TWI496951B - 鎂合金殼體及其製作方法 - Google Patents
鎂合金殼體及其製作方法 Download PDFInfo
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- TWI496951B TWI496951B TW100114216A TW100114216A TWI496951B TW I496951 B TWI496951 B TW I496951B TW 100114216 A TW100114216 A TW 100114216A TW 100114216 A TW100114216 A TW 100114216A TW I496951 B TWI496951 B TW I496951B
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- magnesium alloy
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- 229910000861 Mg alloy Inorganic materials 0.000 title claims description 74
- 238000000034 method Methods 0.000 title claims description 13
- 239000011777 magnesium Substances 0.000 claims description 55
- 238000006243 chemical reaction Methods 0.000 claims description 48
- 239000002131 composite material Substances 0.000 claims description 42
- 239000000758 substrate Substances 0.000 claims description 42
- 229910052749 magnesium Inorganic materials 0.000 claims description 31
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 17
- 229910052760 oxygen Inorganic materials 0.000 claims description 17
- 238000000576 coating method Methods 0.000 claims description 14
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
- 239000011248 coating agent Substances 0.000 claims description 13
- 229910052748 manganese Inorganic materials 0.000 claims description 12
- 229910052698 phosphorus Inorganic materials 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000011159 matrix material Substances 0.000 claims description 10
- 239000000654 additive Substances 0.000 claims description 7
- 230000000996 additive effect Effects 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- 238000005240 physical vapour deposition Methods 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 239000012286 potassium permanganate Substances 0.000 claims description 3
- 239000005696 Diammonium phosphate Substances 0.000 claims description 2
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 2
- 229910021529 ammonia Inorganic materials 0.000 claims description 2
- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 claims description 2
- 229910000388 diammonium phosphate Inorganic materials 0.000 claims description 2
- 235000019838 diammonium phosphate Nutrition 0.000 claims description 2
- 230000005484 gravity Effects 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims 2
- 239000005416 organic matter Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 71
- 239000003513 alkali Substances 0.000 description 8
- 238000005530 etching Methods 0.000 description 8
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 230000004913 activation Effects 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 6
- 229910020335 Na3 PO4.12H2 O Inorganic materials 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000005238 degreasing Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- -1 polyoxyethylene Polymers 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005237 degreasing agent Methods 0.000 description 1
- 239000013527 degreasing agent Substances 0.000 description 1
- 238000004512 die casting Methods 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-M dihydrogenphosphate Chemical compound OP(O)([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-M 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000013072 incoming material Substances 0.000 description 1
- 150000002680 magnesium Chemical class 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0676—Oxynitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
- C23C22/06—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
- C23C22/40—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6 containing molybdates, tungstates or vanadates
- C23C22/42—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6 containing molybdates, tungstates or vanadates containing also phosphates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Laminated Bodies (AREA)
- Chemical Treatment Of Metals (AREA)
Description
本發明係關於一種鎂合金殼體及其製作方法。
鎂合金具有質量輕、強度高、外觀華麗的特點,目前在通訊電子,汽車等領域得到日益廣泛的應用。現有的鎂合金殼體中,鍍層一般通過PVD技術直接鍍在鎂合金基體的表面,然而由於鎂合金基體表面組織凹凸不平,鍍層難以獲得良好的結合力。如此,限制了鎂合金在其使用範圍內發揮優勢。同時由於PVD技術的特點,鍍層大部分呈柱狀晶結構,鍍層表面不可避免地存在針孔等一些典型的缺陷,使其耐腐蝕、耐磨損性能有限。另外,該種單層的PVD亦難以有效地保護鎂合金基體。
鑒於上述內容,有必要提供一種鍍層結合力良好、耐腐蝕、耐磨損性能好的鎂合金殼體。
另外,有必要提供一種上述鎂合金殼體的製作方法。
一種鎂合金殼體,包括鎂合金基體與複合膜層,該鎂合金基體與該複合膜層之間還形成有轉化膜,其主要含有Mg、Al、O、P、Mn,所述複合膜層形成於該轉化膜上,且依次包括直接形成於轉化膜上的第一膜層、直接形成於第一膜層上的第二膜層及直接形成
於第二膜層上的第三膜層,其中第一膜層為MgxOy層,第二膜層為MgxNz,第三膜層為MgxOyNz,所述轉化膜中Mg、Al、O、P、Mn的原子個數比範圍為(1~5):(1~5):(2~10):(1~10):(3~10)。
一種鎂合金殼體的製作方法,包括以下步驟:提供一鎂合金基體;在鎂合金基體上進行化學轉化膜處理形成一轉化膜,其主要含有Mg、Al、O、P、Mn,所述轉化膜中Mg、Al、O、P、Mn的原子個數比範圍為(1~5):(1~5):(2~10):(1~10):(3~10);在轉化膜表面進行PVD鍍形成複合膜層,所述複合膜層形成於該轉化膜上,且依次包括直接形成於轉化膜上的第一膜層、直接形成於第一膜層上的第二膜層及直接形成於第二膜層上的第三膜層,其中第一膜層為MgxOy層,第二膜層為MgxNz,第三膜層為MgxOyNz。
相較於習知技術,本鎂合金殼體在鎂合金基體與複合膜層之間形成有轉化膜,該轉化膜與鎂合金基體結合牢固,且轉化膜與複合膜層結合的表面平整,大大提高了與複合膜層的結合力,並且該複合膜層中三層不同的含鎂的氧化或氮化膜層相互疊加,使得鎂合金殼體表面耐磨損、耐腐蝕。
10‧‧‧鎂合金殼體
11‧‧‧鎂合金基體
12‧‧‧轉化膜
13‧‧‧複合膜層
131‧‧‧第一膜層
132‧‧‧第二膜層
133‧‧‧第三膜層
100‧‧‧鍍膜機
20‧‧‧鍍膜室
21‧‧‧軌跡
22‧‧‧鎂靶
30‧‧‧真空泵
圖1係本發明較佳實施例鎂合金殼體的剖面示意圖;圖2係鎂合金殼體的製作方法流程圖;
圖3係圖1產品的製作過程中所用鍍膜機的結構示意圖。
為了使本發明的目的、技術方案及優點更加清楚明白,以下結合附圖與實施例對本發明進行進一步詳細說明。
請參閱圖1,本發明較佳實施例鎂合金殼體10,包括鎂合金基體11、形成在鎂合金基體11上的轉化膜12、以及形成在轉化膜12上的複合膜層13。所述轉化膜12的厚度為0.2~5μm,為複合物膜,其主要含有Mg、Al、O、P、Mn。所述複合膜層13的厚度為2μm~5μm。該複合膜層13包括第一膜層131、第二膜層132和第三膜層133,第一膜層131為MgxOy層;第二膜層132為MgxNz層,第三膜層133MgxOyNz層,其中x,y,z的取值範圍均在1~10之間。
請參閱圖2,該鎂合金殼體10的製作方法包括以下步驟:
S1:提供一鎂合金基體11,該鎂合金基體11為Mg、Al等金屬材料的合金。將該鎂合金基體11進行化學除油清洗,達到去除鎂合金基體11表面細孔、盲孔中油污的目的。化學除油的過程如下:提供一種清洗溶液,該清洗溶液由Na2CO3、Na3PO4.12H2O、辛基酚聚氧乙烯、及H2O配成,且Na2CO3的濃度為25-30g/l,Na3PO4.12H2O的濃度為20-25g/l,辛基酚聚氧乙烯的濃度為1-3g/l。將鎂合金基體11置入該清洗溶液中清洗,維持溶液溫度在60-80℃,清洗時間為30-60s。
S2:對化學除油後的鎂合金基體11進行水洗,以去除除油清洗後附著在鎂合金基體11表面的除油藥劑。該水洗可為噴淋沖洗,時間20-60s。
S3:對水洗後的鎂合金基體11進行鹼蝕處理,以消低鎂合金基體11表面的凸出部位。該凸出部位為鎂合金基體11表面的一些毛刺,該毛刺在來料工序的沖壓或壓鑄中形成。鹼蝕過程如下:提供一種鹼蝕溶液,該鹼蝕溶液由NaOH、Na3PO4.12H2O、Na2CO3、NaF、及H2O配成,且NaOH的濃度在40-70g/l之間,Na3PO4.12H2O的濃度在10-20g/l之間,Na2CO3的濃度為25-30g/l,NaF的濃度在40-50g/l之間。將鎂合金基體11置入該鹼蝕溶液中進行鹼蝕處理,維持溶液溫度在40-50℃,鹼蝕處理時間為3-5s。鹼蝕過程中,由於凸出部位接觸鹼蝕溶液的面積大,從而可以將凸出部位削平。
S4:對鹼蝕後的鎂合金基體11進行活化處理,以提高鎂合金基體11表面分子的活性,利於增強與轉化膜12的結合力。活化處理過程如下:提供一種活化溶液,該活化溶液由HNO3、HF、及H2O配成,其中HNO3與HF的質量比值為3:1,且配成後HNO3佔溶液的質量百分含量為1-10%,HF佔溶液的質量百分含量為1-8%。將鎂合金基體11置入該活化溶液中,活化溫度可為室溫,活化時間為3-20s。
S5:對活化後的鎂合金基體11進行化學轉化膜處理,以在鎂合金基體11表面形成轉化膜12。提供一種轉化膜溶液,該轉化膜溶液由磷酸二氫氨、高錳酸鉀、添加劑及水配成。所述添加劑包括硫化物與氨系有機物,且各佔添加劑成分比重的10-20%。該轉化膜溶液中,磷酸二氫氨的濃度為60-100g/l,高錳酸鉀的濃度為1-40g/l,添加劑的濃度為1-6g/l。將鎂合金基體11置入該轉化膜溶液中,維持溶液溫度在30℃,反應時間為20min。如此,將
在鎂合金基體11表面形成轉化膜12。該轉化膜12平整地形成在鎂合金基體11表面,轉化膜12的厚度在0.2~5μm,轉化膜12為一複合物膜,其主要含有Mg、Al、O、P、Mn,且Mg、Al、O、P、Mn的原子個數比範圍為(1~5):(1~5):(2~10):(1~10):(3~10)。所述轉化膜12為在上述反應條件下,轉化膜溶液中的Mn,P,O元素與基材表面的Mg,Al元素發生雜合反應而形成。
S6:將化學轉化膜處理後的鎂合金基體11進行烘乾處理。
S7:將烘乾後的鎂合金基體進行PVD鍍膜,以在轉化膜12表面形成複合膜層13。請參閱圖2,提供一鍍膜機100,該鍍膜機100包括一鍍膜室20及連接於鍍膜室20的一真空泵30,真空泵30用以對鍍膜室20抽真空。該鍍膜室20內設有轉架(未圖示)、二鎂靶22,轉架帶動鎂或鎂合金基體11沿圓形的軌跡21公轉,且鎂或鎂合金基體11在沿軌跡21公轉時亦自轉。
形成所述複合膜層13的的具體操作及工藝參數如下:首先,形成複合膜層13中的第一膜層131,提供鎂靶22並置於鍍膜機100的濺射源上,將鎂合金基體11的偏壓調控在-150~-300V,鎂合金基體11的溫度控制在120ºC,通入流量為150~300sccm(標準狀態毫升/分鐘)的氬氣、流量為1-50sccm的氧氣,開啟鎂靶22濺鍍,設定鎂靶22的功率在8~16kw,轉架轉速為0.5r/min(轉/分鐘),濺鍍30min。如此,鎂合金基體11的表面將鍍覆有所述複合膜層13中的第一膜層131即MgxOy層。
形成複合膜層13中第二膜層132,關閉氧氣,開啟氮氣,設置流量為1~50sccm,設定基材的偏壓-150~-300V,開啟鎂靶22濺鍍,設定鎂靶22的功率在8~16kw,轉架轉速為0.5r/min(轉/分鐘),
濺鍍40min。如此,在複合膜層13中第一膜層131即MgxOy上形成第二膜層132即MgxNz。
形成複合膜層13中最外層第三膜層133,通入流量為1~50sccm的氮氣和1-50sccm的氧氣,開啟鎂靶22濺鍍,設定鎂靶22的功率在8~16kw,設定基材的偏壓-150~-300V,轉架轉速為0.5r/min(轉/分鐘),濺鍍60min。然後關閉鎂靶,如此,鎂合金基體11的表面將鍍覆有所述複合膜層13的第三膜層133及MgxOyNz。
上述複合膜層13中的三個膜層是由遠離鎂合金基體11的方向依次形成,且複合膜層13的MgxOy層、MgxNz和MgxOyNz層中x,y,z的取值範圍均在1~10。第一膜層131用以增強轉化膜12與第二膜層132與第三膜層133的結合力。該複合膜層13與轉化膜12具有良好的結合力,且複合膜層13表面幾乎無孔隙。
本鎂合金殼體10在鎂合金基體11與複合膜層13之間形成有轉化膜12,該轉化膜12與鎂合金基體11結合牢固,且轉化膜12與複合膜層13結合的表面平整,大大提高了與複合膜層13的結合力;同時,轉化膜12與複合膜層13形成的多層結構可很好地保護鎂合金基體11,使得鎂合金殼體10表面耐磨損、耐腐蝕。
綜上所述,本發明符合發明專利要件,爰依法提出專利申請。惟,以上所述者僅為本發明之較佳實施方式,舉凡熟悉本案技藝之人士,於爰依本發明精神所作之等效修飾或變化,皆應涵蓋於以下之申請專利範圍內。
10‧‧‧鎂合金殼體
11‧‧‧鎂合金基體
12‧‧‧轉化膜
13‧‧‧複合膜層
131‧‧‧第一膜層
132‧‧‧第二膜層
133‧‧‧第三膜層
Claims (8)
- 一種鎂合金殼體,包括鎂合金基體與複合膜層,其改良在於:該鎂合金基體與該複合膜層之間還形成有轉化膜,其主要含有Mg、Al、O、P、Mn,所述複合膜層形成於該轉化膜上,且依次包括直接形成於轉化膜上的第一膜層、直接形成於第一膜層上的第二膜層及直接形成於第二膜層上的第三膜層,其中第一膜層為MgxOy層,第二膜層為MgxNz,第三膜層為MgxOyNz,其中複合膜層中各膜層中x,y,z的取值範圍均在1~10之間,所述轉化膜中Mg、Al、O、P、Mn的原子個數比範圍為(1~5):(1~5):(2~10):(1~10):(3~10)。
- 如申請專利範圍第1項所述之鎂合金殼體,其中所述轉化膜的厚度為0.2~5μm。
- 如申請專利範圍第1項所述之鎂合金殼體,其中所述鍍膜的厚度為2~5μm。
- 一種鎂合金殼體之製作方法,包括以下步驟:提供一鎂合金基體;在鎂合金基體上進行化學轉化膜處理形成一轉化膜,其主要含有Mg、Al、O、P、Mn,所述轉化膜中Mg、Al、O、P、Mn的原子個數比範圍為(1~5):(1~5):(2~10):(1~10):(3~10);在轉化膜表面進行PVD鍍形成複合膜層,所述複合膜層形成於該轉化膜上,且依次包括直接形成於轉化膜上的第一膜層、直接形成於第一膜層上的第二膜層及直接形成於第二膜層上的第三膜層,其中第一膜層為MgxOy層,第二膜層為MgxNz,第三膜層為MgxOyNz,其中複合膜層中各膜層中x,y,z的取值範圍均在1~10之間。
- 如申請專利範圍第4項所述之鎂合金殼體之製作方法,其中所述轉化膜的處理是在一轉化膜溶液中進行,該轉化膜溶液由磷酸二氫氨、高錳酸鉀、添加劑、及水配成,所述添加劑包括硫化物與氨系有機物,且各佔添加劑成分比重的10~20%。
- 如申請專利範圍第4項所述之鎂合金殼體之製作方法,其中所述複合膜層中形成MgxOy層的參數為:開啟鎂靶,設定鎂靶的功率在8~16kw,設定基材的偏壓-150~-300V,通入流量為1-50sccm的氧氣,濺鍍30min。
- 如申請專利範圍第4項所述之鎂合金殼體之製作方法,其中所述複合膜層中形成MgxNz的參數為:開啟氮氣,設置流量為1~50sccm,設定基材的偏壓-150~-300V,開啟鎂靶,設定鎂靶的功率8~16kw,濺鍍40min。
- 如申請專利範圍第4項所述之鎂合金殼體之製作方法,其中所述複合膜層中形成MgxOyNz的參數為:通入流量為1~50sccm的氮氣和1-50sccm的氧氣,設定基材的偏壓-150~-300V,開啟鎂靶,設定鎂靶的功率在8~16kw,濺鍍60min。
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Publication number | Priority date | Publication date | Assignee | Title |
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US6787192B2 (en) * | 2000-04-27 | 2004-09-07 | Otsuka Kagaku Kabushiki Kaisha | Process for producing part made of magnesium and/or magnesium alloy |
US20080152836A1 (en) * | 2006-12-22 | 2008-06-26 | Industrial Technology Research Institute | Method and apparatus of growing a thin film |
US20100128520A1 (en) * | 2008-11-25 | 2010-05-27 | Seagate Technology Llc | Non volatile memory including stabilizing structures |
WO2010068539A1 (en) * | 2008-12-12 | 2010-06-17 | Everspin Technologies, Inc. | Magnetic tunnel junction stack |
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US6787192B2 (en) * | 2000-04-27 | 2004-09-07 | Otsuka Kagaku Kabushiki Kaisha | Process for producing part made of magnesium and/or magnesium alloy |
US20080152836A1 (en) * | 2006-12-22 | 2008-06-26 | Industrial Technology Research Institute | Method and apparatus of growing a thin film |
US20100128520A1 (en) * | 2008-11-25 | 2010-05-27 | Seagate Technology Llc | Non volatile memory including stabilizing structures |
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