TWI479120B - Surface shape measuring device - Google Patents

Description

Surface shape measuring device

The present invention relates to a surface shape measuring device that detects a fine shape change such as bending of a glass substrate for flat panel display (hereinafter referred to as FPD) by non-contact detection.

In recent years, in order to form a high-quality display with high productivity (yield, manufacturing efficiency) for a glass substrate or the like used in an FPD (Plasma Display Panel) such as an LCD (Liquid Crystal Display), it is required to be in the order of micrometers. The processing accuracy is such that, for the formation of such a substrate, it is necessary to measure the surface shape at a high speed in a non-contact, non-destructive, high-precision manner, and quickly as a feedback person.

In general, as a method of non-contact and non-destructive measurement, a laser triangulation type, an electrostatic capacitance type, a laser automatic focus type, etc. are mentioned, but among the non-contact measurement methods using such a laser etc. It is difficult to measure the surface displacement of the transparent non-conductive glass substrate with high accuracy. In the case of a gas scanner (for example, refer to Patent Document 1), Patent Document 1) is a solid which does not pass a gas. It can be used as a non-contact measurement through a gas film, and high-resolution measurement can be performed with high decomposition.

Further, in the field of the metal strip steel, for example, Patent Document 2 discloses that, in the pressurization, a compressed gas is injected from a plurality of nozzles provided in the width direction, and a plurality of non-contact displacement sensors are used to calculate the width direction. The tension distribution, the shape of the technique.

Therefore, it is considered that the surface shape measurement can be performed with high accuracy and high speed on a glass substrate or the like by using a gas scanner as described above. However, in order to accurately detect bending or the like in the substrate forming process, The bad condition, promptly as feedback, is necessary to detect the surface shape data with high precision, and to process the detected data at high speed, but input data from multiple sensors to the PC, or for its processing speed There are problems with boundaries.

[Patent Document 1] Japanese Patent No. 2788162 (Fig. 1, etc.)

[Patent Document 2] Japanese Laid-Open Patent Publication No. Hei 8-21716 (Patent No. 1, Item 6, etc.)

An object of the present invention is to provide a surface shape measuring device which can measure a surface shape at a high speed in a non-contact, non-destructive, high-precision manner on a glass substrate for FPD, and can detect bending or the like.

According to one aspect of the present invention, there is provided a gas scanner including a mounting table for placing a member to be measured and a surface for measuring a surface of the member to be measured in a non-contact manner, and a gas scanner for moving the gas scanner to The drive control unit for the specific measurement position, and the first data processing unit for calculating the measurement data at the measurement position for each of the plurality of gas scanners, and the first data processing unit for synthesizing the processing play A surface shape measuring device that is characterized by the second data processing unit that measures the processed measurement data.

According to one aspect of the present invention, for example, a surface shape measuring device which can measure a surface shape at a high speed without contact, non-destructively, and with high precision, and which can detect bending or the like, is used for a glass substrate for FPD.

[To implement the best form of invention]

The following embodiments of the present invention will be described with reference to the drawings.

Fig. 1 shows a configuration of a surface shape measuring apparatus according to the present embodiment, and is composed of a measuring unit for measuring the surface shape and a data processing unit for processing the data obtained by the measuring unit.

The measurement unit for measuring the surface shape is composed of an inductor and a drive mechanism. For example, the member to be measured 1 such as a glass substrate for FPD is placed on the measurement table 2 for holding, and is provided at a predetermined interval. The gas scanner 3 that detects the surface displacement of the member 1 to be measured without contact is integrally covered, for example, via the protective cover 4, and the specific interval is maintained by the gas of the adjacent gas scanner. The distance that causes interference, for example, 1300 mm x 1300 mm of the member to be measured 1 can be measured, and seven gas scanners 3 are disposed at a pitch of 200 mm, however, the pattern of the gas scanner 3 is, for example, the amount of pitch movement: 0 to several hundreds of mm, Resolution: 1 μm (repetitive reproducibility: ± 25 μm), measurement range (thickness): 0.1~10μm.

The plurality of gas scanners 3 are connected to drive sources such as AC servo motors and balls that move in the XY-axis direction in order to better move to a specific measurement position, and are adjusted by, for example, precision analogy for controlling the position thereof and the like. The controller 5 is composed of a controller 5, and the measuring station 2 is disposed on a gantry 6 having an air-up type vibration-removing function capable of automatic level adjustment.

The data processing unit for processing the measured data is provided in each of the gas scanners 3, and is connected to the first data processing unit 7 for measuring the measurement data at each measurement position, and is connected to the first data processing unit for the synthesis processing. The second data processing unit 8 that is used to calculate the measurement data of the data processing unit is configured as a main body, and the second data processing unit 8 is connected to measure the size of the glass substrate, the measurement pitch, and the like for inputting the image number. The button (input unit) 9 of the condition is a display (display unit) 10 for displaying the measurement data of the combined processing.

In the above-described surface shape measuring apparatus, the measurement is performed as follows. As shown in the flow chart of FIG. 2, first, the substrate glass 1 is placed on the measuring table 2 of the surface shape measuring device as a member to be measured, via The button 9 inputs the image number, the size of the glass substrate, and the measurement conditions such as the sampling interval (step 1), and the gas scanner 3 controls the position movement via the controller 5, and is specified at each sampling interval set by the condition. At the measurement point, the surface displacement data (step 2) is input, for example, by scanning the AC servo motor and the ball of the fixed plate 11 mounted on the measuring unit 2, and scanning in the Y-axis direction, for example, at intervals of 10 ms. Sampling data, processing to determine the i before and after the measurement point specified by the sampling interval (i is natural material) data of.

The gas scanner 3 is based on the principle of a length measuring device called a non-contact pneumatic servo mechanism, as shown in the block diagram shown in FIG. 3, for the gas scanning nozzles 21 which are respectively disposed at the front end of the n gas scanners 3. The small size change detected is performed by the first data processing unit 7.

In the first data processing unit 7, the excitation oscillator 22 is used to convert the signal into an electrical signal via the A/E converter 23, and the telecommunication signal is passed through the phase detector 24 to multiply the waveform in order to further improve the accuracy. After the frequency is converted to 14 times, the filtering process is performed by the rectifying filter 26, and the high frequency component is removed by the low pass filter 27, and the input i is removed for the CPU 28 (i is Natural data) The largest and smallest data in the data are averaged (step 3), and the averaged data is continuously transmitted to the second data processing as the surface displacement data of the specified measurement point. Part 8 (Step 4).

Further, as shown in FIG. 4, after scanning in the Y-axis direction, the gas scanner 3 is raised, moved in the X-axis direction at a specific pitch, and scanned in the Y-direction in the opposite direction, and is also used as an input. The data is processed by the first data processing unit 7 at each measurement point, and then transmitted to the second data processing unit 8.

Further, the surface shape data is generated by the second data processing unit 8 by the surface displacement data transmitted by the synthesis processing and the position data thereof, and the surface shape data is displayed on the display 10 as a three-dimensional chart as shown in FIG. And so on (step 5).

In this way, the surface shape is expressed as a 3-dimensional chart or the like. In this case, it is determined whether the glass substrate is good or not. In this case, it can be determined automatically based on a predetermined threshold value, and the case where NG is determined by bending or the like is formed in the glass substrate formation process as feedback. For example, the production conditions such as cooling conditions are optimized.

However, when there is a foreign matter on the surface or the inner surface, it is easy to be detected when the surface shape is changed to the extreme as compared with the displacement through the bending, and after the foreign matter is removed, the surface shape is measured again. The curvature can be detected, and the variation of the small foreign matter passing through the surface is deleted during the averaging process. In order to suppress the noise passing through such a foreign matter, it is desirable to provide a surface, for example, in a clean room controlled by a specific clean environment. Shape measuring device.

According to the present invention, the plurality of gas scanners are disposed at a specific interval, and the scanning of the measurement points can be performed at a high speed by driving the XY-axis direction, and the data obtained by the scanning is used for each gas. The scanner performs the arithmetic processing such as the averaging of the first data processing unit, and the data processed by the second data processing unit 8 by the synthesis processing can perform the data processing at a high speed and before and after the measurement point. By averaging a plurality of pieces of data and then using the data as a measurement point, a highly accurate measurement result can be obtained.

Further, by reflecting the obtained measurement results in the production conditions and optimizing the manufacturing conditions, a glass substrate capable of forming a higher processing accuracy can be produced, for example, as shown in FIG. In the case of bending, the films 32, 33, 34 formed on the upper layer by bending are cracked, but as shown in Fig. 7, for the best in the manufacturing conditions. The glass substrate 31' having high processing accuracy formed by the formation can form a good film 32', 33', 34', and accordingly, the production yield can be improved, the manufacturing efficiency and the high quality of the formed product can be achieved. Chemical.

However, in the present embodiment, the data is directly represented as a three-dimensional graph, and can be expressed as a function of a spline function, a least squares method, or the like after the insertion processing.

In addition, measurement is performed on one glass substrate, but it is also possible to measure a plurality of members to be measured by placing a plurality of members to be measured on the measurement table.

Further, although it is suitable for measuring the surface shape of a glass substrate, the member to be measured is not particularly limited, and not only an LCD or a PDP, but also a SED (Surface-conduction Electron-emitter Display), a glass substrate for an organic EL. For the mask, quartz glass, quartz wafer, semiconductor wafer, etc., and the size of the semiconductor wafer can be increased depending on the size of the display.

However, the present invention is not limited to the above-described embodiments, and various other modifications can be made without departing from the scope of the invention.

1‧‧‧Meased components

2‧‧‧ measuring station

3‧‧‧ gas scanner

4‧‧‧Scanner cover

5‧‧‧ Controller

6‧‧‧ 台台

7‧‧‧1st Data Processing Department

8‧‧‧2nd Data Processing Department

9‧‧‧ Input Department

10‧‧‧Display Department

11‧‧‧Drive system mounting plate

21‧‧‧ gas scanning nozzle

22‧‧‧Exciting Oscillator

23‧‧‧A/E converter

24‧‧‧ phase detector

25‧‧‧ waveform multiplication

26‧‧‧Rectifier filter

27‧‧‧ low pass filter

28‧‧‧CPU

31,31'‧‧‧ glass substrate

32,32’,33,33’,34,34’‧‧‧film

Fig. 1 is a view showing a surface shape measuring apparatus according to an embodiment of the present invention.

Fig. 2 is a flow chart for measuring the surface shape of one embodiment of the present invention.

[Fig. 3] is a surface shape measuring device for one aspect of the present invention. Set the block diagram.

Fig. 4 is a scanning pattern showing a surface shape measuring apparatus according to an aspect of the present invention.

Fig. 5 is a three-dimensional graph for the surface shape of a glass substrate according to an aspect of the present invention.

Fig. 6 is a schematic view showing a state of a laminated state in which a glass substrate has a curved state.

Fig. 7 is a schematic view showing a state of lamination on a glass substrate showing high processing accuracy.

1‧‧‧Meased components

2‧‧‧ measuring station

3‧‧‧ gas scanner

4‧‧‧Scanner cover

5‧‧‧ Controller

6‧‧‧ 台台

7‧‧‧1st Data Processing Department

8‧‧‧2nd Data Processing Department

9‧‧‧ Input Department

10‧‧‧Display Department

11‧‧‧Drive system mounting plate

Claims (4)

A surface shape measuring apparatus comprising: a mounting table for placing a member to be measured, and a surface displacement of the member to be measured in a non-contact manner at a predetermined interval in the X-axis direction of the mounting table; a plurality of gas scanners for outputting the measurement data, and in order to integrate the plurality of gas scanners, move in one direction along the Y-axis direction of the mounting table, and then move in the X-axis direction, and then The Y-axis direction, the drive control unit moving in the opposite direction for the one direction, and the gas scanner corresponding to each of the plurality of gas scanners, each having an output from the corresponding gas scanner at a specific sampling interval The first data processing unit of the CPU that averages the surface displacement data obtained by averaging the plurality of measured data, and the surface displacement data supplied to the output of the first plurality of data processing units to synthesize the surface displacement data The second data processing unit that generates the surface shape data of the member to be measured. The surface shape measuring apparatus according to the first aspect of the invention, wherein the second data processing unit combines the surface displacement data with position data indicating a measurement position of the gas scanner corresponding thereto to generate the surface shape data. The surface shape measuring apparatus according to the second aspect of the invention, further comprising a display unit that displays the surface shape data synthesized by the second data processing unit as a three-dimensional graph. The surface shape measuring device according to Item 2 or Item 3 of the patent application, wherein the sampling interval is variable.