CN201990721U - Uniform temperature glass bearing tool device of vertical vacuum coating machine - Google Patents
Uniform temperature glass bearing tool device of vertical vacuum coating machine Download PDFInfo
- Publication number
- CN201990721U CN201990721U CN2011200554038U CN201120055403U CN201990721U CN 201990721 U CN201990721 U CN 201990721U CN 2011200554038 U CN2011200554038 U CN 2011200554038U CN 201120055403 U CN201120055403 U CN 201120055403U CN 201990721 U CN201990721 U CN 201990721U
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- glass substrate
- glass
- temperature
- attachment strap
- strap portion
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Abstract
The utility model provides a uniform temperature glass bearing tool device of a vertical vacuum coating machine, which is provided with a load bearing outer frame, wherein the load bearing outer frame is provided with a rectangular metal frame body and a rectangular window is formed at the inner part of the frame body; a butt strap part protrudes and extends inwards in the middle of the inner circumferential surface of the load bearing outer frame; a uniform temperature plate, of which the inner edge extends inwards, is stuck against and fixed on the back surface of the butt strap part; locators inwards and elastically extending out of top plates are respectively arranged on the left side, the right side, the left position of the bottom side and the right position of the bottom side of the back surface of the window of the load bearing outer frame; and a buckling groove is formed between the inner end surface of each top plate and the uniform temperature plate. When the uniform temperature glass bearing tool device is used, a glass substrate is buckled in the buckling grooves to be positioned, and as the edge of the glass substrate is only stuck against the outer edge of the uniform temperature plate, when a film is coated, the heat energy on the periphery of the glass substrate can be effectively avoided being greatly absorbed by the load bearing outer frame, and thereby the temperature can be kept uniform and the thin film formed on the surface of the glass substrate is enabled to have uniform quality.
Description
Technical field
The utility model relates to a kind of carrier of vacuum plating unit, relates in particular to a kind of samming glass carrier device of vertical vacuum coating equipment.
Background technology
Existing vertical vacuum coating equipment as shown in Figure 8, be that bottom in cavity 40 and top are respectively equipped with driving structure 41 and one guiding structure 42 that extends along left and right direction, front and inner rear side at cavity 40 respectively is provided with a sputtering source 43 and a well heater 44 again, and glass carrier 45 is arranged on drives on the structure 41 and can advance along left and right direction, the top is subjected to the guiding of guiding structure 42 when glass carrier 45 is advanced.
As shown in Figure 8, existing glass carrier 45 is an orthogonal stainless steel framework, at intermediate formation one rectangle of glass carrier 45 and at forward and backward window 451 that forms opening, around the corresponding window 451, in the centre of glass carrier 45 inner peripheral surfaces with around form protrude out an attachment strap portion 452 inwardly, the left and right side of corresponding window 451 and the forward and backward position of bottom side, each rear panel at glass carrier 45 is respectively equipped with a steady arm 46, each steady arm 46 is provided with a top board 461 that ejects with spring outwardly, and the inner of each top board 461 is stretched in the scope of window 451.
When glass substrate 47 is installed in glass carrier 45, be that attachment strap portion 452 back that are against glass carrier 45 are pasted in the front of periphery, and fasten location, back at glass substrate 47 peripheries with the top board 461 of each steady arm 46, when coated glass substrate 47 is traveling in the cavity 40 along with glass carrier 45, can be via well heater 44 heating and with sputtering source 43 plated films.
Though existing glass carrier 45 can take advantage of a year glass substrate 47 to carry out the processing of plated film, but because the specific heat of glass is 600J/Kgk, the specific heat of steel is 450J/Kgk, both difference is little, but the weight of glass carrier 45 far overweights glass substrate 47 (about six to), can siphon away a large amount of heat energy, therefore when 44 pairs of glass substrates 47 of well heater heat, glass substrate 47 directly contacts the edge part branch loss heat of glass carrier 45 attachment strap portions 452, make that the temperature at glass substrate 47 edges is lower than intermediary temperature, because of the uneven of temperature on the glass substrate 47 and then influence the homogeneity of glass substrate 47 plated films.
Because existing glass carrier is directly to contact glass substrate with framework, therefore cause the temperature of glass substrate periphery lower and then influence the problem of plated film quality.At this situation, the designer proposes the utility model, in the hope of overcoming above-mentioned defective.
The utility model content
The purpose of this utility model provides a kind of carrier of vacuum plating unit, and it contacts glass substrate with the inboard temperature-uniforming plate that is provided with in addition of framework, and then makes the Locating Glass substrate reach the effect of temperature-averaging.
For achieving the above object, the utility model provides a kind of samming glass carrier device of vertical vacuum coating equipment, comprising:
One carrying housing, for the orthogonal framework and at the top and the bottom surface form guide rail and the conveyor surface that extends along left and right direction respectively, at intermediate formation one rectangle of this carrying housing and at forward and backward window that forms opening, protrude out an attachment strap portion inwardly again in the centre of this carrying housing inner peripheral surface;
One temperature-uniforming plate is the width of rectangle and the outer rim square frame shape thin plate less than this attachment strap portion outer rim width, and its front with outer periphery is pasted and supported the back that is combined in this attachment strap portion, and inner edge extends the inner edge of this attachment strap portion of protrusion inwardly; And
Four locater, to the and arranged on left and right sides that should window and the left and right position of root edge, be separately positioned on the back of and arranged on left and right sides of this carrying housing and the left and right position of bottom rear, each steady arm is provided with the top board that an elasticity is stretched out outwardly, the inner of each top board is stretched in the scope of this window, inner face at each top board forms a clip face, forms a glass button and support recess between the back of each clip face and this temperature-uniforming plate inner edge.
Further, the utility model is provided with a plurality of plug housings that protrude out backwards in the centre of described attachment strap portion back, described plug housing with around form be incorporated into described attachment strap portion, each plug housing is cylinder and runs through a pin hole at the two opposite sides of periphery; The position of corresponding each plug housing wears a plurality of plug housings hole at described temperature-uniforming plate, around each plug housing, plugs a latch at each pin hole with each plug housing borehole jack again, fastens in the back of this temperature-uniforming plate with each latch and locatees.
Preferable, the utility model in the left and right position of described temperature-uniforming plate bottom rear each in conjunction with a glass substrate bracket that protrudes backwards.
During the utility model bearing glass substrate, be that the back that is against the temperature-uniforming plate inner edge is pasted in the front of glass substrate periphery, and be resisted against the periphery of glass substrate with the top board of each steady arm, the glass substrate clip is supported the recess location at each glass button, glass substrate together enters in the cavity of vacuum together with the carrying housing during plated film, with the intravital well heater of rifle glass substrate is heated, the sputtering source that is provided with the cavity front side is to the glass substrate plated film again.
The beneficial effects of the utility model are, because when glass substrate is set, the edge of glass substrate only pastes the outer rim that is against temperature-uniforming plate, temperature-uniforming plate also only is sticked and is fixed on the attachment strap portion of carrying housing inboard, therefore can be with the structure of temperature-uniforming plate as glass substrate and the intermediary of carrying between the housing, when glass substrate is heated, during plated film, can effectively reduce the glass substrate periphery and be carried the heat energy that housing siphons away in a large number, the samming that can keep the glass substrate whole district, the film that is formed on glass baseplate surface when making plated film has uniform quality.
Description of drawings
Fig. 1 is the stereographic map of the utility model preferred embodiment.
Fig. 2 is the exploded view of the utility model preferred embodiment.
Fig. 3 is the amplification stereogram of the utility model preferred embodiment.
Fig. 4 is the amplification profile of the utility model preferred embodiment.
Fig. 5 is another amplification profile of the utility model preferred embodiment.
Fig. 6 is that the utility model preferred embodiment is arranged on the intravital stereographic map in chamber.
Fig. 7 is that the utility model preferred embodiment is arranged on the intravital side-view in chamber.
Fig. 8 is the schematic side view of existing vertical vacuum coating equipment.
The main element label declaration:
10 carrying housings, 11 guide rails
12 conveyor surfaces, 13 windows
14 attachment strap portions, 15 plug housings
151 pin holes, 20 temperature-uniforming plates
21 plug housing holes, 22 latches
23 glass substrate brackets, 30 steady arms
31 top boards, 311 clip faces
312 pulling eyes, 32 glass buttons support recess
33 glass substrates, 34 cavitys
35 guiding structures 36 drive structure
37 sputtering sources, 38 well heaters
40 cavitys 41 drive structure
42 guiding structures, 43 sputtering sources
44 well heaters, 45 glass carriers
451 windows, 452 attachment strap portions
46 steady arms, 461 top boards
47 glass substrates
Embodiment
Understand for technical characterictic of the present utility model, purpose and effect being had more clearly, now contrast description of drawings embodiment of the present utility model:
The utility model provides a kind of samming glass carrier device of vertical vacuum coating equipment, please referring to the preferred embodiment of Fig. 1 to Fig. 5, comprising:
One carrying housing 10, be rectangle and the vertical stainless steel framework that is provided with, top and bottom surface at carrying housing 10 form respectively along a left side, a guide rail 11 and a conveyor surface 12 that right is extended, again at intermediate formation one rectangle of carrying housing 10 and preceding, the back forms the window 13 of opening, around the corresponding window 13, in the centre of carrying housing 10 inner peripheral surfaces with around form protrude out an attachment strap portion 14 inwardly, in the centre of attachment strap portion 14 back with around form in conjunction with a plurality of plug housings that protrude out backwards 15, each plug housing 15 is circular cylinder, runs through a pin hole 151 at each plug housing 15 periphery intermediary two opposite sides.
One temperature-uniforming plate 20, be the width of rectangle and outer rim stainless steel square shaped as frame thin plate less than attachment strap portion 14 outer rim width, the position of corresponding each plug housing 15, temperature-uniforming plate 20 with around form wear a plurality of plug housings hole 21, temperature-uniforming plate 20 pastes the back that is against attachment strap portion 14 with the front of outer periphery, and with each plug housing hole 21 be enclosed within each plug housing 15 around, the inner edge of temperature-uniforming plate 20 extends the inner edge that protrudes attachment strap portion 14 inwardly, pin hole 151 at each plug housing 15 plugs a latch 22, the two ends of protruding plug housings 15 with each latch 22 fasten the location, back of temperature-uniforming plate 20, again on the left side of temperature-uniforming plate 20 bottom rear, right position is respectively in conjunction with a glass substrate bracket 23 that protrudes backwards.
Four locater 30, the left side of corresponding window 13, the top on right side, wherein two steady arms 30 are combined in carrying housing 10 left sides, the back of right both sides, the left side of corresponding window 13 root edges, right position, two other steady arm 30 is combined in the left side of carrying housing 10 bottom rear, right position, each steady arm 30 is provided with a top board 31 that ejects with spring outwardly, each top board 31 is orthogonal long slab body and inner stretching in the scope of window 13, inner face at each top board 31 forms a clip face 311, each clip face 311 is the inclined-plane of surface towards the rear, between the back of the clip face 311 of each top board 31 and temperature-uniforming plate 20 inner edges, form a glass button and support recess 32, be arranged with a pulling eye 312 in the centre of each top board 31 back again.
When the utility model bearing glass substrate, extremely shown in Figure 5 as Fig. 3, be that the back that is against temperature-uniforming plate 20 inner edges is pasted in the front of glass substrate 33 peripheries, and each steady arm 30 is resisted against the periphery of glass substrate 33 with the clip face 311 of top board 31, and glass substrate 33 clips are supported recess 32 location at each glass button.
When the utility model uses, be to deliver into the operation of carrying out plated film in the cavity of vacuum together with glass substrate 33 with carrying housing 10, as Fig. 6, shown in Figure 7, top in the cavity 34 and bottom are respectively equipped with one along a left side, the guiding structure 35 that right is extended and one drives structure 36, front and inner rear side at cavity 34 respectively is provided with a sputtering source 37 and a well heater 38 again, and the conveyor surface 12 that will carry housing 10 is arranged on and drives on the structure 36 and can be along a left side, right is advanced, the guide rail 11 at top is subjected to the guiding of guiding structure 35 when carrying housing 10 is advanced, enter cavity 34 backs with 33 heating of 38 pairs of glass substrates of well heater, again with 37 pairs of glass substrate 33 plated films of sputtering source.
In the aforementioned process of plating, because the edge of the utility model glass substrate 33 only pastes the inner edge that is against temperature-uniforming plate 20, and 1/5th of the about glass substrate 33 of the weight of temperature-uniforming plate 20 and thermal capacity, therefore temperature-uniforming plate 20 is as the intermediary between glass substrate 33 and the carrying housing 10, when glass substrate 33 carries out plated film, the heat energy that can effectively reduce glass substrate 33 peripheries is siphoned away in a large number, the samming that can keep glass substrate 33 whole districts, the film that is formed on glass substrate 33 surfaces when making plated film has uniform quality.
The above only is the schematic embodiment of the utility model, is not in order to limit scope of the present utility model.Any those skilled in the art, equivalent variations of having done under the prerequisite that does not break away from design of the present utility model and principle and modification all should belong to the scope that the utility model is protected.
Claims (3)
1. the samming glass carrier device of a vertical vacuum coating equipment is characterized in that comprising:
One carrying housing, for the orthogonal framework and at the top and the bottom surface form guide rail and the conveyor surface that extends along left and right direction respectively, again this carrying housing intermediate formation one be rectangle and forward and backward formation opening window, protrude out an attachment strap portion inwardly in the centre of this carrying housing inner peripheral surface;
One temperature-uniforming plate is rectangle, and the width of its outer rim is less than the square frame shape thin plate of this attachment strap portion outer rim width, and the front of its outer periphery is pasted and supported the back that is combined in this attachment strap portion, and its inner rim is extended the inner edge of this attachment strap portion of protrusion inwardly;
Four locater, to the and arranged on left and right sides that should window and the left and right position of root edge, be separately positioned on the back of and arranged on left and right sides of this carrying housing and the left and right position of bottom rear, each described steady arm is provided with the top board that an elasticity is stretched out outwardly, the inner of each described top board is stretched in the scope of this window, inner face at each described top board forms a clip face, forms a glass button and support recess between the back of each described clip face and this temperature-uniforming plate inner edge.
2. the samming glass carrier device of vertical vacuum coating equipment as claimed in claim 1, it is characterized in that: the centre in described attachment strap portion back is provided with a plurality of plug housings that protrude out backwards, described plug housing with around form be incorporated into described attachment strap portion, each described plug housing is cylinder and runs through a pin hole at the two opposite sides of periphery; The position of corresponding each the described plug housing of described temperature-uniforming plate wears a plurality of plug housings hole, and each described plug housing borehole jack is around each described plug housing, and each described pin hole plugs a latch, and each described latch fastens the back that is positioned at this temperature-uniforming plate.
3. the samming glass carrier device of vertical vacuum coating equipment as claimed in claim 1 or 2 is characterized in that: each is in conjunction with a glass substrate bracket that protrudes backwards in the left and right position of described temperature-uniforming plate bottom rear.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200554038U CN201990721U (en) | 2011-03-04 | 2011-03-04 | Uniform temperature glass bearing tool device of vertical vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200554038U CN201990721U (en) | 2011-03-04 | 2011-03-04 | Uniform temperature glass bearing tool device of vertical vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201990721U true CN201990721U (en) | 2011-09-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200554038U Expired - Fee Related CN201990721U (en) | 2011-03-04 | 2011-03-04 | Uniform temperature glass bearing tool device of vertical vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201990721U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102400108A (en) * | 2011-10-18 | 2012-04-04 | 友达光电股份有限公司 | Thin film deposition machine and bearing part thereof |
| CN104630733A (en) * | 2013-11-08 | 2015-05-20 | 伟盟科技有限公司 | Jig for fixing object to be coated |
| CN106133187A (en) * | 2014-03-24 | 2016-11-16 | 艾克斯特朗欧洲公司 | Substrate holder at two wide sides deviated from mutually supporting substrates respectively of substrate holder |
| CN108133909A (en) * | 2017-11-29 | 2018-06-08 | 北京创昱科技有限公司 | A kind of substrate holding apparatus and the vertical producing line equipment of PVD for including it |
| CN108950502A (en) * | 2018-07-23 | 2018-12-07 | 张家港康得新光电材料有限公司 | A kind of panel film-forming apparatus |
| US10260147B2 (en) | 2014-03-24 | 2019-04-16 | Aixtron Se | Device for depositing nanotubes |
-
2011
- 2011-03-04 CN CN2011200554038U patent/CN201990721U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102400108A (en) * | 2011-10-18 | 2012-04-04 | 友达光电股份有限公司 | Thin film deposition machine and bearing part thereof |
| CN104630733A (en) * | 2013-11-08 | 2015-05-20 | 伟盟科技有限公司 | Jig for fixing object to be coated |
| CN106133187A (en) * | 2014-03-24 | 2016-11-16 | 艾克斯特朗欧洲公司 | Substrate holder at two wide sides deviated from mutually supporting substrates respectively of substrate holder |
| JP2017508887A (en) * | 2014-03-24 | 2017-03-30 | アイクストロン、エスイー | Substrate carrier for mounting each substrate on two opposite main surfaces |
| CN106133187B (en) * | 2014-03-24 | 2019-03-12 | 艾克斯特朗欧洲公司 | In the substrate holder of two wide side difference supporting substrates being away from each other of substrate holder |
| US10260147B2 (en) | 2014-03-24 | 2019-04-16 | Aixtron Se | Device for depositing nanotubes |
| CN108133909A (en) * | 2017-11-29 | 2018-06-08 | 北京创昱科技有限公司 | A kind of substrate holding apparatus and the vertical producing line equipment of PVD for including it |
| CN108950502A (en) * | 2018-07-23 | 2018-12-07 | 张家港康得新光电材料有限公司 | A kind of panel film-forming apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110928 Termination date: 20150304 |
|
| EXPY | Termination of patent right or utility model |