CN201525882U - Conveyer of a carrying tool - Google Patents
Conveyer of a carrying tool Download PDFInfo
- Publication number
- CN201525882U CN201525882U CN2009202704441U CN200920270444U CN201525882U CN 201525882 U CN201525882 U CN 201525882U CN 2009202704441 U CN2009202704441 U CN 2009202704441U CN 200920270444 U CN200920270444 U CN 200920270444U CN 201525882 U CN201525882 U CN 201525882U
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- CN
- China
- Prior art keywords
- magnetic
- carrier
- unit
- carrying tool
- transport unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model provides a conveyer of a carrying tool. The conveyer is mounted on a vacuum cavity seat and conveys one carrying tool to advance the carrying tool. The conveyer comprises a conveying mechanism for conveying the carrying tool and a magnetic flotation guide rail mechanism corresponding with a guide terminal of the carrying tool. The magnetic flotation guide rail mechanism comprises: a magnetic flotation unit mounted on the guide terminal of the carrying tool; an installation seat installed on the vacuum cavity seat and a fixation guide magnetic unit installed on the installation seat and corresponding with the magnetic flotation unit, wherein the fixation guide magnetic unit and the magnetic flotation unit use the repulsion acting force to make the magnetic flotation unit kept hung in air and be stable. Because the guided element does not generate friction dust during conveying the carrying tool, thus the conveyer increases the cleanliness of the work environment and the processing quality of the processing article.
Description
Technical field
The utility model relates to a kind of transport unit, particularly a kind of transport unit that is used for transmitting carrier specially.
Background technology
Consult Fig. 1, Fig. 2, in sputter processing in the past, for target atom can be deposited on the surface of desired object, normally multi-piece substrate 11 is set up on the axial carrier 12, the carrier 12 that utilizes a transport unit 2 will carry substrate 11 is again delivered in the vacuum chamber seat 13, and this carrier 12 has the drive end 121 and the guide end 122 that is positioned at the top that are positioned at the below.Described vacuum chamber seat 13 has a chamber wall 132 that defines a vacuum chamber 131, and this chamber wall 132 has the side wall portion 133 of two parallel upright and sheet of water prosposition in these side wall portion 133 vertical top wall portion 134.
And this transport unit 2 comprises on one of them side wall portion 133 that is set up in this chamber wall 132 and drive carrier 12 is set up in 122 of the guide end of this top wall portion 134 and carrier 12 along a transfer direction progressive transporting mechanism 21 and one guide mechanism 22.This transporting mechanism 21 has a plurality of 121 delivery wheels that lean on 211 of drive end that are positioned at vacuum chamber 131 and supply carrier 12, because the structure of improvement of the present utility model and transporting mechanism 21 is irrelevant, no longer describes in detail.And this guide mechanism 22 have one on the guide end 122 that is installed in carrier 12 track 221 and the guide bar 222 of top wall portion 134 belows that are installed in vacuum chamber seat 13, a plurality of compartment of terrain, each guide bar 222 all has a target seeker 224 in the guide channel 223 that stretches into this track 221.
When transporting mechanism 21 drives carriers 12 when transfer direction advances, the target seeker 224 by described guide bar 222 stretches in the guide channel 223 of track 221, can prevent carrier 12 when transferring, and this guide end 122 produces and rocks, unsteady phenomenon.
The transport unit 2 that in the past was used for transmitting carrier 12 in design, though the smoothness in the time of can utilizing this guide mechanism 22 to increase carrier 12 handovers, but design with regard to guide bar 222 and track 221, the width of the guide channel 223 of the essential and track 221 of the target seeker 224 of this guide bar 222 cooperates, just can reach preferable guiding effect, but thus, this target seeker 224 also can produce friction with the trough wall surface that defines this guide channel 223, and then produces the friction dust.Because the dust that produces can be dispersed in vacuum chamber 131, so not only has influence on the cleanliness factor of vacuum chamber 131, also can reduce the processing quality of sputter processing object.
The utility model content
The purpose of this utility model provides a kind of cleanliness factor that can improve processing environment, and improves the transport unit of the carrier of processing quality.
The transport unit of carrier of the present utility model is installed on the vacuum chamber seat, and transmits a carrier so that this carrier advances along a transfer direction, and described carrier also has a guide end.And this transport unit comprises a transporting mechanism that is used for transferring this carrier.
The transport unit of carrier described in the utility model also comprises a Magnetically suspended guide rail mechanism to guide end that should carrier, and above-mentioned Magnetically suspended guide rail mechanism comprises: the floating unit of magnetic on guide end that is installed in this carrier, one are installed in mount pad on the described vacuum chamber seat and one and are installed on this mount pad and utilize the magnetic force that repels each other and the fixedly magnetic conduction unit kept at a distance in the floating unit of this magnetic.
The transport unit of carrier described in the utility model, this mount pad has two along transfer direction setting and assembly wall at interval, described fixedly magnetic conduction unit has one and is installed in the described assembly wall first magnetic conductive part on the assembly wall and one and is installed in second magnetic conductive part on the another one assembly wall in the described assembly wall, above-mentioned first magnetic conductive part has one towards floating unitary one first magnetic surface of this magnetic and the first magnetic conduction face identical with this first magnetic surface polarity, and this second magnetic conductive part has one towards floating unitary one second magnetic surface of this magnetic and the second magnetic conduction face identical with this second magnetic surface polarity.
The transport unit of carrier described in the utility model, this mount pad have two between left and right every hanger bar and an attachment rail that is suspended on the below of aforementioned hanger bar and described assembly wall is set.
Beneficial functional of the present utility model is: in the process that carrier is transferred, the floating unit of this magnetic reaches fixedly, and the magnetic conduction unit moves in unsettled mode, rub and can not produce with other element, therefore, this design of the utility model not only can improve the cleanliness factor of Working environment, also can improve the processing quality of processing object.
Description of drawings
Fig. 1 is that a kind of solid of transport unit of carrier is in the past used synoptic diagram;
Fig. 2 is this side-looking scheme of installation of transport unit in the past;
Fig. 3 is the user mode reference drawing of a preferred embodiment of the utility model transport unit, shows that this transport unit is installed on the vacuum chamber seat and the state when carrying a carrier;
Fig. 4 is a front-view schematic diagram of this preferred embodiment;
Fig. 5 is a partial enlarged drawing of this preferred embodiment, mainly shows a Magnetically suspended guide rail mechanism of this transport unit.
Embodiment
Below in conjunction with drawings and Examples the utility model is elaborated.
Consult Fig. 3, Fig. 4, Fig. 5, a preferred embodiment of the utility model transport unit is set up on the vacuum chamber seat 30, and can carry a carrier 31, driving this carrier 31 simultaneously advances along a transfer direction 32, this vacuum chamber seat 30 comprises that a chamber wall 301 and one are defined the vacuum chamber 302 that forms by this chamber wall 301, described chamber wall 301 also has two axial side wall portions 303 and a slice is set up in top wall portion 304 between described side wall portion 303 apical margins, and this carrier 31 has a drive end 311 and the guide end 312 near top wall portion 304 near the below.
The transport unit of present embodiment comprises: one supplies carrier 31 to set up and transmit carrier 31 along transfer direction 32 progressive transporting mechanisms 4 and a Magnetically suspended guide rail mechanism 5 that is used for guiding this carrier 31.
It is not shown and can drive the propulsion source of described power wheel 41 rotations that the transporting mechanism 4 of present embodiment comprises that a plurality of compartment of terrains are set up in the belt unit 42 of the power wheel 41 on one of them side wall portion 303 of this vacuum chamber seat 30, a described power wheel 41 of interlock and one, and each power wheel 41 all has the lead ring ditch 411 that a drive end 311 that is positioned at vacuum chamber 302 and confession carrier 31 sets up.
The Magnetically suspended guide rail mechanism 5 of present embodiment comprises that the mount pad 51, one of top wall portion 304 belows that are suspended on vacuum chamber seat 30 are installed in fixedly magnetic conduction unit 52 on the described mount pad 51 and the floating unit 53 of magnetic on guide end 312 that is fixedly mounted in carrier 31.This mount pad 51 have two between left and right every hanger bar 511 and an attachment rail 512 that is suspended on described hanger bar 511 belows, this attachment rail 512 has two along transfer direction 32 extensions and front and back assembly wall 513 at interval, and each assembly wall 513 all has a mounting face that is oppositely arranged 514.The fixedly magnetic conduction unit 52 of present embodiment has first magnetic conductive part 521 and second magnetic conductive part 522 that is installed on the another one mounting face 514 that are installed on one of them mounting face 514, above-mentioned first magnetic conductive part 521 and second magnetic conductive part 522 all are the forms of strong magnets, and first magnetic conductive part 521 have first a magnetic conduction face 523 towards second magnetic conductive part 522, second magnetic conductive part 522 has second a magnetic conduction face 524 towards first magnetic conductive part 521, and the polarity of the above-mentioned first magnetic conduction face 523 and the second magnetic conduction face 524 is opposite.
The floating unit 53 of the magnetic of present embodiment is along transfer direction 32 horizontal expansions, it is fixed on guide end 312 tops of carrier 31, and be positioned at 522 of this first magnetic conductive part 521 and second magnetic conductive parts, the floating unit 53 of this magnetic also is the form of strong magnets, and has the first magnetic surface 531 and second a magnetic surface 532 towards the second magnetic conduction face 524 towards the first magnetic conduction face 523, this first magnetic surface 531 is identical with the polarity of the first magnetic conduction face 523, and the polarity of the second magnetic surface 532 and the second magnetic conduction face 524 also is identical.
The transport unit of present embodiment in use, the drive end 311 of this carrier 31 is set up on the lead ring ditch 411 of power wheel 41, and advances along this transfer direction 32.And in the process that carrier 31 is transferred, because the top of this carrier 31 is equipped with the floating unit 53 of this magnetic, the floating unit 53 of described magnetic is positioned at 522 of first magnetic conductive part 521 and second magnetic conductive parts again, adding the first magnetic surface 531 of the floating unit 53 of this magnetic and the first magnetic conduction face 523 and the second magnetic conduction face 524 of the second magnetic surface 532 and correspondence all is homopolar-repulsion, therefore, utilize these relations, can allow the floating unit 53 of magnetic not can with situation that first magnetic conductive part 521 and second magnetic conductive part 522 contacts under, reach the purpose of stablizing, not rocking when transferring along with carrier 31.In other words, because present embodiment is in transferring the process of carrier 31, the element of this Magnetically suspended guide rail mechanism 5 can be against, friction, and therefore, this design of the utility model can improve the cleanliness factor of processing environment and the processing quality of processing object.
In design, the floating unit 53 of magnetic of the present utility model and fixedly magnetic conduction unit 52 except disclosing the strong magnets bar of use strip as embodiment, one of them can also be changed over the form of fritter at interval, that is to say, the floating unit 53 of magnetic of the present utility model also can be the strong magnets piece at a plurality of intervals, perhaps fixedly first magnetic conductive part 521 of magnetic conduction unit 52 and second magnetic conductive part 522 change and become the strong magnets piece that a plurality of intervals are provided with, and above change can reach the creation purpose of the utility model expection.
Claims (3)
1. the transport unit of a carrier, it is installed on the vacuum chamber seat with a vacuum chamber, and transmit a carrier so that this carrier advances along a transfer direction, have a guide end on the described carrier, and the transport unit of this carrier comprises: transfer this carrier progressive transporting mechanism for one;
It is characterized in that, the transport unit of this carrier also comprises a Magnetically suspended guide rail mechanism, and above-mentioned Magnetically suspended guide rail mechanism comprises: the floating unit of magnetic on guide end that is installed in this carrier, one are installed in mount pad on the described vacuum chamber seat and one and are installed on this mount pad and utilize the magnetic force that repels each other and the fixedly magnetic conduction unit kept at a distance in the floating unit of this magnetic.
2. according to the transport unit of the described carrier of claim 1, it is characterized in that, this mount pad has two along transfer direction setting and assembly wall at interval, described fixedly magnetic conduction unit has one and is installed in the described assembly wall first magnetic conductive part on the assembly wall and one and is installed in second magnetic conductive part on the another one assembly wall in the described assembly wall, above-mentioned first magnetic conductive part has one towards floating unitary one first magnetic surface of this magnetic and the first magnetic conduction face identical with this first magnetic surface polarity, and this second magnetic conductive part has one towards floating unitary one second magnetic surface of this magnetic and the second magnetic conduction face identical with this second magnetic surface polarity.
3. according to the transport unit of the described carrier of claim 2, it is characterized in that, this mount pad have two between left and right every hanger bar and an attachment rail that is suspended on the below of aforementioned hanger bar and described assembly wall is set.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202704441U CN201525882U (en) | 2009-11-19 | 2009-11-19 | Conveyer of a carrying tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202704441U CN201525882U (en) | 2009-11-19 | 2009-11-19 | Conveyer of a carrying tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201525882U true CN201525882U (en) | 2010-07-14 |
Family
ID=42517175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202704441U Expired - Fee Related CN201525882U (en) | 2009-11-19 | 2009-11-19 | Conveyer of a carrying tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201525882U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107488834A (en) * | 2017-08-15 | 2017-12-19 | 武汉华星光电半导体显示技术有限公司 | A kind of conveyer and vacuum sputtering equipment |
-
2009
- 2009-11-19 CN CN2009202704441U patent/CN201525882U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107488834A (en) * | 2017-08-15 | 2017-12-19 | 武汉华星光电半导体显示技术有限公司 | A kind of conveyer and vacuum sputtering equipment |
| CN107488834B (en) * | 2017-08-15 | 2019-08-02 | 武汉华星光电半导体显示技术有限公司 | A kind of transmission device and vacuum sputtering equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100714 Termination date: 20141119 |
|
| EXPY | Termination of patent right or utility model |