TWI609076B - 拋光粒子-分散層複合體及包括其之拋光漿料組合物 - Google Patents
拋光粒子-分散層複合體及包括其之拋光漿料組合物 Download PDFInfo
- Publication number
- TWI609076B TWI609076B TW105142619A TW105142619A TWI609076B TW I609076 B TWI609076 B TW I609076B TW 105142619 A TW105142619 A TW 105142619A TW 105142619 A TW105142619 A TW 105142619A TW I609076 B TWI609076 B TW I609076B
- Authority
- TW
- Taiwan
- Prior art keywords
- polishing
- oxide
- layer composite
- dispersion layer
- dispersant
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title claims description 199
- 239000006185 dispersion Substances 0.000 title claims description 56
- 239000002131 composite material Substances 0.000 title claims description 54
- 239000000203 mixture Substances 0.000 title claims description 47
- 239000002002 slurry Substances 0.000 title claims description 46
- 239000002270 dispersing agent Substances 0.000 claims description 64
- 239000002245 particle Substances 0.000 claims description 56
- -1 organic acid cationic compound Chemical class 0.000 claims description 41
- 150000004767 nitrides Chemical class 0.000 claims description 21
- 229920001577 copolymer Polymers 0.000 claims description 18
- 229920003171 Poly (ethylene oxide) Polymers 0.000 claims description 16
- 229910044991 metal oxide Inorganic materials 0.000 claims description 12
- 150000004706 metal oxides Chemical class 0.000 claims description 12
- 239000002202 Polyethylene glycol Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 150000007524 organic acids Chemical class 0.000 claims description 10
- 229920001223 polyethylene glycol Polymers 0.000 claims description 10
- 229920000642 polymer Polymers 0.000 claims description 10
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 9
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 9
- 229920006317 cationic polymer Polymers 0.000 claims description 8
- 150000001413 amino acids Chemical class 0.000 claims description 7
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 6
- 150000001768 cations Chemical class 0.000 claims description 6
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 claims description 6
- 229920001451 polypropylene glycol Polymers 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 125000000524 functional group Chemical group 0.000 claims description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 4
- 229920005591 polysilicon Polymers 0.000 claims description 4
- FFJCNSLCJOQHKM-CLFAGFIQSA-N (z)-1-[(z)-octadec-9-enoxy]octadec-9-ene Chemical compound CCCCCCCC\C=C/CCCCCCCCOCCCCCCCC\C=C/CCCCCCCC FFJCNSLCJOQHKM-CLFAGFIQSA-N 0.000 claims description 3
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 claims description 3
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 3
- LWZFANDGMFTDAV-BURFUSLBSA-N [(2r)-2-[(2r,3r,4s)-3,4-dihydroxyoxolan-2-yl]-2-hydroxyethyl] dodecanoate Chemical compound CCCCCCCCCCCC(=O)OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O LWZFANDGMFTDAV-BURFUSLBSA-N 0.000 claims description 3
- 125000005907 alkyl ester group Chemical group 0.000 claims description 3
- 150000005215 alkyl ethers Chemical class 0.000 claims description 3
- 239000000395 magnesium oxide Substances 0.000 claims description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 3
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 3
- 229920000056 polyoxyethylene ether Polymers 0.000 claims description 3
- 229940051841 polyoxyethylene ether Drugs 0.000 claims description 3
- 229920000259 polyoxyethylene lauryl ether Polymers 0.000 claims description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 3
- 229920000036 polyvinylpyrrolidone Polymers 0.000 claims description 3
- 239000001267 polyvinylpyrrolidone Substances 0.000 claims description 3
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 claims description 3
- 229950006451 sorbitan laurate Drugs 0.000 claims description 3
- 235000011067 sorbitan monolaureate Nutrition 0.000 claims description 3
- 150000001450 anions Chemical class 0.000 claims description 2
- CEKXZSQLUFQAOG-UHFFFAOYSA-N barium(2+) oxygen(2-) titanium(4+) Chemical compound [O--].[O--].[Ti+4].[Ba++] CEKXZSQLUFQAOG-UHFFFAOYSA-N 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 150000008040 ionic compounds Chemical class 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 description 37
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 9
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 8
- 229960002442 glucosamine Drugs 0.000 description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 7
- MSWZFWKMSRAUBD-UHFFFAOYSA-N beta-D-galactosamine Natural products NC1C(O)OC(CO)C(O)C1O MSWZFWKMSRAUBD-UHFFFAOYSA-N 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 6
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 6
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 6
- 235000001014 amino acid Nutrition 0.000 description 6
- 229940024606 amino acid Drugs 0.000 description 6
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 6
- 229920001282 polysaccharide Polymers 0.000 description 6
- 239000005017 polysaccharide Substances 0.000 description 6
- 150000004804 polysaccharides Chemical class 0.000 description 6
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 5
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 5
- SIOXPEMLGUPBBT-UHFFFAOYSA-N picolinic acid Chemical compound OC(=O)C1=CC=CC=N1 SIOXPEMLGUPBBT-UHFFFAOYSA-N 0.000 description 5
- 229920001515 polyalkylene glycol Polymers 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N EtOH Substances CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 4
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 4
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 4
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- NEHMKBQYUWJMIP-UHFFFAOYSA-N chloromethane Chemical compound ClC NEHMKBQYUWJMIP-UHFFFAOYSA-N 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 4
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 4
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 4
- 239000005711 Benzoic acid Substances 0.000 description 3
- WHUUTDBJXJRKMK-UHFFFAOYSA-N Glutamic acid Natural products OC(=O)C(N)CCC(O)=O WHUUTDBJXJRKMK-UHFFFAOYSA-N 0.000 description 3
- CKLJMWTZIZZHCS-REOHCLBHSA-N L-aspartic acid Chemical compound OC(=O)[C@@H](N)CC(O)=O CKLJMWTZIZZHCS-REOHCLBHSA-N 0.000 description 3
- WHUUTDBJXJRKMK-VKHMYHEASA-N L-glutamic acid Chemical compound OC(=O)[C@@H](N)CCC(O)=O WHUUTDBJXJRKMK-VKHMYHEASA-N 0.000 description 3
- 229920002125 Sokalan® Polymers 0.000 description 3
- 235000011054 acetic acid Nutrition 0.000 description 3
- 239000001361 adipic acid Substances 0.000 description 3
- 235000011037 adipic acid Nutrition 0.000 description 3
- 235000003704 aspartic acid Nutrition 0.000 description 3
- 235000010233 benzoic acid Nutrition 0.000 description 3
- OQFSQFPPLPISGP-UHFFFAOYSA-N beta-carboxyaspartic acid Natural products OC(=O)C(N)C(C(O)=O)C(O)=O OQFSQFPPLPISGP-UHFFFAOYSA-N 0.000 description 3
- 150000001767 cationic compounds Chemical class 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- RAABOESOVLLHRU-UHFFFAOYSA-N diazene Chemical compound N=N RAABOESOVLLHRU-UHFFFAOYSA-N 0.000 description 3
- 229910000071 diazene Inorganic materials 0.000 description 3
- 235000013922 glutamic acid Nutrition 0.000 description 3
- 239000004220 glutamic acid Substances 0.000 description 3
- 239000004310 lactic acid Substances 0.000 description 3
- 235000014655 lactic acid Nutrition 0.000 description 3
- 239000004584 polyacrylic acid Substances 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229920001897 terpolymer Polymers 0.000 description 3
- KUEDAAUECWBMLW-AATRIKPKSA-N (e)-n,n,n',n'-tetramethylbut-2-ene-1,4-diamine Chemical compound CN(C)C\C=C\CN(C)C KUEDAAUECWBMLW-AATRIKPKSA-N 0.000 description 2
- OSSNTDFYBPYIEC-UHFFFAOYSA-N 1-ethenylimidazole Chemical compound C=CN1C=CN=C1 OSSNTDFYBPYIEC-UHFFFAOYSA-N 0.000 description 2
- RTBFRGCFXZNCOE-UHFFFAOYSA-N 1-methylsulfonylpiperidin-4-one Chemical compound CS(=O)(=O)N1CCC(=O)CC1 RTBFRGCFXZNCOE-UHFFFAOYSA-N 0.000 description 2
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 2
- 108010011485 Aspartame Proteins 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- 229920001661 Chitosan Polymers 0.000 description 2
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- DGMPVYSXXIOGJY-UHFFFAOYSA-N Fusaric acid Chemical compound CCCCC1=CC=C(C(O)=O)N=C1 DGMPVYSXXIOGJY-UHFFFAOYSA-N 0.000 description 2
- 239000004471 Glycine Substances 0.000 description 2
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229920000663 Hydroxyethyl cellulose Polymers 0.000 description 2
- 239000004354 Hydroxyethyl cellulose Substances 0.000 description 2
- QNAYBMKLOCPYGJ-REOHCLBHSA-N L-alanine Chemical compound C[C@H](N)C(O)=O QNAYBMKLOCPYGJ-REOHCLBHSA-N 0.000 description 2
- HNDVDQJCIGZPNO-YFKPBYRVSA-N L-histidine Chemical compound OC(=O)[C@@H](N)CC1=CN=CN1 HNDVDQJCIGZPNO-YFKPBYRVSA-N 0.000 description 2
- PVNIIMVLHYAWGP-UHFFFAOYSA-N Niacin Chemical compound OC(=O)C1=CC=CN=C1 PVNIIMVLHYAWGP-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- NJSSICCENMLTKO-HRCBOCMUSA-N [(1r,2s,4r,5r)-3-hydroxy-4-(4-methylphenyl)sulfonyloxy-6,8-dioxabicyclo[3.2.1]octan-2-yl] 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)O[C@H]1C(O)[C@@H](OS(=O)(=O)C=2C=CC(C)=CC=2)[C@@H]2OC[C@H]1O2 NJSSICCENMLTKO-HRCBOCMUSA-N 0.000 description 2
- 235000004279 alanine Nutrition 0.000 description 2
- JFCQEDHGNNZCLN-UHFFFAOYSA-N anhydrous glutaric acid Natural products OC(=O)CCCC(O)=O JFCQEDHGNNZCLN-UHFFFAOYSA-N 0.000 description 2
- 125000000129 anionic group Chemical group 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- IAOZJIPTCAWIRG-QWRGUYRKSA-N aspartame Chemical compound OC(=O)C[C@H](N)C(=O)N[C@H](C(=O)OC)CC1=CC=CC=C1 IAOZJIPTCAWIRG-QWRGUYRKSA-N 0.000 description 2
- 229960003438 aspartame Drugs 0.000 description 2
- 235000010357 aspartame Nutrition 0.000 description 2
- 239000000605 aspartame Substances 0.000 description 2
- UCMIRNVEIXFBKS-UHFFFAOYSA-N beta-alanine Chemical compound NCCC(O)=O UCMIRNVEIXFBKS-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 2
- 235000015165 citric acid Nutrition 0.000 description 2
- 238000007334 copolymerization reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- WJJMNDUMQPNECX-UHFFFAOYSA-N dipicolinic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=N1 WJJMNDUMQPNECX-UHFFFAOYSA-N 0.000 description 2
- 235000019253 formic acid Nutrition 0.000 description 2
- 239000001530 fumaric acid Substances 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- HNDVDQJCIGZPNO-UHFFFAOYSA-N histidine Natural products OC(=O)C(N)CC1=CN=CN1 HNDVDQJCIGZPNO-UHFFFAOYSA-N 0.000 description 2
- 235000014304 histidine Nutrition 0.000 description 2
- 235000019447 hydroxyethyl cellulose Nutrition 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- TWBYWOBDOCUKOW-UHFFFAOYSA-N isonicotinic acid Chemical compound OC(=O)C1=CC=NC=C1 TWBYWOBDOCUKOW-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 2
- 239000011976 maleic acid Substances 0.000 description 2
- 229940050176 methyl chloride Drugs 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 235000006408 oxalic acid Nutrition 0.000 description 2
- 239000003002 pH adjusting agent Substances 0.000 description 2
- 229940081066 picolinic acid Drugs 0.000 description 2
- WLJVNTCWHIRURA-UHFFFAOYSA-N pimelic acid Chemical compound OC(=O)CCCCCC(O)=O WLJVNTCWHIRURA-UHFFFAOYSA-N 0.000 description 2
- 229920002401 polyacrylamide Polymers 0.000 description 2
- 229920000058 polyacrylate Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 2
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 2
- TYFQFVWCELRYAO-UHFFFAOYSA-N suberic acid Chemical compound OC(=O)CCCCCCC(O)=O TYFQFVWCELRYAO-UHFFFAOYSA-N 0.000 description 2
- 239000011975 tartaric acid Substances 0.000 description 2
- 235000002906 tartaric acid Nutrition 0.000 description 2
- FQDIANVAWVHZIR-OWOJBTEDSA-N trans-1,4-Dichlorobutene Chemical compound ClC\C=C\CCl FQDIANVAWVHZIR-OWOJBTEDSA-N 0.000 description 2
- MTCFGRXMJLQNBG-REOHCLBHSA-N (2S)-2-Amino-3-hydroxypropansäure Chemical compound OC[C@H](N)C(O)=O MTCFGRXMJLQNBG-REOHCLBHSA-N 0.000 description 1
- KIUKXJAPPMFGSW-DNGZLQJQSA-N (2S,3S,4S,5R,6R)-6-[(2S,3R,4R,5S,6R)-3-Acetamido-2-[(2S,3S,4R,5R,6R)-6-[(2R,3R,4R,5S,6R)-3-acetamido-2,5-dihydroxy-6-(hydroxymethyl)oxan-4-yl]oxy-2-carboxy-4,5-dihydroxyoxan-3-yl]oxy-5-hydroxy-6-(hydroxymethyl)oxan-4-yl]oxy-3,4,5-trihydroxyoxane-2-carboxylic acid Chemical compound CC(=O)N[C@H]1[C@H](O)O[C@H](CO)[C@@H](O)[C@@H]1O[C@H]1[C@H](O)[C@@H](O)[C@H](O[C@H]2[C@@H]([C@@H](O[C@H]3[C@@H]([C@@H](O)[C@H](O)[C@H](O3)C(O)=O)O)[C@H](O)[C@@H](CO)O2)NC(C)=O)[C@@H](C(O)=O)O1 KIUKXJAPPMFGSW-DNGZLQJQSA-N 0.000 description 1
- CBOJBBMQJBVCMW-BTVCFUMJSA-N (2r,3r,4s,5r)-2-amino-3,4,5,6-tetrahydroxyhexanal;hydrochloride Chemical compound Cl.O=C[C@H](N)[C@@H](O)[C@H](O)[C@H](O)CO CBOJBBMQJBVCMW-BTVCFUMJSA-N 0.000 description 1
- OCUSNPIJIZCRSZ-ZTZWCFDHSA-N (2s)-2-amino-3-methylbutanoic acid;(2s)-2-amino-4-methylpentanoic acid;(2s,3s)-2-amino-3-methylpentanoic acid Chemical compound CC(C)[C@H](N)C(O)=O.CC[C@H](C)[C@H](N)C(O)=O.CC(C)C[C@H](N)C(O)=O OCUSNPIJIZCRSZ-ZTZWCFDHSA-N 0.000 description 1
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- JKNCOURZONDCGV-UHFFFAOYSA-N 2-(dimethylamino)ethyl 2-methylprop-2-enoate Chemical compound CN(C)CCOC(=O)C(C)=C JKNCOURZONDCGV-UHFFFAOYSA-N 0.000 description 1
- MSWZFWKMSRAUBD-IVMDWMLBSA-N 2-amino-2-deoxy-D-glucopyranose Chemical compound N[C@H]1C(O)O[C@H](CO)[C@@H](O)[C@@H]1O MSWZFWKMSRAUBD-IVMDWMLBSA-N 0.000 description 1
- 125000001340 2-chloroethyl group Chemical group [H]C([H])(Cl)C([H])([H])* 0.000 description 1
- IIVBUJGYWCCLNG-UHFFFAOYSA-N 3-(dimethylamino)propylurea Chemical compound CN(C)CCCNC(N)=O IIVBUJGYWCCLNG-UHFFFAOYSA-N 0.000 description 1
- RUACIFFMSHZUKZ-UHFFFAOYSA-O 3-Acrylamidopropyl trimethylammonium Chemical compound C[N+](C)(C)CCCNC(=O)C=C RUACIFFMSHZUKZ-UHFFFAOYSA-O 0.000 description 1
- BMYNFMYTOJXKLE-UHFFFAOYSA-N 3-azaniumyl-2-hydroxypropanoate Chemical compound NCC(O)C(O)=O BMYNFMYTOJXKLE-UHFFFAOYSA-N 0.000 description 1
- MXRGSJAOLKBZLU-UHFFFAOYSA-N 3-ethenylazepan-2-one Chemical compound C=CC1CCCCNC1=O MXRGSJAOLKBZLU-UHFFFAOYSA-N 0.000 description 1
- SQDAZGGFXASXDW-UHFFFAOYSA-N 5-bromo-2-(trifluoromethoxy)pyridine Chemical compound FC(F)(F)OC1=CC=C(Br)C=N1 SQDAZGGFXASXDW-UHFFFAOYSA-N 0.000 description 1
- 229920002126 Acrylic acid copolymer Polymers 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 239000004475 Arginine Substances 0.000 description 1
- OABPMUYZZLHPJR-UHFFFAOYSA-N CC(=COCCP)C Chemical compound CC(=COCCP)C OABPMUYZZLHPJR-UHFFFAOYSA-N 0.000 description 1
- 229920002101 Chitin Polymers 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 229920001287 Chondroitin sulfate Polymers 0.000 description 1
- 206010011732 Cyst Diseases 0.000 description 1
- 229920002307 Dextran Polymers 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- HTTJABKRGRZYRN-UHFFFAOYSA-N Heparin Chemical compound OC1C(NC(=O)C)C(O)OC(COS(O)(=O)=O)C1OC1C(OS(O)(=O)=O)C(O)C(OC2C(C(OS(O)(=O)=O)C(OC3C(C(O)C(O)C(O3)C(O)=O)OS(O)(=O)=O)C(CO)O2)NS(O)(=O)=O)C(C(O)=O)O1 HTTJABKRGRZYRN-UHFFFAOYSA-N 0.000 description 1
- XUJNEKJLAYXESH-REOHCLBHSA-N L-Cysteine Chemical compound SC[C@H](N)C(O)=O XUJNEKJLAYXESH-REOHCLBHSA-N 0.000 description 1
- ONIBWKKTOPOVIA-BYPYZUCNSA-N L-Proline Chemical compound OC(=O)[C@@H]1CCCN1 ONIBWKKTOPOVIA-BYPYZUCNSA-N 0.000 description 1
- ODKSFYDXXFIFQN-BYPYZUCNSA-P L-argininium(2+) Chemical compound NC(=[NH2+])NCCC[C@H]([NH3+])C(O)=O ODKSFYDXXFIFQN-BYPYZUCNSA-P 0.000 description 1
- ZDXPYRJPNDTMRX-VKHMYHEASA-N L-glutamine Chemical compound OC(=O)[C@@H](N)CCC(N)=O ZDXPYRJPNDTMRX-VKHMYHEASA-N 0.000 description 1
- KDXKERNSBIXSRK-YFKPBYRVSA-N L-lysine Chemical compound NCCCC[C@H](N)C(O)=O KDXKERNSBIXSRK-YFKPBYRVSA-N 0.000 description 1
- FFEARJCKVFRZRR-BYPYZUCNSA-N L-methionine Chemical compound CSCC[C@H](N)C(O)=O FFEARJCKVFRZRR-BYPYZUCNSA-N 0.000 description 1
- COLNVLDHVKWLRT-QMMMGPOBSA-N L-phenylalanine Chemical compound OC(=O)[C@@H](N)CC1=CC=CC=C1 COLNVLDHVKWLRT-QMMMGPOBSA-N 0.000 description 1
- AYFVYJQAPQTCCC-GBXIJSLDSA-N L-threonine Chemical compound C[C@@H](O)[C@H](N)C(O)=O AYFVYJQAPQTCCC-GBXIJSLDSA-N 0.000 description 1
- QIVBCDIJIAJPQS-VIFPVBQESA-N L-tryptophane Chemical compound C1=CC=C2C(C[C@H](N)C(O)=O)=CNC2=C1 QIVBCDIJIAJPQS-VIFPVBQESA-N 0.000 description 1
- OUYCCCASQSFEME-QMMMGPOBSA-N L-tyrosine Chemical compound OC(=O)[C@@H](N)CC1=CC=C(O)C=C1 OUYCCCASQSFEME-QMMMGPOBSA-N 0.000 description 1
- KDXKERNSBIXSRK-UHFFFAOYSA-N Lysine Natural products NCCCCC(N)C(O)=O KDXKERNSBIXSRK-UHFFFAOYSA-N 0.000 description 1
- 239000004472 Lysine Substances 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- WSSMMNVKLQZMEF-BUUAAUMRSA-N N-[(2R,3R,4R,5S,6R)-2,4,5-trihydroxy-6-(hydroxymethyl)oxan-3-yl]acetamide N-[(3R,4R,5S,6R)-2,4,5-trihydroxy-6-(hydroxymethyl)oxan-3-yl]acetamide Chemical compound CC(=O)N[C@H]1C(O)O[C@H](CO)[C@@H](O)[C@@H]1O.CC(=O)N[C@H]1[C@H](O)O[C@H](CO)[C@@H](O)[C@@H]1O WSSMMNVKLQZMEF-BUUAAUMRSA-N 0.000 description 1
- MBBZMMPHUWSWHV-BDVNFPICSA-N N-methylglucamine Chemical compound CNC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO MBBZMMPHUWSWHV-BDVNFPICSA-N 0.000 description 1
- 229920000707 Poly(2-dimethylamino)ethyl methacrylate) methyl chloride Polymers 0.000 description 1
- 229920002845 Poly(methacrylic acid) Polymers 0.000 description 1
- 229920000691 Poly[bis(2-chloroethyl) ether-alt-1,3-bis[3-(dimethylamino)propyl]urea] Polymers 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- ONIBWKKTOPOVIA-UHFFFAOYSA-N Proline Natural products OC(=O)C1CCCN1 ONIBWKKTOPOVIA-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- YEXSHHDMIBWWJW-IVMDWMLBSA-N SN[C@H]1C(O)O[C@@H]([C@H]([C@@H]1O)O)CO Chemical compound SN[C@H]1C(O)O[C@@H]([C@H]([C@@H]1O)O)CO YEXSHHDMIBWWJW-IVMDWMLBSA-N 0.000 description 1
- MTCFGRXMJLQNBG-UHFFFAOYSA-N Serine Natural products OCC(N)C(O)=O MTCFGRXMJLQNBG-UHFFFAOYSA-N 0.000 description 1
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 1
- AYFVYJQAPQTCCC-UHFFFAOYSA-N Threonine Natural products CC(O)C(N)C(O)=O AYFVYJQAPQTCCC-UHFFFAOYSA-N 0.000 description 1
- 239000004473 Threonine Substances 0.000 description 1
- QIVBCDIJIAJPQS-UHFFFAOYSA-N Tryptophan Natural products C1=CC=C2C(CC(N)C(O)=O)=CNC2=C1 QIVBCDIJIAJPQS-UHFFFAOYSA-N 0.000 description 1
- 229920006322 acrylamide copolymer Polymers 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000000783 alginic acid Substances 0.000 description 1
- 235000010443 alginic acid Nutrition 0.000 description 1
- 229920000615 alginic acid Polymers 0.000 description 1
- 229960001126 alginic acid Drugs 0.000 description 1
- 150000004781 alginic acids Chemical class 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 229920006318 anionic polymer Polymers 0.000 description 1
- ODKSFYDXXFIFQN-UHFFFAOYSA-N arginine Natural products OC(=O)C(N)CCCNC(N)=N ODKSFYDXXFIFQN-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- WQZGKKKJIJFFOK-VFUOTHLCSA-N beta-D-glucose Chemical compound OC[C@H]1O[C@@H](O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-VFUOTHLCSA-N 0.000 description 1
- 229940000635 beta-alanine Drugs 0.000 description 1
- 239000000679 carrageenan Substances 0.000 description 1
- 229920001525 carrageenan Polymers 0.000 description 1
- 235000010418 carrageenan Nutrition 0.000 description 1
- 229940113118 carrageenan Drugs 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229940059329 chondroitin sulfate Drugs 0.000 description 1
- 238000000975 co-precipitation Methods 0.000 description 1
- 208000031513 cyst Diseases 0.000 description 1
- XUJNEKJLAYXESH-UHFFFAOYSA-N cysteine Natural products SCC(N)C(O)=O XUJNEKJLAYXESH-UHFFFAOYSA-N 0.000 description 1
- 235000018417 cysteine Nutrition 0.000 description 1
- 229960000633 dextran sulfate Drugs 0.000 description 1
- OFTQXUUDDADFNU-UHFFFAOYSA-O dimethyl-[(2-methylprop-2-enoylamino)methyl]-propylazanium Chemical compound CCC[N+](C)(C)CNC(=O)C(C)=C OFTQXUUDDADFNU-UHFFFAOYSA-O 0.000 description 1
- GQOKIYDTHHZSCJ-UHFFFAOYSA-M dimethyl-bis(prop-2-enyl)azanium;chloride Chemical compound [Cl-].C=CC[N+](C)(C)CC=C GQOKIYDTHHZSCJ-UHFFFAOYSA-M 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- DJLHXXNSHHGFLB-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate;n-methylmethanamine Chemical compound CNC.CCOC(=O)C(C)=C DJLHXXNSHHGFLB-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 235000011087 fumaric acid Nutrition 0.000 description 1
- 150000002301 glucosamine derivatives Chemical class 0.000 description 1
- 229960001911 glucosamine hydrochloride Drugs 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 229930182478 glucoside Natural products 0.000 description 1
- ZDXPYRJPNDTMRX-UHFFFAOYSA-N glutamine Natural products OC(=O)C(N)CCC(N)=O ZDXPYRJPNDTMRX-UHFFFAOYSA-N 0.000 description 1
- 229920000669 heparin Polymers 0.000 description 1
- 229960002897 heparin Drugs 0.000 description 1
- 229960002885 histidine Drugs 0.000 description 1
- 229920002674 hyaluronan Polymers 0.000 description 1
- 229960003160 hyaluronic acid Drugs 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 229940071870 hydroiodic acid Drugs 0.000 description 1
- 150000001261 hydroxy acids Chemical class 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229930182817 methionine Natural products 0.000 description 1
- 229960003512 nicotinic acid Drugs 0.000 description 1
- 235000001968 nicotinic acid Nutrition 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 229920001542 oligosaccharide Polymers 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 125000006353 oxyethylene group Chemical group 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- COLNVLDHVKWLRT-UHFFFAOYSA-N phenylalanine Natural products OC(=O)C(N)CC1=CC=CC=C1 COLNVLDHVKWLRT-UHFFFAOYSA-N 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920000371 poly(diallyldimethylammonium chloride) polymer Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 125000001453 quaternary ammonium group Chemical group 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- GJAWHXHKYYXBSV-UHFFFAOYSA-N quinolinic acid Chemical compound OC(=O)C1=CC=CN=C1C(O)=O GJAWHXHKYYXBSV-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000010189 synthetic method Methods 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- UZNHKBFIBYXPDV-UHFFFAOYSA-N trimethyl-[3-(2-methylprop-2-enoylamino)propyl]azanium;chloride Chemical compound [Cl-].CC(=C)C(=O)NCCC[N+](C)(C)C UZNHKBFIBYXPDV-UHFFFAOYSA-N 0.000 description 1
- OUYCCCASQSFEME-UHFFFAOYSA-N tyrosine Natural products OC(=O)C(N)CC1=CC=C(O)C=C1 OUYCCCASQSFEME-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- UHVMMEOXYDMDKI-JKYCWFKZSA-L zinc;1-(5-cyanopyridin-2-yl)-3-[(1s,2s)-2-(6-fluoro-2-hydroxy-3-propanoylphenyl)cyclopropyl]urea;diacetate Chemical compound [Zn+2].CC([O-])=O.CC([O-])=O.CCC(=O)C1=CC=C(F)C([C@H]2[C@H](C2)NC(=O)NC=2N=CC(=CC=2)C#N)=C1O UHVMMEOXYDMDKI-JKYCWFKZSA-L 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/04—Aqueous dispersions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1436—Composite particles, e.g. coated particles
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1472—Non-aqueous liquid suspensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Composite Materials (AREA)
- Dispersion Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
本發明涉及拋光粒子-分散層複合體及包括此的拋光料漿組合物。
隨著半導體元件的多樣化和高密集集成,使用更細微的模式形成技術,且隨著此半導體元件的表面結構更複雜,表面膜的段差也變得更大。在製造半導體元件中,用於去除在基板上形成的特定膜的段差的平坦化技術,利用化學機械拋光CMP(chemical mechanical polishing)工程。例如,為了層間絕緣,去除由過量絕緣膜工程的層間絕緣膜(interlayer dielectric;ILD),和如絕緣晶片(chip)間的淺溝槽隔離(shallow trench isolation;STI)用絕緣膜平坦化的工程及排線、接觸插塞、通路接觸等,用於形成金屬導電膜的工程被很多的使用。CMP工程是將要加工的晶片的表面和拋光襯墊接觸的狀態下,供給料漿在這些接觸部位,相對的移動晶片和拋光襯墊,並化學反應晶片的凹凸表面,機械性的去除並平坦化的廣域平坦化技術。在CMP工程中,拋光速度、拋光表面的平坦度、刮痕的發生程度很重要,且這些由CMP工程條件、料漿的種類、拋光襯墊的種類等被決定。隨著密集度變高和工程的規格嚴格,發生快速地平坦段差非常大的絕緣膜的必要性。因此,拋光初期段差去除速度快,段差去除之後,拋光速度非常慢,有必要開發具有自動停止功能的拋光劑。一方面,利用陰離子高分子及陰離子共聚物的混合單一層形態的料漿,可體現在高段差領域的選擇比及高的拋光率,但是,在低段差領域中,對平坦度調整及凹陷控制有困難。此外,具有由拋光粒子所具有的固有硬度的刮痕發生概率高的問題。
技術課題
本發明是作為解決上述的問題,本發明的目的是提供拋光初期在段差大的高段差領域中,拋光物件膜去除速度塊,具有高的選擇比,且段差被去除之後,拋光速度很低可體現自動停止功能,對凹陷、刮痕改善很好的拋光粒子-分散層複合體及包括此的拋光料漿組合物。
但是,本發明要解決的課題不限定於以上提及的課題,且沒有提及的其他課題,可從以下記載明確地被技藝人士理解。 技術方案
根據本發明的一個實施例,提供一種拋光粒子-分散層複合體,其包括:拋光粒子;第一分散劑,從氨基酸、有機酸、聚亞烷基二醇及葡萄糖胺化合物結合的高分子多糖體形成的群中選擇的至少任何一個的陽離子性化合物;及第二分散劑,在分子式內包括兩個以上被離子化的陽離子的陽離子性聚合物。
所述拋光粒子和所述第一分散劑的結合,及所述第一分散劑和第二分散劑的結合可以是化學結合。
所述拋光粒子表面、所述第一分散劑及第二分散劑可顯示陽電荷。
所述陽離子性聚合物可包括由陽離子活性的兩個以上的氮。
在所述拋光粒子-分散層複合體內,包括0.1重量百分比至10重量百分比的所述第一分散劑,且在所述拋光粒子-分散層複合體內,包括0.01重量百分比至5重量百分比的所述第二分散劑。
所述拋光粒子-分散層複合體還可包括非離子性化合物,從聚乙二醇、聚丙二醇、乙烯丙烯共聚物、聚烷基氧化物、聚氧化乙烯、聚環氧乙烷、聚環氧丙烷、聚乙烯吡咯烷酮、聚氧乙烯烷基醚、聚乙二醇烷基酯、聚氧乙烯醚、聚乙二醇磺酸、聚乙烯醇、聚氧化乙烯十二烷基醚、聚氧化乙烯十六醚、聚氧化乙烯油基醚、聚氧化乙烯去水山梨醇月桂酸酯及聚氧化乙烯苯基醚形成的群中選擇的至少任何一個。
在所述拋光粒子-分散層複合體內可包括0.001重量百分比至1重量百分比的所述非離子性化合物。
所述拋光粒子可包括:從金屬氧化物、有機物或無機物被塗層的金屬氧化物,及膠體狀態的所述金屬氧化物形成的群中選擇的至少任何一個,且所述金屬氧化物包括:從二氧化矽、二氧化鈰、氧化鋯、氧化鋁、二氧化鈦、鋇二氧化鈦、氧化鍺、氧化錳及氧化鎂形成的群中選擇的至少任何一個。
所述拋光粒子的直徑可以是10nm至300nm。
所述拋光粒子可在所述拋光粒子-分散層複合體中是0.1重量百分比至10重量百分比。
所述拋光粒子由液態法製造,可使粒子表面具有陽電荷被分散。
根據本發明的其他實施例,提供拋光料漿組合物,其包括根據本發明的一個實施例的拋光粒子-分散層複合體。
所述拋光料漿組合物的pH可以是3至6。
所述拋光料漿組合物的電動電位可以是10mV至60mV。
利用所述拋光料漿組合物,拋光在覆蓋晶片(Blanket wafer)包括氧化膜和氮化膜或氧化膜和聚膜的晶片時,對氧化膜:氮化膜或氧化膜:聚膜的拋光選擇比可以是10:1至40:1。
利用所述拋光料漿組合物,拋光在模式晶片(Pattern wafer)包括氧化膜和氮化膜或氧化膜和多晶矽膜的晶片時,對氧化膜:氮化膜或氧化膜:多晶矽膜的拋光選擇比可以是1:1至5:1。
利用所述拋光料漿組合物,拋光包括氧化膜和氮化膜或氧化膜和聚膜的晶片之後,具有線路/空間基準100㎛/100㎛以下模式密度的晶片的凹陷發生量可以是200Å以下,具有線路/空間基準300㎛/300㎛以上模式密度的晶片的凹陷發生量是250Å以下。 技術效果
根據本發明的一個實施例,拋光粒子-分散層複合體由圍繞拋光粒子的分散劑的化學結合,形成拋光粒子-分散層複合體,使吸附在拋光粒子的分散劑的量多,且減少拋光粒子的硬度,改善潤滑性、凝聚粒子、分散性。
根據本發明的一個實施例,拋光料漿組合物包括拋光粒子-分散層複合體,在拋光氧化膜和氮化膜或聚膜中,在高段差領域使拋光速度快進行去除,並具有高的選擇比,段差被去除之後,使拋光速度非常慢,在聚膜體現拋光自動停止功能,對凹陷、刮痕改善具有很好的效果。
參照以下附圖詳細地說明本發明的實施例。在說明本發明,當判斷對有關公知功能或構成的具體說明,不必要的模糊本發明的摘要時,對其詳細說明進行省略。並且,在本發明所使用的用語是為了適當的表現本發明的優選實施例而被使用的用語,這可按照用戶、運營者的意圖或者本發明所屬領域的慣例等不同。因此,對本用語的定義由本說明書整個內容為基礎下定結論。各圖示出的相同參照符號顯示相同的部件。
在整個說明書,有些部分「包括」有些構成要素時,在沒有特別反對的記載之外,意味著不是排除其他構成要素,而是還可包括其他構成要素。
以下,對本發明的拋光粒子-分散層複合體及包括此的拋光料漿組合物,參照實施例及圖面進行詳細地說明。但是,本發明不限定於這些實施例及圖。
根據本發明的一個實施例,提供一種拋光粒子-分散層複合體,其包括:拋光粒子;第一分散劑,從氨基酸、有機酸、聚亞烷基二醇及葡萄糖胺化合物結合的高分子多糖體形成的群中選擇的至少任何一個的陽離子性化合物;及第二分散劑,在分子式內包括兩個以上的被離子化的陽離子的陽離子性聚合物。
本發明的拋光粒子-分散層複合體由圍繞拋光粒子的分散劑的化學結合,形成拋光粒子-分散層複合體,使吸附在拋光粒子的分散劑的量多,減少拋光粒子的硬度,改善潤滑性、凝聚粒子、分散性。
根據本發明的一個實施例,拋光粒子-分散層複合體的所述拋光粒子和所述第一分散劑的結合,及所述第一分散劑和第二分散劑的結合,可以是化學結合。
所述拋光粒子表面、所述第一分散劑及第二分散劑可顯示相同的電荷。所述第一分散劑由化學結合在所述拋光粒子表面,第二分散劑可由化學結合在所述第一分散劑表面。
根據本發明的一個實施例,拋光粒子-分散層複合體的所述拋光粒子表面、所述第一分散劑及第二分散劑可顯示陽電荷。根據本發明的一個實施例,拋光粒子-分散層複合體的表面都具有陽電荷,所以,不被靜電力結合,且沒有凝聚現象。
所述第一分散劑作為陽離子性化合物,可包括從氨基酸、有機酸、聚亞烷基二醇及葡萄糖胺化合物結合的高分子多糖體形成的群中選擇的至少任何一個。
所述氨基酸提高拋光粒子的分散性,具有進一步提高絕緣膜的拋光速度的效果。所述氨基酸可包括從精氨酸、賴氨酸、天冬氨酸、谷氨酸、天冬醯胺、穀氨醯胺、組氨酸、脯氨酸、酪氨酸、色氨酸、絲氨酸、蘇氨酸、甘氨酸、丙氨酸、β-丙氨酸、甲硫氨酸、半胱氨酸、苯丙氨酸、亮氨酸、異亮氨酸及纈氨酸形成的群中選擇的至少任何一個。
所述有機酸可包括從吡啶甲酸、煙酸、異煙酸、鐮刀菌酸、吡啶二甲酸、吡啶二羥酸、盧剔啶酸、喹啉酸、谷氨酸、丙氨酸、甘氨酸、胱氨酸、組氨酸、天冬醯胺、胍、肼、乙二胺、甲酸、乙酸、苯甲酸、草酸、琥珀酸、蘋果酸、馬來酸、丙二酸、檸檬酸、乳酸、丙三羥酸、酒石酸、天冬氨酸、戊二酸、己二酸、辛二酸、富馬酸、鄰苯二甲酸、吡啶羧酸及上述鹽形成的群中選擇的至少任何一個。
所述聚亞烷基二醇可提高如拋光選自比、平坦度的跑光特性。例如,所述聚亞烷基二醇可包括聚乙二醇、聚丙二醇、聚丁二醇。
所述葡萄糖胺化合物結合的高分子多糖體,可包括從甲殼素、殼聚糖、殼寡糖、多糖、蛋白聚糖、肝素、褐藻酸、纖維素、透明質酸、角叉菜膠、β-葡聚糖和硫酸軟骨素(chondroitin sulfate)形成的群中選擇的至少任何一個。
包括在所述高分子多糖體的葡萄糖胺類化合物可以是葡萄糖胺或葡萄糖胺衍生物,例如,可包括從N-乙醯-D-葡糖胺、N-甲基葡糖胺、N-乙醯半乳糖胺、2-乙醯氨基-2-去氧-β-D-葡萄糖(N-乙醯氨基葡糖)、聚(β-(1,4) - 葡糖胺)-N-聚琥珀醯葡糖胺β-1-6-(PNSG)、聚β-1-6--N-乙醯基葡糖胺(PNAG)、N-醯基葡萄糖胺,葡糖胺鹽酸鹽及葡糖胺寡糖形成的群中選擇的至少任何一個。
所述第二分散劑可以是在分子式內包括兩個以上離子化陽離子的陽離子性聚合物,優選地,可包括兩個以上的由陽離子活性的氮,且所述陽離子陽離子性聚合物可以是聚季銨形態。
所述陽離子性聚合物可包括從聚(二烯丙基二甲基氯化銨)(poly(diallyldimethyl ammonium chloride));聚【雙(2-氯乙基)乙醚-鍵-1,3-雙【3-(二甲氨基)丙基】尿素】(Poly【bis(2-chloroethyl) ether-alt-1,3-bis【3-(dimethylamino)propyl】urea】);1,4-二氯-2-丁烯及具有N,N,N’,N’-四甲基-2-丁烯-1,4-二胺的2,2’,2’’-次氨基三-乙醇聚合物(Ethanol, 2,2’,2’’ -nitrilotris-, polymer with 1,4-dichloro-2-butene and N,N,N',N'-tetramethyl-2-butene-1,4-diamine);羥乙基纖維素二甲基二烯丙基氯化銨共聚物(Hydroxyethyl cellulose dimethyl diallylammonium chloride copolymer);丙烯醯胺/二甲基二烯丙基氯化銨共聚物(Copolymer of acrylamide and diallyldimethylammonium chloride);丙烯醯胺/季銨化的二甲基丙烯酸乙酯共聚物(Copolymer of acrylamide and quaternized dimethylammonium ethyl methacrylate);丙烯酸/二甲基二烯丙基氯化銨共聚物(Copolymer of acrylic acid and diallyldimethylammonium Chloride);丙烯醯胺甲基丙烯酸甲基氯乙烯共聚物(Acrylamide-dimethylaminoethyl methacrylate methyl chloride copolymer);季銨化羥乙基纖維素(Quaternized hydroxyethyl cellulose);乙烯基吡咯烷酮和季銨化甲基丙烯酸共聚物(Copolymer of vinylpyrrolidone/quaternized dimethylaminoethyl methacrylate);乙烯基吡咯烷酮/季銨化乙烯基咪唑共聚物(Copolymer of vinylpyrrolidone and quaternized vinylimidazole);乙烯基吡咯烷酮/甲基丙烯醯丙基三甲基共聚物(Copolymer of vinylpyrrolidone and methacrylamido propyl trimethylammonium);聚(2-甲基丙烯醯氧乙基)氯化銨(Poly(2-methacryloxyethyltrimethylammonium chloride));聚(丙烯醯胺乙基三甲基氯化銨)(Poly(acrylamide 2-methacryloxyethyltrimethyl ammonium chloride));聚【2-(甲基丙烯酸二甲胺乙酯)氯甲烷】(poly【2-(dimethylaminoethyl methacrylate methyl chloride】);聚【3- 丙烯醯胺基丙基氯化銨 】(poly【3-acrylamidopropyl trimethylammonium chloride】);聚【3-甲基丙烯醯丙基氯化銨】(poly【3-methacrylamidopropyl trimethylammonium chloride】);聚【氧乙烯(二亞胺)乙烯(二甲基亞氨基)二氯化乙烯】(Poly【oxyethylene(dimethylimino)ethylene (dimethylimino)ethylene dichloride】);丙烯酸/丙烯醯胺/二甲基二烯丙基氯化銨共聚物(Terpolymer of acrylic acid, acrylamide and diallyldimethylammonium Chloride);丙烯酸/甲基丙烯醯胺基丙基三甲基氯化銨/丙烯酸甲酯的三元共聚物(Terpolymer of acrylic acid, methacrylamidopropyl trimethylammonium chloride, and methyl acrylate);乙烯基己內醯胺/乙烯基吡咯烷酮/季銨化乙烯基咪唑的三元共聚物(Terpolymer of vinylcaprolactam, vinylpyrrolidone, and quaternized vinylimidazole);聚(2-甲基丙烯醯氧基乙基磷醯膽鹼-甲基丙烯酸正丁酯)(Poly(2-methacryloxyethyl phosphorylcholine-co-n-butyl methacrylate));聚【(二亞胺)丙烯酸乙酯苯甲酸氯化物季銨鹽】(PDMAEA BCQ)及聚【(二亞胺)丙烯酸乙酯甲基氯化物季銨鹽】(PDMAEA MCQ)形成的群中選擇的至少任何一個。
在所述拋光粒子-分散層複合體內,可包括0.1重量百分比至10重量百分比的所述第一分散劑,且在所述拋光粒子-分散層複合體內,包括0.01重量百分比至5重量百分比的所述第二分散劑。所述第一分散劑未滿0.1重量百分比、所述第二分散劑未滿0.01重量百分比時,具有拋光粒子凝聚的憂慮,且所述第一分散劑超過10重量百分比、所述第二分散劑超過5重量百分比時,具有拋光粒子-分散層複合體的形成有困難的問題。更優選地,可包括所述第一分散劑為1重量百分比至10重量百分比、所述第二分散劑為0.1重量百分比至1重量百分比。
所述拋光粒子-分散層複合體還可包括第三分散劑,從具有共振結構官能團的共聚物、含有二羧基的聚合物及含有二羧基的有機酸形成的群中選擇的至少任何一個的陰離子性化合物。
所述第三分散劑是陰離子性化學物,可具有陰電荷,且可包括從具有共振結構官能團的共聚物、含有二羧基的聚合物及含有二羧基的有機酸形成的群中選擇的至少任何一個。所述第三分散劑可包括從共振結構官能團形態的共聚物、含有二羧基的聚合物及含有二羧基的有機酸形成的群中選擇的至少任何一個。所述第三分散劑可包括從聚丙烯酸、聚磺酸、聚丙烯酸銨、聚甲基丙烯酸、聚甲基丙烯酸銨鹽、聚丙烯馬來酸、丙烯酸苯乙烯共聚物、聚苯乙烯/丙烯酸共聚物、聚丙烯醯胺/丙烯酸共聚物、聚丙烯酸/磺酸共聚物、聚磺酸/丙烯醯胺共聚物及聚丙烯酸/丙二酸共聚物形成的群中選擇的至少任何一個。
在所述拋光粒子-分散層複合體內可包括0.01重量百分比至5重量百分比的所述第三分散劑。所述第三分散劑未滿0.01重量百分比時,具有拋光粒子凝聚的憂慮,且所述第三分散劑超過5重量百分比時,具有拋光粒子分散層複合體的形成有困難的問題。
所述拋光粒子-分散層複合體為了體現聚膜拋光停止功能,還可包括非離子性化合物。所述非離子性化合物可包括從聚乙二醇、聚丙二醇、乙烯丙烯共聚物、聚烷基氧化物、聚氧化乙烯、聚環氧乙烷、聚環氧丙烷、聚乙烯吡咯烷酮、聚氧乙烯烷基醚、聚乙二醇烷基酯、聚氧乙烯醚、聚乙二醇磺酸、聚乙烯醇、聚氧化乙烯十二烷基醚、聚氧化乙烯十六醚、聚氧化乙烯油基醚、聚氧化乙烯去水山梨醇月桂酸酯及聚氧化乙烯苯基醚形成的群中選擇的至少任何一個。
在所述拋光粒子-分散層複合體內可包括0.001重量百分比至1重量百分比的所述非離子性化合物。所述非離子性化合物未滿0.001重量百分比時,不體現聚膜拋光停止功能,可發生由聚膜過量被拋光的問題,且超過1重量百分比時,分散穩定性低下,具有微刮痕的問題。
所述拋光粒子包括從金屬氧化物、由有機物或無機物塗層的金屬氧化物,及膠體狀態的金屬氧化物形成的群中選擇的至少任何一個,所述金屬氧化物可包括從二氧化矽、二氧化鈰、氧化鋯、氧化鋁、二氧化鈦、鋇二氧化鈦、氧化鍺、氧化錳及氧化鎂形成的群中選擇的至少任何一個。
所述拋光粒子的直徑可以是10nm至300nm。所述拋光粒子的直徑未滿10nm時,其結果具有拋光粒子-分散層複合體的大小較小,拋光率低下的問題,且超過300nm時,其結果具有拋光粒子-分散層複合體的大小較大,凹陷、表面缺陷、拋光率、選擇比的調整困難的問題。
所述拋光粒子可以是所述拋光粒子-分散層複合體中的0.1重量百分比至10重量百分比。所述拋光粒子未滿0.1重量百分比時,可具有拋光速度低下的問題,超過10重量百分比時,憂慮由拋光粒子發生缺陷的問題。
所述拋光粒子可包括由液態法被製造,但不限定於此。液態法是將拋光粒子在水溶液中發生化學反應,生長結晶得到微粒子的溶膠(solgel)法,但是,可適用將拋光粒子離子在水溶液沉澱的共沉澱法,及在高溫高壓形成拋光粒子的水熱合成法等被製造。由液態法製造的拋光粒子,使拋光粒子表面具有陽電荷被分散。
所述拋光粒子可以是單結晶,但不限定於此。使用單結晶拋光粒子時,比起多結晶拋光粒子,可達到刮痕減少的效果,且可改善凹陷(dishing),並且拋光後可改善洗淨性。
所述拋光粒子的形象可包括從球形、角形、針狀形象及板狀形象形成的群中選擇的至少任何一個,優選地可以是球形。
根據本發明的一個實施例,拋光粒子-分散層複合體,使吸附在拋光粒子的分散劑的量變多,且減少拋光粒子的硬度,並改善潤滑性、凝聚粒子、分散性、穩定性。
根據本發明的其他實施例,提供拋光料漿組合物,其包括根據本發明的所述一個實施例的拋光粒子-分散層複合體。
根據本發明的拋光料漿組合物在氧化膜的拋光程序中,在高段差領域由加快拋光速度進行去除,並具有高的選擇比,且段差被去除之後,使拋光速度很慢,在氮化膜或聚膜體現拋光自動停止功能。此外,拋光後,對拋光物件膜的凹陷、刮痕的改善具有很好的效果。
根據本發明的拋光料漿組合物可包括從無機酸或無機酸鹽和有機酸或有機酸鹽形成的群中選擇的至少一個的pH調節劑,其中無機酸或無機酸鹽包括:硝酸、鹽酸、磷酸、硫酸、氫氟酸、氫溴酸、氫碘酸及上述的鹽形成的群中選擇的至少任何一個;有機酸或有機酸鹽包括:甲酸、丙二酸、馬來酸、草酸、乙酸、己二酸、檸檬酸、己二酸、乙酸、丙酸、富馬酸、乳酸、水楊酸、庚二酸、苯甲酸、琥珀酸、鄰苯二甲酸、丁酸、戊二酸、谷氨酸、乙醇酸、乳酸、天冬氨酸、酒石酸及上述的鹽形成的群中選擇的至少任何一個。
所述pH調節劑可由調整拋光料漿組合物pH的量被添加,且根據本發明的拋光料漿組合物的pH可具有3至6的pH範圍。
所述拋光料漿組合物可具有電動電位為10mV至60mV的陽電動電位。
利用所述拋光料漿組合物,拋光在覆蓋晶片(Blanket wafer)包括氧化膜和氮化膜或氧化膜和聚膜的晶片時,在覆蓋晶片(Blanket wafer)對氧化膜:氮化膜或氧化膜:聚膜的拋光選擇比可以是10:1至40:1,可具有氮化膜或聚膜自動拋光停止功能。
利用所述拋光料漿組合物,拋光在模式晶片(Pattern wafer)包括氧化膜和氮化膜或氧化膜和多晶矽膜的晶片時,在模式晶片(Pattern wafer)露出拋光停止膜時進行過度拋光評價凹陷時,氧化膜:氮化膜或氧化膜:多晶矽膜的拋光選擇比可以是1:1至5:1,優選地,是1:1至3:1。
利用所述拋光料漿組合物,拋光包括氧化膜和氮化膜或氧化膜和聚膜的晶片時,可將氧化膜由高速地拋光,且氧化膜可以是3,000Å/min以上,氮化膜或聚膜由100Å/min以下拋光。
利用所述拋光料漿組合物拋光模式晶片時,不僅在模式密度小的晶片,而且在模式密度大的晶片,也可確保高的拋光率。
利用所述拋光料漿組合物,拋光包括氧化膜和氮化膜或氧化膜和聚膜的晶片之後,具有線路/空間基準100㎛/100㎛以下模式密度的晶片的凹陷發生量可以是200Å以下,具有線路/空間基準300㎛/300㎛以上模式密度的晶片的凹陷發生量是250Å以下,且拋光後刮痕發生量可以是50ea以下。
根據本發明的一個實施例,所述拋光粒子-分散層複合體在拋光料漿組合物內,可具有高的穩定性。
根據本發明的一個實施例,陽性拋光料漿組合物包括本發明的添加劑組合物,分散穩定性優秀,且拋光包括氧化膜和氮化膜或氧化膜和多晶矽膜的晶片時,可具有高的拋光速度及平坦度,拋光之後對於物件膜的凹陷、刮痕的改善,具有很好的效果。
以下,參照下述實施例及比較例,對本發明進行詳細地說明。但是,本發明的技術思想不受限或限定於此。
在溶劑放入平均細微性為100nm大小的膠體氧化鈰拋光粒子5重量百分比,混合第一分散劑的吡啶甲酸(Picolinic acid)4重量百分比、第二分散劑的聚【雙(2-氯乙基)乙醚-鍵-1,3-雙【3-(二甲氨基)丙基】尿素】0.3重量百分比,製造拋光粒子-分散層複合體。在包括被製造的拋光粒子-分散層複合體的料漿組合物,添加硝酸,製造pH5的拋光料漿組合物。
除了不添加第二分散劑,只添加第一分散劑之外,與實施例相同的方法製造了拋光料漿組合物。
利用製造的實施例、比較例的拋光料漿組合物,以下述的拋光條件,拋光矽模式晶片。
1.拋光儀器:AP-300 (CTS 社) 2.襯墊:K7 (Rohm&Hass 社) 3.拋光時間:60s 4.桌子RPM(Table RPM):87 5.主軸RPM(Spindle RPM):93 6.流量(Flow rate):300ml/min 7.被使用的晶片:線路/空間100㎛/100㎛模式晶片,(在Si上NIT (氮化膜)1,000Å,HDP(氧化膜) 2,000Å),線路/空間300㎛/300㎛模式晶片(在Si上NIT (氮化膜)1,000Å,HDP(氧化膜) 2,000Å)。
基於模式晶片,去除初期段差之後,將氧化矽膜的段差為1,200Å至1,400Å、氮化矽膜的段差為1,000Å進行調整之後,附加進行過度拋光40s,確認凹陷程度。
以下表1利用包括本發明實施例的拋光粒子-分散層複合體的拋光用料漿組合物及比較例的拋光料漿組合物,拋光模式晶片之後,顯示的拋光率及凹陷結果。 【表1】
參照表1,只使用第一分散劑的比較例的料漿組合物的拋光率優秀,但是,在模式密度為100㎛/100㎛和300㎛/300㎛時,可知凹陷都超過了400Å。全部使用本發明的第一分散劑及第二分散劑的實施例的料漿組合物,確保高的拋光率的同時顯示優秀的凹陷性能。特別地,不僅在模式密度為100㎛/100㎛窄的地方,而且在模式密度寬度300㎛/300㎛地方,也可確認沒有偏差,優秀的凹陷結果。因此,比起比較例的拋光料漿組合物,利用包括本發明的拋光粒子-分散層複合體的實施例的拋光料漿組合物時,可知凹陷改善效果卓越。
如上述,本發明雖然由限定的實施例和圖進行了說明,但是本發明不限定於上述的實施例,且本發明的技藝人士可從這些記載進行多樣地修正及變更。因此,本發明的範圍不能被說明的實施例限定,且由後述的請求項和與此請求項均等的被決定。
無
無
國內寄存資訊 (請依寄存機構、日期、號碼順序註記) 無
國外寄存資訊 (請依寄存國家、機構、日期、號碼順序註記) 無
(請換頁單獨記載) 無
無
Claims (15)
- 一種拋光粒子-分散層複合體,其包括:拋光粒子;第一分散劑,所述第一分散劑為有機酸陽離子性化合物,其中所述有機酸包含基於氨基酸的化合物;第二分散劑,所述第二分散劑在分子式內包括兩個以上被離子化陽離子的陽離子性聚合物,其中所述陽離子性聚合物包括由陽離子活性的兩個以上的氮;及第三分散劑,所述第三分散劑為具有陰電荷的陰離子性化合物且包括從具有共振結構官能團的共聚物、含有二羧基的聚合物及含有二羧基的有機酸形成的群中選擇的至少任何一個;其中在所述拋光粒子-分散層複合體內,包括0.1重量百分比至10重量百分比的所述第一分散劑,其中在所述拋光粒子-分散層複合體內,包括0.01重量百分比至5重量百分比的所述第二分散劑,以及其中在所述拋光粒子-分散層複合體內,包括0.01重量百分比至5重量百分比的所述第三分散劑。
- 根據請求項1之拋光粒子-分散層複合體,其特徵為,所述拋光粒子和所述第一分散劑的結合,及所述第一分散劑和第二分散劑的結合是化學結合。
- 根據請求項1之拋光粒子-分散層複合體,其特徵為,所述拋光粒子表面、所述第一分散劑及第二分散劑顯示陽電荷。
- 根據請求項1之拋光粒子-分散層複合體,其特徵為,所述拋光粒子-分散層複合體還包括:非離子性化合物,從聚乙二醇、聚丙二醇、乙烯丙烯共聚物、聚烷基氧化物、聚氧化乙烯、聚環氧乙烷、聚環氧丙烷、聚乙烯吡咯烷酮、聚氧乙烯烷基醚、聚乙二醇烷基酯、聚氧乙烯醚、聚乙二醇磺酸、聚乙烯醇、聚氧化乙烯十二烷基醚、聚氧化乙烯十六醚、聚氧化乙烯油基醚、聚氧化乙烯去水山梨醇月桂酸酯及聚氧化乙烯苯基醚形成的群中選擇的至少任何一個。
- 根據請求項4之拋光粒子-分散層複合體,其特徵為,在所述拋光粒子-分散層複合體內包括0.001重量百分比至1重量百分比的所述非離子性化合物。
- 根據請求項1之拋光粒子-分散層複合體,其特徵為,所述拋光粒子包括:從金屬氧化物、有機物或無機物被塗層的金屬氧化物,及膠體狀態的所述金屬氧化物形成的群中選擇的至少任何一個,且所述金屬氧化物包括: 從二氧化矽、二氧化鈰、氧化鋯、氧化鋁、二氧化鈦、鋇二氧化鈦、氧化鍺、氧化錳及氧化鎂形成的群中選擇的至少任何一個。
- 根據請求項1之拋光粒子-分散層複合體,其特徵為,所述拋光粒子的直徑是10nm至3OOnm。
- 根據請求項1之拋光粒子-分散層複合體,其特徵為,所述拋光粒子在所述拋光粒子-分散層複合體中是0.1重量百分比至10重量百分比。
- 根據請求項1之拋光粒子-分散層複合體,其特徵為,所述拋光粒子由液態法製造,使粒子表面具有陽電荷被分散。
- 一種拋光料漿組合物,其包括根據請求項1至9中所述的任何一項的拋光粒子-分散層複合體。
- 根據請求項10之拋光料漿組合物,其特徵為,所述拋光料漿組合物的pH是3至6。
- 根據請求項10之拋光料漿組合物,其特徵為,所述拋光料漿組合物的電動電位是10mV至60mV。
- 根據請求項10之拋光料漿組合物,其特徵為,利用所述拋光料漿組合物,拋光在覆蓋晶片包括的氧化膜和氮化膜或氧化膜和聚膜的晶片時,對氧化 膜:氮化膜或氧化膜:聚膜的拋光選擇比是10:1至40:1。
- 根據請求項10之拋光料漿組合物,其特徵為,利用所述拋光料漿組合物,拋光在模式晶片包括氧化膜和氮化膜或氧化膜和多晶矽膜的晶片時,對氧化膜:氮化膜或氧化膜:多晶矽膜的拋光選擇比是1:1至5:1。
- 根據請求項10之拋光料漿組合物,其特徵為,利用所述拋光料漿組合物,拋光包括氧化膜和氮化膜或氧化膜和聚膜的晶片之後,具有線路/空間基準100㎛/100㎛以下模式密度的晶片的凹陷發生量是200Å以下,具有線路/空間基準300㎛/300㎛以上模式密度的晶片的凹陷發生量是250Å以下。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150186156A KR20170076191A (ko) | 2015-12-24 | 2015-12-24 | 연마입자-분산층 복합체 및 그를 포함하는 연마 슬러리 조성물 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201723137A TW201723137A (zh) | 2017-07-01 |
TWI609076B true TWI609076B (zh) | 2017-12-21 |
Family
ID=59088320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW105142619A TWI609076B (zh) | 2015-12-24 | 2016-12-22 | 拋光粒子-分散層複合體及包括其之拋光漿料組合物 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10421883B2 (zh) |
KR (1) | KR20170076191A (zh) |
CN (1) | CN106987209A (zh) |
TW (1) | TWI609076B (zh) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109251676B (zh) * | 2017-07-13 | 2021-07-30 | 安集微电子科技(上海)股份有限公司 | 一种化学机械抛光液 |
CN109251673A (zh) * | 2017-07-13 | 2019-01-22 | 安集微电子科技(上海)股份有限公司 | 一种化学机械抛光液 |
CN109251674B (zh) * | 2017-07-13 | 2021-12-17 | 安集微电子科技(上海)股份有限公司 | 一种化学机械抛光液 |
CN109251672B (zh) * | 2017-07-13 | 2022-02-18 | 安集微电子科技(上海)股份有限公司 | 一种化学机械抛光液 |
US10711158B2 (en) * | 2017-09-28 | 2020-07-14 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Aqueous silica slurry and amine carboxylic acid compositions for use in shallow trench isolation and methods of using them |
KR20200032601A (ko) * | 2018-09-18 | 2020-03-26 | 주식회사 케이씨텍 | 연마용 슬러리 조성물 |
KR20200057374A (ko) * | 2018-11-16 | 2020-05-26 | 주식회사 케이씨텍 | 연마 슬러리 조성물 및 그의 제조방법 |
KR102164777B1 (ko) * | 2018-12-21 | 2020-10-14 | 주식회사 케이씨텍 | 연마 슬러리 조성물 |
KR102279324B1 (ko) * | 2018-12-21 | 2021-07-21 | 주식회사 케이씨텍 | 연마 슬러리 조성물 |
US10676647B1 (en) * | 2018-12-31 | 2020-06-09 | Cabot Microelectronics Corporation | Composition for tungsten CMP |
WO2020170331A1 (ja) * | 2019-02-19 | 2020-08-27 | 日立化成株式会社 | 研磨液及び研磨方法 |
CN114599750A (zh) * | 2019-10-22 | 2022-06-07 | Cmc材料股份有限公司 | 用于硅氧化物和碳掺杂的硅氧化物的化学机械抛光的组合物及方法 |
KR102316237B1 (ko) * | 2019-12-19 | 2021-10-25 | 주식회사 케이씨텍 | 멀티선택비 구현이 가능한 연마용 슬러리 조성물 |
CN115725241B (zh) * | 2022-11-17 | 2024-05-03 | 万华化学集团电子材料有限公司 | 一种多晶硅抛光组合物及其应用 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101065458A (zh) * | 2004-11-05 | 2007-10-31 | 卡伯特微电子公司 | 用于高的氮化硅对氧化硅去除速率比率的抛光组合物及方法 |
CN102017091A (zh) * | 2008-04-23 | 2011-04-13 | 日立化成工业株式会社 | 研磨剂及使用该研磨剂的基板研磨方法 |
TW201211223A (en) * | 2010-09-08 | 2012-03-16 | Basf Se | Aqueous polishing composition and process for chemically mechanically polishing substrate matetials for electrical, mechanical and optical devices |
CN103492519A (zh) * | 2011-04-15 | 2014-01-01 | 嘉柏微电子材料股份公司 | 用于选择性抛光氮化硅材料的组合物及方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6589100B2 (en) * | 2001-09-24 | 2003-07-08 | Cabot Microelectronics Corporation | Rare earth salt/oxidizer-based CMP method |
US6866793B2 (en) * | 2002-09-26 | 2005-03-15 | University Of Florida Research Foundation, Inc. | High selectivity and high planarity dielectric polishing |
US7044836B2 (en) * | 2003-04-21 | 2006-05-16 | Cabot Microelectronics Corporation | Coated metal oxide particles for CMP |
CN101831243A (zh) * | 2010-04-30 | 2010-09-15 | 中国计量学院 | 高精密非水基纳米级金刚石研磨液、制备方法及用途 |
-
2015
- 2015-12-24 KR KR1020150186156A patent/KR20170076191A/ko not_active Application Discontinuation
-
2016
- 2016-12-20 CN CN201611186960.7A patent/CN106987209A/zh active Pending
- 2016-12-21 US US15/386,502 patent/US10421883B2/en active Active
- 2016-12-22 TW TW105142619A patent/TWI609076B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101065458A (zh) * | 2004-11-05 | 2007-10-31 | 卡伯特微电子公司 | 用于高的氮化硅对氧化硅去除速率比率的抛光组合物及方法 |
CN102017091A (zh) * | 2008-04-23 | 2011-04-13 | 日立化成工业株式会社 | 研磨剂及使用该研磨剂的基板研磨方法 |
TW201211223A (en) * | 2010-09-08 | 2012-03-16 | Basf Se | Aqueous polishing composition and process for chemically mechanically polishing substrate matetials for electrical, mechanical and optical devices |
CN103492519A (zh) * | 2011-04-15 | 2014-01-01 | 嘉柏微电子材料股份公司 | 用于选择性抛光氮化硅材料的组合物及方法 |
Also Published As
Publication number | Publication date |
---|---|
US10421883B2 (en) | 2019-09-24 |
KR20170076191A (ko) | 2017-07-04 |
TW201723137A (zh) | 2017-07-01 |
CN106987209A (zh) | 2017-07-28 |
US20170183539A1 (en) | 2017-06-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI609076B (zh) | 拋光粒子-分散層複合體及包括其之拋光漿料組合物 | |
TWI657130B (zh) | Additive composition and positive polishing slurry composition comprising the same | |
KR102298256B1 (ko) | 연마용 조성물, 연마 방법 및 기판의 제조 방법 | |
CN102627914B (zh) | 研磨剂、浓缩一液式研磨剂、二液式研磨剂、基板研磨法 | |
TW201720885A (zh) | 拋光粒子-分散層複合體及包括此的拋光料漿組合物 | |
TW200936736A (en) | Polishing composition | |
TW201518489A (zh) | 硏磨劑、硏磨劑組及基體的硏磨方法 | |
WO2008025208A1 (fr) | Suspension épaisse de polissage à abrasifs mélangés pour matériau faiblement diélectrique | |
KR20200082046A (ko) | 연마용 슬러리 조성물 | |
KR20180071631A (ko) | 다결정실리콘을 함유하는 웨이퍼의 연마 슬러리 조성물 | |
TW201602001A (zh) | 矽酸膠及含有其之半導體晶圓硏磨用組成物 | |
KR101737943B1 (ko) | 질화막 연마용 슬러리 조성물 | |
TW202020104A (zh) | 拋光漿料組合物及其製備方法 | |
CN113195659A (zh) | 抛光浆料组合物 | |
KR20200061796A (ko) | 높은 연마속도 및 선택비를 구현하는 연마용 슬러리 조성물 | |
KR20170076058A (ko) | 연마입자-분산층 복합체 및 그를 포함하는 연마 슬러리 조성물 | |
KR20190068806A (ko) | Cmp용 슬러리 조성물 | |
KR102275429B1 (ko) | Cmp용 슬러리 조성물 및 이에 포함된 연마입자 | |
KR101524626B1 (ko) | 자동연마정지 기능 cmp 슬러리 조성물 | |
KR20190080620A (ko) | Cmp용 슬러리 조성물 | |
TWI792315B (zh) | 化學機械研磨用組成物及研磨方法 | |
KR101406760B1 (ko) | 연마 슬러리 및 이를 이용하여 기판 또는 웨이퍼를 연마하는 방법 | |
KR101797746B1 (ko) | 연마입자-분산층 복합체 및 그를 포함하는 연마 슬러리 조성물 | |
KR20190139568A (ko) | Cmp용 슬러리 조성물 | |
KR101406759B1 (ko) | 연마 슬러리 및 이를 이용한 기판 또는 웨이퍼를 연마하는 방법 |