TWI564232B - A holding device, a holding system, a control method and a conveying device - Google Patents

Description

Holding device, holding system, control method and conveying device

The present invention relates to a holding device, a holding system, a control method, and a conveying device.

In recent years, an apparatus for transporting a plate-shaped member such as a semiconductor wafer or a glass substrate without contact has been developed. For example, Patent Document 1 proposes a device that uses a Bernoulli law to convey a plate-shaped member in a non-contact manner. In the apparatus, a fluid is supplied to a cylindrical chamber opened under the apparatus to generate a swirling flow, and the plate-like member is attracted by the negative pressure of the central portion of the swirling flow, and the fluid flows out from the cylindrical chamber. A certain distance is maintained between the device and the plate member, and the plate-like member can be conveyed in a non-contact manner. Patent Document 1 also proposes the use of a liquid as a fluid.

[prior technical literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-51260

An object of the present invention is to provide a device for holding a negative pressure between the objects to be conveyed by discharging a fluid, and both the gas and the liquid can be used as the fluid.

The present invention provides a holding device which is a holding device for holding a negative pressure in a plate-like member by a discharge fluid, and is provided with a columnar body; a flat end surface of the member; a concave portion formed on the end surface; and a gas flow forming means for forming a swirling flow of gas in the concave portion or discharging a gas into the concave portion to form a radiation flow; and liquid The liquid is discharged into the concave portion to form a liquid flow of one or more of a swirling flow or a radial flow of the liquid.

In the above-described holding device, the gas flow forming means may be a gas passage that discharges a gas into the concave portion to form a swirling flow or a radial flow of the gas.

In the above-described holding device, the one or more liquid passages may form a swirling or radial flow of the liquid while the gas flow forming means forms a swirling or radial flow of the gas.

Moreover, the present invention provides a holding system including: a holding device and a fluid switching means, wherein the holding means is a holding means for holding a negative pressure in a plate-like member by discharging a fluid to hold the member. And having: a columnar body; formed on the body surface a flat end surface of the member; a concave portion formed on the end surface; and a fluid flow forming means for forming a swirling flow of the fluid in the concave portion; or discharging the fluid into the concave portion to form a radial flow. The fluid switching means is connected to the holding means to switch the fluid supplied to the holding means between the gas and the liquid.

Further, the present invention provides a control method for controlling a holding system including a holding device, a fluid switching means, and a control means for causing a negative pressure between a plate-like member by discharging a fluid a holding device for holding the member, and comprising: a columnar body; a flat end surface formed on the body facing the member; a concave portion formed on the end surface; and a fluid flow forming means, the means is a swirling flow of the fluid is formed in the concave portion; or a fluid is discharged into the concave portion to form a radial flow, and the fluid switching means is connected to the holding device, and the fluid supplied to the holding device is performed between the gas and the liquid. Switching, the control means is connected to the fluid switching means for controlling the fluid switching means, wherein the control means controls the fluid switching means to supply gas to the holding means; and the control means controls the fluid The switching means supplies the liquid to the holding means.

Moreover, the present invention provides a transport apparatus including: a first holding device and a second holding device that maintains a negative pressure between a plate-shaped member by discharging gas; The first holding device of the member includes a columnar first body; and a flat first end surface formed on the first body facing the member; a first recessed portion formed on the first end surface; and a gas flow forming means for forming a swirling flow of the gas in the first recessed portion or discharging the gas into the first recessed portion to form a radial flow The holding device is a second holding device that holds a negative pressure between the member and the member to hold the member, and includes a columnar second body; the second body is formed to face the second body a flat second end surface of the member; a second recess formed in the second end surface; and a liquid passage that discharges liquid into the second recess to form a swirling or radial flow of the liquid.

In the above-described conveying apparatus, the gas flow forming means may be configured to discharge a gas into the first concave portion to form a gas passage of one or more of a swirling or radial flow of the gas.

In the above-described transfer device, the liquid flow path may have a swirling or radial flow of the liquid while the gas flow forming means forms a swirling or radial flow of the gas.

According to the invention, it is possible to use both the gas and the liquid as the fluid by causing the negative pressure to be generated between the objects to be conveyed by the discharge fluid.

1‧‧‧Rotating flow forming body

3‧‧‧Liquid supply pump

4‧‧‧ gas supply pump

5‧‧‧Rotating flow forming body

6‧‧‧radiation flow formation

7‧‧‧Microcomputer

10‧‧‧Transporting device

11‧‧‧Ontology

12‧‧‧ recess

13‧‧‧ end face

14‧‧‧Spray outlet

15‧‧‧Sloping surface

16‧‧‧Import

17‧‧‧Introduction

18‧‧‧ convex

20‧‧‧Transporting device

51‧‧‧Ontology

52‧‧‧ recess

53‧‧‧ end face

54‧‧‧Spray outlet

55‧‧‧Sloping surface

56‧‧‧ supply port

57‧‧‧Circular access

58‧‧‧Connected Road

59‧‧‧Supply road

61‧‧‧Ontology

62‧‧‧ annular recess

63‧‧‧ end face

64‧‧‧ facing

65‧‧‧Sloping surface

66‧‧‧ orifice

67‧‧‧Import

68‧‧‧Introduction

69‧‧‧Circular access

70‧‧‧Connected Road

100‧‧‧Transportation system

101‧‧‧ base

102‧‧‧ Friction members

103‧‧‧ Hole Department

200‧‧‧Transportation system

201‧‧‧ base

2011‧‧‧Control Department

2012‧‧‧ wrist

FIG. 1 is a perspective view showing an example of the swirling flow forming body 1.

Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1.

Fig. 3 is a cross-sectional view taken along line B-B of Fig. 1.

FIG. 4 is a circuit configuration diagram of the transport system 100 including the swirling flow forming body 1.

FIG. 5 is a perspective view showing an example of the swirling flow forming body 5.

Fig. 6 is a cross-sectional view taken along line C-C of Fig. 5 .

Fig. 7 is a cross-sectional view taken along line D-D of Fig. 5 .

FIG. 8 is a circuit configuration diagram of the transport system 200 including the swirling flow forming body 5.

FIG. 9 is a view showing an example of the structure of the transport device 10.

FIG. 10 is a view showing an example of the structure of the transport device 20.

FIG. 11 is a perspective view showing an example of the radiation flow forming body 6.

FIG. 12 is a bottom view of the radiation flow forming body 6.

Fig. 13 is a cross-sectional view taken along line E-E of Fig. 11 .

FIG. 14 is a bottom view showing an example of the swirling flow forming body 1A.

FIG. 15 is a cross-sectional view taken along line F-F of FIG. 14.

[Formation for carrying out the invention]

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1. (First embodiment)

Fig. 1 shows a swirling flow forming body 1 according to a first embodiment of the present invention. A perspective view of an example. Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1; Fig. 3 is a cross-sectional view taken along line B-B of Fig. 1; The swirling flow forming body 1 is a device for holding a plate-shaped member W such as a semiconductor wafer or a glass substrate. The swirling flow forming body 1 holds the negative pressure between the plate-like member W by the discharge fluid to hold the member. The fluid refers to, for example, a gas such as compressed air, pure water, or bubble water. The material of the swirling flow forming body 1 is, for example, an aluminum alloy. This swirling flow forming body 1 is an example of the "holding device" of the present invention.

As shown in FIGS. 1 to 3, the swirling flow forming body 1 includes a main body 11, a recess 12, an end surface 13, four discharge ports 14a, 14b, 14c, and 14d (hereinafter collectively referred to as "discharge port 14") and inclined surfaces. 15. Four inlet ports 16a, 16b, 16c, and 16d (hereinafter, collectively referred to as "introduction port 16"), and four inlet paths 17a, 17b, 17c, and 17d (hereinafter collectively referred to as "introduction path 17").

The body 11 has a cylindrical shape. The end surface 13 is formed in a flat shape on one surface of the main body 11 (specifically, a surface facing the plate-like member W as a conveyed object) (hereinafter referred to as "bottom surface"). The recess 12 has a cylindrical shape and is formed at the end face 13. The recess 12 is formed coaxially with the body 11.

The four discharge ports 14 are formed on the inner peripheral side surface of the body 11 facing the recess 12, and each have a circular shape. The four discharge ports 14 are disposed at equal intervals in the axial center portion of the inner peripheral side surface. The discharge ports 14a and 14c are disposed to face each other. Specifically, it is arranged in point symmetry about the axis of the central axis of the body 11 or the recess 12 . Spray outlet 14b and 14d are configured to oppose each other. Specifically, it is arranged in point symmetry about the axis of the central axis of the body 11 or the recess 12 . The fluid supplied to the swirling flow forming body 1 is discharged into the concave portion 12 via the respective discharge ports 14. The discharge ports 14a and 14c discharge the liquid, and the discharge ports 14b and 14d discharge the gas.

The inclined surface 15 is formed in the opening of the recess 12 . The four introduction ports 16 are formed on the outer peripheral side surface of the body 11, and each has a circular shape. Among the four introduction ports 16, the introduction ports 16a and 16c are connected to a liquid supply pump 3, which will be described later, via a pipe, and the liquid is supplied into the body 11 via the introduction ports 16a and 16c. The inlets 16a and 16c are connected to a gas supply pump 4, which will be described later, via a pipe, and gas is supplied into the body 11 through the inlets 16b and 16d.

The four introduction paths 17 are formed substantially parallel to the end surface 13 and extend in the tangential direction with respect to the outer circumference of the concave portion 12. Each of the introduction paths 17 is a connection discharge port 14 and an introduction port 16. Specifically, the introduction path 17a is a connection discharge port 14a and an introduction port 16a, the introduction path 17b is a connection discharge port 14b and an introduction port 16b, the introduction path 17c is a connection discharge port 14c and an introduction port 16c, and the introduction path 17d is a connection discharge port. 14d and the inlet 16d.

The introduction paths 17a and 17c extend parallel to each other, and discharge the liquid into the concave portion 12 to form a swirling flow in the concave portion 12. The introduction paths 17b and 17d are parallel flows extending in parallel with each other, and a swirling flow of gas is formed in the concave portion 12. Specifically, the introduction paths 17b and 17d discharge gas into the concave portion 12 to form a swirling flow of the gas. The introduction paths 17a and 17c are An example of the "liquid passage" of the present invention. The introduction paths 17b and 17d are examples of the "gas flow forming means" and the "gas passage" of the present invention.

When the fluid is supplied to the swirling flow forming body 1 described above via the introduction port 16, the fluid is discharged from the discharge port 14 into the recessed portion 12 through the introduction path 17. The fluid discharged into the concave portion 12 forms a swirling flow in the concave portion 12 and is rectified, and then flows out from the opening portion of the concave portion 12. At this time, when the plate-shaped member W and the end surface 13 are opposed to each other, the inflow of the external fluid (for example, air or water) into the concave portion 12 is restricted, and the centrifugal force and the suction effect of the swirling flow cause each unit of the central portion of the swirling flow. The density of the fluid molecules of the volume becomes smaller, and a negative pressure is generated. As a result, the plate member W is pulled to the end face 13 side by the surrounding fluid being pressed. On the other hand, as the distance between the end surface 13 and the plate-like member W approaches, the amount of fluid flowing out of the recess 12 is restricted, so that the velocity of the fluid discharged from the discharge port 14 into the recess 12 becomes slow, and The pressure at the center of the swirling flow rises. As a result, the plate member W is not in contact with the end face 13, but a certain distance is maintained between the plate member W and the end face 13.

FIG. 4 is a circuit configuration diagram of the transport system 100 including the swirling flow forming body 1. As shown in Fig. 4, the inlets 16a and 16c of the swirling flow forming body 1 are connected to the liquid supply pump 3 via a solenoid valve 2a. On the other hand, the introduction ports 16b and 16d are connected to the gas supply pump 4 via the solenoid valve 2b via the tube. The solenoid valves 2a and 2b are connected to the microcomputer 7, respectively. The solenoid valve 2a allows the passage or interruption of the liquid supplied from the liquid supply pump 3 in accordance with the switch control signal output from the microcomputer 7. On the other hand, the solenoid valve 2b is based on the switch output from the microcomputer 7. The control signal allows passage or interruption of gas supplied from the gas supply pump 4. The microcomputer 7 outputs switching control signals to the solenoid valves 2a and 2b in accordance with a predetermined program.

In the transport system 100, when the microcomputer 7 outputs a turn-on control signal to the solenoid valve 2a and outputs a close control signal to the solenoid valve 2b, the liquid is supplied only to the inlets 16a and 16c of the swirling flow forming body 1. As a result, a swirling flow of the liquid is formed in the concave portion 12 of the swirling flow forming body 1. On the other hand, when the microcomputer 7 outputs a closing control signal to the solenoid valve 2a and outputs a closing control signal to the solenoid valve 2b, the gas is supplied only to the inlets 16b and 16d of the swirling flow forming body 1. As a result, a swirling flow of gas is formed in the concave portion 12 of the swirling flow forming body 1. As described above, according to the transport system 100 of the present embodiment, the use fluid can be used separately between the liquid and the gas. Therefore, for example, when the swirling flow forming body 1 transports the plate-shaped member W in the liquid, the liquid is used, and when the swirling flow forming body 1 transports the plate-shaped member W in the gas, the gas is used.

Further, when the microcomputer 7 outputs a control signal to both the electromagnetic valve 2a and the electromagnetic valve 2b, the liquid is supplied to the inlets 16a and 16c of the swirling flow forming body 1, and the gas is supplied to the inlets 16b and 16d. As a result, The concave portion 12 of the swirling flow forming body 1 is formed with a swirling flow in which a liquid and a gas are mixed. At this time, the introduction paths 17b and 17d form a swirling flow of the liquid while the introduction paths 17a and 17c are formed with the swirling flow of the gas.

2. (Second Embodiment)

Fig. 5 shows a swirling flow forming body 5 according to a second embodiment of the present invention. A perspective view of an example. Fig. 6 is a cross-sectional view taken along line C-C of Fig. 5; Fig. 7 is a sectional view taken along line D-D of Fig. 5; The swirling flow forming body 5 is a device for holding a plate-shaped member W such as a semiconductor wafer or a glass substrate. The swirling flow forming body 5 holds the negative pressure between the plate-like member W by the discharge fluid to hold the member. The fluid refers to, for example, a gas such as compressed air, pure water, or bubble water. The material of the swirling flow forming body 5 is, for example, an aluminum alloy. This swirling flow forming body 5 is an example of the "holding device" of the present invention.

As shown in FIGS. 5 to 7, the swirling flow forming body 5 includes a main body 51, a concave portion 52, an end surface 53, two discharge ports 54, and an inclined surface 55. The body 51 has a cylindrical shape. The end surface 53 is formed in a flat shape on one surface of the main body 51 (specifically, a surface facing the plate-like member W as the object to be conveyed) (hereinafter referred to as "bottom surface"). The recess 52 has a cylindrical shape and is formed at the end face 53. The recess 52 is formed coaxially with the body 51.

The two discharge ports 54 are formed on the inner peripheral side surface of the body 51 facing the recess 52. The two discharge ports 54 are disposed at the central portion in the axial direction of the inner peripheral side surface. The two discharge ports 54 are arranged to face each other. Specifically, it is arranged in point symmetry about the axis of the central axis of the body 51 or the recess 52. The fluid supplied to the swirling flow forming body 5 is discharged into the concave portion 52 through the respective discharge ports 54. The inclined surface 55 is formed in the opening of the recess 52.

As shown in FIGS. 6 and 7, the swirling flow forming body 5 includes a supply port 56, an annular passage 57, a communication passage 58, and two supplies. Give way 59. The supply port 56 is provided at the center of the upper surface of the body 51 (that is, the surface opposite to the bottom surface) and has a circular shape. The supply port 56 is connected to the gas supply pump 3 and the gas supply pump 4 which will be described later, for example, via a pipe. The fluid is supplied into the body 51 via the supply port 56. The annular passage 57 is formed inside the body 51 so as to surround the recess 52 and has a cylindrical shape. The annular passage 57 is formed coaxially with the recess 52. The annular passage 57 supplies the fluid supplied from the communication passage 58 to the supply passage 59. The communication path 58 is provided inside the main body 51 and extends linearly in the radial direction of the bottom surface or the upper surface of the main body 51.

The communication path 58 communicates with the annular passage 57 at both end portions thereof. The communication passage 58 supplies the fluid supplied into the main body 51 via the supply port 56 to the annular passage 57. The two supply passages 59 are formed substantially parallel to the end surface 53 and formed toward the outer periphery of the recess 52. The tangential direction extends. The two supply paths 59 extend parallel to each other. Each of the supply passages 59 has one end that communicates with the annular passage 57 and the other end that communicates with the discharge port 54. Each supply path 59 is a swirling flow in which a fluid is formed in the recess 52. Each supply path 59 is an example of the "fluid flow forming means" of the present invention.

When the fluid is supplied to the swirling flow forming body 5 described above via the supply port 56, the fluid is discharged from the discharge port 54 into the recess 52 through the communication passage 58, the annular passage 57, and the supply passage 59. The fluid discharged into the concave portion 52 forms a swirling flow in the concave portion 52 and is rectified, and then flows out from the opening portion of the concave portion 52. At this time, when the plate-like member W and the end surface 53 are opposed to each other, the inflow of the external fluid (for example, air or water) to the concave portion 52 is restricted, and the centrifugal force and the suction effect of the swirling flow cause each of the central portions of the swirling flow. The density of the fluid molecules per unit volume becomes small, and a negative pressure is generated between the swirling flow forming body 5 and the plate-like member W. As a result, the plate-like member W is pulled to the end face 53 side by the surrounding fluid being pressed. On the other hand, as the distance between the end surface 53 and the plate-like member W approaches, the amount of the fluid flowing out of the recess 52 is restricted, so that the velocity of the fluid discharged from the discharge port 54 into the recess 52 becomes slow. The pressure at the center of the swirling flow rises. As a result, the plate member W is not in contact with the end face 53, but a certain distance is maintained between the plate member W and the end face 53.

FIG. 8 is a circuit configuration diagram of the transport system 200 including the swirling flow forming body 5. This conveying device 200 is an example of the "holding system" of the present invention. As shown in Fig. 8, the supply port 56 of the swirling flow forming body 5 is connected to the liquid supply pump 3 via a solenoid valve 2a, for example, by a pipe, and is connected to the gas supply pump 4 via a solenoid valve 2b, for example. The solenoid valves 2a and 2b are connected to the microcomputer 7, respectively.

The solenoid valve 2a allows the passage or interruption of the liquid supplied from the liquid supply pump 3 in accordance with the switch control signal output from the microcomputer 7. On the other hand, the solenoid valve 2b allows the passage or interruption of the gas supplied from the gas supply pump 4 in accordance with the switching control signal output from the microcomputer 7. The solenoid valves 2a and 2b have a function of switching the gas supplied to the swirling flow forming body 5 between the gas and the liquid, and are examples of the "fluid switching means" of the present invention. The microcomputer 7 outputs switching control signals to the solenoid valves 2a and 2b in accordance with a predetermined program. The microcomputer 7 is an example of the "control means" of the present invention.

In the transport system 200, the microcomputer 7 outputs the solenoid valve 2a When the control signal is turned on and the closing control signal is output to the electromagnetic valve 2b, the liquid is supplied to the supply port 56 of the swirling flow forming body 1. As a result, a swirling flow of the liquid is formed in the concave portion 52 of the swirling flow forming body 5. On the other hand, when the microcomputer 7 outputs a closing control signal to the solenoid valve 2a and outputs a closing control signal to the solenoid valve 2b, the gas is supplied to the supply port 56 of the rotary flow forming body 1. As a result, a swirling flow of the gas is formed in the concave portion 52 of the swirling flow forming body 5. As described above, according to the transport system 200 of the present embodiment, the use fluid can be used separately between the liquid and the gas. Therefore, for example, when the swirling flow forming body 5 transports the plate-shaped member W in the liquid, the liquid is used, and when the swirling flow forming body 5 transports the plate-shaped member W in the gas, the gas is used.

3. Modifications

The above embodiment can be modified as follows. Further, the following two or more modifications may be combined with each other.

3-1. Modification 1

The swirling flow forming body 1 of the above-described first embodiment can be used in a plurality of plate-shaped frames depending on the size of the plate-like member W. FIG. 9 is a view showing an example of the structure of the conveying device 10 of the present modification. Specifically, FIG. 9( a ) is a bottom view of the conveying device 10 , and FIG. 9( b ) is a side view of the conveying device 10 . As shown in FIG. 9, the conveyance device 10 is provided with a base body 101, twelve swirling flow forming bodies 1, twelve friction members 102, and six hole portions 103.

The base 101 has a cylindrical shape. The material of the base 101, It is for example an aluminum alloy. The twelve swirling flow forming bodies 1 are provided on one surface of the base body 101 (specifically, a surface that faces the plate-like member W as the object to be conveyed) (hereinafter referred to as "bottom surface"). The twelve swirling flow forming bodies 1 are arranged on the circumference of the same circle on the bottom surface. The twelve swirling flow forming bodies 1 are arranged at equal intervals along the outer circumference of the base body 101.

The twelve friction members 102 are provided on the bottom surface of the base 101 and have cylindrical shapes, respectively. The twelve friction members 102 are disposed on the bottom surface at equal intervals on a circle similar to the circle in which the swirling flow forming body 1 is disposed. One friction member 102 is disposed between the two swirling flow forming bodies 1. Each of the friction members 102 is a member that comes into contact with the surface of the plate-like member W as the object to be conveyed, and prevents the movement of the plate-like member W by the frictional force generated between the friction members 102. The material of each friction member 102 is, for example, fluororubber. The six hole portions 103 are through holes that are substantially rounded and rectangular in the base body 101. The six hole portions 103 are arranged on the circumference of the same circle at equal intervals in the base body 101. A circle in which the hole portion 103 is disposed on the circumference thereof is concentric with a circle in which the swirling flow forming body 1 is disposed on the circumference thereof. The hole portion 103 is disposed at the center of the surface of the base body 101 than the swirling flow forming body 1.

According to the present modification, the swirling flow forming body 1 attached to the conveying device 10 may be connected to only one of the liquid supply pump 3 and the gas supply pump 4, respectively. Further, the swirling flow forming body 1 connected to the liquid supply pump 3 and the swirling flow forming body 1 connected to the gas supply pump 4 may be alternately arranged in the conveying device 10. In this case, for example, when the conveying device 10 conveys the plate-shaped member W in the liquid, the liquid can be supplied only to the swirling flow forming body 1 connected to the liquid supply pump 3, and the conveying device 10 is in the gas. When the plate-shaped member W is conveyed in the middle, the gas may be supplied only to the swirling flow forming body 1 connected to the gas supply pump 4.

In this example, the swirling flow forming body 1 connected to the liquid supply pump 3 is an example of the "second holding device" of the present invention. The introduction paths 17a and 17c including the swirling flow forming body 1 are examples of the "liquid passage" of the present invention. On the other hand, the swirling flow forming body 1 connected to the gas supply pump 4 is an example of the "first holding means" of the present invention. The introduction paths 17b and 17d including the swirling flow forming body 1 are examples of the "gas flow forming means" of the present invention.

Further, in the conveying device 10, the liquid is supplied to the swirling flow forming body 1 connected to the liquid supply pump 3, and the gas may be supplied to the swirling flow forming body 1 connected to the gas supply pump 4. At this time, the swirling flow forming body 1 (specifically, the introduction paths 17a and 17c) connected to the liquid supply pump 3 is the swirling flow forming body 1 connected to the gas supply pump 4 (specifically, the introduction path) 17b and 17d) form a swirling flow of the liquid during the formation of the swirling flow of the gas.

Further, the rotary flow forming body 5 of the second embodiment may be attached to the conveying device 10 instead of the swirling flow forming body 1.

3-2. Modification 2

In the first modification described above, the shape of the conveying device 10 can also be changed. FIG. 10 is a view showing an example of the structure of the conveying device 20 of the present modification. Specifically, FIG. 10( a ) is a bottom view of the conveying device 20 , and FIG. 10( b ) is a side view of the conveying device 20 . The conveying device 20 is as shown in the figure 10 is provided with a base body 201, ten swirling flow forming bodies 1, and twelve friction members 102A.

The base 201 is a bifurcated fork-shaped plate-like member, and is formed by a rectangular grip portion 2011 and two wrist portions 2012 that are branched from the grip portion 2011. The material of the base 201 is, for example, an aluminum alloy. The ten swirling flow forming bodies 1 are provided on one surface of the two wrist portions 2012 constituting the base body 201 (specifically, they are provided on a surface facing the plate-shaped member W as the object to be conveyed) (hereinafter referred to as "bottom surface"). ".). The ten swirling flow forming bodies 1 are arranged on the circumference of the same circle in the two wrist portions 2012. Five swirling flow forming bodies 2 are disposed at equal intervals of the respective wrist portions 2012.

The twelve friction members 102A are members that are provided on the bottom surface of the two wrist portions 2012 and have a plate shape. The twelve friction members 102A are disposed on the bottom surface at equal intervals on a circle having the same circle as the swirling flow forming body 1. In each of the wrist portions 2012, one rotating flow forming body 1 is placed between the two friction members 102A. Each of the friction members 102A is in contact with the surface of the plate-like member W as the object to be conveyed, and the movement of the plate-like member is prevented by the frictional force generated between the friction members 102A. The material of each friction member 102A is, for example, fluororubber.

3-3. Modification 3

In the second embodiment described above, the swirling flow forming body 5 that forms the swirling flow is used instead of the radial flow forming body that forms the radial flow. FIG. 11 is a perspective view showing an example of the radiation flow forming body 6 of the present modification. The swirling flow forming body 6 is made by discharging a fluid to cause a negative pressure The plate-shaped member W is held between the plate-like members W of the object to be conveyed.

As shown in FIG. 11, the radiation flow forming body 6 includes a main body 61, an annular concave portion 62, an end surface 63, an opposing surface 64, and an inclined surface 65. The body 61 has a cylindrical shape. The end surface 63 is formed in a flat shape on one surface of the main body 61 (specifically, a surface facing the plate-like member W as the object to be conveyed) (hereinafter referred to as "bottom surface"). An annular recess 62 is formed at the end surface 63. The annular recessed portion 62 is formed concentrically with the outer circumference of the body 61. The opposing surface 64 is formed in a flat shape on the bottom surface of the body 61. The opposing surface 64 is a surface surrounded by the annular recessed portion 62 and opposed to the plate-shaped member W as the object to be conveyed. The opposing surface 64 is recessed toward the end surface 63 on the bottom surface of the body 61. The inclined surface 65 is an opening formed in the annular recess 62 (specifically, formed on the outer periphery thereof).

FIG. 12 is a bottom view of the radiation flow forming body 6. Fig. 13 is a sectional view taken along line E-E of Fig. 11; As shown in FIGS. 12 and 13, the radiation flow forming body 6 further includes six injection holes 66, an introduction path 67, an introduction port 68, an annular passage 69, and a communication path 70. The inlet 67 is provided at the center of the upper surface of the body 61 (that is, the surface opposite to the bottom surface) and has a circular shape. The inlet port 67 is connected to the gas supply pump 3 and the gas supply pump 4 shown in Fig. 4, for example, via a pipe. The introduction path 68 is provided inside the body 61 and extends linearly along the central axis of the body 61. The introduction path 68 has one end that communicates with the introduction port 67 and the other end that communicates with the communication path 70. The introduction path 68 supplies the fluid supplied into the body 61 through the introduction port 67 to the annular passage 70.

The communication path 70 is disposed inside the body 61 and faces the ring The radial direction of the passage 69 extends linearly. The communication passage 70 communicates with the introduction passage 68 at the central portion in the axial direction, and communicates with the annular passage 69 at both end portions thereof. The communication passage 70 supplies the fluid supplied from the introduction path 68 to the annular passage 69. The annular passage 69 is provided inside the body 61 and has a cylindrical shape. The annular passage 69 is formed coaxially with the body 61. The annular passage 69 supplies the fluid supplied from the communication passage 70 to the injection hole 66.

The six injection holes 66 are substantially parallel with respect to the end surface 63 or the opposite surface 64, respectively, and are formed to extend in a straight line toward the bottom surface or the upper surface of the body 61, and one end thereof is in communication with the annular passage 69, and the other end is The annular recesses 62 are in communication. The six injection holes 66 are disposed on the same plane with the adjacent injection holes 66 formed at an angle of substantially 45 degrees to each other. Each of the injection holes 66 discharges a fluid such as a gas into the annular recessed portion 62 to form a radial flow. Each of the injection holes 66 is an example of the "fluid flow forming means" of the present invention.

When the fluid is supplied to the radiation flow forming body 6 described above via the introduction port 67, the fluid is discharged from the injection hole 66 into the annular concave portion 62 through the introduction path 68, the communication path 70, and the annular passage 69. The fluid discharged into the annular recess 62 flows out from the opening of the annular recess 62. At this time, when the plate-like member W and the opposing surface 64 are opposed to each other, the inflow of the external fluid (for example, air or water) to the space between the opposing surface 64 and the plate-like member W is restricted, and the attraction by the radiation flow is attracted. The effect is to make the density of fluid molecules per unit volume of the space small, so that a negative pressure is generated. As a result, the plate member W is pulled to the end face 63 side by the surrounding fluid being pressed. On the other hand, as the distance between the end surface 63 and the plate-like member W is close, the amount of fluid flowing out from the annular recess 62 is restricted so that it is annular from the orifice 66 The velocity of the fluid discharged in the recess 62 is slowed, and the pressure in the space is increased. As a result, the plate member W is not in contact with the end surface 63, and a certain distance is maintained between the plate member W and the end surface 63.

Further, the configuration of the radiation flow forming body 6 (in particular, the number of the injection holes 66 and the configuration of the fluid flow path in the body 61) is not limited to the example shown in the present modification. This structure may be determined in accordance with the size, shape, and material of the plate-like member W that is transported by the radiation flow forming body 6.

Further, in the conveying device 10 of the above-described modification 1, the radial flow forming body 6 may be attached to the rotating flow forming body 1. At this time, the radiation flow forming bodies 6 attached to the conveying device 10 may be connected to only one of the liquid supply pump 3 and the gas supply pump 4, respectively. Further, the radiation flow forming body 6 connected to the liquid supply pump 3 and the radiation flow forming body 6 connected to the gas supply pump 4 may be alternately arranged in the conveying device 10. In this example, the radiation flow forming body 6 connected to the liquid supply pump 3 is an example of the "second holding device" of the present invention. The injection hole 66 including the swirling flow forming body 6 is an example of the "liquid passage" of the present invention. On the other hand, the radiation flow forming body 6 connected to the gas supply pump 4 is an example of the "first holding device" of the present invention. The injection hole 66 including the radiation flow forming body 6 is an example of the "gas flow forming means" and the "gas passage" of the present invention.

Further, in the radiation flow forming body 6, the fluid discharged from each of the injection holes 66 can be made different as in the introduction path 17 of the rotary flow forming body 1 of the first embodiment. In this example, the gas injection hole 66 which discharges the gas into the annular recessed portion 62 to form a radial flow is an example of the "gas flow forming means" of the present invention. Further, the liquid is discharged to the annular recess 62 to form a discharge of the liquid. The injection hole 66 is an example of the "liquid passage" of the present invention.

3-4. Modification 4

The shape of the swirling flow forming body 1 of the above-described first embodiment can also be changed. FIG. 14 is a bottom view showing an example of the swirling flow forming body 1A of the present modification. Fig. 15 is a sectional view taken along line F-F of Fig. 14; As shown in FIGS. 14 and 15, the swirling flow forming body 1A further includes a convex portion 18 as compared with the swirling flow forming body 1. The convex portion 18 is formed to extend from the bottom of the concave portion 12 to have a cylindrical shape. The convex portion 18 is formed coaxially with the body 11 or the concave portion 12. The upper surface of the convex portion 18 (specifically, the surface facing the plate-shaped member W as the object to be conveyed) is recessed with respect to the end surface 13. The convex portion 18 has a liquid flow path formed between the outer peripheral side surface and the inner peripheral side surface of the main body 11, and the liquid discharged into the concave portion 12 flows in the liquid flow path to form a swirling flow.

Further, the upper surface of the convex portion 18 may be formed on the same plane as the end surface 13. Further, the upper end portion of the convex portion 18 can also be chamfered.

Further, the convex portion similar to the convex portion 18 may be provided on the bottom surface of the concave portion 52 of the swirling flow forming body 5 of the second embodiment.

3-5. Modification 5

In the swirling flow forming body 1 of the above-described first embodiment, a known electric fan may be used instead of the introduction paths 17b and 17d (see, for example, Japanese Laid-Open Patent Publication No. 2011-138948). Specifically, it can also be formed in a rotating stream The body 11 of the body 1 is provided with an intake port, and a fan is provided. The fan is disposed in the recess 12, and the gas is sucked into the recess 12 from the intake port by the rotation thereof, and the swirling flow is generated in the recess 12. Each fan is an example of the "gas flow forming means" of the present invention. The fan may be rotated by electric rotation when the liquid is discharged from the introduction paths 17a and 17c and the liquid is formed in the concave portion 12, and may be rotated.

The same electric fan may be provided in the swirling flow forming body 5 of the second embodiment. Specifically, a suction port may be provided in the body 51 of the swirling flow forming body 5, and a fan may be provided. The fan is disposed in the recess 52, and the gas is sucked into the recess 52 from the air inlet by the rotation thereof. The swirling flow is generated in the recess 52. Each fan is an example of the "fluid flow forming means" of the present invention. When the rotary current forming body 5 is an electric fan, the microcomputer 7 of the transport system 200 can output a control signal to the electromagnetic valve 2a when the concave portion 52 forms a swirling flow of the liquid, and a swirling flow of the gas is formed in the concave portion 52. , output control signal to the electric fan. Further, the electric fan may be rotated when the concave portion 52 is formed with a swirling flow of the liquid.

3-6. Modification 6

The structure of the base 101 of the above-described conveying device 10 is not limited to the example shown in the above-described modification 1. Moreover, the number, shape, and arrangement of the friction member 102 and the hole portion 103 provided in the base 101 of the conveying device 10 are not limited to the examples shown in the above-described first modification. These elements may be determined in accordance with the size, shape, and material of the plate-shaped member W conveyed by the conveying device 10. The friction member 102 and the hole portion 103 may be originally provided for transportation. The base 101 of the device 10. When the friction member 102 is not provided in the base 101 of the conveying device 10, a well-known centering guide can be provided in the base 101 for positioning the plate-shaped member W (for example, see JP-A-2005-51260). Similarly, the structure of the base 201 of the above-described conveying device 20 is not limited to the example shown in the second modification described above.

3-7. Modification 7

The number, structure, and arrangement of the swirling flow forming bodies 1 provided in the base body 101 of the above-described conveying device 10 are not limited to the examples shown in the above-described first modification. These elements may be determined in accordance with the size, shape, and material of the plate-shaped member W conveyed by the conveying device 10. For example, the number of the swirling flow forming bodies 1 may be less than 12 or 13 or more. Further, the swirling flow forming body 1 may be arranged in two or more rows along the outer circumference of the base body 1. Similarly, the number, structure, and arrangement of the swirling flow forming bodies 5 provided in the base body 201 of the above-described conveying device 20 are not limited to the examples shown in the above-described second modification.

3-8. Modification 8

The shape of the main body 11 of the swirling flow forming body 1 of the above-described first embodiment is not limited to a cylindrical shape, and may be a corner post or an elliptical cylinder. Moreover, the number of the introduction paths 17 provided in the swirling flow forming body 1 is not limited to four, and may be three or less or five or more. Further, the inclined surface 15 may not be provided (it is also possible that the end portion of the end surface 13 is not chamfered). The above-described deformation can also be employed in the swirling flow forming body 5.

1‧‧‧Rotating flow forming body

11‧‧‧Ontology

12‧‧‧ recess

14a‧‧‧Spray outlet

14b‧‧‧Spray outlet

14c‧‧‧Spray outlet

14d‧‧‧Spray outlet

16a‧‧‧Import

16b‧‧‧Import

16c‧‧‧Import

16d‧‧‧Import

17a‧‧‧Introduction

17b‧‧‧Introduction

17c‧‧‧Introduction

17d‧‧‧Introduction

Claims (7)

A holding device is a holding device that holds a negative pressure between a member and a plate-like member to hold the member, and is provided with a columnar body; a flat plate formed on the body facing the member a concave portion formed on the end surface; a gas flow forming means for forming a swirling flow of gas in the concave portion; or discharging a gas into the concave portion to form a radial flow; and discharging a liquid into the concave portion; Further, one or more liquid passages for forming a swirling flow or a radial flow of the liquid, wherein the gas flow forming means discharges the gas into the concave portion to form one or more gas passages of a swirling or radial flow of the gas, and the liquid passage The gas passages are separate passages. The holding device according to the first aspect of the invention, wherein the one or more liquid passages are formed by forming a swirling or radial flow of the liquid while the gas flow forming means forms a swirling or radial flow of the gas. A holding system includes: a holding device and a fluid switching means, wherein the holding device is a holding device that holds a negative pressure between a member and a plate-like member to hold the member, and is provided with a column a body formed on the flat end surface of the body facing the member; a recess formed in the end surface; a gas flow forming means for forming a gas in the recess Rotating the flow; or discharging the gas into the recess to form a radial flow; and 1 or more liquid passages for discharging the liquid into the recess to form a swirling or radiating flow of the liquid, the gas flow forming means Discharging a gas into the concave portion to form a gas flow of one or more of a swirling flow or a radial flow of the gas, wherein the liquid passage and the gas passage are separate passages, and the fluid switching means is connected to the holding device. The fluid to be supplied to the aforementioned holding device is switched between the gas and the liquid. A control method for controlling a holding system including a holding device, a fluid switching means, and a control means for holding a negative pressure in a plate-like member by discharging a fluid to hold the member The holding device further includes: a columnar body; a flat end surface formed on the body facing the member; a recess formed in the end surface; and a gas flow forming means for forming a gas in the recess Rotating the flow; or discharging the gas into the recess to form a radial flow; and 1 or more liquid passages for discharging the liquid into the recess to form a swirling or radiating flow of the liquid, the gas flow forming means Discharging a gas into the concave portion to form a gas flow of one or more of a swirling flow or a radial flow of the gas, wherein the liquid passage and the gas passage are separate passages, and the fluid switching means is connected to the holding device. The fluid to be supplied to the aforementioned holding device is switched between the gas and the liquid, The control means is connected to the fluid switching means for controlling the fluid switching means, wherein the control means controls the fluid switching means to supply gas to the holding means; and the control means controls the fluid switching means a step of supplying a liquid to the aforementioned holding means. A conveying device includes: a first holding device and a second holding device that holds a negative pressure between a plate-shaped member and a first holding device to hold the first holding of the member The apparatus includes: a columnar first body; a first end surface formed in a flat shape in which the first body faces the member; a first recess formed in the first end surface; and a gas flow forming means; In this method, a swirling flow of gas is formed in the first recessed portion, or a gas is discharged into the first recessed portion to form a radial flow, and the second holding device causes a negative pressure between the member and the member by discharging the liquid. a second holding device that holds the member, and includes a columnar second body; a second end surface formed in a flat shape in which the second body faces the member; and a second end surface formed on the second end surface 2 recesses; The liquid is discharged into the second concave portion to form one or more liquid passages of the swirling flow or the radial flow of the liquid. In the conveying apparatus according to the fifth aspect of the invention, the gas flow forming means is a gas passage that discharges a gas into the first concave portion to form a swirling or radial flow of the gas. In the above-described one or more liquid passages, the liquid passage forming means rotates the swirling flow or the radial flow of the gas while the gas flow forming means forms the swirling flow of the liquid. Or radiation flow.