CN205839121U - A kind of glass substrate loading attachment - Google Patents
A kind of glass substrate loading attachment Download PDFInfo
- Publication number
- CN205839121U CN205839121U CN201620741737.3U CN201620741737U CN205839121U CN 205839121 U CN205839121 U CN 205839121U CN 201620741737 U CN201620741737 U CN 201620741737U CN 205839121 U CN205839121 U CN 205839121U
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- Prior art keywords
- glass substrate
- window
- framework
- directive wheel
- loading attachment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a kind of glass substrate loading attachment, including framework and actuating device, actuating device includes least one set guidance set and least one set transmission component；Being provided with at least one window on framework, four bases of window are provided with limit chamfering, and the top of framework is provided with the groove of connection window top margin, is provided with support platform at four angles of bottom of window；Guidance set includes that left directive wheel and right directive wheel, left directive wheel and right directive wheel lay respectively at left side and the right side of framework, and left directive wheel and right directive wheel are respectively relative to the left side of framework and right edge has gap；Transmission component includes Left Drive wheel and right drive, the left side bottom Left Drive wheel and right drive support frame respectively and right side.This utility model improves the utilization rate of glass substrate area, and uniformity is good, glass substrate arris not depositional coating, glass substrate do not have collapse limit and scratch phenomenon, be greatly improved the production yield of glass substrate.
Description
Technical field
This utility model relates to a kind of glass substrate loading attachment.
Background technology
Sol evenning chromium plate is a kind of hard surface photomask material, i.e. photomask base version, and it is that current and future microfabrication light is covered
The main flow sensitive material (being equivalent to the sensitive film of photograph) of film production.It is at smooth, the glass substrate of best bright finish
On form chromium film base version by chromium nitride-nitrogen chromium oxide film in magnetically controlled DC sputtering (SP) deposition, then apply one thereon
Layer photoresist (also known as photoresist) or electron sensitive resist make spin coating chromium plate.Sol evenning chromium plate through overexposure, develop, etch
Form figure etc. technique, and this figure is transferred on backing material.And existing sol evenning chromium plate is in subsequent production technical process,
It is uneven to there is pattern line in wider region, four edge, limits, line defect, the problems such as precision is low.For solving sol evenning chromium plate edge
The lines precision problem in region, during magnetron sputtering, the design for the glass substrate loading attachment of glass substrate is to solve to be somebody's turn to do
A kind of method of problem.
In sol evenning chromium plate production process existing use be usually vertical coating apparatus, it Sample Room including being sequentially connected,
Heating chamber, First Transition room, coating chamber, the second transition chamber and go out specimen chamber, it promotes dolly to move ahead, on dolly by gear drive
Being perpendicular to ground and place glass loading attachment, the structure of its glass loading attachment is: glass substrate is positioned over framework perpendicular to the ground
Window at, glass substrate is connected below with window below, and the glass substrate left and right sides exists symmetrical being fixed on framework
Fixture, this fixture contacts with glass substrate reverse side, and glass substrate is clamped by fixture, to prevent glass substrate from coming off from the negative,
And the limit, front four of window is provided with the shelves bar less than glass substrate size, it is used for preventing glass substrate from deviating from from front.Existing
Glass loading attachment has a disadvantage in that 1, glass substrate easily collapses limit；Dolly advance transmit during unavoidably have shake with
And acceleration-deceleration process.Glass substrate has friction below or slightly jolts with frame window, and glass substrate easily causes and collapses limit, fall
Low production yield.(owing to all wt of glass substrate is pressed in a limit of glass substrate, when jolting, it is easy to cause
It is bad that glass substrate collapses limit, a small gap i.e. occurs).2, glass substrate easily causes reverse side scuffing；Due to framework back side fixture
Directly contact with glass substrate reverse side, thus dolly advance during, glass substrate reverse side easily cause heavily scratch or produce bad.
3, the existence of glass substrate four limit is not sputtered coating film area, and that reduces glass substrate utilizes area；And outward appearance is unsightly.4, glass
Marginal portion, glass substrate four limit optical property inhomogeneities；Due to the impact of window baffle plate, during subsequent technique, glass substrate
The pattern line precision on four plated film subregion, limits is poor.
Disclosed in the patent No. 201210327591.4, a kind of glass substrate loading device, can move in orbit, including:
The framework of setting perpendicular to the ground, described framework offers the window for housing glass substrate, and the size of described window is big
Size in described glass substrate；Two connectors of spaced setting, one end of every a connection piece is positioned at described framework
The top of described window is rotatably connected, and the other end is rotatably connected with the top of described glass substrate, said two connector
The spacing of two other ends extend along with described glass substrate expanded by heating, and along with described glass substrate cooling meat
Reduce；And locating part, it is located at described framework and is positioned at the bottom of described window, described locating part offers the described glass base of collecting
The groove of the bottom of sheet.This structure there will be equally: owing to all wt of glass substrate is pressed in a limit of glass substrate, sends out
Raw when jolting, it is easy to cause glass substrate to collapse limit bad, a small gap i.e. occurs；The existence of glass substrate four limit is not sputtered
Coating film area, that reduces glass substrate utilizes the problems such as area.
Utility model content
The purpose of this utility model is that and overcomes the deficiencies in the prior art, it is provided that a kind of glass substrate loading attachment,
It greatly improves the utilization rate of glass substrate area, profile is more attractive, and uniformity is good, glass substrate arris not depositional coating,
Glass substrate do not have collapse limit and scratch phenomenon, be greatly improved the production yield of glass substrate, improve postorder glass substrate
Through gluing, expose, develop after marginal area figure precision.
To achieve these goals, this utility model provides a kind of glass substrate loading attachment, including framework and transmission
Device, described actuating device includes least one set guidance set and least one set transmission component；It is provided with at least on described framework
One window, four bases of described window are provided with limit chamfering, and the top of described framework is provided with the described window top of connection
The groove on limit, is provided with support platform at four angles of described bottom of window, and described window is by the supporting surface of described support platform extremely
Four right-angle sides at described window top are provided with bull nose；Described guidance set includes left directive wheel and right directive wheel, institute
State left directive wheel and right directive wheel lays respectively at left side and the right side of described framework, and described left directive wheel and right directive wheel are respectively
Gap is had relative to left side and the right edge of described framework；Described transmission component includes Left Drive wheel and right drive, described
Left Drive wheel and right drive support left side and the right side of described base of frame respectively.
Further, the length and width of described window is respectively greater than the length and width 1～2mm of glass substrate.
Further, the degree of depth of described groove is more than the thickness of glass substrate, and the degree of depth of described groove is less than described frame
The thickness of frame.
Further, described guidance set is arranged alternately along the length direction of described framework with described transmission component.
Further, described framework is additionally provided with some lightening holes.
Further, the both sides top edge at described window top is provided with described groove.
Further, four angles of described framework are provided with chamfering.
The glass substrate loading attachment that this utility model provides is for horizontal coating apparatus.During use, glass substrate front
Down be positioned at the window of framework, by the support platform support glass substrate at four angles of window.Wherein window is by supporting
The supporting surface of platform is provided with bull nose, when glass substrate is positioned over window, due to window to four angles at the top of window
Four angles all have bull nose, the angle to window will not be touched in the angle of glass substrate, does not haves glass substrate and collapses angle and give birth to
Producing bad, glass substrate is positioned over window more easily, to prevent the angle of glass substrate from encountering the angle of window, causes glass base
Plate collapses angle and produces bad.
The bottom of framework is supported by transmission component, and realizes the balance transmission of framework.Framework is realized by guidance set
Guide effect during transmission.The difference gap of framework and guidance set is within one side is 5mm, it is ensured that even if framework is the most just put
On transmission component, when the most tiltedly putting, during the postorder of transmission component transmits, framework can be made just to return by guidance set
Rail.Owing to glass substrate of the present utility model is to be directly placed in window, and propped up by the support platform at four angles of bottom of window
Support, glass substrate transmits in company with framework under the effect of transmission component, and its glass substrate does not haves and collapses limit and scratch phenomenon, puts
Take off all wt due to glass substrate occurred in existing vertical glass substrate loading attachment and be pressed in one of glass substrate
Bian Shang, when jolting, it is easy to causes glass substrate to collapse limit bad, a small gap, and clamping glass substrate i.e. occurs
The fixture scuffing to glass substrate reverse side.
The size of this utility model window be all higher than on length and width direction glass substrate length and width 1～
2mm so that when from below to the front sputter coating of glass substrate, four the little angle parts only covered by support platform will not
Sputtered, remainder is all sputtered, thus substantially increases the utilization rate of glass substrate area, good looking appearance, and existing
The four edges of its glass substrate of window of design is placed in the four edges of window, and the four edges of its glass substrate is not sputtered, no
Sputtered region is big.And owing to the size of window is more than the size of glass substrate, when sputter coating, the arris of its glass substrate
Will not depositional coating, with improve postorder glass substrate through gluing, expose, develop after marginal area figure precision.
Four bases of this utility model window are provided with limit chamfering, and the base that limit chamfering is window fall to framework and
Not being chamfering in window, the design of its limit chamfering ensure that the optical parametric uniformity of glass substrate front four edges is good, with
Improve postorder glass substrate through gluing, expose, develop after marginal area figure precision.
The top of window of the present utility model is provided with groove, and the both sides top edge at window top is provided with groove.
The degree of depth of groove is more than the thickness of glass substrate again, and the degree of depth of groove is less than the thickness of framework.To be spattered by the groove of window
Penetrating the glass substrate after plated film to take out in window, it is the most convenient to take out.The degree of depth due to groove is less than the thickness of framework, the most recessed
Groove is not groove, and during sputter coating, the glass substrate arris near grooved area will not be sputtered.
It is provided with some lightening holes on framework of the present utility model, to alleviate the weight of framework, alleviates holding of transmission component
Carry, improve the service life of transmission component.
It is provided with chamfering, so that framework exists bigger angle with guidance set on four angles of framework of the present utility model
Degree, rounder and more smooth with guidance set contact gear ratio, do not result in framework and with guidance set collision thus occur to transmit asking of stopping fault
Topic.
The beneficial effects of the utility model:
1, glass substrate face down of the present utility model be positioned at the window of framework, at four angles of window
Support platform support glass substrate.The bottom of framework is supported by transmission component, and realizes the balance transmission of framework.By guiding group
Part realizes the guide effect during framework transmits.Owing to glass substrate of the present utility model is to be directly placed in window, and
Being supported by the support platform at four angles of bottom of window, glass substrate transmits under the effect of transmission component in company with framework, its glass
Substrate do not have collapse limit and scratch phenomenon, broken away from existing vertical glass substrate loading attachment occur due to glass substrate
All wt be pressed on a limit of glass substrate, when jolting, it is easy to cause glass substrate to collapse limit bad, i.e. occur
One small gap, and the scuffing that the fixture of clamping glass substrate is to glass substrate reverse side.
2, window of the present utility model is provided with bull nose by four angles at the top of the supporting surface to window supporting platform,
When glass substrate is positioned over window, owing to all there is bull nose at four angles of window, the angle of glass substrate will not be touched to window
The angle of mouth, does not haves glass substrate and collapses angle and produce bad so that glass substrate is positioned over window, operation side more easily
Just.
3, the size of this utility model window be all higher than on length and width direction glass substrate length and width 1～
2mm so that when from below to the front sputter coating of glass substrate, four the little angle parts only covered by support platform will not
Sputtered, remainder is all sputtered, thus substantially increases the utilization rate of glass substrate area, good looking appearance, and existing
The four edges of its glass substrate of window of design is placed in the four edges of window, and the four edges of its glass substrate is not sputtered, no
Sputtered region is big.And owing to the size of window is more than the size of glass substrate, when sputter coating, the arris of its glass substrate
Will not depositional coating, with improve postorder glass substrate through gluing, expose, develop after marginal area figure precision.
4, four bases of this utility model window are provided with limit chamfering, and the base that limit chamfering is window is fallen to framework
Rather than in window chamfering, the design of its limit chamfering ensure that the optical parametric uniformity of glass substrate front four edges is good,
With improve postorder glass substrate through gluing, expose, develop after marginal area figure precision.
5, the top of window of the present utility model is provided with groove, and the both sides top edge at window top is provided with recessed
Groove.The degree of depth of groove is more than the thickness of glass substrate again, and the degree of depth of groove is less than the thickness of framework.Will by the groove of window
Glass substrate after sputter coating takes out in window, and it is the most convenient to take out.The degree of depth due to groove is less than the thickness of framework, i.e.
Groove is not groove, and during sputter coating, the glass substrate arris near grooved area will not be sputtered.
6, it is provided with some lightening holes on framework of the present utility model, to alleviate the weight of framework, alleviates transmission component
Carrying, improves the service life of transmission component.
7, it is provided with chamfering on four angles of framework of the present utility model, so that framework exists bigger with guidance set
Angle, rounder and more smooth with guidance set contact gear ratio, do not result in framework and with guidance set collision thus occur to transmit stopping fault
Problem.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will be to embodiment
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, the accompanying drawing in describing below is only
It is embodiments more of the present utility model, for those of ordinary skill in the art, in the premise not paying creative work
Under, it is also possible to other accompanying drawing is obtained according to these accompanying drawings.
Fig. 1 is the structural representation of this utility model embodiment.
Fig. 2 is the enlarged diagram in Fig. 1 at A.
Fig. 3 is the partial sectional view of B-B in Fig. 1.
Above-mentioned reference:
1 framework, 2 windows, 3 left directive wheels, 4 right directive wheels, 5 Left Drive wheels, 6 right drives, 7 grooves, 8 bull noses, 9
Support platform.
Detailed description of the invention
Below in conjunction with the accompanying drawings utility model is further illustrated, but be not limited to scope of the present utility model.
Embodiment
As shown in Figures 1 to 3, a kind of glass substrate loading attachment that this utility model provides, fill including framework 1 and transmission
Putting, described actuating device includes least one set guidance set and least one set transmission component；It is provided with at least one on described framework 1
Individual window 2, four bases of described window 2 are provided with limit chamfering, and the top of described framework 1 is provided with the described window 2 of connection
The groove 7 of top margin, is provided with support platform 9, described window 2 propping up by described support platform 9 at four angles bottom described window 2
Four right-angle sides at support face to described window 2 top are provided with bull nose 8；Described guidance set includes left directive wheel 3 and the right side
Directive wheel 4, described left directive wheel 3 and right directive wheel 4 lay respectively at left side and the right side of described framework 1, and described left directive wheel 3
It is respectively relative to the left side of described framework 1 with right directive wheel 4 and right edge has gap；Described transmission component includes that Left Drive is taken turns
5 and right drive 6, described Left Drive wheel 5 and right drive 6 support the left side bottom described framework 1 and right side respectively.
The length and width of described window 2 of the present utility model is respectively greater than the length and width 1～2mm of glass substrate.
The degree of depth of described groove 7 of the present utility model is more than the thickness of glass substrate, and the degree of depth of described groove 7 is less than institute
State the thickness of framework 1.Specifically, the degree of depth of groove is 4～7mm, and the thickness of framework 1 is 10～20mm.This utility model window
The both sides top edge at top is provided with groove 7.By the groove 7 of window 2 by the glass substrate after sputter coating in window 2
Taking out, it is the most convenient to take out.The degree of depth due to groove 7 is less than the thickness of framework 1, i.e. groove 7 is not groove, during sputter coating,
The glass substrate arris of groove 7 areas adjacent will not be sputtered.
Described guidance set of the present utility model alternately sets along the length direction of described framework 1 with described transmission component
Put.As it is shown in figure 1, actuating device includes three groups of guidance sets and two groups of transmission components, its three groups of guidance sets and two groups of transmissions
Assembly is arranged alternately on the length direction of framework 1.
It is additionally provided with some lightening holes on described framework 1 of the present utility model.By lightening hole, to alleviate the weight of framework 1
Amount, alleviates the carrying of transmission component, improves the service life of transmission component.
The glass substrate loading attachment that this utility model provides is for horizontal coating apparatus.During use, glass substrate front
At the window 2 being positioned over framework 1 down, by the support platform 9 support glass substrate at 2 four angles of window.Wherein window 2 by
The supporting surface of support platform 9 is provided with bull nose 8 to four angles at the top of window 2, when glass substrate is positioned over window 2,
Owing to all there is bull nose 8 at four angles of window 2, the angle to window 2 will not be touched in the angle of glass substrate, does not haves glass base
Plate collapses angle and produces bad, and glass substrate is positioned over window 2 more easily, to prevent the angle of glass substrate from encountering window 2
Angle, causes glass substrate to collapse angle and produces bad.
The bottom of framework 1 is supported by transmission component, and realizes the balance transmission of framework 1.Frame is realized by guidance set
Guide effect during frame 1 transmission.The difference gap of framework 1 and guidance set is within one side is 5mm, it is ensured that though framework 1
The most just it is being put on transmission component, when the most tiltedly putting, during the postorder of transmission component transmits, framework can made by guidance set
1 is back in the saddle.Owing to glass substrate of the present utility model is to be directly placed in window 2, and by four angles bottom window 2
Supporting platform 9 to support, glass substrate transmits in company with framework 1 under the effect of transmission component, its glass substrate do not have collapse limit with
Scratch phenomenon, broken away from all wt due to glass substrate occurred in existing vertical glass substrate loading attachment and be pressed in glass
On one limit of substrate, when jolting, it is easy to cause glass substrate to collapse limit bad, a small gap, and folder i.e. occur
Hold the scuffing to glass substrate reverse side of the fixture of glass substrate.
The size of this utility model window 2 be all higher than on length and width direction glass substrate length and width 1～
2mm so that when from below to the front sputter coating of glass substrate, four the little angle parts only covered by support platform 9 are not
Can be sputtered, remainder is all sputtered, thus substantially increases the utilization rate of glass substrate area, good looking appearance, and shows
The four edges having its glass substrate of window of design is placed in the four edges of window, and the four edges of its glass substrate is not sputtered,
It is not sputtered region big.And this utility model is owing to the size of window 2 is more than the size of glass substrate, when sputter coating, its
The arris of glass substrate will not depositional coating, with improve postorder glass substrate through gluing, expose, develop after marginal area figure
Precision.
Four bases of this utility model window 2 are provided with limit chamfering, and the base that limit chamfering is window 2 is to framework 1
Falling rather than chamfering in window 2, the design of its limit chamfering ensure that the optical parametric uniformity of glass substrate front four edges
Good, with improve postorder glass substrate through gluing, expose, develop after marginal area figure precision.
It is provided with chamfering, so that framework 1 exists bigger with guidance set on four angles of framework 1 of the present utility model
Angle, rounder and more smooth with guidance set contact gear ratio, do not result in framework 1 and with guidance set collision thus occur to transmit stopping fault
Problem.Preferably, the size of chamfering is R30～40mm, a length of 100～200mm.
Of the present utility model ultimate principle, principal character and of the present utility model advantage have more than been shown and described.One's own profession
Skilled person will appreciate that of industry, this utility model is not restricted to the described embodiments, described in above-described embodiment and description
Principle of the present utility model is simply described, on the premise of without departing from this utility model spirit and scope, this utility model also can
There are various changes and modifications, in the range of these changes and improvements both fall within claimed this utility model.This utility model is wanted
Protection domain is asked to be defined by appending claims and equivalent thereof.
Claims (7)
1. a glass substrate loading attachment, it is characterised in that: include that framework and actuating device, described actuating device include at least
One group of guidance set and least one set transmission component；At least one window it is provided with, at the bottom of four of described window on described framework
Being provided with while chamfering, the top of described framework is provided with the groove connecting described window top margin, the four of described bottom of window
Being provided with support platform at individual angle, described window is equal by four right-angle sides of the supporting surface of described support platform to described window top
It is provided with bull nose；
Described guidance set includes that left directive wheel and right directive wheel, described left directive wheel and right directive wheel lay respectively at described framework
Left side and right side, and between described left directive wheel and right directive wheel are respectively relative to the left side of described framework and right edge has
Gap；
Described transmission component includes that Left Drive wheel and right drive, described Left Drive wheel and right drive support described framework respectively
The left side of bottom and right side.
A kind of glass substrate loading attachment the most according to claim 1, it is characterised in that the length and width of described window
It is respectively greater than the length and width 1～2mm of glass substrate.
A kind of glass substrate loading attachment the most according to claim 1, it is characterised in that the degree of depth of described groove is more than glass
The thickness of glass substrate, and the degree of depth of described groove is less than the thickness of described framework.
A kind of glass substrate loading attachment the most according to claim 1, it is characterised in that described guidance set and described biography
Dynamic assembly is arranged alternately along the length direction of described framework.
A kind of glass substrate loading attachment the most according to claim 1, it is characterised in that if being additionally provided with on described framework
Dry lightening hole.
A kind of glass substrate loading attachment the most according to claim 1, it is characterised in that the top, both sides at described window top
Described groove it is provided with at limit.
A kind of glass substrate loading attachment the most according to claim 1, it is characterised in that on four angles of described framework all
It is provided with chamfering.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620741737.3U CN205839121U (en) | 2016-07-14 | 2016-07-14 | A kind of glass substrate loading attachment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620741737.3U CN205839121U (en) | 2016-07-14 | 2016-07-14 | A kind of glass substrate loading attachment |
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| Publication Number | Publication Date |
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| CN205839121U true CN205839121U (en) | 2016-12-28 |
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ID=57618921
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112251729A (en) * | 2020-10-23 | 2021-01-22 | 凯盛信息显示材料(黄山)有限公司 | Glass substrate frame for vacuum coating, coating system thereof and transmission method of coating system |
-
2016
- 2016-07-14 CN CN201620741737.3U patent/CN205839121U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112251729A (en) * | 2020-10-23 | 2021-01-22 | 凯盛信息显示材料(黄山)有限公司 | Glass substrate frame for vacuum coating, coating system thereof and transmission method of coating system |
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