CN108133909A - A kind of substrate holding apparatus and the vertical producing line equipment of PVD for including it - Google Patents
A kind of substrate holding apparatus and the vertical producing line equipment of PVD for including it Download PDFInfo
- Publication number
- CN108133909A CN108133909A CN201711227544.1A CN201711227544A CN108133909A CN 108133909 A CN108133909 A CN 108133909A CN 201711227544 A CN201711227544 A CN 201711227544A CN 108133909 A CN108133909 A CN 108133909A
- Authority
- CN
- China
- Prior art keywords
- support plate
- briquetting
- substrate
- holding apparatus
- rotating dog
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 78
- 238000003825 pressing Methods 0.000 claims abstract description 13
- 230000009977 dual effect Effects 0.000 claims description 10
- 241000009328 Perro Species 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 241000282472 Canis lupus familiaris Species 0.000 description 38
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 241000826860 Trapezium Species 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The present invention relates to manufacture of solar cells equipment technical fields, more particularly to a kind of substrate holding apparatus, including top plate and it is arranged on the support plate being adapted above top plate with top plate, multiple ejector pins are provided on top plate, offer to place the support plate groove of substrate on support plate, the avris of support plate groove is provided with multiple substrate pressing devices, and ejector pin is corresponded with substrate pressing device, and substrate pressing device includes the rotation briquetting to compress substrate and drives the briquetting driving unit of rotation briquetting rotation.A kind of substrate holding apparatus provided by the invention and the vertical producing line equipment of PVD for including it, substrate and support plate can be fixed together, realize 90 ° of uprighting movements, reduce producing line plant width, and support plate uprighting movement can be easy to implement rotary motion, reduce producing line device length；Meanwhile fixture structure is simple, does not need to additional auxiliary mechanical structure, is easy to implement substrate loading and unloading automation, is conducive to producing line equipment promotion.
Description
Technical field
The present invention relates to manufacture of solar cells equipment technical field more particularly to a kind of substrate holding apparatus and include it
The vertical producing line equipment of PVD.
Background technology
With popularizing for solar cell, solar cell cost how is reduced, it is the sun to improve solar cell production capacity
The research direction of energy battery enterprise.The Main for improving production capacity at present is that producing line equipment+support plate carries multiple substrate-modes, production
Line equipment is made of multiple chambers, and multiple substrates are placed on support plate often plates a tunic by a chamber.
Producing line equipment can be divided into horizontal producing line equipment and vertical producing line equipment, so-called horizontal producing line equipment, i.e. substrate and load
Plate level passes through chamber, from top to bottom (or from bottom to top) plated film；And in vertical producing line equipment, substrate and support plate pass through vertically
Chamber carries out plated film by side.Big relative to horizontal producing line occupation area of equipment, particle, which is difficult to control etc., in technical process asks
Topic, vertical producing line equipment it is possible to prevente effectively from horizontal producing line equipment disadvantages mentioned above, but how to be fixed on vertical support plate substrate into
For main problem.The mainstream way used at present is that support plate is tilted a certain angle (common+7 ° and -7 °), and corresponding producing line is set
Standby is trapezoid structure or negative trapezium structure.Such producing line filming equipment length can reach tens meters, equally exist floor space
The problem of larger, simultaneously because not fixed between substrate and support plate, is likely to result in substrate and comes off during the motion.Therefore
It is necessary to design a kind of substrate holding apparatus, for fixing substrate, so as to which support plate and substrate be allowed to be kept upright, production can be effectively reduced
Line equipment space.
Invention content
(1) technical problems to be solved
The purpose of the present invention is to provide a kind of substrate holding apparatus and include its vertical producing line equipment of PVD, it is intended to solve
The problem of easily coming off without fixation, substrate between substrate and support plate in vertical producing line filming equipment certainly of the prior art.
(2) technical solution
In order to solve the above technical problem, the present invention provides a kind of substrate holding apparatus, including top plate and are arranged on institute
The support plate being adapted above top plate with the top plate is stated, multiple ejector pins is provided on the top plate, is opened up on the support plate useful
To place the support plate groove of substrate, the avris of the support plate groove is provided with multiple substrate pressing devices, the ejector pin with it is described
Substrate pressing device corresponds, and the substrate pressing device is included described in rotation briquetting and drive to compress the substrate
Rotate the briquetting driving unit of briquetting rotation.
Wherein, the avris of the support plate groove offers support plate hole, and the spring of intermediate trepanning is provided on the support plate hole
Fixed plate, the briquetting driving unit are set in the support plate hole, and the rotation briquetting is set to the spring retaining plate
Upside.
Wherein, the briquetting driving unit includes spring and rotating dog, and ring is provided on the outer wall in the rotating dog stage casing
Shape protrusion, the spring pocket are set on the outside of the rotating dog, and the upper end of the spring offsets with the spring retaining plate downside
It connects, the lower end of the spring and the upper side of the annular protrusion abut against.
Wherein, the rotation briquetting is fixedly connected by briquetting bolt with the upper end of the rotating dog, the rotation briquetting
It is rotated under the drive of the rotating dog.
Wherein, the lower end of the rotating dog offers the groove being adapted with the ejector pin.
Wherein, the rotation briquetting is single rotation briquetting, and single rotation briquetting is fixed on institute by the briquetting bolt
It states on rotating dog.
Wherein, the rotation briquetting includes single rotation briquetting and dual rotary briquetting, and the end of single rotation briquetting passes through
The briquetting bolt is fixed on the rotating dog, and the middle part of the dual rotary briquetting is fixed on described by the briquetting bolt
On rotating dog.
Wherein, the hypomere outer wall of the rotating dog is equipped with rotating dog protrusion, offer on the inner wall in the support plate hole with
The recessed grain in support plate hole that the rotating dog protrusion is adapted.
Wherein, the recessed grain in the support plate hole includes the recessed grain in vertical section support plate hole and the recessed grain in spiral section support plate hole, the vertical section
The recessed grain in support plate hole is connected with the recessed grain in spiral section support plate hole.
The present invention also provides a kind of vertical producing line equipment of PVD, include above-mentioned substrate holding apparatus.
(3) advantageous effect
Compared with prior art, above-mentioned technical proposal of the invention has the advantages that：One kind provided by the invention
Substrate and support plate, can be fixed together by substrate holding apparatus and the vertical producing line equipment of PVD for including it, realize 90 ° uprightly
Movement reduces producing line plant width, and support plate uprighting movement can be easy to implement rotary motion, reduces producing line device length；Meanwhile
Fixture structure is simple, does not need to additional auxiliary mechanical structure, is easy to implement substrate loading and unloading automation, is conducive to producing line
Equipment promotion.
Description of the drawings
Fig. 1 is the front view of the substrate holding apparatus of the embodiment of the present invention；
Fig. 2 is the side view of the substrate holding apparatus of the embodiment of the present invention；
Fig. 3 is the partial enlarged view at A in Fig. 1；
Fig. 4 is the partial enlarged view at B in Fig. 2；
Side views of the Fig. 5 for support plate trepanning in the substrate holding apparatus of the embodiment of the present invention；
Wherein, 1- top plates；2- support plates；21- support plate grooves；22- support plates hole；The recessed grain in 23- support plates hole；231- vertical section support plates
The recessed grain in hole；The recessed grain in 232- spiral section support plates hole；3- ejector pins；4- spring retaining plates；The mono- rotation briquettings of 5-；6- dual rotary briquettings；7-
Briquetting bolt；8- bolt of fixing plate；9- springs；10- rotating dogs；101- rotating dogs protrusion；11- substrates.
Specific embodiment
Embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples.Following embodiment is used for
Illustrate the present invention, but cannot be used for limiting the scope of the invention.
In the description of the present invention, unless otherwise indicated, " multiple " are meant that two or more；Unless otherwise saying
Bright, the meaning of " nick shaped " is the shape in addition to section is concordant.Term " on ", " under ", "left", "right", " interior ", " outer ", " preceding
End ", " rear end ", " head ", the orientation of the instructions such as " tail portion " or position relationship be based on orientation shown in the drawings or position relationship,
Be for only for ease of the description present invention and simplify description rather than instruction or imply signified device or element must have it is specific
Orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.In addition, term " first ",
" second ", " third " etc. are only used for description purpose, and it is not intended that instruction or hint relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or be integrally connected；It can
To be mechanical connection or be electrically connected；It can be directly connected, can also be indirectly connected by intermediary.For this
For the those of ordinary skill in field, concrete condition can be regarded and understand the concrete meaning of above-mentioned term in the present invention.
Referring to described in Fig. 1 to Fig. 5, the present invention provides a kind of substrate holding apparatus, including top plate 1 and are arranged on top plate 1
The support plate 2 that top is adapted with top plate 1 is provided with multiple ejector pins 3 on top plate 1, offers to place substrate 11 on support plate 2
Support plate groove 21, the avris of support plate groove 21 are provided with multiple substrate pressing devices, and ejector pin 3 is a pair of with substrate pressing device one
Should, substrate pressing device includes the rotation briquetting to compress substrate 11 and drives the briquetting driving unit of rotation briquetting rotation.
Substrate 11 can be fixed on support plate 2 by a kind of substrate holding apparatus provided by the invention, so as in substrate 11 and load
During plate 2 is kept upright, substrate 11 will not fall off；Simultaneously as substrate 11 and support plate 2 keep vertical state, producing line plated film
Equipment can be designed as rotary form, so as to make producing line equipment compacter, further reduce floor space.
Further, the avris of support plate groove 21 offers support plate hole 22, and the bullet of intermediate trepanning is provided on support plate hole 22
Spring fixed plate 4, briquetting driving unit are set in support plate hole 22, and rotation briquetting is set to the upside of spring retaining plate 4.
Specifically, briquetting driving unit includes spring 9 and rotating dog 10, annular is provided on the outer wall in 10 stage casing of rotating dog
Protrusion, spring 9 are sheathed on 10 outside of rotating dog, and upper end and 4 downside of spring retaining plate of spring 9 abut against, the lower end of spring 9
It is abutted against with the upper side of annular protrusion.Spring retaining plate 4 is connect with support plate 2 by bolt of fixing plate 8, passes through adjustment fixing plate
The tensile force of the elasticity adjustable springs 9 of bolt 8, so as to which adjustable rotation briquetting is to the pressing force of substrate 11.
Further, rotation briquetting is fixedly connected by briquetting bolt 7 with the upper end of rotating dog 10, and rotation briquetting is rotating
It is rotated under the drive of pin 10.It is identical with the quantity of rotating dog 10 to rotate briquetting, and corresponds.
Further, the lower end of rotating dog 10 offers the groove being adapted with ejector pin 3.Rotating dog 10 and 3 quantity of ejector pin
It is identical, and correspond；During work, 10 bottom end of rotating dog and 3 tip contact of ejector pin.
Specifically, rotation briquetting is single rotation briquetting 5, single briquetting 5 that rotates is fixed on rotating dog 10 by briquetting bolt 7
On.
Specifically, rotation briquetting includes single rotation briquetting 5 and dual rotary briquetting 6, single end for rotating briquetting 5 passes through briquetting
Bolt 7 is fixed on rotating dog 10, and the middle part of dual rotary briquetting 6 is fixed on by briquetting bolt 7 on rotating dog 10.
Further, the hypomere outer wall of rotating dog 10 is equipped with rotating dog protrusion 101, is offered on the inner wall in support plate hole 22
The support plate hole recessed poor 23 being adapted with rotating dog protrusion 101.Rotating dog 10 is passed through from support plate hole 22, there is a rotation on rotating dog 10
Ship and resell on another market protrusion 101, rotating dog protrusion 101 can along support plate hole groove 23 for vertical movement with spiral or descending motion, spring 9
It is sleeved on rotating dog 10,9 top of spring is contacted with spring retaining plate 4, and spring retaining plate 4 is connected with support plate 2 by bolt of fixing plate 8
It connects, single rotation briquetting 5 or 6 one end of dual rotary briquetting are pressed on substrate 11, and the other end passes through the briquetting bolt 7 and rotating dog 10
Top is connected.
Specifically, support plate hole recessed poor 23 includes vertical section support plate hole recessed poor 231 and spiral section support plate hole recessed poor 232, vertically
Section support plate hole recessed poor 231 is connected with spiral section support plate hole recessed poor 232.Setting vertical section support plate hole recessed poor 231 can prevent spin-ended
Turn briquetting to scratch substrate 11, setting spiral section support plate hole recessed poor 232 can make rotation briquetting rotary motion, and spiral section support plate
Recessed poor 232 rotation angle in hole is 90 °.
A kind of substrate holding apparatus provided by the invention, during work, top plate 1 lies in a horizontal plane in substrate and picks and places on platform, machinery
The support plate 2 that carrying is placed with technique meron by hand is lain in a horizontal plane on top plate 1, and ensures 3 top of ejector pin on top plate 1 with carrying
10 bottom end of rotating dog on plate 2 corresponds, contact, and support plate 2 moves down under the effect of gravity, and rotating dog 10 is in ejector pin 3
The top lower opposite support plate 2 of power effect moves upwards, while compressed spring 9, due to rotating dog protrusion 4101 in support plate hole groove 23 about
It is first moved straight up under beam, remakes spiral movement, so as to which single rotation briquetting 5 and/or dual rotary briquetting 6 be driven to rotate
It 90 °, is removed above substrate 11, takes technique meron away；Put substrate before technique again at this time, manipulator will be in 2 level of support plate
It moves, ejector pin 3 disappears to the top power of rotating dog 10, and the first rotation under the action of spring 9 of rotating dog 10 declines to be vertically lowered again, is driven
Single rotation briquetting 5 and/or dual rotary briquetting 6 are rotated by 90 ° and are pressed in before technique on substrate.
Substrate and support plate, can be fixed together by a kind of substrate holding apparatus provided by the invention, realize 90 ° of upright fortune
It is dynamic, reduce producing line plant width, and support plate uprighting movement can be easy to implement rotary motion, reduce producing line device length；Meanwhile Gu
Determine that apparatus structure is simple, do not need to additional auxiliary mechanical structure, be easy to implement substrate loading and unloading automation, be conducive to producing line and set
It is standby to promote.
The present invention also provides a kind of vertical producing line equipment of PVD, include above-mentioned substrate holding apparatus.It is provided by the invention
A kind of vertical producing line equipment of PVD since substrate and support plate are fixed together, realizes 90 ° of uprighting movements, and then reduce producing line and set
Standby width, and support plate uprighting movement can be easy to implement rotary motion, reduce producing line device length, fixture structure is simple,
Additional auxiliary mechanical structure is not needed to, substrate loading and unloading automation is easy to implement, is conducive to producing line equipment promotion.
The embodiment of the present invention provides for the sake of example and description, and is not exhaustively or by this to send out
It is bright to be limited to disclosed form.Many modifications and variations are obvious for the ordinary skill in the art.Choosing
It is to more preferably illustrate the principle of the present invention and practical application to select and describe embodiment, and makes those of ordinary skill in the art
It will be appreciated that the present invention is so as to design the various embodiments with various modifications suitable for special-purpose.
Claims (10)
1. a kind of substrate holding apparatus, which is characterized in that including top plate (1) and be arranged on above the top plate (1) and the top
The support plate (2) that plate (1) is adapted is provided with multiple ejector pins (3) on the top plate (1), offers to put on the support plate (2)
The support plate groove (21) of substrate (11) is put, the avris of the support plate groove (21) is provided with multiple substrate pressing devices, the top
It sells (3) to correspond with the substrate pressing device, the substrate pressing device includes the rotation to compress the substrate (11)
Turn briquetting and drive the briquetting driving unit of the rotation briquetting rotation.
2. substrate holding apparatus according to claim 1, which is characterized in that the avris of the support plate groove (21) offers
Support plate hole (22) is provided with the spring retaining plate (4) of intermediate trepanning, the briquetting driving unit setting on the support plate hole (22)
In the support plate hole (22), the rotation briquetting is set to the upside of the spring retaining plate (4).
3. substrate holding apparatus according to claim 2, which is characterized in that the briquetting driving unit includes spring (9)
With rotating dog (10), annular protrusion is provided on the outer wall in rotating dog (10) stage casing, the spring (9) is sheathed on the rotation
It ships and resell on another market on the outside of (10), upper end and the spring retaining plate (4) downside of the spring (9) abut against, under the spring (9)
The upper side with the annular protrusion is held to abut against.
4. substrate holding apparatus according to claim 3, which is characterized in that the rotation briquetting passes through briquetting bolt (7)
It is fixedly connected with the upper end of the rotating dog (10), the rotation briquetting rotates under the drive of the rotating dog (10).
5. substrate holding apparatus according to claim 3, which is characterized in that the lower end of the rotating dog (10) offer with
The groove that the ejector pin (3) is adapted.
6. substrate holding apparatus according to claim 4, which is characterized in that the rotation briquetting is single rotation briquetting (5),
Single rotation briquetting (5) is fixed on by the briquetting bolt (7) on the rotating dog (10).
7. substrate holding apparatus according to claim 4, which is characterized in that the rotation briquetting includes single rotation briquetting
(5) and dual rotary briquetting (6), the end of single rotation briquetting (5) are fixed on the rotating dog by the briquetting bolt (7)
(10) on, the middle part of the dual rotary briquetting (6) is fixed on by the briquetting bolt (7) on the rotating dog (10).
8. substrate holding apparatus according to claim 3, which is characterized in that set on the hypomere outer wall of the rotating dog (10)
There is rotating dog raised (101), the load being adapted with the rotating dog raised (101) is offered on the inner wall of the support plate hole (22)
Plate hole is recessed poor (23).
9. substrate holding apparatus according to claim 8, which is characterized in that the support plate hole recessed poor (23) are including vertical section
Support plate hole recessed poor (231) and spiral section support plate hole are recessed poor (232), recessed poor (231) in the vertical section support plate hole and the spiral section
Support plate hole recessed poor (232) is connected.
10. a kind of vertical producing line equipment of PVD, which is characterized in that include the substrate described in any one of the claims 1 to 9
Fixing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711227544.1A CN108133909A (en) | 2017-11-29 | 2017-11-29 | A kind of substrate holding apparatus and the vertical producing line equipment of PVD for including it |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711227544.1A CN108133909A (en) | 2017-11-29 | 2017-11-29 | A kind of substrate holding apparatus and the vertical producing line equipment of PVD for including it |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108133909A true CN108133909A (en) | 2018-06-08 |
Family
ID=62389770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711227544.1A Pending CN108133909A (en) | 2017-11-29 | 2017-11-29 | A kind of substrate holding apparatus and the vertical producing line equipment of PVD for including it |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108133909A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5192087A (en) * | 1990-10-02 | 1993-03-09 | Nippon Steel Corporation | Device for supporting a wafer |
| TW200845272A (en) * | 2007-02-28 | 2008-11-16 | Vistec Semiconductor Sys Jena | Apparatus for holding disk-like objects |
| CN201990721U (en) * | 2011-03-04 | 2011-09-28 | 友威科技股份有限公司 | Uniform temperature glass bearing tool device of vertical vacuum coating machine |
| CN103748694A (en) * | 2012-01-05 | 2014-04-23 | 互进电镀科技有限公司 | Substrate carrier apparatus for electroplating of solar cell |
| CN104576472A (en) * | 2013-10-25 | 2015-04-29 | 英属开曼群岛商精曜有限公司 | Vertical substrate conveyer |
| CN206316807U (en) * | 2016-12-21 | 2017-07-11 | 新辉精密五金(惠州)有限公司 | Position pressure holding mechanism |
-
2017
- 2017-11-29 CN CN201711227544.1A patent/CN108133909A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5192087A (en) * | 1990-10-02 | 1993-03-09 | Nippon Steel Corporation | Device for supporting a wafer |
| TW200845272A (en) * | 2007-02-28 | 2008-11-16 | Vistec Semiconductor Sys Jena | Apparatus for holding disk-like objects |
| CN201990721U (en) * | 2011-03-04 | 2011-09-28 | 友威科技股份有限公司 | Uniform temperature glass bearing tool device of vertical vacuum coating machine |
| CN103748694A (en) * | 2012-01-05 | 2014-04-23 | 互进电镀科技有限公司 | Substrate carrier apparatus for electroplating of solar cell |
| CN104576472A (en) * | 2013-10-25 | 2015-04-29 | 英属开曼群岛商精曜有限公司 | Vertical substrate conveyer |
| CN206316807U (en) * | 2016-12-21 | 2017-07-11 | 新辉精密五金(惠州)有限公司 | Position pressure holding mechanism |
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| AD01 | Patent right deemed abandoned |
Effective date of abandoning: 20201023 |