TWI619852B - Manufacturing methods of electrolytic copper foil having football-shaped copper particles and circuit board assembly - Google Patents

Manufacturing methods of electrolytic copper foil having football-shaped copper particles and circuit board assembly Download PDF

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Publication number
TWI619852B
TWI619852B TW106106455A TW106106455A TWI619852B TW I619852 B TWI619852 B TW I619852B TW 106106455 A TW106106455 A TW 106106455A TW 106106455 A TW106106455 A TW 106106455A TW I619852 B TWI619852 B TW I619852B
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Taiwan
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rugby
plating
copper foil
copper
layer
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TW106106455A
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Chinese (zh)
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TW201831734A (en
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鄧明凱
鄒明仁
林士晴
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南亞塑膠工業股份有限公司
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Priority to TW106106455A priority Critical patent/TWI619852B/en
Priority to CN202310895072.6A priority patent/CN116926631A/en
Priority to CN201710160942.XA priority patent/CN108505075A/en
Priority to JP2017172763A priority patent/JP6894325B2/en
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Publication of TWI619852B publication Critical patent/TWI619852B/en
Publication of TW201831734A publication Critical patent/TW201831734A/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/04Wires; Strips; Foils
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils
    • C25D7/0621In horizontal cells

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Electroplating And Plating Baths Therefor (AREA)

Abstract

本發明公開具有近似橄欖球狀銅瘤的電解銅箔與線路板組件的製造方法。具有近似橄欖球狀銅瘤的電解銅箔的製造方法包括通過電解方法以形成生箔層,且生箔層具有一預定表面。接著,在生箔層的預定表面形成一粗化處理層,以形成表層具有近似橄欖球凸起的電解銅箔。粗化處理層包括多個橄欖球狀銅瘤,且每兩個相鄰的橄欖球狀銅瘤之間形成一近似漏斗狀的容置空間。形成粗化處理層的步驟還進一步包括:執行一第一次電鍍粗化處理以及執行一第一次電鍍固化處理,其中,第一次電鍍粗化處理所使用的一第一電鍍液中含3至40g/L的銅、100至120g/L的硫酸、不超過20ppm的氧化砷以及5至20ppm的鎢酸根離子。藉此,由於表層具有近似橄欖球狀銅瘤的電解銅箔和樹脂基板之間具有更大的接觸面積,從而可具有更高的剝離強度。 The invention discloses a method for manufacturing an electrolytic copper foil and a circuit board assembly having a football-like copper knob. A method for manufacturing an electrolytic copper foil having an approximately rugby-shaped copper knob includes forming a green foil layer by an electrolytic method, and the green foil layer has a predetermined surface. Next, a roughened layer is formed on a predetermined surface of the green foil layer, so as to form an electrolytic copper foil having a surface with approximately a rugby protrusion. The roughening treatment layer includes a plurality of rugby-shaped copper knobs, and an approximately funnel-shaped accommodation space is formed between every two adjacent rugby-shaped copper knobs. The step of forming the roughening treatment layer further includes: performing a first plating roughening treatment and performing a first plating curing treatment, wherein a first plating solution used in the first plating roughening treatment contains 3 To 40 g / L of copper, 100 to 120 g / L of sulfuric acid, arsenic oxide not exceeding 20 ppm, and 5 to 20 ppm of tungstate ion. Thereby, since the electrolytic copper foil having a rugby-like copper knob on the surface layer has a larger contact area with the resin substrate, it can have higher peel strength.

Description

具近似橄欖球狀銅瘤的電解銅箔與線路板組件的製造方法 Method for manufacturing electrolytic copper foil and circuit board assembly with approximate football-like copper knob

本發明涉及一種電解銅箔以及線路板組件的製造方法,特別是涉及一種表層具有多個近似橄欖球狀銅瘤的電解銅箔的製造方法,以及一種使用表層具有多個近似橄欖球狀銅瘤的電解銅箔的線路板組件的製造方法。 The invention relates to a method for manufacturing an electrolytic copper foil and a circuit board assembly, in particular to a method for manufacturing an electrolytic copper foil having a plurality of approximately rugby-like copper knobs on its surface layer, and an electrolytic method using the surface layer having a plurality of rugby-like copper knobs Manufacturing method of copper foil circuit board assembly.

現有應用於印刷電路基板的銅箔,會通過電鍍在陰極輪上形成原箔,再經過後段處理製成而形成最終的產品。後段處理包括對原箔的粗糙面執行粗化處理,以在原箔的粗糙面形成多個圓球狀銅瘤,從而增加銅箔與電路基板之間的接著強度,也就是增加銅箔的剝離強度。 The existing copper foil applied to the printed circuit board will be formed on the cathode wheel by electroplating, and then made through the post-processing to form the final product. The post-processing includes roughening the rough surface of the original foil to form a plurality of spherical copper nodules on the rough surface of the original foil, thereby increasing the bonding strength between the copper foil and the circuit substrate, that is, increasing the peeling strength of the copper foil. .

然而,電子產品近年來趨向高頻高速化,在傳遞高頻訊號時,銅箔表面的形狀對傳輸損耗有很大的影響。表面粗糙度大的銅箔,訊號的傳播距離較長,會導致訊號衰減或延遲。換句話說,銅箔的表面越平滑則訊號在傳遞時的損耗越小。因此,銅箔表面的平整性扮演非常重要的角色。 However, in recent years, electronic products tend to be high-frequency and high-speed. When transmitting high-frequency signals, the shape of the surface of the copper foil has a great influence on transmission loss. Copper foils with large surface roughness have a longer signal propagation distance, which can cause signal attenuation or delay. In other words, the smoother the surface of the copper foil, the less the signal will lose during transmission. Therefore, the flatness of the copper foil surface plays a very important role.

請參考圖1,其顯示現有技術中的銅箔的局部剖面示意圖。如圖1所示,在現有技術中銅箔F1的表面所形成的多個銅瘤F10大致上呈圓球狀,且大部分圓球狀的銅瘤F10在水平方向的最大尺寸會大於在垂直方向上的最大尺寸。如此,雖然可以使銅箔的粗 糙度較低,以滿足高頻傳輸的需求,但銅箔在和高頻基板接合時,銅箔與高頻基板的接合強度較為不足。 Please refer to FIG. 1, which is a schematic partial cross-sectional view of a copper foil in the prior art. As shown in FIG. 1, in the prior art, a plurality of copper bumps F10 formed on the surface of the copper foil F1 are approximately spherical, and most of the spherical copper bumps F10 have a maximum size in the horizontal direction larger than in the vertical direction. The largest dimension in the direction. In this way, although the thickness of the copper foil can be made The roughness is low to meet the needs of high-frequency transmission, but when the copper foil is bonded to a high-frequency substrate, the bonding strength of the copper foil and the high-frequency substrate is insufficient.

若嘗試以降低銅箔表面的粗糙度來降低高頻訊號傳輸損耗,又會降低銅箔和電路基板壓合的剝離強度。因此,如何在提升銅箔的剝離強度時,又能同時保持銅箔表面的平整性是目前業界人員研發的一大課題。 If you try to reduce the roughness of the copper foil surface to reduce high-frequency signal transmission loss, the peel strength of the copper foil and the circuit board will be reduced. Therefore, how to improve the peel strength of the copper foil while maintaining the flatness of the surface of the copper foil at the same time is a major issue for researchers in the industry.

本發明所要解決的技術問題在於,針對現有技術的不足提供一種具近似橄欖球狀銅瘤的電解銅箔以及線路板組件的製造方法。 The technical problem to be solved by the present invention is to provide an electrolytic copper foil with a football-like copper knob and a method for manufacturing a circuit board assembly in response to the shortcomings of the prior art.

本發明所採用的其中一技術方案是,提供一種具近似橄欖球狀銅瘤的電解銅箔的製造方法。具近似橄欖球狀銅瘤的電解銅箔的製造方法包括通過電解方法以形成生箔層,且生箔層具有一預定表面。接著,在生箔層的預定表面形成一粗化處理層,以形成表層具有近似橄欖球凸起的電解銅箔。粗化處理層包括多個近似橄欖球狀的銅瘤,且每兩個相鄰的近似橄欖球狀的銅瘤之間形成一近似漏斗狀的容置空間。形成粗化處理層的步驟還進一步包括:執行一第一次電鍍粗化處理以及執行一第一次電鍍固化處理,其中,第一次電鍍粗化處理所使用的一第一電鍍液中含3至40g/L的銅、100至120g/L的硫酸、不超過20ppm的氧化砷以及5至20ppm的鎢酸根離子。 One of the technical solutions adopted by the present invention is to provide a method for manufacturing an electrolytic copper foil with a football-like copper knob. A method for manufacturing an electrolytic copper foil having an approximately rugby-shaped copper knob includes forming a green foil layer by an electrolytic method, and the green foil layer has a predetermined surface. Next, a roughened layer is formed on a predetermined surface of the green foil layer, so as to form an electrolytic copper foil having a surface with approximately a rugby protrusion. The roughening treatment layer includes a plurality of approximately rugby-shaped copper knobs, and an approximately funnel-shaped accommodation space is formed between every two adjacent approximately rugby-shaped copper knobs. The step of forming the roughening treatment layer further includes: performing a first plating roughening treatment and performing a first plating curing treatment, wherein a first plating solution used in the first plating roughening treatment contains 3 To 40 g / L of copper, 100 to 120 g / L of sulfuric acid, arsenic oxide not exceeding 20 ppm, and 5 to 20 ppm of tungstate ion.

本發明所採用的另外再一技術方案是,提供一種線路板組件的製造方法,其提供由上述的製造方法所形成的具近似橄欖球狀銅瘤的電解銅箔。接著,將上述具近似橄欖球狀銅瘤的電解銅箔與一樹脂基板面對面壓合,以形成一線路板組件,其中,具近似橄欖球狀銅瘤的電解銅箔是以粗化處理層面對樹脂基板。 Another technical solution adopted by the present invention is to provide a method for manufacturing a circuit board assembly, which provides an electrolytic copper foil having a football-like copper knob formed by the above manufacturing method. Next, the above-mentioned electrolytic copper foil with a rugby-like copper knob is pressed face-to-face with a resin substrate to form a circuit board assembly, wherein the electrolytic copper foil with a rugby-like copper knob is used to roughen the resin with a roughened surface Substrate.

本發明的有益效果在於,通過上述的製造方法,可以使電解 銅箔的粗化處理層具有多個橄欖球狀銅瘤或近似橄欖球狀的銅瘤。也就是說,橄欖球狀銅瘤或近似橄欖球狀的銅瘤的寬度比現有技術中的圓球狀銅瘤的寬度小。因此,當表層具近似橄欖球狀銅瘤的電解銅箔和樹脂基板接著時,相較於現有技術中具有圓球狀銅瘤的電解銅箔而言,表層具近似橄欖球狀銅瘤的電解銅箔和樹脂基板之間具有更大的接觸面積,從而可具有更高的剝離強度。 The beneficial effect of the present invention is that, by the above-mentioned manufacturing method, electrolysis can be made The roughened layer of the copper foil has a plurality of rugby-shaped copper knobs or approximately rugby-shaped copper knobs. That is, the width of a rugby-shaped copper knob or an approximately rugby-shaped copper knob is smaller than the width of a spherical copper-shaped knob in the prior art. Therefore, when the electrolytic copper foil having a rugby-like copper knob on the surface layer and the resin substrate are bonded, the electrolytic copper foil having a rugby-like copper knob on the surface layer is compared with the electrolytic copper foil having a spherical copper knob in the prior art. It has a larger contact area with the resin substrate, so that it can have higher peel strength.

為使能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與附圖,然而所提供的附圖僅提供參考與說明用,並非用來對本發明加以限制。 In order to further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are only for reference and description, and are not intended to limit the present invention.

F1‧‧‧現有的銅箔 F1‧‧‧ Existing copper foil

F10‧‧‧圓球狀銅瘤 F10‧‧‧Spherical copper tumor

1‧‧‧生箔裝置 1‧‧‧ raw foil device

10‧‧‧電解槽 10‧‧‧ electrolytic cell

11‧‧‧陽極板 11‧‧‧Anode plate

12‧‧‧陰極輪 12‧‧‧ cathode wheel

13‧‧‧輥輪 13‧‧‧roller

L0‧‧‧電解液 L0‧‧‧ electrolyte

14‧‧‧導流管 14‧‧‧ Diversion tube

E1‧‧‧電源供應裝置 E1‧‧‧Power Supply Unit

2‧‧‧表面處理裝置 2‧‧‧ surface treatment device

20‧‧‧傳送單元 20‧‧‧Transfer Unit

21‧‧‧粗化單元 21‧‧‧Roughening unit

L1‧‧‧第一電鍍液 L1‧‧‧The first plating solution

210‧‧‧粗化槽 210‧‧‧ roughening tank

211‧‧‧粗化陽極板 211‧‧‧roughened anode plate

22‧‧‧固化單元 22‧‧‧curing unit

L2‧‧‧第二電鍍液 L2‧‧‧Second plating solution

220‧‧‧固化槽 220‧‧‧curing tank

221‧‧‧固化陽極板 221‧‧‧cured anode plate

23‧‧‧清洗槽 23‧‧‧cleaning tank

3‧‧‧電解銅箔 3‧‧‧ electrolytic copper foil

T‧‧‧總厚度 T‧‧‧Total thickness

30‧‧‧生箔層 30‧‧‧ raw foil

30a‧‧‧粗糙面 30a‧‧‧Rough surface

30b‧‧‧光滑面 30b‧‧‧ smooth surface

31‧‧‧粗化處理層 31‧‧‧Coarse treatment layer

310‧‧‧銅瘤 310‧‧‧ Copper Tumor

D1‧‧‧最大的長軸直徑 D1‧‧‧Maximum major axis diameter

D2‧‧‧最大的短軸直徑 D2‧‧‧Maximum short axis diameter

S1‧‧‧近似漏斗狀的容置空間 S1‧‧‧Funnel-shaped accommodation space

t‧‧‧粗化處理層厚度 t‧‧‧Roughened layer thickness

P1‧‧‧間距 P1‧‧‧pitch

M1、M1’‧‧‧線路板組件 M1, M1’‧‧‧Circuit board components

4‧‧‧樹脂基板 4‧‧‧ resin substrate

5‧‧‧黏著膠 5‧‧‧ Adhesive

S100、S200~204、S300‧‧‧流程步驟 S100, S200 ~ 204, S300‧‧‧Process steps

圖1為現有技術中的電解銅箔的局部剖面示意圖。 FIG. 1 is a schematic partial cross-sectional view of an electrolytic copper foil in the prior art.

圖2為本發明實施例的表層具近似橄欖球狀銅瘤的電解銅箔的製造方法的流程圖。 FIG. 2 is a flowchart of a method for manufacturing an electrolytic copper foil with a football-like copper knob on its surface layer according to an embodiment of the present invention.

圖3為用以執行圖2的表層具近似橄欖球狀銅瘤的電解銅箔的製造方法的系統的示意圖。 FIG. 3 is a schematic diagram of a system for performing a method for manufacturing an electrolytic copper foil having a rugby-like copper knob on the surface layer of FIG. 2.

圖4為本發明實施例的表層具近似橄欖球狀銅瘤的電解銅箔的局部剖面示意圖。 FIG. 4 is a schematic partial cross-sectional view of an electrolytic copper foil having an approximately rugby-like copper knob on its surface layer according to an embodiment of the present invention.

圖5為圖4的表層具近似橄欖球狀銅瘤的電解銅箔在區域V的局部放大示意圖。 FIG. 5 is a partially enlarged schematic view of the electrolytic copper foil with an approximately rugby-shaped copper knob on the surface layer in FIG. 4 in a region V. FIG.

圖6為本發明實施例的表層具近似橄欖球狀銅瘤的電解銅箔在掃描式電子顯微鏡(SEM)的照片。 FIG. 6 is a scanning electron microscope (SEM) photograph of an electrolytic copper foil with an approximately rugby-like copper knob on its surface layer according to an embodiment of the present invention.

圖7為比較例的電解銅箔在掃描式電子顯微鏡(SEM)的照片。 FIG. 7 is a scanning electron microscope (SEM) photograph of an electrolytic copper foil of a comparative example.

圖8為本發明實施例的表層具近似橄欖球狀銅瘤的電解銅箔的聚焦離子束(FIB)照片。 FIG. 8 is a focused ion beam (FIB) photograph of an electrolytic copper foil with an approximately rugby-like copper knob on the surface of an embodiment of the present invention.

圖9顯示本發明實施例的線路板組件的剖面示意圖。 FIG. 9 is a schematic cross-sectional view of a circuit board assembly according to an embodiment of the present invention.

圖10顯示圖9的線路板組件在區域X的局部放大圖。 FIG. 10 is a partial enlarged view of the circuit board assembly of FIG. 9 in an area X. FIG.

圖11顯示本創作另一實施例的線路板組件的剖面示意圖。 FIG. 11 is a schematic cross-sectional view of a circuit board assembly according to another embodiment of the present invention.

以下是通過特定的具體實施例來說明本發明所公開有關“表層具近似橄欖球狀銅瘤的電解銅箔與線路板組件的製造方法”的實施方式。本發明實施例所提供的具近似橄欖球狀銅瘤的電解銅箔的製造方法可獲得具有低粗度及高剝離強度的電解銅箔。另外,以前述方法所製造的表層具近似橄欖球狀銅瘤的電解銅箔和樹脂基板相互接合所形成的線路板組件可應用於高頻訊號傳輸。 The following is a specific embodiment to explain the embodiment of the "manufacturing method of an electrolytic copper foil and a circuit board assembly with a rugby-like copper knob on the surface layer" disclosed by the present invention. The method for manufacturing an electrolytic copper foil with a rugby-like copper knob provided by an embodiment of the present invention can obtain an electrolytic copper foil having a low thickness and a high peeling strength. In addition, the circuit board assembly formed by bonding the electrolytic copper foil and the resin substrate with a rugby-like copper knob on the surface layer manufactured by the aforementioned method can be applied to high-frequency signal transmission.

請參照圖2及圖3。圖2顯示本發明實施例的表層具近似橄欖球狀銅瘤的電解銅箔的製造方法的流程圖,圖3為用以執行圖2的表層具近似橄欖球狀銅瘤的電解銅箔的製造方法的設備示意圖。 Please refer to FIG. 2 and FIG. 3. FIG. 2 shows a flowchart of a method for manufacturing an electrolytic copper foil with a rugby-like copper knob on the surface layer according to an embodiment of the present invention. FIG. Equipment schematic.

首先,如圖2所示,在步驟S100中,通過一電解方法以形成一生箔層,其中所述生箔層具有一預定表面。 First, as shown in FIG. 2, in step S100, a green foil layer is formed by an electrolytic method, wherein the green foil layer has a predetermined surface.

請參考圖3,通過電解方法形成生箔層的步驟包括提供一生箔裝置1,且生箔裝置1至少包括一電解槽10、一陽極板11、一陰極輪12以及一輥輪13。 Referring to FIG. 3, the step of forming a green foil layer by an electrolytic method includes providing a green foil device 1. The green foil device 1 includes at least an electrolytic cell 10, an anode plate 11, a cathode wheel 12, and a roller 13.

承上所述,電解槽10用以裝盛電解液L0。陽極板11設置在電解槽10內,並電性連接至一電源供應裝置2的正極輸出端。陽極板11是由銥元素或其氧化物披覆於鈦板而形成。陰極輪12則對應於電解槽10設置,並位於陽極板11上方。另外,陰極輪12是電性連接至電源供應裝置2的負極輸出端。在本發明實施例中,陰極輪12為鈦製輥筒。 As mentioned above, the electrolytic cell 10 is used for containing the electrolyte L0. The anode plate 11 is disposed in the electrolytic cell 10 and is electrically connected to a positive output terminal of a power supply device 2. The anode plate 11 is formed by coating a titanium plate with an iridium element or an oxide thereof. The cathode wheel 12 is disposed corresponding to the electrolytic cell 10 and is located above the anode plate 11. In addition, the cathode wheel 12 is electrically connected to a negative output terminal of the power supply device 2. In the embodiment of the present invention, the cathode wheel 12 is a titanium roller.

另外,在本實施例中,生箔裝置1還包括一和電解槽10流體連通的導流管14。前述的電解液L0是通過導流管14注入電解槽10內,淹沒陽極板11,並使部分陰極輪12浸泡在電解液L0中。 In addition, in this embodiment, the green foil device 1 further includes a deflector 14 in fluid communication with the electrolytic cell 10. The aforementioned electrolytic solution L0 is injected into the electrolytic cell 10 through the guide tube 14 to flood the anode plate 11 and immerse part of the cathode wheel 12 in the electrolytic solution L0.

接著,如圖3所示,電源供應裝置E1對陽極板11與陰極輪12輸出直流電,從而對電解液L0施加電流,使電解液L0中的銅離子析出於陰極輪12的表面,而形成生箔層30。 Next, as shown in FIG. 3, the power supply device E1 outputs a direct current to the anode plate 11 and the cathode wheel 12, thereby applying a current to the electrolytic solution L0, so that copper ions in the electrolytic solution L0 are precipitated on the surface of the cathode wheel 12, thereby forming Foil layer 30.

另外,在電解電解液L0形成生箔層30時,會持續供應電解液L0至電解槽10內。具體而言,電解液L0可以通過導流管14流入電解槽10內,以維持電解槽10內的電解液L0的銅離子濃度。請再參照圖3,形成於陰極輪12表面的生箔層30會由陰極輪12的表面剝離,並通過輥輪13,以進行後續製程。 In addition, when the green foil layer 30 is formed by the electrolytic electrolytic solution L0, the electrolytic solution L0 is continuously supplied into the electrolytic tank 10. Specifically, the electrolytic solution L0 can flow into the electrolytic cell 10 through the guide tube 14 to maintain the copper ion concentration of the electrolytic solution L0 in the electrolytic cell 10. Please refer to FIG. 3 again, the green foil layer 30 formed on the surface of the cathode wheel 12 will be peeled off from the surface of the cathode wheel 12 and passed through the roller 13 for subsequent processes.

更進一步來說,生箔層30具有一粗糙面30a及與前述粗糙面30a相對的光滑面30b,其中光滑面30b是在電解過程中,生箔層30和陰極輪12接觸的表面,因此光滑面30b的粗糙度較為固定。粗糙面30a則是接觸電解液L0的表面。生箔層30的粗糙面30a或光滑面30b通常會具有多個顆粒狀突起。在一實施例中,生箔層30的粗糙面30a的十點平均粗糙度不超過2μm,例如介於0.9μm至1.9μm之間。 Furthermore, the green foil layer 30 has a rough surface 30a and a smooth surface 30b opposite to the aforementioned rough surface 30a. The smooth surface 30b is the surface where the green foil layer 30 and the cathode wheel 12 are in contact during the electrolysis process, so it is smooth. The roughness of the surface 30b is relatively constant. The rough surface 30a is a surface that contacts the electrolytic solution L0. The rough surface 30a or the smooth surface 30b of the green foil layer 30 usually has a plurality of granular protrusions. In one embodiment, the ten-point average roughness of the rough surface 30a of the green foil layer 30 does not exceed 2 μm, for example, between 0.9 μm and 1.9 μm.

接著,請再參照圖2,在步驟S200中,形成一粗化處理層於於生箔層的預定表面,以形成一表層具近似橄欖球狀凸起的電解銅箔,其中,粗化處理層包括多個近似橄欖球狀的銅瘤,且每兩個相鄰的近似橄欖球狀的銅瘤之間形成一近似漏斗狀的容置空間。 Next, referring to FIG. 2 again, in step S200, a roughening treatment layer is formed on a predetermined surface of the green foil layer to form an electrolytic copper foil having a surface layer with approximately rugby-like protrusions. The roughening treatment layer includes A plurality of approximately rugby-shaped copper knobs, and an approximately funnel-shaped accommodation space is formed between every two adjacent approximately rugby-shaped copper knobs.

承上所述,形成粗化處理層的步驟S200還進一步包括執行至少一次電鍍粗化處理與至少一次電鍍固化處理。在本發明實施例中,生箔層會經過兩次電鍍粗化處理及兩次電鍍固化處理,以在生箔層的預定表面形成粗化處理層,其中預定表面可以是指粗糙面或者光滑面中的至少其中一者。 As described above, the step S200 of forming a roughening treatment layer further includes performing at least one plating roughening treatment and at least one plating curing treatment. In the embodiment of the present invention, the green foil layer is subjected to two electroplating roughening treatments and two electroplating curing treatments to form a roughening treatment layer on a predetermined surface of the green foil layer, where the predetermined surface may refer to a rough surface or a smooth surface. At least one of them.

詳細而言,如圖2所示,在其中一實施例中,在步驟S100之後,是依序執行第一次電鍍粗化處理(步驟S201)、第一次電鍍固化處理(步驟S203)、第二次電鍍粗化處理(步驟S202)以及第二次電鍍固化處理(步驟S204)。 In detail, as shown in FIG. 2, in one embodiment, after step S100, the first plating roughening process (step S201), the first plating curing process (step S203), and the first step are sequentially performed. The second plating roughening process (step S202) and the second plating curing process (step S204).

在另一個實施例中,在步驟S100之後,是依序執行第一次電鍍粗化處理(步驟S201)、第二次電鍍粗化處理(步驟S202)、第一 次電鍍固化處理(步驟S203)以及第二次電鍍固化處理(步驟S204)。 In another embodiment, after step S100, the first plating roughening process (step S201), the second plating roughening process (step S202), the first The secondary plating curing process (step S203) and the second plating curing process (step S204).

更進一步來說,隨著電鍍粗化處理與電鍍固化處理的次數越多,可以增加電解銅箔與樹脂基板的接著強度,但也會使電解銅箔的表面粗糙度增加,而不利於應用在高頻訊號傳輸。因此,可以根據實際製程的需要,增減電鍍粗化處理與電鍍固化處理的次數以及調整順序。 Furthermore, as the number of times of roughening treatment and electroplating and curing treatment increases, the bonding strength between the electrolytic copper foil and the resin substrate can be increased, but the surface roughness of the electrolytic copper foil is also increased, which is unfavorable for application in High-frequency signal transmission. Therefore, the number of electroplating roughening treatments and electroplating curing treatments and the adjustment order can be increased or decreased according to the needs of the actual manufacturing process.

請參照圖3。以依序執行第一次電鍍粗化處理、第一次電鍍固化處理、第二次電鍍粗化處理及第二次電鍍固化處理為例來進行說明。 Please refer to Figure 3. The description will be made by taking the first plating roughening process, the first plating curing process, the second plating roughening process, and the second plating curing process in this order as an example.

如圖3所示,用於執行步驟S201~S204的表面處理裝置2包括配置在一生產線上的多個傳送單元20、至少一個粗化單元21(圖3中繪示兩個)、至少一個固化單元22(圖3中繪示兩個)以及多個清洗槽23,其中粗化單元21、固化單元22與清洗槽23的數量依據實際需求而設置。多個傳送單元20依照預設的製程流程將生箔層30傳送至粗化單元21、清洗槽23以及固化單元22進行處理。 As shown in FIG. 3, the surface treatment device 2 for performing steps S201 to S204 includes a plurality of transfer units 20, at least one roughening unit 21 (two are shown in FIG. 3), and at least one curing unit arranged on a production line. There are two units 22 (two shown in FIG. 3) and a plurality of cleaning tanks 23. The number of the roughening unit 21, the curing unit 22 and the cleaning tank 23 is set according to actual needs. The plurality of transfer units 20 transfer the green foil layer 30 to the roughening unit 21, the cleaning tank 23, and the curing unit 22 for processing according to a preset process.

粗化單元21包括用以承載第一電鍍液L1的粗化槽210以及設置於粗化槽210內的一組粗化陽極板211。如圖3所示,在執行第一次電鍍粗化處理時,生箔層30會被投入已裝載第一電鍍液L1的粗化槽210內。本發明實施例所使用的第一電鍍液L1含3至40g/L的銅,100至120g/L硫酸,不超過20ppm的氧化砷(As2O3)以及5至20ppm的鎢酸根離子(WO4 2-)。 The roughening unit 21 includes a roughening tank 210 for supporting the first plating solution L1 and a set of roughening anode plates 211 provided in the roughening tank 210. As shown in FIG. 3, when the first plating roughening process is performed, the green foil layer 30 is put into the roughening tank 210 on which the first plating solution L1 is loaded. The first plating solution L1 used in the embodiment of the present invention contains 3 to 40 g / L of copper, 100 to 120 g / L of sulfuric acid, not more than 20 ppm of arsenic oxide (As 2 O 3 ), and 5 to 20 ppm of tungstate ion (WO 4 2- ).

在執行第一次電鍍粗化處理時,粗化陽極板211與生箔層30分別被施加一正電壓與一負電壓,以使第一電鍍液L1內的銅離子還原,而在生箔層30的粗糙面30a形成多個瘤狀銅粒子。 When the first electroplating roughening process is performed, a positive voltage and a negative voltage are applied to the roughened anode plate 211 and the green foil layer 30, respectively, so that copper ions in the first plating solution L1 are reduced, and the green foil layer is reduced. The rough surface 30a of 30 forms a plurality of nodular copper particles.

須說明的是,本發明實施例所使用的第一電鍍液L1具有特殊的組成,可限制瘤狀銅粒子的結晶成長方向。另外,氧化砷的濃度與鎢酸根離子的濃度不超過20ppm。若氧化砷的濃度的濃度過高,可能會形成尺寸偏大的圓球形銅瘤,而較難以形成近似橄欖 球狀或橄欖球狀的銅瘤。 It should be noted that the first plating solution L1 used in the embodiment of the present invention has a special composition, which can limit the crystal growth direction of the nodular copper particles. In addition, the concentration of arsenic oxide and the concentration of tungstate ions do not exceed 20 ppm. If the concentration of arsenic oxide is too high, a large-sized spherical copper tumor may be formed, and it is difficult to form an approximate olive Spherical or rugby-shaped copper knobs.

進一步而言,在執行第一次電鍍粗化處理時,由於第一電鍍液L1中的銅濃度偏低(低於40g/L),銅原子只能被選擇沿著較偏好的結晶方向(即縱向)堆疊。換句話說,瘤狀銅粒子較偏好朝一大致垂直於生箔層30的粗糙面30a的方向成長,而較不容易朝一大致平行於生箔層30的粗糙面30a的方向成長。因此,瘤狀銅粒子在水平方向的成長程度有限,從而使瘤狀銅粒子具有直立於生箔層10的粗糙面10b或光滑面10a的橄欖球狀。 Further, when the first electroplating roughening process is performed, because the copper concentration in the first plating solution L1 is low (less than 40 g / L), copper atoms can only be selected along the preferred crystallization direction (i.e. Portrait). In other words, the nodular copper particles prefer to grow in a direction substantially perpendicular to the rough surface 30 a of the green foil layer 30, but less likely to grow in a direction substantially parallel to the rough surface 30 a of the green foil layer 30. Therefore, the growth degree of the nodular copper particles in the horizontal direction is limited, so that the nodular copper particles have a rugby shape standing upright on the rough surface 10 b or the smooth surface 10 a of the green foil layer 10.

因此,通過第一次電鍍粗化處理後,形成於生箔層30的粗糙面30a上的大部分瘤狀銅粒子在水平方向的尺寸會小於在縱向方向的尺寸,也會使每兩個相鄰的瘤狀銅粒子之間的間距較寬。 Therefore, after the first electroplating and roughening treatment, most of the nodular copper particles formed on the rough surface 30a of the green foil layer 30 in the horizontal direction will be smaller than those in the vertical direction, and every two phases The spacing between adjacent nodular copper particles is wide.

另外,在一實施例中,於執行第一次電鍍粗化處理時,通過粗化陽極板211的電流密度是介於40至80A/dm2,可以形成具近似橄欖球形狀的瘤狀銅粒子。另外,在執行第一次電鍍粗化處理時,第一電鍍液的溫度大致維持在攝氏20至40度。 In addition, in one embodiment, when the first electroplating roughening process is performed, the current density of the roughened anode plate 211 is between 40 and 80 A / dm 2 , so that nodular copper particles having an approximately rugby shape can be formed. In addition, when the first plating roughening process is performed, the temperature of the first plating solution is maintained approximately at 20 to 40 degrees Celsius.

在完成第一次電鍍粗化處理後,執行第一次電鍍固化處理,以形成一覆蓋瘤狀銅粒子的銅保護層,以使瘤狀銅粒子被緊密固定於生箔層30的粗糙面30a或光滑面30b,而防止「掉粉」現象。 After the first electroplating roughening process is completed, the first electroplating curing process is performed to form a copper protective layer covering the nodular copper particles, so that the nodular copper particles are tightly fixed to the rough surface 30a of the green foil layer 30 Or smooth surface 30b to prevent the "falling powder" phenomenon.

如圖3所示,第一次電鍍固化處理是通過固化單元22來執行。固化單元22包括一用以承載第二電鍍液L2的固化槽220以及設置於固化槽220的一組固化陽極板221。 As shown in FIG. 3, the first plating curing process is performed by the curing unit 22. The curing unit 22 includes a curing tank 220 for carrying the second plating solution L2 and a set of curing anode plates 221 disposed in the curing tank 220.

本實施例中,生箔層30在粗化槽210完成第一次電鍍粗化處理後,先通過傳送單元20被傳送至清洗槽23清洗後,再傳送至固化槽220,以執行第一次電鍍固化處理。 In this embodiment, after the first electroplating and roughening treatment is performed on the raw foil layer 30 in the roughening tank 210, the green foil layer 30 is first transferred to the cleaning tank 23 through the transfer unit 20, and then is transferred to the curing tank 220 to perform the first time. Electroplating and curing.

在執行第一次電鍍固化處理時,固化陽極板221與生箔層30分別被施加一正電壓與一負電壓,以使第二電鍍液L2內的銅離子還原,而在生箔層30上形成覆蓋瘤狀銅粒子的銅保護層。 When the first electroplating and curing process is performed, a positive voltage and a negative voltage are applied to the solidified anode plate 221 and the green foil layer 30, respectively, so that the copper ions in the second plating solution L2 are reduced, and the green foil layer 30 is A copper protective layer is formed covering the nodular copper particles.

在執行第一次電鍍固化處理時所使用的第二電鍍液L2含有 50至70g/L的銅,70至100g/L的硫酸,以及低於30ppm的氧化砷,且第二電鍍液L2的溫度大致維持在攝氏50至70度。 The second plating solution L2 used when performing the first plating curing process contains The copper of 50 to 70 g / L, sulfuric acid of 70 to 100 g / L, and arsenic oxide below 30 ppm, and the temperature of the second plating solution L2 is maintained at about 50 to 70 degrees Celsius.

須說明的是,在第一次電鍍粗化處理中所形成的瘤狀銅粒子的高度並不高。若在第一次電鍍固化處理時,形成較厚的銅保護層雖然可以降低掉粉現象發生的機率,並降低電解銅箔表面的粗糙度,卻有可能減少電解銅箔可和樹脂基板接著的表面積,從而降低剝離強度。因此,在執行第一次電鍍固化處理時,電流密度需經過特別調整,以形成較薄且深鍍效果較好的銅保護層。據此,可在防止掉粉的情況下,又不致於降低電解銅箔可和樹脂基板接著的表面積。在一實施例中,在執行第一次電鍍固化處理中,電流密度是15至40A/dm2It should be noted that the height of the nodular copper particles formed in the first plating roughening process is not high. If a thicker copper protective layer is formed during the first electroplating and curing process, although the probability of powder loss and the roughness of the surface of the electrolytic copper foil can be reduced, it is possible to reduce the adhesion of the electrolytic copper foil to the resin substrate. Surface area, which reduces peel strength. Therefore, when performing the first electroplating and curing process, the current density needs to be specially adjusted to form a thinner copper protective layer with better deep plating effect. Accordingly, it is possible to prevent the powder from falling off without reducing the surface area to which the electrolytic copper foil can adhere to the resin substrate. In one embodiment, in performing the first plating curing process, the current density is 15 to 40 A / dm 2 .

在一實施例中,在執行第一次電鍍粗化處理與第一次電鍍固化處理之後,即可形成表層具有橄欖球狀凸起或近似橄欖球狀凸起的電解銅箔。關於粗化處理層的詳細結構將於後文中進一步說明。 In one embodiment, after performing the first electroplating roughening treatment and the first electroplating curing treatment, an electrolytic copper foil having a rugby-like protrusion or a rugby-like protrusion on the surface layer can be formed. The detailed structure of the roughening treatment layer will be further explained later.

接著,通過傳送單元20,將已經過第一電鍍固化處理的生箔層30由固化槽220先傳送至清洗槽23清洗後,再傳送至下一個粗化槽210中,以進行第二次電鍍粗化處理。 Next, the green foil layer 30 that has undergone the first electroplating and curing treatment is transferred from the curing tank 220 to the cleaning tank 23 through the transfer unit 20, and then transferred to the next roughening tank 210 for the second plating. Roughening.

在本實施例中,第二次電鍍粗化處理的參數大致和第一次電鍍粗化處理的第一電鍍液L1的組成相同。但是在第二次電鍍粗化處理時所使用的電流密度是50至90A/dm2,高於第一次電鍍粗化處理時的電流密度。如此,可以使原本已經形成於生箔層30的粗糙面30a上的多個瘤狀銅粒子繼續成長。另外,既然第二次電鍍粗化處理時是使用和第一次電鍍粗化處理相同的第一電鍍液L1。因此,瘤狀銅粒子的成長方向仍然會被限制在大致垂直於生箔層30的粗糙面30a的方向上。如此,可以進一步增加最終的電解銅箔和樹脂基板的接著面積。 In this embodiment, the parameters of the second plating roughening process are approximately the same as the composition of the first plating solution L1 of the first plating roughening process. However, the current density used in the second plating roughening treatment is 50 to 90 A / dm 2 , which is higher than the current density in the first plating roughening treatment. In this way, a plurality of nodular copper particles that have been formed on the rough surface 30 a of the green foil layer 30 can continue to grow. In addition, since the second plating roughening treatment is performed, the same first plating solution L1 as the first plating roughening treatment is used. Therefore, the growth direction of the nodular copper particles is still limited to a direction substantially perpendicular to the rough surface 30 a of the green foil layer 30. In this way, the bonding area between the final electrolytic copper foil and the resin substrate can be further increased.

隨後,通過傳送單元20,將經過第二次電鍍粗化處理的生箔 層30由粗化槽210傳送至另一清洗槽23清洗後,再傳送至另一固化槽220中,以進行第二次電鍍固化處理。第二次電鍍固化處理中的第二電鍍液L2的組成,可以和第一次電鍍固化處理的第二電鍍液L2的組成相同。另外,執行第二次電鍍固化處理的電流密度也可以和第一次電鍍固化處理時的電流密度相近,大約介於15至40A/dm2。通過執行第二次電鍍固化處理,可再進一步提供銅保護層,以免造成掉粉。 Subsequently, the green foil layer 30 subjected to the second electroplating and roughening treatment is transferred from the roughening tank 210 to another cleaning tank 23 through the transfer unit 20, and then transferred to another curing tank 220 for the second time. Sub-plating curing treatment. The composition of the second plating solution L2 in the second plating and curing process may be the same as the composition of the second plating solution L2 in the first plating and curing process. In addition, the current density for performing the second plating curing process may be similar to that during the first plating curing process, which is about 15 to 40 A / dm 2 . By performing the second electroplating and curing process, a copper protective layer can be further provided to avoid powdering.

請參照圖4及圖5。圖4為本發明實施例的電解銅箔的局部剖面示意圖。圖5為圖4的電解銅箔在區域V的局部放大示意圖。 Please refer to FIG. 4 and FIG. 5. FIG. 4 is a schematic partial cross-sectional view of an electrolytic copper foil according to an embodiment of the present invention. FIG. 5 is a partially enlarged schematic view of the electrolytic copper foil of FIG. 4 in a region V. FIG.

經由上述電解銅箔的製造方法所製造的電解銅箔3表層具有橄欖球狀凸起,而可增加和樹脂基板接著的面積。詳細而言,本發明實施例的電解銅箔3包括一生箔層30以及位於生箔層30上的粗化處理層31。 The surface of the electrolytic copper foil 3 manufactured by the manufacturing method of the said electrolytic copper foil has a rugby-like protrusion, and it can increase the area adjoining a resin substrate. In detail, the electrolytic copper foil 3 according to the embodiment of the present invention includes a green foil layer 30 and a roughening treatment layer 31 on the green foil layer 30.

粗化處理層31是位於生箔層30的粗糙面30a及光滑面30b中的至少其中一者上。在圖4的實施例中,粗化處理層31是位於生箔層30的粗糙面30a上。在一實施例中,電解銅箔3的總厚度T是介於6至400μm之間,視實際應用需求而決定。 The roughening treatment layer 31 is located on at least one of the rough surface 30 a and the smooth surface 30 b of the green foil layer 30. In the embodiment of FIG. 4, the roughening treatment layer 31 is located on the rough surface 30 a of the green foil layer 30. In one embodiment, the total thickness T of the electrolytic copper foil 3 is between 6 and 400 μm, which is determined according to actual application requirements.

如圖5所示,在本發明實施例中,粗化處理層31包括多個橄欖球狀或近似橄欖球狀的銅瘤310,且每一個橄欖球狀或近似橄欖球狀的銅瘤310是沿著與粗糙面30a或光滑面30b不平行的長軸方向延伸。 As shown in FIG. 5, in the embodiment of the present invention, the roughening treatment layer 31 includes a plurality of rugby-shaped or approximately rugby-shaped copper knobs 310, and each of the rugby-shaped or approximately rugby-shaped copper knobs 310 is along and roughened. The surface 30a or the smooth surface 30b extends in a non-parallel major axis direction.

另外,每一個橄欖球狀或近似橄欖球狀的銅瘤310具有一最大的長軸直徑D1以及一最大的短軸直徑D2。在一實施例中,最大的長軸直徑D1介於1.6μm至2.5μm之間,所述最大的短軸直徑D2介於1.1μm至2.0μm之間。另外,每兩個相鄰的銅瘤310之間形成一近似漏斗狀的容置空間S1。 In addition, each rugby-shaped or approximately rugby-shaped copper knob 310 has a largest major axis diameter D1 and a largest minor axis diameter D2. In one embodiment, the maximum major axis diameter D1 is between 1.6 μm and 2.5 μm, and the largest minor axis diameter D2 is between 1.1 μm and 2.0 μm. In addition, an approximately funnel-shaped accommodation space S1 is formed between every two adjacent copper knobs 310.

請比較圖1以及圖5,現有技術中的圓球狀銅瘤在短軸方向上的尺寸會大於長軸方向上的尺寸,且分佈較密集。相較之下,本 發明實施例的電解銅箔3的多個橄欖球狀或近似橄欖球狀的銅瘤310在短軸方向(也就是平行於生箔層30的粗糙面30a或光滑面30b的方向)上的直徑會比在長軸方向上的直徑還小。在一較佳實施例中,橄欖球狀或近似橄欖球狀的銅瘤310的最大的短軸直徑D2與最大的長軸直徑D1的比值是介於0.3至0.8之間。 Comparing FIG. 1 and FIG. 5, the size of the spherical copper tumors in the prior art in the short axis direction is larger than that in the long axis direction, and the distribution is dense. In contrast, Ben The diameter of a plurality of rugby-shaped or approximately rugby-shaped copper knobs 310 of the electrolytic copper foil 3 of the embodiment of the invention in the short axis direction (that is, a direction parallel to the rough surface 30a or the smooth surface 30b of the green foil layer 30) will be smaller than The diameter in the long axis direction is still small. In a preferred embodiment, the ratio of the largest short-axis diameter D2 to the largest long-axis diameter D1 of the rugby-shaped or approximately rugby-shaped copper knob 310 is between 0.3 and 0.8.

本發明實施例中,橄欖球狀或近似橄欖球狀的銅瘤310的最大的長軸直徑D1和現有的圓球狀銅瘤在垂直方向的尺寸差不多。因此,本發明實施例中的電解銅箔3的表面粗糙度並沒有因為銅瘤的形狀改變而大幅增加。在一實施例中,粗化處理層31的厚度t大約是介於1.2至4μm之間,而粗化處理層31的十點平均表面粗糙度(Rz)大約是介於1至4μm之間。據此,本發明實施例的電解銅箔3仍可適用於配合高頻基板,來傳遞高頻訊號。 In the embodiment of the present invention, the largest major axis diameter D1 of the rugby-shaped or approximately rugby-shaped copper knob 310 is similar to the size of a conventional spherical copper knob in the vertical direction. Therefore, the surface roughness of the electrolytic copper foil 3 in the embodiment of the present invention does not increase significantly due to the shape change of the copper knob. In an embodiment, the thickness t of the roughening treatment layer 31 is approximately between 1.2 and 4 μm, and the ten-point average surface roughness (R z ) of the roughening treatment layer 31 is approximately between 1 and 4 μm. . Accordingly, the electrolytic copper foil 3 according to the embodiment of the present invention can still be adapted to cooperate with a high-frequency substrate to transmit high-frequency signals.

另一方面,在本發明實施例的電解銅箔3中,每兩個相鄰的橄欖球狀或近似橄欖球狀的銅瘤310之間的間距P1也較寬。換句話說,本發明實施例的橄欖球狀或近似橄欖球狀的銅瘤310也具有較低的密度。在一實施例中,每兩個相鄰的橄欖球狀或近似橄欖球狀的銅瘤310之間的間距P1是介於0.5至1.8μm之間,而這些橄欖球狀或近似橄欖球狀的銅瘤310的分佈密度是每平方微米0.5至1.7顆。 On the other hand, in the electrolytic copper foil 3 according to the embodiment of the present invention, the pitch P1 between every two adjacent rugby-shaped or approximately rugby-shaped copper knobs 310 is also wide. In other words, the rugby-shaped or approximately rugby-shaped copper knob 310 of the embodiment of the present invention also has a lower density. In one embodiment, the distance P1 between two adjacent rugby-shaped or approximately rugby-shaped copper knobs 310 is between 0.5 and 1.8 μm. The distribution density is 0.5 to 1.7 particles per square micrometer.

請參考圖6及圖7。圖6顯示本發明實施例的電解銅箔所拍攝的掃描式電子顯微鏡(SEM)照片,圖7顯示一比較例的電解銅箔所拍攝的掃描式電子顯微鏡照片。先說明的是,在製作比較例的電解銅箔時,在執行電鍍粗化處理時的參數和本發明實施例大致相同,但是在執行電鍍粗化處理時所使用的電鍍液組成中含有濃度超過40g/L的銅。 Please refer to FIG. 6 and FIG. 7. FIG. 6 shows a scanning electron microscope (SEM) photograph of an electrolytic copper foil according to an example of the present invention, and FIG. 7 shows a scanning electron microscope photograph of an electrolytic copper foil of a comparative example. It is explained first that when the electrolytic copper foil of the comparative example is manufactured, the parameters when performing the plating roughening process are substantially the same as those of the embodiment of the present invention, but the composition of the plating solution used when performing the plating roughening process contains a concentration exceeding 40g / L of copper.

比較圖6與圖7的照片可以發現,本發明實施例的電解銅箔的銅瘤顆粒較小,且形狀較細長。圖7的比較例電解銅箔的銅瘤形狀呈圓球形,較粗大也較為密集。 Comparing the photos of FIG. 6 and FIG. 7, it can be found that the copper knob particles of the electrolytic copper foil according to the embodiment of the present invention are smaller and have a longer shape. The copper knob shape of the electrolytic copper foil of the comparative example of FIG. 7 is spherical and coarser and denser.

請參照圖8,顯示通過聚焦離子束與電子束顯微系統所拍攝的本發明實施例電解銅箔的聚焦離子束(FIB)的照片。圖8並顯示本發明實施例的電解銅箔的局部橫截面(cross section)照面。 Referring to FIG. 8, a photograph of a focused ion beam (FIB) of an electrolytic copper foil according to an embodiment of the present invention is taken through a focused ion beam and electron beam microscopy system. FIG. 8 also shows a partial cross-section view of an electrolytic copper foil according to an embodiment of the present invention.

由圖6及圖8的照片可以證明,本發明實施例的電解銅箔在經過表面處理之後,會形成多個橄欖球狀銅瘤,而非圓球狀銅瘤。另外,通過聚焦離子束與電子束顯微系統對本發明實施例的電解銅箔進行分析,電解銅箔的銅結晶顆粒尺寸是介於1.2至4.0μm。 From the photos of FIG. 6 and FIG. 8, it can be proved that, after the surface treatment of the electrolytic copper foil according to the embodiment of the present invention, a plurality of rugby-shaped copper knobs are formed instead of round copper-shaped copper knobs. In addition, the electrolytic copper foil of the embodiment of the present invention is analyzed by a focused ion beam and electron beam microscopy system. The copper crystal particle size of the electrolytic copper foil is between 1.2 and 4.0 μm.

接著,請再參照圖2,在本發明實施例中,在步驟S300中,執行一表面處理。前述的表面處理可以是抗熱處理、抗氧化處理、矽烷耦合劑處理之中的至少一種。 Next, please refer to FIG. 2 again. In the embodiment of the present invention, in step S300, a surface treatment is performed. The aforementioned surface treatment may be at least one of an anti-heat treatment, an anti-oxidation treatment, and a silane coupling agent treatment.

當表面處理為抗熱處理時,是通過電解方法在粗化處理層上形成一鋅合金抗熱層,並增加電解銅箔的抗熱性。在一實施例中,於執行抗熱處理時所使用的電解液組成包括1至4g/L的鋅以及0.3至2.0g/L的鎳,且在執行抗熱處理時的所使用的電流密度是0.4至2.5A/dm2When the surface treatment is heat-resistant, a zinc alloy heat-resistant layer is formed on the roughened layer by an electrolytic method, and the heat resistance of the electrolytic copper foil is increased. In one embodiment, the composition of the electrolyte used in performing the heat treatment includes 1 to 4 g / L of zinc and 0.3 to 2.0 g / L of nickel, and the current density used in performing the heat treatment is 0.4 to 2.5A / dm 2 .

當表面處理為抗氧化處理時,是通過電解方法在粗化處理層上形成一抗氧化層,以增加電解銅箔的抗氧化性。在執行抗氧化處理時所使用的電解液組成包括1至4g/L的氧化鉻以及5至20g/L的氫氧化鈉,且在執行抗熱處理時所使用的電流密度是0.3至3.0A/dm2When the surface treatment is an anti-oxidation treatment, an anti-oxidation layer is formed on the roughened layer by an electrolytic method to increase the oxidation resistance of the electrolytic copper foil. The composition of the electrolytic solution used in performing the anti-oxidation treatment includes 1 to 4 g / L of chromium oxide and 5 to 20 g / L of sodium hydroxide, and the current density used in performing the anti-heat treatment is 0.3 to 3.0 A / dm 2 .

當表面處理為矽烷耦合處理時,會在粗化處理層上形成一矽烷耦合劑處理層,其中,在執行矽烷耦合處理中時使用0.3至1.5%重量矽烷耦合劑。 When the surface treatment is a silane coupling treatment, a silane coupling agent treatment layer is formed on the roughening treatment layer, wherein 0.3 to 1.5% by weight of the silane coupling agent is used in performing the silane coupling treatment.

請參照圖9與圖10。圖9顯示本發明實施例的線路板組件的剖面示意圖,圖10顯示圖9的線路板組件在區域X的局部放大圖。本發明實施例的電解銅箔可應用於不同的線路板組件,例如硬性印刷電路板(PCB)、軟性印刷電路板(FPC)及其相似物。 Please refer to FIG. 9 and FIG. 10. FIG. 9 is a schematic cross-sectional view of a circuit board assembly according to an embodiment of the present invention, and FIG. 10 is a partial enlarged view of the circuit board assembly of FIG. 9 in an area X. The electrolytic copper foil of the embodiment of the present invention can be applied to different circuit board components, such as a rigid printed circuit board (PCB), a flexible printed circuit board (FPC), and the like.

在圖9的實施例中,線路板組件M1由一樹脂基板4以及上述的電解銅箔3面對面壓合而形成,且電解銅箔3的粗化處理層31會面對樹脂基板4。 In the embodiment of FIG. 9, the circuit board assembly M1 is formed by a resin substrate 4 and the above-mentioned electrolytic copper foil 3 being pressed face to face, and the roughened layer 31 of the electrolytic copper foil 3 faces the resin substrate 4.

樹脂基板4可以是高頻基板,如:環氧樹脂基板、聚氧二甲苯樹脂基板(PPO)或氟系樹脂基板,或者是由聚醯亞胺、乙烯對苯二甲酸酯、聚碳酸酯、液晶高分子或聚四氟乙烯等材料所構成的基板。 The resin substrate 4 may be a high frequency substrate, such as an epoxy resin substrate, a polyoxyxylene resin substrate (PPO) or a fluorine resin substrate, or a polyimide, ethylene terephthalate, polycarbonate Substrate made of materials such as liquid crystal polymer or polytetrafluoroethylene.

在圖9與圖10的實施例中,樹脂基板4為半固化基板或液晶高分子基板。由圖10可以看出,由於本發明實施例的橄欖球狀或近似橄欖球狀的銅瘤310之間的間距較寬,在電解銅箔3與樹脂基板4壓合時,樹脂基板4可包覆並接觸橄欖球狀或近似橄欖球狀的銅瘤310的大部分表面,並可深入近似漏斗狀的容置空間S1內。如此,使電解銅箔3與樹脂基板4之間的接著強度增強。 In the embodiments of FIGS. 9 and 10, the resin substrate 4 is a semi-cured substrate or a liquid crystal polymer substrate. It can be seen from FIG. 10 that, because the distance between the rugby-shaped or approximately rugby-shaped copper knobs 310 in the embodiment of the present invention is wide, the resin substrate 4 can be covered and laminated when the electrolytic copper foil 3 and the resin substrate 4 are pressed together. It contacts most of the surface of the rugby-shaped or approximately rugby-shaped copper knob 310 and can penetrate deep into the approximately funnel-shaped accommodation space S1. In this way, the bonding strength between the electrolytic copper foil 3 and the resin substrate 4 is enhanced.

請參照圖11,其顯示本發明另一實施例的線路板組件的剖面示意圖。本實施例中,樹脂基板4與線路層41是通過黏著膠5結合,且黏著膠5的一部分會填入近似漏斗狀的容置空間內。 Please refer to FIG. 11, which is a schematic cross-sectional view of a circuit board assembly according to another embodiment of the present invention. In this embodiment, the resin substrate 4 and the circuit layer 41 are combined by the adhesive 5, and a part of the adhesive 5 is filled into the approximately funnel-shaped accommodation space.

本發明實施例的電解銅箔3與樹脂基板4壓合後進行測試,剝離強度皆可大於4lb/in。具體而言,在一實驗例中,樹脂基板4為玻璃纖維板(FR4),且將玻璃纖維板(FR4)與本發明實施例的電解銅箔進行壓合,形成積層板試驗片。接著,利用剝離強度拉力機進行測定。試驗結果顯示電解銅箔的剝離強度至少大於7lb/in。 The electrolytic copper foil 3 and the resin substrate 4 according to the embodiment of the present invention are tested after being laminated, and the peel strength can be greater than 4 lb / in. Specifically, in an experimental example, the resin substrate 4 is a glass fiber board (FR4), and the glass fiber board (FR4) is laminated with the electrolytic copper foil of the embodiment of the present invention to form a laminated plate test piece. Next, it measured using the peel strength tensile machine. The test results show that the peel strength of the electrolytic copper foil is at least more than 7 lb / in.

另外,本發明實施例的線路板組件的製造方法還可進一步包括在壓合電解銅箔3與樹脂基板4之後,通過蝕刻方式圖案化電解銅箔3,而形成一線路層。 In addition, the method for manufacturing a circuit board assembly according to the embodiment of the present invention may further include, after laminating the electrolytic copper foil 3 and the resin substrate 4, patterning the electrolytic copper foil 3 by etching to form a circuit layer.

綜上所述,本發明的有益效果在於,在利用本發明實施例的電解銅箔的製造方法能通過調整電鍍粗化處理中的第一電鍍液L1的組成,使銅的濃度降低及使氧化砷與鎢酸根離子的含量不超過20ppm,因此可限制銅瘤的結晶方向及成長方向,從而形成橄欖球 狀或近似橄欖球狀的銅瘤310。 In summary, the beneficial effect of the present invention is that in the method for manufacturing the electrolytic copper foil using the embodiment of the present invention, the concentration of copper can be reduced and the oxidation can be reduced by adjusting the composition of the first plating solution L1 in the plating roughening process. The content of arsenic and tungstate ions does not exceed 20ppm, so it can restrict the crystallization direction and growth direction of copper tumors, thereby forming a football Like or football-like copper knob 310.

相較於現有技術中的圓球狀銅瘤F10,橄欖球狀或近似橄欖球狀的銅瘤310的橫向尺寸較小,可以增加電解銅箔3與樹脂基板4之間的接著表面積。另外,兩相鄰的橄欖球狀或近似橄欖球狀的銅瘤310之間具有較寬的距離,當樹脂基板4與電解銅箔3接著時,樹脂基板4可以包覆整個銅瘤的表面,並深入兩個橄欖球狀或近似橄欖球狀的銅瘤310之間的空間,從而增加電解銅箔3與樹脂基板4或黏著層5之間的黏著度。 Compared with the spherical copper knob F10 in the prior art, the lateral size of the rugby-shaped or approximately rugby-shaped copper knob 310 is smaller, which can increase the bonding surface area between the electrolytic copper foil 3 and the resin substrate 4. In addition, there is a wide distance between two adjacent rugby-shaped or approximately rugby-shaped copper knobs 310. When the resin substrate 4 and the electrolytic copper foil 3 are bonded, the resin substrate 4 can cover the entire surface of the copper knob and penetrate deeply. The space between two rugby-shaped or approximately rugby-shaped copper knobs 310 increases the adhesion between the electrolytic copper foil 3 and the resin substrate 4 or the adhesive layer 5.

另外,由於本發明實施例的電解銅箔3的橄欖球狀或近似橄欖球狀的銅瘤310在垂直方向上的尺寸並未大於現有技術中的圓球狀銅瘤F10在垂直方向上的尺寸,因此,電解銅箔3的表面粗糙度相較於現有銅箔的表面粗糙度更低。但是本發明實施例的電解銅箔3的剝離強度並未因表面粗糙度降低而大幅下降,且符合實際應用的需求。 In addition, since the size of the rugby-shaped or nearly rugby-shaped copper knob 310 of the electrolytic copper foil 3 of the embodiment of the present invention in the vertical direction is not larger than the size of the spherical copper knob F10 in the prior art in the vertical direction, The surface roughness of the electrolytic copper foil 3 is lower than that of the existing copper foil. However, the peeling strength of the electrolytic copper foil 3 according to the embodiment of the present invention does not decrease significantly due to the decrease in surface roughness, and meets the requirements of practical applications.

另外,請參照下表1,顯示本發明實施例和比較例的表面粗糙度(Roughness)、剝離強度(Peel Strength)以及剝離強度與表面粗糙度的比值(P/R ratio),其中表面粗糙度為十點平均粗糙度(Rz)。實施例是具有橄欖球狀銅瘤的電解銅箔,而比較例是具有圓球狀銅瘤的電解銅箔。 In addition, please refer to Table 1 below to show the surface roughness (Roughness), peel strength (Peel Strength), and the ratio of peel strength to surface roughness (P / R ratio) of the examples and comparative examples of the present invention, where the surface roughness The ten-point average roughness (Rz). The example is an electrolytic copper foil having a rugby-shaped copper knob, and the comparative example is an electrolytic copper foil having a round-shaped copper knob.

由表1中可以看出,本發明實施例的電解銅箔的表面粗糙度相較於比較例(具有尺寸較大的圓球狀銅瘤)的表面粗糙度更低,因此本發明實施例的電解銅箔在應用於高頻傳輸時,可進一步降低訊號損失。 It can be seen from Table 1 that the surface roughness of the electrolytic copper foil of the embodiment of the present invention is lower than that of the comparative example (having a large-sized spherical copper nodules). Electrolytic copper foil can further reduce signal loss when applied to high-frequency transmission.

另外要說明的是,剝離強度與表面粗糙度的比值越大,銅箔 的剝離強度受表面粗糙度的影響越小,剝離強度的表現性能越佳。由上表中可以看出,相較於比較例,本發明實施例的電解銅箔的剝離強度與表面粗糙度的比值更大。因此,本發明實施例的電解銅箔的剝離強度並沒有因為低表面粗糙度而過多的損失。 It should also be noted that the larger the ratio of peel strength to surface roughness, the greater the copper foil The smaller the peel strength affected by surface roughness, the better the performance of peel strength. As can be seen from the above table, compared with the comparative example, the ratio of the peeling strength to the surface roughness of the electrolytic copper foil of the embodiment of the present invention is larger. Therefore, the peeling strength of the electrolytic copper foil of the embodiment of the present invention is not excessively lost due to the low surface roughness.

以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的申請專利範圍,故凡運用本發明說明書及附圖內容所做的等效技術變化,均包含於本發明的申請專利範圍內。 The content disclosed above is only the preferred and feasible embodiment of the present invention, and therefore does not limit the scope of patent application of the present invention. Therefore, any equivalent technical changes made using the description and drawings of the present invention are included in the application of the present invention. Within the scope of the patent.

Claims (14)

一種具有近似橄欖球狀銅瘤的電解銅箔的製造方法,其包括:通過一電解方法以形成一生箔層,其中,所述生箔層具有一預定表面;以及形成一粗化處理層於所述生箔層的所述預定表面,以形成一表層具有近似橄欖球狀凸起的電解銅箔,其中,所述粗化處理層包括多個近似橄欖球狀的銅瘤,且每兩個相鄰的所述近似橄欖球狀的銅瘤之間形成一近似漏斗狀的容置空間;其中,形成所述粗化處理層的步驟還進一步包括:執行一第一次電鍍粗化處理以及執行一第一次電鍍固化處理,其中,所述第一次電鍍粗化處理所使用的一第一電鍍液中含3至40g/L的銅、100至120g/L的硫酸、不超過20ppm的氧化砷以及5至20ppm的鎢酸根離子;其中,多個所述近似橄欖球狀的銅瘤具有一最大的長軸直徑以及一最大的短軸直徑,最大的長軸直徑介於1.6μm至2.5μm之間,最大的短軸直徑介於1.1μm至2.0μm之間,且最大短軸直徑與最大長軸直徑之間的比值是0.3至0.8。 A method for manufacturing an electrolytic copper foil having a rugby-like copper knob, comprising: forming a green foil layer by an electrolytic method, wherein the green foil layer has a predetermined surface; and forming a roughening treatment layer on the green foil layer. The predetermined surface of the green foil layer to form an electrolytic copper foil with a surface layer having approximately rugby-shaped protrusions, wherein the roughening treatment layer includes a plurality of approximately rugby-shaped copper knobs, and every two adjacent An approximately funnel-shaped accommodating space is formed between the approximately rugby-shaped copper knobs; wherein the step of forming the roughening treatment layer further includes: performing a first plating roughening treatment and performing a first plating A curing process, wherein a first plating solution used in the first electroplating roughening process contains 3 to 40 g / L of copper, 100 to 120 g / L of sulfuric acid, arsenic oxide not exceeding 20 ppm, and 5 to 20 ppm Tungstate ions; wherein the plurality of approximately rugby-shaped copper tumors have a largest major axis diameter and a largest minor axis diameter, the largest major axis diameter is between 1.6 μm and 2.5 μm, and the largest Shaft diameter Between 1.1μm to 2.0μm, the ratio between the maximum minor axis and major axis diameter and the maximum diameter of 0.3 to 0.8. 如請求項1所述的具有近似橄欖球狀銅瘤的電解銅箔的製造方法,其中,在執行所述第一電鍍粗化處理時所使用的電流密度是40至80A/dm2,且所述預定表面為粗糙面或者光滑面。 The method of manufacturing an electrolytic copper foil having an approximately rugby-shaped copper knob according to claim 1, wherein a current density used when performing the first plating roughening treatment is 40 to 80 A / dm 2 , and The predetermined surface is a rough surface or a smooth surface. 如請求項2所述的具有近似橄欖球狀銅瘤的電解銅箔的製造方法,其中,形成所述粗化處理層的步驟還進一步包括:執行一第二次電鍍粗化處理以及執行一第二次電鍍固化處理,所述第二次電鍍粗化處理使用所述第一電鍍液,在執行所述第二電鍍粗化處理時所使用的電流密度是50至90A/dm2,且所述第二 次電鍍固化處理的參數與所述第一次電鍍固化處理的參數相同。 The method of manufacturing an electrolytic copper foil having a rugby-like copper knob as described in claim 2, wherein the step of forming the roughening treatment layer further comprises: performing a second plating roughening treatment and performing a second Secondary plating curing process, the second plating roughening process uses the first plating solution, the current density used when performing the second plating roughening process is 50 to 90 A / dm 2 , and the first The parameters of the secondary plating curing process are the same as those of the first plating curing process. 如請求項3所述的具有近似橄欖球狀銅瘤的電解銅箔的製造方法,其中,形成所述粗化處理層的步驟是依序執行所述第一次電鍍粗化處理、所述第一次電鍍固化處理、所述第二次電鍍粗化處理及所述第二次電鍍固化處理。 The method of manufacturing an electrolytic copper foil having an approximately rugby-shaped copper knob according to claim 3, wherein the step of forming the roughening treatment layer is to sequentially perform the first plating roughening treatment, the first Secondary plating curing treatment, the second plating roughening treatment, and the second plating curing treatment. 如請求項3所述的具有近似橄欖球狀銅瘤的電解銅箔的製造方法,其中,形成所述粗化處理層的步驟是依序執行所述第一次電鍍粗化處理、所述第二次電鍍粗化處理、所述第一次電鍍固化處理及所述第二次電鍍固化處理。 The method for manufacturing an electrolytic copper foil having an approximately rugby-shaped copper knob according to claim 3, wherein the step of forming the roughening treatment layer is to sequentially perform the first plating roughening treatment, the second The secondary plating roughening treatment, the first plating curing treatment, and the second plating curing treatment. 如請求項1所述的具有近似橄欖球狀銅瘤的電解銅箔的製造方法,其中,在執行所述第一次電鍍固化處理時所使用的一第二電鍍液中含50至70g/L的銅、70至100g/L的硫酸以及低於30ppm的氧化砷,且在執行所述第一次電鍍固化處理時所使用的電流密度是15至40A/dm2The method for manufacturing an electrolytic copper foil having a rugby-like copper knob as described in claim 1, wherein a second plating solution used in performing the first plating curing treatment contains 50 to 70 g / L of Copper, 70 to 100 g / L of sulfuric acid, and arsenic oxide below 30 ppm, and the current density used when performing the first plating curing process is 15 to 40 A / dm 2 . 如請求項1所述的具有近似橄欖球狀銅瘤的電解銅箔的製造方法,還進一步包括:執行一抗熱處理,以在所述粗化處理層上形成一鋅合金抗熱層,其中,在執行所述抗熱處理時所使用的電解液組成包括1至4g/L的鋅以及0.3至2.0g/L的鎳,且在執行所述抗熱處理時所使用的電流密度是0.4至2.5A/dm2The method for manufacturing an electrolytic copper foil having an approximately rugby-shaped copper knob as described in claim 1, further comprising: performing an anti-heat treatment to form a zinc alloy heat-resistant layer on the roughening treatment layer, wherein The composition of the electrolyte used when performing the heat treatment includes 1 to 4 g / L of zinc and 0.3 to 2.0 g / L of nickel, and the current density used when performing the heat treatment is 0.4 to 2.5 A / dm 2 . 如請求項1所述的具有近似橄欖球狀銅瘤的電解銅箔的製造方法,還進一步包括:執行一抗氧化處理,以在所述粗化處理層上形成一抗氧化層,其中,在執行所述抗氧化處理時所使用的電解液組成包括1至4g/L的氧化鉻以及5至20g/L的氫氧化 鈉,且在執行所述抗熱處理時所使用的電流密度是0.3至3.0A/dm2The method for manufacturing an electrolytic copper foil having an approximately rugby-shaped copper knob as described in claim 1, further comprising: performing an anti-oxidation treatment to form an anti-oxidation layer on the roughening treatment layer, wherein The composition of the electrolyte used in the anti-oxidation treatment includes 1 to 4 g / L of chromium oxide and 5 to 20 g / L of sodium hydroxide, and the current density used in performing the anti-heat treatment is 0.3 to 3.0 A / dm 2 . 如請求項1所述的具有近似橄欖球狀銅瘤的電解銅箔的製造方法,還進一步包括:執行一矽烷耦合處理,以在所述粗化處理層上形成一矽烷耦合劑處理層,其中,在執行所述矽烷耦合處理時使用0.3至1.5%重量矽烷耦合劑。 The method for manufacturing an electrolytic copper foil having an approximately rugby-shaped copper knob as described in claim 1, further comprising: performing a silane coupling treatment to form a silane coupling agent treatment layer on the roughening treatment layer, wherein, In performing the silane coupling treatment, 0.3 to 1.5% by weight of a silane coupling agent is used. 如請求項1所述的具有近似橄欖球狀銅瘤的電解銅箔的製造方法,其中,多個所述近似橄欖球狀的銅瘤的分布密度為每平方微米0.5至1.7顆,且每兩個相鄰的所述近似橄欖球狀的銅瘤之間的間距是介於0.5至1.8μm之間。 The method for manufacturing an electrolytic copper foil having approximately rugby-shaped copper knobs according to claim 1, wherein a plurality of said approximately rugby-shaped copper knobs have a distribution density of 0.5 to 1.7 per square micrometer, and every two phases The distance between the adjacent rugby-shaped copper knobs is between 0.5 and 1.8 μm. 一種線路板組件的製造方法,包括:提供由如請求項1至11項的其中之一的製造方法所形成的所述具近似橄欖球狀銅瘤的電解銅箔;以及將所述具近似橄欖球狀銅瘤的電解銅箔與一樹脂基板面對面壓合,以形成一線路板組件,其中,所述粗化處理層面對所述樹脂基板。 A method for manufacturing a circuit board assembly, comprising: providing the electrolytic copper foil having a rugby-like copper knob formed by the manufacturing method according to one of claims 1 to 11; The copper foil's electrolytic copper foil is pressed face to face with a resin substrate to form a circuit board assembly, wherein the roughening treatment layer faces the resin substrate. 如請求項11所述的線路板組件的製造方法,其中,所述具近似橄欖球狀銅瘤的電解銅箔的剝離強度至少大於53.57kg/m。 The method for manufacturing a circuit board assembly according to claim 11, wherein a peeling strength of the electrolytic copper foil having a football-like copper knob is at least greater than 53.57 kg / m. 如請求項11所述的線路板組件的製造方法,其中,所述具近似橄欖球狀銅瘤的電解銅箔與所述樹脂基板通過一黏著膠結合,且所述黏著膠的一部分填入所述近似漏斗狀的容置空間內。 The method for manufacturing a circuit board assembly according to claim 11, wherein the electrolytic copper foil having a rugby-like copper knob and the resin substrate are combined by an adhesive, and a part of the adhesive is filled in the Inside an approximately funnel-shaped accommodation space. 如請求項11所述的線路板組件的製造方法,其中,所述樹脂基板為半固化基板或液晶高分子基板,且當所述具近似橄欖球狀銅瘤的電解銅箔與所述樹脂基板壓合時,所述樹脂基板的一部分填入所述近似漏斗狀的容置空間內。 The method for manufacturing a circuit board assembly according to claim 11, wherein the resin substrate is a semi-cured substrate or a liquid crystal polymer substrate, and when the electrolytic copper foil having a football-like copper knob is pressed against the resin substrate When closed, a part of the resin substrate is filled into the approximately funnel-shaped accommodation space.
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