JP4763068B2 - Flexible circuit board, manufacturing method thereof, and bent portion structure of flexible circuit board - Google Patents

Flexible circuit board, manufacturing method thereof, and bent portion structure of flexible circuit board Download PDF

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JP4763068B2
JP4763068B2 JP2009151317A JP2009151317A JP4763068B2 JP 4763068 B2 JP4763068 B2 JP 4763068B2 JP 2009151317 A JP2009151317 A JP 2009151317A JP 2009151317 A JP2009151317 A JP 2009151317A JP 4763068 B2 JP4763068 B2 JP 4763068B2
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circuit board
flexible circuit
wiring
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copper foil
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公一 服部
圭一 木村
尚哉 鍬崎
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Nippon Steel Chemical and Materials Co Ltd
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この発明は、いずれかに屈曲部を有して使用される可撓性回路基板、及びその製造方法、並びに可撓性回路基板の屈曲部構造に関し、詳しくは屈曲に対して耐久性を備え、かつ、屈曲性に優れた可撓性回路基板、及びその製造方法、並びに可撓性回路基板の屈曲部構造に関する。   The present invention relates to a flexible circuit board that is used with a bent portion in any one of them, a method for manufacturing the same, and a bent portion structure of the flexible circuit board. In addition, the present invention relates to a flexible circuit board excellent in flexibility, a manufacturing method thereof, and a bent portion structure of the flexible circuit board.

樹脂層と金属箔からなる配線とを有してなる可撓性回路基板(フレキシブルプリント基板)は、折り曲げて使用することが可能であることから、ハードディスク内の可動部、携帯電話のヒンジ部やスライド摺動部、プリンターのヘッド部、光ピックアップ部、ノートPCの可動部などをはじめ、各種電子・電気機器で幅広く使用されている。そして、近時では、特にこれらの機器の小型化、薄型化、高機能化等に伴い、限られたスペースに可撓性回路基板を小さく折り畳んで収納したり、電子機器等の様々な動きに対応した屈曲性が求められている。そのため、屈曲部における曲率半径がより小さくなるような折り曲げや、折り曲げが頻繁に繰り返されるような動作にも対応できるように、可撓性回路基板の更なる強度等の機械的特性の向上が必要になっている。   Since a flexible circuit board (flexible printed circuit board) having a resin layer and a wiring made of metal foil can be used by being bent, a movable part in a hard disk, a hinge part of a mobile phone, Widely used in various electronic and electrical devices such as sliding slides, printer heads, optical pickups, and notebook PCs. In recent years, especially with the downsizing, thinning, and high functionality of these devices, the flexible circuit board can be folded and stored in a limited space or used in various movements of electronic devices. Corresponding flexibility is required. Therefore, it is necessary to improve the mechanical characteristics such as the strength of the flexible circuit board so that it can cope with the bending with a smaller radius of curvature at the bent portion and the operation in which the bending is frequently repeated. It has become.

一般に、折り曲げの繰り返しや曲率半径の小さい屈曲に対して強度が劣る等で不良要因となるのは樹脂層よりむしろ配線の方であり、これらに耐えられなくなると配線の一部に割れや破断が生じ、回路基板として利用できなくなってしまう。そこで、例えばヒンジ部における配線に対する曲げ応力を小さくするために、回動軸に対して斜めになるように配線された可撓性回路基板(特許文献1参照)や、ヒンジ部の回動方向に1巻き以上螺旋させた螺旋部を形成し、この巻き数を多くすることで開閉動作による螺旋部の直径の変化を小さくして損傷を少なくする方法(特許文献2参照)などが提案されている。しかしながら、これらの方法では、いずれも可撓性回路基板の設計が制約されてしまう。   In general, it is the wiring rather than the resin layer that causes failure due to repeated bending and bending with a small radius of curvature. As a result, it cannot be used as a circuit board. Therefore, for example, in order to reduce the bending stress on the wiring in the hinge portion, the flexible circuit board (see Patent Document 1) wired so as to be inclined with respect to the rotation axis, or in the rotation direction of the hinge portion. A method has been proposed in which a spiral portion formed by spiraling one or more turns is formed and the change in the diameter of the spiral portion due to the opening / closing operation is reduced to reduce damage by increasing the number of turns (see Patent Document 2). . However, any of these methods restricts the design of the flexible circuit board.

一方では、圧延銅箔の圧延面のX線回折(銅箔の厚み方向のX線回折)で求めた(200)面の強度(I)が、微粉末銅のX線回折で求めた(200)面の強度(I0)に対してI/I0>20である場合に屈曲性に優れることが報告されている(特許文献3及び4参照)。すなわち、銅の再結晶集合組織である立方体方位が発達するほど銅箔の屈曲性が向上するため、立方体集合組織の発達度を上記パラメータ(I/I0)で規定した、可撓性回路基板の配線材料として好適な銅箔が知られている。また、圧延銅箔に関し、屈曲変形に対して主すべり面が活動可能である方位に配向した結晶粒の占める割合が、圧延面からの観察によって面積率で80%以上となる結晶組織を有することで、屈曲強度に優れるとする報告もあり(特許文献5の段落0013参照)、この文献における明細書の記載によれば、屈曲させた配線の断面が{100}に配向している状態が好適であると解釈することができる。 On the other hand, the strength (I) of the (200) plane determined by X-ray diffraction (X-ray diffraction in the thickness direction of the copper foil) of the rolled copper foil was determined by X-ray diffraction of fine powder copper (200 ) It has been reported that when I / I 0 > 20 with respect to the surface strength (I 0 ), the film has excellent flexibility (see Patent Documents 3 and 4). That is, the flexibility of the copper foil improves as the cube orientation, which is the recrystallized texture of copper, develops. Therefore, a flexible circuit board in which the degree of development of the cube texture is defined by the parameter (I / I 0 ) A copper foil suitable as a wiring material is known. In addition, the rolled copper foil has a crystal structure in which the proportion of crystal grains oriented in the orientation in which the main slip surface can be active with respect to bending deformation is 80% or more in area ratio as observed from the rolled surface. There is also a report that the bending strength is excellent (see paragraph 0013 of Patent Document 5). According to the description of the specification in this document, it is preferable that the cross section of the bent wiring is oriented in {100}. Can be interpreted.

特開2002−171033号公報JP 2002-171033 A 特開2002−300247号公報JP 2002-300147 A 特開2001−58203号公報JP 2001-58203 A 特許第3009383号公報Japanese Patent No. 3009383 特開2007−107036号公報JP 2007-107036 A

このような状況のもと、本発明は、可撓性回路基板の設計に制約が生じず、かつ、折り曲げの繰り返しや曲率半径の小さな屈曲に対しても耐え得る強度を備えて、屈曲性に優れた可撓性回路基板を提供する。本発明者らは、鋭意検討した結果、驚くべきことに、立方晶系の結晶構造を有する金属箔の結晶軸に対して所定の角度を有して屈曲させた場合に屈曲強度が向上し、かつ、屈曲性に優れるといった新たな知見を得た。そして、このような知見に基づき、屈曲耐久性や屈曲性に優れた可撓性回路基板が得られることを見出し、本発明を完成した。   Under such circumstances, the present invention is not limited in the design of the flexible circuit board, and has sufficient strength to withstand repeated bending and bending with a small radius of curvature. An excellent flexible circuit board is provided. As a result of intensive studies, the present inventors have surprisingly improved the bending strength when bent at a predetermined angle with respect to the crystal axis of the metal foil having a cubic crystal structure, In addition, new findings such as excellent flexibility were obtained. And based on such knowledge, it discovered that the flexible circuit board excellent in bending durability and flexibility was obtained, and completed this invention.

したがって、本発明の目的は、携帯電話や小型電子機器等のヒンジ部又はスライド摺動部など、特に曲率半径の小さな繰り返し屈曲部における過酷な条件に対して耐久性を備え、屈曲性に優れた可撓性回路基板を提供することにある。   Accordingly, the object of the present invention is to provide durability and excellent flexibility in harsh conditions such as hinge portions or slide sliding portions of mobile phones and small electronic devices, particularly in repeated bending portions having a small curvature radius. It is to provide a flexible circuit board.

また、本発明の別の目的は、可撓性回路基板の設計に制約を受けずに、屈曲耐久性や屈曲性に優れた可撓性回路基板を得ることができる可撓性回路基板の製造方法を提供することにある。   Another object of the present invention is to manufacture a flexible circuit board capable of obtaining a flexible circuit board having excellent bending durability and flexibility without being restricted by the design of the flexible circuit board. It is to provide a method.

更に、本発明の別の目的は、携帯電話や小型電子機器等のヒンジ部又はスライド摺動部など、特に曲率半径の小さな繰り返し屈曲部における過酷な条件に対して耐久性を備え、屈曲性に優れた可撓性回路基板の屈曲部構造を提供することにある。   In addition, another object of the present invention is to provide durability and resistance to harsh conditions such as hinge portions or slide sliding portions of mobile phones, small electronic devices, etc., particularly in repeated bending portions having a small curvature radius. An object of the present invention is to provide an excellent flexible circuit board bent portion structure.

本発明は、上記従来技術の問題を解決するために鋭意検討した結果、以下の構成を要旨とする。
(1)樹脂層と金属箔から形成された配線とを備え、配線の少なくとも一箇所に摺動屈曲、折り曲げ屈曲、ヒンジ屈曲、及びスライド屈曲からなる群から選ばれたいずれかの繰り返し動作を伴う屈曲部を有して使用される可撓性回路基板であって、
金属箔が立方晶系の結晶構造を有する銅箔からなり、かつ、屈曲部における稜線から厚み方向に切った際の配線の断面が、[001]を晶帯軸として(100)から(110)への回転方向における(20 1 0)から(1 20 0)の範囲に含まれたいずれかの面に主方位をなすことを特徴とする可撓性回路基板。
(2)屈曲部での稜線から厚み方向に切った際の配線の断面が、(100)標準投影図のステレオ三角形において(20 1 0)を表す点と(110)を表す点とで結ばれた線分上にあるいずれかの面である(1)に記載の可撓性回路基板。
(3)銅箔の厚み方向のX線回折で求めた(200)面の強度(I)が、微粉末銅のX線回折で求めた(200)面の強度(I0)に対してI/I0≧25である(1)又は(2)に記載の可撓性回路基板。
(4)の単位格子の基本結晶軸<100>が銅箔の厚さ方向と箔面内の一方向の2つの直交軸に対して、方位差10°以内にある優先配向領域が、面積率で50%以上を占めるように主方位を有していると共に、屈曲部の稜線から銅箔の厚み方向に切った配線断面に対する法線が、箔面内の<100>主方位と2.9〜87.1°の角度を有する(1)又は(2)に記載の可撓性回路基板。
(5)銅箔が、厚さ5〜100μmの圧延銅箔である(1)〜(4)のいずれかに記載の可撓性回路基板。
)屈曲部における稜線に対して直交する方向に沿って配線が形成されている(1)〜()のいずれかに記載の可撓性回路基板。
)樹脂層がポリイミドからなる(1)〜()のいずれかに記載の可撓性回路基板。
)樹脂層と金属箔から形成された配線とを備え、配線の少なくとも一箇所に摺動屈曲、折り曲げ屈曲、ヒンジ屈曲、及びスライド屈曲からなる群から選ばれたいずれかの繰り返し動作を伴う屈曲部を有して使用される可撓性回路基板の屈曲部構造であって、
金属箔が立方晶系の結晶構造を有する銅箔からなり、かつ、屈曲部における稜線から厚み方向に切った際の配線の断面が、[001]を晶帯軸として(100)から(110)への回転方向における(20 1 0)から(1 20 0)の範囲に含まれたいずれかの面に主方位をなすことを特徴とする可撓性回路基板の屈曲部構造。
)屈曲部での稜線から厚み方向に切った際の配線の断面が、(100)標準投影図のステレオ三角形において(20 1 0)を表す点と(110)を表す点とで結ばれた線分上にあるいずれかの面である()に記載の可撓性回路基板の屈曲部構造。
10)樹脂層と金属箔から形成された配線とを備え、配線の少なくとも一箇所に摺動屈曲、折り曲げ屈曲、ヒンジ屈曲、及びスライド屈曲からなる群から選ばれたいずれかの繰り返し動作を伴う屈曲部を有して使用される可撓性回路基板の製造方法であって、
金属箔が立方晶系の結晶構造を有する銅箔からなり、屈曲部における稜線が、銅箔の面内の基本結晶軸<100>のひとつと2.9〜87.1°の角度を有するように配線を形成することを特徴とする可撓性回路基板の製造方法。
11)銅箔の厚み方向のX線回折で求めた(200)面の強度(I)が、微粉末銅のX線回折で求めた(200)面の強度(I0)に対してI/I0≧25である(10)に記載の可撓性回路基板の製造方法。
12銅箔が圧延銅箔であり、該圧延銅箔を、面心立方構造の単位格子の基本結晶軸<100>が銅箔の厚さ方向と箔面内の一方向の2つの直交軸に対して、方位差10°以内にある優先配向領域が、面積率で50%以上を占めるように、熱処理によって立方体集合組織を呈せしめる(11)に記載の可撓性回路基板の製造方法。
13)屈曲部における稜線に対して直交する方向に沿って配線を形成する(10)〜(12)のいずれかに記載の可撓性回路基板の製造方法。
14)(1)〜()のいずれかに記載の可撓性回路基板を搭載した電子機器。
The present invention is summarized as follows as a result of intensive studies to solve the above-described problems of the prior art.
(1) Provided with a resin layer and a wiring formed of a metal foil, and at least one part of the wiring is accompanied by any one of repeating operations selected from the group consisting of sliding bending, bending bending, hinge bending, and sliding bending A flexible circuit board used with a bent portion,
The metal foil is made of a copper foil having a cubic crystal structure, and the cross section of the wiring when cut in the thickness direction from the ridgeline at the bent portion is (100) to (110) with [001] as the crystal zone axis. A flexible circuit board characterized by having a main orientation in any surface included in a range of (20 1 0) to (1 20 0) in the rotation direction.
(2) The cross section of the wiring when cut in the thickness direction from the ridgeline at the bent portion is connected by a point representing (20 10) and a point representing (110) in the stereo triangle of (100) standard projection drawing The flexible circuit board according to (1), wherein the flexible circuit board is any surface on a line segment.
(3) The strength (I) of the (200) plane determined by X-ray diffraction in the thickness direction of the copper foil is I with respect to the strength (I 0 ) of the (200) plane determined by X-ray diffraction of fine powder copper. The flexible circuit board according to (1) or (2), wherein / I 0 ≧ 25.
(4) with respect to two orthogonal axes in one direction of the unit base crystal axes of the lattice <100> is the thickness direction and the foil surface of the copper foil of the copper, is preferentially oriented area is within orientation difference 10 °, the area And the normal to the wiring cross section cut from the ridge line of the bent portion in the thickness direction of the copper foil is the <100> main direction in the foil plane and 2. The flexible circuit board according to (1) or (2), which has an angle of 9 to 87.1 °.
(5) a flexible circuit board according to any one of the copper foil, a rolled copper foil having a thickness of 5 to 100 [mu] m (1) ~ (4).
( 6 ) The flexible circuit board according to any one of (1) to ( 5 ), wherein a wiring is formed along a direction orthogonal to the ridgeline in the bent portion.
( 7 ) The flexible circuit board according to any one of (1) to ( 6 ), wherein the resin layer is made of polyimide.
( 8 ) Provided with a resin layer and a wiring formed of a metal foil, and at least one part of the wiring is accompanied by any one of repeating operations selected from the group consisting of sliding bending, bending bending, hinge bending, and sliding bending A bent portion structure of a flexible circuit board used with a bent portion,
The metal foil is made of a copper foil having a cubic crystal structure, and the cross section of the wiring when cut in the thickness direction from the ridgeline at the bent portion is (100) to (110) with [001] as the crystal zone axis. A bent portion structure of a flexible circuit board, characterized in that a principal direction is formed on any surface included in the range of (20 1 0) to (1 20 0) in the rotation direction of the flexible circuit board.
( 9 ) The cross section of the wiring when cut in the thickness direction from the ridgeline at the bent portion is connected by a point representing (20 10) and a point representing (110) in the stereo triangle of (100) standard projection drawing The bent part structure of a flexible circuit board according to ( 8 ), which is any surface on a line segment.
( 10 ) It is provided with a resin layer and a wiring formed of a metal foil, and at least one part of the wiring is accompanied by any one of repeating operations selected from the group consisting of sliding bending, bending bending, hinge bending, and sliding bending. A method of manufacturing a flexible circuit board used with a bent portion,
The metal foil is made of a copper foil having a cubic crystal structure, and the ridge line at the bent portion has an angle of 2.9 to 87.1 ° with one of the basic crystal axes <100> in the plane of the copper foil. A method of manufacturing a flexible circuit board, wherein wiring is formed on the substrate.
( 11 ) The strength (I) of the (200) plane determined by X-ray diffraction in the thickness direction of the copper foil is I with respect to the strength (I 0 ) of the (200) plane determined by X-ray diffraction of fine powder copper. The method for producing a flexible circuit board according to ( 10 ), wherein / I 0 ≧ 25.
( 12 ) The copper foil is a rolled copper foil, and the rolled copper foil has two orthogonal directions in which the basic crystal axis <100> of the unit cell having a face-centered cubic structure is a thickness direction of the copper foil and one direction in the foil surface. ( 11 ) The method for producing a flexible circuit board according to ( 11 ), wherein a cubic texture is exhibited by heat treatment so that a preferential orientation region having an azimuth difference of 10 ° or less with respect to an axis occupies 50% or more in area ratio. .
( 13 ) The method for manufacturing a flexible circuit board according to any one of ( 10 ) to ( 12 ), wherein the wiring is formed along a direction orthogonal to the ridgeline in the bent portion.
( 14 ) An electronic device on which the flexible circuit board according to any one of (1) to ( 7 ) is mounted.

本発明によれば、可撓性回路基板を屈曲させた際の、屈曲部の主歪み方向へのせん断すべりが容易になるので、破壊が起こり難くなるという作用効果を奏する。また、繰り返し歪に対して金属疲労が起こり難くなる。更には、応力に対して金属疲労が起こり難くなる。そのため、可撓性回路基板の設計に制約が生じず、折り曲げの繰り返しや曲率半径の小さな屈曲に対しても耐え得る強度を備えて、屈曲性に優れた可撓性回路基板を提供することができる。その結果、薄型携帯電話、薄型ディスプレー、ハードディスク、プリンター、DVD装置等をはじめ、耐久性の高い電子機器が実現可能になる。   According to the present invention, when the flexible circuit board is bent, the shearing of the bent portion in the main strain direction is facilitated, so that an effect is obtained that the breakage hardly occurs. In addition, metal fatigue is less likely to occur due to repeated strain. Furthermore, metal fatigue is less likely to occur with respect to stress. Therefore, it is possible to provide a flexible circuit board having excellent flexibility with sufficient strength to withstand repeated bending and bending with a small radius of curvature without any restrictions on the design of the flexible circuit board. it can. As a result, highly durable electronic devices such as thin mobile phones, thin displays, hard disks, printers, and DVD devices can be realized.

図1は、立方晶系の結晶構造における晶帯軸と晶帯軸を中心に回転させて得られる面の関係を表す図である。FIG. 1 is a diagram illustrating a relationship between a crystal zone axis in a cubic crystal structure and a plane obtained by rotating around the crystal zone axis. 図2は、(100)標準投影図のステレオ三角形である。FIG. 2 is a stereo triangle of (100) standard projection. 図3は、可撓性回路基板を屈曲させた状態を示す断面説明図である。FIG. 3 is an explanatory cross-sectional view showing a state in which the flexible circuit board is bent. 図4は、可撓性回路基板における配線と金属箔の結晶軸との関係を示す平面説明図であり、(a)及び(b)は本発明に係る可撓性回路基板を示し、(c)及び(d)は従来技術の可撓性回路基板を示す。FIG. 4 is an explanatory plan view showing the relationship between the wiring in the flexible circuit board and the crystal axis of the metal foil, (a) and (b) show the flexible circuit board according to the present invention, and (c) ) And (d) show a prior art flexible circuit board. 図5は、片面銅張積層板の斜視説明図である。FIG. 5 is a perspective explanatory view of a single-sided copper-clad laminate. 図6は、本発明の実施例において片面銅張積層板から試験用可撓性回路基板を得る様子を示す平面説明図である。FIG. 6 is an explanatory plan view showing a state in which a test flexible circuit board is obtained from a single-sided copper-clad laminate in the embodiment of the present invention. 図7は、本発明の実施例における金属箔のEBSP法による方位マッピング像を示す。FIG. 7 shows an orientation mapping image of the metal foil according to the embodiment of the present invention by the EBSP method. 図8は、MIT屈曲試験装置の説明図である。FIG. 8 is an explanatory diagram of an MIT flex test apparatus. 図9(a)はIPC屈曲試験装置の説明図であり、図9(b)はIPC屈曲試験に用いた試験用可撓性回路基板のX-X'断面図である。FIG. 9A is an explanatory view of an IPC bending test apparatus, and FIG. 9B is an XX ′ sectional view of a test flexible circuit board used in the IPC bending test.

本発明の可撓性回路基板が備える配線は、立方晶系の結晶構造を有する金属からなる金属箔によって形成される。立方晶系の結晶構造を有する金属として、例えば面心立方晶の場合、銅、アルミニウム、ニッケル、銀、ロジウム、パラジウム、白金、金などが知られており、また、体心立方晶の場合、鉄、クロム、モリブデン、タングステンなどが知られおり、これらはいずれであってもよいが、金属箔としての利用性から銅、アルミニウム及びニッケルが好適であり、なかでも、可撓性回路基板の配線として主に使用される銅箔が最も一般的である。また、金属箔は圧延箔又は電解箔のいずれであってもよいが、好ましくは圧延箔であるのがよく、例えば銅箔の場合には、厚さが5〜100μm、有利には5〜20μm、更に有利には5〜12μmの圧延銅箔であるのがよい。なお、圧延銅箔は、合金元素を含んでもよいが、完全固溶体であることが望ましい。   The wiring included in the flexible circuit board of the present invention is formed of a metal foil made of a metal having a cubic crystal structure. As a metal having a cubic crystal structure, for example, in the case of a face-centered cubic crystal, copper, aluminum, nickel, silver, rhodium, palladium, platinum, gold and the like are known, and in the case of a body-centered cubic crystal, Iron, chromium, molybdenum, tungsten, and the like are known, and any of these may be used, but copper, aluminum, and nickel are preferable because of their availability as a metal foil. Copper foils that are mainly used as are most common. The metal foil may be either a rolled foil or an electrolytic foil, but is preferably a rolled foil. For example, in the case of a copper foil, the thickness is 5 to 100 μm, preferably 5 to 20 μm. More preferably, it is a rolled copper foil of 5 to 12 μm. The rolled copper foil may contain an alloy element, but is preferably a complete solid solution.

本発明の可撓性回路基板内で回路を形成する金属箔は、立方晶系の結晶構造を有する金属からなり、かつ、屈曲部における稜線から厚み方向に切った際の配線の断面Pが、[001]を晶帯軸として(20 1 0)から(1 20 0)の範囲に含まれたいずれかの面に主方位をなしている必要がある。ここで、晶帯軸と面方位の関係を図1に示す。(20 1 0)と(1 20 0)は、[001]を共通軸、すなわち晶帯軸とした関係にあり、[001]を軸とした(100)から(110)へ〔(100)から(010)へ〕の回転面内にある。すなわち、これを断面P法線方位に対する逆極点図上に示すと、(001)、(20 1 0)、(110)の各面は、図2に示すようになる。対称性から、逆極点図上では、(1 20 0)は(20 1 0)と同じ位置に表される。本発明における金属箔の金属は立方晶である。その単位格子の結晶軸は、[100]、[010]、[001]であるが、本発明では、金属箔の厚さ方向(金属箔の表面に対して垂直方向)に<100>優先方位がある場合、この軸を[001]、すなわち箔面方位を(001)として表記するが、立方晶の対称性からこれらの軸を入れ替えても等価であり、勿論これらは本発明に含まれる。   The metal foil that forms a circuit in the flexible circuit board of the present invention is made of a metal having a cubic crystal structure, and the cross section P of the wiring when cut in the thickness direction from the ridgeline at the bent portion, With [001] as the zone axis, it is necessary that the main orientation be formed on any plane included in the range of (20 1 0) to (1 20 0). Here, the relationship between the zone axis and the plane orientation is shown in FIG. (20 1 0) and (1 20 0) have a relationship in which [001] is a common axis, that is, a zone axis, from (100) to (110) with [001] as the axis [from (100) (010)] in the plane of rotation. That is, when this is shown on the reverse pole figure with respect to the cross-sectional P normal direction, the surfaces of (001), (20 10), and (110) are as shown in FIG. Due to symmetry, (1 20 0) is represented at the same position as (20 1 0) on the inverse pole figure. The metal of the metal foil in the present invention is cubic. The crystal axes of the unit cell are [100], [010], and [001]. In the present invention, <100> preferred orientation in the thickness direction of the metal foil (the direction perpendicular to the surface of the metal foil). In this case, this axis is expressed as [001], that is, the foil plane orientation is (001), but it is equivalent even if these axes are interchanged due to the symmetry of the cubic crystal, and these are of course included in the present invention.

また、本発明における金属箔は必ずしも単結晶である必要はないが、少なくとも屈曲部においては、3次元的に優先配向して集合組織を形成している必要がある。そして、優先配向の中心にある結晶方位を集合組織の主方位と呼ぶものとする。集合組織の優先配向の優先度、すなわち配向度又は集積度を表す指標は幾つかあるが、本発明では、X線回折強度、及び電子線回折で得られる局所的な三次元方位データの統計データを用いた客観的なデータに基づいた指標を用いる。本発明における金属箔の優先配向度の範囲は、以下で説明するとおりである。   In addition, the metal foil in the present invention does not necessarily need to be a single crystal, but at least at the bent portion, it is necessary to preferentially orientate three-dimensionally to form a texture. The crystal orientation at the center of the preferential orientation is called the main orientation of the texture. There are several indexes that represent the priority of texture preferential orientation, that is, the degree of orientation or accumulation. In the present invention, the statistical data of X-ray diffraction intensity and local three-dimensional orientation data obtained by electron diffraction is used. An index based on objective data using. The range of the preferential orientation degree of the metal foil in the present invention is as described below.

本発明の可撓性回路基板の典型的な形態は、その回路を構成する金属箔の試料座標系に対して、金属箔の三次元結晶方位が規定され、その望ましい集合組織の集積度は、下記の範囲に規定される。すなわち、立方晶の金属が、少なくとも屈曲部において、金属の単位格子の基本結晶軸の一つ、例えば[001]軸が、金属箔の厚さ方向(金属箔の表面に直交する方向)に対し、方位差で10°以内にある領域が面積比で50%以上、望ましくは75%以上、更に望ましくは98%以上を占めるような優先配向を呈し、かつ、金属箔の表面(主面又は箔面ともいう)に対して水平方向の箔面内において、他の基本結晶軸を主方位とし、主方位から方位差で10°以内にある領域が面積比で50%以上、望ましくは85%以上、更に望ましくは99%以上を占めるような優先配向を呈するのが良い。そして、箔面内の主方位が、屈曲部の主歪み方向、すなわち屈曲部における稜線から厚み方向に切った際の配線の断面法線方向に対して(配線断面Pに対する垂線に対して)、2.9°〜87.1°〔(20 1 0)〜(1 20 0)〕の角度を有することが必要であり、好ましくは5.7°〜84.3°〔(10 1 0)〜(1 10 0)〕の角度、より好ましくは11.4°〜78.6°〔(510)〜(150)〕の角度、更に好ましくは26.6°〜63.4°〔(210)〜(120)〕の角度、最も好適には30°又は60°〔(40 23 0)、又は(23 40 0)〕であることが望ましい。なお、〔 〕内は、それぞれの角度に対応する断面Pの面方位を表す。   In the typical form of the flexible circuit board of the present invention, the three-dimensional crystal orientation of the metal foil is defined with respect to the sample coordinate system of the metal foil constituting the circuit. It is specified in the following range. That is, at least in the bent portion, the cubic metal has one of the basic crystal axes of the metal unit cell, for example, the [001] axis, with respect to the thickness direction of the metal foil (the direction perpendicular to the surface of the metal foil). , Exhibiting a preferential orientation such that a region within 10 ° in orientation difference occupies 50% or more, preferably 75% or more, and more preferably 98% or more by area ratio, and the surface of the metal foil (main surface or foil) In the foil plane in the horizontal direction with respect to the surface), the area where the other basic crystal axis is the main orientation and the difference in orientation is within 10 ° from the main orientation is 50% or more, preferably 85% or more. More preferably, the preferred orientation should be 99% or more. And, the main orientation in the foil plane is in the main strain direction of the bent portion, that is, in the normal direction of the cross section of the wiring cut from the ridge line in the bent portion in the thickness direction (with respect to the perpendicular to the wiring cross section P), It is necessary to have an angle of 2.9 ° to 87.1 ° [(20 1 0) to (1 20 0)], and preferably 5.7 ° to 84.3 ° ((10 1 0) to (1 100)], more preferably 11.4 ° to 78.6 ° [(510) to (150)], and more preferably 26.6 ° to 63.4 ° [(210) to (120)], most preferably 30 ° or 60 ° [(40 23 0) or (23 40 0)]. [] Represents the plane orientation of the cross section P corresponding to each angle.

本発明によれば、回路を屈曲させた際、屈曲部の主応力方向へのせん断すべりが容易になり、破断伸びが大きくなり、破壊が起こり難く、また繰り返しの歪み、もしくは応力に対して、金属疲労が起こり難くなり、屈曲性の高い可撓性回路基板が得られる。すなわち、本発明の可撓性回路基板の好適な例は金属箔が面心立方構造を有して、金属箔の主面が(001)を主方位として優先配向し、かつ、屈曲部における稜線から厚み方向に切った際の配線の断面Pが、(20 1 0)から(1 20 0)の間の特定方位に主方位を有して優先配向し、好ましくは(10 1 0)から(1 10 0)の間の特定方位に主方位を有して優先配向し、より好ましくは(510)から(110)の間の特定方位に主方位を有して優先配向し、更に好ましくは(210)から(110)の間の特定の方位に主方位を有して優先配向し、最も好適には(40 23 0)近傍に中心方位を持って優先配向していることが望ましい。箔面が(001)を主方位として優先配向している金属箔の場合、箔面内のその他の単位格子軸(100)と(010)は等価であって、本発明における可撓性回路基板の屈曲部における稜線から厚み方向に切った際の配線の断面Pの主方位は、(1 20 0)から(110)の間の特定方位と記述することも出来、好ましくは(120)から(110)の間の特定の方位に主方位を有して優先配向し、最も望ましくは(23 40 0)近傍に主方位を持って優先配向していることが望ましいと記述することも可能である。   According to the present invention, when the circuit is bent, shearing in the principal stress direction of the bent portion is facilitated, the elongation at break is increased, breakage is less likely to occur, and against repeated strain or stress, Metal fatigue is less likely to occur, and a flexible circuit board with high flexibility is obtained. That is, in a preferred example of the flexible circuit board of the present invention, the metal foil has a face-centered cubic structure, the main surface of the metal foil is preferentially oriented with (001) as the main orientation, and the ridgeline at the bent portion The cross section P of the wiring when cut in the thickness direction is preferentially oriented with a main orientation in a specific orientation between (20 1 0) and (1 20 0), preferably from (10 1 0) to ( 1 10 0) is preferentially oriented with a main orientation in a specific orientation, and more preferably is preferentially oriented with a main orientation in a specific orientation between (510) and (110), more preferably ( It is desirable that the orientation is preferentially provided with a main orientation at a specific orientation between 210) and (110), and most preferably preferentially oriented with a central orientation in the vicinity of (40 230). In the case of a metal foil whose foil surface is preferentially oriented with (001) as the main orientation, the other unit cell axes (100) and (010) in the foil surface are equivalent, and the flexible circuit board in the present invention The main direction of the cross section P of the wiring when cutting in the thickness direction from the ridgeline at the bent portion of the wire can be described as a specific direction between (1200) and (110), preferably from (120) ( 110) can be described as having a preferential orientation with a main orientation in a particular orientation, and most preferably with a main orientation in the vicinity of (23400). .

ここで、屈曲部における稜線から厚み方向に切った際の配線の断面Pとは、例えば図3に示すように、可撓性回路基板をU字状に屈曲させるとその外側に稜線Lが形成されるが、この稜線Lから可撓性回路基板の厚み方向dに切った際に得られる断面のうち配線部分のものを言う。また、稜線Lとは、可撓性回路基板を屈曲させた状態で、その折り曲げ方向(図3中の太矢印)に沿って可撓性回路基板の断面を見た場合に形成される頂点を結んだ線である。なお、例えば後述する摺動屈曲など、稜線Lが可撓性回路基板を移動するような場合も含まれる。また、図3では、樹脂層1が外側であり、配線2が内側に屈曲された状態を表すが(曲率半径を有する円が内接する側を内側とする)、配線2が外側になる折り曲げ方であってもよいことは勿論である。   Here, the cross section P of the wiring when it is cut in the thickness direction from the ridgeline at the bent portion is, for example, as shown in FIG. 3, when the flexible circuit board is bent in a U shape, a ridgeline L is formed on the outside thereof. However, it refers to the wiring portion of the cross section obtained when the ridge line L is cut in the thickness direction d of the flexible circuit board. The ridge line L is an apex formed when the cross section of the flexible circuit board is viewed along the bending direction (thick arrow in FIG. 3) in a state where the flexible circuit board is bent. It is a connected line. In addition, the case where the ridgeline L moves a flexible circuit board, such as sliding bending mentioned later, for example, is also included. 3 shows a state in which the resin layer 1 is on the outside and the wiring 2 is bent inward (the side on which a circle having a radius of curvature is inscribed is inward), but the wiring 2 is bent outward. Of course, it may be.

様々な用途において、ある曲率の強制変位を受けるとき、金属箔は、主として引張、又は圧縮の応力を受ける。屈曲を受けた可撓性回路基板の中で、どの部分が引張又は圧縮を受けるかは、金属箔と樹脂の構成にもよるが、引張と圧縮の中立軸(あるいは中立面)より屈曲の外側である、最も遠い部分が金属の破壊で過酷であることが一般的であり、屈曲部における稜線から厚み方向に切った際の配線の断面法線方向への引張応力が主応力となる。すなわち、屈曲部における配線の主応力方向は、図3中に矢印21で示した方向であり、典型的には、屈曲部の稜線から金属箔の厚み方向に切った配線断面Pに対する法線方向と等しく、金属箔の厚み方向に配向した[001]軸と垂直に交わる方向である。   In various applications, when subjected to a forced displacement of a certain curvature, the metal foil is primarily subjected to tensile or compressive stress. Which part of the flexible circuit board that is bent is subjected to tension or compression depends on the configuration of the metal foil and the resin, but is bent from the neutral axis (or neutral surface) of tension and compression. It is common that the outermost part, which is the outermost part, is severe due to the destruction of the metal, and the tensile stress in the normal direction of the cross section of the wiring when cut in the thickness direction from the ridgeline at the bent part becomes the main stress. That is, the main stress direction of the wiring in the bent portion is the direction indicated by the arrow 21 in FIG. 3, and is typically the normal direction to the wiring cross section P cut from the ridge line of the bent portion in the thickness direction of the metal foil. And the direction perpendicular to the [001] axis oriented in the thickness direction of the metal foil.

本発明では、屈曲部の稜線から金属箔の厚み方向に切った配線断面Pに対する法線21が、金属箔面内の基本結晶軸<100>と2.9〜45°の角度を有するようにとる。ただし、結晶の対称性から、本発明の範囲として、屈曲部の稜線から金属箔の厚み方向に切った配線断面Pに対する法線21に対して、金属箔面内の基本結晶軸<100>が2.9〜87.1°の角度を有するように配線を形成すると記述することが出来る。また、屈曲部の稜線と稜線から金属箔の厚み方向に切った配線断面Pに対する法線21とは直交し、また金属箔面内の主方位[100]と[010]は直交することから、本発明の範囲として、金属箔の稜線に対して、金属箔面内の基本結晶軸<100>が2.9〜87.1°の角度を有するように配線を形成すると記述することも出来る。   In the present invention, the normal line 21 to the wiring cross section P cut from the ridgeline of the bent portion in the thickness direction of the metal foil has an angle of 2.9 to 45 ° with the basic crystal axis <100> in the metal foil plane. Take. However, because of the symmetry of the crystal, as the scope of the present invention, the basic crystal axis <100> in the metal foil plane is relative to the normal line 21 with respect to the wiring cross section P cut from the ridgeline of the bent portion in the thickness direction of the metal foil. It can be described that the wiring is formed to have an angle of 2.9 to 87.1 °. Further, since the ridgeline of the bent portion and the normal line 21 to the wiring cross section P cut from the ridgeline in the thickness direction of the metal foil are orthogonal, and the main directions [100] and [010] in the metal foil plane are orthogonal, As the scope of the present invention, it can also be described that the wiring is formed so that the basic crystal axis <100> in the metal foil plane has an angle of 2.9 to 87.1 ° with respect to the ridgeline of the metal foil.

可撓性回路基板内の金属箔の機械特性を考える時、図3中の矢印21で示した主応力方向に金属箔を単純引張したときの応力歪み特性が重要な特性となる。ここで、図4(c)及び(d)の例に示すように、仮に立方晶系の結晶構造を有する金属箔の[100]軸に対して直交する稜線が形成されるように屈曲させた場合、屈曲部での稜線から可撓性回路基板の厚み方向に切った配線の断面は(100)面になるが、本発明者等は、屈曲部における稜線から厚み方向に切った際の配線の断面Pが、図1に示すように、[001]を晶帯軸として(100)から(010)までの回転方向における(20 1 0)から(1 20 0)の範囲(図中の両矢印)に含まれたいずれかの面に主方位をなしていれば、配線の屈曲疲労寿命が延びるという新たな知見を得た。このような屈曲疲労特性の向上がより顕著になる観点から言えば、配線の断面Pが(10 1 0)から(1 10 0)の範囲に含まれたいずれかの面に主方位をなしているのが好ましく、(510)から(150)の範囲に含まれたいずれかの面に主方位をなしているのがより好ましく、(210)から(120)の範囲に含まれたいずれかの面に主方位をなしているのが更に好ましく、最も好適には(40 23 0)もしくは(23 40 0)に主方位をなしているのが良い。なお、図1では(20 1 0)から(1 20 0)の範囲を示したが、立方晶系の結晶構造ではこの範囲に含まれる面と等価な面が存在する。そのため、配線の断面が(20 1 0)から(1 20 0)の範囲に含まれる面と符号の異なる等価な面については本発明に含まれる。   When considering the mechanical characteristics of the metal foil in the flexible circuit board, the stress-strain characteristic when the metal foil is simply pulled in the main stress direction indicated by the arrow 21 in FIG. 3 is an important characteristic. Here, as shown in the examples of FIGS. 4C and 4D, the metal foil having a cubic crystal structure is bent so that a ridge line perpendicular to the [100] axis is formed. In this case, the cross section of the wiring cut in the thickness direction of the flexible circuit board from the ridge line at the bent portion becomes the (100) plane. As shown in FIG. 1, the cross section P of FIG. 1 is in the range of (20 1 0) to (1 200) in the rotational direction from (100) to (010) with [001] as the zone axis (both in the figure New knowledge was obtained that the bending fatigue life of the wiring would be extended if any of the planes included in the arrow) had a main orientation. Speaking from the viewpoint of such remarkable improvement in bending fatigue characteristics, the cross section P of the wiring forms a main orientation on any surface included in the range of (10 10) to (1 100). It is preferable that any of the planes included in the range of (510) to (150) has a main orientation, and any of the ranges included in the range of (210) to (120) It is more preferable that the main direction is formed on the surface, and it is most preferable that the main direction is formed at (40 230) or (23 40 0). In FIG. 1, the range from (20 1 0) to (1 20 0) is shown, but the cubic crystal structure has a plane equivalent to the plane included in this range. Therefore, an equivalent surface having a sign different from that of a surface whose wiring cross section is in the range of (20 1 0) to (1 20 0) is included in the present invention.

本発明においては、屈曲部における稜線から厚み方向に切った際の配線の断面Pが、(20 1 0)から(1 20 0)の間の特定方位に主方位を有して優先配向することで、繰り返しの屈曲に対して疲労特性が優れるのは、断面Pの法線方向、すなわち主応力方向に引張応力を引加した時、例えば面心立方構造を有する金属では、すべり面である8つの{111}のなかでも、シュミット因子が最も大きな主すべり面が4面となることから、せん断滑りが良好になり、局所的な加工硬化が起こり難くなるためである。通常の圧延銅箔では、金属箔の長手方向が圧延方向に相当し、図4(c)や(d)に示すように、その主方位<100>に沿って回路を形成するのが通常である。例えば、特許文献5の実施例は、図4(d)の形態に相当する。このように、屈曲部における稜線から厚み方向に切った際の配線の断面方位を(100)にすると、屈曲させた際、8つのすべり面のシュミット因子が等価となって8つのすべり系が同時に働き、局所的に転位が蓄積し易くなる。このような従来技術との差異のために、本発明の形態をとる可撓性回路基板の耐屈曲特性は、通常の形態に比較して優れる。   In the present invention, the cross section P of the wiring when it is cut in the thickness direction from the ridge line in the bent portion has a main orientation in a specific orientation between (20 1 0) and (1 20 0) and is preferentially oriented. Thus, the fatigue characteristics with respect to repeated bending are excellent when the tensile stress is applied in the normal direction of the cross section P, that is, in the principal stress direction, for example, in the case of a metal having a face-centered cubic structure. This is because, among the two {111}, the main slip surface having the largest Schmid factor is four, so that the shear slip is good and local work hardening is difficult to occur. In normal rolled copper foil, the longitudinal direction of the metal foil corresponds to the rolling direction, and as shown in FIGS. 4C and 4D, it is normal to form a circuit along the main direction <100>. is there. For example, the Example of patent document 5 is equivalent to the form of FIG.4 (d). Thus, when the cross-sectional orientation of the wiring when cutting in the thickness direction from the ridgeline at the bent portion is (100), the eight Schmitt factors of the eight slip planes become equivalent when bent, and the eight slip systems become simultaneous. Dislocations tend to accumulate locally. Because of such a difference from the prior art, the flex circuit resistance of the flexible circuit board taking the form of the present invention is superior to that of the normal form.

本発明の可撓性回路基板における断面Pに関し、最も望ましい方位は、屈曲部の主歪み方向、すなわち屈曲部における稜線から厚み方向に切った際の配線の断面法線方向に対して30°又は60°であるが、これは応力方向が、引張の安定方位と一致するためである。以上の機構を考えた時、金属箔の厚さ方向が必ずしも[001]主方位になっている必要は無く、屈曲部における稜線から厚み方向に切った際の配線の断面Pが、[001]を晶帯軸として、(20 1 0)から(1 20 0)の間の特定方位に主方位を有して優先配向を有していれば良い。   Regarding the cross section P in the flexible circuit board of the present invention, the most desirable orientation is 30 ° with respect to the main strain direction of the bent portion, that is, the normal direction of the cross section of the wiring when cutting from the ridge line in the bent portion in the thickness direction. Although it is 60 °, this is because the stress direction matches the stable orientation of tension. Considering the above mechanism, the thickness direction of the metal foil does not necessarily have to be the [001] main direction, and the cross section P of the wiring when cut in the thickness direction from the ridgeline at the bent portion is [001]. It is only necessary to have a preferential orientation with a main orientation in a specific orientation between (20 1 0) and (1 20 0), where is a zone axis.

本発明において、金属箔は必ずしも単結晶である必要はないが、これまで述べたような効果を得るためには、3次元的に優先配向した集合組織を形成し、その集積度は高いほうが望ましい。例えば金属箔が銅箔の場合、X線回折で求めた上記晶帯軸と垂直な(002)からの強度(I)(ここでは、X線回折における一般的な表記方法に従い(200)面の強度としている)が、微粉末銅のX線回折で求めた(200)面の強度(I0)に対してI/I0≧25である銅箔から所定のパターンを有する配線を形成するがよく、好ましくはI/I0が33〜150の範囲、より好ましくは50〜150の範囲であるのがよい。ここで、パラメータI/I0は(100)と(110)の晶帯軸、すなわち共通軸[001]の配向度を表すものであり、立方体集合組織の発達度を表す客観的な一指標である。そして、金属箔が圧延銅箔の場合、これを一定以上の圧延率で強加工をおこなって、その後、熱を加えて再結晶させると、圧延箔面を(001)主方位、箔面内圧延方向を(100)主方位とする再結晶立方体方位が発達する。銅の再結晶集合組織である立方体方位が発達するほど、銅箔の屈曲疲労寿命が向上する。本発明の可撓性回路基板では、I/I0が25より小さいと配線の屈曲疲労寿命の向上が十分に望めず、I/I0が33以上であれば屈曲疲労寿命の向上が顕著になる。ただし、I/I0が150を超えると、後述するように、再結晶集合組織を得るために例えば焼鈍を行った場合、結果的に熱履歴が大きくなりすぎることになり、配線以外の樹脂層や配線と樹脂層との界面状態に悪影響を及ぼすおそれがある。なお、銅箔の厚み方向のX線回折とは、銅箔の表面(圧延銅箔の場合は圧延面)における配向性を確認するものであり、(200)面の強度(I)はX線回折で求めた(200)面の強度積分値を示す。また、強度(I0)は、微粉末銅(関東化学社製銅粉末試薬I級、325メッシュ)の(200)面の強度積分値を示す。 In the present invention, the metal foil does not necessarily need to be a single crystal, but in order to obtain the effects as described above, it is desirable that a texture is formed that is preferentially oriented three-dimensionally and the degree of integration is higher. . For example, when the metal foil is a copper foil, the intensity (I) from (002) perpendicular to the above-mentioned zone axis determined by X-ray diffraction (here, according to a general notation method in X-ray diffraction, (200) plane The wiring having a predetermined pattern is formed from a copper foil having I / I 0 ≧ 25 with respect to the strength (I 0 ) of the (200) plane obtained by X-ray diffraction of fine powder copper. The I / I 0 is preferably in the range of 33 to 150, more preferably in the range of 50 to 150. Here, the parameter I / I 0 represents the degree of orientation of the zone axes of (100) and (110), that is, the common axis [001], and is an objective index indicating the degree of development of the cube texture. is there. When the metal foil is a rolled copper foil, it is strongly processed at a rolling rate of a certain level or higher, and then recrystallized by applying heat, so that the rolled foil surface is rolled into the (001) main orientation and foil plane. A recrystallized cube orientation with the direction as the (100) principal orientation develops. The bending fatigue life of the copper foil is improved as the cubic orientation, which is the recrystallized texture of copper, develops. In the flexible circuit board of the present invention, if I / I 0 is less than 25, it is not possible to sufficiently improve the bending fatigue life of the wiring. If I / I 0 is 33 or more, the bending fatigue life is remarkably improved. Become. However, when I / I 0 exceeds 150, as described later, for example, when annealing is performed in order to obtain a recrystallized texture, the thermal history becomes too large, and the resin layer other than the wiring In addition, the interface state between the wiring and the resin layer may be adversely affected. The X-ray diffraction in the thickness direction of the copper foil confirms the orientation on the surface of the copper foil (rolled surface in the case of a rolled copper foil), and the strength (I) of the (200) plane is X-ray. The integrated intensity value of the (200) plane obtained by diffraction is shown. The intensity (I 0) shows a fine powder of copper (manufactured by Kanto Chemical Co., Inc. copper powder reagent I grade, 325 mesh) in an intensity integral value of the (200) plane.

I/I0を25以上にするためには、銅箔の再結晶集合組織が得られるようにすればよく、この手段については特に制限はないが、例えば上記特許文献4に記載されるように、最終冷間圧延の直前の焼鈍をこの焼鈍で得られる再結晶粒の平均粒径が5〜20μmとなるような条件で行い、次の最終冷間圧延での圧延加工度を90%以上とすることで、I/I0≧25の圧延銅箔を得ることができる。また、例えば樹脂層と圧延銅箔とを積層させて銅張り積層板を得た後、銅箔に300〜360℃の温度が積算時間で5分以上負荷されるような加熱条件を経ることにより、銅箔の再結晶集合組織を得るようにしてもよい。 In order to increase I / I 0 to 25 or more, a recrystallized texture of the copper foil may be obtained. There is no particular limitation on this means, but for example, as described in Patent Document 4 above The annealing immediately before the final cold rolling is performed under the condition that the average grain size of the recrystallized grains obtained by this annealing is 5 to 20 μm, and the degree of rolling in the next final cold rolling is 90% or more. By doing so, a rolled copper foil with I / I 0 ≧ 25 can be obtained. In addition, for example, after a resin layer and a rolled copper foil are laminated to obtain a copper-clad laminate, the copper foil is subjected to a heating condition such that a temperature of 300 to 360 ° C. is loaded for an integrated time of 5 minutes or more. A recrystallized texture of copper foil may be obtained.

また、集合組織を3次元的な集積度で規定するために、集合組織の主方位に対して10°以内に入る優先配向領域の面積率を用いて特定することもできる。すなわち、金属箔の所定の面がどのような結晶方位を有するかについては、例えばEBSP(Electron Back Scattering Pattern)法、ECP(Electron Channeling Pattern)法等の電子線回折法やマイクロラウエ法等のX線回折法等により確認することができる。なかでも、EBSP法は、測定対象である試料表面に収束電子ビームを照射した際に発生する個々の結晶面から回折される擬菊池線と呼ばれる回折像から結晶を解析し、方位データと測定点の位置情報から測定対象の結晶方位分布を測定する方法であり、X線回折法よりもミクロな領域の集合組織の結晶方位を解析することができる。例えば、個々の微小領域でその結晶方位を特定し、それらをつなぎあわせてマッピングすることができ、各マッピング点間の面方位の傾角(方位差)が一定値以下のものを同色で塗り分け、ほぼ同一の面方位を有する領域(結晶粒)の分布を浮かび上がらせることにより方位マッピング像を得ることができる。また、特定の面方位に対して所定の角度以内の方位を有する方位面を含めてその方位であると規定し、各面方位の存在割合を面積率で抽出することもできる。   Further, in order to define the texture with a three-dimensional degree of integration, the texture can be specified using the area ratio of the preferentially oriented region that falls within 10 ° with respect to the main orientation of the texture. That is, as to what crystal orientation the predetermined surface of the metal foil has, for example, X-ray diffraction method such as EBSP (Electron Back Scattering Pattern) method, ECP (Electron Channeling Pattern) method or X-ray method such as micro Laue method It can be confirmed by a line diffraction method or the like. In particular, the EBSP method analyzes a crystal from a diffraction image called a pseudo Kikuchi line that is diffracted from each crystal plane generated when a focused electron beam is irradiated on the surface of a sample to be measured. This is a method of measuring the crystal orientation distribution of the measurement object from the position information of the above, and it is possible to analyze the crystal orientation of the texture in a microscopic region than the X-ray diffraction method. For example, it is possible to specify the crystal orientation in each minute region, connect them and map them, and separate the ones whose tilt angle (azimuth difference) between each mapping point is below a certain value with the same color, An orientation mapping image can be obtained by highlighting the distribution of regions (crystal grains) having substantially the same plane orientation. It is also possible to define the orientation including the orientation plane having an orientation within a predetermined angle with respect to a specific plane orientation, and to extract the existence ratio of each plane orientation by the area ratio.

EBSP法では、ある特定の方位から、特定の角度以内にある領域の面積率を出すためには、少なくとも本発明の可撓性回路基板における回路屈曲領域より大きな領域で、面積率を出すために十分な点数になるように細かく電子線を走査して、その平均的な情報を得る必要があるが、本発明で対象とする金属箔では、対象とする回路の大きさから考えて、0.005mm2以上の領域において、平均的な面積率を出すために1000点以上測定すればよい。 In the EBSP method, in order to obtain an area ratio of a region within a specific angle from a specific orientation, in order to obtain an area ratio at least in a region larger than the circuit bent region in the flexible circuit board of the present invention. It is necessary to scan the electron beam finely so as to obtain a sufficient number of points to obtain the average information. However, in the metal foil targeted by the present invention, in view of the size of the target circuit, 0. In an area of 005 mm 2 or more, 1000 points or more may be measured in order to obtain an average area ratio.

本発明において、金属箔の箔面が(001)を主方位として優先配向し、かつ屈曲部における稜線から厚み方向に切った際の配線の断面Pが、(20 1 0)から(1 20 0)の間の特定方位に主方位を有するということは、図2に示す(100)標準投影図のステレオ三角形(stereo triangle)上で逆極点表示したとき、屈曲部における稜線から厚み方向に切った際の配線の断面方位が、(20 1 0)を表す点と(110)を表す点とで結ばれた線分上にあるいずれかの面であると言うこともできる。また、本発明の可撓性回路基板は、金属箔の厚み方向が[001]軸である3(2)軸配向した材料から配線を形成し、屈曲部における稜線から厚み方向に切った際の配線の断面法線が、箔面内における[100]軸との間に2.9°から87.1°の範囲の角度を有するものと言うこともできる。   In the present invention, the cross section P of the wiring when the foil surface of the metal foil is preferentially oriented with (001) as the main orientation and is cut in the thickness direction from the ridgeline at the bent portion is from (20 10) to (120 000). ) Has a main direction in a specific direction, when the reverse pole is displayed on the stereo triangle of the (100) standard projection diagram shown in FIG. It can also be said that the cross-sectional orientation of the wiring at that time is any surface on the line segment connected by the point representing (20 10) and the point representing (110). In the flexible circuit board of the present invention, the wiring is formed from a 3 (2) axis-oriented material in which the thickness direction of the metal foil is the [001] axis, and is cut from the ridgeline at the bent portion in the thickness direction. It can also be said that the cross-sectional normal of the wiring has an angle in the range of 2.9 ° to 87.1 ° with the [100] axis in the foil plane.

本発明における可撓性回路基板の樹脂層について、樹脂層を形成する樹脂の種類は特に制限されず、通常の可撓性回路基板で使用されるものを挙げることができ、例えばポリイミド、ポリアミド、ポリエステル、液晶ポリマー、ポリフェニレンサルファイド、ポリエーテルエーテルケトン等を例示することができる。なかでも、回路基板とした場合に良好な可撓性を示し、かつ、耐熱性にも優れることから、ポリイミドや液晶ポリマーが好適である。   Regarding the resin layer of the flexible circuit board in the present invention, the type of resin forming the resin layer is not particularly limited, and examples thereof include those used in ordinary flexible circuit boards, such as polyimide, polyamide, Examples thereof include polyester, liquid crystal polymer, polyphenylene sulfide, polyether ether ketone, and the like. Of these, polyimide and liquid crystal polymer are preferred because they exhibit good flexibility when used as a circuit board and are excellent in heat resistance.

樹脂層の厚さは、可撓性回路基板の用途、形状等に応じて適宜設定することができるが、可撓性の観点から5〜75μmの範囲であるのが好ましく、9〜50μmの範囲がより好ましく、10〜30μmの範囲が最も好ましい。樹脂層の厚さが5μmに満たないと、絶縁信頼性が低下するおそれがあり、反対に75μmを超えると小型機器等へ搭載する場合に回路基板全体の厚みが厚くなり過ぎるおそれがあり、屈曲性の低下も考えられる。   The thickness of the resin layer can be appropriately set according to the use, shape, etc. of the flexible circuit board, but is preferably in the range of 5 to 75 μm and in the range of 9 to 50 μm from the viewpoint of flexibility. Is more preferable, and the range of 10 to 30 μm is most preferable. If the thickness of the resin layer is less than 5 μm, the insulation reliability may decrease. On the other hand, if it exceeds 75 μm, the thickness of the entire circuit board may be too thick when mounted on a small device, etc. A decline in sex is also possible.

樹脂層と金属箔とを積層させる手段については、例えば樹脂層がポリイミドからなる場合、ポリイミドフィルムに熱可塑性のポリイミドを塗布し又は介在させて金属箔を熱ラミネートするようにしてもよい(所謂ラミネート法)。ラミネート法で用いられるポリイミドフィルムとしては、例えば、”カプトン”(東レ・デュポン株式会社)、”アピカル”(鐘淵化学工業株式会社)、”ユーピレックス”(宇部興産株式会社)等が例示できる。ポリイミドフィルムと金属箔とを加熱圧着する際には、熱可塑性を示す熱可塑性ポリイミド樹脂を介在させるのがよい。また、樹脂層の厚みや折り曲げ特性等を制御しやすい観点から、金属箔にポリイミド前駆体溶液(ポリアミド酸溶液ともいう)を塗布した後、乾燥・硬化させて積層体を得てもよい(所謂キャスト法)。   Regarding the means for laminating the resin layer and the metal foil, for example, when the resin layer is made of polyimide, the metal foil may be thermally laminated by applying or interposing a thermoplastic polyimide to the polyimide film (so-called laminating). Law). Examples of the polyimide film used in the laminating method include “Kapton” (Toray DuPont Co., Ltd.), “Apical” (Kanebuchi Chemical Industry Co., Ltd.), “Upilex” (Ube Industries Co., Ltd.), and the like. When the polyimide film and the metal foil are heat-bonded, a thermoplastic polyimide resin exhibiting thermoplasticity is preferably interposed. In addition, from the viewpoint of easy control of the thickness and bending characteristics of the resin layer, a polyimide precursor solution (also referred to as a polyamic acid solution) may be applied to the metal foil, and then dried and cured to obtain a laminate (so-called “so-called”). Cast method).

樹脂層は、複数の樹脂を積層させて形成してもよく、例えば線膨張係数等の異なる2種類以上のポリイミドを積層させるようにしてもよいが、その際には耐熱性や屈曲性を担保する観点から、エポキシ樹脂等を接着剤として使用することなく、樹脂層のすべてが実質的にポリイミドから形成されるようにするのが望ましい。   The resin layer may be formed by laminating a plurality of resins. For example, two or more kinds of polyimides having different linear expansion coefficients may be laminated, and in that case, heat resistance and flexibility are ensured. In view of the above, it is desirable that substantially all of the resin layer is formed of polyimide without using an epoxy resin or the like as an adhesive.

本発明の可撓性回路基板では、樹脂層の線膨張係数が10〜30ppm/℃の範囲となるようにするのが好ましい。樹脂層が複数の樹脂からなる場合には、樹脂層全体の線膨張係数がこの範囲になるようにすればよい。このような条件を満たすためには、例えば、線膨張係数が25ppm/℃以下、好ましくは5〜20ppm/℃の低線膨張性ポリイミド層と、線膨張係数が26ppm/℃以上、好ましくは30〜80ppm/℃の高線膨張性ポリイミド層とからなる樹脂層であって、これらの厚み比を調整することによって10〜30ppm/℃のものとすることができる。好ましい低線膨張性ポリイミド層と高線膨張性ポリイミド層の厚みの比は70:30〜95:5の範囲である。また、低線膨張性ポリイミド層は、樹脂層の主たる樹脂層となり、高線膨張性ポリイミド層は金属箔と接するように設けることが好ましい。なお、線膨張係数は、イミド化反応が十分に終了したポリイミドを試料とし、サーモメカニカルアナライザー(TMA)を用いて250℃に昇温後、10℃/分の速度で冷却し、240〜100℃の範囲における平均の線膨張係数から求めることができる。   In the flexible circuit board of the present invention, the linear expansion coefficient of the resin layer is preferably in the range of 10 to 30 ppm / ° C. When the resin layer is made of a plurality of resins, the linear expansion coefficient of the entire resin layer may be in this range. In order to satisfy such conditions, for example, a low linear expansion polyimide layer having a linear expansion coefficient of 25 ppm / ° C. or less, preferably 5 to 20 ppm / ° C., and a linear expansion coefficient of 26 ppm / ° C. or more, preferably 30 to It is a resin layer composed of a high linear expansion polyimide layer of 80 ppm / ° C., and can be adjusted to 10 to 30 ppm / ° C. by adjusting the thickness ratio thereof. A preferred ratio of the thickness of the low linear expansion polyimide layer to the high linear expansion polyimide layer is in the range of 70:30 to 95: 5. The low linear expansion polyimide layer is the main resin layer of the resin layer, and the high linear expansion polyimide layer is preferably provided so as to be in contact with the metal foil. In addition, the linear expansion coefficient is obtained by using polyimide with the imidization reaction sufficiently completed as a sample, raising the temperature to 250 ° C. using a thermomechanical analyzer (TMA), cooling at a rate of 10 ° C./min, and 240 to 100 ° C. It can obtain | require from the average linear expansion coefficient in the range.

また、本発明における可撓性回路基板は、樹脂層と金属箔から形成された配線とを備え、いずれかに屈曲部を有して使用されるものである。すなわち、ハードディスク内の可動部、携帯電話のヒンジ部やスライド摺動部、プリンターのヘッド部、光ピックアップ部、ノートPCの可動部などをはじめ各種電子・電気機器等で幅広く使用され、回路基板自体が折り曲げられたり、ねじ曲げられたり、或いは搭載された機器の動作に応じて変形したりして、いずれかに屈曲部が形成されるものである。特に、本発明の可撓性回路基板は屈曲耐久性に優れた屈曲部構造を有することから、摺動屈曲、折り曲げ屈曲、ヒンジ屈曲、スライド屈曲等の繰り返し動作を伴い頻繁に折り曲げられたりする場合や、或いは搭載される機器の小型化に対応すべく、曲率半径が折り曲げ挙動で0.38〜2.0mmであり、摺動屈曲で1.25〜2.0mmであり、ヒンジ屈曲で3.0〜5.0mmであり、スライド屈曲で0.3〜2.0mmであるような厳しい使用条件の場合に好適であり、0.3〜1mmの狭いギャップで屈曲性能の要求が厳しいスライド用途において特に効果を発揮する。   Moreover, the flexible circuit board in this invention is equipped with the wiring formed from the resin layer and metal foil, and has a bending part in any one, and is used. In other words, it is widely used in various electronic and electrical devices such as movable parts in hard disks, hinges and slides of mobile phones, printer heads, optical pickups, movable parts of notebook PCs, etc., and the circuit board itself Is bent, twisted, or deformed according to the operation of the mounted device, and a bent portion is formed in either of them. In particular, since the flexible circuit board of the present invention has a bent portion structure with excellent bending durability, it is frequently bent with repeated operations such as sliding bending, bending bending, hinge bending, and sliding bending. In addition, in order to cope with the downsizing of devices to be mounted, the radius of curvature is 0.38 to 2.0 mm in bending behavior, 1.25 to 2.0 mm in sliding bending, and 3. 0 to 5.0 mm, suitable for severe use conditions such as 0.3 to 2.0 mm in slide bending, and in slide applications where bending performance is severe with a narrow gap of 0.3 to 1 mm Especially effective.

本発明における可撓性回路基板の製造方法の一つは、[001]軸が最終的に箔面法線(金属箔の表面に対する垂線)に配向する立方体集合組織を呈する圧延金属箔と樹脂層とが金属箔の箔面で貼り合わされた複合体を製造し、設計上の屈曲の主応力方向、すなわち屈曲部における稜線から厚み方向に切った際の配線の断面法線方向を、金属箔面内の[100]主方位に対して2.9°〜87.1°の角度を有して屈曲部の稜線が形成されるように配線すればよい。金属箔は、必ずしも始めから立方体集合組織を呈している必要な無く、熱処理によって立方体集合組織が形成するようにしてもよく、例えば可撓性回路基板の製造過程、具体的には樹脂層の形成過程で熱処理されて、立方体集合組織が形成するようにしてもよい。すなわち、熱処理することで、<100>軸から方位差10°以内の領域が面積比50%以上を占めるように、単位格子の基本結晶軸<100>のひとつを金属箔の厚さ方向に優先配向させると共に、<100>軸から方位差10°以内の領域が面積比50%以上を占めるように、基本結晶軸<100>の別のひとつを金属箔の表面に対して水平方向に優先配向させるようにすればよい。圧延銅箔の再結晶集合組織は、通常、圧延面方位が{100}であり、圧延方向が<100>である。したがって、圧延面方位として(001)主方位が形成されるので、屈曲部における稜線が、金属箔の面内の基本結晶軸<001>のひとつと2.9〜87.1°の角度を有するように、すなわち、圧延方向に2.9°〜87.1°の角度を有して屈曲部の稜線が形成されるように配線すればよい。   One of the methods for producing a flexible circuit board in the present invention is that a rolled metal foil and a resin layer exhibit a cubic texture in which the [001] axis is finally oriented in the normal direction of the foil surface (perpendicular to the surface of the metal foil) And the metal foil surface, the principal stress direction of the design bending, that is, the normal direction of the cross section of the wiring when cutting from the ridge line at the bent portion in the thickness direction is manufactured. What is necessary is just to wire so that the ridgeline of a bending part may be formed at an angle of 2.9 ° to 87.1 ° with respect to the [100] main orientation. The metal foil does not necessarily have to exhibit a cubic texture from the beginning, and may be formed by a heat treatment, for example, a manufacturing process of a flexible circuit board, specifically, formation of a resin layer. A cubic texture may be formed by heat treatment in the process. That is, by heat treatment, one of the basic crystal axes <100> of the unit cell is given priority in the thickness direction of the metal foil so that the area within 10 ° from the <100> axis occupies an area ratio of 50% or more. In addition to the orientation, another one of the basic crystal axes <100> is preferentially oriented in the horizontal direction with respect to the surface of the metal foil so that the area within 10 ° from the <100> axis occupies an area ratio of 50% or more. You can make it. The recrystallized texture of the rolled copper foil usually has a rolling plane orientation of {100} and a rolling direction of <100>. Therefore, since the (001) main orientation is formed as the rolling plane orientation, the ridge line in the bent portion has an angle of 2.9 to 87.1 ° with one of the basic crystal axes <001> in the plane of the metal foil. In other words, wiring may be performed so that the ridgeline of the bent portion is formed with an angle of 2.9 ° to 87.1 ° in the rolling direction.

図3に示すように、例えば可撓性回路基板をU字状に屈曲させると、その外側(曲率半径を有した内接円が形成される方とは反対側)に稜線Lが形成されるが、この稜線Lが、配線を形成する金属箔の[100]軸と直交した状態からα=2.9〜87.1(°)の範囲で傾きを有するようにすればよい。このような状態の例を図4の(a)及び(b)に示す。ちなみに、図4の(c)及び(d)は[100]軸に対し稜線が直交した状態(α=0)である。ここで、αが2.9°未満であると屈曲性において明確な効果が確認されない。α=11.4〜78.6(°)であれば屈曲部構造の屈曲耐久性がより一層向上する。なお、本発明においては、上記α=2.9°の場合に稜線から厚みd方向に切った際の配線の断面Pは(20 1 0)面に相当し、α=45の場合には断面Pが(110)面に相当し、α=87.1の場合には断面Pが(1 20 0)面に相当する。また、立方晶においては、[100]と[010]は等価であるから、図4(a)及び(b)に示すような[100]の箔面内直交軸と稜線のなす角αの角度範囲は、[100]と断面P法線のなす角度範囲、及び[100]と稜線のなす角度範囲と一致する。   As shown in FIG. 3, for example, when a flexible circuit board is bent in a U shape, a ridge line L is formed on the outer side (the side opposite to the side where an inscribed circle having a radius of curvature is formed). However, the ridgeline L may be inclined in a range of α = 2.9 to 87.1 (°) from a state orthogonal to the [100] axis of the metal foil forming the wiring. An example of such a state is shown in FIGS. Incidentally, (c) and (d) of FIG. 4 are states (α = 0) in which the ridge line is orthogonal to the [100] axis. Here, when α is less than 2.9 °, a clear effect on flexibility is not confirmed. When α = 11.4 to 78.6 (°), the bending durability of the bent portion structure is further improved. In the present invention, when α = 2.9 °, the cross section P of the wiring when cut from the ridge line in the thickness d direction corresponds to the (20 10) plane, and when α = 45, the cross section P corresponds to the (110) plane, and when α = 87.1, the cross section P corresponds to the (1 200) plane. In addition, in the cubic crystal, [100] and [010] are equivalent, and therefore, the angle α formed by the orthogonal axis in the foil plane of [100] and the ridge line as shown in FIGS. 4 (a) and 4 (b). The range coincides with the angle range formed by [100] and the cross-section P normal line, and the angle range formed by [100] and the ridge line.

配線の幅、形状、パターン等については特に制限はなく、可撓性回路基板の用途、搭載される電子機器等に応じて適宜設計すればよいが、本発明の屈曲部構造は屈曲耐久性に優れることから、例えば配線に対する曲げ応力を小さくするためにヒンジ部の回動軸に対して斜め方向に配線するようなことをあえてする必要がなく、屈曲部における稜線に対して直交する方向に沿った配線、すなわち必要最小限の最短距離での配線が可能である。例えば、図4(a)及び(b)は、携帯電話のヒンジ部等に使用される可撓性回路基板であり、樹脂層1と金属箔から形成した配線2とコネクタ端子3とを有する例である。図4(a)及び(b)のいずれも、中央付近に屈曲部における稜線Lの位置を示しており、この稜線Lは、配線2を形成する金属箔の[100]軸方向に対して(90+α)°の角度を有する。ここで、図4(a)は、両端のコネクタ端子3の途中、稜線L付近で配線が斜めに形成された例であるが、図4(b)のようにコネクタ端子3間を最短距離で配線することも可能である。なお、折り畳み式携帯電話等のように、屈曲部における稜線Lの位置が固定される場合のほか、スライド式携帯電話等のように屈曲部における稜線Lが移動するようなスライド摺動屈曲(図4(b)に記した太線矢印方向)であってもよい。   The width, shape, pattern, etc. of the wiring are not particularly limited, and may be appropriately designed according to the use of the flexible circuit board, the electronic device to be mounted, etc. For example, in order to reduce the bending stress on the wiring, it is not necessary to dare to wire in an oblique direction with respect to the rotation axis of the hinge portion, and the direction along the direction perpendicular to the ridgeline at the bent portion is not necessary. Wiring, that is, wiring with the minimum necessary minimum distance is possible. For example, FIGS. 4 (a) and 4 (b) are examples of a flexible circuit board used for a hinge portion of a mobile phone and the like, which has a resin layer 1, a wiring 2 formed from a metal foil, and a connector terminal 3. It is. 4A and 4B show the position of the ridge line L in the bent portion near the center, and this ridge line L is (with respect to the [100] axis direction of the metal foil forming the wiring 2 ( 90 + α) °. Here, FIG. 4A is an example in which the wiring is formed obliquely in the vicinity of the ridge line L in the middle of the connector terminals 3 at both ends. However, as shown in FIG. Wiring is also possible. In addition to the case where the position of the ridge line L in the bent portion is fixed as in a folding mobile phone, the slide sliding bend in which the ridge line L in the bent portion moves as in a slide type mobile phone (see FIG. 4 (b) may be the direction of the thick arrow).

また、本発明における可撓性回路基板は、樹脂層の少なくとも片面に金属箔からなる配線を備えるが、必要に応じて樹脂層の両面に金属箔を備えるようにしてもよい。この際、いずれの金属箔とも屈曲部における稜線から厚み方向に切った際の配線の断面が、本発明で言う所定の面となるようにするのが望ましい。   Moreover, although the flexible circuit board in this invention is equipped with the wiring which consists of metal foils on at least one surface of a resin layer, you may make it equip both surfaces of a resin layer with metal foil as needed. At this time, it is desirable that the cross section of the wiring when any metal foil is cut in the thickness direction from the ridge line at the bent portion is a predetermined surface in the present invention.

以下、実施例及び比較例に基づき、本発明をより具体的に説明する。なお、実施例等で用いた銅箔の種類及びポリアミド酸溶液の合成は次のとおりである。   Hereinafter, based on an Example and a comparative example, the present invention is explained more concretely. In addition, the synthesis | combination of the kind of copper foil used in the Example etc. and a polyamic-acid solution is as follows.

[銅箔A]
日鉱金属株式会社製圧延銅箔(商品名BHYA-72F-HA)、厚さ12μm。
[銅箔B]
福田金属株式会社製圧延銅箔(商品名ROFD-T4X)、厚さ12μm。
[銅箔C]
日鉱金属株式会社製圧延銅箔(商品名BHY-22B-T)、厚さ18μm。
[銅箔D]
古河サーキットフォイル株式会社製電解銅箔(商品名U-WZ)、厚さ9μm。
[Copper foil A]
Rolled copper foil (trade name BHYA-72F-HA) manufactured by Nikko Metal Co., Ltd., thickness 12 μm.
[Copper foil B]
Rolled copper foil (trade name ROFD-T4X) manufactured by Fukuda Metal Co., Ltd., thickness 12 μm.
[Copper foil C]
Rolled copper foil (trade name BHY-22B-T) manufactured by Nikko Metal Co., Ltd., thickness 18 μm.
[Copper foil D]
Furukawa Circuit Foil Co., Ltd. electrolytic copper foil (trade name U-WZ), thickness 9μm.

[ポリアミド酸溶液の合成]
(合成例1)
熱電対及び攪拌機を備えると共に窒素導入が可能な反応容器に、N,N−ジメチルアセトアミドを入れた。この反応容器に2,2-ビス[4-(4-アミノフェノキシ)フェニル]プロパン(BAPP)を容器中で撹拌しながら溶解させた。次に、ピロメリット酸二無水物(PMDA)を加えた。モノマーの投入総量が15wt%となるように投入した。その後、3時間撹拌を続け、ポリアミド酸aの樹脂溶液を得た。このポリアミド酸aの樹脂溶液の溶液粘度は3,000cpsであった。
[Synthesis of polyamic acid solution]
(Synthesis Example 1)
N, N-dimethylacetamide was placed in a reaction vessel equipped with a thermocouple and a stirrer and capable of introducing nitrogen. 2,2-bis [4- (4-aminophenoxy) phenyl] propane (BAPP) was dissolved in the reaction vessel with stirring. Next, pyromellitic dianhydride (PMDA) was added. The total amount of monomers charged was 15 wt%. Thereafter, stirring was continued for 3 hours to obtain a resin solution of polyamic acid a. The solution viscosity of this polyamic acid a resin solution was 3,000 cps.

(合成例2)
熱電対及び攪拌機を備えると共に窒素導入が可能な反応容器に、N,N−ジメチルアセトアミドを入れた。この反応容器に2,2'−ジメチル−4,4'−ジアミノビフェニル(m−TB)を投入した。次に3,3',4,4'−ビフェニルテトラカルボン酸二無水物(BPDA)及びピロメリット酸二無水物(PMDA)を加えた。モノマーの投入総量が15wt%で、各酸無水物のモル比率(BPDA:PMDA)が20:80となるように投入した。その後、3時間撹拌を続け、ポリアミド酸bの樹脂溶液を得た。このポリアミド酸bの樹脂溶液の溶液粘度は20,000cpsであった。
(Synthesis Example 2)
N, N-dimethylacetamide was placed in a reaction vessel equipped with a thermocouple and a stirrer and capable of introducing nitrogen. 2,2′-Dimethyl-4,4′-diaminobiphenyl (m-TB) was charged into the reaction vessel. Next, 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride (BPDA) and pyromellitic dianhydride (PMDA) were added. The total amount of monomers charged was 15 wt%, and the molar ratio of each acid anhydride (BPDA: PMDA) was 20:80. Thereafter, stirring was continued for 3 hours to obtain a resin solution of polyamic acid b. The solution viscosity of this polyamic acid b resin solution was 20,000 cps.

[実施例1]
銅箔Aに上記で準備したポリアミド酸溶液aを塗布し、乾燥させ(硬化後は膜厚2μmの熱可塑性ポリイミドを形成)、そのうえにポリアミド酸bを塗布し、乾燥させ(硬化後は膜厚12μmの低熱熱膨張性ポリイミドを形成)、更にその上にポリアミド酸aを塗布し乾燥させ(硬化後は膜厚2μmの熱可塑性ポリイミドを形成)、300〜360℃の温度が積算時間で5分以上負荷されるような加熱条件を経て3層構造からなるポリイミド層を形成した。次いで、銅箔Aの圧延方向(MD方向)に沿って長さ250mm、圧延方向に対して直交する方向(TD方向)に幅150mmの長方形サイズとなるように切り出し、図5に示すように、厚さ16μmのポリイミド層(樹脂層)1と厚さ12μmの銅箔2とを有した片面銅張積層板4を得た。
[Example 1]
The polyamic acid solution a prepared above is applied to copper foil A and dried (after curing, a 2 μm-thick thermoplastic polyimide film is formed), and then polyamic acid b is applied and dried (after curing, a film thickness of 12 μm) Of low thermal thermal expansion polyimide), and further coated with polyamic acid a and dried (forms a 2 μm thick thermoplastic polyimide after curing), and the temperature of 300 to 360 ° C. is 5 minutes or more in accumulated time. A polyimide layer having a three-layer structure was formed through heating conditions that were loaded. Next, cut along the rolling direction (MD direction) of the copper foil A to a rectangular size of 250 mm in length and 150 mm in width in the direction orthogonal to the rolling direction (TD direction), as shown in FIG. A single-sided copper-clad laminate 4 having a polyimide layer (resin layer) 1 having a thickness of 16 μm and a copper foil 2 having a thickness of 12 μm was obtained.

得られた片面銅張積層板4について、銅箔2の圧延面2aのX線回折で得た(200)面の強度積分値から強度(I)を求め、この値を予め測定しておいた純微粉末銅(関東化学社製銅粉末試薬I級、325メッシュ)の(200)面の強度積分値から求めた強度(I0)で割り、I/I0を計算したところ61であった。なお、X線回折には極点図測定装置RINT−2000型(理学電機社製)を用い、Mo−Kαターゲットを用い管電圧60kV、管電流200mAの条件でそれぞれの(200)面の強度積分値を求め、純銅粉固化体回折強度に対する倍率から強度比を求めた。 About the obtained single-sided copper clad laminated board 4, intensity | strength (I) was calculated | required from the intensity | strength integral value of the (200) plane obtained by the X-ray diffraction of the rolling surface 2a of the copper foil 2, and this value was measured beforehand. It was 61 when I / I 0 was calculated by dividing by the intensity (I 0 ) obtained from the intensity integrated value of (200) plane of pure fine powder copper (copper powder reagent class I, 325 mesh manufactured by Kanto Chemical Co., Inc.). . For X-ray diffraction, a pole figure measuring device RINT-2000 type (manufactured by Rigaku Corporation) is used, an Mo-Kα target is used, the tube voltage is 60 kV, and the tube current is 200 mA. The intensity ratio was determined from the magnification with respect to the pure copper powder solidified diffraction intensity.

また、日立製作所製FE−SEM(S-4100)を用いて、EBSPによる銅箔の圧延面2aの結晶方位を測定した。測定領域はおよそ150μm×75μmの領域であり、測定時加速電圧20kV、測定ステップ間隔0.5μmとした。EBSPの測定及び解析には、TSL社製OIM Analysis 5.2とEBSP解析ソフトOIM4.6を用いた。また、得られた銅張積層板の表面をポリッシャー(SM09010:JEOL)でイオン研磨し、銅箔圧延面2aの結晶方位を確認したところ逆極点図において(001)面への強い配向性が確認された。また、EBSP測定において、特定の方位面に対し10°以内の方位を有する方位を抽出したところ、(001)面の面積割合が全測定面積の50%以上を占めたことから、この圧延面2aは(001)面が支配的であった。図7(a)はこの際得られた圧延面2aの箔面方位の逆極点マッピング像である。図7(c)はマッピングのカラーコンターである。同様にして銅箔2の圧延(MD)方位の結晶方位を解析したところ、(100)面への強い配向性が確認され、また、(100)面の面積割合が全測定面積の50%以上を占めたことから、圧延(MD)方位は(100)面が支配的であった。図7(b)は銅箔のMD方位の逆極点マッピング像である。これらの結果より、銅箔2の圧延面2a及び側面2bがいずれも{100}面が支配的であることから、銅箔2の圧延方向(MD方向)に沿って主に銅の[100]軸を有すると言うことができる。なお、実施例等では特に断りのない限り、MD主方位面を(100)と表記し、また、MD主方位を[100]と表記する。   Moreover, the crystal orientation of the rolling surface 2a of the copper foil by EBSP was measured using Hitachi FE-SEM (S-4100). The measurement area was an area of about 150 μm × 75 μm, and the measurement acceleration voltage was 20 kV and the measurement step interval was 0.5 μm. For measurement and analysis of EBSP, OIM Analysis 5.2 and EBSP analysis software OIM 4.6 manufactured by TSL were used. Also, the surface of the obtained copper clad laminate was ion-polished with a polisher (SM09010: JEOL), and the crystal orientation of the copper foil rolled surface 2a was confirmed. As a result, a strong orientation toward the (001) plane was confirmed in the reverse pole figure. It was done. Further, in the EBSP measurement, when an orientation having an orientation within 10 ° with respect to a specific orientation plane was extracted, the area ratio of the (001) plane occupied 50% or more of the total measurement area. The (001) plane was dominant. FIG. 7A is an inverse pole mapping image of the foil surface orientation of the rolled surface 2a obtained at this time. FIG. 7C shows a mapping color contour. Similarly, when the crystal orientation of the rolled (MD) orientation of the copper foil 2 was analyzed, strong orientation to the (100) plane was confirmed, and the area ratio of the (100) plane was 50% or more of the total measurement area. Therefore, the (100) plane was dominant in the rolling (MD) orientation. FIG. 7B is a reverse pole mapping image of the MD orientation of the copper foil. From these results, since both the rolling surface 2a and the side surface 2b of the copper foil 2 are dominant in the {100} plane, the copper [100] is mainly formed along the rolling direction (MD direction) of the copper foil 2. It can be said that it has an axis. In Examples and the like, unless otherwise specified, the MD main azimuth plane is expressed as (100), and the MD main azimuth is expressed as [100].

そして、上記で得られた片面銅張積層板4の銅箔2側に所定のマスクを被せ、塩化鉄/塩化銅系溶液を用いてエッチングを行い、図6に示すように、線幅(l)150μmの直線状の配線2の配線方向H(H方向)がMD方向([100]軸)に対して45°の角度を有するようにし、かつ、スペース幅(s)250μmで配線パターンを形成した。そして、後述する耐屈曲試験用のサンプルを兼ねるように、JIS 6471に準じて、回路基板の配線方向Hに沿って長手方向に15cm、配線方向Hに直交する方向に幅1.5cmを有する試験用可撓性回路基板5を得た。   Then, a predetermined mask is put on the copper foil 2 side of the single-sided copper clad laminate 4 obtained above, and etching is performed using an iron chloride / copper chloride solution. As shown in FIG. ) The wiring direction H (H direction) of the linear wiring 2 of 150 μm has an angle of 45 ° with respect to the MD direction ([100] axis), and a wiring pattern is formed with a space width (s) of 250 μm. did. And a test having a length of 15 cm in the longitudinal direction along the wiring direction H of the circuit board and a width of 1.5 cm in the direction perpendicular to the wiring direction H according to JIS 6471 so that it also serves as a sample for a bending resistance test described later. A flexible circuit board 5 was obtained.

上記で得られた試験用可撓性回路基板5を用い、JIS C5016に準じてMIT屈曲試験を行った。装置は東洋精機製作所製(STROGRAPH-R1)を使用し、試験用可撓性回路基板5の長手方向の一端を屈曲試験装置のくわえ治具に固定し、他端をおもりで固定して、くわえ部を中心として、振動速度150回/分の条件で左右に交互に135±5度ずつ回転させながら、曲率半径0.8mmとなるように屈曲させ、回路基板5の配線2の導通が遮断されるまでの回数を屈曲回数として求めた。この際、図6に示すように、屈曲部に形成される稜線Lが試験用可撓性回路基板5の配線2の配線方向Hに対して直交するようにして試験を行ったところ、屈曲回数2200回目に配線2が屈曲部の稜線L付近で破線したことが確認された。結果を表1に示す。   Using the test flexible circuit board 5 obtained above, an MIT flex test was performed according to JIS C5016. The equipment is manufactured by Toyo Seiki Seisakusho (STROGRAPH-R1), one end of the test flexible circuit board 5 in the longitudinal direction is fixed to the holding jig of the bending test apparatus, and the other end is fixed with a weight. The wire 2 on the circuit board 5 is cut off from conduction while being rotated to 135 ± 5 degrees alternately left and right at a vibration speed of 150 times / min. Was determined as the number of flexing. At this time, as shown in FIG. 6, the test was performed so that the ridge line L formed in the bent portion was orthogonal to the wiring direction H of the wiring 2 of the test flexible circuit board 5. It was confirmed that the wiring 2 was broken in the vicinity of the ridge line L of the bent portion at the 2200th time. The results are shown in Table 1.

ここで、本実施例に係る試験用可撓性回路基板5では、銅の[100]軸に対して配線方向Hが45°傾くようにして配線2を形成しており、この屈曲試験における稜線Lから回路基板5の厚み方向に切った際の配線2の断面は(110)面であると言うことができる。すなわち、本実施例では圧延面2aが(001)面であり、側面2bが(010)面であることから、この銅箔の結晶組織は、立方晶が銅箔面のMD方向([100]軸)に並んでいるということができ、また、表2に示すように、立方晶の場合の(100)面と(h222)面との間の角度の関係は知られていることから、本実施例における稜線Lから回路基板5の厚み方向に切った断面は(110)面であると言うことができる。なお、表2中の数値はPhys.Rev.26,390(1925)より引用した。 Here, in the test flexible circuit board 5 according to this example, the wiring 2 is formed so that the wiring direction H is inclined by 45 ° with respect to the [100] axis of copper, and the ridge line in this bending test It can be said that the cross section of the wiring 2 when cut from L in the thickness direction of the circuit board 5 is the (110) plane. That is, in this example, the rolling surface 2a is the (001) surface and the side surface 2b is the (010) surface, so that the crystal structure of this copper foil is the MD direction of the copper foil surface ([100] In addition, as shown in Table 2, the angular relationship between the (100) plane and the (h 2 k 2 l 2 ) plane is known as shown in Table 2. Therefore, it can be said that the cross section cut in the thickness direction of the circuit board 5 from the ridge line L in this embodiment is the (110) plane. The numerical values in Table 2 are Phys. Rev. 26, 390 (1925).

Figure 0004763068
Figure 0004763068

Figure 0004763068
Figure 0004763068

[実施例2〜5]
銅箔Aに対し、実施例1と同様にしてポリイミド層を形成し、片面銅張積層板4を得た。そして、得られた片面銅張積層板4について、MD方向([100]軸)に対する配線方向Hの角度を表1に示すようにした以外は実施例1と同様にして、各試験用可撓性回路基板5を準備した。得られた回路基板5を用いて実施例1と同様にしてMIT屈曲試験を行った。結果を表1に示す。
[Examples 2 to 5]
A polyimide layer was formed on the copper foil A in the same manner as in Example 1 to obtain a single-sided copper-clad laminate 4. And about the obtained single-sided copper clad laminated board 4, each test flexible was carried out similarly to Example 1 except having made the angle of the wiring direction H with respect to MD direction ([100] axis | shaft) shown in Table 1. Circuit board 5 was prepared. Using the obtained circuit board 5, the MIT bending test was conducted in the same manner as in Example 1. The results are shown in Table 1.

[実施例6〜8]
銅箔Aの表面処理面にポリイミド層を形成する際の加熱条件において、加熱積算時間を2分にした以外は実施例1と同様にして、実施例6〜8に係る片面銅張積層板4を得た。得られた各片面銅張積層板4について、実施例1と同様にしてI/I0を求めたところ43であった。また、得られた片面銅張積層板4について、実施例1と同様にして、EBSP法により銅箔の圧延面2a方位(MD方位)及び側面2b方位(TD方位)の結晶方位を解析したところ、いずれも{100}面が支配的であったことから、これら実施例6〜8に係る片面銅張積層板4は、銅箔2の圧延方向(MD方向)は銅の[100]軸を有することが確認された。
[Examples 6 to 8]
Single-sided copper-clad laminates 4 according to Examples 6 to 8 in the same manner as in Example 1 except that the heating integration time was set to 2 minutes in the heating conditions for forming the polyimide layer on the surface-treated surface of the copper foil A. Got. For each single-sided copper-clad laminate 4 obtained was 43 was determined the I / I 0 in the same manner as in Example 1. The obtained single-sided copper clad laminate 4 was analyzed for the crystal orientation of the rolled surface 2a orientation (MD orientation) and side surface 2b orientation (TD orientation) of the copper foil by the EBSP method in the same manner as in Example 1. Since the {100} plane was dominant in each case, the single-sided copper-clad laminate 4 according to Examples 6 to 8 had a copper [100] axis in the rolling direction (MD direction) of the copper foil 2. It was confirmed to have.

そして、上記で得られた片面銅張積層板4について、MD方向([100]軸)に対する配線方向Hの角度を表1に示すようにした以外は実施例1と同様にして、各試験用可撓性回路基板5を準備した。得られた回路基板5を用い、実施例1と同様にしてMIT屈曲試験を行った。結果を表1に示す。   And about the single-sided copper clad laminated board 4 obtained above, it is for each test similarly to Example 1 except having made the angle of the wiring direction H with respect to MD direction ([100] axis | shaft) shown in Table 1. A flexible circuit board 5 was prepared. Using the obtained circuit board 5, the MIT bending test was performed in the same manner as in Example 1. The results are shown in Table 1.

[実施例9〜11]
銅箔Bを用い、かつ、銅箔Bの表面処理面にポリイミド層を形成する際の加熱条件における加熱積算時間を2分にした以外は実施例1と同様にして、実施例9〜11に係る片面銅張積層板4を得た。得られた各片面銅張積層板4について、実施例1と同様にしてI/I0を求めたところ33であった。また、これら片面銅張積層板4について、実施例1と同様にして、EBSP法により銅箔の圧延面2a及び側面2bの結晶方位を解析したところ、いずれも(100)面が支配的であったことから、実施例9〜11に係る片面銅張積層板4は、銅箔2の圧延方向(MD方向)は銅の[100]軸を有することが確認された。
[Examples 9 to 11]
Examples 9 to 11 were performed in the same manner as in Example 1 except that the copper foil B was used and the heating integration time in the heating condition when forming the polyimide layer on the surface-treated surface of the copper foil B was set to 2 minutes. Such a single-sided copper-clad laminate 4 was obtained. For each single-sided copper-clad laminate 4 obtained, it was 33 was determined the I / I 0 in the same manner as in Example 1. Further, when the crystal orientations of the rolled surface 2a and side surface 2b of the copper foil were analyzed by the EBSP method for these single-sided copper clad laminates 4 in the same manner as in Example 1, the (100) plane was dominant. From this, it was confirmed that the single-sided copper clad laminate 4 according to Examples 9 to 11 has a [100] axis of copper in the rolling direction (MD direction) of the copper foil 2.

そして、上記で得られた片面銅張積層板4について、MD方向([100]軸)に対する配線方向Hの角度を表1に示すようにした以外は実施例1と同様にして、各試験用可撓性回路基板5を準備した。得られた回路基板5を用い、実施例1と同様にしてMIT屈曲試験を行った。結果を表1に示す。   And about the single-sided copper clad laminated board 4 obtained above, it is for each test similarly to Example 1 except having made the angle of the wiring direction H with respect to MD direction ([100] axis | shaft) shown in Table 1. A flexible circuit board 5 was prepared. Using the obtained circuit board 5, the MIT bending test was performed in the same manner as in Example 1. The results are shown in Table 1.

[比較例1〜3]
実施例1と同様にして得た片面銅張積層板4について、MD方向([100]軸)に対する配線方向Hの角度を表1に示すようにした以外は実施例1と同様にして、各試験用可撓性回路基板5を準備した。得られた回路基板5を用いて実施例1と同様にしてMIT屈曲試験を行った。結果を表1に示す。
[Comparative Examples 1-3]
For the single-sided copper clad laminate 4 obtained in the same manner as in Example 1, the angle of the wiring direction H with respect to the MD direction ([100] axis) is as shown in Table 1, A test flexible circuit board 5 was prepared. Using the obtained circuit board 5, the MIT bending test was conducted in the same manner as in Example 1. The results are shown in Table 1.

[比較例4]
銅箔Aの表面処理面にポリイミド層を形成する際の加熱条件において、加熱積算時間を2分にした以外は実施例1と同様にして片面銅張積層板4を得た。得られた各片面銅張積層板4について、実施例1と同様にしてI/I0を求めたところ43であった。また、実施例1と同様にして銅箔の圧延面2a方位(MD方位)及び側面2b方位(TD方位)の結晶方位を解析したところ、いずれも(100)面が支配的であり、これらの片面銅張積層板4は、銅箔2の圧延方向(MD方向)は銅の[100]軸を有することが確認された。そして、得られた片面銅張積層板4について、MD方向([100]軸)に対する配線方向Hの角度を表1に示すように0°にした以外は実施例1と同様にして、各試験用可撓性回路基板5を準備し、MIT屈曲試験を行った。結果を表1に示す。
[Comparative Example 4]
A single-sided copper-clad laminate 4 was obtained in the same manner as in Example 1 except that the heating time when the polyimide layer was formed on the surface-treated surface of the copper foil A was set to 2 minutes. For each single-sided copper-clad laminate 4 obtained was 43 was determined the I / I 0 in the same manner as in Example 1. Further, when the crystal orientation of the rolled surface 2a orientation (MD orientation) and the side surface 2b orientation (TD orientation) of the copper foil was analyzed in the same manner as in Example 1, the (100) plane was dominant in both cases. The single-sided copper clad laminate 4 was confirmed to have a [100] axis of copper in the rolling direction (MD direction) of the copper foil 2. And about the obtained single-sided copper clad laminated board 4, each test was carried out similarly to Example 1, except that the angle of the wiring direction H with respect to the MD direction ([100] axis) was 0 ° as shown in Table 1. A flexible circuit board 5 was prepared and an MIT flex test was performed. The results are shown in Table 1.

[比較例5]
銅箔Bを用い、かつ、銅箔Bの表面処理面にポリイミド層を形成する際の加熱条件における加熱積算時間を2分にした以外は実施例1と同様にして、各片面銅張積層板4を得た。得られた各片面銅張積層板4について、実施例1と同様にしてI/I0を求めたところ33であった。また、実施例1と同様にして圧延面2a方位(MD方位)及び側面2b方位(TD方位)の結晶方位を解析したところ、いずれも(100)面が支配的であり、これらの片面銅張積層板4は、銅箔2の圧延方向(MD方向)は銅の[100]軸を有することが確認された。そして、得られた片面銅張積層板4について、MD方向([100]軸)に対する配線方向Hの角度を表1に示すように0°にした以外は実施例1と同様にして、各試験用可撓性回路基板5を準備し、MIT屈曲試験を行った。結果を表1に示す。
[Comparative Example 5]
Each single-sided copper-clad laminate in the same manner as in Example 1 except that the copper foil B was used and the heating integrated time in the heating condition when forming the polyimide layer on the surface-treated surface of the copper foil B was 2 minutes. 4 was obtained. For each single-sided copper-clad laminate 4 obtained, it was 33 was determined the I / I 0 in the same manner as in Example 1. Further, when the crystal orientations of the rolling surface 2a orientation (MD orientation) and the side surface 2b orientation (TD orientation) were analyzed in the same manner as in Example 1, the (100) surface was dominant, and these single-sided copper-clad The laminate 4 was confirmed to have a [100] axis of copper in the rolling direction (MD direction) of the copper foil 2. And about the obtained single-sided copper clad laminated board 4, each test was carried out similarly to Example 1, except that the angle of the wiring direction H with respect to the MD direction ([100] axis) was 0 ° as shown in Table 1. A flexible circuit board 5 was prepared and an MIT flex test was performed. The results are shown in Table 1.

[比較例6]
銅箔Cを用いた以外は実施例1と同様にして各片面銅張積層板4を得た。得られた各片面銅張積層板4について、実施例1と同様にしてI/I0を求めたところ10であった。そして、得られた片面銅張積層板4について、MD方向に対する配線方向Hの角度を表1に示すように0°にした以外は実施例1と同様にして、各試験用可撓性回路基板5を準備し、MIT屈曲試験を行った。結果を表1に示す。
[Comparative Example 6]
Each single-sided copper clad laminate 4 was obtained in the same manner as in Example 1 except that the copper foil C was used. For each resulting one-sided copper-clad laminate 4 was 10 was determined the I / I 0 in the same manner as in Example 1. And about the obtained single-sided copper clad laminated board 4, each flexible circuit board for a test was carried out similarly to Example 1 except having made the angle of the wiring direction H with respect to MD direction into 0 degree as shown in Table 1. 5 was prepared and an MIT flex test was performed. The results are shown in Table 1.

[比較例7]
銅箔Dを用いた以外は実施例1と同様にして各片面銅張積層板4を得た。得られた各片面銅張積層板4について、実施例1と同様にしてI/I0を求めたところ7であった。そして、得られた片面銅張積層板4について、MD方向([100]軸)に対する配線方向Hの角度を表1に示すように0°にした以外は実施例1と同様にして、各試験用可撓性回路基板5を準備し、MIT屈曲試験を行った。結果を表1に示す。
[Comparative Example 7]
Each single-sided copper clad laminate 4 was obtained in the same manner as in Example 1 except that the copper foil D was used. For each single-sided copper-clad laminate 4 obtained was 7 was determined the I / I 0 in the same manner as in Example 1. And about the obtained single-sided copper clad laminated board 4, each test was carried out similarly to Example 1, except that the angle of the wiring direction H with respect to the MD direction ([100] axis) was 0 ° as shown in Table 1. A flexible circuit board 5 was prepared and an MIT flex test was performed. The results are shown in Table 1.

[実施例12]
純度99.9mass%であり、厚さ12μmの圧延銅箔Eに、合成例1と同じ方法で準備したポリアミド酸溶液aを塗布して乾燥させ(硬化後は膜厚2μmの熱可塑性ポリイミドを形成)、その上にポリアミド酸bを塗布して乾燥させ(硬化後は膜厚12μmの低熱熱膨張性ポリイミドを形成)、更にその上にポリアミド酸aを塗布して乾燥させ(硬化後は膜厚2μmの熱可塑性ポリイミドを形成)、180〜240℃の温度が積算時間で10分付加されるような加熱条件を経てポリイミド層を形成した。
[Example 12]
The polyamic acid solution a prepared in the same manner as in Synthesis Example 1 was applied to a rolled copper foil E having a purity of 99.9 mass% and a thickness of 12 μm and dried (after curing, a 2 μm-thick thermoplastic polyimide was formed) ), And the polyamic acid b is applied thereon and dried (after curing, a low thermal expansion coefficient polyimide film having a thickness of 12 μm is formed). Further, the polyamic acid a is applied thereon and dried (the film thickness after curing). 2 μm thermoplastic polyimide was formed), and a polyimide layer was formed through heating conditions such that a temperature of 180 to 240 ° C. was added for 10 minutes over an integrated time.

次いで、銅箔の圧延方向(MD方向)に沿って長さ250mm、圧延方向に対して直交する方向(TD方向)に幅150mmの長方形サイズとなるように切り出し、厚さ12μmのポリイミド層(樹脂層)1と厚さ12μmの銅箔2とを有した片面銅張積層板4を得た。上記で得られた片面銅張積層板4の銅箔側に所定のマスクを被せ、塩化鉄/塩化銅系溶液を用いてエッチングを行い、IPC規格に基づき、線幅150μm及びスペース幅250μmの直線状の配線を有した低速IPC試験用回路2を形成した。この製造過程において、ポリイミド層の形成の際の加熱条件の最高温度を180℃(条件A)、200℃(条件B)、220℃(条件C)、及び240℃(条件D)の4水準とし、また、直線状の配線2の配線方向(H方向)が圧延方向(MD方向)に対して0°、2°、2.9°、5.7°、9.5°、11.4°、14°、18.4°、25°、26.6°、30°、40°、45°、55°、60°、63.4°、78.6°、80°、82.9°、87.1°、88°、及び90°の22水準の角度を有するように、それぞれ配線パターンを形成した。次いで、それぞれの回路側の面に、エポキシ系接着剤を用いてカバー材7(有沢製作所製 CVK-0515KA:厚さ12.5μm)を積層した。接着剤からなる接着層6の厚さは、銅箔回路のない部分では15μmであり、銅箔回路が存在する部分では6μmであった。そして、配線方向(H方向)に沿って長手方向に15cm、配線方向に直交する方向に幅8mmとなるように切り出して、IPC試験サンプルとするための試験用可撓性回路基板を得た。   Next, a polyimide layer (resin) having a thickness of 250 μm along the rolling direction (MD direction) of the copper foil and a rectangular size of 150 mm width in a direction orthogonal to the rolling direction (TD direction) and having a thickness of 12 μm. Layer) 1 and a single-sided copper-clad laminate 4 having a copper foil 2 having a thickness of 12 μm were obtained. A predetermined mask is placed on the copper foil side of the single-sided copper-clad laminate 4 obtained above, etching is performed using an iron chloride / copper chloride solution, and a straight line having a line width of 150 μm and a space width of 250 μm is based on the IPC standard. A low-speed IPC test circuit 2 having a wire shape was formed. In this manufacturing process, the maximum heating temperature during the formation of the polyimide layer is set to four levels of 180 ° C. (condition A), 200 ° C. (condition B), 220 ° C. (condition C), and 240 ° C. (condition D). Moreover, the wiring direction (H direction) of the linear wiring 2 is 0 °, 2 °, 2.9 °, 5.7 °, 9.5 °, 11.4 ° with respect to the rolling direction (MD direction). 14 °, 18.4 °, 25 °, 26.6 °, 30 °, 40 °, 45 °, 55 °, 60 °, 63.4 °, 78.6 °, 80 °, 82.9 °, Wiring patterns were formed so as to have angles of 22 levels of 87.1 °, 88 °, and 90 °, respectively. Next, a cover material 7 (CVK-0515KA manufactured by Arisawa Manufacturing Co., Ltd., thickness: 12.5 μm) was laminated on each circuit side surface using an epoxy adhesive. The thickness of the adhesive layer 6 made of an adhesive was 15 μm in a portion without a copper foil circuit, and 6 μm in a portion where a copper foil circuit was present. And it cut out so that it might be set to 15 cm in a longitudinal direction along the wiring direction (H direction), and 8 mm in width in the direction orthogonal to a wiring direction, and the flexible circuit board for a test for setting it as an IPC test sample was obtained.

また、EBSPによる組織解析を行なうための試料として、AからDの熱処理条件で作製した片面銅張積層板について、圧延方向に対して、0°、2.9°、30°、63.4°、及び78.6°の5つの角度で切り出した配線パターンの無い試料、合計20枚を作製した。IPC試験サンプルと熱履歴を揃えるために、回路形成エッチングと同じ模擬的な熱処理を加え、同じ条件でカバー材を積層した。ただし、銅箔組織に対するこれらの影響は軽微であり、ポリイミド形成時のA〜Dの熱処理条件によって、銅箔組織が決まることが後に判明している。   In addition, as a sample for performing a structural analysis by EBSP, a single-sided copper-clad laminate produced under the heat treatment conditions A to D is 0 °, 2.9 °, 30 °, 63.4 ° with respect to the rolling direction. A total of 20 samples without wiring patterns cut out at five angles of 78.6 ° were prepared. In order to align the thermal history with the IPC test sample, the same simulated heat treatment as the circuit formation etching was applied, and the cover material was laminated under the same conditions. However, these influences on the copper foil structure are minor, and it has been found later that the copper foil structure is determined by the heat treatment conditions A to D at the time of polyimide formation.

そして、上記のとおりEBSP測定用に作製した4水準の熱処理条件、5水準の角度条件を有する20枚の銅箔Eを基板厚さ方向に研磨し、研磨前の箔面と水平な面を有するようにして、銅箔Eの箔面を露出させた。更にコロイダルシリカを用いて仕上げ研磨して、銅箔Eの組織をEBSPで評価した。測定領域は0.8mm×1.6mmであり、測定間隔は4μmとした。すなわち、1領域の測定点数は80000点である。その結果、条件Aから条件Dの熱処理条件で熱処理した試料はいずれも立方体集合組織を形成しており、銅箔面方位、圧延方向に{001}<100>の主方位を有していることがわかった。そして、得られた結果を基に、銅箔の厚さ方向と圧延方向に対し、単位格子軸<001>が10°以内になっている点の数をカウントし、全体の点数に対する割合を計算し、平均値を求めた。その結果を表3に示す。同じ加熱条件における試料間のばらつきは1%以下であり、同じ熱処理条件では、銅箔全面に渡って表3に示した集積度を有しているといえる。最高熱処理温度が高く、熱履歴が大きいほど再結晶が進行し、立方体再結晶集合組織の集積度は高くなっていることが分った。また、箔面内の方位解析を行なった結果、圧延方向に対して0°、2.9°、30°、63.4°、及び78.6°の5つ角度で切り出した試料の切り出し方向の主方位は、[100]、[20 1 0]、[40 23 0]、[120]、[150]を有しており、ほぼ所定通りであった。   Then, 20 copper foils E having four levels of heat treatment conditions and five levels of angle conditions prepared for EBSP measurement as described above are polished in the substrate thickness direction, and have a plane parallel to the foil surface before polishing. Thus, the foil surface of the copper foil E was exposed. Furthermore, it finished-polished using colloidal silica and evaluated the structure of the copper foil E by EBSP. The measurement area was 0.8 mm × 1.6 mm, and the measurement interval was 4 μm. That is, the number of measurement points in one area is 80000 points. As a result, all the samples heat-treated under the heat treatment conditions from Condition A to Condition D form a cube texture, and have a copper foil plane orientation and a main orientation of {001} <100> in the rolling direction. I understood. Based on the obtained results, the number of points where the unit cell axis <001> is within 10 ° is counted in the thickness direction and the rolling direction of the copper foil, and the ratio to the total number of points is calculated. The average value was obtained. The results are shown in Table 3. The variation between samples under the same heating condition is 1% or less, and it can be said that the same heat treatment condition has the integration degree shown in Table 3 over the entire surface of the copper foil. It was found that the higher the maximum heat treatment temperature and the greater the thermal history, the more recrystallization progressed and the higher the degree of integration of the cubic recrystallization texture. Further, as a result of orientation analysis in the foil plane, the cutting direction of the sample cut at five angles of 0 °, 2.9 °, 30 °, 63.4 °, and 78.6 ° with respect to the rolling direction. The main orientations of [100], [20 1 0], [40 23 0], [120], and [150] were almost as specified.

Figure 0004763068
Figure 0004763068

IPC試験は、図9にその模式図を示したように、携帯電話等に使用される屈曲形態のひとつであるスライド屈曲を模擬した試験である。IPC試験は、図9のように、決められたギャップ長8で屈曲部を設け、片側を固定部9で固定し、反対側のスライド稼動部10を図のように繰り返し往復運動させる試験である。したがって、往復運動させる部分のストローク量に応じた領域において、基板は繰り返しの屈曲を受ける。本実施例では、ポリイミド層(樹脂層)1を外側にして、キャップ長を1mm、すなわち屈曲半径を0.5mm、ストロークを38mmとして繰り返しスライドさせ試験を行なった。試験中、試験用可撓性回路基板の回路の電気抵抗の測定を行ない、電気抵抗の増加で銅箔回路の疲労クラックの進展の度合いをモニタリングした。本実施例では、回路の電気抵抗が初期値の2倍に達したストローク回数を回路破断寿命とした。   The IPC test is a test simulating slide bending, which is one of the bending forms used for mobile phones and the like, as shown in the schematic diagram of FIG. The IPC test is a test in which a bent portion is provided with a determined gap length 8 as shown in FIG. 9, one side is fixed by the fixing portion 9, and the slide operating portion 10 on the opposite side is repeatedly reciprocated as shown in the drawing. . Therefore, the substrate is repeatedly bent in a region corresponding to the stroke amount of the reciprocating portion. In this example, the test was conducted by repeatedly sliding the polyimide layer (resin layer) 1 with the cap length being 1 mm, that is, the bending radius being 0.5 mm and the stroke being 38 mm. During the test, the electrical resistance of the circuit of the test flexible circuit board was measured, and the progress of fatigue cracks in the copper foil circuit was monitored by increasing the electrical resistance. In this example, the circuit breakage life was defined as the number of strokes at which the electrical resistance of the circuit reached twice the initial value.

試験は、上記の条件A〜条件Dの4つの熱処理条件について、22水準の角度を有する配線パターンを形成した合計88水準について行なった。それぞれの試験水準では、4本の試験片について測定を行い、回路破断したストローク回数の平均を求めた。回路破断寿命後の銅箔について、スライド方向に直交するようにして銅箔を厚さ方向に切った断面を走査型電子顕微鏡で観察すると、程度の差はあるが、樹脂層側及びカバー材側のそれぞれの銅箔表面にはクラックが発生し、特に屈曲部の外側にあたる樹脂層側の銅箔表面には多数のクラックが導入されていることが観察された。   The test was conducted on a total of 88 levels in which a wiring pattern having a 22-level angle was formed under the four heat treatment conditions of the above conditions A to D. At each test level, four test pieces were measured, and the average number of strokes at which the circuit was broken was obtained. Regarding the copper foil after the circuit breaking life, when the cross section of the copper foil cut in the thickness direction so as to be orthogonal to the sliding direction is observed with a scanning electron microscope, there is a difference in degree, but the resin layer side and the cover material side It was observed that cracks occurred on the surfaces of the copper foils, and that many cracks were introduced on the surface of the copper foil on the resin layer side, which is outside the bent portion.

各水準の回路破断寿命の平均値を表4に示す。表4の角度欄には、回路の長さ方向(配線方向)、すなわち、屈曲部における稜線から厚み方向に切った際の配線の断面Pについて、低指数方向になる場合のみ面指数も示した。   Table 4 shows the average value of circuit break life at each level. In the angle column of Table 4, the surface index is also shown only in the case of the low index direction of the cross section P of the wiring when the circuit is cut in the length direction (wiring direction), that is, the ridgeline at the bent portion in the thickness direction. .

Figure 0004763068
Figure 0004763068

IPC試験における疲労寿命は、回路長さ方向(配線方向)と圧延方向とのなす角、すなわち屈曲部における稜線から厚み方向に切った際の配線断面の法線方向と[100]とのなす角に大きく依存することがわかった。この方位依存性は、条件B、条件C、及び条件Dにおいて発現し、立方体方位の集積度が高いほど、繰り返し屈曲に対する疲労寿命が大きく、また、方位依存性が大きい。この方位依存性については、金属箔の厚さ方向に対し、銅の[001]が方位差10°以内にある領域がEBSP法による評価で面積比50%以上を占めるように、<001>主方位が金属箔の厚さ方向に優先配向していると共に、銅の[100]軸から方位差10°以内にある領域がEBSP法による評価で面積比50%以上を占めるように、[100]主方位が金属箔面内で優先配向している場合に発現することが確認された。特に、厚さ方向、及び圧延方向共に、それぞれ面積比75%以上、85%以上を示して立方体方位の集積度が高い条件Cの場合には、疲労寿命が大きく、また、方位依存性の効果が大きくなり、厚さ方向、及び圧延方向共に、それぞれ面積比98%以上、99%以上を示して立方体方位の集積度が極めて高い条件Dでは、更に疲労寿命が大きく、方位依存性の効果が大きいことが分った。   The fatigue life in the IPC test is the angle between the circuit length direction (wiring direction) and the rolling direction, that is, the angle between [100] and the normal direction of the wiring cross section when cutting in the thickness direction from the ridgeline at the bent portion. It turned out to depend greatly on. This orientation dependency is manifested under conditions B, C, and D, and the higher the degree of cube orientation integration, the greater the fatigue life against repeated bending and the greater the orientation dependency. Regarding this orientation dependency, the <001> main direction is such that the area where the copper [001] is within an orientation difference of 10 ° occupies an area ratio of 50% or more in the evaluation by the EBSP method with respect to the thickness direction of the metal foil. [100] The orientation is preferentially oriented in the thickness direction of the metal foil, and the region within 10 ° of the orientation difference from the [100] axis of copper occupies an area ratio of 50% or more as evaluated by the EBSP method. It was confirmed that the main azimuth was expressed when preferentially oriented in the metal foil plane. In particular, in the case of the condition C in which the thickness ratio and the rolling direction show an area ratio of 75% or more and 85% or more, respectively, and the accumulation degree of the cube orientation is high, the fatigue life is large and the effect of orientation dependency is also obtained. In the condition D where the area ratio is 98% or more and 99% or more in the thickness direction and the rolling direction, respectively, and the accumulation degree of the cube orientation is extremely high, the fatigue life is further increased, and the effect of orientation dependency is obtained. I found it big.

条件B、条件C、及び条件Dの結果を詳細に検討すると、屈曲部における稜線から厚み方向に切った際の配線断面の法線方向、すなわち主応力方向が銅箔の<100>主方位からずれていたほうが、屈曲に対する回路の疲労寿命が高い。本実施例のIPC試験において、効果が見られたのは、屈曲部の主歪み方向に対し、すなわち屈曲部における稜線から厚み方向に切った際の配線の断面法線方向に対し、2.9°〜87.1°の角度を有する場合であった。これを面指数で表すと、屈曲部における稜線から厚み方向に切った際の配線の断面Pが、[001]を晶帯軸として(20 1 0)から(110)を通り、(1 20 0)までの範囲である。なかでも効果が大きいのは、屈曲部の主歪み方向に対し、すなわち屈曲部における稜線から厚み方向に切った際の配線の断面法線方向に対し、11.4°〜78.6°の角度を有する場合であった。これを面指数で表すと、屈曲部における稜線から厚み方向に切った際の配線の断面Pが、[001]を晶帯軸として(510)から(110)を通り、(150)までの範囲である。屈曲特性は、更に屈曲部の主歪み方向に対し、すなわち屈曲部における稜線から厚み方向に切った際の配線の断面法線方向に対し、26.6°〜63.4°の角度を有する場合に高くなり、最も優れるのは30°と60°の場合であった。これを面指数で表すと、断面Pが、[001]を晶帯軸として(210)から(110)を通り、(120)までの範囲であり、最も優れるのは(40 23 0)及び(23 40 0)近傍にあるときであった。   When the results of Condition B, Condition C, and Condition D are examined in detail, the normal direction of the wiring cross section when cutting in the thickness direction from the ridge line at the bent portion, that is, the main stress direction is from the <100> main direction of the copper foil. The misalignment has a higher fatigue life of the circuit against bending. In the IPC test of this example, the effect was observed with respect to the main strain direction of the bent portion, that is, with respect to the normal direction of the cross section of the wiring when cut from the ridge line in the bent portion in the thickness direction. It was a case having an angle of from 0 ° to 87.1 °. When this is expressed in terms of a plane index, the cross section P of the wiring when it is cut in the thickness direction from the ridgeline at the bent portion passes from (20 1 0) to (110) with [001] as the crystal zone axis, and (1 20 0 ). In particular, the effect is large at an angle of 11.4 ° to 78.6 ° with respect to the main strain direction of the bent portion, that is, with respect to the normal direction of the cross section of the wiring when cut from the ridge line in the bent portion in the thickness direction. It was a case. When this is expressed in terms of a plane index, the cross section P of the wiring when it is cut in the thickness direction from the ridgeline at the bent portion ranges from (510) to (110) to (150) with [001] as the zone axis. It is. When the bending characteristic has an angle of 26.6 ° to 63.4 ° with respect to the main strain direction of the bent portion, that is, with respect to the normal direction of the cross section of the wiring when cut from the ridgeline in the bent portion in the thickness direction The best results were obtained at 30 ° and 60 °. When this is expressed in terms of a plane index, the cross section P is in the range from (210) to (110) to (120) with [001] as the zone axis, and the most excellent are (40 230) and ( 23 40 0) When in the vicinity.

通常の圧延銅箔の使用形態である屈曲部における稜線から厚み方向に切った際の配線の断面方位を(100)にとった場合、屈曲させた際に8つのすべり面のシュミット因子が等価となり、8つのすべり系が同時に働き、局所的に転位蓄積し易くなる。これに対して、本発明のように、配線の断面方位を(100)以外の方位を取る特殊な形態をとった場合、8つのすべり面が、4つの主すべり系と4つの2次すべり系に分かれるため、変形初期においては、4つの主すべり系のみが働き、転位蓄積が起こり難く、疲労特性が向上するものと考えられる。最も望ましい方位は、屈曲部の主歪み方向、すなわち屈曲部における稜線から厚み方向に切った際の配線の断面法線方向に対し、30°又は60°であるが、これは応力方向が、引張の安定方位と一致するためである。   When the cross-sectional orientation of the wiring when the thickness is cut from the ridgeline at the bent portion, which is a normal usage form of rolled copper foil, is taken as (100), the Schmid factors of the eight slip surfaces are equivalent when bent. , 8 slip systems work simultaneously, and dislocations accumulate easily. On the other hand, when taking a special form in which the cross-sectional orientation of the wiring takes an orientation other than (100) as in the present invention, the eight slip surfaces are composed of four main slip systems and four secondary slip systems. Therefore, at the initial stage of deformation, only four main slip systems work, dislocation accumulation hardly occurs, and fatigue characteristics are considered to be improved. The most desirable orientation is 30 ° or 60 ° with respect to the main strain direction of the bent portion, that is, the normal direction of the cross section of the wiring when cutting from the ridge line in the bent portion in the thickness direction. This is because it matches the stable orientation of

以上の機構を考えたとき、配線内の金属箔は、立方体集合組織を呈している必要があるが、屈曲部における稜線から厚み方向に切った際の配線の断面が、[001]を晶帯軸として(100)から(110)への回転方向における(21 1 0)から(1 20 0)の範囲に含まれたいずれかの面に主方位をなしていれば良い。金属箔を箔面内で90°回転させても、対称性からこれは等価である。更に、上記の機構は、銅だけでなく同じすべり面、すべり方向を有する他の面心立方金属にも成立するため、アルミニウム、ニッケル、銀、ロジウム、パラジウム、モリブデン、タングステン等の金属箔、面心立方構造を有する合金箔にも同じ効果が出現するのは自明である。   Considering the above mechanism, the metal foil in the wiring needs to exhibit a cubic texture, but the cross section of the wiring cut in the thickness direction from the ridgeline in the bent portion shows [001] It is only necessary that the main azimuth is formed on any plane included in the range of (21 1 0) to (1 20 0) in the rotation direction from (100) to (110) as an axis. Even if the metal foil is rotated 90 ° in the plane of the foil, this is equivalent due to symmetry. Furthermore, since the above mechanism is established not only for copper but also for other face-centered cubic metals having the same sliding surface and sliding direction, a metal foil or surface such as aluminum, nickel, silver, rhodium, palladium, molybdenum, tungsten, etc. It is obvious that the same effect appears in the alloy foil having a centered cubic structure.

本発明による可撓性回路基板は、各種電子・電気機器で幅広く使用することができ、回路基板自体が折り曲げられたり、ねじ曲げられたり、或いは搭載された機器の動作に応じて変形したりして、いずれかに屈曲部を有して使用するのに適している。特に、本発明の可撓性回路基板は屈曲耐久性に優れた屈曲部構造を有することから、摺動屈曲、折り曲げ屈曲、ヒンジ屈曲、スライド屈曲等の繰り返し動作を伴い頻繁に折り曲げられたりする場合や、或いは搭載される機器の小型化に対応すべく、曲率半径が極めて小さくなることが求められるような屈曲部を形成するような場合に好適である。そのため、本発明の可撓性回路基板は、耐久性が要求される薄型携帯電話、薄型ディスプレー、ハードディスク、プリンター、DVD装置をはじめ、各種電子機器に好適に利用することができる。   The flexible circuit board according to the present invention can be widely used in various electronic and electrical devices. The circuit board itself is bent, twisted, or deformed according to the operation of the mounted device. , Suitable for use with a bent portion in either. In particular, since the flexible circuit board of the present invention has a bent portion structure with excellent bending durability, it is frequently bent with repeated operations such as sliding bending, bending bending, hinge bending, and sliding bending. Alternatively, it is suitable for the case where a bent portion is required in which the radius of curvature is required to be extremely small in order to cope with downsizing of the equipment to be mounted. Therefore, the flexible circuit board of the present invention can be suitably used for various electronic devices including a thin mobile phone, a thin display, a hard disk, a printer, and a DVD device that require durability.

1:樹脂層
2:配線(金属箔)
2a:圧延面
2b:側面
3:コネクタ端子
4:片面銅張積層板
5:試験用可撓性回路基板
6:接着層
7:カバー材
8:ギャップ長
9:固定部
10:スライド稼動部
21:断面Pの法線方向
L:稜線
P:屈曲部における稜線から厚み方向に切った際の配線の断面
1: Resin layer 2: Wiring (metal foil)
2a: Rolled surface
2b: Side surface 3: Connector terminal 4: Single-sided copper clad laminate 5: Test flexible circuit board 6: Adhesive layer 7: Cover material 8: Gap length 9: Fixing part 10: Slide operating part 21: Method of section P Line direction L: Ridge line P: Cross section of wiring when cut in the thickness direction from the ridge line at the bent portion

Claims (14)

樹脂層と金属箔から形成された配線とを備え、配線の少なくとも一箇所に摺動屈曲、折り曲げ屈曲、ヒンジ屈曲、及びスライド屈曲からなる群から選ばれたいずれかの繰り返し動作を伴う屈曲部を有して使用される可撓性回路基板であって、
金属箔が立方晶系の結晶構造を有する銅箔からなり、かつ、屈曲部における稜線から厚み方向に切った際の配線の断面が、[001]を晶帯軸として(100)から(110)への回転方向における(20 1 0)から(1 20 0)の範囲に含まれたいずれかの面に主方位をなすことを特徴とする可撓性回路基板。
A wiring layer formed of a resin layer and a metal foil, and at least one portion of the wiring is provided with a bending portion with any of repetitive operations selected from the group consisting of sliding bending, bending bending, hinge bending, and sliding bending. A flexible circuit board for use with
The metal foil is made of a copper foil having a cubic crystal structure, and the cross section of the wiring when cut in the thickness direction from the ridgeline at the bent portion is (100) to (110) with [001] as the crystal zone axis. A flexible circuit board characterized by having a main orientation in any surface included in a range of (20 1 0) to (1 20 0) in the rotation direction.
屈曲部での稜線から厚み方向に切った際の配線の断面が、(100)標準投影図のステレオ三角形において(20 1 0)を表す点と(110)を表す点とで結ばれた線分上にあるいずれかの面である請求項1に記載の可撓性回路基板。   The cross section of the wiring when cut in the thickness direction from the ridgeline at the bent portion is a line segment connected by a point representing (20 10) and a point representing (110) in the stereo triangle of (100) standard projection drawing The flexible circuit board according to claim 1, wherein the flexible circuit board is any one of the upper surfaces. 銅箔の厚み方向のX線回折で求めた(200)面の強度(I)が、微粉末銅のX線回折で求めた(200)面の強度(I0)に対してI/I0≧25である請求項1又は2に記載の可撓性回路基板。 The intensity (I) of the (200) plane determined by X-ray diffraction in the thickness direction of the copper foil is I / I 0 relative to the intensity (I 0 ) of the (200) plane determined by X-ray diffraction of fine powder copper. The flexible circuit board according to claim 1, wherein ≧ 25. の単位格子の基本結晶軸<100>が銅箔の厚さ方向と箔面内の一方向の2つの直交軸に対して、方位差10°以内にある優先配向領域が、面積率で50%以上を占めるように主方位を有していると共に、屈曲部の稜線から銅箔の厚み方向に切った配線断面に対する法線が、箔面内の<100>主方位と2.9〜87.1°の角度を有する請求項1又は2に記載の可撓性回路基板。 The preferentially oriented region in which the basic crystal axis <100> of the copper unit cell is within an orientation difference of 10 ° with respect to two orthogonal axes of the thickness direction of the copper foil and one direction in the foil surface is 50 in area ratio. %, And the normal to the wiring cross section cut in the thickness direction of the copper foil from the ridge line of the bent portion is the <100> main direction in the foil plane and 2.9 to 87. The flexible circuit board according to claim 1, wherein the flexible circuit board has an angle of 1 °. 銅箔が、厚さ5〜100μmの圧延銅箔である請求項1〜4のいずれかに記載の可撓性回路基板。 The flexible circuit board according to claim 1, wherein the copper foil is a rolled copper foil having a thickness of 5 to 100 μm. 屈曲部における稜線に対して直交する方向に沿って配線が形成されている請求項1〜5のいずれかに記載の可撓性回路基板。 The flexible circuit board according to claim 1, wherein wiring is formed along a direction orthogonal to the ridge line in the bent portion . 樹脂層がポリイミドからなる請求項1〜6のいずれかに記載の可撓性回路基板。 The flexible circuit board according to claim 1, wherein the resin layer is made of polyimide . 樹脂層と金属箔から形成された配線とを備え、配線の少なくとも一箇所に摺動屈曲、折り曲げ屈曲、ヒンジ屈曲、及びスライド屈曲からなる群から選ばれたいずれかの繰り返し動作を伴う屈曲部を有して使用される可撓性回路基板の屈曲部構造であって、A wiring layer formed of a resin layer and a metal foil, and at least one portion of the wiring is provided with a bending portion with any of repetitive operations selected from the group consisting of sliding bending, bending bending, hinge bending, and sliding bending. A bent portion structure of a flexible circuit board to be used,
金属箔が立方晶系の結晶構造を有する銅箔からなり、かつ、屈曲部における稜線から厚み方向に切った際の配線の断面が、[001]を晶帯軸として(100)から(110)への回転方向における(20 1 0)から(1 20 0)の範囲に含まれたいずれかの面に主方位をなすことを特徴とする可撓性回路基板の屈曲部構造。The metal foil is made of a copper foil having a cubic crystal structure, and the cross section of the wiring when cut in the thickness direction from the ridgeline at the bent portion is (100) to (110) with [001] as the crystal zone axis. A bent portion structure of a flexible circuit board, characterized in that a principal direction is formed on any surface included in the range of (20 1 0) to (1 20 0) in the rotation direction of the flexible circuit board.
屈曲部での稜線から厚み方向に切った際の配線の断面が、(100)標準投影図のステレオ三角形において(20 1 0)を表す点と(110)を表す点とで結ばれた線分上にあるいずれかの面である請求項8に記載の可撓性回路基板の屈曲部構造。 The cross section of the wiring when cut in the thickness direction from the ridgeline at the bent portion is a line segment connected by a point representing (20 10) and a point representing (110) in the stereo triangle of (100) standard projection drawing The bent portion structure of a flexible circuit board according to claim 8, wherein the bent portion structure is any one of the upper surfaces . 樹脂層と金属箔から形成された配線とを備え、配線の少なくとも一箇所に摺動屈曲、折り曲げ屈曲、ヒンジ屈曲、及びスライド屈曲からなる群から選ばれたいずれかの繰り返し動作を伴う屈曲部を有して使用される可撓性回路基板の製造方法であって、A wiring layer formed of a resin layer and a metal foil, and at least one portion of the wiring is provided with a bending portion with any of repetitive operations selected from the group consisting of sliding bending, bending bending, hinge bending, and sliding bending. A method of manufacturing a flexible circuit board to be used.
金属箔が立方晶系の結晶構造を有する銅箔からなり、屈曲部における稜線が、銅箔の面内の基本結晶軸<100>のひとつと2.9〜87.1°の角度を有するように配線を形成することを特徴とする可撓性回路基板の製造方法。The metal foil is made of a copper foil having a cubic crystal structure, and the ridge line at the bent portion has an angle of 2.9 to 87.1 ° with one of the basic crystal axes <100> in the plane of the copper foil. A method of manufacturing a flexible circuit board, wherein wiring is formed on the substrate.
銅箔の厚み方向のX線回折で求めた(200)面の強度(I)が、微粉末銅のX線回折で求めた(200)面の強度(I 0 )に対してI/I 0 ≧25である請求項10に記載の可撓性回路基板の製造方法。 The intensity (I) of the (200) plane determined by X-ray diffraction in the thickness direction of the copper foil is I / I 0 relative to the intensity (I 0 ) of the (200) plane determined by X-ray diffraction of fine powder copper. The method for manufacturing a flexible circuit board according to claim 10, wherein ≧ 25 . 銅箔が圧延銅箔であり、該圧延銅箔を、面心立方構造の単位格子の基本結晶軸<100>が銅箔の厚さ方向と箔面内の一方向の2つの直交軸に対して、方位差10°以内にある優先配向領域が、面積率で50%以上を占めるように、熱処理によって立方体集合組織を呈せしめる請求項11に記載の可撓性回路基板の製造方法。 The copper foil is a rolled copper foil, and the rolled copper foil has a basic crystal axis <100> of a unit cell having a face-centered cubic structure with respect to two orthogonal axes of the thickness direction of the copper foil and one direction in the foil surface. The method for manufacturing a flexible circuit board according to claim 11, wherein the cubic texture is exhibited by heat treatment so that the preferential orientation region having an orientation difference within 10 ° occupies 50% or more in terms of area ratio . 屈曲部における稜線に対して直交する方向に沿って配線を形成する請求項10〜12のいずれかに記載の可撓性回路基板の製造方法。 The manufacturing method of the flexible circuit board in any one of Claims 10-12 which forms wiring along the direction orthogonal to the ridgeline in a bending part . 請求項1〜7のいずれかに記載の可撓性回路基板を搭載した電子機器。The electronic device carrying the flexible circuit board in any one of Claims 1-7.
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