TWI554028B - Oscillator package structure with temperature sensing element and its making method - Google Patents

Oscillator package structure with temperature sensing element and its making method Download PDF

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TWI554028B
TWI554028B TW103140788A TW103140788A TWI554028B TW I554028 B TWI554028 B TW I554028B TW 103140788 A TW103140788 A TW 103140788A TW 103140788 A TW103140788 A TW 103140788A TW I554028 B TWI554028 B TW I554028B
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wiring pattern
temperature sensing
package structure
sensing element
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TW103140788A
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TW201620249A (en
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Rui-Yang Yang
shui-yuan Xie
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Description

具有溫度感測元件之振盪器封裝結構及其製作方法 Oscillator package structure with temperature sensing element and manufacturing method thereof

本發明是有關於一種振盪器封裝結構及其製作方法,特別是指一種具有溫度感測元件之振盪器封裝結構及其製作方法。 The invention relates to an oscillator package structure and a manufacturing method thereof, in particular to an oscillator package structure having a temperature sensing element and a manufacturing method thereof.

參閱圖1,中華民國第201334404 A1早期公開號發明專利案公開一種振盪器之封裝結構1,其包含:一個基座11、一個壓電元件12、兩個黏著件13、一個上圍壁14、一個上蓋15、一個熱敏電阻元件16,及一個下圍壁17。 Referring to FIG. 1 , the invention of the invention of the invention is disclosed in Japanese Patent No. 201334404 A1, which comprises: a base 11 , a piezoelectric element 12 , two adhesive members 13 , an upper surrounding wall 14 , An upper cover 15, a thermistor element 16, and a lower surrounding wall 17.

該基座11具有一個上表面110,及一個相反於該上表面110的下表面111。該壓電元件12透過該等黏著件13與該基座11的上表面110相互耦接。該上圍壁14圍繞該壓電元件12地設置於該上表面110上。該上蓋15設置於該上圍壁14上,並與該基座11共同界定出一個容置該壓電元件12的封閉容室112。該熱敏電阻元件16設置於該基座11的下表面111。該下圍壁17圍繞該熱敏電阻元件16地設置於該基座11的下表面111。 The base 11 has an upper surface 110 and a lower surface 111 opposite the upper surface 110. The piezoelectric element 12 is coupled to the upper surface 110 of the susceptor 11 through the adhesive members 13 . The upper peripheral wall 14 is disposed on the upper surface 110 around the piezoelectric element 12. The upper cover 15 is disposed on the upper surrounding wall 14 and defines a closed chamber 112 for receiving the piezoelectric element 12 together with the base 11. The thermistor element 16 is disposed on the lower surface 111 of the susceptor 11. The lower surrounding wall 17 is disposed around the thermistor element 16 on the lower surface 111 of the base 11.

熟悉此技術領域的相關技術人員都知道,該壓電元件12因溫度變化所產生之溫度與頻率的特性會隨著該 壓電元件12的切割角度而有所不同,因此,當該壓電元件12具有不同的切割角度時,則會產生不同的溫度與頻率的特性。 It is known to those skilled in the art that the temperature and frequency characteristics of the piezoelectric element 12 due to temperature changes will follow The cutting angle of the piezoelectric element 12 is different, and therefore, when the piezoelectric element 12 has different cutting angles, different temperature and frequency characteristics are generated.

又,該振盪器之封裝結構1通常是被裝設於一個外部電路板(圖未示)上,利用該熱敏電阻元件16偵測該振盪器之封裝結構1的工作環境溫度,並回授予該外部電路板上的特殊應用積體電路(Application-specific integrated circuit,ASIC)(圖未示),而讓該特殊應用積體電路補償該壓電元件12因溫度所產生的頻率漂移,進而輸出一個穩定的參考頻率(Reference frequency)。而該下圍壁17是用以架高整個振盪器之封裝結構1,並保護且避免該熱敏電阻元件16與該外部電路板相接觸,且該下圍壁17主要是由多層氧化鋁陶瓷基板或印刷電路板(Printed circuit board,PCB)等材料所構成。 Moreover, the package structure 1 of the oscillator is usually mounted on an external circuit board (not shown), and the operating temperature of the package structure 1 of the oscillator is detected by the thermistor element 16, and is returned. An application-specific integrated circuit (ASIC) (not shown) on the external circuit board, and the special application integrated circuit compensates for the frequency drift of the piezoelectric element 12 due to temperature, and then outputs A stable reference frequency. The lower surrounding wall 17 is a package structure 1 for raising the entire oscillator, and protects and prevents the thermistor element 16 from contacting the external circuit board, and the lower surrounding wall 17 is mainly composed of a plurality of alumina ceramics. A substrate or a printed circuit board (PCB) is used.

此外,在該振盪器之封裝結構1結合(Bonding)至該外部電路板的過程中,須先在該外部電路板上配置墊片(圖未示),再於墊片上印刷錫膏;接著,再以貼片機搭載該振盪器之封裝結構1於該外部電路板上;最後,經由迴流焊(Reflow)使該振盪器之封裝結構1與該外部電路板電性結合。 In addition, in the process of bonding the package structure 1 of the oscillator to the external circuit board, a spacer (not shown) is first disposed on the external circuit board, and then solder paste is printed on the spacer; Then, the package structure 1 of the oscillator is mounted on the external circuit board by a mounter; finally, the package structure 1 of the oscillator is electrically coupled to the external circuit board via reflow.

由上述的說明可知,該振盪器之封裝結構1需先於該外部電路板的墊片上印刷錫膏,才可將其與該外部電路板電性結合。因此,容易造成錫膏與墊片因為兩種不 同材料間的潤濕性不良而產生拒焊的問題。 It can be seen from the above description that the package structure 1 of the oscillator needs to be printed on the gasket of the external circuit board before it can be electrically combined with the external circuit board. Therefore, it is easy to cause solder paste and gasket because of two kinds of The problem of solder repelling is caused by poor wettability between the materials.

再者,該振盪器之封裝結構1為了保護該熱敏電阻元件16不受該外部電路板擠壓與破壞,所以必須透過該下圍壁17來架高該熱敏電阻元件16。然而,該下圍壁17主要是由多層氧化鋁陶瓷基板或印刷電路板所構成,其需要利用共燒陶瓷工藝流程或印刷電路板製作工藝流程才能製得,因此,使得製作該下圍壁17需要較高的生產成本與較為複雜的工序。且,由於氧化鋁陶瓷基板或印刷電路板是由多層結構相互壓合所製成,其層疊的結構也會使得該下圍壁17的高度調整受到限制,而無法得到最適化的調整,亦不符合薄型化的趨勢。 Furthermore, in order to protect the thermistor element 16 from being pressed and destroyed by the external circuit board, the package structure 1 of the oscillator must pass through the lower surrounding wall 17 to raise the thermistor element 16. However, the lower surrounding wall 17 is mainly composed of a multilayer alumina ceramic substrate or a printed circuit board, which needs to be produced by using a co-fired ceramic process or a printed circuit board manufacturing process, thereby making the lower surrounding wall 17 Higher production costs and more complex processes are required. Moreover, since the alumina ceramic substrate or the printed circuit board is formed by laminating the multilayer structures, the laminated structure also limits the height adjustment of the lower surrounding wall 17, and the optimum adjustment cannot be obtained. Meet the trend of thinning.

因此,改良現有的振盪器之封裝結構,以解決高成本及其整體高度限制的問題,是此技術領域的相關技術人員所待突破的課題。 Therefore, improving the package structure of the existing oscillator to solve the problem of high cost and overall height limitation is a subject to be solved by those skilled in the art.

因此,本發明之目的,即在提供一種具有溫度感測元件之振盪器封裝結構。 Accordingly, it is an object of the present invention to provide an oscillator package structure having temperature sensing elements.

於是,本發明具有溫度感測元件之振盪器封裝結構是電性連接於一個外部電路板,並包含一個基座、一個壓電元件、一個溫度感測元件、複數個焊墊,及複數個電性支撐塊。 Thus, the oscillator package structure of the present invention having a temperature sensing element is electrically connected to an external circuit board and includes a base, a piezoelectric element, a temperature sensing element, a plurality of pads, and a plurality of electrodes. Sexual support block.

該基座具有一個形成有一個容室的本體、一個封閉該容室的蓋板,及配置於該本體的一個第一配線圖案 與一個第二配線圖案。該壓電元件設置於該基座的容室中並電性連接於該第一配線圖案。該溫度感測元件設置於該基座之本體的一個下表面並電性連接於該第一配線圖案與該第二配線圖案,且透過該第一配線圖案以與該壓電元件呈電性連接。該等焊墊設置於該基座之本體的下表面並分別電性連接於該第二配線圖案。該等電性支撐塊分別透過該等焊墊接合於該基座之本體的下表面且圍繞該溫度感測元件,並用以電性連接至該外部電路板的電路,該等焊墊與該等電性支撐塊具有一個預定高度,該預定高度足以使該基座與該外部電路板間形成一個容置該溫度感測元件的空間。 The base has a body formed with a chamber, a cover plate enclosing the chamber, and a first wiring pattern disposed on the body With a second wiring pattern. The piezoelectric element is disposed in a chamber of the susceptor and electrically connected to the first wiring pattern. The temperature sensing element is disposed on a lower surface of the body of the base and electrically connected to the first wiring pattern and the second wiring pattern, and is electrically connected to the piezoelectric element through the first wiring pattern . The pads are disposed on a lower surface of the body of the base and electrically connected to the second wiring pattern. The electrically conductive support blocks are respectively connected to the lower surface of the body of the base through the pads and surround the temperature sensing component, and are electrically connected to the circuit of the external circuit board, the pads and the like The electrical support block has a predetermined height sufficient to form a space between the base and the external circuit board for receiving the temperature sensing element.

此外,本發明之另一個目的,即在提供一種具有溫度感測元件之振盪器封裝結構的製作方法。 Furthermore, it is another object of the present invention to provide a method of fabricating an oscillator package having temperature sensing elements.

於是,本發明具有溫度感測元件之振盪器封裝結構的製作方法,包含一個材料準備步驟、一個壓電元件設置步驟、一個封止步驟、一個電性支撐塊接著步驟,及一個溫度感測元件搭載步驟。 Thus, the method for fabricating an oscillator package structure having a temperature sensing element comprises a material preparation step, a piezoelectric element setting step, a sealing step, an electrical support block and a step, and a temperature sensing element Carrying steps.

該材料準備步驟是準備一個基座、一個壓電元件、一個溫度感測元件,及複數個電性支撐塊,其中,該基座具有一個形成有一個容室的本體、一個蓋板,及彼此電性隔絕的配置於該本體的一個第一配線圖案與一個第二配線圖案。 The material preparation step is to prepare a pedestal, a piezoelectric element, a temperature sensing element, and a plurality of electrical support blocks, wherein the pedestal has a body formed with a chamber, a cover plate, and each other The electrically isolated one of the first wiring pattern and the second wiring pattern disposed on the body.

該壓電元件設置步驟是將該壓電元件設置於該 基座的容室中,並電性連接於該第一配線圖案。 The piezoelectric element setting step is to set the piezoelectric element to the The chamber of the susceptor is electrically connected to the first wiring pattern.

該封止步驟是利用該蓋板封閉該基座之本體的容室,以將該壓電元件封閉於該容室中。 The sealing step is to close the chamber of the body of the base by the cover plate to enclose the piezoelectric element in the chamber.

該電性支撐塊接著步驟是透過設置於該基座之下表面且電性連接於該第二配線圖案的複數個焊墊,以將複數個電性支撐塊接著於該基座的下表面。 The electrical support block is followed by a plurality of pads disposed on the lower surface of the pedestal and electrically connected to the second wiring pattern to connect the plurality of electrical support blocks to the lower surface of the pedestal.

該溫度感測元件搭載步驟是將該溫度感測元件設置於該基座的下表面且由該等電性支撐塊所圍繞,並電性連接於該第一配線圖案與該第二配線圖案,以令該溫度感測元件與該壓電元件透過該第一配線圖案而呈電性連接,從而構成一個具有溫度感測元件之振盪器封裝結構。 The temperature sensing component is mounted on the lower surface of the pedestal and surrounded by the electrical support blocks, and electrically connected to the first wiring pattern and the second wiring pattern. The temperature sensing element and the piezoelectric element are electrically connected through the first wiring pattern to form an oscillator package structure having a temperature sensing element.

在本發明中,該等焊墊與該等電性支撐塊所形成之預定高度足以令該振盪器封裝結構在電性連接於一個外部電路板時,使該基座與該外部電路板間形成一個容置該溫度感測元件的空間。 In the present invention, the pads and the electrical support blocks are formed to a predetermined height sufficient to form the oscillator package structure between the base and the external circuit board when electrically connected to an external circuit board. A space for housing the temperature sensing element.

本發明之功效在於,藉由直接設置於該基座下的該等電性支撐塊,可有效地解決現有以多層氧化鋁陶瓷基板或印刷電路板所構成之下圍壁,其所衍生高成本與高度限制的問題;此外,當將本發明該振盪器封裝結構結合至該外部電路板時,亦可解決因材料不同所產生之拒焊的問題。 The invention has the advantages that the surrounding walls formed by the multilayer alumina ceramic substrate or the printed circuit board can be effectively solved by the electrical support blocks disposed directly under the susceptor, and the high cost is derived therefrom. In addition to the problem of height limitation; in addition, when the oscillator package structure of the present invention is bonded to the external circuit board, the problem of solder resisting due to different materials can also be solved.

2‧‧‧基座 2‧‧‧Base

21‧‧‧容室 21‧‧ ‧ room

22‧‧‧本體 22‧‧‧Ontology

23‧‧‧蓋板 23‧‧‧ Cover

3‧‧‧第一配線圖案 3‧‧‧First wiring pattern

31‧‧‧第一線路 31‧‧‧First line

311‧‧‧第一端部 311‧‧‧ first end

312‧‧‧延伸部 312‧‧‧Extension

313‧‧‧第二端部 313‧‧‧ second end

32‧‧‧第二線路 32‧‧‧second line

321‧‧‧第一端部 321‧‧‧ first end

322‧‧‧第一延伸部 322‧‧‧First Extension

323‧‧‧第二端部 323‧‧‧second end

324‧‧‧第二延伸部 324‧‧‧Second extension

325‧‧‧第三端部 325‧‧‧ third end

4‧‧‧第二配線圖案 4‧‧‧Second wiring pattern

41‧‧‧第一線路 41‧‧‧First line

411‧‧‧第一端部 411‧‧‧ first end

412‧‧‧延伸部 412‧‧‧Extension

413‧‧‧第二端部 413‧‧‧ second end

42‧‧‧第二線路 42‧‧‧second line

421‧‧‧第一端部 421‧‧‧ first end

422‧‧‧延伸部 422‧‧‧Extension

423‧‧‧第二端部 423‧‧‧second end

43‧‧‧第三線路 43‧‧‧ third line

431‧‧‧第一端部 431‧‧‧First end

432‧‧‧延伸部 432‧‧‧Extension

433‧‧‧第二端部 433‧‧‧second end

44‧‧‧第四線路 44‧‧‧fourth line

441‧‧‧第一端部 441‧‧‧ first end

442‧‧‧延伸部 442‧‧‧ Extension

443‧‧‧第二端部 443‧‧‧ second end

5‧‧‧壓電元件 5‧‧‧Piezoelectric components

51‧‧‧第一電性接著劑 51‧‧‧First electrical adhesive

6‧‧‧溫度感測元件 6‧‧‧Temperature sensing components

61‧‧‧第二電性接著劑 61‧‧‧Second electrical adhesive

7‧‧‧焊墊 7‧‧‧ solder pads

8‧‧‧電性支撐塊 8‧‧‧Electric support block

91‧‧‧材料準備步驟 91‧‧‧Material preparation steps

92‧‧‧壓電元件設置步驟 92‧‧‧ Piezoelectric component setting steps

93‧‧‧封止步驟 93‧‧‧Steps to stop

94‧‧‧電性支撐塊接著步驟 94‧‧‧Electric support block next steps

95‧‧‧溫度感測元件搭載步驟 95‧‧‧ Temperature sensing component mounting steps

96‧‧‧封裝測試步驟 96‧‧‧Package test steps

200‧‧‧外部電路板 200‧‧‧External circuit board

H‧‧‧預定高度 H‧‧‧Predetermined height

本發明之其他的特徵及功效,將於參照圖式的 實施方式中清楚地呈現,其中:圖1是一剖視示意圖,說明中華民國第201334404A1早期公開號發明專利案所公開的振盪器之封裝結構;圖2是一立體分解圖,說明本發明具有溫度感測元件之振盪器封裝結構的一實施例;圖3是一側視示意圖,說明本發明該實施例之元件間的連接關係;圖4是一俯視示意圖,說明本發明該實施例之一基座的一上表面,及其上表面所顯示的一第一配線圖案;圖5是一示意圖,說明本發明該實施例之該基座的內部,及其內部所顯示的第一配線圖案與一第二配線圖案;圖6是一仰視示意圖,說明本發明該實施例之該基座的一下表面,及其下表面所顯示的第一配線圖案、第二配線圖案與複數焊墊;圖7是一X-Y散佈圖,說明本發明該實施例的電性支撐塊球徑與預定高度的關係;圖8是一X-Y散佈圖,說明本發明該實施例的焊墊直徑與預定高度的關係;及圖9是一流程圖,說明本發明具有溫度感測元件之振盪器封裝結構的製作方法的一實施例。 Other features and effects of the present invention will be described with reference to the drawings. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic cross-sectional view showing the package structure of an oscillator disclosed in the Patent Publication No. 201334404A1, the disclosure of which is incorporated herein by reference. FIG. 2 is an exploded perspective view showing the temperature of the present invention. An embodiment of the oscillator package structure of the sensing element; FIG. 3 is a side view showing the connection relationship between the components of the embodiment of the present invention; FIG. 4 is a top plan view showing a base of the embodiment of the present invention. An upper surface of the socket, and a first wiring pattern displayed on the upper surface thereof; FIG. 5 is a schematic view showing the interior of the susceptor of the embodiment of the present invention, and the first wiring pattern and the interior thereof displayed a second wiring pattern; FIG. 6 is a bottom view showing the first wiring pattern, the second wiring pattern and the plurality of pads of the lower surface of the susceptor and the lower surface thereof according to the embodiment of the present invention; FIG. An XY scatter diagram illustrating the relationship between the ball diameter of the electrical support block of the embodiment of the present invention and a predetermined height; and FIG. 8 is an XY scatter diagram illustrating the diameter of the pad and the predetermined height of the embodiment of the present invention. Relationships; and FIG. 9 is a flow chart illustrating an embodiment of a method of fabricating an oscillator package structure having temperature sensing elements of the present invention.

在本發明被詳細描述之前,應當注意在以下的說明內容中,類似的元件是以相同的編號來表示。有關本 發明之技術內容、特點與功效,在以下的詳細說明中,將可清楚的呈現。 Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same reference numerals. Related to this The technical content, features and effects of the invention will be apparent from the following detailed description.

參閱圖2與圖3,本發明具有溫度感測元件之振盪器封裝結構之一個實施例是電性連接於一個外部電路板200,本發明具有溫度感測元件之振盪器封裝結構之該實施例包含一個基座2、一個壓電元件5、一個溫度感測元件6、複數個焊墊7,及複數個電性支撐塊8。 Referring to FIG. 2 and FIG. 3, an embodiment of an oscillator package structure having a temperature sensing element of the present invention is electrically connected to an external circuit board 200. The embodiment of the oscillator package structure of the present invention having a temperature sensing element A susceptor 2, a piezoelectric element 5, a temperature sensing element 6, a plurality of pads 7, and a plurality of electrical support blocks 8 are included.

該基座2具有一個形成有一個容室21的本體22、一個封閉該容室21的蓋板23,及配置於該本體22的一個第一配線圖案3與一個第二配線圖案4。在本發明該實施例中,該第一配線圖案3與該第二配線圖案4是如圖4、圖5,與圖6所示。且該基座2是以陶瓷材料(Ceramics)構成,但不限於此。 The susceptor 2 has a body 22 formed with a chamber 21, a cover plate 23 enclosing the chamber 21, and a first wiring pattern 3 and a second wiring pattern 4 disposed on the body 22. In the embodiment of the present invention, the first wiring pattern 3 and the second wiring pattern 4 are as shown in FIGS. 4, 5, and 6. Further, the susceptor 2 is made of a ceramic material (Ceramics), but is not limited thereto.

該壓電元件5是設置於該基座2的容室21中,並透過一個第一電性接著劑51電性連接於該第一配線圖案3,且受該蓋板23保護以封閉於該容室21中,在本實施例中,該壓電元件5是由石英(Quartz)所構成,但本發明並不以此為限。 The piezoelectric element 5 is disposed in the chamber 21 of the susceptor 2 and electrically connected to the first wiring pattern 3 through a first electrical adhesive 51, and is protected by the cover 23 to be enclosed therein. In the chamber 21, in the present embodiment, the piezoelectric element 5 is made of quartz (Quartz), but the invention is not limited thereto.

該溫度感測元件6設置於該基座2之本體22的一個下表面,且用以偵測該壓電元件5之工作環境溫度,並透過外部溫度補償之積體電路或自身溫度補償之積體電路補償該壓電元件5因溫度差異所產生的頻率漂移。在本實施例中,該溫度感測元件6是由自身溫度補償之積體電 路所構成,其主要包括一個溫度感測讀取架構、一個補償電路架構,與一個用以驅動該壓電元件5產生振盪的驅動電路架構。該溫度感測元件6是透過如圖3所示之複數個第二電性接著劑61電性連接於該第一配線圖案3與該第二配線圖案4,透過該第一配線圖案3與該壓電元件5呈電性連接,並透過該第二配線圖案4輸出一個穩定的參考頻率(Reference frequency)。此外,還要說明的是,該溫度感測元件6也可以是一個熱敏電阻元件,並透過該第二配線圖案4與該外部電路板200進行電性連接,且利用該外部電路板200補償該壓電元件5因溫度差異所產生的頻率漂移。 The temperature sensing component 6 is disposed on a lower surface of the body 22 of the susceptor 2, and is configured to detect the working environment temperature of the piezoelectric component 5 and pass through an integrated temperature compensation integrated circuit or a self-temperature compensation product. The bulk circuit compensates for the frequency drift of the piezoelectric element 5 due to temperature differences. In this embodiment, the temperature sensing element 6 is an integrated body compensated by its own temperature. The circuit comprises a temperature sensing read architecture, a compensation circuit architecture, and a drive circuit architecture for driving the piezoelectric element 5 to generate oscillation. The temperature sensing element 6 is electrically connected to the first wiring pattern 3 and the second wiring pattern 4 through a plurality of second electrical adhesives 61 as shown in FIG. 3, and the first wiring pattern 3 is transmitted through the first wiring pattern 3. The piezoelectric element 5 is electrically connected, and outputs a stable reference frequency through the second wiring pattern 4. In addition, it should be noted that the temperature sensing component 6 can also be a thermistor component, and electrically connected to the external circuit board 200 through the second wiring pattern 4, and compensated by the external circuit board 200. The piezoelectric element 5 drifts in frequency due to temperature difference.

該等焊墊7設置於該基座2之本體22的下表面並分別電性連接於該第二配線圖案4。 The pads 7 are disposed on the lower surface of the body 22 of the susceptor 2 and electrically connected to the second wiring pattern 4, respectively.

該等電性支撐塊8是用以電性連接至該外部電路板200的電路,且分別透過該等焊墊7接合於該基座2之本體22的下表面並圍繞該溫度感測元件6,該等焊墊7與該等電性支撐塊8具有一個預定高度H,該預定高度H足以使該基座2與該外部電路板200間形成一個容置該溫度感測元件6的空間。該等電性支撐塊8分別是由具有導電性之材料所構成,於本實施例中,該等電性支撐塊8是以錫球(Solder ball)為例來做說明。 The electrical support blocks 8 are electrically connected to the external circuit board 200 and are respectively bonded to the lower surface of the body 22 of the base 2 through the pads 7 and surround the temperature sensing element 6 . The pads 7 and the electrically conductive support blocks 8 have a predetermined height H which is sufficient to form a space between the susceptor 2 and the external circuit board 200 for accommodating the temperature sensing element 6. Each of the electrically conductive support blocks 8 is made of a material having electrical conductivity. In the present embodiment, the electrically conductive support blocks 8 are exemplified by a solder ball.

詳細地來說,該基座2的第一配線圖案3具有如圖2所示之一個第一線路31及一個第二線路32。再參閱圖2,並同時配合參閱圖4、圖5與圖6,該第一配線圖案 3的第一線路31具有一個自該本體22的上表面朝其下表面延伸的第一端部311、一個自其第一端部311於該本體22的內部橫向延伸的延伸部312,及一個自其延伸部312向下延伸至該本體22的下表面的第二端部313;該第一配線圖案3的第二線路32具有一個自該本體22的上表面朝其下表面延伸的第一端部321、一個自其第一端部321於該本體22的內部橫向延伸的第一延伸部322、一個自其第一延伸部322向下延伸至該本體22的下表面的第二端部323、一個自其第一延伸部322於該本體22的內部橫向延伸的第二延伸部324,及一個自其第二延伸部324向下延伸至該本體22的下表面的第三端部325。 In detail, the first wiring pattern 3 of the susceptor 2 has a first line 31 and a second line 32 as shown in FIG. Referring again to FIG. 2, and referring to FIG. 4, FIG. 5 and FIG. 6, the first wiring pattern is further referred to. The first line 31 of 3 has a first end 311 extending from the upper surface of the body 22 toward the lower surface thereof, and an extension 312 extending laterally from the first end portion 311 to the interior of the body 22, and a a second end portion 313 extending downward from the extension portion 312 to the lower surface of the body 22; the second line 32 of the first wiring pattern 3 has a first extending from the upper surface of the body 22 toward the lower surface thereof An end portion 321 , a first extension portion 322 extending laterally from the first end portion 321 thereof to the interior of the body 22 , and a second end portion extending downward from the first extension portion 322 to a lower surface of the body 22 323, a second extension 324 extending laterally from the first extension 322 thereof to the interior of the body 22, and a third end 325 extending downwardly from the second extension 324 to the lower surface of the body 22. .

再參閱圖5與圖6,該第二配線圖案4具有一個第一線路41、一個第二線路42、一個第三線路43,及一個第四線路44。該第二配線圖案4的第一線路41、第二線路42、第三線路43及第四線路44,分別具有一個自該本體22的下表面朝上表面延伸的第一端部411、421、431、441、一個自其第一端部411、421、431、441於該本體22的內部朝該本體22的周緣橫向延伸的延伸部412、422、432、442,及一個自其延伸部412、422、432、442向下延伸至該本體22的下表面的第二端部413、423、433、443。 Referring again to FIGS. 5 and 6, the second wiring pattern 4 has a first line 41, a second line 42, a third line 43, and a fourth line 44. The first line 41, the second line 42, the third line 43 and the fourth line 44 of the second wiring pattern 4 respectively have a first end portion 411, 421 extending from a lower surface of the body 22 toward the upper surface. 431, 441, an extension portion 412, 422, 432, 442 extending laterally from the first end portion 411, 421, 431, 441 of the body 22 toward the periphery of the body 22, and a portion 412 extending therefrom 422, 432, 442 extend downward to the second ends 413, 423, 433, 443 of the lower surface of the body 22.

同樣再參閱圖2,並同時配合參閱圖4、圖5與圖6,也就是說,該壓電元件5是連接於該第一配線圖案3的第一線路31與第二線路32之各第一端部311、321,而 該溫度感測元件6是連接於該第一配線圖案3的第一線路31之第二端部313及其第二線路32之第二端部323與第三端部325,且連接於該第二配線圖案4的第一線路41、第二線路42、第三線路43,及第四線路44之各第一端部411、421、431、441;該等焊墊7則分別連接該第二配線圖案4的第一線路41、第二線路42、第三線路43,及第四線路44之各第二端部413、423、433、443。 Referring to FIG. 2 again, and referring to FIG. 4, FIG. 5 and FIG. 6, at the same time, the piezoelectric element 5 is connected to the first line 31 and the second line 32 of the first wiring pattern 3. One end 311, 321 while The temperature sensing element 6 is connected to the second end portion 313 of the first line 31 of the first wiring pattern 3 and the second end portion 323 and the third end portion 325 of the second line 32, and is connected to the first end portion 325 First lines 41, 421, 431, and 441 of the first line 41, the second line 42, the third line 43, and the fourth line 44 of the second wiring pattern 4; the pads 7 are respectively connected to the second line The first line 41, the second line 42, the third line 43, and the second ends 413, 423, 433, 443 of the fourth line 44 of the wiring pattern 4.

參閱圖7,改變本實施例該等電性支撐塊8(錫球)的球徑,並固定該等焊墊7的直徑為0.3mm,由圖7所顯示之量測數據可知,隨著該等電性支撐塊8的球徑增大,其所形成的預定高度H也逐漸遞增,即該預定高度H是與該等電性支撐塊8的球徑成正比。參閱圖8,則是改變本實施例該等焊墊7的直徑,並固定該等電性支撐塊8(錫球)的球徑為0.45mm,由圖8所顯示之量測數據可知,隨著該等焊墊7的直徑增大,其所形成的預定高度H則逐漸遞減,即該預定高度H是與該等焊墊7的直徑成反比。因此,由上述的說明可知,該等焊墊7與該等電性支撐塊8的尺寸大小皆會影響該預定高度H,也就是說,本發明可藉由改變該等焊墊7與該等電性支撐塊8的尺寸大小,便可進一步控制該預定高度H,且該預定高度H調整的範圍可精確至0.1mm以下,與現有的氧化鋁陶瓷基板或印刷電路板相較,便可有效地解決其高度限制的問題,也更能符合薄型化的趨勢。 Referring to FIG. 7, the spherical diameter of the electric support block 8 (tin ball) of the embodiment is changed, and the diameter of the solder pads 7 is fixed to 0.3 mm. As shown by the measurement data shown in FIG. 7, the The ball diameter of the isoelectric support block 8 is increased, and the predetermined height H formed by it is gradually increased, that is, the predetermined height H is proportional to the ball diameter of the electric support blocks 8. Referring to FIG. 8, the diameter of the pads 7 in this embodiment is changed, and the ball diameter of the electric support blocks 8 (tin balls) is fixed to 0.45 mm. The measurement data shown in FIG. 8 is known. As the diameter of the pads 7 increases, the predetermined height H formed is gradually decreased, that is, the predetermined height H is inversely proportional to the diameter of the pads 7. Therefore, it can be seen from the above description that the size of the pads 7 and the electrical support blocks 8 affect the predetermined height H, that is, the present invention can be modified by changing the pads 7 and the like. The size of the electrical support block 8 can further control the predetermined height H, and the predetermined height H can be adjusted to a range of less than 0.1 mm, which is effective compared with the existing alumina ceramic substrate or printed circuit board. The problem of solving the height limitation is also more in line with the trend of thinning.

本發明該實施例藉由該第一配線圖案3與該第二配線圖案4的相互配合,使分別設置於該基座2的容室21中的該壓電元件5與設置於該基座2之本體22的下表面的溫度感測元件6呈電性連接,而該第二配線圖案4電性連接至該等焊墊7,同時,該等焊墊7分別與該等電性支撐塊8相互電性連接/結合(Bonding),從而使該實施例可透過該等電性支撐塊8與該外部電路板200電性連接。 In this embodiment of the present invention, the piezoelectric element 5 and the piezoelectric element 5 respectively disposed in the chamber 21 of the susceptor 2 are disposed on the susceptor 2 by the mutual cooperation of the first wiring pattern 3 and the second wiring pattern 4. The temperature sensing component 6 of the lower surface of the body 22 is electrically connected, and the second wiring pattern 4 is electrically connected to the pads 7, and the pads 7 and the electrical support block 8 are respectively The bonding is electrically connected to each other, so that the embodiment can be electrically connected to the external circuit board 200 through the electrical support block 8 .

參閱圖9,本發明具有溫度感測元件之振盪器封裝結構的製作方法之一個實施例是製作出如圖3所示具有溫度感測元件之振盪器封裝結構。本發明之製作方法之該實施例包含一個材料準備步驟91、一個壓電元件設置步驟92、一個封止步驟93、一個電性支撐塊接著步驟94、一個溫度感測元件搭載步驟95,及一個封裝測試步驟96。 Referring to FIG. 9, an embodiment of a method of fabricating an oscillator package structure having a temperature sensing element of the present invention is to fabricate an oscillator package structure having a temperature sensing element as shown in FIG. This embodiment of the manufacturing method of the present invention comprises a material preparation step 91, a piezoelectric element setting step 92, a sealing step 93, an electrical support block followed by step 94, a temperature sensing element mounting step 95, and a Package test step 96.

該材料準備步驟91是準備該基座2、該壓電元件5、該溫度感測元件6,及該等電性支撐塊8。在本發明中,該基座2的細部結構,以及該基座2與該壓電元件5所使用的具體材質,皆已記載於前述說明中,於此不再贅述。但此處需特別說明的是,於該製作方法的實施例中,是利用矽晶穿孔(Through silicon via)技術以將該第一配線圖案3之第一線路31的延伸部312、該第一配線圖案3之第二線路32的第一延伸部322與第二延伸部324,及該第二配線圖案4之第一線路41、第二線路42、第三線路43與第四線路44的各延伸部412、422、432、442設置於該 本體22內。此外,該壓電元件5是先將一個石英經研磨至所需厚度以粗調其頻率;接著,將該石英進行蝕刻清洗以去除研磨過程中所產生的裂痕及附著之異物與油漬,並進行烘乾,以使該石英的頻率範圍更加集中;最後,在該石英的表面蒸鍍電極(適用電極成分可以是Ag、Cr/Ag/Cr或Cr/Ag),即可準備取得該壓電元件5。 The material preparation step 91 is to prepare the susceptor 2, the piezoelectric element 5, the temperature sensing element 6, and the electrical support blocks 8. In the present invention, the detailed structure of the susceptor 2, and the specific materials used for the susceptor 2 and the piezoelectric element 5 are described in the foregoing description, and will not be described herein. However, it should be particularly noted herein that in the embodiment of the manufacturing method, the extension silicon via technology is used to extend the portion 312 of the first line 31 of the first wiring pattern 3, the first The first extension portion 322 and the second extension portion 324 of the second line 32 of the wiring pattern 3, and the first line 41, the second line 42, the third line 43 and the fourth line 44 of the second wiring pattern 4 Extensions 412, 422, 432, 442 are disposed in the Inside the body 22. In addition, the piezoelectric element 5 is first ground to a desired thickness to coarsely adjust its frequency; then, the quartz is etched and cleaned to remove cracks and adhering foreign matter and oil stains generated during the grinding process, and perform Drying to make the frequency range of the quartz more concentrated; finally, the electrode is vapor-deposited on the surface of the quartz (the electrode component may be Ag, Cr/Ag/Cr or Cr/Ag), and the piezoelectric element is ready to be obtained. 5.

該壓電元件設置步驟92是將該壓電元件5設置於該基座2的容室21中,且透過該第一電性接著劑51以電性連接於該第一配線圖案3的第一線路31與第二線路32之各第一端部311、321後,並予以硬化。此處需補充說明的是,在該封止步驟93前,還實施一個水晶頻率調整步驟(圖未示)。該水晶頻率調整步驟是採用離子束(Ion beam)來對該石英之電極施予乾蝕刻,以藉此微調其頻率。 The piezoelectric element setting step 92 is that the piezoelectric element 5 is disposed in the chamber 21 of the susceptor 2, and is electrically connected to the first wiring pattern 3 through the first electrical adhesive 51. The first ends 311, 321 of the line 31 and the second line 32 are then hardened. It should be additionally noted here that before the sealing step 93, a crystal frequency adjustment step (not shown) is also implemented. The crystal frequency adjustment step uses an ion beam (Ion beam) to dry-etch the electrode of the quartz to thereby fine-tune its frequency.

該封止步驟93是利用配置在該基座2本體22之頂緣的一個密封環(Seal ring,圖未示),以透過滾焊封止技術(Seam sealing)使該蓋板23封閉該基座2之本體22的容室21,以將該壓電元件5封閉於該容室21中。在本實施例中,該密封環與該蓋板23是以Fe-Co-Ni為例做說明,但本發明並不限於此。 The sealing step 93 utilizes a sealing ring (not shown) disposed on the top edge of the body 22 of the base 2 to seal the cover 23 by means of Seam sealing. The chamber 21 of the body 22 of the seat 2 encloses the piezoelectric element 5 in the chamber 21. In the present embodiment, the seal ring and the cover plate 23 are described by taking Fe-Co-Ni as an example, but the present invention is not limited thereto.

該電性支撐塊接著步驟94是分別透過設置於該基座2之下表面,且電性連接於該第二配線圖案4的第一線路41、第二線路42、第三線路43與第四線路44之各第二端部413、423、433、443的該等焊墊7,以將該等電性 支撐塊8接著於該基座2的下表面,而使其在電性連接於該外部電路板200時,具有一個預定高度H,可使該基座2與該外部電路板200間形成該可容置該溫度感測元件6的空間。 The electrical support block is further connected to the first line 41, the second line 42, the third line 43 and the fourth line which are respectively disposed on the lower surface of the base 2 and electrically connected to the second wiring pattern 4, respectively. The pads 7 of each of the second ends 413, 423, 433, 443 of the line 44 to treat the electrical properties The support block 8 is then disposed on the lower surface of the base 2 to have a predetermined height H when electrically connected to the external circuit board 200, so that the base 2 and the external circuit board 200 can form the same The space of the temperature sensing element 6 is accommodated.

此處要說明的是,該等電性支撐塊8原則上雖是由具有導電性的材料所構成,且形狀亦無限制。然而,當所選用的材料不同時,其接著的方式就會有所不同。於本發明該製作方法之實施例中,該等電性支撐塊8是以錫球(Solder ball)為例來做說明,而該等錫球則可利用錫球網格陣列(Ball grid array,BGA)的植球技術(Ball attachment process)或網印印刷錫膏技術,經由迴流焊形成於呈圓形的該等焊墊7下。 It should be noted here that the electrically conductive support blocks 8 are in principle composed of a material having electrical conductivity and the shape is not limited. However, when the materials selected are different, the way they follow will be different. In the embodiment of the manufacturing method of the present invention, the electrical support block 8 is exemplified by a solder ball, and the solder ball can utilize a ball grid array (Ball grid array, BGA) Ball attachment process or screen printing solder paste technology is formed by reflow soldering under the solder pads 7 which are rounded.

此外,還要進一步說明的是,為了更加精確地控制該預定高度H,需使該等焊墊7的外觀呈圓形,才能配合該等電性支撐塊8(錫球)的輪廓。因此,為了令該等焊墊7的外觀呈圓形,便需利用矽穿孔(via)的製程方式,使該第二配線圖案4的該第一線路41、第二線路42、第三線路43與第四線路44之各延伸部412、422、432、442分別透過穿孔向下延伸至該本體22的下表面的各第二端部413、423、433、443(見圖5與圖6)。也就是說,利用穿孔將該第二配線圖案4之各延伸部412、422、432、442分別與各第二端部413、423、433、443進行導通的方式,與現有的經由外部導線進行導通的方式相較,可有效地避免於 植錫球的過程中,錫被外部導線所吸附,而導致該等錫球的高度產生偏移,進而影響該預定高度H。 Further, it is further explained that in order to control the predetermined height H more precisely, it is necessary to make the appearance of the pads 7 circular in order to match the contour of the electric support blocks 8 (tin balls). Therefore, in order to make the appearance of the pads 7 circular, the first line 41, the second line 42, and the third line 43 of the second wiring pattern 4 are required to be processed by using a via. Each of the extensions 412, 422, 432, 442 of the fourth line 44 extends through the perforations to the second ends 413, 423, 433, 443 of the lower surface of the body 22 (see FIGS. 5 and 6). . That is, the respective extension portions 412, 422, 432, and 442 of the second wiring pattern 4 are electrically connected to the respective second end portions 413, 423, 433, and 443 by perforation, and the conventional method is performed via an external lead. Compared with the way of conduction, it can be effectively avoided. During the process of implanting the solder balls, the tin is adsorbed by the external wires, causing the height of the solder balls to shift, thereby affecting the predetermined height H.

該溫度感測元件搭載步驟95是利用表面黏著技術(Surface mounting technology,SMT),將該溫度感測元件6設置於該基座2的下表面且由該等電性支撐塊8所圍繞,並透過該等第二電性接著劑61電性連接於該第一配線圖案3的第一線路31之第二端部313及其第二線路32之第二端部323與第三端部325,且連接於該第二配線圖案4的第一線路41、第二線路42、第三線路43,及第四線路44之各第一端部411、421、431、441,以令該溫度感測元件6與該壓電元件5透過該第一配線圖案3而呈電性連接,從而構成如圖3所示之該具有溫度感測元件之振盪器封裝結構。 The temperature sensing element mounting step 95 is performed by the surface mounting technology (SMT), and the temperature sensing element 6 is disposed on the lower surface of the susceptor 2 and surrounded by the electrical support blocks 8 and The second end portion 313 of the first line 31 of the first wiring pattern 3 and the second end portion 323 and the third end portion 325 of the second line 32 are electrically connected to the first wiring pattern 3 through the second electrical adhesive 61. And connecting the first ends 41, 421, 431, and 441 of the first line 41, the second line 42, the third line 43, and the fourth line 44 of the second wiring pattern 4 to sense the temperature. The element 6 and the piezoelectric element 5 are electrically connected through the first wiring pattern 3, thereby constituting the oscillator package structure having the temperature sensing element as shown in FIG.

該封裝測試步驟96是將該振盪器封裝結構進行一個電特性檢測與一個老化測試,以確認該振盪器封裝結構能正常運作並符合應用端之需求。 The package test step 96 performs an electrical characteristic test and an aging test on the oscillator package structure to confirm that the oscillator package structure is functioning properly and meets the requirements of the application end.

本發明具有溫度感測元件之振盪器封裝結構的製作方法有別於該振盪器之封裝結構1的優點在於(再配合參閱圖1),該振盪器之封裝結構1如欲將其電性連接至外部電路板時,還需利用表面黏著技術於外部電路板印刷錫膏,才可將該振盪器之封裝結構1電性連接於該外部電路板上。然而,根據本案先前技術內所記載的內容可知,由於材料不同容易因潤濕性不良而產生拒焊的問題。反觀本 發明具有溫度感測元件的振盪器封裝結構的製作方法之該實施例,由於該等電性支撐塊8(錫球)是直接取代該振盪器之封裝結構1的下圍壁17,一方面可避免因為材質不同所產生拒焊的問題,且可輕易地將本發明具有溫度感測元件的振盪器封裝結構黏著於該外部電路板200;另一方面,也可改善該下圍壁17因採用多層氧化鋁陶瓷或玻璃纖維等昂貴材質所衍生的高成本及高度限制的問題。 The manufacturing method of the oscillator package structure having the temperature sensing component of the present invention is different from the package structure 1 of the oscillator. (There is an advantage of referring to FIG. 1 ), the package structure 1 of the oscillator is electrically connected. When the external circuit board is used, the surface soldering technology is also needed to print the solder paste on the external circuit board, so that the package structure 1 of the oscillator can be electrically connected to the external circuit board. However, according to the contents described in the prior art of the present invention, it is known that the problem of solder repelling due to poor wettability is caused by the difference in materials. In contrast In this embodiment of the method for fabricating an oscillator package structure having a temperature sensing element, since the isoelectric support block 8 (the solder ball) directly replaces the lower surrounding wall 17 of the package structure 1 of the oscillator, The problem of solder resisting caused by different materials is avoided, and the oscillator package structure having the temperature sensing element of the present invention can be easily adhered to the external circuit board 200; on the other hand, the lower surrounding wall 17 can also be improved. High cost and height limitations caused by expensive materials such as multilayer alumina ceramics or fiberglass.

綜上所述,本發明具有溫度感測元件之振盪器封裝結構及其製作方法,藉由設置在該基座2下的該等電性支撐塊8,以取代一般振盪器之封裝結構1的下圍壁17,不僅可改善高成本的問題,還能使本發明該振盪器封裝結構與該外部電路板200接合時,因材料相容而無拒焊的問題;此外,利用調整該等焊墊7或該等電性支撐塊8的尺寸大小,即可得到所欲使用之預定高度H,故確實能達成本發明之目的。 In summary, the present invention has an oscillator package structure having a temperature sensing element and a manufacturing method thereof, which are replaced by the electrical support block 8 disposed under the pedestal 2 to replace the package structure 1 of the general oscillator. The lower wall 17 not only improves the problem of high cost, but also has the problem of no solder repelling due to material compatibility when the oscillator package structure of the present invention is bonded to the outer circuit board 200. In addition, the welding is adjusted by using the same. The size of the pad 7 or the electrical support blocks 8 is such that a predetermined height H is desired to be used, so that the object of the present invention can be achieved.

惟以上所述者,僅為本發明之實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 However, the above is only the embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes and modifications made by the patent application scope and the patent specification of the present invention are still It is within the scope of the patent of the present invention.

2‧‧‧基座 2‧‧‧Base

21‧‧‧容室 21‧‧ ‧ room

22‧‧‧本體 22‧‧‧Ontology

23‧‧‧蓋板 23‧‧‧ Cover

3‧‧‧第一配線圖案 3‧‧‧First wiring pattern

5‧‧‧壓電元件 5‧‧‧Piezoelectric components

51‧‧‧第一電性接著劑 51‧‧‧First electrical adhesive

6‧‧‧溫度感測元件 6‧‧‧Temperature sensing components

61‧‧‧第二電性接著劑 61‧‧‧Second electrical adhesive

7‧‧‧焊墊 7‧‧‧ solder pads

8‧‧‧電性支撐塊 8‧‧‧Electric support block

200‧‧‧外部電路板 200‧‧‧External circuit board

H‧‧‧預定高度 H‧‧‧Predetermined height

Claims (8)

一種具有溫度感測元件之振盪器封裝結構,是電性連接於一個外部電路板,該具有溫度感測元件之振盪器封裝結構包含:一個基座,具有一個形成有一個容室的本體、一個封閉該容室的蓋板,及配置於該本體的一個第一配線圖案與一個第二配線圖案,該第一配線圖案具有一個第一線路及一個第二線路,該第一配線圖案的第一線路具有一個自該本體的一上表面朝其一下表面延伸的第一端部、一個自其第一端部於該本體的內部橫向延伸的延伸部,及一個自其延伸部向下延伸至該本體的下表面的第二端部,該第一配線圖案的第二線路具有一個自該本體的上表面朝其下表面延伸的第一端部、一個自其第一端部於該本體的內部橫向延伸的第一延伸部、一個自其第一延伸部向下延伸至該本體的下表面的第二端部、一個自其第一延伸部於該本體的內部橫向延伸的第二延伸部,及一個自其第二延伸部向下延伸至該本體的下表面的第三端部,該第二配線圖案具有一個第一線路、一個第二線路、一個第三線路,及一個第四線路,該第二配線圖案的第一線路、第二線路、第三線路,及第四線路分別具有一個自該本體的下表面朝上表面延伸的第一端部、一個自其第一端部於該本體的內部朝該本體的周緣橫向延伸的延伸部,及一個自其延伸部向下延伸至該本 體的下表面的第二端部;一個壓電元件,設置於該基座的容室中並電性連接於該第一配線圖案的第一線路與第二線路之各第一端部;一個溫度感測元件,設置於該基座之本體的下表面並連接於該第一配線圖案的第一線路之第二端部及其第二線路之第二端部與第三端部,且連接於該第二配線圖案的第一線路、第二線路、第三線路及第四線路之各第一端部,以電性連接於該第一配線圖案與該第二配線圖案,且透過該第一配線圖案以與該壓電元件呈電性連接;複數個焊墊,設置於該基座之本體的下表面並分別連接於該第二配線圖案的第一線路、第二線路、第三線路,及第四線路之各第二端部;及複數個電性支撐塊,分別透過該等焊墊接合於該基座之本體的下表面且圍繞該溫度感測元件,並用以電性連接至該外部電路板的電路,該等焊墊與該等電性支撐塊具有一個預定高度,該預定高度足以使該基座與該外部電路板間形成一個容置該溫度感測元件的空間。 An oscillator package structure having a temperature sensing element electrically connected to an external circuit board, the oscillator package structure having a temperature sensing element comprising: a base having a body formed with a chamber, and a body a cover plate enclosing the chamber, and a first wiring pattern and a second wiring pattern disposed on the body, the first wiring pattern having a first line and a second line, the first of the first wiring patterns The wire has a first end extending from an upper surface of the body toward a lower surface thereof, an extension extending laterally from the first end thereof to the interior of the body, and a portion extending downwardly from the extension thereof to the a second end of the lower surface of the body, the second line of the first wiring pattern having a first end extending from an upper surface of the body toward a lower surface thereof, and a first end portion of the body from the first end thereof a laterally extending first extension, a second end extending downwardly from the first extension thereof to a lower surface of the body, and a second end extending laterally from the first extension thereof to the interior of the body a second extension portion, and a third end portion extending downward from the second extension portion thereof to a lower surface of the body, the second wiring pattern having a first line, a second line, a third line, and a a fourth line, the first line, the second line, the third line, and the fourth line of the second wiring pattern respectively have a first end extending from a lower surface of the body toward the upper surface, and a first end thereof An extension extending laterally of the body toward the periphery of the body, and an extension extending downwardly from the extension to the body a second end portion of the lower surface of the body; a piezoelectric element disposed in the chamber of the base and electrically connected to the first ends of the first line and the second line of the first wiring pattern; a temperature sensing element disposed on a lower surface of the body of the base and connected to the second end of the first line of the first wiring pattern and the second end and the third end of the second line, and connected The first ends of the first line, the second line, the third line, and the fourth line of the second wiring pattern are electrically connected to the first wiring pattern and the second wiring pattern, and are transparent to the first wiring pattern a wiring pattern is electrically connected to the piezoelectric element; a plurality of solder pads are disposed on the lower surface of the body of the base and are respectively connected to the first line, the second line, and the third line of the second wiring pattern And the second end portions of the fourth line; and the plurality of electrical support blocks are respectively connected to the lower surface of the body of the base through the pads and surround the temperature sensing element, and are electrically connected to The circuit of the external circuit board, the pads and the electrical support blocks It has a predetermined height, the predetermined height sufficient to enable the base forming a receiving space of the temperature sensing element and between the external circuit board. 如請求項1所述的具有溫度感測元件之振盪器封裝結構,其中,該溫度感測元件用以偵測該壓電元件之工作環境溫度並透過外部溫度補償之積體電路或自身溫度補償之積體電路補償該壓電元件因溫度差異所產生的頻率漂移。 The oscillator package structure with a temperature sensing component according to claim 1, wherein the temperature sensing component is configured to detect an operating environment temperature of the piezoelectric component and pass through an external temperature compensation integrated circuit or self temperature compensation. The integrated circuit compensates for the frequency drift of the piezoelectric element due to temperature differences. 如請求項1所述的具有溫度感測元件之振盪器封裝結構,其中,該等焊墊呈圓形,且該預定高度與該等焊墊的直徑成反比。 An oscillator package structure having a temperature sensing element according to claim 1, wherein the pads are circular, and the predetermined height is inversely proportional to the diameters of the pads. 如請求項1所述的具有溫度感測元件之振盪器封裝結構,其中,該等電性支撐塊是由具有導電性之材料所構成。 An oscillator package structure having a temperature sensing element according to claim 1, wherein the electrically conductive support block is made of a material having conductivity. 一種具有溫度感測元件之振盪器封裝結構的製作方法,包含以下步驟:一個材料準備步驟,是準備一個基座、一個壓電元件、一個溫度感測元件,及複數個電性支撐塊,其中,該基座具有一個形成有一個容室的本體、一個蓋板,及彼此電性隔絕的配置於該本體的一個第一配線圖案與一個第二配線圖案,該第一配線圖案具有一個第一線路及一個第二線路,該第一配線圖案的第一線路具有一個自該本體的一上表面朝其下表面延伸的第一端部、一個自其第一端部於該本體的內部橫向延伸的延伸部,及一個自其延伸部向下延伸至該本體的下表面的第二端部,該第一配線圖案的第二線路具有一個自該本體的上表面朝其下表面延伸的第一端部、一個自其第一端部於該本體的內部橫向延伸的第一延伸部、一個自其第一延伸部向下延伸至該本體的下表面的第二端部、一個自其第一延伸部於該本體的內部橫向延伸的第二延伸部,及一個自其第二延伸部向下延伸至該本體的下表面的第三端部, 該第二配線圖案具有一個第一線路、一個第二線路、一個第三線路,及一個第四線路,該第二配線圖案的第一線路、第二線路、第三線路,及第四線路分別具有一個自該本體的下表面朝上表面延伸的第一端部、一個自其第一端部於該本體的內部朝該本體的周緣橫向延伸的延伸部,及一個自其延伸部向下延伸至該本體的下表面的第二端部;一個壓電元件設置步驟,是將該壓電元件設置於該基座的容室中,並連接於該第一配線圖案的第一線路與第二線路之各第一端部;一個封止步驟,利用該蓋板封閉該基座之本體的容室,以將該壓電元件封閉於該容室中;一個電性支撐塊接著步驟,是透過設置於該基座之下表面且連接於該第二配線圖案的第一線路、第二線路、第三線路,及第四線路之各第二端部的複數個焊墊,以將該等電性支撐塊分別接著於該基座的下表面;及一個溫度感測元件搭載步驟,是將該溫度感測元件設置於該基座的下表面且由該等電性支撐塊所圍繞,並連接於該第一配線圖案的第一線路之第二端部及其第二線路之第二端部與第三端部,且連接於該第二配線圖案的第一線路、第二線路、第三線路,及第四線路之各第一端部,以令該溫度感測元件與該壓電元件透過該第一配線圖案而呈電性連接,從而構成一個具有溫度感測元 件之振盪器封裝結構;其中,該等焊墊與該等電性支撐塊所形成之預定高度足以令該振盪器封裝結構在電性連接於一個外部電路板時,使該基座與該外部電路板間形成一個容置該溫度感測元件的空間。 A method for fabricating an oscillator package structure having a temperature sensing element includes the following steps: a material preparation step of preparing a pedestal, a piezoelectric element, a temperature sensing element, and a plurality of electrical support blocks, wherein The pedestal has a body formed with a chamber, a cover plate, and a first wiring pattern and a second wiring pattern disposed on the body electrically isolated from each other, the first wiring pattern having a first And a second line, the first line of the first wiring pattern having a first end extending from an upper surface of the body toward a lower surface thereof, and a first end extending laterally from the first end portion of the body And a second end extending downward from the extension portion to the lower surface of the body, the second line of the first wiring pattern having a first extending from the upper surface of the body toward the lower surface thereof An end portion, a first extension portion extending laterally from the first end portion thereof to the interior of the body, and a second end portion extending downward from the first extension portion thereof to a lower surface of the body A portion extending from the second inner portion which extends in a first transversely extending in the body, and a second extending portion which extends downwardly from the third end portion to the lower surface of the body, The second wiring pattern has a first line, a second line, a third line, and a fourth line, and the first line, the second line, the third line, and the fourth line of the second wiring pattern are respectively Having a first end extending from the lower surface of the body toward the upper surface, an extension extending laterally from the first end to the interior of the body toward the periphery of the body, and one extending downwardly from the extension thereof a second end portion of the lower surface of the body; a piezoelectric element disposing step of disposing the piezoelectric element in the chamber of the pedestal and connecting to the first line and the second line of the first wiring pattern a first end portion of the line; a sealing step of closing the chamber of the body of the base with the cover plate to enclose the piezoelectric element in the chamber; an electrical support block is followed by a step a plurality of pads disposed on a lower surface of the pedestal and connected to the first line, the second line, the third line, and the second ends of the fourth line of the second wiring pattern to Sexual support blocks are respectively attached to the pedestal And a temperature sensing component mounting step of disposing the temperature sensing component on a lower surface of the pedestal and surrounded by the electrical support blocks, and connecting to the first line of the first wiring pattern a second end portion and a second end portion of the second end portion, and the first end, the second line, the third line, and the first end of the fourth line connected to the second wiring pattern a portion for electrically connecting the temperature sensing element and the piezoelectric element through the first wiring pattern to form a temperature sensing element The oscillator package structure; wherein the pads and the electrical support blocks are formed at a predetermined height sufficient for the oscillator package structure to electrically connect to an external circuit board to cause the base and the exterior A space for accommodating the temperature sensing element is formed between the boards. 如請求項5所述的具有溫度感測元件之振盪器封裝結構的製作方法,還包含一個封裝測試步驟,該封裝測試步驟是將該振盪器封裝結構進行一個電特性檢測與一個老化測試,以確認該振盪器封裝結構能正常運作並符合應用端之需求。 The method for fabricating an oscillator package structure having a temperature sensing element according to claim 5, further comprising a package test step of performing an electrical characteristic test and an aging test on the oscillator package structure, Confirm that the oscillator package structure is functioning properly and meets the needs of the application. 如請求項5所述的具有溫度感測元件之振盪器封裝結構的製作方法,其中,在該電性支撐塊接著步驟中,該等焊墊呈圓形,且該預定高度與該等焊墊的直徑成反比。 The method for fabricating an oscillator package structure having a temperature sensing element according to claim 5, wherein in the subsequent step of the electrical support block, the pads are circular, and the predetermined height and the pads are The diameter is inversely proportional. 如請求項5所述的具有溫度感測元件之振盪器封裝結構的製作方法,其中,在該電性支撐塊接著步驟中,該等電性支撐塊是由具有導電性之材料所構成。 The method of fabricating an oscillator package structure having a temperature sensing element according to claim 5, wherein in the subsequent step of the electrical support block, the electrically conductive support block is made of a material having conductivity.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070176517A1 (en) * 2006-01-31 2007-08-02 Kouichi Moriya Surface mount type crystal oscillator
US20070247030A1 (en) * 2006-04-24 2007-10-25 Epson Toyocom Corporation Piezoelectric oscillator
US20080129395A1 (en) * 2006-06-21 2008-06-05 Epson Toyocom Corporation Piezoelectric resonator for oscillator and surface mount type piezoelectric oscillator
CN103096619A (en) * 2011-10-28 2013-05-08 精工爱普生株式会社 Circuit substrate, electronic device, electronic apparatus and method of manufacturing circuit substrate
TWM458034U (en) * 2013-03-27 2013-07-21 Harmony Electronics Corp Quartz oscillator package structure with thermistor element

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070176517A1 (en) * 2006-01-31 2007-08-02 Kouichi Moriya Surface mount type crystal oscillator
US20070247030A1 (en) * 2006-04-24 2007-10-25 Epson Toyocom Corporation Piezoelectric oscillator
US20080129395A1 (en) * 2006-06-21 2008-06-05 Epson Toyocom Corporation Piezoelectric resonator for oscillator and surface mount type piezoelectric oscillator
CN103096619A (en) * 2011-10-28 2013-05-08 精工爱普生株式会社 Circuit substrate, electronic device, electronic apparatus and method of manufacturing circuit substrate
TWM458034U (en) * 2013-03-27 2013-07-21 Harmony Electronics Corp Quartz oscillator package structure with thermistor element

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