TWI580509B - Spherical forming device - Google Patents

Description

Sphere forming device

The present invention relates to a manufacturing apparatus, and more particularly to a ball forming apparatus.

With the advancement of technology, the integrated circuit is moving toward high density, high speed and small volume. With the increase of wafer integration, the requirements for packaging technology are more stringent, and the Ball Grid Array technology is like this. A surface mount package technology applied to integrated circuits uses a small metal sphere, usually a solder ball, to hold various wafers on a circuit board.

Because the quality of the solder balls produced, such as shape and size, will affect the yield of the wafer in the IC process, for the technician, placing more solder balls on a fixed area is the main task of the solder ball manufacturing technology. In other words, the roundness and size of the solder ball are the index parameters of the solder ball manufacturing yield. In addition, the speed of the solder ball output must be taken into account in the manufacturing process to achieve cost-effectiveness.

Therefore, how to maintain the high manufacturing yield of the solder ball while manufacturing the solder ball in large quantities is an urgent problem to be solved in the industry. In addition, the same problem is faced with the manufacture of non-metallic spheres.

In order to solve the problems of the prior art, the present invention provides a ball forming device, comprising: a melting furnace having a receiving space and a heating module, wherein the heating module is configured to heat the substance placed in the receiving space to the substance a melting point, the furnace has an opening for discharging the molten material; the vibration module has a stopping portion, and the vibration module is configured to generate a first vibration frequency, and the stopping portion reciprocates according to the first vibration frequency The detection module is configured to detect the liquid level of the substance and emit a detection signal corresponding to the liquid level; the management module is configured to receive the detection signal, and Sending a corresponding first control signal to the vibration module according to the detection signal, wherein the vibration module receives the first control signal, and generates a second vibration frequency according to the first control signal, so that the stop portion is based on The second vibration frequency reciprocates to close or open the opening.

In an embodiment of the invention, the first filling unit is further included for filling the furnace with a first gas, and the first gas is used to squeeze the molten material to discharge into the opening.

In an embodiment of the invention, the first gas is an inert gas or nitrogen.

In an embodiment of the invention, the detecting module is a liquid level meter for detecting the liquid level of the substance or a barometer for detecting the first gas pressure.

In one embodiment of the invention, an electrostatic unit is included, having an electrostatic tube in communication with the opening.

In an embodiment of the invention, wherein the electrostatic tube system is made of diamonds.

In an embodiment of the present invention, the cooling module includes a first tube body and a second tube body, the first tube body is connected to the furnace, and has an electrostatic tube body a first buffer space connected to the first tube body and having a second buffer space in communication with the first tube body, wherein the second buffer space has liquid nitrogen.

In an embodiment of the invention, the second filling unit is further connected to the first tube to fill the first buffer space with the second gas.

In an embodiment of the invention, wherein the second gas is an inert gas or nitrogen.

In an embodiment of the present invention, the control module is configured to be multiplexed to issue a corresponding second control signal according to the detection signal, and the control module is configured to use the second control according to the second control The signal controls the pressure of the second gas.

Compared with the prior art, the spherical body forming device of the present invention controls the frequency of the vibration module through the feedback of the molten metal liquid level when the molten metal is pressurized by nitrogen gas to be discharged from the opening of the electrostatic tube body. The discharge amount of the metal is kept consistent, and after the electrostatic repulsion of the molten metal by the electrostatic unit is added to the surface tension of the metal itself and the gravity to generate the metal sphere, the rotation of the metal sphere by the nitrogen in the first buffer space is used. Cooling can increase the manufacturing yield and precision of the metal sphere, and the metal sphere produced has the characteristics of small size and high roundness.

1‧‧‧furnace

10‧‧‧ accommodating space

100‧‧‧Sphere forming device

11‧‧‧Opening

2‧‧‧Vibration Module

21‧‧‧stop

3‧‧‧Detection module

4‧‧‧Management module

5‧‧‧First filling unit

6‧‧‧Electrostatic unit

61‧‧‧Electrostatic pipe body

7‧‧‧Cooling module

71‧‧‧First tube

711‧‧‧First buffer space

72‧‧‧Second body

721‧‧‧Second buffer space

8‧‧‧Second filling unit

9‧‧‧Control Module

Figure 1 is a schematic view of a sphere forming apparatus of the present invention.

The other embodiments of the present invention will be readily understood by those skilled in the art from this disclosure.

It is to be understood that the structure, the proportions, the size, and the like of the present invention are intended to be used in conjunction with the disclosure of the specification, and are not intended to limit the invention. The conditions are limited, so it is not technically meaningful. Any modification of the structure, change of the proportional relationship or adjustment of the size should fall within the present invention without affecting the effects and the achievable objectives of the present invention. The technical content disclosed can be covered. In the meantime, the terms "upper", "inside", "outside", "bottom" and "one" are used in this description for convenience of description and are not intended to limit the invention. The scope, the change or adjustment of its relative relationship, is also considered to be the scope of implementation of the present invention in the absence of substantial changes in the technical content.

Please refer to Fig. 1, which is a schematic view of a spherical forming apparatus of the present invention. As shown in the figure, the present invention provides a ball forming apparatus 100, which mainly includes a melting furnace 1, a vibration module 2, a detecting module 3, and a management module 4. The furnace 1 has an accommodating space 10 and a heating module (not shown). The accommodating space 10 can be used for placing a solid metal or other non-metallic substance. This embodiment is described by taking a solid metal as an example. The heating module is an electric heating system, and the solid metal is heated to a melting point by energization, the solid metal is thus molten, and the furnace 1 has an opening 11, preferably formed in the furnace. The bottom portion of the first metal is discharged from the opening 11 by the metal for forming the molten state, but the vibration module 2 has a stopper portion 21 disposed at the position of the alignment hole 11, and the vibration module 2 generates a first vibration frequency for the stopper portion. 21 is moved up and down to close the opening 11 or open the opening 11, so that the molten metal can be discharged periodically or quantitatively according to the preset demand.

Then, the detecting module 3 detects the liquid level of the molten metal. As the molten metal gradually discharges out of the furnace 1, the detecting module 3 sends a detection signal to the management module 4, and the management module 4 is based on the detection. The test signal sends a first control signal to the vibration module 2, and the vibration module 2 generates the first The vibration frequency keeps the discharge amount of molten metal constant.

In an embodiment of the present invention, the ball forming device 1 further includes a first filling unit 5, the first filling unit 5 stores a first gas, and when the solid metal is heated to a melting point and becomes molten metal, it is in the capacity of the furnace 1. The first gas is injected into the space 10, and the first gas is pressed to discharge the molten metal to the opening 11. The first gas may be a gas which is less likely to generate a chemical reaction such as an inert gas or a nitrogen gas. In the present embodiment, the nitrogen gas is injected and pressurized.

In the embodiment, the detecting module 3 can detect the liquid level of the molten metal in the accommodating space 11 and detect the pressure of the nitrogen injected into the accommodating space 11, so that the detecting mode is detected. Group 3 can be a level gauge that detects the level of the liquid or a barometer that detects the pressure of the nitrogen. In the embodiment where the detecting module 3 is a barometer, when the liquid level of the molten metal is lowered with the discharge, the air pressure in the accommodating space is also changed and the barometer is detected, and then A detection signal corresponding to the air pressure value is generated.

In an embodiment of the present invention, the electrostatic unit 6 is included, and the electrostatic unit 6 has an electrostatic tube 61 that communicates with the opening 11 and passes through the electrostatic tube body 61 when the molten metal passes through the opening 11. By the action of the electrostatic unit 6, the molten metal is electrostatically generated, and the gravity and surface tension of the molten metal itself form a single metal sphere, and in order to withstand the high temperature of the molten metal, the electrostatic tube body is preferably made of diamond. .

In this embodiment, the ball forming device of the present invention may further include a cooling module 7. After the metal ball is formed, it may then fall into the cooling module 7. Preferably, the cooling module 7 includes the first The tube body 71 and the second tube body 72 are connected to the furnace 1 and have a first buffer space 711 communicating with the electrostatic tube body 61. The second tube body 72 is in communication with the first tube body 71 and has a The first tube body 71 is connected to the second buffer space 721, and therefore, the metal spheres are successively passed through A buffer space 711 and a second buffer space 721.

In the embodiment, the ball forming device 1 further includes a second filling unit 8 communicating with the first pipe body 71, and the second filling unit 8 stores a second gas. When the metal ball passes through the first buffer space 711, The second filling unit 8 is configured to fill the first buffer space 711 with the second gas. The second gas may be a gas that is not easy to generate a chemical reaction, such as an inert gas or a nitrogen gas. In the embodiment, nitrogen gas is injected, and the nitrogen gas may cause The metal sphere generates a rotation effect, and the metal sphere generates a spin by the rotation action, thereby improving the roundness.

When the metal sphere passes through the first buffer space 711, it will then fall into the second buffer space 721, and the second buffer space 721 may contain liquid nitrogen for cooling the metal sphere falling to the second tube body 72. The metal spheres form a solid state.

In an embodiment of the present invention, the control module 9 is configured to transmit a corresponding second control signal according to the detection signal generated by the detection module 3, and the control module 9 further The second control signal controls the pressure of the second gas, that is, the nitrogen gas.

In summary, the spherical forming device of the present invention utilizes a solid metal or other non-metallic substance to form a molten state by heating to a melting point, and is detected by detecting the liquid level of the molten state substance or the pressure of the injected nitrogen. Control is given to allow the vibration module to maintain its function to discharge a quantity of molten state material, and then to generate a sphere through the electrostatic unit. In addition, the rotation of the first tube body may be selectively performed by nitrogen or an inert gas to increase the roundness of the sphere, and then the second tube body may be further cooled, by the sphere forming device of the present invention. The resulting spheres have a ball diameter of less than 0.1 mm and can maintain high manufacturing yields while being manufactured in large quantities.

The above embodiments are intended to illustrate the principles and effects of the present invention, rather than It is intended to limit the invention. Any of the above-described embodiments may be modified by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention should be as set forth in the scope of the patent application.

1‧‧‧furnace

10‧‧‧ accommodating space

100‧‧‧Sphere forming device

11‧‧‧Opening

2‧‧‧Vibration Module

21‧‧‧stop

3‧‧‧Detection module

4‧‧‧Management module

5‧‧‧First filling unit

6‧‧‧Electrostatic unit

61‧‧‧Electrostatic pipe body

7‧‧‧Cooling module

71‧‧‧First tube

711‧‧‧First buffer space

72‧‧‧Second body

721‧‧‧Second buffer space

8‧‧‧Second filling unit

9‧‧‧Control Module

Claims (6)

A ball forming device includes: a melting furnace having an accommodating space and a heating module, wherein the heating module is configured to heat the substance placed in the accommodating space to a melting point of the substance, the furnace having the fused melting The opening of the material; the vibration module has a stopping portion, the vibration module is configured to generate a first vibration frequency, and the stopping portion reciprocates according to the first vibration frequency to close or open the opening; a module for detecting a liquid level of the substance and emitting a detection signal corresponding to the liquid level; a management module for receiving the detection signal and issuing a corresponding first control according to the detection signal Signaling to the vibration module, wherein the vibration module receives the first control signal, and generates a second vibration frequency according to the first control signal, so that the stop portion reciprocates according to the second vibration frequency to close or Opening the opening; the electrostatic unit has an electrostatic tube body communicating with the opening; the cooling module includes a first tube body and a second tube body, wherein the first tube body is connected to the furnace and has the static electricity Pipe connection a first buffer space, the second tube body is in communication with the first tube body and has a second buffer space in communication with the first tube body, wherein the second buffer space has liquid nitrogen; and a second filling unit, The first tube is connected to the first tube to fill the first buffer space with a second gas, and the second gas causes the substance to discharge the opening to generate a rotation. The spherical forming device according to claim 1, comprising the first filling unit, The furnace is filled with a first gas, and the first gas is used to extrude the molten material and is discharged through the opening. The sphere forming apparatus of claim 2, wherein the first gas is an inert gas or nitrogen. The spherical forming device of claim 2, wherein the detecting module is a liquid level meter for detecting the liquid level of the substance or a barometer for detecting the pressure of the first gas. The sphere forming apparatus according to claim 1, wherein the electrostatic tube system is made of diamonds. The sphere forming apparatus of claim 1, wherein the second gas is an inert gas or nitrogen.