CN107488834A - A kind of conveyer and vacuum sputtering equipment - Google Patents
A kind of conveyer and vacuum sputtering equipment Download PDFInfo
- Publication number
- CN107488834A CN107488834A CN201710711154.5A CN201710711154A CN107488834A CN 107488834 A CN107488834 A CN 107488834A CN 201710711154 A CN201710711154 A CN 201710711154A CN 107488834 A CN107488834 A CN 107488834A
- Authority
- CN
- China
- Prior art keywords
- magnet
- guide rail
- conveyer
- load carrier
- poles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
Abstract
The invention discloses a kind of conveyer, the conveyer includes the first guide rail, the second guide rail and the load carrier between the first guide rail, the second guide rail;Load carrier includes first end and the second end;Wherein, first end is set with respect to the first guide rail, and identical first magnet of polarized and the second magnet are set on first end and the first guide rail;The second end is set with respect to the second guide rail, and the magnet of polarized identical the 3rd and the 4th magnet are set on the second end and the second guide rail;So that load carrier is suspended between the first guide rail and the second guide rail.By the above-mentioned means, the present invention can strengthen the transmission stability of conveyer.
Description
Technical field
The present invention relates to technical field of surface, more particularly to a kind of conveyer and vacuum sputtering equipment.
Background technology
Vapour deposition (Physical Vapor Deposition, PVD) is that atom or molecule are transferred into base material table by source
Process on face, it is usually used in substrate surface film forming.Generally there is both of which using more Pvd equipment at present,
One kind is a piece leaf formula, and a kind of is vertical.The equipment of both of which respectively has advantage, and compared to a piece leaf formula, vertical equipment has yield
Greatly, the advantages that thickness homogeneity is good.But vertical equipment is asked in conveyer stability, substrate surface impurity particle quantity etc.
It is poor in topic.
Referring to Fig. 1, Fig. 1 is the structural representation of conveyer in prior art vertical vacuum sputtering equipment.As schemed
Show, substrate is substantially fixed on load transferring vehicle by the structure of conveyer in vertical equipment, and metal is housed below load transferring vehicle
Bar, metallic rod are driven on drive, and drive is then to be connected by belt and driven by motor.Present inventor is in length
Found in the research and development of phase, existing structure there is also some problems, such as:Load transferring vehicle can rub when being transmitted on drive with drive
Wipe and collide, causing vibrations to cause, the dust on load transferring vehicle is shaken off or substrate placement is unstable;The mechanism of existing conveyer
Complexity, belt tension, motor rotary speed, load transferring vehicle size etc. after a long time use all can be unstable, and then causes substrate to fall piece;
The collision of load transferring vehicle and mechanical parts can cause the component life-span such as drive magnetic fluid and load transferring vehicle lower guideway in existing transmit process
The problems such as shortening.
The content of the invention
The present invention solves the technical problem of a kind of conveyer and vacuum sputtering equipment is provided, transmission can be strengthened
The transmission stability of device.
In order to solve the above technical problems, one aspect of the present invention is:A kind of conveyer is provided, the transmission
Device includes the first guide rail, the second guide rail and the load carrier between the first guide rail, the second guide rail;Load carrier includes the
One end, the second end and the receiving space between first end, the second end, receiving space, which is used to load, to be transmitted
Thing;Wherein, first end is set with respect to the first guide rail, the first magnet is provided with first end, and be provided with the first guide rail
With first the second magnet of magnet polarities identical;The second end is set with respect to the second guide rail, and the 3rd magnetic is provided with the second end
Iron, and be provided with the second guide rail and the magnet of the 3rd magnet polarities identical the 4th;So that load carrier is suspended in the first guide rail
Between the second guide rail.
In order to solve the above technical problems, another technical solution used in the present invention is:A kind of vacuum sputtering equipment is provided,
The vacuum sputtering equipment includes above-mentioned conveyer.
The beneficial effects of the invention are as follows:The situation of prior art is different from, the present invention provides a kind of conveyer, the transmission
Device includes the first guide rail, the second guide rail and the load carrier between the first guide rail, the second guide rail;Load carrier includes the
One end, the second end and the receiving space between first end, the second end, receiving space, which is used to load, to be transmitted
Thing;Wherein, first end is set with respect to the first guide rail, the first magnet is provided with first end, and be provided with the first guide rail
With first the second magnet of magnet polarities identical;The second end is set with respect to the second guide rail, and the 3rd magnetic is provided with the second end
Iron, and be provided with the second guide rail and the magnet of the 3rd magnet polarities identical the 4th;So that load carrier is suspended in the first guide rail
Between the second guide rail.By setting polarity identical magnet on load carrier and guide rail, repelled each other original using same polarity magnet
Reason, can be such that load carrier is suspended between the first guide rail and the second guide rail, so in transmit process, hold by magneticaction
Mounted mechanism will not contact with guide rail, reduce because the mechanical collision of load carrier and guide rail, friction caused by dust shake off, quilt
Transmission thing drops, is damaged by transmission thing, transmits the problems such as unstable, improves transmission stability.
Brief description of the drawings
Fig. 1 is the structural representation of conveyer in prior art vertical vacuum sputtering equipment;
Fig. 2 is the positive structure diagram of the embodiment of conveyer one of the present invention;
Fig. 3 is the cross-sectional view in the AA directions of the embodiment of conveyer one in Fig. 2;
Fig. 4 is the cross-sectional view in the AA directions of another embodiment of conveyer in Fig. 2;
Fig. 5 is the structural representation of the embodiment of conveyer one of the present invention;
Fig. 6 is the cross-sectional view in the AA directions of the embodiment of conveyer one in Fig. 5;
Fig. 7 is the cross-sectional view in the BB directions of the embodiment of conveyer one in Fig. 6;
Fig. 8 is the structural representation of the embodiment of conveyer one of the present invention;
Fig. 9 is the structural representation of the embodiment of vacuum sputtering equipment one of the present invention.
Embodiment
To make the purpose of the present invention, technical scheme and effect clearer, clear and definite, develop simultaneously embodiment pair referring to the drawings
The present invention is further described.
Referring to Fig. 2, Fig. 2 is the positive structure diagram of the embodiment of conveyer one of the present invention.The embodiment carries
For a kind of conveyer, the conveyer includes:First guide rail 201, the second guide rail 203 and led positioned at the first guide rail 201, second
Load carrier 202 between rail 203;Load carrier 202 includes first end 2021, the second end 2023 and positioned at first end
2021st, the receiving space 2022 between the second end 2023, receiving space 2022 are used to load by transmission thing.
Wherein, first end 2021 is set with respect to the first guide rail 201, and the first magnet (figure is provided with first end 2021
Do not show), and be provided with the first guide rail 201 and first magnet polarities identical the second magnet (not shown);The second end 2023
Set with respect to the second guide rail 203, the 3rd magnet (not shown), and 203 setting on the second guide rail are provided with the second end 2023
Have and the magnet (not shown) of the 3rd magnet polarities identical the 4th;So that load carrier 202 is suspended in the first guide rail 201 and second
Between guide rail 203.
Specifically, the first magnet, the second magnet, the 3rd magnet and the 4th magnet can be S poles magnet or N poles
Magnet, repelled each other principle using same polarity magnet, by magneticaction ensure load carrier 202 not with the first guide rail 201 and second
Guide rail 203 directly contacts.First magnet, the second magnet, the 3rd magnet and the 4th magnet have with by the weight phase of transmission thing
The predetermined magnetism intensity matched somebody with somebody, you can to select the first magnet, the second magnetic according to load carrier 202 and by the weight of transmission thing
The magnetism intensity of iron, the 3rd magnet and the 4th magnet, to ensure that load carrier 202 can be suspended in the first guide rail 201 and second
Between guide rail 203.
Present embodiment is repelled each other by setting polarity identical magnet on load carrier and guide rail using same polarity magnet
Principle, by magneticaction load carrier can be made to be suspended between the first guide rail and the second guide rail, so in transmit process,
Load carrier will not contact with guide rail, reduce because the mechanical collision of load carrier and guide rail, friction caused by dust shake off,
Dropped by transmission thing, damaged by transmission thing, transmit the problems such as unstable, improve transmission stability.
Referring to Fig. 3, Fig. 3 is the cross-sectional view in the AA directions of the embodiment of conveyer one in Fig. 2.First leads
The guide rail 203 of rail 201/ second includes the first top 302, first side 301, second side 303 and by the first top 302, first
Surround the first groove 304 to be formed for side 301, second side 303, and the second end 2023 of first end 2021/ is contained in first
In groove 304;First top 302 includes the first half areas 3021 and the second half areas 3022, the first half area 3021 and first sides 301
It is provided with N poles magnet, the second half areas 3022 and second side 303 are provided with S poles magnet, the second end of first end 2021/
2023 are provided with N poles magnet, the second end of first end 2021/ close to the region in the first half areas 3021 and first side 301
2023 are provided with S poles magnet close to the region in the second half areas 3022 and second side 303.
In another embodiment, S poles magnet can also be provided with the first half areas 3021 and first side 301, second
Half area 3022 and second side 303 are provided with N poles magnet, and the second end 2023 of first end 2021/ is close to the first half areas 3021
The region of first side 301 is provided with S poles magnet, the second end 2023 of first end 2021/ is close to the second half Hes of area 3022
The region of second side 303 is provided with N poles magnet.By setting groove on the guide rail of the first guide rail/second, can house and solid
Determine load carrier, and set on the first guide rail and the second guide rail with load carrier polarity identical magnet, can ensure to carry
Mechanism not with the component contact on the first guide rail and the second guide rail or collision.In other embodiments, the first guide rail/the second is led
Rail can also be not provided with groove, directly be planar structure.
Referring to Fig. 4, Fig. 4 is the cross-sectional view in the AA directions of another embodiment of conveyer in Fig. 2.First
The guide rail 203 of guide rail 201/ second includes the second top 402, the 3rd side 401, four side 403 and by the second top 402, the
Three sides 401, four side 403 surround the second groove 404 to be formed, and the second end 2023 of first end 2021/ is contained in
In two grooves 404;Second top 402 and the 3rd side 401 are provided with N poles magnet, and four side 403 is provided with S poles magnet, the
The second end 2022 of one end 2021/ is provided with N poles magnet, first end close to the region on the second top 402 and the 3rd side 401
The second end 2022 of portion 2021/ is provided with S poles magnet close to the region of four side 403.
In another embodiment, the second top 402 and the 3rd side 401 can also be provided with S poles magnet, the 4th side
Side 403 is provided with N poles magnet, and the second end 2022 of first end 2021/ is close to the second top 402 and the area of the 3rd side 401
Domain is provided with S poles magnet, and the second end 2022 of first end 2021/ is provided with N poles magnet close to the region of four side 403.
Similarly, by setting groove on the guide rail of the first guide rail/second, can house and fixed load carrier, and in the first guide rail
With setting on the second guide rail and load carrier polarity identical magnet, it can ensure that load carrier is not led with the first guide rail and second
Component contact or collision on rail.In other embodiments, the guide rail of the first guide rail/second can also be not provided with groove, directly
It is planar structure.
Referring to Fig. 5, Fig. 5 is the structural representation of the embodiment of conveyer one of the present invention.In the embodiment, transmission
Device is vertical type conveyer, i.e., can make to be transmitted thing and be transmitted with erectility, wherein, the first guide rail 501 is located at
The top of load carrier 502, the second guide rail 503 are located at the lower section of load carrier 502, and conveyer also includes drive mechanism 504,
Drive mechanism 504 is located at the lower section of the second guide rail 503.
Fig. 3 and Fig. 6 are referred to, Fig. 6 is the cross-sectional view in the AA directions of the embodiment of conveyer one in Fig. 5.
In this embodiment, the first end 5021 of the first guide rail 501 and load carrier 502 is set using the structure type in Fig. 3,
To ensure that the first end 5021 of load carrier 502 will not be contacted or collided with the first guide rail 501;Second guide rail 503 and carrying
The second end 5023 of mechanism 502 is set using the structure type in Fig. 6, by the bottom 602 of the second guide rail 503 and carrying
N poles magnet is provided with the second end 5023 of mechanism 502, can ensure load carrier 502 be suspended in the second guide rail 503 it
On;Certainly in other embodiments, can also be in the bottom 602 of the second guide rail 503 and the second end of load carrier 502
S poles magnet is provided with 5023;By setting N/S poles magnetic on the first side 601 of the second guide rail 503 and second side 603
Iron, set and the first side close to the region of first side 601 and second side 603 in the first end 5023 of load carrier 502
Side 601 and the magnet of the homopolarity of second side 603, it can ensure that load carrier 502 does not contact with the second guide rail 503.The embodiment party
In formula, drive mechanism 604 is arranged on the lower section of the second guide rail 503, is moved for driving transmission device.
Referring to Fig. 7, Fig. 7 is the cross-sectional view in the BB directions of the embodiment of conveyer one in Fig. 6.The implementation
In mode, drive mechanism includes motor (not shown) and driving wheel 701, is provided with and the polarity of the 3rd magnet 703 on driving wheel 701
The magnet 702 of identical the 5th, the 3rd magnet 703 are set for wedge shape, and motor driving driving wheel 701 rotates, by changing the 5th magnetic
Active force drive transmission unit movement between the magnet 703 of iron 702 and the 3rd.
Specifically, because the 3rd magnet 703 is set for wedge shape, driving wheel 701 is when rotating, the distance of the 5th magnet 702 the
The distance of diverse location (A points and B points in figure) is different on three magnet 703, therefore A on the 5th magnet 702 and the 3rd magnet 703
Active force between point and B points is different, can be poor in the presence of a power, and then promotes conveyer movement.Alternatively, the 3rd magnet
703 and the 5th magnet 702 can be N poles magnet or S poles magnet.In other embodiments, the 3rd magnet 703
Can be that trapezoidal grade has other figures of inclined plane etc., driving wheel 701 can be circle, regular hexagon, octagon isotactic
Then shape etc..
Referring to Fig. 8, Fig. 8 is the structural representation of the embodiment of conveyer one of the present invention.In the embodiment, transmission
Device 801 is applied to vacuum treatment device, specifically, when assembling vacuum treatment device, it is necessary to which conveyer 801 is positioned over
In vacuum chamber 803, and drive mechanism 802 is then positioned over outside vacuum chamber 803.The concrete structure of conveyer 801 is set
The description referred in above-mentioned embodiment is put, will not be repeated here.
Wherein, in the embodiment, the first set magnet in conveyer 801, the second magnet, the 3rd magnet and the
Four magnet are the magnet after application of vacuum, i.e., above-mentioned magnet should meet condition of high vacuum degree requirement.
Referring to Fig. 9, Fig. 9 is the structural representation of the embodiment of vacuum sputtering equipment one of the present invention.In the embodiment,
Vacuum sputtering equipment includes conveyer 901, drive mechanism 902 and sputter process room 903.Wherein, conveyer 901 is specific
Structure setting refers to the description in above-mentioned embodiment, will not be repeated here.The vacuum sputtering equipment has and above-mentioned transmission
Device identical beneficial effect, will not be repeated here.
To sum up, presently filed embodiment provides a kind of conveyer, and the conveyer includes the first guide rail, the second guide rail
And the load carrier between the first guide rail, the second guide rail;Load carrier includes first end, the second end and positioned at first
Receiving space between end, the second end, receiving space are used to load by transmission thing;Wherein, first end is led with respect to first
Rail is set, and is provided with the first magnet on first end, and be provided with the first guide rail and first the second magnetic of magnet polarities identical
Iron;The second end is set with respect to the second guide rail, the 3rd magnet is provided with the second end, and be provided with and the 3rd on the second guide rail
The magnet of magnet polarities identical the 4th;So that load carrier is suspended between the first guide rail and the second guide rail.By in carrying machine
Polarity identical magnet is set on structure and guide rail, is repelled each other principle using same polarity magnet, carrying machine can be made by magneticaction
Structure is suspended between the first guide rail and the second guide rail, and so in transmit process, load carrier will not contact with guide rail, is reduced
The dust caused by the mechanical collision of load carrier and guide rail, friction shakes off, dropped by transmission thing, by the damage of transmission thing, pass
The problems such as unstable is sent, improves transmission stability.
Embodiments of the present invention are the foregoing is only, are not intended to limit the scope of the invention, it is every to utilize this
The equivalent structure or equivalent flow conversion that description of the invention and accompanying drawing content are made, or directly or indirectly it is used in other correlations
Technical field, it is included within the scope of the present invention.
Claims (10)
1. a kind of conveyer, it is characterised in that the conveyer includes:First guide rail, the second guide rail and positioned at described
Load carrier between one guide rail, the second guide rail;The load carrier includes first end, the second end and positioned at described first
Receiving space between end, the second end, the receiving space are used to load by transmission thing;Wherein,
Relatively described first guide rail of the first end is set, and the first magnet, and described first are provided with the first end
It is provided with guide rail and the second magnet of the first magnet polarities identical;Relatively described second guide rail of the second end is set
Put, the 3rd magnet is provided with the second end, and be provided with second guide rail identical with the 3rd magnet polarities
The 4th magnet;So that the load carrier is suspended between first guide rail and the second guide rail.
2. device according to claim 1, it is characterised in that first guide rail/second guide rail includes the first top
End, first side, second side and the first groove formed is surrounded by first top, first side, second side, it is described
First end/the second end is contained in first groove;First top includes the first half area and the second half area,
The first half area and the first side are provided with N poles magnet, and the second half area and the second side are provided with S poles magnetic
Iron, the first end/the second end are provided with N poles magnetic close to the region in the first half area and the first side
Iron, the first end/the second end are provided with S poles magnetic close to the region in the second half area and the second side
Iron.
3. device according to claim 1, it is characterised in that first guide rail/second guide rail includes the second top
End, the 3rd side, four side and the second groove formed is surrounded by second top, the 3rd side, four side, it is described
First end/the second end is contained in second groove;Second top and the 3rd side are provided with N poles
Magnet, the four side are provided with S poles magnet, and the first end/the second end is close to second top and institute
The region for stating the 3rd side is provided with N poles magnet, and the first end/the second end is close to the region of the four side
It is provided with S poles magnet.
4. device according to claim 1, it is characterised in that the conveyer is vertical type conveyer, so that institute
State and transmitted by transmission thing with erectility, wherein, first guide rail is located at the top of the load carrier, and described second
Guide rail is located at the lower section of the load carrier, and the conveyer also includes drive mechanism, and the drive mechanism is positioned at described the
The lower section of two guide rails.
5. device according to claim 4, it is characterised in that the drive mechanism includes motor and driving wheel, the drive
It is provided with driving wheel and is set with the magnet of the 3rd magnet polarities identical the 5th, the 3rd magnet for wedge shape, the motor
Drive the driving wheel to rotate, the transmission is driven by changing the active force between the 5th magnet and the 3rd magnet
Device moves.
6. device according to claim 5, it is characterised in that the driving wheel is in circle, regular hexagon, octagon
One kind.
7. device according to claim 5, it is characterised in that the conveyer is applied to vacuum treatment device, wherein,
The conveyer is positioned over application of vacuum intracavitary, and the drive mechanism is positioned over outside vacuum chamber.
8. device according to claim 7, it is characterised in that first magnet, the second magnet, the 3rd magnet and the 4th
Magnet is the magnet after application of vacuum.
9. device according to claim 1, it is characterised in that first magnet, the second magnet, the 3rd magnet and the 4th
Magnet has the predetermined magnetism intensity to match with the weight by transmission thing.
10. a kind of vacuum sputtering equipment, it is characterised in that the vacuum sputtering equipment is included such as any one of claim 1-9 institutes
The conveyer stated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710711154.5A CN107488834B (en) | 2017-08-15 | 2017-08-15 | A kind of transmission device and vacuum sputtering equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710711154.5A CN107488834B (en) | 2017-08-15 | 2017-08-15 | A kind of transmission device and vacuum sputtering equipment |
Publications (2)
Publication Number | Publication Date |
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CN107488834A true CN107488834A (en) | 2017-12-19 |
CN107488834B CN107488834B (en) | 2019-08-02 |
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CN201710711154.5A Active CN107488834B (en) | 2017-08-15 | 2017-08-15 | A kind of transmission device and vacuum sputtering equipment |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110241396A (en) * | 2019-07-16 | 2019-09-17 | 上海应用技术大学 | A kind of vacuum film plating substrate fixture |
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CN201525882U (en) * | 2009-11-19 | 2010-07-14 | 北儒精密股份有限公司 | Conveyer of a carrying tool |
CN202913053U (en) * | 2012-03-14 | 2013-05-01 | 无锡康力电子有限公司 | Magnetic positioning system with substrate frames |
CN104451585A (en) * | 2013-09-12 | 2015-03-25 | 三星显示有限公司 | Deposition source transporting apparatus |
CN204325488U (en) * | 2014-12-23 | 2015-05-13 | 洛阳康耀电子有限公司 | A kind of vacuum magnetron sputtering coating film magnetic suspension driving gear |
CN204999310U (en) * | 2015-09-29 | 2016-01-27 | 深圳市信宇人科技有限公司 | Charging carriage with function is carried in magnetic suspension |
CN105644388A (en) * | 2016-02-05 | 2016-06-08 | 陈德荣 | Electric permanent maglev track traffic system |
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CN201525882U (en) * | 2009-11-19 | 2010-07-14 | 北儒精密股份有限公司 | Conveyer of a carrying tool |
CN202913053U (en) * | 2012-03-14 | 2013-05-01 | 无锡康力电子有限公司 | Magnetic positioning system with substrate frames |
CN104451585A (en) * | 2013-09-12 | 2015-03-25 | 三星显示有限公司 | Deposition source transporting apparatus |
CN204325488U (en) * | 2014-12-23 | 2015-05-13 | 洛阳康耀电子有限公司 | A kind of vacuum magnetron sputtering coating film magnetic suspension driving gear |
CN204999310U (en) * | 2015-09-29 | 2016-01-27 | 深圳市信宇人科技有限公司 | Charging carriage with function is carried in magnetic suspension |
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CN110241396A (en) * | 2019-07-16 | 2019-09-17 | 上海应用技术大学 | A kind of vacuum film plating substrate fixture |
CN110241396B (en) * | 2019-07-16 | 2021-12-03 | 上海应用技术大学 | Vacuum coating substrate clamp |
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