TWI532858B - Copper foil, copper clad laminate, flexible circuit substrate, and copper clad laminate manufacturing method - Google Patents

Copper foil, copper clad laminate, flexible circuit substrate, and copper clad laminate manufacturing method Download PDF

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TWI532858B
TWI532858B TW101111426A TW101111426A TWI532858B TW I532858 B TWI532858 B TW I532858B TW 101111426 A TW101111426 A TW 101111426A TW 101111426 A TW101111426 A TW 101111426A TW I532858 B TWI532858 B TW I532858B
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copper
copper foil
mass
less
clad laminate
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TW101111426A
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TW201303047A (en
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Keiichi Kimura
Koichi Hattori
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Nippon Steel & Sumikin Chem Co
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    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/08Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of copper or alloys based thereon
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B32B15/088Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin comprising polyamides
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/01Alloys based on copper with aluminium as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/05Alloys based on copper with manganese as the next major constituent
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/022Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0393Flexible materials

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)

Description

銅箔、貼銅層合板、可撓性電路基板、及貼銅層合板的製造方法 Copper foil, copper-clad laminate, flexible circuit board, and copper-clad laminate manufacturing method

本發明有關對屈撓疲勞(flex fatigue)耐久性(permanence)高的銅箔(copper foil)經採用該銅箔之貼銅層合板(copper clad laminate)、以及可撓性電路基板(flexible circuit board)、和貼銅層合板的製造方法,詳言之,有關能製得對屈撓具備耐久性,且屈撓性優異的可撓性電路基板之銅箔,經採用該銅箔之貼銅層合板以及可撓性電路基板、和貼銅層合板的製造方法。 The present invention relates to a copper foil having high flex fatigue durability and a copper clad laminate using the copper foil, and a flexible circuit board. And a method of manufacturing a copper-clad laminate, in particular, a copper foil capable of producing a flexible circuit board having durability and flexibility, and using a copper-clad layer of the copper foil A method of manufacturing a plywood, a flexible circuit board, and a copper clad laminate.

由於具有由樹脂層與金屬箔所成之佈線所形成之可撓性電路基板(flexible print circuit board),係能折彎使用之故,包括硬碟(hard disk)內的可動部、行動電話的鉸鏈(hinge)部或導板滑動部(slide sliding part)、對列印機(printer)的磁頭(head)部、光拾波(light pick-up)部、筆記型個人電腦(note book type personal computer)的可動部等在內,廣泛使用於各種電子.電氣設備上。並且,近來,隨著此等設備之小型化、薄型化、高功能化等,需要能對應於在有限空間(space)中折疊可撓性電路基板為小後收納、或電子.電氣設備的種種動作之屈撓性。因此,為亦能對應屈撓部中之曲率半徑成為更小之方式之折彎、或頻繁重複折彎之方式的動作起見,需要可撓性電路基板之進一步的強度等的機械式特性之提 升。 A flexible printed circuit board formed by a wiring made of a resin layer and a metal foil can be bent, including a movable portion in a hard disk and a mobile phone. a hinge portion or a slide sliding part, a head portion for a printer, a light pick-up portion, a note book type personal The mobile part of the computer is widely used in various electronic devices. On electrical equipment. Further, recently, with the miniaturization, thinning, and high functionality of such devices, it is necessary to be able to fold a flexible circuit substrate in a limited space for storage, or electrons. Flexibility of various actions of electrical equipment. Therefore, mechanical characteristics such as further strength of the flexible circuit board are required in order to cope with the method in which the radius of curvature in the flexure portion is smaller or the method of frequently repeating the bending. mention Rise.

一般,因對折彎之重複或曲率半徑小的屈撓之強度劣差等而成為不良要因者並非樹脂層而是屬於佈線,如不能忍耐此等,則將在佈線的一部分發生裂紋或破裂,以致不能再作為電路基板使用。於是,例如,為降低於鉸鏈部之對佈線之彎曲應力(bending stress)起見,提案有:按對回轉軸能成為斜歪之方式所佈線之可撓性電路基板(參考專利文獻1)、或形成往鉸鏈部的回轉方向螺旋一捲以上之螺旋部,並增加其捲數藉以減少因開閉動作所引起之螺旋部的直徑之變化以降低損傷之方法(參考專利文獻2)等。然而,此等方法,卻會限制可撓性電路基板之設計。 In general, it is not a resin layer but a wiring because of the repetition of the bending or the strength difference of the bending radius, and the like. If the film cannot be tolerated, cracks or cracks may occur in a part of the wiring. Can no longer be used as a circuit board. Then, for example, in order to reduce the bending stress on the wiring of the hinge portion, a flexible circuit board that is routed so that the rotary axis can be inclined is proposed (refer to Patent Document 1). Alternatively, a method of spiraling one or more spiral portions in the direction of rotation of the hinge portion and increasing the number of windings to reduce the change in the diameter of the spiral portion due to the opening and closing operation to reduce the damage (see Patent Document 2). However, these methods limit the design of the flexible circuit substrate.

另一方面,有如從軋製銅箔的軋製面之X射線繞射(X-ray diffraction)(銅箔的厚度方向之X射線繞射)所求得之(200)面的強度(I),係對由微粉末銅之X射線繞射所求得之(200)面的強度(I0)為I/I0>20之情形,屈撓性會優異之報告(參考專利文獻3及4)。亦即,由於屬於銅的再結晶聚集組織(recrystallization aggregation texture)之立方體方位(cubic direction)愈發達時銅的屈撓性會獲提升之故,周知有一種經將立方體聚集組織(cube aggregation texture)的生長度(growth degree)按上述參數(parameter)(I/I0)所規定之,作為可撓性電路基板的佈線材料合適的銅箔。又,有一項報告謂一種經按能固溶(solid dissolution)於銅之範圍的濃度含有Fe(鐵)、Ni(鎳)、Al(鋁)、Ag(銀)等元 素,並依既定之條件退火(annealing)以使其再結晶化所得之軋製銅合金箔,可使沿著滑動面(slip plane)之剪切變形(shearing deformation)容易進行,且屈撓性優異之事實(參考專利文獻5)。 On the other hand, the intensity of the (200) plane obtained by X-ray diffraction (X-ray diffraction in the thickness direction of the copper foil) of the rolled surface of the rolled copper foil (I) In the case where the intensity (I 0 ) of the (200) plane obtained by the X-ray diffraction of the fine powder copper is I/I 0 >20, the flexibility is excellent (refer to Patent Documents 3 and 4). ). That is, since the copper direction of the recrystallization aggregation texture belonging to copper is more developed, the flexibility of copper is improved, and a cube aggregation texture is known. The growth degree is defined as the above-mentioned parameter (I/I 0 ), and is suitable as a copper foil for the wiring material of the flexible circuit board. In addition, there is a report that a concentration of solid solution in the range of copper contains Fe (iron), Ni (nickel), Al (aluminum), Ag (silver) and other elements, and according to the established conditions. The rolled copper alloy foil obtained by annealing to recrystallize the shearing deformation along the slip plane, and the fact that the flexibility is excellent (refer to the patent literature) 5).

又,為需要高屈撓特性之可撓性電路基板,有時會使用含有氧或銀等不純物之銅箔,以純度計,為99%至99.9質量%程度之銅箔。本說明中,除非特別備註,純度係以質量濃度表示者。又,試驗等級而言,有在採用廣泛作為電纜的導體所使用之純度99.5%程度的韌銅(tough-pitch copper)或不含氧化物之無氧銅之例(參考專利文獻3、4)。韌銅的不純物,除數百ppm的氧(多以氧化銅所含)之外,尚含有銀、鐵、硫、磷等。無氧銅,通常係純度至99.96至99.995%程度為止之銅,為經大幅度減少氧至10ppm以下之銅。於上述之專利文獻3、4中報告,以無氧銅所製造之銅箔的屈撓疲勞特性係較韌銅箔為優異,乃因有無含有氧化銅所致者。再者,如欲再提高此等銅的純度時,則需要去除銀、磷、硫等的不純物。 In addition, a copper foil containing impurities such as oxygen or silver, and a copper foil having a purity of about 99% to 99.9% by mass, may be used for the flexible circuit board which requires high flexural properties. In the present description, unless otherwise noted, the purity is expressed in terms of mass concentration. In addition, as for the test grade, there are examples of tough-pitch copper or oxide-free oxygen-free copper which is used in a wide range of conductors for cables (refer to Patent Documents 3 and 4). . Impurities of tough copper, in addition to hundreds of ppm of oxygen (mostly contained in copper oxide), still contain silver, iron, sulfur, phosphorus and the like. Oxygen-free copper is usually copper with a purity of about 99.96 to 99.995%, and is copper which has been greatly reduced in oxygen to less than 10 ppm. It is reported in the above-mentioned Patent Documents 3 and 4 that the flexural fatigue characteristics of the copper foil produced by the oxygen-free copper are superior to that of the tough copper foil, and are caused by the presence or absence of copper oxide. Furthermore, if it is desired to further increase the purity of such copper, it is necessary to remove impurities such as silver, phosphorus, sulfur, and the like.

〔先前技術文獻〕 [Previous Technical Literature] 〔專利文獻〕 [Patent Document]

〔專利文獻1〕日本專利特開2002-171033號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2002-171033

〔專利文獻2〕日本專利特開2002-300247號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2002-300247

〔專利文獻3〕日本專利特開2001-58203號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2001-58203

〔專利文獻4〕日本專利第3009383號公報 [Patent Document 4] Japanese Patent No. 3009383

〔專利文獻5〕日本專利特開2007-107036號公報 [Patent Document 5] Japanese Patent Laid-Open Publication No. 2007-107036

如此狀況之下,本發明人等為獲得可撓性電路基板之設計上不發生限制,對折彎的重複或曲率半徑小的屈撓亦具備耐久性之可撓性電路基板起見專心研究之結果發現,如採用一種即使添加合金成分仍能高度定向之銅合金箔,則可製得屈撓耐久性或屈撓性優異的可撓性電路基板之事實,終於完成本發明。 Under the circumstance, the inventors of the present invention have found that the flexible circuit board is not limited in design, and the results of intensive research on the flexible circuit board having durability such as repetition of bending or small curvature radius are also provided. It has been found that the present invention has finally been completed by using a copper alloy foil which is highly oriented even with the addition of an alloy component, to obtain a flexible circuit substrate excellent in flexural durability or flexibility.

因而,本發明之目的在於提供一種耐久性優異,例如於可撓性電路基板中,當形成佈線時,對行動電話或小型電子設備等的鉸鏈部或導板滑動部等,會隨伴曲率半徑小的重複屈撓之嚴厲的使用條件仍能顯示耐久性、且屈撓耐久性優異的銅合金箔(以下,簡稱「銅箔」)。 Therefore, an object of the present invention is to provide an excellent durability. For example, in a flexible circuit board, when a wiring is formed, a hinge portion or a guide sliding portion of a mobile phone or a small electronic device or the like may have a radius of curvature. A copper alloy foil (hereinafter, abbreviated as "copper foil") which is excellent in durability and excellent in flexural durability can be exhibited under severe use conditions.

又,本發明之一目的在於提供一種採用上述銅箔即能製得耐久性等優異的可撓性電路基板之貼銅層合板、及其可撓性電路基板。 Moreover, an object of the present invention is to provide a copper-clad laminate which can obtain a flexible circuit board excellent in durability and the like using the above-mentioned copper foil, and a flexible circuit board therefor.

再者,本發明之再另一目的在於提供一種適合於製造耐久性等優異的可撓性電路基板之貼銅層合板的製造方法。 Furthermore, another object of the present invention is to provide a method for producing a copper-clad laminate suitable for producing a flexible circuit board having excellent durability and the like.

為解決上述在來技術之問題起見專心研究之結果,本發明之要旨含有下列構成。 In order to solve the above problems of the prior art, the gist of the present invention has the following constitution.

(1)一種銅箔,係含有Mn(錳)0.001質量%以上0.4質量%以下、並具有不可避免之不純物及餘部的Cu(銅)之銅箔,其特徵為:銅的單位晶格(unit lattice)之基本結晶軸<100>,係對該銅箔之厚度方向與存在於箔面內之某一方向所成之2個正交軸(orthogonal axis),各個方位差(azimuthal difference)15°以內之擇優定向區域(preferred orientation region),以面積率計,在佔有60%以上。 (1) A copper foil comprising Cu (copper) copper foil having Mn (manganese) of 0.001% by mass or more and 0.4% by mass or less and having an unavoidable impurity and a remainder, characterized by a unit cell of copper (unit) The basic crystal axis <100> of the lattice is the orthogonal axis of the thickness direction of the copper foil and the direction existing in the foil surface, and the azimuthal difference is 15°. The preferred orientation region within the area is 60% or more in terms of area ratio.

(2)如(1)所記載之銅箔,其中含有Mn 0.001質量%以上0.1質量%以下之同時,含有0.005質量%以上0.2質量%以下之Ti(鈦)、或0.005質量%以上2質量%以下之Al(鋁)之至少一種。 (2) The copper foil according to the above (1), which contains 0.001% by mass or more and 0.1% by mass or less of Mn, and contains 0.005% by mass or more and 0.2% by mass or less of Ti (titanium) or 0.005% by mass or more and 2% by mass. At least one of the following Al (aluminum).

(3)如(1)或(2)所記載之銅箔,其中含有Mn 0.06質量%以下。 (3) The copper foil according to (1) or (2), which contains 0.06 mass% or less of Mn.

(4)一種銅箔,係含有選自Ca(鈣)、La(鑭)、Ce(鈰)、Pr(鐠)、Nd(釹)、Sm(釤)、Eu(銪)、Gd(釓)、Dy(鏑)、Ho(鈥)、Er(鉺)、Tm(銩)、Yb(鐿)、以及Y(釔)所成群之至少1種元素0.005質量%以上0.4質量%以下,餘部的銅為99.6質量%以上99.999質量%以下之銅箔,其特徵為:銅的單位晶格之基本結晶軸<100>,係對銅箔之厚度方向與存在於箔面內之某一方向所成之2個正交軸,各個方位差15°以內之擇優定向區域,以面積率計,在佔有60%以上。 (4) A copper foil containing a substance selected from the group consisting of Ca (calcium), La (yttrium), Ce (yttrium), Pr (yttrium), Nd (yttrium), Sm (yttrium), Eu (yttrium), and Gd (yttrium). At least one element of the group of Dy (镝), Ho (鈥), Er (铒), Tm (銩), Yb (镱), and Y (钇) is 0.005 mass% or more and 0.4 mass% or less, and the remainder The copper foil having a copper content of 99.6 mass% or more and 99.999 mass% or less is characterized in that the basic crystal axis of the unit crystal lattice of copper is <100>, which is formed in the thickness direction of the copper foil and in a direction existing in the foil surface. The two orthogonal axes, the preferred orientation regions within 15° of each azimuth difference, account for more than 60% of the area ratio.

(5)如(4)所記載之銅箔,其中含有0.005質量% 以上0.2質量%以下之Ti、或0.005質量%以上0.395質量%以下之Al之至少一種。 (5) The copper foil according to (4), which contains 0.005 mass% At least one of 0.2% by mass or less of Ti or 0.005 mass% or more and 0.395 mass% or less of Al.

(6)如(1)至(5)之任一項所記載之銅箔,其中氧的含量為未達0.1質量%。 (6) The copper foil according to any one of (1) to (5) wherein the content of oxygen is less than 0.1% by mass.

(7)一種貼銅層合板,其特徵為具有由(1)至(6)之任一項所記載之銅箔所成銅箔層與經層合於此之樹脂層。 (7) A copper-clad laminate having a copper foil layer formed of the copper foil according to any one of (1) to (6) and a resin layer laminated thereon.

(8)如(7)所記載之貼銅層合板,其中銅箔層之厚度為5μm以上18μm以下,樹脂層之厚度為5μm以上75μm以下。 (8) The copper-clad laminate according to (7), wherein the thickness of the copper foil layer is 5 μm or more and 18 μm or less, and the thickness of the resin layer is 5 μm or more and 75 μm or less.

(9)如(7)或(8)所記載之貼銅層合板,其中樹脂層係由聚醯亞胺所成。 (9) The copper-clad laminate according to (7) or (8), wherein the resin layer is made of polyimine.

(10)一種可撓性電路基板,其特徵為:實施(7)至(9)之任一項所記載之貼銅層合板之銅箔層之蝕刻以形成既定的佈線,並於該佈線之至少一處形成屈撓部後使用。 (10) A flexible circuit board, characterized in that the copper foil layer of the copper-clad laminate according to any one of (7) to (9) is etched to form a predetermined wiring, and the wiring is Use at least one part to form the flexure.

(11)如(10)所記載之可撓性電路基板,其中按能形成隨伴選自滑動屈撓、折彎屈撓、鉸鏈屈撓、以及導板屈撓所成群之任一重複動作之屈撓部之方式所使用者。 (11) The flexible circuit board according to (10), wherein any one of the repetitive movements in which the companion is selected from the group consisting of sliding flexing, bending flexing, hinge flexing, and bending of the guide plate is formed. The user of the way of flexing the part.

(12)一種電子設備,其特徵為:裝載有(10)或(11)所記載之可撓性電路基板。 (12) An electronic device comprising the flexible circuit board according to (10) or (11).

(13)一種貼銅層合板的製造方法,係具有銅箔層及樹脂層之貼銅層合板的製造方法,其特徵為:對含有Mn 0.001質量%以上0.1質量%以下,並於為組成而具有不可 避免之不純物及餘部的Cu之冷軋銅箔(cold rolled copper foil)表面,塗佈聚醯胺酸溶液並實施加熱處理,或重疊聚醯亞胺薄膜後進行熱壓黏合(thermo compression bonding),藉以在冷軋銅箔(cold rolled copper foil)上形成由聚醯亞胺所成之樹脂層之同時使冷軋銅箔再結晶化,而作成銅的單位晶格的基本結晶軸<100>,能對該銅箔之厚度方向與存在於箔面內之某一方向所成之2個正交軸,各個方位差15°以內之擇優定向區域,以面積率計,佔有60%以上之銅箔層。 (13) A method for producing a copper-clad laminate, comprising a method of producing a copper-clad laminate having a copper foil layer and a resin layer, wherein the composition contains Mn in an amount of 0.001% by mass or more and 0.1% by mass or less. Have no Avoiding the impurities and the surface of the cold rolled copper foil of Cu, coating the polyaminic acid solution and performing heat treatment, or superimposing the polyimide film to perform thermo compression bonding. By forming a resin layer made of polyimine on a cold rolled copper foil and recrystallizing the cold-rolled copper foil to form a basic crystal axis of the unit crystal of copper <100>, The preferred orientation area of the thickness direction of the copper foil and the two orthogonal axes formed in a certain direction of the foil surface, within 15 degrees of each azimuth difference, occupying 60% or more of the copper foil by area ratio Floor.

(14)如(13)所記載之貼銅層合板的製造方法,其中冷軋銅箔再含有0.005質量%以上0.2質量%以下之Ti、或者,0.005質量%以上2質量%以下之Al之任一種。 (14) The method for producing a copper-clad laminate according to the above aspect, wherein the cold-rolled copper foil further contains 0.005 mass% or more and 0.2 mass% or less of Ti, or 0.005 mass% or more and 2 mass% or less of Al. One.

(15)如(13)或(14)所記載之貼銅層合板的製造方法,其中冷軋銅箔含有0.06質量%以下之Mn。 (15) The method for producing a copper-clad laminate according to the above aspect, wherein the cold-rolled copper foil contains 0.06 mass% or less of Mn.

(16)一種貼銅層合板的製造方法,係具有銅箔層及樹脂層之貼銅層合板的製造方法,其特徵為:對含有選自Ca、La、Ce、Pr、Nd、Sm、Eu、Gd、Dy、Ho、Er、Tm、Yb、以及Y所成群之至少1種元素0.005質量%以上0.4質量%以下,餘部的銅為99.6質量%以上99.999質量%以下之冷軋銅箔表面,塗佈聚醯胺酸溶液並實施加熱處理,或重疊聚醯亞胺薄膜後進行熱壓黏合,藉以在冷軋銅箔上形成由聚醯亞胺所成之樹脂層之同時使冷軋銅箔再結晶化,而作成銅的單位晶格之基本結晶軸<100>,能對該銅箔之厚度方向與存在於箔面內之某一方向所成之2個正交軸 ,各個方位差15°以內之擇優定向區域,以面積率計,佔有60%以上之銅箔層。 (16) A method for producing a copper-clad laminate, which is a method for producing a copper-clad laminate having a copper foil layer and a resin layer, comprising: a pair selected from the group consisting of Ca, La, Ce, Pr, Nd, Sm, and Eu , at least one element of the group of Gd, Dy, Ho, Er, Tm, Yb, and Y is 0.005 mass% or more and 0.4 mass% or less, and the remaining copper is 99.9% by mass or more and 99.999 mass% or less of the cold rolled copper foil surface. , coating the polyaminic acid solution and performing heat treatment, or superimposing the polyimide film to perform hot press bonding, thereby forming a resin layer made of polyimine on the cold rolled copper foil while making cold rolled copper The foil is recrystallized, and the basic crystal axis of the unit crystal lattice of copper is <100>, and the thickness direction of the copper foil and the two orthogonal axes formed in a certain direction in the foil surface can be formed. The preferred orientation area within 15° of each azimuth difference accounts for more than 60% of the copper foil layer in terms of area ratio.

(17)如(16)所記載之貼銅層合板的製造方法,其中冷軋銅箔含有0.005質量%以上0.2質量%以下之Ti、或者0.005質量%以上0.395質量%以下之Al之任一種。 (17) The method for producing a copper-clad laminate according to the above aspect, wherein the cold-rolled copper foil contains 0.005 mass% or more and 0.2 mass% or less of Ti or 0.005 mass% or more and 0.395 mass% or less of Al.

(18)如(13)至(17)之任一項所記載之貼銅層合板的製造方法,其中將所塗佈之聚醯胺酸溶液實施加熱處理,以形成樹脂層之溫度為280℃以上400℃以下。 (18) The method for producing a copper-clad laminate according to any one of (13) to (17) wherein the coated polyaminic acid solution is subjected to heat treatment to form a resin layer at a temperature of 280 ° C. Above 400 ° C.

(19)如(13)至(17)之任一項所記載之貼銅層合板的製造方法,其中將聚醯亞胺薄膜實施熱壓黏合以形成樹脂層之溫度為280℃以上400℃以下。 The method for producing a copper-clad laminate according to any one of the aspects of the present invention, wherein the polyimide film is subjected to thermocompression bonding to form a resin layer at a temperature of from 280 ° C to 400 ° C. .

如採用本發明,則即使於經使可撓性電路基板屈撓時之屈撓部形成佈線,仍難於發生金屬疲勞(fatigue of metal),對應力(stress)及變形(strain)具有優異的耐久性。因此,可撓性電路基板之設計上不會有所限制,對折彎的重複或曲率半徑小的屈撓亦具備能忍耐之強度,而製得屈撓性優異的可撓性電路基板,故包括薄性行動電話、薄型顯示器、硬碟、列印機、DVD(多功能數位影音光碟)裝置等在內,將能實現耐久性高的電子設備。 According to the present invention, even if the flexure portion forms a wiring when the flexible circuit substrate is flexed, it is difficult to cause metal fatigue, and has excellent durability against stress and strain. Sex. Therefore, the design of the flexible circuit board is not limited, and the bending of the bend or the curvature of the radius of curvature is also tolerable, and the flexible circuit board having excellent flexibility is obtained. A thin mobile phone, a thin display, a hard disk, a printer, a DVD (multi-function digital video disc) device, etc., can realize an electronic device with high durability.

〔發明之最佳實施形態〕 [Best Embodiment of the Invention]

以下,就本發明加以詳細說明。 Hereinafter, the present invention will be described in detail.

本發明之銅箔,係對重複荷重(負荷)或變形,難於發生疲勞破裂者,為實現此種銅箔起見,採用2種合金組成之結果,分別順利成功製得難於發生金屬疲勞,對應力及變形具有優異的耐久性之貼銅層合板或可撓性電路基板。具有第1合金組成之銅箔,係作為組成而含有Mn 0.001質量%以上0.4質量%以下之同時,具有不可避免不純物及餘部之Cu者,且其特徵為:具有銅的單位晶格之基本結晶軸<100>,係對銅箔之厚度方向與存在於箔面內之某一方向所成之2個正交軸,各個方位差15°以內之擇優定向區域,以面積率計,在佔有60%以上之組織(以下,簡稱「有關第1發明之銅箔」)。又,具有第2合金組成之銅箔,係含有選自Ca、La、Ce、Pr、Nd、Sm、Eu、Gd、Dy、Ho、Er、Tm、Yb、以及Y所成群之至少1種元素0.005質量%以上0.4質量%以下,餘部的銅為99.6質量%以上99.999質量%以下者,且其特徵為:具有銅的單位晶格<100>,係對銅箔之厚度方向與存在於箔面內之某一方向所成之2個正交軸,各個方位差15°以內之擇優定向區域,以面積率計,在佔有60%以上之組織(以下,簡稱「有關第2發明之銅箔」)。 The copper foil of the present invention is a pair of repeated load (load) or deformation, and it is difficult to cause fatigue cracking. For the purpose of realizing such a copper foil, the results of the two kinds of alloy compositions are successfully produced, and it is difficult to produce metal fatigue. Forced and deformed copper-clad laminate or flexible circuit board with excellent durability. The copper foil having the first alloy composition contains Mn in an amount of 0.001% by mass or more and 0.4% by mass or less as a composition, and has an unavoidable impurity and a residual portion of Cu, and is characterized by a basic crystal of a unit lattice having copper. The axis <100> is a pair of orthogonal axes formed by the thickness direction of the copper foil and a direction existing in the foil surface, and the preferred orientation area within 15 degrees of each azimuth difference, in terms of area ratio, in the occupancy 60 More than % of the organizations (hereinafter referred to as "the copper foil of the first invention"). Further, the copper foil having the second alloy composition contains at least one selected from the group consisting of Ca, La, Ce, Pr, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Y. The element is 0.005 mass% or more and 0.4 mass% or less, and the remaining copper is 99.6% by mass or more and 99.999 mass% or less, and is characterized in that the unit lattice having copper is <100>, and the thickness direction of the copper foil is present in the foil. Two orthogonal axes formed in one direction in the plane, and a preferred orientation region within 15° of each azimuth difference, in an area ratio of 60% or more of the tissue (hereinafter referred to as "the copper foil of the second invention" ").

首先,就有關第1及第2發明之銅箔的材料組織上之規定加以說明。 First, the specifications regarding the material structure of the copper foils according to the first and second inventions will be described.

一般,材料組織會對材料之疲勞特性給與很大的影響。如組織為微細之情形,雖然強度或裂斷延性(breaking ductility)會獲提升,惟在另一方面,晶界(grain boundary)將成為轉位(rearangement)的累積面(cumulated plane)。又,因晶粒的方位(azimuth)之每顆晶粒的各向異性(anisotropy)所致之變形時的微觀性(microscopic)應力集中,會使疲勞特性惡化。由於本發明提供特別在形成可撓性電路基板的佈線後具有曲率半徑2mm以下的屈撓部般的變形值超過1%之高變形區域,仍具有優異的疲勞特性之銅箔之故,銅箔中無晶界者較佳,經高度地定向,且銅的3個基本結晶軸均齊全為宜。由於3個基本結晶軸<100>係在互相正交之故,如能決定其中之2個軸,則可決定全部的軸。亦即,銅的單位晶格之基本結晶軸<100>,有需要對銅箔之厚度方向與存在於箔面內之某一方向所成之2個正交軸,各個方位差15°以內之擇優定向區域,以面積率計,佔有60%以上,較佳為80%以上。特別是,為會形成曲率半徑成為0.8mm以下之屈撓部般之嚴厲的屈撓用途則較佳為作成佔有95%以上,更佳為作成佔有98%以上之方式為宜。 In general, material organization can have a large impact on the fatigue properties of materials. If the organization is fine, although the strength or breaking ductility will be improved, on the other hand, the grain boundary (grain) Boundary will become the cumulative plane of the reaping. Further, the microscopic stress concentration at the time of deformation due to the anisotropy of each crystal grain of the azimuth of the crystal grains deteriorates the fatigue characteristics. The present invention provides a copper foil having excellent fatigue characteristics, a copper foil having excellent deformation characteristics of a flexural portion having a curvature radius of 2 mm or less after forming a wiring of a flexible circuit board, and a copper foil having excellent fatigue characteristics. It is better to have no grain boundary in the middle, and it is highly oriented, and the three basic crystal axes of copper are all suitable. Since the three basic crystal axes <100> are orthogonal to each other, if two of the axes can be determined, all the axes can be determined. That is, the basic crystal axis of the unit cell of copper <100>, there is a need to have two orthogonal axes of the thickness direction of the copper foil and a direction existing in the foil surface, and each orientation difference is within 15°. The preferred orientation area accounts for 60% or more, preferably 80% or more, in terms of area ratio. In particular, in the case of forming a flexing portion such as a flexing portion having a curvature radius of 0.8 mm or less, it is preferable to use 95% or more of the composition, and more preferably 98% or more.

由於將在擇優定向區域之中心之晶粒方位簡稱為聚集組織(aggregation organization)的主方位(main aziluth)之故,有關本發明之第1及第2銅箔,均可謂銅箔之厚度方向具有<100>之主方位之同時,銅箔的箔面內具有<100>的主方位。亦即,本發明之銅箔,有需要於箔之厚度方向具有<100>方位,又,在箔面內呈現有將與此正交之<100>方位作為主方位之經高度地定向之簡稱為立方體方位(cubic azimuth)之聚集組織(aggregation organization)。立方體方位的積體度(integration level)較高者為宜,而因發達有此種聚集組織之故,本發明之銅箔,均較佳為箔面內之結晶粒徑在800μm以上為宜,並具有該結晶粒徑貫通於箔的厚度方向之組織者為宜。以下之說明中,除非特別有備註,其說明內容係就有關第1及第2發明之銅箔為所共通者。 Since the grain orientation in the center of the preferred orientation region is simply referred to as the main aziluth of the aggregation organization, the first and second copper foils of the present invention can be said to have the thickness direction of the copper foil. At the same time as the main orientation of <100>, the foil surface of the copper foil has a main orientation of <100>. That is, the copper foil of the present invention needs to have a <100> orientation in the thickness direction of the foil, and a short orientation in which the <100> orientation orthogonal to the orientation is used as the main orientation. Aggregation of cubic azimuth (aggregation) Organization). It is preferable that the integration level of the cube orientation is higher, and the copper foil of the present invention preferably has a crystal grain size of more than 800 μm in the foil surface due to the development of such agglomerated structure. It is preferable to have a structure in which the crystal grain size penetrates the thickness direction of the foil. In the following description, unless otherwise noted, the description is common to the copper foils according to the first and second inventions.

有關第1及第2發明之銅箔,可分別為軋輥銅(rolled copper)或電解銅(electrolytic copper)之任一,惟為獲得高的定向性(directing property)起見,較佳為軋輥銅。在銅之情形,經設法選擇軋輥條件及熱處理條件獲知,具體而言,較佳為依大的冷加工率(cold working ratio)(最終壓下率(final rolling draft ratio)90%以上)實施軋輥加工,並進行加工硬化而累積變形後施加熱量,藉以使其再結晶。經軋輥加工之銅的再結晶組織之一個係往箔的厚度方向齊全<100>方位、往軋輥方向齊全<100>方位之立方體聚集組織。 The copper foils according to the first and second inventions may each be either rolled copper or electrolytic copper, but are preferably rolled copper for obtaining high directing property. . In the case of copper, it has been known to select a roll condition and a heat treatment condition, and specifically, it is preferable to carry out roll processing in accordance with a large cold working ratio (final rolling ratio of 90% or more). And work hardening to accumulate deformation and then apply heat to recrystallize it. One of the recrystallized structures of the copper processed by the roll is a cubic aggregate structure having a thickness of <100> in the thickness direction of the foil and a <100> orientation in the direction of the roll.

表示聚集組織的擇優定向之優先度(priority),亦即表示定向度(directing degree)或積體度(integrating degree)之指標有幾種,惟可採用經使用由電子繞射(electron diffraction)所得之局部性的三維方位數據(three-dimensional azimuthal data)的統計資料之根據客觀性的資料之指標。於是,為依三維性的積體度規定聚集組織起見,可採用對聚集組織的主方位進入15°以內之擇優定向區域之面積率加以特定。 The priority indicating the preferred orientation of the aggregated organization, that is, the index indicating the directing degree or the integral degree, but may be obtained by electron diffraction. The statistic data of the statistics of the three-dimensional azimuthal data. Therefore, in order to define the aggregated structure according to the three-dimensional degree of integration, it is possible to specify the area ratio of the preferred orientation area in which the main orientation of the aggregated structure enters within 15°.

亦即,就銅箔之既定的面具有何種晶體方位(crystal azimuth)而言,例如,可藉由EBSD(electron back scattering diffraction(電子反向散射型繞射))法、ECP(electron channeling pattern)法等的電子繞射(electron diffraction)法或微勞厄法(micro Laue’s method)等的X射線繞射法等而加以確認。其中,EBSD法,係從當對測定對象之試樣表面照射會聚電子束(converging electron beam)時所發生之從各個結晶面所繞射之稱為偽菊池射線(pseudo KIKUCHI ray)之繞射像(diffraction figure)解析結晶,並從方位數據及測定點的位置資訊(location information)測定測定對象的晶體方位分佈(crystal azimuth distribution)之方法,而較X射線繞射法為能解析微觀區域的聚集組織之晶體取向。例如,可在各個微小區域中特定(specify)其晶體定位(crystal azimuth),並此等連結以進行測繪(mapping),使用同樣顏色以塗佈區分各測繪點間的平面方位(plane azimuth)的傾斜角(方位差)在一定值以下者,並使具有殆同一的平面方位之區域(晶粒)的分佈特別顯著,即可繪得方位測繪像。又,亦可包含對特定之平面方位具有既定的角度以內的方位之方位平面在內規定為其方位,並以面積率計,抽取各平面方位之存在比例。於EBSD法中,由於從某特定的方位算出在特定角度以內之區域的面積率之故,如考慮於可撓性電路基板之佈線之形成時,則本發明中,較佳為在較佈線被屈撓之部分的區域為大的區域,為算出 面積率而按能成為足夠的點數之方式細密地掃描電子射線,以獲得其平均性資訊。本發明中,考慮一般在可撓性電路基板上所形成之佈線電路之大小之下,選擇0.005mm2程度之區域,並為能算出平均性面積率起見,測定1000點以上即可。 That is, as to the crystal azimuth of the predetermined surface of the copper foil, for example, an EBSD (electron back scattering diffraction) method or an ECP (electron channeling pattern) can be used. It is confirmed by an electron diffraction method such as a method or an X-ray diffraction method such as a micro Laue's method. The EBSD method is a diffraction image called pseudo KIKUCHI ray which is emitted from each crystal plane when a converging electron beam is irradiated onto the surface of the sample to be measured. (diffraction figure) Analyzes the crystal, and measures the crystal azimuth distribution of the measured object from the orientation data and the location information of the measurement point, and the X-ray diffraction method is capable of analyzing the aggregation of the microscopic region. The crystal orientation of the tissue. For example, crystal azimuth can be specified in each micro-region, and these are linked for mapping, and the same color is used to coat the plane azimuth between the mapping points. If the inclination angle (azimuth difference) is below a certain value, and the distribution of the area (grain) having the same plane orientation is particularly remarkable, the azimuth mapping image can be drawn. Further, the orientation may be defined by including an azimuth plane having a certain angle within a predetermined angle, and the ratio of the plane orientations may be extracted by the area ratio. In the EBSD method, since the area ratio of the region within a certain angle is calculated from a specific orientation, when considering the formation of the wiring of the flexible circuit board, in the present invention, it is preferable to be in the wiring. The region of the flexion is a large region, and the electron beam is finely scanned in such a manner as to be sufficient to calculate the area ratio to obtain the average information. In the present invention, it is considered that a region of about 0.005 mm 2 is selected under the size of a wiring circuit formed on a flexible circuit board, and it is sufficient to measure 1000 points or more in order to calculate an average area ratio.

<有關第1發明之銅箔> <The copper foil of the first invention>

其次,關於有關第1發明之銅箔,就合金成分之規定加以說明。 Next, the copper foil of the first invention will be described with respect to the specifications of the alloy composition.

一般,合金元素,係藉由固溶強化(soliddissolving tempering)而提升金屬的強度者。但,在另一方面,具有面心立方構造(face-centered cubic structure)之對銅之幾乎全部的合金元素,會使層合缺陷能量(laminated deficiency energy)降低,以使容易擴展(spreading)轉位。因此,在變形時轉位即難於發生交叉滑動(cross-slip),以致容易發生局部性轉位的累積(accumulation)。其結果,亦會具有降低重複變形時的疲勞特性(fatigue characteristic)之作用。其中發現,Mn可能係較其他合金為降低銅的層合缺陷能量之效果低者。於具有同一組織之情形,將含有Mn規定量之銅與未含有銅進行比較時,在含有Mn之銅則有使往箔面內的一方向施加拉張應力(tension)時之破斷延性增大之效果,亦即,即使添加有合金成分,仍會高度地定向,且其破斷延性能實現具有大的面心立方晶系的晶體構造之銅合金箔,並能提升往箔面內 的一方向施加重複的拉張應力、或變形時之疲勞特性之事實。 In general, alloying elements are those that increase the strength of metals by solid dissolving tempering. However, on the other hand, almost all of the alloying elements of copper with a face-centered cubic structure reduce the laminated deficiency energy to facilitate spreading. Bit. Therefore, it is difficult to cause a cross-slip when indexing is performed at the time of deformation, so that accumulation of localized indexing is liable to occur. As a result, it also has the effect of reducing the fatigue characteristic at the time of repeated deformation. It has been found that Mn may be less effective than other alloys in reducing the lamination defect energy of copper. In the case of having the same structure, when copper having a predetermined amount of Mn is compared with copper which is not contained, copper having Mn has an increase in breakage when a tensile stress is applied to one direction in the foil surface. The large effect, that is, even if the alloy component is added, it is highly oriented, and its breaking property realizes a copper alloy foil having a large face-centered cubic crystal structure and can be lifted into the foil surface. The fact that repeated tensile stresses or fatigue characteristics during deformation are applied in one direction.

於是,本發明人等就於銅箔中之Mn的含量研究之結果發現,Mn的含量在0.001質量%以上時即可顯現其效果,惟特別是在含有0.005質量%以上時,效果將增大之事實。又,由於下述之理由,將其上限值規定為0.4質量%。 Then, the inventors of the present invention have found that the content of Mn in the copper foil is 0.001% by mass or more, and the effect is exhibited, but in particular, when it is contained in an amount of 0.005% by mass or more, the effect is increased. The facts. Moreover, the upper limit is made 0.4 mass% for the following reasons.

如上所述,有關第1發明之銅箔,具有銅的單位晶格之基本結晶軸<100>,係對銅箔之厚度方向與存在於箔面內之某一方向所成之2個正交軸,各個方位差15°以內之擇優定向區域,以面積率計,在佔有60%以上之組織。作為獲得此種組織之有力的手段,可採用藉由經依軋輥所加工之銅箔之熱處理,而形成往箔的厚度方向及軋輥方向經高度地定向<100>方位之再結晶聚集組織之方法。此時,如增加合金元素的濃度時,則再結晶溫度會上升。其程度係因成分種(component seed)而有所不同。又,有時,視成分種或濃度之不同,雖然會發生再結晶,惟不會形成<100>再結晶組織,立方體聚集組織。 As described above, in the copper foil according to the first aspect of the invention, the basic crystal axis of the unit lattice having copper is <100>, which is orthogonal to the thickness direction of the copper foil and the direction existing in the foil surface. The axis, the preferred orientation area within 15° of each azimuth difference, accounts for more than 60% of the tissue in area ratio. As a powerful means for obtaining such a structure, a method of recrystallizing agglomerated structure which is highly oriented in the thickness direction of the foil and in the direction of the roll by a direction of <100> can be formed by heat treatment of the copper foil processed by the roll. . At this time, if the concentration of the alloying element is increased, the recrystallization temperature rises. The extent varies depending on the component seed. Further, depending on the species or concentration, recrystallization may occur, but a <100> recrystallized structure and a cubic aggregate structure are not formed.

Mn,如係有關第1發明之銅箔所規定之範圍內的添加量之情形。則雖然可獲得立方體聚合組織,惟隨著含有量之增大而再結晶溫度會上升,如按超過0.4質量%之量含有之情形,則即使實施例如500℃之熱處理,仍然堅固的立方體方位之形成會有困難。此種500℃以上的熱處理,在簡單的氣氛控制下會容易發生氧化,因而需要降低氧氣 濃度為極低以實施熱處理,如實施輥輪至輥輪(roll-to-roll)般的連續性熱處理時,則需要膨大的設備,以致製造成本會增高。因此,在有關第1發明之銅箔中,Mn含量的上限值,係依因500℃,1小時的熱處理而不能製得本發明中所稱之規定的聚集組織之上限含量加以規定者。 Mn is a case where the amount added in the range specified by the copper foil of the first invention is used. Although a cubic polymeric structure can be obtained, the recrystallization temperature increases as the content increases, and if it is contained in an amount exceeding 0.4% by mass, a solid cube orientation is obtained even if a heat treatment such as 500 ° C is performed. Forming will be difficult. Such a heat treatment at 500 ° C or higher is susceptible to oxidation under a simple atmosphere control, and thus it is necessary to reduce oxygen. The concentration is extremely low to carry out the heat treatment, and if a roll-to-roll type continuous heat treatment is carried out, an inflated apparatus is required, so that the manufacturing cost is increased. Therefore, in the copper foil according to the first aspect of the invention, the upper limit of the Mn content is determined by the heat treatment at 500 ° C for 1 hour, and the upper limit content of the aggregated structure defined in the present invention cannot be obtained.

再者,本發明,係以可撓性電路基板用的銅箔之提供作為主要目的者。因而,亦可利用可撓性電路基板的製造過程時之熱歷程(thermal hysteresis)而使銅箔再結晶,如此作時則在成本上為有利者。當然,亦可將經預先加工硬化之銅箔加以熱處理,以形成再結晶聚集組織後,進行可撓性電路基板之形成,惟如於經加工硬化之銅箔上形成樹脂層之作法,在處理操作(handling)方面亦較容易。可撓性電路基板的製造方法,有:鑄製(casting)法、熱壓機(hat pressing)法、層壓(laminating)法等種種方法,其中,如依鑄製法而塗佈聚醯胺酸溶液並實施加熱處理以形成由聚醯亞胺所成之樹脂層之情形,其溫度最高亦只不過400℃。如將聚醯亞胺薄膜重疊後實施熱壓黏合以在銅箔上形成樹脂層之情形,其熱壓黏合之溫度為一般在300至400℃程度。於是,由於較佳為在此等加熱處理或熱壓黏合時之溫度下完成再結晶之故,於冷軋銅箔之組成中之Mn濃度,更佳為不超過0.1質量%。再者,如欲以連續式製造此時,則由於熱處理時間可縮短之故,工業規模上的可撓性電路基板用之銅箔的Mn濃度如在0.06質量%以下時,則在操作處理方面。又因能節省銅箔與聚醯亞 胺的層合過程前之銅箔的退火過程方面而言,更合適。 Furthermore, the present invention is mainly directed to the provision of a copper foil for a flexible circuit board. Therefore, it is also possible to recrystallize the copper foil by utilizing the thermal hysteresis during the manufacturing process of the flexible circuit board, which is advantageous in terms of cost. Of course, the pre-processed and hardened copper foil may be heat-treated to form a recrystallized aggregate structure, and then the flexible circuit substrate is formed, but the resin layer is formed on the work-hardened copper foil. Handling is also easier. The method for producing the flexible circuit board includes various methods such as a casting method, a hat pressing method, and a laminating method, wherein the polyamine is coated by a casting method. The solution was subjected to heat treatment to form a resin layer made of polyimide, and the temperature was at most 400 °C. For example, in the case where the polyimide film is overlapped and subjected to thermocompression bonding to form a resin layer on the copper foil, the temperature of the thermocompression bonding is generally about 300 to 400 °C. Therefore, since the recrystallization is preferably carried out at the temperature at the time of heat treatment or thermocompression bonding, the Mn concentration in the composition of the cold rolled copper foil is more preferably not more than 0.1% by mass. In addition, if the heat treatment time is shortened, the Mn concentration of the copper foil for the flexible circuit board on the industrial scale is, for example, 0.06 mass% or less, in terms of handling treatment. . And because it can save copper foil and Juyi It is more suitable in terms of the annealing process of the copper foil before the lamination process of the amine.

另一方面,銅的電阻值,在室溫下為約1.7×10-8Ω m。如為可撓性電路基板而使用之情形,由於形成有佈線之銅箔,係為信號或電力之傳達所使用之故,電阻值較低者較為合適。如添加至Mn濃度為0.1質量%以上時,則室溫的電阻將成為2.0×10-8 Ω m以上,並IACS(International Annealed Copper Standard(國際退火銅標準))會降低至85%以下之故,從此方面而言,Mn濃度更佳為不要在0.1質量%以上。又,如Mn濃度在0.06質量%以下時,則由於電阻值再降低為1.9×10-8Ω m以下之故,更合適。 On the other hand, the resistance value of copper is about 1.7 × 10 -8 Ω m at room temperature. In the case of being used as a flexible circuit board, the copper foil on which the wiring is formed is used for signal or power transmission, and the resistance value is preferably low. When the concentration of Mn is 0.1% by mass or more, the electrical resistance at room temperature will be 2.0 × 10 -8 Ω m or more, and the IACS (International Annealed Copper Standard) will be reduced to 85% or less. In this respect, the Mn concentration is more preferably not more than 0.1% by mass. Further, when the Mn concentration is 0.06 mass% or less, the resistance value is further reduced to 1.9 × 10 -8 Ω m or less, which is more preferable.

又,就如上所述方式將Mn含量抑制在0.1質量%以下之情形而言,有關第1發明之銅箔中,可作成含有0.001質量%以上,0.1質量%以下的Mn之同時,含有0.005質量%以上0.2質量%以下的Ti、或0.005質量%以上2質量%以下的Al之至少一種,並具有不可避免之不純物與餘部之Cu之方式。如作成此種組成之銅箔,則可更提升破斷延性、以提升疲勞特性。如在上述範圍添加Ti或Al,則特別在0.001質量%以上0.005質量%以下之少量的Mn添加量,仍能關於耐久性方面獲得大的效果。 In the case of the copper foil according to the first aspect of the invention, the copper foil according to the first aspect of the invention may contain 0.001 mass% or more and 0.1 mass% or less of Mn, and may contain 0.005 mass. At least one of 0.2% by mass or less of Ti or 0.005 mass% or more and 2% by mass or less of Al, and having an unavoidable impurity and a residual portion of Cu. If the copper foil of such a composition is formed, the fracture ductility can be further improved to improve the fatigue characteristics. When Ti or Al is added in the above range, a small amount of Mn added in an amount of 0.001% by mass or more and 0.005% by mass or less can obtain a large effect on durability.

在此,Ti含量的上限,係與Mn同樣,由再結晶溫度(recrystallization temperature)所規定。Ti較Mn為提高再結晶溫度之作用雖大,惟因500℃、1小時之熱處理則不能製得本發明中所稱之規定的聚集組織之值,具體而 言,Ti含量的上限值,為0.2質量%。又,較佳為在400℃以下即能完成再結晶為宜,此時之Ti含量之上限為0.05質量%為宜。 Here, the upper limit of the Ti content is defined by the recrystallization temperature as in the case of Mn. Ti is more effective than Mn in increasing the recrystallization temperature. However, the heat treatment at 500 ° C for 1 hour does not produce the value of the aggregated structure specified in the present invention. The upper limit of the Ti content is 0.2% by mass. Further, it is preferable that recrystallization is completed at 400 ° C or lower, and the upper limit of the Ti content at this time is preferably 0.05% by mass.

另一方面之Al,係使銅的再結晶溫度上升之效果較小,雖然原理上能添加至對銅之Al的最大固溶極限(maximal solid dissolving limit)之9質量%為止,惟通常之鑄製凝固(casting solidification)中,如超過2質量%之添加,則容易形成CuAl化合物相(compound phase)。如形成有此種化合物相,則當施加變形時,應力將集中於銅箔內的CuAl化合物近旁,以致顯著降低疲勞特性。 On the other hand, Al has a small effect of increasing the recrystallization temperature of copper, and although it can be added in principle to 9% by mass of the maximum solid dissolving limit of Al of copper, it is usually cast. In the case of casting solidification, if it is added in an amount of more than 2% by mass, a CuAl compound phase is easily formed. If such a compound phase is formed, when deformation is applied, the stress will concentrate in the vicinity of the CuAl compound in the copper foil, so that the fatigue characteristics are remarkably lowered.

有關第1發明之銅箔中,除Mn、Ti以及Al以外尚含有不可避免之不純物,惟特別是作為原料銅中之不純物元素所含有之銀、鐵、鎳,並不對本發明中所說明之效果發生影響。但,就氧而言,如作為氧化銅而含有多量氧之情形,則由於當對銅箔施加應力時,會對氧化銅引起應力集中(stress concentration)之故,氧的含量有最大不超過0.1質量%之必要,較佳為一般性的韌銅中所含之水準之0.05質量%以下,更佳為無氧銅的氧不純物濃度水準之0.001質量%以下為宜。 In the copper foil according to the first aspect of the invention, in addition to Mn, Ti, and Al, unavoidable impurities are contained, but in particular, silver, iron, and nickel contained in the impurity element in the raw material copper are not described in the present invention. The effect has an effect. However, in the case of oxygen, if a large amount of oxygen is contained as copper oxide, since stress is applied to the copper foil when stress is applied to the copper foil, the oxygen content may not exceed 0.1 at the maximum. The mass % is preferably 0.05% by mass or less based on the level contained in the general tough pitch copper, and more preferably 0.001% by mass or less based on the oxygen impurity level of the oxygen-free copper.

<有關第2發明之銅箔> <Copper foil relating to the second invention>

又,就有關第2發明之銅箔的合金成分之規定加以說明。 Moreover, the specification of the alloy component of the copper foil of the second invention will be described.

為使銅箔高度地定向起見,較佳為藉由冷軋而累積變 形、加熱並再結晶,以形成屬於再結晶聚集組織之立方體方位。如上所述,合金元素有妨礙再結晶後的立方體方位之形成之情形,惟其中,Ca、La、Ce、Pr、Nd、Sm、Eu、Gd、Dy、Ho、Er、Tm、Yb以及Y,則促進立方體方位。在同一熱處理條件下加熱之情形下,就Ca、La、Ce、Pr、Nd、Sm、Eu、Gd、Dy、Ho、Er、Tm、Yb以及Y,比較經含有規定量之此等之銅與未經含有此等之銅時,在含有上述合金元素之情形,銅的立方體方位之積體度可能會增大。又,合金元素,會藉由固溶強化而提升強度。但,在另一方面,具有面心立方構造之對銅之幾乎全部的合金元素,會使層合缺陷能量降低,以使容易擴展轉位。因此,在變形時轉位即難於發生交叉滑動,以致容易發生局部性轉位的累積。其結果,亦會具有降低重複變形時的疲勞特性之作用。其中發現,Ca、La、Ce、Pr、Nd、Sm、Eu、Gd、Dy、Ho、Er、Tm、Yb以及Y,係較其他合金為降低銅的層合缺陷能量之效果低、降低重複變形時的疲勞特性之作用亦低之事實。 In order to make the copper foil highly oriented, it is preferable to accumulate and change by cold rolling. Shape, heat and recrystallize to form a cube orientation belonging to the recrystallized aggregated structure. As described above, the alloying elements have a situation in which the orientation of the cube after recrystallization is hindered, but among them, Ca, La, Ce, Pr, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Y, Then promote the orientation of the cube. In the case of heating under the same heat treatment conditions, Ca, La, Ce, Pr, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Y are compared to contain a predetermined amount of such copper and In the case where the above-mentioned alloying elements are not contained, the bulk of the cube orientation of copper may increase. In addition, alloying elements increase strength by solid solution strengthening. However, on the other hand, almost all alloying elements of copper having a face-centered cubic structure reduce the lamination defect energy to make it easy to expand the index. Therefore, it is difficult to cause cross-sliding when indexing is performed at the time of deformation, so that accumulation of localized indexing is liable to occur. As a result, it also has the effect of reducing the fatigue characteristics at the time of repeated deformation. It is found that Ca, La, Ce, Pr, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb and Y are lower in effect and lower the repetitive deformation than other alloys in reducing the copper lamination defect energy. The effect of the fatigue characteristics of the time is also low.

選自Ca、La、Ce、Pr、Nd、Sm、Eu、Gd、Dy、Ho、Er、Tm、Yb以及Y所成群之一種以上的合金元素之含量,以微量的添加量即可顯現其效果,特別是含有0.005質量%以上時,效果將增大。又,此等元素,如以總量計,添加0.4質量%以上時,則立方體方位的積體度反而會降低。又,由於如此等元素未固溶於銅中之情形,當對銅箔施加變形時,將在析出相(Separate phase)的近旁發生 應力集中,而該應力集中將成為破壞起點之故,如上述合金元素的最大固溶極限在0.4質量%以下時,則不超出此值為宜。 The content of one or more alloying elements selected from the group consisting of Ca, La, Ce, Pr, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Y can be expressed in a small amount of addition. The effect, in particular, when it is contained in an amount of 0.005% by mass or more, the effect is increased. In addition, when these elements are added in an amount of 0.4% by mass or more based on the total amount, the degree of integration of the cube orientation is rather lowered. Moreover, since such elements are not dissolved in the copper, when a deformation is applied to the copper foil, it will occur in the vicinity of the separated phase. The stress concentration, and the stress concentration will become the starting point of the failure. If the maximum solid solution limit of the above alloying elements is 0.4% by mass or less, the value is not exceeded.

有關第2發明之銅箔所規定之Ca、La、Ce、Pr、Nd、Sm、Eu、Gd、Dy、Ho、Er、Tm、Yb以及Y係化學性質相似者,均有提升銅箔的<100>定向度之作用。因而,此等元素可為經混合2種以上之元素而含有者。此中,La、Ce、Pr、Nd、Sm、Eu、Gd、Dy、Ho、Er、Tm、Yb以及Y為稀土類元素,如欲分類各個元素時需要耗費成本,且高價者為多。將此等元素精練並分離之前的金屬係稱為鈰鑭稀土合金(Misch metal),係以Ce、La、Pr、Nd作為主成分之混合體,而較為廉價者。由於鈰鑭稀土合金中所多含有之金屬均發揮同樣作用之故,如作為鈰鑭稀土合金而添加時,則成本削減上有效。 In the copper foil of the second invention, the Ca, La, Ce, Pr, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Y-based chemical properties are similar, and the copper foil is improved. 100> The role of orientation. Therefore, these elements may be contained by mixing two or more elements. Among them, La, Ce, Pr, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Y are rare earth elements, and it is costly to classify each element, and there are many high prices. The metal before the element is refined and separated is referred to as a bismuth rare earth alloy (Misch metal), which is a mixture of Ce, La, Pr, and Nd as main components, and is relatively inexpensive. Since the metal contained in the rare earth alloy has the same effect, when it is added as a rare earth alloy, it is effective in cost reduction.

雖曾於有關第1發明之銅箔中已說明,本發明,係以提供可撓性電路基板用銅箔作為主要目的者。因而,亦可利用貼銅層合板或可撓性電路基板之製造過程時的熱歷程而使銅箔再結晶,故成本上有利者。當然,亦可作成將經預先加工硬化之銅箔加以熱處理以形成再結晶聚集組織後,製得貼銅層合板之方式,惟於經加工硬化之銅箔上形成樹脂層之作法,在操作處理上較容易。貼銅層合板的製造方法,有:鑄製法、熱壓機法、層壓法等種種方法,而形成樹脂層之溫度,至高亦為400℃程度,較佳為在此溫度下完成有關第2發明之銅箔的再結晶。 Although it has been described in the copper foil according to the first aspect of the invention, the present invention provides a copper foil for a flexible circuit board as a main object. Therefore, the copper foil can be recrystallized by the thermal history of the copper-clad laminate or the flexible circuit board during the manufacturing process, which is advantageous in terms of cost. Of course, it is also possible to prepare a copper-clad laminate by heat-treating the pre-processed and hardened copper foil to form a recrystallized aggregate structure, but forming a resin layer on the work-hardened copper foil, and operating it. It's easier. The method for producing the copper-clad laminate includes a casting method, a hot press method, a lamination method, and the like, and the temperature at which the resin layer is formed is also about 400 ° C, preferably at the temperature. Recrystallization of the inventive copper foil.

就有關第2發明之銅箔而言,上述以外之元素亦可作為不可避免之不純物而含有。特別是,Al、Ti(鈦)、Ag、Fe、Ni、Mn(錳)、Hf(鉿)、Ta(鉭)、B(硼)、或V(釩),只要是有關第2發明之銅箔中所規定之銅箔的純度以內(銅含量),則本發明之效果即可維持。此等元素之中,Al及Ti,如與選自Ca、La、Ce、Pr、Nd、Sm、Eu、Gd、Dy、Ho、Er、Tm、Yb,以及Y所成群之1種以上的元素組合,詳言之,如含有0.005質量%以上0.2質量%以下的Ti或者0.005質量%以上0.395質量%以下的Al之至少任一種,則有能提升經以同樣條件使銅箔再結晶化時的<100>定向度之作用。再者,不可避免之不純物中之Mg,雖然係與有關第2發明之銅箔中所規定之元素群在化學性質上相似者,惟由於會降低<100>定向度之故,其含量較佳為0.001質量%以下。 In the copper foil according to the second aspect of the invention, the elements other than the above may be contained as unavoidable impurities. In particular, Al, Ti (titanium), Ag, Fe, Ni, Mn (manganese), Hf (铪), Ta (钽), B (boron), or V (vanadium), as long as the copper of the second invention The effect of the present invention can be maintained within the purity of the copper foil specified in the foil (copper content). Among these elements, Al and Ti are one or more groups selected from the group consisting of Ca, La, Ce, Pr, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Y. When the composition of the element is more than 0.005 mass% or more and 0.2 mass% or less of Ti or at least one of 0.005 mass% or more and 0.395 mass% or less of Al, it is possible to enhance the recrystallization of the copper foil under the same conditions. The role of <100> orientation. Further, the Mg in the unavoidable impurities is chemically similar to the element group specified in the copper foil according to the second invention, but the content is preferably lowered because the degree of orientation is lowered by <100>. It is 0.001% by mass or less.

又,在不可避免之不純物之中,就氧而言,如作為氧化銅而含有多量氧之情形,則由於當對銅箔施加應力時,會對氧化銅引起應力集中之故,氧的含量有最大不超過0.1質量%之必要,較佳為一般性的韌銅中所含之水準之0.05質量%以下,更佳為無氧銅的氧不純物濃度水準之0.001質量%以下為宜。又,就硫而言,亦與銅之親和性高,容易作為不純物混入,惟由於有使銅脆化之作用之故,含量較佳為低者。屬於有關第2發明之銅箔中所規定之元素之Ca、La、Ce、Pr、Nd、Sm、Eu、Gd、Dy、Ho、Er、Tm、Yb以及Y,和需要時所添加之Al及Ti,各個係與 氧或硫的親和性高,當熔解銅以進行合金化時亦有與對耐屈撓疲勞特性(flex fatigue resistance characteristic)有害的氧或硫形成化合物,以將氧及硫排出於材料之外的副次性效果。因此,如上述般之所添加之合金元素,較佳為按照銅的原料中的氧或硫含量,在考慮作成化合物而被去除之部分之下按稍多方式添加為宜。 Further, among the unavoidable impurities, in the case of oxygen, if a large amount of oxygen is contained as copper oxide, since stress is concentrated on the copper oxide when stress is applied to the copper foil, the oxygen content is The content of not more than 0.1% by mass is preferably 0.05% by mass or less based on the level contained in the general tough pitch copper, and more preferably 0.001% by mass or less based on the oxygen impurity concentration level of the oxygen-free copper. Further, in terms of sulfur, the affinity with copper is also high, and it is easy to be mixed as an impurity, but the content is preferably low because of the effect of embrittlement of copper. Ca, La, Ce, Pr, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Y which are elements specified in the copper foil according to the second invention, and Al added as needed Ti, each department and Oxygen or sulfur has a high affinity. When copper is melted for alloying, it also forms a compound with oxygen or sulfur which is harmful to the flex fatigue resistance characteristic to discharge oxygen and sulfur out of the material. Sub-secondary effect. Therefore, it is preferable that the alloying element added as described above is added in a slightly larger amount in accordance with the oxygen or sulfur content in the raw material of copper, in consideration of the portion which is removed in consideration of the preparation of the compound.

如上所述,有關第2發明之銅箔中之Ca、La、Ce、Pr、Nd、Sm、Eu、Gd、Dy、Ho、Er、Tm、Yb、Y、Al、以及Ti之含量,係按在藉由鑄製法、熱壓機法、層壓法等而形成樹脂層以製造貼銅層合板之方式之熱處理溫度下,銅箔能獲得足夠的<100>擇優定向區域之條件加以規定者,惟所施加於銅箔之熱歷程為相同之情形,則可獲得提升因上述元素所致之<100>立方體方位之積體度之效果。 As described above, in the copper foil according to the second aspect of the invention, the contents of Ca, La, Ce, Pr, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Y, Al, and Ti are In the heat treatment temperature at which the resin layer is formed by a casting method, a hot press method, a lamination method, or the like to produce a copper-clad laminate, the copper foil can obtain a sufficient condition of <100> preferred orientation region. However, if the thermal history applied to the copper foil is the same, the effect of increasing the integrated body of the <100> cube orientation due to the above elements can be obtained.

<貼銅層合板、可撓性電路基板> <Bronze laminated board, flexible circuit board>

本發明中,採用上述之有關第1發明之銅箔或有關第2發明之銅箔,而於任一銅箔所成之銅箔層上層合樹脂層以作成貼銅層合板,並將此貼銅層合板的銅箔層實施蝕刻以形成既定的佈線,則可製得屈撓耐久性或屈撓性優異的可撓性電路基板。該可撓性電路基板係很適合於佈線的至少一處形成屈撓部後使用者,特別是於屈撓部的曲率半徑在2mm以下般的高變形區域中仍具有優異的疲勞特性。為達成此目的起見,本發明中,作成銅箔具有第1或第2發明所規定之組成及成分值之方式,加之,較佳為如下述 所示之構成者。在此,下述之內容係與有關第1及第2發明之銅箔所共通者,並將採用其中之一種銅箔的情形稱為有關本發明之貼銅層合板、及可撓性電路基板。 In the present invention, the copper foil according to the first aspect of the invention or the copper foil according to the second aspect of the invention is used, and a resin layer is laminated on the copper foil layer formed of any copper foil to form a copper-clad laminate. When the copper foil layer of the copper laminate is etched to form a predetermined wiring, a flexible circuit board excellent in flexural durability or flexibility can be obtained. The flexible circuit board is suitable for a user who forms a flexure at least one portion of the wiring, and particularly has excellent fatigue characteristics in a high deformation region in which the curvature radius of the flex portion is 2 mm or less. In order to achieve the object, in the present invention, the copper foil is formed to have the composition and component values specified in the first or second invention, and preferably, it is as follows. The constituents shown. Here, the following contents are common to the copper foils according to the first and second inventions, and the case where one of the copper foils is used is referred to as a copper-clad laminate according to the present invention, and a flexible circuit substrate. .

亦即,於本發明中,特別需要高屈撓性之情形,將形成可撓性電路基板之佈線之銅箔,採用厚度5至18μm的軋製銅箔(rolled copper foil)為宜,較佳為採用厚度9至12μm的軋製銅箔為宜。如軋製銅箔之厚度在18μm以上時,則難於製得曲率半徑在2mm以下般之高變形區域具有優異的疲勞特性之可撓性電路基板。又,如厚度在5μm以下時,則在使銅箔與樹脂層層合時的操作處理即有困難,以致難於形成均質的貼銅層合板。再者,如上所述,在從軋製銅箔形成銅箔層之情形,可採用一種其軋製銅箔為經預先熱處理,並銅的單位晶格之基本結晶軸<100>,係按對該銅箔的厚度方向與存在於箔面內之某一方向所成之2個正交軸,能將各個方位差15°以內之擇優定向區域,以面積率計,佔有60%以上之方式所再結晶化者,或者,亦可作成在上述厚度範圍且經冷軋者藉由依鑄製法或層壓法等之樹脂層形成之熱歷程而所再結晶化之方式。 That is, in the present invention, in the case where high flexibility is particularly required, a copper foil for forming a wiring of a flexible circuit substrate is preferably a rolled copper foil having a thickness of 5 to 18 μm, preferably. It is preferred to use a rolled copper foil having a thickness of 9 to 12 μm. When the thickness of the rolled copper foil is 18 μm or more, it is difficult to obtain a flexible circuit board having excellent fatigue characteristics in a high deformation region having a curvature radius of 2 mm or less. Moreover, when the thickness is 5 μm or less, the handling of the copper foil and the resin layer is difficult, so that it is difficult to form a homogeneous copper-clad laminate. Furthermore, as described above, in the case of forming a copper foil layer from a rolled copper foil, a rolled copper foil may be used as a pre-heat treated, and the basic crystal axis of the unit cell of copper is <100>, which is In the thickness direction of the copper foil and the two orthogonal axes formed in a certain direction in the foil surface, the preferred orientation region within 15° of each azimuth difference can be used in an area ratio of 60% or more. The recrystallization may be formed by recrystallization in a temperature range of the above-mentioned thickness range and by a cold rolling by a resin layer formed by a casting method or a lamination method.

就本發明中之貼銅層合板的樹脂層而言,形成樹脂層之樹脂種類並不特別加以限制,惟可例示:聚醯亞胺、聚醯胺、聚酯、液晶聚合物、聚苯硫醚、聚醚型聚酮醚等。其中,從作成電路基板時能顯示良好的可撓性、且耐熱性亦優異之觀點來看,聚醯亞胺或液晶聚合物很合適。 In the resin layer of the copper-clad laminate of the present invention, the kind of the resin forming the resin layer is not particularly limited, but may be exemplified by polyimine, polyamine, polyester, liquid crystal polymer, polyphenylene sulfide. Ether, polyether polyketone ether, and the like. Among them, polyiminoimine or liquid crystal polymer is suitable from the viewpoint of exhibiting good flexibility when forming a circuit board and having excellent heat resistance.

樹脂層的厚度,可按照貼銅層合板之用途、形狀等而 適當設定,惟從可撓性之觀點來看,較佳為5至75μm的範圍、更佳為9至50μm的範圍、最佳為10至30μm的範圍。如樹脂層的厚度不足5μm時,則有絕緣可靠性降低之可能性,相反地,如在75μm以上則在作為可撓性電路基板裝載於小型設備等上時可能電路基板全體的厚度過厚,以致亦有屈撓性之降低之可能性。 The thickness of the resin layer can be in accordance with the use, shape, etc. of the copper-clad laminate It is suitably set, but from the viewpoint of flexibility, it is preferably in the range of 5 to 75 μm, more preferably in the range of 9 to 50 μm, and most preferably in the range of 10 to 30 μm. When the thickness of the resin layer is less than 5 μm, the insulation reliability may be lowered. Conversely, when the thickness is 75 μm or more, when the flexible circuit board is mounted on a small-sized device or the like, the thickness of the entire circuit board may be too thick. As a result, there is also the possibility of a decrease in flexibility.

又,作為可撓性電路基板而裝載於小型設備等之很多情形,可能在從銅箔層所形成之佈線上形成如下述中所示般的覆蓋(cover)材料。在此情形,在考慮施加於佈線之應力的平衡之下設計覆蓋材料及樹脂層之構成為宜。據本發明人等所知,例如,形成樹脂層之聚醯亞胺樹脂在25℃下之抗張彈性係數(tensile modulus of elasticity)為4至6GPa(千兆帕)之同時,厚度在14至17μm之範圍時,則所使用之覆蓋材料具有由厚度8至17μm的熱硬化性樹脂所成之黏接層、與厚度7至13μm的聚醯亞胺層之2層,而黏接層與聚醯亞胺層全體的抗張彈性係數能成為2至4GPa之構成為宜。又,如形成樹脂層之聚醯亞胺樹脂在25℃下之抗張彈性係數為6至8GPa之同時,厚度在12至15μm的範圍時,則所使用之覆蓋材料具有由厚度8至17μm的熱硬化性樹脂所成之黏接層、與厚度7至13μm的聚醯亞胺層之2層,而黏接層與聚醯亞胺全體的抗張彈性係數能成為2至4GPa之構成為宜。 Further, in many cases, such as a small-sized device, which is mounted on a flexible circuit board, a cover material as shown in the following may be formed on the wiring formed of the copper foil layer. In this case, it is preferable to design the covering material and the resin layer in consideration of the balance of the stress applied to the wiring. According to the inventors' knowledge, for example, the polyimide resin forming the resin layer has a tensile modulus of elasticity of 4 to 6 GPa at 25 ° C and a thickness of 14 to In the range of 17 μm, the covering material used has an adhesive layer made of a thermosetting resin having a thickness of 8 to 17 μm and two layers of a polyimide layer having a thickness of 7 to 13 μm, and the adhesive layer and the poly layer It is preferable that the tensile modulus of elasticity of the entire quinone imine layer can be 2 to 4 GPa. Further, if the polyimide resin forming the resin layer has a tensile modulus of elasticity of 6 to 8 GPa at 25 ° C and a thickness of 12 to 15 μm, the covering material used has a thickness of 8 to 17 μm. The adhesive layer formed of the thermosetting resin and the polyimide layer of 7 to 13 μm in thickness, and the tensile modulus of the adhesive layer and the polyimide may be 2 to 4 GPa. .

使樹脂層與銅箔層層合之手段而言,例如樹脂層係由聚醯亞胺所成之情形,則作成可於聚醯亞胺薄膜上塗佈熱 塑性之聚醯亞胺或使其介在以進行銅箔之熱層壓(hot laminating)之方式(所謂層壓法)。在層壓法中所用之聚醯亞胺薄膜而言,可例示:“卡布頓”(東麗.杜邦(股))、“阿比卡爾”(鐘淵化學工業(股))、“悠比列克斯”(宇部興產(股))等。當進行聚醯亞胺薄膜與銅箔之加熱壓黏合時,較佳為使能顯示熱塑性之熱塑性聚醯亞胺樹脂介在其中。利用此種層壓法而進行聚醯亞胺薄膜之熱壓黏合以形成樹脂層時,其熱壓黏合之溫度在280℃以上400℃以下為宜、較佳為300℃以上400℃以下。 For the method of laminating the resin layer and the copper foil layer, for example, when the resin layer is formed of polyimine, the heat can be applied to the polyimide film. The plastic polyimide or it is interposed in a manner to perform hot laminating of the copper foil (so-called lamination method). The polyimine film used in the lamination method can be exemplified by "Caboton" (Dongli DuPont (share)), "Abikar" (Zhongyuan Chemical Industry Co., Ltd.), "Yu Billex" (Ube Industries (shares)) and so on. When the polyimine film is subjected to heat-pressure bonding of the copper foil, it is preferred to allow a thermoplastic thermoplastic polyimide resin to be incorporated therein. When the polyimine film is subjected to thermocompression bonding by the lamination method to form a resin layer, the temperature of the thermocompression bonding is preferably 280 ° C or more and 400 ° C or less, preferably 300 ° C or more and 400 ° C or less.

另一方面,從容易控制樹脂層的厚度或折彎特性等之觀點來看,經於銅箔上塗佈聚醯亞胺先質(precursor)溶液(亦稱聚醯胺酸溶液)後,進行乾燥.硬化以形成樹脂層之作法亦可能(所謂鑄製法)。於此種鑄製法中,為使聚醯亞胺先質溶液醯亞胺化以形成樹脂層之用的加熱處理之溫度在280℃以上400℃以下為宜、較佳為300℃以上400℃以下為宜。 On the other hand, from the viewpoint of easily controlling the thickness of the resin layer, the bending property, and the like, the polyimide film is coated with a polyimide solution (also called a polyaminic acid solution). dry. It is also possible to harden to form a resin layer (so-called casting method). In the casting method, the temperature for heat treatment for forming the resin layer by imidizing the polyimine precursor solution is preferably 280 ° C or higher and 400 ° C or lower, preferably 300 ° C or higher and 400 ° C or lower. It is appropriate.

樹脂層亦可使複數種樹脂層合以形成,例如,可作成使線膨脹係數等相異的2種以上的聚醯亞胺層合之方式,惟此時,為維持耐熱性或屈撓性之觀點來看,較佳為作成將環氧樹脂等不作為黏接劑使用之下,樹脂層的全部能實質上可從聚醯亞胺所形成之方式。包括由單獨的聚醯亞胺所成之情形及由複數種聚醯亞胺所成之情形在內,樹脂層的抗張彈性係數作成能成為4至10GPa之方式為宜,較佳為作成5至8GPa之方式為宜。 The resin layer may be formed by laminating a plurality of kinds of resins, for example, a method in which two or more kinds of polyimines having different linear expansion coefficients are laminated, but in this case, heat resistance or flexibility is maintained. In view of the above, it is preferred to use an epoxy resin or the like as an adhesive, and all of the resin layers can be substantially formed from polyimine. In particular, it is preferable that the tensile modulus of the resin layer is 4 to 10 GPa, and preferably 5, in the case where it is formed of a single polyimine and the case of a plurality of polyimine. The method to 8GPa is appropriate.

於本發明之貼銅層合板中,較佳為作成樹脂層之線膨脹係數能成為10至30ppm/℃之範圍。如樹脂層為由複數種樹脂所成之情形,則作成樹脂層全體之線膨脹係數能成為此種範圍即可。為滿足此種條件時,例如,本身為由線膨脹係數為25ppm/℃以下、較佳為5至20ppm/℃的低線膨脹性聚醯亞胺(低熱膨脹性聚醯亞胺)層、與線膨脹係數為26ppm/℃以上、較佳為30至80ppm/℃的高線膨脹性聚醯亞胺(高熱膨脹性聚醯亞胺)層所成之樹脂層,如調整此等之厚度比,則可作成10至30ppm/℃者。較佳的低線膨脹性聚醯亞胺層與高線膨脹性聚醯亞胺層的厚度比為70:30至95:5的範圍。又,較佳為低線膨脹性聚醯亞胺層,將成為樹脂層的主要樹脂層,而高線膨脹性聚醯亞胺層則按能與銅箔相接之方式所設置。再者,線膨脹係數,係以醯亞胺化反應經充分完成醯亞胺化反應之聚醯亞胺作為試料,採用熱機分析器(thermo-mechanical analyser)(TMA)在升溫為250℃後,以10℃/分鐘的速度冷卻,而可從於240至100℃的範圍下之平均的線膨脹係數中求得。 In the copper-clad laminate of the present invention, it is preferred that the coefficient of linear expansion of the resin layer be in the range of 10 to 30 ppm/°C. When the resin layer is formed of a plurality of kinds of resins, the linear expansion coefficient of the entire resin layer may be such a range. In order to satisfy such a condition, for example, a low-expansion polyimine (low thermal expansion polyimide) layer having a linear expansion coefficient of 25 ppm/° C. or less, preferably 5 to 20 ppm/° C., and a resin layer formed of a layer of a high linear expandable polyimide (highly heat-expandable polyimide) having a coefficient of linear expansion of 26 ppm/° C. or more, preferably 30 to 80 ppm/° C., if such a thickness ratio is adjusted, It can be made into 10 to 30 ppm/°C. The thickness ratio of the preferred low linear expansion polyimide layer to the high linear expansion polyimide layer is in the range of 70:30 to 95:5. Further, the low-expansion polyimine layer is preferably a main resin layer of the resin layer, and the high-expansion polyimine layer is provided so as to be in contact with the copper foil. Further, the linear expansion coefficient is obtained by using a polyimine which sufficiently completes the ruthenium imidization reaction by a ruthenium imidization reaction, and using a thermo-mechanical analyser (TMA) after the temperature is raised to 250 ° C. It is cooled at a rate of 10 ° C / minute, and can be obtained from the average linear expansion coefficient in the range of 240 to 100 ° C.

又,從本發明之貼銅層合板所得之可撓性電路基板,具備有由樹脂層與銅箔層所形成之佈線,在任一處具有屈撓部所使用者。亦即,包括硬碟內的可動部、行動電話的鉸鏈部或導板滑動部、列印機的磁頭部、光拾波部、筆記型個人電腦的可動部在內廣泛在各種電子.電氣設備等中使用,電路基板本身被折彎、被扭彎、或按照所裝置之設備的動作而變形,以致在任一處形成屈撓部者。特別是, 由於本發明之可撓性電路基板具有屈撓耐久性優異的屈撓部構造之故,為對應隨伴滑動屈撓、折彎屈撓(包括卷邊接縫(lock side seaming))、鉸鏈屈撓、導板屈撓等的重複動作而頻繁折彎之情形、或者所裝載之設備的小型化起見,曲率半徑係按折彎動作為0.38至2.0mm、按滑動屈撓為1.25至2.0mm、按鉸鏈屈撓為3.0至5.0mm、按導板屈撓為0.3至2.0mm般的嚴厲的使用條件之情形合適者,可在0.3至1mm的狹窄間隙(gap)且屈撓性能的要求嚴厲的導板用途,其中於能形成曲率半徑將成為0.8mm以下之屈撓部般之嚴厲的屈撓用途上特別發揮效果。 Moreover, the flexible circuit board obtained from the copper-clad laminate of the present invention includes a wiring formed of a resin layer and a copper foil layer, and has a flexure portion at any position. That is to say, including the movable part in the hard disk, the hinge part of the mobile phone or the sliding part of the guide, the magnetic head of the printing machine, the optical pickup part, and the movable part of the notebook type personal computer are widely used in various electronic. In electrical equipment and the like, the circuit board itself is bent, twisted, or deformed in accordance with the action of the apparatus of the apparatus, so that the flexure is formed at any position. especially, Since the flexible circuit board of the present invention has a flexure structure excellent in flexural durability, it is suitable for sliding sliding, flexing and flexing (including side seaming) and hinge bending. The case where the bending, the bending of the guide plate, etc. are repeated, and the bending is frequent, or the miniaturization of the loaded device, the radius of curvature is 0.38 to 2.0 mm according to the bending action, and 1.25 to 2.0 mm according to the sliding deflection. In the case of a severe use condition such as a hinge flexing of 3.0 to 5.0 mm and a bending of the guide plate of 0.3 to 2.0 mm, a narrow gap of 0.3 to 1 mm and a requirement for flexibility can be severe. The use of the guide plate is particularly effective in the use of a flexing-like flexing portion having a curvature radius of 0.8 mm or less.

就佈線的寬幅、形成、圖型等而言,並不特別加以限定,只要是按照可撓性電路基板之用途,所裝載之電子設備而適當設計即可。第1圖,表示例如為行動電話的鉸鏈部等所使用之可撓性電路基板,係具有從樹脂層1及銅箔所形成之佈線2及連結器端子3之例者。將經使第1圖的可撓性電路基板能形成稜線L之方式屈撓為U字型之情形的模式圖表示於第2圖中。如第2圖所示,例如,使可撓性電路基板屈撓為U字狀,則將於其外側(在形成有具有曲率半徑之內接圓處之相反側)形成稜線L。於第1圖(a)、第1圖(b)、以及第2圖中所示之該稜線L,係對形成銅佈線2之銅箔的擇優定向區域之〔100〕軸方向具有α°的角度。在此,第1圖(a),係在兩端的連結器端子3的中間處,在稜線L附近經傾斜方式所形成之例,惟亦可如第1圖(b)般,亦能以最短距離之方式將連結器 端子3間加以佈線。再者,如折疊式行動電話等般,除於屈撓部之稜線L的位置為經固定之情形之外,亦可為滑板式行動電話等般於屈撓部之稜線L會移動之方式之導板滑動屈撓(第1圖(b)中所記載之粗線箭頭方向)。再者,本發明中之可撓性電路基板,係於樹脂層之至少單面具有由銅箔所成之佈線者,惟需要時亦可作成於樹脂層兩面具備銅箔之方式。 The width, formation, pattern, and the like of the wiring are not particularly limited, and may be appropriately designed in accordance with the use of the flexible circuit board and the mounted electronic device. In the first embodiment, the flexible circuit board used for the hinge portion of the mobile phone or the like is provided, and the wiring 2 and the connector terminal 3 formed from the resin layer 1 and the copper foil are exemplified. A schematic diagram showing a case where the flexible circuit board of Fig. 1 can be bent into a U-shape so that the flexible circuit board can be formed is shown in Fig. 2. As shown in FIG. 2, for example, when the flexible circuit board is bent into a U shape, the ridge line L is formed on the outer side (the side opposite to the inner circumference where the radius of curvature is formed). The ridge line L shown in Fig. 1 (a), Fig. 1 (b), and Fig. 2 has α° in the [100] axis direction of the preferred orientation region of the copper foil forming the copper wiring 2. angle. Here, Fig. 1(a) shows an example in which the ridge line L is formed in an inclined manner in the middle of the connector terminals 3 at both ends, but it can also be as short as in Fig. 1(b). Distance way Wiring between terminals 3. Further, in the case of a folding mobile phone or the like, in addition to the case where the position of the ridge line L of the flexing portion is fixed, it may be a manner in which the ridge line L of the flexing portion moves like a slide type mobile phone. The guide plate slides and flexes (the direction of the thick arrow shown in Fig. 1(b)). Further, the flexible circuit board of the present invention has a wiring made of a copper foil on at least one side of the resin layer, and may be formed by providing a copper foil on both surfaces of the resin layer as occasion demands.

如第1圖所示,由本發明之可撓性電路基板之銅箔所形成之佈線2,可為朝向任何方向者。α°可採取任何角度。亦即,於本發明之可撓性電路基板中,銅佈線內之擇優定向區域之1個<100>軸,為銅箔之厚度方向,係與樹脂層1成為垂直者,除此以外之2個<100>軸,則可朝向銅佈線面內之任何方向。又,就第1圖中所示之可撓性電路基板按能形成稜線L之方式使其屈撓為U字狀以實施疲勞試驗之情形,第1圖中之〔100〕軸與屈撓時之主應力會一致之第1圖(c)及第1圖(d)係最嚴厲的方向。此乃如下所述之原因。 As shown in Fig. 1, the wiring 2 formed of the copper foil of the flexible circuit board of the present invention may be oriented in any direction. °° can take any angle. That is, in the flexible circuit board of the present invention, one <100> axis of the preferred orientation region in the copper wiring is in the thickness direction of the copper foil, and is perpendicular to the resin layer 1, and other than The <100> axis can be oriented in any direction within the copper wiring plane. Further, the flexible circuit board shown in Fig. 1 is bent into a U shape so as to form a ridge line L to perform a fatigue test, and the [100] axis and flexing time in Fig. 1 Figure 1 (c) and Figure 1 (d), where the principal stresses are consistent, are the most severe directions. This is the reason as described below.

如就可撓性電路基板按能形成稜線L之方式使其屈撓為U字狀之情形,雖視可撓性電路基板之構成而有所不同惟施加於銅電路之主應力,係稜線L切裁銅佈線之剖面垂直的拉張、或壓縮壓力(compressive stress)。如將於屈撓部之從稜線往厚度方向切裁時之佈線之剖面方位設為(100)時,則當使其屈撓時,8個滑動面(slip plane)的史米特因子(schmidt)將成為等價(equivalent)而8個 滑動系同時發生作用,以致轉位容易局部性地累積。如第1圖(a)或(b)所示,如將〔100〕軸與稜線L所成之角度作成90°以外的角度時,由以銅箔的滑動面之8個{111}之中,史米特因子最大的主滑動面會成為4個之故,剪切滑動(shearing slip)變成良好,以致不易發生局部性的加工硬化。 When the flexible circuit board is bent into a U shape so that the ridge line L can be formed, the main stress applied to the copper circuit differs depending on the configuration of the flexible circuit board, and the ridge line L Cutting the cross section of the copper wiring vertically, or compressive stress. For example, when the cross-sectional orientation of the wiring when the flexing portion is cut from the ridge line to the thickness direction is set to (100), the Schmitt factor of the eight slip planes (schmidt) when it is flexed Will become equivalent and 8 The sliding system acts at the same time, so that the indexing is easy to accumulate locally. As shown in Fig. 1 (a) or (b), when the angle formed by the [100] axis and the ridge line L is made to an angle other than 90°, it is made up of 8 {111} of the sliding surface of the copper foil. The largest main sliding surface of the Schmitt factor becomes four, and the shearing slip becomes good, so that localized work hardening is less likely to occur.

於在來所用之周知的軋製銅箔中,銅箔的長距方向係相當於軋製方向,如第1圖(c)或(d)所示,通常係沿著其主方位<100>以形成電路之作法。並且,如使用在來的銅箔而往如此方向形成電路時,會在耐久性上發生問題,相對地,在本發明中,即使此種情形,對重複性屈撓仍難發生斷裂。當然,如按第1圖(a)或(b)般形成銅箔佈線時,會成為屈撓疲勞特性更高的可撓性電路基板。 In the well-known rolled copper foil used in the prior art, the long-distance direction of the copper foil corresponds to the rolling direction, as shown in Fig. 1 (c) or (d), usually along its main orientation <100>. To form a circuit. Further, when a circuit is formed in such a direction by using a copper foil which is used, there is a problem in durability. In contrast, in the present invention, even in such a case, it is difficult to cause cracking for repetitive flexing. Of course, when a copper foil wiring is formed as shown in Fig. 1 (a) or (b), it becomes a flexible circuit board having higher flexural fatigue characteristics.

如上所說明,由於本發明之銅箔係經高度地定向之同時,含有所規定之合金成分之故,難於發生金屬疲勞、對應力及變形具有優異的耐久性。又,由於採用此種銅箔以形成貼銅層合板,並依周知之方法進行其銅箔之蝕刻以形成佈線所得之可撓性電路基板,具備即使對折彎的重複或曲率半徑小的屈撓仍能耐久之強度、且優於屈撓性之故,不致於發生在考慮屈撓部之佈線的形狀等的可撓性電路基板之設計上之限制。 As described above, since the copper foil of the present invention is highly oriented and contains a predetermined alloy composition, it is difficult to cause metal fatigue and excellent durability against stress and deformation. Moreover, since such a copper foil is used to form a copper-clad laminate, and the copper foil is etched by a known method to form a flexible circuit board obtained by wiring, it is possible to have a repeating of the bending or a small curvature radius. The strength is still durable and is superior to the flexibility, so that the design of the flexible circuit board in consideration of the shape of the wiring of the flexure portion or the like is not limited.

〔實施例〕 [Examples]

以下,將根據實施例及比較例,更具體地說明本發明內容。以下所述,係表示本發明之例者,本發明並不因此等例而有所限定。於本實施例中,製作具有種種合金元素之銅箔,從經採用該銅箔所得試驗用單面貼銅層合板實施銅箔組織之解析之同時,從試驗用單面貼銅層合板製作試驗用可撓性電路基板,以測定屈撓疲勞特性。 Hereinafter, the contents of the present invention will be more specifically described based on examples and comparative examples. Hereinafter, the examples of the present invention are shown, and the present invention is not limited by the examples. In the present embodiment, a copper foil having various alloying elements was produced, and the copper foil structure was analyzed from the test single-sided copper-clad laminate obtained by using the copper foil, and the test was performed from the test single-sided copper-clad laminate. A flexible circuit board was used to measure the flexural fatigue characteristics.

〔實施例1〕 [Example 1]

於本實施例中,製作以Mn作為合金元素之銅箔,從經使用該銅箔之試驗用貼銅層合板測定裂斷延性之同時,從該試驗用單面貼銅層合板製作試驗用可撓性電路基板,以測定屈撓疲勞特性。 In the present embodiment, a copper foil having Mn as an alloying element was produced, and the test for cracking ductility was measured from the copper-clad laminate for testing using the copper foil, and the test was performed from the single-sided copper-clad laminate for the test. A flexible circuit board to measure flex fatigue characteristics.

於本實施例中所使用之有關試樣號碼1至16之銅箔,係按下述方式所製造者。將純度99.99%、氧含量0.0008%的無氧銅、與按表1中所示之既定量所秤量之純度99.9%的Mn,在石墨坩堝中於氬氣氣氛下加以熔解並攪拌後,流延(casting)於寬幅50mm、長度100mm、厚度15mm的長方體的石墨鑄模中以製作錠塊(ingot)。接著,往寬幅方向按能成為厚度10mm之方式實施拉幅軋製(tentering rolling)、在最高600℃下實施熱軋製(hot rolling)、再往長度方向按能成為厚度2mm方式依同樣條件實施熱軋製。然後,實施冷軋製至厚度9μm止。在其當中,於厚度0.5mm處利用長條加工(slitworking)以切斷兩端,將寬幅加以整齊為60mm。因而,所得銅箔為寬 幅60mm、厚度9μm者。 The copper foils of the sample numbers 1 to 16 used in the present embodiment were produced in the following manner. An oxygen-free copper having a purity of 99.99% and an oxygen content of 0.0008% and Mn having a purity of 99.9% as measured in Table 1 were melted and stirred in a graphite crucible under an argon atmosphere, and then cast. Casting in a rectangular parallelepiped graphite mold having a width of 50 mm, a length of 100 mm, and a thickness of 15 mm to make an ingot. Then, in the wide direction, tentering rolling can be performed to a thickness of 10 mm, hot rolling can be performed at a maximum temperature of 600 ° C, and thickness can be 2 mm in the longitudinal direction. Hot rolling is carried out. Then, cold rolling was performed to a thickness of 9 μm. Among them, slit processing was used at a thickness of 0.5 mm to cut both ends, and the width was aligned to 60 mm. Thus, the resulting copper foil is wide The width is 60mm and the thickness is 9μm.

然後,一部分銅箔,則在真空爐中500℃下,實施再結晶熱處理1小時。將所得銅箔的兩端、及中央部的Mn濃度加以化學分析之結果,確認銅箔不論有無實施再結晶熱處理殆無因處所所引起之濃度偏差之事實。 Then, a part of the copper foil was subjected to recrystallization heat treatment at 500 ° C for 1 hour in a vacuum furnace. As a result of chemical analysis of the Mn concentrations at both ends and the central portion of the obtained copper foil, it was confirmed whether or not the copper foil was subjected to recrystallization heat treatment without any concentration deviation caused by the location.

又,構成有關實施例1之試驗用可撓性電路基板之樹脂層之聚醯亞胺的先質之聚醯胺酸溶液,係依下列方法合成2種。 Further, the polyamic acid solution of the precursor of the polyimine which constitutes the resin layer of the flexible circuit board for a test of Example 1 was synthesized in the following manner.

(合成例1) (Synthesis Example 1)

於具備熱電偶(thermocouple)及攪拌機之同時能導入氮氣之反應容器內,置入N,N-二甲基乙醯胺。於此反應容器中,在攪拌中使2,2-雙〔4-(4-胺基苯氧)苯基〕丙烷(BAPP)溶解於容器中。接著,添加均苯四酸二酐(PMDA)。經按單體的置入總量能成為15質量%之方式置入。然後,繼續攪拌3小時,製得聚醯胺酸a之樹脂溶液。該聚醯胺酸a之樹脂溶液的溶液黏度為3,000cps(厘泊)。 N,N-dimethylacetamide was placed in a reaction vessel capable of introducing nitrogen while having a thermocouple and a stirrer. In this reaction vessel, 2,2-bis[4-(4-aminophenoxy)phenyl]propane (BAPP) was dissolved in a vessel while stirring. Next, pyromellitic dianhydride (PMDA) was added. It can be placed in such a manner that the total amount of the monomers to be placed can be 15% by mass. Then, stirring was continued for 3 hours to obtain a resin solution of polyamic acid a. The solution viscosity of the polyacetic acid a resin solution was 3,000 cps (centipoise).

(合成例2) (Synthesis Example 2)

於具有熱電偶及攪拌機之同時能導入氮氣之反應容器內,置入N,N-二甲基乙醯胺。於此反應容器中,置入2,2’-二甲基-4,4’-二胺基聯苯(m-TB)。接著,添加3,3’4,4’-二聯苯四羧酸二酐(BPDA)及均苯四酸二酐( PMDA)。經按單體的置入總量能成為15質量%,而各酸酐的莫耳比率(BPDA:PMDA)能成為20:80之方式置入。然後,繼續攪拌3小時,製得聚醯胺酸b之樹脂溶液。該聚醯胺酸b之樹脂溶液的溶液黏度為20,000cps。 N,N-dimethylacetamide was placed in a reaction vessel capable of introducing nitrogen while having a thermocouple and a stirrer. Into this reaction vessel, 2,2'-dimethyl-4,4'-diaminobiphenyl (m-TB) was placed. Next, 3,3'4,4'-diphenyltetracarboxylic dianhydride (BPDA) and pyromellitic dianhydride (BPDA) and pyromellitic dianhydride (BPDA) were added. PMDA). The total amount of the monomers to be incorporated can be 15% by mass, and the molar ratio of each of the acid anhydrides (BPDA: PMDA) can be set to 20:80. Then, stirring was continued for 3 hours to obtain a resin solution of polylysine b. The solution viscosity of the polyacetic acid b resin solution was 20,000 cps.

其次,將銅箔與聚醯亞胺所成之複合體之貼銅層合板之形成方法加以說明。 Next, a method of forming a copper-clad laminate of a composite of copper foil and polyimine will be described.

在經於上述中製備之有關試料號碼1至16之銅箔表面,塗佈經於上述中製備之聚醯胺酸溶液a,並使其乾燥(硬化後即形成膜厚2μm的熱塑性聚醯亞胺),並於其上塗佈聚醯胺酸b,並使其乾燥(硬化後即形成膜厚9μm的低熱膨脹性聚醯亞胺),再於其上塗佈聚醯胺酸a並使其乾燥(硬化後即形成膜厚2μm的熱塑性聚醯亞胺),以最高溫度作為400℃,經過依在360~400℃的溫度範圍下的累積時間成為5分鐘之加熱條件之加熱處理,以形成由3層構造之聚醯亞胺所成之樹脂層。 On the surface of the copper foil of the sample Nos. 1 to 16 prepared in the above, the polyamic acid solution a prepared in the above was applied and dried (after hardening, a thermoplastic polyimide having a film thickness of 2 μm was formed). An amine), and coated with poly-proline acid b, and dried (after hardening, a low thermal expansion polyimine having a film thickness of 9 μm is formed), and then polyacrylic acid a is coated thereon and It is dried (after curing, a thermoplastic polyimide having a film thickness of 2 μm is formed), and the maximum temperature is taken as 400 ° C, and the heating time under the heating condition of a temperature range of 360 to 400 ° C is 5 minutes. A resin layer formed of a polylayer of a 3-layer structure is formed.

接著,按沿著銅箔的軋製方向(MD(縱向)方向)成為長度250mm,對軋製方向正交之方向(TD(橫向)方向)成為寬幅40mm的長方形尺寸之方式切裁,製得具有厚度13μm的樹脂層(聚醯亞胺)1及厚度9μm的銅箔層2之試驗用單面貼銅層合板(第5圖)。此時的樹脂層全體的抗張彈性係數為7.5GPa。 Then, it was cut into a length of 250 mm along the rolling direction (MD (longitudinal) direction) of the copper foil, and cut into a rectangular shape having a width of 40 mm in a direction orthogonal to the rolling direction (TD (lateral) direction). A test single-sided copper-clad laminate having a resin layer (polyimine) 1 having a thickness of 13 μm and a copper foil layer 2 having a thickness of 9 μm was obtained (Fig. 5). The tensile modulus of elasticity of the entire resin layer at this time was 7.5 GPa.

就經於上述中所得試驗用單面貼銅層合板內的銅箔(銅箔層),實施裂斷延性及組織解析。 The copper foil (copper foil layer) in the single-sided copper-clad laminate for the test obtained above was subjected to crack ductility and texture analysis.

銅箔的裂斷延性,係使用經將試驗用單面貼銅層合板 之由聚醯亞胺所成樹脂層化學方式去除所得之銅箔按往軋製方向成為長度150mm,於箔面內對軋製方向正交之方向成為寬幅10mm所切裁之試料,按往長度方向依標點間距離100mm、接伸速度(rate of extension)10mm/min.之條件測定所得者。測定時,按銅箔種類各準備7支試料,以求出裂斷延性的平均值。 The fracture and ductility of copper foil is the use of a single-sided copper laminate for testing. The copper foil obtained by chemically removing the resin layer formed by the polyimide reaction has a length of 150 mm in the rolling direction, and is cut into a width of 10 mm in the direction perpendicular to the rolling direction in the foil surface. The length direction was measured in accordance with the conditions of a distance between the punctuation of 100 mm and a rate of extension of 10 mm/min. At the time of measurement, seven samples were prepared for each type of copper foil to determine the average value of the fracture ductility.

銅箔的組織,係對各銅箔的軋製面使用膠體二氧化矽(colloidal silica),實施機械式、化學式研磨後,使用EBSD裝置以實施方位解析而製得。所使用之裝置,為日立製作所製FE-SEM(S-4100)、TSL社製的EBSD裝置、以及軟件程式(software)(OIM Analysis 5.2)。測定區域為大約800μm×1600μm的區域,測定時作成加速電壓(acceleration voltage)20kV、測定階段間隔(measuring step interval)4μm。亦即,測定點數成為80000點。本發明之立方體聚集組織的積體度,亦即<100>擇優定向區域的評價,可按對箔的厚度方向、及箔的軋製方向的雙方,<100>進入15°以內之測定點對全體測定點之比例表示。測定數係就各品種個體相異的5個試料實施,將百分比的小數點以下加以四捨五入。又,採用所得數據,將相鄰之晶粒的方位差在15°以上者作為晶界以進行晶粒徑(grain diameter)之評價。 The structure of the copper foil was obtained by using a colloidal silica on the rolled surface of each copper foil, mechanically and chemically polished, and then performing orientation analysis using an EBSD apparatus. The apparatus used was an FE-SEM (S-4100) manufactured by Hitachi, Ltd., an EBSD device manufactured by TSL, and a software (OIM Analysis 5.2). The measurement area was a region of about 800 μm × 1600 μm, and an acceleration voltage of 20 kV and a measurement step interval of 4 μm were measured. That is, the number of measurement points is 80000 points. The degree of integration of the cubic aggregated structure of the present invention, that is, the evaluation of the preferred orientation area of <100>, can be measured in the thickness direction of the foil and the rolling direction of the foil, and <100> enters the measurement point within 15°. The ratio of all measurement points is expressed. The number of measurements was carried out on five samples with different individual varieties, and the percentage of the decimal point was rounded off. Further, using the obtained data, the orientation difference of the adjacent crystal grains was 15 or more as a grain boundary to evaluate the grain diameter.

接著,在經於上述中所得試驗用單面貼銅層合板的銅箔層側被覆既定的遮罩(mask),使用氯化鐵/氯化銅系溶液以實施蝕刻,按線寬(line width)(1)為150μm的 直線狀的佈線的佈線方向,能往軋製方向成為平行之方式,且,間隔寬度(space width)能成為250μm之方式形成佈線圖型。然後,按能兼作後述之耐屈撓試驗用的試樣之方式,準照JIS 6471,製得沿著電路基板之佈線方向H而往長距方向具有150mm,往與佈線方向H正交之方向具有寬幅40mm之試驗用可撓性電路基板。確認在藉由蝕刻之電路形成的前後,銅箔的組織上並無變化之事實。 Next, a predetermined mask was applied to the copper foil layer side of the test single-sided copper-clad laminate obtained in the above, and a chloride/copper chloride-based solution was used for etching, and line width was used. ) (1) is 150 μm The wiring direction of the linear wiring can be parallel to the rolling direction, and the wiring pattern can be formed so that the space width can be 250 μm. Then, in accordance with JIS 6471, it is possible to obtain 150 mm in the long-distance direction along the wiring direction H of the circuit board, and to be perpendicular to the wiring direction H, in accordance with the sample for the flexural test which will be described later. A test flexible circuit board having a width of 40 mm. It was confirmed that there was no change in the structure of the copper foil before and after the formation by the etching circuit.

採用經於上述中所得試驗用可撓性電路基板,準照JIS C5016以實施MIT屈撓試驗。將試驗之模式圖表示於第3圖中。裝置,係使用東洋精機製作所製(STROGRAPH-R1),將試驗用可撓性電路基板的長距方向之一端固定於屈撓試驗裝置的夾頭機架,以重錘固定另一端,以夾頭部作為中心,依振動速度150次/分鐘之條件左右輪流每次旋轉135±5度,並按曲率半徑能成為0.8mm之方式使其屈撓,將電路基板的佈線的傳導被遮斷為止的次數作為屈撓次數求得。 The MIT flexural test was carried out by using the flexible circuit board for the test obtained above and in accordance with JIS C5016. The mode diagram of the test is shown in Figure 3. The device is manufactured by Toyo Seiki Co., Ltd. (STROGRAPH-R1), and one end of the long-distance direction of the test flexible circuit board is fixed to the chuck frame of the flexure test device, and the other end is fixed by the weight to the chuck. The center is rotated by 135±5 degrees per revolution depending on the vibration speed of 150 times/min, and is flexed so that the radius of curvature can be 0.8 mm, and the conduction of the wiring of the circuit board is blocked. The number of times is obtained as the number of flexings.

於此試驗條件中,由於屈撓部所形成之稜線將試驗用可撓性電路基板的佈線之佈線方向H按能正交之方式受到屈撓之故,施加於銅電路之主應力、主變形,則成為與軋製方向平行的拉張應力、拉張變形。在屈撓試驗後,如從銅箔的厚度方向觀察電路時,則可確認在屈撓部的稜線附近按對軋製方向略垂直方式發生龜裂並斷線之情況。 In this test condition, since the ridge line formed by the flexure portion bends the wiring direction H of the wiring of the test flexible circuit substrate in an orthogonal manner, the principal stress and the main deformation applied to the copper circuit Then, it is a tensile stress and a tensile deformation parallel to the rolling direction. After observing the circuit from the thickness direction of the copper foil after the flexural test, it was confirmed that the crack occurred in the vicinity of the ridge line of the flexing portion and the wire was slightly perpendicular to the rolling direction.

經由以上所述之試驗所得之銅箔中的Mn量、銅箔的裂斷延性、<100>擇優定向面積率、以及屈撓壽命表示於 表1中。屈撓壽命(flex life),係按每種銅箔種類各準備5支之試驗用可撓性電路基板的結果之平均值。 The amount of Mn in the copper foil obtained by the above test, the fracture ductility of the copper foil, the <100> preferred orientation area ratio, and the flex life are expressed in in FIG. 1. The flex life is an average value of the results of five test flexible circuit boards prepared for each type of copper foil.

從表1獲知,所以能獲得疲勞壽命(fatigue life)在2000次以上之高的耐屈撓特性之原因,係Mn濃度在0.001質量%以上、0.4質量%以下,且<100>擇優定向區域的面積率在60%以上之時之事實。如Mn濃度在0.02質量%以下之濃度時,則不管有無經過500℃、1小時的再結晶熱處理,均獲得具有極高的積體度之立方體聚集組織。在此範圍時,則在積體度上並不未認出有意差,隨著Mn濃度之增高,疲勞壽命即增長,特別在0.005質量%以上時獲得良好的耐屈撓特性。此乃因Mn之添加,而屈撓時之 主應力方向之佈線的長度方向,亦即軋製方向之裂斷延性會增大之故。在Mn濃度為0.001質量%以上之試料時,發現具有立方體方位之晶粒經於銅箔面內發達為800μm以上之大小、以致經於箔的厚度方向貫通之事實。 As is known from Table 1, the fatigue resistance of the fatigue life of 2000 times or more can be obtained, and the Mn concentration is 0.001% by mass or more and 0.4% by mass or less, and the <100> preferred orientation region is The fact that the area ratio is above 60%. When the concentration of Mn is 0.02% by mass or less, a cubic aggregate structure having an extremely high degree of bulk is obtained regardless of the presence or absence of recrystallization heat treatment at 500 ° C for 1 hour. In this range, there is no unrecognized intentional difference in the degree of the bulk, and as the Mn concentration increases, the fatigue life increases, and particularly at 0.005 mass% or more, good flex resistance characteristics are obtained. This is due to the addition of Mn, and when it is flexed The length direction of the wiring in the direction of the principal stress, that is, the crack-breaking property in the rolling direction is increased. When the sample having a Mn concentration of 0.001% by mass or more is found, the crystal grains having a cubic orientation are developed to have a size of 800 μm or more in the surface of the copper foil so as to penetrate through the thickness direction of the foil.

如比較Mn濃度在0.1質量%之試料號碼11與12時,則試驗號碼11的試料之耐屈撓特性為較高,相對地,試料號碼12的試料發生裂斷止之次數為較少。此乃因試料號碼11的試料之銅箔,係因實施有500℃、1小時的再結晶熱處理之故,再結晶有進展,<100>擇優定向區域之面積率為較大所致。又,在Mn濃度在0.42質量%以上的試料,則雖然在形成可撓性電路基板之前施加有再結晶熱處理,惟<100>擇優定向區域之面積率成為60%以下,至發生裂斷止的屈撓次數亦大為減少。此乃因Mn之過剩的添加,而再結晶溫度增高所致。 When the sample numbers 11 and 12 having a Mn concentration of 0.1% by mass were compared, the sample of the test No. 11 had a high flex resistance characteristic, and the number of samples of the sample No. 12 was relatively small. This is because the copper foil of the sample of the sample No. 11 was recrystallized by the recrystallization heat treatment at 500 ° C for 1 hour, and the area ratio of the <100> preferred orientation region was large. Further, in the sample having a Mn concentration of 0.42% by mass or more, the recrystallization heat treatment is applied before the formation of the flexible circuit board, but the area ratio of the <100> preferred orientation region is 60% or less, and the crack is broken. The number of flexing is also greatly reduced. This is due to the excessive addition of Mn and the increase in recrystallization temperature.

於本實施例中之聚醯亞胺之形成時間為5分鐘,此乃係模擬輥輪至輥輪之連續生產之試驗。如比較未經事前實施500℃、1小時的再結晶熱處理之試料,則Mn濃度在0.005質量%以上、0.06質量%以下之時,屈撓壽命即增高。亦即此種濃度範圍的銅箔,係作為製造具備有由聚醯亞胺所成之樹脂層之聚醯亞胺系可撓性電路基板時所用之銅箔,特別合適者。 The formation time of the polyimine in this example was 5 minutes, which was a test for continuous production of a roll to a roller. When the sample which has not been subjected to the recrystallization heat treatment at 500 ° C for 1 hour beforehand is compared, when the Mn concentration is 0.005 mass% or more and 0.06 mass% or less, the flexural life is increased. In other words, a copper foil of such a concentration range is particularly suitable as a copper foil used in the production of a polyimide substrate having a resin layer made of polyimide.

〔實施例2〕 [Example 2]

於本實施例中,製作以Mn、Ti、以及Al作為合金元 素之銅箔,從經使用該銅箔之試驗用單面貼銅層合板測定裂斷延性之同時,從該試驗用單面貼銅層合板製作試驗用可撓性電路基板,以測定屈撓疲勞特性。 In the present embodiment, Mn, Ti, and Al are used as alloying elements. A copper foil for a test, a test flexible circuit board was prepared from the test single-sided copper-clad laminate, and the flexural ductility was measured from the test single-sided copper-clad laminate using the copper foil. Fatigue properties.

於本實施例中所使用之有關試料號碼17至38之銅箔,係按下述方式所製造者。將純度99.9%、氧含量0.015%的韌銅、與經按既定之量所秤量之各為純度99.9%的Mn、Ti、以及Al,按如表2中所示,在石墨坩堝中於氬氣氣氛下加以熔解並攪拌後,流延於寬幅50mm、長度100mm、厚度15mm的長方體的石墨鑄模中以製作錠塊。然後,往寬幅方向按能成為厚度10mm之方式實施拉幅軋製,在最高600℃下實施熱軋製,再往長度方向按能成為厚度2mm之方式止依同樣條件實施熱軋製。然後,實施冷軋製至厚度9μm止。在其當中,於厚度0.5mm處利用長條加工以切斷兩端,將寬幅加以整齊為60mm。因而,所得銅箔為寬幅60mm、厚度12μm者。 The copper foils of the sample numbers 17 to 38 used in the present embodiment were produced in the following manner. The toughness copper having a purity of 99.9% and an oxygen content of 0.015% and Mn, Ti, and Al each having a purity of 99.9% as measured by a predetermined amount are as shown in Table 2, and argon gas is present in the graphite crucible. After melting and stirring in an atmosphere, it was cast in a rectangular parallelepiped graphite mold having a width of 50 mm, a length of 100 mm, and a thickness of 15 mm to prepare an ingot. Then, tenter rolling was carried out so as to have a thickness of 10 mm in the width direction, hot rolling was performed at a maximum of 600 ° C, and hot rolling was carried out under the same conditions in the longitudinal direction so as to have a thickness of 2 mm. Then, cold rolling was performed to a thickness of 9 μm. Among them, the strip was cut at a thickness of 0.5 mm to cut both ends, and the width was aligned to 60 mm. Therefore, the obtained copper foil was a width of 60 mm and a thickness of 12 μm.

然後,一部分銅箔,則在真空爐中500℃下,實施再結晶熱處理1小時。將所得銅箔的兩端、及中央部的Mn、Ti、Al濃度加以化學分析之結果,確認銅箔不論有無實施再結晶熱處理殆無因處所所引起之濃度偏差之事實。 Then, a part of the copper foil was subjected to recrystallization heat treatment at 500 ° C for 1 hour in a vacuum furnace. As a result of chemical analysis of the concentrations of Mn, Ti, and Al at both ends and the central portion of the obtained copper foil, it was confirmed whether or not the copper foil was subjected to recrystallization heat treatment without any concentration deviation caused by the cause.

接著,使用經依與實施例1的合成例1及合成例2同樣方法所製備之聚醯胺酸溶液,在經於上述中製備之有關試料號碼17至38之銅箔表面,首先,塗佈聚醯胺酸溶液a並使其乾燥(硬化後即形成膜厚2μm的熱塑性聚醯亞胺),於其上塗佈聚醯胺酸b並使其乾燥(硬化後即形成膜 厚8μm的低熱膨脹性聚醯亞胺),再於其上塗佈聚醯胺酸a並使其乾燥(硬化後即形成膜厚2μm的熱塑性聚醯亞胺),以最高溫度作為400℃,經過依在360℃至400℃的溫度範圍下的累積時間成為5分鐘之加熱條件之加熱處理,以形成由3層構造之聚醯亞胺所成之樹脂層。 Next, a polylysine solution prepared in the same manner as in Synthesis Example 1 and Synthesis Example 2 of Example 1 was used, and the surface of the copper foil of the sample Nos. 17 to 38 prepared in the above was first coated. The polyaminic acid solution a is dried (after curing, a thermoplastic polyimide having a film thickness of 2 μm is formed), and the poly-proline b is coated thereon and dried (curing to form a film) a low thermal expansion polyimine having a thickness of 8 μm, and then coating the polyamid acid a thereon and drying it (after curing, a thermoplastic polyimide having a film thickness of 2 μm is formed), and the maximum temperature is 400 ° C. The accumulation time under the temperature range of 360 ° C to 400 ° C was heat-treated under heating conditions of 5 minutes to form a resin layer made of a polylayer of a three-layer structure.

接著,按沿著銅箔的軋製方向成為長度250mm、對軋製方向正交之方向成為寬幅40mm的長方形尺寸之方式切裁,製得具有厚度12μm的樹脂層(聚醯亞胺)及厚度12μm的銅箔層之有關實施例2之試驗用單面貼銅層合板。 Then, it was cut so as to have a length of 250 mm along the rolling direction of the copper foil and a rectangular shape having a width of 40 mm in the direction perpendicular to the rolling direction, thereby obtaining a resin layer (polyimine) having a thickness of 12 μm and A single-sided copper-clad laminate for testing of Example 2 of a copper foil layer having a thickness of 12 μm.

就經於上述中所得試驗用單面貼銅層合板內的銅箔(銅箔層),按與實施例1同樣方式實施裂斷延性及組織解析。又,於試驗用單面貼銅層合板的銅箔層側被覆既定的遮罩,使用氯化鐵/氯化銅系溶液以實施蝕刻,以形成與實施例1同樣的佈線圖型。然後,按能兼作後述之耐屈撓試驗用的試樣之方式,準照JIS 6471,製得沿著電路基板之佈線方向H而往長距方向具有150mm、往與佈線方向H正交之方向具有寬幅40mm之試驗用可撓性電路基板。在此,確認在藉由蝕刻之電路形成的前後,銅箔的組織上並無變化之事實。 The copper foil (copper foil layer) in the single-sided copper-clad laminate for the test obtained above was subjected to crack ductility and texture analysis in the same manner as in Example 1. In addition, a predetermined mask was coated on the side of the copper foil layer of the test single-sided copper-clad laminate, and etching was performed using a ferric chloride/copper chloride-based solution to form the same wiring pattern as in the first embodiment. Then, in the direction of the wiring direction H of the circuit board, it is 150 mm in the long-distance direction and orthogonal to the wiring direction H, in accordance with JIS 6471, which can also serve as a sample for the flexural test described later. A test flexible circuit board having a width of 40 mm. Here, the fact that the structure of the copper foil did not change before and after the formation by the circuit for etching was confirmed.

接著,就具有上述樹脂層1與佈線(銅箔)2之試驗用可撓性電路基板,如第4圖(b)中所示,於各個佈線圖型側的面上,採用環氧系黏接劑以層合覆蓋材料7(有澤製作所製CVK-0515KA:厚度12.5μm)。由黏接劑所成 之黏接層6之厚度,係在無銅箔電路之部分為15μm,存在有銅箔電路之部分則為6μm。並且,按沿著佈線方向(H方向)而往長距方向成為15cm,往與佈線方向正交之方向成為寬幅8mm之方式切裁,製得作為IPC試驗試樣用之試驗用可撓性電路基板。 Next, as for the test flexible circuit board having the resin layer 1 and the wiring (copper foil) 2, as shown in FIG. 4(b), epoxy-based adhesive was used on the surface of each wiring pattern side. The adhesive was laminated to cover material 7 (CVK-0515KA manufactured by Ozawa Seisakusho Co., Ltd.: thickness: 12.5 μm). Made of adhesive The thickness of the adhesive layer 6 is 15 μm in the portion of the copper-free foil circuit and 6 μm in the portion where the copper foil circuit is present. Further, it was cut to 15 mm in the long-distance direction along the wiring direction (H direction), and cut to a width of 8 mm in the direction orthogonal to the wiring direction, thereby obtaining test flexibility for use as an IPC test sample. Circuit board.

IPC試驗,如第4圖中之模式圖所示,係經模擬作為行動電話等所使用之屈撓形態之一種之導板屈撓(slide flex)之試驗。IPC試驗,如第4圖所示,係按所決定之間隙長度(gap length)8設置屈撓部,以固定部9固定單側,使相對側的導板活動部(slide moving part)10依圖之方式進行重複來回運動之試驗。因而,在按照使其來回運動之部分的行程(stroke)量之區域中,基板將收受重複之屈撓(flex)。本實施例中,則實施將樹脂層(聚醯亞胺)1作成外側,將間隙長度(gap length)作成1mm,亦即將屈撓半徑作成0.5mm,將行程作成38mm以進行重複滑動以實施試驗。試驗中,進行試驗用可撓性電路基板的電路的電阻之測定,並監視因電阻之增加所引起之銅箔電路的疲勞裂縫(fatigue crack)的進展之程度。本實施例中,將電路的電阻到達初期值的2倍之行程次數作為電路裂斷壽命(circuit breaking life)。於此試驗條件中,由於屈撓部中所形成之稜線將試驗用可撓性電路基板的佈線2之佈線方向正交之方式收受屈撓之故,於銅箔電路所施加之主應力、主變形,則成為往軋製方向平行之拉張應力、拉張變形。 The IPC test, as shown in the pattern diagram in Fig. 4, is a test for simulating a slide flex as a kind of flexing form used for a mobile phone or the like. In the IPC test, as shown in Fig. 4, the flexing portion is set according to the determined gap length 8, and the one side is fixed by the fixing portion 9, so that the slide moving part 10 on the opposite side is placed. The method of the figure is repeated to test the back and forth movement. Thus, in the region of the stroke amount of the portion that moves it back and forth, the substrate will receive repeated flexing. In the present embodiment, the resin layer (polyimine) 1 was formed as the outer side, the gap length was made 1 mm, that is, the flexural radius was made 0.5 mm, and the stroke was made 38 mm to perform repeated sliding to carry out the test. . In the test, the electrical resistance of the circuit of the test flexible circuit board was measured, and the degree of progress of the fatigue crack of the copper foil circuit due to the increase in resistance was monitored. In the present embodiment, the number of strokes in which the resistance of the circuit reaches twice the initial value is taken as the circuit breaking life. In this test condition, the ridge line formed in the flexure portion is subjected to flexing so that the wiring direction of the wiring 2 of the test flexible circuit board is orthogonal to each other, and the principal stress applied to the copper foil circuit is mainly When the deformation is performed, the tensile stress and the tensile deformation are parallel to the rolling direction.

就電路裂斷壽命後的銅箔,使用掃瞄式電子顯微鏡(scanning electron microscope)以觀察經與往滑動方向正交之方式將銅箔往厚度方向切裁之剖面時,觀察到雖然有程度差,惟在樹脂層側及覆蓋材料側的各個銅箔表面發生有裂縫,特別是在相當於屈撓部外側之樹脂層側的銅箔表面導入有多數個裂縫之情形。 In the case of the copper foil after the cracking life of the circuit, a scanning electron microscope was used to observe the cross section of the copper foil cut in the thickness direction so as to be orthogonal to the sliding direction, and it was observed that although there was a degree of difference However, cracks occur on the surface of each of the copper foils on the side of the resin layer and the side of the covering material, and in particular, a large number of cracks are introduced into the surface of the copper foil on the side of the resin layer on the outer side of the flexing portion.

就由上述之試驗所得銅箔中的Mn、Ti、Al量、銅箔的裂斷延性、<100>擇優定向面積率、以及屈撓壽命(flex life),將其結果表示於表2中。 The results of the Mn, Ti, and Al in the copper foil obtained by the above test, the fracture ductility of the copper foil, the <100> preferred orientation area ratio, and the flex life were shown in Table 2.

從表2可知,於IPC試驗中,疲勞壽命之所以能超過30000次般的高的耐屈撓特性之原因在於Mn濃度為0.001質量%以上之同時,Ti濃度為0.005質量%以上0.2質量%以下、或者,Al濃度為0.005質量%以上2質量%以下,且<100>擇優定向區域的面積率為60%以上之時之故之事實。在Ti濃度、或者Al濃度分別為0.2質量%、2質量%以上之濃度時,即使經過500℃下、1小時的再結晶熱處理,仍然未能獲得具有極高的積體度之立方體聚焦組織。此種試料之耐屈撓特性較低。當觀察IPC試驗終了後之Al濃度為2.1質量%之屬於試料號碼31的試料的組織時,發現存在有由Cu與Al所構成之金屬間化合物(intermetallic compound),並從此近旁發生有裂縫。疲勞壽命之所以降低之原因,在於依通常之溶劑則不能作成單相,以致在較銅為硬的金屬間化合物周圍形成有金屬間化合物之故。 As can be seen from Table 2, the reason why the fatigue life can exceed 30,000 times in the IPC test is that the Mn concentration is 0.001% by mass or more, and the Ti concentration is 0.005% by mass or more and 0.2% by mass or less. Or the fact that the Al concentration is 0.005 mass% or more and 2 mass% or less, and the area ratio of the <100> preferred orientation region is 60% or more. When the Ti concentration or the Al concentration is 0.2% by mass or more and 2% by mass or more, even after the recrystallization heat treatment at 500 ° C for 1 hour, a cubic focusing structure having an extremely high degree of bulk is not obtained. The sample has low flex resistance. When the structure of the sample belonging to sample No. 31 having an Al concentration of 2.1% by mass after the end of the IPC test was observed, it was found that an intermetallic compound composed of Cu and Al was present, and cracks occurred in the vicinity. The reason why the fatigue life is lowered is that a solvent cannot be formed into a single phase according to a usual solvent, so that an intermetallic compound is formed around an intermetallic compound which is harder than copper.

除Mn之外,再添加規定量之Ti、或Al之結果,裂斷延性即增大。特別是比較單獨添加Mn之情形,以低的Mn濃度即獲得大的效果。又,除Mn外,再添加Ti及Al雙方之情形,於IPC屈撓試驗中,疲勞壽命大為改善。 In addition to Mn, the addition of a predetermined amount of Ti or Al results in an increase in the fracture ductility. In particular, in the case where Mn is added separately, a large effect is obtained with a low Mn concentration. Further, in addition to Mn, when both Ti and Al were added, the fatigue life was greatly improved in the IPC flexural test.

〔實施例3〕 [Example 3]

本實施例中所使用之銅箔,係按如下方式所製造者。為原料,則使用板厚15mm、純度99.99%以上而氧含量0.0008%的無氧銅。將此原料銅、及按能成為既定濃度之 方式所秤量之各合金元素,在石墨坩堝中於氬氣氛氛中加以熔解並攪拌後,流延於寬幅50mm、長度100mm、厚度15mm的長方體的石墨鑄模中以製作錠塊。合金元素之中,釔(Y)、鈣(Ca)、以及鐿(Yb)的純度為99.9%以上。又,作為合金元素,亦使用鈰鑭稀土合金(Misch metal)。鈰鑭稀土合金的主要成分,係La(鑭)為25質量%、Ce(鈰)為53質量%、Pr(鐠)為6質量%、Nd(釹)為15質量%,而合計此等元素之純度為99質量%、餘部為含有其他稀土類金屬等之其他不可避免不純物。 The copper foil used in the present embodiment was produced as follows. As the raw material, oxygen-free copper having a thickness of 15 mm, a purity of 99.99% or more and an oxygen content of 0.0008% was used. The raw material copper and the energy can be set to a predetermined concentration Each of the alloying elements weighed in the manner was melted and stirred in a graphite crucible in an argon atmosphere, and then cast in a rectangular parallelepiped graphite mold having a width of 50 mm, a length of 100 mm, and a thickness of 15 mm to prepare an ingot. Among the alloy elements, the purity of yttrium (Y), calcium (Ca), and yttrium (Yb) is 99.9% or more. Further, as the alloying element, a cerium rare earth alloy (Misch metal) is also used. The main component of the lanthanum rare earth alloy is such that La (镧) is 25% by mass, Ce (铈) is 53% by mass, Pr (鐠) is 6% by mass, and Nd (钕) is 15% by mass, and these elements are aggregated. The purity is 99% by mass, and the remainder is other unavoidable impurities containing other rare earth metals.

所鑄造之錠塊,則往寬幅方向按能成為厚度10mm之方式實施拉幅軋製,在最高600℃下實施熱軋製,再往長度方向按能成為厚度1.5mm之方式止依同樣條件實施熱軋製。未添加合金元素之試料。則將經將原料銅板原封不動地切裁為與鑄造錠塊同樣大小者依同樣條件加以熱軋製。然後,將此等熱軋製板按能成為厚度9μm止,實施冷軋製。在其當中,於厚度0.5mm處利用長條加工以切斷兩端,將寬幅加以整齊為60mm。因而,所得銅箔為寬幅60mm、厚度9μm者。又,在不添加合金元素之下進行熔解、鑄造,以製作依同樣製造過程所製作之比較材料。將所得銅箔的兩端、及中央部的合金元素濃度加以化學分析之結果,確認殆無因處所所引起之濃度偏差之事實。將本實施例中所用之銅箔(試料號碼39至70)的合金濃度綜合表示於表3中。在表3中,銅的含量,係從所分析之合金元素及源自原料之不純物量,按下述方式所求得之計算值,係在 理論範圍者。 The ingot to be cast is subjected to tenter rolling in a wide direction so as to have a thickness of 10 mm, and hot rolling is performed at a maximum of 600 ° C, and the same condition can be obtained by a thickness of 1.5 mm in the longitudinal direction. Hot rolling is carried out. A sample in which no alloying elements were added. Then, the raw material copper plate is cut to the same size as the cast ingot as it is, and hot rolled under the same conditions. Then, these hot rolled sheets were pressed to a thickness of 9 μm, and cold rolling was performed. Among them, the strip was cut at a thickness of 0.5 mm to cut both ends, and the width was aligned to 60 mm. Therefore, the obtained copper foil was a width of 60 mm and a thickness of 9 μm. Further, melting and casting were carried out without adding an alloying element to prepare a comparative material produced in the same manufacturing process. The chemical analysis of the alloy element concentrations at both ends and the center portion of the obtained copper foil confirmed the fact that the concentration deviation caused by the defect was not observed. The alloy concentrations of the copper foils (sample numbers 39 to 70) used in the examples are collectively shown in Table 3. In Table 3, the content of copper is calculated from the alloy element analyzed and the amount of impurities derived from the raw material, as calculated in the following manner. The scope of the theory.

亦即,表3中所示銅含量之下限值,係從「(原料純度的最小值)-(合金元素含量)-(源自合金元素之不純物)」所求得者。例如在試料號碼41之情形為「99.99-0.0042-0.0042×1/999=99.9858(%)」,而在試料號碼61之情形為「99.99-(0.0026+0.0012+0.0002+0.005)-(0.0026+0.0012+0.0002+0.005)×1/99=99.9854」。另一方面,上限值係從「100-(合金元素含量)」所求得者。當計算此種上限值時,源自合金元素的不純物係作為在合金化過程中所精練之氣體成分處理,而不包含在計算式中。例如在試料號碼41之情形,為「100-0.0042=99.9958(%)」。但,如試料號碼39、40般在不添加合金元素之銅箔之情形,則作成減去氧含量之方式。又,如出現小數點第5位以下之數值之情形,下限值則捨去小數點第5位以下之方式所算出者。 That is, the lower limit of the copper content shown in Table 3 is obtained from "(minimum value of raw material purity) - (alloy element content) - (impurity derived from alloying elements)". For example, in the case of sample number 41, it is "99.99-0.0042-0.0042 x 1999=99.9858 (%)", and in the case of sample number 61, it is "99.99-(0.0026+0.0012+0.0002+0.005)-(0.0026+0.0012) +0.0002+0.005)×1/99=99.9854”. On the other hand, the upper limit is obtained from "100-(alloy element content)". When such an upper limit value is calculated, an impurity derived from an alloying element is treated as a gas component refined in the alloying process, and is not included in the calculation formula. For example, in the case of sample number 41, it is "100-0.0042 = 99.9958 (%)". However, in the case where the copper foil of the alloying element is not added as in the sample numbers 39 and 40, the oxygen content is reduced. Further, if the numerical value of the fifth or lower decimal point occurs, the lower limit value is calculated by subtracting the fifth or lower decimal point.

又,構成本實施例之試驗用可撓性電路基板的樹脂層之屬於聚醯亞胺的先質之聚醯胺酸溶液,係依照實施例1中所記載之2種合成例而製得。 Moreover, the polyamic acid solution which is a precursor of the polyimide of the resin layer of the test flexible circuit board of this Example was obtained by the two synthesis examples described in Example 1.

其次,將屬於銅箔與聚醯亞胺的複合體之貼銅層合板的形成方法加以說明。 Next, a method of forming a copper-clad laminate which is a composite of copper foil and polyimine will be described.

在上述中所準備之銅箔的單側表面塗佈於合成例1中所得聚醯胺酸溶液a並使其乾燥(硬化後即形成膜厚2μm的熱塑性聚醯亞胺),在其上塗佈於合成例2中所得聚醯胺酸b並使其乾燥(硬化後則形成膜厚9μm的低熱膨脹性 聚醯亞胺),再在其上塗佈聚醯胺酸a並使其乾燥(硬化後即形成膜厚2μm的熱塑性聚醯亞胺),並經過280℃或350℃的溫度以累積時間計能負荷5分鐘以上般之加熱條件,以形成由3層構造之聚醯亞胺所成樹脂層。在此,將本熱處理溫度,作成聚醯亞胺形成溫度。 The one side surface of the copper foil prepared above was applied to the polyamic acid solution a obtained in Synthesis Example 1 and dried (after curing, a thermoplastic polyimide having a film thickness of 2 μm was formed), and was coated thereon. The polylysine b obtained in Synthesis Example 2 was dried and dried (after hardening, a low thermal expansion of a film thickness of 9 μm was formed). Polyimine), which is coated with polylysine a and dried (hardened to form a thermoplastic polyimide having a film thickness of 2 μm) and passed through a temperature of 280 ° C or 350 ° C in cumulative time. It can be heated under the conditions of 5 minutes or more to form a resin layer made of a polylayer of a three-layer structure. Here, the heat treatment temperature is set to a polyamidene formation temperature.

接著,按沿著銅箔的軋製方向(MD方向)成為長度250mm,對軋製方向正交之方向(TD方向)成為寬幅40mm的長方形尺寸之方式切裁,製得具有厚度13μm的樹脂層(聚醯亞胺)1及厚度9μm的銅箔層2之試驗用單面貼銅層合板(第5圖)。此時的樹脂層全體的抗張彈性係數為7.5GPa。 Then, it was cut into a length of 250 mm along the rolling direction (MD direction) of the copper foil, and the direction orthogonal to the rolling direction (TD direction) was cut into a rectangular shape having a width of 40 mm to obtain a resin having a thickness of 13 μm. A single-sided copper-clad laminate for testing of a layer (polyimine) 1 and a copper foil layer 2 having a thickness of 9 μm (Fig. 5). The tensile modulus of elasticity of the entire resin layer at this time was 7.5 GPa.

就經於上述中所得單面貼銅層合板內的銅箔(銅箔層),按與實施例1同樣方式實施組織解析。又,於上述中所得試驗用單面貼銅層合板的銅箔層側被覆既定的遮罩,使用氯化鐵/氯化銅系溶液以實施蝕刻,以形成與實施例1同樣的佈線圖型。然後,按能兼作耐屈撓試驗用的試樣之方式,準照JIS 6471,製得沿著電路基板之佈線方向H而往長距方向具有150mm,往與佈線方向H正交之方向具有寬幅40mm之試驗用可撓性電路基板。確認在藉由蝕刻之電路形成的前後,銅箔的組織上並無變化之事實。 The structure analysis was carried out in the same manner as in Example 1 on the copper foil (copper foil layer) in the single-sided copper-clad laminate obtained above. Moreover, the copper foil layer side of the test single-sided copper-clad laminate obtained above was covered with a predetermined mask, and etching was performed using a ferric chloride/copper chloride-based solution to form the same wiring pattern as in the first embodiment. . Then, in accordance with JIS 6471, it can be made to have a diameter of 150 mm in the long-distance direction along the wiring direction H of the circuit board, and is wide in the direction orthogonal to the wiring direction H. A 40 mm test flexible circuit board. It was confirmed that there was no change in the structure of the copper foil before and after the formation by the etching circuit.

採用經於上述中所得試驗用可撓性電路基板,按與實施例1同樣方式準照JIS C5016以實施MIT屈撓試驗。於此試驗條件中,由於屈撓部所形成之稜線將對試驗用可撓性電路基板的佈線的佈線方向H正交之方式收受屈撓之故 ,於銅箔電路所施加之主應力、主變形,則成為往軋製方向平行之拉張應力、拉張變形。在屈撓試驗後從銅箔的厚度方向觀察電路時,經確認在屈撓部的稜線附近按對軋製方向殆成為垂直方式發生有裂紋,並已斷線之事實。 The MIT flexural test was carried out in the same manner as in Example 1 using the flexible circuit board for the test obtained above. In this test condition, the ridge line formed by the flexure portion is subjected to flexion in a manner orthogonal to the wiring direction H of the wiring of the test flexible circuit substrate. The principal stress and the main deformation applied to the copper foil circuit are tensile stress and tensile deformation parallel to the rolling direction. When the circuit was observed from the thickness direction of the copper foil after the flexural test, it was confirmed that cracks occurred in the vicinity of the ridge line of the flexing portion in a direction perpendicular to the rolling direction, and the wire was broken.

將由上述之試驗所得銅箔中的合金元素量、<100>擇優定向面積率、以及屈撓壽命、與試料號碼及聚醯亞胺形成溫度一起,表示於表3中。屈撓壽命,係按每種銅箔各準備5支之試驗用可撓性電路基板的結果之平均。在成分值中以(-)標記者乃表示化學分析之測定界限值以下之事實。 Table 3 shows the amount of alloying elements in the copper foil obtained by the above test, the <100> preferred orientation area ratio, and the flex life, together with the sample number and the polyimine forming temperature. The flex life is an average of the results of five test flexible circuit boards prepared for each copper foil. Among the component values, the (-) mark indicates the fact that the chemical analysis is below the measurement limit value.

由表3中所示結果可知,比較未經添加任何合金元素所製作之銅箔,當將選自Ca、La、Ce、Pr、Nd、Yb以及Y所成群之至少1種以上按0.005質量%以上0.4質量%以下的量含有之結果,並以同樣熱處理溫度比較時,發現<100>擇優定向區域的面積率增大之事實,而提升有疲勞壽命。由於除Ca或Y之外,在鑭系(lanthanoid)屬之中金屬半徑(metal radius)大的La及最小的Yb亦有見效之故,可判斷為在化學特性類似,且具有中間的金屬半徑之Sm(釤)、Eu(銪)、Gd(釓)、Dy(鏑)、Ho(鈥)、Er(鉺)、以及Tm(銩)亦有同樣效果。 From the results shown in Table 3, it is understood that the copper foil produced by adding no alloying elements is at least one of a group selected from the group consisting of Ca, La, Ce, Pr, Nd, Yb, and Y, and is 0.005 mass. When the amount of % or more of 0.4% by mass or less is contained and compared with the same heat treatment temperature, it is found that the area ratio of the <100> preferred orientation region is increased, and the fatigue life is improved. In addition to Ca or Y, La having a large metal radius and a minimum Yb in the lanthanoid genus are also effective, and can be judged to have similar chemical characteristics and have an intermediate metal radius. Sm (钐), Eu (铕), Gd (釓), Dy (镝), Ho (鈥), Er (铒), and Tm (銩) have the same effect.

又,獲知銅箔的<100>擇優定向區域的面積率,係因形成試驗用單面貼銅層合板之溫度,亦即於本實施例中因聚醯亞胺形成溫度而會大幅度不相同,惟在280℃下,5分鐘的熱歷程中,在上述之合金成分的範圍內,<100>擇優定向區域的面積率獲得有60%以上,而較未經添加合金元素所製作之銅箔為<100>擇優定向區域的面積率、疲勞壽命均優異之事實。再者,於試料號碼52至54中添加有Ca 0.4質量%之情形(如試料號碼54)下,<100>擇優定向區域的面積率之所以降低之原因,可能是因合金元素的添加而增高再結晶溫度以致<100>再結晶聚集組織之形成受妨礙所致。 Moreover, it is known that the area ratio of the <100> preferred orientation region of the copper foil is largely different due to the temperature at which the single-sided copper-clad laminate for the test is formed, that is, the temperature at which the polyimide is formed in the present embodiment. However, at 280 ° C, in the thermal history of 5 minutes, within the range of the above-mentioned alloy composition, the area ratio of the <100> preferred orientation region is more than 60%, and the copper foil is produced without adding the alloying element. The fact that the area ratio and fatigue life of the preferred orientation area are excellent for <100>. Further, in the case where 0.4% by mass of Ca is added to the sample numbers 52 to 54, (for example, sample number 54), the reason why the area ratio of the <100> preferred orientation region is lowered may be increased by the addition of alloying elements. The recrystallization temperature is such that the formation of the <100> recrystallized aggregated structure is hindered.

〔實施例4〕 [Example 4]

於本實施例中,使用鈰鑭稀土合金、Ti、以及Al而 製作以此等作為合金元素之銅箔,並從經使用該銅箔所得之試驗用單面貼銅層合板實施銅箔組織之解析之同時,從試驗用單面貼銅層合板製作試驗用可撓性電路基板,以測定屈撓疲勞特性。在此,本實施例中所用之鈰鑭稀土合金的主要成分,係La為25質量%、Ce為54質量%、Pr為6質量%、Nd為14質量%,而此等之總和的純度為99質量%。此外之成分,係包含其他稀土類金屬之其他的不可避免之不純物。 In this embodiment, a rare earth alloy, Ti, and Al are used. A copper foil having such an alloy element was produced, and the copper foil structure was analyzed from the test single-sided copper-clad laminate obtained by using the copper foil, and the test was performed from the test single-sided copper-clad laminate. A flexible circuit board to measure flex fatigue characteristics. Here, the main components of the lanthanum rare earth alloy used in the present embodiment are La of 25% by mass, Ce of 54% by mass, Pr of 6% by mass, and Nd of 14% by mass, and the sum of these is 99% by mass. In addition, the constituents are other inevitable impurities containing other rare earth metals.

於本實施例中所使用之銅箔,係按如下方式所製造者。將本身為厚度15mm、純度99.9%以上而氧含量0.015質量%、硫含量0.03質量%、以及銀含量0.02質量%之電解銅板(electrolytic copper plate)、及經秤量為既定量之純度99.9%以上之Ti及Al合金元素、以及具有上述構成元素及其純度之鈰鑭稀土合金,按能成為既定濃度之方式加以秤量後,在石墨坩堝中於氬氣氣氛下加以熔解並攪拌後,流延於寬幅50mm、長度100mm、厚度15mm的長方體的石墨鑄模中以製作錠塊。 The copper foil used in the present embodiment was produced as follows. An electrolytic copper plate having a thickness of 15 mm, a purity of 99.9% or more, an oxygen content of 0.015 mass%, a sulfur content of 0.03 mass%, and a silver content of 0.02 mass%, and a purity of 99.9% or more. Ti and an Al alloy element, and a rare earth alloy having the above-mentioned constituent elements and their purity are weighed so as to have a predetermined concentration, and then melted and stirred in a graphite crucible in an argon atmosphere, and then cast in a width. An ingot was produced in a rectangular parallelepiped graphite mold having a width of 50 mm, a length of 100 mm, and a thickness of 15 mm.

經鑄造之錠塊,係往寬幅方向按能成為厚度10mm之方式實施拉幅軋製,在最高600℃下實施熱軋製,再往長度方向按能成為1mm厚度止之方式依同樣條件實施熱軋製。然後,實施冷軋製至厚度12μm止。在其當中,於厚度0.5mm處利用長條加工以切斷兩端,將寬幅加以整齊為60mm。因而,所得銅箔為寬幅60mm、厚度12μm者。又,在不添加合金元素之下進行熔解、鑄造,以製作依同樣 製造過程所製作之比較材料。再者,就所得銅箔,將合金成分之濃度加以化學分析之結果,確認殆無因處所所引起之濃度偏差之事實。將本實施例中所用之銅箔(試料號碼71至84)的合金濃度綜合表示於表4中。在表4中,銅的含量,如在實施例3中所說明般,係從所分析之合金元素及原料之不純物量所求得之計算值,係在理論範圍者。 The cast ingot is subjected to tenter rolling in a width direction of 10 mm, and is subjected to hot rolling at a maximum temperature of 600 ° C, and then subjected to the same conditions in a length direction of 1 mm. Hot rolling. Then, cold rolling was performed to a thickness of 12 μm. Among them, the strip was cut at a thickness of 0.5 mm to cut both ends, and the width was aligned to 60 mm. Therefore, the obtained copper foil was a width of 60 mm and a thickness of 12 μm. In addition, it is melted and cast without adding an alloying element, and the same is produced. Comparative materials made during the manufacturing process. Further, as a result of chemical analysis of the concentration of the alloy component in the obtained copper foil, it was confirmed that the concentration deviation caused by the defect was not observed. The alloy concentrations of the copper foils (sample numbers 71 to 84) used in the present examples are collectively shown in Table 4. In Table 4, the content of copper, as explained in Example 3, is calculated from the amount of impurities of the alloy element and the raw material analyzed, and is in the theoretical range.

此中,銅含量的上限值,係作成除此以外的不純物為氣體成分等,在合金化之過程中,因與氣體或稀土類元素的反應,而全部排出於系統外之情形所算出者。 In this case, the upper limit of the copper content is calculated by the fact that the impurity other than the impurity is a gas component, and is completely discharged outside the system due to the reaction with the gas or the rare earth element during the alloying process. .

另一方面,下限值係作成原料中的不純物全部殘留於合金內所算出者。亦即,從原料銅的純度之下限值,減去除銀以外之合金元素含量,再者,稀土類元素中的La、Ce、Pr、Nd以外之1%為表4中所示之元素以外者,而作成此等係全部殘留者,又同樣方式作成Al及Ti的不純物分0.1%係殘留者加以減去。在此,銀並非係作為合金元素所添加者,而主要係原料銅中作為不純物所混入者,對所扣除之值所加算者。例如,試料號碼72之下限值,將成為「99.9-(0.053+0.024+0.0061+0.014+0.0042)-1/99×(0.053+0.024+0.0061+0.014)-1/999×0.0042+0.018=99.8147」。 On the other hand, the lower limit is calculated as the amount of impurities in the raw material remaining in the alloy. In other words, the alloy element content other than silver is removed from the lower limit of the purity of the raw material copper, and 1% other than La, Ce, Pr, and Nd in the rare earth element are other than the elements shown in Table 4. Those who have made all of these residues, and subtracted 0.1% of the impurities of Al and Ti in the same manner. Here, silver is not added as an alloying element, but is mainly a mixture of raw material copper as an impurity, and is added to the deducted value. For example, the lower limit of sample number 72 will be "99.9-(0.053+0.024+0.0061+0.014+0.0042)-1/99×(0.053+0.024+0.0061+0.014)-1/999×0.0042+0.018=99.8147 "."

接著,塗佈經依與實施例1之合成例1同樣方法製備之聚醯胺酸溶液a並使其乾燥(硬化後即形成膜厚2μm的熱塑性聚醯亞胺),並於其上塗佈經依與實施例1之合成例2同樣方法製備之聚醯胺酸b並使其乾燥(硬化後即形 成膜厚8μm的低熱膨脹性聚醯亞胺),再於其上塗佈聚醯胺酸a並使其乾燥(硬化後即形成膜厚2μm的熱塑性聚醯亞胺),經過最高溫度320℃的溫度能以累積時間計施加10分間般之加熱條件後形成聚醯亞胺層(樹脂層)。 Next, the polyamic acid solution a prepared in the same manner as in Synthesis Example 1 of Example 1 was applied and dried (after hardening, a thermoplastic polyimide having a film thickness of 2 μm was formed), and coated thereon. Polylysine b prepared in the same manner as in Synthesis Example 2 of Example 1 and dried (hardened) Filming a low thermal expansion polyimine with a thickness of 8 μm, and then coating the polyamid acid a thereon and drying it (after curing, a thermoplastic polyimide having a film thickness of 2 μm is formed), and the maximum temperature is 320 ° C. The temperature of the polyimine layer (resin layer) can be formed by applying a heating condition of 10 minutes in an accumulated time.

接著,按沿著銅箔的軋製方向(MD方向)成為長度250mm,對軋製方向正交之方向(TD方向)成為寬幅40mm的長方形尺寸之方式切裁,製得具有厚度12μm的聚醯亞胺層(樹脂層)1及厚度12μm的銅箔層2之有關實施例2之試驗用單面貼銅層合板(第5圖)。此時的樹脂層全體的抗張彈性係數為7.5GPa。 Then, it was cut into a length of 250 mm in the rolling direction (MD direction) along the copper foil, and cut into a rectangular shape having a width of 40 mm in a direction orthogonal to the rolling direction (TD direction) to obtain a polymer having a thickness of 12 μm. A single-sided copper-clad laminate for testing according to Example 2 of the yttrium imide layer (resin layer) 1 and the copper foil layer 2 having a thickness of 12 μm (Fig. 5). The tensile modulus of elasticity of the entire resin layer at this time was 7.5 GPa.

就經於上述中所得單面貼銅層合板內的銅箔(銅箔層),按與實施例1同樣方式實施組織解析。又,在試驗用單面貼銅層合板的銅箔層側被覆既定的遮罩,使用氯化鐵/氯化銅系溶液以實施蝕刻,以形成與實施例1同樣之佈線圖型。然後,按能兼作後述之耐屈撓試驗用的試樣之方式,準照JIS 6471,製得沿著電路基板之佈線方向H而往長距方向具有150mm、往與佈線方向H正交之方向具有寬幅40mm之試驗用可撓性電路基板。在此,確認在藉由蝕刻之電路形成的前後,銅箔的組織上並無變化之事實。 The structure analysis was carried out in the same manner as in Example 1 on the copper foil (copper foil layer) in the single-sided copper-clad laminate obtained above. Moreover, a predetermined mask was coated on the side of the copper foil layer of the test single-sided copper-clad laminate, and etching was performed using a ferric chloride/copper chloride-based solution to form a wiring pattern similar to that of the first embodiment. Then, in the direction of the wiring direction H of the circuit board, it is 150 mm in the long-distance direction and orthogonal to the wiring direction H, in accordance with JIS 6471, which can also serve as a sample for the flexural test described later. A test flexible circuit board having a width of 40 mm. Here, the fact that the structure of the copper foil did not change before and after the formation by the circuit for etching was confirmed.

接著,就具有上述樹脂層1與佈線(銅箔)2之試驗用可撓性電路基板,如第4圖(b)中所示,於各個佈線圖型側的面上,採用環氧系黏接劑以層合覆蓋材料7(有澤製作所製CVK-0515KA:厚度12.5μm)。由黏接劑所成之黏接層6之厚度,係在無銅箔電路之部分為15μm,存 在有銅箔電路之部分則為6μm。並且,按沿著佈線方向(H方向)而往長距方向成為15cm、往與佈線方向正交之方向成為寬幅8mm之方式切裁,製得作為IPC試驗試樣用之試驗用可撓性電路基板。然後,按與實施例2同樣方式實施IPC試驗,將電路的電阻到達初期值之2倍之行程次數作為電路裂斷壽命求得。再者,就電路裂斷壽命後的銅箔,使用掃瞄式電子顯微鏡以觀察經與往滑動方向正交之方式將銅箔往厚度方向切裁之剖面時,與實施例2同樣,觀察到雖然有程度差,惟在樹脂層側及覆蓋材料側的各個銅箔表面發生裂縫,特別是在相當於屈撓部外側之樹脂層側的銅箔表面導入有多數裂縫之情形。 Next, as for the test flexible circuit board having the resin layer 1 and the wiring (copper foil) 2, as shown in FIG. 4(b), epoxy-based adhesive was used on the surface of each wiring pattern side. The adhesive was laminated to cover material 7 (CVK-0515KA manufactured by Ozawa Seisakusho Co., Ltd.: thickness: 12.5 μm). The thickness of the adhesive layer 6 formed by the adhesive is 15 μm in the portion of the copper-free foil circuit. In the part with the copper foil circuit, it is 6 μm. Further, it was cut to 15 mm in the long-distance direction along the wiring direction (H direction), and was cut to a width of 8 mm in the direction orthogonal to the wiring direction, thereby obtaining test flexibility for use as an IPC test sample. Circuit board. Then, the IPC test was carried out in the same manner as in Example 2, and the number of strokes in which the resistance of the circuit reached twice the initial value was obtained as the circuit breaking life. In the same manner as in the second embodiment, the copper foil after the circuit breaking life was observed by using a scanning electron microscope to observe the cross section of the copper foil in the thickness direction so as to be orthogonal to the sliding direction. Although there is a degree of difference, cracks occur on the surface of each of the copper foils on the side of the resin layer and the side of the covering material, and in particular, a large number of cracks are introduced into the surface of the copper foil on the side of the resin layer on the outer side of the flexing portion.

將由上述之試驗所得銅箔中的合金成分值、<100>擇優定向面積率、以及屈撓壽命、與試料號碼及聚醯亞胺形成溫度一起,表示於表4中。成分值中以(-)標記者乃表示化學分析之測定界限值以下之事實。由於本實施例中所使用之原料銅,係純度比較低之故,銅箔中,除所添加之合金元素以外,尚檢測到較多量之Ag。又,除此以外之不可避免的不純物而言,檢測到氧及硫。 Table 4 shows the alloy component values, the <100> preferred orientation area ratio, and the flex life, which are obtained from the copper foil obtained by the above test, together with the sample number and the polyimide temperature. Among the component values, the (-) mark indicates the fact that the chemical analysis is below the measurement limit value. Since the raw material copper used in the present embodiment has a relatively low purity, a large amount of Ag is detected in the copper foil in addition to the alloying elements added. Further, oxygen and sulfur were detected in addition to the unavoidable impurities.

由表4中所示結果可知,比較全然未經添加任何合金元素之情形,因鈰鑭稀土合金或合金元素之添加之結果,發現銅箔的<100>擇優定向區域的面積率、及經依IPC試驗所測定之疲勞壽命增高之事實。又,如以Ce、La、Pr、Nd的合金濃度為殆相同的試料比較時,發現當添加Al、Ti、或其雙方時,則隨著在本發明所規定之範圍內增加濃度時,則增高有<100>擇優定向區域的面積率、及經依IPC試驗所測定之疲勞壽命之情形。惟經添加Al 0.41質量%之試料號碼76的試料、及經添加Ti 0.21質量%之試料號碼81的試料,則反而降低疲勞壽命。可能是因過剩的合金元素之添加,而增高再結晶溫度以致<100>再結晶聚集組織之形成受妨害所致。 It can be seen from the results shown in Table 4 that, compared with the case where no alloying elements are added at all, the area ratio of the <100> preferred orientation region of the copper foil and the dependence of the rare earth alloy or alloying elements are found. The fact that the fatigue life measured by the IPC test is increased. Further, when the alloys having the same alloy concentration of Ce, La, Pr, and Nd are the same, it is found that when Al, Ti, or both of them are added, when the concentration is increased within the range specified by the present invention, Increase the area ratio of the <100> preferred orientation area and the fatigue life measured by the IPC test. However, the sample to which the sample No. 76 of 0.41% by mass of Al and the sample No. 81 to which Ti is added in an amount of 0.21% by mass were used to reduce the fatigue life. It may be due to the addition of excess alloying elements, which increases the recrystallization temperature so that the formation of <100> recrystallized aggregated structure is impaired.

〔實施例5〕 [Example 5]

於本實施例中,作為合金元素而使用Ce、La、Y、Sm、Ca以及Al以製作此等的銅合金箔,並從經使用其合金箔所得試驗用單面貼銅層合板實施銅箔組織之解析之同時,從試驗用單面貼銅層合板製作試驗用可撓性電路基板,以測定屈撓疲勞特性。在此,於本實施例中所用之合金元素的純度均為99.9%以上者,各具有2至3mm的粒狀的形狀者。 In the present embodiment, Ce, La, Y, Sm, Ca, and Al were used as alloying elements to prepare such copper alloy foils, and copper foil was used for the test single-sided copper-clad laminate obtained by using the alloy foil. At the same time as the analysis of the structure, a flexible circuit board for testing was fabricated from a single-sided copper-clad laminate for testing to measure the flexural fatigue characteristics. Here, the purity of the alloying elements used in the present embodiment is 99.9% or more, and each has a granular shape of 2 to 3 mm.

於本實施例中所使用之銅箔,係按如下方式所製造者。原料銅,係直徑5mm、長度約20mm的韌銅,純度為99.96%、氧含量為0.029質量%。又,合金元素在熔解前 所飼入之進料組成(秤量組成)係固定作成0.01%。亦即,於下述表5中所示之試料號碼89的試料,係原料銅為99.8%、Ce為0.1%、Al為0.1%。 The copper foil used in the present embodiment was produced as follows. The raw material copper is a tough pitch copper having a diameter of 5 mm and a length of about 20 mm, and has a purity of 99.96% and an oxygen content of 0.029% by mass. Again, the alloying elements are before melting The feed composition (quantity composition) fed was fixed at 0.01%. That is, the sample No. 89 shown in Table 5 below was 99.8% of raw material copper, 0.1% of Ce, and 0.1% of Al.

原料銅及合金元素之熔解、鑄造,係按下述之2種方法製造者。 The melting and casting of raw material copper and alloying elements are carried out by the following two methods.

第一種,係將預先經將原料銅軋製所得銅箔中包捆之合金元素置入坩堝,首先在真空爐內抽真空後,導入99.99%的氬氣,在經控制為1氣壓下之氬氣氣氛中,熔解為1200℃並攪拌後,在其爐內流延於寬幅50mm、長度100mm、厚度15mm的長方體的石墨鑄模中以製作錠塊。所製作之錠塊,則在經純水中添加20%的鹽酸、0.1%的過氧化氫水之酸洗滌液中進行超音波洗滌,以取除表面之污垢(scale)。 In the first type, the alloying element encapsulated in the copper foil obtained by rolling the raw material copper is placed in the crucible, and after first evacuating in a vacuum furnace, 99.99% of argon gas is introduced, and the pressure is controlled to 1 atmosphere. In an argon atmosphere, after melting at 1200 ° C and stirring, it was cast in a furnace of a rectangular parallelepiped graphite mold having a width of 50 mm, a length of 100 mm, and a thickness of 15 mm to prepare an ingot. The ingot produced was ultrasonically washed in an acid washing solution in which 20% hydrochloric acid and 0.1% hydrogen peroxide water were added to pure water to remove the scale of the surface.

第二種,係將經將原料銅軋製之銅箔中包捆之合金元素置入坩堝內,在箱型爐內導入99.99%的氬氣之下熔解為1200℃後,取出坩堝,在大氣中流延於寬幅50mm、長度100mm、厚度15mm的長方體的石墨鑄模中以製作錠塊。所製作之錠塊,則在經純水中添加20%的鹽酸、0.1%的過氧化氫水之酸洗滌液內進行超音波洗滌,以取除表面之污垢。 In the second type, the alloying element encapsulated in the copper foil rolled by the raw material copper is placed in a crucible, and after being melted into 1200 ° C under the introduction of 99.99% of argon gas in the box furnace, the crucible is taken out and exposed to the atmosphere. The ingot was cast in a rectangular parallelepiped graphite mold having a width of 50 mm, a length of 100 mm, and a thickness of 15 mm. The ingot produced was ultrasonically washed in an acid washing solution containing 20% hydrochloric acid and 0.1% hydrogen peroxide water in pure water to remove dirt on the surface.

爾後的錠塊之加工方法,係不採用如上所述之鑄造時之氣氛,而均作成同樣條件。錠塊,係往寬幅方向按能成為厚度10mm之方式實施拉幅軋製,在最高600℃下實施熱軋製,再往長度方向按能成為1mm厚度止之方式依同 樣條件實施熱軋製。然後,實施冷軋製至厚度12μm止。在其中,於厚度0.5mm處利用長條加工以切斷兩端,將寬幅加以整齊為60mm。因而,所得銅箔為寬幅60mm、厚度12μm者。又,在不添加合金元素之下進行熔解、鑄造,以製作依同樣製造過程所製作之比較材料。再者,就所得銅箔,將合金成分之濃度加以化學分析之結果,確認殆無因處所所引起之濃度偏差之事實。將本實施例中所用之銅箔(試料號碼85至98)之合金濃度,綜合表示於表5中。 The processing method of the ingot afterwards is not the same as the atmosphere at the time of casting as described above, and the same conditions are all made. The ingot is subjected to tenter rolling in a width direction of 10 mm, and is subjected to hot rolling at a maximum of 600 ° C, and then to a length of 1 mm in the longitudinal direction. The conditions were subjected to hot rolling. Then, cold rolling was performed to a thickness of 12 μm. Among them, the strip was cut at a thickness of 0.5 mm to cut both ends, and the width was aligned to 60 mm. Therefore, the obtained copper foil was a width of 60 mm and a thickness of 12 μm. Further, melting and casting were carried out without adding an alloying element to prepare a comparative material produced in the same manufacturing process. Further, as a result of chemical analysis of the concentration of the alloy component in the obtained copper foil, it was confirmed that the concentration deviation caused by the defect was not observed. The alloy concentrations of the copper foils (sample numbers 85 to 98) used in the examples are collectively shown in Table 5.

於表5之中,銅含量,係從所分析之元素及原料的不純物量所求之計算值,且係理論性範圍者。銅含量之上限值,係作為僅由表中的合金元素及氧及銅所構成而加以計算者。因而,例如在試料號碼89之情形,上限值為「100-0.079-0.1-0.0067=99.8143(%)」。另一方面,下限值係將原料銅和原料銅中所含有之氧加以合計之99.989%以外的0.011%及合金元素中的不純物濃度0.01%中所含有之元素係全由合金元素及氧以外之成分所構成,而視為此等會全部被帶進計,從上限值減去之方式所算出者。例如在試料號碼89之情形,下限值為「99.8143-0.998×0.011-0.001×0.1-0.001×0.1=99.8031(%)」。 In Table 5, the copper content is a calculated value from the amount of impurities of the element and the raw material analyzed, and is a theoretical range. The upper limit of the copper content is calculated as being composed only of the alloying elements in the table and oxygen and copper. Therefore, for example, in the case of the sample number 89, the upper limit value is "100-0.079-0.1-0.0067=99.8143 (%)". On the other hand, the lower limit is 0.011% other than the total amount of oxygen contained in the raw material copper and the raw material copper, and the element contained in 0.01% of the impurity concentration in the alloy element is all other than the alloy element and oxygen. It is composed of the components, and is considered to be all that is calculated by subtracting the upper limit value. For example, in the case of the sample number 89, the lower limit value is "99.8143-0.998 × 0.011 - 0.001 × 0.1 - 0.001 × 0.1 = 99.8031 (%)".

合金元素之分析值,係例如由試料號碼89之結果所示,雖然較0.1%為小,惟此乃主要在不純物中所含有之氧或硫、或者在熔解.鑄造時與氣氛中的氧起反應而形成氧化物或硫化物並被排出至錠塊的上部或表層部,結果在酸洗時作為污垢而往系外出來者。鋁亦確認有多少程度的脫氧效果,惟在此次的條件,則可能是稀土類元素為較大者。 The analytical value of the alloying element is, for example, shown by the result of sample number 89, although it is smaller than 0.1%, but it is mainly contained in the impurity or the oxygen or sulfur contained in the impurity. At the time of casting, it reacts with oxygen in the atmosphere to form an oxide or a sulfide, and is discharged to the upper portion or the surface layer portion of the ingot, and as a result, it is released as dirt at the time of pickling. Aluminum also confirms the degree of deoxidation effect, but in this case, the rare earth element may be the larger.

接著,塗佈經依與實施例1的合成例1同樣方法製備之聚醯胺酸溶液a並使其乾燥(硬化後即形成膜厚2μm的熱塑性聚醯亞胺),並於其上塗佈經依與實施例1的合成例2同樣方法製備之聚醯胺酸b並使其乾燥(硬化後即形成膜厚8μm的低熱膨脹性聚醯亞胺),再於其上塗佈聚醯胺酸a並使其乾燥(硬化後即形成膜厚2μm的熱塑性聚醯 亞胺),經過最高溫度360℃的溫度能在累積時間施加10分鐘之方式之加熱條件以形成聚醯亞胺層(樹脂層)。 Next, the polyamic acid solution a prepared in the same manner as in Synthesis Example 1 of Example 1 was applied and dried (after hardening, a thermoplastic polyimide having a film thickness of 2 μm was formed), and coated thereon. The polylysine b prepared in the same manner as in Synthesis Example 2 of Example 1 was dried (after hardening, a low thermal expansion polyimine having a film thickness of 8 μm was formed), and polyamine was coated thereon. Acid a and dry it (hardened to form a thermoplastic polymer with a film thickness of 2 μm) The imine) is heated under the conditions of a maximum temperature of 360 ° C for 10 minutes at a cumulative time to form a polyimide layer (resin layer).

接著,按沿著銅箔的軋製方向(MD方向)成為長度250mm,對軋製方法正交之方向(TD方向)成為寬幅40mm的長方形尺寸之方式切裁,製得具有厚度12μm的聚醯亞胺層(樹脂層)1及厚度12μm的銅箔層2之有關實施例3之試驗用單面貼銅層合板(第5圖)。此時的樹脂層全體的抗張彈性係數為7.5GPa。 Then, it was cut into a length of 250 mm in the rolling direction (MD direction) along the copper foil, and the direction orthogonal to the rolling method (TD direction) was cut into a rectangular shape having a width of 40 mm to obtain a polymer having a thickness of 12 μm. A single-sided copper-clad laminate for testing of the ninth imide layer (resin layer) 1 and the copper foil layer 2 having a thickness of 12 μm according to Example 3 (Fig. 5). The tensile modulus of elasticity of the entire resin layer at this time was 7.5 GPa.

就經於上述中所得單面貼銅層合板內的銅箔(銅箔層),按與實施例1同樣方式實施組織解析。又,於試驗用單面貼銅層合板的銅箔層側被覆既定的遮罩,使用氯化鐵/氯化銅系溶液以實施蝕刻,以形成與實施例1同樣的佈線圖型。然後,按能兼作後述之耐屈撓試驗用的試樣之方式,準照JIS 6471,製得沿著電路基板的佈線方向H而往長距方向具有150mm、往與佈線方向H正交之方向具有寬幅40mm之試驗用可撓性電路基板。在此,確認在藉由蝕刻之電路形成的前後,銅箔的組織上並無變化之事實。 The structure analysis was carried out in the same manner as in Example 1 on the copper foil (copper foil layer) in the single-sided copper-clad laminate obtained above. In addition, a predetermined mask was coated on the side of the copper foil layer of the test single-sided copper-clad laminate, and etching was performed using a ferric chloride/copper chloride-based solution to form the same wiring pattern as in the first embodiment. Then, in the direction of the wiring direction H of the circuit board, it is 150 mm in the long-distance direction and orthogonal to the wiring direction H, in accordance with JIS 6471, which can also serve as a sample for the flexural test described later. A test flexible circuit board having a width of 40 mm. Here, the fact that the structure of the copper foil did not change before and after the formation by the circuit for etching was confirmed.

接著,就具有上述樹脂層1及佈線(銅箔)2之試驗用可撓性電路基板,按與實施例2同樣方式製得為作為IPC試驗試樣之用的試驗用可撓性電路基板。並且,於本實施例中,將聚醯亞胺層(樹脂層)1作成外側,將間隙長度作成1.5mm,亦即將屈撓半徑作成0.75mm,將行程作成38mm以外,其餘則按與實施例2同樣方式實施IPC試驗,將電路的電阻到達初期值的2倍之行程次數作為電 路裂斷壽命求得。再者,就電路裂斷壽命後的銅箔,使用掃瞄式電子顯微鏡以觀察經與往滑動方向正交之方式將銅箔往厚度方向切裁之剖面時,按與實施例2同樣方式,觀察到雖然有程度差,惟在樹脂層側及覆蓋材料側的各個銅箔表面發生有裂縫,特別是在相當於屈撓部外側之樹脂層側的銅箔表面導入有多數個裂縫之情形。 Then, a test flexible circuit board having the resin layer 1 and the wiring (copper foil) 2 was used as a test flexible circuit board as an IPC test sample in the same manner as in the second embodiment. Further, in the present embodiment, the polyimide layer (resin layer) 1 was formed outside, the gap length was made 1.5 mm, that is, the bending radius was made 0.75 mm, and the stroke was made to be 38 mm, and the rest was in accordance with the examples. 2 Implement the IPC test in the same way, and take the number of strokes of the circuit's resistance to twice the initial value as electricity. The road break life is obtained. In the same manner as in the second embodiment, the copper foil after the circuit breaking life is observed by using a scanning electron microscope to observe the cross section of the copper foil in the thickness direction so as to be orthogonal to the sliding direction. Although it was observed that there was a degree of difference, cracks occurred on the surface of each of the copper foils on the side of the resin layer and the side of the covering material, and in particular, a large number of cracks were introduced into the surface of the copper foil on the side of the resin layer on the outer side of the flexing portion.

將由上述之試驗所得銅箔中的合金成分值,<100>擇優定向面積率、以及屈撓壽命,與試料號碼及聚醯亞胺形成溫度一起,表示於表5中。成分值中以(-)標記者乃表示未測定者之意。如試料號碼85之試料中所示般,經在Ar氣流中熔解鑄造者銅箔之氧濃度係較原料銅為低者。此乃因在低氧濃度下熔解.鑄造所致之脫氧效果。又,試料號碼87、91、94、96之試料,係添加Ce、Y、Sm、Ca後依同樣條件所熔解.鑄造者,可知由於此等元素之添加而提升<100>擇優定向區域之面積率,結果增高有依IPC試驗所測定之疲勞壽命之事實。再者,如比較試料號碼94與試料號碼95之結果時,即可知如Sm外再添加Al時,則IPC試驗中所測定之疲勞壽命會增高之事實。 The alloy component values, the <100> preferred orientation area ratio, and the flex life in the copper foil obtained by the above test are shown in Table 5 together with the sample number and the polyimide temperature. The (-) mark in the component value means the meaning of the unmeasured person. As shown in the sample No. 85, the oxygen concentration of the caster's copper foil melted in the Ar gas stream was lower than that of the raw material copper. This is due to melting at low oxygen concentrations. Deoxidation effect caused by casting. Further, samples of sample numbers 87, 91, 94, and 96 were melted under the same conditions by adding Ce, Y, Sm, and Ca. The founder knows that the area ratio of the <100> preferred orientation area is increased by the addition of these elements, and the result is an increase in the fatigue life measured by the IPC test. Further, when the results of the sample number 94 and the sample number 95 are compared, it can be known that when Al is added in addition to Sm, the fatigue life measured in the IPC test is increased.

另一方面,在試料號碼86之情形所示般,經在大氣中鑄造者,銅箔的氧濃度較原料銅者為高。相對於此,如觀察試料號碼88、90、92、以及96之結果時,即可知如添加Ce、La、Y、Ca時,則銅箔中的氧濃度會降低之事實。此乃因此等元素具有脫氧效果之故。於此等試料中,依IPC試驗所測定之疲勞壽命增高之原因,可能是因稀土 類元素提升<100>擇優定向區域的面積率之直接性效果、及因熔解.鑄造時之氧化反應之脫氧效果所致者。又,可認為試料號碼89、93、以及98之結果,係顯示鋁再增強其效果之事實。 On the other hand, as shown in the case of the sample number 86, the oxygen concentration of the copper foil is higher than that of the raw material copper when cast in the atmosphere. On the other hand, when the results of the sample numbers 88, 90, 92, and 96 are observed, the fact that the concentration of oxygen in the copper foil is lowered when Ce, La, Y, and Ca are added is known. This is why the elements have a deoxidizing effect. Among these samples, the reason for the increase in fatigue life measured by the IPC test may be due to rare earths. The class element enhances the direct effect of the area ratio of the <100> preferred orientation area and the melting factor. The deoxidation effect of the oxidation reaction at the time of casting. Further, it can be considered that the results of the sample numbers 89, 93, and 98 show the fact that aluminum reinforces the effect.

〔產業上之利用可能性〕 [Industrial use possibility]

本發明之銅箔,係適合作為可撓性電路基板而在各種電子.電氣設備中廣泛使用,以因應電路基板本身被折彎、扭彎、或所裝載之設備之動作而變形等,在任何處具有屈撓部所使用者。特別是,由於本發明之可撓性電路基板具有屈撓耐久性優異的屈撓部構造之故,適合於隨伴滑動屈撓、折彎屈撓、鉸鏈屈撓、導板屈撓等的重複動作並頻繁被折彎之情形、或為對應所裝載之設備的小型化起見,形成需要曲率半徑極小的屈撓部般之情形者。因而,可適合利用於需要耐久性之薄型行動電話、薄型顯示器、硬碟、列印機、DVD裝置、以及各種電子設備上。 The copper foil of the present invention is suitable as a flexible circuit substrate in various electrons. Widely used in electrical equipment, the user of the flexure is provided anywhere, in response to deformation of the circuit board itself, bending, or deformation of the loaded equipment. In particular, since the flexible circuit board of the present invention has a flexing portion structure excellent in flexural durability, it is suitable for repetition of sliding, flexing, flexing, bending, hinge bending, and the like. In the case where the movement is frequently bent, or in the case of miniaturization of the equipment to be loaded, a situation in which a flexing portion having a small radius of curvature is required is formed. Therefore, it can be suitably used for thin mobile phones, thin displays, hard disks, printers, DVD devices, and various electronic devices that require durability.

1‧‧‧樹脂層 1‧‧‧ resin layer

2‧‧‧佈線(金屬箔) 2‧‧‧Wiring (metal foil)

3‧‧‧連接器端子 3‧‧‧Connector terminals

6‧‧‧黏接層 6‧‧‧Adhesive layer

7‧‧‧覆蓋材料 7‧‧‧ Covering materials

8‧‧‧間隙長度 8‧‧‧ gap length

9‧‧‧固定部 9‧‧‧Fixed Department

10‧‧‧導板活動部 10‧‧‧ Guides Department

21‧‧‧剖面P之法線方向 21‧‧‧ Normal direction of section P

L‧‧‧稜線 L‧‧‧ ridgeline

P‧‧‧從屈撓部之稜線往厚度方向切裁時之佈線的剖面 P‧‧‧A section of the wiring when cut from the ridgeline of the flexure to the thickness direction

第1圖:表示由可撓性電路基板之銅箔層所成之佈線與屈撓部的稜線之間的關係之平面模式圖。 Fig. 1 is a plan view showing a relationship between a wiring formed by a copper foil layer of a flexible circuit board and a ridge line of a flexure portion.

第2圖:表示使可撓性電路基板屈撓之狀態之剖面說明圖。 Fig. 2 is a cross-sectional explanatory view showing a state in which a flexible circuit board is bent.

第3圖:係MIT屈撓試驗裝置之說明圖。 Fig. 3 is an explanatory view of the MIT flexure test apparatus.

第4(a)圖:IPC屈撓試驗裝置之說明圖,第4(b) 圖:係採用IPC屈撓試驗之試驗用可撓性電路基板之X-X’剖面圖。 Figure 4(a): Illustration of the IPC flexure test device, section 4(b) Fig.: X-X' sectional view of a flexible circuit board for testing using IPC flexural test.

第5圖:係單面貼銅層合板之斜視說明圖。 Figure 5: A squint illustration of a single-sided copper laminate.

1‧‧‧樹脂層 1‧‧‧ resin layer

2‧‧‧佈線(金屬箔) 2‧‧‧Wiring (metal foil)

3‧‧‧連接器端子 3‧‧‧Connector terminals

L‧‧‧稜線 L‧‧‧ ridgeline

Claims (19)

一種銅箔,係含有Mn(錳)0.001質量%以上0.4質量%以下、並具有不可避免之不純物及餘部的Cu(銅)之銅箔,其特徵為:銅的單位晶格之基本結晶軸<100>,係對該銅箔之厚度方向與存在於箔面內之某一方向所成之2個正交軸,各個方位差15°以內之擇優定向區域,以面積率計,佔有60%以上。 A copper foil containing Cu (copper) copper foil having Mn (manganese) of 0.001% by mass or more and 0.4% by mass or less and having unavoidable impurities and remainder, characterized in that the basic crystal axis of the unit crystal lattice of copper < 100> is a preferred orientation region in which the thickness direction of the copper foil and the two orthogonal axes existing in a certain direction of the foil surface are within 15 degrees of each azimuth difference, and the area ratio is 60% or more. . 如申請專利範圍第1項之銅箔,其中含有Mn 0.001質量%以上0.1質量%以下,且含有0.005質量%以上0.2質量%以下之Ti(鈦)、或0.005質量%以上2質量%以下之Al(鋁)之至少任一種。 The copper foil according to the first aspect of the invention, which contains Mn in an amount of 0.001% by mass or more and 0.1% by mass or less, and contains 0.005% by mass or more and 0.2% by mass or less of Ti (titanium) or 0.005% by mass or more and 2% by mass or less of Al. At least one of (aluminum). 如申請專利範圍第1項或第2項之銅箔,其中含有Mn 0.06質量%以下。 A copper foil according to claim 1 or 2, which contains Mn 0.06 mass% or less. 一種銅箔,係含有選自Ca(鈣)、La(鑭)、Ce(鈰)、Pr(鐠)、Nd(釹)、Sm(釤)、Eu(銪)、Gd(釓)、Dy(鏑)、Ho(鈥)、Er(鉺)、Tm(銩)、Yb(鐿)、以及Y(釔)所成群之至少1種元素0.005質量%以上0.4質量%以下,餘部的銅為99.6質量%以上99.999質量%以下之銅箔,其特徵為:銅的單位晶格之基本結晶軸<100>,係對銅箔之厚度方向與存在於箔面內之某一方向所成之2個正交軸,各個方位差15°以內之擇優定向區域,以面積率計,佔有60%以上。 A copper foil containing a substance selected from the group consisting of Ca (calcium), La (镧), Ce (铈), Pr (鐠), Nd (钕), Sm (钐), Eu (铕), Gd (釓), Dy (镝), Ho(鈥), Er(铒), Tm(銩), Yb(镱), and Y(钇) are at least one element of 0.005 mass% or more and 0.4 mass% or less, and the remaining copper is 99.6. A copper foil having a mass % or more and 99.999 mass% or less is characterized in that the basic crystal axis of the unit crystal lattice of copper is <100>, which is formed by the thickness direction of the copper foil and a direction existing in the foil surface. The orthogonal axis, the preferred orientation area within 15° of each azimuth difference, accounts for more than 60% of the area ratio. 如申請專利範圍第4項之銅箔,其中含有0.005質量%以上0.2質量%以下之Ti、或0.005質量%以上0.395 質量%以下之Al之至少任一種。 A copper foil according to item 4 of the patent application, which contains 0.005 mass% or more and 0.2 mass% or less of Ti, or 0.005 mass% or more and 0.395. At least one of the mass % or less of Al. 如申請專利範圍第1項或第2項之銅箔,其中氧的含量未達0.1質量%。 The copper foil of claim 1 or 2, wherein the oxygen content is less than 0.1% by mass. 一種貼銅層合板,其特徵為:具有由申請專利範圍第1項至第6項之任一項所記載之銅箔所成銅箔層與層合於此之樹脂層。 A copper-clad laminate having a copper foil layer formed of a copper foil according to any one of claims 1 to 6 and a resin layer laminated thereon. 如申請專利範圍第7項之貼銅層合板,其中銅箔層之厚度為5μm以上18μm以下,樹脂層之厚度為5μm以上75μm以下。 The copper-clad laminate according to claim 7, wherein the thickness of the copper foil layer is 5 μm or more and 18 μm or less, and the thickness of the resin layer is 5 μm or more and 75 μm or less. 如申請專利範圍第7項或第8項之貼銅層合板,其中樹脂層係由聚醯亞胺所成。 A copper clad laminate according to claim 7 or 8, wherein the resin layer is made of polyimine. 一種可撓性電路基板,其特徵為:使申請專利範圍第7項至第9項之任一項所記載之貼銅層合板之銅箔層進行蝕刻以形成特定的佈線,並於該佈線之至少一處形成屈撓部後使用。 A flexible circuit board characterized in that a copper foil layer of a copper-clad laminate according to any one of claims 7 to 9 is etched to form a specific wiring, and the wiring is Use at least one part to form the flexure. 如申請專利範圍第10項之可撓性電路基板,其中按能形成隨伴選自滑動屈撓、折彎屈撓、鉸鏈屈撓、以及導板屈撓所成群之任一重複動作之屈撓部之方式所使用者。 The flexible circuit substrate of claim 10, wherein the repetitive motion of the group is selected from the group consisting of sliding flexing, bending flexing, hinge flexing, and bending of the guide plate. The user of the way of the scratch. 一種電子設備,其特徵為:裝載有申請專利範圍第10項或第11項所記載之可撓性電路基板。 An electronic device characterized in that the flexible circuit board described in claim 10 or 11 is loaded. 一種貼銅層合板的製造方法,係具有銅箔層及樹脂層之貼銅層合板的製造方法,其特徵為:對含有Mn 0.001質量%以上0.1質量%以下,並於組成具有不可避免 之不純物及餘部的Cu之冷軋銅箔表面,塗佈聚醯胺酸溶液並實施加熱處理,或重疊聚醯亞胺薄膜後進行熱壓黏合,藉以在冷軋銅箔上形成由聚醯亞胺所成之樹脂層之同時使冷軋銅箔再結晶化,而作成銅的單位晶格的基本結晶軸<100>,能對該銅箔之厚度方向與存在於箔面內之某一方向所成之2個正交軸,各個方位差15°以內之擇優定向區域,以面積率計,佔有60%以上之銅箔層。 A method for producing a copper-clad laminate, which is a method for producing a copper-clad laminate having a copper foil layer and a resin layer, characterized in that it contains Mn in an amount of 0.001% by mass or more and 0.1% by mass or less, and is inevitably formed in composition. The surface of the cold-rolled copper foil of the impure material and the remaining part of Cu is coated with a polyaminic acid solution and subjected to heat treatment, or the polyimide film is overlapped and then subjected to thermocompression bonding, thereby forming a poly-pyrene on the cold-rolled copper foil. The resin layer formed by the amine simultaneously recrystallizes the cold-rolled copper foil, and the basic crystal axis of the unit crystal lattice of copper is <100>, and the thickness direction of the copper foil and the direction existing in the foil surface can be The two orthogonal axes formed, the preferred orientation regions within 15° of each azimuth difference, occupy 60% or more of the copper foil layer in terms of area ratio. 如申請專利範圍第13項之貼銅層合板的製造方法,其中冷軋銅箔再含有0.005質量%以上0.2質量%以下之Ti、或者,0.005質量%以上2質量%以下之Al之至少任一種。 The method for producing a copper-clad laminate according to claim 13, wherein the cold-rolled copper foil further contains 0.005 mass% or more and 0.2 mass% or less of Ti, or at least 0.005 mass% or more and 2 mass% or less of at least one of Al. . 如申請專利範圍第13項或第14項之貼銅層合板的製造方法,其中冷軋銅箔含有0.06質量%以下的Mn。 The method for producing a copper-clad laminate according to the 13th or 14th aspect of the invention, wherein the cold-rolled copper foil contains 0.06 mass% or less of Mn. 一種貼銅層合板的製造方法,係具有銅箔層及樹脂層之貼銅層合板的製造方法,其特徵為:對含有選自Ca、La、Ce、Pr、Nd、Sm、Eu、Gd、Dy、Ho、Er、Tm、Yb、以及Y所成群之至少1種元素0.005質量%以上0.4質量%以下,餘部的銅為99.6質量%以上99.999質量%以下之冷軋銅箔表面,塗佈聚醯胺酸溶液並實施加熱處理,或重疊聚醯亞胺薄膜後進行熱壓黏合,藉以在冷軋銅箔上形成由聚醯亞胺所成之樹脂層之同時使冷軋銅箔再結晶化,而作成銅的單位晶格之基本結晶軸<100>,能對該銅箔之厚度方向與存在於箔面內之某一方向所成之2個正交軸,各個方位差15°以內之擇優定向區域,以面積率計, 佔有60%以上之銅箔層。 A method for producing a copper-clad laminate, which comprises a copper foil layer and a resin layer, wherein the pair contains Ca, La, Ce, Pr At least one element of Dy, Ho, Er, Tm, Yb, and Y is 0.005 mass% or more and 0.4 mass% or less, and the remaining copper is 99.9% by mass or more and 99.999 mass% or less of the surface of the cold-rolled copper foil. The polyaminic acid solution is subjected to heat treatment, or the polyimide film is laminated and then subjected to thermocompression bonding, whereby a resin layer made of polyimine is formed on the cold-rolled copper foil, and the cold-rolled copper foil is recrystallized. The basic crystal axis of the unit crystal lattice of copper is <100>, and the thickness direction of the copper foil and the two orthogonal axes formed in a certain direction in the foil surface can be within 15° of each orientation difference. The preferred orientation area, in terms of area ratio, Occupy more than 60% of the copper foil layer. 如申請專利範圍第16項之貼銅層合板的製造方法,其中冷軋銅箔含有0.005質量%以上0.2質量%以下之Ti、或者0.005質量%以上0.395質量%以下之Al之至少任一種。 The method for producing a copper-clad laminate according to claim 16, wherein the cold-rolled copper foil contains at least one of 0.005 mass% or more and 0.2 mass% or less of Ti or 0.005 mass% or more and 0.395 mass% or less of Al. 如申請專利範圍第13項或第16項之貼銅層合板的製造方法,其中將所塗佈之聚醯胺酸溶液實施加熱處理,以形成樹脂層之溫度為280℃以上400℃以下。 The method for producing a copper-clad laminate according to claim 13 or 16, wherein the applied polyamine solution is subjected to heat treatment to form a resin layer having a temperature of from 280 ° C to 400 ° C. 如申請專利範圍第13項或第16項之貼銅層合板的製造方法,其中將聚醯亞胺薄膜實施熱壓黏合以形成樹脂層之溫度為280℃以上400℃以下。 The method for producing a copper-clad laminate according to claim 13 or 16, wherein the polyimide film is subjected to thermocompression bonding to form a resin layer at a temperature of from 280 ° C to 400 ° C.
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CN103415635B (en) 2016-07-06
KR20140021627A (en) 2014-02-20
WO2012133518A1 (en) 2012-10-04
KR101886824B1 (en) 2018-08-08
TW201303047A (en) 2013-01-16
CN103415635A (en) 2013-11-27

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