TWI595445B - Anti-noise three dimensional scanning system - Google Patents

Anti-noise three dimensional scanning system Download PDF

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TWI595445B
TWI595445B TW105128097A TW105128097A TWI595445B TW I595445 B TWI595445 B TW I595445B TW 105128097 A TW105128097 A TW 105128097A TW 105128097 A TW105128097 A TW 105128097A TW I595445 B TWI595445 B TW I595445B
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polarization
polarized
tested
scanning system
line
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TW105128097A
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TW201812707A (en
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蔡政廷
翁義龍
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致茂電子股份有限公司
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Priority to CN201710463556.8A priority patent/CN107782253B/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Polarising Elements (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Description

抗雜訊之立體掃描系統 Anti-noise stereo scanning system

本揭露是有關於一種立體掃描系統。 The disclosure relates to a stereo scanning system.

隨著科技的進步,越來越多的電子產品開始使用金屬材質作為殼體,以增加產品的美觀。金屬殼體可藉由機械加工(例如銑床或車床)而得到需求的形狀與特徵,這些形狀與特徵可利用光學儀器擷取其影像作檢測。然而加工過後,金屬表面可能會變得粗糙(例如加工所產生的刀紋),如此一來,光學儀器所擷取的影像可能會包含粗糙表面的資訊,使得量測不穩定,甚至無法量測出欲檢測的特徵。 With the advancement of technology, more and more electronic products are beginning to use metal materials as the shell to increase the aesthetics of the products. The metal casing can be machined (e.g., a milling machine or a lathe) to obtain the desired shape and features that can be imaged for inspection using optical instruments. However, after processing, the metal surface may become rough (for example, the stencil generated by the processing), so that the image captured by the optical instrument may contain information on the rough surface, making the measurement unstable or even impossible to measure. The characteristics to be detected.

本揭露之一態樣提供一種立體掃描系統,包含偏振平行線光源、遠心影像擷取裝置與第一偏振元件。偏振平行線光源提供偏振線光束至待測面。偏振線光束之擴散角度小於10度。遠心影像擷取裝置用以擷取待測面上之偏振線光束。第一偏振元件置於遠心影像擷取裝置與待測面之 間。偏振線光束之偏振態與第一偏振元件之偏振態實質正文。 One aspect of the disclosure provides a stereo scanning system including a polarized parallel line source, a telecentric image capturing device, and a first polarizing element. A polarized parallel line source provides a line of polarized light to the surface to be measured. The polarization beam has a spread angle of less than 10 degrees. The telecentric image capturing device is used to extract the polarized light beam on the surface to be measured. The first polarizing element is placed in the telecentric image capturing device and the surface to be tested between. The polarization state of the polarized beam and the polarization state of the first polarizing element are substantially textual.

在上述實施方式中,立體掃描系統利用具小擴散角度之偏振線光束、第一偏振元件與遠心影像擷取裝置的組合可消除待測物因表面結構不規則所造成的量測錯誤。 In the above embodiment, the stereo scanning system utilizes a combination of a polarized light beam having a small diffusion angle, a first polarizing element, and a telecentric image capturing device to eliminate measurement errors caused by irregularities in the surface structure of the object to be tested.

110‧‧‧偏振平行線光源 110‧‧‧Polarized parallel line source

112、115‧‧‧偏振線光束 112, 115‧‧‧ polarized beam

114、116‧‧‧光軸 114, 116‧‧‧ optical axis

122‧‧‧偏振光源 122‧‧‧Polarized light source

123‧‧‧偏振光束 123‧‧‧Polarized beam

124‧‧‧柱狀透鏡 124‧‧‧ lenticular lens

152‧‧‧相機 152‧‧‧ camera

154‧‧‧遠心鏡頭 154‧‧‧ telecentric lens

160‧‧‧第一偏振元件 160‧‧‧First polarizing element

900‧‧‧平台 900‧‧‧ platform

905‧‧‧待測物 905‧‧‧Test object

910‧‧‧待測面 910‧‧‧To be tested

126、136‧‧‧準直元件 126, 136‧‧ ‧ collimating components

132‧‧‧線光源 132‧‧‧Line light source

133‧‧‧線光束 133‧‧‧Line beam

138‧‧‧第二偏振元件 138‧‧‧Second polarizing element

150‧‧‧遠心影像擷取裝置 150‧‧‧ telecentric image capture device

912‧‧‧法線 912‧‧‧ normal

C‧‧‧區域 C‧‧‧ area

D‧‧‧方向 D‧‧‧ Direction

θ、θ’‧‧‧擴散角度 θ, θ'‧‧‧ diffusion angle

第1圖為本揭露一實施方式之立體掃描系統、平台與待測物的示意圖。 FIG. 1 is a schematic diagram of a stereo scanning system, a platform, and an object to be tested according to an embodiment of the present disclosure.

第2圖為第1圖之偏振平行線光源根據一實施方式的示意圖。 Fig. 2 is a schematic view of a polarization parallel line source of Fig. 1 according to an embodiment.

第3圖為第1圖之偏振平行線光源根據另一實施方式的示意圖。 Fig. 3 is a schematic view of a polarization parallel line source of Fig. 1 according to another embodiment.

第4圖為第1圖之偏振平行線光源根據再一實施方式的示意圖。 Fig. 4 is a schematic view showing a polarization parallel line source of Fig. 1 according to still another embodiment.

以下將以圖式揭露本揭露的複數個實施方式,為明確說明起見,許多實務上的細節將在以下敘述中一併說明。然而,應瞭解到,這些實務上的細節不應用以限制本揭露。也就是說,在本揭露部分實施方式中,這些實務上的細節是非必要的。此外,為簡化圖式起見,一些習知慣用的結構與元件在圖式中將以簡單示意的方式繪示之。 The embodiments of the present disclosure are disclosed in the following drawings, and for the sake of clarity, many of the details of the practice will be described in the following description. However, it should be understood that these practical details are not intended to limit the disclosure. That is, in some embodiments of the disclosure, these practical details are not necessary. In addition, some of the conventional structures and elements are shown in the drawings in a simplified schematic manner in order to simplify the drawings.

第1圖為本揭露一實施方式之立體掃描系統、平台900與待測物905的示意圖,第2圖為第1圖之偏振平行線光源110根據一實施方式的示意圖。立體掃描系統包含偏振平行線光源110、遠心影像擷取裝置150與第一偏振元件160。偏振平行線光源110提供偏振線光束112至待測面910。偏振線光束112之擴散角度θ(如第2圖所示)小於10度,在較佳的實施方式中,擴散角度θ小於5度。遠心影像擷取裝置150用以擷取待測面910上之偏振線光束115。第一偏振元件160置於遠心影像擷取裝置150與待測面910之間。偏振線光束112之偏振態與第一偏振元件160之偏振態實質正交。 1 is a schematic diagram of a stereo scanning system, a platform 900 and an object to be tested 905 according to an embodiment of the present disclosure, and FIG. 2 is a schematic diagram of a polarization parallel line source 110 according to FIG. 1 according to an embodiment. The stereo scanning system includes a polarization parallel line source 110, a telecentric image capturing device 150, and a first polarization element 160. The polarization parallel line source 110 provides a line of polarized beam 112 to the surface 910 to be tested. The diffusion angle θ of the polarized beam 112 (as shown in Fig. 2) is less than 10 degrees. In a preferred embodiment, the diffusion angle θ is less than 5 degrees. The telecentric image capturing device 150 is configured to capture the polarized light beam 115 on the surface 910 to be tested. The first polarizing element 160 is disposed between the telecentric image capturing device 150 and the surface to be tested 910. The polarization state of the polarized line beam 112 is substantially orthogonal to the polarization state of the first polarizing element 160.

在本文中,擴散角度θ為光束隨傳播距離增加而擴散的程度。擴散程度越大,擴散角度θ便越大,反之則越小。在第2圖中,偏振線光束112沿著一光軸114傳播,而偏振線光束112之光束邊緣與光軸114相夾擴散角度θ。若擴散角度θ為0度,則偏振線光束112為平行光,亦即平行光束不隨傳播距離增加而擴散。 In this context, the diffusion angle θ is the extent to which the beam diffuses as the propagation distance increases. The greater the degree of diffusion, the greater the diffusion angle θ, and vice versa. In FIG. 2, the polarized beam 112 propagates along an optical axis 114, and the beam edge of the polarized beam 112 is incident with the optical axis 114 by a diffusion angle θ. If the diffusion angle θ is 0 degrees, the polarization beam 112 is parallel light, that is, the parallel beam does not spread as the propagation distance increases.

在一些實施方式中,待測面910可為一平台900之表面。然而在本實施方式中,一待測物905可置於平台900上,而立體掃描系統用以掃描待測物905之立體形貌。若立體掃描系統掃描待測物905,則待測面910為待測物905與平台900被偏振線光束112照射到之表面。若立體掃描系統掃描平台900之表面,則待測面910為平台900被偏振線光束112照射 到之表面。在此為了清楚起見,以待測物905被偏振線光束112照射到之表面作為待測面910之舉例。 In some embodiments, the surface to be tested 910 can be the surface of a platform 900. However, in the present embodiment, a test object 905 can be placed on the platform 900, and the stereoscopic scanning system is used to scan the three-dimensional shape of the object to be tested 905. If the stereo scanning system scans the object to be tested 905, the surface to be tested 910 is the surface on which the object to be tested 905 and the platform 900 are irradiated by the polarized light beam 112. If the stereo scanning system scans the surface of the platform 900, the surface 910 to be tested is the platform 900 illuminated by the polarized light beam 112. To the surface. For the sake of clarity, the surface to which the object to be tested 905 is irradiated with the polarized light beam 112 is taken as an example of the surface to be tested 910.

在本實施方式中,立體掃描系統利用具小擴散角度θ之偏振線光束112、第一偏振元件160與遠心影像擷取裝置150的組合可消除待測物905因表面結構不規則所造成的量測錯誤。具體而言,待測物905可為一金屬殼體,例如為經過機械加工、表面具有刀紋的金屬殼體。對於一個表面粗糙之待測物905而言,量測其表面形貌很容易因粗糙之表面而產生不規則的散射光。這些散射光會在擷取到的影像上形成雜訊,提高後續分析的困難度。 In the present embodiment, the stereo scanning system uses a combination of the polarized light beam 112 having a small diffusion angle θ, the first polarizing element 160, and the telecentric image capturing device 150 to eliminate the amount of the object 905 due to surface structure irregularities. Measure the error. Specifically, the object to be tested 905 may be a metal casing, for example, a metal casing that is machined and has a blade on the surface. For a rough surface of the object to be tested 905, measuring the surface topography is easy to generate irregular scattered light due to the rough surface. These scattered light will form noise on the captured image, which will improve the difficulty of subsequent analysis.

不過,在本實施方式中,偏振平行線光源110提供偏振線光束112,亦即偏振線光束112具有特定之偏振態。偏振線光束112會在待測物905之待測面910上形成一線條,線條的起伏可反應出待測面910的形貌。隨著待測物905與偏振線光束112之間相對移動,偏振線光束112掃描待測面910,因此可反應出待測面910的完整形貌。當偏振線光束112照射至待測面910上時,待測面910之刀紋或其他機械加工所產生的細微缺陷可能會讓偏振線光束112產生不規則的散射,這些不規則的散射會使得偏振線光束112的偏振態產生不規則的改變。具有不規則偏振態之偏振線光束112到達第一偏振元件160時,會被第一偏振元件160所濾除,因此只剩具有待測面910之立體資訊的部分偏振線光束115能夠通過第一偏振元件160而到達遠心影像擷取裝置150。另一方面,因遠心影像擷取裝置150具有接收實質平 行光的特性,因此可接收自待測面910散射的小擴散角度之偏振線光束115,且不會接收因表面刀紋而不規則散射的大擴散角度之其他光束。 However, in the present embodiment, the polarization parallel line source 110 provides a polarization beam 112, i.e., the polarization beam 112 has a particular polarization state. The polarized light beam 112 forms a line on the surface 910 to be tested 905, and the undulation of the line reflects the topography of the surface 910 to be tested. As the object 905 and the polarization beam 112 move relative to each other, the polarization beam 112 scans the surface 910 to be measured, thereby reflecting the complete topography of the surface 910 to be measured. When the polarized line beam 112 is irradiated onto the surface to be tested 910, the grain defects of the surface to be tested 910 or other mechanical processing may cause irregular scattering of the polarized beam 112, and these irregular scattering may cause The polarization state of the polarized beam 112 produces an irregular change. When the polarized line beam 112 having an irregular polarization state reaches the first polarizing element 160, it is filtered by the first polarizing element 160, so that only the partially polarized line beam 115 having the stereoscopic information of the surface to be tested 910 can pass through the first The polarizing element 160 reaches the telecentric image capturing device 150. On the other hand, since the telecentric image capturing device 150 has a substantially flat reception The characteristics of the traveling light, therefore, can receive the polarized light beam 115 of a small diffusion angle scattered from the surface to be measured 910, and do not receive other light beams of a large diffusion angle irregularly scattered by the surface grain.

綜合上述,即使部分之偏振線光束112照射至待測面910會因刀紋而產生不規則的散射,然而這些不規則散射之光束可藉由第一偏振元件160與遠心影像擷取裝置150而濾除,因此待測面910之特徵能被加強,同時粗糙表面的影像被壓抑,使得待測物905的特徵能夠被突顯,以取得清晰的待測物905之特徵影像。如此一來,待測物905可不需經過表面處理(例如噴砂處理)即可作檢測,可大幅簡化製程。 In summary, even if a part of the polarized light beam 112 is irradiated onto the surface to be tested 910, irregular scattering occurs due to the stencil, but these irregularly scattered beams can be passed through the first polarizing element 160 and the telecentric image capturing device 150. The filtering is performed, so that the features of the surface to be tested 910 can be enhanced, and the image of the rough surface is suppressed, so that the features of the object to be tested 905 can be highlighted to obtain a clear feature image of the object to be tested 905. In this way, the object to be tested 905 can be detected without surface treatment (for example, sand blasting), and the process can be greatly simplified.

請參照第2圖。在一些實施方式中,偏振平行線光源110包含偏振光源122、柱狀透鏡124與準直元件126。偏振光源122用以提供一偏振光束123。柱狀透鏡124用以將偏振光束123塑形為偏振線光束112。準直元件126用以準直偏振線光束112。具體而言,偏振光源122例如可為具有偏振態的光源,例如為雷射光源,亦可以是其他光源加上偏振元件的組合。偏振光源122可為點光源,在本文中,點光源所提供之偏振光束123的光點實質上為非線形,例如為圓形、楕圓形。柱狀透鏡124之透鏡曲面呈單一軸向彎曲,因此可將偏振光束123作單一軸向的變形(例如收斂後擴散),使得偏振光束123變為偏振線光束112。準直元件126可準直偏振線光束112,以收斂偏振線光束112的擴散角度θ。換言之,未通過準直元件126之偏振線光束112的擴散角度θ’大於通 過準直元件126之偏振線光束112的擴散角度θ。在一些實施方式中,準直元件126可為透鏡,然而本揭露不以此為限。 Please refer to Figure 2. In some embodiments, the polarization parallel line source 110 includes a polarized light source 122, a lenticular lens 124, and a collimating element 126. The polarized light source 122 is used to provide a polarized light beam 123. The lenticular lens 124 is used to shape the polarized beam 123 into a polarized beam 112. The collimating element 126 is used to collimate the polarized line beam 112. Specifically, the polarized light source 122 may be, for example, a light source having a polarization state, such as a laser light source, or a combination of other light sources and polarizing elements. The polarized light source 122 can be a point source. In this paper, the spot of the polarized beam 123 provided by the point source is substantially non-linear, such as circular, rounded. The lens curved surface of the lenticular lens 124 is bent in a single direction, so that the polarized light beam 123 can be deformed in a single axial direction (for example, after convergence), so that the polarized light beam 123 becomes the polarized light beam 112. The collimating element 126 can collimate the polarized line beam 112 to converge the diffusion angle θ of the polarized line beam 112. In other words, the diffusion angle θ' of the polarization beam 112 that does not pass through the collimating element 126 is greater than The diffusion angle θ of the polarization beam 112 passing through the collimating element 126. In some embodiments, the collimating element 126 can be a lens, although the disclosure is not limited thereto.

偏振平行線光源110的結構不以第2圖的結構為限。請參照第3圖,其為第1圖之偏振平行線光源110根據另一實施方式的示意圖。在本實施方式中,偏振平行線光源110可省略第2圖之準直元件126,亦即偏振平行線光源110包含偏振光源122與柱狀透鏡124。在本實施方式中,區域C之偏振線光束112(亦即接近光軸114之部分偏振線光束112)具有較小的擴散角度θ,因此可僅利用區域C之偏振線光束112,例如使用一擋板將區域C外之偏振線光束112阻擋,或者遠心影像擷取裝置150僅接收區域C之偏振線光束112皆可。至於本實施方式的其他細節與第2圖相同,因此便不再贅述。 The structure of the polarization parallel line light source 110 is not limited to the structure of FIG. Please refer to FIG. 3, which is a schematic diagram of a polarization parallel line source 110 according to FIG. 1 according to another embodiment. In the present embodiment, the polarization parallel line source 110 can omit the collimating element 126 of FIG. 2, that is, the polarization parallel line source 110 includes the polarization source 122 and the lenticular lens 124. In the present embodiment, the polarization beam 112 of the region C (i.e., the partial polarization beam 112 near the optical axis 114) has a small diffusion angle θ, so that only the polarization beam 112 of the region C can be utilized, for example, using a The baffle blocks the polarized line beam 112 outside of the area C, or the telecentric image capturing device 150 receives only the polarized line beam 112 of the area C. Other details of the present embodiment are the same as those of Fig. 2, and therefore will not be described again.

第4圖為第1圖之偏振平行線光源110根據再一實施方式的示意圖。在本實施方式中,偏振平行線光源110包含線光源132、準直元件136與第二偏振元件138。線光源132用以提供線光束133。準直元件136用以準直線光束133。第二偏振元件138用以將準直後之線光束133偏振化為偏振線光束112。具體而言,線光源132可為燈條,包含複數個點光源134,沿一方向D排列。點光源134可以是發光二極體或是其他合適的光源。準直元件136可準直線光束133,以收斂線光束133的擴散角度。而後線光束133通過第二偏振元件138而偏振化為偏振線光束112。第二偏振元件138的偏振態與第一偏振元件160(如第1圖所示)實質正 交。雖然在第4圖中,準直元件136置於線光源132與第二偏振元件138之間,然而在其他的實施方式中,第二偏振元件138可置於線光源132與準直元件136之間,亦即線光源132所提供之線光束133可先通過第二偏振元件138後再通過準直元件136。至於本實施方式的其他細節與第2圖相同,因此便不再贅述。 Fig. 4 is a schematic view of a polarization parallel line source 110 of Fig. 1 according to still another embodiment. In the present embodiment, the polarization parallel line source 110 includes a line source 132, a collimating element 136, and a second polarizing element 138. Line source 132 is used to provide line beam 133. The collimating element 136 is used for a quasi-linear beam 133. The second polarizing element 138 is used to polarize the collimated line beam 133 into a polarized beam 112. Specifically, the line source 132 can be a light bar comprising a plurality of point sources 134 arranged in a direction D. Point source 134 can be a light emitting diode or other suitable light source. The collimating element 136 can collimate the beam 133 to converge the angle of diffusion of the line beam 133. The back-line beam 133 is polarized to the polarized beam 112 by the second polarizing element 138. The polarization state of the second polarization element 138 and the first polarization element 160 (as shown in Figure 1) are substantially positive cross. Although in FIG. 4, the collimating element 136 is placed between the line source 132 and the second polarizing element 138, in other embodiments, the second polarizing element 138 can be placed between the line source 132 and the collimating element 136. The line beam 133 provided by the line source 132 may pass through the second polarizing element 138 and then pass through the collimating element 136. Other details of the present embodiment are the same as those of Fig. 2, and therefore will not be described again.

請回到第1圖。在本實施方式中,偏振線光束112正向入射待測面910,而遠心影像擷取裝置150斜向擷取待測面910上之偏振線光束115。具體而言,待測面910具有法線912。「正向入射」表示從偏振平行線光源110提供之偏振線光束112之光軸114與法線912實質平行,而「斜向擷取」表示遠心影像擷取裝置150所接收之偏振線光束115之光軸116與光軸114的相交角度大於0度,當相交角度愈大時,消除(或抗)雜訊的效果愈好,在較佳的實施方式中,相交角度大於20度。因偏振線光束112正向入射待測面910,而遠心影像擷取裝置150斜向擷取偏振線光束115,因此遠心影像擷取裝置150擷取的主要為自待測面910散射之偏振線光束115。 Please return to Figure 1. In the present embodiment, the polarized light beam 112 is incident on the surface 910 to be measured, and the telecentric image capturing device 150 obliquely draws the polarized light beam 115 on the surface 910 to be tested. Specifically, the surface to be tested 910 has a normal line 912. "Positive incidence" means that the optical axis 114 of the polarized line beam 112 supplied from the polarized parallel line source 110 is substantially parallel to the normal 912, and "obliquely drawn" indicates the polarized line beam 115 received by the telecentric image capturing device 150. The angle of intersection of the optical axis 116 with the optical axis 114 is greater than 0 degrees. The greater the angle of intersection, the better the effect of eliminating (or anti-noise) noise. In a preferred embodiment, the angle of intersection is greater than 20 degrees. Since the polarization beam 112 is positively incident on the surface 910 to be measured, and the telecentric image capturing device 150 obliquely extracts the polarization beam 115, the telecentric image capturing device 150 extracts the polarization line mainly scattered from the surface 910 to be measured. Beam 115.

在第1圖中,遠心影像擷取裝置150包含相機152與遠心鏡頭154。遠心鏡頭154置於相機152與第一偏振元件160之間。遠心鏡頭154可包含多個透鏡(未繪示),遠心鏡頭154設計為使實質平行光入射,使得相機152主要由平行光所成像。如此的設計可使物體的成像倍率不因物體的遠近而改變,且可排除大擴散角度之光束在相機152成像。 In FIG. 1, the telecentric image capturing device 150 includes a camera 152 and a telecentric lens 154. The telecentric lens 154 is placed between the camera 152 and the first polarizing element 160. The telecentric lens 154 can include a plurality of lenses (not shown) that are designed to cause substantially parallel light to be incident such that the camera 152 is primarily imaged by parallel light. Such a design allows the imaging magnification of the object to be not changed by the distance of the object, and the beam of the large diffusion angle can be excluded from being imaged by the camera 152.

綜合上述,偏振平行線光源提供偏振線光束以在待測面上形成線條,其起伏可反應出待測面的形貌。當偏振線光束照射至待測面上時,待測面之刀紋或其他機械加工所產生的細微缺陷可能會讓偏振線光束產生不規則的散射。具有不規則偏振態之偏振線光束到達第一偏振元件時,會被第一偏振元件所濾除,因此只剩具有待測面之立體資訊的部分偏振線光束能夠通過第一偏振元件而到達遠心影像擷取裝置。遠心影像擷取裝置可接收自待測面散射的小擴散角度之偏振線光束,且不會接收因表面刀紋而不規則散射的大擴散角度之光束。如此一來,立體掃描系統可消除待測物因表面結構不規則所造成的量測錯誤。 In summary, the polarized parallel line source provides a polarized line beam to form a line on the surface to be measured, the undulation of which reflects the topography of the surface to be measured. When the polarized light beam is irradiated onto the surface to be measured, the grain defects of the surface to be measured or other mechanical processing may cause irregular scattering of the polarized light beam. When the polarized light beam having an irregular polarization state reaches the first polarizing element, it is filtered by the first polarizing element, so that only a part of the polarized line beam having the stereoscopic information of the surface to be measured can reach the telecentricity through the first polarizing element. Image capture device. The telecentric image capturing device can receive a beam of polarized light having a small diffusion angle scattered from the surface to be measured, and does not receive a beam of a large diffusion angle that is irregularly scattered by the surface knife. In this way, the stereo scanning system can eliminate measurement errors caused by irregularities in the surface structure of the object to be tested.

雖然本揭露已以實施方式揭露如上,然其並非用以限定本揭露,任何熟習此技藝者,在不脫離本揭露之精神和範圍內,當可作各種之更動與潤飾,因此本揭露之保護範圍當視後附之申請專利範圍所界定者為準。 The present disclosure has been disclosed in the above embodiments, and is not intended to limit the disclosure. Any one skilled in the art can make various modifications and retouchings without departing from the spirit and scope of the disclosure. The scope is subject to the definition of the scope of the patent application attached.

110‧‧‧偏振平行線光源 110‧‧‧Polarized parallel line source

112、115‧‧‧偏振線光束 112, 115‧‧‧ polarized beam

114、116‧‧‧光軸 114, 116‧‧‧ optical axis

150‧‧‧遠心影像擷取裝置 150‧‧‧ telecentric image capture device

152‧‧‧相機 152‧‧‧ camera

154‧‧‧遠心鏡頭 154‧‧‧ telecentric lens

160‧‧‧第一偏振元件 160‧‧‧First polarizing element

900‧‧‧平台 900‧‧‧ platform

905‧‧‧待測物 905‧‧‧Test object

910‧‧‧待測面 910‧‧‧To be tested

912‧‧‧法線 912‧‧‧ normal

Claims (8)

一種立體掃描系統,包含:一偏振平行線光源,提供一偏振線光束至一待測面,其中該偏振線光束之擴散角度小於10度,該偏振平行線光源包含:一偏振光源,用以提供一偏振光束;一柱狀透鏡,用以將該偏振光束塑形為該偏振線光束;以及一準直元件,用以準直該偏振線光束;一遠心影像擷取裝置,用以擷取該待測面上之該偏振線光束;以及一第一偏振元件,置於該遠心影像擷取裝置與該待測面之間,其中該偏振線光束之該偏振態與該第一偏振元件之偏振態實質正交。 A stereo scanning system comprising: a polarization parallel line source, providing a polarization beam to a surface to be measured, wherein the polarization beam has a diffusion angle of less than 10 degrees, the polarization parallel line source comprising: a polarization source for providing a polarized beam; a cylindrical lens for shaping the polarized beam into the polarized beam; and a collimating element for collimating the polarized beam; a telecentric image capturing device for capturing the beam a polarized light beam on the surface to be measured; and a first polarizing element disposed between the telecentric image capturing device and the surface to be tested, wherein the polarization state of the polarized light beam and the polarization of the first polarizing element The states are substantially orthogonal. 如請求項1所述之立體掃描系統,其中該偏振光源為一雷射光源。 The stereoscopic scanning system of claim 1, wherein the polarized light source is a laser light source. 如請求項1所述之立體掃描系統,其中該偏振線光束正向入射該待測面。 The stereo scanning system of claim 1, wherein the polarized light beam is incident on the surface to be tested. 如請求項1所述之立體掃描系統,其中該遠心影像擷取裝置斜向擷取該待測面上之該偏振線光束。 The stereo scanning system of claim 1, wherein the telecentric image capturing device obliquely captures the polarized light beam on the surface to be tested. 如請求項1所述之立體掃描系統,其中該遠心影像擷取裝置包含:一相機;以及一遠心鏡頭,置於該相機與該第一偏振元件之間。 The stereoscopic scanning system of claim 1, wherein the telecentric image capturing device comprises: a camera; and a telecentric lens disposed between the camera and the first polarizing element. 一種立體掃描系統,包含:一偏振平行線光源,提供一偏振線光束至一待測面,其中該偏振線光束之擴散角度小於10度,該偏振平行線光源包含:一線光源,用以提供一線光束;一準直元件,用以準直該線光束;以及一第二偏振元件,用以將準直後之該線光束偏振化為該偏振線光束;一遠心影像擷取裝置,用以擷取該待測面上之該偏振線光束;以及一第一偏振元件,置於該遠心影像擷取裝置與該待測面之間,其中該偏振線光束之該偏振態與該第一偏振元件之偏振態實質正交。 A stereo scanning system comprising: a polarization parallel line source, providing a polarization beam to a surface to be measured, wherein the polarization beam has a diffusion angle of less than 10 degrees, and the polarization parallel line source comprises: a line source for providing a line a light beam; a collimating element for collimating the line beam; and a second polarizing element for polarizing the collimated line beam into the polarized line beam; a telecentric image capturing device for capturing The polarized light beam on the surface to be tested; and a first polarizing element disposed between the telecentric image capturing device and the surface to be tested, wherein the polarization state of the polarized light beam and the first polarizing element The polarization states are substantially orthogonal. 如請求項6所述之立體掃描系統,其中該線光源包含複數個點光源,沿一方向排列。 The stereo scanning system of claim 6, wherein the line source comprises a plurality of point sources arranged in a direction. 如請求項6所述之立體掃描系統,其中該些點光源為發光二極體。 The stereoscopic scanning system of claim 6, wherein the point light sources are light emitting diodes.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102356628A (en) * 2009-12-08 2012-02-15 松下电器产业株式会社 Image processing apparatus
CN102834712A (en) * 2010-03-30 2012-12-19 杰富意钢铁株式会社 Surface detection method for steel plate having resin coating film and surface detection device for same
TW201516374A (en) * 2013-10-17 2015-05-01 Ind Tech Res Inst Linear scanning topography measurement system
TWM523097U (en) * 2015-12-23 2016-06-01 高準精密工業股份有限公司 Optical device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5024529A (en) * 1988-01-29 1991-06-18 Synthetic Vision Systems, Inc. Method and system for high-speed, high-resolution, 3-D imaging of an object at a vision station
KR100383816B1 (en) * 2000-06-26 2003-05-16 한국전력공사 A 3-D shape measuring method and system using a adaptive area clustering
EP1371939A1 (en) * 2002-05-15 2003-12-17 Icos Vision Systems N.V. A device for measuring in three dimensions a topographical shape of an object
KR100612932B1 (en) * 2005-12-14 2006-08-14 주식회사 고영테크놀러지 3d image measuring apparatus and method thereof
CN101334270B (en) * 2008-07-25 2010-06-23 西安交通大学 Laser line scanning feeler geometric transformation calibration and curved face interpolation correcting method and apparatus
US20100240382A1 (en) * 2009-03-19 2010-09-23 Qualcomm Incorporated Systems, apparatus and methods for interference management in wireless networks
TWI467236B (en) * 2012-04-12 2015-01-01 Univ Nat Formosa Three-dimensional appearance remote measuring system and the method using the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102356628A (en) * 2009-12-08 2012-02-15 松下电器产业株式会社 Image processing apparatus
CN102834712A (en) * 2010-03-30 2012-12-19 杰富意钢铁株式会社 Surface detection method for steel plate having resin coating film and surface detection device for same
TW201516374A (en) * 2013-10-17 2015-05-01 Ind Tech Res Inst Linear scanning topography measurement system
TWM523097U (en) * 2015-12-23 2016-06-01 高準精密工業股份有限公司 Optical device

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