CN201990723U

CN201990723U - Substrate transmission mechanism device of vertical vacuum coating machine

Info

Publication number: CN201990723U
Application number: CN2011200565653U
Authority: CN
Inventors: 邱敬凯; 黄泰源; 郑耿旻; 赖青华; 蔡明展
Original assignee: UVAT Tech Co Ltd
Current assignee: UVAT Tech Co Ltd
Priority date: 2011-03-04
Filing date: 2011-03-04
Publication date: 2011-09-28
Anticipated expiration: 2021-03-04

Abstract

The utility model relates to a substrate transmission mechanism device of a vertical vacuum coating machine; the bottom in a cavity body is provided with a driving structure, and the top in the cavity body is provided with a guiding structure; all conveying wheels of the driving structure are respectively provided with a glass carrier; the top of each glass carrier is provided with a concave guiding groove; the guiding structure is combined with a plurality of substrate support rods which extend downwards on the bottom surface of the top of the cavity body; the bottom ends of all the substrate support rods are combined with a substrate; the bottom of the substrate is provided with rollers in rows; and all the rollers can slide in the guiding carriers on the top of the glass carriers, so that dust is prevented from falling off and polluting the glass substrates when the rollers rotate, a film is prevented from being attached on the rollers and affecting the rotation of the rollers during a sputtering process, and the transmission can be stable and smooth.

Description

The board transport mechanism arrangement of vertical vacuum coating equipment

Technical field

The utility model relates to a kind of device of vertical vacuum coating equipment, relates in particular to a kind of board transport mechanism arrangement of vertical vacuum coating equipment.

Background technology

Existing vertical vacuum coating equipment as shown in Figure 6, be that bottom in cavity 70 and top are respectively equipped with driving structure 71 and one guiding structure 72 that extends along left and right direction, front and inner rear side at cavity 70 respectively is provided with a sputtering source 73 and a well heater 74 again, and glass carrier 75 is arranged on drives on the structure 71 and can advance along left and right direction, the top is subjected to the guiding of guiding structure 72 and can carries out translational motion when glass carrier 75 is advanced.

Aforementioned existing guiding structure 72 is that bottom surface at cavity 70 tops is in conjunction with the vertically extending down substrate holder bar 721 of a plurality of difference, in the bottom of most substrate holder bars 721 in conjunction with a substrate 722, in substrate 722 bottom surfaces with the form at left and right interval in conjunction with many to limited roller 723, each is divided into forward and backward both sides to limited roller 723, and respectively be resisted against the front and the back of glass carrier 75 apical margins, the correcting during as transmission glass carrier 75 and the fixing means of top with the inboard.

But existing glass carrier 75 heats with well heater 74 in the cavity 70 of taking out true hole, when carrying out the plated film operation of glass substrate with sputtering source 73 again, film is easily attached on each limited roller 723, at each limited roller 723 again on the both sides of glass carrier 75, be the form that exposes, therefore in the process of the transmission glass carrier 75 of being everlasting, plated film around the friction limited roller 723 forms dust, drop on the glass substrate of glass carrier 75 carrying and cause the bad of plated film quality, have influence on the yield of board output.

Therefore, the roller of existing vertical vacuum coating equipment transmission glass carrier is the form that exposes, and therefore can produce the problem that the dust pollution product influences yield.

The utility model content

Main purpose of the present utility model provides a kind of board transport mechanism arrangement of vertical vacuum coating equipment, and this device forms in order to hold the guiding ditch of roller in a row at the top of glass carrier, solves the problem that dust drops.

For achieving the above object, the utility model provides a kind of board transport mechanism arrangement of vertical vacuum coating equipment, comprising:

One cavity for vertical housing and have forward and backward and and arranged on left and right sides, wears a sputter space in this inside cavity with the form that runs through and arranged on left and right sides;

One drives structure, is arranged on the bottom this sputter space in, at the end face of this cavity bottom in conjunction with a delivery wheel support along left and right direction extension, at this delivery wheel support with the form at left and right interval in conjunction with a plurality of delivery wheels;

One guiding structure, be arranged on the top in this sputter space, in the bottom surface at this cavity top with the form at left and right interval in conjunction with the vertically extending down substrate holder bar of a plurality of difference, in the bottom of most substrate holder bars in conjunction with a substrate, in the centre of this substrate bottom surface with the form at left and right interval in conjunction with a plurality of roller mount that protrude out down, at the side face of each roller mount bottom with the sheathed roller of rotatable form; And

One glass carrier, be provided with a carrying housing, it is rectangle and the vertical framework that is provided with, the bottom surface of this carrying housing is seated on each delivery wheel of this delivery wheel support, the top of this carrying housing is arranged with one and extends and run through the guiding ditch of and arranged on left and right sides along left and right direction, and each roller that this guiding ditch holds guiding structure rolls in inside.

Further, each protrudes the limiting plate of this carrying housing end face in conjunction with one day to the utility model at the apical margin of the apical margin of described carrying housing front and rear side, respectively this limiting plate is the long slab body that extends along left and right direction, and described guiding ditch is formed between the end face of two limiting plates and this carrying housing.

Further, the utility model forms a guide ramp respectively at the left and right both ends of described each limiting plate inner face.

The utility model forms the guiding ditch at the top of glass carrier, and be provided with a row roller in the bottom of guiding structure, make each roller of guiding structure can be contained in rolling in the guiding ditch, when the sputter space of glass carrier by cavity, when on guiding structure, transmitting, can be subjected to the guiding of each roller.

Beneficial functional of the present utility model is, because each roller is located in the guiding ditch at glass carrier top, therefore dust directly drops in the time of avoiding roller to roll, can avoid the situation of dust pollution glass substrate to take place, again can be hidden each roller of guiding structure bottom, when carrying out sputter, film can be attached on the roller, make that the rotation of roller can be more smooth, can not influence the stability of guiding transmission glass carrier because of adhering to of film.

Description of drawings

Fig. 1 is the stereographic map of the utility model preferred embodiment.

Fig. 2 is the exploded view of the utility model preferred embodiment.

Fig. 3 is the sectional view of the utility model preferred embodiment.

Fig. 4 is the side-view of the utility model preferred embodiment.

Fig. 5 is the sectional view that the utility model preferred embodiment is amplified.

Fig. 6 is the synoptic diagram of existing vertical vacuum coating equipment.

The component symbol explanation

10 ... cavity 11 ... the sputter space

12 ... opening 20 ... sputtering source

30 ... drive structure 31 ... the delivery wheel support

311 ... delivery wheel 40 ... well heater

41 ... heater support 50 ... guiding structure

51 ... substrate holder bar 52 ... substrate

53 ... roller mount 54 ... roller

60 ... glass carrier 61 ... the carrying housing

62 ... limiting plate 621 ... guide ramp

63 ... guiding ditch 70 ... cavity

71 ... drive structure 72 ... guiding structure

721 ... substrate holder bar 722 ... substrate

723 ... limited roller 73 ... sputtering source

74 ... well heater 75 ... the glass carrier

Embodiment

The utility model provides a kind of board transport mechanism arrangement of vertical vacuum coating equipment, please referring to the preferred embodiment of Fig. 1 to Fig. 5, for the utility model is installed in the use form of vertical vacuum coating equipment, comprising:

One cavity 10, for vertical rectangular case and have forward and backward and and arranged on left and right sides, wear a sputter space 11 in cavity 10 inside with the form that runs through and arranged on left and right sides, for vertically and the rectangle hole that extends along left and right direction, the left and right two ends in corresponding sputter space 11 form an orthogonal opening 12 respectively at the and arranged on left and right sides face of cavity 10 opposite location.

One sputtering source 20 is combined in the front of cavity 10.

One drives structure 30, is arranged on the bottom in the sputter space 11, and at the end face of cavity 10 bottoms in conjunction with a delivery wheel support 31 that extends along left and right direction, at delivery wheel support 31 with the form at left and right interval in conjunction with a plurality of delivery wheels 311.

One well heater 40, for the plate shape well heater that vertically is provided with and be located at rear side in the sputter space 11, at delivery wheel support 31 in conjunction with a face heater support 41 of stretching and relying on well heater 40 backwards.

One guiding structure 50, be arranged on the top in the sputter space 11, and in the bottom surface at cavity 10 tops with the form at left and right interval in conjunction with the vertically extending down substrate holder bar 51 of a plurality of difference, in the bottom of most substrate holder bars 51 in conjunction with a substrate 52, be the long slab body that extends along left and right direction, in the centre of substrate 52 bottom surfaces with the form at left and right interval in conjunction with a plurality of roller mount that protrude out down respectively 53, each roller mount 53 is circular vertical cylinder, and each at the side face of bottom with the sheathed roller 54 of rotatable form.

One glass carrier 60, be provided with a carrying housing 61, be rectangle and the vertical framework that is provided with, can locate the glass substrate that carrying needs plated film in the inboard of glass carrier 60, carrying housing 61 is seated on each delivery wheel 311 of delivery wheel support 31 with the bottom surface, each protrudes the limiting plate 62 of carrying housing 61 end faces in conjunction with one day at the apical margin of the apical margin of carrying housing 61 fronts and rear side, respectively be along a left side, the long slab body that right is extended, form between the end face of two limiting plates 62 and carrying housing 61 one by above recessed and along a left side, the guiding ditch 63 that right is extended, the roller 54 that holds each guiding structure 50 with guiding ditch 63 moves and is subjected to the guiding of each roller 54 in inside, on the left side of each limiting plate 62 inner face, right both ends form a guide ramp 621 respectively.

The utility model is arranged in the cavity 10, form guiding ditch 63 at the top of glass carrier 60, and be provided with a row roller 54 in the bottom of guiding structure 50, make each roller 54 of guiding structure 50 can be contained in rolling in the guiding ditch 63, and because each roller 54 enters when guiding ditch 63, can be subjected to each guiding to guide ramp 621, therefore can enter smoothly in the guiding ditch 63 and roll, dust drops when so structure can avoid roller 54 to roll, can avoid the situation of dust pollution glass substrate to take place, each roller 54 that again can hidden guiding structure 50 bottoms, when sputtering source 20 carries out sputter, film can not make that the rotation of roller 54 can be more smooth attached on the roller 54, can not influence the stability of guiding transmission glass carrier 60 because of adhering to of film.

Claims

1. the board transport mechanism arrangement of a vertical vacuum coating equipment is characterized in that, comprising:

2. the board transport mechanism arrangement of vertical vacuum coating equipment according to claim 1, it is characterized in that, each protrudes the limiting plate of this carrying housing end face in conjunction with one day at the apical margin of the apical margin of described carrying housing front and rear side, respectively this limiting plate is the long slab body that extends along left and right direction, and described guiding ditch is formed between the end face of two limiting plates and this carrying housing.

3. the board transport mechanism arrangement of vertical vacuum coating equipment according to claim 2 is characterized in that, forms a guide ramp respectively at the left and right both ends of described each limiting plate inner face.