TWI539165B - Probe, probe head and probe module - Google Patents

Description

Probe, probe head and probe module

The invention relates to a probe, and in particular to a probe, a probe head and a probe module.

When the wafer is tested, the test machine contacts the wafer through a probe card and transmits a test signal to obtain an electrical signal of the wafer. Probe cards typically contain several probes of precise dimensions. In wafer testing, a small contact contact on a device under test (DUT), such as a pad or bump, is transferred from the test machine. Test the signal and cooperate with the probe card and the control program of the test machine to achieve the purpose of measuring the wafer. As the contact pads on the wafer become smaller and smaller, probes using MEMS technology to create Fine Pitch applications are becoming more popular.

Currently commercially available MEMS probes include pogo pins, vertical buckling probes or C-shaped needles, which are mainly used in batch and mass production using MEMS technology. Characteristics. In a batch and mass production process using MEMS technology, a series connection portion and a connection portion may be formed together while forming a probe, wherein the series connection portion is further connected to the probe via the connection portion. Therefore, when moving these probes, the probes can be moved in tandem via the moving tandem.

Referring to FIG. 1, after the needle tail 11 of the probe 10 is separated from the joint portion (not shown) of the tandem portion, the side surface 11a of the needle tail 11 may have a breakage mark 11b which protrudes slightly from the side surface 11a of the needle tail 11. Therefore, when the probe 10 is assembled between the upper guide 21 and the lower guide 22, the needle tip 12 of the probe 10 is passed down through the lower through hole 22a of the lower guide 22, and then the needle tail 11 of the probe 10 is attached. The upper through hole 21a of the upper guide 21 is inserted upward. However, the breakage marks 11b remaining on the side surface 11a of the needle tail 11 may structurally interfere with the upper guide plate 21, so that the needle tail 11 cannot smoothly pass through the upper through hole 21a or cause damage to the probe 10, thereby increasing assembly man-hours. Or part cost.

The present invention provides a probe that ensures the smoothness of the probe assembly to the guide.

The present invention provides a probe head whose fluency of assembly of the probe to the guide can be ensured.

The present invention provides a probe module that ensures the smoothness of assembly of the probe to the guide.

The probe of the present invention is adapted to be assembled to a lower guide and an upper guide. The probe includes a needle tail, a needle tip and a needle body. The needle tail is adapted to be threaded through an upper aperture of the upper guide and has a recess. The recess is recessed from a side of the needle tail to accommodate a break. The tip is adapted to pass through the through hole of the lower guide. Both ends of the needle body are connected to the needle tail and the needle tip.

The probe head of the present invention includes at least one probe as described above, an upper guide, and a lower guide. The upper guide plate has at least one upper through hole, and the needle tail of at least one probe is disposed in the upper through hole. The lower guide plate has at least a through hole, and the tip of at least one probe passes through the lower through hole.

A probe module includes at least one probe as described above, at least one connecting portion, and at least one serial portion. The connection is connected to the pocket of the needle end of the probe. The tandem portion is connected to the connecting portion.

Based on the above, in the present invention, the needle end of the probe has a pocket to accommodate the breakage so that the breakage does not protrude as far as possible from the side of the needle tail. Therefore, in the process of inserting the needle tail into the upper through hole of the upper guide plate, the breakage mark does not cause interference between the needle tail and the upper guide plate in the structure, so that the needle tail of the probe can smoothly pass through the upper guide plate. The upper through hole thus ensures the smoothness of the probe's needle tail assembly to the upper guide.

The above described features and advantages of the invention will be apparent from the following description.

Referring to FIG. 2, for the batch, a large number of productions, in the embodiment, the probe module 50 can be fabricated by using a microelectromechanical technology, which can include an auxiliary portion 51, a plurality of serial portions 52, and a plurality of The connecting portion 53 and the plurality of probes 100. The auxiliary portion 51 connects the series connecting portions 52, and each of the connecting portions 52 connects the corresponding connecting portions 53, and each connecting portion 53 is connected to the corresponding probe 100. In another embodiment, the probe module 50 may have only one serial portion 52 without the auxiliary portion 51 according to actual needs. Finally, each probe 100 is detached from the corresponding connecting portion 53.

Referring to FIG. 3 and FIG. 4, in the embodiment, the needle tail 110 of the probe 100 has a recess 111 recessed from a side surface 110a and an end surface 110b of the needle tail 110. In other words, the pocket 111 is a hollowed out area of the solid portion of the needle tail 110. The connecting portion 53 is connected to the pocket 111 of the needle tail 110 of the corresponding probe 100. Therefore, when the connecting portion 53 is separated from the needle tail 110 of the probe 100, the breaking trace 112 formed by separating the connecting portion 53 from the needle tail 110 of the probe 100 will remain in the pocket 111 of the needle tail 110. In other words, the pocket 111 of the needle tail 110 accommodates the above-described breakage 112. Therefore, referring to FIG. 4 and FIG. 5, after the needle tip 120 of the probe 100 is inserted through the lower through hole 222 of the lower guide 220, since the recess 111 accommodates the breakage 112, the needle tail 110 of the probe 100 is The structure does not interfere with the upper guide plate 210, so that the needle tail 110 of the probe 100 can smoothly pass through the upper through hole 212 of the upper guide plate 210, thereby ensuring the smoothness of assembling the needle tail 110 of the probe 100 to the upper guide plate 210. .

Referring to FIG. 4 again, in the present embodiment, the depth d of the recess 111 is greater than or equal to 5 micrometers. Further, the depth d of the pocket 111 is less than one-half of the width w of the needle tail 110. Regardless of how the depth d of the pocket 111 is set, it is sufficient that the breakage mark 112 does not protrude from the side surface 110a of the needle tail 110.

Referring to FIG. 6, unlike the embodiment of FIG. 4, in the present embodiment, the pocket 111 of the needle tail 110 of the probe 100 can be moved downward to be recessed only to the side 110a of the needle tail 110 without being recessed or adjacent to the needle tail. End face 110b of 110. Such a recess 111 can also accommodate the breakage 112. In addition, referring to FIG. 7, unlike the embodiment of FIG. 4, in the present embodiment, the pocket 111 is a slope which is inclined to the side 110a and the end surface 110b of the needle tail 110. Such a recess 111 can also accommodate the breakage 112.

Referring to FIG. 3 again, the probe 100 has a needle body 130, and the two ends of the needle body 130 are respectively connected to the needle tail 110 and the needle tip 120. The needle tail 110 of the probe 100 forms a stop 140 with the needle body 130. In this embodiment, the needle body 130 can be curved such that the needle tails 110 and the needle tips 120 at the two ends of the needle body 130 are not located on the same axis, and the curved shape of the needle body 130 becomes the stopper portion 140, as shown in FIG. . The stopper portion 140 is a portion where the probe 100 is in contact with the lower surface of the upper guide plate 210 to prevent the needle body 130 from coming off the upper guide plate 210 from the upper through hole 212, so that the needle body 130 is held on the upper guide plate 210 and below. The guide plates 220 are not dropped between them.

Referring to FIG. 8A , unlike the embodiment of FIG. 3 , in the present embodiment, the probe 100 is of a straight needle type, wherein the width W of the needle body 130 is greater than the width w of the needle tail 110 such that the needle body 130 and the needle tail 110 are A stopper 140 similar to the shape of the shoulder is formed. Referring to FIG. 8B, in comparison with the embodiment of FIG. 8A, in the present embodiment, the needle body 130 of the probe 100 is partially narrowed to weaken its structural strength. Referring to FIG. 8C, in contrast to the embodiment of FIG. 8A, the probe 100 is of the pogo-pin type in which the needle body 130 has a curved and elastically deformable shape.

Referring to FIG. 5 again, the probe head 90 of the present embodiment includes a plurality of probes 100, an upper guide 210, and a lower guide 220. The probe head 90 can be applied to a vertical probe card. The vertical probe card also includes a printed circuit board and a space conversion board, wherein the space conversion board is disposed between the printed circuit board and the probe head 90 such that the probe head 90 can be electrically connected to the printed circuit board via the space conversion board. The vertical probe card is adapted to be electrically connected to a test object via the probe head 90 for electrical testing of the object to be tested.

In summary, in the present invention, the needle end of the probe has a pocket to accommodate the breakage, so that the breakage does not protrude as far as possible from the side of the needle tail. Therefore, in the process of inserting the needle tail into the upper through hole of the upper guide plate, the breakage mark does not cause interference between the needle tail and the upper guide plate in the structure, so that the needle tail of the probe can smoothly pass through the upper guide plate. The upper through hole thus ensures the smoothness of the probe's needle tail assembly to the upper guide.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

10‧‧‧ probe
11‧‧‧needle tail
11a‧‧‧ side
11b‧‧‧break marks
12‧‧‧ needle tip
21‧‧‧Upper guide
21a‧‧‧Upper hole
22‧‧‧ lower guide
22a‧‧‧lower hole
50‧‧‧ Probe Module
51‧‧‧Auxiliary Department
52‧‧‧ tandem
53‧‧‧Connecting Department
90‧‧‧ probe head
100‧‧‧ probe
110‧‧‧needle tail
110a‧‧‧ side
110b‧‧‧ end face
111‧‧‧ recess
112‧‧‧break marks
120‧‧‧ needle tip
130‧‧‧ needle body
210‧‧‧Upper guide
212‧‧‧Upper hole
220‧‧‧ lower guide
222‧‧‧lower hole
D‧‧‧Deep depth
W‧‧‧needle width
W‧‧‧ Needle width

Figure 1 is a schematic illustration of a conventional probe head. 2 is a schematic diagram of a probe module in accordance with an embodiment of the present invention. 3 is a schematic view of the connecting portion and the probe of the probe module of FIG. 2. Fig. 4 is a schematic view showing the probe of Fig. 3 separated from the connecting portion. Figure 5 is a schematic illustration of a probe head in accordance with another embodiment of the present invention. Figure 6 is a schematic illustration of the probe separated from the joint in accordance with another embodiment of the present invention. Figure 7 is a schematic illustration of the probe separated from the joint in accordance with another embodiment of the present invention. 8A-8C are schematic illustrations of a connector and a probe in accordance with various embodiments of the present invention.

90‧‧‧ probe head

100‧‧‧ probe

110‧‧‧needle tail

112‧‧‧break marks

120‧‧‧ needle tip

130‧‧‧ needle body

210‧‧‧Upper guide

212‧‧‧Upper hole

220‧‧‧ lower guide

222‧‧‧lower hole

Claims (10)

A probe is adapted to be assembled to a lower guide plate and an upper guide plate, the probe comprising: a needle tail adapted to pass through an upper through hole of the upper guide plate and having a recess, the recess is recessed from a side of the needle tail for receiving a broken mark; a needle tip adapted to pass through the through hole of the lower guide; and a needle body, the two ends of the needle body being respectively connected to the needle tail and the needle tip . The probe of claim 1, wherein the needle tail forms a stop with the needle body, and the stopper contacts the lower surface of the upper guide plate to prevent the needle body from the upper through hole The upper guide plate is disengaged such that the needle body is held between the upper guide plate and the lower guide plate. The probe of claim 2, wherein the needle body is curved such that the needle tail and the needle tip at the two ends of the needle body are not located on the same axis, and the curved shape of the needle body becomes a stop portion. . The probe of claim 2, wherein the width of the needle body is greater than the width of the needle tail such that the stop portion is formed between the needle body and the needle tail. The probe of claim 1, wherein the depth of the recess is greater than or equal to 5 microns. The probe of claim 1, wherein the depth of the pocket is less than one-half the width of the needle tail. The probe of claim 1, wherein the recess is further recessed from an end face of the needle tail. A probe head comprising: at least one probe according to claim 1; an upper guide plate having at least one upper through hole, the needle tail of the at least one probe being disposed in the upper through hole; And a lower guiding plate having at least a through hole, wherein the tip of the at least one probe passes through the lower through hole. A probe module comprising: at least one probe according to claim 1; at least one connecting portion connected to the recess of the needle tail of the at least one probe; and at least one stringing portion, Connecting the at least one connecting portion. The probe module of claim 9, further comprising: an auxiliary portion connecting the at least one series.