CN112251729B - Glass substrate frame for vacuum coating, coating system thereof and transmission method of coating system - Google Patents
Glass substrate frame for vacuum coating, coating system thereof and transmission method of coating system Download PDFInfo
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- CN112251729B CN112251729B CN202011144981.9A CN202011144981A CN112251729B CN 112251729 B CN112251729 B CN 112251729B CN 202011144981 A CN202011144981 A CN 202011144981A CN 112251729 B CN112251729 B CN 112251729B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B80/00—Architectural or constructional elements improving the thermal performance of buildings
- Y02B80/22—Glazing, e.g. vaccum glazing
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
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- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
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- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides a glass substrate frame for vacuum coating, a coating system thereof and a transmission method of the coating system, wherein the glass substrate frame comprises a substrate frame, an upper rotary seat, a lower rotary seat and a vacuum driving mechanism, the substrate frame comprises cross beams and vertical beams, the plurality of cross beams and the vertical beams divide the substrate frame into a glass mounting interval and a vacuum driving mechanism interval, and a spring sleeve is movably mounted in a telescopic mechanism; the vacuum driving mechanism is arranged in the space of the vacuum driving mechanism, the vacuum driving mechanism comprises a barrel, and a plurality of driving synchronous belt pulleys are uniformly arranged on the driving connecting rod at intervals.
Description
Technical Field
The invention relates to the technical field of vacuum coating devices, in particular to a glass substrate frame for vacuum coating, a coating system thereof and a transmission method of the coating system.
Background
A glass substrate frame for vacuum coating and a coating system thereof and a transmission method of the coating system belong to a glass substrate transmission technology and key process equipment in vacuum coating, the glass substrate frame for vacuum coating of the device comprises at least one concave frame containing area used for loading a glass substrate with closed bottom surface or hollow bottom surface, the coating system with the glass substrate frame also comprises a glass substrate frame transmission device and a coating device arranged in parallel with the glass substrate frame, the transmission method using the glass substrate frame is that the glass substrate frame obliquely stands on the glass substrate frame transmission device, the edge of the frame containing area forms an inclination angle with the horizontal line of the bottom edge of the glass substrate frame in the horizontal direction, the glass substrate frame for vacuum coating and the coating system thereof have simple structures, the glass substrate frame conveying method is used for replacing a clamp by arranging the concave frame accommodating area structure of the glass substrate frame and the respective position relation of the glass substrate frame and the concave frame accommodating area to realize stable conveying of the glass substrate, and the problems of low coating yield such as glass substrate coating shadow, small particle pollution and the like caused by the influence of the clamp are solved.
However, the glass substrate holder for vacuum coating, the coating system thereof and the conveying method of the coating system still have the following obvious defects in the using process: 1. according to the device, the glass leans against the inside of the frame accommodating area in an inclined mode, so that one surface of the glass leans against the frame accommodating area, the corners of the glass are easy to break and the surface of the glass is easy to scratch due to the installation mode, and meanwhile, after the glass is coated, the glass is difficult to take down from the frame accommodating area due to the fact that the glass is tightly attached to the frame accommodating area, and therefore the loading and unloading progress is influenced; 2. the frame accommodating area of the device enables the vacuum coating chamber to coat only one surface of the glass, and when double-sided coating is needed, the device cannot meet the coating requirement, and the use scene is limited.
Disclosure of Invention
The present invention is directed to a glass substrate holder for vacuum coating, a coating system thereof and a method for transporting the coating system, so as to solve the problems of the prior art.
In order to achieve the purpose, the invention provides the following technical scheme:
a glass substrate frame for vacuum coating comprises a substrate frame, an upper rotary seat, a lower rotary seat and a vacuum driving mechanism, wherein the substrate frame comprises a plurality of cross beams and vertical beams, the plurality of cross beams and the vertical beams divide the substrate frame into a glass mounting interval and a vacuum driving mechanism interval, the glass mounting intervals are arranged in an array manner, the upper rotary seat and the lower rotary seat are respectively and movably mounted on the cross beams above and below the glass mounting intervals, and the upper rotary seat and the lower rotary seat are arranged in a one-to-one correspondence manner;
the upper rotary bases comprise upper rotary discs, glass fixing elastic pieces are fixedly mounted at the bottoms of the upper rotary discs, the upper rotary discs are movably inserted into spring sleeves through upper rotary shafts, return springs are arranged in the spring sleeves, and the spring sleeves are movably mounted in the telescopic mechanisms;
the lower rotary bases comprise lower rotary tables, glass fixing elastic pieces are fixedly mounted at the upper parts of the lower rotary tables, the bottoms of the lower rotary tables are movably mounted in spring sleeves through lower rotary shafts, return springs are arranged in the spring sleeves, and driven synchronizing wheels are fixedly mounted at one ends of the lower rotary shafts, far away from the lower rotary tables;
the vacuum driving mechanism is arranged in a gap of the vacuum driving mechanism, the vacuum driving mechanism comprises a barrel, an inflatable telescopic air bag is fixedly arranged on one side in the barrel, an extrusion plate is fixedly arranged at the telescopic end of the inflatable telescopic air bag, a telescopic rack is fixedly arranged at the upper end of the extrusion plate, the telescopic rack is movably matched with a driving bevel gear disc, the driving bevel gear disc is meshed with a driven bevel gear, the driven bevel gear is fixedly connected onto a driving connecting rod, a plurality of driving synchronous pulleys are uniformly arranged on the driving connecting rod at intervals, the driving synchronous pulleys are all connected with a plurality of driven synchronous wheels arranged in the horizontal direction through synchronous belts, and the driven bevel gear, the driving connecting rod, the synchronous belts and the driven synchronous wheels are all arranged in a substrate frame;
the telescopic mechanism comprises a telescopic sleeve, a spring sleeve of the upper rotary seat is movably arranged in the telescopic sleeve, and one side of the telescopic sleeve movably abuts against the spring sleeve through a threaded knob;
blocking blocks are fixedly arranged on one sides of the downward-rotating turntables and are movably connected with blocking rods correspondingly arranged on the cross beams;
a sliding rod is fixedly installed in the barrel, a through hole for the sliding rod to pass through is formed in the extrusion plate, and a speed reduction spring is sleeved on a rod body on one side, away from the inflatable telescopic air bag, of the sliding rod;
the beam at the top end of the substrate frame is provided with a magnet mounting groove, and substrate frame positioning magnets are uniformly arranged in the magnet mounting groove.
A coating system comprises a substrate frame system for bearing glass, wherein the substrate frame system adopts the glass substrate frame.
A transmission method of a film coating system adopts the glass substrate frame and comprises the following steps:
the method comprises the following steps: the working personnel install the glass to be coated in each glass installation interval through the glass fixing elastic sheet;
step two: the loaded glass to be coated is conveyed to the interior of the magnetron sputtering chamber through a grooved pulley conveying mechanism at the bottom of the vacuum coating chamber, and the upper part of the substrate frame is attracted through an attraction magnetic block arranged at the top of the magnetron sputtering chamber, so that the substrate frame is prevented from toppling;
step three: after entering a vacuum coating chamber, coating the glass surface on one side by a magnetron sputtering source of a rotary cathode target or a plane cathode target;
step four: because the inside of the magnetron sputtering chamber is in a relatively vacuum environment, the air inside the magnetron sputtering chamber is thin, so that the pressure inside and outside the inflatable telescopic air bag is unbalanced after entering the inside of the vacuum chamber, the inflatable telescopic air bag expands to drive the extrusion plate to move, the extrusion plate moves to drive the telescopic rack to move, in a period of time when the telescopic rack moves and is not meshed with the driving bevel wheel disc, the magnetron sputtering source of the rotating cathode target or the plane cathode target carries out film coating on the glass at one side, when the telescopic rack moves to be meshed with the driving bevel wheel disc, the driven bevel wheel, the driving connecting rod and the driving synchronous belt wheel are driven to rotate along with the continuous movement of the telescopic rack, so as to drive the glass to turn over, when the glass rotates 180 degrees, under the action of the stop block and the stop rod, the glass stops rotating, and the surface of the glass on the other side is coated with a film along with the continuous movement of the substrate frame;
step five: after the double-sided coating of the glass is finished, the substrate frame is moved out of the magnetron sputtering chamber under the drive of the conveying mechanism, the air pressure inside and outside the inflatable telescopic air bag is kept balanced, the upper rotary seat and the lower rotary seat rotate 180 degrees under the reverse movement of the return spring and the telescopic rack, and at the moment, the glass which is finished with the double-sided coating is dismounted by a worker, so that a coating process is finished.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, the glass to be coated is clamped by the upper and lower glass fixing elastic sheets, so that the surface of the glass is not scratched, and meanwhile, the risk of damage of the corners of the glass is reduced;
the invention utilizes the characteristics of a vacuum environment, sets the expansion of the inflatable telescopic air bag, and completes the 180-degree rotation of the glass without the drive of a motor through the internal and external air pressure difference under the conditions of vacuum and atmospheric pressure, so that the glass can be subjected to double-sided film coating, the double-sided film coating can be carried out without carrying out reverse side loading and unloading again, and the film coating efficiency is improved.
The glass to be coated is clamped by the upper and lower glass fixing elastic sheets, so that the surface of the glass is not scratched, the risk of corner damage of the glass is reduced, the 180-degree rotation of the glass is completed without being driven by a motor through the internal and external air pressure difference under the conditions of vacuum and atmospheric pressure by utilizing the characteristics of a vacuum environment, the double-sided coating of the glass can be realized, and the loading and unloading efficiency and the coating efficiency of the glass are improved.
Drawings
FIG. 1 is a perspective view of the overall structure of the present invention;
FIG. 2 is a schematic view of a glass mounting spacer structure of the present invention;
FIG. 3 is a schematic view of the driving link connection structure of the present invention;
FIG. 4 is a schematic view of the internal structure of the vacuum driving mechanism of the present invention;
fig. 5 is an enlarged schematic view of the region a of the present invention.
In the figure: the device comprises a substrate frame 1, an upper rotary table 2, a lower rotary table 3, a vacuum driving mechanism 4, a cross beam 5, a vertical beam 6, a glass mounting interval 7, a vacuum driving mechanism interval 8, an upper rotary table 9, a glass fixing elastic sheet 10, an upper rotating shaft 11, a spring sleeve 12, a telescopic mechanism 13, a lower rotary table 14, a lower rotating shaft 15, a driven synchronous wheel 16, a cylinder 17, an inflatable telescopic air bag 18, a squeezing plate 19, a telescopic rack 20, a driving bevel gear disc 21, a driven bevel gear 22, a driving connecting rod 23, a driving synchronous pulley 24, a synchronous belt 25, a telescopic sleeve 26, a threaded knob 27, a blocking block 28, a blocking rod 29, a sliding rod 30, a speed reducing spring 31, a magnet mounting groove 32 and a substrate frame positioning magnet 33.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example (b):
referring to fig. 1-5, the present invention provides a technical solution:
a glass substrate frame for vacuum coating comprises a substrate frame 1, an upper rotary seat 2, a lower rotary seat 3 and a vacuum driving mechanism 4, wherein the substrate frame 1 comprises a plurality of cross beams 5 and vertical beams 6, the substrate frame 1 is divided into a glass mounting interval 7 and a vacuum driving mechanism interval 8 by the cross beams 5 and the vertical beams 6, the glass mounting intervals 7 are arranged in an array manner, the upper rotary seat 2 and the lower rotary seat 3 are respectively and movably mounted on the cross beams 5 above and below the glass mounting interval 7, the upper rotary seat 2 and the lower rotary seat 3 are arranged in a one-to-one correspondence manner, the upper rotary seat 2 and the lower rotary seat 3 are used for clamping glass to be coated, and the vacuum driving mechanism 4 is used for operating the lower rotary seat 3 to rotate;
the upper rotary bases 2 comprise upper rotary tables 9, glass fixing elastic sheets 10 are fixedly installed at the bottoms of the upper rotary tables 9, the upper rotary tables 9 are movably inserted into spring sleeves 12 through upper rotary shafts 11, return springs are arranged in the spring sleeves 12, the spring sleeves 12 are movably installed in telescopic mechanisms 13, the spring sleeves 12 can rotate in the telescopic mechanisms 13, the heights of the glass fixing elastic sheets 10 are adjusted through the stretching of the spring sleeves 12, the clamping requirements of glass with different sizes are met, the return springs are used for keeping the upper rotary tables 9 parallel to the direction of the cross beam 5 at two ends of the glass fixing elastic sheets 10 under the effect of no external force, and therefore the upper rotary tables 9 are prevented from rotating unnecessarily in the installation process, and the installation of the glass is prevented from being influenced;
the lower rotary bases 3 comprise lower rotary bases 14, glass fixing elastic pieces 10 are fixedly mounted on the upper portions of the lower rotary bases 14, the bottoms of the lower rotary bases 14 are movably mounted in the spring sleeves 12 through lower rotary shafts 15, return springs are arranged in the spring sleeves 12, driven synchronizing wheels 16 are fixedly mounted at the ends, far away from the lower rotary bases 14, of the lower rotary shafts 15, the driven synchronizing wheels 16 rotate to drive the lower rotary bases 14 to rotate, the lower rotary bases 14 rotate to drive glass to rotate, double-sided film coating operation is further conducted, the return springs arranged in the spring sleeves 12 of the lower rotary shafts 15 are used for keeping the positions of the lower rotary bases 14 under the action of no external force, and therefore the lower rotary bases 14 cannot easily rotate in the installation process of the glass;
vacuum actuating mechanism 4 installs in vacuum actuating mechanism interval 8, vacuum actuating mechanism 4 includes barrel 17, the inside one side fixed mounting of barrel 17 has aerifys flexible gasbag 18, the flexible end fixed mounting who aerifys flexible gasbag 18 has stripper plate 19, stripper plate 19 upper end fixed mounting has flexible rack 20, flexible rack 20 and initiative helical gear dish 21 clearance fit, initiative helical gear dish 21 meshes with driven helical gear 22, driven helical gear 22 fixed connection is on drive connecting rod 23, the interval evenly is provided with a plurality of initiative synchronous pulley 24 on the drive connecting rod 23, initiative synchronous pulley 24 all is connected with a plurality of driven synchronizing wheel 16 that the horizontal direction set up through hold-in range 25, driven helical gear 22, drive connecting rod 23, hold-in range 25 and driven synchronizing wheel 16 all set up inside base plate frame 1.
Because the inside of the magnetron sputtering chamber is in a relatively vacuum environment, the air inside the magnetron sputtering chamber is thin, so that the pressure inside and outside the inflatable telescopic air bag 18 is unbalanced after entering the inside of the vacuum chamber, and the inflatable telescopic air bag 18 expands to drive the extrusion plate 19 to move, the extrusion plate 19 moves to drive the telescopic rack 20 to move, in a period of time when the telescopic rack 20 moves and is not meshed with the driving bevel gear disc 21, the magnetron sputtering source of the rotary cathode target or the planar cathode target carries out film coating on one side of the glass, when the telescopic rack 20 moves to be meshed with the driving bevel gear disc 21, the driven bevel gear 22, together with the driving connecting rod 23 and the driving synchronous pulley 24, are driven to rotate along with the continuous movement of the telescopic rack 20, so as to drive the glass to turn over, and when the glass rotates 180 degrees, the glass stops rotating under the action of the blocking block 28 and the blocking rod 29, and at the same time, along with the continuous movement of the substrate frame 1, coating the glass surface on the other side;
the telescopic mechanism 13 comprises a telescopic sleeve 26, the spring sleeve 12 of the upper screwing seat 2 is movably mounted in the telescopic sleeve 26, one side of the telescopic sleeve 26 is movably abutted against the spring sleeve 12 through a thread knob 27, the spring sleeve 12 is made to stretch out and draw back inside the telescopic sleeve 26 through loosening the thread knob 27, and the spring sleeve 12 is fixed through fastening the thread knob 27.
The lower rotary table 14 is fixedly provided with a blocking block 28 on one side, the blocking block 28 is movably connected with a blocking rod 29 correspondingly arranged on the beam 5, and the lower rotary table 14 is limited to rotate excessively through the matching of the blocking block 28 and the blocking rod 29, so that the lower rotary table 14 is kept after rotating for 180 degrees, and the reverse side coating is facilitated.
A sliding rod 30 is fixedly installed in the cylinder 17, a through hole for the sliding rod 30 to pass through is formed in the extrusion plate 19, a speed reducing spring 31 is sleeved on a rod body on one side, away from the inflatable telescopic air bag 18, of the sliding rod 30, and resistance provided by the speed reducing spring 31 enables the extrusion plate 19 to move slowly in a relative vacuum state, so that the contact time of the telescopic rack 20 and the driving bevel gear disc 21 is delayed, and sufficient time for coating on the front surface of glass is guaranteed.
A coating system comprises a substrate frame system for bearing glass, wherein the substrate frame system adopts the glass substrate frame.
A transmission method of a film coating system adopts the glass substrate frame and comprises the following steps:
the method comprises the following steps: the worker installs the glass to be coated in each glass installation interval 7 through the glass fixing elastic sheet 10;
step two: the loaded glass to be coated is conveyed to the interior of the magnetron sputtering chamber through a grooved pulley conveying mechanism at the bottom of the vacuum coating chamber, and the upper part of the substrate frame 1 is attracted through an attraction magnetic block arranged at the top of the magnetron sputtering chamber, so that the substrate frame 1 is prevented from toppling;
step three: after entering a vacuum coating chamber, coating the glass surface on one side by a magnetron sputtering source of a rotary cathode target material or a planar cathode target material;
step four: because the inside of the magnetron sputtering chamber is in a relatively vacuum environment, the air inside the chamber is thin, the pressure inside and outside the inflatable telescopic air bag 18 is unbalanced after entering the inside of the vacuum chamber, so that the inflatable telescopic air bag 18 expands to drive the extrusion plate 19 to move, the extrusion plate 19 moves to drive the telescopic rack 20 to move, in a period of time when the telescopic rack 20 moves but is not meshed with the driving bevel gear disc 21, the magnetron sputtering source of the rotating cathode target material or the plane cathode target material coats one side of glass, when the telescopic rack 20 moves to be meshed with the driving bevel gear disc 21, the driven bevel gear 22, together with the driving connecting rod 23 and the driving synchronous belt wheel 24, are driven to rotate along with the continuous movement of the telescopic rack 20, so as to drive the glass to overturn, when the glass rotates 180 degrees, the glass stops rotating under the action of the blocking block 28 and the blocking rod 29, and at the same time, along with the continuous movement of the substrate frame 1, coating the glass surface on the other side;
step five: after the double-sided coating of glass is finished, the substrate frame 1 is moved out of the magnetron sputtering chamber under the drive of the conveying mechanism, the air pressure inside and outside the inflatable telescopic air bag 18 is kept balanced, the upper rotary seat 2 and the lower rotary seat 3 rotate by 180 degrees under the reverse movement of the return spring and the telescopic rack 20, and at the moment, a worker unloads the glass which is finished with double-sided coating, so that a coating process is finished.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (3)
1. The utility model provides a vacuum coating's glass substrate frame, includes substrate frame (1), top swivel mount (2), lower swivel mount (3) and vacuum actuating mechanism (4), its characterized in that: the glass substrate rack comprises a substrate rack body (1) and a plurality of glass mounting intervals (7) and vacuum driving mechanism intervals (8), wherein the substrate rack body (1) is divided into a plurality of cross beams (5) and vertical beams (6) by the cross beams (5) and the vertical beams (6), the glass mounting intervals (7) are arranged in an array mode, upper rotary bases (2) and lower rotary bases (3) are movably mounted on the cross beams (5) above and below the glass mounting intervals (7) respectively, and the upper rotary bases (2) and the lower rotary bases (3) are arranged in a one-to-one corresponding mode;
the upper rotating bases (2) comprise upper rotating discs (9), glass fixing elastic sheets (10) are fixedly installed at the bottoms of the upper rotating discs (9), the upper rotating discs (9) are movably inserted into spring sleeves (12) through upper rotating shafts (11), return springs are arranged in the spring sleeves (12), and the spring sleeves are movably installed in telescopic mechanisms (13);
the lower rotary bases (3) comprise lower rotary tables (14), glass fixing elastic sheets (10) are fixedly mounted on the upper portions of the lower rotary tables (14), the bottoms of the lower rotary tables (14) are movably mounted in the spring sleeves (12) through lower rotary shafts (15), return springs are arranged in the spring sleeves (12), and driven synchronizing wheels (16) are fixedly mounted at one ends, far away from the lower rotary tables (14), of the lower rotary shafts (15);
the vacuum driving mechanism (4) is installed in a vacuum driving mechanism interval (8), the vacuum driving mechanism (4) comprises a cylinder body (17), an inflatable telescopic air bag (18) is fixedly installed on one side inside the cylinder body (17), a squeezing plate (19) is fixedly installed at the telescopic end of the inflatable telescopic air bag (18), a telescopic rack (20) is fixedly installed at the upper end of the squeezing plate (19), the telescopic rack (20) is movably matched with a driving bevel gear disc (21), the driving bevel gear disc (21) is meshed with a driven bevel gear (22), the driven bevel gear (22) is fixedly connected onto a driving connecting rod (23), a plurality of driving synchronous pulleys (24) are evenly arranged on the driving connecting rod (23) at intervals, and the driving synchronous pulleys (24) are connected with a plurality of driven synchronous wheels (16) arranged in the horizontal direction through synchronous belts (25), the driven bevel gear (22), the driving connecting rod (23), the synchronous belt (25) and the driven synchronous wheel (16) are all arranged in the substrate frame (1);
the telescopic mechanism (13) comprises a telescopic sleeve (26), a spring sleeve (12) of the upper rotating base (2) is movably arranged in the telescopic sleeve (26), and one side of the telescopic sleeve (26) is movably abutted against the spring sleeve (12) through a threaded knob (27);
blocking blocks (28) are fixedly arranged on one sides of the lower rotary tables (14), and the blocking blocks (28) are movably connected with blocking rods (29) correspondingly arranged on the cross beam (5);
a sliding rod (30) is fixedly installed in the cylinder body (17), a through hole for the sliding rod (30) to pass through is formed in the extrusion plate (19), and a speed reduction spring (31) is sleeved on a rod body on one side, far away from the inflatable telescopic air bag (18), of the sliding rod (30);
the transverse beam (5) at the top end of the substrate frame (1) is provided with a magnet mounting groove (32), and substrate frame positioning magnets (33) are uniformly arranged in the magnet mounting groove (32).
2. A coating system, including a substrate holder system for holding glass, characterized in that: the substrate holder system using the glass substrate holder according to claim 1.
3. A method of transferring a coating system using the glass substrate holder according to claim 1, comprising the steps of:
the method comprises the following steps: the worker installs the glass to be coated in each glass installation interval (7) through the glass fixing elastic sheet (10);
step two: the loaded glass to be coated is conveyed to the interior of the magnetron sputtering chamber through a grooved pulley conveying mechanism at the bottom of the vacuum coating chamber, and the upper part of the substrate frame (1) is attracted through an attraction magnetic block arranged at the top of the magnetron sputtering chamber, so that the substrate frame (1) is prevented from toppling;
step three: after entering a vacuum coating chamber, coating the glass surface on one side by a magnetron sputtering source of a rotary cathode target material or a planar cathode target material;
step four: because the inside of the magnetron sputtering chamber is in a relatively vacuum environment, the air inside the magnetron sputtering chamber is thin, the pressure inside and outside the inflatable telescopic air bag (18) is unbalanced after entering the inside of the vacuum chamber, so that the inflatable telescopic air bag (18) expands to drive the extrusion plate (19) to move, the extrusion plate (19) moves to drive the telescopic rack (20) to move, in a period of time when the telescopic rack (20) moves but is not meshed with the driving bevel gear disc (21), at the moment, the magnetron sputtering source for rotating the cathode target or the planar cathode target carries out film coating on glass on one side, when the telescopic rack (20) moves to be meshed with the driving bevel gear disc (21), along with the continuous movement of the telescopic rack (20), the driven bevel gear (22) and the driving connecting rod (23) and the driving synchronous belt wheel (24) are driven to rotate, so as to drive the glass to turn over, and when the glass rotates 180 degrees, under the action of the stop block (28) and the stop rod (29), the glass stops rotating, and the surface of the glass on the other side is coated with a film along with the continuous movement of the substrate frame (1);
step five: after the double-sided coating of glass is completed, the substrate frame (1) is moved out of the magnetron sputtering chamber under the drive of the conveying mechanism, the air pressure inside and outside the inflatable telescopic air bag (18) is kept balanced, the upper rotary seat (2) and the lower rotary seat (3) rotate around 180 degrees under the reverse movement of the return spring and the telescopic rack (20), and at the moment, the glass which is subjected to double-sided coating is dismounted by a worker to complete a coating process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011144981.9A CN112251729B (en) | 2020-10-23 | 2020-10-23 | Glass substrate frame for vacuum coating, coating system thereof and transmission method of coating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011144981.9A CN112251729B (en) | 2020-10-23 | 2020-10-23 | Glass substrate frame for vacuum coating, coating system thereof and transmission method of coating system |
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| Publication Number | Publication Date |
|---|---|
| CN112251729A CN112251729A (en) | 2021-01-22 |
| CN112251729B true CN112251729B (en) | 2022-08-30 |
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| CN202011144981.9A Active CN112251729B (en) | 2020-10-23 | 2020-10-23 | Glass substrate frame for vacuum coating, coating system thereof and transmission method of coating system |
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| CN112981506A (en) * | 2021-02-09 | 2021-06-18 | 苏州晶洲装备科技有限公司 | Electrochemical deposition equipment |
| CN113278943B (en) * | 2021-05-24 | 2023-04-28 | 南京凯泽瑞兹光电科技有限公司 | High-uniformity vacuum coating machine for large-caliber high-curvature optical lens |
| CN113789501B (en) * | 2021-09-09 | 2023-07-25 | 比尔安达(上海)润滑材料有限公司 | Method and system for forming multi-nano coating on surface of shaver cap |
| CN114345857B (en) * | 2021-12-13 | 2023-05-23 | 凯盛科技股份有限公司蚌埠华益分公司 | Device and method for low-temperature aluminizing magnetic control coating |
| CN114481061B (en) * | 2021-12-26 | 2023-10-27 | 凯盛科技股份有限公司蚌埠华益分公司 | Glass continuous ITO coating equipment |
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| CN105316641B (en) * | 2015-11-09 | 2019-05-14 | 信义光伏产业(安徽)控股有限公司 | A kind of film plating substrate frame and vacuum coating equipment |
| CN105483637A (en) * | 2016-03-02 | 2016-04-13 | 凯盛信息显示材料(洛阳)有限公司 | Glass vacuum plated substrate frame |
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| CN110128022B (en) * | 2019-05-10 | 2024-02-20 | 吉林大学 | Large-scale curved glass vacuum sputtering coating device |
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| RU2015120001A (en) * | 2015-05-27 | 2016-12-20 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана" (МГТУ им. Н.Э. Баумана) | Carousel type installation for magnetron sputtering of multilayer coatings and a method of magnetron sputtering of equal thickness nanocoating |
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