TWI488694B - Apparatus for dropping liquid - Google Patents

Description

Device for dropping liquid

The present invention relates to an apparatus for dropping a liquid, and more particularly to a substrate for horizontally moving a discharge unit in a state where a plurality of head blocks are fixed to a gantry A device that dispenses liquid crystal.

Generally, a cathode ray tube (CRT) is widely used as a display device. However, CRTs have various disadvantages such as a relatively large volume and a relatively heavy weight. Therefore, in recent years, flat panel display devices such as a liquid crystal display (LCD) device, a plasma display panel (PDP) device, or an organic light emitting device (OLED) have been used. Flat panel display devices have characteristics such as relatively light weight, relatively thin thickness, and relatively low power consumption.

A flat panel display device can be manufactured by combining a pair of flat substrates. In other words, in order to manufacture an LCD device, a lower substrate including a plurality of thin film transistors and a plurality of pixel electrodes, and an upper substrate including a color filter and a common electrode are formed. Subsequently, the liquid crystal is discharged onto the lower substrate. The lower substrate and the upper substrate are sealed to each other to manufacture an LCD device. A device for dropping liquid crystals can be utilized to drop liquid crystals onto the substrate.

The apparatus for dropping liquid crystals includes: a plurality of spacers each having a container and a syringe configured to store liquid crystal; a plurality of discharge units each connected to a lower portion of each spacer to discharge the liquid crystal to the substrate on. Said The device further includes a drive unit configured to horizontally transport the spacer. While the spacer is moving horizontally, the discharge unit located below the spacer provides liquid crystal to a portion of the substrate. The liquid crystal is discharged onto all areas of the substrate by repeating the operation and stopping of the discharge unit.

However, the weight of each pad containing the container and syringe may be relatively heavy. The friction between the spacer and the drive unit can produce particles as the spacer moves. The particles can drip onto the substrate causing malfunction of the LCD device. In addition, when the heavy pad moves, the container contained in each pad may be shaken, thereby generating bubbles in the liquid crystal in the container. Therefore, the LCD device may be defective.

The present invention provides an apparatus for dropping a liquid, comprising a plurality of spacers separately manufactured and a plurality of dropping units, so that the dropping device can horizontally move the discharging unit while the spacer is fixed to the stage. The liquid crystal is dropped on the entire surface of the substrate.

According to an exemplary embodiment, an apparatus for dropping a liquid includes: a stage configured to support a substrate; a stage positioned on the stage; and a plurality of blocks mounted on the stage, The spacers are spaced apart from each other in a first direction; a plurality of discharge units positioned below the spacer and spaced apart from the spacer, the discharge unit being in the first direction Displaced from each other, and the discharge unit is configured to discharge liquid onto the substrate; and a first drive unit configured to convey each of the discharge units horizontally.

In some embodiments, the spacers may be fixed to the gantry, and each of the discharge units conveys each of the unloadings horizontally at the first drive unit The liquid is simultaneously discharged onto the substrate while the unit is being fed.

In other embodiments, the above apparatus can further include a second drive unit configured to horizontally transmit the gantry in a second direction that intersects the first direction.

In still other embodiments, the discharge unit can be positioned on the gantry and below the shims.

In other embodiments, the discharge unit may be spaced apart from one another in the first direction that is substantially perpendicular to the direction in which the gantry moves horizontally.

In still other embodiments, each of the spacers can comprise: a container configured to store the liquid; a syringe positioned below the container, the syringe configured to store receipt from the container a liquid; and a securing member configured to support the container and the syringe to secure the container and the syringe to the gantry.

In a further embodiment, the above apparatus may further comprise: a first connecting component that communicates the container with the syringe to provide a flow path of the liquid from the container to the syringe; and a second connection A component that communicates the syringe with each of the discharge units to provide a flow path for the liquid from the syringe to each of the discharge units.

In still other embodiments, each of the discharge units can include a nozzle configured to drop the liquid onto the substrate, a support member configured to support the nozzle, and a moving block, There is a first portion connected to the support member and a second portion connected to the first drive unit, and the moving block is configured to horizontally convey the support member.

In a further embodiment, the first driving unit may include: magnetic a portion extending in the first direction; a rail coupled to each of the discharge units to guide movement of each of the discharge units; and a drive portion configured to follow the rails The discharge unit is conveyed, the drive portion including a first end portion connected to the magnetic portion and a second end portion connected to each of the moving blocks in each of the discharge units.

In other embodiments, the magnetic portion can be positioned on the gantry and positioned between the spacer and the discharge unit, and the magnetic portion extends in the first direction.

In still other embodiments, the magnetic portion may include a guiding groove such that the first driving unit portion is inserted and mounted in the guiding groove, and the guiding groove is at the first Extend in the direction.

In other embodiments, an upper portion of the drive portion is insertable and mountable in the guiding groove, and a lower portion of the driving portion is connectable to a moving block included in each of the unloading units The upper part.

In still other embodiments, the rail can be positioned below the magnetic portion and spaced apart from the magnetic portion, and the rail extends in the first direction.

In a further embodiment, the discharge unit may be arranged on the rail and spaced apart from one another in the first direction.

In still other embodiments, the liquid can comprise a liquid crystal.

The above and other objects, features and advantages of the present invention will become more <RTIgt;

The drawings are included to facilitate a further understanding of the concepts of the invention, which are incorporated in and constitute a part of this specification. Schematic illustrating the concept of the invention The exemplary embodiments, together with the description, are used to explain the principles of the concepts of the invention.

Exemplary embodiments of the inventive concept are described in more detail below with reference to the accompanying drawings. However, the inventive concept may be embodied in different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

In the figures, the dimensions of layers and regions are exaggerated for clarity of illustration. It will also be appreciated that when a layer (or film) is referred to as being "on" another layer or substrate, it may be directly on the other layer or substrate, or an intervening layer may also be present. In addition, it will be understood that when a layer is referred to as being "under" another layer, it may be directly below, and one or more intervening layers may be present. In addition, it will also be understood that when a layer is referred to as being "between" two layers, it may be the only layer between the two layers, or one or more intervening layers may also be present. Throughout the text, the same component symbols refer to the same components.

Exemplary embodiments of the inventive concept will be described in detail below with reference to the drawings.

FIG. 1 is a perspective view illustrating an apparatus for dropping a liquid on a substrate, according to an exemplary embodiment. Fig. 2 is an enlarged view of a portion "A" shown in Fig. 1. Figure 3 is an enlarged cross-sectional view of the portion "A" shown in Figure 1.

1 to 3, an apparatus for dropping a liquid on a substrate includes a stage 100, a gantry 200, a plurality of spacers 300, a plurality of unloading units 400, and configured to move unloading, according to some exemplary embodiments. First of unit 400 Drive unit 500.

The stage 100 supports the substrate S. The gantry 200 is positioned on the stage 100. The spacers 300 are fastened to the gantry 200 and are spaced apart from one another in a first direction. The unloading unit 400 for discharging the liquid crystal is positioned below the spacer 300 and spaced apart from the spacer 300. Further, the unloading units 400 are spaced apart from each other in the first direction. The unloading unit 400 is positioned on a lower portion of the gantry 200, and the shims 300 are positioned on an upper portion of the gantry 200 such that each of the unloading units 400 and each of the shims 300 are vertically spaced apart from one another.

In some demonstrative embodiments, the apparatus for dropping liquid may further include a second drive unit 700 positioned on the stage 100. The second drive unit 700 is configured to move the gantry 200 horizontally. Further, the liquid may contain liquid crystal, and the liquid crystal may be discharged onto the substrate S, so that the apparatus for dropping the liquid on the substrate S may correspond to an apparatus for dropping the liquid crystal on the substrate S. Various liquids can be employed to dispense the liquid on the substrate S.

The shape of the stage 100 may correspond to the shape of the substrate S to support the substrate S. For example, when the substrate has a rectangular plate shape, the stage 100 may have a rectangular plate shape. The stage 100 can include a retention portion (not shown) that is configured to hold the substrate S to the upper surface of the stage 100. For example, the retaining portion can include an electrostatic chuck (not shown) or a vacuum holder (not shown). When the holding portion includes the vacuum holder, the vacuum holder may include a vacuum pump (not shown) and a plurality of vacuum holes (not shown) formed in the upper surface of the stage 100 in communication with the vacuum pump. Therefore, the vacuum holder can fasten the substrate S to the upper surface of the stage 100.

The second drive unit 700 can be configured to transmit the gantry 200 in a second direction that intersects the first direction in which the discharge unit 400 moves. For example, the second direction can be substantially perpendicular to the first direction. The second driving unit 700 may include a plurality of second guide rails 710 and a plurality of second driving portions 720.

The second rail 710 is positioned on the upper surface of the stage 100. The second rails 710 are parallel to each other and spaced apart from each other to form a pair of second rails 710. Each second drive portion 720 is positioned on each of the second rails 710 to slide along the second rails 710. The second rail 710 can extend in a second direction that is substantially perpendicular to a first direction in which the discharge unit 400 moves horizontally. The second rail 710 is mounted on the stage 100. The upper portion of each of the second drive portions 720 is coupled to a lower portion of the gantry 200. Therefore, when the second driving portion 720 slides along the second rail 710, the stage 200 connected to the second driving portion 720 moves horizontally in the second direction.

In an exemplary embodiment, each of the second drive portions 720 can include a linear motor (not shown) or an assembly (not shown) that includes a ball screw (not shown) And a motor (not shown) for rotating the ball screw. The various portions may be adapted to the second driving portion 720 under the condition that the portion slides along the second rail 710.

The spacer 300 is positioned on the gantry 200. For example, the spacer 300 is mounted on the side wall of the gantry 200. Further, the spacer 300 may be disposed in a first direction that is substantially perpendicular to a second direction in which the second rail 710 extends. Each spacer 300 is spaced apart from each other.

In an exemplary embodiment, each spacer 300 includes a container 310 for storing a liquid, a syringe 330, a first support member 340 configured to support the container 310, and a second support member 350 configured to support the syringe 330, And a fixing member 360. The syringe 330 is positioned below the container 310. Syringe 330 can receive liquid from container 310 to store the liquid in a predetermined volume. The first support member 340 is in contact with the lower surface of the container 310 to support the container 310. The second support members 350 are positioned below the first support members 340 and face each other. The second support member 350 is in contact with the upper surface of the syringe 330 to support the syringe 330. The fixing member 360 is coupled to the first support member 340 and the second support member 350 to secure the container 310 and the syringe 330 to the gantry 200.

The container 310 is used to store the liquid to be supplied into the syringe 330. The container 310 can have a cylindrical shape. However, the container 310 can have a variety of shapes. In an exemplary embodiment, the container 310 may include a bubble removal unit (not shown) having a vacuum portion to remove air bubbles in the liquid in the container 310. The syringe 330 receives liquid from the container 310 to provide liquid to the discharge unit 400. The syringe 330 can be coupled to a pressurization unit (not shown) configured to pressurize the liquid in the syringe 330 using a carrier gas, such as nitrogen, such that the liquid can be under uniform pressure Flow from the syringe 330 to the discharge unit 400.

In an exemplary embodiment, the apparatus for dripping liquid may further include a first connecting component 610 that communicates the container 310 with the syringe 330, and a valve 630. The first attachment component 610 is positioned between the container 310 and the syringe 330. The first connecting member 610 may have a shape of a tube. Valve 630 is positioned at A connecting member 610 is interposed between the syringe 330. When the valve 630 is open, the liquid in the container 310 is supplied into the syringe 330 via the first connecting member 610.

The unloading unit 400 can be used to discharge liquid onto the substrate S positioned on the stage 100. For example, the discharge unit 400 can dispense liquid onto the substrate S while moving horizontally in the first direction. The unloading unit 400 is positioned below the spacer 300 and spaced apart from the spacer 300. Further, the unloading units 400 are spaced apart from each other in the first direction. The unloading unit 400 is positioned on a lower portion of the gantry 200, and the shims 300 are positioned on an upper portion of the gantry 200 such that the unloading unit 400 and the shims 300 are vertically spaced apart from one another. Further, the unloading unit 400 is disposed in a first direction that is substantially perpendicular to the second direction in which the second rail 710 extends.

In some exemplary embodiments, each discharge unit 400 includes a nozzle 430, a third support member 420, and a moving block 410. The nozzle 430 can dispense liquid on the substrate S. The third support member 420 is coupled to the nozzle 430 to support the nozzle 430. The moving block 410 connects the third supporting member 420 with the first driving unit 500 to horizontally transfer the third supporting member 420. The number of unloading units 400 may correspond to the number of pads 300. In some exemplary embodiments, the apparatus for dripping liquid may further include a second attachment component 620 positioned between the nozzle 430 of each discharge unit 400 and the syringe 330 of each spacer 300. The second connecting member 620 communicates the nozzle 430 with the syringe 330. The valve 630 is positioned at an end portion of the second connecting member 620. The valve 630 is positioned between the second connecting member 630 and the syringe 330 to connect the second connecting member 620 with the syringe 330. Valve 630 controls syringe 330 Whether the liquid in the flow flows into the nozzle 330 via the second connecting member 620. The second connecting member 620 may have a shape of a tube.

The first driving unit 500 is for horizontally conveying each of the unloading units 400 that discharge the liquid onto the substrate S. In some exemplary embodiments, the first driving unit 500 may include a magnetic portion 510, a first rail 530, and a first driving portion 520.

The magnetic portion 510 extends in the first direction. The first rail 530 can be coupled to the moving block 410 to guide the movement of the discharge unit 400. The first drive portion 520 includes a first portion to be coupled to the magnetic portion 510, and a second portion to be moved to the moving block 410 of each of the discharge units 400 such that the discharge unit 400 moves along the first rail 530. The magnetic portion 510 can extend over a portion of the gantry 200 between the spacer 300 and the unloading unit 400. The magnetic portion 510 can extend in a first direction in which the discharge unit 400 is disposed. In the exemplary embodiment, the magnetic portion 510 has a guiding groove 511 such that the first driving portion 520 is installed in the guiding groove 511. The guiding groove 511 extends in one direction. The guiding groove 511 may extend in a first direction in which the magnetic portion 510 extends. For example, the guiding groove 511 is formed at a lower portion of the magnetic portion 510. Therefore, the upper portion of the first driving portion 520 is inserted and mounted in the guiding groove 511. Further, the lower portion of the first driving portion 520 is combined to the upper portion of the moving block 410. The first rail 530 is positioned below the magnetic portion 510. The first rail 530 extends away from the magnetic portion 510. The first rail 530 can extend in a first direction in which the magnetic portion 510 extends. The discharge unit 400 is mounted on the first rail 530. The unloading unit 400 is arranged in a second direction in which the first rail 530 extends With. Each of the discharge units 400 are spaced apart from each other.

In an exemplary embodiment, the first drive portion 520 may include a linear motor (not shown) that produces linear motion, or a combination of a ball screw (not shown) and a motor (not shown) that rotates the ball screw. (not shown). The various assemblies can be fitted with the first drive portion 520 under conditions in which the assembly slides along the first rail 530.

When the first driving portion 520 operates to move along the guiding groove 511 formed in the magnetic portion 510, the discharging unit 400 connected to the first driving portion 520 horizontally moves along the first rail 530.

4A and 4B are cross-sectional views illustrating a method of dropping a liquid on a substrate using an apparatus for dropping a liquid according to an exemplary embodiment. Hereinafter, a method of dropping a liquid crystal on a substrate using an apparatus for dropping a liquid on a substrate will be described with reference to FIGS. 1 to 3.

The first connecting member 610 is provided with liquid crystal contained in the container 310 in each of the blocks 300. Subsequently, the valve 630 is opened to communicate the first connecting member 610 with the syringe 330. Therefore, the liquid crystal flows into the syringe 330 from the container 310 via the first connecting member 610. The valve 630 is opened to communicate the syringe 330 with the second connecting member 620. Therefore, the liquid crystal flows from the syringe 330 to the nozzle 430 included in each of the discharge units 400. When a plurality of spacers 300 and a plurality of discharge units 400 are mounted on the stage 200, the discharge unit 400 discharges a large amount of liquid crystal droplets onto the substrate S.

As shown in FIGS. 4A and 4B, while the discharge unit 400 is horizontally moved, the discharge unit 400 discharges the liquid crystal onto the substrate S under the condition that the spacer 300 is fixed to the stage 200. In other words, the first driving portion 520 operates The movement is moved along the guide groove 511 formed in the magnetic portion 510 such that the discharge unit 400 connected to the first driving portion 520 is horizontally moved in the first direction along the first rail 530. While the unloading unit 400 is horizontally moved, the unloading unit 400 discharges the liquid crystal via the nozzle 430. Although not shown, the second drive unit 700 transmits the gantry 200 connecting the spacer 300 and the unloading unit 400. For example, the second drive unit 700 horizontally transports the gantry 200 in a second direction that is substantially perpendicular to the first direction in which the discharge unit 400 moves horizontally. After the second drive unit 700 horizontally conveys the gantry 200 by a predetermined distance, the second drive unit 700 is stopped. The discharge unit 400 then discharges the liquid crystal on the substrate. Therefore, one cycle of discharging the liquid crystal onto a portion of the substrate is completed. The liquid crystal is dropped on the entire surface of the substrate S by repeating the cycle.

According to an exemplary embodiment, the spacer 300 and the unloading unit 400 are separately manufactured. Further, when the discharge unit 400 is horizontally moved and the spacer 300 is fixed to the stage 200, the discharge unit 400 discharges the liquid onto the substrate S. Therefore, the spacer 300 having a relatively heavy weight does not need to be moved, whereby the generation of particles caused by the movement of the spacer 300 can be suppressed. Further, since the spacer 300 is not moved but fixed to the stage 200, generation of air bubbles in the container 310 contained in each of the spacers 300 can be prevented. In addition, because the relatively light weight unloading unit 400 moves, the discharge unit can discharge liquid on the substrate at a relatively high speed.

As explained above, the apparatus for dropping a liquid on a substrate discharges liquid crystal on the substrate S according to some exemplary embodiments. However, the apparatus for dropping the liquid may be adapted to drip various liquids.

According to some exemplary embodiments, a plurality of blocks having a container for storing a liquid and a syringe and a plurality of discharge units for discharging the liquid are separately manufactured. The spacer is secured to the gantry and the drive unit configured to transport the unloading unit is positioned on the gantry. Therefore, when the spacer is fixed to the gantry and the discharge unit is horizontally moved, the discharge unit discharges the liquid crystal onto all areas of the substrate. Therefore, the relatively heavy weight pad does not need to be moved, whereby the generation of particles caused by the movement of the spacer can be suppressed. Further, since the spacers are not moved but fixed to the gantry, it is possible to prevent air bubbles from being generated in the containers contained in each of the spacers. In addition, the discharge unit can discharge liquid on the substrate at a relatively high speed due to the relatively light weight of the discharge unit moving.

Although an apparatus for dropping a liquid has been described with reference to a specific embodiment, the apparatus is not limited thereto. Various modifications and changes can be made thereto without departing from the spirit and scope of the invention as defined by the appended claims.

While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application.

100‧‧‧

200‧‧‧ gantry

300‧‧‧ pads

310‧‧‧ Container

330‧‧‧Syringe

340‧‧‧First support member

350‧‧‧Second support parts

360‧‧‧Fixed parts

400‧‧‧Drawing unit

410‧‧‧moving block

420‧‧‧ Third support member

430‧‧‧ nozzle

500‧‧‧First drive unit

510‧‧‧magnetic part

511‧‧‧ guiding groove

520‧‧‧First drive section

530‧‧‧First rail

610‧‧‧First connecting part

620‧‧‧Second connection parts

630‧‧‧ valve

700‧‧‧Second drive unit

710‧‧‧Second rail

720‧‧‧second drive part

S‧‧‧Substrate

FIG. 1 is a perspective view illustrating an apparatus for dropping a liquid on a substrate, according to an exemplary embodiment.

Figure 2 is an enlarged perspective view of the portion "A" shown in Figure 1.

Figure 3 is an enlarged cross-sectional view of the portion "A" shown in Figure 1.

4A and 4B are diagrams illustrating the use of a drop for use according to an exemplary embodiment. A cross-sectional view of a method of dropping a liquid onto a substrate.

200‧‧‧ gantry

300‧‧‧ pads

310‧‧‧ Container

330‧‧‧Syringe

340‧‧‧First support member

350‧‧‧Second support parts

360‧‧‧Fixed parts

400‧‧‧Drawing unit

410‧‧‧moving block

420‧‧‧ Third support member

430‧‧‧ nozzle

500‧‧‧First drive unit

510‧‧‧magnetic part

511‧‧‧ guiding groove

520‧‧‧First drive section

530‧‧‧First rail

610‧‧‧First connecting part

620‧‧‧Second connection parts

630‧‧‧ valve

Claims (13)

An apparatus for dropping a liquid, comprising: a stage on which a substrate is placed; a stage disposed on the stage; a plurality of blocks mounted on and fixed to the stage, and in the first side Arranging upwardly spaced apart from each other; a plurality of discharge units positioned below the spacer and spaced apart from the spacer, the discharge units being spaced apart from one another in the first direction, and The discharge unit is configured to discharge liquid onto the substrate; and a first drive unit configured to horizontally convey each of the discharge units, wherein the first drive unit comprises: a magnetic portion, Extending in the first direction; a rail coupled to each of the discharge units to guide movement of each of the discharge units in the first direction; a drive portion configured to The rail transports the discharge unit, wherein the discharge unit is disposed on the rail and is movable in the first direction along the rail, wherein each of the spacers Included: a container configured to store the liquid; an injection Positioned under the container, said injector configured to store the liquid received from the container; a first supporting member configured to support the container; a second support member configured to support the syringe; and A securing member configured to support the container and the syringe to secure the container and the syringe to the gantry. The apparatus of claim 1, wherein the spacer is fixed to the gantry, and each of the unloading units is conveyed horizontally while the first driving unit horizontally transports each of the unloading units The unit discharges the liquid onto the substrate. The apparatus of claim 2, further comprising a second drive unit configured to horizontally transmit the gantry in a second direction that intersects the first direction. The apparatus of claim 1, wherein the discharge unit is positioned on the gantry and below the bolster. The apparatus of claim 1, wherein the discharge unit is spaced apart from each other in the first direction that is substantially perpendicular to a direction in which the gantry moves horizontally. The device of claim 1, further comprising: a first connecting member that communicates the container with the syringe to provide a flow path of the liquid from the container to the syringe; A second attachment member that communicates the syringe with each of the discharge units to provide a flow path for the liquid from the syringe to each of the discharge units. The apparatus of claim 1, wherein each of the discharge units comprises: a nozzle configured to drip the liquid onto the substrate; a support member configured to support the nozzle ;as well as A moving block includes a first portion coupled to the support member and a second portion coupled to the first drive unit, and the moving block is configured to horizontally transport the support member. The apparatus of claim 7, wherein the driving portion includes a first end portion connected to the magnetic portion, and a second end connected to each of the moving blocks in each of the discharging units section. The apparatus of claim 8, wherein the magnetic portion is positioned on the gantry and is located between the spacer and the discharge unit, and the magnetic portion is at the first Extend in the direction. The apparatus of claim 8, wherein the magnetic portion includes a guiding groove such that the first driving unit is partially inserted and mounted into the guiding groove, and the guiding concave The slot extends in the first direction. The apparatus of claim 10, wherein an upper portion of the driving portion is inserted and mounted into the guiding groove, and a lower portion of the driving portion is connected to each of the discharging materials The upper part of the moving block in the unit. The apparatus of claim 8, wherein the rail is positioned below the magnetic portion and spaced apart from the magnetic portion, and the rail extends in the first direction. The device of claim 1, wherein the liquid comprises a liquid crystal.