TWI462193B - 指紋感測晶片封裝方法及其封裝結構 - Google Patents

指紋感測晶片封裝方法及其封裝結構 Download PDF

Info

Publication number
TWI462193B
TWI462193B TW097133856A TW97133856A TWI462193B TW I462193 B TWI462193 B TW I462193B TW 097133856 A TW097133856 A TW 097133856A TW 97133856 A TW97133856 A TW 97133856A TW I462193 B TWI462193 B TW I462193B
Authority
TW
Taiwan
Prior art keywords
circuit layer
substrate
conductive film
sensing chip
conductive
Prior art date
Application number
TW097133856A
Other languages
English (en)
Other versions
TW201011840A (en
Inventor
En Min Jow
Original Assignee
En Min Jow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by En Min Jow filed Critical En Min Jow
Priority to TW097133856A priority Critical patent/TWI462193B/zh
Priority to US12/547,767 priority patent/US7977759B2/en
Publication of TW201011840A publication Critical patent/TW201011840A/zh
Application granted granted Critical
Publication of TWI462193B publication Critical patent/TWI462193B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/63Connectors not provided for in any of the groups H01L24/10 - H01L24/50 and subgroups; Manufacturing methods related thereto
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12Fingerprints or palmprints
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01047Silver [Ag]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01079Gold [Au]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701Low temperature co-fired ceramic [LTCC]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • H01L2924/1815Shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Image Input (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)

Description

指紋感測晶片封裝方法及其封裝結構
本發明係有關一種半導體晶片封裝方法及其封裝結構,特別是一種指紋感測晶片封裝方法及其封裝結構。
在半導體製程領域所提供的晶片製造方式中,通常需考慮晶片所提供的電特性,並且須將晶片透過封裝的程序設置於封裝體中,以免除例如壓力及靜電等外力的任何可能的破壞。
然而隨著晶片應用領域的發展,新的應用必須使得部份之晶片表面裸露於環境中,例如晶片式的指紋感測器需要提供一與手指接觸的晶片表面,以讀取手指的紋路,作為身分識別使用。
圖1為習知的觸滑式指紋辨識器之封裝構造100之示意圖。主要包括一基板110、一半導體晶片120、複數個銲線130以及一封膠體140。半導體晶片120之背面係黏貼在基板110之上表面111,並以銲線130電性連接半導體晶片120至基板110,利用半導體晶片120下方之基板110做為半導體晶片120之機械結合與電性連接之介質,為了包覆銲線130,封膠體140係覆蓋至半導體晶片120之主動面121部份周邊與側面,但需顯露出半導體晶片120主動面121之感測區123,因此封膠時模具之壓合密合度顯得相當重要。此外,打線良率與封膠時是否因模流影響銲線130也是極為重要之因素。
為了解決上述問題,本發明目的之一係提供一種指紋感測晶片封裝方法及其封裝結構,利用導電膠體取代習用金屬銲線以提高產品良率並減少封裝厚度,同時省略習用之模壓製程。此外,利用導電薄膜層與基板地線連接,以消散靜電,達到保護晶片之目的。
為了達到上述目的,本發明一實施例之指紋感測晶片封裝方法,包括下列步驟:提供一基板,基板上具有一線路層;設置一感測晶片於基板上,其中感測晶片之一主動面朝上,且感測晶片的非主動面係直接設置於基板上;形成一導電膠電路層於感測晶片的主動面上,其中導電膠電路層係自感測晶片之主動面的周緣沿著感測晶片之側壁向下延伸並電性連接基板上之線路層,且導電膠電路層係以同一側電性連接主動面及基板上之線路層;形成一非導電薄膜覆蓋感測晶片、導電膠電路層與部份基板;以及形成一導電薄膜於非導電薄膜上。
本發明又一實施例之指紋感測晶片封裝結構,包括:一基板,具有一線路層;一感測晶片,設置於基板上,其中感測晶片之一主動面朝上,且感測晶片的非主動面係直接設置於基板上;一導電膠電路層,形成於感測晶片的主動面上,其中導電膠電路層係自感測晶片之主動面的週邊沿著感測晶片之側壁向下延伸至基板上之線路層,且導電膠電路層係以同一側電性連接主動面及基板上之線路層;一非導電薄膜,覆蓋感測晶片、導電膠電路層與部份基板;以及一導電薄膜,設置於非導電薄膜上,同時與基板之地線連接,以消散靜電。
以下藉由具體實施例配合所附的圖式詳加說明,當更容易瞭解本發明之目的、技術內容、特點及其所達成之功效。
其詳細說明如下,所述較佳實施例僅做一說明非用以限定本發明。
請參考圖2a到圖2e,圖2a至圖2e為本發明指紋感測晶片封裝方法之流程之結構剖視示意圖。指紋感測晶片封裝方法包括下列步驟。首先,參考圖2a,提供一基板210,基板210上具有一線路層(圖中未示)。參考圖2b,設置一感測晶片220於此基板210上,其中感測晶片220之一主動面222朝上且感測晶片220的非主動面係直接設置於基板210上。於一實施例中,感測晶片220可以利用黏貼的方式設置於基板210上。接著,參考圖2c,形成一導電膠電路層230於感測晶片220上,其中導電膠電路層230係自感測晶片220之主動面222的周緣沿著感測晶片220之側壁224向下延伸並電性連接基板210上之線路層,且導電膠電路層230以同一側電性連接主動面222及基板210上之線路層。再來,為保護感測晶片220不受使用者汗水汙染或外力破壞,形成一非導電薄膜240覆蓋感測晶片220、導電膠電路層230與部份基板210,如圖2d。以及,形成一導電薄膜250於非導電薄膜240上,如圖2e所示。
接續上述,於一實施例中,導電膠電路層230係利用灌模方式或是塗佈的方式形成於感測晶片220之主動面222的周緣。於又一實施例中,形成非導電薄膜240且/或導電薄膜250之方法係包括汽化冷卻沉積法、印刷方法、噴塗方法。為使接地效果良好,更包括開設一接地點212或接地面於基板210上,並於上述導電薄膜250覆蓋過程中一併覆蓋包含該接地位置的區域,達到連接之目的,以避免靜電放電(Electrostatic Discharge,ESD)對半導體元件造成的損害。此外,省略習用包覆銲線之模壓製程 (molding process),避免指紋感測晶片兩端的凸起部份以獲得更平坦之接觸面。
請繼續參考圖2e,本發明又一實施例之指紋感測晶片封裝結構,如圖所示,此指紋感測晶片封裝結構200包括:一基板210,含有一線路層(圖中未示)。一感測晶片220設置於基板210上,其中感測晶片220之一主動面222係朝上,且感測晶片220的非主動面係直接設置於基板210上。一導電膠電路層230,形成於感測晶片220上,其中導電膠電路層230係自感測晶片220之主動面222的周緣沿著感測晶片220之側壁224向下延伸至基板210上之線路層,且導電膠電路層230係以同一側電性連接主動面222及基板210上之線路層。其中導電膠電路層230係設置於感測晶片220之主動面222的周緣以曝露出感測區。一非導電薄膜240,覆蓋感測晶片220、導電膠電路層230與部份基板210。以及,一導電薄膜250,設置於非導電薄膜240上。
接續上述,基板210之材質包括金屬、玻璃、陶瓷或複合材料材質所構成。於一實施例中,導電膠電路層230之材料包括銀膠或其他導電膠體以完成電性連接感測晶片220與基板210,並改善因為打線會出現的良率問題,此外,導電膠電路層230之使用更可以縮小整體厚度,使產品更臻輕薄微小化。其中感測晶片220含有複數個導電接點設置於主動面222之周緣。導電膠電路層230則電性連接導電接點與基板210上之線路層。
接續說明,此實施例之指紋感測晶片封裝結構,其非導電薄膜240之材質包括塑膠或高分子材料以保護感測晶片與其上之電路或導電接點。於一實施例中,非導電薄膜240之厚度的範圍0.1~5μm。另,導電薄膜250之材質包括金屬材質。於一實施例中,導電薄膜250除可以作為接地作用;另外,為避免使用者長期觸模造成可能的損壞, 導電薄膜250最好具有耐刮、耐腐蝕之特性。故一實施例中,導電薄膜250之材質可包括鈦金屬及其合金。於一實施例中,導電薄膜250係與基板210上之一接地點212或接地面電性連接,以消散靜電,達到保護晶片之目的。於又一實施例中,為提供此封裝結構更好的保護,更包括一非導電薄膜260設置於導電薄膜250上以提供耐腐蝕與耐磨保護之功能,如圖2e所示。
綜合上述,本發明提供一種指紋感測晶片封裝方法及其封裝結構,利用導電膠體取代習用金屬銲線以提高產品良率並減少封裝厚度。另,省略習用之模壓製程,避免兩端的凸起部份以獲得更平坦之接觸面。此外,利用導電薄膜層與基板地線連接,以消散靜電,達到保護晶片之目的。
以上所述之實施例僅係為說明本發明之技術思想及特點,其目的在使熟習此項技藝之人士能夠瞭解本發明之內容並據以實施,當不能以之限定本發明之專利範圍,即大凡依本發明所揭示之精神所作之均等變化或修飾,仍應涵蓋在本發明之專利範圍內。
100‧‧‧觸滑式指紋辨識器之封裝構造
110‧‧‧基板
111‧‧‧上表面
120‧‧‧半導體晶片
121‧‧‧主動面
123‧‧‧感測區
130‧‧‧銲線
140‧‧‧封膠體
200‧‧‧指紋感測晶片封裝結構
210‧‧‧基板
212‧‧‧接地點
220‧‧‧感測晶片
222‧‧‧主動面
224‧‧‧側壁
230‧‧‧導電膠電路層
240,260‧‧‧非導電薄膜
250‧‧‧導電薄膜
圖1係習知觸滑式指紋辨識器之封裝構造之示意圖。
圖2a至圖2e為本發明指紋感測晶片封裝方法之流程之結構剖視示意圖。
200‧‧‧指紋感測晶片封裝結構
210‧‧‧基板
212‧‧‧接地點
220‧‧‧感測晶片
222‧‧‧主動面
224‧‧‧側壁
230‧‧‧導電膠電路層
240‧‧‧非導電薄膜
250‧‧‧導電薄膜
260‧‧‧非導電薄膜

Claims (14)

  1. 一種指紋感測晶片封裝方法,係包含下列步驟:提供一基板,該基板上具有一線路層;設置一感測晶片於該基板上,其中該感測晶片之一主動面朝上,且該感測晶片的非主動面係直接設置於該基板上;形成一導電膠電路層於該感測晶片的該主動面上,其中該導電膠電路層係自該感測晶片之該主動面的周緣沿著該感測晶片之側壁向下延伸並電性連接該基板上之該線路層,且該導電膠電路層係以同一側電性連接該主動面及該基板上之該線路層;形成一非導電薄膜覆蓋該感測晶片、該導電膠電路層與部份該基板;以及形成一導電薄膜於該非導電薄膜上。
  2. 如請求項1所述之指紋感測晶片封裝方法,其中形成該導電膠電路層之方法包含灌模、塗佈方法。
  3. 如請求項1所述之指紋感測晶片封裝方法,其中形成該非導電薄膜之方法係包含汽化冷卻沉積法、印刷方法、噴塗方法。
  4. 如請求項1所述之指紋感測晶片封裝方法,其中形成該導電薄膜之方法係包含汽化冷卻沉積法、印刷方法、噴塗方法。
  5. 如請求項1所述之指紋感測晶片封裝方法,更包含設置一接地點或一接地面於該基板上,並將該導電薄膜與該接地點或該接地面電性連接。
  6. 一種指紋感測晶片封裝結構,包含:一基板,具有一線路層;一感測晶片,設置於該基板上,其中該感測晶片之一主動面係朝上,且該感測晶片的非主動面係直接設置於該基板上; 一導電膠電路層,形成於該感測晶片的該主動面上,其中該導電膠電路層係自該感測晶片之該主動面的週邊沿著該感測晶片之側壁向下延伸至該基板上之該線路層,且該導電膠電路層係以同一側電性連接該主動面及該基板上之該線路層;一非導電薄膜,覆蓋該感測晶片、該導電膠電路層與部份該基板;以及一導電薄膜,設置於該非導電薄膜上。
  7. 如請求項6所述之指紋感測晶片封裝結構,其中該導電膠電路層之材料包含銀膠。
  8. 如請求項6所述之指紋感測晶片封裝結構,其中該非導電薄膜之材質包含塑膠或高分子材料。
  9. 如請求項6所述之指紋感測晶片封裝結構,其中該導電薄膜之材質包含金屬材質。
  10. 如請求項6所述之指紋感測晶片封裝結構,其中該導電薄膜之材質包含鈦金屬及其合金。
  11. 如請求項6所述之指紋感測晶片封裝結構,其中該感測晶片含有複數個導電接點設置於該主動面之周緣。
  12. 如請求項11所述之指紋感測晶片封裝結構,其中該導電膠電路層係電性連接該些導電接點與該基板上之該線路層。
  13. 如請求項6所述之指紋感測晶片封裝結構,其中該非導電薄膜之厚度的範圍0.1~5μm。
  14. 如請求項6所述之指紋感測晶片封裝結構,其中該導電薄膜係與該基板上之一接地點或一接地面電性連接。
TW097133856A 2008-09-04 2008-09-04 指紋感測晶片封裝方法及其封裝結構 TWI462193B (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW097133856A TWI462193B (zh) 2008-09-04 2008-09-04 指紋感測晶片封裝方法及其封裝結構
US12/547,767 US7977759B2 (en) 2008-09-04 2009-08-26 Fingerprint sensor chip package method and the package structure thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097133856A TWI462193B (zh) 2008-09-04 2008-09-04 指紋感測晶片封裝方法及其封裝結構

Publications (2)

Publication Number Publication Date
TW201011840A TW201011840A (en) 2010-03-16
TWI462193B true TWI462193B (zh) 2014-11-21

Family

ID=42933703

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097133856A TWI462193B (zh) 2008-09-04 2008-09-04 指紋感測晶片封裝方法及其封裝結構

Country Status (2)

Country Link
US (1) US7977759B2 (zh)
TW (1) TWI462193B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106056033A (zh) * 2015-04-14 2016-10-26 李美燕 复合基板感测装置及其制造方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9406580B2 (en) 2011-03-16 2016-08-02 Synaptics Incorporated Packaging for fingerprint sensors and methods of manufacture
TWI512911B (zh) * 2012-06-27 2015-12-11 聯詠科技股份有限公司 晶片封裝
CN104766053B (zh) * 2015-03-26 2018-10-30 业成光电(深圳)有限公司 指纹识别装置及其制造方法
CN105205473A (zh) * 2015-10-19 2015-12-30 深圳市欧菲投资控股有限公司 指纹识别传感器及其制作方法
US9939920B2 (en) 2016-03-03 2018-04-10 Microsoft Technology Licensing, Llc Keyset fingerprint sensor with backlight
CN106972007A (zh) * 2016-12-23 2017-07-21 创智能科技股份有限公司 具有抗静电结构的指纹感测辨识装置
CN106803079B (zh) * 2017-01-20 2020-08-21 Oppo广东移动通信有限公司 指纹模组及移动终端
KR101981247B1 (ko) * 2017-03-02 2019-05-23 크루셜텍 (주) 센서 패키지용 코팅 장치
CN108538733B (zh) * 2017-03-02 2021-06-11 韩国科泰高科株式会社 传感器封装件用涂覆装置及利用其制造的传感器封装件
CN108960006B (zh) * 2017-05-19 2021-11-30 致伸科技股份有限公司 指纹识别模块及其制作方法
CN107664868B (zh) * 2017-10-23 2020-12-01 京东方科技集团股份有限公司 一种彩膜基板及其制备方法和显示面板
CN109379460B (zh) 2018-10-15 2019-11-26 华为技术有限公司 镜头、主动发光模组及终端
CN110174210A (zh) * 2019-07-04 2019-08-27 昆山灵科传感技术有限公司 压力传感器及其封装方法
TWM612841U (zh) * 2021-02-19 2021-06-01 安帝司股份有限公司 指紋辨識智慧卡

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200300291A (en) * 2001-11-05 2003-05-16 Mitsumasa Koyanagi Solid-state image sensor and its production method
TWM327540U (en) * 2007-08-16 2008-02-21 Int Semiconductor Tech Ltd Package structure for touch-and-slide flat type fingerprint recognizer and substrate for the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003243577A (ja) * 2002-02-18 2003-08-29 Shinko Electric Ind Co Ltd 半導体装置及びその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200300291A (en) * 2001-11-05 2003-05-16 Mitsumasa Koyanagi Solid-state image sensor and its production method
TWM327540U (en) * 2007-08-16 2008-02-21 Int Semiconductor Tech Ltd Package structure for touch-and-slide flat type fingerprint recognizer and substrate for the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106056033A (zh) * 2015-04-14 2016-10-26 李美燕 复合基板感测装置及其制造方法

Also Published As

Publication number Publication date
US20100258891A1 (en) 2010-10-14
TW201011840A (en) 2010-03-16
US7977759B2 (en) 2011-07-12

Similar Documents

Publication Publication Date Title
TWI462193B (zh) 指紋感測晶片封裝方法及其封裝結構
TWI485821B (zh) 指紋辨識晶片封裝模組及其製造方法
JP5635661B1 (ja) イメージセンサの2段階封止方法
US9760754B2 (en) Printed circuit board assembly forming enhanced fingerprint module
TWI631632B (zh) 封裝結構及其製法
JP2013521582A (ja) 指紋センサ等のための一体成形したダイおよびベゼル構造
US9546089B1 (en) Pressure sensor and packaging method thereof
TW200828130A (en) Sweep-type fingerprint sensing device and method of packaging the same
TWI642158B (zh) 指紋感測晶片封裝結構
TWM484793U (zh) 指紋辨識晶片封裝模組
CN106470527B (zh) 用于形成增强型指纹辨识模块的印刷电路板结构
CN100372116C (zh) 接触式传感器封装构造及其制造方法
US10689249B2 (en) Semiconductor device package including a wall and a grounding ring exposed from the wall
CN112118526B (zh) 微机电系统麦克风封装结构与封装方法
TWM352093U (en) Fingerprint sensor chip package structure
TWM515144U (zh) 指紋感測裝置
TWI774008B (zh) 封裝結構及其製造方法
TWI250465B (en) Fingerprint sensor package with electrostatic discharge on chip
TW201711146A (zh) 封裝結構及其製法
TWM504287U (zh) 具有指紋辨識功能的觸控面板
US20060108681A1 (en) Semiconductor component package
JP3196821B2 (ja) 樹脂封止型回路装置
JP2019201121A (ja) プリモールド基板とその製造方法および中空型半導体装置とその製造方法
US11798967B2 (en) Image sensor package with transparent adhesive covering the optical sensing circuit
JP2001196505A (ja) 半導体チップ表面露出型の樹脂封止半導体パッケージ