JPH09206568A - Material for air filter - Google Patents
Material for air filterInfo
- Publication number
- JPH09206568A JPH09206568A JP8016352A JP1635296A JPH09206568A JP H09206568 A JPH09206568 A JP H09206568A JP 8016352 A JP8016352 A JP 8016352A JP 1635296 A JP1635296 A JP 1635296A JP H09206568 A JPH09206568 A JP H09206568A
- Authority
- JP
- Japan
- Prior art keywords
- pressure loss
- filter
- air filter
- porous membrane
- polytetrafluoroethylene porous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ポリテトラフルオ
ロエチレン（以下「ＰＴＦＥ」という。）多孔質膜を用
いたエアーフィルター用濾材に関し、さらに詳しくは半
導体工業などのクリーンルームで使用される、空気及び
気体中の浮游粒子の捕獲に適し、空気及び気体の圧力損
失の小さい高性能エアーフィルターに用いられる濾材に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filter material for an air filter using a polytetrafluoroethylene (hereinafter referred to as "PTFE") porous membrane, and more specifically, air and a filter material used in a clean room such as semiconductor industry. The present invention relates to a filter material suitable for capturing floating particles in a gas and used in a high-performance air filter with a small pressure loss of air and gas.
【０００２】[0002]
【従来の技術】従来、クリーンルームで使用されるエア
ーフィルターの材料として、ガラス繊維にバインダーを
加えて抄紙した濾材が多く使用されている。しかし、こ
のような濾材にはいくつかの問題がある。例えば、濾材
中の付着小繊維の存在、または加工による折り曲げ時の
自己発塵の発生、または自己発塵を防ぐためにバインダ
ーを増大させると圧力損失が増大することなどである
（特開昭６３−１６０１９号公報参照）。さらに、この
濾材は、フッ酸などのある種の化学薬品と接触するとガ
ラス及びバインダーの劣化により、発塵するという問題
もあった。2. Description of the Related Art Conventionally, as a material for an air filter used in a clean room, a filter medium formed by adding a binder to glass fiber and making paper has been widely used. However, such filter media have several problems. For example, the presence of attached fibrils in the filter medium, the occurrence of self-dusting at the time of bending due to processing, or the increase in the binder to prevent self-dusting increases the pressure loss (Japanese Patent Application Laid-Open No. 63-163). No. 16019). Further, the filter medium has a problem that when it comes into contact with a certain chemical such as hydrofluoric acid, the glass and the binder are deteriorated and generate dust.
【０００３】これらの問題を解決するために合成繊維の
エレクトレット濾材（特開昭５４−５３３６５号公報参
照）を用いることが提案されているが、エレクトレット
の減衰の発生という問題がある。In order to solve these problems, it has been proposed to use a synthetic fiber electret filter medium (see Japanese Patent Application Laid-Open No. 54-53365), but there is a problem that electret attenuation occurs.
【０００４】ＰＴＦＥはクリーンな材料で、耐薬品性も
ある。そこで延伸法により得られるＰＴＦＥ多孔質膜を
高性能エアーフィルターに適用することが種々提案され
ている。例えば国際公開番号ＷＯ９４／１６８０２号、
特開平７−１９６８３１号公報がある。[0004] PTFE is a clean material and also has chemical resistance. Therefore, various proposals have been made to apply the PTFE porous membrane obtained by the stretching method to a high-performance air filter. For example, international publication number WO94 / 16802,
There is JP-A-7-196831.
【０００５】[0005]
【発明が解決しようとする課題】しかし、前記国際公開
番号ＷＯ９４／１６８０２号、特開平７−１９６８３１
号公報に提案されているフィルターは、いずれも捕集効
率を上げるために孔径（平均孔径）を０．５μｍ以下と
極めて小さくしており、又それで圧力損失を小さくする
ために厚さを極めて薄くしているものである。そしてこ
れらはこの様な構造を有しているために次の様な問題が
あった。 （１）厚さと孔径のバラツキが平均値に対して大きく、
結果的に圧力損失のバラツキが大きくなる。 （２）圧力損失の極めて小さな部分又はピンホールに由
来するリークが多く存在する。 （３）絶対的な気孔（空ゲキ）量が小さく、濾材寿命が
短い。 上記（１）〜（３）について詳しく述べると、（１）の
圧力損失のバラツキはフィルターユニットとしてされた
ときの風速分布が大きくなり、層流風が得られなくなる
ものである。（２）は対象としている粒子径以上の粒子
を透過してしまうため、クリーン度を提供できなくなる
ものである。（３）はフィルターの塵あい保持性能に直
接関係するもので、前記のような濾材を使用した場合、
少量の塵あい負荷で、圧力損失が上昇してしまうもので
ある。圧力損失はフィルター運転時のエネルギーコスト
の点で極めて重要である。However, the above-mentioned International Publication No. WO94 / 16802 and JP-A-7-196831.
The filters proposed in the publications each have a very small pore diameter (average pore diameter) of 0.5 μm or less in order to improve the collection efficiency, and thus the thickness is extremely thin in order to reduce the pressure loss. Is what you are doing. Since these have such a structure, they have the following problems. (1) Variations in thickness and hole diameter are large with respect to the average value,
As a result, the variation in pressure loss increases. (2) There are many leaks derived from pinholes or portions with extremely small pressure loss. (3) Absolute amount of pores (void marks) is small and the filter medium life is short. To describe the above (1) to (3) in detail, the variation in pressure loss in (1) is such that the wind velocity distribution becomes large when used as a filter unit, and laminar airflow cannot be obtained. In the case of (2), since particles having a particle size larger than the target particle size are transmitted, cleanliness cannot be provided. (3) is directly related to the dust holding performance of the filter, and when the above filter medium is used,
A small dust load increases pressure loss. Pressure loss is extremely important in terms of energy cost during filter operation.
【０００６】本発明は、前記従来の問題を解決するた
め、塵埃の捕集効率が高く、圧力損失が低く、圧力損失
のバラツキが緩和され、貫通したピンホールもなく、リ
ークレスとなり、かつ気孔量も増大し寿命特性も優れた
エアーフィルター用濾材を提供することを目的とする。In order to solve the above-mentioned conventional problems, the present invention has a high dust collection efficiency, a low pressure loss, a variation in pressure loss is alleviated, there is no pin hole penetrating, and there is no leak, and the amount of pores is small. It is an object of the present invention to provide a filter material for an air filter, which has an increased life and excellent life characteristics.
【０００７】[0007]
【課題を解決するための手段】前記目的を達成するた
め、本発明のエアーフィルター用濾材は、ＰＴＦＥ多孔
質膜を２層以上積層したという構成を備えたものであ
る。この構成により、従来の１層だけの場合と比較し
て、塵埃の捕集効率が高く、圧力損失が低く、複数層の
多孔質膜が用いられているので、圧力損失のバラツキも
緩和され、貫通したピンホールもなくなり、リークレス
となるものである。またこれと同時に絶対的な気孔量も
増大し寿命特性も優れたものになる。In order to achieve the above object, the filter material for an air filter of the present invention has a structure in which two or more layers of PTFE porous membranes are laminated. With this configuration, the dust collection efficiency is high, the pressure loss is low, and a plurality of layers of porous membranes are used as compared with the conventional case of only one layer, so that the variation in pressure loss is alleviated. There are no pinholes penetrating through, and there is no leak. At the same time, the absolute porosity is increased and the life characteristics are improved.
【０００８】前記構成においては、ＰＴＦＥ多孔質膜の
積層間に、さらに補強材を介在させたことが好ましい。
また前記構成においては、補強材が不織布であることが
好ましい。In the above structure, it is preferable that a reinforcing material is further interposed between the laminated porous PTFE membranes.
Moreover, in the said structure, it is preferable that a reinforcing material is a nonwoven fabric.
【０００９】また前記構成においては、不織布を構成す
る繊維が、芯鞘構造の複合繊維であり、芯成分が鞘成分
より相対的に融点が高い合成繊維であることが好まし
い。また前記構成においては、５．３ｃｍ／ｓｅｃの流
速で空気を透過させる時の圧力損失が６５ｍｍＨ2 Ｏ以
下であることが好ましい。本発明のエアーフィルター濾
材の圧力損失は構成されるＰＴＦＥ多孔質膜、及びその
他構成材料及び積層条件によって自由に変化させる事が
可能であるが、クリーンルーム等のＨＥＰＡ(Hig Effic
iency Particulate Air)フィルター、及びＵＬＰＡ(Ult
ra Low Penetration Air) フィルターとして使用される
には、濾材としての圧力損失が６５ｍｍＨ2 Ｏ以下であ
ることが好ましい。Further, in the above structure, it is preferable that the fibers constituting the nonwoven fabric are composite fibers having a core-sheath structure, and the core component is a synthetic fiber having a relatively higher melting point than the sheath component. Further, in the above structure, it is preferable that the pressure loss when permeating air at a flow rate of 5.3 cm / sec is 65 mmH 2 O or less. The pressure loss of the air filter medium of the present invention can be freely changed depending on the PTFE porous membrane to be constructed, other constituent materials and lamination conditions, but HEPA (Hig Effic
iency Particulate Air) filter and ULPA (Ult
In order to be used as a ra Low Penetration Air) filter, it is preferable that the pressure loss of the filter medium is 65 mmH 2 O or less.
【００１０】また前記構成においては、流体を流したと
きに、上流側のＰＴＦＥ多孔質膜の圧力損失が下流側の
ＰＴＦＥ多孔質膜の圧力損失よりも低いことが好まし
い。すなわち、異なる圧力損失のＰＴＦＥ多孔質膜を重
ねる場合は、上流側のＰＴＦＥ多孔質膜の圧力損失が下
流側のＰＴＦＥ多孔質膜の圧力損失よりも小さくなる様
に積層することがフィルター寿命を長くする点で重要で
ある。上流側に圧力損失の大きい膜を配置した場合、一
般に圧力損失の大きい多孔質膜は捕集効率が高く、細か
い粒子も粗い粒子も捕集してしまい、下流側の圧力損失
の低い多孔質膜の存在の意味がなくなってしまうからで
ある。In the above structure, it is preferable that the pressure loss of the PTFE porous membrane on the upstream side is lower than the pressure loss of the PTFE porous membrane on the downstream side when the fluid flows. That is, when stacking PTFE porous membranes having different pressure losses, stacking them so that the pressure loss of the upstream PTFE porous membrane is smaller than the pressure loss of the downstream PTFE porous membrane increases the filter life. It is important to do. When a membrane with a large pressure loss is placed on the upstream side, a porous membrane with a large pressure loss generally has a high collection efficiency and traps both fine and coarse particles, and a porous membrane with a low pressure loss on the downstream side. Because the meaning of the existence of is lost.
【００１１】本発明でのＰＴＦＥ多孔質膜を重ねる方法
は特に限定されるものではなく、接着剤を用いる方法、
熱可塑性の多孔質材料（不織布又はネットなど）を介し
て熱で積層する方法などが挙げられる。一般にはＰＴＦ
Ｅ多孔質膜だけでは折り込み加工性や強度に劣るため補
強材が用いられる。The method for stacking the PTFE porous membranes in the present invention is not particularly limited, and a method using an adhesive,
Examples thereof include a method of laminating with heat through a thermoplastic porous material (nonwoven fabric, net, or the like). Generally PTF
Since the E porous film alone is inferior in folding workability and strength, a reinforcing material is used.
【００１２】補強材としては、不織布、織布、メッシ
ュ、その他の多孔膜が使用できる。補強材の材質として
は、ポリオレフィン（たとえば、ポリエチレン、ポリプ
ロピレンなど）、ナイロン、ポリエステル、アラミド
（芳香族系ポリアミド）、又はこれらを複合したもの
（たとえば、芯／鞘構造の繊維から成る不織布、低融点
材料と高融点材料の２層不織布など）、更にフッ素系多
孔膜（たとえば、ＰＦＡ（テトラフルオロエチレン／パ
ーフルオロアルキルビニルエーテル共重合体）、ＦＥＰ
（テトラフルオロエチレン／ヘキサフルオロプロピレン
共重合体）、ＰＴＦＥの多孔質膜など）が例示できる。Nonwoven fabrics, woven fabrics, meshes and other porous membranes can be used as the reinforcing material. As the material for the reinforcing material, polyolefin (for example, polyethylene, polypropylene, etc.), nylon, polyester, aramid (aromatic polyamide), or a composite thereof (for example, a nonwoven fabric composed of fibers having a core / sheath structure, a low melting point) Materials and high melting point materials such as two-layer nonwoven fabric), and fluorine-based porous membranes (for example, PFA (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer), FEP)
(Tetrafluoroethylene / hexafluoropropylene copolymer), PTFE porous membrane, etc.) can be exemplified.
【００１３】とりわけ芯鞘構造の複合繊維（鞘成分のほ
うが低融点ポリマー）から成る不織布、低融点材料と高
融点材料の２層不織布などが好ましい。このような補強
材は、ラミネート時に収縮しない。また、このような補
強材とのラミネート膜は、ＨＥＰＡフィルターやＵＬＰ
Ａフィルターとして加工しやすく、フィルターエレメン
トにする際に折り込みピッチが増やせる。Above all, a non-woven fabric composed of a composite fiber having a core-sheath structure (a sheath component is a low-melting polymer), a two-layer non-woven fabric composed of a low-melting material and a high-melting material, and the like are preferable. Such reinforcements do not shrink during lamination. In addition, such a laminated film with a reinforcing material is used for HEPA filters and ULPs.
It is easy to process as an A filter, and the folding pitch can be increased when it is used as a filter element.
【００１４】本発明に用いられるＰＴＦＥ多孔質膜の製
造方法は特に限定されるものでなく、従来より提案され
ている様々な方法を使用できるものである。The method for producing the PTFE porous membrane used in the present invention is not particularly limited, and various conventionally proposed methods can be used.
【００１５】[0015]
【実施例】以下、実施例を用いて本発明を具体的に説明
する。なお、以下の実施例での各測定方法は次の通りで
ある。The present invention will be specifically described below with reference to examples. In addition, each measuring method in the following examples is as follows.
【００１６】（圧力損失）濾材を有効面積１００ｃｍ2
の円形のホルダーにセットし、入口側と出口側に圧力差
を与え、濾材の透過流速を流量計で５．３ｃｍ／ｓｅｃ
に調整したときの圧力損失を圧力計（マノメーター）で
測定した。５０箇所のサンプルを測定し、その平均値を
濾材の圧力損失とした。また、バラツキはその最大値と
最小値を示した。(Pressure loss) Effective area of the filter medium is 100 cm 2
Set in a circular holder, and a pressure difference is applied to the inlet side and the outlet side, and the permeation velocity of the filter medium is 5.3 cm / sec with a flow meter.
The pressure loss when adjusted to 1 was measured with a pressure gauge (manometer). Samples at 50 locations were measured, and the average value was taken as the pressure loss of the filter medium. Moreover, the variation showed the maximum value and the minimum value.
【００１７】（捕集効率）圧力損失測定と同一の装置を
用い、濾材の透過流速を５．３ｃｍ／ｓｅｃにして、上
流側に多分散ジオクチルフタレート（ＤＯＰ）を０．１
μｍ〜０．１５μｍの粒子が約１０7 ／リットルになる
ように流し、これを下流側の濃度をパーティクルカウン
ターで測定し、以下の式で捕集効率を求めた。 捕集効率＝｛１−（下流濃度／上流濃度）｝×１００％ （ただし、対象粒子は０．１〜０．１５μｍの範囲のも
のである。また、バラツキはその最大値と最小値で示し
た。） （リーク性能）捕集効率の測定において、０．３μｍ以
上の粒子が下流側でカウントされたサンプル数を示し
た。(Collection efficiency) Using the same device as the pressure loss measurement, the permeation flow rate of the filter medium was set to 5.3 cm / sec, and polydisperse dioctyl phthalate (DOP) was added to the upstream side of 0.1.
Particles of μm to 0.15 μm were made to flow so as to be about 10 7 / liter, the downstream concentration was measured by a particle counter, and the collection efficiency was determined by the following formula. Collection efficiency = {1- (downstream concentration / upstream concentration)} × 100% (However, the target particles are in the range of 0.1 to 0.15 μm. Further, the variation is shown by the maximum value and the minimum value. (Leak performance) In the measurement of collection efficiency, the number of samples in which particles of 0.3 μm or more were counted on the downstream side was shown.
【００１８】（圧力損失の上昇性）捕集効率測定と同一
の条件で、５分間ＤＯＰ粒子の負荷を与えた時の圧力損
失から初期の圧力損失を減じた値を示した。(Increase in pressure loss) A value obtained by subtracting the initial pressure loss from the pressure loss when a load of DOP particles was applied for 5 minutes was shown under the same conditions as the measurement of the collection efficiency.
【００１９】[0019]
【実施例１】ＰＴＦＥファインパウダー（商品名「ポリ
フロンＦ−１０４」、ダイキン工業製）１００重量部に
対して液状潤滑剤として炭化水素油の商品名「アイソパ
ーＭ」（エッソ石油社製）を２５重量部を均一に混合し
た混和物を圧力２０ｋｇ／ｃｍ2 で圧縮予備成形し、次
にこれをロッド状に押出成形し、更にこのロッド状物を
１対の金属製圧延ロール間に通し、厚さ０．２ｍｍ、幅
１５０ｍｍの長尺フィルムを得た。[Example 1] 100 parts by weight of PTFE fine powder (trade name "Polyflon F-104", manufactured by Daikin Industries, Ltd.) was used as a liquid lubricant with 25 "hydrocarbon oil" trade name "ISOPER M" (manufactured by Esso Oil Co., Ltd.). The mixture obtained by uniformly mixing the parts by weight is pre-compressed at a pressure of 20 kg / cm 2 , and then extruded into a rod shape, and the rod-shaped material is passed between a pair of metal rolling rolls to form a thick film. A long film having a length of 0.2 mm and a width of 150 mm was obtained.
【００２０】次いでこの成形物を２２０℃に加熱して液
状潤滑剤を除去して管状芯体にロール状に巻回した。次
いでこのシートを未焼成の状態で縦横延伸し、その後、
寸法を固定して焼成し、表１に示す各ＰＴＦＥ多孔質膜
を作製した。尚、圧力損失、捕集効率の変化は延伸温
度、倍率、焼成温度を変化させることで調整した。Next, this molded product was heated to 220 ° C. to remove the liquid lubricant, and wound around a tubular core body in a roll shape. Next, this sheet is longitudinally and transversely stretched in a non-baked state, and thereafter,
The PTFE porous membranes shown in Table 1 were produced by fixing the dimensions and firing. The changes in pressure loss and collection efficiency were adjusted by changing the stretching temperature, the magnification, and the firing temperature.
【００２１】[0021]
【表１】 [Table 1]
【００２２】次に、これらのＰＴＦＥ多孔質膜とポリエ
ステル／ポリエチレンの芯鞘構造を有する複合繊維で形
成されたスパンボンド不織布（商品名「エルベス」、ユ
ニチカ製）を用い、熱ラミネートにより図１の様なエア
ーフィルター濾材を作成した。図１において、１は表１
のＮｏ．１のＰＴＦＥ多孔質膜、２は表１のＮｏ．２の
ＰＴＦＥ多孔質膜、３は表１のＮｏ．３のＰＴＦＥ多孔
質膜である。また４は目付：４０g/mm2 の前記スパンボ
ンド不織布、５は目付：１５g/mm2 の前記スパンボンド
不織布、６は目付：１５g/mm2 の前記スパンボンド不織
布、７は目付：２０g/mm2 の前記スパンボンド不織布で
ある。Next, a spunbonded non-woven fabric (commercial name "Elves", manufactured by Unitika) formed of these PTFE porous membranes and a composite fiber having a core / sheath structure of polyester / polyethylene is used for thermal lamination of FIG. Such an air filter medium was prepared. In FIG. 1, 1 is Table 1
No. No. 1 in Table 1 is a porous PTFE membrane. The PTFE porous membrane of No. 2 and No. 3 of Table 1. No. 3 PTFE porous membrane. Further, 4 is a unit weight: 40 g / mm 2 of the spunbonded nonwoven fabric, 5 is a basis weight: 15 g / mm 2 of the spunbonded nonwoven fabric, 6 is a basis weight: 15 g / mm 2 of the spunbonded nonwoven fabric, and 7 is a basis weight: 20 g / mm. 2 is the spunbonded nonwoven fabric.
【００２３】得られたエアーフィルター濾材の特性は、
後の表３にまとめて示す。The characteristics of the obtained air filter medium are as follows:
It is summarized in Table 3 below.
【００２４】[0024]
【比較例１】国際公開番号ＷＯ９４／１６８０２号の実
施例より成る多孔質膜（横方向延伸倍率４０倍）を作成
した。この多孔質膜の圧力損失と捕集効率は表２に示す
ようであった。[Comparative Example 1] A porous membrane (a transverse stretching ratio of 40 times) composed of an example of International Publication No. WO94 / 16802 was prepared. Table 2 shows the pressure loss and the collection efficiency of this porous membrane.
【００２５】[0025]
【表２】 [Table 2]
【００２６】このＰＴＦＥ多孔質膜とポリエステル／ポ
リエチレンの芯鞘構造を有する複合繊維で形成されたス
パンボンド不織布（エルベスユニチカ製）を用い、熱ラ
ミネートにより図２の様なエアーフィルター濾材を作成
した。尚、使用不織布の総秤量は実施例と合わせた。図
２において、１１はＰＴＦＥ多孔質膜、１２は目付：７
０g/mm2 の前記スパンボンド不織布、１３は目付：２０
g/mm2 の前記スパンボンド不織布である。An air filter medium as shown in FIG. 2 was prepared by thermal lamination using a spunbonded non-woven fabric (made by Elves Unitika) made of this PTFE porous membrane and a composite fiber having a core / sheath structure of polyester / polyethylene. In addition, the total weighing of the used nonwoven fabric was the same as that of the example. In FIG. 2, 11 is a PTFE porous membrane, 12 is a basis weight: 7
0 g / mm 2 of the spunbonded non-woven fabric, 13 is a basis weight: 20
g / mm 2 of the spunbond nonwoven fabric.
【００２７】前記実施例１と比較例１のエアーフィルタ
ー濾材の圧力損失、圧力損失のバラツキ、捕集効率、捕
集効率のバラツキ、リーク性能、圧力損失の上昇性につ
いてテストした。その結果を表３に示した。The air filter media of Example 1 and Comparative Example 1 were tested for pressure loss, pressure loss variation, collection efficiency, collection efficiency variation, leak performance, and pressure loss increase. Table 3 shows the results.
【００２８】[0028]
【表３】 [Table 3]
【００２９】表３から明らかな通り、実施例１の濾材
が、圧力損失のバラツキ、捕集効率のバラツキ、リーク
性能、圧力損失の上昇性において優れていることが確認
できた。As is clear from Table 3, it was confirmed that the filter medium of Example 1 was excellent in the variation in pressure loss, the variation in collection efficiency, the leak performance, and the increase in pressure loss.
【００３０】[0030]
【発明の効果】以上説明した通り本発明によれば、ＰＴ
ＦＥ多孔質膜を２層以上積層したことにより、従来の１
層だけの場合と比較して、圧力損失のバラツキが緩和さ
れ、貫通したピンホールもなくなり、リークレスとなる
エアーフィルター用濾材を提供することができる。また
絶対的な気孔量も増大し寿命特性も優れたものになる。As described above, according to the present invention, PT
By stacking two or more layers of FE porous membrane,
It is possible to provide a filter medium for an air filter, in which variations in pressure loss are alleviated and pinholes penetrating are eliminated as compared with the case of only layers, and which is leakless. In addition, the absolute porosity increases and the life characteristics become excellent.
【００３１】前記において、ＰＴＦＥ多孔質膜の積層間
に、さらに補強材を介在させたという好ましい構成によ
れば、折り込み加工性や強度が向上する。また前記にお
いて、補強材が繊維不織布であると、ラミネート時に収
縮せず、また、このような補強材とのラミネート膜は、
ＨＥＰＡフィルターやＵＬＰＡフィルターとして加工し
やすく、フィルターエレメントにする際に折り込みピッ
チが増やせるという利点がある。In the above, according to the preferable constitution in which the reinforcing material is further interposed between the laminated porous PTFE membranes, the folding workability and the strength are improved. Further, in the above, when the reinforcing material is a fibrous nonwoven fabric, it does not shrink during lamination, and a laminated film with such a reinforcing material,
It has the advantages that it can be easily processed as a HEPA filter or ULPA filter, and that the folding pitch can be increased when forming a filter element.
【００３２】また前記構成においては、不織布を構成す
る繊維が、芯鞘構造の複合繊維であり、芯成分が鞘成分
より相対的に融点が高い合成繊維であると、ラミネート
時にさらに収縮せず、また、ＨＥＰＡフィルターやＵＬ
ＰＡフィルターとしてさらに加工しやすく、フィルター
エレメントにする際に折り込みピッチが増やせるという
利点がある。Further, in the above-mentioned constitution, when the fiber constituting the non-woven fabric is a composite fiber having a core-sheath structure and the core component is a synthetic fiber having a relatively higher melting point than that of the sheath component, further shrinkage does not occur during lamination, In addition, HEPA filter and UL
It has the advantage that it can be processed more easily as a PA filter and the folding pitch can be increased when it is used as a filter element.
【００３３】また前記において、５．３ｃｍ／ｓｅｃの
流速で空気を透過させる時の圧力損失が６５ｍｍＨ2 Ｏ
以下であると、クリーンルーム等のＨＥＰＡ及びＵＬＰ
Ａフィルターとしてさらに好都合である。Further, in the above description, the pressure loss when permeating air at a flow rate of 5.3 cm / sec is 65 mmH 2 O.
HEPA and ULP in clean rooms, etc.
It is more convenient as an A filter.
【００３４】また前記において、流体を流したときに、
上流側のＰＴＦＥ多孔質膜の圧力損失が下流側のＰＴＦ
Ｅ多孔質膜の圧力損失よりも低いと、フィルター寿命を
さらに長くできる。In the above, when a fluid is flown,
The pressure loss of the upstream PTFE porous membrane is the downstream PTFE
If it is lower than the pressure loss of the E porous membrane, the filter life can be further extended.
【図１】 本発明の実施例１のエアーフィルター濾材の
概念断面図。FIG. 1 is a conceptual cross-sectional view of an air filter medium according to a first embodiment of the present invention.
【図２】 比較例１のエアーフィルター濾材の概念断面
図。FIG. 2 is a conceptual cross-sectional view of an air filter medium of Comparative Example 1.
１，２，３ ＰＴＦＥ多孔質膜 ４，５，６，７ 芯鞘構造の複合繊維を用いたスパンボ
ンド不織布 １１ ＰＴＦＥ多孔質膜 １２，１３ 芯鞘構造の複合繊維を用いたスパンボンド
不織布1,2,3 PTFE porous membrane 4,5,6,7 Spunbonded nonwoven fabric using core-sheath composite fiber 11 PTFE porous membrane 12,13 Spunbond nonwoven fabric using core-sheath composite fiber
Claims (6)
２層以上積層したエアーフィルター用濾材。1. A filter material for an air filter, which comprises a stack of two or more layers of polytetrafluoroethylene porous membrane.
積層間に、さらに補強材を介在させた請求項１に記載の
エアーフィルター用濾材。2. The filter material for an air filter according to claim 1, wherein a reinforcing material is further interposed between the laminated polytetrafluoroethylene porous membranes.
エアーフィルター用濾材。3. The filter material for an air filter according to claim 2, wherein the reinforcing material is a non-woven fabric.
合繊維であり、芯成分が鞘成分より相対的に融点が高い
合成繊維である請求項３に記載のエアーフィルター用濾
材。4. The filter material for an air filter according to claim 3, wherein the fibers constituting the non-woven fabric are composite fibers having a core-sheath structure, and the core component is a synthetic fiber having a relatively higher melting point than the sheath component.
させる時の圧力損失が６５ｍｍＨ2 Ｏ以下である請求項
１に記載のエアーフィルター用濾材。5. The filter medium for an air filter according to claim 1, wherein the pressure loss when allowing air to permeate at a flow rate of 5.3 cm / sec is 65 mmH 2 O or less.
ラフルオロエチレン多孔質膜の圧力損失が下流側のポリ
テトラフルオロエチレン多孔質膜の圧力損失よりも低い
請求項１に記載のエアーフィルター濾材。6. The air filter according to claim 1, wherein the pressure loss of the polytetrafluoroethylene porous membrane on the upstream side is lower than the pressure loss of the polytetrafluoroethylene porous membrane on the downstream side when flowing the fluid. Filter media.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8016352A JPH09206568A (en) | 1996-02-01 | 1996-02-01 | Material for air filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8016352A JPH09206568A (en) | 1996-02-01 | 1996-02-01 | Material for air filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09206568A true JPH09206568A (en) | 1997-08-12 |
Family
ID=11913975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8016352A Pending JPH09206568A (en) | 1996-02-01 | 1996-02-01 | Material for air filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09206568A (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000035672A1 (en) * | 1998-12-11 | 2000-06-22 | Daikin Industries, Ltd. | Porous material, air filter filter medium, air filter unit and support material for air filter filter medium |
| US6310770B1 (en) | 1998-12-28 | 2001-10-30 | Nec Corporation | Dustproof structure of communication device, using air filter having distributed dust collecting efficiency and pressure loss |
| JP2001340732A (en) * | 2000-05-31 | 2001-12-11 | Pall Corp | Laminated filter element |
| US6416562B1 (en) | 1999-10-07 | 2002-07-09 | Daikin Industries, Ltd. | Air filter medium, air filter pack and air filter unit comprising the same, and method for producing air filter medium |
| JP2002346317A (en) * | 2001-05-24 | 2002-12-03 | Daikin Ind Ltd | Core material of filter medium roll and filter medium folding system equipped with filter medium roll |
| KR100424968B1 (en) * | 1997-09-02 | 2004-06-05 | 닛토덴코 가부시키가이샤 | Air filter and manufacturing method thereof |
| JP2005205305A (en) * | 2004-01-22 | 2005-08-04 | Nitto Denko Corp | Air filter medium |
| JP2012045524A (en) * | 2010-08-30 | 2012-03-08 | Fujifilm Corp | Crystallizable polymer microporous membrane and method for manufacturing the same, and filteration filter |
| JP2012144717A (en) * | 2010-12-21 | 2012-08-02 | Daikin Industries Ltd | Polytetrafluoroethylene mixture |
| JP2013057079A (en) * | 2012-11-28 | 2013-03-28 | Nitto Denko Corp | Winding body and filter medium for filter |
| WO2014156398A1 (en) * | 2013-03-29 | 2014-10-02 | 日東電工株式会社 | Method for producing air filter material, air filter material, and air filter pack |
| JP2015511173A (en) * | 2012-01-27 | 2015-04-16 | ゼウス インダストリアル プロダクツ インコーポレイテッド | Electrospun porous material |
| WO2018226076A3 (en) * | 2017-06-09 | 2019-01-24 | 주식회사 아모그린텍 | Filter medium, manufacturing method therefor, and filter unit including same |
| US11359064B2 (en) | 2017-11-15 | 2022-06-14 | Amogreentech Co., Ltd. | Composition for producing graphite-polymer composite and graphite-polymer composite produced therethrough |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05202217A (en) * | 1991-07-23 | 1993-08-10 | Daikin Ind Ltd | Porous polytetrafluoroethylene film |
-
1996
- 1996-02-01 JP JP8016352A patent/JPH09206568A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05202217A (en) * | 1991-07-23 | 1993-08-10 | Daikin Ind Ltd | Porous polytetrafluoroethylene film |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100424968B1 (en) * | 1997-09-02 | 2004-06-05 | 닛토덴코 가부시키가이샤 | Air filter and manufacturing method thereof |
| EP1142702A1 (en) * | 1998-12-11 | 2001-10-10 | Daikin Industries, Ltd. | Porous material, air filter filter medium, air filter unit and support material for air filter filter medium |
| WO2000035672A1 (en) * | 1998-12-11 | 2000-06-22 | Daikin Industries, Ltd. | Porous material, air filter filter medium, air filter unit and support material for air filter filter medium |
| EP1142702A4 (en) * | 1998-12-11 | 2002-06-19 | Daikin Ind Ltd | Porous material, air filter filter medium, air filter unit and support material for air filter filter medium |
| US6310770B1 (en) | 1998-12-28 | 2001-10-30 | Nec Corporation | Dustproof structure of communication device, using air filter having distributed dust collecting efficiency and pressure loss |
| US6421238B1 (en) | 1998-12-28 | 2002-07-16 | Nec Corporation | Dustproof structure of communication device, using air filter having distributed dust collecting efficiency and pressure loss |
| US6480381B2 (en) | 1998-12-28 | 2002-11-12 | Nec Corporation | Dustproof structure of communication device, using air filter having distributed dust collecting efficiency and pressure loss |
| US6487075B2 (en) | 1998-12-28 | 2002-11-26 | Nec Corporation | Dustproof structure of communication device, using air filter having distributed dust collecting efficiency and pressure loss |
| US6416562B1 (en) | 1999-10-07 | 2002-07-09 | Daikin Industries, Ltd. | Air filter medium, air filter pack and air filter unit comprising the same, and method for producing air filter medium |
| JP4495831B2 (en) * | 2000-05-31 | 2010-07-07 | ポール・コーポレーション | Multilayer filter element |
| JP2001340732A (en) * | 2000-05-31 | 2001-12-11 | Pall Corp | Laminated filter element |
| JP2002346317A (en) * | 2001-05-24 | 2002-12-03 | Daikin Ind Ltd | Core material of filter medium roll and filter medium folding system equipped with filter medium roll |
| JP2005205305A (en) * | 2004-01-22 | 2005-08-04 | Nitto Denko Corp | Air filter medium |
| JP2012045524A (en) * | 2010-08-30 | 2012-03-08 | Fujifilm Corp | Crystallizable polymer microporous membrane and method for manufacturing the same, and filteration filter |
| JP2012144717A (en) * | 2010-12-21 | 2012-08-02 | Daikin Industries Ltd | Polytetrafluoroethylene mixture |
| JP2015511173A (en) * | 2012-01-27 | 2015-04-16 | ゼウス インダストリアル プロダクツ インコーポレイテッド | Electrospun porous material |
| JP2013057079A (en) * | 2012-11-28 | 2013-03-28 | Nitto Denko Corp | Winding body and filter medium for filter |
| WO2014156398A1 (en) * | 2013-03-29 | 2014-10-02 | 日東電工株式会社 | Method for producing air filter material, air filter material, and air filter pack |
| JP2014208326A (en) * | 2013-03-29 | 2014-11-06 | 日東電工株式会社 | Manufacturing method of air filter medium, air filter medium, and air filter pack |
| KR20150138845A (en) * | 2013-03-29 | 2015-12-10 | 닛토덴코 가부시키가이샤 | Method for producing air filter material, air filter material, and air filter pack |
| CN105188878A (en) * | 2013-03-29 | 2015-12-23 | 日东电工株式会社 | Method for producing air filter material, air filter material, and air filter pack |
| CN105188878B (en) * | 2013-03-29 | 2017-04-05 | 日东电工株式会社 | The manufacture method of air filter filter medium, air filter filter medium and air filter element |
| WO2018226076A3 (en) * | 2017-06-09 | 2019-01-24 | 주식회사 아모그린텍 | Filter medium, manufacturing method therefor, and filter unit including same |
| US11839855B2 (en) | 2017-06-09 | 2023-12-12 | Amogreentech Co., Ltd. | Filter medium, manufacturing method therefor, and filter unit including same |
| US11359064B2 (en) | 2017-11-15 | 2022-06-14 | Amogreentech Co., Ltd. | Composition for producing graphite-polymer composite and graphite-polymer composite produced therethrough |
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