TWI315288B - Substrate buffer clamp - Google Patents
Substrate buffer clampInfo
- Publication number
- TWI315288B TWI315288B TW94143282A TW94143282A TWI315288B TW I315288 B TWI315288 B TW I315288B TW 94143282 A TW94143282 A TW 94143282A TW 94143282 A TW94143282 A TW 94143282A TW I315288 B TWI315288 B TW I315288B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate buffer
- buffer clamp
- clamp
- substrate
- buffer
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94143282A TWI315288B (en) | 2005-12-08 | 2005-12-08 | Substrate buffer clamp |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94143282A TWI315288B (en) | 2005-12-08 | 2005-12-08 | Substrate buffer clamp |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200722355A TW200722355A (en) | 2007-06-16 |
TWI315288B true TWI315288B (en) | 2009-10-01 |
Family
ID=45073055
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94143282A TWI315288B (en) | 2005-12-08 | 2005-12-08 | Substrate buffer clamp |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI315288B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6248977B2 (en) * | 2015-05-08 | 2017-12-20 | 日新イオン機器株式会社 | Substrate holding device |
-
2005
- 2005-12-08 TW TW94143282A patent/TWI315288B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW200722355A (en) | 2007-06-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |