TWI622100B - 晶圓狀物件之液體處理用方法及設備 - Google Patents
晶圓狀物件之液體處理用方法及設備 Download PDFInfo
- Publication number
- TWI622100B TWI622100B TW102130270A TW102130270A TWI622100B TW I622100 B TWI622100 B TW I622100B TW 102130270 A TW102130270 A TW 102130270A TW 102130270 A TW102130270 A TW 102130270A TW I622100 B TWI622100 B TW I622100B
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- housing
- heating element
- flow rate
- gas
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000007788 liquid Substances 0.000 title description 23
- 238000010438 heat treatment Methods 0.000 claims abstract description 100
- 230000008569 process Effects 0.000 claims abstract description 20
- 238000001816 cooling Methods 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 230000001737 promoting effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 62
- 239000007789 gas Substances 0.000 description 31
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 11
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 239000010453 quartz Substances 0.000 description 6
- 230000005855 radiation Effects 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000003973 paint Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens or the like for the charge within the furnace
- F27D5/0037—Supports specially adapted for semi-conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Weting (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/593,264 | 2012-08-23 | ||
| US13/593,264 US9316443B2 (en) | 2012-08-23 | 2012-08-23 | Method and apparatus for liquid treatment of wafer shaped articles |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201426873A TW201426873A (zh) | 2014-07-01 |
| TWI622100B true TWI622100B (zh) | 2018-04-21 |
Family
ID=50147082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102130270A TWI622100B (zh) | 2012-08-23 | 2013-08-23 | 晶圓狀物件之液體處理用方法及設備 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9316443B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6285125B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR102096672B1 (cg-RX-API-DMAC7.html) |
| TW (1) | TWI622100B (cg-RX-API-DMAC7.html) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9748120B2 (en) | 2013-07-01 | 2017-08-29 | Lam Research Ag | Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus |
| US9245777B2 (en) | 2013-05-15 | 2016-01-26 | Lam Research Ag | Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus |
| US9972514B2 (en) * | 2016-03-07 | 2018-05-15 | Lam Research Ag | Apparatus for liquid treatment of wafer shaped articles |
| US10720343B2 (en) | 2016-05-31 | 2020-07-21 | Lam Research Ag | Method and apparatus for processing wafer-shaped articles |
| CN109308986A (zh) * | 2017-07-26 | 2019-02-05 | 北京中科信电子装备有限公司 | 一种离子注入机晶片冷却装置 |
| KR102615845B1 (ko) * | 2020-11-19 | 2023-12-22 | 세메스 주식회사 | 지지 유닛 및 기판 처리 장치 |
| KR102683732B1 (ko) * | 2021-04-01 | 2024-07-12 | 세메스 주식회사 | 지지 유닛 및 기판 처리 장치 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI290861B (en) * | 2001-08-31 | 2007-12-11 | Applied Materials Inc | A method and apparatus for processing a wafer |
| US20080138914A1 (en) * | 2006-11-02 | 2008-06-12 | Zoran Popovic | Preparation of micro-porous crystals and conjugates thereof |
| US7509035B2 (en) * | 2004-09-27 | 2009-03-24 | Applied Materials, Inc. | Lamp array for thermal processing exhibiting improved radial uniformity |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS592318A (ja) * | 1982-06-28 | 1984-01-07 | Toshiba Mach Co Ltd | 半導体気相成長装置 |
| JPS6146023A (ja) * | 1984-08-10 | 1986-03-06 | Ushio Inc | 超高圧水銀灯による半導体ウエハ−材料の露光方法 |
| AT389959B (de) | 1987-11-09 | 1990-02-26 | Sez Semiconduct Equip Zubehoer | Vorrichtung zum aetzen von scheibenfoermigen gegenstaenden, insbesondere von siliziumscheiben |
| JPH0213958A (ja) * | 1988-06-30 | 1990-01-18 | Mitsubishi Electric Corp | レジスト現像装置 |
| JPH05299350A (ja) * | 1992-04-20 | 1993-11-12 | Nec Corp | 基板加熱機構 |
| GB9412918D0 (en) * | 1994-06-28 | 1994-08-17 | Baxendine Alar R | Apparatus for uniformly heating a substrate |
| TW386235B (en) | 1995-05-23 | 2000-04-01 | Tokyo Electron Ltd | Method for spin rinsing |
| US6198074B1 (en) * | 1996-09-06 | 2001-03-06 | Mattson Technology, Inc. | System and method for rapid thermal processing with transitional heater |
| US5965047A (en) * | 1997-10-24 | 1999-10-12 | Steag Ast | Rapid thermal processing (RTP) system with rotating substrate |
| JP2000334397A (ja) | 1999-05-31 | 2000-12-05 | Kokusai Electric Co Ltd | 板状試料の流体処理装置及び板状試料の流体処理方法 |
| US6536454B2 (en) | 2000-07-07 | 2003-03-25 | Sez Ag | Device for treating a disc-shaped object |
| JP4050505B2 (ja) * | 2001-12-07 | 2008-02-20 | 芝浦メカトロニクス株式会社 | スピン処理装置及び処理方法 |
| KR100498609B1 (ko) * | 2002-05-18 | 2005-07-01 | 주식회사 하이닉스반도체 | 배치형 원자층 증착 장치 |
| WO2004084278A1 (en) | 2003-03-20 | 2004-09-30 | Sez Ag | Device and method for wet treating disc-shaped articles |
| US8277569B2 (en) * | 2004-07-01 | 2012-10-02 | Dainippon Screen Mfg. Co., Ltd. | Substrate treating apparatus and substrate treating method |
| TWI267405B (en) | 2004-07-20 | 2006-12-01 | Sez Ag | Fluid discharging device |
| US7112763B2 (en) * | 2004-10-26 | 2006-09-26 | Applied Materials, Inc. | Method and apparatus for low temperature pyrometry useful for thermally processing silicon wafers |
| KR101061945B1 (ko) * | 2005-11-24 | 2011-09-05 | 도쿄엘렉트론가부시키가이샤 | 액 처리 방법, 액 처리 장치 및 이를 행하는 제어프로그램이 기억된 컴퓨터 판독 가능한 기억 매체 |
| US7914626B2 (en) * | 2005-11-24 | 2011-03-29 | Tokyo Electron Limited | Liquid processing method and liquid processing apparatus |
| JP4680044B2 (ja) * | 2005-11-24 | 2011-05-11 | 東京エレクトロン株式会社 | 液処理方法、液処理装置、制御プログラム、およびコンピュータ読取可能な記憶媒体 |
| TWI373804B (en) | 2007-07-13 | 2012-10-01 | Lam Res Ag | Apparatus and method for wet treatment of disc-like articles |
| US8254767B2 (en) * | 2008-08-29 | 2012-08-28 | Applied Materials, Inc. | Method and apparatus for extended temperature pyrometry |
| JP5195175B2 (ja) * | 2008-08-29 | 2013-05-08 | 東京エレクトロン株式会社 | 成膜装置、成膜方法及び記憶媒体 |
| US8294068B2 (en) * | 2008-09-10 | 2012-10-23 | Applied Materials, Inc. | Rapid thermal processing lamphead with improved cooling |
| WO2011007287A2 (en) | 2009-07-16 | 2011-01-20 | Lam Research Ag | Method for drying a semiconductor wafer |
| US8596623B2 (en) | 2009-12-18 | 2013-12-03 | Lam Research Ag | Device and process for liquid treatment of a wafer shaped article |
| CN101922042B (zh) * | 2010-08-19 | 2012-05-30 | 江苏中晟半导体设备有限公司 | 一种外延片托盘支撑旋转联接装置 |
| US20120103371A1 (en) | 2010-10-28 | 2012-05-03 | Lam Research Ag | Method and apparatus for drying a semiconductor wafer |
| US9355883B2 (en) * | 2011-09-09 | 2016-05-31 | Lam Research Ag | Method and apparatus for liquid treatment of wafer shaped articles |
| US9093482B2 (en) * | 2012-10-12 | 2015-07-28 | Lam Research Ag | Method and apparatus for liquid treatment of wafer shaped articles |
-
2012
- 2012-08-23 US US13/593,264 patent/US9316443B2/en active Active
-
2013
- 2013-08-21 JP JP2013170914A patent/JP6285125B2/ja active Active
- 2013-08-23 KR KR1020130100716A patent/KR102096672B1/ko active Active
- 2013-08-23 TW TW102130270A patent/TWI622100B/zh active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI290861B (en) * | 2001-08-31 | 2007-12-11 | Applied Materials Inc | A method and apparatus for processing a wafer |
| US7509035B2 (en) * | 2004-09-27 | 2009-03-24 | Applied Materials, Inc. | Lamp array for thermal processing exhibiting improved radial uniformity |
| US20080138914A1 (en) * | 2006-11-02 | 2008-06-12 | Zoran Popovic | Preparation of micro-porous crystals and conjugates thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| US20140054280A1 (en) | 2014-02-27 |
| TW201426873A (zh) | 2014-07-01 |
| JP6285125B2 (ja) | 2018-02-28 |
| US9316443B2 (en) | 2016-04-19 |
| JP2014042027A (ja) | 2014-03-06 |
| KR102096672B1 (ko) | 2020-04-03 |
| KR20140026307A (ko) | 2014-03-05 |
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