CN203577526U - Filter material of filter and filter unit - Google Patents

Filter material of filter and filter unit Download PDF

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Publication number
CN203577526U
CN203577526U CN201320678708.3U CN201320678708U CN203577526U CN 203577526 U CN203577526 U CN 203577526U CN 201320678708 U CN201320678708 U CN 201320678708U CN 203577526 U CN203577526 U CN 203577526U
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Prior art keywords
filter
filter filtration
filtration material
maintaining part
former
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森将明
堀江百合
新井雅弘
内山志穗
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Nitto Denko Corp
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Nitto Denko Corp
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Abstract

The utility model provides a filter material of a filter free of unexpected deformation under pressure of filtered gas as well as a filter unit. Spacer holding parts formed on two surfaces of a raw filter material and another side spacer holding part formed on the other surface side of the raw filter material are thinner than a surface side spacer holding part formed on a surface side of the raw filter material. The filter material of the filter, which is used in a bent state, is free of deformation under pressure of filtered gas. The filter material is easy to be bent in use, thus inhibiting deformation of the filter material due to gas pressure.

Description

Filter filtration material and filter unit
Technical field
The utility model relates to for trapping the filter filtration material that is filtered the contained particle of gas and the filter unit that uses this filter filtration material, and the former material of filter material particularly relating to trapping this particle carries out pleat the mace filter filtration material processing and the filter unit that uses this filter filtration material.
Background technology
In the past, as the filter filtration material of use in the dust free room etc. of factory of manufacturing semiconductor, liquid crystal, be known to filter filtration material 100 as shown in Figure 6.This filter filtration material 100 is by trapping to being configured to that the former material 200 of filter material that is filtered the contained particle of gas is bending in many places to be formed as folded shape and to form.
This filter filtration material 100 comprises by making the bending bend 100a forming of the former material of filter material 200, configuring multiple flat part 100b of forming and for keeping multiple intervals maintaining part 300 at adjacent flat part 100b, 100b interval each other in the relative mode in the region except bend 100a in the former material 200 of filter material.
This interval maintaining part 300 is formed by multiple ribs (bead) 300a of portion, and flank 300a forms by opening compartment of terrain adhesive-applying (PUR etc.) in two face overhead of the former material 200 of filter material.Specifically, interval maintaining part 300 is by flank 300a, the 300a of one side side and another side side being engaged and formed respectively between the each flat part 100b between the each flat part 100b in the one side side of the former material 200 of filter material and in another side side.That is to say, interval maintaining part 300 is formed between the each flat part 100b in the one side side of the former material 200 of filter material and between the each flat part 100b in another side side.
As shown in Fig. 7 (a), the filter filtration material 100 forming is as described above housed in the framework A that the mode can accommodate filter filtration material forms and forms filter unit 110.This framework A comprises: a pair of relative wall A1, A1, and it is opened the relative mode in compartment of terrain with sky and configures; And linking wall A2, its peripheral part by this pair of relative wall A1, A1 is connected to each other.And, be configured to and can in space (being also the denoted as below inner space) AR being surrounded by a pair of relative wall A1, A1 and link wall A2, accommodate filter filtration material 100.A pair of relative wall A1, A1 have the peristome A3, the A3 that are connected with inner space AR.Thus, framework A be configured to can make to be filtered gas from a peristome A3 side towards another peristome A3 side by inner space AR.
The filter filtration material 100 of being accommodated by framework A is disposed at a relative wall A1 side in the AR of inner space, and the peripheral part of filter filtration material 100 is fixed on framework A.Thus, between filter filtration material 100 wall A1 relative to another, be formed with interval.
The filter unit 110 forming as described above so that length L 1 direction of filter filtration material 100 mode of (being roughly orthogonal specifically) of intersecting with the circulating direction F that is filtered gas configure.That is to say, filter unit 110 is so that be filtered the height L3 direction of gas inherent filtration device filter material 100 and configure with the mode that filter filtration material 100 contacts.Thus, the gas that is filtered that flow into the inside of filter unit 110 from a peristome A3 of framework A sees through filter filtration material 100 and discharges from another peristome A3 of framework A in the AR of inner space.
Therefore, when making to be filtered gas in the interior circulation of filter unit 110, owing to being filtered the rising of the pressure loss of blast, filter filtration material 100 of gas, as shown in Fig. 7 (b), likely the central portion of filter filtration material 100 can bloat towards the downstream of circulating direction F that is filtered gas and the state that makes filter filtration material 100 become bending.
The bending of such filter filtration material 100 can cause the increase of the pressure loss or the reduction of filter efficiency of filter unit.In addition, when the bending of filter filtration material 100 becomes excessive, sometimes also can produce the breakage of filter unit 110.
As the bending method that prevents filter filtration material as described above, propose to have various schemes.For example, proposition has following method: by reduction, be used for the initial pressure loss of the former material of filter material that forms filter filtration material or the effective area of filter filtration material is increased, thereby reduce the rising of the pressure loss that the timeliness of filter filtration material changes and suppress the bending (with reference to patent documentation 1) of filter filtration material producing because of blast.In addition, proposition has following method: rigidity is installed on to filter filtration material higher than the member (being also denoted as below rigid member) of the rigidity of filter filtration material, thereby utilizes this rigid member to suppress the bending (with reference to patent documentation 2 and patent documentation 3) of filter filtration material.
But, as mentioned above, in the method for the rising of the pressure loss changing in the timeliness that reduces filter filtration material, the trapping performance trapping from the particle that is filtered gas is likely reduced.In addition, as mentioned above, using in the method for rigid member, spend the cost for preparing rigid member, and the labour and the time that when making filter filtration material, filter unit, spend, this can cause the reduction of production efficiency.
Patent documentation 1: TOHKEMY 2002-292215 communique
Patent documentation 2: Japanese kokai publication hei 11-42410 communique
Patent documentation 3: No. 2005/077492 file of International Publication
Utility model content
Therefore, problem of the present utility model is, provides and can prevent that the blast because being filtered gas from producing the filter filtration material of unexpected distortion and the filter unit of this filter filtration material of use.
Filter filtration material of the present utility model comprises: multiple bends, and the plurality of bend is that the former material of filter material that will be filtered the contained particle of gas by trapping bends to folded shape and forms; Multiple flat parts, the plurality of flat part is by the region except bend in former filter material material is configured and formed in relative mode; And multiple intervals maintaining part, the plurality of interval maintaining part is formed between the each flat part in the one side side of the former material of filter material and between the each flat part in another side side and for keeping adjacent bend interval each other, this filter filtration material is characterised in that, the thickness that is formed at the another side side interval maintaining part of another side side in the interval maintaining part of two faces of the former material of above-mentioned filter material, that be formed at the former material of filter material is thinner than the thickness of the one side side interval maintaining part of the one side side that is formed at the former material of filter material.
Adopt this structure, the interval each other of the flat part in the another side side of the former material of filter material is narrower than flat part in the one side side of the former material of filter material interval each other.Therefore, the region of the center side of the length direction of filter filtration material is easy to bloat to the one side side of the former material of filter material than the both ends of the length direction of filter filtration material, thereby is easy to make filter filtration material bending.Like this, by filter filtration material bending state use filter filtration material, can suppress filter filtration material and be out of shape because of the blast that is filtered gas.
Specifically, by making filter filtration material bending as described above, thereby the rigidity that the side that filter filtration material is bloated with respect to the region of the center side of inherent filtration device filter material puts on for the blast of filter filtration material uprises.The distortion of the filter filtration material that therefore, can suppress to be caused by blast.
In addition, preferably, above-mentioned interval maintaining part is by engaging a side rib portion and another side side rib portion is engaged and formed respectively between flat part between flat part, this side rib portion forms by placement of adhesives on a face of the former material of filter material, this another side side rib portion forms by placement of adhesives on another face of the former material of filter material, and the thickness at the position that is used to form interval maintaining part in another side side rib portion is thinner than the thickness at the position that is used to form interval maintaining part in an above-mentioned side rib portion.
Adopt this structure, the thickness that is formed as another side side interval maintaining part is thinner than the thickness of one side side interval maintaining part.Thus, be easy to make filter filtration material bending and use as described above, thereby can suppress the distortion that filter filtration material produces because of blast.
In addition, preferably, the thickness at the position that is used to form interval maintaining part in above-mentioned another side side rib portion be the position that is used to form interval maintaining part in a side rib portion thickness 20%~80%.
Filter unit of the present utility model is to form by accommodate this filter filtration material in the framework for accommodating the filter filtration material described in above-mentioned arbitrary technical scheme, it is characterized in that, above-mentioned framework has and flow into inner peristome for being filtered gas, above-mentioned filter filtration material is housed in framework agley, makes the region of the center side of the length direction of filter filtration material be positioned at the position by above-mentioned peristome side than the both ends of length direction.
As mentioned above, adopt the utility model, can prevent that filter filtration material from producing unexpected distortion because being filtered the blast of gas.
Accompanying drawing explanation
Fig. 1 is the stereogram that represents the filter filtration material of present embodiment.
Fig. 2 is stereogram and the partial enlarged drawing thereof that represents the former material of filter material of the filter filtration material of this embodiment.
(a) of Fig. 3 is that the face that intersects along the short transverse utilization of filter filtration material and flat part dissects the cutaway view that the filter filtration material of this embodiment forms, and (b) of Fig. 3 utilizes the face extending along length direction and the width of filter filtration material to dissect the cutaway view that filter filtration material forms.
Fig. 4 is the cutaway view that uses the filter unit of the filter filtration material formation of this embodiment.
Fig. 5 is the cutaway view that represents the interval maintaining part of the filter filtration material of another embodiment.
Fig. 6 is the stereogram that represents filter filtration material in the past.
(a) of Fig. 7 is that the filter filtration material of Fig. 6 is housed in framework and the cutaway view of the filter unit forming, (b) of Fig. 7 be on the filter unit of the blast that represents to be filtered gas (a) that be applied to Fig. 7 and make filter filtration material bending the cutaway view of state.
Description of reference numerals
1, filter filtration material; 1a, bend; 1b, flat part; 2, the former material of filter material; 2a, porous layer; 2b, substrate layer; 3A, one side side interval maintaining part; 3B, another side side interval maintaining part; 3a, a side rib portion; 3b, another side side rib portion; 10, filter unit; A1, bending presumptive area; A2, flat part presumptive area; X, framework; X1, relative wall; X2, link wall; X3, peristome; XR, inner space: F, circulating direction.
The specific embodiment
With reference to Fig. 1~Fig. 4, embodiment of the present utility model is described below.In addition, in following accompanying drawing, to identical or suitable part mark identical with reference to Reference numeral, do not repeat its explanation.
As shown in Figure 1, the filter filtration material 1 of present embodiment comprises: multiple bend 1a, and the plurality of bend 1a can trap the former material 2 of filter material that is filtered the contained particle of gas and bends to folded shape (being also denoted as below the processing of pleat mace) and form by making to be configured to; Multiple flat part 1b, the plurality of flat part 1b is by the region except bend 1a in former filter material material 2 is configured and formed in relative mode; And multiple interval maintaining part 3A, 3B, the plurality of interval maintaining part 3A is formed between the each flat part 1b in the one side side of the former material 2 of filter material, the plurality of interval maintaining part 3B is formed between the each flat part 1b in the another side side of the former material 2 of filter material, for keeping adjacent bend 1a, 1a interval each other.
As shown in Figure 2, the sheet that is formed as growing in one direction under the state of the former material 2 of above-mentioned filter material before bending to folded shape.In addition, the former material 2 of filter material both can be configured to by from unreeling and become sheet being formed as strip and rolled-up state compared with long mode in one direction, can be also the monolithic body that is formed as sheet in longer in one direction mode.
In addition, the former material 2 of filter material comprises for trapping and is filtered the porous layer 2a of the contained particle of gas and has gas permeability and be laminated in the substrate layer 2b of this porous layer 2a.In the present embodiment, the former material 2 of filter material comprises multiple (being two specifically) porous layer 2a, at porous layer 2a, disposes each other substrate layer 2b.Like this, by form the former material 2 of filter material with multiple porous layer 2a, compared with the situation that forms the former material 2 of filter material with the porous layer 2a by single, can suppress the pressure loss, arresting efficiency produces deviation.In addition,, owing to can suppressing to connect the formation of the such pin hole of the former material 2 of filter material, therefore, can obtain the former material 2 of filter material of leak free structure.
The sheet material (being also denoted as below Porous sheet) that use can trap the Porous of above-mentioned particle forms above-mentioned porous layer 2a.As this Porous sheet, be not particularly limited, can suitably select according to the purposes of filter filtration material 1.As this Porous sheet, can list PTFE sheet, melt spraying non-woven fabrics, electret filter or the glass fibre etc. that for example by polytetrafluoroethylene (PTFE) being formed as to sheet, form.In the present embodiment, use PTFE sheet as Porous sheet.As the method that forms PTFE sheet, for example, can adopt following method.
Specifically, to adding aqueous lubricant in PTFE fine powder and form the mixture of paste.As PTFE fine powder, be not particularly limited, can list such as polytetrafluoroethylene (PTFE) (polyflon) F-104(Daikin Industries company manufacture), teflon (fluon) CD-123(rising sun ICI Fluoropolymers company manufacture), fluorine chemical company of teflon 6J(Mitsui Du Pont manufacture) etc.As aqueous lubricant, be not particularly limited, as long as can give appropriate wetability to mixture surface, if aqueous lubricant can utilize extraction process, heat treated and be removed, particularly preferably.As aqueous lubricant, for example, except the hydrocarbon ils such as fluid paraffin wax, naphtha, white oil, toluene, dimethylbenzene, also can list ethanol class, ketone, ester class and mixtures more than two classes in them etc.As the addition of aqueous lubricant, be not particularly limited, can be according to the kind of PTFE fine powder and aqueous lubricant, the manufacturing process while obtaining PTFE sheet suitably adjusts.Specifically, as the addition of aqueous lubricant, preferably, with respect to PTFE fine powder 100 weight portions, be 5 weight portion~50 weight portions.
Then, the said mixture consisting of PTFE fine powder and aqueous lubricant is carried out preform and makes preform.Specifically, by being the bar-shaped preform of making by said mixture extrusion molding.Under the pressure of the degree that preferably, can not separate from mixture at aqueous lubricant, carry out this preform.
Then, by the preform extrusion molding, the roll forming that obtain are configured as to sheet.As the method that this preform is configured as to sheet, for example can list by preform is supplied between pair of rolls, be rolled and by preform be formed as the method for sheet, the method that is sheet by preform extrusion molding or be further supplied to and be rolled between pair of rolls and preform be formed as to method of sheet etc. by the preform that is sheet by extrusion molding.As the thickness of the formed body of the sheet obtaining, be not particularly limited, be for example preferably 0.05mm~0.5mm.
Then,, by by the formed body uniaxial tension of the sheet obtaining or the biaxial stretch-formed formed body porous materialization that makes this sheet, form PTFE sheet.In the present embodiment, the formed body of sheet is alongst stretched, and also along with the orthogonal width of length direction stretch (biaxial stretch-formed).In addition, preferably, before being stretched, the formed body of sheet removes aqueous lubricant from this formed body.When removing aqueous lubricant, can adopt the method (heating) of this formed body heating, this formed body is immersed in to the method (extraction method) of extracting aqueous lubricant in solvent.
When the formed body of sheet is alongst stretched, stretching ratio can promote the fibrillation of this formed body and be easy to make this formed body porous materialization compared with large mode.Therefore, as stretching ratio, for example, be preferably 10 times~30 times.In addition, the temperature conditions during as this formed body of stretching, is not particularly limited, for example, be preferably 150 ℃ above and be less than 327 ℃.
By the formed body of the sheet after alongst stretching is stretched along width, effectively make this formed body fibrillation, can obtain the less PTFE sheet of deviation in aperture.As the condition that the formed body of sheet is stretched along width, be not particularly limited, for example stretching ratio is preferably 20 times~100 times.In addition, preferably, the area stretching ratio that the formed body that makes sheet is stretched to the product representation of the stretching ratio when stretching along its length before take the stretching ratio on width along width is as more than 450 times.Area stretching ratio is larger, more can further promote fibrillation, can obtain the PTFE sheet of the Porous that PF value is larger.In addition, as draft temperature, be not particularly limited, for example, be preferably 40 ℃~100 ℃.
It is 50mmH that the PTFE sheet forming as above has the pressure loss 2o is following, arresting efficiency is more than 99.9% excellent characteristic.Particularly, at area stretching ratio, be more than 450 times in the situation that, the pressure loss is reduced to and is less than 20mmH 2o and arresting efficiency can significantly not reduce, and PF value is more than 22.Thus, can obtain the PTFE sheet of the Porous of very excellent performance.The deviation of the pressure loss between the each PTFE sheet obtaining in addition, also diminishes.Therefore, become operating cost lower and demonstrate the PTFE sheet of the Porous of very excellent dust removal performance.
In addition, in order to obtain strength enhancing, dimensional stability, also can further to the PTFE sheet obtaining, heat-treat (firing processing) as above.Conventionally, with the temperature more than fusing point of PTFE sintered body, make the size of PTFE sheet fix and PTFE sheet is heat-treated.In addition, utilize this heat treatment, can reduce the pressure loss.Therefore in the PF of PTFE sheet value, be more than 22,, the demonstration pressure loss is 20mmH 2in situation more than O, can utilize this heat treatment that the pressure loss is reduced to and be less than 20mmH 2o.
Above-mentioned substrate layer 2b is used the sheet material (being also denoted as below gas permeability sheet) with gas permeability to form.As gas permeability sheet, be not particularly limited, such as can list nonwoven, spin cloth, screen cloth, macromolecular fibre etc.Particularly, make porous layer 2a(Porous synusia) and substrate layer 2b(gas permeability sheet) thermal welding (heat lamination) in the situation that, preferably use the gas permeability sheet forming by thering are thermoplastic raw material.
As the material of gas permeability sheet, the material (two-layer nonwoven of nonwoven, low melting material and the materials with high melting point for example being formed by the fiber of core/sheath structure etc.) that can list the such as polyolefin such as polyethylene, polypropylene, nylon, polyester, aramid fiber (being fragrant family polyamide etc. specifically) or they are composited.In addition, as the material of gas permeability sheet, can list such as PFA(tetrafluoroethylene/perfluoro alkyl vinyl ether co-polymer), FEP(tetrafluoroethylene/hexafluoropropylene copolymer), the fluorine such as the multiple aperture plasma membrane of PTFE is perforated membrane.
Particularly, preferably use and utilize the composite fibre of being constructed by core sheath and be the nonwoven that forms higher than the synthetic fibers of the fusing point of sheath composition of the fusing point of core composition, the gas permeability sheet being formed by low melting material and this two-layer nonwoven forming of materials with high melting point etc.By using such nonwoven, can be suppressed at porous layer 2a(Porous synusia) and substrate layer 2b(gas permeability sheet) contraction that produces in substrate layer 2b during heat lamination.In addition, by using this nonwoven, to add the processability in man-hour good being carried out pleat mace for the former material 2 of filter material, can increase the flexible position (folding into spacing reduces) of the former material 2 of filter material.
As the method that forms the former material 2 of filter material as described above, be not particularly limited, for example can adopt following method: configure PUR, pressure sensitive bonding agent being used to form the Porous sheet of porous layer 2a and being used to form between the gas permeability sheet of substrate layer 2b, by Porous sheet and the crimping of gas permeability sheet.Or, can adopt gas permeability sheet that heating softened and the method for Porous sheet crimping (heat lamination).
On the former material 2 of filter material forming as described above, be formed with flank 3a for forming interval maintaining part 3A, for forming the flank 3b of interval maintaining part 3B.This flank 3a, 3b are carrying out formation after the processing of pleat mace to the former material 2 of filter material.Specifically, by former filter material material 2 along bending and after carrying out the processing of pleat mace in many places with the orthogonal width of a direction (length direction), former filter material material 2 is stretched to the flat condition before the processing of pleat mace, and on two faces of the former material 2 of filter material adhesive-applying, form thus flank 3a, 3b.As the shape of flank 3a, 3b, be not particularly limited, in the present embodiment, along a direction (length direction) of the former material 2 of filter material, be formed as wire.
Flank (being also denoted as the below a side rib portion) 3a that is formed on the one side side of the former material 2 of filter material is formed at the many places of the former material 2 of filter material with flank (being also denoted as the below another side side rib portion) 3b of the another side side that is formed on the former material 2 of filter material.Specifically, 3a of side rib portion and the another side side rib 3b of portion are formed with multiple along the empty standard width of a room in an old-style house of a direction (length direction) of the former material 2 of filter material every ground.And, 3a of side rib portion and the another side side rib 3b of portion along the direction (length direction) of the former material 2 of filter material alternately (and, with can not be across the overlapping mode of the former material 2 of filter material) arrange.In addition, 3a of side rib portion and the another side side rib 3b of portion open compartment of terrain along the width sky of the former material 2 of filter material and are arranged with multiple (being 3 in the present embodiment).
3a of side rib portion and the another side side rib 3b of portion with add and become the region of bend 1a (being also denoted as below bending presumptive area) the A1 mode of (roughly orthogonal) of intersecting man-hour and form the former material 2 of filter material being carried out to pleat mace.Specifically, the bending presumptive area A1 and the 3a of side rib portion that are configured in adjacent bending presumptive area A1, A1 intersect and another bending presumptive area A1 and the another side side rib 3b of portion intersection.In addition, 3a of side rib portion and the another side side rib 3b of portion are formed on the face of peak side that will become bend 1a in each bending presumptive area A1.
In addition, 3a of side rib portion and the another side side rib 3b of portion are formed at and add on two faces that become the region of flat part 1b (being also denoted as below flat part presumptive area) A2 man-hour the former material 2 of filter material is carried out to pleat mace.Specifically, 3a of side rib portion and the another side side rib 3b of portion are formed into the substantial middle portion of flat part presumptive area A2 from the position intersecting with bending presumptive area A1.
In addition, the 3a of side rib portion forming as described above and the another side side rib 3b of portion are configured to the another side side rib 3b(of portion and at length say, be used to form the position of interval maintaining part 3B) thickness be thinner than a 3a(of side rib portion and at length say, be used to form the position of interval maintaining part 3A) thickness.Specifically, the coating amount of the bonding agent by making the another side side that is coated on the former material 2 of filter material is less than the coating amount of the bonding agent of the one side side that is coated on the former material 2 of filter material, thereby makes the thickness of the another side side rib 3b of portion be thinner than the thickness of a 3a of side rib portion.Ratio as the thickness of the another side side rib 3b of portion with respect to the thickness of a 3a of side rib portion, is preferably 20%~80%, and more preferably 40%~60%.In addition, the thickness of each flank 3a, 3b refers to, and is configured in the thickness in the direction of thickness direction that is equivalent to the former material 2 of filter material of each flank 3a, 3b on two faces of the former material 2 of filter material.
As the bonding agent for forming a 3a of side rib portion and the another side side rib 3b of portion, be not particularly limited, for example can use PUR.As the temperature when PUR coating is on the former material 2 of filter material, according to the composition of PUR and difference is for example preferably 100 ℃~250 ℃, more preferably 140 ℃~230 ℃.
The former material 2 of filter material that makes to be as described above formed with flank 3a, 3b is again bending and be formed as folded shape in each bending presumptive area A1.Thus, as shown in Fig. 3 (a), form multiple bend 1a and multiple flat part 1b.In addition, by the position between the each flat part 1b on two faces of the former material 2 of filter material in each flank 3a, 3b is engaged with each other, thereby form interval maintaining part 3A, 3B.Thus, form filter filtration material 1.In addition, in the case of using PUR as the bonding agent for forming flank 3a, 3b, preferably, when PUR softens to the degree that PUR can engage each other, (in the open time (in Japanese: オ ー プ Application タ イ system)) is formed as folded shape again by former filter material material 2.
In addition, in the following description, in the direction suitable with a direction (length direction) of the former material 2 of filter material in filter filtration material 1, be of a size of the length L 1 of filter filtration material 1.In addition in the direction suitable with another direction (width) of the former material 2 of filter material in filter filtration material 1, be of a size of, the width L2 of filter filtration material 1.In addition, with the one side side of the former material 2 of filter material, become bend 1a that the mode of peak side forms and become the height L3 that is spaced apart filter filtration material 1 between the bend 1a that the mode of peak side forms with the another side side of the former material 2 of filter material.
In the filter filtration material 1 forming as described above, in the one side side of the former material 2 of filter material, be formed with interval maintaining part 3A, in another side side, be formed with interval maintaining part 3B.In addition, each interval maintaining part 3A, 3B are formed as linearity along the height L3 direction of filter filtration material 1.In addition, as shown in Fig. 3 (a), Fig. 3 (b), each interval maintaining part (being also denoted as below another side side interval maintaining part) 3B of each interval maintaining part of the one side side of filter filtration material 1 (being also denoted as below one side side interval maintaining part) 3A and another side side alternately arranges along length L 1 direction (being specifically on the straight line extending along length L 1 direction) of filter filtration material 1.
In addition, to be formed as thickness different for one side side interval maintaining part 3A and another side side interval maintaining part 3B.Specifically, the thickness of another side side interval maintaining part 3B is formed as being thinner than the thickness of one side side interval maintaining part 3A.More particularly, by the position between flat part 1b in the another side side rib 3b of portion of the thin thickness of a 3a of side rib portion of Thickness Ratio is engaged with each other, thereby form the simultaneously another side side interval maintaining part 3B of the thin thickness of side interval maintaining part 3A of Thickness Ratio.Ratio as the thickness of another side side interval maintaining part 3B with respect to the thickness of one side side interval maintaining part 3A, is preferably 20%~80%, and more preferably 40%~60%.In addition, the thickness of each interval maintaining part 3A, 3B refers to the thickness in the direction that is equivalent to adjacent flat part direction respect to one another.
Like this, by being configured to the thickness of another side side interval maintaining part 3B, be thinner than the thickness of one side side interval maintaining part 3A, thereby as shown in Fig. 3 (a), Fig. 3 (b), make interval between the each flat part 1b in the another side side of the former material 2 of filter material be narrower than the interval between the each flat part 1b in the one side side of the former material 2 of filter material.
As shown in Figure 4, the filter filtration material 1 forming is as described above housed in the framework X that the mode can accommodate filter filtration material 1 forms and as filter unit 10.This framework X comprises: a pair of relative wall X1, X1, and this pair of relative wall X1, X1 open the relative mode in compartment of terrain with sky and configure; And linking wall X2, it is for by connected to each other the peripheral part of this pair of relative wall X1, X1.And, be configured to and can in space (being also the denoted as below inner space) XR being surrounded by a pair of relative wall X1, X1 and link wall X2, accommodate filter filtration material 1.A pair of relative wall X1, X1 have the peristome X3, the X3 that are connected with inner space XR.Thus, framework X be configured to can make to be filtered gas from a peristome X3 side towards another peristome X3 side by inner space XR.
As the shape of framework X, as long as accommodating the shape of filter filtration material 1, just there is no particular limitation, and that can to list such as inside dimension and be 1180mm × 1180mm, outside dimension and be 1220mm × 1220mm, thickness be 75mm is rectangular-shaped, have the round-shaped etc. of predetermined internal diameter.In addition, as the material of framework X, be not particularly limited, can use the material of aluminum.
So that length L 1 reaches the mode of the length of regulation, filter filtration material 1 is regulated, thereby filter filtration material 1 is housed in framework X.Specifically, so that the length L 1 of filter filtration material 1 is longer than the mode of the upper interval XL1 of the direction of accommodating filter filtration material 1 in framework X (being the direction along length L 1 direction of filter filtration material 1 specifically) between the inner surface that links wall X2, filter filtration material 1 is regulated to (cut-out).
And filter filtration material 1 becomes state bending in framework X under the state being accommodated in framework X.Specifically, under state in filter filtration material 1 is housed in framework X, filter filtration material 1 becomes following state: filter filtration material 1 is along length L 1 direction bending, make the both ends of length L 1 direction of filter filtration material 1 be connected to the inner surface (being more particularly the inner surface that links wall X2) of framework X, and the region of the center side of length L 1 direction of filter filtration material 1 is positioned at the position by a peristome X3 side than the both ends of the length L of filter filtration material 11 direction.
In addition, as by so that in other words the one side side of filter filtration material 1 becomes each bend 1a(that the mode of peak side forms, be formed at each bend 1a of the larger side in the interval of each flat part 1b) the connected to each other and radius (bending radius) of the circular arc that forms of apex, be not particularly limited, for example, be preferably 250mm~1500mm, more preferably 290mm~1200mm.
Between filter filtration material 1 and framework X, be filled with caulking agent.As this caulking agent, can list for example two pendular ring oxygen caulking agents (being that Henkel Corp. manufactures the two pendular ring oxygen caulking agents that Macroplast 8104MC-18 and Macroplast UK5400 are mixed with the ratio of 3:1 specifically) etc.
This filter filtration material unit 10 is suitable as the HEPA(High Efficiency Particulate Air of dust free room etc.: highly effective air) filter and ULPA(Ultra Low Penetration Air: ultra high efficiency air) filter.
The filter unit 10 forming as described above configures in length L 1 direction of filter filtration material 1 mode of (being roughly orthogonal specifically) of intersecting with the circulating direction F that is filtered gas.That is to say, filter unit 10 is so that be filtered the height L3 direction of gas inherent filtration device filter material 1 and configure with the mode that filter filtration material 1 contacts.In addition, in filter unit 10, with the region of the center side of length L 1 direction of filter filtration material 1, be positioned at than the both ends of the length L of filter filtration material 11 direction and configure by the mode of position of upstream side of the circulating direction F that is filtered gas.Thus, the gas that is filtered that flow into the inside of filter unit 10 from a peristome X3 of framework X sees through filter filtration material 1 and discharges from another peristome X3 of framework X in the XR of inner space.
As mentioned above, adopt filter filtration material of the present utility model and filter unit, can prevent that the blast because being filtered gas from producing unexpected distortion.
; by above-mentioned filter filtration material 1 being configured to the thickness of another side side interval maintaining part 3B, be thinner than the thickness of one side side interval maintaining part 3A, thereby make flat part 1b in the another side side of the former material 2 of filter material interval each other be narrower than flat part 1b in the one side side of the former material 2 of filter material interval each other.Therefore, the region of the center side of the length direction of filter filtration material 1 is easy to bloat to the one side side of the former material 2 of filter material than the both ends of the length direction of filter filtration material 1, thereby is easy to make filter filtration material 1 bending.Like this, by bending state under use filter filtration material 1, can suppress filter filtration material 1 and be out of shape because of the blast that is filtered gas.
Specifically, by making filter filtration material 1 bending as described above, thereby the rigidity that the side that filter filtration material 1 is bloated with respect to the region of the center side of inherent filtration device filter material 1 puts on for the blast of filter filtration material 1 uprises.Therefore, can suppress the distortion of the filter filtration material 1 that blast causes.
In addition, by being configured to the thickness at the position that is used to form another side side interval maintaining part 3B in the another side side rib 3b of portion, be thinner than the thickness at position that is used to form one side side interval maintaining part 3A in a 3a of side rib portion, thereby the thickness that is formed as another side side interval maintaining part 3B is thinner than the thickness of one side side interval maintaining part 3A.Thus, be easy to make filter filtration material 1 bending and use as described above, thereby can suppress the distortion that filter filtration material 1 produces because of blast.
In addition, filter filtration material of the present utility model and filter unit are not limited to above-mentioned embodiment, can in the scope that does not depart from purport of the present utility model, carry out various changes.In addition, self-evident, structure, method that also can at random adopt above-mentioned multiple embodiments etc. combines (also the structure of 1 embodiment, method etc. can be applied to structure, method of another embodiment etc.), and, also can at random select structure, method of following various modifications etc. and be applied to structure, method of above-mentioned embodiment etc.
For example, in the above-described embodiment, the mode of intersecting with flank 3a, 3b and bend 1a has formed flank 3a, 3b, but be not limited thereto, as shown in Figure 5, also can only by the part that is used to form interval maintaining part 3A, form flank 3a ', only by the part that is used to form interval maintaining part 3B, form flank 3b '.
In addition, in the above-described embodiment, interval maintaining part 3 is formed with multiple every ground along the empty standard width of a room in an old-style house of bend 1a, but be not limited thereto, and also can form along bend 1a.
In addition, in the above-described embodiment, use the former material 2 of the filter material being formed by porous layer 2a and substrate layer 2b to form filter filtration material 1, but be not limited thereto, for example, also can use the former material of the filter material only being formed by porous layer 2a.In addition, in the above-described embodiment, use multiple porous layer 2a to form the former material 2 of filter material, but be not limited thereto, also can only by single porous layer 2a and substrate layer 2b, form the former material of filter material.
Embodiment
Embodiment of the present utility model is described below.
Make filter filtration material
1. Porous sheet
PTFE sheet has been used as to Porous sheet.Specifically, with respect to PTFE fine powder (rising sun ICIFluoropolymers company manufacture teflon CD-123) 100 weight portions, add aqueous lubricant (dodecane) 20 weight portions and formed the mixture of paste.Then, this mixture is pre-formed into bar-shaped.Afterwards, as embodiment described above, preform is supplied between pair of rolls member and is rolled, thereby made strip sheet (thickness: 200 μ m).Then, strip sheet is alongst stretched 11 times under the environment of 200 ℃, and under the environment of 80 ℃ along stretching 25 times with the orthogonal width of length direction, obtained thus the PTFE sheet of not firing.
Using hot blast to produce stove fires the PTFE sheet making with 400 ℃.The average pore size of the PTFE sheet after firing is 0.6 μ m, and thickness is 16 μ m, and average fiber footpath is 0.08 μ m, and arresting efficiency is 99.999%, and the pressure loss is 160Pa.By following method, the pressure loss and arresting efficiency have been obtained.
2. gas permeability sheet
Used the gas permeability sheet (manufacture of ELEVESS030WDO You Nijia company) forming in longer in one direction mode.
3. make the former material of filter material
Mode with the length direction of above-mentioned Porous sheet and the length direction almost parallel of gas permeability sheet in laminated porous, is transported to above-mentioned Porous sheet and above-mentioned gas permeability sheet between pair of rolls member (hot-rolling and backing roll) on two faces of gas permeability sheet.Thus, by the heat-sealing of Porous sheet and gas permeability sheet and bonding.Thus, made the former material 2(of filter material as shown in Figure 2 width L2:580mm).The pressure loss of the former material 2 of this filter material is 170Pa, and arresting efficiency is 99.999%, and thickness is 0.32mm.
The pressure loss
Make gas permeation be arranged at circular retaining member (effective area: 100cm 2) test sample (the former material 2 of the Porous sheet making or filter material) time, utilize pressure gauge (manometer) to measure the draught head between one side side and the another side side of test sample.In addition, seeing through flow velocity is 5.3cm/ second, at 8 places of test sample, has measured draught head.The arithmetic mean of instantaneous value of the measurement result obtaining is the above-mentioned pressure loss.
Arresting efficiency
Make to contain about 109/more than L dioctyl phthalate (DOP) gas permeation be arranged at circular retaining member (effective area: 100cm 2) test sample (the former material 2 of the Porous sheet making or filter material).Then, utilize particle collector to measure the DOP concentration that sees through the gas after test sample.And, use following formula (1) to calculate arresting efficiency (%).In addition, seeing through flow velocity is 5.3cm/ second.DOP particle is in the scope of 0.1 μ m~0.2 μ m.
Arresting efficiency (%)=and 1-(downstream concentration/upstream concentration) } × 100...(1)
Embodiment 1 and embodiment 2
Filter filtration material
After the former material 2 of the filter material making is carried out to the processing of pleat mace, as shown in Figure 3, by forming a 3a of side rib portion and the another side side rib 3b of portion, thereby made filter filtration material 1.The length L 1 of the filter filtration material 1 making is 580mm, and width L2 is 580mm, and height L3 is 35mm, and the pleat number of every 1 inch is 8.As the bonding agent (PUR) that is used to form each flank 3a, 3b, the Macromelt 6202(that has used Henkel Corp. to manufacture is polyamide-based).In addition, the quality of a 3a of side rib portion is illustrated in following table 1 with respect to the ratio (rib table back of the body ratio) of the quality of the another side side rib 3b of portion.In addition, utilize following formula (2) to calculate rib table back of the body ratio.
The quality of quality/another side side rib 3b of portion of rib table back of the body ratio=mono-3a of side rib portion ... (2)
In addition measured as follows, the quality of a 3a of side rib portion and the another side side rib 3b of portion.Specifically, first, measured the test film (1.0m that inherent filtration device filter material 1 extracts 2) quality.Then, heat run sheet, measured by a 3a(of side rib portion or, the another side side rib 3b of portion) quality of test film after removing.Then, according to of poor quality before and after the heating of test film, calculated a 3a(of side rib portion or the another side side rib 3b of portion) quality.
Filter unit
It is 580mm × 580mm that filter filtration material 1 is housed in to framework X(inside dimension, and outside dimension is 610mm × 610mm, the aluminum that thickness is 80mm) inner side, and utilize two pendular ring oxygen ca(u)lk materials by the clearance seal between framework X and filter filtration material 1.Thus, made filter unit 10 as shown in Figure 4.In addition,, as two pendular ring oxygen ca(u)lk materials, Macroplast 8104MC-18 and the two pendular ring oxygen ca(u)lk materials that mix with the ratio of 3:1 of Macroplast UK5400 that Henkel Corp. is manufactured have been used.
Be housed in the state that filter filtration material 1 in framework X becomes bending, make the region of the center side of length L 1 direction of filter filtration material 1 be positioned at the position by a peristome X3 side than the both ends of length L 1 direction.In addition, by by so that the one side side of filter filtration material 1 becomes the radius (bending radius) of the apex circular arc forming connected to each other of each bend 1a that the mode of peak side forms is illustrated in following table 1.
Resistance to pressure test
The central portion of the filter filtration material 1 in the filter unit making has been applied to load from the side bloating than the both ends of length L 1 direction.Now, measured the displacement (displacement on loading direction) of the central portion of filter filtration material 1.As the method for imposed load, used the central portion of filter filtration material 1 load more than 1 counterweight (
Figure BDA0000405167790000181
137mm, 10kg) method.
Comparative example 1
So that becoming 0 mode, rib table back of the body ratio formed each flank 3a, 3b.In addition, filter filtration material 1 is not housed in framework X agley, in addition, with the condition identical with embodiment 1, has measured deflection.Deflection is illustrated in following table 1.
Table 1
Figure BDA0000405167790000191
Sum up
According to the comparison of each embodiment and comparative example 1, find out that each embodiment is less than the deflection of comparative example 1 with respect to load with respect to the deflection of load.That is to say, can find out, as each embodiment, by the state that makes filter filtration material 1 become bending, thereby improved the rigidity of filter filtration material 1 for the load of the side bloating from the center side of filter filtration material 1, therefore can suppress the distortion of filter filtration material 1.
In addition, according to the comparison of embodiment 1 and embodiment 2, can find out, by increasing rib table back of the body ratio, thereby bending radius be diminished.That is to say, when rib table back of the body ratio becomes large, the difference at the interval each other of the each flat part 1b in the another side side of interval each other of the each flat part 1b in the one side side of the former material 2 of filter material and the former material 2 of filter material becomes large.Therefore, can make filter filtration material 1 be easier to bending, thereby can reduce bending radius.Can find out, can improve thus the rigidity of filter filtration material 1 as described above, therefore can more effectively suppress the distortion of filter filtration material 1.

Claims (4)

1. a filter filtration material, it comprises: multiple bends, the plurality of bend is that the former material of filter material that will be filtered the contained particle of gas by trapping bends to folded shape and forms; Multiple flat parts, the plurality of flat part is by the region except bend in former filter material material is configured and formed in relative mode; And multiple intervals maintaining part, the plurality of interval maintaining part is formed between the each flat part in the one side side of the former material of filter material and between the each flat part in another side side and for keeping adjacent bend interval each other,
This filter filtration material is characterised in that,
The thickness that is formed at the another side side interval maintaining part of another side side in the interval maintaining part on two faces of the former material of above-mentioned filter material, that be formed at the former material of filter material is thinner than the thickness of the one side side interval maintaining part of the one side side that is formed at the former material of filter material.
2. filter filtration material according to claim 1, is characterized in that,
Above-mentioned interval maintaining part is by engaging a side rib portion and another side side rib portion is engaged and formed between flat part between flat part, this side rib portion forms by placement of adhesives on a face of the former material of filter material, this another side side rib portion forms by placement of adhesives on another face of the former material of filter material, and the thickness at the position that is used to form interval maintaining part in another side side rib portion is thinner than the thickness at the position that is used to form interval maintaining part in an above-mentioned side rib portion.
3. filter filtration material according to claim 2, is characterized in that,
The thickness at the position that is used to form interval maintaining part in above-mentioned another side side rib portion be the position that is used to form interval maintaining part in a side rib portion thickness 20%~80%.
4. a filter unit, it is to form by accommodate this filter filtration material in the framework for accommodating the filter filtration material described in the claims 1 to 3 any one, it is characterized in that,
Above-mentioned framework has and flow into inner peristome for being filtered gas, above-mentioned filter filtration material is housed in framework agley, makes the region of the center side of the length direction of above-mentioned filter filtration material be positioned at the position by above-mentioned peristome side than the both ends of length direction.
CN201320678708.3U 2012-10-30 2013-10-30 Filter material of filter and filter unit Expired - Lifetime CN203577526U (en)

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CN106268085A (en) * 2015-05-11 2017-01-04 (株)大韩Pnc Pleated filter and manufacture method thereof
CN106362485A (en) * 2015-07-24 2017-02-01 上海名冠净化材料股份有限公司 Purification composite material
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CN107614895A (en) * 2015-06-18 2018-01-19 雅玛信过滤器株式会社 Return filter
CN107614895B (en) * 2015-06-18 2019-12-24 雅玛信过滤器株式会社 Reflux filter
CN106362485A (en) * 2015-07-24 2017-02-01 上海名冠净化材料股份有限公司 Purification composite material
CN111818974A (en) * 2018-03-08 2020-10-23 3M创新有限公司 Filter and mask

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