CN116837325B - Quick-cleaning vacuum coating equipment and application method thereof - Google Patents
Quick-cleaning vacuum coating equipment and application method thereof Download PDFInfo
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- CN116837325B CN116837325B CN202310434880.2A CN202310434880A CN116837325B CN 116837325 B CN116837325 B CN 116837325B CN 202310434880 A CN202310434880 A CN 202310434880A CN 116837325 B CN116837325 B CN 116837325B
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 103
- 238000004140 cleaning Methods 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims abstract description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 104
- 230000007246 mechanism Effects 0.000 claims abstract description 25
- 239000011248 coating agent Substances 0.000 claims abstract description 22
- 238000000576 coating method Methods 0.000 claims abstract description 22
- 239000007921 spray Substances 0.000 claims abstract description 22
- 238000005507 spraying Methods 0.000 claims abstract description 16
- 230000000694 effects Effects 0.000 claims abstract description 15
- 239000010865 sewage Substances 0.000 claims description 20
- 239000007888 film coating Substances 0.000 claims description 6
- 238000009501 film coating Methods 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 4
- 238000005086 pumping Methods 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 239000000428 dust Substances 0.000 abstract description 4
- 239000007788 liquid Substances 0.000 abstract description 4
- 238000009713 electroplating Methods 0.000 abstract description 3
- 238000009434 installation Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Spray Control Apparatus (AREA)
Abstract
The invention provides a quick-cleaning vacuum coating device and a use method thereof, belonging to the technical field of vacuum coating, wherein the vacuum coating device comprises a device main body, a box door, a vacuum pump, an inner ring frame, a lower plate, an upper plate, a supporting mechanism, a moving mechanism and a cleaning mechanism, wherein: a lower cavity, a vacuum coating cavity and an upper cavity are arranged in the equipment main body from bottom to top; the box door is movably connected to one side of the equipment main body and is communicated with the vacuum coating cavity; the vacuum pump is fixedly connected in the upper chamber, the air suction port of the vacuum pump is communicated with the vacuum coating cavity, and the output end of the vacuum pump extends to the outer side of the equipment main body; the invention can realize continuous movement and rotation of the workpiece during coating, the pressure is more uniform, so as to improve the coating effect, the spray head continuously rotates during spraying water, dead angles in the vacuum coating cavity can be effectively cleaned, the drainage can be automatically cleaned, the vacuum coating cavity can be effectively cleaned, the influence of dust, electroplating liquid and the like on the next coating is reduced, and the stable coating quality is maintained.
Description
Technical Field
The invention belongs to the technical field of vacuum coating, and particularly relates to a rapid-cleaning vacuum coating device and a use method thereof.
Background
The vacuum coating machine mainly refers to a type of coating film which needs to be carried out under a higher vacuum degree, and particularly comprises various types including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and the like. The main idea is to divide into two types, evaporation and sputtering.
The utility model discloses a chinese patent of application number CN201711481351.9 among the prior art, discloses a novel quick abluent vacuum coating equipment, including the vacuum coating equipment body, the last fixed surface of vacuum coating equipment body installs the motor, the front end fixed mounting of motor has first band pulley, the second band pulley is installed in the front surface rotation of limiting plate, and the front surface of limiting plate is close to one side position department rotation of second band pulley and install the third band pulley, the front surface fixed mounting of third band pulley has the folding bar, the lower extreme fixed mounting of folding bar has the stopper, the upper surface of bearing plate is close to the opposite side position department fixed mounting of vacuum coating equipment body has belt cleaning device. The cleaning device can be used for cleaning the inner wall of the vacuum cavity of the vacuum coating equipment after the vacuum coating equipment is used; the electric opening and closing of the protective door can be realized through the motor, the belt wheel and the sliding rail, manual opening is not needed, the structure is scientific and reasonable, and the use is safe and convenient.
Most of the current vacuum coating equipment is smaller, the number of each coating is limited, the cabinet door needs to be frequently opened during urgent processing, dust possibly enters the vacuum chamber, and after the vacuum coating equipment is used for coating for a period of time, a part of electroplating liquid is attached to the inner wall of the vacuum coating equipment, so that the quality of coating is reduced.
Disclosure of Invention
The invention aims to provide a quick-cleaning vacuum coating device and a use method thereof, and aims to solve at least one problem in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions:
a rapid cleaning vacuum coating apparatus comprising:
the device comprises a device main body, a vacuum coating cavity and a vacuum coating cavity, wherein a lower cavity, a vacuum coating cavity and an upper cavity are arranged in the device main body from bottom to top;
the box door is movably connected to one side of the equipment main body and is communicated with the vacuum coating cavity;
the vacuum pump is fixedly connected in the upper chamber, the air suction port of the vacuum pump is communicated with the vacuum coating cavity, and the output end of the vacuum pump extends to the outer side of the equipment main body;
the inner ring frame is movably arranged in the vacuum coating cavity, and a plurality of positioning holes are formed in the upper end of the inner ring frame;
the lower plate is fixedly connected to the lower inner wall of the vacuum coating cavity;
the upper plate is fixedly connected to the upper end of the lower plate;
the supporting mechanisms are arranged in a plurality of groups and are respectively arranged in the positioning holes and used for placing the workpieces to be coated;
the moving mechanism is arranged in the vacuum coating cavity and is used for driving the inner ring frame to link the workpiece to be coated to move circularly; and
the cleaning mechanism is arranged in the equipment main body, penetrates through the lower cavity and the vacuum coating cavity to clean the vacuum coating cavity and automatically discharges sewage.
As a preferable scheme of the invention, each group of supporting mechanism comprises a hanging frame, a locating pin, a locating shaft and a pinion, wherein the locating shaft is rotationally connected in a locating hole, a locating groove is formed in the top of the locating shaft, the locating pin is inserted into the locating groove from top to bottom, the hanging frame is fixedly connected to the top of the locating pin, the hanging frame is used for installing a workpiece to be coated, and the pinion is fixedly connected to the bottom of the locating shaft.
As a preferred embodiment of the present invention, the moving mechanism includes:
the outer ring frame is fixedly connected to the lower inner wall of the vacuum coating cavity;
the inner gear ring is fixedly connected to the lower inner wall of the outer ring frame, and the plurality of pinion gears are meshed with the inner gear ring;
the round groove is fixedly connected to the lower inner wall of the vacuum coating cavity;
the upper plate is fixedly connected to the upper end of the lower plate; and
the belt pulley assembly is arranged between the lower plate and the upper plate, and is connected with the inner ring frame to drive the inner ring frame to circularly move.
As a preferred aspect of the present invention, the pulley assembly includes:
the wheel shafts are provided with two wheel shafts, are rotatably connected to the lower inner wall of the lower cavity, and the upper ends of the wheel shafts penetrate through the circular grooves and extend upwards;
the gear plates are arranged, are positioned between the lower plate and the upper plate and are respectively and fixedly connected with the circumferential surfaces of the corresponding wheel shafts;
the inner toothed belt is connected between the two gear plates in a transmission way and is fixedly connected to the inner wall of the inner ring frame; and
and the driving part is arranged in the lower cavity and is used for driving one of the wheel shafts to rotate.
As a preferable scheme of the invention, the driving part comprises a servo motor, a driving conical gear and a driven conical gear, wherein the servo motor is fixedly connected to the lower inner wall of the lower cavity, the driving conical gear is fixedly connected to the output end of the servo motor, the driven conical gear is fixedly connected to the circumferential surface of the wheel shaft, and the driving conical gear is meshed with the driven conical gear.
As a preferred embodiment of the present invention, the cleaning mechanism includes:
the hollow hopper is fixedly connected to the lower inner wall of the lower cavity, round grooves are formed in the centers of the lower plate and the upper plate, and the hollow hopper penetrates through the round grooves and is communicated with the lower cavity;
the pressurizing valve is fixedly connected to the lower inner wall of the hollow bucket, the input end of the pressurizing valve is fixedly connected with a water inlet, the other end of the water inlet penetrates through the equipment main body and extends outwards, and the water inlet is used for introducing clean water;
one end of the telescopic pipe is fixedly connected with the output end of the booster valve;
the circular plate is positioned on the upper side of the hollow bucket, and the upper end of the circular plate is detachably connected with a conical top;
the electric push rods are provided with two electric push rods which are fixedly connected to the lower inner wall of the hollow bucket, and the extension ends of the electric push rods are fixedly connected to the bottom edge of the circular plate;
the positioning ring is fixedly connected to the lower side of the circular plate, and the other end of the telescopic pipe is fixedly connected with the positioning ring;
the rotary spraying assembly is arranged on the positioning ring and is used for rotationally spraying clear water to clean dead angles of the vacuum coating cavity; and
and the water outlet component is arranged in the lower cavity and is used for discharging sewage.
As a preferable scheme of the invention, the rotary spraying assembly comprises a gear motor and a hollow pipe, wherein the hollow pipe is rotationally connected between a positioning ring and a circular plate, the gear motor is fixedly connected to the top of the circular plate, the output end of the gear motor is fixedly connected to the top of the hollow pipe, the gear motor is positioned between the circular plate and a conical top, and a plurality of spray heads are arranged on the circumferential surface of the hollow pipe.
As a preferable scheme of the invention, the water outlet assembly comprises a water suction pump, a short pipe and a water outlet pipe, wherein the water suction pump is fixedly connected to the lower inner wall of the lower cavity, one end of the short pipe is fixedly connected to a water suction port of the water suction pump, the other end of the short pipe is fixedly connected to the hollow bucket, a water outlet of the water suction pump is fixedly connected with the water outlet pipe, and the tail end of the water outlet pipe penetrates through the equipment main body and extends outwards.
As a preferable scheme of the invention, a groove part is arranged at the top center of the upper plate, the hollow hopper is positioned between the groove parts, and a hydrophobic and oleophobic layer is arranged among the outer ring frame, the inner ring frame and the upper plate.
The application method of the quick-cleaning vacuum coating equipment comprises the following steps:
s1, sequentially mounting a workpiece to be coated on a hanger, closing a box door after the mounting is completed, starting a vacuum pump, and pumping air in a vacuum coating cavity through the vacuum pump to enable the vacuum coating cavity to be in a vacuum state and perform coating work;
s2, when the film plating work is carried out, starting a servo motor, driving a driving conical gear to rotate through the output end of the servo motor, driving the driving conical gear to drive a driven conical gear to rotate in a decelerating way, driving a wheel shaft to rotate by the driven conical gear, driving a gear disc fixed by the wheel shaft to rotate, driving an inner toothed belt to move circularly by the gear disc, driving an inner ring frame to move circularly, enabling a plurality of hanging frames to move circularly along with the inner ring frame, enabling a pinion to rotate continuously under the action of meshing with the inner ring frame, enabling a workpiece to move circularly and rotate in a main body of the equipment, enabling pressure applied to the workpiece during film plating to be more uniform, and improving film plating effect;
s3, when cleaning is needed, connecting the water inlet with an external pipeline, enabling clear water to enter the water inlet from the external pipeline, then increasing pressure through a pressure increasing valve, enabling the clear water to enter the telescopic pipe in an accelerating mode, enabling the clear water to enter the hollow pipe, enabling the spray head to spray to the inner wall of the vacuum coating cavity, then starting a speed reducing motor, driving the hollow pipe to rotate through the output end of the speed reducing motor, enabling the spray head to continuously rotate when spraying water, and effectively cleaning dead angles in the vacuum coating cavity so as to improve cleaning effects;
s4, after cleaning, starting a water suction pump to enable sewage generated by cleaning in the vacuum coating cavity to enter the hollow bucket, and then enabling the sewage to enter a water outlet pipe through a short pipe to be discharged, so that automatic cleaning is completed;
s5, after the water drainage is completed, the extension end of the electric push rod drives the circular plate to move downwards, the circular plate, the conical top and the hollow pipe integrally move downwards, and the top of the circular plate is contracted in the hollow bucket and attached to the groove part, so that the hollow bucket and the circular plate are closed.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the scheme, the plurality of hangers follow the inner annular frame to move circularly, the pinion continuously rotates under the action of meshing with the annular gear, so that a workpiece moves circularly and rotates in the equipment main body, the pressure on the workpiece during coating is more uniform, the coating effect is improved, sewage generated during cleaning enters the hollow bucket and then is discharged from the short pipe into the water outlet pipe, the workpiece is continuously moved and rotated during coating, the received pressure is more uniform, the coating effect is improved, the nozzle continuously rotates during spraying water, dead angles in the vacuum coating cavity are effectively cleaned, drainage can be automatically cleaned, the vacuum coating cavity is effectively cleaned, the influence of dust, electroplating liquid and the like on the next coating is reduced, and stable coating quality is maintained.
2. The locating pin only needs to be inserted into the locating slot during installation, the hanging frame moves along with the locating shaft, the hanging frame rotates along with the locating shaft rotates, the hanging frame can be detached after the locating pin is pulled out, the installation and detachment mode is simple, and the hanging frame is convenient for workers to use.
3. The heights of the outer ring frame, the inner ring frame, the lower plate and the upper plate are leveled, contact surfaces are in seamless fit, and the inner ring frame cannot deform under the support of the outer ring frame, the lower plate and the upper plate so as to keep the inner ring frame to stably move.
4. The angle of the shower nozzle of every of this scheme is different, and the position of water spray also is different to drive the cavity pipe through gear motor's output and rotate, constantly rotate when making the shower nozzle spray water, increase clearance scope, effectively clear up the dead angle in the vacuum coating chamber, improve cleaning performance.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention.
In the drawings:
FIG. 1 is an overall view of the present invention;
FIG. 2 is a side view of the present invention;
FIG. 3 is a plan cross-sectional view of the present invention;
FIG. 4 is a side cross-sectional view of the present invention;
FIG. 5 is an exploded view of the movement mechanism of the present invention;
FIG. 6 is a block diagram of a pulley assembly of the present invention;
FIG. 7 is a block diagram of a hanger of the present invention;
FIG. 8 is a diagram of the lower chamber structure of the present invention;
FIG. 9 is an exploded view of FIG. 8A in accordance with the present invention;
FIG. 10 is a cross-sectional view of a hollow bucket of the present invention;
fig. 11 is an exploded view of the hollow tube of the present invention.
The reference numerals in the figures illustrate: 1. an apparatus main body; 101. a lower chamber; 102. a vacuum coating cavity; 103. an upper chamber; 2. a door; 3. an outer ring frame; 4. an inner ring frame; 5. an inner gear ring; 6. positioning holes; 7. positioning a shaft; 8. a pinion gear; 9. a positioning groove; 10. a hanging rack; 11. a positioning pin; 12. a servo motor; 13. a driving bevel gear; 14. a wheel axle; 15. a driven bevel gear; 16. a gear plate; 17. an internal toothed belt; 18. a lower plate; 19. an upper plate; 20. a groove portion; 21. a circular groove; 22. a hollow bucket; 23. a pressure increasing valve; 24. a water inlet; 25. a telescopic tube; 26. a circular plate; 27. an electric push rod; 28. a conical roof; 29. a speed reducing motor; 30. a positioning ring; 31. a hollow tube; 32. a spray head; 33. a water suction pump; 34. a short pipe; 35. a water outlet pipe; 36. and a vacuum pump.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Examples
Referring to fig. 1 to 11, the technical solution provided in this embodiment is as follows:
the utility model provides a quick abluent vacuum coating equipment, includes equipment body 1, chamber door 2, vacuum pump 36, interior loop wheel machine 4, lower plate 18, upper plate 19, supporting mechanism, moving mechanism and wiper mechanism, wherein: a lower chamber 101, a vacuum coating chamber 102 and an upper chamber 103 are arranged in the equipment main body 1 from bottom to top; the box door 2 is movably connected to one side of the equipment main body 1 and is communicated with the vacuum coating cavity 102; the vacuum pump 36 is fixedly connected in the upper chamber 103, the air suction port of the vacuum pump is communicated with the vacuum coating cavity 102, and the output end of the vacuum pump extends to the outer side of the equipment main body 1; the inner ring frame 4 is movably arranged in the vacuum coating cavity 102, and the lower plate 18 with a plurality of positioning holes 6 at the upper end is fixedly connected with the lower inner wall of the vacuum coating cavity 102; the upper plate 19 is fixedly connected to the upper end of the lower plate 18; the supporting mechanisms are arranged in a plurality of groups and are respectively arranged in the positioning holes 6 and used for placing the workpieces to be coated; the moving mechanism is arranged in the vacuum coating cavity 102 and is used for driving the inner ring frame 4 to link the workpiece to be coated to move circularly; the cleaning mechanism is provided in the apparatus main body 1, which penetrates the lower chamber 101 and the vacuum coating chamber 102 to clean the vacuum coating chamber 102 and automatically discharge the sewage.
In the specific embodiment of the invention, the vacuum coating cavity 102 is positioned between the lower cavity 101 and the upper cavity 103, the inner ring frame 4 is made of rubber and can deform, the inner gear ring 5 is positioned in the outer ring frame 3, the pinion gear 8 is positioned in the inner ring frame 4, a space is formed between the outer ring frame 3 and the inner ring frame 4, the side parts of the lower plate 18 and the upper plate 19 are attached to the inner wall of the inner ring frame 4 so as to prevent the inner ring frame 4 from deforming when moving, the positioning hole 6 is used for installing the positioning shaft 7, the positioning shaft 7 can rotate in the positioning hole 6, the pinion gear 8 is meshed with the inner gear ring 5, the inner ring frame 4 moves along with the pinion gear 8, at the moment, the pinion gear 8 continuously rotates under the meshing action of the inner gear ring 5, the vacuum pump 36 is positioned in the upper cavity 103, the vacuum coating cavity 102 is vacuumized when the vacuum pump 36 works so as to assist the vacuum coating work, at this time, the output end of the servo motor 12 drives the driving bevel gear 13 to rotate, the driving bevel gear 13 drives the driven bevel gear 15 to rotate at a reduced speed, the driven bevel gear 15 drives the wheel shaft 14 to rotate, the wheel shaft 14 drives the gear disc 16 fixed with the wheel shaft 14 to rotate, the gear disc 16 drives the inner toothed belt 17 to move circularly and then drives the inner ring frame 4 to move circularly, the plurality of hangers 10 move circularly along with the inner ring frame 4, and the pinion 8 rotates continuously under the action of meshing with the inner ring gear 5, so that the workpiece moves circularly and rotates in the equipment main body 1, the pressure applied to the workpiece during coating is more uniform, so as to improve the coating effect, when cleaning is needed, the water inlet 24 is connected with an external pipeline, clean water enters the water inlet 24 from the external pipeline, then the pressure is increased through the pressure increasing valve 23, the clean water enters the telescopic pipe 25 in an accelerating way, the clean water enters the hollow pipe 31 and is sprayed to the inner wall of the vacuum coating cavity 102 through the spray head 32, then the gear motor 29 is started, the hollow tube 31 is driven to rotate through the output end of the gear motor 29, the spray head 32 continuously rotates when spraying water, dead angles in the vacuum coating cavity 102 are effectively cleaned, so that the cleaning effect is improved, after cleaning is finished, the water suction pump 33 is started, sewage generated by cleaning in the vacuum coating cavity 102 enters the hollow bucket 22, then the sewage enters the water outlet pipe 35 through the short pipe 34 to be discharged, automatic cleaning is finished, after the water discharge is finished, the round plate 26 is driven to move downwards through the extension end of the electric push rod 27, the round plate 26, the conical top 28 and the hollow tube 31 integrally move downwards, the top of the round plate 26 is contracted in the hollow bucket 22 and is attached to the groove part 20, the hollow bucket 22 and the round plate 26 are closed to be in situ, the scheme effectively realizes continuous movement and rotation of a workpiece during coating, the pressure received by the spray head 32 is more uniform, so that the coating effect is improved, the dead angles in the vacuum coating cavity 102 can be effectively cleaned, the influence of dust, the plating liquid and the like on the next coating is effectively cleaned, and stable quality is kept.
Specifically, each group of supporting mechanism comprises a hanging frame 10, a locating pin 11, a locating shaft 7 and a pinion 8, wherein the locating shaft 7 is rotationally connected in the locating hole 6, a locating groove 9 is formed in the top of the locating shaft 7, the locating pin 11 is inserted into the locating groove 9 from top to bottom, the hanging frame 10 is fixedly connected to the top of the locating pin 11, the hanging frame 10 is used for installing a workpiece to be coated, and the pinion 8 is fixedly connected to the bottom of the locating shaft 7.
In the embodiment of the invention, as shown in fig. 6 and 7, the positioning pin 11 is only required to be inserted into the positioning groove 9 during installation, the hanging frame 10 moves along with the movement of the positioning shaft 7, the hanging frame 10 rotates along with the rotation of the positioning shaft 7, the hanging frame 10 can be detached by pulling out the positioning pin 11, the installation and detachment mode is simple, and the use of staff is convenient.
Specifically, the moving mechanism includes:
an outer ring frame 3 fixedly connected to the lower inner wall of the vacuum coating cavity 102;
an inner gear ring 5 fixedly connected to the lower inner wall of the outer ring frame 3, and a plurality of pinion gears 8 are engaged with the inner gear ring 5;
a circular groove 21 fixedly connected to the lower inner wall of the vacuum coating chamber 102;
an upper plate 19 fixedly connected to an upper end of the lower plate 18;
the belt pulley assembly, it sets up between lower plate 18 and upper plate 19, and it is connected in order to drive interior ring frame 4 circulation removal with interior ring frame 4, and the belt pulley assembly includes:
the wheel shafts 14, which are provided with two, are rotatably connected to the lower inner wall of the lower chamber 101, and the upper ends thereof extend upward through the circular grooves 21;
the gear plate 16, which is provided with two, is located between the lower plate 18 and the upper plate 19, and is fixedly connected to the circumferential surface of the corresponding wheel axle 14, respectively;
an internal toothed belt 17, which is in driving connection between the two gear disks 16 and which is fixedly connected to the inner wall of the inner ring carrier 4;
the driving part is arranged in the lower cavity 101 and is used for driving one of the wheel shafts 14 to rotate, the driving part comprises a servo motor 12, a driving conical gear 13 and a driven conical gear 15, the servo motor 12 is fixedly connected to the lower inner wall of the lower cavity 101, the driving conical gear 13 is fixedly connected to the output end of the servo motor 12, the driven conical gear 15 is fixedly connected to the circumferential surface of the wheel shaft 14, and the driving conical gear 13 is meshed with the driven conical gear 15.
In the specific embodiment of the invention, the outer ring frame 3 is attached to the inner wall of the vacuum coating cavity 102, the inner gear ring 5 is positioned in the outer ring frame 3, the pinion 8 is positioned in the inner ring frame 4, a space is formed between the outer ring frame 3 and the inner ring frame 4, the side parts of the lower plate 18 and the upper plate 19 are attached to the inner wall of the inner ring frame 4, the heights of the outer ring frame 3, the inner ring frame 4, the lower plate 18 and the upper plate 19 are equal, contact surfaces are in seamless attachment, the inner ring frame 4 cannot deform under the support of the outer ring frame 3, the lower plate 18 and the upper plate 19, so that the inner ring frame 4 can be kept stable to move, in specific operation, the output end of the servo motor 12 drives the driving conical gear 13 to rotate, the driven conical gear 15 is decelerated to rotate, the driven conical gear 15 drives the wheel shaft 14 to rotate, the wheel shaft 14 drives the gear disc 16 fixed with the driven conical gear 16 to drive the inner gear belt 17 to circularly move, the inner ring frame 4 is driven to circularly move, the plurality of racks 10 follow the inner ring frame 4, the pinion 8 is in the inner ring frame 4 to be in a continuous rotation, the action of the pinion 5 is not in the inner ring frame 4 is meshed with the inner gear ring frame 5, the workpiece is enabled to be uniformly rotated, and the workpiece can be uniformly moved under the action of the workpiece is even, and the workpiece can be coated by the workpiece is enabled to move, and the workpiece is uniformly in the circulation pressure when the workpiece is subjected to the rolling.
Specifically, the cleaning mechanism includes:
the hollow bucket 22 is fixedly connected to the lower inner wall of the lower chamber 101, the centers of the lower plate 18 and the upper plate 19 are respectively provided with a circular groove 21, and the hollow bucket 22 penetrates through the circular grooves 21 and is communicated with the lower chamber 101;
the pressure increasing valve 23 is fixedly connected to the lower inner wall of the hollow bucket 22, the input end of the pressure increasing valve is fixedly connected with the water inlet 24, the other end of the water inlet 24 penetrates through the equipment main body 1 and extends outwards, and the water inlet 24 is used for introducing clean water;
a telescopic tube 25, one end of which is fixedly connected to the output end of the booster valve 23;
a circular plate 26 which is positioned on the upper side of the hollow hopper 22 and the upper end of which is detachably connected with a conical top 28;
the electric push rods 27 are provided with two, are fixedly connected to the lower inner wall of the hollow hopper 22, and have the extension ends fixedly connected to the bottom edge of the circular plate 26;
a positioning ring 30 fixedly connected to the lower side of the circular plate 26, and the other end of the telescopic tube 25 is fixedly connected to the positioning ring 30;
the rotary spraying assembly is arranged on the positioning ring 30 and is used for rotationally spraying clear water to clean dead angles of the vacuum coating cavity 102, the rotary spraying assembly comprises a gear motor 29 and a hollow tube 31, the hollow tube 31 is rotationally connected between the positioning ring 30 and the circular plate 26, the gear motor 29 is fixedly connected to the top of the circular plate 26, the output end of the gear motor 29 is fixedly connected to the top of the hollow tube 31, the gear motor 29 is positioned between the circular plate 26 and the conical top 28, and a plurality of spray heads 32 are arranged on the circumferential surface of the hollow tube 31;
the water outlet component is arranged in the lower cavity 101 and is used for discharging sewage, the water outlet component comprises a water suction pump 33, a short pipe 34 and a water outlet pipe 35, the water suction pump 33 is fixedly connected to the lower inner wall of the lower cavity 101, one end of the short pipe 34 is fixedly connected to a water suction port of the water suction pump 33, the other end of the short pipe 34 is fixedly connected to the hollow bucket 22, a water outlet of the water suction pump 33 is fixedly connected with the water outlet pipe 35, and the tail end of the water outlet pipe 35 penetrates through the equipment main body 1 and extends outwards.
In the specific embodiment of the invention, the bottom of the hollow bucket 22 is fixed on the lower inner wall of the lower chamber 101, the top of the hollow bucket 22 upwards penetrates through the vacuum coating cavity 102, the lower plate 18 and the upper plate 19 and is attached to the lowest part of the groove part 20, the pressure increasing valve 23 is positioned in the hollow bucket 22, the water inlet 24 is connected with an external pipeline, clean water enters the water inlet 24 through the external pipeline, then the pressure increasing valve 23 increases the pressure to accelerate the clean water into the telescopic pipe 25, finally the clean water is sprayed out through the spray heads 32, the angles of the spray heads 32 are different, the water spraying positions are also different, the output end of the speed reducing motor 29 drives the hollow pipe 31 to rotate, the spray heads 32 continuously rotate when spraying water, the cleaning range is enlarged, the dead angle in the vacuum coating cavity 102 is effectively cleaned, the cleaning effect is improved, sewage is generated after cleaning is finished, the sewage flows into the hollow bucket 22, the water suction pump 33 is started to generate suction force, the sewage in the vacuum coating cavity 102 is sucked into the hollow bucket 22, residual sewage is avoided, the electric push rods 27 are arranged, the round plate 26 is driven to move downwards by the extension ends of the electric push rods 27, the round plate 26, the conical top 28 and the hollow tube 31 integrally move downwards, the top of the round plate 26 is contracted in the hollow bucket 22 and is attached to the groove part 20, the hollow bucket 22 and the round plate 26 are closed, the vacuum coating cavity 102 is kept in a sealed environment, the structure is more reasonable, the conical top 28 is in threaded connection with the round plate 26, and the speed reducing motor 29 is convenient to replace and detach.
Specifically, a groove part 20 is arranged at the top center of the upper plate 19, a hollow bucket 22 is positioned between the groove parts 20, and a water and oil drainage layer is arranged among the outer ring frame 3, the inner ring frame 4 and the upper plate 19.
In the embodiment of the present invention, as shown in fig. 5, the groove portion 20 is located around the circular groove 21, and the groove portion 20 is gradually recessed inwards, so that the sewage in the vacuum coating cavity 102 flows into the hollow bucket 22 more easily, and the arrangement of the hydrophobic and oleophobic layer plays a role in preventing water and oil, and improves the tightness.
The embodiment also provides a use method of the rapid cleaning vacuum coating equipment, which comprises the following steps:
s1, sequentially mounting a workpiece to be coated on a hanger 10, closing a box door 2 after mounting, starting a vacuum pump 36, and pumping air in a vacuum coating cavity 102 through the vacuum pump 36 to enable the vacuum coating cavity 102 to be in a vacuum state and perform coating work;
s2, when film coating work is carried out, a servo motor 12 is started, a driving bevel gear 13 is driven to rotate through the output end of the servo motor 12, a driven bevel gear 15 is driven to rotate in a decelerating way by the driving bevel gear 13, a wheel shaft 14 is driven to rotate by the driven bevel gear 15, a gear disc 16 fixed with the wheel shaft 14 is driven to rotate by the wheel shaft 14, an inner tooth belt 17 is driven to move circularly by the gear disc 16, an inner ring frame 4 is driven to move circularly, a plurality of hangers 10 move circularly along with the inner ring frame 4, and a pinion 8 rotates continuously under the meshing effect of the inner tooth ring 5, so that a workpiece moves circularly and rotates in the equipment main body 1, and the pressure applied to the workpiece during film coating is more uniform, so that the film coating effect is improved;
s3, when cleaning is needed, the water inlet 24 is connected with an external pipeline, clean water enters the water inlet 24 from the external pipeline, then the pressure is increased through the pressure increasing valve 23, the clean water enters the telescopic pipe 25 in an accelerating way, the clean water enters the hollow pipe 31 and is sprayed to the inner wall of the vacuum coating cavity 102 through the spray head 32, then the speed reducing motor 29 is started, the hollow pipe 31 is driven to rotate through the output end of the speed reducing motor 29, the spray head 32 continuously rotates when spraying water, dead angles in the vacuum coating cavity 102 are effectively cleaned, and the cleaning effect is improved;
s4, after cleaning is finished, starting a water suction pump 33, enabling sewage generated by cleaning in the vacuum coating cavity 102 to enter the hollow bucket 22, and then enabling the sewage to enter a water outlet pipe 35 through a short pipe 34 for discharging, so that automatic cleaning is finished;
s5, after the water is drained, the extension end of the electric push rod 27 drives the circular plate 26 to move downwards, the circular plate 26, the conical top 28 and the hollow tube 31 move downwards integrally, and the top of the circular plate 26 is contracted in the hollow bucket 22 and is attached to the groove part 20, so that the hollow bucket 22 and the circular plate 26 are closed.
Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present invention, and the present invention is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present invention has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A rapid cleaning vacuum coating apparatus comprising:
a lower chamber (101), a vacuum coating cavity (102) and an upper chamber (103) are arranged in the equipment main body (1) from bottom to top;
the box door (2) is movably connected to one side of the equipment main body (1) and is communicated with the vacuum coating cavity (102);
the vacuum pump (36) is fixedly connected in the upper chamber (103), the air suction port of the vacuum pump is communicated with the vacuum coating cavity (102), and the output end of the vacuum pump extends to the outer side of the equipment main body (1);
the inner ring frame (4) is movably arranged in the vacuum coating cavity (102), and a plurality of positioning holes (6) are formed in the upper end of the inner ring frame;
the lower plate (18) is fixedly connected to the lower inner wall of the vacuum coating cavity (102);
an upper plate (19) fixedly connected to the upper end of the lower plate (18);
the supporting mechanisms are arranged in a plurality of groups and are respectively arranged in the positioning holes (6) and used for placing the workpieces to be coated;
the moving mechanism is arranged in the vacuum coating cavity (102) and is used for driving the inner ring frame (4) to link the workpiece to be coated to move circularly; and
the cleaning mechanism is arranged in the equipment main body (1), penetrates through the lower cavity (101) and the vacuum coating cavity (102) to clean the vacuum coating cavity (102) and automatically discharges sewage;
each group of supporting mechanism comprises a hanging frame (10), a locating pin (11), a locating shaft (7) and a pinion (8), wherein the locating shaft (7) is rotationally connected in a locating hole (6), a locating groove (9) is formed in the top of the locating shaft (7), the locating pin (11) is inserted into the locating groove (9) from top to bottom, the hanging frame (10) is fixedly connected to the top of the locating pin (11), the hanging frame (10) is used for installing a workpiece to be coated, and the pinion (8) is fixedly connected to the bottom of the locating shaft (7);
the cleaning mechanism includes:
the hollow hopper (22) is fixedly connected to the lower inner wall of the lower cavity (101), circular grooves (21) are formed in the centers of the lower plate (18) and the upper plate (19), and the hollow hopper (22) penetrates through the circular grooves (21) and is communicated with the lower cavity (101);
the pressurizing valve (23) is fixedly connected to the lower inner wall of the hollow bucket (22), the input end of the pressurizing valve is fixedly connected with the water inlet (24), the other end of the water inlet (24) penetrates through the equipment main body (1) and extends outwards, and the water inlet (24) is used for introducing clean water;
one end of the telescopic pipe (25) is fixedly connected with the output end of the pressure increasing valve (23);
a circular plate (26) which is positioned on the upper side of the hollow bucket (22) and the upper end of which is detachably connected with a conical top (28);
the two electric push rods (27) are fixedly connected to the lower inner wall of the hollow hopper (22), and the extension ends of the two electric push rods are fixedly connected to the bottom edge of the circular plate (26);
the positioning ring (30) is fixedly connected to the lower side of the circular plate (26), and the other end of the telescopic pipe (25) is fixedly connected with the positioning ring (30);
the rotary spraying assembly is arranged on the positioning ring (30) and is used for rotationally spraying clear water to clean dead corners of the vacuum coating cavity (102); and
and a water outlet assembly disposed in the lower chamber (101) for discharging sewage.
2. A rapid cleaning vacuum coating apparatus according to claim 1 wherein the moving mechanism comprises:
the outer ring frame (3) is fixedly connected to the lower inner wall of the vacuum coating cavity (102);
an inner gear ring (5) fixedly connected to the lower inner wall of the outer ring frame (3), wherein a plurality of pinion gears (8) are meshed with the inner gear ring (5);
the round groove (21) is fixedly connected to the lower inner wall of the vacuum coating cavity (102);
an upper plate (19) fixedly connected to the upper end of the lower plate (18); and
the belt pulley assembly is arranged between the lower plate (18) and the upper plate (19), and is connected with the inner ring frame (4) to drive the inner ring frame (4) to move circularly.
3. A rapid cleaning vacuum coating apparatus according to claim 2 wherein the pulley assembly comprises:
the wheel shafts (14) are provided with two wheel shafts which are rotatably connected to the lower inner wall of the lower chamber (101), and the upper ends of the wheel shafts penetrate through the circular grooves (21) and extend upwards;
the gear plates (16) are arranged, are positioned between the lower plate (18) and the upper plate (19) and are fixedly connected to the circumferential surfaces of the corresponding wheel shafts (14) respectively;
the inner toothed belt (17) is connected between the two gear plates (16) in a transmission way and is fixedly connected to the inner wall of the inner ring frame (4); and
and a driving part, which is arranged in the lower chamber (101) and is used for driving one of the wheel shafts (14) to rotate.
4. A rapid cleaning vacuum coating apparatus according to claim 3, wherein the driving means comprises a servo motor (12), a driving bevel gear (13) and a driven bevel gear (15), the servo motor (12) is fixedly connected to the lower inner wall of the lower chamber (101), the driving bevel gear (13) is fixedly connected to the output end of the servo motor (12), the driven bevel gear (15) is fixedly connected to the circumferential surface of the wheel shaft (14), and the driving bevel gear (13) is meshed with the driven bevel gear (15).
5. The rapid cleaning vacuum coating apparatus according to claim 4, wherein the rotary spray assembly comprises a gear motor (29) and a hollow tube (31), the hollow tube (31) is rotatably connected between a positioning ring (30) and a circular plate (26), the gear motor (29) is fixedly connected to the top of the circular plate (26), the output end of the gear motor (29) is fixedly connected to the top of the hollow tube (31), the gear motor (29) is located between the circular plate (26) and a conical top (28), and a plurality of spray heads (32) are arranged on the circumferential surface of the hollow tube (31).
6. The rapid cleaning vacuum coating equipment according to claim 5, wherein the water outlet assembly comprises a water suction pump (33), a short pipe (34) and a water outlet pipe (35), the water suction pump (33) is fixedly connected to the lower inner wall of the lower chamber (101), one end of the short pipe (34) is fixedly connected to a water suction port of the water suction pump (33), the other end of the short pipe (34) is fixedly connected to the hollow bucket (22), the water outlet of the water suction pump (33) is fixedly connected with the water outlet pipe (35), and the tail end of the water outlet pipe (35) penetrates through the equipment main body (1) and extends outwards.
7. The rapid cleaning vacuum coating equipment according to claim 6, wherein a groove part (20) is arranged at the top center of the upper plate (19), the hollow bucket (22) is positioned between the groove parts (20), and a water and oil drainage layer is arranged among the outer ring frame (3), the inner ring frame (4) and the upper plate (19).
8. A method for using a rapid cleaning vacuum coating apparatus, applied to the vacuum coating apparatus as claimed in claim 7, comprising the steps of:
s1, sequentially mounting a workpiece to be coated on a hanger (10), closing a box door (2) after mounting, starting a vacuum pump (36), and pumping air in a vacuum coating cavity (102) through the vacuum pump (36) to enable the vacuum coating cavity (102) to be in a vacuum state and perform coating work;
s2, when film coating work is carried out, a servo motor (12) is started, a driving bevel gear (13) is driven to rotate through the output end of the servo motor (12), the driving bevel gear (13) drives a driven bevel gear (15) to rotate in a decelerating way, the driven bevel gear (15) drives a wheel shaft (14) to rotate, the wheel shaft (14) drives a gear disc (16) fixed with the wheel shaft to rotate, the gear disc (16) drives an inner toothed belt (17) to move circularly, then an inner ring frame (4) is driven to move circularly, a plurality of hanging frames (10) move circularly along with the inner ring frame (4), and a pinion (8) rotates continuously under the meshing effect of the inner ring gear (5), so that a workpiece moves circularly and rotates in the equipment main body (1), and the pressure applied to the workpiece during film coating is more uniform, and the film coating effect is improved;
s3, when cleaning is needed, connecting the water inlet (24) with an external pipeline, enabling clear water to enter the water inlet (24) from the external pipeline, then increasing pressure through a pressurizing valve (23), enabling clear water to enter an extension pipe (25) in an accelerating mode, enabling clear water to enter a hollow pipe (31), enabling a spray head (32) to spray the clear water to the inner wall of a vacuum coating cavity (102), then starting a gear motor (29), driving the hollow pipe (31) to rotate through the output end of the gear motor (29), enabling the spray head (32) to rotate continuously when spraying water, and effectively cleaning dead corners in the vacuum coating cavity (102) so as to improve cleaning effects;
s4, after cleaning is finished, starting a water suction pump (33) to enable sewage generated by cleaning in the vacuum coating cavity (102) to enter the hollow bucket (22), and then enabling the sewage to enter a water outlet pipe (35) through a short pipe (34) to be discharged, so that automatic cleaning is finished;
s5, after water drainage is completed, the round plate (26) is driven to move downwards through the extension end of the electric push rod (27), the round plate (26), the conical top (28) and the hollow tube (31) integrally move downwards, and the top of the round plate (26) is contracted in the hollow bucket (22) and attached to the groove part (20), so that the hollow bucket (22) and the round plate (26) are closed.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310434880.2A CN116837325B (en) | 2023-04-21 | 2023-04-21 | Quick-cleaning vacuum coating equipment and application method thereof |
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| CN202310434880.2A CN116837325B (en) | 2023-04-21 | 2023-04-21 | Quick-cleaning vacuum coating equipment and application method thereof |
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| CN116837325B true CN116837325B (en) | 2024-01-12 |
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| KR20180051205A (en) * | 2016-11-08 | 2018-05-16 | 주식회사 선익시스템 | Shutter Combination nozzle cleaning device of deposition equipment |
| CN213409187U (en) * | 2020-09-09 | 2021-06-11 | 沈阳镨和真空电子设备有限公司 | Vacuum coating device with quick wiper mechanism |
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