TWI522022B - Apparatus for removing carrier cu foil and method for the same - Google Patents

Apparatus for removing carrier cu foil and method for the same Download PDF

Info

Publication number
TWI522022B
TWI522022B TW102120751A TW102120751A TWI522022B TW I522022 B TWI522022 B TW I522022B TW 102120751 A TW102120751 A TW 102120751A TW 102120751 A TW102120751 A TW 102120751A TW I522022 B TWI522022 B TW I522022B
Authority
TW
Taiwan
Prior art keywords
substrate
copper foil
carrier copper
carrier
cutting
Prior art date
Application number
TW102120751A
Other languages
Chinese (zh)
Other versions
TW201414378A (en
Inventor
朴象鉉
Original Assignee
三星電機股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三星電機股份有限公司 filed Critical 三星電機股份有限公司
Publication of TW201414378A publication Critical patent/TW201414378A/en
Application granted granted Critical
Publication of TWI522022B publication Critical patent/TWI522022B/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H41/00Machines for separating superposed webs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006Delaminating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/022Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
    • H05K3/025Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates by transfer of thin metal foil formed on a temporary carrier, e.g. peel-apart copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00Handling processes for sheets or webs
    • B65H2301/50Auxiliary process performed during handling process
    • B65H2301/51Modifying a characteristic of handled material
    • B65H2301/511Processing surface of handled material upon transport or guiding thereof, e.g. cleaning
    • B65H2301/5112Processing surface of handled material upon transport or guiding thereof, e.g. cleaning removing material from outer surface
    • B65H2301/51122Processing surface of handled material upon transport or guiding thereof, e.g. cleaning removing material from outer surface peeling layer of material

Description

載體銅箔去除裝置及方法 Carrier copper foil removing device and method

本發明係有關於一種載體銅箔去除裝置及方法。 The present invention relates to a carrier copper foil removal apparatus and method.

隨著印刷電路板之電路圖面日益精細化,銅箔層板(Copper Clad Laminate,簡稱CCL)等基板之銅箔層厚度也隨之變薄。以往較厚的銅箔層,雖適用H/L工法等,可具體呈現精細電路圖面,但最近傾向將新型態之超薄板(5μm以下)作為銅箔基層板(CCL)或多層印刷電路板用之銅箔層使用,以具體呈現精細電路圖面。 As the circuit surface of the printed circuit board becomes more and more refined, the thickness of the copper foil layer of the substrate such as Copper Clad Laminate (CCL) is also thinned. In the past, the thick copper foil layer was applied to the H/L method, and the fine circuit surface was specifically presented. However, the ultra-thin plate (below 5 μm) of the new state has recently been favored as a copper foil base plate (CCL) or a multilayer printed circuit. The copper foil layer used for the board is used to specifically represent the fine circuit surface.

然而,藉由使用上述超薄板之銅(Cu),無法以手工作業直接處理銅(Cu)板,因此使用附著載體銅箔(Carrier Cu foil)之基板,用以保護雙面銅(Cu)板。 However, by using the above-mentioned ultra-thin copper (Cu), it is not possible to directly process the copper (Cu) plate by hand. Therefore, a carrier Cu foil substrate is used to protect the double-sided copper (Cu). board.

使用附著載體銅箔之基板進行作業時,作業員以手工作業去除銅箔,因在去除過程中之施力並不均等,將發生基板翹曲、破損、污染、增加作業時間等問題。 When the work is performed using the substrate to which the carrier copper foil is attached, the worker removes the copper foil by hand, and the force applied during the removal process is not uniform, causing problems such as warpage, breakage, contamination, and increase of work time of the substrate.

另外,在去除載體銅箔之過程中,若發生基板翹曲、基板表面發生細微裂痕(crack),將導致印刷電路板之製造工程 中發生基板破損、最終產品亦彎曲之不良情況。另外,在去除載體銅箔時所發生之細微裂痕,將使於烘烤(baking)工程中未施以防鏽處理之銅(Cu)之表面氧化,因此於烘烤(baking)後之產品發生強大之彎曲應力,恐造成基板整體翹曲(warpage)及破損不良。 In addition, in the process of removing the carrier copper foil, if the substrate warps and a crack occurs on the surface of the substrate, the manufacturing process of the printed circuit board will result. There is a problem that the substrate is damaged and the final product is also bent. In addition, the fine cracks which occur when the carrier copper foil is removed will oxidize the surface of the copper (Cu) which is not subjected to the rust-preventing treatment in the baking process, and thus the product after the baking occurs. Strong bending stress may cause overall warpage and damage of the substrate.

另一方面,先前於日本登錄特許第4718031號,已揭示載體銅箔在形成轉寫銅箔之構造。 On the other hand, the structure in which the carrier copper foil is formed in the transfer copper foil has been disclosed in Japanese Patent Application No. 4710031.

本發明之一方面係提出一種載體銅箔去除裝置及方法,該載體銅箔去除裝置及方法係可穩定地去除基板上所附著之載體銅箔。 One aspect of the present invention provides a carrier copper foil removing apparatus and method for stably removing a carrier copper foil attached to a substrate.

本發明之另一方面係提出一種載體銅箔去除裝置及方法,該載體銅箔去除裝置及方法係於去除載體銅箔之過程中,可防止基板銅箔層遭受損傷之問題。 Another aspect of the present invention provides a carrier copper foil removing apparatus and method for preventing damage to a substrate copper foil layer during removal of a carrier copper foil.

本發明之又一方面係提出一種載體銅箔去除裝置及方法,該載體銅箔去除裝置及方法係可自動地去除基板上之載體銅箔,並減少工程時及提高生產性。 According to still another aspect of the present invention, there is provided a carrier copper foil removing apparatus and method which can automatically remove a carrier copper foil on a substrate, and reduce engineering time and productivity.

根據本發明之一實施例,載體銅箔去除裝置,係包含:一作業台,該作業台係兩面各配置附著第1載體銅箔及第2載體銅箔之基板;一裁切手段,該裁切手段係將該作業台所配置之基板兩處邊角部分,各剩餘該第1載體銅箔及第2載體銅箔而裁切;一去除手段,該去除手段係將該第1載體銅箔及第2載體 銅箔自該基板去除;一翻轉手段,該翻轉手段係將配置於該作業台上之該基板翻轉180°;一控制部,該控制部係控制該裁切手段、去除手段及翻轉手段之驅動。 According to an embodiment of the present invention, a carrier copper foil removing apparatus includes: a working table on which a substrate on which a first carrier copper foil and a second carrier copper foil are attached is disposed on both sides; and a cutting means, the cutting Cutting means cutting the two corner portions of the substrate disposed on the work table, each of the first carrier copper foil and the second carrier copper foil, and removing the first carrier copper foil and the removing means Second carrier The copper foil is removed from the substrate; and the turning means rotates the substrate disposed on the working table by 180°; a control unit controls the cutting means, the removing means and the driving means of the turning means .

另外,更可包括:該基板所投入之基板投入部、將投入該基板投入部之該基板移送至該作業台之第1移送部。 Moreover, the substrate input unit to which the substrate is placed and the substrate to be loaded into the substrate input unit may be transferred to the first transfer unit of the work table.

另外,於該基板投入部可更包括第1偵測部,該第1偵測部係偵測基板投入該基板投入部,該控制部可接收來自該第1偵測部之訊號,驅動該第1移送部,並將投入該基板投入部之該基板移送至該作業台。 In addition, the substrate input unit may further include a first detecting unit, wherein the first detecting unit detects that the substrate is inserted into the substrate input unit, and the control unit receives the signal from the first detecting unit to drive the first detecting unit. The transfer unit transfers the substrate loaded in the substrate input unit to the work table.

另外,可更包括基板取出部及第2移送部,該基板取出部係取出該第1載體銅箔及第2載體銅箔去除後之基板,該第2移送部係自該作業台去除該第1載體銅箔及第2載體銅箔之基板,移送至該基板取出部。 Further, the substrate take-out portion may be obtained by taking out the substrate after the removal of the first carrier copper foil and the second carrier copper foil, and removing the substrate from the work table by the second transfer portion The substrate of the carrier copper foil and the second carrier copper foil is transferred to the substrate take-out portion.

另外,更加包括第2偵測部及廢棄處理部,該第2偵測部係偵測基板在去除該第1載體銅箔及第2載體銅箔後是否受損,該廢棄處理部係取出受損之基板,該控制部,接收來自該第2偵測部之訊息,判斷該基板是否受損,若有受損,則驅動該第2移送部,將受損之基板移送至該廢棄處理部,若無受損,則驅動第2移送部,將基板移送至該基板取出部。 Further, the second detecting unit further includes a second detecting unit that detects whether the substrate is damaged after removing the first carrier copper foil and the second carrier copper foil, and the disposal portion is taken out and received. In the damaged substrate, the control unit receives the message from the second detecting unit, determines whether the substrate is damaged, and if damaged, drives the second transfer unit to transfer the damaged substrate to the disposal unit. If there is no damage, the second transfer unit is driven to transfer the substrate to the substrate take-out unit.

在此,該去除手段可包含夾持該第1載體銅箔及第2載體銅箔之夾持部材,以及使該夾持部材以等速度移動之移動部材。 Here, the removing means may include a sandwiching member that sandwiches the first carrier copper foil and the second carrier copper foil, and a moving member that moves the sandwiching member at a constant speed.

另外,該裁切手段可包含:該基板之邊角部分之一 面配置之支撐部材、位於該基板邊角部分另一面之裁切部材,以及將該裁切部材上下移動之移動部材。 In addition, the cutting means may include: one of the corner portions of the substrate The support member disposed on the surface, the cut member on the other side of the corner portion of the substrate, and the moving member that moves the cut member up and down.

此時,該裁切部材可由圓形構成。 At this time, the cutting member may be formed of a circular shape.

另外,該裁切手段為一對,分別位於該基板之相異 兩邊角部分,該一對裁切手段可分別位於對角線方向,彼此呈相對向。 In addition, the cutting means is a pair, which are respectively located on the substrate. In the two corner portions, the pair of cutting means may be respectively located in a diagonal direction and opposed to each other.

另外,該作業台可為真空桌台。 In addition, the work table can be a vacuum table.

根據本發明之另一實施例,載體銅箔去除方法,係 將兩面各附著有第1載體銅箔及第2載體銅箔之基板,配置於作業台上並予以整列之步驟,以及將該基板之兩個邊角部分,分別朝第1載體銅箔及第2載體銅箔剩餘之厚度方向裁切之步驟,將該第1第1載體銅箔自該基板去除之步驟,將該基板180°翻轉之步驟,以及將該第2載體銅箔自該基板去除之步驟。 According to another embodiment of the present invention, a carrier copper foil removal method is a substrate in which the first carrier copper foil and the second carrier copper foil are adhered to each other on both sides, and is arranged on the workbench, and the two corner portions of the substrate are respectively directed to the first carrier copper foil and a step of cutting the remaining thickness direction of the carrier copper foil, removing the first first carrier copper foil from the substrate, and stepping the substrate 180°, and removing the second carrier copper foil from the substrate The steps.

在此可包括:將該基板配置於該作業台並予以整列 之步驟,將該基板投入基板投入部之步驟,以及將所投入之該基板移送至該作業台之步驟。 Herein, the method may include: arranging the substrate on the workbench and arranging the column In the step of feeding the substrate into the substrate input portion and transferring the input substrate to the work table.

另外,將該基板之兩個邊角部分,分別朝第1載體 銅箔及第2載體銅箔所剩餘厚度方向裁切之步驟,可藉由包含以下部材而進行:該基板之一面及另一面之兩個邊角部分分別配置之支撐部材,位於與該支撐部材相對向位置之裁切部材,以及將該裁切部材上下移動之移動部材。 In addition, the two corner portions of the substrate are respectively directed to the first carrier The step of cutting the remaining thickness direction of the copper foil and the second carrier copper foil may be performed by including the following members: a support member disposed on each of the two corner portions of the one surface and the other surface of the substrate, and the support member The cutting member in the relative position and the moving member that moves the cutting member up and down.

此時,該裁切部材可由圓形構成。 At this time, the cutting member may be formed of a circular shape.

另外,將該基板彼此相異之邊角部分,分別朝第1 載體銅箔及第2載體銅箔所剩餘厚度方向裁切之步驟,可於該基板之一面及另一面同時進行。 In addition, the corner portions of the substrate different from each other are respectively directed to the first The step of cutting the remaining thickness direction of the carrier copper foil and the second carrier copper foil may be performed simultaneously on one surface and the other surface of the substrate.

另外,將該第1載體銅箔自該基板去除之步驟,可 包含:使用夾持部材夾持該第1載體銅箔之步驟,以及將該夾持部材以等速度移動之步驟。 Further, the step of removing the first carrier copper foil from the substrate may be The method includes the steps of sandwiching the first carrier copper foil with a clamping member, and moving the clamping member at a constant speed.

另外,將該第2載體銅箔自該基板去除之步驟,可 包含:使用夾持部材夾持該第2載體銅箔之步驟,以及將該夾持部材以等速度移動之步驟。 In addition, the step of removing the second carrier copper foil from the substrate may The method includes the steps of clamping the second carrier copper foil with a clamping member, and moving the clamping member at a constant speed.

另外,將該第2載體銅箔自該基板去除之步驟後, 可更包括將該基板取出之步驟。 Further, after the step of removing the second carrier copper foil from the substrate, The step of taking out the substrate may be further included.

另外,於將該基板取出之步驟前,可更包括判斷該 基板有無受損之步驟。 In addition, before the step of taking out the substrate, the method further includes determining Whether the substrate is damaged or not.

另外,在判斷該基板有無受損之步驟後,可將有受 損之基板加以廢棄處理,並取出未受損之基板。 In addition, after determining whether the substrate is damaged or not, it may be subject to The damaged substrate is discarded and the undamaged substrate is taken out.

本發明係透過機械方式將附著於基板上之載體銅箔 自動去除,據有改善因手工作業而發生之基板翹曲、破損、污染及不良誘發等問題,並提高工程信賴度之效果。 The invention relates to a carrier copper foil attached to a substrate by mechanical means Automatic removal, it is possible to improve the substrate warpage, breakage, contamination and adverse induction caused by manual work, and improve the reliability of the project.

另外,本發命藉由將附著於基板上之載體銅箔之邊 角部分圓形裁切,防止將載體銅箔自基板剝離之際,基板上之銅箔受損。 In addition, the present life is by the side of the carrier copper foil to be attached to the substrate. The corner portion is circularly cut to prevent the copper foil on the substrate from being damaged when the carrier copper foil is peeled off from the substrate.

為了對本發明之上述及其他方面有更佳的瞭解,下文特舉較佳實施例,並配合所附圖式,作詳細說明如下: In order to better understand the above and other aspects of the present invention, the preferred embodiments are described below, and in conjunction with the drawings, the detailed description is as follows:

100‧‧‧載體銅箔去除裝置 100‧‧‧ Carrier copper foil removal device

110‧‧‧作業台 110‧‧‧Working table

120‧‧‧裁切手段 120‧‧‧ cutting means

130‧‧‧去除手段 130‧‧‧Removal means

140‧‧‧翻轉手段 140‧‧‧Flip means

150‧‧‧控制手段 150‧‧‧Control means

160‧‧‧基板投入部 160‧‧‧Substrate Input Department

165‧‧‧第1移送部 165‧‧‧1st Transfer Department

170‧‧‧基板取出部 170‧‧‧Substrate removal unit

175‧‧‧第2移送部 175‧‧‧2nd Transfer Department

180‧‧‧廢棄處理部 180‧‧‧Disposal Department

190‧‧‧第1偵測部 190‧‧‧1st detection department

195‧‧‧第2偵測部 195‧‧‧2nd Detection Department

121‧‧‧支撐部材 121‧‧‧Supporting materials

123‧‧‧裁切部材 123‧‧‧Cutting parts

131‧‧‧夾持部材 131‧‧‧Clamping parts

200‧‧‧基板 200‧‧‧Substrate

201‧‧‧絕緣材 201‧‧‧Insulation

203a、203b‧‧‧銅箔層 203a, 203b‧‧‧ copper foil layer

205a、205b‧‧‧載體銅箔 205a, 205b‧‧‧ carrier copper foil

第1圖為本發明一實施例之載體銅箔去除裝置之構造方塊圖。 BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a block diagram showing the construction of a carrier copper foil removing apparatus according to an embodiment of the present invention.

第2圖為本發明一實施例之載體銅箔去除裝置中,裁切手段之斜視圖。 Fig. 2 is a perspective view showing a cutting means in a carrier copper foil removing device according to an embodiment of the present invention.

第3圖為本發明一實施例之裁切手段中,裁切部材之斜視圖。 Fig. 3 is a perspective view showing a cutting member in a cutting method according to an embodiment of the present invention.

第4圖為本發明一實施例之載體銅箔去除方法之流程圖。 Fig. 4 is a flow chart showing a method for removing a carrier copper foil according to an embodiment of the present invention.

第5圖為表示本發明一實施例之載體銅箔去除方法中,裁切基板邊角部分之過程及剝離載體銅箔之工程剖圖。 Fig. 5 is a cross-sectional view showing the process of cutting the corner portion of the substrate and the peeling of the carrier copper foil in the method for removing the carrier copper foil according to the embodiment of the present invention.

本發明之目的、優點及特徵,依所附圖式及以下詳細說明而可更加情楚。在本說明書中,於各圖式之構成元件賦予參照編號之時,只要是相同之構成元件,就算於不同之圖式中,以盡可能賦予相同編號。另外,「一面」、「另一面」、「第1」、「第2」等用語,乃是用與區分一個構成元件及其他構成元件,構成元件並非因該用語而受限。 The objects, advantages and features of the present invention will become more apparent from the accompanying drawings and appended claims. In the present specification, when the constituent elements of the respective drawings are given the same reference numerals, the same reference numerals are used as far as possible in the different drawings. In addition, terms such as "one side", "the other side", "first", and "second" are used to distinguish one component from another component, and the component is not limited by the term.

以下參照所附圖式,說明本發明之較佳實施例。 DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

<載體銅箔去除裝置><Carrier copper foil removal device>

第1圖為本發明一實施例之載體銅箔去除裝置之構成方塊圖,第2圖為本發明一實施例之載體銅箔去除裝置中裁切 手段之斜視圖,第3圖為本發明一實施例之裁切手段中裁切部材之斜視圖。 1 is a block diagram showing a structure of a carrier copper foil removing device according to an embodiment of the present invention, and FIG. 2 is a cutting process of a carrier copper foil removing device according to an embodiment of the present invention. 3 is a perspective view of a cutting member in a cutting method according to an embodiment of the present invention.

參照第1圖,本實施例之載體銅箔去除裝置100包 括:配置基板之作業台110、將配置於作業台110之基板之邊角部分加以裁切之裁切手段120、自該基板去除載體銅箔之去除手段130、將配置於作業台110上之基板加以180°翻轉之翻轉手段140,以及控制裁切手段120、去除手段130和翻轉手段140之驅動之控制部150。 Referring to Fig. 1, the carrier copper foil removing device 100 of the present embodiment is packaged The work table 110 for arranging the substrate, the cutting means 120 for cutting the corner portion of the substrate disposed on the work table 110, the removing means 130 for removing the carrier copper foil from the substrate, and the placing means 130 are disposed on the work table 110. The flipping means 140 for inverting the substrate by 180°, and the control unit 150 for controlling the driving of the cutting means 120, the removing means 130 and the turning means 140.

於本實施例中,該基板可為雙面銅箔層板(Copper Clad Laminate,簡稱CCL),但並不限定於此。 In this embodiment, the substrate can be a double-sided copper foil laminate (Copper) Clad Laminate, abbreviated as CCL), but is not limited thereto.

一般而言,於雙面銅箔層板(CCL)上,附著載體 銅箔(Carrier Cu foil),以保護銅(Cu)板。 In general, on a double-sided copper foil laminate (CCL), the carrier is attached. Copper foil (Carrier Cu foil) to protect copper (Cu) plates.

如上所述,本發明係透過機械方式自動去除附著於 基板之一面或兩面、用以保護基板之載體銅箔,藉此可防止以手工作業剝離載體銅箔時所發生基板受損之狀況。 As described above, the present invention automatically removes and adheres to it by mechanical means. The carrier copper foil for protecting the substrate on one or both sides of the substrate can prevent the substrate from being damaged when the carrier copper foil is peeled off by hand.

於本實施例中,作業台110可為真空台,但並不限 定於此。 In this embodiment, the workbench 110 can be a vacuum table, but is not limited thereto. It is here.

一般而言,該真空台,為利用真空吸附及固定所配 置基板之桌台,於該真空台上,可更具備多孔性吸附片(未繪示),以防止基板受損,該多孔性吸附片(未繪示)之下部,可具備多孔質吸附部材(未繪示)。 In general, the vacuum table is equipped for vacuum adsorption and fixation. The table of the substrate is further provided with a porous adsorption sheet (not shown) to prevent damage to the substrate. The porous adsorption sheet (not shown) may have a porous adsorption member. (not shown).

該多孔質吸附部材上形成複數孔,與多孔性吸附片 接觸面之相反面,可具備吸引空氣之吸引管(未繪示)。 a plurality of pores are formed on the porous adsorbing member, and the porous adsorbing sheet On the opposite side of the contact surface, a suction tube (not shown) for attracting air may be provided.

也就是說,透過該吸引管吸引空氣,空氣將自該多孔性吸附片之上方面被均勻吸引。如此所吸引之空氣,透過該多孔質吸附部材內之複數個小孔,被吸引至該吸引管。 That is, the air is sucked through the suction pipe, and the air is uniformly attracted from the upper side of the porous absorbent sheet. The air thus sucked is attracted to the suction pipe through a plurality of small holes in the porous adsorbing member.

藉此,將基板配置於作業台110上後,當開始進行吸引,即可透過自上部所施加之幾乎均等之壓力,使基板被該多孔性吸附片吸附,並被固定於作業台110上。 Thereby, after the substrate is placed on the work table 110, the suction is started, and the substrate can be adsorbed by the porous adsorption sheet by the almost uniform pressure applied from the upper portion, and is fixed to the work table 110.

另外,本實施例之載體銅箔去除裝置100,可更包括該基板所投入之基板投入部160,以及將被投入該基板投入部160之基板移送至作業台110之第1移送部165。 Further, the carrier copper foil removing apparatus 100 of the present embodiment may further include a substrate loading portion 160 into which the substrate is placed, and a first transfer portion 165 that transfers the substrate loaded into the substrate loading portion 160 to the work table 110.

另外,可更包括第1偵測部190,第1偵測部190乃是用於偵測基板被投入基板投入部160中。控制部150,可自第1偵測部190接受對應投入基板之訊號,驅動第1移送部165,並將基板自基板投入部160移送至作業台110。 In addition, the first detecting unit 190 may be further included, and the first detecting unit 190 may be configured to detect that the substrate is loaded into the substrate input unit 160. The control unit 150 receives the signal corresponding to the input substrate from the first detecting unit 190, drives the first transfer unit 165, and transfers the substrate from the substrate input unit 160 to the work table 110.

另外,本實施例中之載體銅箔去除裝置100,可更包括基板取出部170及第2移送部175,基板取出部170乃是取出已去除載體銅箔之基板,第2移送部175乃是移送自作業台110移送至基板取出部170之基板。 Further, the carrier copper foil removing device 100 of the present embodiment may further include a substrate take-out portion 170 and a second transfer portion 175. The substrate take-out portion 170 is a substrate from which the carrier copper foil has been removed, and the second transfer portion 175 is The transfer is transferred from the work table 110 to the substrate of the substrate take-out unit 170.

另外,可更包括廢棄處理部180,廢棄處理部180乃是當已去除載體銅箔之基板受損時,可將受損之基板取出。 Further, the disposal processing unit 180 may be further included, and when the substrate on which the carrier copper foil has been removed is damaged, the damaged substrate can be taken out.

另外,可更包括偵測已去除載體銅箔之基板是否受損之第2偵測部195。控制部150,可接收來自第2偵測部195 之訊號,判斷已去除載體銅箔之基板是否受損。 In addition, the second detecting unit 195 that detects whether the substrate on which the carrier copper foil has been removed may be detected. The control unit 150 can receive the second detecting unit 195. The signal determines whether the substrate on which the carrier copper foil has been removed is damaged.

此時,判斷是否受損之控制部150,於受損時,驅 動第2移送部175,將受損之基板自作業台110移送至廢棄處理部180,若無受損,則驅動第2移送部175,將基板自作業台110移送至基板取出部170。 At this time, it is judged whether or not the damaged control unit 150 is driven when it is damaged. The second transfer unit 175 transfers the damaged substrate from the work table 110 to the disposal unit 180. If there is no damage, the second transfer unit 175 is driven to transfer the substrate from the work table 110 to the substrate take-out unit 170.

另一方面,在本實施例中,可透過第2偵測部195 確認是否已去除載體銅箔。 On the other hand, in the embodiment, the second detecting unit 195 is permeable. Confirm if the carrier copper foil has been removed.

具體而言,控制部150,接收來自第2偵測部195 之訊號,判斷於基板上是否還有未去除載體銅箔之部分,若還有未去除之部分,則對操作裝置者警告該判斷結果,由操作者直接以手工作業去除未去除之部分。 Specifically, the control unit 150 receives the second detecting unit 195. The signal determines whether there is a portion of the substrate on which the carrier copper foil has not been removed. If there is any unremoved portion, the operator is warned of the result of the determination, and the operator directly removes the unremoved portion by manual work.

在本實施例中,裁切手段120可包括:配置於該基 板之邊角部分一面之支撐部材1211,位於該基板邊角部分另一面之裁切部材123,以及將該裁切部材123上下移動之移動部材(未繪示)。 In this embodiment, the cutting means 120 may include: being configured on the base The supporting member 1211 on one side of the corner portion of the board, the cutting member 123 on the other side of the corner portion of the substrate, and a moving member (not shown) for moving the cutting member 123 up and down.

此時,裁切手段120可為一對,分別位於相異之兩 個邊角部分,該一對之裁切手段120,可位於使該裁切部材123彼此呈對角線方向之對向處。 At this time, the cutting means 120 can be a pair, respectively located in two different The pair of corner cutting portions 120 may be located at a direction opposite to the diagonal direction of the cutting members 123.

也就是說,基板之相異兩個邊角部分中之一角,一 個裁切部材123位於其中一面,另一個裁切部材123則位於另一面。 That is, one of the two corner portions of the substrate is different, one One of the cutting members 123 is located on one side, and the other cutting member 123 is located on the other side.

這是為了使基板之相異之兩個邊角部分同時朝上/ 下方向裁切。 This is to make the two corners of the substrate different at the same time / Cut in the down direction.

在本實施例中,裁切部材123,可如第3圖所示呈 圓形,但此僅為一實施例,該形狀並不限於此。 In this embodiment, the cutting member 123 can be as shown in FIG. It is circular, but this is only an embodiment, and the shape is not limited thereto.

但是,裁切部材123呈圓形,藉此使基板邊角部分 之裁切面形成圓形,因此與裁切面形成直線形時相較,具有載體銅箔更容易自基板分離之優點。 However, the cutting member 123 is rounded, thereby making the corner portion of the substrate The cut surface is formed into a circular shape, so that the carrier copper foil is more easily separated from the substrate than when the cut surface is formed into a straight line.

另外,藉由將基板之邊角部分圓形裁切,將載體銅 箔自基板剝離之際,可防止基板上之銅箔發生刮痕等損傷,並可提高使用該基板所形成之印刷電路板之電性可信度。 In addition, the carrier copper is formed by cutting the corner portion of the substrate in a circular shape. When the foil is peeled off from the substrate, scratches such as scratches on the copper foil on the substrate can be prevented, and the electrical reliability of the printed circuit board formed using the substrate can be improved.

在本實施例中,去除手段130可包括:與夾持載體 銅箔之夾持部材(未繪示)、與該夾持部材(未繪示)連結並使該夾持部材(未繪示)以等速度移動之移動部材(未繪示),但此僅為一實施例,並不限定於此。 In this embodiment, the removing means 130 may include: clamping the carrier a clamping member (not shown) of the copper foil, a moving member (not shown) that is coupled to the clamping member (not shown) and moves the clamping member (not shown) at a constant speed, but this is only For an embodiment, it is not limited to this.

如上所述,本實施例中之載體銅箔去除裝置100, 於兩面附有載體銅箔之基板上,將兩個邊角部分朝上/下方向裁切,並僅留下載體銅箔後,夾持留下載體銅箔的部分,加以剝離的工程,係透過機械方式自動進行,與以手工作業剝離載體銅箔的情況相較之下,不但縮短了工程時間,並可防止基板之銅箔層發生損傷。 As described above, the carrier copper foil removing device 100 of the present embodiment, On the substrate with the carrier copper foil on both sides, the two corner portions are cut in the up/down direction, and only the carrier copper foil is left, and the portion where the carrier copper foil is left is peeled off. The mechanical method is automatically performed, and compared with the case where the carrier copper foil is peeled off by manual work, the engineering time is shortened and the copper foil layer of the substrate is prevented from being damaged.

<載體銅箔去除方法><Carrier copper foil removal method>

第4圖為本發明之一實施例之載體銅箔去除方法之方塊圖,第5圖為表示本發明之一實施例之載體銅箔去除方法 中,裁切基板邊角部分之過程,以及剝離載體銅箔之過程之工程剖面圖。 4 is a block diagram of a method for removing a carrier copper foil according to an embodiment of the present invention, and FIG. 5 is a view showing a method for removing a carrier copper foil according to an embodiment of the present invention. The process of cutting the corner portions of the substrate and the engineering sectional view of the process of peeling off the carrier copper foil.

參照第4圖,首先使附著載體銅箔205a、205b之基板200配置於作業台110(參照第1圖)並予以整列(S303)。 Referring to Fig. 4, first, the substrate 200 to which the carrier copper foils 205a and 205b are attached is placed on the work table 110 (see Fig. 1) and arranged in a row (S303).

在本實施例中,基板之一面或兩面可為銅箔層板(Copper Clad Laminate,簡稱CCL),但並不限定於此。 In this embodiment, one or both sides of the substrate may be a copper foil laminate (CCL), but is not limited thereto.

另外,在本實施例中,基板之一面或兩面附著載體銅箔205a、205b,以自外部保護銅箔層203a、203b。 Further, in the present embodiment, the carrier copper foils 205a, 205b are attached to one or both sides of the substrate to protect the copper foil layers 203a, 203b from the outside.

在本實施例中所述,係有關於一種於使用基板之前,先自基板200自動去除該載體銅箔205a、205b之方法。 In the present embodiment, there is a method of automatically removing the carrier copper foils 205a, 205b from the substrate 200 before using the substrate.

如上所述,載體銅箔205a、205b可附著於基板200之一面或兩面,在本實施例說明中,雖是附著於基板之兩面,但並不限定於此,亦可適用於附著於基板一面之情形。 As described above, the carrier copper foils 205a and 205b may be attached to one surface or both surfaces of the substrate 200. Although it is attached to both surfaces of the substrate in the description of the embodiment, the present invention is not limited thereto, and may be applied to the substrate. The situation.

因此,在本實施例中,將附著於基板兩面之載體銅箔205a、205b,分別命名為第1載體銅箔205a、第2載體銅箔205b。 Therefore, in the present embodiment, the carrier copper foils 205a and 205b adhering to both surfaces of the substrate are designated as the first carrier copper foil 205a and the second carrier copper foil 205b, respectively.

此時,將該基板200配置於作業台110(參照第1圖)並予以整列之階段,可包含以下步驟(S301):當基板被投入基板投入部160,透過第1移送部165,將被投入之基板自基板投入部160移送至作業台110。 At this time, the substrate 200 is placed on the work table 110 (see FIG. 1) and is arranged in a row. The step (S301) may be included. When the substrate is loaded into the substrate input unit 160, the substrate is transferred to the first transfer unit 165. The input substrate is transferred from the substrate input unit 160 to the work table 110.

其次,將基板200之相異之兩個邊角部分,分別朝厚度方向裁切,使其剩餘第1載體銅箔205a及第2載體銅箔205b (S305)。 Next, the two opposite corner portions of the substrate 200 are respectively cut in the thickness direction to leave the first carrier copper foil 205a and the second carrier copper foil 205b. (S305).

也就是說,如第5圖所示,將基板200之兩個邊角 部分分局朝由上而下及由下而上之方向裁切。此時,使第1載體銅箔205a留下B部分,使第2載體銅箔205b留下C部分。 That is, as shown in FIG. 5, the two corners of the substrate 200 are Some of the branches were cut from the top down and the bottom up. At this time, the first carrier copper foil 205a is left in the B portion, and the second carrier copper foil 205b is left in the C portion.

此時,如上所述裁切之階段,雖可透過裁切手段120 (參照第2圖)進行,但並不限定於此。裁切手段120包括:基 板200之一面及另一面之邊角部分分別配置之支撐部材121(參照第2圖)、對應於該支撐部材121之裁切部材123(參照第2圖),以及將該裁切部材123上下移動之移動部材(未繪示)。 At this time, the cutting stage as described above can be cut through the cutting means 120. (Refer to Fig. 2), but it is not limited thereto. The cutting means 120 includes: a support member 121 (see FIG. 2) disposed on each of the corners of the one surface and the other surface of the panel 200, a cutting member 123 corresponding to the support member 121 (see FIG. 2), and the cutting member 123 Moving parts (not shown).

在此,如第3圖所示,該裁切部材123可為圓形之 裁刀A。 Here, as shown in FIG. 3, the cutting member 123 may be circular Cutter A.

透過如上所述裁切部材123形成圓形,使基板邊角 部分之裁切面形成圓形,因此與裁切面形成直線之情況相較之下,具有可較容易將載體銅箔自基板分離之優點。 By forming the circular shape by cutting the member 123 as described above, the corners of the substrate are made The portion of the cut surface is rounded, so that it has an advantage that the carrier copper foil can be easily separated from the substrate in comparison with the case where the cut surface is straight.

另外,透過將基板之邊角部分裁切成圓形,將載體 銅箔自基板剝離之際,可防止於基板上之銅箔發生刮痕等損傷,提高使用該基板所形成之印刷電路板之電性可信度。 In addition, by cutting the corner portion of the substrate into a circular shape, the carrier When the copper foil is peeled off from the substrate, scratches such as scratches on the copper foil on the substrate can be prevented, and the electrical reliability of the printed circuit board formed using the substrate can be improved.

另外,在本實施例中,可將基板200之兩個邊角部 分朝厚度方向裁切之步驟可同時進行,但並不限定於此。 In addition, in the embodiment, the two corner portions of the substrate 200 can be The steps of cutting in the thickness direction may be performed simultaneously, but are not limited thereto.

具體而言,於本實施例中,透過分別配置於基板200 之兩個邊角部分之裁切手段120,可將兩個邊角部分中之一角朝由上而下之方向裁切,另一個邊角部分則朝由下而上方向裁切。 Specifically, in the embodiment, the transmission is respectively disposed on the substrate 200 The cutting means 120 of the two corner portions can cut one of the two corner portions toward the top-down direction, and the other corner portion is cut toward the bottom-up direction.

其次,將第1載體銅箔205a自基板200去除 (S307)。 Next, the first carrier copper foil 205a is removed from the substrate 200. (S307).

在本實施例中,雖可透過以下步驟進行:將第1載 體銅箔205a自基板200去除之步驟、透過夾持部材131持該第1載體銅箔205a所剩餘部分B之步驟,以及將該夾持部材131朝箭頭方向以等速度移送之步驟,但不限定於此。 In this embodiment, the following steps can be performed: the first load a step of removing the bulk copper foil 205a from the substrate 200, a step of holding the remaining portion B of the first carrier copper foil 205a through the sandwiching member 131, and a step of transferring the sandwiching member 131 at an equal speed in the direction of the arrow, but not Limited to this.

其次,將基板200翻轉180°(S309)。 Next, the substrate 200 is turned over by 180 (S309).

此時,基板200之翻轉,可由本發明所屬技術領域 中具有通常知識者依其通常知識下可使用之各種方法進行,關於此之詳細說明,在此予以省略。 At this time, the flipping of the substrate 200 can be made by the technical field to which the present invention pertains. Those having ordinary knowledge can carry out various methods which can be used according to their usual knowledge, and a detailed description thereof will be omitted herein.

如上所述,透過將基板200加以180°翻轉,可將 之整列,使第2載體銅箔205b所附著之面朝上。 As described above, by flipping the substrate 200 180°, In the entire row, the surface on which the second carrier copper foil 205b is attached faces upward.

其次,將第2載體銅箔205b自基板200去除 (S311)。 Next, the second carrier copper foil 205b is removed from the substrate 200. (S311).

於本實施例中,將第2載體銅箔205b自基板200 去除之步驟,與上述之第1載體銅箔205a之去除方法相同,因此關於其詳細方法,在此予以省略。 In the embodiment, the second carrier copper foil 205b is self-substrate 200 The step of removing is the same as the method of removing the first carrier copper foil 205a described above, and thus the detailed method thereof will be omitted herein.

接著,取出已去除第1載體銅箔205a及第2載體銅 箔205b之基板200(S313)。 Next, the removed first carrier copper foil 205a and the second carrier copper are removed. The substrate 200 of the foil 205b (S313).

此時,在本實施例中,在取出基板200之步驟之前, 可更加包括判斷已去除載體銅箔205a、載體銅箔205b之基板是否受損。若判斷結果為基板200受損,則加以廢棄處理,若無損 傷,則可取出至基板取出部170(參照第1圖)。 At this time, in the present embodiment, before the step of taking out the substrate 200, It may further include determining whether the substrate on which the carrier copper foil 205a and the carrier copper foil 205b have been removed is damaged. If the result of the judgment is that the substrate 200 is damaged, it is disposed of, and if it is not damaged. The injury can be taken out to the substrate take-out portion 170 (see Fig. 1).

另外,當去除第1載體銅箔205a或第2載體銅箔 205b後,可判斷是否有未去除第1載體銅箔205a或第2載體銅箔205b之部分,若有未去除之部分,則警告裝置操作者,以手工作業去除未去除之部分。 In addition, when the first carrier copper foil 205a or the second carrier copper foil is removed After 205b, it is judged whether or not the portion of the first carrier copper foil 205a or the second carrier copper foil 205b is not removed, and if there is an unremoved portion, the operator of the apparatus is warned to manually remove the unremoved portion.

以上乃是以實施例說明本發明,但此為具體說明本 發明,本發明並不限定於此,只要為於該領域具有一般知識者,可於本發明之技術思想內進行變形或改良,此不言自明。 The above description is based on the embodiments, but this is a specific description of the present invention. The present invention is not limited thereto, and any modifications or improvements may be made without departing from the spirit and scope of the invention.

綜上所述,雖然本發明已以較佳實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。因此,本發明之保護範圍當視後附之申請專利範圍所界定者為準。 In conclusion, the present invention has been disclosed in the above preferred embodiments, and is not intended to limit the present invention. A person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

100‧‧‧載體銅箔去除裝置 100‧‧‧ Carrier copper foil removal device

110‧‧‧作業台 110‧‧‧Working table

120‧‧‧裁切手段 120‧‧‧ cutting means

130‧‧‧去除手段 130‧‧‧Removal means

140‧‧‧翻轉手段 140‧‧‧Flip means

150‧‧‧控制手段 150‧‧‧Control means

160‧‧‧基板投入部 160‧‧‧Substrate Input Department

165‧‧‧第1移送部 165‧‧‧1st Transfer Department

170‧‧‧基板取出部 170‧‧‧Substrate removal unit

175‧‧‧第2移送部 175‧‧‧2nd Transfer Department

180‧‧‧廢棄處理部 180‧‧‧Disposal Department

190‧‧‧第1偵測部 190‧‧‧1st detection department

195‧‧‧第2偵測部 195‧‧‧2nd Detection Department

Claims (20)

一種載體銅箔去除裝置,包括:一作業台,係配置一基板,該基板之兩面分別配置第1載體銅箔及第2載體銅箔;一裁切手段,係分別裁切配置於該作業台之該基板之兩個邊角部分,使該第1載體銅箔及第2載體銅箔剩餘;一去除手段,係自該基板去除該第1載體銅箔及第2載體銅箔;一翻轉手段,係將配置於該作業台上之該基板180°翻轉;以及一控制部,係控制該裁切手段、該去除手段及該翻轉手段之驅動。 A carrier copper foil removing device includes: a working table, wherein a substrate is disposed, and a first carrier copper foil and a second carrier copper foil are disposed on both sides of the substrate; and a cutting means is respectively cut and disposed on the working table The first carrier copper foil and the second carrier copper foil remain in the two corner portions of the substrate; and a removing means removes the first carrier copper foil and the second carrier copper foil from the substrate; And rotating the substrate disposed on the workbench 180°; and a control unit controlling the cutting means, the removing means, and the driving of the turning means. 如申請專利範圍第1項所述之載體銅箔去除裝置,更包括:該基板所投入之基板投入部;以及將被投入該基板投入部之基板移送至該作業台之第1移送部。 The carrier copper foil removing device according to claim 1, further comprising: a substrate loading portion into which the substrate is placed; and a first transfer portion that transfers the substrate loaded into the substrate loading portion to the work table. 如申請專利範圍第2項所述之載體銅箔去除裝置,更包括一第1偵測部,該第1偵測部係偵測基板被投入該基板投入部;其中該控制部,係接收來自該第1偵測部之訊號,並驅動該第1偵測部,將被投入該基板投入部之基板移送至該作業台。 The carrier copper foil removing device according to claim 2, further comprising a first detecting portion, wherein the detecting portion is input to the substrate input portion; wherein the control portion receives the The signal of the first detecting unit drives the first detecting unit to transfer the substrate loaded into the substrate input unit to the working table. 如申請專利範圍第1項所述之載體銅箔去除裝置,更包 括:一基板取出部,係將已去除該第1載體銅箔及第2載體銅箔之基板取出;以及一第2移送部,係將已去除該第1載體銅箔及第2載體銅箔之基板自該作業台移送至該基板取出部。 The carrier copper foil removing device according to claim 1 of the patent application scope, further includes a substrate take-out portion for taking out a substrate from which the first carrier copper foil and the second carrier copper foil have been removed, and a second transfer portion for removing the first carrier copper foil and the second carrier copper foil The substrate is transferred from the work table to the substrate take-out portion. 如申請專利範圍第4項所述之載體銅箔去除裝置,更包括:一第2偵測部,係偵測已去除該第1載體銅箔及第2載體銅箔之基板有無受損;以及一廢棄處理部,係將受損之基板取出;其中該控制部接受來自該第2偵測部之訊號,判斷該基板是否受損,若是受損,則驅動該第2移送部,將受損之基板移送至該廢棄處理部,若未受損,則驅動該第2移送部,將基板移送至該基板取出部。 The carrier copper foil removing device according to claim 4, further comprising: a second detecting portion for detecting whether the substrate on which the first carrier copper foil and the second carrier copper foil have been removed is damaged; The disposal unit removes the damaged substrate; the control unit receives the signal from the second detection unit to determine whether the substrate is damaged, and if it is damaged, the second transfer unit is driven and damaged. The substrate is transferred to the disposal processing unit, and if it is not damaged, the second transfer unit is driven to transfer the substrate to the substrate take-out unit. 如申請專利範圍第1項所述之載體銅箔去除裝置,其中該去除手段包含:夾持該第1載體銅箔或第2載體銅箔之夾持部材;以及使該夾持部材以等速度移動之移動部材。 The carrier copper foil removing device according to claim 1, wherein the removing means comprises: a clamping member that sandwiches the first carrier copper foil or the second carrier copper foil; and the clamping member is at a constant speed Moving parts of the movement. 如申請專利範圍第1項所述之載體銅箔去除裝置,其中該裁切手段包含:配置於該基板之邊角部分一面之夾持部材;位於該基板邊角部分之另一面上之裁切部材;以及 將該裁切部材上下移動之移動部材。 The carrier copper foil removing device according to claim 1, wherein the cutting means comprises: a clamping member disposed on one side of the corner portion of the substrate; and cutting on the other side of the corner portion of the substrate Parts; A moving member that moves the cutting member up and down. 如申請專利範圍第7項所述之載體銅箔去除裝置,其中該裁切部材係呈圓形。 The carrier copper foil removing device according to claim 7, wherein the cutting member has a circular shape. 如申請專利範圍第7項所述之載體銅箔去除裝置,其中該裁切手段為一對,分別位於該基板相異之兩個邊角部分,該一對裁切手段之裁切部材彼此位於對角線方向呈對向。 The carrier copper foil removing device according to claim 7, wherein the cutting means is a pair, respectively located at two corner portions of the substrate, and the cutting members of the pair of cutting means are located at each other The diagonal direction is opposite. 如申請專利範圍第1項所述之載體銅箔去除裝置,其中該作業台為真空桌台。 The carrier copper foil removing device according to claim 1, wherein the working table is a vacuum table. 一種載體銅箔去除方法,包括:配置及整列步驟,係將兩面分別附著第1載體銅箔或第2載體銅箔之基板配置於該作業台,並予以整列;裁切步驟,係分別朝厚度方向裁切該基板之兩個邊角部分,使其分別剩餘該第1載體銅箔或該第2載體銅箔;第1去除步驟,係將該第1載體銅箔自該基板去除;翻轉步驟,係將該基板180°翻轉;以及第2去除步驟,係將該第2載體銅箔自該基板去除。 A method for removing a carrier copper foil, comprising: arranging and arranging a step of disposing a substrate on which both the first carrier copper foil or the second carrier copper foil are adhered on the working surface, and arranging them; the cutting step is respectively performed toward the thickness Cutting the two corner portions of the substrate to separate the first carrier copper foil or the second carrier copper foil; the first removing step is to remove the first carrier copper foil from the substrate; The substrate is inverted by 180°, and the second removal step is performed by removing the second carrier copper foil from the substrate. 如申請專利範圍第11項所述之載體銅箔去除方法,其中將該基板配置於該作業台並予以整列之步驟包括:將該基板投入基板投入部之步驟;以及將所投入之該基板移送至該作業台之移送步驟。 The method for removing a carrier copper foil according to claim 11, wherein the step of disposing the substrate on the workbench and arranging the steps includes: inserting the substrate into the substrate input portion; and transferring the input substrate The transfer step to the workbench. 如申請專利範圍第11項所述之載體銅箔去除方法,其中於朝厚度方向裁切該基板之兩個邊角部分、分別使該第1載體 銅箔及該第2載體銅箔剩餘之步驟,係透過該裁切手段進行,該裁切手段包括:該基板之一面及另一面之兩個邊角部分分別配置之支撐部材、位於與該支撐部材呈對向面之裁切部材,以及使該裁切部材上下移動之移動部材。 The carrier copper foil removing method according to claim 11, wherein the two corner portions of the substrate are cut in a thickness direction to respectively make the first carrier The remaining steps of the copper foil and the second carrier copper foil are performed by the cutting means, and the cutting means includes: a support member disposed on each of the two corner portions of the substrate and the other surface, and the supporting member The cutting member is a cutting member facing the facing surface, and a moving member for moving the cutting member up and down. 如申請專利範圍第13項所述之載體銅箔去除方法,其中該裁切部材係呈圓形。 The carrier copper foil removing method according to claim 13, wherein the cutting member has a circular shape. 如申請專利範圍第11項所述之載體銅箔去除方法,其中於朝厚度方向裁切該基板之兩個邊角部分、分別使該第1載體銅箔及該第2載體銅箔剩餘之步驟,係該基板之一面及另一面同時進行。 The method for removing a carrier copper foil according to claim 11, wherein the step of cutting the two corner portions of the substrate in the thickness direction and respectively remaining the first carrier copper foil and the second carrier copper foil One side of the substrate and the other side are simultaneously performed. 如申請專利範圍第11項所述之載體銅箔去除方法,其中於將該第1載體銅箔自該基板去除之步驟,包括:使用夾持部材之夾持該第1載體銅箔之步驟;以及使該夾持部材以等速度移動之步驟。 The method for removing a carrier copper foil according to claim 11, wherein the step of removing the first carrier copper foil from the substrate comprises: clamping the first carrier copper foil with a clamping member; And the step of moving the clamping member at a constant speed. 如申請專利範圍第11項所述之載體銅箔去除方法,其中於將該第2載體銅箔自該基板去除之步驟,包括:使用夾持部材之夾持該第2載體銅箔之步驟;以及使該夾持部材以等速度移動之步驟。 The method for removing a carrier copper foil according to claim 11, wherein the step of removing the second carrier copper foil from the substrate comprises: clamping the second carrier copper foil with a clamping member; And the step of moving the clamping member at a constant speed. 如申請專利範圍第11項所述之載體銅箔去除方法,其中於將該第2載體自該基板去除之步驟後,更包括將該基板取出之步驟。 The method for removing a carrier copper foil according to claim 11, wherein the step of removing the second carrier from the substrate further comprises the step of removing the substrate. 如申請專利範圍第18項所述之載體銅箔去除方法,其 中於將該基板取出之步驟前,更包括判斷該基板有無受損之步驟。 a method for removing a carrier copper foil according to claim 18, which Before the step of taking out the substrate, the method further comprises the step of determining whether the substrate is damaged. 如申請專利範圍第19項所述之載體銅箔去除方法,其中於判斷該基板有無受損之步驟後,若有受損,則加以廢棄處理,若無受損,則取出基板。 The carrier copper foil removing method according to claim 19, wherein after the step of determining whether the substrate is damaged or not, if it is damaged, it is disposed of, and if it is not damaged, the substrate is taken out.
TW102120751A 2012-06-15 2013-06-11 Apparatus for removing carrier cu foil and method for the same TWI522022B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120064434A KR20130141208A (en) 2012-06-15 2012-06-15 Apparatus for removing carrier cu foil and method for the same

Publications (2)

Publication Number Publication Date
TW201414378A TW201414378A (en) 2014-04-01
TWI522022B true TWI522022B (en) 2016-02-11

Family

ID=49985403

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102120751A TWI522022B (en) 2012-06-15 2013-06-11 Apparatus for removing carrier cu foil and method for the same

Country Status (3)

Country Link
JP (1) JP5497946B2 (en)
KR (1) KR20130141208A (en)
TW (1) TWI522022B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6051812B2 (en) * 2012-11-27 2016-12-27 凸版印刷株式会社 Carrier copper foil peeling apparatus and carrier copper foil peeling method
KR101470371B1 (en) * 2013-06-19 2014-12-08 대덕전자 주식회사 Method of manufacturing printed circuit board
KR101669539B1 (en) * 2016-02-26 2016-10-26 주식회사 코엠에스 Substrate Separation Method and Device
TWI728915B (en) * 2018-09-28 2021-05-21 景碩科技股份有限公司 Peeling device
TWI714890B (en) * 2018-09-28 2021-01-01 景碩科技股份有限公司 Peeling device
KR102088799B1 (en) * 2019-05-21 2020-03-13 주식회사 라온큐텍 A apparatus for separating the protecting thin film
KR102381032B1 (en) * 2021-11-29 2022-04-01 (주)아이엠 Apparatus for removing subsidiary of fpcb

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4718031B2 (en) * 2001-04-05 2011-07-06 イビデン株式会社 Printed wiring board and manufacturing method thereof
JP4744517B2 (en) * 2005-06-02 2011-08-10 シャープ株式会社 Blade for film cutting and peeling and film cutting and peeling device

Also Published As

Publication number Publication date
TW201414378A (en) 2014-04-01
KR20130141208A (en) 2013-12-26
JP5497946B2 (en) 2014-05-21
JP2014001076A (en) 2014-01-09

Similar Documents

Publication Publication Date Title
TWI522022B (en) Apparatus for removing carrier cu foil and method for the same
TWI336603B (en) Method and apparatus for producing a wiring board, including film-peeling
JP6324606B1 (en) Release film peeling method and release film peeling apparatus
TWI663644B (en) Grinding device and method for attaching protective tape
JP2012216606A (en) Substrate transfer method and substrate transfer device
JP2019029650A (en) Pickup device of semiconductor chip, mounting device of the semiconductor chip, and mounting method
KR20140094709A (en) Embossed mold system
JP2010058869A (en) Film separation device and method
TW201913852A (en) Adhesive tape stripping method and adhesive tape stripping device
JP2004018180A (en) Slip sheet taking out device
JP2007320678A (en) Method and device for peeling outer layer body
CN108107617B (en) Substrate disconnection system
TWI744517B (en) Manufacturing device and manufacturing method of flexible element
JP6119178B2 (en) Peeling apparatus and build-up board peeling method
KR101915572B1 (en) Core detaching apparatus from printed circuit board
KR101757280B1 (en) A apparatus for separating the attached copper plates
JP2018072615A (en) Substrate dividing system
JP3567802B2 (en) Manufacturing method of multilayer ceramic electronic component
JP2009280297A (en) Laminating device of flat plate-like material
JP7411722B2 (en) Transfer method of flat workpiece
TW202320155A (en) Dividing method of workpiece
JP2021077687A (en) Pickup device
JP2008037571A (en) Laminated sheet peeling method, and peeling device for the same
JP6177697B2 (en) Panel suction transfer device
JP2010076864A (en) Film peeling device and film peeling method

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees