JP6396019B2 - Method for manufacturing piezoelectric oscillator - Google Patents

Description

  The present invention relates to a piezoelectric oscillator substrate, a piezoelectric oscillator, and a method for manufacturing a piezoelectric oscillator.

  A piezoelectric oscillator having a substrate, a vibration element mounted on one main surface of the substrate, and an integrated circuit element mounted on the one main surface is known (for example, Patent Document 1). Further, as a method for manufacturing a piezoelectric oscillator, a step of measuring electrical characteristics of a vibration element via an external terminal provided on the substrate after the vibration element is mounted on the substrate and before the integrated circuit element is mounted on the substrate. (For example, patent document 1) is known.

  Patent Document 1 discloses a technique for forming a cutting pattern on a substrate in order to reduce the size of a piezoelectric oscillator manufactured by the above manufacturing method. The cutting pattern connects the external terminal connected to the pad on which the integrated circuit element is mounted and the pad on which the vibration element is mounted, and measures the electrical characteristics of the vibration element via the external terminal. Make it possible. This cutting pattern is cut after measuring the electrical characteristics of the vibration element and before mounting the integrated circuit element on the substrate. Thereby, in the completed piezoelectric oscillator, the external terminal is used as a normal external terminal connected only to the pad on which the integrated circuit element is mounted.

JP 2011-199577 A

  In the technique of Patent Document 1, when the cutting pattern is cut, there is a possibility that a region on the main surface of the substrate on which the integrated circuit element is to be mounted is contaminated. As a result, for example, the mounting of the integrated circuit element is not suitably performed, and there is a possibility that connection failure or deterioration of electrical characteristics may be caused.

  Therefore, it is desirable to provide a piezoelectric oscillator substrate, a piezoelectric oscillator, and a method for manufacturing the piezoelectric oscillator that can cut the cutting pattern suitably.

  The piezoelectric oscillator substrate of the present invention is a substrate on which a vibration element and an integrated circuit element including an oscillation circuit are mounted side by side on one main surface, and a predetermined number of external terminals equal to or greater than 2 and the one A pair of vibration element pads on which the vibration element is mounted, and the integrated circuit element provided on the one main surface and connected to the predetermined number of external terminals. A first integrated circuit element pad having the same number as the predetermined number and a pair of first integrated circuit elements provided on the one main surface and connected to the pair of vibration element pads. Two integrated circuit element pads and two of the predetermined number of first integrated circuit element pads and the pair of second integrated circuit element pads provided on the one main surface, The predetermined number of second integrated circuit element pads and the pair of first sets. It has a one-to-cut pattern of having a portion located outside of the region surrounded by the circuit element pad, the.

  Preferably, the cutting pattern is made of a silver palladium alloy.

  The piezoelectric oscillator according to the present invention includes the above-described piezoelectric oscillator substrate, the vibration elements mounted on the pair of vibration element pads, the predetermined number of first integrated circuit element pads, and the pair of second elements. The integrated circuit element connected to the integrated circuit element pad, and the pair of cutting patterns are cut.

  Preferably, the piezoelectric oscillator substrate is a single layer substrate.

  Preferably, it further has a metal cap fixed to the one main surface so as to seal the vibration element.

  Preferably, the predetermined number of first integrated circuit element pads and the pair of second integrated circuit element pads are arranged in two rows in the arrangement direction of the vibration element and the integrated circuit element, One of the pair of second integrated circuit element pads is included in one of the two columns, the other of the pair of second integrated circuit element pads is included in the other of the two columns, and the predetermined number of external pads A predetermined number of first wirings connecting terminals and the predetermined number of first integrated circuit element pads extend from the first integrated circuit element pads to the outside of the two rows, and A pair of second wirings for connecting the second integrated circuit element pad and the pair of vibration element pads extend from the integrated circuit element side to the vibration element side inside the two rows. .

  The piezoelectric oscillator manufacturing method of the present invention includes a vibration element mounting step of mounting a vibration element on the pair of vibration element pads of the piezoelectric oscillator substrate, and the pair of cutting after the vibration element mounting step. A measurement step of measuring electrical characteristics of the vibration element via the two external terminals connected to the pair of vibration element pads by a pattern for use, and the plurality of second integrated circuit elements after the measurement step An integrated circuit element mounting step of mounting on the piezoelectric oscillator substrate an integrated circuit element connected to the pad for use and the pair of first integrated circuit element pads; and after the integrated circuit element mounting step, And a cutting step for cutting the cutting pattern.

  Preferably, the cutting pattern is made of a silver-palladium alloy, and in the cutting step, the cutting pattern is irradiated with green laser light.

  According to said structure or procedure, size reduction or thickness reduction is realizable at low cost.

The perspective view which shows the structure of the piezoelectric oscillator which concerns on embodiment of this invention. The disassembled perspective view of the piezoelectric oscillator of FIG. Sectional drawing of the piezoelectric oscillator in the III-III line | wire of FIG. 4A is a view showing the upper surface of the substrate of the piezoelectric oscillator of FIG. 1, and FIG. 4B is a view showing the lower surface of the substrate of FIG. 4A. The flowchart which shows the procedure of the manufacturing method of the piezoelectric oscillator of FIG.

  Hereinafter, an oscillator according to an embodiment of the present invention will be described with reference to the drawings. Note that the drawings used in the following description are schematic, and the dimensional ratios and the like on the drawings do not necessarily match the actual ones.

  Moreover, the same code | symbol may be attached | subjected about the same or similar structure. In this case, the same or similar configurations may be distinguished from each other by adding capital letters to the reference numerals such as “external terminal 3” as “external terminal 3A” and “external terminal 3B”.

  FIG. 1 is a perspective view showing a configuration of an oscillator 1 according to an embodiment of the present invention. In FIG. 1, a part of the configuration on the upper side of the oscillator 1 is indicated by a dotted line, and the inside of the oscillator 1 is indicated by a solid line.

  Note that the oscillator 1 may have either direction upward or downward, but in the following embodiments, for convenience, the orthogonal coordinate system xyz is defined and the positive side in the z direction is defined as the upward direction. , Upper surface, lower surface, etc. may be used.

  For example, the oscillator 1 is generally formed in a thin, rectangular parallelepiped shape as a whole. A plurality (four in this embodiment) of external terminals 3 are exposed on the lower surface (see also FIG. 4B). The oscillator 1 is mounted on a circuit board, for example, with a lower surface facing a circuit board (not shown) and pads provided on the circuit board and four external terminals 3 are fixed by soldering or the like.

  The four external terminals 3 include, for example, a GND terminal to which a reference potential (GND signal) is applied, a Vcc terminal to which a drive potential (Vcc signal) is applied (terminal to which DC power is supplied with a potential difference from the reference potential), An output terminal that outputs an oscillation signal (output signal) generated by the oscillator 1. The remaining one is, for example, an E / D terminal to which a signal (E / D signal) for controlling the output and stop of the oscillation signal from the oscillator 1 is input, or a frequency adjustment signal for controlling the frequency of the oscillation signal. This is a Vcon terminal to which (Vcon signal) is input.

  As described above, all the external terminals 3 are used for inputting or outputting signals (potentials) necessary for the operation of the oscillator 1 as a product. That is, the oscillator 1 does not have an external terminal that is used only in the manufacturing process. The specific arrangement and shape of the external terminal 3 will be described later.

  2 is an exploded perspective view of the oscillator 1 (however, some members are omitted), and FIG. 3 is a cross-sectional view of the oscillator 1 taken along line III-III in FIG.

  As shown in FIGS. 1 to 3, the oscillator 1 includes, for example, a substrate 5, a vibration element 7 (FIGS. 2 and 3) mounted on the substrate 5, an integrated circuit element 9 mounted on the substrate 5, A cap 11 covering the vibration element 7 and a sealing resin 12 (shown by dotted lines in FIGS. 1 and 3) for sealing the integrated circuit element 9 and the like are provided.

  The external terminal 3 described above is provided on the substrate 5 and connected to the integrated circuit element 9. The integrated circuit element 9 is connected to the vibration element 7 via the substrate 5, and generates an oscillation signal by applying a voltage to the vibration element 7. The cap 11 and the sealing resin 12 seal the vibration element 7 and the integrated circuit element 9. Specific configurations of these members are as follows.

  The substrate 5 is configured by a so-called single layer substrate. Here, the single-layer substrate has a conductive layer parallel to these principal surfaces only on one principal surface or both principal surfaces of the insulation substrate, and the insulation substrate has a conductive layer parallel to the principal surface. The one that does not have a layer. The single-layer substrate may have a conductor (which may be a conductive layer) extending in the thickness direction of the insulating substrate on the side surface or inside of the insulating substrate in order to connect the conductive layers on both main surfaces to each other. For this reason, since it is not necessary to provide a conductive layer parallel to the main surface inside the substrate 5, the substrate 5 can be made thinner with respect to the thickness of the conductive layer.

  In the present embodiment, the substrate 5 includes an insulating substrate 13, a first conductive layer 15A provided on one main surface (first main surface 13a) of the insulating substrate 13, and the other main surface (first surface) of the insulating substrate 13. A plurality of (four in this embodiment) front and back connecting conductors 17 (four in the present embodiment) that connect the second conductive layer 15B (FIG. 1) provided on the second main surface 13b) to the first conductive layer 15A and the second conductive layer 15B. 1 and 2).

  The insulating substrate 13 does not have flexibility, for example. That is, the substrate 5 is a so-called rigid circuit substrate. The material of the insulating substrate 13 is mainly ceramic or resin, for example. The planar shape of the insulating substrate 13 may be set as appropriate, but is, for example, generally rectangular.

  As shown particularly in FIG. 2, the first conductive layer 15A includes a plurality of (four in the present embodiment) to which the pair of vibration element pads 19 on which the vibration element 7 is mounted and the integrated circuit element 9 are connected. A first integrated circuit element pad 21 and a pair of second integrated circuit element pads 23, and a plurality of wirings connecting the pads and the front and back connection conductors 17. Specific positions and shapes of these pads and wiring will be described later.

  The second conductive layer 15B includes the plurality of external terminals 3B described above.

  The plurality of front and back connection conductors 17 are constituted by, for example, a conductive layer formed on the inner surface of a groove (castellation) extending in the thickness direction of the substrate 5 formed at a corner (or a side surface) of the substrate 5.

  The first conductive layer 15A, the second conductive layer 15B, and the front / back connection conductor 17 are made of, for example, a metal such as Cu or Al. These may be formed of materials and thicknesses different from each other. Further, the material and thickness may be different between the pad and the wiring in the first conductive layer 15A. For example, the wiring may be formed of a Cu layer, and the pad may be configured by performing nickel plating and gold plating on the Cu layer.

  In the present embodiment, preferably, at least a part (a cutting pattern 41 described later) of the first conductive layer 15A is formed of a silver palladium alloy. The whole or most of the first conductive layer 15A may be formed of a silver palladium alloy.

  The configuration of the vibration element 7 may be a known configuration. For example, as shown in FIGS. 2 and 3, the vibration element 7 includes a piezoelectric body 25 formed in a flat plate shape and a pair of excitation electrodes 27 (FIG. 2. One side) provided on both main surfaces of the piezoelectric body 25. The excitation electrode 27 includes a pair of extraction electrodes 29 connected to the pair of excitation electrodes 27 (not shown) hidden behind the piezoelectric body 25.

  The piezoelectric body 25 is made of, for example, quartz, and its planar shape is rectangular. The pair of excitation electrodes 27 are layered electrodes that cover a relatively wide range of the main surface of the piezoelectric body 25, and the planar shape thereof is rectangular. For example, the pair of extraction electrodes 29 are provided side by side in the lateral direction at one end in the longitudinal direction of the piezoelectric body 25.

  For example, the vibration element 7 is mounted on the substrate 5 by fixing the pair of extraction electrodes 29 and the pair of vibration element pads 19 by the conductive adhesive 31 (FIG. 3). The vibration element 7 has, for example, a direction (y direction) in which the end portion on the side where the pair of extraction electrodes 29 is provided intersects (more specifically, intersects) the arrangement direction of the vibration element 7 and the integrated circuit element 9. Placed towards the.

  The integrated circuit element 9 operates by being supplied with DC power from the GND terminal and the Vcc terminal (external terminal 3). Further, the integrated circuit element 9 outputs an oscillation signal having a predetermined frequency generated by applying a voltage to the vibration element 7 from the Output terminal (external terminal 3). Further, the integrated circuit element 9 allows or prohibits the output of the oscillation signal from the Output terminal based on the signal from the E / D terminal (external terminal 3), or uses the signal from the Vcon terminal (external terminal 3) as a signal. Based on this, the frequency of the oscillation signal is adjusted.

  The configuration of the integrated circuit element 9 may be a known configuration including the configuration of the oscillation circuit. The integrated circuit element 9 may be a so-called bare chip or a packaged one.

  For example, the integrated circuit element 9 is formed in a substantially rectangular parallelepiped shape, and has a plurality of connection pads 33 (FIG. 3) on its lower surface. The plurality of connection pads 33 are connected to and fixed to the plurality of integrated circuit element pads (21 and 23) by a plurality of bumps 35 (FIG. 3). An underfill 36 (FIGS. 1 and 3) is filled in the gap between the integrated circuit element 9 and the substrate 5, which is configured by the thickness of the bumps 35 and the like.

  The bump 35 is made of, for example, solder (including lead-free solder) or a conductive adhesive. The underfill 36 is mainly made of resin, for example. The underfill 36 may include a filler made of an inorganic material.

  The cap 11 is formed, for example, in a substantially box shape, and is placed on the first main surface 13 a of the substrate 5 so as to cover the vibration element 7. The cap 11 and the first main surface 13a are fixed by, for example, the adhesive 14 (FIGS. 1 and 3) over the entire circumference of the lower end of the cap 11. Thereby, the vibration element 7 is sealed. The cap 11 is made of, for example, a metal, and thereby the thickness is reduced while ensuring the strength.

  The sealing resin 12 covers, for example, the first main surface 13a, the cap 11, and the integrated circuit element 9. The shape of the outer surface of the sealing resin 12 may be set as appropriate. For example, it is a thin rectangular parallelepiped shape having an area equivalent to that of the substrate 5. The sealing resin 12 may include a filler made of an inorganic material.

  4A is a diagram showing the first main surface 13a of the substrate 5, and FIG. 4B is a diagram showing the second main surface 13b of the substrate 5. As shown in FIG. 4B is a view seen from above (a view showing the second main surface 13b through the oscillator 1), similarly to FIG. 4A. In FIG. 4A, the arrangement range of the adhesive 14 and the arrangement range of the integrated circuit element 9 are also indicated by a two-dot chain line.

  As described above, the plurality of external terminals 3 are connected to the integrated circuit element 9. Between the plurality of external terminals 3 and the integrated circuit element 9, a plurality of front and back connection conductors 17, a plurality of first wirings 37, and a plurality of first integrated circuit element pads 21 are sequentially disposed. Note that these are the same number (four in this embodiment).

  The integrated circuit element 9 is connected to the vibration element 7. Between the integrated circuit element 9 and the vibration element 7, a pair of second integrated circuit element pads 23, a pair of second wirings 39, and a pair of vibration element pads 19 are sequentially disposed.

  In the manufacturing process of the oscillator 1, two of the plurality of external terminals 3 (3A and 3C in the present embodiment) are also connected to the vibration element 7. For example, the substrate 5 is provided with a pair of cutting patterns 41 that connect two (37A and 37C) of the plurality of first wirings 37 to a pair of second integrated circuit element pads 23. . This cutting pattern is cut before the oscillator 1 is completed. FIG. 1 shows a state after cutting, and FIGS. 2 and 4 (a) show a state before cutting.

  As described above, the substrate 5 is composed of a single-layer substrate that does not have a conductive layer parallel to the main surface. The wirings (first wiring 37 and the like) for connecting the front and back connection conductors 17, the first integrated circuit element pads 21, the second integrated circuit element pads 23, and the vibration element pads 19 to each other are all first main surfaces. 13a.

  Specifically, the first wiring 37 extends from the front / back connection conductor 17 to the first integrated circuit element pad 21 on the first main surface 13a. The second wiring 39 extends from the second integrated circuit element pad 23 to the vibration element pad 19 on the first main surface 13a. The cutting pattern 41 extends from the first wiring 37 to the second integrated circuit element pad 23 on the first main surface.

  Various pads and wirings are suitably arranged so that these wirings do not cross each other. Specifically, for example, it is as follows.

  A plurality (four) of front and back connection conductors 17 (external terminals 3) are provided at four corners of the substrate 5. From another viewpoint, the front and back connection conductors 17 are arranged in two rows in the arrangement direction (x direction) of the vibration element 7 and the integrated circuit element 9. A plurality (four) of first integrated circuit element pads 21 and a pair of second integrated circuit element pads 23 are arranged in two rows in the x direction.

  One of the pair of second integrated circuit element pads 23 is included in one of the two rows constituted by the pads (21, 23), and the other of the pair of second integrated circuit element pads 23 is 2 Included in the other of the columns. Each of the pair of second integrated circuit element pads 23 may be provided at any position (x direction) in each column, but is provided at the same position, for example. The first integrated circuit element pad 21 is provided at a position sandwiched in the x direction.

  The plurality of (four) first wirings 37 extend from the plurality of first integrated circuit element pads 21 to the outside of the two rows (outside in the y direction) constituted by the pads (21, 23). They are bent appropriately (but basically outward) and extend to a plurality of front and back connection conductors 17. On the other hand, the pair of second wirings 39 extends to the inner side (the inner side in the y direction) of the two rows formed by the pads (21, 23), and then from the integrated circuit element 9 to the vibrating element inside the two rows. Extending together in the direction to 7, exit the area surrounded by two rows of pads. Thus, the first wiring 37 and the second wiring 39 do not intersect.

  The pair of second wirings 39 extends from the region surrounded by the pads (21, 23) to the vibration element pad 19 so as not to overlap the excitation electrode 27. For example, the pair of second wirings 39 extend in the opposite directions along the outer periphery of the vibration element 7.

  The pair of cutting patterns 41 is disposed at a position where at least a portion to be cut does not overlap the integrated circuit element 9. Specifically, for example, the pair of cutting patterns 41 are moved from the pair of second integrated circuit element pads 23 to the outside of the two rows formed by the pads (21, 23) (outside in the y direction). It extends to a position where it does not overlap with the integrated circuit element 9. Thereafter, the pair of cutting patterns 41 extend to the adjacent first wirings 37 by appropriately bending or the like (but basically not returning to the inner side of the two rows). In this way, the pair of cutting patterns 41 are arranged at positions where most of them do not overlap with the integrated circuit element 9.

  Before the integrated circuit element 9 is mounted on the substrate 5, the size of the integrated circuit element 9 for the substrate 5 is uncertain. However, the arrangement area of the plurality of pads on which the integrated circuit element 9 is mounted substantially overlaps the arrangement area of the integrated circuit element 9. Therefore, if the portion to be cut of the cutting pattern 41 is located outside the region surrounded by the pads (21, 23), there is a high probability that the portion does not overlap the integrated circuit element 9. That is, after the integrated circuit element 9 is mounted on the substrate 5, the cutting pattern 41 is located outside the integrated circuit element 9.

  As described above, the four sets of conductors including the first integrated circuit element pad 21, the first wiring 37, the front / back connection conductor 17 and the external terminal 3 are arranged in four directions. The above-described GND signal, Vcc signal, Output signal, and Vcon signal (or E / D signal) may be assigned to the conductor at any position. For example, the first integrated circuit element pad 21A has a Vcon signal, the first integrated circuit element pad 21B has a GND signal, the first integrated circuit element pad 21C has an Output signal, and the first integrated circuit element pad 21D has Is assigned a Vcc signal.

  The arrangement region of the adhesive 14 indicated by a two-dot chain line in FIG. 4A overlaps, for example, a portion of the second wiring 39 that extends along the outer periphery of the vibration element 7. Therefore, the second wiring 39 and the cap 11 can be made as small as possible, and further, the second wiring 39 can be protected by the adhesive 14.

  FIG. 5 is a flowchart showing an example of the procedure of the method for manufacturing the oscillator 1.

  First, the substrate 5, the vibration element 7 and the integrated circuit element 9 are prepared. These manufacturing methods may be similar to known methods. The substrate 5 is in a state where the cutting pattern 41 has not been cut yet.

  Next, the vibration element 7 is mounted on the substrate 5 (step ST1). Specifically, for example, the conductive adhesive 31 is disposed on the pair of vibration element pads 19, and then the vibration element 7 is disposed so that the extraction electrode 29 contacts the conductive adhesive 31. . Then, the conductive adhesive 31 is heated and cured.

  Next, the frequency of the vibration element 7 is adjusted (step ST2). Specifically, for example, first, the substrate 5 on which the vibration element 7 is mounted is placed in a vacuum atmosphere. Further, the probe of the electrical characteristic test apparatus (not shown) is brought into contact with the external terminals 3A and 3C. That is, the electrical characteristic test apparatus and the vibration element 7 are connected via the external terminal 3. Then, the oscillation frequency of the vibration element 7 is measured, and the excitation electrode 27 is etched with a laser or the like based on the measurement result, or conversely, a metal is deposited on the piezoelectric body 25. Thus, the oscillation frequency of the vibration element 7 is adjusted.

  Next, the vibration element 7 is sealed (step ST3). Specifically, for example, a glass sealing material is applied to one of the substrate 5 and the cap 11. Then, the cap 11 is placed on the substrate 5 in a vacuum atmosphere. Then, the glass sealing material is heated and then cooled to join the cap 11 to the substrate 5 and seal the vibration element 7.

  Next, the characteristic inspection of the vibration element 7 is performed (step ST4). Specifically, for example, first, a probe of an electrical characteristic test apparatus (not shown) is brought into contact with the external terminals 3A and 3C. That is, the electrical characteristic test apparatus and the vibration element 7 are connected via the external terminal 3. Then, for example, the oscillation frequency and crystal impedance value (CI value) of the vibration element 7 are measured.

  In addition, compared with the measurement result at the time of the frequency adjustment in step ST2, the inspection result includes a characteristic change accompanying the attachment of the cap 11 in step ST3. The inspection result is used for adjustment of the oscillation frequency by the integrated circuit element 9, for example. For example, the capacitance of the variable capacitance element included in the oscillation circuit of the integrated circuit element 9 is set based on the inspection result.

  Next, the integrated circuit element 9 is mounted on the substrate 5 (step ST5). Specifically, for example, solder that becomes the bumps 35 is disposed on the plurality of first integrated circuit element pads 21 and the pair of second integrated circuit element pads 23, and the integrated circuit element 9 is placed thereon. And transport to the reflow oven.

  Next, the underfill 36 is filled between the substrate 5 and the integrated circuit element 9 (step ST6). For filling, a known method such as a method using a capillary phenomenon (side fill method) may be used.

  Next, the pair of cutting patterns 41 are cut (step ST7). Specifically, for example, the cutting pattern 41 is cut by irradiating a laser beam. Here, since the cutting pattern 41 is made of a silver-palladium alloy, a green laser can be used as the laser. The green laser is composed of, for example, a YAG laser capable of generating harmonics with a nonlinear crystal, and generates green laser light having a wavelength of 532 nm. Such a green laser is used for printing on the completed oscillator 1, and the green laser for printing may be used for this step.

  Depending on the intensity or irradiation time of the laser light, not only the cutting pattern 41 but also a part of the surface of the substrate 5 may be removed at the cutting position, and a recess may be formed in the first main surface 13a. . This concave portion is evidence that the cutting pattern 41 exists in the oscillator 1 completed as a product.

  Thereafter, the sealing resin 12 is provided on the substrate 5 (step ST8). For example, the molten resin is placed on the substrate 5 and solidified by a known method such as a printing method or a dispenser method.

  Next, an electrical characteristic inspection is performed (step ST9). Specifically, for example, first, a probe of an electrical characteristic inspection device (not shown) is brought into contact with the external terminal 3. That is, the electrical characteristic inspection apparatus is connected to the integrated circuit element 9 through the external terminal 3. Then, the oscillation frequency and the like are measured.

  As described above, the substrate 5 for the oscillator 1 according to the present embodiment has the cutting pattern 41, and the cutting pattern 41 is provided on the first main surface 13a and is used for a plurality of first integrated circuit elements. Two of the pads 21 (21A, 21C) are connected to a pair of second integrated circuit element pads 23, and a plurality of first integrated circuit element pads 21 and a pair of second integrated circuit element pads are connected. It is located outside (at least a part of) the area surrounded by the pad 23.

  Therefore, as described with reference to FIG. 5, after mounting the integrated circuit element 9 on the substrate 5, the pair of cutting patterns 41 can be cut. As a result, the region where the integrated circuit element 9 is mounted on the first main surface 13a of the substrate 5 is not contaminated by the cutting process. As a result, the integrated circuit element 9 is preferably mounted, and the electrical characteristics of the oscillator 1 are stabilized.

  In the present embodiment, the cutting pattern 41 is made of a silver palladium alloy. Therefore, it is possible to cut the cutting pattern 41 using a printing green laser. As a result, it is not necessary to introduce new equipment only for cutting the cutting pattern 41.

  In the present embodiment, the substrate 5 is a single layer substrate. Therefore, the cutting pattern 41 eliminates the need to provide an external terminal that is used only for the inspection of the electrical characteristics of the crystal, and the effect of reducing the size and the effect of reducing the thickness of the substrate 5 by using a single-layer substrate. Together with this, the oscillator 1 can be further miniaturized. Furthermore, in the present embodiment, the oscillator 1 includes the metallic cap 11 fixed to the first main surface 13a so as to seal the vibration element 7, and further miniaturization is achieved.

  In the present embodiment, the plurality of first integrated circuit element pads 21 and the pair of second integrated circuit element pads 23 are arranged in two lines in the arrangement direction (x direction) of the vibration elements 7 and the integrated circuit elements 9. Are lined up. One of the pair of second integrated circuit element pads 23 is included in one of the two rows of pads (21, 23), and the other of the pair of second integrated circuit element pads 23 is of the pads (21, 23). Included in the other of the two rows. The first wiring 37 extends from the first integrated circuit element pad 21 to the outside of the two rows of the pads (21, 23), and the pair of second wirings 39 includes two rows of the pads (21, 23). Inside, it extends from the integrated circuit element 9 side to the vibration element 7 side.

  Therefore, in the single layer substrate, the second wiring 39 can be preferably extended from the integrated circuit element 9 side to the vibration element 7 side so that the second wiring 39 does not intersect the first wiring 37. Further, since the first wiring 37 extends to the outside of the two rows formed by the pads (21, 23), the cutting pattern 41 is extended from the second integrated circuit element pad 23 to the outside of the two rows. The cutting pattern 41 is a simple wiring pattern, is connected to the second integrated circuit element pad 23 and the first wiring 37, and is disposed at a position where at least a part does not overlap the integrated circuit element 9.

  The present invention is not limited to the above embodiment, and may be implemented in various aspects.

  The predetermined number (number of external terminals, front and back connecting conductors, first integrated circuit element pads, first wiring, etc.) is not limited to four. Since it is sufficient that the electrical characteristics of the vibration element can be measured via two external terminals, it is sufficient that the number of external terminals is two or more. For example, only the GND terminal and the Vcc terminal may be provided, and the oscillation signal may be output wirelessly from the integrated circuit element. For example, six external terminals may be provided. In this case, for example, two output terminals that output the same or different oscillation signals may be provided as external terminals, or a terminal that outputs the temperature around the oscillator may be provided.

  The direction of the vibration element is not limited to the direction in which the direction orthogonal to the arrangement direction of the vibration element and the integrated circuit element is the longitudinal direction of the vibration element. For example, the direction of the vibration element may be a direction in which the arrangement direction is the longitudinal direction of the vibration element.

  Note that since the vibration element and the integrated circuit element have different shapes and sizes, the arrangement direction thereof may be comprehensively specified including the shape of these elements, the shape of the substrate, and the like. For example, in this embodiment, a rectangular substrate having a side extending in the x direction and a side extending in the y direction is used, and most of one of the vibration element and the integrated circuit element overlaps the other when viewed in the x direction. Therefore, even if the position of the vibration element and the integrated circuit element (for example, the position of the center of gravity of the figure) is deviated from each other in the y direction, it may be specified that they are arranged in the x direction. Even if they are deviated from each other, it is not necessary to determine the direction oblique to the x direction as the alignment direction. In addition, when it cannot judge in this way, you may specify a row direction using both figure centroids.

  The plurality of first integrated circuit element pads and the pair of second integrated circuit element pads may not be arranged in two rows in the arrangement direction (x direction) of the vibration elements and the integrated circuit elements. For example, these pads may be arranged in two rows in a direction (y direction) orthogonal to the arrangement direction of the vibration elements and the integrated circuit elements, or may be arranged in an arrangement that cannot be interpreted as two rows. .

  Further, the position of the pair of second integrated circuit element pads in the arrangement range of the first and second pads may be appropriately set. For example, as in the embodiment, these first and second pads are arranged in two rows in the x direction, and one second integrated circuit element pad is arranged in one column and the other second integrated circuit element pad. Are included in the other column, the pair of second integrated circuit element pads may be located at positions different from each other in the x-direction, or may be located closest to the vibration element. .

  The front and back connection conductors are not limited to the conductive layer formed on the inner surface of the side groove. For example, the front and back connection conductors may be a conductive layer formed on the inner surface of a through hole (through hole) penetrating the insulating substrate or a conductor filled in the through hole.

  The integrated circuit element is not limited to that mounted on the integrated circuit element pad via the bump. For example, the integrated circuit element may be fixed to an area surrounded by the integrated circuit element pad by an adhesive or the like and connected to the integrated circuit element pad by wire bonding. In this case, the cutting pattern located outside the region surrounded by the integrated circuit element pads is farther from the bonding wire or the like than the cutting pattern that linearly connects the integrated circuit element pads. As a result, the influence of the cutting process on the integrated circuit element or the like is reduced.

  In the actual product, only the portion to be cut (the portion that is lost in the finished product) may be interpreted as a cutting pattern, or the portion including both sides thereof (for example, the second integrated circuit element pad 23 to the second pattern in the embodiment). A portion up to one wiring 37) may be interpreted as a cutting pattern.

  In order to say that at least a part of the cutting pattern is located outside the region surrounded by the integrated circuit element pads (21, 23), for example, at least a part of the cutting pattern has its width It suffices if it is located outside the plurality of pads with respect to a straight line connecting the centers of the pads throughout.

  DESCRIPTION OF SYMBOLS 1 ... Oscillator, 3 ... External terminal, 5 ... Board | substrate, 7 ... Vibration element, 9 ... Integrated circuit element, 13 ... Insulation board | substrate, 13a ... 1st main surface, 13b ... 2nd main surface, 17 ... Front and back connection conductor, 19 DESCRIPTION OF SYMBOLS ... Pad for vibration element, 21 ... Pad for first integrated circuit element, 23 ... Pad for second integrated circuit element, 37 ... First wiring, 39 ... Second wiring, 41 ... Cutting pattern.

Claims (6)

A method for manufacturing a piezoelectric oscillator, comprising:
The piezoelectric oscillator is
A piezoelectric oscillator substrate;
A vibration element mounted on one main surface of the piezoelectric oscillator substrate;
An integrated circuit element including an oscillation circuit, which is mounted alongside the vibration element on the one main surface;
A cap made of metal that covers only the vibration element of the vibration element and the integrated circuit element, and
Have
The piezoelectric oscillator substrate is:
A predetermined number of external terminals equal to or greater than 2,
A pair of vibration element pads provided on the one main surface and on which the vibration element is mounted;
A predetermined number of first integrated circuit element pads provided on the one main surface and connected to the predetermined number of external terminals to which the integrated circuit elements are connected;
A pair of second integrated circuit element pads to which the integrated circuit element is connected, provided on the one main surface and connected to the pair of vibration element pads;
Provided on the one main surface and extending along a path connecting two of the predetermined number of first integrated circuit element pads and the pair of second integrated circuit element pads; A pair having a portion located outside a region surrounded by a predetermined number of pads for the first integrated circuit element and the pair of second integrated circuit element pads, and being interrupted at a cutting position in the portion. Cutting patterns for
Have
In a plan view of the one main surface,
The vibration element has a longitudinal direction in a direction perpendicular to the direction in which the vibration element and the integrated circuit element are arranged,
The cap has the longitudinal direction as the orthogonal direction,
The integrated circuit element has the arrangement direction as a longitudinal direction,
The integrated circuit element, the predetermined number of first integrated circuit element pads, and the pair of second integrated circuit element pads are located on the inner side of a range of lengths of the cap in the orthogonal direction. And
The cutting position is located outside the orthogonal direction of the integrated circuit element, and the predetermined number of first integrated circuit element pads and the pair of second integrated circuit element pads ,
A vibration element mounting step of mounting the vibration element on the pair of vibration element pads of the piezoelectric oscillator substrate in a state where the pair of cutting patterns extend over the entire length of the path;
After the vibration element mounting step, a measurement step of measuring electrical characteristics of the vibration element via the two external terminals connected to the pair of vibration element pads by the pair of cutting patterns;
After the measurement step, an integrated circuit element mounting is performed in which the integrated circuit elements connected to the predetermined number of first integrated circuit element pads and the pair of second integrated circuit element pads are mounted on the piezoelectric oscillator substrate. Process,
After the integrated circuit element mounting step, a cutting step of cutting the pair of cutting patterns at the cutting position;
A method of manufacturing a piezoelectric oscillator having The method for manufacturing a piezoelectric oscillator according to claim 1, wherein the cutting pattern is made of a silver-palladium alloy. The method for manufacturing a piezoelectric oscillator according to claim 1, wherein the piezoelectric oscillator substrate is a single-layer substrate. The predetermined number of first integrated circuit element pads and the pair of second integrated circuit element pads are arranged in two rows in the arrangement direction,
One of the pair of second integrated circuit element pads is included in one of the two columns, and the other of the pair of second integrated circuit element pads is included in the other of the two columns;
The same number of first wirings that connect the predetermined number of external terminals and the predetermined number of first integrated circuit element pads extend from the first integrated circuit element pads to the outside of the two rows. And
A pair of second wirings for connecting the pair of second integrated circuit element pads and the pair of vibration element pads is provided on the inner side of the two rows from the integrated circuit element side to the vibration element side. The manufacturing method of the piezoelectric oscillator of any one of Claims 1-3. The pair of vibration element pads are arranged in the alignment direction along one side of the cap in the orthogonal direction,
A pair of second wirings connecting the pair of vibration element pads and the pair of second integrated circuit element pads are connected from the integrated circuit element side to the integrated circuit element side of the cap. 4. It extends under the cap via one side, extends in opposite directions along the outer periphery of the vibration element, and reaches the pair of vibration element pads. A method for producing a piezoelectric oscillator according to claim 1 . The cutting pattern is made of a silver palladium alloy,
The method for manufacturing a piezoelectric oscillator according to claim 1 , wherein in the cutting step, the cutting pattern is irradiated with green laser light.

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