TWI518831B - And a method of moving out of the container and the moving out of the container - Google Patents

Description

Loading and unloading device for substrate storage container and loading and unloading method

The present invention relates to a loading/unloading device and a container loading and unloading method for a substrate storage container for loading a load port or the like.

Conventionally, the loading and unloading device includes a rotary lifting and lowering means 20 for rotating a substrate storage container (hereinafter referred to as a FOUP) that has been loaded into a loading cassette; and a moving device 38 that has received the rotation The container 30 that rotates the lifting device 20 moves forward and backward (see FIGS. 1 and 2 of Patent Document 1).

Further, as another loading cassette, there is provided a platform 12 on which a FOUP is placed, rotation mechanisms 31 to 35 for rotating the platform, and a lifting mechanism 39 for lifting the platform; and the members 12, 31 to 35, 39 are provided. The moving mechanism that moves forward and backward (refer to Figs. 1 and 3 of Patent Document 2).

[Advanced technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent No. 4168724

[Patent Document 2] Japanese Patent No. 4816637

However, in the loading cassette of Patent Document 1, as the shifting movement of the FOUP The structure other than the moving means 38 is provided with a rotary lifting means 20 for rotating the FOUP. Moreover, the loading cassette does not have a clamp for holding the FOUP that has been carried in. When the FOUP is moved up and down and rotated without being clamped, there is a problem that the FOUP holding state becomes unstable during the vertical movement or the rotation. Further, it is necessary to perform the delivery of the FOUP between the moving means 38 and the rotary lifting means 20, and in this operation, the state in which the FOUP is held is also unstable.

Further, in the structure of the loading cassette of Patent Document 2, a plurality of structures such as the platform 12 of the FOUP, the rotating mechanisms 31 to 35 of the platform, and the elevating mechanism 39 of the platform are moved forward and backward, so that the loading cassette is easily enlarged. Further, since the center of the stage 12 is rotated and eccentrically rotated during the rotation, it is difficult to say that the space required for the rotation operation is the smallest. Further, similarly to the loading cassette of Patent Document 1, the holding mechanism is attached to the dock stage 38. Therefore, the holding is not performed during the FOUP lowering, and the FOUP is lowered in an unstable state.

The present invention has been made in view of the above problems, and provides a loading/unloading device for a substrate storage container that can hold a FOUP that has been carried in a stable state and that is further reduced in size.

The invention of the present invention is directed to a loading and unloading device for a substrate storage container, comprising: a mounting table on which the substrate storage container is placed, and a sliding mechanism including a slider, the slider being the mounting table a container loading/unloading position in which the container is placed on the mounting table, and a substrate loading/unloading position in which the substrate is carried in and out between the device on the mounting table and the substrate for loading and unloading; and a rotating mechanism A rotating body that rotatably supports the sliding mechanism is provided, and the mounting table is rotatable at a rotational position between the container loading/unloading position and the substrate loading/unloading position.

According to another aspect of the invention, there is provided a method of loading and unloading a substrate for a substrate storage container, comprising the step of: holding a substrate storage container that has been loaded into the mounting table to the mounting table; a moving step of moving the position of the mounting table from the container into and out of the container while maintaining the clamping in the clamping step, and stopping at the rotating position; and rotating the step to maintain the clamping in the clamping step In the state in which the mounting table is rotated at the rotation position, the mounting table is moved in and out of the substrate, and the substrate loading/unloading direction is when the substrate loading/unloading portion of the container to be placed is carried in and out toward the substrate. a state of the direction; and a second moving step of moving the substrate from the rotational position to the substrate while maintaining the clamping in the clamping step and moving the mounting table toward the substrate. Into the location.

According to the loading/unloading device for the substrate storage container of the invention of the present invention, the rotation mechanism is fixed to the apparatus main body, and the rotation of the center of the rotation mechanism coincides with the center of the mounting table. Therefore, the space required for the rotation operation becomes The smallest. Further, since the fixed rotating mechanism holds the mounting table and the moving portion is only the mounting table, although the rotating mechanism is added, the entire device is compact and stable operation can be realized.

Further, since the rotation mechanism reverses the direction in which the slide mechanism moves forward and backward by the rotation of the rotation position, the placement table can be stopped at a plurality of times only by moving the slide mechanism forward and backward in a predetermined direction. The other transfer machine performs the position at which the container is carried in, the rotational position at which the container is rotated, and the substrate carrying in and out of the substrate in the container. It is possible to expand the advance and retreat movement range of the mounting table by using an inexpensive two-point stop cylinder or the like, thereby making it easy to perform access from the transfer machine side.

Further, the device base portion to which the rotating base portion is fixed is further provided to A guiding portion that guides the mounting table so as to be rotatable at the rotational position. Thereby, the position at which the container rotates is rotated only at the position where the center of the rotating base coincides with the center of the mounting table, and the space required for the rotating operation is minimized.

Further, since the guided portion guided by the guiding portion is provided on the guide pin of the mounting table, it is easy to restrict the rotation operation other than the rotational position.

Further, the length of the positioning pin provided on the mounting table from the upper surface of the mounting table is such that the working space can be formed between the bottom surface of the container placed on the positioning pin and the upper surface of the mounting table. The work space is a space in which the fork portion of the transfer machine having the fork portion of the container on which the transfer target is placed is inserted. That is, the fork frame is lowered to a position away from the container and retracted after the container is loaded on the positioning pin, thereby realizing delivery to the mounting table. Therefore, the lifting mechanism of the mounting table is not required, and the device can be made compact.

Further, further comprising a nozzle unit including an air supply and exhaust nozzle for filling a container for loading the cleaning gas into the container, wherein the nozzle unit includes an elevating mechanism that can be lifted and lowered to be placed a nozzle 埠 formed on a bottom surface of the container on the mounting table at the substrate loading and unloading position, a venting position in communication with the air supply nozzle, and a lowering position at which the air supply nozzle is separated from the nozzle 。. Therefore, according to the present invention, when there is a distance between the nozzle 埠 and the mounting table, the air supply and exhaust nozzle also moves up and down, so that the cleaning can be performed on the mounting table.

According to another aspect of the present invention, a method for loading and unloading a substrate storage container can be performed by a step of holding a substrate storage container that has been loaded into a mounting table on the mounting table; a first moving step And maintaining the position of the mounting table from the container in and out of the container while maintaining the clamping in the clamping step, and stopping at the rotating position; and rotating the step of maintaining the clamping in the clamping step In the state of the above, the mounting table is in the above rotating position Rotation, the direction in which the mounting table is carried in and out of the substrate, and the direction in which the substrate is carried in and out is a state in which the substrate carrying-in/out portion of the container to be placed is moved in and out of the substrate; and the second moving step In a state in which the clamping in the clamping step is maintained and the mounting table is moved in and out of the substrate, the mounting table is further moved from the rotational position to a position at which the substrate is carried in and out. Therefore, since the container is gripped immediately after being delivered to the mounting table, the rotation operation and the advancement and retreat movement of the mounting table do not become unstable, and the operations can be quickly performed.

Further, the clamping step is performed in a state where the height position of the mounting table and the height position of the container placed on the mounting table are constant, and the first moving step causes the mounting table to be carried out from the above The step of moving the position is horizontally moved to the above-described rotational position, and the second moving step is a step of horizontally moving the mounting table from the rotational position to a position at which the loading and unloading is performed. When the container is clamped to the mounting table, it does not move up and down, but maintains the same height, so that the clamping state can be firmly maintained and the sliding can be performed quickly. Rotate the action.

Furthermore, the loading and unloading method of the substrate storage container further includes a loading step of transporting the container to a state in which it protrudes upward by using a transfer device having a fork portion on which the container to be transferred is placed. a loading pin on the mounting table; the loading step includes an operation of moving the fork unit to transfer the container of the transfer target to the positioning pin, and the fork portion is lowered And the fork frame portion after the transfer operation is lowered to a working space formed between the bottom surface of the container that has been transferred to the positioning pin and the upper surface of the mounting table; and the retracting operation The fork portion is extracted from the work space. Therefore, it is possible to start the holding operation on the mounting table side immediately after the container is delivered to the positioning pin, the container is lowered to the working space, and the retracting operation is performed without moving the above-described mounting table up and down.

1‧‧‧FOUP (container) moving in and out device

1a‧‧‧Moving out the device body (device base)

5‧‧‧FOUP (transfer box, container)

10‧‧‧ mounting table

10a‧‧‧Before the stage

11, 11a, 11b‧‧‧ positioning pin

11g‧‧‧ front entrance

12‧‧‧Clamping members

12a‧‧‧ claws

13‧‧‧Probe pin

20‧‧‧Sliding mechanism

21‧‧‧Sliding mechanism body

21a‧‧‧rails

2.2‧‧‧ Slider

23‧‧‧Actuator

23a‧‧‧Cylinder

23b‧‧‧ Connecting rod

23c‧‧‧ coil spring

23d‧‧‧Connected components

30‧‧‧Rotating mechanism

31‧‧‧Rotating base

32‧‧‧ rotating body

40‧‧‧Guiding agency

41‧‧‧1st linear motion guide

42‧‧‧Rotary guide

43‧‧‧2nd linear motion guide

44‧‧‧guide (slave)

50‧‧‧Nozzle unit

51‧‧‧Air supply nozzle (one of the supply and exhaust nozzles)

51a‧‧‧Nozzle埠

52‧‧‧Exhaust nozzle (one of the air supply and exhaust nozzles)

52a‧‧‧Nozzle埠

53‧‧‧Nozzle support

54‧‧‧ Lifting mechanism

55‧‧‧Nozzle support

D1‧‧‧FOUP moving in and out direction (the direction in which the transport box is moved in and out)

D2‧‧‧Loading the direction of the door

D3‧‧‧Advance and retreat movement direction

DB‧‧‧Retreating Mobile

Position of P1~P4, P9‧‧‧ guides

S1‧‧‧Workspace

T‧‧‧ fork unit

Fig. 1 is a perspective view showing a loading/unloading device for a substrate storage container according to an embodiment of the present invention.

Fig. 2 is a cross-sectional view showing a cross section taken along line A-A of Fig. 1.

Fig. 3 is an exploded perspective view showing the loading and unloading device of Fig. 1;

Fig. 4 is a plan view showing the apparatus main body of the loading and unloading device of Fig. 1.

5(A) to 5(E) are explanatory views for explaining the operation of the carry-in/out device shown in Fig. 1.

Hereinafter, the loading/unloading device for the substrate storage FOUP (container) of the present invention will be described with reference to the drawings.

As shown in Fig. 1, the loading/unloading device 1 includes a mounting table 10 on which a FOUP 5 (see Fig. 2) is placed, a sliding mechanism 20 that supports the mounting table 10 in a movable movement, and a rotating mechanism 30 (Fig. 2). Rotatingly supporting the sliding mechanism 20; guiding mechanisms 41 to 43 (refer to FIG. 4) for guiding the movement of the mounting table 10; and nozzle unit 50 for performing the FOUP 5 placed on the mounting table 10. Purification.

The mounting table 10 includes positioning pins 11 (11a, 11b) provided in a state in which the upper surface of the mounting table 10 protrudes upward, and a holding member 12 for holding the FOUP 5.

The mounting table 10 used in the present embodiment includes three positioning pins 11. The FOUP 5 that has been transferred to the mounting table 10 is supported by being placed on the three positioning pins 11 . The bottom surface of the FOUP 5 has a V-groove (not shown) into which the top end of the positioning pin is inserted. Therefore, the FOUP 5 is reliably positioned on the specific FOUP mounting position on the mounting table 10 by the three positioning pins 11 (see According to the position of the transfer box F of Fig. 2). The top end positions of the three positioning pins 11 are the same height, and the FOUP 5 is supported in a horizontal state on a specific FOUP mounting position on the mounting table 10. Further, the height of the FOUP mounting position is the same as the height position of the FOUP 5 placed on the mounting table 10 at the substrate loading/unloading position.

The arrangement of the three positioning pins 11 is two on the front side (the loading/receiving side of the substrate) on the mounting table 10 and one on the rear side (the loading and unloading side of the FOUP). The two front side positioning pins 11a and 11a disposed on the front side are disposed on the left and right sides of the front portion of the mounting table 10, and a front side inlet portion 11g having a wide inlet width is formed between the two positioning pins 11a and 11a.

Further, the length (height) from the upper surface of the mounting table 10 to the top end of the three positioning pins 11 is such that a working space S1 can be formed between the bottom surface of the FOUP 5 placed on the positioning pin and the upper surface of the mounting table 10. Figure 2) The length. Further, the front side inlet portion 11g is located on the front side of the mounting table 10 of the work space S1.

For example, as described below, the work space S1 is used when the FOUP 5 is transferred to the positioning pin 11 by using a transfer machine (not shown) having the fork portion T (see FIG. 5(A)). Space. If the work space S1 is present, the fork portion T can be used to easily carry in and out of the FOUP 5 with respect to the specific transport cassette placement position, and the FOUP 5 can be moved up and down after the FOUP 5 is transferred.

The holding member 12 is a member for fixing the placed FOUP 5 to the mounting table 10, and is rotatable to a locking position for holding the FOUP 5 on the mounting table 10 (refer to the position of the two-dot chain line in FIG. 3). ) and the unlocking position of the clamping (refer to the position of FIG. 3). Moreover, the tip end of the holding member 12 is provided with the clamping claw part 12a. Therefore, when the clamp member 12 is rotated to the lock position, the FOUP 5 is fixed to the mounting table 10, and when it is rotated to the unlock position, the FOUP 5 can be carried out from the mounting table 10.

Further, the symbol "13" is a detecting pin, and is used as a means for detecting the loading of the FOUP 5 into the mounting table 10.

As shown in FIG. 3, the slide mechanism 20 is provided with: a slide mechanism body 21 rotatably provided on the rotation mechanism 30; a slider 22 slidably disposed relative to the slide mechanism body 21; and an actuator 23, It is disposed on the sliding mechanism body 21.

The slide mechanism main body 21 is provided with a guide rail 21a extending linearly, and the slider 22 is slidably provided on the guide rail 21a. The slide mechanism body 21 is provided in such a manner that the guide rail 21a is horizontal. Therefore, the slider 22 and the mounting table 10 fixed to the slider 22 are both moved in the horizontal direction. That is, the slide mechanism 20 is a member that horizontally moves the FOUP 5 placed on the mounting table 10.

The actuator 23 is provided with an air cylinder 23a. The cylinder 23a is a drive source for sliding the slider 22, and includes a link 23b that is detached from the cylinder main body, a coil spring 23c that is externally inserted into the link 23b, and a connection that is provided at the tip end of the link 23b. Member 23d. The connecting member 23d is fixed to the bottom surface of the mounting table 10. Further, the extending direction (in the direction of the exit) of the link 23b coincides with the extending direction of the guide rail 21a.

Therefore, when the link 23b of the air cylinder 23a is infested, the slider 22 and the mounting table 10 move in the extending direction of the guide rail 21a in conjunction with this operation.

More specifically, when the link 23b is maximally retracted (refer to FIG. 3 when immersed), the mounting table 10 is located at the rotational position (see FIGS. 5(B) and (C)). At this time, the slider 22 is in the position at the time of rotation.

In addition, when the link 23b is extended (projected) in a direction (see FIGS. 5(A) and (B)) in which the FOUP is carried in and out of the FOUP, the mounting table 10 is positioned at a specific transport cassette loading/unloading position (see FIG. 5). (A)). Further, when the link 23b is in the direction D2 in which the card is loaded (see FIG. 5(D)) When the elongation is reached, the mounting table 10 is positioned at a specific substrate loading/unloading position (see FIG. 5(D)).

The coil spring 23c is positioned by biasing the mounting table 10 against the member on the link side by biasing the rod 23b in the protruding direction. Therefore, when the distal end portion of the link 23b protrudes in the direction D2, when the foreign matter is interposed between the distal end 10b of the mounting table and the nozzle unit 50, the excessive force can be prevented by the elastic force (urging force) of the coil spring 23c. . Moreover, since the sliding mechanism 20 is rotated and used, the operation of moving the mounting table 10 to the FOUP loading/unloading position and the movement of the mounting table 10 to the substrate loading/unloading position are performed by causing the link 23b to protrude. In this way, two actions can be performed using the one-way movement of the link 23b, and a multi-point stop can be realized in a long range using an inexpensive machine.

Further, when the mounting table 10 is in the FOUP loading/unloading position, the slider 22 is in the FOUP loading/unloading position; when the mounting table 10 is in the substrate loading/unloading position, the slider 22 is in the position at which the substrate is carried in and out.

The rotating mechanism 30 includes a rotating base 31 that is provided on the loading/unloading device main body 1a (hereinafter referred to as an apparatus main body), a rotating body 32 that is rotatably supported with respect to the rotating base 31, and a driving source (not shown). ), which rotates the rotating body 32. That is, the rotating base 31 is fixed to the apparatus body 1a. In other words, the relative position of the rotating base portion 31 with respect to the FOUP loading/unloading position of the mounting table 10 or the substrate loading/unloading position is constant. As described above, when the rotating base portion 31 is fixed to the apparatus main body 1a, the rotation operation of the rotating body 32 of the rotating mechanism 30 is stabilized. Further, since the rotating mechanism 30 is fixed and the sliding portion is only the mounting table 10, the entire apparatus is tight despite the addition of the rotating mechanism 30.

Further, the rotating body 32 supports the sliding mechanism 20. Therefore, when the rotating body 32 rotates, the slide mechanism 20 and the mounting table 10 provided on the slide mechanism 20 rotate.

More specifically, the sliding mechanism 20 and the mounting table 10 can be turned to the first by the rotating mechanism 30. The rotation direction (the state facing the FOUP carry-in side) and the second rotation direction (the state facing the FOUP door) are rotated, and the first rotation direction means that the front end 10a (see FIG. 1) of the mounting table 10 is moved in and out toward the FOUP. In the direction of the direction D1 (see FIGS. 5(A) and (B), the direction in which the FOUP is moved in and out), the second direction of rotation refers to a state in which the front end 10a of the mounting table 10 faces the direction D2 of the cardia (see the figure). 1. The direction in which the substrate is moved in and out).

Further, the rotating body 32 supports the slide mechanism 20 such that the guide rail 21a is horizontal. Therefore, both the slider 22 and the mounting table 10 fixed to the slider 22 move forward and backward in the horizontal direction. That is, the slide mechanism 20 is a member that horizontally moves the mounting table 10.

As shown in FIG. 4, the guide mechanism 40 includes guide portions 41, 42, and 43 which are provided on the apparatus main body 1a, and a follower (guided portion) 44 which is provided on the mounting table 10.

The follower 44 is a guide pin provided in a state in which the lower surface of the mounting table extends downward from the lower surface of the mounting table, and is slidably rotated integrally with the mounting table 10.

Further, the guide portions 41 to 43 are members that guide the movement of the guide table 40 by guiding the movement of the guide pin 44, and include the first linear motion guide portion 41 and the rotation guide portion 42, And the second linear motion guiding portion 43.

The first linear motion guiding portion 41 is constituted by a first guiding step portion that extends in the advancing and retracting movement direction D3 (FIG. 4) of the mounting table 10. The first linear motion guiding portion 41 moves the mounting table 10 located between the FOUP carry-in/out position (see FIG. 5(A)) and the rotational position (see FIG. 5(B)) only in the advance/retract movement direction D3. The guide pin 44 is guided in a non-rotating manner.

The rotation guide portion 42 is constituted by an arc-shaped guide step portion having an arc shape. The rotation guide portion 42 is a rotation position at the time of loading and unloading the substrate in a state in which the front end 10a of the mounting table 10 at the rotational position is in the direction D2 of the cardiac door (see FIGS. 1 and 5(C)). Become the mounting table 10 The front end 10a is rotated in the direction in which the FOUP is moved in and out of the direction D1 (see FIGS. 5(A) and (B)), and is rotated in the forward and backward movement directions, and is not moved in the forward and backward movement direction D3. 44 guide. That is, the rotation guide portion 42 is a member that guides the rotation operation of the mounting table 10 that performs 180° reversal. Further, when the mounting table 10 is at the rotational position, the center of the mounting table 10 coincides with the center of the rotating body 32 of the rotating mechanism 30, and therefore the space required for the rotating operation of the mounting table 10 is minimized.

The second linear motion guiding portion 43 is constituted by a second guiding step portion that extends in the advancing and retracting movement direction D3 of the mounting table 10. The second linear motion guiding portion 43 moves the guide pin 44 so that the mounting table 10 located between the rotational position and the substrate loading/unloading position (see FIG. 5(D)) moves only in the forward and backward movement direction D3 and does not rotate. Guided.

The guide pins 44 guided by the guide portions 41 to 43 are located at the following positions. That is, when the mounting table 10 is located at the FOUP loading/unloading position (see FIG. 5(A)), the guide pin 44 is at the FOUP carry-in position P1 (see FIG. 4). Further, when the mounting table 10 is at the rotational position, the guide pin 44 is placed in one rotation end position (FOUP carry-in side rotation end position) P2 and the other rotation end position in conjunction with the rotation state of the mounting table 10 (substrate carry-in and out) Side rotation terminal position) Rotation position between P3 (for example, position P9). Further, when the mounting table 10 is positioned at the substrate loading/unloading position (see FIGS. 5(D) and (E)), the guide pin 44 is at the substrate loading/unloading position P4.

Further, each of the guiding portions 41 to 43 is a step portion in the present embodiment, but is not limited thereto. For example, it may be a groove structure that guides the guide pin.

The nozzle unit 50 includes an air supply nozzle 51 for filling an inert gas (purifying gas) into the FOUP 5 placed on the mounting table 10, an exhaust nozzle 52 for discharging the gas in the FOUP 5, and a nozzle support body. 53 which supports the nozzles 51, 52; and a lifting mechanism 54, which enables The nozzle support body 53 is raised and lowered. In addition, the nozzle unit 50 is used when, for example, a purge gas such as an inert gas such as nitrogen gas or argon gas is supplied and discharged with respect to the inside of the FOUP 5. Further, each of the nozzles 51 and 52 has a well-known structure, and thus detailed description thereof is omitted here.

The nozzle support 53 can be raised to a position higher than the mounting table 10. More specifically, the nozzle support body 53 can be moved up and down between the mounting table 10 and the bottom surface of the FOUP 5 placed on the mounting table 10. With this arrangement, the mounting table 10 can be moved back to the lower side of the nozzle support body 53 (the state of FIG. 5(D)). In addition, in a state where the movement of the mounting table 10 to the substrate loading/unloading position is completed, the nozzle support body 53 can be raised (the state of FIG. 5(E)) to perform the purging operation.

The elevating mechanism 54 is provided on the apparatus main body 1a, and the nozzle support body 53 is raised and lowered to a ventilation position (see FIG. 5(E)) and a descending position (see FIG. 5(D)). The nozzle support body 53 is raised to the air venting position, for example, when the mounting table 10 on which the FOUP 5 is placed is placed at the substrate loading/unloading position (see FIG. 5(D)). When the nozzle support 53 is raised to the vent position, the air supply nozzle 51 and the exhaust nozzle 52 are connected to the corresponding nozzle 埠 (not shown) formed on the bottom surface of the FOUP 5 of the mounting table 10. Further, when the nozzle support body 53 is lowered to the lowered position, the connection is released, and the air supply nozzle 51 and the exhaust nozzle 52 are separated from the nozzle 埠.

In addition, depending on the container manufacturer, the air supply nozzle may be disposed on the bottom surface (the bottom surface opposite to the FOUP door) on the side after the FOUP, and the exhaust nozzle may be disposed on the front side of the FOUP near the center. The bottom surface (the bottom surface of the FOUP door side). As shown in FIG. 3, the loading/unloading device 1 of the present embodiment is provided with nozzle support bodies 55 and 55 on both sides of the positioning pin 11b of the mounting table 10, and nozzles for supplying air are provided in the nozzle supporting bodies 55 and 55. Further, 51a and 51a are provided with additional nozzles 52a and 52a at positions further inside the nozzle support body 53 than the nozzles 51 and 52.

Thereby, the air supply piping system in the elevating mechanism 54 in the loading/unloading device 1 of the present embodiment The nozzles of each container have the same position, and can be switched by changing the air supply and exhaust ports, and supplying air. The path of the exhaust gas can also be easily changed by connecting. Further, the nozzle support body 55 is formed of an L-shaped frame so as not to interfere with the other nozzle support body 53 during the sliding or rotating operation of the mounting table 10, but the present invention is not limited thereto, and may be the same as the above-described lifting mechanism 54. The construction of the activity.

The operation of the carry-in/out device will be described with reference to Fig. 5 .

Here, the operation description will be started from the loading step. The loading step is a step of transferring the FOUP 5 to the positioning pin 11 of the loading table 10 of the loading and unloading device 1. Here, as a means for transferring the FOUP 5, a transfer machine (not shown) including a fork portion T that transports the transfer target FOUP 5 and transfers it to the mounting table 10 is used.

In addition, when the loading step is started, the FOUP 5 to be transferred is placed on the fork unit T of the transfer machine, and the mounting table 10 of the loading/unloading device 1 is placed at the transport cassette loading/unloading position (see FIG. 5 (A). )). Therefore, the link 23b of the air cylinder 23a of the slide mechanism 20 is in a protruding state in which the mounting table 10 is placed in the transport cassette loading/unloading position. At this time, the slider 22 is at the position where the FOUP is carried in and out, and the guide pin 44 is at the position P1 when the transport cassette is carried in and out (see FIG. 4).

In the loading step, first, the fork portion T of the transfer machine is operated, the FOUP 5 on the fork portion T is placed on the mounting table 10, and then the fork portion T is lowered to place the FOUP 5 on the positioning pin 11. (Transfer operation, refer to FIG. 5(A)). Thus, the probe pin 13 detects that the FOUP 5 is placed. However, by this, the FOUP 5 is supported by the positioning pin 11 in a state of being positioned at a specific FOUP mounting position.

In the loading step, the mounting table 10 is in a state in which the front end 10a (see FIG. 1) is moved in and out of the FOUP (see FIG. 5(A)), and the front side inlet portion 11g having a wide inlet width faces the FOUP. Move in and out of direction D1. Therefore, the fork portion T can be fed from the front side inlet portion 11g It is inserted into the work space S1 formed between the bottom surface of the transferred FOUP 5 and the upper surface of the mounting table 10. Moreover, the FOUP 5 is transferred to the mounting table 10 in a state in which the opening closed by the lid is directed toward the front end 10a side of the mounting table 10.

After that, the fork portion T is further lowered, and after the fork portion T is separated from the bottom surface of the transferred FOUP 5 (the fork portion is lowered), the fork portion T is moved so as to be withdrawn from the work space S1 (retraction operation) ). Thereby, the carry-in step ends. Here, the work space S1 is a space in which the above-described transfer operation, the fork portion lowering operation, and the retracting operation can be performed. The height of the positioning pin 11 is set so that the three operations can be sufficiently performed.

Next, a clamping step is performed. The clamping step is a step of fixing the FOUP 5 that has been transferred to the mounting table 10 to the mounting table 10.

In the clamping step, the gripping member 12 in the unlocked position is rotated in a manner to rise toward the locked position. Then, the claw portion of the tip end of the holding member 20 is engaged with the engaging portion of the bottom surface of the FOUP 5, and the FOUP 5 is fixed to the mounting table 10. When the FOUP 5 is fixed to the mounting table 10, when the mounting table 10 is moved toward the loading side, the FOUP 5 can be reliably prevented from falling off. This clamping step is only the operation of the gripping member 12, and does not require an action of lifting the mounting table 10. Therefore, when the loading step is completed, the clamping step can be quickly performed to be in the clamped state.

Next, the first moving step is performed. In the first moving step, the mounting table 10 on which the FOUP 5 is placed is moved from the FOUP loading/unloading position (see FIG. 5(A)) to the rotating position in a state in which the clamping in the holding step is maintained (see FIG. 5 (B). )) and the steps to stop.

At the start of the first moving step, the link 23b of the air cylinder 23a of the slide mechanism 20 enters the direction D1 in which the transport cassette is carried in and out, and the slider 22 is also in the entering state (see FIG. 5(A)). In the first moving step, the link 23b in this state is made in a retracted manner. Into the action. As a result, the mounting table 10 moves back to the transport cassette door side in the horizontal direction, and is in a state of being in the rotational position (see FIG. 5(B)).

At this time, the guide pin 44 of the mounting table 10 moves along the first linear motion guiding portion 41. Since the first linear motion guiding portion 41 is provided, the mounting table 10 moves backward by the rotation preventing state.

Next, a rotation step is performed. The rotation step is a step of rotating the mounting table 10 at the rotational position while maintaining the grip in the gripping step.

The stage 10 before the start of the rotation step is in a state in which the tip end 10a is moved in and out of the transport cassette D1, and the guide pin 44 is in the state of the position P2 (see FIG. 1).

In this state, the rotation mechanism is operated, and the mounting table 10 is rotated until the front end 10a of the mounting table 10 is in the direction in which the card door is loaded (the direction in which the substrate is carried in and out) D2 (see FIG. 5(C)). Thereby, the direction of the link 23b of the air cylinder 23a is reversed, and it is the state toward the side of the loading card. That is, the direction of the stage 10 is reversed by 180° by the rotating step.

At this time, the guide pin 44 moves along the rotation guide 42 to reach the position of the position P3 (refer to FIG. 1). Since the rotation guide portion 42 is provided, the stage 10 can be prevented from moving forward and backward on the one hand, and can be rotated in a stable state on the other hand.

If the position is rotated at a position other than the rotational position, the FOUP 5 on the mounting table 10 or the mounting table may cause a problem such as a peripheral member. In the device of the present embodiment, the guide portions 41 to 43 are provided. Indeed to prevent such a bad situation.

Next, the second moving step is performed. In the second moving step, the mounting stage 10 on which the FOUP 5 is placed is moved from the rotational position while maintaining the clamping in the clamping step and maintaining the state in which the front end 10a of the mounting table 10 is in the direction D2 in which the card is loaded. To the substrate loading and unloading position (see Follow the steps in Figure 5(D)).

In the second moving step, the cylinder 23a of the slide mechanism 20 is operated to cause the link 23b to move in a protruding manner. As a result, the mounting table 10 is moved backward in the horizontal direction (moving toward the loading card side), and is placed in a state in which the substrate is carried in and out (see FIG. 5(B)).

At this time, the guide pin 44 of the mounting table 10 moves along the second linear motion guiding portion 43. Since the second linear motion guiding portion 43 is provided, it is possible to prevent the rotation of the mounting table 10 on the one hand, thereby preventing the rotation of the DB.

As a result, when the FOUP 5 is moved to the substrate carry-in/out position, the substrate carry-in/out process can be performed. In addition, the substrate carrying-in and ejecting steps are well-known operations, and thus detailed description thereof is omitted here.

After the second moving step is completed, the intake and exhaust steps may be performed as needed. The suction and exhaust step is a step of filling the FOUP 5 with a purge gas or discharging the gas in the FOUP 5.

In the suction and exhaust step, first, the lifting mechanism of the nozzle unit is operated to raise the nozzle support to the supply position. Thereby, the intake nozzle and the exhaust nozzle are connected to corresponding 埠 (not shown) at the bottom of the FOUP 5. Thereafter, the purge gas is filled into the FOUP 5 via the intake nozzle, and the gas in the FOUP 5 is discharged through the exhaust nozzle.

When the substrate loading/unloading step is completed, the FOUP 5 that has moved the substrate into and out of the position is moved to the FOUP loading/unloading position, and is carried out by the loading/unloading device 1. However, the operation before the removal of the FOUP 5 from the carry-in/out device 1 in which the substrate has been carried out is carried out in the reverse order, and thus the detailed description thereof will be omitted.

As described above, in the carry-in/out device 1 of the present embodiment, the FOUP 5 that has been transferred to the mounting table 10 is moved to the substrate loading/unloading position and is carried out from the mounting table 10 until The state is clamped on the mounting table 10, so that the FOUP 5 can be moved in a stable state.

Further, since the mounting table 10 does not move up and down during the forward and backward movement, the FOUP 5 placed on the mounting table 10 can be quickly transported in a stable state.

In addition, the method of loading and unloading the substrate storage container and the substrate storage container of the present invention is not limited to the above embodiment, and the present invention includes various aspects of the device that are modified without departing from the scope of the present invention. And methods.

1a‧‧‧ moving into and out of the device

10‧‧‧ mounting table

10a‧‧‧Before the stage

11a, 11b‧‧‧ Locating pins

12‧‧‧Clamping members

12a‧‧‧ claws

13‧‧‧Probe pin

20‧‧‧Sliding mechanism

21‧‧‧Sliding mechanism body

21a‧‧‧rails

22‧‧‧ Slider

23‧‧‧Actuator

23a‧‧‧Cylinder

23b‧‧‧ Connecting rod

23c‧‧‧ coil spring

23d‧‧‧Connected components

30‧‧‧Rotating mechanism

31‧‧‧Rotating base

32‧‧‧ rotating body

42‧‧‧Rotary guide

43‧‧‧2nd linear motion guide

44‧‧‧guide (slave)

50‧‧‧Nozzle unit

51‧‧‧Air supply nozzle (one of the supply and exhaust nozzles)

51a‧‧‧Nozzle埠

52‧‧‧Exhaust nozzle (one of the air supply and exhaust nozzles)

52a‧‧‧Nozzle埠

53‧‧‧Nozzle support

54‧‧‧ Lifting mechanism

55‧‧‧Nozzle support

Claims (10)

A loading and unloading device for a substrate storage container, comprising: a mounting table on which a substrate storage container is placed; and a slide mechanism having a slider that supports the mounting table in a movable manner a substrate loading/unloading position in which the container is placed, a substrate loading/unloading position in which the container is carried in and out of the substrate on the mounting table, and a rotation mechanism that rotatably a rotating body supporting the sliding mechanism; the mounting table is rotatable at a rotational position between the container loading/unloading position and the substrate loading/unloading position; the rotating mechanism includes a rotating base fixed to the device base portion, and is rotatably supported by The rotating body of the rotating base; the base portion of the device to which the rotating base is fixed is provided with a guiding portion, and the guiding portion is provided with a linear motion guiding portion between the loading and unloading position of the container and the rotating position And guiding the forward and backward movement of the mounting table between the rotational position and the substrate loading and unloading position; and rotating the guiding portion, the mounting of the rotating position The rotation of the guide. The loading/unloading device for a substrate storage container according to the first aspect of the invention, wherein the rotation mechanism reverses a direction in which the sliding mechanism moves forward and backward by rotation at the rotation position; the slider is movable to Positioning the mounting table at the rotational position of the rotational position, and moving from the rotational position to the forward and backward moving direction, moving to a position at which the container is placed in the container loading and unloading position, and the loading position The position at which the substrate is moved in and out of the substrate is placed. The loading/unloading device for a substrate storage container according to the first aspect of the invention, wherein the mounting table has a guided portion on a lower surface thereof, and the guided portion is guided by the guiding portion so that the guiding portion is guided by the guiding portion The mounting table moves forward and backward and moves. The loading/unloading device for a substrate storage container according to the first aspect of the invention, wherein the mounting table includes a positioning pin that protrudes upward from an upper surface of the mounting table and supports the mounted container in a positioned state; The positioning pin supports the container placed on the positioning pin at the same height position as the height of the container when the substrate is carried in and out; the length of the positioning pin from the upper surface of the mounting table is on the positioning pin. a length of a working space between the bottom surface of the container and the upper surface of the mounting table; the working space is a fork for a transfer machine having a fork portion on which the transfer target container is placed a space for insertion; the sliding mechanism horizontally moves the container placed on the positioning pin of the mounting table. A loading and unloading device for a substrate storage container, comprising: a mounting table on which a substrate storage container is placed; and a slide mechanism having a slider that supports the mounting table in a movable manner The loading and unloading position of the container in which the container is placed and the substrate loading/unloading position in which the container is carried in and out between the device on the mounting table and the substrate is carried in and out; and the rotating mechanism is rotatably supported a rotating body of the sliding mechanism; and a nozzle unit including an air supply and exhaust nozzle for replacing the cleaning gas in the container placed on the mounting table; The mounting table is rotatable at a rotational position between the container loading/unloading position and the substrate loading/unloading position; the nozzle unit is provided with a lifting mechanism that can be raised and lowered to the mounting table placed at the substrate loading and unloading position. The nozzle 形成 formed by the bottom surface of the container communicates with the air supply and exhaust nozzle, and the lowering position of the air supply and exhaust nozzle from the nozzle ,. The nozzle unit is disposed at the apparatus base. The loading/unloading device for a substrate storage container according to the fifth aspect of the invention, wherein the supply and exhaust nozzle is provided on a side of the substrate carrying portion of the device base portion, and includes an air supply nozzle and an exhaust nozzle. The loading and unloading device for a substrate storage container according to the sixth aspect of the invention, wherein the nozzle unit includes a nozzle support that supports the air supply nozzle and the exhaust nozzle, and includes a gas supply nozzle located in the nozzle support And another nozzle inside the exhaust nozzle; the mounting table includes another nozzle support that supports another air supply nozzle; the air supply nozzle, the exhaust nozzle, the other nozzle, and the other air supply nozzle Each of the supply and exhaust ports can be switched to the position of the nozzle of the container. The loading/unloading device for a substrate storage container according to the fifth aspect of the invention, wherein the mounting table includes a positioning pin that protrudes upward from an upper surface of the mounting table and supports the mounted container in a positioned state; The positioning pin supports the container placed on the positioning pin at the same height position as the height of the container when the substrate is carried in and out; the length of the positioning pin from the upper surface of the mounting table is on the positioning pin. Contained The working space is formed between the bottom surface of the device and the upper surface of the mounting table; the working space is a space into which the fork portion of the transfer device having the fork portion of the container for loading the object is inserted; The sliding mechanism horizontally moves the container placed on the positioning pin of the mounting table. A method for loading and unloading a substrate storage container, comprising: a clamping step of fixing a substrate storage container that has been loaded to a mounting table to the mounting table; and the first moving step is to maintain the In a state of being clamped in the clamping step, the mounting table is moved from a position where the container is carried in and out of the container, and is stopped at a rotating position; and the rotating step is performed while maintaining the clamping in the clamping step. When the mounting table is rotated at the rotational position, the mounting table is moved in and out of the substrate, and the direction in which the substrate is carried in and out is the state in which the substrate carrying-in/out portion of the container is placed in the direction in which the substrate is carried in and out. And a second moving step of moving the mounting table to the substrate from the rotational position while maintaining the clamping in the clamping step and moving the mounting table toward the substrate. a position to be moved in the first movement step, wherein the first linear motion guiding portion moves the mounting table between the position where the container is carried in and out and the rotational position, and only moves in the advancing and retracting direction; In the rotating step, the mounting portion at the rotational position is rotated by the rotation guide portion without moving in the advancing and retracting direction; and in the second moving step, the mounting table is rotated by the second linear motion guiding portion. The position does not rotate between the position where the substrate is carried in and out, and only moves in the advancing and retracting direction. The loading/unloading method of the substrate storage container according to the ninth aspect of the invention, further comprising the carrying-in step of transferring the container to the upward direction using a transfer device having a fork portion on which the container to be transferred is placed The protruding state is disposed on the positioning pin of the mounting table; the loading step includes an operation of transferring the fork portion to move the container of the transfer object to the positioning pin; a lowering operation of the fork portion, wherein the fork portion after the transfer operation is lowered to a working space formed between a bottom surface of the container that has been transferred to the positioning pin and an upper surface of the mounting table; and retreat The operation is to extract the fork portion from the working space.