TWI445076B - Vacuum processing device - Google Patents

Vacuum processing device Download PDF

Info

Publication number
TWI445076B
TWI445076B TW097106066A TW97106066A TWI445076B TW I445076 B TWI445076 B TW I445076B TW 097106066 A TW097106066 A TW 097106066A TW 97106066 A TW97106066 A TW 97106066A TW I445076 B TWI445076 B TW I445076B
Authority
TW
Taiwan
Prior art keywords
vacuum
transfer chamber
processing
chamber
wafer
Prior art date
Application number
TW097106066A
Other languages
English (en)
Chinese (zh)
Other versions
TW200929352A (en
Inventor
Susumu Tauchi
Shingo Kimura
Minoru Yatomi
Masakazu Isozaki
Akitaka Makino
Original Assignee
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Corp filed Critical Hitachi High Tech Corp
Publication of TW200929352A publication Critical patent/TW200929352A/zh
Application granted granted Critical
Publication of TWI445076B publication Critical patent/TWI445076B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
TW097106066A 2007-12-27 2008-02-21 Vacuum processing device TWI445076B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007335516A JP5596265B2 (ja) 2007-12-27 2007-12-27 真空処理装置

Publications (2)

Publication Number Publication Date
TW200929352A TW200929352A (en) 2009-07-01
TWI445076B true TWI445076B (zh) 2014-07-11

Family

ID=40796666

Family Applications (2)

Application Number Title Priority Date Filing Date
TW097106066A TWI445076B (zh) 2007-12-27 2008-02-21 Vacuum processing device
TW102119148A TW201338037A (zh) 2007-12-27 2008-02-21 真空處理裝置

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW102119148A TW201338037A (zh) 2007-12-27 2008-02-21 真空處理裝置

Country Status (4)

Country Link
US (1) US20090165952A1 (cg-RX-API-DMAC7.html)
JP (1) JP5596265B2 (cg-RX-API-DMAC7.html)
KR (2) KR100978887B1 (cg-RX-API-DMAC7.html)
TW (2) TWI445076B (cg-RX-API-DMAC7.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5260981B2 (ja) * 2008-02-22 2013-08-14 株式会社日立ハイテクノロジーズ 真空処理装置
KR101390900B1 (ko) 2011-05-31 2014-04-30 세메스 주식회사 기판처리장치
US9991139B2 (en) * 2012-12-03 2018-06-05 Asm Ip Holding B.V. Modular vertical furnace processing system
JP6609425B2 (ja) * 2015-06-17 2019-11-20 株式会社日立ハイテクノロジーズ プラズマ処理装置
CN113436984B (zh) * 2020-03-23 2024-12-06 台湾积体电路制造股份有限公司 用于半导体制程机台的设备接口系统
CN112317745B (zh) * 2020-09-22 2022-05-10 成都飞机工业（集团）有限责任公司 一种自动化增材制造粉末存储装置及存储方法
CN120659950A (zh) * 2023-02-06 2025-09-16 应用材料公司 用于处理光学装置的模块、系统及方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0982493A (ja) * 1995-09-14 1997-03-28 Tokyo Electron Ltd プラズマ処理装置
KR100193886B1 (ko) * 1996-05-03 1999-06-15 김영환 플라즈마 식각 장비 및 그를 이용한 식각 방법
JP3454034B2 (ja) * 1996-09-13 2003-10-06 株式会社日立製作所 真空処理装置
US5844195A (en) * 1996-11-18 1998-12-01 Applied Materials, Inc. Remote plasma source
JPH11145251A (ja) 1997-08-15 1999-05-28 Tokyo Electron Ltd 基板処理装置
US6107192A (en) * 1997-12-30 2000-08-22 Applied Materials, Inc. Reactive preclean prior to metallization for sub-quarter micron application
JP2000021870A (ja) * 1998-06-30 2000-01-21 Tokyo Electron Ltd プラズマ処理装置
JP2000133597A (ja) * 1998-10-22 2000-05-12 Tadahiro Omi 半導体製造装置
JP2000269149A (ja) * 1999-03-19 2000-09-29 Rohm Co Ltd 半導体基板に対するプラズマ表面処理装置
JP2001007117A (ja) * 1999-06-24 2001-01-12 Tokyo Electron Ltd 処理装置及び処理方法
US6860965B1 (en) * 2000-06-23 2005-03-01 Novellus Systems, Inc. High throughput architecture for semiconductor processing
US7335277B2 (en) * 2003-09-08 2008-02-26 Hitachi High-Technologies Corporation Vacuum processing apparatus
JP2006080347A (ja) 2004-09-10 2006-03-23 Hitachi High-Technologies Corp プラズマ処理装置
JP4694249B2 (ja) * 2005-04-20 2011-06-08 株式会社日立ハイテクノロジーズ 真空処理装置及び試料の真空処理方法
JP5030410B2 (ja) * 2005-09-28 2012-09-19 株式会社日立ハイテクノロジーズ 真空処理装置
KR100758298B1 (ko) 2006-03-03 2007-09-12 삼성전자주식회사 기판 처리 장치 및 방법

Also Published As

Publication number Publication date
KR20090071304A (ko) 2009-07-01
KR20100087689A (ko) 2010-08-05
US20090165952A1 (en) 2009-07-02
KR101116875B1 (ko) 2012-03-06
KR100978887B1 (ko) 2010-08-31
JP5596265B2 (ja) 2014-09-24
TW201338037A (zh) 2013-09-16
JP2009158733A (ja) 2009-07-16
TW200929352A (en) 2009-07-01

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees