CN215853592U - PVD coating equipment cleaning device and have its PVD coating equipment - Google Patents

Abstract

The utility model relates to the technical field of dust removal of coating equipment, in particular to a cleaning device of PVD (physical vapor deposition) coating equipment and the PVD coating equipment with the cleaning device. The cleaning device of the PVD coating equipment comprises a cleaning component and a limiting component, wherein the cleaning component is arranged on a conveying belt and is provided with a dust-sticking wheel unit, and the dust-sticking wheel unit can rotate and can move along with the conveying belt under the action of the conveying belt; the limiting assembly is used for blocking the cleaning assembly at a preset position of the conveyor belt, so that the dust sticking wheel unit can rotate under the driving of the conveyor belt, and the conveyor belt is cleaned. The utility model has the advantages that: under the action of the conveyor belt and the limiting assembly, the limiting assembly resists the cleaning assembly to continuously move along with the conveyor belt at a preset position, so that the cleaning assembly is driven to rotate in the continuous movement process of the conveyor belt, and the cleaning assembly can clean the conveyor belt; the cleaning device does not need to be stopped periodically for manual cleaning, avoids the reduction of the productivity of the PVD coating equipment, has good cleaning effect, is convenient to use and has low cost.

Description

PVD coating equipment cleaning device and have its PVD coating equipment

Technical Field

The utility model relates to the technical field of dust removal of coating equipment, in particular to a cleaning device of PVD (physical vapor deposition) coating equipment and the PVD coating equipment with the cleaning device.

Background

The photovoltaic cell PVD coating equipment can coat a film on a cell tray, after a TCO film is coated on the tray, the tray is driven by a conveying belt and a roller, relative friction is generated in the driving process, so that the film coated on the tray can be rubbed into powder, a large amount of TCO yellow powder is generated, and the TCO yellow powder can be loosely adhered to the conveying belt or the roller; and in the process that conveyer belt and gyro wheel continue to move, TCO yellow powder can fly away everywhere to influence the inside cleanliness factor of PVD coating equipment, and then influence the cleanliness factor of cell on the tray, reduce battery quality.

However, the existing method for cleaning dust is to perform manual cleaning by stopping machine regularly, and the dust cleaning by stopping machine needs longer steps of cooling, opening a cavity cover, vacuumizing and the like, so that the cost is high, the time is long, and the utilization rate of PVD (physical vapor deposition) coating equipment is reduced.

SUMMERY OF THE UTILITY MODEL

In view of the above, there is a need to provide a PVD coating apparatus cleaning device with good cleaning effect, convenient use, low cost and simple structure, and a PVD coating apparatus having the same.

In order to solve the technical problem, the application provides the following technical scheme:

the cleaning device for the PVD coating equipment comprises a conveying belt, and further comprises a cleaning component and a limiting component, wherein the cleaning component is arranged on the conveying belt, and is provided with a dust sticking wheel unit which can rotate and can move along with the conveying belt under the action of the conveying belt;

the limiting assembly is used for blocking the cleaning assembly at a preset position of the conveyor belt, so that the dust sticking wheel unit can rotate under the driving of the conveyor belt, and the conveyor belt is cleaned.

In the application, the cleaning assembly and the limiting assembly are arranged, and under the action of the conveyor belt and the limiting assembly, the limiting assembly stops the cleaning assembly to continuously move along with the conveyor belt at a preset position, so that the dust adhering wheel unit can be driven to rotate in the continuous movement process of the conveyor belt, and the dust adhering wheel unit can clean the conveyor belt; the cleaning device does not need to be stopped periodically for manual cleaning, avoids the reduction of the productivity of the PVD coating equipment, has good cleaning effect, is convenient to use and has low cost.

In one embodiment, the cleaning assembly comprises a frame, the frame can be in limit fit with the limiting assembly at a preset position, and the dust adhesion wheel unit is rotatably mounted on the frame so that the dust adhesion wheel unit can rotate relative to the frame.

According to the arrangement, the dust adhesion wheel unit is arranged on the frame, and when the cleaning assembly moves to a preset position along with the conveyor belt, the limiting assembly can limit the frame, so that the dust adhesion wheel unit can rotate on the conveyor belt to clean the conveyor belt; simple structure, low cost and high utilization rate.

In one embodiment, the number of the dust adhesion wheel units is multiple, and the dust adhesion wheel units are arranged on one side of the frame at intervals; or a plurality of the dust sticking wheel units are arranged on two sides of the frame.

So set up to make the dust adhesion wheel unit clean the conveyer belt.

In one embodiment, the dust-sticking wheel unit comprises a wheel shaft, a bearing and a sticking wheel, one end of the wheel shaft is connected with the frame, the other end of the wheel shaft is connected with the bearing, and the sticking wheel is sleeved on the bearing and can rotate relative to the wheel shaft.

So set up, simple structure, with low costs and high-usage will glue the wheel cover and locate on the bearing, be convenient for glue the rotation of taking turns, glue the wheel and can be when the frame is spacing, along with the continuation motion rotation on the conveyer belt of conveyer belt to clean the conveyer belt.

In one embodiment, the axle is threaded at one end to the frame.

So set up, the installation and the dismantlement of the sticky dust wheel unit of being convenient for to can wash the sticky dust wheel unit after dismantling, make can used repeatedly, the high-usage.

In one embodiment, the adhesive wheel is detachably connected with the bearing.

So set up, be convenient for install and dismantle gluing the wheel.

In one embodiment, the limiting component comprises a driving component and a limiting block, and the limiting block is connected with the driving component and can be extended or retracted under the action of the driving component to block or unblock the cleaning component.

According to the arrangement, before the cleaning assembly is placed in the PVD coating equipment, the driving piece drives the limiting block to do stretching movement, so that the limiting block reaches a preset position; after the cleaning assembly is placed into the PVD coating equipment, the cleaning assembly can be blocked by the limiting block at the preset position, so that the dust-binding wheel unit can rotate.

In one embodiment, the limiting assembly is provided with a plurality of limiting assemblies, and the plurality of limiting assemblies are arranged at intervals.

So set up, can make the cleaning assembly by spacing firm more stable that subassembly kept out.

The application also provides PVD coating equipment, which comprises the cleaning device for the PVD coating equipment.

In one embodiment, the number of the cleaning devices is multiple, and the cleaning devices can be sequentially arranged on the conveyor belt.

So set up, can further improve clean efficiency.

Compared with the prior art, the cleaning device for the PVD coating equipment is provided with the cleaning assembly and the limiting assembly, and under the action of the conveying belt and the limiting assembly, the limiting assembly supports the cleaning assembly to move continuously along with the conveying belt at the preset position, so that the dust-sticking wheel unit can be driven to rotate in the process of continuous movement of the conveying belt, and the dust-sticking wheel unit can clean the conveying belt; the cleaning device does not need to be stopped periodically for manual cleaning, avoids the reduction of the productivity of the PVD coating equipment, has good cleaning effect, is convenient to use and has low cost.

Drawings

FIG. 1 is a schematic view of a cleaning device for a PVD coating apparatus provided by the utility model in operation.

FIG. 2 is a top view of the cleaning apparatus of the PVD coating apparatus of FIG. 1.

Fig. 3 is a schematic structural diagram of a cleaning assembly provided by the present invention.

Fig. 4 is a partially enlarged view of a portion a in fig. 3.

Fig. 5 is a schematic structural diagram of a dust-binding wheel unit provided by the utility model.

Fig. 6 is a front view of a dust wheel unit provided by the present invention.

Fig. 7 is a schematic cross-sectional view taken along line B-B in fig. 6.

In the figure, 100, a cleaning device of a PVD coating device; 10. a conveyor belt; 20. a cleaning assembly; 21. a frame; 211. a main rod; 2111. a groove; 212. an auxiliary rod; 22. a dust-binding wheel unit; 221. a wheel axle; 222. a bearing; 223. sticking a wheel; 224. a locking member; 30. a limiting component; 31. a drive member; 32. a limiting block; 40. a vacuum chamber; 41. a gate valve; 42. a pipeline; 43. a vacuum pump.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.

It will be understood that when an element is referred to as being "mounted on" another element, it can be directly mounted on the other element or intervening elements may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present. When an element is referred to as being "secured to" another element, it can be directly secured to the other element or intervening elements may also be present.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. As used herein, the term "or/and" includes any and all combinations of one or more of the associated listed items.

As shown in fig. 1, the present application provides a cleaning device 100 for a PVD coating apparatus, which is used for cleaning dust on a conveyor belt 10 in the PVD coating apparatus to ensure cleanliness of the interior of the PVD coating apparatus.

The existing photovoltaic cell PVD coating equipment can coat a film on a cell tray, after a TCO film is coated on the tray, the tray is driven by a conveyor belt and a roller, relative friction is generated in the driving process, so that the film coated on the tray can be rubbed into powder, a large amount of TCO yellow powder is generated, and the TCO yellow powder can be loosely adhered to the conveyor belt or the roller; and in the process that conveyer belt and gyro wheel continue to move, TCO yellow powder can fly away everywhere to influence the inside cleanliness factor of PVD coating equipment, and then influence the cleanliness factor of cell on the tray, reduce battery quality.

In addition, the existing method for cleaning dust on the conveying belt in the PVD coating equipment is to periodically stop to clean the dust manually, but the dust is cleaned in a stopping way through longer steps of cooling, opening a cavity cover, vacuumizing and the like, so that the problems of overhigh cost, time consumption, overlong length and the like are caused, and the utilization rate of the PVD coating equipment is greatly reduced.

Referring to fig. 1 and 2, the present application provides a cleaning apparatus 100 for a PVD coating apparatus, the cleaning apparatus 100 for a PVD coating apparatus includes a conveyor belt 10, a cleaning component 20 and a limiting component 30, the cleaning component 20 is disposed on the conveyor belt 10 and can rotate, and can move along with the conveyor belt 10 under the action of the conveyor belt 10; the limiting assembly 30 is used for blocking the cleaning assembly 20 from continuously moving along with the conveyor belt 10 at a preset position of the conveyor belt 10, so that the cleaning assembly 20 can be driven to rotate during the continuous movement of the conveyor belt 10, and the cleaning assembly 20 can clean the conveyor belt 10; therefore, the PVD coating equipment does not need to be shut down periodically for manual cleaning, the yield of the PVD coating equipment is prevented from being reduced, the cleaning effect is good, the use is convenient, and the cost is low.

The predetermined position refers to a position that the limiting component 30 reaches by stretching before the cleaning component 20 is placed inside the PVD coating equipment; when the cleaning component 20 is driven by the conveyor belt 10, the cleaning component 20 can abut against the limiting component 30 at the preset position, so that the limiting component 30 blocks the cleaning component 20, and the cleaning component 20 cannot move continuously along with the drive of the conveyor belt 10; the conveyor belt 10 is rotated at the preset position under the action of the conveyor belt 10 and the limiting assembly 30, so that the purpose of cleaning the conveyor belt 10 is achieved.

Further, referring to fig. 3, the cleaning assembly 20 includes a frame 21 and a dust-binding wheel unit 22, the frame 21 can be in limit fit with the limit assembly 30 at a predetermined position, the dust-binding wheel unit 22 is rotatably mounted on the frame 21, so that the dust-binding wheel unit 22 can rotate relative to the frame 21; by mounting the dust-sticking wheel unit 22 on the frame 21, when the cleaning assembly 20 moves along with the conveyor belt 10 and moves to a preset position, the limiting assembly 30 can limit the frame 21, so that the dust-sticking wheel unit 22 rotates on the conveyor belt 10 to clean the conveyor belt 10; thus, the structure is simple, the cost is low and the utilization rate is high.

Specifically, referring to fig. 3 and 4, in an embodiment, the frame 21 includes two main rods 211 and a plurality of auxiliary rods 212, the main rod 211 has grooves 2111, and the plurality of auxiliary rods 212 respectively extend into the grooves 2111 of the two main rods 211, are uniformly distributed along the length direction of the main rod 211, and are connected with the main rod 211, so that the structure is firm and stable; and, a plurality of dust-binding wheel units 22 are respectively connected to the two main bars 211 on the side away from the sub-bar 212 in a one-to-one correspondence so as to clean the conveyor belt 10.

In this application, the number of the dust adhesion wheel units 22 is plural, and the plural dust adhesion wheel units 22 are installed at one side of the frame 21 at intervals; alternatively, a plurality of dust roller units 22 are installed at both sides of the frame 21 so that the dust roller units 22 can clean the conveyor belt 10.

Preferably, in this embodiment, the number of the dust wheel units 22 is ten, ten dust wheel units 22 are respectively installed on two sides of the frame 21, five dust wheel units 22 are respectively installed on each side, and the dust wheel units 22 on two sides respectively correspond to one another. Of course, in other embodiments, the number of the dust adhesion wheel units 22 may also be not limited to ten, and the number of the dust adhesion wheel units 22 may be installed according to actual requirements during use, as long as the cleaning effect can be achieved, for example, the number of the dust adhesion wheel units 22 is set to six, eight, or twelve.

Referring to fig. 2, in the embodiment, there are two conveyor belts 10, the dust-binding wheel units 22 on two sides of the frame 21 in the cleaning assembly 20 are respectively disposed on the two conveyor belts 10, and under the cooperation of the conveyor belts 10 and the limiting assembly 30, the dust-binding wheel units 22 rotate to clean the two conveyor belts 10.

Further, referring to fig. 5-7, the dust-sticking wheel unit 22 includes a wheel shaft 221, a bearing 222 and a sticking wheel 223, one end of the wheel shaft 221 is connected to the frame 21, the other end of the wheel shaft is connected to the bearing 222, the sticking wheel 223 is sleeved on the bearing 222 and can rotate relative to the wheel shaft 221, the structure is simple, the cost is low, the utilization rate is high, the sticking wheel 223 is sleeved on the bearing 222 to facilitate the rotation of the sticking wheel 223, and the sticking wheel 223 can rotate on the conveyor belt 10 along with the continuous movement of the conveyor belt 10 when the frame 21 is limited, so as to clean the conveyor belt 10; the dust wheel unit 22 further includes a locking member 224, and the bearing 222 can be fixed on the wheel shaft 221 by the locking member 224 to ensure smooth rotation of the bearing 222 and prevent the bearing 222 from sliding in the axial direction.

Specifically, threaded connection between wheel shaft 221 one end and frame 21, the installation and the dismantlement of adhesion dust wheel unit 22 of being convenient for to can wash adhesion dust wheel unit 22 after dismantling, make repeatedly usable, the high-usage.

Specifically, the sticky wheel 223 is detachably connected with the bearing 222, so that the sticky wheel 223 is convenient to mount and dismount and is convenient to use.

Referring to fig. 1 and 2, the limiting assembly 30 includes a driving member 31 and a limiting block 32, the limiting block 32 is connected to the driving member 31 and can extend or retract under the action of the driving member 31 to block the cleaning assembly 20 or release the blocking of the cleaning assembly 20, before the cleaning assembly 20 is placed in the PVD coating apparatus, the driving member 31 drives the limiting block 32 to extend, so that the limiting block 32 reaches a predetermined position; after the cleaning assembly 20 is placed in the PVD coating apparatus, the cleaning assembly 20 can be stopped by the stopper 32 at a predetermined position to rotate the adhesive wheel 223, thereby cleaning the conveyor belt 10.

In the present application, the driving member 31 is a cylinder; of course, in other embodiments, the driving member 31 may be other members as long as the same driving effect can be achieved.

Furthermore, the plurality of limiting assemblies 30 are arranged at intervals, so that the cleaning assembly 20 is more firmly and stably supported by the limiting assemblies 30; preferably, in the present application, the number of the limiting assemblies 30 is three, and of course, in other embodiments, the limiting assemblies 30 may be set to other numbers as long as the blocking effect can be achieved, such as setting the limiting assemblies 30 to four, five or six.

The present application further provides a PVD coating apparatus (not shown), which includes a cleaning device 100 for the PVD coating apparatus, and in an embodiment, the number of the cleaning device 100 for the PVD coating apparatus may be multiple, and multiple cleaning devices 100 for the PVD coating apparatus may be sequentially disposed on the conveyor belt 10; in other embodiments, a plurality of cleaning assemblies 20 may be provided, the plurality of cleaning assemblies 20 are sequentially disposed on the conveyor belt 10, the first cleaning assembly 20 close to the limiting assembly 30 can abut against the limiting assembly 30 and rotate under the action of the limiting assembly 30, the adjacent cleaning assemblies 20 sequentially abut against each other and limit each other, so that the rotation cleans the conveyor belt 10, and the cleaning efficiency can be further improved.

Further, the PVD coating equipment has a vacuum chamber 40, and the PVD coating equipment further includes a gate valve 41, a pipe 42 and a vacuum pump 43, the conveyor belt 10, the cleaning component 20 and the limiting component 30 are all disposed in the vacuum chamber 40, the gate valve 41 is mounted on the inner wall of the vacuum chamber 40, and the vacuum pump 43 is communicated with the vacuum chamber 40 through the pipe 42, so that the vacuum chamber 40 is in a vacuum state.

In this application, when will clean internal conveyer belt 10 of PVD coating equipment, control driving piece 31 earlier and make stopper 32 extend to preset position, place cleaning assembly 20 on conveyer belt 10 again, cleaning assembly 20 can remove along with the drive of conveyer belt 10, when cleaning assembly 20 reachs preset position, frame 21 supports by in stopper 32, no longer removes to make and glue wheel 223 and carry out the rotation, at this moment, conveyer belt 10 continues to move, glues wheel 223 rotation and cleans conveyer belt 10.

It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.

The features of the above embodiments may be arbitrarily combined, and for the sake of brevity, all possible combinations of the features in the above embodiments are not described, but should be construed as being within the scope of the present specification as long as there is no contradiction between the combinations of the features.

It should be understood by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as a limitation of the present invention, and that suitable changes and modifications of the above embodiments are within the scope of the claimed invention as long as they are within the spirit and scope of the present invention.

Claims (10)

1. A cleaning device for PVD coating equipment comprises a conveying belt;

the PVD coating equipment cleaning device is characterized by further comprising a cleaning component and a limiting component, wherein the cleaning component is arranged on the conveying belt and is provided with a dust-sticking wheel unit, and the dust-sticking wheel unit can rotate and can move along with the conveying belt under the action of the conveying belt;

the limiting assembly is used for blocking the cleaning assembly at a preset position of the conveyor belt, so that the dust sticking wheel unit can rotate under the driving of the conveyor belt, and the conveyor belt is cleaned.

2. The PVD coating equipment cleaning device of claim 1, wherein the cleaning assembly comprises a frame, the frame can be in limit fit with the limiting assembly at a preset position, and the dust adhesion wheel unit is rotatably mounted on the frame so that the dust adhesion wheel unit can rotate relative to the frame.

3. The PVD coating equipment cleaning device according to claim 2, wherein the number of the dust-sticking wheel units is plural, and the plural dust-sticking wheel units are installed at one side of the frame at intervals;

or a plurality of the dust sticking wheel units are arranged on two sides of the frame.

4. The PVD coating equipment cleaning device of claim 2, wherein the dust-sticking wheel unit comprises a wheel shaft, a bearing and a sticking wheel, one end of the wheel shaft is connected with the frame, the other end of the wheel shaft is connected with the bearing, and the sticking wheel is sleeved on the bearing and can rotate relative to the wheel shaft.

5. The PVD coating apparatus cleaning device of claim 4, wherein the axle is threaded at one end to the frame.

6. The PVD coating equipment cleaning device of claim 4, wherein the adhesive wheel is detachably connected with the bearing.

7. The PVD coating equipment cleaning device according to claim 1, wherein the limiting component comprises a driving component and a limiting block, the limiting block is connected with the driving component and can extend or retract under the action of the driving component to block or unblock the cleaning component.

8. The PVD coating equipment cleaning device according to claim 1, wherein the limiting assembly comprises a plurality of limiting assemblies, and the plurality of limiting assemblies are arranged at intervals.

9. A PVD coating apparatus comprising the PVD coating apparatus cleaning device according to any of claims 1 to 8.

10. The PVD coating apparatus of claim 9, wherein the cleaning device is provided in plurality, and the plurality of cleaning devices are sequentially placed on the conveyor belt.

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