TW201812707A - Anti-noise three dimensional scanning system - Google Patents
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- G01—MEASURING; TESTING
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- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
Description
本揭露是有關於一種立體掃描系統。 This disclosure relates to a stereo scanning system.
隨著科技的進步,越來越多的電子產品開始使用金屬材質作為殼體,以增加產品的美觀。金屬殼體可藉由機械加工(例如銑床或車床)而得到需求的形狀與特徵,這些形狀與特徵可利用光學儀器擷取其影像作檢測。然而加工過後,金屬表面可能會變得粗糙(例如加工所產生的刀紋),如此一來,光學儀器所擷取的影像可能會包含粗糙表面的資訊,使得量測不穩定,甚至無法量測出欲檢測的特徵。 With the advancement of technology, more and more electronic products have started to use metal materials as housings to increase the aesthetics of the products. The metal shell can be machined (such as a milling machine or a lathe) to obtain the required shapes and features. These shapes and features can be captured by optical instruments for inspection. However, after processing, the metal surface may become rough (such as the knife pattern produced by processing). As a result, the image captured by the optical instrument may contain information about the rough surface, making the measurement unstable and even impossible to measure. Get the features you want to detect.
本揭露之一態樣提供一種立體掃描系統,包含偏振平行線光源、遠心影像擷取裝置與第一偏振元件。偏振平行線光源提供偏振線光束至待測面。偏振線光束之擴散角度小於10度。遠心影像擷取裝置用以擷取待測面上之偏振線光束。第一偏振元件置於遠心影像擷取裝置與待測面之 間。偏振線光束之偏振態與第一偏振元件之偏振態實質正文。 One aspect of this disclosure provides a stereo scanning system including a polarized parallel line light source, a telecentric image capturing device, and a first polarizing element. A polarized parallel line light source provides a polarized line beam to the surface to be measured. The polarization angle of the polarized light beam is less than 10 degrees. The telecentric image capturing device is used to capture the polarized light beam on the surface to be measured. The first polarizing element is placed between the telecentric image capturing device and the surface to be measured. The polarization state of the polarized light beam and the polarization state of the first polarization element are substantially the same.
在上述實施方式中,立體掃描系統利用具小擴散角度之偏振線光束、第一偏振元件與遠心影像擷取裝置的組合可消除待測物因表面結構不規則所造成的量測錯誤。 In the above embodiments, the stereo scanning system uses a combination of a polarized beam with a small diffusion angle, a first polarizing element, and a telecentric image capture device to eliminate measurement errors caused by irregularities in the surface structure of the object under test.
110‧‧‧偏振平行線光源 110‧‧‧polarized parallel line light source
112、115‧‧‧偏振線光束 112, 115‧‧‧ polarized beams
114、116‧‧‧光軸 114, 116‧‧‧ Optical axis
122‧‧‧偏振光源 122‧‧‧polarized light source
123‧‧‧偏振光束 123‧‧‧polarized beam
124‧‧‧柱狀透鏡 124‧‧‧ cylindrical lens
152‧‧‧相機 152‧‧‧ Camera
154‧‧‧遠心鏡頭 154‧‧‧Telecentric lens
160‧‧‧第一偏振元件 160‧‧‧first polarizing element
900‧‧‧平台 900‧‧‧ platform
905‧‧‧待測物 905‧‧‧DUT
910‧‧‧待測面 910‧‧‧Test surface
126、136‧‧‧準直元件 126, 136‧‧‧collimation element
132‧‧‧線光源 132‧‧‧line light source
133‧‧‧線光束 133‧‧‧line beam
138‧‧‧第二偏振元件 138‧‧‧Second polarizing element
150‧‧‧遠心影像擷取裝置 150‧‧‧ Telecentric image capture device
912‧‧‧法線 912‧‧‧normal
C‧‧‧區域 C‧‧‧Area
D‧‧‧方向 D‧‧‧ direction
θ、θ’‧‧‧擴散角度 θ, θ’‧‧‧ diffusion angle
第1圖為本揭露一實施方式之立體掃描系統、平台與待測物的示意圖。 FIG. 1 is a schematic diagram of a three-dimensional scanning system, a platform, and a test object according to an embodiment of the disclosure.
第2圖為第1圖之偏振平行線光源根據一實施方式的示意圖。 FIG. 2 is a schematic diagram of the polarized parallel line light source of FIG. 1 according to an embodiment.
第3圖為第1圖之偏振平行線光源根據另一實施方式的示意圖。 FIG. 3 is a schematic diagram of the polarized parallel line light source of FIG. 1 according to another embodiment.
第4圖為第1圖之偏振平行線光源根據再一實施方式的示意圖。 FIG. 4 is a schematic diagram of the polarization parallel line light source of FIG. 1 according to still another embodiment.
以下將以圖式揭露本揭露的複數個實施方式,為明確說明起見,許多實務上的細節將在以下敘述中一併說明。然而,應瞭解到,這些實務上的細節不應用以限制本揭露。也就是說,在本揭露部分實施方式中,這些實務上的細節是非必要的。此外,為簡化圖式起見,一些習知慣用的結構與元件在圖式中將以簡單示意的方式繪示之。 In the following, a plurality of implementations of the present disclosure will be disclosed graphically. For the sake of clear description, many practical details will be explained in the following description. However, it should be understood that these practical details should not be used to limit this disclosure. That is, in some embodiments of the present disclosure, these practical details are unnecessary. In addition, in order to simplify the drawings, some conventional structures and components will be shown in the drawings in a simple and schematic manner.
第1圖為本揭露一實施方式之立體掃描系統、平台900與待測物905的示意圖,第2圖為第1圖之偏振平行線光源110根據一實施方式的示意圖。立體掃描系統包含偏振平行線光源110、遠心影像擷取裝置150與第一偏振元件160。偏振平行線光源110提供偏振線光束112至待測面910。偏振線光束112之擴散角度θ(如第2圖所示)小於10度,在較佳的實施方式中,擴散角度θ小於5度。遠心影像擷取裝置150用以擷取待測面910上之偏振線光束115。第一偏振元件160置於遠心影像擷取裝置150與待測面910之間。偏振線光束112之偏振態與第一偏振元件160之偏振態實質正交。 FIG. 1 is a schematic diagram of a three-dimensional scanning system, a platform 900, and a test object 905 according to an embodiment of the disclosure, and FIG. 2 is a schematic diagram of the polarized parallel line light source 110 of FIG. The stereo scanning system includes a polarized parallel line light source 110, a telecentric image capturing device 150, and a first polarizing element 160. The polarization parallel line light source 110 provides a polarization line light beam 112 to a surface to be measured 910. The diffusion angle θ (as shown in FIG. 2) of the polarized light beam 112 is less than 10 degrees. In a preferred embodiment, the diffusion angle θ is less than 5 degrees. The telecentric image capturing device 150 is configured to capture a polarized light beam 115 on the surface 910 to be measured. The first polarizing element 160 is disposed between the telecentric image capturing device 150 and the surface 910 to be measured. The polarization state of the polarized light beam 112 is substantially orthogonal to the polarization state of the first polarization element 160.
在本文中,擴散角度θ為光束隨傳播距離增加而擴散的程度。擴散程度越大,擴散角度θ便越大,反之則越小。在第2圖中,偏振線光束112沿著一光軸114傳播,而偏振線光束112之光束邊緣與光軸114相夾擴散角度θ。若擴散角度θ為0度,則偏振線光束112為平行光,亦即平行光束不隨傳播距離增加而擴散。 In this paper, the diffusion angle θ is the degree to which the light beam spreads as the propagation distance increases. The larger the degree of diffusion, the larger the diffusion angle θ, and vice versa. In FIG. 2, the polarized light beam 112 propagates along an optical axis 114, and the edge of the polarized light beam 112 and the optical axis 114 are sandwiched by a diffusion angle θ. If the diffusion angle θ is 0 degrees, the polarized light beam 112 is parallel light, that is, the parallel light beam does not diffuse as the propagation distance increases.
在一些實施方式中,待測面910可為一平台900之表面。然而在本實施方式中,一待測物905可置於平台900上,而立體掃描系統用以掃描待測物905之立體形貌。若立體掃描系統掃描待測物905,則待測面910為待測物905與平台900被偏振線光束112照射到之表面。若立體掃描系統掃描平台900之表面,則待測面910為平台900被偏振線光束112照射 到之表面。在此為了清楚起見,以待測物905被偏振線光束112照射到之表面作為待測面910之舉例。 In some embodiments, the test surface 910 can be the surface of a platform 900. However, in this embodiment, a test object 905 can be placed on the platform 900, and a stereo scanning system is used to scan the three-dimensional appearance of the test object 905. If the three-dimensional scanning system scans the object to be measured 905, the surface to be measured 910 is the surface to which the object to be measured 905 and the platform 900 are illuminated by the polarization beam 112. If the stereo scanning system scans the surface of the platform 900, the surface to be measured 910 is the surface to which the platform 900 is irradiated by the polarized light beam 112. For the sake of clarity, the surface of the object to be measured 905 irradiated by the polarization beam 112 is taken as an example of the surface to be measured 910.
在本實施方式中,立體掃描系統利用具小擴散角度θ之偏振線光束112、第一偏振元件160與遠心影像擷取裝置150的組合可消除待測物905因表面結構不規則所造成的量測錯誤。具體而言,待測物905可為一金屬殼體,例如為經過機械加工、表面具有刀紋的金屬殼體。對於一個表面粗糙之待測物905而言,量測其表面形貌很容易因粗糙之表面而產生不規則的散射光。這些散射光會在擷取到的影像上形成雜訊,提高後續分析的困難度。 In this embodiment, the stereo scanning system uses a combination of the polarized light beam 112 with a small diffusion angle θ, the first polarizing element 160 and the telecentric image capturing device 150 to eliminate the amount of the object 905 caused by the irregular surface structure Test error. Specifically, the object to be measured 905 may be a metal case, for example, a metal case with a knife pattern on its surface after machining. For a test object 905 with a rough surface, measuring the surface topography can easily produce irregular scattered light due to the rough surface. These scattered light will form noise on the captured image, increasing the difficulty of subsequent analysis.
不過,在本實施方式中,偏振平行線光源110提供偏振線光束112,亦即偏振線光束112具有特定之偏振態。偏振線光束112會在待測物905之待測面910上形成一線條,線條的起伏可反應出待測面910的形貌。隨著待測物905與偏振線光束112之間相對移動,偏振線光束112掃描待測面910,因此可反應出待測面910的完整形貌。當偏振線光束112照射至待測面910上時,待測面910之刀紋或其他機械加工所產生的細微缺陷可能會讓偏振線光束112產生不規則的散射,這些不規則的散射會使得偏振線光束112的偏振態產生不規則的改變。具有不規則偏振態之偏振線光束112到達第一偏振元件160時,會被第一偏振元件160所濾除,因此只剩具有待測面910之立體資訊的部分偏振線光束115能夠通過第一偏振元件160而到達遠心影像擷取裝置150。另一方面,因遠心影像擷取裝置150具有接收實質平 行光的特性,因此可接收自待測面910散射的小擴散角度之偏振線光束115,且不會接收因表面刀紋而不規則散射的大擴散角度之其他光束。 However, in this embodiment, the polarized parallel line light source 110 provides a polarized line light beam 112, that is, the polarized line light beam 112 has a specific polarization state. The polarized light beam 112 forms a line on the test surface 910 of the test object 905, and the fluctuation of the line can reflect the shape of the test surface 910. With the relative movement between the object to be measured 905 and the polarized light beam 112, the polarized light beam 112 scans the surface to be measured 910, so the complete shape of the surface to be measured 910 can be reflected. When the polarized light beam 112 is irradiated on the surface 910 to be measured, slight defects caused by the cutting pattern or other machining of the measured surface 910 may cause irregular scattering of the polarized light beam 112, and these irregular scattering will cause The polarization state of the polarization line light beam 112 changes irregularly. When the polarized light beam 112 with an irregular polarization state reaches the first polarizing element 160, it will be filtered by the first polarizing element 160, so only a part of the polarized light beam 115 having the stereo information of the surface 910 to be measured can pass through the first The polarizing element 160 reaches the telecentric image capturing device 150. On the other hand, since the telecentric image capturing device 150 has a characteristic of receiving substantially parallel light, it can receive a polarized light beam 115 with a small diffusion angle scattered from the surface to be measured 910, and will not receive irregular scattering due to the surface knife pattern. Large beam angle of other beams.
綜合上述,即使部分之偏振線光束112照射至待測面910會因刀紋而產生不規則的散射,然而這些不規則散射之光束可藉由第一偏振元件160與遠心影像擷取裝置150而濾除,因此待測面910之特徵能被加強,同時粗糙表面的影像被壓抑,使得待測物905的特徵能夠被突顯,以取得清晰的待測物905之特徵影像。如此一來,待測物905可不需經過表面處理(例如噴砂處理)即可作檢測,可大幅簡化製程。 To sum up, even if part of the polarized light beam 112 is irradiated to the surface to be measured 910 due to the knife pattern, irregular scattering may occur. However, these irregularly scattered beams can be obtained by the first polarizing element 160 and the telecentric image capturing device 150 It is filtered, so the features of the test surface 910 can be enhanced, and at the same time, the image of the rough surface is suppressed, so that the features of the test object 905 can be highlighted to obtain a clear characteristic image of the test object 905. In this way, the test object 905 can be detected without surface treatment (such as sandblasting), which can greatly simplify the manufacturing process.
請參照第2圖。在一些實施方式中,偏振平行線光源110包含偏振光源122、柱狀透鏡124與準直元件126。偏振光源122用以提供一偏振光束123。柱狀透鏡124用以將偏振光束123塑形為偏振線光束112。準直元件126用以準直偏振線光束112。具體而言,偏振光源122例如可為具有偏振態的光源,例如為雷射光源,亦可以是其他光源加上偏振元件的組合。偏振光源122可為點光源,在本文中,點光源所提供之偏振光束123的光點實質上為非線形,例如為圓形、楕圓形。柱狀透鏡124之透鏡曲面呈單一軸向彎曲,因此可將偏振光束123作單一軸向的變形(例如收斂後擴散),使得偏振光束123變為偏振線光束112。準直元件126可準直偏振線光束112,以收斂偏振線光束112的擴散角度θ。換言之,未通過準直元件126之偏振線光束112的擴散角度θ’大於通 過準直元件126之偏振線光束112的擴散角度θ。在一些實施方式中,準直元件126可為透鏡,然而本揭露不以此為限。 Please refer to Figure 2. In some embodiments, the polarized parallel line light source 110 includes a polarized light source 122, a lenticular lens 124, and a collimating element 126. The polarized light source 122 is used to provide a polarized light beam 123. The lenticular lens 124 is used to shape the polarized light beam 123 into a polarized light beam 112. The collimation element 126 is used to collimate the polarized light beam 112. Specifically, the polarization light source 122 may be, for example, a light source having a polarization state, such as a laser light source, or a combination of other light sources and a polarization element. The polarized light source 122 may be a point light source. Herein, the light point of the polarized light beam 123 provided by the point light source is substantially non-linear, such as a circle or a circle. The lens curved surface of the lenticular lens 124 is curved in a single axial direction. Therefore, the polarized light beam 123 can be deformed in a single axial direction (such as diffusion after convergence), so that the polarized light beam 123 becomes a polarized light beam 112. The collimating element 126 can collimate the polarization line beam 112 to converge the diffusion angle θ of the polarization line beam 112. In other words, the diffusion angle θ 'of the polarization line light beam 112 that has not passed through the collimation element 126 is larger than the diffusion angle θ of the polarization line light beam 112 that has passed through the collimation element 126. In some embodiments, the collimating element 126 may be a lens, but the disclosure is not limited thereto.
偏振平行線光源110的結構不以第2圖的結構為限。請參照第3圖,其為第1圖之偏振平行線光源110根據另一實施方式的示意圖。在本實施方式中,偏振平行線光源110可省略第2圖之準直元件126,亦即偏振平行線光源110包含偏振光源122與柱狀透鏡124。在本實施方式中,區域C之偏振線光束112(亦即接近光軸114之部分偏振線光束112)具有較小的擴散角度θ,因此可僅利用區域C之偏振線光束112,例如使用一擋板將區域C外之偏振線光束112阻擋,或者遠心影像擷取裝置150僅接收區域C之偏振線光束112皆可。至於本實施方式的其他細節與第2圖相同,因此便不再贅述。 The structure of the polarization parallel line light source 110 is not limited to the structure of FIG. 2. Please refer to FIG. 3, which is a schematic diagram of the polarization parallel line light source 110 according to another embodiment of FIG. 1. In this embodiment, the collimated parallel line light source 110 may omit the collimation element 126 in FIG. 2, that is, the polarized parallel line light source 110 includes a polarized light source 122 and a lenticular lens 124. In this embodiment, the polarization line beam 112 in the region C (that is, a portion of the polarization line beam 112 near the optical axis 114) has a small diffusion angle θ. Therefore, only the polarization line beam 112 in the region C can be used. The baffle blocks the polarization beam 112 outside the area C, or the telecentric image capturing device 150 can only receive the polarization beam 112 in the area C. The other details of this embodiment are the same as those in FIG. 2 and therefore will not be described again.
第4圖為第1圖之偏振平行線光源110根據再一實施方式的示意圖。在本實施方式中,偏振平行線光源110包含線光源132、準直元件136與第二偏振元件138。線光源132用以提供線光束133。準直元件136用以準直線光束133。第二偏振元件138用以將準直後之線光束133偏振化為偏振線光束112。具體而言,線光源132可為燈條,包含複數個點光源134,沿一方向D排列。點光源134可以是發光二極體或是其他合適的光源。準直元件136可準直線光束133,以收斂線光束133的擴散角度。而後線光束133通過第二偏振元件138而偏振化為偏振線光束112。第二偏振元件138的偏振態與第一偏振元件160(如第1圖所示)實質正 交。雖然在第4圖中,準直元件136置於線光源132與第二偏振元件138之間,然而在其他的實施方式中,第二偏振元件138可置於線光源132與準直元件136之間,亦即線光源132所提供之線光束133可先通過第二偏振元件138後再通過準直元件136。至於本實施方式的其他細節與第2圖相同,因此便不再贅述。 FIG. 4 is a schematic diagram of the polarization parallel line light source 110 according to still another embodiment of FIG. 1. In this embodiment, the polarization parallel line light source 110 includes a line light source 132, a collimating element 136, and a second polarizing element 138. The linear light source 132 is used to provide a linear light beam 133. The collimating element 136 is used to collimate the light beam 133. The second polarizing element 138 is used to polarize the collimated linear beam 133 into a polarized linear beam 112. Specifically, the linear light source 132 may be a light bar including a plurality of point light sources 134 arranged along a direction D. The point light source 134 may be a light emitting diode or other suitable light sources. The collimating element 136 can collimate the linear beam 133 to converge the diffusion angle of the linear beam 133. Then, the linear light beam 133 is polarized by the second polarizing element 138 into a polarized light beam 112. The polarization state of the second polarization element 138 is substantially orthogonal to the first polarization element 160 (as shown in Fig. 1). Although in FIG. 4, the collimating element 136 is disposed between the linear light source 132 and the second polarizing element 138, in other embodiments, the second polarizing element 138 may be disposed between the linear light source 132 and the collimating element 136. In other words, the linear light beam 133 provided by the linear light source 132 can pass through the second polarizing element 138 and then pass through the collimating element 136. The other details of this embodiment are the same as those in FIG. 2 and therefore will not be described again.
請回到第1圖。在本實施方式中,偏振線光束112正向入射待測面910,而遠心影像擷取裝置150斜向擷取待測面910上之偏振線光束115。具體而言,待測面910具有法線912。「正向入射」表示從偏振平行線光源110提供之偏振線光束112之光軸114與法線912實質平行,而「斜向擷取」表示遠心影像擷取裝置150所接收之偏振線光束115之光軸116與光軸114的相交角度大於0度,當相交角度愈大時,消除(或抗)雜訊的效果愈好,在較佳的實施方式中,相交角度大於20度。因偏振線光束112正向入射待測面910,而遠心影像擷取裝置150斜向擷取偏振線光束115,因此遠心影像擷取裝置150擷取的主要為自待測面910散射之偏振線光束115。 Please return to Figure 1. In this embodiment, the polarized light beam 112 is incident on the surface to be measured 910 in a forward direction, and the telecentric image capturing device 150 captures the polarized light beam 115 on the surface to be measured 910 obliquely. Specifically, the test surface 910 has a normal 912. “Forward incidence” indicates that the optical axis 114 of the polarization line beam 112 provided from the polarization parallel line light source 110 is substantially parallel to the normal line 912, and “oblique capture” indicates the polarization line beam 115 received by the telecentric image capture device 150 The intersection angle between the optical axis 116 and the optical axis 114 is greater than 0 degrees. The larger the intersection angle, the better the effect of eliminating (or anti) noise. In a preferred embodiment, the intersection angle is greater than 20 degrees. Because the polarized light beam 112 enters the surface to be measured 910 in a forward direction, and the telecentric image capturing device 150 captures the polarized light beam 115 obliquely, the polarized light scattered by the telecentric image capturing device 150 is mainly scattered from the measured surface 910. Light beam 115.
在第1圖中,遠心影像擷取裝置150包含相機152與遠心鏡頭154。遠心鏡頭154置於相機152與第一偏振元件160之間。遠心鏡頭154可包含多個透鏡(未繪示),遠心鏡頭154設計為使實質平行光入射,使得相機152主要由平行光所成像。如此的設計可使物體的成像倍率不因物體的遠近而改變,且可排除大擴散角度之光束在相機152成像。 In FIG. 1, the telecentric image capturing device 150 includes a camera 152 and a telecentric lens 154. A telecentric lens 154 is interposed between the camera 152 and the first polarizing element 160. The telecentric lens 154 may include a plurality of lenses (not shown). The telecentric lens 154 is designed to make substantially parallel light incident, so that the camera 152 is mainly imaged by the parallel light. Such a design can prevent the imaging magnification of the object from being changed by the distance of the object, and can exclude the imaging of the light beam with a large diffusion angle at the camera 152.
綜合上述,偏振平行線光源提供偏振線光束以在待測面上形成線條,其起伏可反應出待測面的形貌。當偏振線光束照射至待測面上時,待測面之刀紋或其他機械加工所產生的細微缺陷可能會讓偏振線光束產生不規則的散射。具有不規則偏振態之偏振線光束到達第一偏振元件時,會被第一偏振元件所濾除,因此只剩具有待測面之立體資訊的部分偏振線光束能夠通過第一偏振元件而到達遠心影像擷取裝置。遠心影像擷取裝置可接收自待測面散射的小擴散角度之偏振線光束,且不會接收因表面刀紋而不規則散射的大擴散角度之光束。如此一來,立體掃描系統可消除待測物因表面結構不規則所造成的量測錯誤。 To sum up, the polarized parallel line light source provides a polarized light beam to form a line on the surface to be measured, and its undulation can reflect the shape of the surface to be measured. When the polarized light beam is irradiated onto the surface to be measured, the small defects caused by the knife pattern or other mechanical processing on the surface to be measured may cause irregular scattering of the polarized light beam. When the polarized light beam with irregular polarization reaches the first polarizing element, it will be filtered by the first polarizing element, so only a part of the polarizing light beam with stereo information of the surface to be measured can reach the telecentricity through the first polarizing element. Image capture device. The telecentric image capturing device can receive polarized light beams with a small diffusion angle scattered from the surface to be measured, and will not receive light beams with a large diffusion angle scattered irregularly due to the surface knife pattern. In this way, the stereo scanning system can eliminate measurement errors caused by irregular surface structures of the object to be measured.
雖然本揭露已以實施方式揭露如上,然其並非用以限定本揭露,任何熟習此技藝者,在不脫離本揭露之精神和範圍內,當可作各種之更動與潤飾,因此本揭露之保護範圍當視後附之申請專利範圍所界定者為準。 Although this disclosure has been disclosed as above in the form of implementation, it is not intended to limit this disclosure. Any person skilled in this art can make various changes and decorations without departing from the spirit and scope of this disclosure. Therefore, the protection of this disclosure The scope shall be determined by the scope of the attached patent application.
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