TWI532588B - To prevent the bubble generated by the adhesive tape and electronic components of the method - Google Patents

To prevent the bubble generated by the adhesive tape and electronic components of the method Download PDF

Info

Publication number
TWI532588B
TWI532588B TW103105993A TW103105993A TWI532588B TW I532588 B TWI532588 B TW I532588B TW 103105993 A TW103105993 A TW 103105993A TW 103105993 A TW103105993 A TW 103105993A TW I532588 B TWI532588 B TW I532588B
Authority
TW
Taiwan
Prior art keywords
tape
base
chamber
electronic component
vacuum adsorption
Prior art date
Application number
TW103105993A
Other languages
Chinese (zh)
Other versions
TW201532786A (en
Inventor
Jun-Liang Shi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW103105993A priority Critical patent/TWI532588B/en
Priority to CN201410123108.XA priority patent/CN104861882B/en
Publication of TW201532786A publication Critical patent/TW201532786A/en
Application granted granted Critical
Publication of TWI532588B publication Critical patent/TWI532588B/en

Links

Landscapes

  • Adhesives Or Adhesive Processes (AREA)

Description

防止氣泡產生之膠帶與電子元件的黏貼方法Adhesive tape and electronic component adhesion preventing method

本發明係一種膠帶與電子元件的黏貼方法,尤指可防止膠帶與電子元件之黏貼處產生氣泡的黏貼方法。The invention relates to a method for attaching a tape to an electronic component, in particular to a method for preventing the generation of air bubbles at the adhesion between the tape and the electronic component.

現有膠帶與電子元件之黏貼方法係先將穿設有複數容置空間的載板黏設於一膠帶上,且膠帶的黏膠層鄰接容置空間,並將欲黏貼的電子元件定位地設置於一基座上,黏合之載板與膠帶進一步蓋覆於電子元件上,使電子元件伸入載板的容置空間並黏貼於膠帶的黏膠層。The adhesive tape and the electronic component are adhered to a tape by a carrier plate having a plurality of accommodating spaces, and the adhesive layer of the tape is adjacent to the accommodating space, and the electronic component to be pasted is positioned and positioned. On a pedestal, the bonded carrier and the tape are further covered on the electronic component, so that the electronic component protrudes into the accommodating space of the carrier and adheres to the adhesive layer of the adhesive tape.

其中,電子元件黏貼於膠帶的黏膠層時,電子元件與黏膠層之間的空氣無法完全逃逸,部分空氣被夾存於電子元件與黏膠層之間而形成氣泡,造成不平整而影響後續製程,所以進一步要將氣泡消除,一般採用滾筒或是刮刀,以人工操作方式進行氣泡的刮除,相當費工費時且氣泡刮除效果不佳。Wherein, when the electronic component is adhered to the adhesive layer of the adhesive tape, the air between the electronic component and the adhesive layer cannot completely escape, and some air is trapped between the electronic component and the adhesive layer to form a bubble, thereby causing unevenness and affecting. Follow-up process, so the bubble should be further eliminated. Generally, the roller or the scraper is used to scrape the bubble by manual operation, which is time-consuming and time-consuming and the bubble scraping effect is not good.

本發明之主要目的在於提供一種防止氣泡產生之膠帶與電子元件的黏貼方法,希藉此改善目前電子元件黏貼於膠帶會產生氣泡,以及氣泡採人工刮除相當費工費時且效果不佳的問題。The main object of the present invention is to provide a method for preventing adhesion of an adhesive tape and an electronic component, thereby improving the problem that air bubbles are generated when the electronic component is adhered to the tape, and the manual scraping of the air bubble is laborious and time-consuming and the effect is not good. .

為達成前揭目的,本發明之防止氣泡產生之膠帶與電子元件的黏貼方法包含:  一膠帶與載板的黏合步驟,一具有複數容置空間的載板對位貼合於一膠帶的黏貼面上;  一第一真空吸附步驟,以一第一真空吸附裝置對第一基座的第一容室抽真空,第一基座吸附該膠帶的非黏貼面以吸附貼合之膠帶與載板;  一放置步驟,將欲黏貼於該膠帶的電子元件置放於一第二基座的第二容室中;  一對位步驟,以移動裝置讓該第一基座與該第二基座產生相對位移,使該第一基座與該第二基座上下對位,接著該第一基座連同載板與該第二基座相向移動,使膠帶兩側的第一容室與第二容室皆呈氣密狀態;以及  一第二真空吸附步驟,該第二基座連接一第二真空吸附裝置並對該第二基座的第二容室抽真空,同時該第一真空吸附裝置解除該第一基座之第一容室對膠帶的真空吸附狀態,使膠帶自動朝該第二基座的電子元件移動並貼合。In order to achieve the foregoing object, the method for adhering the tape and the electronic component for preventing bubble generation comprises: a step of bonding the tape to the carrier, and a carrier having a plurality of accommodating spaces is aligned to the adhesive surface of the tape. a first vacuum adsorption step, the first chamber of the first pedestal is evacuated by a first vacuum adsorption device, and the first pedestal adsorbs the non-adhesive surface of the tape to adsorb the adhesive tape and the carrier; a placing step of placing the electronic component to be adhered to the tape in a second chamber of a second base; a pair of positioning steps to move the first base to the second base Displacement, the first base and the second base are aligned up and down, and then the first base moves along with the carrier plate and the second base to make the first chamber and the second chamber on both sides of the tape And a second vacuum adsorption step, the second base is connected to a second vacuum adsorption device and evacuates the second chamber of the second base, and the first vacuum adsorption device releases the First capacity of the first pedestal Vacuum suction state of the tape, the tape is automatically moved so that the electronic component and the second base is attached.

據上所述,該防止氣泡產生之膠帶與電子元件的黏貼方法於第一真空吸附步驟中,將貼合的膠帶與載板吸起,並於第二真空吸附步驟中,對第二容室抽真空且解除第一容室對膠帶的真空吸附狀態,使膠帶因第一容室與第二容室之間的壓力差而自動黏貼電子元件,且第二容室抽真空,所以電子元件與膠帶之間的空氣被抽出,所以貼合時無空氣留存於膠帶與電子元件之間,有效防止氣泡產生,改善以往人工刮除氣泡的費工費時問題,且可利於後續製程的進行。According to the above, the adhesive tape preventing the bubble generation and the electronic component adhesion method in the first vacuum adsorption step, the adhesive tape and the carrier plate are sucked up, and in the second vacuum adsorption step, the second chamber Vacuuming and releasing the vacuum adsorption state of the tape by the first chamber, so that the tape is automatically adhered to the electronic component due to the pressure difference between the first chamber and the second chamber, and the second chamber is evacuated, so the electronic component is The air between the tapes is extracted, so that no air remains between the tape and the electronic components during the bonding, which effectively prevents the generation of air bubbles, improves the laborious and time-consuming problem of manually scraping the air bubbles, and can facilitate the subsequent processes.

請參閱圖1,為本發明防止氣泡產生之膠帶與電子元件的黏貼方法之一種較佳實施例,其包含一膠帶與載板的黏合步驟、一第一真空吸附步驟、一放置步驟、一對位步驟及一第二真空吸附步驟,請參閱圖2、圖3所示之用以執行膠帶50與電子元件黏貼的黏貼模組,該黏貼模組包含有一第一基座10及一第二基座20,該第一基座10上設有一第一容室11,以及該第一基座10連接一第一真空吸附裝置12,該第二基座20上設有一第二容室21,以及該第二基座20連接一第二真空吸附裝置22,且第二基座20於第二容室21中設有矩陣排列的定位部23,其中,於該第一基座10、第二基座20上設有圍繞第一容室11、第二容室21的氣密膠條30。Referring to FIG. 1 , a preferred embodiment of a method for adhering a tape and an electronic component for preventing bubble generation according to the present invention comprises a step of bonding a tape to a carrier, a first vacuum adsorption step, a placing step, and a pair. For the step of the second vacuum and the second vacuum adsorption step, please refer to the adhesive module for performing the adhesive tape 50 and the electronic component as shown in FIG. 2 and FIG. 3 , the adhesive module includes a first base 10 and a second base. a first housing 10 is disposed on the first base 10, and the first base 10 is connected to a first vacuum adsorption device 12, and the second base 20 is provided with a second chamber 21, and The second base 20 is connected to a second vacuum adsorption device 22, and the second base 20 is provided with a matrix-arranged positioning portion 23 in the second chamber 21, wherein the first base 10 and the second base are The seat 20 is provided with a gas-tight strip 30 surrounding the first chamber 11 and the second chamber 21.

於膠帶與載板的黏合步驟,配合參看圖3、圖4,將一具有複數容置空間41的載板40對位貼合於一膠帶50的黏貼面51上,該膠帶50於相對黏貼面51的一側形成一非黏貼面52,以及膠帶50的部分黏貼面51鄰接載板40的容置空間41。In the bonding step of the tape and the carrier, with reference to FIG. 3 and FIG. 4, a carrier 40 having a plurality of accommodating spaces 41 is aligned on the bonding surface 51 of a tape 50, and the tape 50 is on the opposite bonding surface. A non-adhesive surface 52 is formed on one side of the 51, and a part of the adhesive surface 51 of the adhesive tape 50 abuts the accommodating space 41 of the carrier 40.

於該第一真空吸附步驟中,配合參看圖5,以一第一真空吸附裝置12對第一基座10的第一容室11抽真空,第一基座10吸附膠帶50的非黏貼面52以吸附貼合之膠帶50與載板40。In the first vacuum adsorption step, referring to FIG. 5, the first chamber 11 of the first susceptor 10 is evacuated by a first vacuum adsorption device 12, and the first susceptor 10 adsorbs the non-adhesive surface 52 of the adhesive tape 50. The adhesive tape 50 and the carrier 40 are adsorbed.

接著進行該放置步驟,將欲黏貼於該膠帶50的電子元件60置放於一第二基座20之第二容室21的定位部23上。Next, the placing step is performed, and the electronic component 60 to be adhered to the tape 50 is placed on the positioning portion 23 of the second chamber 21 of the second susceptor 20.

接著進行該對位步驟,且配合參看圖6、圖7,以移動裝置讓該第一基座10與該第二基座20產生相對位移,使該第一基座10與該第二基座20上下對位,接著該第一基座10連同載板40與該第二基座20相向移動,使膠帶50兩側的第一容室11與第二容室21皆呈氣密狀態,以及載板40的容置空間41對應第二基座20的電子元件60。Then, the alignment step is performed, and with reference to FIG. 6 and FIG. 7, the first base 10 and the second base 20 are relatively displaced by the moving device, so that the first base 10 and the second base are 20 is up and down, and then the first base 10 and the carrier 40 move toward the second base 20, so that the first chamber 11 and the second chamber 21 on both sides of the tape 50 are airtight, and The accommodating space 41 of the carrier 40 corresponds to the electronic component 60 of the second susceptor 20.

接著進行該第二真空吸附步驟且配合參看圖8,該第二基座20連接一第二真空吸附裝置22並對該第二基座20的第二容室21抽真空,同時該第一真空吸附裝置12解除該第一基座10之第一容室11對膠帶50的真空吸附狀態,使膠帶50鄰接容置空間41的黏貼面51自動朝該第二基座20的電子元件60移動並貼合,待膠帶50與電子元件60黏貼後,該移動裝置可帶動該第一基座10以脫離該第二基座20。And then performing the second vacuum adsorption step and referring to FIG. 8 , the second susceptor 20 is connected to a second vacuum adsorption device 22 and vacuuming the second chamber 21 of the second pedestal 20 while the first vacuum The adsorption device 12 releases the vacuum adsorption state of the tape 50 by the first chamber 11 of the first susceptor 10, so that the adhesive surface 51 of the tape 50 adjacent to the accommodating space 41 automatically moves toward the electronic component 60 of the second susceptor 20 and After the adhesive tape 50 is pasted with the electronic component 60, the moving device can drive the first base 10 to be separated from the second base 20.

其中,該第一真空吸附裝置12於該第一基座10上設有複數間隔設置的第一吸嘴,以及該第二真空吸附裝置22於該第二基座20上設有複數間隔設置的第二吸嘴,透過均勻佈設以提供均勻的真空吸附力。The first vacuum adsorption device 12 is provided with a plurality of first nozzles disposed on the first base 10, and the second vacuum adsorption device 22 is disposed on the second base 20 at a plurality of intervals. The second nozzle is evenly distributed to provide uniform vacuum adsorption.

於該第二真空吸附步驟中,由於第二容室21抽真空,使膠帶50與電子元件60之間的空氣被抽離,又第一容室11的真空吸附狀態解除,使得第一容室11的壓力大於第二容室21的壓力,讓膠帶50可隨著第二容室21的空氣被抽離而自動朝電子元件60移動,使電子元件60可黏貼於該膠帶50,而第二容室21抽真空,使電子元件60與膠帶50之間無空氣,所以電子元件60與膠帶50的黏貼處不會產生氣泡。In the second vacuum adsorption step, since the second chamber 21 is evacuated, the air between the tape 50 and the electronic component 60 is evacuated, and the vacuum adsorption state of the first chamber 11 is released, so that the first chamber is removed. The pressure of 11 is greater than the pressure of the second chamber 21, so that the tape 50 can be automatically moved toward the electronic component 60 as the air of the second chamber 21 is pulled away, so that the electronic component 60 can be adhered to the tape 50, and the second The chamber 21 is evacuated so that there is no air between the electronic component 60 and the tape 50, so that no bubbles are generated at the adhesion of the electronic component 60 to the tape 50.

綜上所述,該防止氣泡產生之膠帶與電子元件的黏貼方法透過切換第一容室11與第二容室21的真空吸附狀態,有效抽離膠帶50與電子元件60之間的空氣,確保膠帶50與電子元件60黏合時不產生氣泡,可節省以往人工刮除氣泡的作業,且可利於後續製程的進行。In summary, the method of adhering the tape and the electronic component for preventing bubble generation effectively removes the air between the tape 50 and the electronic component 60 by switching the vacuum adsorption state of the first chamber 11 and the second chamber 21, thereby ensuring that the air between the tape 50 and the electronic component 60 is effectively removed. When the adhesive tape 50 is bonded to the electronic component 60, no air bubbles are generated, which saves the manual manual scraping of the air bubbles, and can facilitate the subsequent process.

10‧‧‧第一基座
11‧‧‧第一容室
12‧‧‧第一真空吸附裝置
20‧‧‧第二基座
21‧‧‧第二容室
22‧‧‧第二真空吸附裝置
23‧‧‧定位部
30‧‧‧氣密膠條
40‧‧‧載板
41‧‧‧容置空間
50‧‧‧膠帶
51‧‧‧黏貼面
52‧‧‧非黏貼面
60‧‧‧電子元件
10‧‧‧First base
11‧‧‧First room
12‧‧‧First vacuum adsorption device
20‧‧‧Second base
21‧‧‧Second room
22‧‧‧Second vacuum adsorption device
23‧‧‧ Positioning Department
30‧‧‧Airtight strip
40‧‧‧ Carrier Board
41‧‧‧ accommodating space
50‧‧‧ Tape
51‧‧‧Adhesive surface
52‧‧‧Non-adhesive surface
60‧‧‧Electronic components

圖1:為本發明防止氣泡產生之膠帶與電子元件的黏貼方法之流程示意圖。圖2:為執行膠帶與電子元件黏貼的黏貼模組之示意圖。圖3:為本發明防止氣泡產生之膠帶與電子元件的黏貼方法之未作動示意圖。圖4:為本發明防止氣泡產生之膠帶與電子元件的黏貼方法之膠帶與載板貼合之示意圖。圖5:為本發明防止氣泡產生之膠帶與電子元件的黏貼方法之第一基座真空吸附貼合之膠帶與載板,以及放置電子元件於第二基座的示意圖。圖6:為本發明防止氣泡產生之膠帶與電子元件的黏貼方法之第一基座與第二基座對位的示意圖。圖7:為本發明防止氣泡產生之膠帶與電子元件的黏貼方法之第一基座與第二基座相向移動且第一容室與第二容室呈氣密狀態的示意圖。圖8:為本發明防止氣泡產生之膠帶與電子元件的黏貼方法之第二真空吸附步驟的示意圖。Fig. 1 is a flow chart showing a method for adhering a tape and an electronic component for preventing bubble generation according to the present invention. Figure 2: Schematic diagram of an adhesive module for performing adhesive tape bonding to electronic components. Fig. 3 is a schematic view showing the unactuated method of adhering the tape and the electronic component for preventing bubble generation according to the present invention. Fig. 4 is a schematic view showing the bonding of the tape and the carrier sheet to the method for adhering the tape and the electronic component for preventing bubble generation. FIG. 5 is a schematic view showing the tape and the carrier plate of the first susceptor vacuum-adhesive bonding of the tape and the electronic component for preventing the generation of bubbles, and the placing of the electronic component on the second pedestal. FIG. 6 is a schematic view showing the alignment of the first pedestal and the second pedestal of the method for adhering the tape and the electronic component for preventing bubble generation according to the present invention. Fig. 7 is a schematic view showing the first pedestal and the second susceptor moving toward each other and the first chamber and the second chamber being airtight in the method for adhering the tape and the electronic component for preventing bubble generation. Fig. 8 is a schematic view showing a second vacuum adsorption step of the method of adhering the tape to the electronic component for preventing bubble generation.

Claims (3)

一種防止氣泡產生之膠帶與電子元件的黏貼方法,其包含:一膠帶與載板的黏合步驟,一具有複數容置空間的載板對位貼合於一膠帶的黏貼面上;一第一真空吸附步驟,以一第一真空吸附裝置對第一基座的第一容室抽真空,第一基座吸附該膠帶的非黏貼面以吸附貼合之膠帶與載板;一放置步驟,將欲黏貼於該膠帶的電子元件置放於一第二基座的第二容室中;一對位步驟,以移動裝置讓該第一基座與該第二基座產生相對位移,使該第一基座與該第二基座上下對位,接著該第一基座連同載板與該第二基座相向移動,使膠帶兩側的第一容室與第二容室皆呈氣密狀態;以及一第二真空吸附步驟,該第二基座連接一第二真空吸附裝置並對該第二基座的第二容室抽真空,同時該第一真空吸附裝置解除該第一基座之第一容室對膠帶的真空吸附狀態,使膠帶自動朝該第二基座的電子元件移動並貼合。A method for adhering a tape and an electronic component for preventing bubble generation, comprising: a step of bonding a tape to a carrier, a carrier having a plurality of accommodating spaces being aligned to a bonding surface of a tape; a first vacuum In the adsorption step, the first chamber of the first pedestal is evacuated by a first vacuum adsorption device, and the first pedestal adsorbs the non-adhesive surface of the tape to adsorb the adhesive tape and the carrier; An electronic component adhered to the tape is placed in a second chamber of a second base; a pair of positioning steps to move the first base and the second base relative to each other to make the first The pedestal is aligned with the second pedestal, and then the first pedestal and the carrier are moved toward the second pedestal, so that the first chamber and the second chamber on both sides of the tape are in an airtight state; And a second vacuum adsorption step, the second base is connected to a second vacuum adsorption device and evacuates the second chamber of the second base, and the first vacuum adsorption device releases the first base The vacuum adsorption state of the tape to the tape allows the tape to automatically face Moving the second electronic component and bonded to the base. 如請求項1所述之防止氣泡產生之膠帶與電子元件的黏貼方法,其中,於該第二真空吸附步驟中,該第一真空吸附裝置進一步增加該第一容室的壓力。The method of adhering a tape and an electronic component for preventing bubble generation according to claim 1, wherein in the second vacuum adsorption step, the first vacuum adsorption device further increases the pressure of the first chamber. 如請求項1或2所述之防止氣泡產生之膠帶與電子元件的黏貼方法,其中,於第一基座、第二基座上設有圍繞第一容室、第二容室的氣密膠條。The method for adhering a tape and an electronic component for preventing bubble generation according to claim 1 or 2, wherein the first base and the second base are provided with a gas-tight adhesive surrounding the first chamber and the second chamber. article.
TW103105993A 2014-02-24 2014-02-24 To prevent the bubble generated by the adhesive tape and electronic components of the method TWI532588B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW103105993A TWI532588B (en) 2014-02-24 2014-02-24 To prevent the bubble generated by the adhesive tape and electronic components of the method
CN201410123108.XA CN104861882B (en) 2014-02-24 2014-03-28 Method for sticking adhesive tape and electronic element for preventing generation of air bubble

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103105993A TWI532588B (en) 2014-02-24 2014-02-24 To prevent the bubble generated by the adhesive tape and electronic components of the method

Publications (2)

Publication Number Publication Date
TW201532786A TW201532786A (en) 2015-09-01
TWI532588B true TWI532588B (en) 2016-05-11

Family

ID=53908081

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103105993A TWI532588B (en) 2014-02-24 2014-02-24 To prevent the bubble generated by the adhesive tape and electronic components of the method

Country Status (2)

Country Link
CN (1) CN104861882B (en)
TW (1) TWI532588B (en)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06274948A (en) * 1993-03-24 1994-09-30 Toshiba Corp Device and method for sticking
JP3018276B2 (en) * 1996-01-12 2000-03-13 株式会社ホロン Method and device for bonding optical recording information medium
JPWO2002056352A1 (en) * 2001-01-15 2004-05-20 リンテック株式会社 Lamination device and lamination method
US6872268B2 (en) * 2002-06-11 2005-03-29 3M Innovative Properties Company Method of conforming an adherent film to a substrate by application of vacuum
CN101128556B (en) * 2005-02-28 2011-04-20 西尔弗布鲁克研究有限公司 Method for felting underlay
JP2010208305A (en) * 2009-03-12 2010-09-24 Sharp Corp Laminated substrate, display device, manufacturing method of laminated substrate, and manufacturing method of display device
CN102598091B (en) * 2010-08-30 2014-09-10 信越工程株式会社 Display panel production method and production system therefor
JP5701679B2 (en) * 2010-09-03 2015-04-15 日東電工株式会社 Method and apparatus for sequentially attaching optical films having polarizing films on rectangular panels

Also Published As

Publication number Publication date
CN104861882A (en) 2015-08-26
TW201532786A (en) 2015-09-01
CN104861882B (en) 2017-04-26

Similar Documents

Publication Publication Date Title
JP5926501B2 (en) Holding device and holding method
TWI690980B (en) Method for transferring chip and chip transferring apparatus
JP2004510334A (en) Method for back-polishing a wafer while leaving a back polishing tape on the chuck
JP6627243B2 (en) Substrate processing method and substrate film forming method
JP2020024976A (en) Protective member forming device
JP2010286664A (en) Film sticking method and film sticking device
JP2006276669A (en) Pressure-sensitive adhesive chuck device and substrate sticking machine equipped with the same
TWI532588B (en) To prevent the bubble generated by the adhesive tape and electronic components of the method
JP2010062337A (en) Suction device for substrate and handling method of substrate
KR101390513B1 (en) Apparatus and method of bonding substrates using flexible pad
JP2019186509A (en) Substrate sucking apparatus
TWI708536B (en) Device for removing partial cover and method of removing partial cover
TW201917807A (en) Leveling device
TWI774894B (en) Substrate protector and method for producing film-attached substrate
JP2015104800A (en) Peeling method of plate-like body, peeling device of the same, and production method of the plate-like body
KR20120133511A (en) Adhensive device for optical clear adhensive film
TWI754070B (en) Substrate processing apparatus and substrate processing method
JP2011258625A (en) Method for handling semiconductor wafer
TWM537712U (en) Sucking apparatus
JP2020526023A (en) Vacuuming device and vacuuming method
WO2013057815A1 (en) Extraction device
TWI819623B (en) Carrier attachment mechanism of plasma process system
TWI415781B (en) Disk drive device
JP2016099383A5 (en)
JP2016159486A (en) Film pasting device, film pasting method, manufacturing apparatus of information processor, and manufacturing method of information processor