WO2010061431A1

WO2010061431A1 - Wafer storing container

Info

Publication number: WO2010061431A1
Application number: PCT/JP2008/071321
Authority: WO
Inventors: 千明松鳥; 康治飯村; 剛永島
Original assignee: ミライアル株式会社
Priority date: 2008-11-25
Filing date: 2008-11-25
Publication date: 2010-06-03
Also published as: JP5087145B2; JPWO2010061431A1

Abstract

When an opening section (1a) of a storing container main body (1) is covered with a cover body (2), a plurality of semiconductor wafers (W) are elastically held by a receiving side retainer (4) and a pressing side retainer (5) and separated from wafer placing grooves (31), in a state where the wafers are arranged upright parallel to each other in the storing container main body (1). When the opening section (1a) is not covered with the cover body (2), each semiconductor wafer (W) returns to the state where it is placed in each wafer placing groove (31). Thus, at the time of carrying in and out the semiconductor wafers (W) by having the semiconductor wafers (W) arranged and stored upright, the semiconductor wafers (W) are accurately aligned, and the semiconductor wafers (W) are surely protected from shocks and vibration for transportation and storage.

Description

Wafer storage container

The present invention relates to a wafer storage container for storing a plurality of semiconductor wafers formed in a disk shape side by side for transportation, storage and the like.

The mainstream of conventional semiconductor wafers has a diameter of 300 mm. In the conventional wafer storage container for storing such semiconductor wafers, a plurality of semiconductor wafers are horizontally arranged in a state of being overlapped with a gap between each other, and each outer edge portion is held. It is like that.

However, if a semiconductor wafer having a diameter of, for example, 450 mm is leveled and held at its outer edge, the semiconductor wafer will be bent by its own weight, causing troubles in and out of the robot arm. Therefore, it is necessary to make the gap between the semiconductor wafers very large, and the storage efficiency is greatly reduced.

Therefore, in a semiconductor wafer or the like having a diameter of 450 mm, it is excellent in terms of storage efficiency and the like that the semiconductor wafer is closely arranged and stored in an upright state. However, some conventional wafer storage containers store semiconductor wafers in an upright state (for example, Patent Documents 1 and 2).
JP-A-4-303941 JP-A-6-72482

In order to load and remove a plurality of semiconductor wafers stored side by side in the storage container one by one from the storage container with a robot arm or the like, each semiconductor wafer must be accurately positioned in the storage container. There is.

Therefore, a wafer placement groove for placing each semiconductor wafer individually is arranged on the bottom side of the storage container, and a retainer is provided to elastically press the semiconductor wafer against the wafer placement groove. Such a wafer mounting groove should not be elastically displaced or deformed in order to ensure the function of positioning each semiconductor wafer.

However, the storage container storing the semiconductor wafer may be subjected to a large impact or constant vibration during transportation. Then, the impact and vibration are directly transmitted from the wafer mounting groove to the semiconductor wafer. For this reason, the semiconductor wafer is damaged at the contact portion with the wafer mounting groove due to the impact, or the semiconductor wafer is rotated by the vibration and fine particles are cut out at the contact portion with the wafer mounting groove or the retainer. In some cases, it may become detrimental to the wafer.

An object of the present invention is to arrange a plurality of semiconductor wafers formed in a disk shape in an upright state, and to accurately position the semiconductor wafer when the semiconductor wafer is taken in and out, and to carry and store the semiconductor wafer. It is an object of the present invention to provide a wafer container that can reliably protect a semiconductor wafer from impact and vibration.

In order to achieve the above object, a wafer storage container of the present invention is a wafer storage container for storing a plurality of semiconductor wafers formed in a disk shape in an upright state, and an opening is provided only on one side surface. A formed box-shaped storage container body, a lid that is detachably attached to the storage container body from the side so as to close the opening of the storage container body, and each semiconductor wafer with respect to the opening. Each semiconductor wafer is engaged with a plurality of wafer mounting grooves arranged in parallel on the bottom side in the storage container body for positioning and mounting in an upright state so as to be in a substantially vertical orientation A plurality of wafer engaging grooves formed side by side in parallel, and a plurality of receiving wafer retainers that are elastically deformable at positions opposite to the openings in the storage container body, and a plurality of semiconductor wafers that are engaged with each other. Wafer engaging grooves A push-side retainer that is elastically deformable and formed on the inner surface side of the lid body, and the lid body is a storage container body in the region on the lower end side of at least one of the receiving-side retainer and the push-side retainer. When the semiconductor wafer is picked up and detached from each wafer mounting groove when being attached to the opening of the wafer, it is a wafer pick-up part, and the opening of the storage container body is closed with a lid, so that a plurality of semiconductors The wafer is elastically held by the receiving side retainer and the push side retainer while standing in parallel in the storage container body, and is separated from the wafer mounting groove, and the opening of the storage container body is closed with a lid. When the wafer is not peeled off, each semiconductor wafer returns to a state where it is placed in each wafer placement groove.

The receiving side retainer and the push side retainer may each be supported by the storage container main body or the lid body by a leaf spring-like support part, and the wafer mounting groove is near the end near the opening of the storage container main body. It may be formed in a shape that gradually displaces upward toward the end side.

According to the present invention, when the lid is attached to the opening of the storage container main body, the plurality of semiconductor wafers are elasticized by the receiving side retainer and the push side retainer in a state where the plurality of semiconductor wafers are erected in parallel in the storage container main body. Since it is held and removed from the wafer mounting groove, the semiconductor wafer can be reliably protected from impact and vibration during transportation and storage, and each semiconductor is removed when the lid is removed from the opening of the storage container body. Since the wafer returns to the state where it is placed in the wafer placement groove, the semiconductor wafer can be accurately positioned when the semiconductor wafer is taken in and out.

1 is a perspective view schematically showing an overall configuration of a wafer storage container according to an embodiment of the present invention. It is side surface sectional drawing of the state in which the semiconductor wafer was accommodated in the wafer storage container which concerns on the Example of this invention. It is a fragmentary perspective view of the wafer mounting base which concerns on the Example of this invention. It is a perspective view of the push side retainer which concerns on the Example of this invention. It is a perspective view which expands and shows a part of push side retainer concerning the Example of this invention. It is a perspective view of the receiving side retainer which concerns on the Example of this invention. In the wafer storage container which concerns on the Example of this invention, it is side sectional drawing of the state from which the cover body was removed. In the wafer storage container which concerns on the Example of this invention, it is side surface sectional drawing of the state in the middle of the cover body being attached.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Storage container main body 1a Opening part 2 Cover body 3 Wafer mounting base 4 Receiving side retainer 5 Pushing side retainer 31 Wafer mounting groove 41 Wafer engaging groove 44 Plate spring-like support part 45 Wafer scooping part 51 Wafer engaging groove 54 Plate spring Shaped support part 55 Wafer scooping part W Semiconductor wafer

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 schematically shows a wafer storage container for storing a plurality of (for example, about 5 to 30) semiconductor wafers W formed in a thin disk shape. The storage container main body 1 that stores the semiconductor wafers W in a standing state is formed in a box shape in which an opening 1a is formed only on one side surface. A lid 2 for closing the opening 1a is detachably attached to the storage container body 1 from the side.

Both the container main body 1 and the lid body 2 are formed of a synthetic resin or a metal that emits a small amount of gas harmful to the semiconductor wafer W. In the engaging portion between the lid 2 and the opening 1a of the storage container body 1, a known sealing member for hermetically sealing the engaging portion or the lid 2 is prevented from being removed from the opening 1a. For this purpose, a known locking mechanism or the like is provided, but the illustration thereof is omitted.

A plurality of wafer placement grooves 31 for placing the semiconductor wafer W in an upright state are formed side by side in parallel at predetermined intervals on the wafer placement table 3 provided at the bottom of the storage container body 1. Has been.

The wafer mounting groove 31 is formed in a direction perpendicular to the opening 1a of the storage container body 1 when viewed from above. Accordingly, each semiconductor wafer W is placed in the wafer placement groove 31 so that the board surface is positioned at a predetermined interval in a direction substantially perpendicular to the opening 1 a of the storage container body 1.

A receiving side retainer 4 in which a plurality of wafer engaging grooves 41 with which each semiconductor wafer W engages is formed in parallel is disposed at a position on the opposite side of the opening 1a in the storage container body 1. Further, on the inner surface side of the lid body 2, a push side retainer 5 in which a plurality of wafer engaging grooves 51 with which the respective semiconductor wafers W are engaged is formed in parallel is disposed.

FIG. 2 shows a state in which the semiconductor wafer W is stored in the wafer storage container. Each semiconductor wafer W is held in the

wafer engaging grooves

41 and 51 provided in each of the receiving side retainer 4 and the pushing side retainer 5 and is in a state of being lifted from the wafer mounting groove 31 of the wafer mounting table 3. ing.

Each wafer mounting groove 31 has a substantially V-shaped cross section as shown in FIG. 3 which is a perspective view of a single wafer mounting table 3. This is the same as the V-shaped groove provided for placing the semiconductor wafer W in a known wafer storage container. In FIG. 3, in order to clearly show the wafer placement groove 31, the groove width and pitch interval of the wafer placement groove 31 are shown wider than actual.

For example, 5 to 30 wafer placement grooves 31 are arranged at equal intervals in the direction orthogonal to the opening 1a of the storage container body 1 when viewed from above, and both ends of each wafer placement groove 31 are arranged. In the vicinity of the portion, an ear portion 32 is formed so as to protrude upward to assist in holding the semiconductor wafer W in a stable state.

Each wafer mounting groove 31 is formed in an arc shape having the same radius of curvature as the outer periphery of the semiconductor wafer W. However, as long as the semiconductor wafer W can be stably placed, the radius of curvature is not necessarily the same as that of the outer periphery of the semiconductor wafer W, and may not be an arc shape.

Although the wafer mounting table 3 is formed integrally with the storage container main body 1 in this embodiment, the wafer mounting table 3 formed as a separate part from the storage container main body 1 is attached to the bottom surface in the storage container main body 1. May be.

FIG. 4 is a perspective view of a single unit of the push side retainer 5, and FIG. 5 is a partially enlarged view thereof. On the push side retainer 5 formed of a synthetic resin material having elasticity, the same number of wafer engaging grooves 51 as the wafer mounting grooves 31 are formed so as to correspond to the positions of the wafer mounting grooves 31. Each wafer engaging groove 51 is formed in a substantially V-shaped cross-sectional shape, similar to the wafer mounting groove 31, and an ear 52 is formed in a protruding manner at a plurality of locations.

The wafer engaging groove 51 is formed in an arc shape having the same radius of curvature as the outer periphery of the semiconductor wafer W. As shown in FIG. 2, the center position Oa of the arc of the wafer engaging groove 51 is the wafer mounting groove 31. Is slightly above the center position Ob of the arc and slightly away from the opening 1a.

As shown in FIG. 5, a dividing groove 53 having an appropriate depth has an appropriate length between each wafer engaging groove 51 arranged side by side and the adjacent wafer engaging groove 51. Is formed. As a result, each wafer engaging groove 51 portion has a certain degree of elasticity.

The push-side retainer 5 in which the plurality of wafer engaging grooves 51 are formed in an arcuate shape is provided with a leaf spring-like support portion provided in a shape bent from both upper and lower end portions toward the lid body 2 side. 54 is supported by the lid 2. The end of the leaf spring support 54 is fixed to the lid 2. Note that the push side retainer 5 may be formed integrally with the lid 2.

The leaf spring support 54 formed in a thin plate functions as a leaf spring. Therefore, the push side retainer 5 can be elastically deformed as a whole, and the semiconductor wafer W held therein is isolated from the impact and vibration applied to the lid 2 (or the impact and vibration are greatly attenuated). Held state).

FIG. 6 is a perspective view of a single retainer 4 on the receiving side. On the receiving side retainer 4 formed of the same synthetic resin material as that of the pushing side retainer 5, the same number of arc-shaped wafer engaging grooves 41 as the wafer engaging grooves 51 are formed so as to correspond to the positions of the wafer engaging grooves 51. Has been. The structure of each part of the receiving side retainer 4 is basically the same as the structure of the pushing

side retainer

5, 42 is an ear part, 43 is a separation groove, and 44 is a leaf spring-like support part. The center position of the arc of the wafer engaging groove 41 formed in the receiving side retainer 4 coincides with the center position Oa of the arc of the wafer engaging groove 51.

The end of the leaf spring support 44 of the receiving retainer 4 is fixed to the inner wall surface of the storage container body 1. However, the receiving side retainer 4 may be formed integrally with the storage container body 1. Further, since the plate spring-like support portion 54 formed in a thin plate functions as a plate spring, the receiving side retainer 4 can be elastically deformed as a whole, and the semiconductor wafer W held there can be stored in the storage container. It can be held in a state isolated from the impact and vibration applied to the main body 1.

FIG. 7 shows a state in which the lid 2 is removed from the opening 1a of the storage container body 1 and the opening 1a is opened in order to put the semiconductor wafer W into and out of the storage container body 1. Yes. The push side retainer 5 attached to the lid body 2 moves together with the lid body 2 and disappears from the inside of the storage container body 1.

As a result, each semiconductor wafer W is placed on the wafer placement groove 31 in a standing state, and a plurality of semiconductor wafers W can be efficiently stored in the storage container body 1 at a small pitch. Can do. The engagement between the semiconductor wafer W and the receiving retainer 4 is also almost disengaged (particularly on the upper half side).

The wafer mounting table 3 has poor springiness and hardly deforms. Therefore, each semiconductor wafer W placed in the wafer placement groove 31 having a substantially V-shaped cross-section is accurately positioned at a predetermined position, and the semiconductor wafers W are surely placed one by one with a robot arm or the like. And can be taken in and out of the storage container body 1.

The wafer mounting groove 31 is formed in a shape that gradually displaces upward toward the end near the end near the opening 1a (that is, the left end in FIG. 7). That is, the left end side is gradually higher. Accordingly, the semiconductor wafer W does not roll out toward the opening 1a due to slight vibration or tilt.

FIG. 8 shows a state where the lid 2 is being attached to the opening 1 a of the storage container body 1. A region on the lower end side of each of the push side retainer 5 and the receiving side retainer 4 is formed by scooping up the semiconductor wafer W from the side when the lid 2 is attached to the opening 1 a of the storage container body 1, and the wafer placement groove 31. Functions as

wafer scooping portions

55 and 45 to be detached from the wafer. However, the

wafer scooping portions

55 and 45 may be provided on at least one of the push side retainer 5 and the receiving side retainer 4.

As a result, when the lid 2 is attached to the opening 1 a of the storage container body 1, the plurality of semiconductor wafers W engage with the

wafer engaging grooves

51 and 41 of the push side retainer 5 and the receiving side retainer 4, and store. The wafer main body 1 is separated from the wafer mounting groove 31 in a state where it stands up in parallel. Since the resistance force acting on the operation of attaching the lid 2 to the opening 1a of the storage container main body 1 is only for such an operation, the opening 1a of the storage container main body 1 can be operated with a very light operating force. Can be closed with the lid 2.

As shown in FIG. 2, when the opening 1 a of the storage container body 1 is completely closed by the lid body 2, the

wafer engaging grooves

51, 41 of the push side retainer 5 and the receiving side retainer 4. Are engaged with the outer periphery of the semiconductor wafer W in contact with the opening 1a side and the opposite side in almost the entire region, so that the semiconductor wafer W is elastic by the push side retainer 5 and the receiving side retainer 4. It will be held in the state. The semiconductor wafer W rises from the wafer placement groove 31 and is in a state where it does not come in contact with any part of the lid 2 and the inner wall surface of the storage container body 1.

The wafer engaging groove 51 portion and the wafer engaging groove 41 portion pressed from opposite directions to the semiconductor wafer W are in a state of being slightly elastically deformed, and the push side retainer 5 and the receiving side retainer 4 are respectively provided with respective leaf springs. Since the

support members

54 and 44 can be elastically deformed, the semiconductor wafer W is held elastically.

Therefore, even if an impact or vibration is applied to the wafer storage container in which the semiconductor wafer W is stored, they are absorbed by the push side retainer 5 and the receiving side retainer 4 and a strong impact or vibration is not applied to the semiconductor wafer W. The semiconductor wafer W can be reliably protected during transportation and storage.

When the lid 2 is removed and the opening 1 a of the storage container body 1 is not closed by the lid 2, each semiconductor wafer W is stably placed in the wafer placement groove 31. Return to the state shown in FIG.

In addition, this invention is not limited to a structure in the said Example, For example, if the push side retainer 5 and the receiving side retainer 4 have the function which can absorb the impact and vibration from the cover body 2 or the container main body 1, However, it does not necessarily have to be elastically deformable as a whole, as long as at least a part thereof can be elastically deformed.

Further, the shape, arrangement position, and the like of the wafer mounting table 3, the receiving side retainer 4, the pushing side retainer 5 and the like can take an appropriate mode. For example, the shape of the

wafer engaging grooves

51 and 41 is not necessarily an arc shape, but may be any shape that can hold the semiconductor wafer W without rattling. Further, the receiving side retainer 4 and the pushing side retainer 5 may be formed in a shape or the like extending upward along the semiconductor wafer W, such as the wafer mounting table 3, the receiving side retainer 4, the pushing side retainer 5 or the like. Each of them may be divided into a plurality of parts.

In addition, in order to stabilize the posture of each semiconductor wafer W placed on the wafer placement groove 31 when the lid 2 is removed from the opening 1a of the storage container body 1, An auxiliary member that elastically supports each semiconductor wafer W by abutting the outer periphery of each semiconductor wafer W with a small biasing force may be attached to the wafer mounting table 3 and / or the ceiling portion in the storage container body 1. .

Claims

A wafer storage container for storing a plurality of semiconductor wafers formed in a disk shape in a standing state,
A box-shaped storage container body in which an opening is formed only on one side surface;
A lid that is detachably attached to the storage container body from the side so as to close the opening of the storage container body;
The semiconductor wafers are arranged side by side in parallel on the bottom side in the storage container main body in order to position and place the semiconductor wafers in such a state that the surface of the semiconductor wafer stands uprightly with respect to the opening. A plurality of wafer mounting grooves;
A receiving retainer that is formed in parallel with a plurality of wafer engaging grooves with which each of the semiconductor wafers engages and is elastically deformable at a position opposite to the opening in the storage container body; ,
A plurality of wafer engaging grooves with which each of the semiconductor wafers is engaged are formed in parallel, and a push-side retainer provided on the inner surface side of the lid so as to be elastically deformable,
The region on the lower end side of at least one of the receiving side retainer and the pushing side retainer is configured to scoop up each semiconductor wafer when the lid body is attached to the opening of the storage container body, and from the wafer mounting groove. It is the wafer scooping part to be detached,
In a state where the opening of the storage container main body is closed with the lid, the receiving retainer and the push side retainer are in a state where the plurality of semiconductor wafers are erected in parallel in the storage container main body. And elastically held away from the wafer placement groove,
The wafer storage container, wherein when the opening of the storage container main body is not closed by the lid, the semiconductor wafers return to the state of being placed in the wafer placement grooves.
The wafer storage container according to claim 1, wherein the receiving side retainer and the push side retainer are each supported by the storage container body or the lid body by a leaf spring-like support portion.
2. The wafer storage container according to claim 1, wherein the wafer placement groove is formed in a shape that gradually displaces upward toward the end side in the vicinity of the end near the opening of the storage container body. .