JP2015064525A - Drawing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a drawing apparatus capable of detecting a cause of degradation of a drawing head with a high precision.SOLUTION: A testing part 4 of a drawing apparatus includes: a light quantity sensor 44 for receiving light from a projection optical system 35 of a drawing head 31 when the testing part 4 is positioned at a drawing light quantity measuring position; a lighting head 42 interposed on a light path of a drawing head 31, the lighting head 42 for taking in at least a part of light irradiated from a light source 32 to a spatial light modulation device 34; a bundle fiber 43 for leading light taken in by the lighting head 42 to the light quantity sensor 44 positioned at an intermediate light quantity measuring position; and a testing head 41. Thus, by the drawing apparatus, a light quantity of light from the projection optical system 35 of the drawing head 31 and a light quantity of light taken out of between the light source 32 of the drawing head 31 and the spatial light modulation device 34 are measured by the same light quantity sensor 44 and are compared with each other. Accordingly, even when the optical characteristics of the light quantity sensor 44 is changed, a cause of a degradation of the drawing head 31 can be detected with a high precision.

Description

  The present invention relates to a drawing apparatus that draws a pattern by irradiating an object with light.

  2. Description of the Related Art Conventionally, there is known a drawing apparatus that draws a pattern by irradiating an object on a stage with spatially modulated light and scanning the irradiation area of the light on the object. In such a drawing apparatus, the amount of light on the object may decrease due to deterioration of the light source, characteristic deterioration of the spatial light modulation device, reduction in the transmittance of the optical system, adhesion of foreign matter, and the like. Therefore, in such a drawing apparatus, the light amount from the drawing head is detected by a light amount sensor provided in the vicinity of the stage.

  For example, in the laser drawing apparatus of Patent Document 1, a first light quantity monitor is provided between an acousto-optic modulator and a polygon mirror, and a second light quantity monitor is provided on the drawing stage. In the laser drawing apparatus, even if the optical characteristics of the first light quantity monitor are changed due to the deterioration of the characteristics of the optical components, the adhesion of foreign matters, or the like, the first light quantity is detected based on the light quantity detected by the second light quantity monitor. The light amount detection accuracy of the light amount monitor is calibrated.

  In the exposure drawing apparatus of Patent Document 2, a first light quantity sensor is provided between an aperture member that separates light from a light source and a spatial light modulation means, and a second light quantity sensor is provided on an exposed object table. In the exposure drawing apparatus, based on the output from the first light quantity sensor and the output from the second light quantity sensor, the situation from the aperture member to the object to be exposed is determined.

  In the exposure apparatus of Patent Document 3, a first light amount sensor that measures the light amount of a light source is provided in the vicinity of the light source, and a second light amount sensor that measures the light amount via an optical element is provided around the substrate. In the exposure apparatus, the lifetime of the light source is determined based on the output from the first light quantity sensor. When the output from the first light quantity sensor determines that the light source is within the lifetime, the quality of the optical element is determined based on the output from the second light quantity sensor.

JP 2003-177553 A JP 2008-242173 A JP 2010-85507 A

  By the way, in the laser drawing apparatus of Patent Document 1, it is difficult to accurately calibrate the light quantity detection accuracy of the first light quantity monitor when the optical characteristics of the second light quantity monitor deteriorate. Also, in the exposure apparatuses of Patent Document 2 and Patent Document 3, when deterioration of optical characteristics or the like occurs in either the first light amount sensor or the second light amount sensor, the output from the first light amount sensor and the second light amount sensor There is a risk that the inspection accuracy based on the output from the sensor will decrease.

  The present invention has been made in view of the above problems, and an object of the present invention is to accurately detect a deterioration factor of a drawing head.

  The invention according to claim 1 is a drawing apparatus that draws a pattern by irradiating light on an object, and holds a drawing head that irradiates the object with spatially modulated light, and the object. A holding unit that scans an irradiation area of light from the drawing head on the object by moving relative to the drawing head; and an inspection unit that inspects the drawing head. A head includes a light source that emits light, a spatial light modulation device, an illumination optical system that guides light from the light source to the spatial light modulation device, and the light that is spatially modulated by the spatial light modulation device A projection optical system that leads to a light source, and a light amount sensor that receives light from the projection optical system when the inspection unit is positioned at a drawing light amount measurement position that is determined relative to the drawing head; , The light quantity sensor A sensor moving mechanism that moves between a drawing light quantity measurement position and a predetermined intermediate light quantity measurement position, and is inserted on an optical path from the light source to the spatial light modulation device, and from the light source to the spatial light modulation device A daylighting head that captures at least part of the light that travels toward the light, a measurement optical system that guides the light captured by the daylighting head to the light quantity sensor located at the intermediate light quantity measurement position, and the daylighting head on the optical path. And a daylighting head moving mechanism that is inserted and removed from the optical path.

  Invention of Claim 2 is the drawing apparatus of Claim 1, Comprising: The said light quantity sensor is provided in the said holding | maintenance part, The distance from the front-end | tip of the said projection optical system to the light-receiving surface of the said light quantity sensor is the following. The sensor moving mechanism moves the holding unit relative to the drawing head at a distance equal to the distance from the tip of the projection optical system to the surface of the object.

  A third aspect of the present invention is the drawing apparatus according to the first or second aspect, wherein the illumination optical system includes an integrator, and the lighting head is disposed on an optical path from the integrator to the spatial light modulation device. Inserted.

  The invention according to claim 4 is the drawing apparatus according to any one of claims 1 to 3, wherein the light emitted from the light source is ultraviolet light.

  A fifth aspect of the present invention is the drawing apparatus according to any one of the first to fourth aspects, wherein the spatial light modulation device is an optical element in which a number of micromirror surfaces whose directions can be changed are arranged in a plane. is there.

  A sixth aspect of the present invention is the drawing apparatus according to any one of the first to fifth aspects, wherein a light amount of light from the measurement optical system received by the light amount sensor is determined by the light amount sensor. The amount of light received from the projection optical system is 10% or more and 100% or less.

  Invention of Claim 7 is the drawing apparatus in any one of Claim 1 thru | or 6, Comprising: The said test | inspection part is the light quantity from the said measurement optical system received by the said light quantity sensor, The apparatus further includes an abnormality detection unit that detects an abnormality of the drawing head based on the amount of light from the projection optical system received by the light amount sensor.

  The invention according to claim 8 is the drawing apparatus according to claim 7, wherein the inspection unit is supplied to the light amount of the light from the measurement optical system received by the light amount sensor and the light source. The apparatus further includes another abnormality detection unit that detects abnormality of the drawing head based on current or power.

  A ninth aspect of the present invention is the drawing apparatus according to any one of the first to eighth aspects, further comprising another drawing head having the same structure as the drawing head, wherein the inspection unit includes the other In the other drawing head, the other lighting head that takes in at least a part of the light that is inserted on the optical path from the light source to the spatial light modulation device and travels from the light source to the spatial light modulation device. Another measurement optical system that guides the captured light to the light amount sensor positioned at the intermediate light amount measurement position, and the light amount sensor is relative to the other drawing head by the sensor moving mechanism. It moves to another predetermined drawing light quantity measurement position and receives light from the projection optical system of the other drawing head when it is located at the other drawing light quantity measurement position.

  A tenth aspect of the present invention is the drawing apparatus according to the ninth aspect, wherein the drawing light quantity measurement position, the other drawing light quantity measurement position, and the intermediate light quantity measurement position are arranged on a straight line.

  In the present invention, the deterioration factor of the drawing head can be accurately detected.

It is a front view of the drawing apparatus which concerns on one embodiment. It is a perspective view of a drawing head and an inspection head. It is a figure which shows a spatial light modulation device. It is a block diagram which shows the function of a head abnormality detection part. It is a figure which shows the flow of a test | inspection of a drawing head. It is a front view of a drawing apparatus.

  FIG. 1 is a front view showing a configuration of a drawing apparatus 1 according to an embodiment of the present invention. The drawing apparatus 1 irradiates a light-sensitive material on a target object with light that is substantially beam-modulated and scans the light irradiation area on the target object, thereby drawing a pattern (a so-called direct drawing apparatus). , A direct drawing device). In the example shown in FIG. 1, the object is a printed wiring board (hereinafter simply referred to as “substrate 9”). In the substrate 9, a resist film made of a photosensitive material is provided on the copper layer. In the drawing apparatus 1, a circuit pattern is drawn on the resist film of the substrate 9.

  The drawing apparatus 1 includes a stage 21, a moving mechanism 22, a drawing unit 3, and an inspection unit 4. The drawing unit 3 includes a plurality of drawing heads 31 arranged in the X direction. The plurality of drawing heads 31 have the same structure. The inspection unit 4 includes an inspection head 41, a plurality of daylighting heads 42, a plurality of bundle fibers 43, a light amount sensor 44, and a daylighting head moving mechanism 45. The inspection head 41 is disposed on the (+ X) side of the plurality of drawing heads 31. The light quantity sensor 44 is provided on the stage 21. In the example shown in FIG. 1, three lighting heads 42 are arranged above the three drawing heads 31 (that is, on the (+ Z) side). The inspection unit 4 uses a plurality of daylighting heads 42 to inspect a plurality of drawing heads 31.

  The stage 21 is a holding unit that holds the substrate 9 from below. The moving mechanism 22 moves the substrate 9 together with the stage 21 relative to the plurality of drawing heads 31 and the inspection head 41. The moving mechanism 22 includes a first moving mechanism 23 that moves the stage 21 in the Y direction perpendicular to the X direction, and a second moving mechanism 24 that moves the stage 21 in the X direction. In the following description, the X direction and the Y direction are also referred to as “sub-scanning direction” and “main scanning direction”, respectively. Note that the moving mechanism 22 may allow the substrate 9 to rotate together with the stage 21 in a horizontal plane.

  In the drawing apparatus 1, main scanning is performed on the substrate 9 by the first moving mechanism while irradiating the spatially modulated light from the plurality of drawing heads 31 of the drawing unit 3 onto the upper surface 91 which is the (+ X) side surface of the substrate 9. By moving in the direction, the irradiation area of the light from the plurality of drawing heads 31 is scanned on the substrate 9. Subsequently, the substrate 9 is moved by a predetermined distance in the sub-scanning direction by the second moving mechanism 24, and the substrate 9 is moved in the main scanning direction again while irradiating the spatially modulated light on the substrate 9. In the drawing apparatus 1, the circuit pattern is drawn on the substrate 9 by repeating the movement of the substrate 9 in the main scanning direction and the movement in the sub-scanning direction as described above.

  FIG. 2 is a perspective view showing the most (+ X) drawing head 31 and the inspection head 41 among the three drawing heads 31 of the drawing unit 3. In FIG. 2, in order to facilitate understanding of the internal structures of the drawing head 31 and the inspection head 41, the housings of the drawing head 31 and the inspection head 41 are drawn with broken lines, and the configuration inside the housing is drawn with a solid line.

  The drawing head 31 includes a light source 32, an illumination optical system 33, a spatial light modulation device 34, and a projection optical system 35. The light source 32 emits light. The light emitted from the light source 32 is, for example, ultraviolet light. As the light source 32, for example, an LED (Light Emitting Diode) is used. The illumination optical system 33 guides light from the light source 32 to the spatial light modulation device 34. The illumination optical system 33 includes, for example, an integrator 331, a lens 332, and a mirror 333. The integrator 331 improves the uniformity of the illuminance distribution of the light from the light source 32. For example, a quartz rod is used as the integrator 331.

  As the spatial light modulation device 34, for example, a DMD (digital micromirror device), which is an optical element in which a number of micromirror surfaces whose directions can be individually changed, are arranged in a plane is used. FIG. 3 is a diagram illustrating the spatial light modulation device 34. The spatial light modulation device 34 includes a micromirror surface group 342 provided on a silicon substrate 341. In the micromirror surface group 342, a large number of micromirror surfaces 343 are two-dimensionally arranged (that is, arranged in two directions perpendicular to each other). The actual micromirror surface group 342 includes a larger number of micromirror surfaces 343 than shown in FIG. In the spatial light modulation device 34, each micro mirror surface 343 is inclined by a predetermined angle with respect to the surface of the silicon substrate 341 by electrostatic action according to data written in the memory cell corresponding to each micro mirror surface 343. Then, light (that is, spatially modulated light) formed only by the reflected light from the micromirror surface 343 in a posture corresponding to a predetermined ON state is guided to the projection optical system 35 shown in FIG.

  The light spatially modulated by the spatial light modulation device 34 is guided to the substrate 9 (see FIG. 1) on the stage 21 by the projection optical system 35. The light from the projection optical system 35 is irradiated onto an irradiation region on the substrate 9 that is optically conjugate with respect to the micromirror surface group 342 (see FIG. 3) of the spatial light modulation device 34.

  As shown in FIG. 2, the daylighting head 42 of the inspection unit 4 is inserted on the optical path from the light source 32 of the drawing head 31 to be inspected to the spatial light modulation device 34. The daylighting head 42 captures at least part of the light traveling from the light source 32 to the spatial light modulation device 34 on the optical path. In the example shown in FIG. 2, the daylighting head 42 is inserted on the optical path from the integrator 331 to the spatial light modulation device 34. Specifically, the daylighting head 42 is inserted immediately after the integrator 331, that is, between the integrator 331 and the lens 332. Similarly, the other daylighting head 42 is inserted in the optical path from the light source 32 to the spatial light modulation device 34 in the other drawing head 31, and captures at least a part of the light traveling from the light source 32 to the spatial light modulation device 34. In the drawing apparatus 1 shown in FIG. 1, another daylighting head 42 is also inserted on the optical path from the integrator 331 of the other drawing head 31 to the spatial light modulation device 34.

  The plurality of bundle fibers 43 connect the plurality of daylighting heads 42 to the inspection head 41, respectively. The bundle fiber 43 is a bundle of hundreds to thousands of thin optical fibers that are strands. In FIG. 2, only a part of the two bundle fibers 43 out of the three bundle fibers 43 is illustrated.

  The inspection head 41 includes an integrator (for example, a quartz rod) and a lens that are fixed to the housing of the inspection head 41. The light taken in by the daylighting head 42 is guided to the inspection head 41 via the bundle fiber 43 connected to the daylighting head 42, and the uniformity of the illuminance distribution is improved by the inspection head 41 to the light amount sensor 44. It is guided. The inspection fiber 41 and the bundle fiber 43 shown in FIG. 2 as a whole is a measurement optical system that guides the light taken in by the daylighting head 42 to which the bundle fiber 43 is connected to the light amount sensor 44. The inspection head 41 and the other bundle fiber 43 are other measurement optical systems that guide the light taken in by the other daylighting head 42 to which the other bundle fiber 43 is connected to the light amount sensor 44. The inspection head 41 is shared by a plurality of measurement optical systems.

  As shown in FIG. 1, the lighting head moving mechanism 45 moves the plurality of lighting heads 42 relative to the plurality of drawing heads 31. In the example shown in FIG. 1, the plurality of daylighting heads 42 are simultaneously moved in the vertical direction (that is, the Z direction) by the daylighting head moving mechanism 45. Thereby, the plurality of daylighting heads 42 are respectively inserted on the optical paths of the plurality of drawing heads 31 as shown in FIG. In FIG. 2, the daylighting head 42 at a position separated from the optical path is drawn with a two-dot chain line. In FIG. 2, the illustration of the daylighting head moving mechanism 45 is omitted. As the lighting head moving mechanism 45, for example, an air cylinder is used.

  As described above, the light amount sensor 44 is disposed on the stage 21. As shown in FIG. 1, the light receiving surface 441 of the light amount sensor 44 is positioned at approximately the same position as the upper surface 91 of the substrate 9 held on the stage 21 with respect to the Z direction. In the drawing apparatus 1, when the stage 21 is moved in the X direction and the Y direction by the moving mechanism 22, the light quantity sensor 44 is also moved in the X direction and the Y direction.

  The inspection unit 4 further includes a head abnormality detection unit that detects an abnormality of the drawing head 31 of the drawing unit 3. FIG. 4 is a block diagram illustrating functions of the head abnormality detection unit 46. The head abnormality detection unit 46 has a general computer system configuration in which a CPU that performs various arithmetic processes, a ROM that stores basic programs, a RAM that stores various information, and the like are connected to a bus line. The head abnormality detection unit 46 includes an abnormality detection unit 461 and another abnormality detection unit 462. In the following description, in order to distinguish the abnormality detection units 461 and 462, they are referred to as “first abnormality detection unit 461” and “second abnormality detection unit 462”, respectively. In FIG. 4, another configuration of the drawing apparatus 1 connected to the head abnormality detection unit 46 is also shown.

  Next, the flow of inspection of a plurality of drawing heads 31 in the drawing apparatus 1 will be described with reference to FIG. In the drawing apparatus 1, first, the stage 21 is moved by the moving mechanism 22, and as shown in FIG. 6, the light amount sensor 44 is directly below the (+ X) side drawing head 31 (that is, (−Z) side). Located (step S11). In the following description, the position of the light amount sensor 44 shown in FIG. 6 is referred to as a “drawing light amount measurement position”. The drawing light amount measurement position is a position determined relatively to the drawing head 31 located on the most (+ X) side.

  When the light quantity sensor 44 is positioned at the drawing light quantity measurement position, the light source 32 of the most (+ X) drawing head 31 shown in FIG. 2 is turned on, and the light from the light source 32 is illuminated with the illumination optical system 33, the spatial light modulation device 34, and the projection. The light is guided through the optical system 35 to the light quantity sensor 44 located at the drawing light quantity measurement position shown in FIG. The light amount sensor 44 receives light from the projection optical system 35 and acquires the light amount of the light (step S12). In the following description, the light amount (that is, illuminance) of light from the projection optical system 35 received by the light amount sensor 44 positioned at the drawing light amount measurement position is referred to as “drawing light amount”. In the drawing head 31, the current supplied to the light source 32 is adjusted so that the drawing light amount becomes equal to a predetermined target light amount (for example, the light amount when drawing a pattern on the substrate 9).

  When the drawing light amount of the most (+ X) drawing head 31 in FIG. 6 is acquired, the light amount sensor 44 is moved in the (−X) direction together with the stage 21 by the second moving mechanism 24, and the three drawing heads 31 are moved. Among them, it is located directly below the central drawing head 31. In other words, the light quantity sensor 44 is located at the drawing light quantity measurement position of the next drawing head 31 (steps S13 and S11). When the light amount sensor 44 is positioned at the next drawing light amount measurement position, the light source 32 of the central drawing head 31 is turned on, and the light from the projection optical system 35 of the drawing head 31 is received by the light amount sensor 44. Is obtained (step S12). Then, the current supplied to the light source 32 is adjusted so that the drawing light amount becomes equal to the target light amount.

  In the drawing apparatus 1, the light quantity sensor 44 sequentially moves to a plurality of drawing light quantity measurement positions corresponding to the plurality of drawing heads 31, the drawing light quantities of the plurality of drawing heads 31 are sequentially acquired, and the drawing light quantity becomes equal to the target light quantity. As described above, the current supplied to the light source 32 is adjusted (steps S11 to S13). The respective drawing light amounts of the plurality of drawing heads 31 are sent from the light amount sensor 44 to the first abnormality detection unit 461 of the head abnormality detection unit 46 shown in FIG. The drawing light amounts of the plurality of drawing heads 31 sent to the first abnormality detection unit 461 are approximately equal to the target light amount.

  When the drawing light amounts of the plurality of drawing heads 31 are acquired, the light amount sensor 44 is moved in the (+ X) direction by the second moving mechanism 24, and as shown in FIGS. , (−Z) side) (step S14). In the following description, the position of the light quantity sensor 44 shown in FIGS. 1 and 2 is referred to as “intermediate light quantity measurement position”. The intermediate light quantity measurement position is a predetermined relative position with respect to the inspection head 41.

  In the drawing apparatus 1, the intermediate light quantity measurement positions and the plurality of drawing light quantity measurement positions respectively corresponding to the plurality of drawing heads 31 are arranged on a substantially straight line parallel to the X direction. The second moving mechanism 24 moves the stage 21 relative to the inspection head 41 and the plurality of drawing heads 31 in the X direction, thereby causing the light quantity sensor 44 to move between the intermediate light quantity measurement position and the plurality of drawing light quantity measurement positions. It is a sensor movement mechanism which moves between.

  When the light quantity sensor 44 is positioned at the intermediate light quantity measurement position, each daylighting head 42 is lowered by the daylighting head moving mechanism 45 and is inserted on the optical path of the corresponding drawing head 31 as shown by the solid line in FIG. S15). The light source 32 is turned on in one of the drawing heads 31 and the light source 32 is turned off in the other drawing heads 31. For example, only the light source 32 of the most (+ X) drawing head 31 is turned on, and the light sources 32 of the other drawing heads 31 are turned off. Then, a part of the light from the light source 32 is taken in by the daylighting head 42 inserted on the optical path of the drawing head 31 in which the light source 32 is turned on. The light taken in by the daylighting head 42 is measured by the measurement optical system corresponding to the daylighting head 42 (that is, the bundle fiber 43 and the inspection head 41 connected to the daylighting head 42). 44 and is received by the light quantity sensor 44. In the following description, the light amount (that is, illuminance) of light from the measurement optical system received by the light amount sensor 44 located at the intermediate light amount measurement position is referred to as “intermediate light amount”.

  When the intermediate light amount of the most (+ X) drawing head 31 is acquired, the light source 32 of the central drawing head 31 among the three drawing heads 31 is turned on, and the light sources 32 of the other drawing heads 31 are turned off. Similarly to the above, a part of the light from the light source 32 of the drawing head 31 is taken in by the central lighting head 42 inserted on the optical path of the central drawing head 31. The light taken in by the daylighting head 42 is guided to the light quantity sensor 44 located at the intermediate light quantity measurement position by the measurement optical system corresponding to the daylighting head 42. The light from the measurement optical system is received by the light quantity sensor 44, whereby the intermediate light quantity of the central drawing head 31 is acquired.

  In the drawing apparatus 1, the intermediate light amount is sequentially acquired for each of the plurality of drawing heads 31 according to the above procedure (step S <b> 16). While the intermediate light amount is sequentially acquired for the plurality of drawing heads 31, the light amount sensor 44 does not move from the intermediate light amount measurement position. The intermediate light amounts of the plurality of drawing heads 31 are sent to the first abnormality detection unit 461 and the second abnormality detection unit 462 of the head abnormality detection unit 46 shown in FIG. The intermediate light amount of each drawing head 31 is less than the drawing light amount. In each drawing head 31, the intermediate light amount is, for example, 10% or more and 100% or less of the drawing light amount. Note that the intermediate light amounts of the plurality of drawing heads 31 are not necessarily equal to each other.

  When the acquisition of the intermediate light amount of each drawing head 31 is completed, the plurality of daylighting heads 42 are raised by the daylighting head moving mechanism 45 and are separated from the optical paths of the plurality of drawing heads 31 (step S17). Then, the first abnormality detection unit 461 of the head abnormality detection unit 46 detects the abnormality of each drawing head 31 based on the intermediate light amount and the drawing light amount of each drawing head 31. Specifically, first, based on the output from the light amount sensor 44, a ratio of the drawing light amount of the drawing head 31 to the intermediate light amount (hereinafter referred to as “measured light amount ratio”) is obtained by the first abnormality detection unit 461. . The first abnormality detection unit 461 stores in advance a reference light amount ratio that is a measured light amount ratio when the drawing head 31 is in a normal state.

  In the first abnormality detection unit 461, when the measured light amount ratio becomes smaller than the reference light amount ratio, the optical characteristics due to aging deterioration, adhesion of foreign matters, etc. are added to the configuration after the insertion position of the lighting head 42 in the drawing head 31. It is determined that deterioration has occurred. The configuration after the insertion position of the daylighting head 42 is a configuration of the projection optical system 35 and between the insertion position and the projection optical system 35. In the example illustrated in FIG. 2, the lens 332 and the mirror 333 of the illumination optical system 33, the spatial light modulation device 34, and the projection optical system 35. In the first abnormality detection unit 461, when the measured light amount ratio is smaller than the reference light amount ratio by a predetermined value (for example, 10% of the reference light amount ratio) or more, the first abnormality detection unit 461 has a configuration after the insertion position of the lighting head 42 of the drawing head 31. Abnormal optical properties are detected. The abnormality of the drawing head 31 detected by the first abnormality detection unit 461 is mainly an abnormality of the spatial light modulation device 34 that is frequently driven to spatially modulate light. The abnormality of the drawing head 31 detected by the first abnormality detection unit 461 is notified to the operator by notification means such as a display on a monitor or a warning sound.

  In the head abnormality detection unit 46, the abnormality of each drawing head 31 is detected based on the intermediate light amount of each drawing head 31 and the current supplied to the light source 32 of each drawing head 31 by the second abnormality detection unit 462. It is detected (step S18). Specifically, first, the intermediate light amount and the ideal light amount are compared based on the output from the light amount sensor 44. As the ideal light quantity, an ideal deterioration function with current and time as variables is determined in advance. When measuring the intermediate light quantity, since the current supplied to the light source 32 is a constant value, the ideal light quantity is a function with time as a variable. Similarly, the intermediate light amount is also expressed by a function with time as a variable, and the ratio of the intermediate light amount to the ideal light amount is obtained. When the ratio is less than a predetermined value (for example, 10%), the configuration excluding the light source 32 (that is, the illumination optical system 33) in the configuration before the insertion position of the lighting head 42 of the drawing head 31 is used. Abnormal optical properties are detected. The abnormality detected by the second abnormality detection unit 462 is notified to the operator by a notification means such as a display on a monitor or a warning sound. Note that the comparison between the intermediate light amount and the ideal light amount may be performed in a state where the current supplied to the light source 32 is not adjusted so that the drawing light amount becomes equal to the target light amount.

  In addition, the second abnormality detection unit 462 compares the current value (current supplied to the light source 32) after the drawing light amount is adjusted to be equal to the target light amount with the maximum rated current associated with the light source 32. . When the current supplied to the light source 32 is larger than a certain level with respect to the maximum rated current, an abnormality of the light source 32 is detected and notified to the operator by a notification means such as a display on a monitor or a warning sound. The notification of the abnormality of the light source 32 may be divided into two stages of “service call” and “replacement required” based on the magnitude of the current supplied to the light source 32, for example.

  As described above, the inspection unit 4 of the drawing apparatus 1 uses the light amount sensor 44 that receives light from the projection optical system 35 of the drawing head 31 and the light amount sensor 44 when the drawing light amount measurement position is located. A second moving mechanism 24 that moves between the measurement position and the intermediate light quantity measurement position, and a daylighting head that is inserted on the optical path of the drawing head 31 and captures at least part of the light traveling from the light source 32 toward the spatial light modulation device 34 42, a measurement optical system (that is, the bundle fiber 43 and the inspection head 41) for guiding the light taken in by the daylighting head 42 to the light amount sensor 44 located at the intermediate light amount measurement position, and the daylighting head 42 on the optical path. A daylighting head moving mechanism 45 that is inserted and removed from the optical path is provided.

  Thus, in the drawing apparatus 1, the amount of light from the projection optical system 35 of the drawing head 31 is the same as the amount of light extracted from between the light source 32 and the spatial light modulation device 34 of the drawing head 31. Obtained by the light quantity sensor 44 and compared. Therefore, even if the optical characteristic of the light quantity sensor 44 is changed, the change in the optical characteristic does not have a great influence on the above-described comparison of the light quantity. For this reason, in the drawing head 31, it is possible to accurately detect whether the optical characteristics are degraded before or after the insertion position of the daylighting head 42. In other words, the drawing apparatus 1 can detect the deterioration factor of the drawing head 31 with high accuracy.

  Further, since the daylighting head 42 can be moved by the daylighting head moving mechanism 45, the drawing head 31 can be inspected without opening the housing (not shown) of the drawing apparatus 1. As a result, it is possible to reduce contamination in the drawing apparatus 1 due to the opening of the housing.

  As described above, the drawing apparatus 1 includes the first abnormality detection unit 461 that detects an abnormality of the drawing head 31 based on the intermediate light amount and the drawing light amount. Thereby, in the drawing head 31, an abnormality (particularly, an abnormality of the spatial light modulation device 34) in the configuration after the insertion position of the daylighting head 42 can be automatically detected. Further, the drawing apparatus 1 includes a second abnormality detection unit 462 that detects an abnormality of the drawing head 31 based on the intermediate light amount and the current supplied to the light source 32. Thereby, in the drawing head 31, it is possible to automatically detect an abnormality in the configuration before the insertion position of the daylighting head.

  In the drawing apparatus 1, the light amount sensor 44 is provided on the stage 21, and the second moving mechanism 24 moves the stage 21 relative to the drawing head 31, whereby the light amount sensor 44 measures the intermediate light amount measurement position and the drawing light amount measurement. Move between positions. Thereby, the structure of the drawing apparatus 1 can be simplified.

  Further, as described above, the light receiving surface 441 of the light quantity sensor 44 is located at approximately the same position as the upper surface 91 of the substrate 9 in the vertical direction. That is, the vertical distance from the tip of the projection optical system 35 of each drawing head 31 to the light receiving surface 441 of the light quantity sensor 44 located at the drawing light quantity measurement position extends from the tip of the projection optical system 35 to the upper surface 91 of the substrate 9. Approximately equal to the vertical distance. Therefore, the drawing light amount of each drawing head 31 acquired by the light amount sensor 44 is approximately equal to the light amount irradiated to the upper surface 91 of the substrate 9 from the projection optical system 35 of each drawing head 31 when drawing on the substrate 9. equal. For this reason, the light quantity on the board | substrate 9 at the time of drawing a pattern on the board | substrate 9 can be easily measured by the light quantity sensor 44 located in a drawing light quantity measurement position. Then, by adjusting the drawing light amount acquired by the light amount sensor 44 at the drawing light amount measurement position to the target light amount, the light amount on the substrate 9 of the light from the drawing head 31 can be easily adjusted to a desired light amount. .

  In the drawing apparatus 1, the illumination optical system 33 of the drawing head 31 includes an integrator 331, and the daylighting head 42 of the inspection unit 4 is inserted on the optical path from the integrator 331 to the spatial light modulation device 34. That is, the daylighting head 42 is inserted into the light whose uniformity is improved by the integrator 331. For this reason, even when the insertion position of the daylighting head 42 is slightly shifted in the direction perpendicular to the optical axis of the drawing head 31, the change in the amount of light captured by the daylighting head 42 and received by the light amount sensor 44 is changed. It is suppressed. Thereby, the test | inspection precision of the drawing head 31 by the test | inspection part 4 can be improved.

  As described above, in each drawing head 31, the light emitted from the light source 32 is ultraviolet light. For this reason, deterioration of each component of the illumination optical system 33, the spatial light modulation device 34, and the projection optical system 35 becomes relatively quick. Therefore, the above-described structure of the drawing apparatus 1 that can accurately detect the deterioration factor of the drawing head 31 is particularly suitable for a drawing apparatus in which the light emitted from the light source is ultraviolet light.

  In the drawing apparatus 1, as described above, the intermediate light amount received by the light amount sensor 44 is 10% or more and 100% or less of the drawing light amount. In this way, the drawing head 31 can be inspected with high accuracy by setting the intermediate light amount to an appropriate light amount range. In addition, the inspection unit 4 can be applied to other drawing apparatuses in which the magnification of the projection optical system 35 is different from that of the drawing apparatus 1 in a light amount range in which the intermediate light amount is 10% to 100% of the drawing light amount. In other words, the inspection unit 4 can be applied to each of a plurality of types of drawing apparatuses having different projection optical system 35 magnifications.

  As described above, the drawing unit 3 is provided with a plurality of drawing heads 31, and the inspection unit 4 includes a lighting head 42 and a measurement optical system corresponding to each drawing head 31. A plurality of measurement optical systems share the inspection head 41, and the light taken in by each daylighting head 42 is guided to the light amount sensor 44 located at the intermediate light amount measurement position. Thereby, the structure of the test | inspection part 4 can be simplified. Further, since the intermediate light amount of the plurality of drawing heads 31 can be acquired without moving the light amount sensor 44, the time required for the inspection of the plurality of drawing heads 31 can be shortened. Furthermore, since the intermediate light quantity measurement position and the plurality of drawing light quantity measurement positions are arranged on a straight line, the movement of the light quantity sensor 44 can be simplified when inspecting the plurality of drawing heads 31.

  In the drawing apparatus 1, various changes can be made.

  For example, the light quantity sensor 44 is not necessarily provided on the stage 21 and may be provided independently of the stage 21. In addition, a sensor moving mechanism that moves the light amount sensor 44 independently of the moving mechanism 22 that relatively moves the stage 21 may be provided in the drawing apparatus 1.

  In the inspection unit 4, the same number of inspection heads 41 as the plurality of drawing heads 31 may be provided. Each inspection head 41 is arranged at a position determined relative to the drawing head 31 on the (+ X) side of the corresponding drawing head 31, for example. That is, the plurality of drawing heads 31 and the plurality of inspection heads 41 are alternately arranged in the X direction. Then, the drawing light amount and the intermediate light amount of each drawing head 31 are sequentially acquired while the light amount sensor 44 moves in the X direction. Thereby, in a plurality of combinations of the drawing head 31 and the inspection head 41, the lengths of the bundle fibers 43 that connect the drawing head 31 and the inspection head 41 can be made approximately the same.

  In the drawing apparatus 1, the light amount sensor 44 may be moved relative to the drawing head 31 and the inspection head 41. For example, the drawing head 31 and the inspection head 41 may move in the X direction above the light amount sensor 44 without moving the light amount sensor 44. In this case, the state where the inspection head 41 is positioned directly above the light amount sensor 44 is the state where the light amount sensor 44 is positioned at the intermediate light amount measurement position. The state in which the drawing head 31 is positioned directly above the light amount sensor 44 is the state in which the light amount sensor 44 is positioned at the drawing light amount measurement position.

  The daylighting head 42 does not necessarily need to be inserted immediately after the integrator 331, and may be inserted on the optical path from the integrator 331 to the spatial light modulation device 34. However, as described above, even if the insertion position of the daylighting head 42 is slightly shifted in the direction perpendicular to the optical axis of the drawing head 31 by inserting the daylighting head 42 immediately after the integrator 331, the daylighting head 42 The change in the amount of light taken in by 42 and received by the light amount sensor 44 is suppressed. As a result, the inspection accuracy of the drawing head 31 by the inspection unit 4 can be improved.

  If the lighting head 42 is inserted on the optical path from the light source 32 to the spatial light modulation device 34, it is not always necessary to be inserted on the optical path from the integrator 331 to the spatial light modulation device 34. Even in this case, as described above, the deterioration factor of the drawing head 31 can be detected with high accuracy.

  The plurality of daylighting heads 42 are not necessarily required to move in the vertical direction at the same time. For example, each daylighting head 42 may be provided with a daylighting head moving mechanism 45, and the plurality of daylighting heads 42 may move in the vertical direction independently of each other. In other words, each lighting head 42 may be inserted into and removed from the optical path independently from the other lighting heads 42.

  In the inspection unit 4, only one lighting head 42 may be provided for the plurality of drawing heads 31. In this case, the daylighting head 42 is inserted into the optical path of the drawing head 31 by moving the daylighting head 42 in the X direction to be positioned right above the drawing head 31 to be measured and lowering the daylighting head 42. .

  The light source 32 is not limited to the LED. For example, an LD (Laser Diode), a high-pressure mercury lamp, or the like may be used as the light source 32. When a high pressure mercury lamp is used as the light source 32, the power supplied to the light source 32 is adjusted in the drawing head 31. In step S <b> 18, the second abnormality detection unit 462 detects an abnormality of each drawing head 31 based on the intermediate light amount of each drawing head 31 and the power supplied to the light source 32 of each drawing head 31. . In the drawing apparatus 1, instead of automatic detection of the abnormality of the drawing head 31 by the head abnormality detection unit 46, based on the intermediate light amount and drawing light amount output from the light amount sensor 44, and the current or power supplied to the light source 32. An operator may detect an abnormality in the drawing head 31.

  In each drawing head 31, instead of the DMD, for example, a GLV (Grating Light Valve) (registered trademark) may be provided as the spatial light modulation device 34. Only one drawing head 31 may be provided in the drawing unit 3.

  The board 9 on which drawing is performed in the drawing apparatus 1 is not necessarily limited to a printed wiring board. In the drawing apparatus 1, for example, a circuit pattern is drawn on a semiconductor substrate, a glass substrate for a flat panel display device such as a liquid crystal display device or a plasma display device, a glass substrate for a photomask, a substrate for a solar cell panel, or the like. May be.

  The configurations in the above-described embodiments and modifications may be combined as appropriate as long as they do not contradict each other.

DESCRIPTION OF SYMBOLS 1 Drawing apparatus 4 Inspection | inspection part 9 Board | substrate 21 Stage 22 Movement mechanism 23 1st movement mechanism 24 2nd movement mechanism 31 Drawing head 32 Light source 33 Illumination optical system 34 Spatial light modulation device 35 Projection optical system 41 Inspection head 42 Light collection head 43 Bundle fiber 44 Light quantity sensor 45 Daylighting head moving mechanism 91 Upper surface 331 Integrator 343 Micro mirror surface 441 Light receiving surface 461 First abnormality detection unit 462 Second abnormality detection unit S11 to S18 Steps

Claims (10)

A drawing apparatus that draws a pattern by irradiating a target with light,
A drawing head for irradiating the object with spatially modulated light;
A holding unit that holds the object and scans the irradiation area of the light from the drawing head on the object by moving relative to the drawing head;
An inspection unit for inspecting the drawing head;
With
The drawing head is
A light source that emits light;
A spatial light modulation device;
An illumination optical system for guiding light from the light source to the spatial light modulation device;
A projection optical system for guiding light spatially modulated by the spatial light modulation device to the holding unit;
With
The inspection unit is
A light quantity sensor that receives light from the projection optical system when positioned at a drawing light quantity measurement position determined relative to the drawing head;
A sensor moving mechanism that moves the light quantity sensor between the drawing light quantity measurement position and a predetermined intermediate light quantity measurement position;
A daylighting head that is inserted on an optical path from the light source to the spatial light modulation device and captures at least a part of the light from the light source toward the spatial light modulation device;
A measurement optical system that guides light captured by the daylighting head to the light quantity sensor located at the intermediate light quantity measurement position;
A daylighting head moving mechanism for inserting the daylighting head into the optical path and detaching the daylighting head from the optical path;
A drawing apparatus comprising: The drawing apparatus according to claim 1,
The light amount sensor is provided in the holding unit;
The distance from the tip of the projection optical system to the light receiving surface of the light quantity sensor is equal to the distance from the tip of the projection optical system to the surface of the object,
The drawing apparatus, wherein the sensor moving mechanism moves the holding unit relative to the drawing head. The drawing apparatus according to claim 1 or 2,
The illumination optical system includes an integrator,
The drawing apparatus, wherein the daylighting head is inserted on an optical path from the integrator to the spatial light modulation device. The drawing apparatus according to any one of claims 1 to 3,
The drawing apparatus, wherein the light emitted from the light source is ultraviolet light. The drawing apparatus according to any one of claims 1 to 4,
The drawing apparatus, wherein the spatial light modulation device is an optical element in which a number of micromirror surfaces whose directions can be changed are arranged in a plane. A drawing apparatus according to any one of claims 1 to 5,
The amount of light from the measurement optical system received by the light amount sensor is 10% to 100% of the amount of light from the projection optical system received by the light amount sensor. Drawing device. The drawing apparatus according to any one of claims 1 to 6,
Based on the light amount of the light from the measurement optical system received by the light amount sensor and the light amount of the light from the projection optical system received by the light amount sensor, the inspection unit A drawing apparatus, further comprising an abnormality detection unit for detecting an abnormality. The drawing apparatus according to claim 7,
Another abnormality detection in which the inspection unit detects an abnormality of the drawing head based on a light amount of light from the measurement optical system received by the light amount sensor and a current or power supplied to the light source. The drawing apparatus further comprising a unit. A drawing apparatus according to any one of claims 1 to 8,
Further comprising another drawing head having the same structure as the drawing head,
The inspection unit is
In the other drawing head, another daylighting head that is inserted on an optical path from the light source to the spatial light modulation device and captures at least part of the light traveling from the light source to the spatial light modulation device;
Another measurement optical system that guides the light captured by the other daylighting head to the light quantity sensor located at the intermediate light quantity measurement position;
Further comprising
When the light quantity sensor moves to another drawing light quantity measurement position determined relative to the other drawing head by the sensor moving mechanism and is positioned at the other drawing light quantity measurement position, the other light quantity sensor A drawing apparatus for receiving light from a projection optical system of a drawing head. The drawing apparatus according to claim 9,
The drawing apparatus, wherein the drawing light quantity measurement position, the other drawing light quantity measurement position, and the intermediate light quantity measurement position are arranged on a straight line.

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