TW200641191A - Manufacturing device of granular single crystal - Google Patents

Manufacturing device of granular single crystal

Info

Publication number
TW200641191A
TW200641191A TW094132387A TW94132387A TW200641191A TW 200641191 A TW200641191 A TW 200641191A TW 094132387 A TW094132387 A TW 094132387A TW 94132387 A TW94132387 A TW 94132387A TW 200641191 A TW200641191 A TW 200641191A
Authority
TW
Taiwan
Prior art keywords
dropping
melted
granular
crucible
dropping tube
Prior art date
Application number
TW094132387A
Other languages
Chinese (zh)
Inventor
Josuke Nakata
Original Assignee
Kyosemi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyosemi Corp filed Critical Kyosemi Corp
Publication of TW200641191A publication Critical patent/TW200641191A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • C30B29/66—Crystals of complex geometrical shape, e.g. tubes, cylinders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

Manufacturing device of granular single crystal (1) is a device for manufacturing granular single crystals by solidifying granular melted drops made of inorganic material while dropping them with free fall. This device (1) comprises a dropping tube having a sectional area gradually reducing toward downward, a melted drop forming mechanism (10) which comprises a crucible (11) for melting inorganic material at the upper side of the dropping tube and plural nozzles (12a,12b) formed on a bottom wall of the crucible (11), these nozzles (12a,12b) forming melted granular drops from melted materials in the crucible (11), a gas stream forming mechanism (50) forming inert gas stream flowing toward downward in the dropping tube, a solid grain ejecting mechanism (40) for ejecting solid grains to over cooled liquid drops dropping in the dropping tube, a rotary ball mill (80), a heat treatment furnace (84) and a diffusion furnace.
TW094132387A 2005-05-17 2005-09-20 Manufacturing device of granular single crystal TW200641191A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2005/008993 WO2006123403A1 (en) 2005-05-17 2005-05-17 Granular crystal production apparatus

Publications (1)

Publication Number Publication Date
TW200641191A true TW200641191A (en) 2006-12-01

Family

ID=37430987

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094132387A TW200641191A (en) 2005-05-17 2005-09-20 Manufacturing device of granular single crystal

Country Status (2)

Country Link
TW (1) TW200641191A (en)
WO (1) WO2006123403A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI580509B (en) * 2015-11-13 2017-05-01 Spherical forming device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010077010A (en) 2008-09-01 2010-04-08 Hiroshima Univ Device for manufacturing crystal, semiconductor device manufactured by using the same and method for manufacturing semiconductor device using the same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3231244B2 (en) * 1996-07-22 2001-11-19 仗祐 中田 Method for producing spherical material made of inorganic material and apparatus for producing the same
JP3287579B2 (en) * 1997-10-23 2002-06-04 仗祐 中田 Single crystal manufacturing method and single crystal manufacturing apparatus
US6264742B1 (en) * 1998-07-10 2001-07-24 Ball Semiconductor Inc. Single crystal processing by in-situ seed injection
CN1318663C (en) * 2002-05-13 2007-05-30 中田仗祐 Drop tube type granular crystal producing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI580509B (en) * 2015-11-13 2017-05-01 Spherical forming device

Also Published As

Publication number Publication date
WO2006123403A1 (en) 2006-11-23

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