TWI485122B - Manufacturing method of semiconductor porcelain composition and heater for semiconductor porcelain composition - Google Patents

Manufacturing method of semiconductor porcelain composition and heater for semiconductor porcelain composition Download PDF

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Publication number
TWI485122B
TWI485122B TW098105396A TW98105396A TWI485122B TW I485122 B TWI485122 B TW I485122B TW 098105396 A TW098105396 A TW 098105396A TW 98105396 A TW98105396 A TW 98105396A TW I485122 B TWI485122 B TW I485122B
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TW
Taiwan
Prior art keywords
tio
atmosphere
heat treatment
temperature
calcined powder
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Application number
TW098105396A
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English (en)
Chinese (zh)
Other versions
TW200940475A (en
Inventor
Takeshi Shimada
Kentaro Ino
Toshiki Kida
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Hitachi Metals Ltd
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Publication of TW200940475A publication Critical patent/TW200940475A/zh
Application granted granted Critical
Publication of TWI485122B publication Critical patent/TWI485122B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
    • H01C7/022—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient mainly consisting of non-metallic substances
    • H01C7/023—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient mainly consisting of non-metallic substances containing oxides or oxidic compounds, e.g. ferrites
    • H01C7/025—Perovskites, e.g. titanates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
    • C04B35/468—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates
    • C04B35/4682—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates based on BaTiO3 perovskite phase
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
    • H01C17/06506—Precursor compositions therefor, e.g. pastes, inks, glass frits or green body
    • H01C17/06513—Precursor compositions therefor, e.g. pastes, inks, glass frits or green body characterised by the resistive component
    • H01C17/06533—Precursor compositions therefor, e.g. pastes, inks, glass frits or green body characterised by the resistive component composed of oxides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3208—Calcium oxide or oxide-forming salts thereof, e.g. lime
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3227—Lanthanum oxide or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3298—Bismuth oxides, bismuthates or oxide forming salts thereof, e.g. zinc bismuthate
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3418—Silicon oxide, silicic acids or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54—Particle size related information
    • C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6583—Oxygen containing atmosphere, e.g. with changing oxygen pressures
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/66—Specific sintering techniques, e.g. centrifugal sintering
    • C04B2235/661—Multi-step sintering
    • C04B2235/662—Annealing after sintering
    • C04B2235/663—Oxidative annealing

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Thermistors And Varistors (AREA)
TW098105396A 2008-03-19 2009-02-20 Manufacturing method of semiconductor porcelain composition and heater for semiconductor porcelain composition TWI485122B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008071353A JP5844507B2 (ja) 2008-03-19 2008-03-19 半導体磁器組成物の製造方法及び半導体磁器組成物を用いたヒータ

Publications (2)

Publication Number Publication Date
TW200940475A TW200940475A (en) 2009-10-01
TWI485122B true TWI485122B (zh) 2015-05-21

Family

ID=41090856

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098105396A TWI485122B (zh) 2008-03-19 2009-02-20 Manufacturing method of semiconductor porcelain composition and heater for semiconductor porcelain composition

Country Status (7)

Country Link
US (1) US8766145B2 (enExample)
EP (1) EP2253602A4 (enExample)
JP (1) JP5844507B2 (enExample)
KR (1) KR101545763B1 (enExample)
CN (1) CN101959829A (enExample)
TW (1) TWI485122B (enExample)
WO (1) WO2009116452A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI844017B (zh) * 2022-05-10 2024-06-01 鈞成金屬股份有限公司 一體式車肩座結構改良

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120175361A1 (en) * 2009-10-06 2012-07-12 Kentaro Ino Semiconductor ceramic composition, method for producing same, ptc element and heat generating module
JP6337689B2 (ja) 2013-10-03 2018-06-06 Tdk株式会社 半導体磁器組成物およびｐｔｃサーミスタ
CN104860677A (zh) * 2015-04-20 2015-08-26 河南师范大学 一种掺杂锆钛酸钡基铁电陶瓷材料及其制备方法
CN109761602B (zh) * 2019-02-28 2020-11-24 华中科技大学 一种低阻热敏陶瓷材料及其制备方法与应用

Citations (2)

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Publication number Priority date Publication date Assignee Title
TW487742B (en) * 1999-05-10 2002-05-21 Matsushita Electric Industrial Co Ltd Electrode for PTC thermistor, manufacture thereof, and PTC thermistor
WO2006118274A1 (ja) * 2005-04-28 2006-11-09 Hitachi Metals, Ltd. 半導体磁器組成物とその製造方法

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JPS56169301A (en) 1980-06-02 1981-12-26 Tohoku Metal Ind Ltd Method of producing barium titanate semiconductor porcelain
JPS6186467A (ja) * 1984-10-02 1986-05-01 科学技術庁無機材質研究所長 高性能チタン酸バリウム系ポジスタ−の製造方法
JPH08153604A (ja) * 1994-06-24 1996-06-11 Teika Corp 積層型半導体セラミック素子の製造方法
EP0982782B1 (en) * 1998-08-21 2005-02-09 TDK Corporation Piezoelectric ceramics
US6514427B2 (en) * 1999-10-18 2003-02-04 Matsushita Electric Industrial Co., Ltd. Piezoelectric ceramic composition and piezoelectric element containing the same
JP2001130957A (ja) * 1999-11-02 2001-05-15 Murata Mfg Co Ltd 半導体磁器、半導体磁器の製造方法およびサーミスタ
JP4211510B2 (ja) * 2002-08-13 2009-01-21 株式会社村田製作所 積層型ｐｔｃサーミスタの製造方法
JP2006179692A (ja) * 2004-12-22 2006-07-06 Komatsu Electronics Inc サーミスタの製造方法
WO2006106910A1 (ja) 2005-03-31 2006-10-12 Hitachi Metals, Ltd. 半導体磁器組成物の製造方法
KR101118320B1 (ko) * 2005-08-11 2012-03-09 히타치 긴조쿠 가부시키가이샤 반도체 자기 조성물
WO2007097462A1 (ja) * 2006-02-27 2007-08-30 Hitachi Metals, Ltd. 半導体磁器組成物
JP4780306B2 (ja) * 2006-03-15 2011-09-28 Ｔｄｋ株式会社 積層型サーミスタ及びその製造方法
EP2077257A4 (en) 2006-10-27 2011-05-18 Hitachi Metals Ltd SEMICONDUCTOR CERAMIC COMPOSITION AND MANUFACTURING METHOD THEREFOR
US7993547B2 (en) * 2006-11-01 2011-08-09 Hitachi Metals, Ltd. Semiconductor ceramic composition and process for producing the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW487742B (en) * 1999-05-10 2002-05-21 Matsushita Electric Industrial Co Ltd Electrode for PTC thermistor, manufacture thereof, and PTC thermistor
WO2006118274A1 (ja) * 2005-04-28 2006-11-09 Hitachi Metals, Ltd. 半導体磁器組成物とその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI844017B (zh) * 2022-05-10 2024-06-01 鈞成金屬股份有限公司 一體式車肩座結構改良

Also Published As

Publication number Publication date
US20110011848A1 (en) 2011-01-20
US8766145B2 (en) 2014-07-01
KR20110009653A (ko) 2011-01-28
EP2253602A1 (en) 2010-11-24
EP2253602A4 (en) 2015-03-25
JP2009227477A (ja) 2009-10-08
TW200940475A (en) 2009-10-01
JP5844507B2 (ja) 2016-01-20
WO2009116452A1 (ja) 2009-09-24
CN101959829A (zh) 2011-01-26
KR101545763B1 (ko) 2015-08-19

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