TWI555690B - And a supply means for the tape member, a bonding means for the adhesive tape, and a supply means for the belt member - Google Patents

And a supply means for the tape member, a bonding means for the adhesive tape, and a supply means for the belt member Download PDF

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TWI555690B
TWI555690B TW102117016A TW102117016A TWI555690B TW I555690 B TWI555690 B TW I555690B TW 102117016 A TW102117016 A TW 102117016A TW 102117016 A TW102117016 A TW 102117016A TW I555690 B TWI555690 B TW I555690B
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supply
belt member
belt
end portion
tape
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TW102117016A
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TW201408575A (en
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Mitsuyoshi Tsuzura
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Shibaura Mechatronics Corp
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Description

帶構件之供給裝置、黏著帶之貼著裝置及帶構件之供給方法 Supply device with member, adhesive device for adhesive tape, and supply method for belt member 發明領域 Field of invention

本發明是有關於一種適合藉由引線將複數半導體元件連接成一列時之帶構件之供給裝置、黏著帶之貼著裝置及帶構件之供給方法。 The present invention relates to a supply device for a belt member which is suitable for connecting a plurality of semiconductor elements in a row by a lead wire, an adhesion device for an adhesive tape, and a supply method for a belt member.

發明背景 Background of the invention

太陽電池模組有結晶型與薄膜型。結晶型之太陽電池模組藉由帶狀引線而將單結晶矽或多結晶矽等之半導體元件連接成一列,藉由樹脂將該半導體元件一體地積層於玻璃製之底板上而構成。 Solar cell modules are available in crystalline and thin film types. In the crystal type solar cell module, semiconductor elements such as single crystal germanium or polycrystalline germanium are connected in a row by a strip lead, and the semiconductor element is integrally laminated on a glass substrate by a resin.

太陽電池模組是透過黏著帶且藉由彎曲成曲柄狀之上述引線而電連接,前述黏著帶是由貼著於為複數太陽電池元件之半導體元件之表面且具有導電性之熱硬化性樹脂所形成。 The solar cell module is electrically connected via an adhesive tape and is bent by a crank-shaped lead wire which is adhered to a surface of a semiconductor element which is a plurality of solar cell elements and has a conductive thermosetting resin. form.

圖14A、圖14B是顯示一般結晶型之太陽電池模組的一例。圖14A藉由引線2(2a~2n)而將多數之半導體元件1(1a~1n)連接成一列之狀態之平面圖,圖14B為放大之側面圖。 14A and 14B are views showing an example of a solar cell module of a general crystal type. Fig. 14A is a plan view showing a state in which a plurality of semiconductor elements 1 (1a to 1n) are connected in a row by a lead 2 (2a to 2n), and Fig. 14B is an enlarged side view.

本例中,在接受各半導體元件1a~1n之太陽光之受光面的上面,等間隔的形成多數之柵極(指狀電極)5,與該等柵極5之配置方向交叉之寬度方向之兩端部及中央部之三處由匯流排電極6a連接。在各半導體元件1a~1n之背面,跨背面之幾乎全體形成背面電極7,於該背面電極7,3條匯流排電極6b與上面側之匯流排電極6a對應而形成。 In this example, a plurality of gate electrodes (finger electrodes) 5 which are formed at equal intervals on the upper surface of the light receiving surface of the sunlight receiving the semiconductor elements 1a to 1n are crossed in the width direction of the arrangement direction of the gate electrodes 5 Three ends and a central portion are connected by bus bar electrodes 6a. On the back surface of each of the semiconductor elements 1a to 1n, the back surface electrode 7 is formed almost entirely across the back surface, and the back surface electrode 7 and the three bus bar electrodes 6b are formed corresponding to the bus bar electrode 6a on the upper surface side.

在上面側之匯流排電極6a與下面側之匯流排電極6b,分別貼著由具有導電性之熱硬化性樹脂構成之黏著帶3,在貼著於相鄰之一對半導體元件1之上面側之匯流排電極6a與背面側之匯流排電極6b之黏著帶3,有彎曲成曲柄狀之引線2a~2n之一端部與他端部暫壓接。 The bus bar electrode 6a on the upper side and the bus bar electrode 6b on the lower side are respectively adhered to an adhesive tape 3 made of a conductive thermosetting resin, and are attached to the upper surface side of the adjacent one pair of the semiconductor elements 1. The adhesive tape 3 of the bus bar electrode 6a and the bus bar electrode 6b on the back side has one end portion of the lead wires 2a to 2n bent in a crank shape and is temporarily pressed against the other end portion.

接著,以比暫壓接時大之加壓力,將上述引線2a~2n加壓並加熱。藉此,由於上述黏著帶3會熔融硬化,引線2a~2n會正式壓接也就是連接固定於半導體元件1a~1n之上下面。 Next, the leads 2a to 2n are pressurized and heated at a pressure greater than that at the time of the temporary pressure connection. Thereby, since the adhesive tape 3 is melt-hardened, the leads 2a to 2n are formally crimped, that is, connected and fixed to the upper surface of the semiconductor elements 1a to 1n.

藉此,複數之半導體元件1a~1n藉由引線2a~2n而連接成一列。藉由引線2a~2n連接成一列之半導體元件1a~1n稱為串列1A。 Thereby, the plurality of semiconductor elements 1a to 1n are connected in a row by the leads 2a to 2n. The semiconductor elements 1a to 1n connected in a row by the leads 2a to 2n are referred to as a series 1A.

上述黏著帶3貼著於脫模帶之其中一面,以該等黏著帶3與脫模帶形成帶構件。該帶構件捲裝於構成供給裝置之供給捲軸。 The adhesive tape 3 is attached to one side of the release tape, and the tape is formed by the adhesive tape 3 and the release tape. The belt member is wound around a supply reel that constitutes a supply device.

將相鄰之半導體元件1以對應於與設置於其上下面之各個匯流排電極6a,6b之數目之複數引線2、本例中是以3條引線2連接時,於上述供給裝置以預定間隔設置因應於 引線2之數目之3個供給捲軸。 When the adjacent semiconductor elements 1 are connected to the plurality of leads 2 of the number of the bus bar electrodes 6a, 6b disposed above and below them, and are connected by three leads 2 in this example, the supply means is spaced at predetermined intervals. Setting up Three supply reels of the number of leads 2.

由3個供給捲軸拉出之帶構件是,黏著帶3與脫模帶中僅黏著帶被切斷機構切斷成對應於上述半導體元件1之長度尺寸。接著,黏著帶之切斷為預定長度之部分,與脫模帶一起運行搬送,並與定位在貼著位置之上述半導體元件1對向地定位。 The belt member pulled out by the three supply spools is such that only the adhesive tape is cut by the cutting tape 3 and the release tape to correspond to the length dimension of the semiconductor element 1. Then, the adhesive tape is cut to a predetermined length, transported together with the release tape, and positioned opposite to the semiconductor element 1 positioned at the adhering position.

上述貼著位置設有貼著頭,該貼著頭朝下降方向驅動,藉此3條帶構件之切斷成預定長度之黏著帶按壓於上述半導體元件1之板面。藉此,切斷成預定長度之上述黏著帶貼著於上述半導體元件1之板面。 The abutting position is provided with a bonding head which is driven in the descending direction, whereby the adhesive tape cut into a predetermined length by the three tape members is pressed against the surface of the semiconductor element 1. Thereby, the adhesive tape cut into a predetermined length is attached to the surface of the semiconductor element 1.

貼著後,由貼著於上述半導體元件1之黏著帶剝離脫模帶。接著,剝離後,脫模帶傳送預定長度,黏著帶之切斷為預定長度之下一部分貼著於定位在貼著位置之下一基板,如此重複進行。 After the adhesion, the release tape is peeled off by the adhesive tape attached to the semiconductor element 1. Next, after the peeling, the release tape is conveyed for a predetermined length, and the cutting of the adhesive tape is a part of the predetermined length and is attached to a substrate positioned under the adhesive position, and thus repeated.

繼續如此之貼著作業時,由於捲裝於上述供給裝置之供給捲軸之帶構件會用盡,因此若殘量在預定以下,則進行將使用中之供給捲軸更換成新的供給捲軸。 When the continuation of such a work is continued, since the belt member wound around the supply reel of the supply device is used up, if the remaining amount is less than or equal to a predetermined value, the supply reel in use is replaced with a new supply reel.

由上述供給捲軸拉出之帶構件在受多數流通輥子導引等之路徑運行。因此,將上述帶構件配置於上述路徑之作業、也就是帶構件通過路徑之作業較為麻煩。 The belt member pulled out by the supply spool is operated by a path guided by a plurality of flow rollers. Therefore, it is troublesome to arrange the belt member on the above-described path, that is, the belt member passage path.

因此,捲裝於設置在上述供給裝置之供給捲軸之帶構件的殘量在預定以下時,可檢測出該情況。接著,在帶構件用盡之前,由使用中之供給捲軸,將新的供給捲軸之帶構件之始端部連接於使用中之供給捲軸之帶構件之終 端部。 Therefore, when the remaining amount of the belt member attached to the supply spool of the supply device is less than or equal to a predetermined value, this can be detected. Then, before the belt member is used up, the beginning end of the belt member of the new supply reel is connected to the end of the belt member of the supply reel in use by the supply reel in use. Ends.

藉此,進行將捲裝於新的供給捲軸之帶構件藉由使用中之供給捲軸之帶構件而導入至路徑。 Thereby, the belt member that is wound on the new supply reel is introduced into the path by the belt member of the supply reel in use.

先行技術文獻 Advanced technical literature 專利文獻 Patent literature

【專利文獻1】日本特許第4549432號公報 [Patent Document 1] Japanese Patent No. 4549432

發明概要 Summary of invention

然而,若是上述之太陽電池模組的情況,複數之黏著帶平行地貼著於該半導體元件之板面。因此,在帶構件之供給裝置設置複數之供給捲軸,由該等供給捲軸同時拉出帶構件。 However, in the case of the solar cell module described above, a plurality of adhesive tapes are attached in parallel to the surface of the semiconductor element. Therefore, a plurality of supply reels are provided in the supply device of the belt member, and the belt members are simultaneously pulled out from the supply reels.

各供給捲軸雖然捲裝有上述帶構件,但無法避免捲裝之長度會不均。因此,即使由複數之供給捲軸拉出帶構件而使用,捲裝之帶構件之殘量仍會產生差異。 Although each of the supply reels is wound with the above-described belt member, it is unavoidable that the length of the package may be uneven. Therefore, even if the belt member is pulled out by a plurality of supply reels, the residual amount of the belt member may be different.

然而,以往,若檢測出複數之供給捲軸中,捲裝之帶構件的殘量在預定以下,則進行僅將檢測出之1個供給捲軸更換成新的供給捲軸。 However, conventionally, when a plurality of supply reels are detected and the remaining amount of the packaged tape member is less than or equal to a predetermined value, only one of the detected supply reels is replaced with a new supply reel.

也就是說,雖然供給裝置設有複數供給捲軸,但供給捲軸之更換是一個一個進行的。因此,供給捲軸之更換作業變頻繁,不僅對作業者的負擔增加,且由於每次更換供給捲軸時,必須停止供給裝置,因此成為導致生產性降低的原因。 That is, although the supply device is provided with a plurality of supply reels, the replacement of the supply reels is performed one by one. Therefore, the replacement work of the supply reel becomes frequent, and the burden on the operator is increased, and the supply device must be stopped every time the supply reel is replaced, which causes a decrease in productivity.

本發明係提供一種藉由複數供給捲軸供給複數帶構件時,可達到更換作業之容易化及效率化之帶構件之供給裝置、使用該供給裝置之黏著帶之貼著裝置、及帶構件之供給方法。 The present invention provides a supply device for a belt member that can be easily and efficiently replaced by a plurality of supply reels, an attachment device for an adhesive tape using the supply device, and a supply of a belt member. method.

本發明一種帶構件之供給裝置,是由供給捲軸供給在脫模帶之其中一面貼著有黏著帶之帶構件,且前述帶構件之供給裝置包含有:帶供給機構,是設有捲裝有上述帶構件且可裝卸之複數供給捲軸,且由該等供給捲軸供給上述帶構件;檢測機構,是藉由上述帶構件之終端部,檢測捲裝於上述複數供給捲軸之帶構件之殘量在預定以下之情況;及連接裝置,用以連接捲裝於使用中之複數供給捲軸之上述帶構件之終端部、與捲裝於欲更換之新的複數供給捲軸之帶構件之始端部;其中,若上述檢測機構檢測出複數之供給捲軸中,至少一個捲裝於供給捲軸之帶構件的殘量在預定量以下的情況,則根據該檢測,整批更換使用中之複數供給捲軸,並且藉由上述連接裝置,將捲裝於使用中之複數供給捲軸之複數帶構件的終端部與捲裝於欲更換之新的複數供給捲軸之複數帶構件之始端部一次連接。 A supply device for a belt member is a belt member which is supplied with a pressure-sensitive adhesive tape on one side of a release belt by a supply reel, and the supply device for the belt member includes a belt supply mechanism which is provided with a coil The detachable plurality of supply reels are supplied to the reel, and the supply member is supplied from the supply reel; and the detecting means detects the remaining amount of the belt member wound on the plurality of supply reels by the end portion of the belt member. And a connecting device for connecting a terminal portion of the belt member wound in a plurality of supply spools in use and a leading end portion of the belt member wound on the new plurality of supply spools to be replaced; If the detecting means detects that the remaining number of the supply spools of the plurality of supply spools is less than a predetermined amount, the plurality of supply spools are replaced in batches by the detection. The connecting device refills the end portion of the plurality of tape members of the plurality of supply spools in use and the new plurality of supply spools to be replaced With a member of the leading end portion of the first connection.

本發明一種帶構件之貼著裝置,是將複數黏著帶以預訂間隔同時貼著於基板板面,該帶構件之貼著裝置包含有:帶供給機構,是由捲裝有帶構件之複數供給捲軸供給上述帶構件,且前述帶構件是於脫模帶之其中一面貼著有上述黏著帶,切斷機構,是僅將由上述供給捲軸拉出之上 述帶構件之上述脫模帶與上述黏著帶中之上述黏著帶切斷為因應上述基板之長度尺寸;貼著機構,將被該切斷機構切斷之上述黏著帶貼著於上述基板;檢測機構,是藉由上述帶構件之終端部,檢測捲裝於上述複數供給捲軸之帶構件之殘量在預定以下之情況;及連接裝置,用以連接捲裝於使用中之複數供給捲軸之上述帶構件之終端部、與捲裝於欲更換之新的複數供給捲軸之帶構件之始端部;其中,若上述檢測機構檢測出複數之供給捲軸中,至少一個捲裝於供給捲軸之帶構件的殘量在預定量以下的情況,則根據該檢測,整批更換使用中之複數供給捲軸,並且藉由上述連接裝置,將捲裝於使用中之複數供給捲軸之複數帶構件的終端部與捲裝於欲更換之新的複數供給捲軸之複數帶構件之始端部一次連接。 The adhesive device with a component is characterized in that the plurality of adhesive tapes are simultaneously attached to the surface of the substrate at a predetermined interval. The adhesive device of the tape member comprises: a tape feeding mechanism, which is a plurality of supplies provided by the tape-loading member. The reel is supplied with the belt member, and the belt member has the adhesive tape attached to one side of the release belt, and the cutting mechanism is only pulled out from the supply reel The release tape of the tape member and the adhesive tape in the adhesive tape are cut into a length dimension corresponding to the substrate; and the adhesive tape that is cut by the cutting mechanism is attached to the substrate; The mechanism is configured to detect, by the end portion of the belt member, a residual amount of the belt member wound on the plurality of supply spools; and a connecting device for connecting the plurality of supply spools in use a terminal end portion of the belt member and a start end portion of the belt member wound on the new plurality of supply reels to be replaced; wherein the detecting means detects at least one of the plurality of supply reels and is wound on the belt member of the supply reel When the residual amount is less than or equal to the predetermined amount, the plurality of supply reels in use are replaced in batches according to the detection, and the end portions and the reels of the plurality of supply members of the plurality of supply reels are wound by the connecting means. The beginning end of the plurality of belt members mounted on the new plurality of supply spools to be replaced is connected once.

本發明帶構件之供給方法,是由供給捲軸供給在脫模帶之其中一面貼著有黏著帶之帶構件,且前述帶構件之供給方法包含有下述步驟:由捲裝有上述帶構件之複數供給捲軸供給上述帶構件;藉由上述帶構件之終端部,檢測捲裝於上述複數供給捲軸之帶構件之殘量在預定以下之情況;當上述複數供給捲軸中,至少一個供給捲軸之帶構件的殘量在預定以下時,整批更換上述複數供給捲軸;及根據上述帶構件之終端部的檢測,將使用中之複數供給卷軸整批更換為新的複數供給捲軸,並且將捲裝於使用中之複數供給捲軸之複數帶構件之終端部與捲裝於欲更換之新的複數供給捲軸之複數帶構件之始端部一次連接。 The belt member is supplied from the supply reel by a belt member to which an adhesive tape is attached to one side of the release belt, and the supply method of the belt member includes the following steps: The plurality of supply reels are supplied to the belt member; and the end portion of the belt member detects that the residual amount of the belt member wound on the plurality of supply spools is less than or equal to a predetermined value; and at least one of the plurality of supply spools When the residual amount of the component is less than or equal to predetermined, the plurality of supply reels are replaced in batches; and according to the detection of the end portion of the belt member, the plurality of supply reels in use are replaced in batches into a new plurality of supply reels, and the package is packaged in The end portion of the plurality of belt members of the plurality of supply spools in use is once connected to the beginning end of the plurality of belt members wound on the new plurality of supply spools to be replaced.

根據本發明,若檢測出複數供給捲軸中至少一個捲裝於供給捲軸之帶構件之殘量在預定以下,則根據該檢測整批更換複數供給捲軸,而且在其更換時,一次連接使用中之複數帶構件之終端部與業經更換之新的複數供給捲軸之帶構件之始端部。 According to the present invention, if it is detected that at least one of the plurality of supply reels has a residual amount of the tape member wound on the supply reel below a predetermined value, the plurality of supply reels are replaced in batches according to the detection, and when the replacement is performed, one connection is used. The end portion of the end member of the plurality of belt members and the belt member of the new plurality of supply spools that have been replaced.

因此,複數供給捲軸之更換可整批進行,藉此可降低供給捲軸之更換頻率,達到更換作業之效率提昇,而且由於將使用中之複數帶構件之終端部與欲更換之新的複數供給捲軸之帶構件之始端部同時連接,因此用以得到待構件之運行路性之連接作業也可迅速且有效率地進行。 Therefore, the replacement of the plurality of supply reels can be performed in batches, whereby the frequency of replacement of the supply reels can be reduced, the efficiency of the replacement operation can be improved, and the end portions of the plurality of belt members in use and the new plurality of supply reels to be replaced are replaced. Since the beginning ends of the belt members are simultaneously connected, the joining work for obtaining the running path of the members can be performed quickly and efficiently.

1,1a~1n‧‧‧半導體元件 1,1a~1n‧‧‧Semiconductor components

1A‧‧‧串列 1A‧‧‧Listing

2,2a~2n‧‧‧引線 2,2a~2n‧‧‧ leads

3‧‧‧黏著帶 3‧‧‧Adhesive tape

4‧‧‧脫模帶 4‧‧‧Mold strip

5‧‧‧柵極電極 5‧‧‧ gate electrode

6a,6b‧‧‧匯流排電極 6a, 6b‧‧‧ bus bar electrodes

7‧‧‧背面電極 7‧‧‧Back electrode

11‧‧‧帶構件 11‧‧‧With components

11E‧‧‧終端部 11E‧‧‧End Department

11F‧‧‧始端部 11F‧‧‧Beginning

12‧‧‧帶供給機構 12‧‧‧With supply agency

13‧‧‧支持體 13‧‧‧Support

14‧‧‧基座構件 14‧‧‧Base member

15‧‧‧臂 15‧‧‧arm

15a‧‧‧固定臂 15a‧‧‧Fixed Arm

15b‧‧‧可動臂 15b‧‧‧ movable arm

16‧‧‧卡止凹部 16‧‧‧Card recess

17‧‧‧支軸 17‧‧‧ fulcrum

19‧‧‧供給捲軸 19‧‧‧Supply reel

21‧‧‧軸承 21‧‧‧ bearing

22‧‧‧軸環 22‧‧‧ collar

23‧‧‧固定用環 23‧‧‧Fixed ring

24‧‧‧把手 24‧‧‧Hands

26‧‧‧擺動桿 26‧‧‧swing rod

27‧‧‧擺動輥子 27‧‧‧Swing roller

28‧‧‧搖動軸 28‧‧‧Shake axis

29‧‧‧卡合孔 29‧‧‧Snap hole

30‧‧‧卡止銷 30‧‧‧ card sales

31‧‧‧第1導輥 31‧‧‧1st guide roller

32‧‧‧第2導輥 32‧‧‧2nd guide roller

33‧‧‧切斷機構 33‧‧‧cutting mechanism

34‧‧‧導引溝 34‧‧‧ Guide groove

35‧‧‧滑輪構件 35‧‧‧ pulley components

35a‧‧‧吸引孔 35a‧‧‧Attraction hole

36‧‧‧輥子 36‧‧‧ Roller

37‧‧‧壓缸 37‧‧‧Cylinder

37a‧‧‧突出面 37a‧‧‧Face

38‧‧‧切斷機 38‧‧‧cutting machine

39‧‧‧流通輥子 39‧‧‧Circulation rollers

40‧‧‧檯 40‧‧‧

41‧‧‧貼著頭 41‧‧‧ affixed to the head

41a‧‧‧突條 41a‧‧‧

42‧‧‧上下驅動源 42‧‧‧Up and down drive source

43‧‧‧剝離輥子單元 43‧‧‧ peeling roller unit

43a‧‧‧輥子 43a‧‧‧ Roller

45‧‧‧傳送輥子 45‧‧‧Transfer roller

46‧‧‧風管 46‧‧‧ duct

51‧‧‧檢測部 51‧‧‧Detection Department

52‧‧‧第1感測器 52‧‧‧1st sensor

53‧‧‧第2感測器 53‧‧‧2nd sensor

53a‧‧‧投光部 53a‧‧‧Projecting Department

53b‧‧‧受光部 53b‧‧‧Receiving Department

55‧‧‧連接裝置 55‧‧‧Connecting device

56‧‧‧基體 56‧‧‧ base

57‧‧‧第1安裝部 57‧‧‧First Installation Department

58‧‧‧第2安裝部 58‧‧‧Second Installation Department

59‧‧‧空間部 59‧‧‧ Space Department

61‧‧‧第1線性驅動源 61‧‧‧1st linear drive source

61a‧‧‧驅動軸 61a‧‧‧Drive shaft

62‧‧‧第2線性驅動源 62‧‧‧2nd linear drive source

62a‧‧‧驅動軸 62a‧‧‧Drive shaft

63‧‧‧第1安裝板 63‧‧‧1st mounting plate

64‧‧‧第2安裝板 64‧‧‧2nd mounting plate

65‧‧‧連接單元 65‧‧‧ Connection unit

66‧‧‧承接構件 66‧‧‧Receiving components

66a‧‧‧凸部 66a‧‧‧ convex

67‧‧‧本體部 67‧‧‧ Body Department

67a‧‧‧突出面 67a‧‧‧Face

68‧‧‧定位溝 68‧‧‧Positioning trench

71‧‧‧第1吸引孔 71‧‧‧1st attraction hole

72‧‧‧第2吸引孔 72‧‧‧2nd attraction hole

73‧‧‧貫通孔 73‧‧‧through holes

74‧‧‧超音波工具 74‧‧‧Ultrasonic tools

75‧‧‧超音波振動子 75‧‧‧Supersonic vibrator

76‧‧‧焊頭 76‧‧‧welding head

77‧‧‧插通孔 77‧‧‧ inserted through hole

78‧‧‧安裝螺栓 78‧‧‧Installation bolts

79‧‧‧彈簧 79‧‧‧ Spring

81‧‧‧螺帽 81‧‧‧ nuts

82‧‧‧切斷溝 82‧‧‧ cut the ditch

83‧‧‧切斷機 83‧‧‧Cutting machine

83a‧‧‧刃 83a‧‧‧Blade

84‧‧‧支軸 84‧‧‧ fulcrum

85‧‧‧托座 85‧‧‧ bracket

86‧‧‧長孔 86‧‧‧ long hole

87‧‧‧卡止軸 87‧‧‧ card axle

88‧‧‧壓縮彈簧 88‧‧‧Compression spring

91‧‧‧搖動構件 91‧‧‧Shake member

92‧‧‧大徑孔 92‧‧‧ Large diameter hole

圖1為顯示本發明之一實施形態之黏著帶之貼著裝置之概略構成圖。 Fig. 1 is a schematic block diagram showing an attachment device of an adhesive tape according to an embodiment of the present invention.

圖2為設有使用於上述貼著裝置之供給捲軸之帶供給機構之正面圖。 Fig. 2 is a front elevational view showing a tape supply mechanism provided with a supply reel used in the above-mentioned applicator.

圖3為圖2所示之帶供給機構之側面圖。 Figure 3 is a side elevational view of the tape supply mechanism of Figure 2;

圖4為使用於圖1所示之貼著裝置之連接裝置之平面圖。 Figure 4 is a plan view of the connecting device used in the attaching device shown in Figure 1.

圖5為圖4所示之連接裝置之正面圖。 Figure 5 is a front elevational view of the connecting device of Figure 4.

圖6為顯示設置於上述連接裝置之第1安裝板之3個連接單元。 Fig. 6 is a view showing three connection units provided on the first mounting plate of the above-mentioned connecting device.

圖7為顯示黏著帶之切斷機構之圖。 Fig. 7 is a view showing a cutting mechanism of the adhesive tape.

圖8為藉由上述切斷機構切斷帶構件之黏著帶之圖。 Fig. 8 is a view showing the adhesive tape of the belt member cut by the cutting mechanism.

圖9A為顯示設有連接裝置之帶構件之切斷機之托座的正面圖。 Fig. 9A is a front elevational view showing the holder of the cutter of the belt member provided with the connecting device.

圖9B為顯示設有連接裝置之帶構件之切斷機之托座的側面圖。 Fig. 9B is a side view showing the holder of the cutter of the belt member provided with the connecting device.

圖10為將上述托座之一部份截面之側面圖。 Figure 10 is a side elevational view, partly in section, of the bracket.

圖11A為切斷前面之供給捲軸之帶構件之終端部的說明圖。 Fig. 11A is an explanatory view of a terminal portion of a belt member that cuts a front supply spool;

圖11B為切斷前面之供給捲軸之帶構件之終端部的放大圖。 Fig. 11B is an enlarged view of the end portion of the belt member that cuts the front supply spool.

圖12A為顯示舊的供給捲軸之帶構件之終端部業經切斷之狀態的說明圖。 Fig. 12A is an explanatory view showing a state in which the end portion of the belt member of the old supply reel is cut.

圖12B為將由新的供給捲軸拉出之帶構件之始端部重疊於切斷之帶構件之終端部時之說明圖。 Fig. 12B is an explanatory view showing a state in which the beginning end portion of the belt member pulled out by the new supply reel is superposed on the end portion of the cut belt member.

圖12C為將重疊之帶構件之終端部與始端部超音波接合之狀態的說明圖。 Fig. 12C is an explanatory view showing a state in which the end portion of the overlapping tape member is ultrasonically joined to the start end portion.

圖13為顯示該發明之其他實施形態之連接裝置之正面圖。 Fig. 13 is a front elevational view showing a connecting device according to another embodiment of the present invention.

圖14A為將複數之半導體元件藉由複數引線連接為一列之串列之平面圖。 Fig. 14A is a plan view showing a series of a plurality of semiconductor elements connected in a line by a plurality of leads.

圖14B為將複數之半導體元件藉由複數引線連接為一列之串列之一部份的側面圖。 Fig. 14B is a side view showing a portion in which a plurality of semiconductor elements are connected in a series by a plurality of leads.

較佳實施例之詳細說明 Detailed description of the preferred embodiment

以下、參照圖式說明本發明之實施形態。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

圖1乃至圖12顯示本發明之一實施形態,圖1顯示使用帶構件11之後述之連接裝置55之黏著帶的貼著裝置。該貼著裝置具有用以供給上述帶構件11之帶供給機構12。 1 to 12 show an embodiment of the present invention, and Fig. 1 shows an attaching device for an adhesive tape using a connecting member 55 which will be described later with a belt member 11. The attaching device has a tape supply mechanism 12 for supplying the above-described belt member 11.

上述帶供給機構12如圖2與圖3所示,具有支持體13。該支持體13是由將板面垂直配置之板狀之基座構件14、及分別水平地突出設置於該基座構件14之一側面之寬度方向兩端部之一對臂15所形成。一對臂15之前端部形成朝上面開放之卡止凹部16,支軸17之一端部與他端部可裝卸地卡合支持於該卡止凹部16。 The tape supply mechanism 12 has a support 13 as shown in Figs. 2 and 3 . The support body 13 is formed by a plate-shaped base member 14 in which the plate faces are arranged vertically, and a pair of arms 15 which are horizontally protruded from the both ends in the width direction of one side surface of the base member 14. The front end portion of the pair of arms 15 is formed with a locking recess 16 open to the upper surface, and one end of the support shaft 17 is detachably engaged with the other end portion to be supported by the locking recess portion 16.

再者,上述帶構件11如圖7與圖8所示,在由薄膜狀之樹脂構成之脫模帶4之其中一面,貼著由具有導電性之熱硬化性之樹脂構成之黏著帶3而構成。 Further, as shown in FIG. 7 and FIG. 8, the tape member 11 is adhered to one of the release tapes 4 made of a film-like resin, and is adhered to an adhesive tape 3 made of a conductive thermosetting resin. Composition.

上述臂15由一端安裝於上述基座構件14之固定臂15a、及可調整安裝位置地設置於該固定臂15a之他端之可動臂15b所構成,可將臂15之全長因應於如後述之可旋轉地設置於上述支軸17之供給捲軸19之外徑尺寸而調整。再者,上述卡止凹部16形成於上述可動臂15b之前端部。 The arm 15 is composed of a fixed arm 15a whose one end is attached to the base member 14 and a movable arm 15b which is provided at the other end of the fixed arm 15a at an adjustable mounting position, and the entire length of the arm 15 can be adapted as will be described later. The outer diameter of the supply spool 19 rotatably provided on the support shaft 17 is adjusted. Further, the locking recessed portion 16 is formed at an end portion of the movable arm 15b.

上述支軸17設有複數、本實施型態中為3個之上述供給捲軸19。也就是說,各供給捲軸19在徑方向中心部設有軸承21,且使該軸承21可裝卸地外嵌於上述支軸17而可旋轉地受支持。 The support shaft 17 is provided with a plurality of the supply spools 19 which are three in the present embodiment. In other words, each of the supply reels 19 is provided with a bearing 21 at the center portion in the radial direction, and the bearing 21 is detachably fitted to the support shaft 17 to be rotatably supported.

如圖2所示,在上述支軸17,軸環22之端面抵接於上述軸承21之內輪(未圖示)之端面而分別裝設於位於中央之供給捲軸19之兩側面、與位於兩側之供給捲軸19之一 側面之間,固定用環23使端面抵接於上述內輪之端面而裝設於位於兩側之2個供給捲軸19之另一側面。 As shown in Fig. 2, in the support shaft 17, the end faces of the collars 22 abut against the end faces of the inner rings (not shown) of the bearing 21, and are respectively mounted on both side faces of the supply spool 19 located at the center. One of the supply spools 19 on both sides Between the side faces, the fixing ring 23 abuts against the end surface of the inner ring and is attached to the other side surface of the two supply reels 19 on both sides.

上述固定用環23螺合有把手24,且使該把手24朝螺入方向旋轉,藉此可將上述固定用環23固定於上述支軸17。 The fixing ring 23 is screwed with the handle 24, and the handle 24 is rotated in the screwing direction, whereby the fixing ring 23 can be fixed to the support shaft 17.

藉此,裝設於上述支軸17之3個供給捲軸19藉上述軸環22與上述固定用環23,而相對上述支軸17以預定間隔定位且固定。 Thereby, the three supply reels 19 attached to the support shaft 17 are positioned and fixed at predetermined intervals with respect to the support shaft 17 by the collar 22 and the fixing ring 23.

接著、若將上述支軸17由上述臂15之卡止凹部16拆下,且由該支軸17拆下一對固定用環23,則可將3個供給捲軸19由上述支軸17拆下。 Next, when the support shaft 17 is detached from the locking recess 16 of the arm 15, and the pair of fixing rings 23 are removed by the support shaft 17, the three supply spools 19 can be detached from the support shaft 17. .

也就是說,3個供給捲軸19相對於上述支持體13可與上述支軸17一次裝卸,例如若欲先將末使用之供給捲軸19安裝於其他支軸17的話,在拆下用盡之供給捲軸19後,可將未使用之3個供給捲軸19一次安裝於上述支持體13。 In other words, the three supply reels 19 can be attached and detached to the support shaft 17 at a time with respect to the support body 13. For example, if the supply reel 19 to be used is to be attached to the other support shafts 17, the exhausted supply is removed. After the spool 19, the three supply spools 19 that are not used can be attached to the support 13 at a time.

再者,雖未圖示,但設置成旋轉驅動之摩擦車可彈性的壓接於上述供給捲軸19之外周面,藉由該摩擦車,可使上述供給捲軸19驅動旋轉。該摩擦車亦可分別驅動使複數之供給捲軸19個別旋轉,亦可驅動複數之供給捲軸19整批旋轉。 Further, although not shown, the friction motor provided to be rotationally driven is elastically pressure-bonded to the outer circumferential surface of the supply reel 19, and the supply reel 19 can be driven to rotate by the friction car. The friction car can also be driven to individually rotate the plurality of supply spools 19, or to drive a plurality of supply spools 19 to rotate in a batch.

各供結捲軸19捲裝有上述帶構件11。如圖1所示,捲裝於各供給捲軸19之帶構件11被拉出,分別卡合於可旋轉地設置於擺動桿26之一端部之擺動輥子27(皆僅揭示1個)。 Each of the supply spools 19 is wound with the above-described belt member 11. As shown in Fig. 1, the belt members 11 wound around the supply spools 19 are pulled out, and are respectively engaged with the swinging rollers 27 (only one of which is disclosed) rotatably provided at one end of the swinging lever 26.

上述擺動桿26之長邊方向的中途部可藉由搖動軸28而可搖動地受樞支,且因應於其搖動角度,由上述供給捲軸19拉出之上述帶構件11之鬆弛長度會變化。 The intermediate portion of the swing lever 26 in the longitudinal direction can be pivotally supported by the rocking shaft 28, and the slack length of the belt member 11 pulled by the supply spool 19 changes depending on the swing angle.

上述擺動桿26之一端部沿著長邊方向形成有細長的卡合孔29。上述擺動桿26由圖1實線所示之位置搖動到鏈線所示之位置時,可使卡止銷30卡合於上述卡合孔29。藉此,可保持上述擺動桿26不能搖動。也就是說,可阻止由上述供給捲軸19拉出之上述帶構件11之鬆弛長度產生變化。 One end portion of the swing lever 26 is formed with an elongated engagement hole 29 along the longitudinal direction. When the swing lever 26 is pivoted to the position indicated by the chain line by the position shown by the solid line in FIG. 1, the locking pin 30 can be engaged with the engaging hole 29. Thereby, the swing lever 26 can be kept from being shaken. That is, it is possible to prevent the slack length of the above-described belt member 11 pulled out by the above-described supply spool 19 from changing.

再者,上述卡止銷30是藉由未圖示之電磁圈等之驅動源而朝軸方向驅動,當上述電磁圈作動時,會卡合於上述卡合孔29。 Further, the locking pin 30 is driven in the axial direction by a driving source such as an electromagnetic coil (not shown), and is engaged with the engaging hole 29 when the electromagnetic ring is actuated.

由3個供給捲軸19拉出之各個帶構件11由構成導引機構之第1導輥31與第2導輥32所導引而導至切斷機構33。 Each of the belt members 11 pulled out by the three supply spools 19 is guided by the first guide roller 31 and the second guide roller 32 that constitute the guide mechanism, and guided to the cutting mechanism 33.

上述擺動輥子27及上述一對導輥31、32之外周面是如圖10所示,形成有截面形狀為梯形之導引溝34。該導引溝34之底邊設定為寬度尺寸與上述帶構件11之寬度尺寸相同。藉此,可防止被導引溝34導引而運行之上述帶構件11對寬度方向偏位。 The outer circumferential surface of the oscillating roller 27 and the pair of guide rollers 31 and 32 is formed with a guide groove 34 having a trapezoidal cross-sectional shape as shown in FIG. The bottom edge of the guide groove 34 is set to have the same width dimension as that of the belt member 11 described above. Thereby, it is possible to prevent the above-described belt member 11 that is guided by the guide groove 34 from being displaced in the width direction.

如圖7所示,上述切斷機構33具有滑輪構件35。該滑輪構件35之其中一側面之上下方向之兩端角部分別安裝有可旋轉之輥子36(僅圖示1個滑輪材)。 As shown in FIG. 7, the above-described cutting mechanism 33 has a pulley member 35. A rotatable roller 36 (only one pulley material is shown) is attached to each of the corner portions at one of the upper and lower sides of the one side of the pulley member 35.

由3個供給捲軸19拉出之各個帶構件11被上述一 對輥子36所導引,而沿著上述滑輪構件35之側面運行。此時,上述帶構件11之脫模帶4朝向與上述滑輪構件35之側面對向之內側,黏著帶3朝向外側。再者,上述各輥子36宜於外周面形成用以導引帶構件11且截面為梯形之導引溝。 Each of the belt members 11 pulled out by the three supply spools 19 is one of the above Guided by the rollers 36, running along the sides of the pulley member 35 described above. At this time, the release tape 4 of the belt member 11 faces the inner side opposite to the side surface of the pulley member 35, and the adhesive tape 3 faces outward. Further, it is preferable that each of the rollers 36 is formed with a guide groove for guiding the belt member 11 and having a trapezoidal cross section on the outer peripheral surface.

上述滑輪構件35之帶構件11之運行面側設有藉由壓缸37驅動之切斷機38。設定上述切斷機38之衝程,使該切斷機38藉由上述壓缸37而被驅動,藉此如圖8所示,僅切斷貼著於上述帶構件11之脫模帶4之黏著帶3。 A cutter 38 driven by a cylinder 37 is provided on the running surface side of the belt member 11 of the pulley member 35. The stroke of the cutter 38 is set such that the cutter 38 is driven by the cylinder 37, whereby only the adhesion of the release belt 4 attached to the belt member 11 is cut as shown in FIG. With 3.

此時,為了確實地切斷黏著性之上述黏著帶3,宜將上述脫模帶4切斷厚度之約一半左右。 At this time, in order to reliably cut the adhesive tape 3, it is preferable to cut the release tape 4 by about half of the thickness.

在上述滑輪構件35之側面,形成有開口之連通吸引泵之多數吸引孔35a,且藉使上述吸引孔35a產生吸引力,帶構件11可吸著保持於上述滑輪構件35之側面。 A plurality of suction holes 35a that communicate with the suction pump are formed on the side surface of the pulley member 35, and the belt member 11 is slidably held by the side surface of the pulley member 35 by the attraction of the suction hole 35a.

由3個供給捲軸19取出之3條帶構件11係與垂直相交於圖1之紙面之方向以預定間隔平行地運行,上述切斷機構33具有3個切斷機38,且各切斷機38以對應於3條帶構件11的間隔配置。再者,3個切斷機38亦可由1個壓缸37驅動,亦可分別由不同的壓缸37來驅動,主要就是只要可一次切斷3條帶構件11之黏著帶3即可。 The three belt members 11 taken out from the three supply spools 19 are operated in parallel at a predetermined interval in a direction perpendicularly intersecting the paper surface of Fig. 1, and the cutting mechanism 33 has three cutters 38, and each cutter 38 It is arranged at intervals corresponding to the three strip members 11. Further, the three cutters 38 may be driven by one cylinder 37 or may be driven by different cylinders 37, mainly as long as the adhesive tapes 3 of the three belt members 11 can be cut at one time.

如圖1所示,經上述切斷機構33切斷黏著帶3之3條帶構件11藉由形成於複數之流通輥子39之外周面之截面梯形的導引溝(未圖示),將貼著有上述黏著帶3之面向下而朝圖1箭頭所示之方向被導引。 As shown in Fig. 1, the three strip members 11 that cut the adhesive tape 3 by the cutting mechanism 33 are attached to a guide trap (not shown) having a trapezoidal cross section formed on the outer peripheral surface of the plurality of flow rollers 39. The face of the adhesive tape 3 is guided downward in the direction indicated by the arrow in Fig. 1.

接著,上述3條帶構件11被導引,在與業經朝X、 Y、Z及θ方向驅動之檯40定位之作為基板之半導體元件1之上面對向之部分,藉由上述流通輥子39而與上述半導體元件1平行且對半導體元件1之寬度方向以預定間隔分隔運行。 Then, the above three strip members 11 are guided, and the direction is X, The facing portions of the semiconductor element 1 as the substrate, which are positioned in the Y, Z and θ directions, are aligned with the semiconductor element 1 by the flow roller 39 and at predetermined intervals in the width direction of the semiconductor element 1. Separate runs.

由上述切斷機構33切斷成上述黏著帶3之預定之長度的部分搬送到與業經定位之上述半導體元件1之上面對向之位置時,上述半導體元件1藉由上述檯40而朝上昇方向驅動到接近上述黏著帶3之位置後,配置於上述半導體元件1之上方之作為貼著手段之貼著頭41藉由上下驅動源42而朝下降方向驅動。 When the portion cut to a predetermined length of the adhesive tape 3 by the cutting mechanism 33 is transported to a position facing the semiconductor element 1 that is positioned, the semiconductor element 1 is raised by the stage 40. After the direction is driven to a position close to the adhesive tape 3, the adhering head 41, which is disposed above the semiconductor element 1, as a bonding means, is driven in the descending direction by the vertical driving source 42.

上述貼著頭41之下面以與3條帶構件11對應之間隔突出設置有3個突條41a。因此,當上述貼著頭41朝下降方向驅動時,藉由該3個突條41a,3條黏著帶3經由脫模帶4而按壓於上述半導體元件1之上面。藉此,上述黏著帶3貼著於上述半導體元件1之上面。也就是說,上述半導體元件1之上面同時貼著有3條黏著帶3。 Three ribs 41a are protruded from the lower surface of the above-mentioned sticking head 41 at intervals corresponding to the three belt members 11. Therefore, when the attaching head 41 is driven in the descending direction, the three adhesive strips 3 are pressed against the upper surface of the semiconductor element 1 via the release tape 4 by the three protrusions 41a. Thereby, the adhesive tape 3 is attached to the upper surface of the semiconductor element 1. That is, three adhesive tapes 3 are attached to the upper surface of the semiconductor element 1 at the same time.

上述黏著帶3貼著於半導體元件1之上述帶構件11之殘餘的脫模帶4卡合於剝離輥子單元43之輥子43a。該剝離輥子單元43往圖1之箭頭記號X所示之方向驅動時,脫模帶4由上述黏著膠帶3剝離。 The release tape 4 to which the adhesive tape 3 is attached to the tape member 11 of the semiconductor element 1 is engaged with the roller 43a of the peeling roller unit 43. When the peeling roller unit 43 is driven in the direction indicated by the arrow mark X in Fig. 1, the release tape 4 is peeled off by the above-mentioned adhesive tape 3.

由上述黏著帶3剝離之3條脫模帶4,分別通過使外周面轉接之一對傳送輥子45間後,上述脫模帶4通過藉由風壓朝傳送方向導引之風管46。一對傳送輥子45之至少一者藉由未圖示之驅動源驅動旋轉。該傳送輥子45亦可對應 於複數脫模帶4之各個而個別設置,亦可整批夾著複數脫模帶4而整批傳送。 The three release tapes 4 which are peeled off by the above-mentioned adhesive tape 3 are respectively transferred between the transfer rollers 45 by the outer peripheral surface, and the release tape 4 is guided by the air duct 46 guided by the wind pressure in the conveyance direction. At least one of the pair of transport rollers 45 is driven to rotate by a drive source (not shown). The conveying roller 45 can also correspond The individual stripping strips 4 are individually disposed, and the plurality of stripping strips 4 may be sandwiched and transported in batches.

脫模帶4由貼著於上述半導體元件1之黏著帶3剝離時,藉由轉接之一對傳送輥子45,上述脫模帶4往箭頭方向傳送。藉此,切斷成預定長度之新的黏著帶3位於與定位在預定位置之半導體元件1之上方對向,重複進行上述之貼著作業。 When the release tape 4 is peeled off by the adhesive tape 3 attached to the semiconductor element 1, the transfer roller 45 is transferred by one of the transfer rollers 45 in the direction of the arrow. Thereby, the new adhesive tape 3 cut into a predetermined length is placed opposite to the semiconductor element 1 positioned at a predetermined position, and the above-mentioned pasting work is repeated.

在上述帶構件11之路徑,作為檢測機構之檢測部51配置於較上述切斷機構33上游側,且前述檢測部51是檢測由保持於上述帶供給機構12之支持體13之3個供給捲軸19取出之帶構件11之殘量在預定以下之情況以及上述路徑沒有帶構件11之情況。 In the path of the belt member 11, the detecting portion 51 as the detecting means is disposed on the upstream side of the cutting mechanism 33, and the detecting portion 51 detects the three supply spools supported by the support body 13 of the belt supply mechanism 12. The case where the residual amount of the taken-out belt member 11 is less than or equal to the predetermined one and the above-mentioned path has no belt member 11.

上述檢測部51具有與運行之3條帶構件11對向設置之例如由光感測器構成之第1感測器52與第2感測器53。再者,圖1中,在3個第1感測器52與第2感測器53之中僅圖示1個。 The detecting unit 51 has a first sensor 52 and a second sensor 53 which are provided, for example, by a photosensor, which are disposed opposite to the three belt members 11 that are operated. In addition, in FIG. 1, only one of the three first sensors 52 and the second sensors 53 is shown.

上述第1感測器52構成為,捲裝於供給捲軸19之帶構件11在預定量以下,且未貼著有黏著帶3之脫模帶4之終端部取出時,根據黏著帶3與脫模帶4之反射光量的不同來檢測上述終端部。 The first sensor 52 is configured such that when the tape member 11 wound on the supply reel 19 is taken up by a predetermined amount or less and the end portion of the release tape 4 to which the adhesive tape 3 is not attached is taken out, the adhesive tape 3 is removed. The terminal portion is detected by the difference in the amount of reflected light of the mold tape 4.

上述第2感測器53具有夾著上述帶構件11而對向配置之投光部53a與受光部53b,用以檢測由投光部53a出射之光是否由受光部53b受光,也就是投光部53a與受光部53b之間沒有帶構件11時檢測該情況。 The second sensor 53 has a light projecting portion 53a and a light receiving portion 53b that are opposed to each other with the belt member 11 interposed therebetween, and detects whether or not the light emitted from the light projecting portion 53a is received by the light receiving portion 53b, that is, the light is projected. This is detected when there is no belt member 11 between the portion 53a and the light receiving portion 53b.

上述第1感測器52檢測到帶構件11之終端部被取出,也就是由供結捲軸19檢測到脫模帶4之未貼著有黏著帶3之終端部被取出時,根據其檢測信號,停止來自上述各供給捲軸19之由上述傳送輥子45進行之帶構件11之拉出動作。 The first sensor 52 detects that the end portion of the tape member 11 is taken out, that is, when the end portion of the release tape 4 that is not attached to the adhesive tape 3 by the supply reel 19 is taken out, according to the detection signal thereof. The pulling operation of the belt member 11 by the above-described conveying roller 45 from each of the supply spools 19 is stopped.

也就是說,上述檢測部51之3個第1感測器52是設置成分別檢測由3個供給捲軸19取出之3條帶構件11之終端部,但當其中之至少1個第1感測器52檢測出帶構件11之終端部時,則來自3個供給捲軸19之帶構件11的拉出動作同時停止。 In other words, the three first sensors 52 of the detecting unit 51 are provided to detect the end portions of the three strip members 11 taken out by the three supply reels 19, but at least one of the first sensing portions. When the end portion of the belt member 11 is detected, the pulling operation of the belt members 11 from the three supply spools 19 is simultaneously stopped.

換言之,預先捲裝於3個供給捲軸19之帶構件11的長度、或者各供給捲軸19之帶構件11之使用量有差異,有時候各個第1感測器52無法同時檢測出帶構件11之終端部。 In other words, the length of the belt member 11 previously wound around the three supply spools 19 or the amount of use of the belt members 11 of the supply spools 19 is different, and sometimes the respective first sensors 52 cannot simultaneously detect the belt members 11 Terminal department.

即使是那樣的情況,由於捲裝於3個供給捲軸19之帶構件11之殘量有很大的差異,因此藉1組第1感測器52檢測出帶構件11之終端部,可停止來自3個供給捲軸19之帶構件11的拉出。 Even in such a case, since the remaining amount of the belt member 11 wound around the three supply spools 19 is greatly different, the end portion of the belt member 11 is detected by the first group of first sensors 52, and the stop can be stopped. The belt members 11 of the three supply spools 19 are pulled out.

來自供給捲軸19之帶構件11的拉出停止之同時,在上述切斷機構33之滑輪構件35之側面形成開口之吸引孔35a產生吸引力,吸著保持上述帶構件11之較上述檢測部51下游側的部分。 At the same time as the pulling of the belt member 11 from the supply spool 19 is stopped, the suction hole 35a having an opening formed in the side surface of the pulley member 35 of the cutting mechanism 33 generates an attractive force, and the above-described detecting portion 51 is sucked and held by the belt member 11. The part on the downstream side.

接著,當使用中之3個供給捲軸19之任一帶構件11之殘量在預定以下時,則更換成新的3個供給捲軸19。接 著,由新的供給捲軸19拉出之帶構件11之始端部藉由上述連接裝置55而連接於殘留在裝置內之使用中之供給捲軸19所剩餘帶構件11之終端部。該連接裝置55如後述,配置在上述帶構件11之運行路徑之較上述檢測部51上游側的部分。 Next, when the remaining amount of any of the belt members 11 of the three supply spools 19 in use is less than or equal to a predetermined value, the new three supply spools 19 are replaced. Connect The start end portion of the belt member 11 pulled out by the new supply spool 19 is connected to the end portion of the belt member 11 remaining in the supply spool 19 remaining in use in the apparatus by the above-described connecting device 55. As will be described later, the connection device 55 is disposed on a portion of the operation path of the belt member 11 that is upstream of the detection unit 51.

再者,藉由上述第2感測器53檢測帶構件11之路徑沒有帶構件11時,根據其檢測,貼著裝置之全部動作停止。 Further, when the second sensor 53 detects the path of the belt member 11 without the belt member 11, the entire operation of the sticking device is stopped based on the detection.

上述連接裝置55是如圖4與圖5所示,具有平面形狀為字狀之基體56。該基體56之一端部設有第1安裝部57、他端部設有第2安裝部58,中間部形成有空間部59。 The connecting device 55 is as shown in FIG. 4 and FIG. 5 and has a planar shape. The base of the shape 56. One end of the base body 56 is provided with a first mounting portion 57, a second mounting portion 58 is provided at the other end portion, and a space portion 59 is formed at the intermediate portion.

上述第1安裝部57設有壓缸等之第1線性驅動源61,第2安裝部58設有第2線性驅動源62。第1、第2線性驅動源61,62之前端部朝上述空間部59突出。 The first mounting portion 57 is provided with a first linear drive source 61 such as a cylinder, and the second mounting portion 58 is provided with a second linear drive source 62. The front ends of the first and second linear drive sources 61, 62 protrude toward the space portion 59.

上述第1線性驅動源61之驅動軸61a安裝有第1安裝板63,上述第2線性驅動源62之驅動軸62a安裝有第2安裝板64而與上述第1安裝板63平行且對向。 The first mounting plate 63 is attached to the drive shaft 61a of the first linear drive source 61, and the second mounting plate 64 is attached to the drive shaft 62a of the second linear drive source 62 so as to be parallel to the first mounting plate 63.

在上述第1安裝板63,設置複數、也就是對應於設置在上述支持體13之供給捲軸19之數目之3個連接單元65之本體部67,且本體部67如圖6所示,以與由3個供給捲軸19拉出之3條帶構件11相同的間隔,如後述可彈性地變位。 In the first mounting plate 63, a plurality of main body portions 67 corresponding to the number of the supply units 19 provided in the support body 13 are provided, and the main body portion 67 is as shown in FIG. The same interval of the three belt members 11 pulled out by the three supply spools 19 is elastically displaced as will be described later.

於上述第2安裝板64,以與上述3個連接單元65對應之間隔,設有3個承接構件66。在該承接構件66之端面, 如圖5所示,沿著與上述帶構件11之運行方向垂直相交之方向形成有複數凸部66a。 In the second mounting plate 64, three receiving members 66 are provided at intervals corresponding to the three connecting units 65. At the end face of the receiving member 66, As shown in FIG. 5, a plurality of convex portions 66a are formed in a direction perpendicular to the running direction of the belt member 11.

如圖5與圖6所示,上述連接單元65具有本體部67。該本體部67之一側面之長邊方向中途部比長邊方向兩端部稍高,且在中途部形成分隔成2個之突出面67a。 As shown in FIGS. 5 and 6, the connecting unit 65 has a body portion 67. One of the side portions in the longitudinal direction of one side surface of the main body portion 67 is slightly higher than both end portions in the longitudinal direction, and two protruding surfaces 67a are formed in the middle portion.

在分隔之各突出面67a,沿著長邊方向形成有供已由上述供給捲軸19拉出之帶構件11可運行地卡合之定位溝68。該定位溝68也形成為底面具有寬度尺寸與上述帶構件11之寬度尺寸相同之截面梯形。 In each of the partitioning projections 67a, a positioning groove 68 is formed along the longitudinal direction in which the belt member 11 that has been pulled out by the supply spool 19 is operatively engaged. The positioning groove 68 is also formed such that the bottom surface has a trapezoidal cross section having a width dimension equal to the width dimension of the belt member 11.

藉此,已由上述供給捲軸19拉出之上述帶構件11藉由上述定位溝68與上述第1、第2導輥31,32而不會偏離寬度方向,被定位後可運行。再者,上述第1、第2導輥31,32也與上述本體部67一起構成上述連接單元65。 Thereby, the belt member 11 which has been pulled out by the supply spool 19 can be operated by the positioning groove 68 and the first and second guide rollers 31 and 32 without being displaced from the width direction. Further, the first and second guide rollers 31, 32 also constitute the connection unit 65 together with the main body portion 67.

在上述本體部67之一側面之位於上述第1導輥31側之長邊方向之一端部,形成有一列開口之複數第1吸引孔71,該複數第1吸引孔71是構成用以吸著保持上述帶構件11之較上述定位溝68上游側的部分之第1吸著部,在位於上述第2導輥32側之長邊方向之他端部形成有一列開口之複數第2吸引孔72,該複數第2吸引孔72是構成用以吸著保持上述帶構件11之較上述定位溝68下游側之部分之第2吸著部。 One end of one of the side faces of the main body portion 67 on the side of the first guide roller 31 in the longitudinal direction is formed with a plurality of first suction holes 71, and the plurality of first suction holes 71 are configured to be sucked The first absorbing portion that holds the portion of the belt member 11 that is upstream of the positioning groove 68 is formed with a plurality of second suction holes 72 that are open at the end portion of the second guide roller 32 in the longitudinal direction. The plurality of second suction holes 72 constitute a second absorbing portion for absorbing and holding the portion of the belt member 11 on the downstream side of the positioning groove 68.

上述本體部67之長邊方向一端部與他端部之側面設定為與形成於長邊方向中途部之定位溝68之底面相同高度。 The one end portion of the main body portion 67 in the longitudinal direction and the side surface of the other end portion are set to have the same height as the bottom surface of the positioning groove 68 formed in the middle portion in the longitudinal direction.

貫通孔73在厚度方向上穿設於上述本體部67之長邊方向中途部之分隔成2個突出面67a之間的部分。於該貫通孔73,圓柱狀之超音波工具74之前端面配置與上述定位溝68之底面相同高度或者稍微高。 The through hole 73 is bored in a thickness direction in a portion partitioned between the two protruding surfaces 67a in the middle of the longitudinal direction of the main body portion 67. In the through hole 73, the front end surface of the cylindrical ultrasonic tool 74 is disposed at the same height or slightly higher than the bottom surface of the positioning groove 68.

上述超音波工具74安裝於藉由超音波振動子75而進行超音波振動之焊頭(horn)76,且上述焊頭76安裝於上述本體部67之他側面,如後述,成為自由遊動、也就是自由搖動之構造。上述超音波工具74之前端面位於與形成有設置在上述第2安裝板64之承接構件66之凸部66a之端面對向。 The ultrasonic tool 74 is attached to a horn 76 that performs ultrasonic vibration by the ultrasonic vibrator 75, and the horn 76 is attached to the side surface of the main body portion 67, and is free to swim as will be described later. It is the structure of free shaking. The front end surface of the ultrasonic tool 74 is opposed to the end surface of the convex portion 66a on which the receiving member 66 provided on the second mounting plate 64 is formed.

藉此,上述第1安裝板63藉由上述第1線性驅動源61而驅動,且於其定位溝68卡合上述帶構件11之第1、第2導輥31,32間之部分的狀態,藉由上述第2線性驅動源62而上述第2安裝板64朝前進方向驅動時,上述承接構件66之端面之凸部66a壓接於上述超音波工具74之前端面。 The first mounting plate 63 is driven by the first linear drive source 61, and the positioning groove 68 is engaged with a portion between the first and second guide rollers 31 and 32 of the belt member 11. When the second mounting plate 64 is driven in the forward direction by the second linear drive source 62, the convex portion 66a of the end surface of the receiving member 66 is pressed against the front end surface of the ultrasonic tool 74.

藉此,如後述,新的帶構件11之脫模帶4超音波接合於使用中之帶構件11之脫模帶4。 Thereby, as will be described later, the release belt 4 of the new belt member 11 is ultrasonically joined to the release belt 4 of the belt member 11 in use.

上述本體部67之四角部穿設有插通孔77,且豎立設置於上述第1安裝板63之安裝螺栓78在具有遊隙之狀態下插通於各插通孔77。各安裝螺栓78裝設有可彈性支持上述本體部67之作為彈性構件之彈簧79,且由上述螺栓78之上述插通孔77突出之前端部螺合有螺帽81。 The four corner portions of the main body portion 67 are provided with insertion holes 77, and the mounting bolts 78 that are erected on the first mounting plate 63 are inserted into the respective insertion holes 77 with a play. Each of the mounting bolts 78 is provided with a spring 79 as an elastic member that elastically supports the main body portion 67, and a nut 81 is screwed to the front end portion of the bolt 78 by the insertion hole 77.

藉此,3個連接單元56之本體部67可彈性變位地安裝於上述第1安裝板63,而各本體部67之定位溝68成為與 由3個供給捲軸19拉出之3條帶構件11相同之間隔。 Thereby, the main body portion 67 of the three connecting units 56 is elastically displaceably attached to the first mounting plate 63, and the positioning grooves 68 of the main body portions 67 become The three strip members 11 pulled out by the three supply spools 19 are equally spaced.

上述本體部67之分隔成2個之突出面67a中,較上述超音波工具74之前端面露出之處靠近一端部、也就是在相對於帶構件11之運行方向,位於上述超音波工具74較上游側之突出面67a,垂直相交於上述定位溝68之切斷溝82以與上述定位溝68相同之深度形成。也就是說,3個本體部67之定位溝68形成為一列。 The protruding portion 67a of the main body portion 67 which is partitioned into two of the protruding surfaces 67a is located closer to the one end portion than the front end surface of the ultrasonic tool 74, that is, in the running direction with respect to the belt member 11, and is located upstream of the ultrasonic tool 74. The side protruding surface 67a and the cutting groove 82 perpendicularly intersecting the positioning groove 68 are formed at the same depth as the positioning groove 68. That is, the positioning grooves 68 of the three body portions 67 are formed in a line.

如圖9A、圖9B所示,在上述切斷溝82是構成為,使構成上述連接單元65之要素之一且在外周面形成有刃83a之圓盤狀切斷機83之其外周面彈性地壓接於上述切斷溝82之底面,使之旋轉並驅動。 As shown in FIG. 9A and FIG. 9B, the cutting groove 82 is configured such that the outer peripheral surface of the disk-shaped cutter 83 which is one of the elements of the connecting unit 65 and has the blade 83a formed on the outer peripheral surface thereof is elastic. The ground pressure is connected to the bottom surface of the cutting groove 82, and is rotated and driven.

即,於上述切斷機83之中心部設有支軸84。該切斷機83插入字狀之托座85之溝內,上述支軸84支持為可在形成於上述托座85之長孔86滑動。上述支軸84與設置於上述托座85之兩側外面之卡止軸87之間設有壓縮彈簧88。藉此,上述切斷機83朝由上述托座85之前端突出之方向賦與彈性勢能。 That is, the support shaft 84 is provided in the center part of the said cutter 83. The cutter 83 is inserted In the groove of the bracket 85 of the shape, the support shaft 84 is supported to be slidable in the long hole 86 formed in the bracket 85. A compression spring 88 is provided between the support shaft 84 and the locking shaft 87 provided on the outer sides of the bracket 85. Thereby, the cutter 83 is biased toward the direction in which the front end of the bracket 85 protrudes.

上述托座85在上述連接裝置55之基體56的空間部59,沿著形成於如圖6箭頭記號所示般並列設置之3個本體部67之突出面67a之切斷溝82,藉由壓缸等之第3線性驅動源(未圖示)而驅動往返。 The bracket 85 is pressed by the cutting groove 82 of the protruding surface 67a of the three main body portions 67 which are formed in parallel with each other as shown by the arrow mark in Fig. 6 in the space portion 59 of the base 56 of the connecting device 55. The third linear drive source (not shown) such as a cylinder drives the shuttle back and forth.

藉此,如後述,分別定位於上述3個本體部67之定位溝68之上述帶構件11由沿著上述切斷溝82驅動之上述切斷機83切斷。 Thereby, as will be described later, the belt members 11 respectively positioned in the positioning grooves 68 of the three main body portions 67 are cut by the cutter 83 driven along the cutting grooves 82.

接著,就上述構成之貼著裝置之動作,參照圖1、圖11A、圖11B、圖12A~圖12C一面說明。 Next, the operation of the above-described bonding device will be described with reference to Figs. 1, 11A, 11B, and 12A to 12C.

通常,上述貼著裝置進行將切斷成預定長度之複數(在本實施形態中為3條)之黏著帶3貼著於半導體元件1之作業。 Usually, the above-described attaching device performs an operation of adhering the adhesive tape 3 which is cut into a predetermined length (three in the present embodiment) to the semiconductor element 1.

即,由支持於帶供給機構12之支持體13之3個供給捲軸19拉出之帶構件11由連接單元65之第1、第2導輥31,32所導引,通過檢測部51及切斷機構33,在與貼著頭41對向之部分,藉由一對流通輥子39與上述貼著頭41平行地被導引後,被一對傳送輥子45所夾持搬送,同時,被搬送之份被設置於傳送輥子45之下游側之風管46往排出方向壓送。 In other words, the belt member 11 pulled out by the three supply reels 19 supported by the support body 13 of the belt supply mechanism 12 is guided by the first and second guide rollers 31, 32 of the connection unit 65, passes through the detecting portion 51 and cuts. The blocking mechanism 33 is guided by the pair of conveying rollers 45 in parallel with the abutting head 41 in a portion opposed to the adhering head 41, and is conveyed by a pair of conveying rollers 45, and is conveyed. The air duct 46 provided on the downstream side of the conveying roller 45 is pressure-fed in the discharge direction.

構成上述帶構件11之黏著帶3與脫模帶4中,僅黏著帶3被上述切斷機構33之切斷機38切斷成預定長度。黏著帶3之切斷長度是因應於半導體元件1之長度尺寸而設定。 Of the adhesive tape 3 and the release tape 4 constituting the belt member 11, only the adhesive tape 3 is cut by the cutter 38 of the cutting mechanism 33 to a predetermined length. The cut length of the adhesive tape 3 is set in accordance with the length dimension of the semiconductor element 1.

切斷為預定長度之3條帶構件11之黏著帶3搬送到上述貼著頭41之下方、也就是經檯40定位之上述半導體元件1之上面時,上述半導體元件1藉由上述檯40而朝上昇方向驅動直到其上面接近切斷為預定長度之黏著帶3。 When the adhesive tape 3 cut into three strip members 11 of a predetermined length is conveyed under the above-mentioned attaching head 41, that is, above the semiconductor element 1 positioned via the stage 40, the semiconductor element 1 is used by the stage 40. It is driven in the ascending direction until it is close to the adhesive tape 3 cut to a predetermined length.

接著,上述貼著頭41藉由上下驅動源42而朝下降方向驅動,藉由3個突條41a,3條黏著帶3透過脫模帶4而同時按壓貼著於上述半導體元件1之上面。貼著後,剝離輥子單元43朝圖1箭頭記號X所示之方向驅動,脫模帶4由貼著於半導體元件1之上面之3條黏著帶3剝離。 Next, the attaching head 41 is driven in the descending direction by the upper and lower driving sources 42, and the three adhesive strips 3 are passed through the release tape 4 while being pressed against the upper surface of the semiconductor element 1 by the three protruding strips 41a. After the adhesion, the peeling roller unit 43 is driven in the direction indicated by the arrow mark X in Fig. 1, and the release tape 4 is peeled off by the three adhesive tapes 3 which are attached to the upper surface of the semiconductor element 1.

當脫模帶4剝離時,上述剝離輥子單元43朝與箭頭X方向相反之方向驅動。與此同時,驅動傳送輥子45,帶構件11搬送預定長度,重複進行上述之貼著作業。 When the release tape 4 is peeled off, the peeling roller unit 43 is driven in a direction opposite to the direction of the arrow X. At the same time, the conveying roller 45 is driven, and the belt member 11 is conveyed by a predetermined length, and the above-mentioned decoration work is repeated.

重複進行貼著作業時,捲繞在設置於上述支持體13之3個供給捲軸19的帶構件11會減少,其殘量會在預定以下。當帶構件11之殘量在預定以下時,帶構件11之終端部、也就是未貼著有脫模帶4之黏著帶3之部分由上述供給捲軸19取出。 When the pasting work is repeated, the tape member 11 wound around the three supply reels 19 provided in the support body 13 is reduced, and the remaining amount is less than or equal to a predetermined value. When the remaining amount of the belt member 11 is less than or equal to a predetermined value, the end portion of the belt member 11, that is, the portion of the adhesive tape 3 to which the mold release tape 4 is not attached, is taken out by the supply spool 19.

由上述供給捲軸19取出之脫模帶4之未貼著有黏著帶3之終端部與貼著有黏著帶3之部分的反射光量不同,因此,上述檢測部51之第1感測器52會檢測該部分已被取出。 The amount of reflected light of the portion of the release tape 4 taken out by the supply reel 19 that is not attached to the adhesive tape 3 and the portion where the adhesive tape 3 is adhered is different. Therefore, the first sensor 52 of the detecting portion 51 is It is detected that the part has been taken out.

也就是說,在設置於上述支持體13之3個供給捲軸19中,當至少1個捲裝於供給捲軸19之帶構件11之殘量在預定以下時,上述檢測部51之第1感測器52會檢測出該情況。 In other words, in the three supply reels 19 provided in the support body 13, when the remaining amount of at least one of the belt members 11 wound on the supply reel 19 is less than or equal to a predetermined value, the first sensing of the detecting portion 51 The device 52 will detect this condition.

根據來自上述檢測部51之第1感測器52的檢測信號,使上述傳送輥子45進行來自3個供給捲軸19之帶構件11之拉出停止。與此同時,使形成於上述切斷機構33之滑輪構件35之側面之多數吸引孔35a產生吸引力,上述帶構件11之終端部被吸著保持於上述滑輪構件35之側面。 The conveyance roller 45 causes the conveyance roller 45 to stop the pulling of the belt member 11 from the three supply spools 19 based on the detection signal from the first sensor 52 of the detection unit 51. At the same time, the plurality of suction holes 35a formed on the side surface of the pulley member 35 of the cutting mechanism 33 generate an attraction force, and the end portion of the belt member 11 is sucked and held by the side surface of the pulley member 35.

接著,連接裝置55之設有3個連接單元65之第1安裝板63藉由第1線性驅動源61朝前進方向驅動。藉此,如圖11A、圖11B所示,各供給捲軸19之帶構件11之終端部11E 卡合於上述連接單元65之截面梯形之定位溝68,且上述帶構件11定位而不會朝寬度方向振動。 Next, the first mounting plate 63 of the connecting device 55 provided with the three connecting units 65 is driven in the forward direction by the first linear drive source 61. Thereby, as shown in FIGS. 11A and 11B, the end portion 11E of the belt member 11 of each supply spool 19 The positioning groove 68 of the cross-sectional trapezoidal shape of the connecting unit 65 is engaged, and the belt member 11 is positioned so as not to vibrate in the width direction.

與此同時,如圖11A所示,上述帶構件11之終端部11E之較上述定位溝68上游側之部分與下游側之部分藉由第1吸引孔71與第2吸引孔72而吸著保持。也就是說,上述帶構件11之對應於上述連接單元65之本體部67之側面的部分吸著保持於該本體部67之側面。 At the same time, as shown in FIG. 11A, the portion of the end portion 11E of the belt member 11 that is upstream of the positioning groove 68 and the portion on the downstream side are sucked and held by the first suction hole 71 and the second suction hole 72. . That is, a portion of the belt member 11 corresponding to the side surface of the main body portion 67 of the connecting unit 65 is sucked and held by the side surface of the main body portion 67.

如此,當帶構件11之終端部11E吸著保持於上述本體部67之側面時,如圖11B所示,藉由第3線性驅動源,切斷機83沿著3個本體部67之成為一列之切斷溝82驅動,上述帶構件11之終端部11E之在上述切斷溝82交叉之處藉由上述切斷機83而切斷。 As described above, when the end portion 11E of the belt member 11 is sucked and held by the side surface of the main body portion 67, as shown in FIG. 11B, the cutter 83 becomes a row along the three main body portions 67 by the third linear drive source. The cutting groove 82 is driven, and the end portion 11E of the belt member 11 is cut by the cutter 83 at a position where the cutting groove 82 intersects.

上述切斷機83可彈性變位地支持於托座85。因此,當上述切斷機83進入切斷溝82時,該切斷機83之刃83a會彈性地壓接於定位保持於與上述切斷溝82交叉之上述定位溝68之帶構件11。因此,藉由上述切斷機83,可確實地切斷位於上述帶構件11之切斷溝82之部分。而且,藉上述切斷機83彈性地變位,可防止其刃83a過於強力的碰撞到切斷溝82之底面而損傷。 The cutter 83 is supported by the bracket 85 in an elastically displaceable manner. Therefore, when the cutter 83 enters the cutting groove 82, the blade 83a of the cutter 83 is elastically pressed against the belt member 11 positioned and held by the positioning groove 68 that intersects the cutting groove 82. Therefore, the portion of the cutting groove 82 of the belt member 11 can be reliably cut by the cutter 83. Further, by the elastic displacement of the cutter 83, it is possible to prevent the blade 83a from colliding too strongly against the bottom surface of the cutting groove 82 to be damaged.

當上述切斷機83切斷帶構件11而回到原來位置時,吸附保持上述帶構件11之終端部11E之較上述定位溝68上游側之部分之第1吸引孔71的吸引力會關閉。接著,帶構件11因擺動桿26之重量而拉伸,擺動桿26由如圖1實線所示之位置往鏈線所示之位置旋動後,藉由未圖示之驅動源, 卡止銷30被驅動卡合於其卡合孔29,上述擺動桿26保持成不能旋動。 When the cutter 83 cuts the belt member 11 and returns to the original position, the suction force of the first suction hole 71 that sucks and holds the portion of the end portion 11E of the belt member 11 that is upstream of the positioning groove 68 is closed. Next, the belt member 11 is stretched by the weight of the swing lever 26, and the swing lever 26 is rotated by a position shown by a solid line in FIG. 1 toward a position indicated by a chain line, and is driven by a driving source not shown. The locking pin 30 is driven to engage with the engaging hole 29, and the swing lever 26 is held so as not to be rotated.

若上述擺動桿26保持成不能旋動,由上述支持體13之卡止凹部16拆下安裝有3個供給捲軸19的支軸17,並且更換成裝設有預定量之帶構件11之新的供給捲軸19。圖12A是顯示,藉拆下支軸17,由本體部67之殘留的先前的供給捲軸19拉出之上述帶構件11的終端部11E。 When the swing lever 26 is held in a non-rotatable manner, the support shaft 17 to which the three supply spools 19 are attached is detached by the locking recess 16 of the support body 13, and replaced with a new one in which a predetermined amount of the belt member 11 is attached. The reel 19 is supplied. Fig. 12A shows the end portion 11E of the belt member 11 which is pulled out by the remaining supply reel 19 of the main body portion 67 by the detachment of the support shaft 17.

上述供給捲軸19之更換是將預先安裝有新的3個供給捲軸19之支軸17裝設於上述支持體13,或者從由支持體13拆下之支軸17拆下用盡之先前的供給捲軸19,並將新的供給捲軸19安裝於其支軸17後,將其支軸17安裝於上述支持體13之卡止凹部16,任一者即可。 The supply spool 19 is replaced by a support shaft 13 to which a new three supply spools 19 are attached in advance, or a previous supply that has been removed from the support shaft 17 that has been removed by the support 13 The reel 19 is attached to the support shaft 17 of the new supply reel 19, and the support shaft 17 is attached to the locking recess 16 of the support body 13, either.

若將新的供給捲軸19安裝於上述支持體13,拉出捲裝於各供給捲軸19之帶構件11,如圖12B所示,使新的帶構件11之始端部11F吸著於上述連接單元65之本體部67之第1吸引孔71,並且將較其前端側之部分重疊於在上述切斷溝82之處所切斷之先前的帶構件11之終端部11E。也就是說,在上述超音波工具74之前端面上,於舊的帶構件11之後端部11E重疊新的帶構件11之始端部11F。 When the new supply spool 19 is attached to the support body 13, the belt member 11 wound around each of the supply spools 19 is pulled out, and as shown in Fig. 12B, the start end portion 11F of the new belt member 11 is sucked to the above-mentioned connection unit. The first suction hole 71 of the main body portion 67 of the 65 is overlapped with the portion of the front end portion 11E of the previous belt member 11 cut at the position of the cutting groove 82. That is, on the front end surface of the above-described ultrasonic tool 74, the end portion 11F of the new belt member 11 is overlapped at the end portion 11E of the old belt member 11.

如此,舊的帶構件11之終端部11E與新的帶構件11之始端部11F重疊的話,與上述連接單元65對應而設置3個承接構件66之第2安裝板64藉由第2線性驅動源62往前進方向驅動。與此同時,使設有上述超音波工具74之超音波振動子75振盪。 When the end portion 11E of the old belt member 11 overlaps the start end portion 11F of the new belt member 11, the second mounting plate 64 of the three receiving members 66 corresponding to the connecting unit 65 is provided by the second linear driving source. 62 drives in the forward direction. At the same time, the ultrasonic vibrator 75 provided with the above ultrasonic tool 74 is oscillated.

藉此,如圖12C所示,設置於上述第2安裝板64之3個承接構件66之端面之凸部66a會按壓在設置於上述第1安裝板63之3個連接單元65之用以超音波振動之超音波工具74之前端面重疊之舊的帶構件11之終端部11E、與新的帶構件11之始端部11F,因此各帶構件11之終端部11E與始端部11F會熔著。 As a result, as shown in FIG. 12C, the convex portion 66a provided on the end faces of the three receiving members 66 of the second mounting plate 64 is pressed against the three connecting units 65 provided in the first mounting plate 63 for super The end portion 11E of the old belt member 11 and the start end portion 11F of the new belt member 11 in which the ultrasonic vibration tool 74 of the ultrasonic vibration is overlapped with the front end portion 11F of the old belt member 11 are melted.

如此,熔著各帶構件11之終端部11E與始端部11F時,具有超音波工具74之連接單元65之本體部67藉由彈簧79而可彈性變位地保持於上述第1安裝板63。而且,設置於上述第1安裝板63之安裝螺栓78在具有遊隙之狀態下插通於形成於本體部67之四角部的插通孔77。 When the end portion 11E and the start end portion 11F of each of the belt members 11 are fused, the main body portion 67 of the connection unit 65 having the ultrasonic tool 74 is elastically displaced by the spring 79 to the first attachment plate 63. Further, the attachment bolts 78 provided on the first attachment plate 63 are inserted into the insertion holes 77 formed at the four corners of the main body portion 67 with a play.

因此,設置於上述第1安裝板63之上述本體部67之超音波工具74之前端面透過各帶構件11之終端部11E與始端部11F而被設置於上述第2安裝板64之承接構件66之凸部66a按壓時,上述本體部67會壓縮上述彈簧79並且彈性的變位,而上述超音波工具74之前端面會隨著形成有上述承接構件66之凸部66a的端面。 Therefore, the end surface of the ultrasonic tool 74 provided in the main body portion 67 of the first mounting plate 63 passes through the end portion 11E and the start end portion 11F of each of the belt members 11 and is provided in the receiving member 66 of the second mounting plate 64. When the convex portion 66a is pressed, the main body portion 67 compresses the spring 79 and is elastically displaced, and the front end surface of the ultrasonic tool 74 follows the end surface of the convex portion 66a of the receiving member 66.

也就是說,上述超音波工具74之前端面會相對於上述承接構件66之凸部66a平行地彈性變位。因此,在上述超音波工具74之前端面重疊之各帶構件11之終端部11E與始端部11F會確實地熔著。 That is, the front end surface of the ultrasonic tool 74 is elastically displaced in parallel with respect to the convex portion 66a of the receiving member 66. Therefore, the end portion 11E and the start end portion 11F of the respective belt members 11 whose end faces overlap before the ultrasonic tool 74 are surely fused.

如此,各帶構件11之終端部11E與始端部11F熔著時,在第2安裝板64朝後退方向驅動後,阻止上述擺動桿26之搖動之上述卡止銷30朝後退方向驅動,並且解除上述擺 動桿26之保持狀態。 When the end portion 11E and the start end portion 11F of the respective belt members 11 are melted, after the second attachment plate 64 is driven in the backward direction, the locking pin 30 that blocks the swinging of the swing lever 26 is driven in the backward direction, and is released. Above pendulum The holding state of the moving rod 26.

接著,設置於上述連接單元65之本體部67之第1吸引孔71進行之新的帶構件11之始端部11F、與第2吸引孔72進行之舊的帶構件11之終端部11E之吸著保持解除後,上述第1安裝板63藉由第1線性驅動源61而朝後退方向驅動。也就是說,上述連接單元65之本體部67離開連接之舊的帶構件11之終端部11E與新的帶構件11之始端部11F的連接部分。 Then, the first end portion 11F of the new belt member 11 provided in the first suction hole 71 of the main body portion 67 of the connecting unit 65 and the end portion 11E of the old belt member 11 which is carried by the second suction hole 72 are sucked. After the release is released, the first mounting plate 63 is driven in the reverse direction by the first linear drive source 61. That is, the body portion 67 of the above-described connecting unit 65 is separated from the connecting portion of the terminal portion 11E of the old band member 11 and the starting end portion 11F of the new belt member 11.

各帶構件11之終端部11E與始端部11F之連接作業結束後,各帶構件11之切斷機構33之滑輪構件35之吸引孔35a之吸引力解除,各帶11恢復自由。接著,藉由傳送輥子45,拉出帶構件11到各帶構件11之連接部分較切斷機構33下游側之位置、也就是新的帶構件11之黏著帶3對應於上述切斷機構33之滑輪構件35的位置。藉此,各帶構件11之舊的帶之終端部11E與新的帶之始端部11F的連接作業結束。再者,貼著之再開始是在到達連接部分超過傳送輥子45時才進行。 After the connection operation between the end portion 11E of each belt member 11 and the start end portion 11F is completed, the suction force of the suction hole 35a of the pulley member 35 of the cutting mechanism 33 of each belt member 11 is released, and the respective belts 11 are restored. Next, by the conveying roller 45, the position where the connecting portion of the belt member 11 to the belt member 11 is pulled out from the downstream side of the cutting mechanism 33, that is, the adhesive belt 3 of the new belt member 11 corresponds to the above-described cutting mechanism 33. The position of the pulley member 35. Thereby, the connection work of the end portion 11E of the old belt of each belt member 11 and the start end portion 11F of the new belt is completed. Furthermore, the re-starting of the affixing is performed only when the connecting portion reaches the conveying roller 45.

如上述,將設有3個供給捲軸19之支軸17可裝卸地支持於上述帶供給機構12之支持體13。因此,保持於支軸17之3個供拾捲軸19中,至少1個殘留於供給捲軸19之帶構件11會在預定量以下,若由檢測部51之第1感測器52檢測此情況,則可根據該檢測,將設置於上述支持體13之3個供給捲軸19與上述支軸17一次更換成新的供給捲軸19。 As described above, the support shaft 13 provided with the three supply spools 19 is detachably supported by the support body 13 of the tape supply mechanism 12. Therefore, at least one of the three supply and supply spools 19 held by the support shaft 17 is at least a predetermined amount or less, and if the first sensor 52 of the detection unit 51 detects the situation, According to the detection, the three supply reels 19 provided on the support body 13 and the support shaft 17 can be replaced with a new supply reel 19 at a time.

也就是說,將3個供給捲軸19設置於支持體13時, 會因為捲裝於各供給捲軸19之帶構件11之長度有差異或捲裝於各供給捲軸19之帶構件11之使用量的差異,而捲裝於各供給捲軸19之帶構件11之殘量不會一樣。因此,3個供給捲軸19之更換時期會產生差異。 That is, when the three supply reels 19 are placed on the support 13, The residual amount of the belt member 11 wound around each of the supply spools 19 may vary due to the difference in the length of the belt members 11 wound around the supply spools 19 or the difference in the amount of use of the belt members 11 wound around the respective supply spools 19. Not the same. Therefore, the replacement period of the three supply reels 19 is different.

然而,由檢測部51之第1感測器52檢測出3個供給捲軸19中至少1個捲裝於供給捲軸19之帶構件11的殘量在預定以下時,會一次更換3個供給捲軸19。 However, when the first sensor 52 of the detecting unit 51 detects that the remaining amount of at least one of the three supply spools 19 wound on the supply spool 19 is less than or equal to a predetermined value, the three supply spools 19 are replaced at a time. .

因此,以往進行之複數次的更換作業一次就完成,故可達到供給捲軸19之更換作業之容易化及效率化。 Therefore, the replacement work that has been performed in the past is completed once, so that the replacement work of the supply reel 19 can be facilitated and improved.

另,如上述,捲裝於各供給捲軸19之帶構件11的殘量有時候會不一樣,因此整批更換複數供給捲軸19時,會產生未被使用之帶構件11。然而,如此未被使用之帶構件之長度只有一點點,相較於為了該一點點的長度,以些微的間隔重複更換作業,因而每次停止裝置,放棄一點點未使用的部分結果可降低成本。 Further, as described above, the remaining amount of the belt member 11 wound around each of the supply spools 19 may be different. Therefore, when the plurality of supply spools 19 are replaced in batches, the unused belt members 11 are generated. However, the length of the tape member which is not used is only a little bit, and the replacement work is repeated at a slight interval for the length of the one point, so that each time the device is stopped, a part of the unused portion is discarded, and the cost can be reduced. .

又,上述連接裝置55如上述,在第1安裝板63設置3個連接單元65,並且於第2安裝板64將3個承接構件66與上述連接單元65對應設置。 Further, as described above, the connection device 55 is provided with three connection units 65 on the first attachment plate 63, and the three attachment members 66 are provided corresponding to the connection unit 65 on the second attachment plate 64.

因此,由於可將舊的3個供給捲軸19之3個帶構件11之終端部11E與新的3個供給捲軸19之3個帶構件11之始端部11F同時連接,因此可與供給捲軸19之更換作業同樣,以一次進行3條帶構件11之連接作業。也就是說,可有效率地進行帶構件11之連接作業。 Therefore, since the end portions 11E of the three belt members 11 of the old three supply spools 19 can be simultaneously connected to the start end portions 11F of the three belt members 11 of the new three supply spools 19, the supply spools 19 can be used. In the same manner as the replacement work, the connection work of the three belt members 11 is performed at one time. That is to say, the joining operation of the belt member 11 can be performed efficiently.

舊的帶構件11之終端部與新的帶構件11之始端 部連接時,舊的帶構件11之終端部11E藉由截面梯形之定位溝68與第2導輥32之導引溝34而保持不會偏離寬度方向,新的帶構件11之始端部11F同樣藉由截面梯形之第1導輥31之導引溝34與定位溝68而保持不會偏離寬度方向。 The end portion of the old belt member 11 and the beginning of the new belt member 11 When the portions are connected, the end portion 11E of the old belt member 11 is held by the positioning groove 68 having a trapezoidal cross section and the guide groove 34 of the second guide roller 32 so as not to deviate from the width direction, and the starting end portion 11F of the new belt member 11 is also the same. The guide groove 34 of the first guide roller 31 having a trapezoidal cross section and the positioning groove 68 are kept from being displaced from the width direction.

進而,舊的帶構件11之終端部11E藉由形成於本體部67之第1吸引孔71而吸著保持,新的帶構件11之始端部11F由第2吸引孔72吸著保持。 Further, the end portion 11E of the old belt member 11 is sucked and held by the first suction hole 71 formed in the main body portion 67, and the start end portion 11F of the new belt member 11 is sucked and held by the second suction hole 72.

因此,經定位而在超音波工具74之前端面上重疊之舊的帶構件11之終端部11E、與新的帶構件11之始端部11F不會產生偏位而熔著。而且,熔著時,上述帶構件11之重疊部分會被形成於承接構件66之端面之複數凸部66a按壓,並且超音波工具74之前端面平形地隨著形成有承接構件66之凸部66a之端面而彈性變位,藉此也可確實地熔著上述帶構件11之重疊部分。 Therefore, the end portion 11E of the old belt member 11 which is overlapped on the front end surface of the ultrasonic tool 74 by positioning and the start end portion 11F of the new belt member 11 are not eccentric and melted. Further, when fused, the overlapping portion of the belt member 11 is pressed by the plurality of convex portions 66a formed on the end faces of the receiving members 66, and the front end surface of the ultrasonic tool 74 is flatly formed along with the convex portion 66a where the receiving member 66 is formed. The end faces are elastically displaced, whereby the overlapping portions of the belt members 11 can be surely fused.

藉由運行於與上述定位溝68交叉形成之切斷溝82之切斷機83,切斷保持於上述定位溝68之舊的帶構件11之終端部11E。上述定位溝68與上述切斷溝82之底面形成為相同高度。 The end portion 11E of the old belt member 11 held by the positioning groove 68 is cut by the cutter 83 running on the cutting groove 82 formed by the positioning groove 68. The positioning groove 68 is formed at the same height as the bottom surface of the cutting groove 82.

因此,保持於上述定位溝68之底面之帶構件11相較於上述切斷溝82之底面僅上升帶構件11之厚度分,因此上述帶構件11在與上述切斷溝82交叉之部分,藉由沿著上述切斷溝82運行之切斷機83而確實地切斷。 Therefore, the belt member 11 held on the bottom surface of the positioning groove 68 is only divided by the thickness of the rising belt member 11 on the bottom surface of the cutting groove 82. Therefore, the belt member 11 is borrowed at a portion intersecting the cutting groove 82. The cutting machine 83 that runs along the cutting groove 82 is surely cut.

又,接合之帶構件11之寬度尺寸是1mm左右,尺寸非常細者,藉由以超音波接合連接,相較於例如使用連 接用帶連接之其他連接方法,可在短時間內高強度地接合。 Further, the width of the joined belt member 11 is about 1 mm, and the size is very thin, and the connection is made by ultrasonic bonding, as compared with, for example, the use of a joint. By connecting other connection methods with a connection, it is possible to join at a high strength in a short time.

圖13是顯示該發明之其他實施形態之連接裝置55之正面。該實施形態中,在與形成連接單元65之本體部67之突出面67a之面相反之側的面、也就是其他側面,使板狀之搖動構件91接觸於一側面而設置。 Fig. 13 is a front view showing a connecting device 55 according to another embodiment of the present invention. In this embodiment, the plate-shaped rocking member 91 is placed in contact with one side surface on the side opposite to the surface on which the protruding surface 67a of the main body portion 67 of the connecting unit 65 is formed, that is, on the other side surface.

在上述搖動構件91,於與豎立設置在上述第1安裝板63之安裝螺栓78對應之部分,穿設有比上述安裝螺栓78之外徑尺寸大之大徑孔92,上述安裝螺栓78之前端部通過上述大徑孔92及上述本體部67之插通孔77而在前端螺合螺帽81。 In the rocking member 91, a large diameter hole 92 having a larger outer diameter than the mounting bolt 78 is provided in a portion corresponding to the mounting bolt 78 that is erected on the first mounting plate 63, and the front end of the mounting bolt 78 is provided. The nut 81 is screwed to the distal end through the large diameter hole 92 and the insertion hole 77 of the main body portion 67.

藉此,上述搖動構件91藉由裝設於上述安裝螺栓78之彈簧79,而彈性地按壓且設置於上述本體部67之他側面。接著,設有上述超音波工具74之焊頭76安裝於上述搖動構件91。 Thereby, the rocking member 91 is elastically pressed and provided on the side surface of the main body portion 67 by the spring 79 attached to the mounting bolt 78. Next, a horn 76 provided with the above ultrasonic tool 74 is attached to the oscillating member 91.

根據如此構成,為了接合帶構件11之脫模帶4,上述超音波工具74透過脫模帶4而受承接構件66按壓時,隨著該承接構件66,上述超音波工具74與上述搖動構件91一起搖動。 According to this configuration, in order to engage the release tape 4 of the tape member 11, when the ultrasonic tool 74 is pressed by the receiving member 66 through the release tape 4, the ultrasonic tool 74 and the shaking member 91 accompany the receiving member 66. Shake together.

也就是說,上述超音波工具74隨上述承接構件66搖動時,可不搖動上述本體部67。因此,上述超音波工具74按壓於上述承接構件66時,會容易搖動而隨上述承接構件66,因此可確實地進行上述脫模帶4之接合。 That is, when the ultrasonic tool 74 is rocked by the receiving member 66, the main body portion 67 may not be shaken. Therefore, when the ultrasonic tool 74 is pressed against the receiving member 66, the receiving member 66 is easily oscillated to follow the receiving member 66, so that the joining of the releasing belt 4 can be surely performed.

在上述一實施形態中,是舉以3條引線連接相鄰 之2個半導體元件為例來說明,但也有以2條或4條以上之引線連接的情況,此時,只要將因應於引線之數目之複數供給捲軸設置於帶供給機構之支持體即可。 In the above embodiment, the three leads are connected adjacent to each other. The two semiconductor elements are described as an example. However, there are cases in which two or four or more leads are connected. In this case, a plurality of supply reels corresponding to the number of leads may be provided in the support of the tape supply mechanism.

又,設置於第1安裝板之連接單元或設置於第2安裝板之承接構件之數目為對應於設置在支持體之供給捲軸之數目的複數即可。 Moreover, the number of the connection means provided in the first mounting plate or the receiving member provided in the second mounting plate may be plural in accordance with the number of supply reels provided on the support.

再者,上述之實施形態中,捲裝於各供給捲軸19之帶構件11的殘量未必相同。因此,即使1個帶構件11到達終端,也會有其他帶構件11未到達終端。如上述,帶構件11之終端部僅構成未貼著黏著帶3之脫模帶4。 Further, in the above embodiment, the remaining amount of the belt member 11 wound around each of the supply spools 19 is not necessarily the same. Therefore, even if one belt member 11 reaches the terminal, there are other belt members 11 that do not reach the terminal. As described above, the end portion of the belt member 11 constitutes only the release belt 4 to which the adhesive tape 3 is not attached.

因此,一齊切斷各帶構件11,整批更換複數之供給捲軸19時,在到達終端之帶構件11中,在脫模帶4之部分切斷,並且將更換之新的帶構件11之始端之脫模帶4與舊的帶構件11之脫模帶4超音波接合。 Therefore, when the respective belt members 11 are cut together, when the plurality of supply spools 19 are replaced in batches, in the belt member 11 reaching the terminal, the portion of the belt release belt 4 is cut, and the beginning of the new belt member 11 to be replaced is replaced. The release tape 4 is ultrasonically joined to the release tape 4 of the old tape member 11.

相對於此,未到達終端之帶構件11中,在貼著了黏著帶3之位置被切斷。因此,經更換之新的帶構件11之始端之脫模帶4與舊的帶構件11之黏著帶3部分超音波接合。 On the other hand, in the belt member 11 which has not reached the terminal, it is cut at the position where the adhesive tape 3 adhered. Therefore, the release tape 4 at the beginning of the replaced new belt member 11 is ultrasonically joined to the adhesive tape 3 of the old belt member 11.

超音波接合中,接合新的帶構件11之脫模帶4與舊的帶構件11之脫模帶4,可以使接合部分之帶厚度變化少,且在搬送路徑上引起的危險少,或者可為以相同素材之脫模帶之間的接合,故用以接合之條件為一定,不需要因脫模帶與黏著帶之接合而改變,因此未到達終端之舊的帶構件11,宜個別地驅動傳送輥子45旋轉,並送出直到脫模帶4出現,再一齊切斷。 In the ultrasonic bonding, the release tape 4 of the new belt member 11 and the release tape 4 of the old belt member 11 can reduce the thickness of the belt portion of the joint portion, and the risk caused by the conveyance path is small, or In order to bond between the release belts of the same material, the conditions for joining are constant, and it is not necessary to change due to the engagement of the release belt and the adhesive tape, so the old belt member 11 that has not reached the terminal should be individually The conveying conveyance roller 45 is rotated and sent out until the release belt 4 appears, and is cut off again.

進而,終端部未必僅為脫模帶4,也有形成黏著帶3到終端部之種類的帶構件11。如此之帶構件11在終端部之附近之黏著帶3之表面,附有顯示終端部之終點記號(例如銀紙般與黏著帶3之反射率不同之構件),可利用第1感測器52檢測。此時,就未到達終端之舊的帶構件11,宜個別地驅動傳送輥子45旋轉,藉此送出直到終點記號出現為止,再一齊切斷。 Further, the terminal portion is not necessarily only the mold release tape 4, but also the tape member 11 of the type in which the adhesive tape 3 is formed to the end portion. The belt member 11 is attached to the surface of the adhesive tape 3 in the vicinity of the end portion, and has an end point mark (for example, a member having a different reflectance from the adhesive tape 3 as the silver paper) of the display terminal portion, and can be detected by the first sensor 52. . At this time, the old belt member 11 that has not reached the terminal is preferably driven to rotate by the conveying roller 45, and is sent until the end mark appears, and then cut again.

再者,上述情況中,是藉由承接構件66按壓新的帶構件11之始端部11F之黏著帶3的上面,也會有黏著帶3附著於承接構件66之表面的情況,因此宜於承接構件66之表面進行黏著防止處理或者剝離脫模帶等。 Further, in the above case, the upper surface of the adhesive tape 3 of the new belt member 11 is pressed by the receiving member 66, and the adhesive tape 3 may be attached to the surface of the receiving member 66, so that it is preferable to accept The surface of the member 66 is subjected to an adhesion prevention treatment or a release release belt or the like.

除此之外,也會有始端部與終端部無黏著帶3,而露出脫模帶4之帶構件11與始端部到終端部設有黏著帶3之帶構件11混合的情況,但任一者在更換捲軸時,皆可先送出舊的帶構件11,直到檢測出終端部,經常在終端部附近一齊切斷。 In addition, there is also a case where the beginning end portion and the end portion are not provided with the adhesive tape 3, and the tape member 11 exposing the release tape 4 is mixed with the tape member 11 having the adhesive tape 3 at the end portion to the end portion, but any When the reel is replaced, the old belt member 11 can be sent out until the end portion is detected, and is often cut off in the vicinity of the end portion.

1‧‧‧半導體元件 1‧‧‧Semiconductor components

4‧‧‧脫模帶 4‧‧‧Mold strip

11‧‧‧帶構件 11‧‧‧With components

12‧‧‧帶供給機構 12‧‧‧With supply agency

17‧‧‧支軸 17‧‧‧ fulcrum

19‧‧‧供給捲軸 19‧‧‧Supply reel

21‧‧‧軸承 21‧‧‧ bearing

26‧‧‧擺動桿 26‧‧‧swing rod

27‧‧‧擺動輥子 27‧‧‧Swing roller

28‧‧‧搖動軸 28‧‧‧Shake axis

29‧‧‧卡合孔 29‧‧‧Snap hole

30‧‧‧卡止銷 30‧‧‧ card sales

31‧‧‧第1導輥 31‧‧‧1st guide roller

32‧‧‧第2導輥 32‧‧‧2nd guide roller

33‧‧‧切斷機構 33‧‧‧cutting mechanism

35‧‧‧滑輪構件 35‧‧‧ pulley components

36‧‧‧輥子 36‧‧‧ Roller

37‧‧‧壓缸 37‧‧‧Cylinder

38‧‧‧切斷機 38‧‧‧cutting machine

39‧‧‧流通輥子 39‧‧‧Circulation rollers

40‧‧‧檯 40‧‧‧

41‧‧‧貼著頭 41‧‧‧ affixed to the head

41a‧‧‧突條 41a‧‧‧

42‧‧‧上下驅動源 42‧‧‧Up and down drive source

43‧‧‧剝離輥子單元 43‧‧‧ peeling roller unit

43a‧‧‧輥子 43a‧‧‧ Roller

45‧‧‧傳送輥子 45‧‧‧Transfer roller

46‧‧‧風管 46‧‧‧ duct

51‧‧‧檢測部 51‧‧‧Detection Department

52‧‧‧第1感測器 52‧‧‧1st sensor

53‧‧‧第2感測器 53‧‧‧2nd sensor

53a‧‧‧投光部 53a‧‧‧Projecting Department

53b‧‧‧受光部 53b‧‧‧Receiving Department

55‧‧‧連接裝置 55‧‧‧Connecting device

61‧‧‧第1線性驅動源 61‧‧‧1st linear drive source

62‧‧‧第2線性驅動源 62‧‧‧2nd linear drive source

63‧‧‧第1安裝板 63‧‧‧1st mounting plate

64‧‧‧第2安裝板 64‧‧‧2nd mounting plate

65‧‧‧連接單元 65‧‧‧ Connection unit

66‧‧‧承接構件 66‧‧‧Receiving components

83‧‧‧切斷機 83‧‧‧Cutting machine

85‧‧‧托座 85‧‧‧ bracket

X‧‧‧方向 X‧‧‧ direction

Claims (10)

一種帶構件之供給裝置,是由捲裝有帶構件之複數個供給捲軸的各個,來供給前述帶構件,該帶構件是將黏著帶貼著在脫模帶而構成,且前述帶構件之供給裝置包含有:帶供給機構,是可裝卸地設有前述複數個供給捲軸,且由該等供給捲軸供給上述帶構件;檢測機構,是藉由上述帶構件之終端部,檢測捲裝於上述複數個供給捲軸之帶構件之殘量在預定以下之情況;及連接裝置,用以連接捲裝於使用中之複數個供給捲軸之上述帶構件之被切斷而形成的端部、與捲裝於已更換之新的複數個供給捲軸之帶構件之始端部;其中,若上述檢測機構檢測出複數個供給捲軸中至少一個供給捲軸所捲裝之帶構件的殘量在預定量以下的情況,則根據該檢測,停止來自上述複數個供給捲軸之上述帶構件的供給,並且藉由上述連接裝置,將捲裝於使用中之複數個供給捲軸之各個帶構件之被切斷而形成的端部、與捲裝於已更換之新的複數個供給捲軸之各個帶構件之始端部連接。 A supply device with a member is provided by each of a plurality of supply reels on which a belt member is wound, and the belt member is formed by attaching an adhesive tape to a release belt, and the supply of the belt member is provided. The apparatus includes: a tape supply mechanism that detachably mounts the plurality of supply reels, and the supply reel is supplied from the supply reel; and the detecting mechanism detects the package in the plural by the end portion of the tape member The remaining amount of the belt member of the supply spool is less than or equal to a predetermined value; and the connecting means for connecting the end portion of the belt member wound with the plurality of supply spools in use and being wound up a start end portion of the belt member of the plurality of new supply spools that have been replaced; wherein, if the detecting means detects that the remaining amount of the belt member wrapped in at least one of the plurality of supply spools is less than a predetermined amount, According to the detection, the supply of the belt members from the plurality of supply reels is stopped, and the plurality of supply reels are wound in use by the connecting device. The ends of each belt member is formed by cutting, and the package has been replaced to a new member of each of a plurality of tape supply reel connected to the leading end portion. 如請求項1之帶構件之供給裝置,其中上述連接裝置具有複數個連接單元,該複數個連接單元是以對應於由設置在上述帶供給機構之複數個供給捲軸拉出之複數個 帶構件的間隔排列設置,前述連接單元是構成為具有:導引機構,是用以導引由上述供給捲軸拉出之上述帶構件;本體部,是設置成可朝相對於被該導引機構導引而運行之前述帶構件接近離開之方向驅動,且當朝接近方向驅動時,用以在寬度方向定位上述帶構件之定位溝是形成在被上述導引機構導引而運行之上述帶構件之運行方向的中途部;第1吸著部與第2吸著部,挾著上述定位溝而形成於上述本體部之一端部與他端部,且相較於上述帶構件之由上述定位溝定位之部分,前述第1吸著部是用以吸著保持在上述運行方向之上游側的部分,前述第2吸著部是用以吸著保持下游側的部分;切斷機,是朝與上述定位溝交叉之方向驅動,且切斷上述帶構件之定位於上述定位溝之處;超音波焊頭,是露出前端面而設置於上述本體部之形成有上述定位溝之部分中,比驅動上述切斷機之位置更靠近上述運行方向之下游側;及承接構件,是設置成可朝相對於設置在上述本體部之超音波焊頭接近離開之方向驅動,且具有當朝接近方向驅動時壓接於上述超音波焊頭之前端面之按壓面。 The supply device of the belt member of claim 1, wherein the connecting device has a plurality of connecting units, and the plurality of connecting units are a plurality of connecting units corresponding to a plurality of supply reels provided by the belt feeding mechanism The connecting unit is arranged at intervals, and the connecting unit is configured to have a guiding mechanism for guiding the belt member pulled out by the supply reel; the main body portion is disposed to be opposite to the guiding mechanism The leading belt member that is guided to be driven is driven in a direction away from the direction of separation, and when driven in the approaching direction, the positioning groove for positioning the belt member in the width direction is formed in the belt member that is guided to be guided by the guiding mechanism a middle portion of the running direction; the first absorbing portion and the second absorbing portion are formed on one end portion and the other end portion of the main body portion with respect to the positioning groove, and the positioning groove is compared with the belt member In the positioning portion, the first absorbing portion is a portion for sucking and holding the upstream side in the running direction, and the second absorbing portion is for sucking and holding the downstream side; the cutting device is facing The positioning groove is driven in a direction intersecting, and the belt member is cut at a position of the positioning groove; the ultrasonic welding head is disposed at a portion of the main body portion where the positioning groove is formed by exposing a front end surface, and Driving the cutter to be closer to the downstream side of the running direction; and the receiving member is configured to be driven in a direction approaching and away from the ultrasonic welding head disposed on the body portion, and having a driving direction toward the approaching direction The pressure is pressed against the pressing surface of the front end surface of the ultrasonic welding head. 如請求項1之帶構件之供給裝置,其中上述帶供給機構具有支持體,且於該支持體可裝卸地安裝有支軸,該支 軸以預定間隔設有可旋轉之上述複數個供給捲軸。 The supply device of the belt member of claim 1, wherein the belt supply mechanism has a support body, and a support shaft is detachably mounted to the support body, the support The shaft is provided with a plurality of the supply spools that are rotatable at predetermined intervals. 如請求項2之帶構件之供給裝置,其中上述複數個連接單元之上述本體部是可彈性變位地安裝於一個安裝板,而當驅動上述承接構件壓接於上述超音波焊頭之前端面時,上述超音波焊頭之前端面會與上述承接構件之按壓面平行。 The supply device of the belt member of claim 2, wherein the body portion of the plurality of connecting units is elastically displaceably mounted to a mounting plate, and when the receiving member is driven to be crimped to the front end surface of the ultrasonic welding head The front end surface of the ultrasonic horn is parallel to the pressing surface of the receiving member. 如請求項2之帶構件之供給裝置,其中上述切斷機受可動構件所支持且可旋轉並彈性地變位。 A supply device for a belt member according to claim 2, wherein said cutter is supported by the movable member and is rotatable and elastically displaced. 如請求項1之帶構件之供給裝置,其中上述檢測機構藉由上述帶構件之終端部檢測出上述複數個供給捲軸中至少一個供給捲軸所捲裝之帶構件的殘量在預定量以下的情況時,送出其他供給捲軸的帶構件,直到檢測出上述其他供給捲軸之帶構件的終端部為止。 The supply device of the belt member of claim 1, wherein the detecting means detects, by the end portion of the belt member, that a residual amount of the belt member in which at least one of the plurality of supply spools is wound is less than a predetermined amount At this time, the belt member of the other supply spool is sent until the end portion of the belt member of the other supply spool is detected. 一種黏著帶之貼著裝置,是將複數個黏著帶以預定間隔貼著於基板板面,其特徵在於具備:如請求項1~6中任一項之帶構件之供給裝置;切斷機構,是僅將由上述供給捲軸拉出之上述帶構件之上述脫模帶與上述黏著帶中之上述黏著帶切斷為因應上述基板之長度尺寸;及貼著機構,將被該切斷機構切斷之上述黏著帶貼著於上述基板。 An adhesive tape attachment device is provided with a plurality of adhesive tapes attached to a substrate surface at a predetermined interval, and is characterized by comprising: a supply device for a belt member according to any one of claims 1 to 6; The stripping tape of the tape member pulled out by the supply spool and the adhesive tape in the adhesive tape are cut into a length dimension corresponding to the substrate; and the attaching mechanism is cut by the cutting mechanism. The adhesive tape is attached to the substrate. 一種帶構件之供給方法,是由捲裝有帶構件之複數個供給捲軸的各個,來供給前述帶構件,該帶構件是將黏著帶貼著在脫模帶而構成,其特徵在於具備有下述步驟: 由上述複數個供給捲軸之各個,供給上述帶構件;藉由上述帶構件之終端部,檢測捲裝於上述複數個供給捲軸之帶構件之殘量在預定以下之情況;當上述複數個供給捲軸中,至少一個供給捲軸之帶構件的殘量在預定以下時,更換上述複數個供給捲軸;及將捲裝於使用中之複數個供給捲軸之各個帶構件被切斷而形成之端部、與捲裝於已更換之新的複數個供給捲軸之各個帶構件之始端部連接。 A belt member supply method is provided by supplying a plurality of supply reels to which a belt member is attached, and the belt member is formed by attaching an adhesive tape to a release belt, and is characterized in that it has a lower portion Steps: And supplying the belt member to each of the plurality of supply spools; and detecting, by the end portion of the belt member, a residual amount of the belt member wound on the plurality of supply spools is less than or equal to a predetermined amount; and the plurality of supply spools And replacing at least one of the plurality of supply reels when the remaining amount of the belt member of the at least one supply reel is less than or equal to a predetermined number; and forming the end portion of each of the plurality of supply reels that are wound in use The package is connected to the beginning end of each of the plurality of supply spools that have been replaced. 如請求項8之帶構件之供給方法,其中當檢測出捲裝於使用中之上述供給捲軸之帶構件的終端部時,在上游側與下游側之兩處吸著保持上述帶構件之終端部,將在上述上游側與上述下游側吸著保持之帶構件在其途中的部分藉由切斷機切斷,之後,解除上述上游側之吸著保持,將使用中之供給捲軸更換為新的供給捲軸,將由新的供給捲軸拉出之帶構件的始端部,重疊於藉由上述切斷機切斷之上述帶構件的端部並進行吸著保持後,將兩個帶構件之重疊部分進行超音波接合。 The method of supplying a belt member according to claim 8, wherein when the end portion of the belt member of the supply spool in use is detected, the end portion of the belt member is sucked and held at two places on the upstream side and the downstream side The portion of the belt member sucked and held on the upstream side and the downstream side is cut by a cutter, and then the suction holding on the upstream side is released, and the supply spool in use is replaced with a new one. The supply reel is formed by superimposing the end portion of the belt member that is pulled by the new supply reel on the end portion of the belt member that is cut by the cutter, and absorbing and holding the overlapping portion of the two belt members. Ultrasonic bonding. 一種帶構件之供給方法,是由捲裝有帶構件之複數個供給捲軸的各個,來供給前述帶構件,該帶構件是將黏著帶貼著在脫模帶而構成,其特徵在於具備有下述步驟:由上述複數個供給捲軸之各個,供給上述帶構件; 藉由上述帶構件之終端部,檢測捲裝於上述複數個供給捲軸之帶構件之殘量在預定以下之情況;當檢測出上述複數個供給捲軸中至少一個供給捲軸之帶構件的終端部時,關於未檢測出終端部之供給捲軸,送出上述帶構件直到檢測出帶構件之終端部為止;更換檢測出終端部之上述複數個供給捲軸;及將捲裝於使用中之複數個供給捲軸之各個帶構件被切斷而形成之端部、與捲裝於已更換之新的複數個供給捲軸之各個帶構件之始端部連接。 A belt member supply method is provided by supplying a plurality of supply reels to which a belt member is attached, and the belt member is formed by attaching an adhesive tape to a release belt, and is characterized in that it has a lower portion The step of: supplying the belt member by each of the plurality of supply reels; Detecting, by the end portion of the belt member, a residual amount of the belt member wound on the plurality of supply spools is less than or equal to a predetermined value; and detecting a terminal portion of the belt member of at least one of the plurality of supply spools The supply reel in which the end portion is not detected, the tape member is sent out until the end portion of the tape member is detected, the plurality of supply reels that detect the end portion are replaced, and the plurality of supply reels are wound in use. The end portion formed by cutting each of the belt members is connected to the beginning end portion of each of the belt members wound around the plurality of new supply spools that have been replaced.
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