TWI601567B - Filter medium and filter unit - Google Patents

Filter medium and filter unit Download PDF

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TWI601567B
TWI601567B TW102136184A TW102136184A TWI601567B TW I601567 B TWI601567 B TW I601567B TW 102136184 A TW102136184 A TW 102136184A TW 102136184 A TW102136184 A TW 102136184A TW I601567 B TWI601567 B TW I601567B
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filter
filter medium
filter material
portions
thickness
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TW102136184A
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TW201422299A (en
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森將明
堀江百合
新井雅弘
內山志穗
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日東電工股份有限公司
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  • Filtering Of Dispersed Particles In Gases (AREA)

Description

過濾濾材及過濾單元 Filter filter and filter unit 技術領域 Technical field

本發明是有關於一種捕集包含於被過濾氣體之粒子的過濾濾材及使用該過濾濾材之過濾單元,特別是有關於一種構成為將可捕集該粒子之濾材原料褶襉加工者。 The present invention relates to a filter medium for collecting particles contained in a gas to be filtered, and a filter unit using the filter medium, and more particularly to a filter material which is configured to pleat a filter material which can collect the particles.

背景技術 Background technique

迄今,作為於製造半導體或液晶之工廠之無塵室等使用的過濾濾材,已知的是如圖6所示之過濾濾材100。該過濾濾材100構成為:構成為可捕集包含於被過濾氣體之粒子的濾材原料200於複數處彎折而形成為褶狀。 Heretofore, as the filter medium used in a clean room or the like for manufacturing a semiconductor or liquid crystal factory, a filter medium 100 as shown in Fig. 6 is known. The filter medium 100 is configured such that the filter material 200 that can collect the particles contained in the gas to be filtered is bent at a plurality of points to form a pleat shape.

前述過濾濾材100具備:彎折部100a,是濾材原料200彎折而形成;複數個平板部100b,是濾材原料200中除了彎折部100a以外之領域配置成對向而形成;及複數個間隔保持部300,是保持相鄰之平板部100b、100b彼此之間隔。 The filter medium 100 includes a bent portion 100a formed by bending a filter material 200, and a plurality of flat portions 100b formed in a direction other than the bent portion 100a of the filter material 200 to be opposed to each other; and a plurality of intervals The holding portion 300 is a space in which the adjacent flat plate portions 100b and 100b are kept apart from each other.

該間隔保持部300是藉由於濾材原料200之兩面隔著間隔塗布接著劑(熱熔膠等)而形成的複數個卷邊部300a所形成。具體而言,間隔保持部300是藉由於濾材原料 200之一面側及他面側中的各平板部100b間分別接合一面側及他面側之卷邊部300a、300a而形成。即,間隔保持部300形成於濾材原料200之一面側及他面側中的各平板部100b間。 The space holding portion 300 is formed by a plurality of curling portions 300a formed by applying an adhesive (hot melt adhesive or the like) to the both surfaces of the filter material 200 at intervals. Specifically, the interval maintaining portion 300 is made of a filter material The one side surface side of each of the 200 side faces and the other flat side parts 100b are formed by joining the bead portions 300a and 300a on the one side and the other side. That is, the space holding portion 300 is formed between the flat plate portions 100b on one of the surface side of the filter material 200 and the other side.

如圖7(a)所示,如前述般構成的過濾濾材100會收納於構成為可收納過濾濾材之框體A內而構成過濾單元110。該框體A具備:一對對向壁A1、A1,其配置成隔著間隔對向;及連結壁A2,其連結該一對對向壁A1、A1之外周部彼此。又,構成為可將過濾濾材1收納於藉由一對對向壁A1、A1與連結壁A2所包圍的空間(以下亦記作內部空間)AR。一對對向壁A1、A1具備與內部空間AR連通之開口部A3、A3。藉此,框體A會構成為被過濾氣體可自一開口部A3側朝另一開口部A3側通過內部空間AR。 As shown in Fig. 7 (a), the filter medium 100 configured as described above is housed in a casing A that is configured to accommodate the filter medium, and constitutes the filter unit 110. The frame A includes a pair of opposing walls A1 and A1 that are disposed to face each other with a gap therebetween, and a connecting wall A2 that connects the outer peripheral portions of the pair of opposing walls A1 and A1. Further, the filter medium 1 can be housed in a space (hereinafter also referred to as an internal space) AR surrounded by the pair of opposing walls A1 and A1 and the connecting wall A2. The pair of opposing walls A1 and A1 include openings A3 and A3 that communicate with the internal space AR. Thereby, the casing A is configured such that the filtered gas can pass through the internal space AR from the one opening A3 side toward the other opening A3 side.

收納於框體A之過濾濾材100配置於內部空間AR中的一對向壁A1側,且外周部固定於框體A。藉此,於過濾濾材100與另一對向壁A1間形成間隔。 The filter medium 100 accommodated in the frame A is disposed on the side of the pair of facing walls A1 in the internal space AR, and the outer peripheral portion is fixed to the frame A. Thereby, a space is formed between the filter medium 100 and the other opposing wall A1.

如前述般構成的過濾單元110配置成過濾濾材100之長度L1方向與被過濾氣體之流通方向F交叉(具體而言為略呈正交)。即,過濾單元110配置成被過濾氣體自過濾濾材100之高度L3方向與過濾濾材100接觸。藉此,自框體A之一開口部A3流入過濾單元110之內部的被過濾氣體會在內部空間AR透過過濾濾材100而自框體A之另一開口部A3排出。 The filter unit 110 configured as described above is disposed such that the length L1 direction of the filter medium 100 intersects with the flow direction F of the filtered gas (specifically, it is slightly orthogonal). That is, the filter unit 110 is disposed such that the filtered gas comes into contact with the filter medium 100 from the height L3 direction of the filter medium 100. Thereby, the filtered gas that has flowed into the inside of the filter unit 110 from the opening A3 of one of the frames A passes through the filter medium 100 in the internal space AR, and is discharged from the other opening A3 of the frame A.

故,若使被過濾氣體於過濾單元110流通,則因 被過濾氣體之風壓或過濾濾材100之壓力損失之上升,如圖7(b)所示,過濾濾材100之中央部會朝被過濾氣體之流通方向F之下游側膨出,並有過濾濾材100構成彎曲狀態之虞。 Therefore, if the filtered gas is circulated through the filter unit 110, As shown in Fig. 7(b), the wind pressure of the filtered gas or the pressure loss of the filter medium 100 increases, and the central portion of the filter medium 100 bulges toward the downstream side of the flow direction F of the filtered gas, and has a filter medium. 100 constitutes the state of the bending state.

此種過濾濾材100之彎曲會成為使過濾單元之壓力損失增加或使過濾效率降低之主要原因。又,若過濾濾材100之彎曲過大,則亦會有過濾單元110產生破損之情形。 The bending of such a filter medium 100 is a factor that increases the pressure loss of the filter unit or reduces the filtration efficiency. Moreover, if the bending of the filter medium 100 is too large, the filter unit 110 may be damaged.

作為防止如前述過濾濾材之彎曲之方法,目前揭示有各種方法。舉例言之,目前揭示有一種方法,其藉由減低構成過濾濾材之過濾原料之初期之壓力損失,或使過濾濾材之有效面積增加,減低過濾濾材經久之壓力損失之上升,並抑制因風壓而產生的過濾濾材之彎曲(參照專利文獻1)。又,目前揭示有一種方法,其將剛性高於過濾濾材之構件(以下亦記作剛性構件)安裝於過濾濾材,並藉由該剛性構件,抑制過濾濾材之彎曲(參照專利文獻2及3)。 As a method of preventing the bending of the filter medium as described above, various methods are currently disclosed. For example, a method has been disclosed which reduces the initial pressure loss of the filter material constituting the filter media or increases the effective area of the filter media, reduces the increase in pressure loss of the filter media over time, and suppresses wind pressure. The resulting filter medium is bent (see Patent Document 1). Further, there has been disclosed a method of attaching a member having a higher rigidity than a filter medium (hereinafter also referred to as a rigid member) to a filter medium, and suppressing bending of the filter medium by the rigid member (see Patent Documents 2 and 3) .

然而,在如前述般減低過濾濾材經久之壓力損失之上升之方法中,會有來自被過濾氣體之粒子之捕集性能降低之虞。又,在如前述般使用剛性構件之方法中,耗費用以準備剛性構件之成本,同時製作過濾濾材或過濾單元時費事,並成為生產效率降低之主要原因。 However, in the method of reducing the increase in the pressure loss of the filter medium for a long period of time as described above, there is a possibility that the collection performance of the particles from the filtered gas is lowered. Further, in the method of using a rigid member as described above, it takes a lot of trouble to prepare a filter medium or a filter unit at the cost of preparing a rigid member, and it is a cause of a decrease in production efficiency.

先行技術文獻 Advanced technical literature 專利文獻 Patent literature

[專利文獻1]日本專利公開公報特開2002-292215號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2002-292215

[專利文獻2]特開平11-42410號公報 [Patent Document 2] Japanese Patent Publication No. 11-42410

[專利文獻3]國際公開第2005/077492號說明書 [Patent Document 3] International Publication No. 2005/077492

發明概要 Summary of invention

故,本發明之課題在提供一種可防止因被過濾氣體之風壓而無意地變形之過濾濾材及使用該過濾濾材之過濾單元。 Therefore, an object of the present invention is to provide a filter medium which can prevent unintentional deformation due to the wind pressure of a filtered gas, and a filter unit using the filter medium.

有關本發明之過濾濾材具備:複數個彎折部,是可捕集包含於被過濾氣體之粒子的濾材原料彎折成褶狀而形成;複數個平板部,是濾材原料中除了彎折部以外之領域配置成對向而形成;及複數個間隔保持部,是形成於濾材原料之一面側及他面側中的各平板部間而保持相鄰之彎折部彼此之間隔;又,前述過濾濾材構成為在形成於前述濾材原料之兩面的間隔保持部中,形成於濾材原料之他面側的他面側間隔保持部之厚度比形成於濾材原料之一面側的一面側間隔保持部之厚度薄。 The filter medium according to the present invention includes a plurality of bent portions formed by folding a material of the filter material contained in the particles of the gas to be filtered into a pleat shape, and a plurality of flat plate portions are other than the bent portion of the filter material. The field is arranged to be opposed to each other; and the plurality of interval holding portions are formed between the flat plate portions on one of the surface side of the filter material and the other side of the filter material to maintain the interval between the adjacent bent portions; The filter medium is configured such that the thickness of the surface-side spacer portion formed on the other side of the filter material is larger than the thickness of the one-side spacer formed on the one surface side of the filter material in the gap holding portion formed on both surfaces of the filter material. thin.

若藉由前述構造,則濾材原料之他面側中的平板部彼此之間隔會比濾材原料之一面側中的平板部彼此之間隔窄。故,相較於過濾濾材之長度方向之兩端部,中央側之領域容易朝濾材原料之一面側膨出,且容易使過濾濾材彎曲。依此,藉由於彎曲狀態下使用過濾濾材,可抑制過濾濾材因被過濾氣體之風壓而變形。 According to the above configuration, the interval between the flat portions in the other side of the filter material is narrower than the interval between the flat portions on the one side of the filter material. Therefore, compared with the both ends of the longitudinal direction of the filter media, the field on the center side is likely to bulge toward the surface side of the filter material, and the filter medium is easily bent. Accordingly, by using the filter medium in a bent state, it is possible to suppress the filter medium from being deformed by the wind pressure of the filtered gas.

具體而言,藉由使過濾濾材如前述般彎曲,相對 於自過濾濾材之中央側之領域膨出側施加於過濾濾材之風壓,過濾濾材之剛性會提高。故,可抑制因風壓所造成的過濾濾材之變形。 Specifically, by bending the filter media as described above, The wind pressure applied to the filter media on the bulging side of the center side of the filter media is increased, and the rigidity of the filter media is increased. Therefore, deformation of the filter media due to wind pressure can be suppressed.

又,前述間隔保持部宜藉由於濾材原料之一面配置接著劑而形成的一面側卷邊部及於濾材原料之他面配置接著劑而形成的他面側卷邊部各自於平板部間接合而形成,並構成為他面側卷邊部中形成間隔保持部之部位之厚度比前述一面側卷邊部中形成間隔保持部之部位之厚度薄。 Moreover, it is preferable that the space-retaining portion is formed by a one-side bead portion formed by disposing an adhesive on one surface of the filter material and a side-side bead portion formed by disposing an adhesive on the other side of the filter material. The thickness of the portion where the space holding portion is formed in the side curling portion is formed to be thinner than the thickness of the portion where the space holding portion is formed in the one side curling portion.

若藉由前述構造,則形成為他面側間隔保持部之厚度比一面側間隔保持部之厚度薄。藉此,容易使過濾濾材如前述般彎曲而使用,且可抑制過濾濾材因風壓所造成的變形。 According to the above configuration, the thickness of the face-side spacer portion is made thinner than the thickness of the one-side spacer portion. Thereby, it is easy to use the filter media as described above, and it is possible to suppress deformation of the filter media due to wind pressure.

又,前述一面側卷邊部中形成間隔保持部之部位之厚度宜為他面側卷邊部中形成間隔保持部之部位之厚度之20%以上、80%以下。 Moreover, it is preferable that the thickness of the portion in which the space holding portion is formed in the one side curling portion is 20% or more and 80% or less of the thickness of the portion where the space holding portion is formed in the side curling portion.

有關本發明之過濾單元是構成為於收納如前述中任一者之過濾濾材之框體收納該過濾濾材,又,前述框體具備使被過濾氣體流入內部之開口部,且前述過濾濾材彎曲成相較於長向之兩端部,中央側之領域會位於前述開口部側而收納於框體。 In the filter unit of the present invention, the filter medium is accommodated in a housing that accommodates the filter medium according to any one of the above, and the frame body has an opening that allows the filtered gas to flow into the inside, and the filter medium is bent into The field on the center side is located on the side of the opening and is housed in the frame, compared to the both ends of the long direction.

如前述,若藉由本發明,則可防止因被過濾氣體之風壓而無意地變形。 As described above, according to the present invention, it is possible to prevent unintentional deformation due to the wind pressure of the filtered gas.

1,100‧‧‧過濾濾材 1,100‧‧‧Filter media

1a,100a‧‧‧彎折部 1a, 100a‧‧‧bend

1b,100b‧‧‧平板部 1b, 100b‧‧‧ flat section

2,200‧‧‧濾材原料 2,200‧‧‧ Filter material

2a‧‧‧多孔質層 2a‧‧‧Porous layer

2b‧‧‧基材層 2b‧‧‧ substrate layer

3A‧‧‧一面側間隔保持部 3A‧‧‧One side spacer

3B‧‧‧他面側間隔保持部 3B‧‧‧He side interval keeping

3a‧‧‧一面側卷邊部 3a‧‧‧One side curling

3a’,3b’,300a‧‧‧卷邊部 3a’, 3b’, 300a‧‧‧ hem

3b‧‧‧他面側卷邊部 3b‧‧‧He side curling

10,110‧‧‧過濾單元 10,110‧‧‧Filter unit

300‧‧‧間隔保持部 300‧‧‧Interval Maintenance Department

A,X‧‧‧框體 A, X‧‧‧ frame

A1‧‧‧彎折預定領域 A1‧‧‧Bound booking area

A1(習知),X1‧‧‧對向壁 A1 (conventional), X1‧‧‧ opposite wall

A2‧‧‧平板部預定領域 A2‧‧‧Scheduled area

A2(習知),X2‧‧‧連結壁 A2 (conventional), X2‧‧‧ connecting wall

A3,X3‧‧‧開口部 A3, X3‧‧‧ openings

AR,XR‧‧‧內部空間 AR, XR‧‧‧ interior space

F‧‧‧流通方向 F‧‧‧Circulation direction

L1‧‧‧長度 L1‧‧‧ length

L2‧‧‧寬度 L2‧‧‧Width

L3‧‧‧高度 L3‧‧‧ Height

XL1‧‧‧間隔 XL1‧‧ interval

圖1是顯示有關本實施形態之過濾濾材之透視圖。 Fig. 1 is a perspective view showing a filter medium according to the embodiment.

圖2是顯示有關同實施形態之過濾濾材之濾材原料之透視圖及其局部放大圖。 Fig. 2 is a perspective view showing a material of a filter material relating to a filter medium of the same embodiment and a partial enlarged view thereof.

圖3(a)是將同實施形態之過濾濾材沿著高度方向在與平板部交叉之面切斷之截面圖,(b)是將過濾濾材在沿著長度方向及寬度方向之面切斷之截面圖。 Fig. 3 (a) is a cross-sectional view showing the filter medium of the embodiment cut along the surface intersecting the flat plate portion in the height direction, and (b) the filter medium is cut along the longitudinal direction and the width direction. Sectional view.

圖4是使用有關同實施形態之過濾濾材而構成的過濾單元之截面圖。 Fig. 4 is a cross-sectional view showing a filter unit constructed using the filter medium of the same embodiment.

圖5是顯示有關其他實施形態之過濾濾材之間隔保持部之截面圖。 Fig. 5 is a cross-sectional view showing a gap holding portion of a filter medium according to another embodiment.

圖6是顯示習知過濾濾材之透視圖。 Figure 6 is a perspective view showing a conventional filter media.

圖7(a)是構成為於框體收納圖6之過濾濾材之過濾單元之截面圖,(b)是顯示被過濾氣體之風壓施加於(a)之過濾單元且過濾濾材彎曲之狀態之截面圖。 Fig. 7 (a) is a cross-sectional view of a filter unit configured to accommodate the filter medium of Fig. 6 in a frame, and Fig. 7 (b) is a view showing a state in which the wind pressure of the filtered gas is applied to the filter unit of (a) and the filter medium is bent. Sectional view.

用以實施發明之形態 Form for implementing the invention

以下,參照圖1~4,說明本發明之實施形態。另,於以下之圖式中,相同或相當之部分會附上相同之參照符號且不重複其說明。 Hereinafter, embodiments of the present invention will be described with reference to Figs. In the following figures, the same or corresponding parts will be denoted by the same reference numerals and the description will not be repeated.

如圖1所示,有關本實施形態之過濾濾材1具備:複數個彎折部1a,是構成為可捕集包含於被過濾氣體之粒子的濾材原料2彎折成褶狀(以下亦記作褶襉加工)而形成; 複數個平板部1b,是濾材原料2中除了彎折部1a以外之領域配置成對向而形成;及複數個間隔保持部3A、3B,是形成於濾材原料2之一面側及他面側中的各平板部1b間而保持相鄰之彎折部1a、1a彼此之間隔。 As shown in Fig. 1, the filter medium 1 of the present embodiment includes a plurality of bent portions 1a, and is configured such that the filter material 2 that can collect the particles contained in the gas to be filtered is bent into a pleat shape (hereinafter also referred to as Formed by pleating; The plurality of flat plate portions 1b are formed such that the filter material 2 is disposed in a direction other than the bent portion 1a, and the plurality of the interval holding portions 3A and 3B are formed on one surface side and the other side of the filter material 2; Between the flat plate portions 1b, the adjacent bent portions 1a, 1a are spaced apart from each other.

前述濾材原料2在彎折成褶狀前之狀態下,如圖2所示,形成為一方向構成長方形之片狀。另,濾材原料2亦可形成為長條狀而一方向構成長方形,並構成為藉由自捲繞狀態開捲而構成片狀,且亦可為形成為片狀而一方向構成長方形之單片體。 As shown in FIG. 2, the filter material 2 is formed into a rectangular sheet shape in one direction before being bent into a pleated shape. Further, the filter material 2 may be formed in a long shape and formed into a rectangular shape in one direction, and may be formed into a sheet shape by being unwound from a wound state, or may be formed into a sheet shape and formed into a rectangular piece in one direction. body.

又,濾材原料2具備:多孔質層2a,其捕集包含於被過濾氣體之粒子;及基材層2b,其具有通氣性,並積層於該多孔質層2a。於本實施形態中,濾材原料2具備複數個(具體而言為2層)多孔質層2a,且於多孔質層2a彼此間配置基材層2b。依此,藉由使用複數個多孔質層2a而形成濾材原料2,相較於由單一之多孔質層2a形成濾材原料2之情形,可抑制壓力損失或捕集效率產生誤差。又,由於可抑制形成像是貫通濾材原料2之針孔,因此,可獲得不滲漏之結構之濾材原料2。 Further, the filter material 2 includes a porous layer 2a that collects particles contained in the gas to be filtered, and a base layer 2b that has air permeability and is laminated on the porous layer 2a. In the present embodiment, the filter material 2 has a plurality of (specifically, two) porous layers 2a, and the base layer 2b is disposed between the porous layers 2a. According to this, the filter material 2 is formed by using the plurality of porous layers 2a, and the pressure loss or the collection efficiency is suppressed from being caused by the formation of the filter material 2 from the single porous layer 2a. Further, since it is possible to suppress the formation of pinholes that penetrate the filter material 2, it is possible to obtain the filter material 2 having a structure that does not leak.

前述多孔質層2a是使用可捕集前述粒子之多孔質之片材(以下亦記作多孔質片)而形成。該多孔質片並無特殊之限制,可按照過濾濾材1之用途適當地選擇。舉例言之,該多孔質片可列舉如:將聚四氟乙烯(PTFE)形成為片狀之PTFE片;或熔噴不織布、靜電濾網或玻璃纖維等。於本實施形態中,使用PTFE片作為多孔質片。形成PTFE片之 方法例如可採用下述方法。 The porous layer 2a is formed using a porous sheet (hereinafter also referred to as a porous sheet) capable of collecting the particles. The porous sheet is not particularly limited and may be appropriately selected depending on the use of the filter medium 1. For example, the porous sheet may, for example, be a PTFE sheet in which polytetrafluoroethylene (PTFE) is formed into a sheet shape; or a melt blown nonwoven fabric, an electrostatic sieve, or a glass fiber. In the present embodiment, a PTFE sheet is used as the porous sheet. Forming a PTFE sheet The method can, for example, adopt the following method.

具體而言,於PTFE細粉添加液狀潤滑劑而形成糊狀混合物。PTFE細粉並無特殊之限制,舉例言之,可列舉如:Polyflon F-104(大金工業公司製)、Fluon CD-123(旭.ICI氟聚合物公司製)、Teflon 6J(三井.杜邦氟化學公司製)等。液狀潤滑劑並無特殊之限制,只要是可賦予混合物表面適度之潤濕性者即可,若為可藉由萃取處理或加熱處理除去者,則特別理想。舉例言之,除了液態石蠟、石腦油、白油、甲苯、二甲苯等之烴油外,液狀潤滑劑可列舉如:醇類、酮類、酯類及該等之2種以上之混合物等。液狀潤滑劑之添加量並無特殊之限制,可依照PTFE細粉及液狀潤滑劑之種類、獲得PTFE片時之成形方法適當地調整。具體而言,液狀潤滑劑之添加量宜相對於PTFE細粉100質量份而為5質量份以上、50質量份以下。 Specifically, a liquid lubricant is added to the PTFE fine powder to form a paste mixture. The PTFE fine powder is not particularly limited, and examples thereof include Polyflon F-104 (manufactured by Daikin Industries, Ltd.), Fluon CD-123 (made by Asahi ICI Fluoropolymer Co., Ltd.), and Teflon 6J (Mitsui. DuPont). Fluorine chemical company) and so on. The liquid lubricant is not particularly limited as long as it imparts moderate wettability to the surface of the mixture, and is particularly preferably removed by extraction treatment or heat treatment. For example, in addition to the hydrocarbon oil such as liquid paraffin, naphtha, white oil, toluene, xylene, etc., the liquid lubricant may, for example, be an alcohol, a ketone, an ester, or a mixture of two or more thereof. Wait. The amount of the liquid lubricant to be added is not particularly limited, and can be appropriately adjusted depending on the type of the PTFE fine powder and the liquid lubricant, and the molding method for obtaining the PTFE sheet. Specifically, the amount of the liquid lubricant to be added is preferably 5 parts by mass or more and 50 parts by mass or less based on 100 parts by mass of the PTFE fine powder.

又,由PTFE細粉及液狀潤滑劑所構成的前述混合物會預備成形而製作預備成形體。具體而言,藉由使前述混合物押出成形為棒狀,製作預備成形體。前述預備成形宜藉由液狀潤滑劑不會自混合物分離之程度之壓力進行。 Further, the mixture of the PTFE fine powder and the liquid lubricant is preliminarily molded to prepare a preliminary molded body. Specifically, a preliminary molded body is produced by extruding the mixture into a rod shape. The preliminary preparation is preferably carried out by a pressure at which the liquid lubricant does not separate from the mixture.

其次,所獲得之預備成形體會藉由押出成形或壓延成形而成形為片狀。舉例言之,該預備成形體成形為片狀之方法可列舉如:藉由使預備成形體供給至一對輥構件間並壓延,使預備成形體形成為片狀之方法;預備成形體押出成形為片狀之方法;或藉由使業已押出成形為片狀之 預備成形體進一步地供給至一對輥間並壓延,使預備成形體形成為片狀之方法等。所獲得之片狀成形體之厚度並無特殊之限制,舉例言之,宜為0.05mm以上、0.5mm以下。 Next, the obtained preliminary formed body is formed into a sheet shape by extrusion molding or calender molding. For example, the method of forming the preliminary molded body into a sheet shape may be a method in which a preliminary molded body is formed into a sheet shape by supplying a preliminary molded body between a pair of roll members and rolling, and the preliminary formed body is formed into a sheet shape. a sheet-like method; or by forming a sheet into a sheet The preliminary molded body is further supplied to a pair of rolls and rolled, and the preliminary molded body is formed into a sheet shape or the like. The thickness of the sheet-like formed body obtained is not particularly limited, and is preferably 0.05 mm or more and 0.5 mm or less, for example.

其次,所獲得之片狀成形體會藉由單軸延伸或雙軸延伸而多孔質化,並形成PTFE片。於本實施形態中,片狀成形體會沿著長向延伸,同時亦沿著與長向呈正交之寬度方向延伸(雙軸延伸)。另,於片狀成形體延伸前,宜自該成形體除去液狀潤滑劑。液狀潤滑劑之除去可採用加熱該成形體之方法(加熱法),或使該成形體浸漬於溶劑中而萃取液狀潤滑劑之方法(萃取法)等。 Next, the obtained sheet-like formed body is made porous by uniaxial stretching or biaxial stretching, and a PTFE sheet is formed. In the present embodiment, the sheet-like formed body extends in the longitudinal direction and also extends in the width direction orthogonal to the longitudinal direction (biaxially extending). Further, it is preferred to remove the liquid lubricant from the molded body before the sheet-like formed body is extended. The liquid lubricant may be removed by a method of heating the molded body (heating method) or a method of extracting a liquid lubricant by immersing the molded body in a solvent (extraction method).

片狀成形體沿著長向延伸時,延伸倍率較大者會促進該成形體之纖絲化而容易多孔質化。故,舉例言之,延伸倍率宜為10倍以上、30倍以下。又,該成形體延伸時之溫度條件並無特殊之限制,舉例言之,宜為150℃以上、小於327℃。 When the sheet-like formed body is extended in the longitudinal direction, the larger the stretching ratio, the higher the expansion ratio of the formed body is, and the porous body is easily made porous. Therefore, for example, the stretching ratio is preferably 10 times or more and 30 times or less. Further, the temperature condition at which the molded body is extended is not particularly limited, and is preferably 150 ° C or more and less than 327 ° C.

藉由使業已沿著長向延伸後的片狀成形體沿著寬度方向延伸,該成形體會有效地纖絲化,且可獲得孔徑之誤差少的PTFE片。片狀成形體沿著寬度方向延伸之條件並無特殊之限制,舉例言之,延伸倍率宜為20倍以上、100倍以下。又,片狀成形體宜沿著寬度方向延伸成藉由與先前長向延伸時之延伸倍率之積所表示的面積延伸倍率構成450倍以上。面積延伸倍率越大,越會更進一步地促進纖絲化,且可獲得PF值大的多孔質PTFE片。又,延伸溫度並無特殊之限制,舉例言之,宜為40℃以上、100℃以下。 By extending the sheet-shaped formed body which has been extended in the longitudinal direction in the width direction, the formed body is effectively fibrillated, and a PTFE sheet having a small error in the pore diameter can be obtained. The condition for extending the sheet-like formed body in the width direction is not particularly limited. For example, the stretching ratio is preferably 20 times or more and 100 times or less. Further, it is preferable that the sheet-like formed body is extended in the width direction to be 450 times or more by the area stretching magnification expressed by the product of the stretching ratio in the case of the previous long-direction extension. The larger the area stretching ratio, the more the fibrillation is further promoted, and a porous PTFE sheet having a large PF value can be obtained. Further, the stretching temperature is not particularly limited, and for example, it is preferably 40 ° C or more and 100 ° C or less.

如前述般形成的PTFE片具有壓力損失為50mmH2O以下且捕集效率為99.9%以上之優異特性。特別是面積延伸倍率為450倍以上時,捕集效率不會大幅地降低,且壓力損失降低至小於20mmH2O,同時PF值構成22以上。藉此,可獲得極為優異之性能的多孔質PTFE片。又,所獲得之每片PTFE片之壓力損失之誤差亦會減小。故,可構成作業成本低並顯示極為優異之除塵性能的多孔質PTFE片。 The PTFE sheet formed as described above has an excellent property of a pressure loss of 50 mmH 2 O or less and a collection efficiency of 99.9% or more. In particular, when the area extension ratio is 450 times or more, the collection efficiency is not largely lowered, and the pressure loss is reduced to less than 20 mmH 2 O, and the PF value is 22 or more. Thereby, a porous PTFE sheet having extremely excellent performance can be obtained. Moreover, the error in the pressure loss of each of the obtained PTFE sheets is also reduced. Therefore, it is possible to constitute a porous PTFE sheet having a low work cost and exhibiting extremely excellent dust removal performance.

另,在強度提升或獲得尺寸安定性之目的下,依前述作成而獲得之PTFE片亦可進一步地進行熱處理(焙燒處理)。一般而言,PTFE片之熱處理會藉由PTFE焙燒體之熔點以上之溫度固定尺寸來進行。又,藉由前述熱處理,可降低壓力損失。故,在顯示PTFE片之PF值為22以上且壓力損失為20mmH2O以上時,可藉由該熱處理,使壓力損失降低至小於20mmH2O。 Further, the PTFE sheet obtained as described above may be further subjected to heat treatment (baking treatment) for the purpose of improving strength or obtaining dimensional stability. In general, the heat treatment of the PTFE sheet is carried out by a fixed size of the temperature above the melting point of the PTFE calcined body. Moreover, the pressure loss can be reduced by the aforementioned heat treatment. Therefore, when the PF value of the PTFE sheet is 22 or more and the pressure loss is 20 mmH 2 O or more, the pressure loss can be reduced to less than 20 mmH 2 O by the heat treatment.

前述基材層2b是使用具有通氣性之片材(以下亦記作通氣性片)而形成。通氣性片並無特殊之限制,舉例言之,可列舉如:不織布、織布、網眼、高分子纖維等。特別是在使多孔質層2a(多孔質層片)與基材層2b(通氣性片)熱熔接(熱層合)時,宜使用由具有熱可塑性之素材所構成的通氣性片。 The base material layer 2b is formed using a sheet having air permeability (hereinafter also referred to as a breathable sheet). The air permeable sheet is not particularly limited, and examples thereof include non-woven fabrics, woven fabrics, meshes, and polymer fibers. In particular, when the porous layer 2a (porous layer) and the base layer 2b (air permeable sheet) are thermally welded (thermally laminated), it is preferable to use a permeable sheet composed of thermoplastic material.

舉例言之,通氣性片之材質可列舉如:聚乙烯或聚丙烯等之聚烯烴、耐綸、聚酯、聚芳醯胺(具體而言為芳族系聚醯胺等)或複合該等者(舉例言之,由芯/鞘結構之纖 維所構成的不織布;或低熔點材料與高熔點材料之雙層不織布等)。除此之外,舉例言之,通氣性片之材質可列舉如:PFA(四氟乙烯/全氟烷基乙烯基醚共聚物)、FEP(四氟乙烯/六氟丙烯共聚物)、PTFE之多孔質膜等之氟系多孔膜。 For example, the material of the air permeable sheet may be, for example, a polyolefin such as polyethylene or polypropylene, a nylon, a polyester, a polyarylamine (specifically, an aromatic polyamine or the like) or a composite thereof. (for example, by the core / sheath structure of the fiber a non-woven fabric composed of a dimension; or a double-layer non-woven fabric of a low-melting point material and a high-melting point material, etc.). In addition, as an example, the material of the air permeable sheet may be, for example, PFA (tetrafluoroethylene/perfluoroalkyl vinyl ether copolymer), FEP (tetrafluoroethylene/hexafluoropropylene copolymer), PTFE. A fluorine-based porous film such as a porous membrane.

特別是適合使用由下述所構成的通氣性片,即:由屬於芯鞘結構之複合纖維且芯成分相較於鞘成分熔點相對高之合成纖維所構成的不織布;或由低熔點材料與高熔點材料之二層所構成的不織布等。藉由使用此種不織布,在多孔質層2a(多孔質層片)與基材層2b(通氣性片)熱層合時,可抑制於基材層2b所產生的收縮。又,藉由使用前述不織布,濾材原料2褶襉加工時之加工性會變得良好,且可增加濾材原料2之彎折處(折疊間距)。 In particular, it is suitable to use a permeable sheet composed of a conjugate fiber belonging to a core-sheath structure and having a core component which is relatively high in melting point compared to a sheath component; or a low-melting material and high A non-woven fabric composed of two layers of a melting point material. By using such a nonwoven fabric, when the porous layer 2a (porous layer sheet) and the base material layer 2b (air permeable sheet) are thermally laminated, shrinkage due to the base material layer 2b can be suppressed. Moreover, by using the above-mentioned nonwoven fabric, the workability in the pleating process of the filter material 2 is improved, and the bending portion (folding pitch) of the filter material 2 can be increased.

形成如前述之濾材原料2之方法並無特殊之限制,舉例言之,可採用以下方法,即:於形成多孔質層2a之多孔質片與形成基材層2b之通氣性片間配置熱熔膠或感壓型接著劑,並壓接多孔質片與通氣性片。或,可採用加熱而軟化之通氣性片與多孔質片壓接(熱層合)之方法。 The method of forming the filter material 2 as described above is not particularly limited. For example, a method may be employed in which a hot melt is disposed between the porous sheet forming the porous layer 2a and the air permeable sheet forming the substrate layer 2b. A glue or a pressure sensitive adhesive, and the porous sheet and the air permeable sheet are crimped. Alternatively, a method in which a heat-treated softened air-permeable sheet and a porous sheet are pressure-bonded (thermally laminated) may be employed.

於如前述般構成的濾材原料2形成構成間隔保持部3A、3B之卷邊部3a、3b。該卷邊部3a、3b是在濾材原料2褶襉加工後形成。具體而言,濾材原料2沿著與一方向(長向)呈正交之寬度方向於複數處彎折而褶襉加工後,伸展成褶襉加工前之平坦狀態,並藉由於濾材原料2之兩面塗布接著劑,形成卷邊部3a、3b。卷邊部3a、3b之形狀並無特殊之限制,於本實施形態中,沿著濾材原料2之一方向(長向) 形成為線狀。 The filter material 2 configured as described above forms the bead portions 3a and 3b constituting the space holding portions 3A and 3B. The beading portions 3a and 3b are formed after the corrugated material 2 is pleated. Specifically, the filter material 2 is bent at a plurality of points in a width direction orthogonal to one direction (long direction) to be pleated, and then stretched to a flat state before the pleat processing, and by the filter material 2 The adhesive is applied to both sides to form the curled portions 3a, 3b. The shape of the curling portions 3a and 3b is not particularly limited, and in the present embodiment, along one direction of the filter material 2 (long direction) Formed as a line.

形成於濾材原料2之一面側的卷邊部(以下亦記作一面側卷邊部)3a及形成於濾材原料2之他面側的卷邊部(以下亦記作他面側卷邊部)3b會形成於濾材原料2之複數處。具體而言,一面側卷邊部3a及他面側卷邊部3b會沿著濾材原料2之一方向(長向)隔著間隔形成複數個。又,一面側卷邊部3a與他面側卷邊部3b會沿著濾材原料2之一方向(長向)交互(再者,不會透過濾材原料2而重疊)排列。又,一面側卷邊部3a及他面側卷邊部3b會沿著濾材原料2之寬度方向隔著間隔排列複數個(於本實施形態中為3個)。 a beading portion (hereinafter also referred to as a one-side beading portion) 3a formed on one surface side of the filter material 2 and a bead portion formed on the other side of the filter material 2 (hereinafter also referred to as a side curling portion) 3b is formed at a plurality of the filter material 2. Specifically, the one side curling portion 3a and the other side curling portion 3b are formed in plural along the direction (longitudinal direction) of the filter material 2. Further, the one side curling portion 3a and the other side curling portion 3b are arranged in one direction (long direction) in the direction of the filter material 2 (further, they do not overlap the filter material 2). Further, the one side curling portion 3a and the other side curling portion 3b are arranged in plural at intervals along the width direction of the filter material 2 (three in the present embodiment).

一面側卷邊部3a及他面側卷邊部3b形成為與濾材原料2褶襉加工時構成彎折部1a之領域(以下亦記作彎折預定領域)A1交叉(略呈正交)。具體而言,構成為於相鄰之彎折預定領域A1、A1中,一彎折預定領域A1與一面側卷邊部3a交叉,同時另一彎折預定領域A1與他面側卷邊部3b交叉。又,一面側卷邊部3a及他面側卷邊部3b形成於各彎折預定領域A1中構成彎折部1a之突起側之面上。 The one side curling portion 3a and the other side curling portion 3b are formed so as to intersect (slightly orthogonal) the region (hereinafter also referred to as a predetermined bending region) A1 which constitutes the bent portion 1a when the filter material 2 is pleated. Specifically, in the adjacent predetermined bending areas A1, A1, one bending predetermined area A1 and one side side curling portion 3a are intersected, while the other bending predetermined area A1 and the other side side curling portion 3b are formed. cross. Moreover, the one side side curling part 3a and the other side side curling part 3b are formed in the surface of the protrusion part side of the bending part 1a in each bending predetermined area A1.

又,一面側卷邊部3a及他面側卷邊部3b形成於濾材原料2褶襉加工時構成平板部1b之領域(以下亦記作平板部預定領域)A2之兩面。具體而言,一面側卷邊部3a及他面側卷邊部3b會自與彎折預定領域A1之交叉位置遍及平板部預定領域A2之大略中央部而形成。 In addition, the one side side beading part 3a and the other side side beading part 3b are formed on both surfaces of the field of the flat plate part 1b (hereinafter also referred to as a predetermined area of the flat plate portion) A2 when the filter material 2 is pleated. Specifically, the one side curling portion 3a and the other side curling portion 3b are formed from the intersection of the predetermined predetermined area A1 and the substantially central portion of the predetermined area A2 of the flat portion.

又,如前述般形成的一面側卷邊部3a及他面側卷邊部3b會構成為他面側卷邊部3b(詳而言之為形成間隔保 持部3B之部位)之厚度比一面側卷邊部3a(詳而言之為形成間隔保持部3A之部位)之厚度薄。具體而言,藉由使塗布於濾材原料2之他面側的接著劑之塗布量比塗布於一面側的接著劑之塗布量少,構成為他面側卷邊部3b之厚度比一面側卷邊部3a之厚度薄。相對於一面側卷邊部3a之厚度的他面側卷邊部3b之厚度之比例宜為20%以上、80%以下,且更宜為40%以上、60%以下。另,所謂各卷邊部3a、3b之厚度是指配置於濾材原料2之兩面的各卷邊部3a、3b中相當於濾材原料2之厚度方向的方向之厚度。 Further, the one-side curling portion 3a and the other-side curling portion 3b which are formed as described above are configured as the side-side curling portion 3b (in detail, the gap is formed). The thickness of the portion of the holding portion 3B is thinner than the thickness of the one side side bead portion 3a (in detail, the portion where the space holding portion 3A is formed). Specifically, the coating amount of the adhesive applied to the other side of the filter material 2 is smaller than the amount of the adhesive applied to the one surface side, and the thickness of the side curling portion 3b is smaller than that of the side surface. The thickness of the side portion 3a is thin. The ratio of the thickness of the side surface side bead portion 3b with respect to the thickness of the one side side bead portion 3a is preferably 20% or more and 80% or less, and more preferably 40% or more and 60% or less. The thickness of each of the curling portions 3a and 3b is the thickness of the respective curling portions 3a and 3b disposed on both surfaces of the filter material 2 corresponding to the thickness direction of the filter material 2 .

構成一面側卷邊部3a及他面側卷邊部3b之接著劑並無特殊之限制,舉例言之,可使用熱熔膠。將熱熔膠塗布於濾材原料2時之溫度會依照熱熔膠之成分而不同,然而,舉例言之,宜為100℃以上、250℃以下,且更宜為140℃以上、230℃以下。 The adhesive constituting the one side curling portion 3a and the other side curling portion 3b is not particularly limited, and for example, a hot melt adhesive can be used. The temperature at which the hot melt adhesive is applied to the filter material 2 varies depending on the composition of the hot melt adhesive. However, it is preferably 100 ° C or higher and 250 ° C or lower, and more preferably 140 ° C or higher and 230 ° C or lower.

如前述般形成卷邊部3a、3b的濾材原料2於各彎折預定領域A1再度彎折而形成為褶狀。藉此,如圖3(a)所示,形成複數個彎折部1a及複數個平板部1b。又,各卷邊部3a、3b是藉由接合濾材原料2之兩面中位於各平板部1b間之部位彼此,形成間隔保持部3A、3B。藉此,形成過濾濾材1。另,構成卷邊部3a、3b之接著劑使用熱熔膠時,宜於軟化成熱熔膠彼此可接合之程度時(開放時間內),使濾材原料2再度形成為褶狀。 The filter material 2 in which the curling portions 3a and 3b are formed as described above is bent again in each of the predetermined bending regions A1 to form a pleat shape. Thereby, as shown in FIG. 3(a), a plurality of bent portions 1a and a plurality of flat plate portions 1b are formed. Further, each of the curling portions 3a and 3b is formed by joining the portions between the flat plate portions 1b on both surfaces of the filter material 2, and the gap holding portions 3A and 3B are formed. Thereby, the filter medium 1 is formed. When the hot-melt adhesive is used as the adhesive constituting the bead portions 3a and 3b, it is preferable to soften the hot melt adhesive to the extent that it can be joined to each other (opening time), and the filter material 2 is again formed into a pleated shape.

另,於以下說明中,過濾濾材1中相當於濾材原料2之一方向(長向)的方向是過濾濾材1之長度L1。又,過 濾濾材1中相當於濾材原料2之另一方向(寬度方向)的方向是過濾濾材1之寬度L2。又,形成為濾材原料2之一面側構成突起側的彎折部1a與形成為濾材原料2之他面側構成突起側的彎折部1a間之間隔是過濾濾材1之高度L3。 In the following description, the direction corresponding to one direction (longitudinal direction) of the filter material 2 in the filter medium 1 is the length L1 of the filter medium 1. Again, too The direction corresponding to the other direction (width direction) of the filter material 2 in the filter medium 1 is the width L2 of the filter medium 1. Further, the interval between the bent portion 1a on the one side of the filter material 2 and the bent portion 1a on the side of the other side of the filter material 2 is the height L3 of the filter medium 1.

於如前述般形成的過濾濾材1中,於濾材原料2之一面側及他面側分別形成間隔保持部3A、3B。又,各間隔保持部3A、3B會沿著過濾濾材1之高度L3方向形成為直線狀。又,如圖3(a)(b)所示,過濾濾材1之一面側之各間隔保持部(以下亦記作一面側間隔保持部)3A及他面側之各間隔保持部(以下亦記作他面側間隔保持部)3B會沿著過濾濾材1之長度L1方向(具體而言為沿著長度L1方向之直線上)交互排列。 In the filter medium 1 formed as described above, the space holding portions 3A and 3B are formed on one of the surface side and the other side of the filter material 2, respectively. Further, each of the interval holding portions 3A and 3B is formed linearly along the height L3 direction of the filter medium 1. Further, as shown in Fig. 3 (a) and (b), each of the interval holding portions (hereinafter also referred to as a one-side spacer portion) 3A on the one surface side of the filter medium 1 and the respective interval holding portions on the other side (hereinafter also referred to as The face-side spacers 3B are alternately arranged along the length L1 direction of the filter medium 1 (specifically, on a straight line along the length L1 direction).

又,一面側間隔保持部3A與他面側間隔保持部3B形成為厚度不同。具體而言,形成為他面側間隔保持部3B之厚度比一面側間隔保持部3A之厚度薄。更詳而言之,藉由接合厚度比一面側卷邊部3a薄之他面側卷邊部3b中位於平板部1b間之部位彼此,形成厚度比一面側間隔保持部3A薄之他面側間隔保持部3B。相對於一面側間隔保持部3A之厚度的他面側間隔保持部3B之厚度之比例宜為20%以上、80%以下,且更宜為40%以上、60%以下。另,所謂各間隔保持部3A、3B之厚度是相當於相鄰之平板部彼此對向之方向的方向之厚度。 Moreover, the one side spacer holding portion 3A and the other side spacer holding portion 3B are formed to have different thicknesses. Specifically, the thickness of the one side interval holding portion 3B is formed to be thinner than the thickness of the one side interval holding portion 3A. More specifically, by joining the portions of the other side curling portion 3b which are thinner than the one side curling portion 3a between the flat plate portions 1b, the thickness is thinner than the one side spacer holding portion 3A. Interval holding portion 3B. The ratio of the thickness of the surface-side spacer portion 3B to the thickness of the one-side spacer portion 3A is preferably 20% or more and 80% or less, and more preferably 40% or more and 60% or less. Further, the thickness of each of the interval holding portions 3A and 3B is a thickness corresponding to a direction in which the adjacent flat plate portions face each other.

依此,藉由構成為他面側間隔保持部3B之厚度比一面側間隔保持部3A之厚度薄,如圖3(a)、(b)所示,濾 材原料2之他面側之各平板部1b間之間隔會比濾材原料2之一面側之各平板部1b間之間隔窄。 With this configuration, the thickness of the face-side spacer holding portion 3B is thinner than the thickness of the one-side spacer portion 3A, as shown in Figs. 3(a) and (b). The interval between the flat portions 1b on the other side of the material 2 is narrower than the interval between the flat portions 1b on the one side of the filter material 2.

如圖4所示,如前述般構成的過濾濾材1會收納於構成為可收納過濾濾材1之框體X而使用作為過濾單元10。該框體X具備:一對對向壁X1、X1,其配置成隔著間隔對向;及連結壁X2,其連結該一對對向壁X1、X1之外周部彼此。又,構成為可將過濾濾材1收納於藉由一對對向壁X1、X1與連結壁X2所包圍的空間(以下亦記作內部空間)XR。一對對向壁X1、X1具備與內部空間XR連通之開口部X3、X3。藉此,框體X會構成為被過濾氣體可自一開口部X3側朝另一開口部X3側通過內部空間XR。 As shown in FIG. 4, the filter medium 1 configured as described above is stored in the frame X which is configured to accommodate the filter medium 1, and is used as the filter unit 10. The housing X includes a pair of opposing walls X1 and X1 that are disposed to face each other with a gap therebetween, and a connecting wall X2 that connects the outer peripheral portions of the pair of opposing walls X1 and X1. Further, the filter medium 1 can be housed in a space (hereinafter also referred to as an internal space) XR surrounded by the pair of opposing walls X1 and X1 and the connecting wall X2. The pair of opposing walls X1 and X1 have openings X3 and X3 that communicate with the internal space XR. Thereby, the frame body X is configured such that the filtered gas can pass through the internal space XR from the one opening portion X3 side toward the other opening portion X3 side.

框體X之形狀只要是可收納過濾濾材1之形狀,則無特殊之限制,舉例言之,可列舉如:內部尺寸1180mm×1180mm、外部尺寸1220mm×1220mm、厚度75mm之長方體狀,或具有預定內徑之圓形狀等。又,框體X之材質並無特殊之限制,可使用鋁製者。 The shape of the frame X is not particularly limited as long as it can accommodate the filter medium 1 , and examples thereof include an inner dimension of 1180 mm × 1180 mm, an outer dimension of 1220 mm × 1220 mm, a thickness of 75 mm, or a predetermined shape. The round shape of the inner diameter and the like. Further, the material of the frame X is not particularly limited, and aluminum may be used.

過濾濾材1會調節成長度L1構成預定長度而收納於框體X。具體而言,調節(切斷)成過濾濾材1之長度L1比框體X中收納過濾濾材1之方向(具體而言為沿著過濾濾材1之長度L1方向之方向)的連結壁X2之內面間之間隔XL1長。 The filter medium 1 is adjusted so that the length L1 is a predetermined length and is accommodated in the frame X. Specifically, the length L1 of the filter medium 1 adjusted (cut) is smaller than the direction of the direction in which the filter medium 1 is accommodated in the frame X (specifically, the direction along the length L1 direction of the filter medium 1) The interval between faces is XL1 long.

又,過濾濾材1於收納於框體X之狀態下,構成於框體X內彎曲之狀態。具體而言,過濾濾材1於收納於框體X之狀態下,長度L1方向之兩端部抵接於框體X之內面(更詳而言之為連結壁X2之內面),同時相較於長度L1方向 之兩端部,中央側之領域會比該兩端部位於一開口部X3側而構成沿著寬度L2方向彎曲之狀態。 Moreover, the filter medium 1 is in a state of being bent in the casing X in a state of being housed in the casing X. Specifically, the filter medium 1 is placed in the frame body X, and both end portions in the length L1 direction abut against the inner surface of the frame body X (more specifically, the inner surface of the connection wall X2), and the phase Compared to the length L1 direction The both ends of the center side are located on the side of one opening X3 than the both ends, and are formed in a state of being curved in the width L2 direction.

另,連結形成為過濾濾材1之一面側構成突起側的各彎折部1a(換言之,形成於各平板部1b之間隔變寬側之各彎折部1a)之頂點部彼此而形成的圓弧之半徑(彎曲半徑)並無特殊之限制,舉例言之,宜為250mm以上、1500mm以下,且更宜為290mm以上、1200mm以下。 In addition, the arc formed by the apex portions of the respective bent portions 1a (in other words, the respective bent portions 1a formed on the sides where the respective flat portions 1b are widened) on the one side of the filter medium 1 is formed. The radius (bending radius) is not particularly limited. For example, it is preferably 250 mm or more and 1500 mm or less, and more preferably 290 mm or more and 1200 mm or less.

於過濾濾材1與框體X間填充填縫劑。舉例言之,該填縫劑可列舉如:雙液環氧填縫劑(具體而言,以3:1之比率混合漢高(Henkel)公司製Macroplast 8104MC-18與Macroplast UK5400者)等。 A caulking agent is filled between the filter medium 1 and the frame X. For example, the sealant may be, for example, a two-liquid epoxy sealant (specifically, a combination of Henkel's Macroplast 8104MC-18 and Macroplast UK5400 in a ratio of 3:1).

前述過濾單元10適合使用作為無塵室等之HEPA(High Efficiency Particulate Air,高效率粒子空氣)過濾器及ULPA(Ultra Low Penetration Air,超低滲透空氣)過濾器。 The filter unit 10 is preferably a HEPA (High Efficiency Particulate Air) filter or a ULPA (Ultra Low Penetration Air) filter that is used as a clean room or the like.

如前述般構成的過濾單元10配置成過濾濾材1之長度L1方向相對於被過濾氣體之流通方向F而交叉(具體而言為略呈正交)。即,過濾單元10配置成被過濾氣體自過濾濾材1之高度L3方向與過濾濾材1接觸。又,過濾單元10配置成相較於過濾濾材1之長度L1方向之兩端部,中央側之領域會比該兩端部位於被過濾氣體之流通方向F之上游側。藉此,構成為自框體X之一開口部X3流入過濾單元10之內部的被過濾氣體會在內部空間XR透過過濾濾材1而自框體x之另一開口部X3排出。 The filter unit 10 configured as described above is disposed such that the length L1 direction of the filter medium 1 crosses (specifically, is substantially orthogonal) with respect to the flow direction F of the filtered gas. That is, the filter unit 10 is disposed such that the filtered gas comes into contact with the filter medium 1 from the height L3 direction of the filter medium 1 . Moreover, the filter unit 10 is disposed so that both ends of the filter medium 1 in the longitudinal direction L1 direction are located on the upstream side of the flow direction F of the filtered gas than the both ends. As a result, the filtered gas that has flowed into the inside of the filter unit 10 from the opening portion X3 of one of the frames X passes through the filter medium 1 in the internal space XR and is discharged from the other opening portion X3 of the frame x.

如前述,若藉由有關本發明之過濾濾材及過濾單元,則可防止因被過濾氣體之風壓而無意地變形。 As described above, according to the filter medium and the filter unit of the present invention, it is possible to prevent unintentional deformation due to the wind pressure of the filtered gas.

即,前述過濾濾材1構成為他面側間隔保持部3B之厚度比一面側間隔保持部3A之厚度薄,藉此,濾材原料2之他面側中的平板部1b彼此之間隔會比濾材原料2之一面側中的平板部1b彼此之間隔窄。故,相較於過濾濾材1之長度方向之兩端部,中央側之領域會比該兩端部更容易朝濾材原料2之一面側膨出,且容易使過濾濾材1彎曲。依此,藉由於彎曲狀態下使用過濾濾材1,可抑制過濾濾材1因被過濾氣體之風壓而變形。 In other words, the filter medium 1 is configured such that the thickness of the surface side interval holding portion 3B is thinner than the thickness of the one side space holding portion 3A, whereby the flat portions 1b of the other side of the filter material 2 are spaced apart from each other by the filter material. The flat plate portions 1b in one of the face sides are narrowed from each other. Therefore, the field on the center side is more likely to bulge toward the surface side of the filter material 2 than the both end portions of the filter medium 1 in the longitudinal direction, and the filter medium 1 is easily bent. Accordingly, by using the filter medium 1 in a bent state, it is possible to suppress the filter medium 1 from being deformed by the wind pressure of the filtered gas.

具體而言,藉由使過濾濾材1如前述般彎曲,相對於自過濾濾材1之中央側之領域膨出側施加於過濾濾材1之風壓,過濾濾材1之剛性會提高。故,可抑制因風壓所造成的過濾濾材1之變形。 Specifically, by bending the filter medium 1 as described above, the rigidity of the filter medium 1 is increased with respect to the wind pressure applied to the filter medium 1 from the bulging side of the center side of the filter medium 1 . Therefore, deformation of the filter medium 1 due to wind pressure can be suppressed.

又,藉由構成為他面側卷邊部3b中形成他面側間隔保持部3B之部位之厚度比一面側卷邊部3a中形成一面側間隔保持部3A之部位之厚度薄,形成為他面側間隔保持部3B之厚度比一面側間隔保持部3A之厚度薄。藉此,容易使過濾濾材1如前述般彎曲而使用,且可抑制過濾濾材1因風壓所造成的變形。 In addition, the thickness of the portion in which the side surface side holding portion 3B is formed in the side curling portion 3b is thinner than the thickness of the portion in which the one side side space holding portion 3A is formed in the one side side curling portion 3a. The thickness of the front side spacer holding portion 3B is thinner than the thickness of the one side spacer holding portion 3A. Thereby, the filter medium 1 is easily bent and used as described above, and deformation of the filter medium 1 due to wind pressure can be suppressed.

另,有關本發明之過濾濾材及過濾單元並不限於前述實施形態,可於未脫離本發明之要旨之範圍進行各種變更。又,亦可任意地採用、組合前述複數個實施形態之構造或方法等(亦可將有關一實施形態之構造或方法等應 用在有關其他實施形態之構造或方法等),再者,當然亦可任意地選擇有關下述各種變更例之構造或方法等,並於有關前述實施形態之構造或方法等中採用。 Further, the filter medium and the filter unit of the present invention are not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the invention. Further, the structure, method, and the like of the plurality of embodiments may be arbitrarily employed or combined (the structure or method relating to an embodiment may be used. Further, it is a matter of course, the structure, the method, and the like of the other embodiments are arbitrarily selected, and the structure or method of the various modifications described below can be arbitrarily selected and used in the structure or method of the above-described embodiment.

舉例言之,於前述實施形態中,卷邊部3a、3b形成為與彎折部1a交叉,然而,並不限於此,如圖5所示,亦可僅由形成間隔保持部3A、3B之部分構成卷邊部3a’、3b’。 For example, in the above embodiment, the curling portions 3a and 3b are formed to intersect the bent portion 1a. However, the present invention is not limited thereto, and as shown in FIG. 5, only the gap holding portions 3A, 3B may be formed. The portions constitute the curled portions 3a', 3b'.

又,於前述實施形態中,間隔保持部3沿著彎折部1a隔著間隔形成複數個,然而,並不限於此,亦可沿著彎折部1a一體地形成。 Further, in the above-described embodiment, the plurality of the interval holding portions 3 are formed at intervals along the bent portion 1a. However, the present invention is not limited thereto, and may be integrally formed along the bent portion 1a.

又,於前述實施形態中,使用由多孔質層2a與基材層2b所構成的濾材原料2來構成過濾濾材1,然而,並不限於此,舉例言之,亦可使用僅由多孔質層2a形成的濾材原料。又,於前述實施形態中,由複數個多孔質層2a形成濾材原料2,然而,並不限於此,亦可由單一之多孔質層2a與基材層2b形成濾材原料。 Further, in the above-described embodiment, the filter medium 1 is constituted by the filter material 2 composed of the porous layer 2a and the base layer 2b. However, the filter medium 1 is not limited thereto, and as an example, only the porous layer may be used. The filter material formed by 2a. Further, in the above embodiment, the filter material 2 is formed of a plurality of porous layers 2a. However, the present invention is not limited thereto, and the filter material may be formed of a single porous layer 2a and the base layer 2b.

實施例 Example

以下,說明本發明之實施例。 Hereinafter, embodiments of the invention will be described.

<過濾濾材之製作> <Production of Filter Media>

1.多孔質片 Porous sheet

使用PTFE片作為多孔質片。具體而言,相對於PTFE細粉(旭.ICI氟聚合物公司製Fluon CD-123)100重量份,添加液狀潤滑劑(十二烷)20重量份而形成糊狀混合物。又,該混合物會預備成形為棒狀。然後,如前述實施形態,藉由 使預備成形體供給至一對輥構件間並壓延,製作長條片(厚度:200μm)。又,長條片會在200℃之環境下,沿著長向延伸為11倍,同時在80℃之環境下,沿著與長向呈正交之寬度方向延伸為25倍,藉此,獲得未焙燒之PTFE片。 A PTFE sheet was used as the porous sheet. Specifically, 20 parts by weight of a liquid lubricant (dodecane) was added to 100 parts by weight of PTFE fine powder (Fluon CD-123, manufactured by Asahi ICF Fluoropolymer Co., Ltd.) to form a paste mixture. Also, the mixture is prepared to be formed into a rod shape. Then, as in the foregoing embodiment, by The preliminary molded body was supplied between a pair of roll members and rolled to form a long piece (thickness: 200 μm). In addition, the long strips are stretched 11 times along the long direction in an environment of 200 ° C, and 25 times in the width direction orthogonal to the long direction in an environment of 80 ° C, thereby obtaining Unfired PTFE sheet.

所獲得之PTFE片會使用熱風產生爐以400℃焙燒。焙燒後之PTFE片之平均孔徑為0.6μm,厚度為16μm,平均纖維徑為0.08μm,捕集效率為99.999%,壓力損失為160Pa。壓力損失及捕集效率是藉由下述方法來求取。 The obtained PTFE sheet was fired at 400 ° C using a hot air generating furnace. The calcined PTFE sheet had an average pore diameter of 0.6 μm, a thickness of 16 μm, an average fiber diameter of 0.08 μm, a collection efficiency of 99.999%, and a pressure loss of 160 Pa. The pressure loss and the collection efficiency are obtained by the following methods.

2.通氣性片 2. Ventilation film

使用形成為一方向構成長方形之通氣性片(Eleves S030WDO尤尼吉可(Unitika)公司製)。 An air-permeable sheet (Eleves S030WDO, manufactured by Unitika Co., Ltd.) which is formed into a rectangular shape in one direction is used.

3.濾材原料之製作 3. Production of filter materials

多孔質片是在通氣性片之兩面積層為前述多孔質片與通氣性片之長向略呈平行,並搬送至一對輥構件(前述熱輥與前述支持輥)間,且多孔質片與通氣性片會熱封而黏合。藉此,製作如圖2所示之濾材原料2(寬度L2:580mm)。該濾材原料2之壓力損失為170Pa,捕集效率為99.999%,厚度為0.32mm。 The porous sheet is such that the porous sheet is slightly parallel to the longitudinal direction of the air-permeable sheet in the two-area layer of the air-permeable sheet, and is transported between a pair of roller members (the heat roller and the support roller), and the porous sheet and the porous sheet are The air permeable sheet will be heat sealed and bonded. Thereby, the filter material 2 (width L2: 580 mm) shown in Fig. 2 was produced. The filter material 2 had a pressure loss of 170 Pa, a collection efficiency of 99.999%, and a thickness of 0.32 mm.

<壓力損失> <pressure loss>

於氣體透過業已設置於圓環狀支架(有效面積:100cm2)之試驗樣本(所獲得之多孔質片或濾材原料2)時,藉由壓力計(氣壓計),測定試驗樣本之一面側與他面側之氣壓差。另,透過流速為5.3cm/sec,且於試驗樣本之8處測定氣壓差。所獲得之測定結果之相加平均為前述壓力損失。 One side of the test sample (obtained porous sheet of filter material or 2), by a pressure gauge (pressure meter), measured with a test sample of: a gas permeable been disposed in an annular holder (effective area of 100cm 2) The pressure difference on his face. Further, the permeation flow rate was 5.3 cm/sec, and the pressure difference was measured at 8 points of the test sample. The sum of the obtained measurement results is the aforementioned pressure loss.

<捕集效率> <Capture efficiency>

使含有多分散鄰苯二甲酸二辛酯(DOP)約109個/L以上之氣體透過業已設置於圓環狀支架(有效面積:100cm2)之試驗樣本(所獲得之多孔質片或濾材原料2)。又,藉由粒子計數器,測定業已透過試驗樣本的氣體之DOP濃度。又,使用下述(1)式,算出捕集效率(%)。另,透過流速為5.3cm/sec。DOP粒子為0.1~0.2μm之範圍。 A gas containing about 109/L or more of polydisperse dioctyl phthalate (DOP) is passed through a test sample which has been placed on a circular stent (effective area: 100 cm 2 ) (the obtained porous sheet or filter material) 2). Further, the DOP concentration of the gas that has passed through the test sample is measured by a particle counter. Moreover, the collection efficiency (%) was calculated using the following formula (1). In addition, the permeation flow rate was 5.3 cm/sec. The DOP particles are in the range of 0.1 to 0.2 μm.

捕集效率(%)={1-(下游濃度/上游濃度)}×100…(1) Collection efficiency (%) = {1 - (downstream concentration / upstream concentration)} × 100... (1)

<實施例1及2> <Examples 1 and 2>

=過濾濾材= = filter media =

所獲得之濾材原料2褶襉加工後,如圖3所示,藉由形成一面側卷邊部3a及他面側卷邊部3b,製作過濾濾材1。所獲得之過濾濾材1之長度L1為580mm,寬度L2為580mm,高度L3為35mm,平均一吋之褶數為8個。形成各卷邊部3a、3b之接著劑(熱熔膠)是使用漢高公司製之Macromelt 6202(聚醯胺系)。另,相對於他面側卷邊部3b之質量的一面側卷邊部3a之質量之比率(卷邊表裡比率)顯示於下述表1。又,卷邊表裡比率之算出是藉由下述(2)式來進行。 After the obtained filter material 2 is pleated, as shown in FIG. 3, the filter material 1 is produced by forming the one side curling portion 3a and the other side curling portion 3b. The obtained filter medium 1 had a length L1 of 580 mm, a width L2 of 580 mm, a height L3 of 35 mm, and an average number of pleats of eight. The adhesive (hot melt adhesive) for forming each of the bead portions 3a and 3b was Macromelt 6202 (polyamide) manufactured by Henkel Corporation. Further, the ratio of the mass of the one side side bead portion 3a with respect to the mass of the side curling portion 3b (the ratio of the curling surface) is shown in Table 1 below. Further, the calculation of the ratio in the hemming table is performed by the following formula (2).

卷邊表裡比率=一面側卷邊部3a之質量/他面側卷邊部3b之質量…(2) The ratio of the curling table = the mass of one side curling portion 3a / the quality of the side curling portion 3b... (2)

另,一面側卷邊部3a及他面側卷邊部3b之質量如下述般測定。具體而言,首先,測定採取自過濾濾材1之試驗片(1.0m2)之質量。又,加熱試驗片,並測定業已除去一面側卷邊部3a(或他面側卷邊部3b)時之試驗片之質量。又, 自試驗片之加熱前後之質量差,算出一面側卷邊部3a(或他面側卷邊部3b)之質量。 The mass of the one side curling portion 3a and the other side curling portion 3b was measured as follows. Specifically, first, the mass of the test piece (1.0 m 2 ) taken from the filter medium 1 was measured. Further, the test piece was heated, and the quality of the test piece when one side side bead portion 3a (or the other side side bead portion 3b) was removed was measured. Moreover, the mass of the one side side beading part 3a (or the other side side beading part 3b) was calculated from the difference in quality before and after heating of the test piece.

=過濾單元= = filter unit =

過濾濾材1會收納於框體X(內部尺寸為580mm×580mm、外部尺寸為610mm×610mm、厚度為80mm之鋁製)之內側,並藉由雙液環氧填縫材,密封框體X與過濾濾材1之間隙。藉此,製作如圖4所示之過濾單元10。另,雙液環氧填縫材是使用以3:1之比率混合漢高製Macroplast 8104MC-18與Macroplast UK5400者。 The filter medium 1 is housed inside the frame X (having an inner dimension of 580 mm × 580 mm, an outer dimension of 610 mm × 610 mm, and a thickness of 80 mm), and the sealing frame X is sealed by a two-liquid epoxy filler material. Filter the gap of the filter material 1. Thereby, the filter unit 10 as shown in FIG. 4 is produced. In addition, the two-liquid epoxy caulking material was mixed with Henkel's Macroplast 8104MC-18 and Macroplast UK5400 in a ratio of 3:1.

收納於框體X之過濾濾材1會構成彎曲成相較於長度L1方向之兩端部,中央側之領域會比該兩端部位於一開口部X3側之狀態。另,連結形成為過濾濾材1之一面側構成突起側的各彎折部1a之頂點部彼此而形成的圓弧之半徑(彎曲半徑)顯示於下述表1。 The filter medium 1 accommodated in the frame X is formed to be bent at both end portions in the direction of the length L1, and the field on the center side is located on the side of the opening portion X3 from the both end portions. In addition, the radius (bending radius) of the arc formed by the apex portions of the respective bent portions 1a constituting the projection side on the one side of the filter medium 1 is shown in Table 1 below.

=耐壓性試驗= = pressure resistance test =

於所獲得之過濾單元中的過濾濾材1之中央部,自相較於長度L1方向之兩端部膨出側施加負載。此時,測定過濾濾材1之中央部之位移量(負載方向之位移量)。施加負載之方法是使用於過濾濾材1之中央部載置1個以上之秤砣(□137mm、10kg)之方法。 In the central portion of the filter medium 1 in the obtained filter unit, a load is applied from the bulging side of both end portions in the length L1 direction. At this time, the displacement amount (displacement amount in the load direction) of the central portion of the filter medium 1 was measured. The method of applying a load is a method of placing one or more scales (□ 137 mm, 10 kg) in the central portion of the filter medium 1 .

<比較例1> <Comparative Example 1>

各卷邊部3a、3b形成為卷邊表裡比率構成0。又,除了使過濾濾材1收納於框體X而不會彎曲外,藉由與實施例1相同之條件,進行變形量之測定。變形量顯示於下述表1。 Each of the bead portions 3a and 3b is formed such that the ratio of the curling table is 0. Further, the amount of deformation was measured under the same conditions as in Example 1 except that the filter medium 1 was housed in the frame X without being bent. The amount of deformation is shown in Table 1 below.

<歸納> <induction>

若比較各實施例與比較例1,則可看見各實施例相對於負載之變形量較小。即,如各實施例,藉由使過濾濾材1構成彎曲狀態,相對於來自過濾濾材1之中央側膨出側之負載,過濾濾材1之剛性會提升,因此,可看見抑制過濾濾材1之變形。 Comparing the respective examples with the comparative example 1, it can be seen that the deformation amount of each embodiment with respect to the load is small. In other words, in the respective embodiments, the filter medium 1 is formed in a curved state, and the rigidity of the filter medium 1 is increased with respect to the load from the center side bulging side of the filter medium 1, so that the deformation of the filter medium 1 can be suppressed. .

又,若比較實施例1與實施例2,則可看見藉由使卷邊表裡比率增大,彎曲半徑會減小。即,若卷邊表裡比率增大,則濾材原料2之一面側中的各平板部1b彼此之間隔與濾材原料2之他面側中的各平板部1b彼此之間隔之差會增大。故,可使過濾濾材1更容易彎曲,且可減小彎曲半徑。藉此,由於可提升如前述之過濾濾材1之剛性,因此,可看見更有效地抑制過濾濾材1之變形。 Further, by comparing Example 1 with Example 2, it can be seen that the bending radius is reduced by increasing the ratio of the curling surface. In other words, when the ratio in the curling table is increased, the difference between the interval between the flat plate portions 1b on one surface side of the filter material 2 and the interval between the flat plate portions 1b on the other side of the filter material 2 increases. Therefore, the filter medium 1 can be more easily bent, and the bending radius can be reduced. Thereby, since the rigidity of the filter medium 1 as described above can be improved, it can be seen that the deformation of the filter medium 1 is more effectively suppressed.

1‧‧‧過濾濾材 1‧‧‧Filter media

2‧‧‧濾材原料 2‧‧‧ Filter material

3A‧‧‧一面側間隔保持部 3A‧‧‧One side spacer

3B‧‧‧他面側間隔保持部 3B‧‧‧He side interval keeping

10‧‧‧過濾單元 10‧‧‧Filter unit

F‧‧‧流通方向 F‧‧‧Circulation direction

X‧‧‧框體 X‧‧‧ frame

X1‧‧‧對向壁 X1‧‧‧ opposite wall

X2‧‧‧連結壁 X2‧‧‧ Link wall

X3‧‧‧開口部 X3‧‧‧ openings

XL1‧‧‧間隔 XL1‧‧ interval

XR‧‧‧內部空間 XR‧‧‧ interior space

Claims (3)

一種過濾濾材,具備:複數個彎折部,其是濾材原料彎折成褶狀而形成,該濾材原料可捕集被過濾氣體中所包含之粒子;複數個平板部,是濾材原料中除了彎折部以外之領域配置成對向而形成;及複數個間隔保持部,是形成於濾材原料之一面側及他面側中的各平板部間而保持相鄰之彎折部彼此之間隔;其中前述間隔保持部是藉由一面側卷邊部與他面側卷邊部各自在平板部之間接合而形成者,其中該一面側卷邊部是於濾材原料之一面塗布接著劑而形成,且該他面側卷邊部是於濾材原料之他面塗布接著劑而形成,前述一面側卷邊部及前述他面側卷邊部形成在前述濾材原料之彎折部的突起側之面上,藉由將他面側卷邊部中形成間隔保持部之部位的厚度構成為比起前述一面側卷邊部中形成間隔保持部之部位的厚度更薄,而使得該過濾濾材被構成為:在前述濾材原料之兩面上形成的間隔保持部之中,形成於濾材原料之他面側的他面側間隔保持部之厚度比形成於濾材原料之一面側的一面側間隔保持部之厚度更薄,該過濾濾材並被彎曲形成為彎曲半徑在290mm以上1200mm以下。 A filter filter material comprising: a plurality of bent portions formed by bending a material of a filter material into a pleat shape, wherein the filter material is capable of trapping particles contained in the filtered gas; and the plurality of flat plate portions are in addition to the curved material of the filter material The regions other than the folded portion are disposed to face each other; and the plurality of spacers are formed between the flat portions of the one side of the filter material and the other side of the filter material to maintain the interval between the adjacent bent portions; The space-retaining portion is formed by joining a flat side portion which is formed by applying an adhesive to one surface of the filter material, and is formed by bonding the one side curling portion to the flat surface portion, and The side curling portion is formed by applying an adhesive to the other side of the filter material, and the one side curling portion and the front side curling portion are formed on the protruding side of the bent portion of the filter material. The thickness of the portion in which the spacer portion is formed in the side curling portion is made thinner than the thickness of the portion in which the spacer portion is formed in the one side curling portion, so that the filter medium is configured to be The foregoing Among the spacer holding portions formed on both surfaces of the material, the thickness of the surface-side spacer portion formed on the other side of the filter material is thinner than the thickness of the one-side spacer portion formed on one surface side of the filter material. The filter medium is filtered and bent to have a bending radius of 290 mm or more and 1200 mm or less. 如請求項1之過濾濾材,其中前述一面側卷邊部中形成間隔保持部之部位的厚度是他面側卷邊部中形成間隔保持部之部位之厚度之20%以上、80%以下。 The filter medium according to claim 1, wherein the thickness of the portion where the space holding portion is formed in the one side curling portion is 20% or more and 80% or less of the thickness of the portion where the space holding portion is formed in the side curling portion. 一種過濾單元,其構成為於收納如請求項1或2之過濾濾材之框體收納該過濾濾材,又,前述框體具備使被過濾氣體流入內部之開口部,且前述過濾濾材被彎曲而使得比長向之兩端部更為中央側之領域位於前述開口部側,並收納於框體。 A filter unit configured to accommodate the filter medium in a housing that accommodates the filter medium of claim 1 or 2, wherein the frame includes an opening that allows the filtered gas to flow into the interior, and the filter medium is bent A region on the center side of the both end portions of the long direction is located on the side of the opening, and is housed in the casing.
TW102136184A 2012-10-30 2013-10-07 Filter medium and filter unit TWI601567B (en)

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JP6624819B2 (en) * 2015-06-18 2019-12-25 ヤマシンフィルタ株式会社 Return filter
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