TWI583522B - Disassembly method of laminated ceramic substrate - Google Patents

Description

Method for dividing laminated ceramic substrate

The present invention relates to a method for separating a laminated ceramic substrate obtained by laminating ceramic substrates of different materials.

When the laminated ceramic substrate in which a metal layer is laminated on a ceramic substrate is previously broken, it is often cut by a wafer cutter or the like. Further, Patent Document 1 proposes a method of manufacturing a ceramic bonded substrate in which a metal substrate is scribed after a scribe line, and a metal layer of a scribe line is removed by etching and then ruptured.

[Previous Technical Literature]

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-252971

In the above Patent Document 1, it is necessary to scribe the ceramic substrate before laminating the metal layer, and there is a problem that the laminated ceramic substrate is not separated.

The development of laminated ceramic substrates in which different types of ceramic substrates are laminated has been continuously developed, but the method of breaking is not established. As a method of dividing the laminated ceramic substrate, in consideration of the breaking by a wafer cutting machine, which is a breaking method of a generally brittle material substrate, the laminated ceramic substrate is scribed by a scribing wheel to perform fracture.

For example, in the multilayer ceramic substrate having a two-layer structure in which the dissimilar materials are separated, as shown in FIG. 1(a), the laminated substrate 100 in which the other ceramic substrate 102 is laminated on the ceramic substrate 101 is patterned. In the case where the wire is broken, first, as shown in FIG. 1(b), the surface of the ceramic substrate 101 is scribed by the scribing wheel 103, and as shown in FIG. 1(c), the laminated substrate 100 is laminated. It is held by the support members 105 and 106, and is pressed by the fracture bar 104 from the side of the ceramic substrate 102 to be broken. In this case, even if the ceramic substrate 101 can be separated, the ceramic substrate 102 cannot be separated. As shown in FIG. 1(d), even if the fracture is performed, the ceramic substrate 102 cannot be completely separated.

Further, in order to separate the multilayer ceramic substrate having a three-layer structure of the dissimilar material, as shown in FIG. 2(a), the laminated substrate 100 in which the ceramic substrates 101, 102, and 103 having the different materials are sequentially laminated is scribed When the fracture is performed, first, as shown in FIG. 2(b), the scribing wheel 104 is scribed on the surface of the ceramic substrate 101, and as shown in FIG. 2(c), the laminated substrate 100 is held by the supporting member. At 106 and 107, the fracture is performed by pressing the fracture rod 105 from the side of the ceramic substrate 103. In this case, even if the laminated substrate 100 is separated, vertical cracks do not occur on the ceramic substrate 102 or the ceramic substrate 103. Therefore, there is a problem that it is difficult to break, cannot be separated, or is not separated as shown by the scribe line as shown in Fig. 2(d).

Further, as another method, as shown in FIGS. 3(a) and 3(b), the scribing wheel 103 is scribed on the surface of the other ceramic substrate 102 in the multilayer ceramic substrate 100. Then, as shown in FIG. 3(c), the laminated ceramic substrate 100 is cut using the rupture rod 104. In this case, even if the ceramic substrate 102 can be separated, the ceramic substrate 101 cannot be separated. Therefore, as shown in FIG. 3(d), even if the fracture is performed, the ceramic substrate 101 cannot be completely separated.

Further, as another method, as shown in FIGS. 4(a) and 4(b), the ceramic substrate 103 on the other surface of the laminated ceramic substrate 100 is scribed by the scribing wheel 104. Then, as shown in FIG. 4(c), the laminated substrate 100 is cut using the breaking bar 105. In this case, even if the laminated substrate 100 is separated, vertical cracks do not occur on the ceramic substrate 101 or the ceramic substrate 102. Therefore, there is a problem that it is difficult to break, cannot be separated, or cannot be separated as indicated by a scribe line as shown in Fig. 4(d).

The present invention has been made in view of such problems, and its object is to be able to laminate A multilayer ceramic substrate having a two-layer structure in which a ceramic substrate of a different material is completely separated and individualized, and the purpose is to completely separate the laminated ceramic substrate obtained by laminating a ceramic substrate having three or more different materials. Individualized.

In order to solve the problem, the method for dividing a laminated ceramic substrate according to the present invention includes, as a first aspect, a method for dividing a laminated ceramic substrate, which is to divide a first ceramic substrate and a second ceramic substrate which are different in material type from each other. In the method of forming a laminated ceramic substrate, a first scribe line is formed along the predetermined dividing line on the first ceramic substrate, and a line corresponding to the first scribe line is formed on the second ceramic substrate Forming a second scribe line, breaking the at least one ceramic substrate along the first and second scribe lines, thereby breaking the ceramic substrate along the scribe line; and, as a second aspect, including a laminated ceramic substrate a method for dividing a laminated ceramic substrate having at least the first, second, and third ceramic substrates, and at least the second ceramic substrate and the material of the first and third ceramic substrates, and a first scribe line is formed on the first ceramic substrate along a predetermined line to be cut, and a second scribe line is formed along a line corresponding to the first scribe line on the ceramic substrate on the back surface of the laminated ceramic substrate. , along the first and second strokes above , So that the at least one ceramic substrate breaks, thereby breaking the ceramic substrate along the scribe line.

Here, in the laminated ceramic substrate of the second aspect, the first to third ceramic substrates are sequentially laminated, and the second ceramic substrate in the middle may be a thinner substrate than the first and third ceramic substrates. .

Here, in the laminated ceramic substrate of the second aspect, the first to third ceramic substrates are sequentially laminated, and the second ceramic substrate in the middle may have a lower hardness than the first and third ceramic substrates. Substrate.

According to the invention having such a feature, the laminated ceramic substrate obtained by laminating a ceramic substrate having a different material from both sides is scribed, and is fractured from at least one surface.

Therefore, the effect of being able to be completely divided into desired shapes and individualized can be improved, and the end face precision can be improved.

<Figure 5, Figure 6>

10‧‧‧Multilayer ceramic substrate

11, 12‧‧‧ ceramic substrate

13, 14‧‧‧ scribe wheel

15, 16‧‧‧ Supporting components

17, 19 ‧ ‧ belt

18‧‧‧breaking rod

<Figure 7, Figure 8>

10‧‧‧Multilayer ceramic substrate

11,12,13‧‧‧ceramic substrates

14, 15‧‧‧ scribe wheel

16, 17‧‧‧ Supporting components

18, 20‧‧

19‧‧‧Fracture rod

Fig. 1 is a view showing a breaking process in the case where a ceramic substrate side of a multilayer ceramic substrate having a two-layer structure is scribed and broken.

FIG. 2 is a view showing a breaking process in the case where the ceramic substrate side of one of the multilayer ceramic substrates having a three-layer structure is scribed and broken.

Fig. 3 is a view showing a state in which the other ceramic substrate side of the multilayer ceramic substrate having a two-layer structure is scribed and broken.

FIG. 4 is a view showing a state in which the other ceramic substrate side of the multilayer ceramic substrate having a three-layer structure is scribed and broken.

Fig. 5 is a view showing a breaking process of the laminated ceramic substrate according to the embodiment of the present invention.

Fig. 6 is a view showing a breaking process of the laminated ceramic substrate according to the embodiment of the present invention.

Fig. 7 is a view showing a breaking process of the multilayer ceramic substrate of the second embodiment.

Fig. 8 is a view showing a breaking process of the multilayer ceramic substrate of the second embodiment.

<First Embodiment: Breaking Process of Ceramic Substrate of Two-Layer Structure>

(a) of FIG. 5 is a view showing a laminated ceramic substrate (hereinafter simply referred to as a laminated substrate) 10 which is a separation target according to an embodiment of the present invention in which the first and second ceramic substrates 11 and 12 having different types are laminated. . Here, the ceramic substrates 11 and 12 may be a ceramic substrate such as an LTCC substrate, aluminum oxide (HTCC), aluminum nitride, barium titanate, ferrite or tantalum nitride, or a so-called fine ceramic ceramic substrate. The thickness of the ceramic substrates 11 and 12 is, for example, 0.2 to 0.4 mm. The material of the first ceramic substrate 11 may be different from the ceramic substrate 12. The thickness of the ceramic substrate 11 may be the same as or different from the thickness of the ceramic substrate 12. Here, the first ceramic substrate 11 is made of ferrite, and the second ceramic substrate 12 is made of LTCC substrate.

Further, when the laminated substrate 10 is divided by a specific pattern, first, as shown in FIG. 5(b), a line which is not shown is drawn from the first ceramic substrate 11 along a predetermined breaking line. The device presses the scribing wheel 13 to rotate it to form a scribe line. The scribe line thus formed is referred to as a first scribe line S1. The scribing wheel used for the scribing can be a highly immersed scribing line or a regular scribing wheel. Here, a highly immersible scribing wheel is used, and the blade leading edge angle is 155°. For example, Japanese Patent Publication No. 3074143 proposes a scribing wheel in which a plurality of grooves are formed at a predetermined interval on a circumferential surface, and a gap is a protrusion and can be highly saturated. The material of the ferrite is relatively brittle, so it is preferred to use a blade leading edge angle 155. Lighter lines are used.

Further, the laminated substrate 10 is reversed, and as shown in FIG. 5(c), a scribe line is formed on the surface of the second ceramic substrate 12 from the scribe line S1 by a scribing device (not shown). The scribe line thus formed is referred to as a second scribe line S2. In this case, a person who can be highly saturated with a scribing line or a regular scribing wheel can also be used. Here, a scribing wheel 14 that can be highly saturated with a scribing line is used. The blade leading edge angle at this time was set to 110°, and the scribing was performed deeper than the ceramic substrate 11. The type of the scribing wheel and the load at the time of scribing are appropriately selected depending on the material, thickness, hardness, and the like of the ceramic substrates 11 and 12.

Then, as shown in FIG. 5(d), the tape 17 is placed on the upper surface of the pair of support members 15 and 16 by using a breaking device, and the laminated substrate 10 is placed such that the scribe lines S1 and S2 are located between the support members 15 and 16. Further, the rupture rod 18 is pressed from the upper portion along the second scribe line S2 to be broken.

Further, as shown in FIG. 6(e), the laminated substrate 10 is reversed, and the tape 19 is placed on the support members 15 and 16, and the laminated substrate 10 is placed such that the scribe lines S1 and S2 are located between the support members 15 and 16. Further, from the upper portion, the rupture rod 18 is pressed along the first scribe line S1 to be broken. In this manner, as shown in FIG. 6(f), the laminated substrate 10 can be completely separated and individualized along the scribe lines S1 and S2, and the end surface accuracy can be improved. The individual laminated substrate wafers can be formed by dividing the laminated ceramic substrate in a lattice shape.

Further, in the above embodiment, as shown in FIGS. 5(b) and 5(c), the ceramic substrate 11 is scribed, and then the ceramic substrate 12 is scribed, and the scribe lines may be reversed in the order.

Further, in the above example, as shown in FIGS. 5(d) and 6(e), the ceramic substrates from both sides are broken by the breaking device, but may be performed by the type or thickness of the ceramic substrate. The break of the person is broken. For example, when the scribe line is sufficiently deeped on the ceramic substrate 12 along the scribe line S2, or when the ceramic substrate 11 is sufficiently thin, it can be separated and individualized by breaking from one of the faces.

Here, when the ceramic substrates of the first and second ceramic substrates are scribed, different scribing wheels are used, but the same can be used. The type of the scribing wheel is appropriately selected according to the material, thickness, hardness, and the like of the ceramic substrates 11 and 12. The angle of the leading edge of the scribing wheel or the scribing load or the like is also appropriately selected depending on the ceramic substrate. Generally speaking, it can be a light scribe line in ferrite. Regarding LTCC, the properties are greatly different depending on the sintering temperature or additives, so the scribing wheel and the scribe line suitable for the blade leading edge angle and type of the substrate are used. Load.

Further, in this embodiment, in the steps of (b) and (c) of FIG. 5, the scribing wheel is moved by the scribing device to perform the scribing, and the scribing may be performed by the laser scribing device. It can be heated by laser using the laser scribing, and then immediately cooled and soaked with the scribing laser scribing device, or the substrate can be melted to increase the output of the laser itself. Further, it is possible to use a laser scribing device in which the laser beam is intermittently irradiated so that the irradiation position is different. Further, in the step of Fig. 6(e), the breaking device is used for the fracture, but it may be replaced by the operator directly when the shape of the divided piece is relatively large. In this case, the belt 19 becomes redundant.

<Second embodiment: breaking treatment of a ceramic substrate having a three-layer structure>

(a) of FIG. 7 is a laminated ceramic substrate which is a target to be separated in the embodiment of the present invention in which the first to third ceramic substrates 11 , 12 , and 13 having different types are sequentially stacked (hereinafter simply referred to as a laminated substrate) ) Figure 10 Here, the ceramic substrates 11, 12, and 13 may be a ceramic substrate such as an LTCC substrate, aluminum oxide (HTCC), aluminum nitride, barium titanate, ferrite, or tantalum nitride, or a so-called fine ceramic ceramic substrate. The thickness of the ceramic substrates 11, 12, and 13 is, for example, 0.2 to 0.4 mm.

Further, the material of the second ceramic substrate 12 may be different from that of the first and third ceramic substrates 11 and 13, and the materials of the ceramic substrates 11 and 13 may be the same or different. The thickness of each ceramic substrate may be the same or different from each other. Here, since the second ceramic substrate 12 in the middle can be broken by breaking, it is preferable that the ceramic substrates 11 and 13 on both sides are relatively thinner, for example, a substrate having a thickness of 0.3 mm or less. Further, at the same time or in place of this, the hardness of the second ceramic substrate is preferably lower than the hardness of the first and third ceramic substrates, and for example, the Vickers hardness HV may be 800 or less. Here, the first ceramic substrate 11 is an LTCC substrate, the second ceramic substrate 12 is a ferrite, and the third ceramic substrate is an LTCC substrate.

Further, when the laminated substrate 10 is divided by a specific pattern, first, as shown in FIG. 7(b), a scribe line device (not shown) is formed along the predetermined breaking line from the ceramic substrate 11 side. The scribing wheel 14 is pressed to move it to form a scribe line. The scribe line thus formed is referred to as a first scribe line S1. The scribing wheel used for the scribing can be a highly immersed scribing line or a regular scribing wheel. Here, a highly immersed scribing wheel is used with a blade leading edge angle of 110°. For example, Japanese Patent Publication No. 3074143 proposes a scribing wheel which is formed by forming a plurality of grooves at a predetermined interval on a circumferential surface and having a gap as a projection to be highly saturated.

Further, the laminated substrate 10 is reversed, and as shown in FIG. 7(c), the scribe line is formed on the surface of the third ceramic substrate 13 from the scribe line S1 by a scribing device (not shown). The scribe line thus formed is referred to as a second scribe line S2. In this case, a person who can be highly saturated with a scribing line or a regular scribing wheel can also be used. Here, a scribing wheel 15 that can be highly saturated with a scribing line is used. The blade leading edge angle at this time is set to 110°. The type of the scribing wheel is appropriately selected depending on the material, thickness, hardness, and the like of the ceramic substrates 11 and 13.

Then, as shown in FIG. 7(d), the tape 18 is placed on the upper surface of the pair of support members 16, 17 using the breaking device, and the laminated substrate 10 is disposed between the support members 16 and 17 at positions along the scribe lines S1 and S2. . Further, the rupture rod 19 is pressed from the upper portion along the second scribe line S2 to be broken. Thereby, the ceramic substrate 11 can be broken. At this time, the ceramic substrate 12 may also be broken.

Further, as shown in FIG. 8(e), the laminated substrate 10 is reversed, and the tape 20 is placed on the support members 16 and 17, and the laminated substrate is placed between the support members 16 and 17 so as to be along the scribe lines S1 and S2. 10. Further, from the upper portion, the rupture rod 19 is pressed down along the first scribe line S1 to be broken. As a result, as shown in FIG. 8(f), the ceramic substrate 13 is broken, and the intermediate ceramic substrate 12 can be penetrated and divided along the scribe lines S1 and S2 to be individualized. By dividing in this way, the end face accuracy can be improved. An individual laminated substrate wafer can be formed by dividing the laminated ceramic substrate in a lattice shape.

Further, in the above embodiment, as shown in FIGS. 7(b) and 7(c), the ceramic substrate 11 is scribed, and then the ceramic substrate 13 is scribed, and the scribe lines may be reversed in the order.

Further, in the above example, as shown in FIGS. 7(d) and 8(e), the ceramic substrates from both sides are broken by the breaking device, but may be saturated according to the type or thickness of the ceramic substrate or the scribe line. Degree, by breaking one of the breaks. For example, when the scribe line is sufficiently deeply etched along the scribe line S2 on the ceramic substrate 13, or when the ceramic substrates 11 to 13 are sufficiently thin, they can be separated and individually by breaking one of the surface types of either of the ceramic substrates. Chemical.

Here, the same scribing wheel is used for the scribing of the first and third ceramic substrates, but it may be different. The type of the scribing wheel is appropriately selected depending on the material, thickness, hardness, and the like of the ceramic substrates 11 to 13. The angle of the leading edge of the scribing wheel or the scribing load or the like is also appropriately selected depending on the ceramic substrate. In general, the ferrite may be a light scribe line, and regarding the LTCC, the properties are greatly different depending on the sintering temperature, the additive, and the like, and a scribing wheel and a scribing load suitable for the blade leading edge angle and type of the substrate are used.

Further, in this embodiment, in the steps of (b) and (c) of FIG. 7, the scribing wheel is moved by the scribing device to perform the scribing, and the scribing may be performed by the laser scribing device. It can be heated by laser using the laser scribing, and then immediately cooled and soaked with the scribing laser scribing device, or the substrate can be melted to increase the output of the laser itself. Further, it is possible to use a laser scribing device in which the laser beam is intermittently irradiated so that the irradiation position is different and the scribing is performed. Again, in Figure 8(e) In the step, the fracture device is used for the fracture, but it may be replaced by the operator directly by the operator when the shape of the segmented piece is relatively large. In this case, the belt 20 becomes redundant.

Furthermore, in this embodiment, the first and third ceramic substrates are made of the same type of material, and the material of the second ceramic substrate is different, and the material of the ceramic substrate of any of the first to third may be Different from each other.

In the embodiment, the laminated ceramic substrate in which the first to third ceramic substrates are laminated is described. However, the present invention can be applied to a laminated ceramic substrate in which a plurality of different ceramic substrates are laminated. In this case, the second scribe line S2 is formed at the same position as the scribe line S1 with respect to the ceramic substrate of the laminated ceramic substrate opposite to the first ceramic substrate.

[Industrial availability]

According to the present invention, it is possible to easily separate a laminated ceramic substrate of a dissimilar material using a scribing device and a breaking device, and it is effective for producing a micro buildup substrate.

10‧‧‧Multilayer ceramic substrate

11, 12‧‧‧ ceramic substrate

13, 14‧‧‧ scribe wheel

15, 16‧‧‧ Supporting components

17‧‧‧With

18‧‧‧breaking rod

S1‧‧‧1st line

S2‧‧‧2nd line

Claims (4)

A method for dividing a laminated ceramic substrate by dividing a first and second ceramic substrates having different types of materials from each other, wherein the first ceramic substrate does not face the second a main surface on a side of the ceramic substrate is formed along a predetermined line to form a first scribe line, and the first surface of the second ceramic substrate not facing the first ceramic substrate is along the first surface A line corresponding to the scribe line is formed, and a second scribe line is formed, and the surface of the laminated ceramic substrate is broken along the first and second scribe lines, thereby breaking the ceramic substrate along the scribe line. A method for dividing a laminated ceramic substrate, wherein at least the first, second, and third ceramic substrates are laminated, and at least the second ceramic substrate and the first and third ceramic substrates are different in material type In the method of forming a substrate, a first scribe line is formed along the predetermined dividing line on the first ceramic substrate, and a ceramic substrate on the back surface of the laminated ceramic substrate is formed along a line corresponding to the first scribe line. The second scribe line is formed by breaking the at least one ceramic substrate along the first and second scribe lines, thereby separating the ceramic substrate along the scribe line. The method for dividing a laminated ceramic substrate according to the second aspect of the invention, wherein the laminated ceramic substrate is formed by sequentially laminating the first to third ceramic substrates, and the second ceramic substrate in the middle is the first one A thinner substrate of the third ceramic substrate. The method for dividing a laminated ceramic substrate according to the second aspect of the invention, wherein the laminated ceramic substrate is formed by sequentially laminating the first to third ceramic substrates, and wherein the second ceramic substrate is stiffer than the first 1. The lower substrate of the third ceramic substrate.