TWI586597B - Container for storing substrates - Google Patents

Description

Container for accommodating the substrate

The present invention relates to a container, and more particularly to a container for housing a substrate.

Substrates, i.e., wafers, which are commonly used in the fabrication of integrated circuits, require better protection during storage, transport, or transfer between processes to avoid particulate contamination or damage.

Generally, a container for accommodating a substrate can accommodate a plurality of substrates at the same time, and a layered spaced support structure is required in the container to space the substrates to avoid collision of the substrates; and an automated pick-and-place device is provided. It is easy to remove the substrate from the container or place the treated substrate into the container. A common support structure, such as a plurality of ribs fixed to the inner wall surface of the container casing, supports the substrate. However, such structural design has many application limitations. For example, during baking, since hot air can only be convected through a single door opening, the substrate in the container is not easily heated uniformly, and may cause baking. In addition to poor results, in severe cases, the substrate may even be broken due to different degrees of thermal expansion at different locations. If a door/window mechanism that improves the convection effect is added to a position other than the original door opening of the container, such as the rear wall surface of the container, the ribs at the place may be unsupported and easily deformed or shaken. The substrate that is supported by it is also deformed or even broken due to uneven or unstable support. At the same time, the rib shape in the support structure of the conventional container is mostly U-shaped, so that the substrate can only provide support near the rear wall of the container and the rear half of the side wall, and can not provide support for the center of the substrate and the periphery of the front half, thus The center and the front half of the substrate are subjected to gravity to cause sagging deformation. And this problem will be aggravated with the increase of the size/diameter of the substrate or the thinning of the thickness of the substrate. In severe cases, the automatic pick-and-place device may be rubbed into the portion where the substrate is drooped when it is inserted into the container for taking the film. The substrate is damaged or even broken. In addition, the ribs in the support structure of the conventional container are mostly of a fixed structural design, so that the design and manufacture must be individually designed and manufactured for various containers of different capacities; and when some of the ribs in the finished product of the container are damaged, When there are designs that are newer, better, or can meet different needs, they cannot be replaced individually, and the entire container can only be redesigned and manufactured, thus increasing the cost of manufacturing and the demand for inventory.

Since the structural design of the container requires consideration of various problems and needs including the above examples, there is still room for improvement in the existing container structure.

Accordingly, it is an object of the present invention to provide a container that can be supported by abutment structures between a plurality of carrier brackets that are stackable and that are adjacent to each other.

Thus, the container for housing a substrate of the present invention, in some embodiments, includes a housing defining a chamber, and a support unit. The support unit includes a plurality of brackets located in the housing, each of the brackets having a curved frame and at least one abutting structure connected to the frame. The frame body has two arm portions spaced apart from each other, and a curved portion connected between the two arm portions, and the two arm portions are connected to the outer casing. The abutting structure is disposed at the curved portion and is biased at the outer edge. The frames of the receiving brackets are arranged at intervals in the up-and-down direction, and the adjacent supporting structures are supported by the supporting structures. The frame is such that the curved portions of the adjacent frames remain at a fixed interval.

In some embodiments, the two abutting structures of the two adjacent brackets abut in the up and down direction.

In some embodiments, the abutment structure has a support portion connected to the outer edge of the curved portion, and the support portions of each of the two adjacent brackets abut in the up and down direction.

In some embodiments, the resisting structure further has a limiting portion, and the limiting portion and the supporting portion respectively protrude from opposite sides of the curved portion in the up and down direction, and the upper and lower phases are displaced, so that each of the two The limiting portion of one of the adjacent receiving brackets abuts the supporting portion of the other of the brackets in a direction toward a center of curvature of the curved portion.

In some implementations, the limiting portion has a card slot, and the supporting portion has a card block, and the card card of the supporting portion of one of the two adjacent receiving brackets is placed therein. The card slot of the one of the limiting portions.

In some embodiments, each of the support portions further has two connecting arms spaced apart from each other to the curved portion, and a connecting beam connected to the bottom ends of the connecting arms, and the blocking block faces the curved portion. The inner edge of the portion protrudes from the surface of the connecting beam.

In some embodiments, the support portion further has two support columns respectively protruding from the surface of the connecting arm toward the inner edge of the curved portion, and the projection of the limiting portion in the up and down direction is located at the support portion. Between the two supporting columns, such that the limiting portion of one of the two adjacent receiving brackets is located between the two supporting columns of the other of the supporting portions, and the two supporting columns are abutted Between the curved portions of the two adjacent brackets.

In some embodiments, the housing includes a housing and a door body, the housing has a bottom wall, a top wall opposite to the bottom wall, and two side walls respectively connecting the bottom wall and the top wall And a rear wall connecting the bottom wall, the top wall and the two side walls, and defining a front opening opposite to the rear wall, the door body being detachably combined with the housing to close the front opening, and The chamber is defined together with the housing.

In some embodiments, the rear wall defines a rear opening opposite the front opening, and the outer casing further includes a rear cover detachably coupled to the rear wall for closing the rear opening.

In some embodiments, the rear opening is formed at an intermediate portion of the rear wall and extends in the up and down direction.

In some embodiments, each of the brackets has two abutting structures connected to the frame, and the two abutting structures are respectively located near or at a junction of the two side walls and the rear wall. At the sides of the rear opening.

In some implementations, the support unit further includes a plurality of first fixing structures respectively disposed at the two side walls and arranged in the up and down direction, and the frame body of each of the bearing brackets further has two separate structures In the second fixing structure of the two arm portions, the two second fixing structures are respectively fixed and fixed in combination with the corresponding first fixing structures on the two side walls.

In some implementations, the support unit further includes two adapter plates provided with the first fixed structures.

In some implementations, the two adapter plates are detachably secured to the two side walls.

In some embodiments, each of the corresponding first fixed structure and the second fixed structure cooperate with each other to form a structure that is engaged or fixed to each other.

In some embodiments, each of the first fixing structures has an elongated groove shape extending in a front-rear direction, and each of the second fixing structures has an elongated strip shape and is connected to the corresponding arm portion. The outer edge is perpendicularly connected to the arm to be inserted into the corresponding first fixing structure.

In some embodiments, each of the first fixing structures is an elongated piece extending in the front-rear direction and protruding from the side wall or the surface of the adapter plate toward the cavity, and each of the second fixings The structure is a recess corresponding to the inner edge of the arm portion and recessed in the arm portion to receive the corresponding first fixing structure.

In some embodiments, the frame body of each of the carrier brackets is C-shaped and the inner edge of the curved portion has a single curvature, and the two arm portions each have an extension connecting the curved portion and a Connecting a tail section of the extension, the inner edge at the extension being curved and extending from the inner edge at the curved portion and having the same curvature, the outer edge at the extension being linearly extended by the outer edge connecting the curved portion, and An outer edge of the tail section extends linearly from an outer edge connecting the extension to correspond to the outer casing, and an inner edge of the tail section extends from an inner edge of the extension to a direction parallel to the outer edge, such that The width of the extension is gradually widened by connecting one end of the curved portion to one end of the tail segment, and the width of the tail segment is greater than or equal to the maximum width of the extension.

In some embodiments, the frame of each of the brackets further has at least one intermediate bracket connected to the curved portion and located between the two arms toward the center of the chamber.

In some embodiments, when the frame has a plurality of intermediate supports, the intermediate supports are interconnected adjacent one end of the center of the chamber.

The invention has at least the following effects: the support structure of the frame stacking brackets can be easily supported by the support structure without being easily deformed, so that the curved portions of the adjacent frame bodies are kept at a fixed interval, and the substrate can be provided. The more even and stable support prevents the substrate contained in the container from being damaged by excessive deformation, and also prevents the substrate from being damaged or even broken by the collision of the automatic pick-and-place device due to excessive deformation. A rear opening may be added to provide a good convection effect in the baking process, but without thereby reducing the support stability of the frame of each carrier near the rear opening. In addition, the brackets are connected to the outer casing by two adapter plates, and the two adapter plates are detachable, and different number of support units can be replaced according to the use requirements, so as to apply substrates of different thicknesses or sizes. Reduce the cost of stocking and inventory. Moreover, the brackets have the same structure, can be formed separately, and then stacked and assembled, which is also convenient for manufacturing and inventory.

Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same reference numerals.

Referring to FIG. 1 to FIG. 5, a first embodiment of a container for accommodating a substrate for accommodating a plurality of substrates 5 is particularly suitable for a circular substrate 5, the container comprising a casing 1 defining a chamber 11 And a support unit 2.

The outer casing 1 includes a casing 12 and a door body 13. The housing 12 has a bottom wall 121, a top wall 122 opposite to the bottom wall 121, and two side walls 123 connecting the bottom wall 121 and the top wall 122, and a bottom wall 121. The top wall 122 and the rear wall 124 of the two side walls 123 define a front opening 125 opposite the rear wall 124. The door body 13 is detachably combined with the housing 12 to enclose the front opening 125 and to define the chamber 11 together with the housing 12. In the present embodiment, the rear wall 124 of the housing 12 defines a rear opening 126 opposite to the front opening 125 and communicating with the chamber 11, and the housing 1 further includes a detachably coupled to the rear wall 124. A rear cover 14 for closing the rear opening 126 is combined. The rear opening 126 is formed at an intermediate portion of the rear wall 124 and extends in the up-and-down direction D1 for forming a gas convection passage with the front opening 125 to make the chamber when baking is performed after the cleaning process is completed. The component or substrate 5 within 11 can be uniformly heated and easily dried. In the embodiment, the upper and lower sides of the rear opening 126 are adjacent to the top wall 122 and the bottom wall 121 respectively to increase the range of the convection passage.

The rear cover 14 can be combined with the rear wall 124 as needed to close the rear opening 126 to maintain the cleanliness in the chamber 11, or can be used to perform the rear cover 14 after the process such as baking. The wall 124 is removed. In addition, the rear cover 14 shown in Fig. 4 is exemplified by the simplest flat structure. In practical applications, the back cover 14 can be fabricated into a variety of different shapes or configurations as desired, such as in the form of a curved surface, or by adding additional structures such as a card slot or stud/slot on the surface. In addition, the back cover 14 can also be selected to be transparent or opaque, or even a material that allows only light of a specific wavelength range to pass through. For example, when the back cover 14 is made of a transparent material, the worker can observe the state of the substrate 5 accommodated in the container provided by the embodiment through the transparent back cover 14 during the process, so that It can be processed as soon as possible when an abnormality occurs.

Referring to FIGS. 5-8, the support unit 2 includes a plurality of brackets 3 located in the chamber 11. Each carrier 3 has a curved body 31 for supporting the substrate 5, and at least one abutting structure 32 connected to the frame 31, and in this embodiment, each of the frames 31 is connected with two resisting structures 32 as an example. The frame body 31 has two arm portions 311 which are spaced apart from each other, and a curved portion 312 connected between the two arm portions 311, and has an inner edge 313 and an outer edge 314, and the two arm portions 311 and The outer casing 1 is connected.

In this embodiment, the support unit 2 further includes a plurality of first fixing structures 41 respectively disposed on the two side walls 123 and arranged in the up and down direction D1, and the frame body 31 of each of the receiving brackets 3 further has Two second fixing structures 33 are respectively disposed on the two arm portions 311, and the two second fixing structures 33 are respectively fixedly coupled to the corresponding first fixing structures 41 on the two side walls 123. Each of the corresponding ones of the first fixing structure 41 and the second fixing structure 33 are mutually concave and convex to cooperate with each other to be engaged or fixed.

In this embodiment, the support unit 2 further includes two adapter plates 4 provided with the first fixing structures 41, and the two adapter plates 4 are detachably fixed to the two side walls 123, respectively. Referring to FIG. 10 and FIG. 11 , in the embodiment, each of the first fixing structures 41 has an elongated groove shape extending in the front-rear direction D2 , and each of the second fixing structures 33 has a long shape. The sheet is connected to the outer edge 314 of the corresponding arm portion 311 and perpendicularly connected to the arm portion 311 to be inserted into the corresponding first fixing structure 41, and corresponding to each second fixing structure 33 A screw (not shown) is inserted through a through hole 42 of the adapter plate 4 and a locking hole 331 of the second fixing structure 33 to lock the second fixing structure 33 to the adapter plate 4 for reinforcement.

In a variant embodiment, the first fixing structure 41 can also be designed as a groove-shaped chute having a T-shaped cross section and opening toward the front opening 125. In the combination, it is only necessary to insert and fix the second fixing structure 33 on both sides of each carrier bracket 3 in the front-rear direction D2 by inserting the corresponding first fixing structure 41 having a T-shaped groove shape. It can be understood that in another variant embodiment, the first fixing structures 41 can also be formed directly on the two side walls 123 without the adapter plate 4 being disposed.

In addition, the second fixing structures 33 may be directly locked or glued to the two adapter plates 4 or the two side walls 123, or the two arm portions 311 may be integrally connected to the outer casing 1. The example is limited. That is, the manner in which the two arm portions 311 of each of the brackets 3 are connected to the outer casing 1 is not limited to the embodiment, and may be implemented by direct connection or indirect connection. However, if the two adapter plates 4 are provided, the flexibility of the use adjustment can be increased, which will be described later.

The abutting structure 32 of each of the brackets 3 is disposed at the curved portion 312 of the frame body 31 and is biased at the outer edge 314. The frame bodies 31 of the receiving brackets 3 are arranged at intervals in the vertical direction D1. The adjacent frame bodies 31 are supported by the abutment structure 32 to maintain the arcuate portions 312 of the adjacent frame bodies 31 at a fixed interval. That is, it is used to support the curved portion 312 to prevent the curved portion 312 from being bent and deformed downward.

In this embodiment, the two abutting structures 32 of each receiving bracket 3 are respectively located near the intersection of the two side walls 123 and the rear wall 124 on both sides of the rear opening 126 (see FIG. 4), instead of being in the The passage between the front opening 125 and the rear opening 126 does not impede the flow of gas between the front opening 125 and the rear opening 126. It can be understood that each of the brackets 3 can also be provided with only one abutting structure 32, for example, in the middle section of the curved portion 312, or three or more supporting structures 32 can also be provided, without limitation.

As shown in FIG. 7, in the present embodiment, the frame body 31 of each carrier bracket 3 has a C shape, and the inner edge 313 at the curved portion 312 has a single curvature. The two arm portions 311 each have an extending portion 311a connecting the curved portion 312 and a tail portion 311b connecting the extending portion 311a. The inner edge 313 at the extension 311a is curvedly extended by the inner edge 313 at the curved portion 312 and has the same curvature. The outer edge 314 at the extension 311a extends linearly from the outer edge 314 at the bend 312, and the outer edge 314 at the tail 311b extends linearly from the outer edge 314 at the extension 311a to correspond And connected to the outer casing 1. The inner edge 313 of the tail section 311b extends from the inner edge 313 of the extension 311a toward the parallel outer edge 314, such that the width W1 of the extension 311a is connected to the tail by one end of the curved portion 312. One end of the segment 311b is gradually wider, and the width W2 of the tail segment 311b can be greater than or equal to the maximum width of the extended segment 311a, that is, the width W2 of the tail segment 311b can be greater than or equal to the maximum value of the width W1 of the extended segment 311a. . In this way, the width of the opening of the frame body 31 near the end of the front opening 125 can be minimized, and only the opening of the width of the robot arm that can be used for the automatic access device can be kept, so that the substrate 5 can be supported when the substrate 5 is supported. The lateral and front perimeters provide a greater range of support than the conventional U-shaped support structure generally supports only the sides and rear perimeter of the substrate. Therefore, a better supporting force can be provided to reduce the amount of sagging or deformation of the substrate 5 due to the action of gravity.

Referring to FIG. 8 and FIG. 9 , each of the abutting structures 32 has a supporting portion 321 and a limiting portion 322 connected to the outer edge 314 of the curved portion 312 . The limiting portion 322 and the supporting portion 321 are located therein. The upper and lower directions D1 respectively protrude from opposite sides of the curved portion 312, and the upper and lower phases are displaced. The support portion 321 further has two connecting arms 321a spaced apart from each other to the curved portion 312, a connecting beam 321b connected to the bottom ends of the connecting arms 321a, and a convex portion 313 facing the curved portion 312. The block 321c on the surface of the connecting beam 321b and the two supporting columns 321d which are respectively protruded from the surface of the connecting arms 321a toward the inner edge 313 of the curved portion 312. The limiting portion 322 has a card slot 322a, and the projection of the limiting portion 322 in the vertical direction D1 is located between the two supporting columns 321d.

Referring to FIG. 10 to FIG. 12, the support portion 321 of the abutting structure 32 of each two adjacent brackets 3 abuts in the up and down direction D1, and the limit of one of each two adjacent brackets 3 The seat portion 322 abuts against the support portion 321 of the other one in a direction toward the center of curvature of the curved portion 312, and the one of the support portions 321 of the support portion 321 is stuck in the limit portion of the other one. The card slot 322a of the 322 is at the same time, and the limiting portion 322 of one of the supporting portions 322 is located between the two supporting pillars 321d of the supporting portion 321 of the other one, and the two supporting pillars 321d are bent against the bending of the two adjacent brackets 3 Between the arcs 312. Thereby, the supporting structure 32 of each two adjacent bearing brackets 3 can not only support the frame body 31, but also can buckle with each other to make the overall structure more stable.

In this embodiment, the supporting portion 321 of the receiving structure 32 of each receiving bracket 3 is protruded downward from the frame body 31, and the limiting portion 322 is protruded upward from the frame body 31, however, it is understandable In the variation embodiment, the support portion 321 can also protrude upward from the frame body 31, and the limiting portion 322 can be protruded downward from the frame body 31. Furthermore, only the support portion 321 of the abutting structure 32 can be implemented as long as it can withstand between the adjacent two frames 31. In this embodiment, the design of the upper and lower abutting structures 32 to be buckled to each other can further make the overall structure more stable. Of course, there are many variations on the design of the buckle limit, which is not limited to this embodiment.

In addition, the supporting structure 32 of the upper and lowermost receiving brackets 3 can be adjusted according to actual needs. For example, the supporting structure 32 located at the uppermost receiving bracket 3 may not be provided with the upper limiting portion 322 or the support. The portion 321 and the abutting structure 32 at the lowermost receiving bracket 3 may not be provided with a downwardly protruding supporting portion 321 or a limiting portion 322 to reduce the height of the outer casing 1 and the chamber 11 in the height direction. Space.

Referring to FIG. 5 and FIG. 10 , in the embodiment, the two adapter plates 4 are detachably fixed to the two side walls 123 , thereby adjusting the structure of the support unit 2 according to the use requirement, for example, having 25 The adapter plate 4 of the first fixed structure 41 is provided with a carrier 3 only at the position of the first fixed structure 41 of the single layer, and is a container that can accommodate 13 substrates 5 . Or the supporting unit 2 of the present embodiment can be adapted to accommodate 13 substrates 5, and the receiving brackets 3 having the different heights of the supporting structures 32 can be used, and the height of the second fixing structure 33 and the first of the adapter plates 4 can be changed. a spacing of the fixing structures 41 to adjust the spacing between the frame bodies 31, and to increase the number of the receiving brackets 3 by reducing the spacing, for example, forming the supporting unit 2 for accommodating the 25 substrates 5; or by increasing the spacing To reduce the number of brackets 3. In other words, a plurality of support units 2 having different number of layers (the number of the brackets 3) can be prepared. The two adapter plates 4 are detachably fixed to the two side walls 123, so that different layers can be replaced according to the use requirements. The support unit 2 is adapted to apply the substrate 5 of different thicknesses or sizes. Moreover, in production, the outer casing 1 of the same size can be matched with the support unit 2 of different layers, and the cost of preparing materials and stocks can be reduced, and the elasticity of production can be increased. Moreover, in the present embodiment, the receiving brackets 3 have the same structure, can be formed separately, and then stacked and assembled, which is also convenient for manufacturing and inventory.

In addition, if there is no need to adjust the structure of the support unit 2, the two adapter plates 4 may be integrally connected to the two side walls 123, for example, by insert molding. In order to meet various process requirements, the outer casing 1 and the support unit 2 of the container provided in this embodiment can be made of materials with different characteristics, for example, a plastic material capable of eliminating static electricity and having a temperature resistance of 180 ° C or higher. to make.

Referring to Figures 13 through 15, a second embodiment of the container for housing a substrate of the present invention is substantially identical in construction to the first embodiment. In the second embodiment, the frame body 31 of each of the carrier brackets 3 has one arm portion 311 which is spaced apart from each other, and a curved portion 312 which is connected between the two arm portions 311. The intermediate portion 315 is connected to the curved portion 312 and is located between the two arm portions 311 and protrudes toward the center of the chamber 11. This embodiment can be applied to a substrate 5 having a relatively small thickness or a large size (refer to FIG. 3), and the intermediate portion 315 is used to increase the support of the central portion of the substrate 5, so that the substrate 5 is placed on the carrier 3 The frame body 31 can be flatter and does not have an excessively large amount of sag, so that the robot arm of the automatic pick-and-place device can be damaged or even damaged when it is rubbed into a portion where the deformation is drooped.

As shown in FIG. 16, in a variant embodiment, the frame body 31 of the carrier 3 can also have more than one intermediate support 315. The one shown in Fig. 16 is exemplified by a frame body 31 having two intermediate brackets 315. When the frame body 31 of the carrier 3 has a plurality of intermediate brackets 315, the intermediate brackets 315 are close to one end of the center of the chamber 11 (see FIG. 14) (that is, each of the intermediate brackets 315 is away from the frame). One end of 31 may be interconnected to increase the strength of the overall structure and thus provide a more stable support for the central portion of the substrate 5 (see Figure 3).

In addition, with reference to FIG. 17 to FIG. 19, in the second embodiment, the first fixing structures 41 are directly disposed on the two side walls 123, and each of the first fixing structures 41 is surface-facing by the side wall 123. An elongated strip extending in the direction of the front and rear direction D2, and each of the second fixing structures 33 is disposed in the arm portion 311 by an outer edge 314 corresponding to the arm portion 311. A recessed recess is received to receive the corresponding first fixed structure 41. In a variant embodiment, the first fixing structure 41 may also be one or more bumps or clips arranged along the front-rear direction D2, and each second fixing structure 33 is one or more along the corresponding arm. A recessed hole is provided at the outer side edge 314 of the portion 311 to fit the corresponding bump or the latch. As in the first embodiment, in the second embodiment, two adapter plates provided with the first fixing structures 41 may be included (refer to the first embodiment), and corresponding to the adapter plates The side walls 123 are fixed in combination. Moreover, the adapter plates can also be designed to be detachably or non-removably fixed to the side walls 123 depending on the needs of use.

In summary, by the abutment structure 32, the frame bodies 31 of the stacked stacking brackets 3 can be well supported and not deformed so that the curved portions 312 of the adjacent frame bodies 31 are kept at a fixed interval. It can provide a more even and stable support of the substrate 5, so that the substrate 5 accommodated in the container is not damaged by excessive deformation, and the substrate 5 can be prevented from being damaged or even broken by the collision of the automatic pick-and-place device due to excessive deformation. . In addition, the brackets 3 are connected to the outer casing 1 by two adapter plates 4, and the two adapter plates 4 are detachable, and the different number of support units 2 can be replaced according to the use requirements, so as to be applicable to different thicknesses or sizes. The substrate 5 can also reduce the cost of stocking and stocking. Moreover, the carrier brackets 3 have the same structure, can be formed separately, and then stacked and assembled, which is also convenient for manufacturing and inventory. The rear opening 126 can be added to provide a good convection effect in the baking process, but does not reduce the structural strength and support stability of the frame body 31 of each of the carrier brackets 3 near the rear opening 126.

However, the above is only the embodiment of the present invention, and the scope of the invention is not limited thereto, and all the equivalent equivalent changes and modifications according to the scope of the patent application and the patent specification of the present invention are still The scope of the invention is covered.

1‧‧‧Shell
11‧‧ ‧ room
12‧‧‧ housing
121‧‧‧ bottom wall
122‧‧‧ top wall
123‧‧‧ side wall
124‧‧‧ Back wall
125‧‧‧ front opening
126‧‧‧After opening
13‧‧‧
14‧‧‧ Back cover
2‧‧‧Support unit
3‧‧‧ bracket
31‧‧‧ ‧ frame
311‧‧‧ Arms
311a‧‧‧Extension
311b‧‧ End
312‧‧‧Curved arc
313‧‧‧ inside edge
314‧‧‧ outside edge
315‧‧‧ Middle support
32‧‧‧Resistance structure
321‧‧‧Support
321a‧‧‧ connecting arm
321b‧‧‧Connecting beam
321c‧‧‧ card block
321d‧‧‧Support column
322‧‧‧Limited
322a‧‧‧ card slot
33‧‧‧Second fixed structure
331‧‧‧Keyhole
4‧‧‧Adapter plate
41‧‧‧First fixed structure
42‧‧‧Perforation
5‧‧‧Substrate
D1‧‧‧Up and down direction
D2‧‧‧ direction
W1‧‧‧Extension width
W2‧‧‧ tail width

Other features and advantages of the present invention will be apparent from the embodiments of the present invention, wherein: Figure 1 is a perspective view of a first embodiment of a container for receiving a substrate of the present invention; FIG. 3 is a perspective view showing a state in which the door body is removed in the first embodiment; FIG. 4 is a perspective exploded view showing a state in which the opening and the opening are opened in the first embodiment; Figure 5 is an exploded perspective view of the first embodiment illustrating the assembly relationship between a support unit and a housing; Figure 6 is a perspective view of the support unit of the first embodiment; Figure 7 is the first embodiment FIG. 8 is a perspective view of the bracket of the first embodiment; FIG. 9 is a perspective view of the bracket of the first embodiment; FIG. Is a rear view of the support unit of the first embodiment; FIG. 11 is an incomplete side view of the support unit of the first embodiment; FIG. 12 is a perspective view of the support unit of the first embodiment. Full cross-sectional perspective view; Figure 13 is the present invention for storage Figure 1 is a perspective exploded view of the second embodiment of the second embodiment Figure 16 is a plan view showing another embodiment of the carrier of the second embodiment; Figure 17 is a cross-sectional view of the second embodiment; Figure 18 is an enlarged view of a partial area of Figure 17; Another cross-sectional view of the second embodiment.

1‧‧‧Shell

11‧‧ ‧ room

12‧‧‧ housing

123‧‧‧ side wall

2‧‧‧Support unit

3‧‧‧ bracket

31‧‧‧ ‧ frame

32‧‧‧Resistance structure

4‧‧‧Adapter plate

D1‧‧‧Up and down direction

Claims (24)

A container for accommodating a substrate, comprising: a casing defining a chamber; and a supporting unit comprising a plurality of brackets in the chamber, each bracket having a curved frame And at least one abutting structure connected to the frame body, the frame body has two arm portions spaced apart from each other, and a curved portion connected between the two arm portions, and the two arm portions are connected to the outer casing, The abutting structure is disposed at the curved portion and is biased at the outer edge. The frames of the receiving brackets are arranged at intervals in the up-and-down direction, and the adjacent supporting structures are supported by the supporting structures. The frame is such that the curved portions of the adjacent frames remain at a fixed interval. The container of claim 1, wherein the two adjacent supporting structures of the two receiving brackets abut in the up and down direction. The container of claim 2, wherein the abutting structure has a support portion connected to the outer edge of the curved portion, and the support portions of each of the two adjacent brackets are offset in the up and down direction. Pick up. The container of claim 3, wherein the abutting structure further has a limiting portion, the limiting portion and the supporting portion respectively protrude from opposite sides of the curved portion in the up and down direction, and the upper and lower phases are displaced, and The retaining portion of one of the two adjacent ones of the brackets abuts the support portion of the other of the brackets in a direction toward the center of curvature of the curved portion. The container of claim 4, wherein the limiting portion has a card slot, the supporting portion has a card block, and the card portion of the supporting portion of each of the two adjacent ones of the receiving brackets is latched The card slot of the other of the limiting portions. The container of claim 5, wherein each of the support portions further has two connecting arms spaced apart from each other to the curved portion, and a connecting beam connected to the bottom ends of the connecting arms, and the blocking block faces the The inner edge of the curved portion protrudes from the surface of the connecting beam. The container according to claim 6, wherein the support portion further has two support columns respectively protruding from the surface of the connecting arm toward the inner edge of the curved portion, and the limiting portion is in the up and down direction. Projecting between the two support columns, such that the limit portion of one of the two adjacent ones of the brackets is located between the two support columns of the other of the support portions, and the two supports The post is between the arcing portions of the two adjacent brackets. The container according to any one of claims 1 to 7, wherein the outer casing comprises a casing and a door body, the casing has a bottom wall, a top wall opposite to the bottom wall, and two bottoms respectively connected to the bottom a wall and a side wall on both sides of the top wall, and a rear wall connecting the bottom wall, the top wall and the two side walls, and defining a front opening opposite to the rear wall, the door body being detachably coupled to the housing The phases are combined to close the front opening and define the chamber together with the housing. The container of claim 8, wherein the rear wall defines a rear opening opposite the front opening, and the outer casing further includes a rear cover detachably coupled to the rear wall for closing the rear opening. The container according to claim 9, wherein the rear opening is formed at an intermediate portion of the rear wall and extends in the up and down direction. The container of claim 10, wherein each of the brackets has two abutting structures connected to the frame, and the two abutting structures are respectively located near the intersection of the two side walls and the rear wall or Located near the sides of the rear opening. The container of claim 1, wherein the outer casing comprises a casing and a door body, the casing has a bottom wall, a top wall opposite to the bottom wall, and two connecting the bottom wall and the top wall respectively a side wall, and a rear wall connecting the bottom wall, the top wall and the two side walls, and defining a front opening opposite to the rear wall, the door body being detachably combined with the housing to close the front Opening and defining the chamber together with the housing; the support unit further includes a plurality of first fixing structures respectively disposed at the two side walls and arranged in the up and down direction, and the frame body of each of the brackets There are also two second fixing structures respectively disposed on the two arm portions, and the two second fixing structures are respectively fixedly coupled with the corresponding first fixing structures on the two side walls. The container of claim 12, wherein the support unit further comprises two adapter plates provided with the first fixed structures. The container of claim 13, wherein the two adapter plates are detachably fixed to the two side walls respectively. The container of claim 12, 13 or 14, wherein each of the corresponding first fixed structure and the second fixed structure cooperate with each other to form a structure that is engaged or fixed to each other. The container of claim 15, wherein each of the first fixing structures has an elongated groove shape extending in a front-rear direction, and each of the second fixing structures has an elongated strip shape and is connected to the corresponding one. The outer edge of the arm is perpendicularly connected to the arm to be inserted into the corresponding first fixing structure. The container of claim 12, wherein each of the corresponding first fixed structure and the second fixed structure are mutually concave and convex to cooperate with each other, or each of the first fixed The structure is an elongated strip extending in the front-rear direction and protruding from the sidewall surface toward the chamber, and each of the second fixing structures is recessed by the outer edge corresponding to the arm toward the arm a groove is provided to receive the corresponding first fixing structure. The container of claim 13 or 14, wherein each of the corresponding first fixed structure and the second fixed structure are mutually concave and convex to cooperate with each other or to be fixedly coupled to each other, and each of the a fixing structure is an elongated piece extending in the front-rear direction and protruding from the surface of the adapter plate toward the cavity, and each of the second fixing structures is a corresponding outer edge of the arm a recess recessed in the arm portion for receiving the corresponding first fixing structure. The container of claim 15, wherein the rear wall defines a rear opening opposite the front opening, and the outer casing further includes a rear cover detachably coupled to the rear wall for closing the rear opening. The container according to claim 19, wherein the rear opening is formed at an intermediate portion of the rear wall and extends in the up and down direction. The container of claim 20, wherein each of the brackets has two abutting structures connected to the frame, and the two abutting structures are respectively located near the intersection of the two side walls and the rear wall or Located near the sides of the rear opening. The container of claim 1, wherein the frame body of each of the carrier brackets is C-shaped and the inner edge of the curved portion has a single curvature, and the two arm portions each have an extension connecting the curved portion a segment and a tail segment connecting the extension, the inner edge at the extension being curved and extending from the inner edge at the curved portion and having the same curvature, the outer edge at the extension being straight by the outer edge connecting the curved portion Extending, and the outer edge at the tail section is linearly extended by the outer edge connecting the extension to correspond to and be connected to the outer casing, and the inner edge of the tail section is gradually parallel to the outer edge from the inner edge of the extension Extending such that the width of the extension is gradually widened by connecting one end of the curved portion to one end of the tail segment, and the width of the tail segment is greater than or equal to the maximum width of the extension. The container of claim 1, wherein the frame of each of the brackets further has at least one intermediate bracket connected to the curved portion and located between the two arms toward the center of the chamber. The container of claim 23, wherein when the frame has a plurality of intermediate portions, the intermediate portions are connected to each other near one end of the center of the chamber.