrier 400 in the Y-axis direction. A plurality of holding tables 430 are arranged on the upper surface of the replacement table 420, and the replacement seam welding roller unit 201 is placed on the holding table 430 in a paired state. That is, the replacement seam welding roller unit 201 is also movable in the X direction by the carrier drive shaft 720.

  In this in-vacuum welding processing apparatus 1, the carrier 400 is moved in the X-axis direction, and the welding head 300 is moved in the Y-axis direction, whereby an arbitrary work 10 arranged in a matrix on the work tray 410 is moved. It is possible to dispose a pair of seam welding roller units 200 on each other. Further, the in-vacuum welding processing apparatus 1 moves the carrier 400 in the X-axis direction and moves the welding roller 300 in the Y-axis direction, so that seam welding is performed on an arbitrary holding table 430 on the exchange table 420. The roller unit 200 can be opened or a new replacement seam welding roller unit 201 can be held. As a result, the in-vacuum welding processing apparatus 1 can automatically process (seam welding) all the workpieces 10 on the work tray 410, and can replace the seam welding roller unit 200 that is frequently replaced due to wear or the like. The automatic exchange within the vacuum chamber 100 is possible.

  Next, the procedure of seam welding by the in-vacuum welding processing apparatus 1 will be described.

  4A is an enlarged front view showing the state of seam welding by the in-vacuum welding processing apparatus 1, and FIG. 4B is an enlarged view of the state of seam welding by the in-vacuum welding processing apparatus 1. FIG. It is the left side view. As shown in these drawings, the seam welding roller unit 200 is configured such that a welding roller 210 as a welding electrode is rotatably held in a housing 220. The workpiece 10 is accommodated in a plurality of depressions 412 formed in the workpiece tray 410 in a state where the lid 14 is placed on or temporarily attached to the package 12.

  First, the welding head 300 is moved in the Y direction and the carrier 400 is moved in the X direction, and the pair of seam welding roller units 200 is disposed immediately above the workpiece 10 at a predetermined position. 4A, the welding head 300 lowers the pair of seam welding roller units 200 (moves in the Z-axis direction) so that the welding roller 210 faces the lid 14 with a predetermined pressure. In contact with the two edges. Next, a pulse voltage is applied to the welding roller 210 and the carrier 400 is moved in the X-axis direction as shown in FIG. As the carrier 400 moves, the welding roller 210 moves relatively along the edge of the lid 14 while rolling. Thereby, the lid 14 and the package 12 are welded along two opposing edges of the lid 14. The carrier 400 continues to move, and the workpieces 10 arranged in the X-axis direction are continuously welded.

  When the welding of all the workpieces 10 in the X-axis direction is completed, the welding head 300 raises (moves in the Z-axis direction) the pair of seam welding roller units 200 and moves in the Y-axis direction. A pair of seam welding roller units 200 is disposed immediately above the workpieces 10 in this row. Then, similarly to the above, welding of the rows of workpieces 10 in the X-axis direction is continuously performed. By repeating this, the X-axis direction edges of all the workpieces 10 held on the workpiece tray 410 are welded. When welding the edge of the workpiece 10 in the Y-axis direction, welding is performed by carrying the workpiece tray 410 into an in-vacuum welding processing apparatus having the same structure in which the XY direction is different by 90 degrees. After 410 is taken out and rotated by 90 degrees, it may be carried into the in-vacuum welding processing apparatus 1 again for welding. It is also preferable that the carrier 400 be rotated 90 degrees in the vacuum chamber 100.

  Next, the structure of the welding head 300 will be described in detail.

  5 is a front view in which a part of the welding head 300 is sectioned, FIG. 6 is a plan view in which a part of the welding head 300 is sectioned, and FIG. 7 is a left side in which a part of the welding head 300 is sectioned. FIG.

  As shown in these drawings, the welding head 300 includes a frame 302 to which a slider 510 and a nut 530 are fixed on the rear surface, and a lower portion of the front surface of the frame 302 that is relatively movable in the Y-axis direction. One Y-direction movable member 320 and a Z-direction movable member 310 that can move in the Z-axis direction relative to each of the front surfaces of the two Y-direction movable members 320 are provided. A connection member 330 for moving the Z-direction movable member 310 is connected to the upper portion of the Z-direction movable member 310. A holding means 340 for detachably holding the seam welding roller unit 200 is disposed below the Z-direction movable member 310.

  The welding head 300 further includes an attachment / detachment switching member 350 for switching the holding / release of the seam welding roller unit 200 by the holding means 340 between the two Y-direction movable members 320. Also, two first conversion means 360 for moving the two Z-direction movable members 310 in the Z-axis direction and two second conversions for moving the two Y-direction movable members 320 in the Y-axis direction, respectively. Means 360 and third conversion means 380 for moving attachment / detachment switching member 350 in the Z-axis direction are provided on the upper portion of frame 302. Although a part has already been described, the first conversion means 360 is engaged with the first roller drive shaft 600 serving as a spline, and the second conversion means 370 is engaged with the second roller drive shaft 610 serving as a spline. The third converting means 380 is adapted to engage with the second roller drive shaft 610.

  The frame 302 has a shape in which a box-like member is connected to the upper part of a plate-like member, and the first conversion unit 360, the second conversion unit 370, and the third conversion unit 380 are arranged inside the box-like upper part. Is housed.

  The Y-direction movable member 320 is attached to the frame 302 via two guide rails 304 disposed along the Y-axis direction on the lower front surface of the frame 302 and two sliders 306 that move linearly along the guide rail 304. It is arranged. The two Y-direction movable members 320 are arranged side by side in the Y-axis direction, which is the movement direction, and the distance between the two is increased or reduced by moving in the opposite directions to each other. . At the upper end of the Y-direction movable member 320, a cam follower 326 connected to the lower portion of the second conversion means 370 is projected. A roller (not shown) is provided at the tip of the cam follower 326.

  The Z-direction movable member 310 is movable in the Y-direction via a guide rail 322 disposed along the Z-axis direction in front of the Y-direction movable member 320 and two sliders 324 that move linearly along the guide rail 322. It is disposed on the member 320. A receiving plate 312 that is connected to the connection member 330 is provided on the upper front portion of the Z-direction movable member 310.

  The connecting member 330 is a U-shaped member that connects the Z-direction movable member 310 and the first conversion means 360 in a side view, and is disposed on the frame 302 so as to be movable in the Z-axis direction. An upper roller 332 that comes into contact with the upper surface of the first conversion means 360 is provided at the upper end of the connection member 330. In addition, a lower roller 334 that contacts the lower surface of the receiving plate 312 is provided at the lower end of the connection member 330. The two connecting members 330 are provided via a guide rail 336 disposed along the Z-axis direction on the inner surface on the front side of the box-shaped portion of the frame 302, and two sliders 338 that move linearly along the guide rail 336. Respectively.

  In the present embodiment, the Z-direction movable member 310 is urged downward by urging means (not shown). Thereby, the lower roller 334 is always pressed downward from the receiving plate 312. The upper roller 332 is pressed against the upper surface of the first conversion unit 360 by the pressing force from the receiving plate 312. Thus, by urging the Z-direction movable member 310 downward by the urging means, the contact between the receiving plate 312 and the lower roller 334 and the contact between the first converting means 360 and the upper roller 332 can be stabilized. it can. Furthermore, the pressing force of the welding roller 210 against the workpiece 10 can be stabilized at a predetermined value.

  Although details will be described later, the first converting means 360 is a cam and rotates together with the first roller drive shaft 600. The connection member 330 is moved up and down by the rotation of the cam, and the Z-direction movable member 310 is moved up and down by the vertical movement of the connection member 330.

  The holding means 340 includes a fixing member 342 and an opening / closing member 344, and is configured so as to sandwich the housing 220 of the seam welding roller unit 200 with both of them. The opening / closing member 344 is rotatably disposed on the back surface of the fixed member 342 via a rotation pin 346. The opening / closing member 344 is urged in a direction (closing direction) in which the seam welding roller unit 200 is sandwiched by an urging means (not shown) such as a spring. That is, the holding means 340 has a structure in which the seam welding roller unit 200 is clamped by the urging force of the urging means.

  The opening / closing member 344 includes a lever 348 projecting upward, and a roller 349 is provided at the tip of the lever 348. The attachment / detachment switching member 350 presses the roller 349 of the lever 348 in a predetermined direction, thereby rotating the opening / closing member 344 in the opening direction against the urging force of the urging means, and the seam welding roller unit 200. Is released from the holding means 340. Details of the attachment / detachment switching member 350 and details of releasing the seam welding roller unit 200 from the holding means 340 will be described later.

  A positioning groove 222 is formed on the outer circumferential surface of the housing 220 of the seam welding roller unit 200 along the circumferential direction. Positioning protrusions (not shown) protrude from positions corresponding to the fixing member 342 of the holding unit 340 and the positioning groove 222 of the opening / closing member 344. By positioning the positioning protrusion in the positioning groove 222 of the housing 220, the seam welding roller unit 200 is positioned in the Y-axis direction.

  The first conversion means 360 is a cam having a shape in which the distance from the rotation center to the outer peripheral surface continuously changes (see FIG. 7), and two first conversion means 360 are rotatably disposed on the upper portion of the frame 302. The two first conversion means 360 are arranged in series with the rotation axis parallel to the Y-axis direction, and the first roller drive shaft 600 serving as a spline shaft is at the rotation center of the two first conversion means 360. Are respectively penetrated. The first conversion means 360 holds the balls that mesh with the spline grooves of the first roller drive shaft 600. That is, the first conversion unit 360 rotates together with the first roller drive shaft 600 by a ball spline mechanism, and can move along the first roller drive shaft 600 in the Y-axis direction. The connection member 330 and the Z-direction movable member 310 are moved up and down by the rotation of the first conversion means 360. In the present embodiment, in the cam of the first conversion means 360, the state in which the seam welding roller unit 200 is lowered to a weldable state is “welding execution region”, and the seam welding roller unit 200 is raised to a weldable state. The state is defined as “non-welding area”.

  The second conversion means 370 is a cylindrical cam in which a guide groove 372 in which the roller of the cam follower 326 of the Y-direction movable member 320 is accommodated is formed on the outer peripheral surface (see FIG. 6). The two second conversion means 370 are arranged in series behind the first conversion means 360 when viewed from the front, with the rotation axis parallel to the Y-axis direction. The second roller drive shaft 610 is passed through the rotation center of the second conversion means 370. Similarly to the first conversion unit 360, the two second conversion units 370 rotate together with the second roller drive shaft 610 by the ball spline mechanism, and along the second roller drive shaft 610 together with the welding head 300 in the Y-axis direction. It is possible to move to. The guide groove 372 includes a Y-direction guide region 372A formed in a spiral shape and a Y-direction stationary region 372B formed in a non-spiral shape in the circumferential direction. The guide groove 372 is formed in each of the two second conversion means 370 so as to be symmetric when viewed from the front. Therefore, when the roller of the cam follower 325 moves in the Y direction guide region 372A of the guide groove 372, the Y direction movable member 320 slides in the Y direction. On the other hand, when the roller of the cam follower 325 moves in the Y-direction stationary region 372B of the guide groove 372, the slide of the Y-direction movable member 320 is stopped regardless of the rotation of the second conversion means 370.

  The third converting means 380 is a cam having an outer peripheral surface including a convex portion 382 whose distance from the rotation center continuously changes and a smooth portion 384 formed at a constant distance from the rotation center. Although the details will be described later, the attachment / detachment switching member 350 moves up and down with the rotation of the convex portion 382 and the smooth portion 384 to open and close the holding means 340 that sandwiches the seam welding roller unit 200. In the present embodiment, the convex portion 382 functions as an open area that opens the holding means 340, and the smooth portion 384 functions as a holding area that closes the holding means 340. The third conversion unit 370 is disposed in series between the two second conversion units 370 with the rotation axis parallel to the Y-axis direction, and the second roller drive shaft 610 passes through the rotation center. . The third converting means 380 rotates together with the second roller drive shaft 610 by a ball spline mechanism, and can move in the Y-axis direction along the second roller drive shaft 610. The convex portion 382 (open region) corresponds to the Y-direction stationary region 372B, and the smooth portion 384 (holding region) is provided at a position corresponding to the Y-direction guiding region 372A of the second conversion unit 370.

  Next, the movement of the Y direction movable member 320 will be described.

  8A and 8B are front views showing how the Y-direction movable member 320 moves. In these drawings, a part is shown in cross section and a part of the member is cut out.

  FIG. 8A shows a state in which the two Y-direction movable members 320 are located closest to each other. In this state, when the second roller drive shaft 610 is rotationally driven by the second roller drive shaft drive means 630 and the second conversion means 370 is rotated clockwise as viewed from the left side, the Y direction of the guide groove 372 is obtained. The cam follower 326 is guided by the guide region 372A, and the two Y-direction movable members 320 move in the Y-axis direction in directions away from each other.

  When the second conversion means 370 is rotated counterclockwise when viewed from the left side from the state of FIG. 8A, the cam follower 326 enters the Y-direction stationary region 372B, so that two Y The direction movable member 320 does not move in the Y-axis direction, and maintains the positions closest to each other.

  When the cam follower 326 is in the Y-direction guiding region 372A of the guiding groove 372, as shown in FIG. 8B, the second converting means 370 is rotated clockwise to see 2 The two Y-direction movable members 320 move in directions away from each other, and the two Y-direction movable members 320 move in directions close to each other by rotating the second conversion means 370 counterclockwise when viewed from the left side. . Since the two second conversion means 370 are symmetrical to each other and rotate by the same angle in the same direction, the two Y-direction movable members 320 move the same distance in the opposite directions. . Thereby, the interval between the pair of welding rollers 210 can be adjusted to the size of the electronic component that becomes the workpiece 10.

  In addition, by changing the distance between the pair of welding rollers 210, it is possible to change the portion that contacts the workpiece 10 on the side surface of the welding roller 210, that is, the welding portion. The welded portion on the side of the welding roller 210 is consumed by repeated loads and heat generated during welding. For example, by changing the position of the welded portion by changing the interval between the pair of welding rollers 210 at a predetermined cycle. The life of the welding roller 210 can be extended. That is, by not continuously using the same part on the side surface of the welding roller 210 for welding, the amount of wear on the side surface of the welding roller 210 can be reduced and the side surface of the welding roller 210 can be prevented from being locally worn. In addition, when an abnormality occurs on the side surface of the welding roller 210, the welding operation can be continued only by changing the welding portion by changing the interval between the pair of welding rollers 210 without replacing the welding roller unit 200. There are cases where it is possible.

  As the Y-direction movable member 320 moves in the Y-axis direction, the Z-direction movable member 310, the holding means 340, and the seam welding roller unit 200 installed thereon also move in the Y-axis direction. Since the receiving plate 312 of the Z-direction movable member 310 has a width in the Y-axis direction corresponding to the moving distance of the Y-direction movable member 320, the Z-direction movable member 310 and the Y-direction movable member 320 are positioned in the Y-axis direction. Even if it changes, the contact of the lower roller 334 of the connection part 330 and the receiving plate 312 is maintained. Further, since the lower roller 334 rolls as the receiving plate 312 moves, the movement of the Y-direction movable member 320 and the Z-direction movable member 310 in the Y-axis direction is not hindered.

  Thus, in the present embodiment, the second roller driving shaft driving unit 630 rotates the second conversion unit 370 to move the Y-direction movable member 320, thereby arbitrarily setting the distance between the pair of welding rollers 210. It is possible to set. By doing in this way, in this embodiment, it is possible to cope with seam welding of the workpiece 10 having various dimensions.

  Next, the movement of the Z direction movable member 310 will be described.

9A and 9B are left side views showing how the Z-direction movable member 310 moves. In these drawings, a part is shown in cross section.

  FIG. 9A shows a state where the Z-direction movable member 310 is raised most. That is, the upper roller 332 of the connection member 330 is in contact with the outer peripheral surface (the welding non-execution region) that is farthest from the rotation center of the first conversion unit 360. From this state, when the first roller drive shaft 600 is rotated by the first roller drive shaft drive unit 620 and the first conversion unit 360 is rotated clockwise in the drawing, the upper roller 332 becomes the first conversion unit. It rolls with the rotation of 360, and descends as the distance from the rotation center of the contact surface of the first conversion means 360 decreases (transition to the welding execution area). That is, the connecting member 330 is lowered, and accordingly, the Z-direction movable member 310, the holding means 340, and the seam welding roller unit 200 are also lowered and come into contact with the workpiece 10 and are ready for welding.

  As shown in FIG. 9B, by rotating the first conversion means 360 clockwise in the figure, the Z-direction movable member 310 is lowered, and the first conversion means 360 is turned counterclockwise in the figure. By rotating, the Z-direction movable member 310 rises. Since the two first conversion means 360 have the same shape and rotate in the same direction by the same angle, the two Z-direction movable members 310 move the same distance in the same direction.

  Thus, in this embodiment, the seam welding roller unit 200 can be raised or lowered by rotating the first conversion means 360 by the first roller drive shaft drive means 620 and moving the Z-direction movable member 310. It is possible. By doing so, the seam welding roller unit 200 is lowered to process the workpiece 10 (seam welding), and when the welding head 300 or the carrier 400 is moved, the seam welding roller unit 200 is raised and retracted. Can be made.

  Since the Z-direction movable member 310 is caught on the lower roller 334 of the connecting member 330 via the receiving plate 312, the Z-direction movable member 310 may escape upward during seam welding. It is possible. For this reason, in this embodiment, the seam welding roller unit 200 does not apply a pressing force more than necessary to the workpiece 10 during the seam welding. Further, since the pair of seam welding roller units 200 can individually escape upward, for example, even when the workpiece 10 is tilted, the pressing force by the pair of welding rollers 210 is made substantially equal. It is possible.

Next , details of the attachment / detachment switching member 350 and release of the seam welding roller unit 200 from the holding means 340 will be described.

  FIGS. 10A and 10B are left side views showing a state in which the seam welding roller unit 200 is released from the holding means 340. FIG. In these drawings, a part is shown in cross-section, and members in front of the attachment / detachment switching member 350 are omitted in the drawing.

  As shown in these drawings, the attachment / detachment switching member 350 includes a guide rail 308 disposed along the Z-axis direction at the lower front portion of the frame 302, and two sliders 309 that move linearly along the guide rail 308. And is arranged to be movable in the Z-axis direction. The upper end of the attachment / detachment switching member 350 is offset to the front side (the right side in the figure) and is connected to the swing lever 352. The lower end of the attachment / detachment switching member 350 is divided into left and right parts when viewed from the front, and is configured to be able to press the roller 349 at the tip of the lever 348 of the two holding means 340 from above (see FIG. 5). In addition, pressing slopes 350 </ b> A that are in contact with the rollers 349 are formed at the two lower ends of the attachment / detachment switching member 350.

  As shown in FIGS. 10A and 10B, the swing lever 352 is located below the third conversion means 380 via a swing shaft 354 connected to an end on the back side (left side in the figure). The frame 302 is swingable about a swing shaft 354. The front end (right side in the drawing) of the swing lever 352 is connected to the upper end of the attachment / detachment switching member 350 via a pin 356 inserted through the long hole. In addition, the swing lever 352 includes a roller 358 that contacts the third conversion unit 380 at a position facing the lower surface of the third conversion unit 380. Since the attachment / detachment switching member 350 is urged upward by an urging means (not shown), the roller 358 is always pressed against the lower surface of the third conversion means 380.

  FIG. 10A shows a state where the two Y-direction movable members 320 are closest to each other in the Y-direction guiding area 372A of the second converting means 370 (that is, at the boundary between the Y-direction guiding area 372A and the Y-direction stationary area 372B). In this state, the roller 358 is in contact with the vicinity of the boundary between the smooth portion 384 (holding region) and the convex portion 382 (open region) of the third converting means 380. When the second roller drive shaft 610 is further rotated by the second roller drive shaft drive means 630 from this state and the third conversion means 380 is rotated counterclockwise in FIG. It comes into contact with the (open region) side and is pushed down according to the protruding amount of the convex portion 382. As a result, the swing lever 352 swings and moves the attachment / detachment switching member 350 downward.

  As described above, when the third conversion unit 380 is further rotated, the second conversion unit 370 is also rotated at the same time. However, since the cam follower 326 of the Y direction movable member 320 enters the Y direction stationary region 372B, the Y direction movable member 320 does not move in the Y axis direction. On the other hand, when the third converting means 380 and the second converting means 370 are rotated clockwise from the state shown in FIG. 10B in order to move the Y-direction movable member 320, the roller 358 of the swing lever 352 is rotated. Is brought into contact with the smooth portion 384 (holding region), and the attachment / detachment switching member 350 does not move downward. That is, in this embodiment, the Y-direction movable member 320 does not move when the attachment / detachment switching member 350 is movable, and the attachment / detachment switching member 350 does not move when the Y-direction movable member 320 is movable. .

  As shown in FIG. 10B, when the attachment / detachment switching member 350 moves downward, the pressing slope 350A presses the roller 349 at the tip of the lever 348 of the holding means 340 toward the front side (right side in the figure). Then, the opening / closing member 344 is moved so as to open from the fixing member 342. As a result, the seam welding roller unit 200 is released from being held by the holding means 340 and falls.

  Further, with the opening / closing member 344 opened, the replacement seam welding roller unit 201 is installed between the fixed member 342 and the opening / closing member 344, and the third conversion unit 380 is connected to the third conversion unit 380 in FIG. By rotating the attachment / detachment switching member 350 upward by rotating clockwise, the replacement seam welding roller unit 201 can be held between the holding means.

  As described above, in this embodiment, the seam welding roller unit 200 can be automatically replaced by rotating the third conversion unit 380 by the second roller driving shaft driving unit 630 and moving the attachment / detachment switching member 350. It is possible. In particular, since the distance between the pair of seam welding roller units 201 at the time of replacement is always constant depending on the distance between the Y-direction stationary regions 372B of the second conversion means 370, stable replacement work can be realized.

  The procedure for automatic replacement of the seam welding roller unit 200 will be described in detail as follows. First, the welding head 300 and the carrier 400 are respectively moved so that the seam welding roller unit 200 held by the holding means 340 is opposed to an empty holding table 430 placed on the upper surface of the replacement table 420. Then, the Z-direction movable member 310 is lowered to bring the seam welding roller unit 200 closer to the holding base 430, and then the attachment / detachment switching member 350 is lowered to release the seam welding roller unit 200 from the holding means 340 to hold the holding base 430. Place on top. Next, the Z-direction movable member 310 is raised and the welding head 300 and the carrier 400 are moved so that the holding means 340 is opposed to the replacement seam welding roller unit 201 placed on the holding table 430 of the replacement table 420. . Then, the Z-direction movable member 310 is lowered, and the replacement seam welding roller unit 201 is positioned between the fixing member 342 and the opening / closing member 344 of the holding means 340, and then the attachment / detachment switching member 350 is raised to perform replacement. The seam welding roller unit 201 is held between the holding means 340.

  As described above, in the in-vacuum welding processing apparatus 1 according to the present embodiment, the carrier 400 that moves in the X-axis direction and the welding head 300 that moves in the Y-axis direction are disposed in the vacuum chamber 100, and the welding head Driving means 540 and carrier driving means 740 are arranged outside the vacuum chamber 100. Further, the Z-direction movable member 310 that moves in the Z-axis direction together with the seam welding roller unit 200 and the first conversion means 360 that moves the Z-direction movable member 310 are disposed in the welding head 300 and are connected to the first conversion means 360. The first roller driving shaft 600 is disposed in the vacuum chamber 100 in parallel with the Y-axis direction, and the first roller driving shaft driving means 620 for driving the first roller driving shaft 600 is disposed outside the vacuum chamber. Yes.

For this reason, the vacuum chamber 100 can be made smaller than before, and the manufacturing cost and the maintenance cost can be reduced. Further, since the volume in the vacuum chamber 100 is reduced, the pressure in the vacuum chamber 100 can be reduced in a short time. Further, by individually moving the welding head 300 in the Y direction and the carrier 400 in the X direction individually, the structure becomes simpler and position control is easier than the conventional XY table. The positioning of the seam welding roller unit 200 can be performed at a higher speed and with higher accuracy than before. In addition, since the number of shafts connecting the driving means outside the vacuum chamber 100 and the movable object in the vacuum chamber 100 can be minimized, the sealing performance of the vacuum chamber 100 is improved, and the manufacturing cost and maintenance management cost are reduced. Can be reduced.

  Further, since the carrier 400 moves linearly only in the X direction, for example, the work tray 410 on which the work 10 is placed is received from one side of the vacuum chamber 100 and the work tray 410 is moved from the other side of the vacuum chamber 100 after welding is completed. The structure of carrying out toward a process is employable. By doing in this way, it becomes possible to arrange | position the layout of the whole line containing the in-vacuum welding processing apparatus 1 linearly, and it can be set as an efficient layout.

  Further, the welding head 300 of the in-vacuum welding processing apparatus 1 includes a Y-direction movable member 320 that moves together with the seam welding roller unit 200, and a second conversion means 370 that moves the Y-direction movable member 320, and the second conversion means. A second roller driving shaft 610 connected to 370 is disposed in the vacuum chamber 100 in parallel with the Y-axis direction, and second roller driving shaft driving means 630 for driving the second roller driving shaft 610 is disposed outside the vacuum chamber. Has been established. Therefore, it is possible to cause the seam welding roller unit 200 to perform various operations without arranging an actuator or a motor in the vacuum chamber. Accordingly, many types of workpieces can be processed, and more complicated processing can be performed on the workpiece. Also in this case, it is not necessary to use an expensive vacuum actuator or motor, and it is not necessary to increase the size of the vacuum chamber 100, so that manufacturing costs and maintenance costs can be reduced.

Also, the Z-direction movable member 310 is disposed on each of the two Y-direction movable members 320, and the second conversion means 370 moves the two Y-direction movable members 320 in the Y-axis direction, thereby increasing the distance between the two. Because of the change, workpieces of various sizes can be processed. Moreover, it becomes possible to change the part (welding part) which contacts the workpiece | work 10 of the welding roller 210 side surface, and can extend the lifetime of the welding roller 210. In addition, this reduces the replacement frequency of the welding roller 210, thereby improving the operating rate of the apparatus.

  In addition, the welding head 300 includes an attachment / detachment switching member 350 and third conversion means 380 that moves the attachment / detachment switching member 350, and the Z-direction movable member 310 includes a seam welding roller as the attachment / detachment switching member 350 moves. A holding means 340 for detachably holding the unit 200 is provided. Therefore, it is possible to automatically replace the seam welding roller unit 200 in the vacuum chamber 100 without using an expensive vacuum actuator or the like. Further, since the third converting means 380 is connected to the second roller driving shaft 610, the seam welding roller is not increased without increasing the number of shafts connecting the driving means outside the vacuum chamber 100 and the movable object in the vacuum chamber 100. The unit 200 can be automatically replaceable within the vacuum chamber 100.

  Further, the Y direction guiding area 372A of the guiding groove 372 of the second converting means 370 is formed at a position corresponding to the holding area (smoothing portion 384) of the seam welding roller unit 200 in the third converting means 380, and the third converting means. Since the open region (convex portion 382) of the seam welding roller unit 200 at 380 is formed at a position corresponding to the Y-direction stationary region 372B of the guide groove 372 of the second conversion unit 370, the second conversion unit 370 and the second conversion unit 370 In a state in which the 3 converting means 380 is rotated by the common second roller drive shaft 610 but can be opened by the movement of the attachment / detachment switching member 350, the Y direction movable member 320 is not moved, and the Y direction movable member 320 is moved. In the movable state, it is possible to prevent the release operation by the movement of the attachment / detachment switching member 350. Thereby, the axis | shaft connected to the 2nd conversion means 370 and the 3rd conversion means 380 can be made common by a simple and cheap structure.

  Further, since the in-vacuum welding processing apparatus 1 automatically replaces the seam welding roller unit 200 held by the holding means 340 and the replacement seam welding roller unit 201 disposed in the vacuum chamber 100, In addition, it is possible to complete an extremely long exchange operation in a short time, and the operating rate of the apparatus can be dramatically improved. Further, since it is possible to replace the seam welding roller unit 200 while keeping the inside of the vacuum chamber 100 in a vacuum atmosphere, the operation preparation after the replacement becomes a short time, and more workpieces 10 are continuously processed than before. be able to.

  In addition, since the replacement seam welding roller unit 201 is placed on the carrier 400 (or on a table interlocked with the carrier), the positioning when the seam welding roller unit 200 is replaced is determined by the welding head 300 and the carrier 400. This can be done by a combination of movements. That is, the seam welding roller unit 200 can be automatically replaced without increasing the number of shafts that connect the driving means outside the vacuum chamber 100 and the movable object in the vacuum chamber 100.

  Further, since the seam welding roller unit 200 is a seam welding roller unit including a roller electrode (welding roller 210), the seam welding of an electronic component package or the like can be efficiently performed in a vacuum atmosphere with a device that is less expensive than the conventional one. As a result, the productivity of electronic parts and the like can be improved and the production cost can be reduced.

  In this embodiment, the X-axis direction and the Y-axis direction are set in the horizontal plane, and the Z-axis direction is set in the vertical direction. However, the present invention is not limited to this, and X, Y, The Z-axis direction may be set to other directions.

  Further, in this embodiment, the Y-direction movable member 320 is disposed so as to be movable in the Y-axis direction, but the present invention is not limited to this, and the Y-direction movable member 320 is in the X-axis direction or other. It may be configured to move in this direction. Moreover, you may comprise the Y direction movable member 320 so that rotation is possible.

  Moreover, although the in-vacuum welding processing apparatus 1 which concerns on this embodiment is provided with the Z direction movable member 310 and the Y direction movable member 320, respectively, this invention is not limited to this, Z direction movable One member 310 and three or more Y-direction movable members 320 may be provided.

  In this embodiment, the Y-direction movable member 320 is disposed in the welding head 300, and the Z-direction movable member 310 is disposed in the Y-direction movable member 320. However, the present invention is not limited to this. Instead, the Z-direction movable member 310 may be disposed on the welding head 300, and the Y-direction movable member 320 may be disposed on the Z-direction movable member 310.

  In the present embodiment, the first conversion unit 360, the second conversion unit 370, and the third conversion unit 380 are each configured by a rotating cam. However, the present invention is not limited to this, and the first conversion unit 360, The conversion unit 360, the second conversion unit 370, and the third conversion unit 380 may be configured by other mechanisms such as a rack and pinion mechanism.

  Further, in the present embodiment, the second conversion unit 370 and the third conversion unit 380 are shown only when the second roller drive shaft 610 is shared, but the first conversion unit 360 and the third conversion unit 380 are The first roller drive shaft 600 may be shared. In this case, the rotation phase range of the holding region of the third conversion unit 380 is made to correspond to the rotation phase range of the welding execution region of the first conversion unit 360, and the welding non-execution region of the first conversion unit 360 is matched. The rotational phase range of the open area of the third conversion means 380 may be made to correspond to the rotational phase range.

  In this embodiment, the replacement seam welding roller unit 201 is arranged on the replacement table 420 provided in the carrier 400. However, the present invention is not limited to this, and the replacement seam welding roller unit 201 is provided. You may make it arrange | position in another place. Further, the exchange table 420 may be configured to be movable independently from the carrier 400.

  In the present embodiment, the seam welding roller unit 200 is a seam welding roller unit. However, the present invention is not limited to this, and the seam welding roller unit 200 is a welding unit using other methods and structures. There may be.

  Although the embodiment of the present invention has been described above, the in-vacuum welding processing apparatus of the present invention is not limited to the above-described embodiment, and various modifications are made without departing from the scope of the present invention. Of course you get.

  The present invention can be used in the field of manufacture of electronic equipment, electronic parts or other various articles, or physical distribution.

It is a front view of the in-vacuum welding processing apparatus which concerns on embodiment of this invention. FIG. 3 is a plan view of the in-vacuum welding processing apparatus. It is a left view of the in-vacuum welding processing apparatus. (A) is the front view which expanded and showed the mode of seam welding by a vacuum welding processing apparatus, (b) is the left view which expanded and showed the mode of seam welding by a vacuum welding processing apparatus. . It is the front view which made a part of welding head into the section. It is the top view which made a part of welding head the cross section. It is the left view which made some welding heads into the section. (A) And (b) It is the front view which showed the mode of the movement of a Y direction movable member. (A) And (b) It is the left view which showed the mode of the movement of a Z direction movable member . It is the left view which showed a mode that the seam welding roller unit was released from (a) and (b) holding means.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Vacuum welding processing apparatus 10 ... Workpiece 100 ... Vacuum chamber 200 ... Processing means 201 ... Replacement processing means 300 ... Welding head 310 ... Z direction movable member 320. ··· Y-direction movable member 340 ··· holding means 350 ··· attachment / detachment switching member 360 ··· first conversion means 370 ··· second conversion means 372 ··· guide groove 372A ··· Y-direction guide region 372B ... Y-direction stationary region 380 ... third conversion means 382 ... convex part 384 ... smooth part 400 ... carrier 540 ... welding head drive means 600 ... first roller drive shaft 610 ... second roller drive shaft 620 ... first roller drive shaft drive means 630 ... second roller drive shaft drive means 740 ... carrier drive means

Claims (7)

A vacuum chamber that keeps its interior in a vacuum atmosphere;
A carrier disposed in the vacuum chamber and capable of placing a work and moving in the X direction;
Carrier driving means arranged outside the vacuum chamber and moving the carrier;
A welding head disposed in the vacuum chamber and movable in a Y direction perpendicular to the X direction;
Welding head driving means arranged outside the vacuum chamber to move the welding head;
The X direction and the Y direction perpendicular Z direction, and is a movable relative to the Y direction, and two welding rollers for welding the workpiece at the welding head,
A first roller drive shaft disposed in the vacuum chamber in parallel with the Y direction;
First roller driving shaft driving means disposed outside the vacuum chamber and driving the first roller driving shaft;
A first conversion means disposed on the welding head for converting the power of the first roller drive shaft into Z-direction movement power of the welding roller;
A second roller drive shaft disposed in the vacuum chamber in parallel with the Y direction;
Second roller driving shaft driving means disposed outside the vacuum chamber and driving the second roller driving shaft;
Second converting means for converting the power of the second roller drive shaft into the Y-direction moving power of the welding roller in the welding head to change the distance between the two welding rollers;
Holding means for detachably holding the welding roller by an opening / closing member provided in the welding head;
A detachable switching member for opening and closing the opening and closing member of the holding means;
A third conversion means disposed in the welding head and configured to convert the power of the first roller drive shaft or the second roller drive shaft into power of the attachment / detachment switching member;
An in-vacuum welding processing apparatus comprising: The third conversion means is adapted to convert the power of the second roller drive shaft,
The second converting means moves the welding roller in the Y direction according to the rotation phase of the second roller drive shaft, and moves the welding roller in the Y direction regardless of the rotation phase of the second roller drive shaft. Has a Y-direction stationary region that is not moved to
The third converting means has an open area where the welding roller is opened by the rotational phase of the second roller drive shaft, and a holding area where the welding roller is maintained in the held state by the rotational phase of the second roller drive shaft. And
The range of the Y direction guiding area of the second converting means is included in the range of the holding area of the third converting means,
The range of the open area of the third conversion means is included in the range of the Y-direction stationary area of the second conversion means,
The in-vacuum welding processing apparatus according to claim 1 . The second conversion means and the third conversion means are cams that rotate together with the second roller drive shaft,
The in-vacuum welding processing apparatus according to claim 1 or 2 . The third conversion means is adapted to convert the power of the first roller drive shaft,
The first conversion means has a welding execution region in which the welding roller is lowered to a weldable state by the rotational phase of the first roller drive shaft, and the welding roller cannot be welded by the rotational phase of the first roller drive shaft. Has a welding non-execution area that rises by
The third conversion means is an open region for maintaining the welding roller in an open state by the rotational phase of the first roller drive shaft, and a holding for maintaining the welding roller in a held state by the rotational phase of the first roller drive shaft. Has an area,
The range of the welding execution area of the first conversion means is included in the range of the holding area of the third conversion means,
The range of the open area of the third conversion means is configured to be included in the range of the welding non-execution area of the first conversion means,
The in-vacuum welding processing apparatus according to claim 1 . The first conversion means and the third conversion means are cams that rotate together with the first roller drive shaft.
The in-vacuum welding processing apparatus according to claim 1 or 4 . The replacement welding roller is disposed in the vacuum chamber,
The welding roller held by the holding means and the replacement welding roller arranged in the vacuum chamber are automatically exchanged,
The in-vacuum welding processing apparatus according to any one of claims 1 to 5 . The welding roller for replacement is placed on an exchange table movable in the X direction by the carrier driving means,
The in-vacuum welding processing apparatus according to claim 6 .

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