TWI511230B - A detection machine with a mask - Google Patents

Description

Detecting machine with mask

A masking inspection machine, in particular, a masked inspection machine that applies a positive pressure above the electronic component to be tested, thereby providing sufficient downforce to ensure detection reliability without substantial contact.

In general, electronic components, such as optoelectronic or semiconductor components, need to be tested during manufacturing or assembly to verify their various electrical properties. A common automated detection method is to electrically connect the electronic components to be tested to the test. The detection device on the machine, power on or input signal to confirm the operation of the above products. In order to ensure the reliability of the power-on or the input signal, the detecting machine is provided with a pressing arm in the detecting device portion, and by applying pressure, the electronic component to be tested is forced to be well connected with the electrode on the machine; During the high temperature generated during the test, additional thermal contact devices are provided to ensure that the temperature of the operating environment is not too high and damages the components themselves.

However, taking CCD and LED components as an example, the pressing of the mechanical arm ensures the conductive and thermal conduction between the device under test and the machine, but also increases the risk of scratching the surface of the CCD and the LED component, as a CCD component for image capture. Once the surface is scratched, it will affect the light trapping. As for the light-transmissive cover of the LED component, in addition to the protection function, it is usually responsible for determining the light field distribution of the LED component. If a scratch occurs, the light will be affected; especially when the light energy transmission is blocked, it may be The scratch is absorbed and converted into heat energy residue. Therefore, the scratch is more likely to heat up than other smooth places. For long-term use, the light-transmissive cover may be broken by thermal stress and damage the components.

Therefore, as described above, the CCD-based optical sensing electronic component, the LED-based luminescent electronic component, or the un-packaged bare-crystal component is limited in that the optical sensing-type electronic component cannot be left on the light receiving surface. In other words, the light-transmitting protective cover of the illuminating electronic component itself involves the distribution of the light field of the light and cannot be pressed, and the bare-crystal component is more incapable of directly applying pressure to the extremely fine circuit surface. Contradictoryly, when performing the above test, the electrical connection or the thermal connection needs to be completely tightly attached. Once there is a slight gap between the electrode of the electronic component to be tested and the electrode of the detection machine, the air is both poor in electricity and heat. The conductor can easily lead to malfunction of the device under test, and it is misidentified by the inspection machine, or it is burnt due to the high temperature accumulation during the detection process due to the inconsistent heat conduction effect.

Another consideration is that if the LED wafer has not been divided, the temperature change of the factor during the manufacturing process may result in uneven warping of about 5 micrometers, so that the spotting device has poor contact due to the height drop when the conductive device contacts the respective crystal grains. , which in turn affects the accuracy of the overall detection. Therefore, the electronics industry adopts a detection machine. The surface of the machine is equipped with a vent hole on the surface of the machine. The vacuum pump is used to draw downward, and the wafer is adsorbed on the surface of the machine to detect the surface of the crucible. The electrode is in conductive contact with the detecting port, and the common electrode of the wafer to be tested is electrically connected to the electrode on the detecting machine.

The design of fixing and guiding by adsorption is mainly to remove the air pressure under the object to be tested, so that the air pressure above the object to be tested is applied to the object to be tested, thereby achieving the effect of fixing and pressing; The air pressure in all directions of the object is one atmosphere, that is, in the non-contact condition, the maximum downward pressure that can be applied is limited to only one atmospheric pressure, so that the pressing effect of the structure on the object to be tested is limited. Moreover, when the object to be tested is not flattened to a certain extent, or the contact end has greater elasticity, the conductive contact between the test object and the electrode of the test machine and the heat conduction contact effect are still not ensured. In order to provide a downward pressure close to an atmospheric pressure, the lower part is responsible for suction The vacuum pump must increase the attractiveness and increase the vacuum, which will greatly increase the cost of the machine.

Therefore, the present invention provides a non-contact down-press design that avoids the risk of damage to the component to be tested during the pressing process, and still ensures the effect of pressing down, providing good conductive contact and thermal contact during the test. Completely solve the dilemma of the past and provide a fully automated inspection machine.

SUMMARY OF THE INVENTION An object of the present invention is to provide a detecting machine that replaces physical pressing with air pressure and reduces the probability of damage of the test object during the detecting process.

Another object of the present invention is to provide a detecting machine for providing effective electrical conduction and thermal conduction connection between an element to be tested and a detecting machine, thereby ensuring detection accuracy and increasing the detection rate.

It is still another object of the present invention to provide a non-contact down-pressing machine that can be adjusted to a pressure greater than one atmosphere, providing an adjustable detection environment and increased detection flexibility.

Still another object of the present invention is to reduce the strength of the vacuum pumping required by the downforce, and even to provide a sufficient conductivity and heat conduction detecting machine without the need of a vacuum pump, thereby reducing the overall machine cost.

A masking detection machine for ventilating to a gas pressure increasing and lowering device and for detecting at least one electronic component, the testing machine comprising: a base; one disposed on the base and having at least one a venting port bearing device; at least one set of detecting devices corresponding to the at least one venting hole and disposed on the carrying device and electrically connecting the electronic components; one set on the pedestal and one corresponding to the at least one group Detecting an opening of the device and forming a mask with a hermetically sealed space together with the base; wherein the mask and/or the base are further formed to One of the pressure holes that is away from the vent hole and is ventilated to the air pressure increasing and lowering device to form a positive pressure in the hermetically sealed space.

Through the above-described mask design, the present invention utilizes air pressure to provide pressure without physical contact with the object to be tested. Therefore, the problem of scratching and damage of the object to be tested during the detection process of the prior art is solved, so that the detection is more stable and safe, and the detection yield is improved.

The foregoing and other objects, features, and advantages of the invention are set forth in the <RTIgt;

A first preferred embodiment of the present invention, as shown in FIG. 1, a masking machine 1 includes a base 10 having a set of carrying devices 11 for carrying components to be tested, and a carrying device 11 Corresponding at least one set of detections is a detection device 12 for detecting points, and a set of masks 13 covering the detection device 12 of the above-mentioned release as a detection point and disposed on the carrier device 11. The mask 13 and the base 10 are hermetically joined to form an airtight enclosed space 131. The carrying device 11 is mainly used for isolating the object to be tested and the susceptor 10 for insulation, and can also be used as the object to be tested for heat conduction and heat dissipation during the test.

As shown in FIG. 2, in the carrier device 11 provided on the susceptor 10, for example, five sets of vent holes 110 are formed, which are respectively connected to the outside via the carrier device 11 and the susceptor 10, and in the present example, the above-mentioned pass The air hole 110 is connected to a group of air pressure increasing and lowering devices 15 for vacuum pumping to generate a negative pressure via a vent pipe (not labeled), thereby forcing air to flow downward from the vent hole 110, so that the electronic component 2 is shielded from the passage. When the air hole 110 is above, a negative pressure is formed at the vent hole 110 due to suction. The base 10 is further provided with, for example, five sets of detecting means 12 for detecting points, in this case, inspecting The measuring device 12 corresponds to each of the vent holes 110 provided on the carrying device 11, and the detecting device 12, which is a detecting point in the present example, is a detecting point for a pair of enabling electrodes disposed around each of the vent holes 110 in this example. For convenience of explanation, the electronic component 2 to be tested in this example is an example of an LED component.

When the electronic component 2 to be tested is detected on the detecting machine 1, each LED component is placed on the carrying device 11 and corresponding to, for example, a group of vent holes 110, and the air pressure increasing and decreasing device 15 is vented from the venting hole 110. The air is extracted, and the electronic component 2 is positioned under negative pressure by the air suction on the detecting device 12, and is electrically connected in pairs with the detecting device 12 as a detecting point of the enabling electrode. In order to reduce the cost of the machine, the suction effect required by the air pressure increasing and decreasing device 15 of the present invention does not need to achieve a high vacuum, and only a general vacuum degree is required, and even one vent hole 110 corresponds to each object to be tested, and thus The electronic component 2 is initially positioned at the detecting device 12.

For the mask 13 of the present embodiment, please refer to FIG. 3 and FIG. 4 together. An opening 130 is formed under the drawing, so that the mask 13 can be covered on the base 10, and each cover is covered as a detection point. Detection device 12. The mask 13 and the base 10 must be kept airtight so that they together surround a hermetic closed space 131. In the present case, the base 10 or the cover 13 is provided with a pressurizing hole 14 for injecting air into the air. In this example, the pressurizing hole 14 is formed on the mask 13, and the pressurizing hole 14 is extended. The air pipe is connected to the air pressure increasing and lowering device which is an air pressure source by the ventilating; thereby, a positive pressure of, for example, five atmospheres is applied to the airtight closed space 131.

Since the pressure in the hermetic closed space 131 reaches five atmospheres, the electronic component 2, which is attracted to the remote position and is positioned at the detection position, is more closely attached to the detecting device 12, thereby completely eliminating the gap between the two. Ensure that the power source and signal are transmitted, so that the LED component in this example is correctly tested, so that the measured signal of the object to be tested is output from the detecting device 12 to External instruments or display devices to avoid any false positives.

The second preferred embodiment of the present invention improves the above-described mask, and as shown in Fig. 5, a light transmitting region 132' is further formed. The user can confirm the internal detection work from the outside of the mask 13', eliminating the need to open the mask 13'. Since the inside of the mask 13' is in a state of high air pressure during operation of the present invention, if the cover 13' is opened for detection, it must be pressed first, and then re-pressurized after confirmation; not only troublesome but also wastes the time of detection. Through the design of the light-transmissive area 132', the advantage is that the confirmation can be made immediately without having to press the pressure, and the detection is not interrupted or interrupted. Of course, those skilled in the art can easily infer that the transparent region 132' of the mask 13' of the present invention is not necessarily limited to a certain portion; or the entire mask 13' may be transparent.

The third preferred embodiment of the present invention is mainly shown in FIG. 6. The carrier device includes a set of temperature control units 111". In this example, a set of temperature control platforms having thermal contact points is taken as an example, for example. When the CCD as the electronic component 2" to be tested is pressed against the detecting device 12", the bottom of the CCD also directly contacts a heat conducting contact of the temperature control unit 111". The inspection machine can thus maintain the component to be tested at a low temperature of, for example, zero degrees Celsius, or a specific temperature of, for example, sixty degrees Celsius, in accordance with the operator's design, thereby confirming the electrical properties and photoelectricity of the device under test at the operating temperature. Features, increase the application flexibility of the inspection machine.

Of course, those skilled in the art can easily understand that the above temperature control unit can be further simplified. Therefore, the fourth preferred embodiment of the present invention is as shown in FIG. 7, and the temperature control unit is provided in the form of a simple heat conduction unit 19''. At the detection points of each set of enabling electrodes, for example, a material having a good thermal conductivity or a structural design such as a metal spacer is provided, thereby combining the heat conducting units 19"' in the cost example. For example, when a high-brightness LED component is used as the electronic component 2 to be tested, heat emitted during the detection process can be easily conducted to the heat dissipation fins (not shown) by the heat conductive material to avoid high temperature during operation. Damage to the component under test itself, shorten its lifetime, or cause degradation of luminescence properties.

In addition, as shown in FIG. 8, the air pressure increasing and lowering device 15''' in this example includes a set of pressure gauges 151"', a pneumatic source 152"', and a pneumatic valve 150'''. The pressure hole 14 ′′′ on the carrying device 11 ′′′ is configured to input positive air into the airtight closed space 131 ′′′, and may also be connected to the bearing device 11 ′′′ A plurality of vent holes 110''' are formed to form a negative pressure. Wherein the air pipe corresponding to the pressing hole 14 ′′′ is further provided with a regulating valve 150 ′′′ for controlling the one-way circulation of the air, and the pressure gauge 151 ′′′ is connected to the airtight closed space 131 ′′′ By allowing the gas from the air pressure source 152"' to continue to pass through the regulating valve 150"' to be replenished into the hermetic closed space 131"' to maintain the pressure therein. The positive pressure is within the predetermined range. Of course, those skilled in the art can easily infer that the present invention can provide no downward suction at all, wherein the air pressure increasing and lowering device 15"" is only a pump, and is simply provided in the hermetically sealed space 131"". Positive pressure. And connecting the vent hole 110"' to the outside of the hermetic closed space 131"", the vent hole can be formed in a relatively negative pressure state with respect to the positive pressure in the above-mentioned hermetic closed space 131"".

However, the above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes and modifications according to the scope of the present invention and the description of the invention are still It is within the scope of the patent of the present invention.

1‧‧‧Testing machine

10‧‧‧ Pedestal

11, 11'''‧‧‧ Carrying device

110, 110'''‧‧‧ Vents

111"‧‧‧temperature control unit

12, 12"‧‧‧Detection device

13, 13’‧‧‧ mask

130‧‧‧ openings

131,131'''‧‧‧ ‧ hermetic closed space

132'‧‧‧Lighting area

14, 14'''‧‧‧ Pressurized hole

15, 15'''‧‧‧ Air pressure increase and decrease device

150'''‧‧‧Control Valve

151'''‧‧‧ Pressure gauge

152'''‧‧‧ Air pressure source

19'''‧‧‧ Thermal Conductive Unit

2, 2", 2'''‧‧‧ Electronic components

1 is a side elevational view of a first preferred embodiment of the testing machine of the present invention; FIG. 2 is a cross-sectional side view of the base and the carrying device of the embodiment of FIG. 1 for illustrating the operation of negative pressure positioning; FIG. 1 is a perspective view of a mask; Figure 4 is a cross-sectional side view of the embodiment of Figure 1 for illustrating the operation of the hermetic closed space; Figure 5 is a cross-sectional side view of the second preferred embodiment of the present invention for illustrating the structural relationship of the transparent region of the mask; Figure 6 is a side elevational view of a third preferred embodiment of the present invention for explaining a temperature control unit; Figure 7 is a side elevational view of the fourth preferred embodiment of the present invention for explaining the operation of the heat conducting unit; Figure 8 is Figure 7 A schematic diagram of a pneumatic input control device of an embodiment.

1‧‧‧Testing machine

12‧‧‧Detection device

131‧‧‧Seal sealed space

13‧‧‧ mask

10‧‧‧ Pedestal

11‧‧‧ Carrying device

Claims (9)

A masking detection machine for ventilating to a gas pressure increasing and lowering device and for detecting at least one electronic component, the testing machine comprising: a base; one disposed on the base and having at least one a venting port bearing device; at least one set of detecting devices corresponding to the at least one venting hole and disposed on the carrying device and electrically connecting the electronic components; one set on the pedestal and one corresponding to the at least one group Detecting an opening of the device and forming a mask with a sealed space; and wherein the mask and/or the base are further formed with at least one venting connection to the air pressure increasing and lowering device, such that the air sealing A pressurized hole is formed in the closed space. A detecting machine having a mask as in the first aspect of the patent application, wherein the carrying device further comprises a heat conducting unit. A detecting machine having a mask as in the first aspect of the patent application, wherein the carrying device further comprises a temperature control unit. A detecting machine having a mask according to the first, second or third aspect of the patent application, wherein the vent hole is connected to the air pressure increasing and lowering device, and a negative pressure state is formed at the vent hole. A detecting machine having a mask according to the first, second or third aspect of the patent application, wherein the vent hole is connected to the outside of the hermetic closed space, and the positive pressure is formed in the vent hole relative to the airtight closed space. Relative negative pressure state. The inspection machine has a mask as in the first, second or third aspect of the patent application, wherein the pressure hole is further equipped with a regulating valve. A detection machine having a mask as in the first, second or third aspect of the patent application, wherein the detection machine further comprises the above-mentioned air pressure increase and decrease device. A detection machine having a mask as in the seventh aspect of the patent application, wherein the pressure increase and decrease device further comprises a pressure gauge. A detecting machine having a mask as in the first, second or third aspect of the patent application, wherein the mask is formed with a light transmitting area.