TWI539246B - Drawing apparatus - Google Patents

Description

Depiction device

The present invention relates to a drawing device for drawing a pattern by irradiating light onto an object.

Conventionally, there is a drawing device that draws a pattern by irradiating a spatially modulated light onto an object on a mounting table and scanning an irradiation region of the light on the object. In such a drawing device, the amount of light on the object is lowered due to deterioration of the light source, deterioration of characteristics of the spatial light modulation element, decrease in transmittance of the optical system, adhesion of foreign matter, and the like. Therefore, in such a drawing device, the amount of light from the drawing head is detected by a light amount sensor provided in the vicinity of the mounting table.

For example, in the laser drawing device of Japanese Laid-Open Patent Publication No. 2003-177553 (Document 1), a first light amount monitor is provided between the acousto-optic modulator and the polygon mirror, and is provided on the drawing stage. The second light quantity monitor. In the laser drawing device, even if the optical characteristics of the first light amount monitor are changed due to deterioration of characteristics of the optical component or adhesion of foreign matter, the first light quantity can be corrected based on the amount of light detected by the second light amount monitor. The light quantity detection accuracy of the light quantity monitor.

In the exposure drawing device of Japanese Laid-Open Patent Publication No. 2008-242173 (Document 2), a first light amount sensor is provided between an aperture member that separates light from a light source and a spatial light modulation means. A second light amount sensor is disposed on the exposed body platform. The exposure drawing device is based on an output from the first light amount sensor The output from the second light amount sensor is judged from the state of the aperture member to the object to be exposed.

In the exposure apparatus of Japanese Laid-Open Patent Publication No. 2010-85507 (Document 3), the first light amount sensor that measures the amount of light of the light source is placed in the vicinity of the light source, and the second light amount of the amount of light passing through the optical element is measured. The detector is disposed at the periphery of the substrate. The exposure device determines the lifetime of the light source based on the output from the first light amount sensor. When it is determined that the light source is within the lifetime of the light source based on the output from the first light amount sensor, the quality of the optical element is determined based on the output from the second light amount sensor.

However, in the laser drawing device of Document 1, when the optical characteristics of the second light amount monitor are deteriorated, it is difficult to accurately correct the light amount detection accuracy of the first light amount monitor. Further, in the exposure apparatus of the documents 2 and 3, when the optical characteristics are deteriorated in any of the first light amount sensor and the second light amount sensor, there is also a case based on the first light amount sensor. The output is reduced from the inspection accuracy of the output from the second light sensor.

The present invention is suitable for a drawing device for drawing a pattern by irradiating light onto an object, and an object thereof is to accurately detect the cause of deterioration of the drawing head.

The drawing device of the present invention includes: a drawing head that irradiates the object with spatially modulated light; and a holding unit that holds the object and moves relative to the drawing head to perform the above-described drawing The illumination area of the head light is scanned on the object; and the inspection unit performs the inspection of the drawing head; and the drawing head includes a light source that emits light, a spatial light modulation element, and an illumination optical system. The light from the light source is guided to the spatial light modulation component; and the projection optical system is guided by the spatially modulated light of the spatial light modulation component. The inspection unit includes: a light amount sensor that receives light from the projection optical system when the position of the drawing light amount set in a relative manner with respect to the drawing head is received a sensor moving mechanism that moves the light amount sensor between the drawing light amount measuring position and a preset intermediate light amount measuring position; the lighting head is inserted from the light source to the spatial light modulation element a light path that captures at least a portion of the light directed from the light source toward the spatial light modulation element, and a measurement optical system that guides the light captured by the light collection head to the amount of light at the intermediate light amount measurement position a sensor; and a head moving mechanism that inserts the head to the optical path or disengages the head from the optical path.

This drawing device can accurately detect the cause of deterioration of the drawing head.

In a preferred embodiment of the present invention, the light amount sensor is provided in the holding portion, and a distance from a front end of the projection optical system to a light receiving surface of the light amount sensor is equal to that from the projection optical system. The distance between the front end and the surface of the object, the sensor moving mechanism relatively moves the holding portion relative to the drawing head.

In another preferred embodiment of the present invention, the illumination optical system includes an integrator, and the illumination head is inserted into an optical path from the integrator to the spatial light modulation element.

In another preferred embodiment of the present invention, the light emitted from the light source is ultraviolet light.

In another preferred embodiment of the present invention, the spatial light modulation element is an optical element in which a plurality of minute mirror surfaces that are changeable are arranged in a planar manner.

In another preferred embodiment of the present invention, in the above light quantity sensor The amount of light received from the measuring optical system is 10% or more and 100% or less of the amount of light received from the projection optical system received by the light amount sensor.

In another preferred embodiment of the present invention, the inspection unit is further improved. The step includes an abnormality detecting unit that determines the amount of light from the measuring optical system received by the light amount sensor and the light from the projection optical system received by the light amount sensor. The amount of light is detected, and the abnormality of the above-described drawing head is detected.

More preferably, the inspection department further has another abnormality check. The detecting unit detects the abnormality of the drawing head based on the amount of light from the measuring optical system received by the light amount sensor and the current or electric power supplied to the light source.

In other preferred embodiments of the present invention, there are further In the drawing head, the other drawing head has the same structure as the drawing head, and the inspection unit further includes another lighting head that is inserted into the self-light source to the spatial light in the other drawing head. a light path of the modulation element capturing at least a portion of the light directed from the light source toward the spatial light modulation element; and other measuring optical systems that direct light captured by the other of the light collecting heads in position The light amount sensor of the intermediate light amount measuring position; wherein the light amount sensor is moved toward the other drawing light amount measuring position set in a relative manner with respect to the other drawing head by the sensor moving mechanism And when the position is at the other described light amount measuring position, the light from the projection optical system of the other drawing head is received.

More preferably, the light amount measurement position and the other light amount described above are described above. The measurement position and the intermediate light amount measurement position are arranged on a straight line.

The above and other objects, features, aspects and advantages of the invention will be apparent from

1‧‧‧Drawing device

3‧‧‧Drawing Department

4‧‧‧ Inspection Department

9‧‧‧Substrate

21‧‧‧ mounting table

22‧‧‧Mobile agencies

23‧‧‧1st mobile agency

24‧‧‧2nd mobile agency

31‧‧‧Drawing head

32‧‧‧Light source

33‧‧‧Lighting optical system

34‧‧‧Spatial light modulation components

35‧‧‧Projection optical system

41‧‧‧Check head

42‧‧‧Lighting head

43‧‧‧Bundle fiber

44‧‧‧Light quantity sensor

45‧‧‧Lighting head moving mechanism

46‧‧‧ Head Anomaly Detection Department

91‧‧‧Upper surface

331‧‧‧ integrator

332‧‧‧ lens

333‧‧‧Mirror

341‧‧‧矽 substrate

342‧‧‧Small mirror group

343‧‧‧Small mirror

441‧‧‧Stained surface

461‧‧‧1st abnormality detection department

462‧‧‧2nd abnormality detection department

S11~S18‧‧‧Steps

Figure 1 is a front elevational view of a depiction device of an embodiment.

Figure 2 is a perspective view of the head and the inspection head.

Fig. 3 is a view showing a spatial light modulation element.

Fig. 4 is a block diagram showing the function of the head abnormality detecting unit.

Fig. 5 is a view showing the flow of the inspection of the drawing head.

Figure 6 is a front view depicting the device.

Fig. 1 is a front view showing the configuration of a drawing device 1 according to an embodiment of the present invention. The drawing device 1 is a direct drawing device that performs pattern drawing by irradiating a light beam having a substantially beam shape that is spatially modulated onto a light-sensitive material on an object, and scanning an irradiation region of the light on the object (so-called Straight drawing device). In the example shown in FIG. 1, the object is a printed wiring board (hereinafter, simply referred to as "substrate 9"). In the substrate 9, a photoresist film formed of a photosensitive material is provided on the copper layer. The drawing device 1 draws a circuit pattern on the photoresist film of the substrate 9.

The drawing device 1 includes a mounting table 21, a moving mechanism 22, a drawing unit 3, and an inspection unit 4. The drawing unit 3 includes a plurality of drawing heads 31 arranged in the X direction. The plurality of drawing heads 31 have the same configuration as each other. The inspection unit 4 includes an inspection head 41, a plurality of lighting heads 42, a plurality of bundle fibers 43, a light amount sensor 44, and a head moving mechanism 45. The inspection head 41 is disposed on the (+X) side of the plurality of drawing heads 31. Light quantity sensor 44 is disposed on the mounting table 21. In the example shown in FIG. 1, three heads 42 are disposed above the three drawing heads 31 (that is, on the (+Z) side). The inspection unit 4 performs inspection of a plurality of drawing heads 31 by using a plurality of lighting heads 42.

The mounting table 21 holds the holding portion of the substrate 9 from the lower side. The moving mechanism 22 relatively moves the substrate 9 together with the mounting table 21 with respect to the plurality of drawing heads 31 and the inspection head 41. The moving mechanism 22 includes a first moving mechanism 23 that moves the mounting table 21 in the Y direction perpendicular to the X direction, and a second moving mechanism 24 that moves the mounting table 21 in the X direction. In the following description, the X direction and the Y direction are also referred to as "sub scanning direction" and "main scanning direction", respectively. Furthermore, the substrate 9 and the mounting table 21 can be rotated together in the horizontal plane by the moving mechanism 22.

In the drawing device 1, on the one hand, the spatially modulated light is irradiated onto the upper surface 91 which is the surface on the (+X) side of the substrate 9 from the plurality of drawing heads 31 of the drawing unit 3, on the one hand, by the first The moving mechanism moves the substrate 9 in the main scanning direction, thereby scanning the irradiation area of the light from the plurality of drawing heads 31 on the substrate 9. Then, the second moving mechanism 24 moves the substrate 9 by only a predetermined distance in the sub-scanning direction, and on the other hand, the spatially modulated light is irradiated onto the substrate 9 to move the substrate 9 in the main scanning direction. In this manner, the drawing device 1 draws a circuit pattern on the substrate 9 by repeatedly moving the substrate 9 in the main scanning direction and moving in the sub-scanning direction.

2 is a perspective view showing the drawing head 31 on the (+X) side of the three drawing heads 31 of the drawing unit 3 and the inspection head 41. In FIG. 2, in order to easily understand the internal structure of the drawing head 31 and the inspection head 41, the outer casing of the drawing head 31 and the inspection head 41 is shown by a broken line, and the inside of the casing is drawn by a solid line.

The drawing head 31 includes a light source 32, an illumination optical system 33, a spatial light modulation element 34, and a projection optical system 35. Light source 32 emits light. From the light source 32 The light is, for example, ultraviolet light. As the light source 32, for example, a light emitting diode (LED) can be used. Illumination optics 33 directs light from source 32 to spatial light modulation element 34. The illumination optical system 33 includes, for example, an integrator 331, a lens 332, and a mirror 333. The integrator 331 increases the uniformity of the illuminance distribution of the light from the light source 32. As the integrator 331, for example, a quartz rod can be used.

As the spatial light modulation element 34, for example, the direction of each can be utilized A plurality of micro-mirror devices (DMDs, digital micro-mirror devices), which are optical elements arranged on a flat surface, can be individually changed. FIG. 3 is a diagram showing the spatial light modulation element 34. The spatial light modulation element 34 includes a micro mirror group 342 provided on the ruthenium substrate 341. In the micro mirror group 342, a plurality of minute mirror faces 343 are two-dimensionally arranged (that is, arranged in two directions perpendicular to each other). The actual tiny mirror group 342 contains more tiny mirrors 343 than shown in FIG. In the spatial light modulation element 34, each of the minute mirror surfaces 343 is inclined by a predetermined angle with respect to the surface of the 矽 substrate 341 by electrostatic action based on the data written in the memory cell corresponding to each of the minute mirror faces 343. . Then, only the light formed by the reflected light from the minute mirror surface 343 in the posture corresponding to the predetermined ON state (that is, the spatially modulated light) is guided to the projection optical system shown in FIG. 35.

Spatially modulated light by the spatial light modulation element 34 is projected by The optical system 35 is guided to the substrate 9 on the mounting table 21 (see Fig. 1). The light from the projection optical system 35 is irradiated onto the irradiation region on the substrate 9 optically conjugate with respect to the minute mirror group 342 (see FIG. 3) of the spatial light modulation element 34.

As shown in FIG. 2, the lighting head 42 of the inspection unit 4 is inserted into the inspection object. That is, the light path from the light source 32 to the spatial light modulation element 34 of the head 31 is depicted. The concentrating head 42 is on the optical path, capturing at least the light from the light source 32 that is directed toward the spatial light modulation element 34. portion. In the example shown in FIG. 2, the head 42 is inserted into the optical path from the integrator 331 to the spatial light modulation element 34. Specifically, the head 42 is inserted immediately after the integrator 331, that is, inserted between the integrator 331 and the lens 332. Similarly, the other lighting heads 42 are inserted into the optical path from the light source 32 to the spatial light modulation element 34 to the other drawing heads 31, and capture at least a portion of the light that is directed from the light source 32 toward the spatial light modulation element 34. In the drawing device 1 shown in FIG. 1, the other lighting heads 42 are also inserted into the optical paths of the other drawing heads 31 from the integrator 331 to the spatial light modulation element 34.

a plurality of bundle fibers 43 are connected to the inspection heads by a plurality of lighting heads 42 respectively 41. The bundle fiber 43 is formed by bundling hundreds to thousands of fine wires, that is, fine fibers. Regarding the two bundle fibers 43 of the three bundle fibers 43, only a part thereof is shown in Fig. 2 .

The inspection head 41 has an integrator fixed to the outer casing of the inspection head 41 (for example, quartz rods) or lenses. The light captured by the lighting head 42 is guided to the inspection head 41 via the bundle fibers 43 connected to the polishing head 42, and the uniformity of the illuminance distribution is improved in the inspection head 41, and then guided to the light amount sensor 44. The inspection head 41 and the entire bundle fiber 43 are shown in Fig. 2 to guide the light captured by the head 42 to which the bundle fiber 43 is attached to the measurement optical system of the light amount sensor 44. Further, the inspection head 41 and the other bundle fibers 43 guide the light captured by the other collection heads 42 to which the other bundle fibers 43 are connected to the other measurement optical system of the light amount sensor 44. The inspection head 41 is shared by several measuring optical systems.

As shown in FIG. 1, the head moving mechanism 45 causes a plurality of lighting heads 42 to phase Relative movement for several drawing heads 31. In the example shown in FIG. 1, a plurality of lighting heads 42 are simultaneously moved in the up and down direction (i.e., the Z direction) by the head moving mechanism 45. Thereby, a plurality of lighting heads 42 are respectively inserted into the optical paths of the plurality of drawing heads 31 as shown in FIG. 2, They are separated from the light path. In Fig. 2, the head 42 is separated from the position on the optical path by a two-dot chain line. In Fig. 2, the illustration of the head moving mechanism 45 is omitted. As the head moving mechanism 45, for example, a cylinder can be utilized.

As described above, the light amount sensor 44 is disposed on the mounting table 21. As shown in FIG. 1, the light receiving surface 441 of the light amount sensor 44 and the upper surface 91 of the substrate 9 held on the mounting table 21 are located at substantially the same position in the Z direction. In the drawing device 1, the mounting table 21 is moved in the X direction and the Y direction by the moving mechanism 22, whereby the light amount sensor 44 also moves in the X direction and the Y direction.

The inspection unit 4 further includes a head abnormality detecting unit that detects an abnormality of the drawing head 31 of the drawing unit 3. FIG. 4 is a block diagram showing the function of the head abnormality detecting unit 46. The head abnormality detecting unit 46 is a central processing unit (CPU, Central Processing Unit) that executes various arithmetic processing, a read only memory (ROM) that memorizes a basic program, and a random access memory that memorizes various kinds of information ( RAM, Random Access Memory, etc. constitutes a general computer system connected to a bus bar. The head abnormality detecting unit 46 includes an abnormality detecting unit 461 and another abnormality detecting unit 462. In the following description, in order to distinguish the abnormality detecting units 461 and 462, the first abnormality detecting unit 461 and the second abnormality detecting unit 462 are respectively referred to. In FIG. 4, the other configuration of the drawing device 1 connected to the head abnormality detecting unit 46 is also shown.

Next, on the one hand, the flow of inspection of the plurality of drawing heads 31 in the drawing device 1 will be described with reference to FIG. 5. In the drawing device 1, first, the mounting table 21 is moved by the moving mechanism 22, and as shown in Fig. 6, the light amount sensor 44 is located directly below the drawing head 31 on the (+X) side (i.e., (-Z) ) side) (step S11). In the following description, the position of the light amount sensor 44 shown in FIG. 6 is referred to as a "drawing light amount measurement position". The light measurement position is drawn with respect to the drawing head 31 located on the most (+X) side. The fixed position.

If the light amount sensor 44 is located at the position where the light amount is measured, then FIG. 2 The light source 32 of the drawing head 31 on the most (+X) side is illuminated, and the light from the light source 32 is guided to the light source 33 through the illumination optical system 33, the spatial light modulation element 34, and the projection optical system 35. The light amount sensor 44 is shown at the position where the light amount is measured. The light amount sensor 44 receives the light from the projection optical system 35 and acquires the amount of light of the light (step S12). In the following description, the amount of light (i.e., illuminance) of the light from the projection optical system 35 received by the light amount sensor 44 at the position where the light amount is measured is referred to as "the amount of light to be drawn". In the drawing head 31, the current supplied to the light source 32 is adjusted so that the amount of drawing light is equal to a predetermined amount of target light (for example, the amount of light when the substrate 9 is drawn on the substrate).

If the drawing light of the drawing head 31 on the (+X) side of the most (+X) side in Fig. 6 is obtained The amount of light sensor 44 is moved in the (-X) direction by the second moving mechanism 24 together with the mounting table 21, and is located directly below the drawing head 31 in the center of the three drawing heads 31. In other words, the light amount sensor 44 is located at the drawing light amount measurement position of the next drawing head 31 (steps S13, S11). When the light amount sensor 44 is located at the next drawing light amount measuring position, the light source 32 of the central drawing head 31 is illuminated, and the light from the projection optical system 35 of the drawing head 31 is received by the light amount sensor 44, and The amount of light of the light, that is, the amount of light to be drawn is obtained (step S12). Then, the current supplied to the light source 32 is adjusted so that the amount of drawing light is equal to the amount of the target light.

In the drawing device 1, the light amount sensor 44 is sequentially moved to the number The plurality of drawing light amount measurement positions corresponding to the drawing head 31 are sequentially obtained, and the drawing light amounts of the plurality of drawing heads 31 are sequentially acquired, and the current supplied to the light source 32 is adjusted so that the drawing light amount is equal to the target light amount (steps S11 to S13). ). Several depictions of each of the heads 31 The amount of light is transmitted from the light amount sensor 44 to the first abnormality detecting unit 461 of the head abnormality detecting unit 46 shown in Fig. 4 . The amount of drawing light of the plurality of drawing heads 31 transmitted to the first abnormality detecting unit 461 is substantially equal to the target light amount.

When the amount of drawing light of the plurality of drawing heads 31 is obtained, the light amount sensor 44 The second moving mechanism 24 moves in the (+X) direction, and as shown in FIGS. 1 and 2, is located immediately below the inspection head 41 (that is, on the (-Z) side) (step S14). In the following description, the position of the light amount sensor 44 shown in FIGS. 1 and 2 is referred to as "intermediate light amount measurement position". The intermediate light amount measurement position is a relative position set in advance with respect to the inspection head 41.

In the drawing device 1, the intermediate light amount measurement position, and a plurality of depictions The plurality of drawing light amount measurement positions corresponding to the heads 31 are arranged on a substantially straight line parallel to the X direction. The second moving mechanism 24 moves the light amount sensor 44 between the intermediate light amount measuring position and the plurality of drawing light amount measuring positions by relatively moving the mounting table 21 in the X direction with respect to the inspection head 41 and the plurality of drawing heads 31. Moving sensor moving mechanism.

If the light amount sensor 44 is located at the intermediate light amount measuring position, each lighting The head 42 is lowered by the head moving mechanism 45, and as shown by the solid line in Fig. 2, is inserted into the optical path of the corresponding drawing head 31 (step S15). Then, in one of the plurality of drawing heads 31, the light source 32 is turned on, and in the other drawing head 31, the light source 32 is turned off. For example, only the light source 32 of the drawing head 31 closest to the (+X) side is illuminated, and the light source 32 of the other drawing head 31 is extinguished. A portion of the light from the source 32 is then captured by insertion into the head 42 on the optical path of the drawing head 31 that has been illuminated by the source 32. The light captured by the lighting head 42 is guided to the light amount at the intermediate light amount measuring position by the measuring optical system corresponding to the lighting head 42 (that is, the beam fiber 43 and the inspection head 41 connected to the lighting head 42). The detector 44 is received by the light amount sensor 44. In the following description, the amount of light at the position where the intermediate light is measured is The amount of light (i.e., illuminance) received by the sensor 44 from the measuring optical system is referred to as "intermediate light amount".

If the amount of intermediate light of the drawing head 31 on the (+X) side is obtained, then 3 The light source 32 of the drawing head 31 in the center of the drawing head 31 is illuminated, and the light source 32 of the other drawing head 31 is turned off. Then, in the same manner as described above, a part of the light from the light source 32 of the drawing head 31 is captured by the head 42 inserted in the center of the optical path of the central drawing head 31. The light captured by the lighting head 42 is guided to the light amount sensor 44 located at the intermediate light amount measuring position by the measuring optical system corresponding to the lighting head 42. The light from the measuring optical system is received by the light amount sensor 44, thereby obtaining the intermediate light amount of the central drawing head 31.

In the drawing device 1, each of the plurality of drawing heads 31 is in the above order The amount of intermediate light is sequentially obtained (step S16). While the number of intermediate light amounts is sequentially acquired by the plurality of drawing heads 31, the light amount sensor 44 does not move from the intermediate light amount measuring position. The intermediate light amount of each of the plurality of drawing heads 31 is transmitted to the first abnormality detecting unit 461 and the second abnormality detecting unit 462 of the head abnormality detecting unit 46 shown in Fig. 4 . The amount of intermediate light in each of the drawing heads 31 is equal to or less than the amount of light to be drawn. In each of the drawing heads 31, the amount of intermediate light is, for example, 10% or more and 100% or less of the amount of light to be drawn. Furthermore, the amount of intermediate light of the plurality of drawing heads 31 does not have to be equal to each other.

If the intermediate light amount of each drawing head 31 is obtained, several lightings are completed. The head 42 is raised by the head moving mechanism 45, and is detached from the optical path of the plurality of drawing heads 31 (step S17). Then, the first abnormality detecting unit 461 of the head abnormality detecting unit 46 detects an abnormality of each of the drawing heads 31 based on the intermediate light amount and the amount of drawing light of each of the drawing heads 31. Specifically, first, based on the output from the light amount sensor 44, the first abnormality detecting unit 461 obtains the amount of the drawing light of the drawing head 31 with respect to the intermediate light amount. The ratio (hereinafter referred to as "measurement light amount ratio"). In the first abnormality detecting unit 461, the reference light amount ratio which is the ratio of the measured light amount in the normal state of the drawing head 31 is stored in advance.

In the first abnormality detecting unit 461, when the measured light amount ratio is smaller than the reference In the light amount ratio, it is determined that the optical head is deteriorated due to deterioration over time, adhesion of foreign matter, or the like, in the configuration in which the drawing head 31 is positioned further rearward than the optical head 42. The configuration in which the insertion position of the optical head 42 is further rearward is the configuration between the projection optical system 35 and the insertion position and the projection optical system 35. In the example shown in FIG. 2, it is a lens 332 and a mirror 333 of the illumination optical system 33, a spatial light modulation element 34, and a projection optical system 35. In the first abnormality detecting unit 461, when the measured light amount ratio is smaller than the reference light amount ratio (for example, 10% of the reference light amount ratio), it is detected that the drawing head 31 is inserted later than the light collecting head 42. An abnormality in optical characteristics in the configuration. The abnormality of the drawing head 31 detected by the first abnormality detecting unit 461 is mainly an abnormality of the spatial light modulation element 34 that is frequently driven to spatially modulate light. The abnormality of the drawing head 31 detected by the first abnormality detecting unit 461 is notified to the operator by means of a notification means such as display of a monitor or a warning sound.

The head abnormality detecting unit 46 is further provided by the second abnormality detecting unit 462. The abnormality of each drawing head 31 is detected based on the amount of intermediate light of each drawing head 31 and the current supplied to the light source 32 by each drawing head 31 (step S18). Specifically, first, based on the output from the light amount sensor 44, the comparison between the intermediate light amount and the ideal light amount is performed. As the ideal light amount, an ideal deterioration function with current and time as variables is set in advance. When the amount of intermediate light is measured, since the current supplied to the light source 32 is a fixed value, the ideal amount of light becomes a function of time. Similarly, the amount of intermediate light is expressed by a function of time as a function, and the ratio of the amount of intermediate light to the amount of ideal light is obtained. Then, if If the ratio is less than a predetermined value (for example, 10%), the optical configuration of the configuration other than the light source 32 (i.e., the illumination optical system 33) in the configuration of the drawing head 31 closer to the insertion position of the head 42 is detected. Anomalous characteristics. The abnormality detected by the second abnormality detecting unit 462 is notified to the operator by a notification means such as a display of the monitor or a warning sound. Further, the comparison between the intermediate light amount and the ideal light amount may be performed in a state where the current supplied to the light source 32 is not adjusted so that the amount of the drawn light is equal to the target light amount.

Further, in the second abnormality detecting unit 462, the amount of light to be drawn is displayed. The adjusted current value (current supplied to the light source 32) in a manner equal to the amount of light is compared with the maximum rated current of the light source 32. Then, when the current supplied to the light source 32 is larger than the maximum rated current, the abnormality of the light source 32 is detected, and the operation is notified to the operation by means of a notification means such as display or warning sound of the monitor. By. The notification of the abnormality of the light source 32 may be divided into two stages of "service request" and "to be exchanged" depending on the magnitude of the current supplied to the light source 32, for example.

As described above, the inspection unit 4 of the drawing device 1 is provided with a sense of light quantity The detector 44 receives the light from the projection optical system 35 of the drawing head 31 when it is located at the drawing light amount measuring position, and the second moving mechanism 24 causes the light amount sensor 44 between the drawing light amount measuring position and the intermediate light amount measuring position. Moving; the lighting head 42 is inserted into the optical path of the drawing head 31 to capture at least a portion of the light that is directed from the light source 32 toward the spatial light modulation element 34; the measuring optical system (ie, the beam fiber 43 and the inspection head 41) The light captured by the lighting head 42 is guided to the light amount sensor 44 at the intermediate light amount measuring position; and the head moving mechanism 45, which inserts the head 42 into the optical path, and causes the head 42 to follow the light path. Get rid of.

Thus, in the drawing device 1, the same light amount sensor 44 is obtained. The amount of light from the projection optical system 35 of the head 31 and the self-drawing head 31 The amount of light taken out between the light source 32 and the spatial light modulation element 34 is compared and compared. Therefore, even if the optical characteristics of the light amount sensor 44 are changed, the change in the optical characteristics does not greatly affect the comparison of the above-described amounts of light. Therefore, in the drawing head 31, whether or not the optical characteristics are deteriorated can be accurately detected before or after the insertion position of the lighting head 42. In other words, the drawing device 1 can accurately detect the cause of deterioration of the drawing head 31.

Moreover, since the lighting head 42 can be performed by the polishing head moving mechanism 45 Since it is moved, the inspection of the drawing head 31 can be performed without opening the outer casing (not shown) of the drawing device 1. As a result, contamination in the drawing device 1 caused by the opening of the outer casing can be reduced.

As described above, in the drawing device 1, it is provided based on the amount of intermediate light and The first abnormality detecting unit 461 that detects the abnormality of the drawing head 31 by detecting the amount of light. Thereby, in the drawing head 31, an abnormality in the configuration of the rear end of the insertion position of the optical head 42 (especially, the abnormality of the spatial light modulation element 34) can be automatically detected. Further, the drawing device 1 includes a second abnormality detecting unit 462 that detects an abnormality of the drawing head 31 based on the amount of intermediate light and the current supplied to the light source 32. Thereby, in the drawing head 31, the abnormality in the configuration closer to the insertion position of the optical head 42 can be automatically detected.

In the drawing device 1, the light amount sensor 44 is placed on the mounting table 21 Further, the second moving mechanism 24 relatively moves the mounting table 21 with respect to the drawing head 31, whereby the light amount sensor 44 moves between the intermediate light amount measuring position and the drawing light amount measuring position. Thereby, the configuration of the drawing device 1 can be simplified.

Further, as described above, the light receiving surface 441 of the light amount sensor 44 and the substrate The upper surface 91 is located at substantially the same position with respect to the up and down direction. That is, the light amount sensing from the front end of the projection optical system 35 of each drawing head 31 to the position where the light amount is measured is The distance from the upper surface of the light receiving surface 441 of the device 44 is substantially equal to the distance from the front end of the projection optical system 35 to the upper and lower surfaces of the upper surface 91 of the substrate 9. Therefore, the amount of light to be drawn by each of the drawing heads 31 obtained by the light amount sensor 44 is substantially equal to the amount of light that is irradiated onto the upper surface 91 of the substrate 9 by the projection optical system 35 of each drawing head 31 when the substrate 9 is drawn. Therefore, the amount of light on the substrate 9 when the pattern is drawn on the substrate 9 can be easily measured by the light amount sensor 44 located at the position where the light amount is measured. Then, by adjusting the amount of drawing light acquired by the light amount sensor 44 to the target light amount by the light amount measuring position, the amount of light from the drawing head 31 on the substrate 9 can be easily adjusted to a desired amount of light.

In the drawing device 1, the illumination optical system 33 of the drawing head 31 has a product The divider 331, the head 42 of the inspection unit 4 is inserted into the optical path from the integrator 331 to the spatial light modulation element 34. That is, the head 42 is inserted into the light whose uniformity is improved by the integrator 331. Therefore, even if the insertion position of the polishing head 42 is shifted in a direction perpendicular to the optical axis of the drawing head 31, the light captured by the lighting head 42 and received by the light amount sensor 44 can be suppressed. The change in the amount of light. Thereby, the inspection accuracy of the drawing head 31 by the inspection unit 4 can be improved.

As described above, in each of the drawing heads 31, the light emitted from the light source 32 is purple. External light. Therefore, deterioration of the respective configurations of the illumination optical system 33, the spatial light modulation element 34, and the projection optical system 35 becomes earlier. Therefore, the above-described structure of the drawing device 1 capable of accurately detecting the cause of deterioration of the drawing head 31 is particularly suitable for a light-based ultraviolet light drawing device that is emitted from a light source.

The drawing device 1 is received by the light amount sensor 44 as described above. The amount of intermediate light is 10% or more and 100% or less of the amount of light to be drawn. As described above, the inspection of the drawing head 31 can be performed accurately by setting the intermediate light amount to an appropriate light amount range. also, The inspection unit 4 can be applied to other drawing devices different from the magnification of the projection optical system 35 of the drawing device 1 in a range of light amount in which the amount of intermediate light is 10% or more and 100% or less of the amount of light to be drawn. In other words, the inspection unit 4 can be applied to several kinds of drawing devices in which the magnifications of the projection optical system 35 are different from each other.

As described above, a plurality of drawing heads 31 are provided in the drawing unit 3, and inspection is performed. The inspection unit 4 includes a lighting head 42 and a measuring optical system corresponding to each drawing head 31. Further, the plurality of measuring optical systems share the inspection head 41, and guide the light captured by each of the collecting heads 42 to the light amount sensor 44 located at the intermediate light amount measuring position. Thereby, the configuration of the inspection unit 4 can be simplified. Moreover, the amount of intermediate light of the plurality of drawing heads 31 can be obtained without moving the light amount sensor 44, so that the time required for the inspection of the plurality of drawing heads 31 can be shortened. Further, since the intermediate light amount measurement position and the plurality of drawing light amount measurement positions are arranged on a straight line, the movement of the light amount sensor 44 can be simplified when the plurality of drawing heads 31 are inspected.

Various changes can be made in the drawing device 1.

For example, the light amount sensor 44 is not necessarily provided on the mounting table 21, and may be provided independently from the mounting table 21. Further, the sensor moving mechanism that moves the light amount sensor 44 independently of the moving mechanism 22 that moves the mounting table 21 may be provided in the drawing device 1.

In the inspection unit 4, a plurality of inspection heads 41 of the same number as the plurality of drawing heads 31 may be provided. Each of the inspection heads 41 is disposed at a position opposite to the drawing head 31, for example, on the (+X) side of the corresponding drawing head 31. That is, the plurality of drawing heads 31 and the plurality of inspection heads 41 are alternately arranged in the X direction. Further, the light amount sensor 44 moves in the X direction on the one hand, and sequentially acquires the amount of light and the amount of intermediate light of each of the drawing heads 31 on the one hand. Thereby, in the combination of the drawing head 31 and the inspection head 41, the length of the bundle fibers 43 connecting the drawing head 31 and the inspection head 41 can be made substantially the same.

In the drawing device 1, the light amount sensor 44 may be relatively moved only with respect to the drawing head 31 and the inspection head 41. For example, the light amount sensor 44 may not move, and the drawing head 31 and the inspection head 41 move in the X direction above the light amount sensor 44. In this case, the state in which the inspection head 41 is located directly above the light amount sensor 44 is a state in which the light amount sensor 44 is located at the intermediate light amount measurement position. Further, in a state where the drawing head 31 is located directly above the light amount sensor 44, the light amount sensor 44 is in a state of drawing the light amount measuring position.

The head 42 is not necessarily inserted immediately after the integrator 331 and may be inserted into the optical path from the integrator 331 to the spatial light modulation element 34. However, as described above, by inserting the polishing head 42 against the integrator 331, even if the insertion position of the polishing head 42 is slightly offset in the direction perpendicular to the optical axis of the drawing head 31, The variation in the amount of light received by the light amount sensor 44 by the light collecting head 42 can be suppressed. As a result, the inspection accuracy of the drawing head 31 by the inspection unit 4 can be improved.

The lighting head 42 is not necessarily inserted into the optical path from the integrator 331 to the spatial light modulation element 34 as long as it is inserted into the optical path from the light source 32 to the spatial light modulation element 34. Even in this case, as described above, the cause of deterioration of the drawing head 31 can be accurately detected.

The plurality of lighting heads 42 do not have to move in the up and down direction at the same time. For example, the head moving mechanism 45 may be provided in each of the heads 42, and the plurality of heads 42 may be moved in the vertical direction independently of each other. In other words, the insertion of each of the daylighting heads 42 into the optical path and the detachment from the optical path can be performed independently of the other daylighting heads 42.

In the inspection unit 4, only one of the lighting heads 42 may be provided with respect to the plurality of drawing heads 31. In this case, the head 42 is moved in the X direction to be in the measurement pair. Immediately above the drawing head 31, the head 42 is lowered, whereby the head 42 is inserted into the optical path of the drawing head 31.

The light source 32 is not limited to the LED, and for example, the laser diode can also be used. (LD, Laser Diode) or a high pressure mercury lamp or the like is used as the light source 32. In the case where a high pressure mercury lamp is used as the light source 32, the power supplied to the light source 32 in the drawing head 31 will be adjusted. Then, in step S18, the second abnormality detecting unit 462 detects an abnormality of each of the drawing heads 31 based on the intermediate light amount of each of the drawing heads 31 and the electric power supplied to the light source 32 by each of the drawing heads 31. In the drawing device 1 , instead of the automatic detection of the abnormality of the drawing head 31 by the head abnormality detecting unit 46 , the intermediate light amount and the amount of the drawn light output from the light amount sensor 44 and the current supplied to the light source 32 or In the electric power, the operator detects the abnormality of the drawing head 31.

In each of the drawing heads 31, for example, grating light may be provided instead of the DMD. A valve (GLV, grating light valve) (registered trademark) is used as the spatial light modulation element 34. In the drawing unit 3, only one drawing head 31 may be provided.

The substrate 9 to be drawn by the drawing device 1 is not necessarily limited to printing. Wiring board. In the drawing device 1, for example, a circuit pattern such as a glass substrate for a flat panel display device such as a semiconductor substrate, a liquid crystal display device, or a plasma display device, a glass substrate for a photomask, or a substrate for a solar cell panel can be used. .

The configurations in the above-described embodiments and modifications may be combined as appropriate within the limits that do not contradict each other.

The invention has been described and illustrated in detail, by way of illustration Therefore, many variations or aspects can be made without departing from the scope of the invention.

3‧‧‧Drawing Department

4‧‧‧ Inspection Department

21‧‧‧ mounting table

31‧‧‧Drawing head

32‧‧‧Light source

33‧‧‧Lighting optical system

34‧‧‧Spatial light modulation components

35‧‧‧Projection optical system

41‧‧‧Check head

42‧‧‧Lighting head

43‧‧‧Bundle fiber

44‧‧‧Light quantity sensor

331‧‧‧ integrator

332‧‧‧ lens

333‧‧‧Mirror

441‧‧‧Stained surface

Claims (30)

A drawing device that emits light to an object and draws a pattern, and includes: a drawing head that irradiates the object with spatially modulated light; and a holding unit that holds the object and is The drawing head performs relative movement, and the irradiation area of the light from the drawing head is scanned on the object; and the inspection unit performs the inspection of the drawing head; and the drawing head includes a light source that emits light a spatial light modulation component; an illumination optical system that directs light from the light source to the spatial light modulation component; and a projection optical system that spatially modulates light in the spatial light modulation component Leading to the holding unit; and the inspection unit is provided with a light amount sensor that receives the light from the projection optical system when the position of the drawing light amount is set relative to the drawing head a sensor moving mechanism that moves the light amount sensor between the drawing light amount measuring position and a preset intermediate light amount measuring position; An optical head inserted into the optical path from the light source to the spatial light modulation element, capturing at least a portion of the light from the light source toward the spatial light modulation element; and the measuring optical system that is captured by the light collecting head Light, guided in place above The light amount sensor of the intermediate light amount measuring position; and the head moving mechanism that inserts the head to the optical path or disengages the head from the optical path. The drawing device of claim 1, wherein the light amount sensor is disposed in the holding portion, and a distance from a front end of the projection optical system to a light receiving surface of the light amount sensor is equal to The distance from the front end of the projection optical system to the surface of the object, and the sensor moving mechanism relatively moves the holding portion relative to the drawing head. The drawing device of claim 2, wherein the illumination optical system includes an integrator, and the lighting head is inserted into an optical path from the integrator to the spatial light modulation element. The drawing device of claim 3, wherein the light emitted from the light source is ultraviolet light. The drawing device of claim 4, wherein the spatial light modulation element is an optical element in which a plurality of minute mirror surfaces are changeable in a planar manner. The drawing device of claim 5, wherein the amount of light received by the light amount sensor from the measuring optical system is light received from the light measuring device and received by the light measuring device. 10% or more of the amount of light is 100% or less. A drawing device according to item 6 of the patent application, wherein Further, the inspection unit further includes an abnormality detecting unit that receives the light from the measuring optical system received by the light amount sensor and receives the projection from the light amount sensor The amount of light of the optical system is detected, and the abnormality of the above-described drawing head is detected. The drawing device of claim 7, wherein the inspection unit further includes another abnormality detecting unit, wherein the other abnormality detecting unit is received from the measuring optical system by the light amount sensor. The amount of light and the current or power supplied to the light source are detected to detect an abnormality in the drawing head. The drawing device of claim 1, wherein the illumination optical system includes an integrator, and the lighting head is inserted into an optical path from the integrator to the spatial light modulation element. The drawing device of claim 9, wherein the light emitted from the light source is ultraviolet light. The drawing device of claim 10, wherein the spatial light modulation element is an optical element in which a plurality of minute mirror surfaces that are changeable are arranged in a planar manner. The drawing device of claim 11, wherein the amount of light received by the light amount sensor from the measuring optical system is light received from the light guiding sensor and received from the projection optical system. 10% or more of the amount of light is 100% or less. The drawing device of claim 12, wherein the inspection unit further includes an abnormality detecting unit, wherein the abnormality detecting unit is The amount of light from the measuring optical system received by the light amount sensor and the amount of light from the projection optical system received by the light amount sensor are detected to detect an abnormality of the drawing head. The drawing device of claim 13, wherein the inspection unit further includes another abnormality detecting unit, wherein the other abnormality detecting unit is received from the measuring optical system by the light amount sensor. The amount of light and the current or power supplied to the light source are detected to detect an abnormality in the drawing head. The drawing device of claim 1, wherein the light emitted from the light source is ultraviolet light. The drawing device of claim 15, wherein the spatial light modulation element is an optical element in which a plurality of minute mirror surfaces that are changeable are arranged in a planar manner. The drawing device of claim 16, wherein the amount of light received by the light quantity sensor from the measuring optical system is light received from the light measuring device and received by the light quantity sensor. 10% or more of the amount of light is 100% or less. The drawing device of claim 17, wherein the inspection unit further includes an abnormality detecting unit that adjusts the amount of light from the measuring optical system received by the light amount sensor, And an amount of light received from the projection optical system received by the light quantity sensor to detect an abnormality of the drawing head. The drawing device of claim 18, wherein the inspection unit further includes another abnormality detecting unit, the other abnormality The detecting unit detects an abnormality of the drawing head based on the amount of light from the measuring optical system received by the light amount sensor and the current or electric power supplied to the light source. The drawing device of claim 1, wherein the spatial light modulation element is an optical element in which a plurality of minute mirror surfaces that are changeable are arranged in a planar manner. The drawing device of claim 20, wherein the amount of light received by the light amount sensor from the measuring optical system is light received from the light guiding sensor and received from the projection optical system. 10% or more of the amount of light is 100% or less. In the drawing device of claim 21, the inspection unit further includes an abnormality detecting unit that determines the amount of light from the measuring optical system received by the light amount sensor, And an amount of light received from the projection optical system received by the light quantity sensor to detect an abnormality of the drawing head. The drawing device of claim 22, wherein the inspection unit further includes another abnormality detecting unit, wherein the other abnormality detecting unit is received from the measuring optical system by the light amount sensor. The amount of light and the current or power supplied to the light source are detected to detect an abnormality in the drawing head. The drawing device of claim 1, wherein the amount of light received by the light amount sensor from the measuring optical system is light received from the light guiding sensor and received from the projection optical system. 10% or more of the amount of light is 100% or less. The drawing device of claim 24, wherein the inspection unit further includes an abnormality detecting unit that receives the amount of light from the measuring optical system received by the light amount sensor, And an amount of light received from the projection optical system received by the light quantity sensor to detect an abnormality of the drawing head. The drawing device of claim 25, wherein the inspection unit further includes another abnormality detecting unit, wherein the another abnormality detecting unit receives the light from the measuring optical system received by the light amount sensor. The amount of light and the current or power supplied to the light source are detected to detect an abnormality in the drawing head. In the drawing device of the first aspect of the invention, the inspection unit further includes an abnormality detecting unit that adjusts the amount of light from the measuring optical system received by the light amount sensor, And an amount of light received from the projection optical system received by the light quantity sensor to detect an abnormality of the drawing head. The drawing device of claim 27, wherein the inspection unit further includes another abnormality detecting unit, wherein the other abnormality detecting unit is received from the measuring optical system by the light amount sensor The amount of light and the current or power supplied to the light source are detected to detect an abnormality in the drawing head. The drawing device according to any one of claims 1 to 28, further comprising: another drawing head having the same structure as the drawing head, wherein the inspection unit is further provided Have: Other concentrating heads are inserted into the optical path from the light source to the spatial light modulation element in the other drawing heads, capturing at least a portion of the light from the light source toward the spatial light modulating element; and others Measuring optical system for guiding light captured by the other of the above-mentioned optical collecting heads to the light quantity sensor positioned at the intermediate light amount measuring position; wherein the light quantity sensor is opposite to the sensor moving mechanism Moving to the other drawing light amount measuring position set in the opposite manner to the other drawing heads, and receiving the projection optical system from the other drawing heads when the other drawing light amount measuring position is located Light. The drawing device of claim 29, wherein the drawing light amount measuring position, the other drawing light amount measuring position, and the intermediate light amount measuring position are arranged on a straight line.