TWI618917B - 用於量測一零件的方法及裝置 - Google Patents
用於量測一零件的方法及裝置 Download PDFInfo
- Publication number
- TWI618917B TWI618917B TW102141319A TW102141319A TWI618917B TW I618917 B TWI618917 B TW I618917B TW 102141319 A TW102141319 A TW 102141319A TW 102141319 A TW102141319 A TW 102141319A TW I618917 B TWI618917 B TW I618917B
- Authority
- TW
- Taiwan
- Prior art keywords
- probe
- artifact
- during
- fluid flow
- point
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 52
- 239000000523 sample Substances 0.000 claims abstract description 192
- 239000012530 fluid Substances 0.000 claims abstract description 98
- 230000003993 interaction Effects 0.000 claims abstract description 35
- 239000007788 liquid Substances 0.000 claims description 55
- 238000005259 measurement Methods 0.000 claims description 51
- 241001422033 Thestylus Species 0.000 claims description 37
- 239000002826 coolant Substances 0.000 claims description 37
- 238000003754 machining Methods 0.000 claims description 32
- 238000001816 cooling Methods 0.000 claims description 21
- 238000010586 diagram Methods 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000003750 conditioning effect Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000001960 triggered effect Effects 0.000 description 2
- 206010067482 No adverse event Diseases 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Auxiliary Devices For Machine Tools (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ??12250176.0 | 2012-11-14 | ||
| EP12250176 | 2012-11-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201428234A TW201428234A (zh) | 2014-07-16 |
| TWI618917B true TWI618917B (zh) | 2018-03-21 |
Family
ID=47678534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102141319A TWI618917B (zh) | 2012-11-14 | 2013-11-13 | 用於量測一零件的方法及裝置 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10048065B2 (https=) |
| EP (1) | EP2920549B1 (https=) |
| JP (1) | JP6466847B2 (https=) |
| KR (1) | KR20150082620A (https=) |
| CN (1) | CN104813140B (https=) |
| TW (1) | TWI618917B (https=) |
| WO (1) | WO2014076454A1 (https=) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10393505B2 (en) * | 2013-12-06 | 2019-08-27 | Werth Messtechnik Gmbh | Device and method for measuring workpieces |
| WO2015097893A1 (ja) * | 2013-12-27 | 2015-07-02 | 株式会社牧野フライス製作所 | 工作機械の制御装置 |
| CN106796095B (zh) * | 2014-09-02 | 2021-05-28 | 瑞尼斯豪公司 | 操作坐标测量设备的方法、坐标测量设备和计算机程序 |
| GB201603496D0 (en) * | 2016-02-29 | 2016-04-13 | Renishaw Plc | Method and apparatus for calibrating a scanning probe |
| JP6663808B2 (ja) * | 2016-07-04 | 2020-03-13 | 株式会社キーエンス | 画像測定装置 |
| JP6663807B2 (ja) * | 2016-07-04 | 2020-03-13 | 株式会社キーエンス | 画像測定装置 |
| JP2018096886A (ja) * | 2016-12-15 | 2018-06-21 | 株式会社Izox | 三次元形状測定検査システム及び三次元形状測定検査方法 |
| IT201700064533A1 (it) * | 2017-06-12 | 2018-12-12 | Marposs Spa | Apparecchiatura optoelettronica per il controllo di parti meccaniche, e relativo dispositivo di protezione |
| CN111121651A (zh) | 2018-10-31 | 2020-05-08 | 财团法人工业技术研究院 | 光学测量稳定性控制系统 |
| CN110244165A (zh) * | 2019-06-20 | 2019-09-17 | 昆山埃维奥电机有限公司 | 一种刷架功能测试机构及方法 |
| JP6810882B1 (ja) * | 2019-11-27 | 2021-01-13 | 株式会社東京精密 | 検出器、表面性状測定装置及び測定方法 |
| CN112171374A (zh) * | 2020-09-25 | 2021-01-05 | 陈清 | 一种数控机床自动寻点加工工艺 |
| JP7030280B2 (ja) * | 2020-12-01 | 2022-03-07 | 株式会社東京精密 | 表面性状測定装置及び測定方法 |
| JP7715610B2 (ja) * | 2021-11-30 | 2025-07-30 | 株式会社ディスコ | リニアゲージ |
| JP2024125793A (ja) * | 2023-03-06 | 2024-09-19 | 株式会社ミツトヨ | 三次元測定機およびインライン測定システム |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4536661A (en) * | 1982-10-15 | 1985-08-20 | Renishaw Plc | Position-sensing apparatus |
| US6154972A (en) * | 1998-07-16 | 2000-12-05 | Mitutoyo Corporation | Measuring machine with cleaning device |
| EP1953497A1 (en) * | 2007-01-31 | 2008-08-06 | Mitutoyo Corporation | Touch probe with cleaning function |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4153998A (en) | 1972-09-21 | 1979-05-15 | Rolls-Royce (1971) Limited | Probes |
| GB1551218A (en) | 1975-05-13 | 1979-08-22 | Rolls Royce | Probe for use in displacement measuring apparatus |
| US4561776A (en) * | 1981-03-25 | 1985-12-31 | Diffracto Ltd. | Electro-optical sensors for tool and robotic inspection |
| FR2567265B1 (fr) * | 1984-07-04 | 1988-09-09 | Snecma | Palpeur de mesure dimensionnelle multidirectionnel etanche |
| DE3836263C1 (https=) | 1988-10-25 | 1990-06-07 | Mtu Muenchen Gmbh | |
| JP3304994B2 (ja) | 1991-08-30 | 2002-07-22 | キヤノン株式会社 | 研磨方法および研磨装置 |
| DE4436782B4 (de) * | 1993-10-21 | 2006-05-04 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren und Vorrichtung zur Vermessung von Prüflingen auf einem Koordinatenmeßgerät |
| JP2000221024A (ja) * | 1998-11-25 | 2000-08-11 | Fuji Seiki Kk | 清掃流体吹き出し口付き加工物測定用接触プロ―ブ及びこれを用いる測定方法 |
| EP1004846A3 (en) * | 1998-11-25 | 2001-05-02 | Fuji Seiki Co.,Ltd. | Work measuring probe with cleaning function |
| EP1128156A1 (en) | 2000-02-10 | 2001-08-29 | General Electric Company | Method and apparatus for automatically compensating for measurement error |
| JP2003042750A (ja) * | 2001-07-26 | 2003-02-13 | Canon Inc | 水槽を有する3次元形状測定装置 |
| GB0228371D0 (en) * | 2002-12-05 | 2003-01-08 | Leland E C E | Workpiece inspection method |
| GB0318388D0 (en) | 2003-08-06 | 2003-09-10 | Renishaw Plc | Stylus tip for workpiece contacting probe |
| JP2006007369A (ja) * | 2004-06-25 | 2006-01-12 | Nippei Toyama Corp | 工作機械における被測定物の表面形状判定装置 |
| JP2006090945A (ja) * | 2004-09-27 | 2006-04-06 | Olympus Corp | 形状測定機 |
| ATE487108T1 (de) * | 2005-07-08 | 2010-11-15 | Heidenhain Gmbh Dr Johannes | Tastkopf |
| JP5203028B2 (ja) * | 2007-05-30 | 2013-06-05 | 株式会社ミツトヨ | 形状測定機構の異常検出方法及び形状測定機構 |
| EP2018934A1 (en) * | 2007-07-26 | 2009-01-28 | Renishaw plc | Measurement device having authentication module |
| FR2946909B1 (fr) * | 2009-06-18 | 2012-06-29 | Peugeot Citroen Automobiles Sa | Dispositif de recalage/nettoyage de machine d'usinage |
| TWI458938B (zh) | 2011-01-19 | 2014-11-01 | Renishaw Plc | 用於機械工具裝置之類比量測探針 |
| EP2479531A1 (en) | 2011-01-19 | 2012-07-25 | Renishaw plc | Analogue measurement probe for a machine tool apparatus |
| JP6075797B2 (ja) * | 2011-05-03 | 2017-02-08 | スモルテク インターナショナル, リミテッド ライアビリティー カンパニーSmalTec International, LLC | マイクロ放電に基づく計測システム |
| JP2013104721A (ja) * | 2011-11-11 | 2013-05-30 | Disco Abrasive Syst Ltd | 研削装置 |
-
2013
- 2013-11-05 WO PCT/GB2013/052884 patent/WO2014076454A1/en not_active Ceased
- 2013-11-05 CN CN201380058806.XA patent/CN104813140B/zh active Active
- 2013-11-05 KR KR1020157015569A patent/KR20150082620A/ko not_active Ceased
- 2013-11-05 EP EP13786744.6A patent/EP2920549B1/en active Active
- 2013-11-05 JP JP2015542350A patent/JP6466847B2/ja active Active
- 2013-11-05 US US14/438,138 patent/US10048065B2/en active Active
- 2013-11-13 TW TW102141319A patent/TWI618917B/zh not_active IP Right Cessation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4536661A (en) * | 1982-10-15 | 1985-08-20 | Renishaw Plc | Position-sensing apparatus |
| US6154972A (en) * | 1998-07-16 | 2000-12-05 | Mitutoyo Corporation | Measuring machine with cleaning device |
| EP1953497A1 (en) * | 2007-01-31 | 2008-08-06 | Mitutoyo Corporation | Touch probe with cleaning function |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201428234A (zh) | 2014-07-16 |
| KR20150082620A (ko) | 2015-07-15 |
| JP2016515192A (ja) | 2016-05-26 |
| JP6466847B2 (ja) | 2019-02-06 |
| US10048065B2 (en) | 2018-08-14 |
| WO2014076454A1 (en) | 2014-05-22 |
| US20150285629A1 (en) | 2015-10-08 |
| EP2920549A1 (en) | 2015-09-23 |
| CN104813140A (zh) | 2015-07-29 |
| EP2920549B1 (en) | 2020-01-08 |
| CN104813140B (zh) | 2019-05-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |