TWI473937B - Low temperature pump and very low temperature freezer - Google Patents

Low temperature pump and very low temperature freezer Download PDF

Info

Publication number
TWI473937B
TWI473937B TW100132644A TW100132644A TWI473937B TW I473937 B TWI473937 B TW I473937B TW 100132644 A TW100132644 A TW 100132644A TW 100132644 A TW100132644 A TW 100132644A TW I473937 B TWI473937 B TW I473937B
Authority
TW
Taiwan
Prior art keywords
ejector
refrigerator
cooling
high temperature
regenerator
Prior art date
Application number
TW100132644A
Other languages
English (en)
Chinese (zh)
Other versions
TW201226704A (en
Inventor
Hidekazu Tanaka
Original Assignee
Sumitomo Heavy Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries filed Critical Sumitomo Heavy Industries
Publication of TW201226704A publication Critical patent/TW201226704A/zh
Application granted granted Critical
Publication of TWI473937B publication Critical patent/TWI473937B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F04B37/04—Selection of specific absorption or adsorption materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
TW100132644A 2010-09-13 2011-09-09 Low temperature pump and very low temperature freezer TWI473937B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010204891A JP5632241B2 (ja) 2010-09-13 2010-09-13 クライオポンプ及び極低温冷凍機

Publications (2)

Publication Number Publication Date
TW201226704A TW201226704A (en) 2012-07-01
TWI473937B true TWI473937B (zh) 2015-02-21

Family

ID=45805319

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100132644A TWI473937B (zh) 2010-09-13 2011-09-09 Low temperature pump and very low temperature freezer

Country Status (5)

Country Link
US (1) US20120060519A1 (ko)
JP (1) JP5632241B2 (ko)
KR (1) KR101280983B1 (ko)
CN (1) CN102400888B (ko)
TW (1) TWI473937B (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9187799B2 (en) * 2012-08-13 2015-11-17 William R. Jones 20 bar super quench vacuum furnace
JP6013886B2 (ja) * 2012-11-13 2016-10-25 住友重機械工業株式会社 クライオポンプ
JP6305193B2 (ja) * 2013-09-17 2018-04-04 住友重機械工業株式会社 蓄冷式冷凍機、一段蓄冷器、及び二段蓄冷器
JP2015098844A (ja) * 2013-11-20 2015-05-28 住友重機械工業株式会社 クライオポンプシステム、及びクライオポンプシステムの運転方法
JP6109057B2 (ja) * 2013-12-16 2017-04-05 住友重機械工業株式会社 蓄冷器式冷凍機
JP6440361B2 (ja) * 2014-01-29 2018-12-19 住友重機械工業株式会社 極低温冷凍機
JP6710604B2 (ja) * 2015-08-10 2020-06-17 住友重機械工業株式会社 クライオポンプ
JP6959746B2 (ja) * 2017-03-10 2021-11-05 アルバック・クライオ株式会社 クライオトラップ
CN107605700A (zh) * 2017-09-26 2018-01-19 安徽万瑞冷电科技有限公司 一种高吸留极限的低温泵
JP2022117029A (ja) * 2021-01-29 2022-08-10 アルバック・クライオ株式会社 クライオポンプ
CN114753991B (zh) * 2022-05-12 2022-10-04 之江实验室 可伸缩式吸气剂泵抽真空装置及应用方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3802211A (en) * 1972-11-21 1974-04-09 Cryogenic Technology Inc Temperature-staged cryogenic apparatus of stepped configuration with adjustable piston stroke
JP2002243294A (ja) * 2001-02-22 2002-08-28 Sumitomo Heavy Ind Ltd クライオポンプ
TWI247871B (en) * 2002-08-20 2006-01-21 Sumitomo Heavy Industries Very low temperature refrigerator
TW200907173A (en) * 2007-05-15 2009-02-16 Brooks Automation Inc Integral facet cryopump, water vapor pump, or high vacuum pump
TW200928100A (en) * 2007-12-28 2009-07-01 Sumitomo Heavy Industries Cryopump and evacuation method
JP2010084702A (ja) * 2008-10-01 2010-04-15 Sumitomo Heavy Ind Ltd クライオポンプ
JP2010196632A (ja) * 2009-02-26 2010-09-09 Sumitomo Heavy Ind Ltd クライオポンプ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2949092A1 (de) * 1979-12-06 1981-06-11 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
US4277947A (en) * 1980-04-16 1981-07-14 The United States Of America As Represented By The Secretary Of The Army Cryogenic cooler having telescoping multistage regenerator-displacers
JP3368770B2 (ja) * 1996-10-03 2003-01-20 三菱電機株式会社 極低温冷凍機及びその製造方法
JP3623659B2 (ja) * 1998-06-12 2005-02-23 エア・ウォーター株式会社 クライオポンプ
JP2000179966A (ja) * 1998-12-18 2000-06-30 Mitsubishi Electric Corp 極低温冷凍機および極低温冷凍機の洗浄方法
JP2003021062A (ja) * 2001-07-10 2003-01-24 Sumitomo Heavy Ind Ltd クライオポンプ
KR100785745B1 (ko) * 2004-08-25 2007-12-18 아루박ㆍ크라이오 가부시키가이샤 축냉기 및 크라이오 펌프
US8959929B2 (en) * 2006-05-12 2015-02-24 Flir Systems Inc. Miniaturized gas refrigeration device with two or more thermal regenerator sections
EP2310768B1 (en) * 2008-05-21 2018-12-26 Brooks Automation, Inc. Linear drive cryogenic refrigerator
WO2010038416A1 (ja) * 2008-09-30 2010-04-08 キヤノンアネルバ株式会社 真空排気システム、基板処理装置、電子デバイスの製造方法、真空排気システムの運転方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3802211A (en) * 1972-11-21 1974-04-09 Cryogenic Technology Inc Temperature-staged cryogenic apparatus of stepped configuration with adjustable piston stroke
JP2002243294A (ja) * 2001-02-22 2002-08-28 Sumitomo Heavy Ind Ltd クライオポンプ
TWI247871B (en) * 2002-08-20 2006-01-21 Sumitomo Heavy Industries Very low temperature refrigerator
TW200907173A (en) * 2007-05-15 2009-02-16 Brooks Automation Inc Integral facet cryopump, water vapor pump, or high vacuum pump
TW200928100A (en) * 2007-12-28 2009-07-01 Sumitomo Heavy Industries Cryopump and evacuation method
JP2010084702A (ja) * 2008-10-01 2010-04-15 Sumitomo Heavy Ind Ltd クライオポンプ
JP2010196632A (ja) * 2009-02-26 2010-09-09 Sumitomo Heavy Ind Ltd クライオポンプ

Also Published As

Publication number Publication date
CN102400888A (zh) 2012-04-04
JP2012057920A (ja) 2012-03-22
CN102400888B (zh) 2015-07-01
KR101280983B1 (ko) 2013-07-08
US20120060519A1 (en) 2012-03-15
KR20120028817A (ko) 2012-03-23
TW201226704A (en) 2012-07-01
JP5632241B2 (ja) 2014-11-26

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