TWI433622B - Fabrication methods for circuit substrate structure with smooth surface - Google Patents

Fabrication methods for circuit substrate structure with smooth surface Download PDF

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TWI433622B
TWI433622B TW100113496A TW100113496A TWI433622B TW I433622 B TWI433622 B TW I433622B TW 100113496 A TW100113496 A TW 100113496A TW 100113496 A TW100113496 A TW 100113496A TW I433622 B TWI433622 B TW I433622B
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copper foil
layer
carrier
circuit
smooth surface
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TW100113496A
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Chinese (zh)
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TW201244567A (en
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Chiu Yu Chen
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Mutual Tek Ind Co Ltd
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Description

具平滑表面的電路基板結構的製造方法Method for manufacturing circuit substrate structure with smooth surface

本發明係有關於一種電路基板結構的製造方法,特別有關於一種具有平滑表面的電路基板結構及其製造方法。The present invention relates to a method of fabricating a circuit substrate structure, and more particularly to a circuit substrate structure having a smooth surface and a method of fabricating the same.

在先進電子裝配技術中,印刷電路基板及模組能有效達到增加基板上晶片的單位密度,縮短連接晶片導體的長度,減低網路間的電容效應,提高線路的性能及信賴度等目標。於先前技術中,印刷電路基板大都採用複合材料積層板,先鍍上一層銅箔,再經蝕刻製程以得到所欲的印刷電路板。就結構而言,電路圖案是以電鍍的方式形成凸出於底層基板的表面。In the advanced electronic assembly technology, the printed circuit board and the module can effectively increase the unit density of the wafer on the substrate, shorten the length of the connected wafer conductor, reduce the capacitance effect between the networks, and improve the performance and reliability of the line. In the prior art, printed circuit boards are mostly made of composite laminates, which are first plated with a layer of copper foil and then etched to obtain the desired printed circuit board. In terms of structure, the circuit pattern is formed by electroplating to protrude from the surface of the underlying substrate.

然而就實際應用而言,多重切換旋鈕為應用於例如應用於音響或數位相機的多種功能切換,主要藉由一旋鈕與底層的電路基板結構之間旋轉而相互機械式接觸,以達到多重切換的目的。然而,若採用傳統電路圖案凸出於底層基板的表面,則易造成基板結構上的電路圖案隨著長期使用而磨耗損傷。However, in practical applications, the multiple switching knobs are used for various function switching, for example, applied to an audio or digital camera, and are mechanically contacted with each other mainly by rotation between a knob and the underlying circuit substrate structure to achieve multiple switching. purpose. However, if the conventional circuit pattern is used to protrude from the surface of the underlying substrate, the circuit pattern on the substrate structure is liable to be worn and damaged with long-term use.

有鑑於此,本發明各實施例目的之一在於提供一種具有平滑表面的電路基板結構製造方法,使圖案化電路結構的表面與預浸材基底的表面齊高,以增進多重切換旋鈕的耐用度及可靠度。In view of the above, one of the objects of the embodiments of the present invention is to provide a method for fabricating a circuit substrate structure having a smooth surface, such that the surface of the patterned circuit structure is flush with the surface of the prepreg substrate to enhance the durability of the multiple switching knobs. And reliability.

根據本發明之一實施例,一種具平滑表面的電路基板結構的製造方法,包括:提供一載板;貼覆一銅箔於該載板上;形成一光阻層於該銅箔上並實施微影製程於該光阻層,以顯露出一具有電路圖案的該銅箔表面;形成一披覆層於該具有電路圖案的該銅箔表面上;形成一銅鍍層於該披覆層上,以形成一圖案化電路結構;移除該光阻層,露出底層的該銅箔;將一預浸材與具有該圖案化電路結構的載板壓合成一堆疊體;移除該載板與該銅箔;以及沖壓該預浸材以形成一具平滑表面的電路基板結構。According to an embodiment of the present invention, a method of fabricating a circuit substrate having a smooth surface includes: providing a carrier; attaching a copper foil to the carrier; forming a photoresist layer on the copper foil and implementing a lithography process on the photoresist layer to expose a surface of the copper foil having a circuit pattern; forming a cladding layer on the surface of the copper foil having the circuit pattern; forming a copper plating layer on the cladding layer, Forming a patterned circuit structure; removing the photoresist layer to expose the underlying copper foil; pressing a prepreg with the carrier having the patterned circuit structure into a stack; removing the carrier and the carrier a copper foil; and stamping the prepreg to form a circuit substrate structure having a smooth surface.

根據本發明另一實施例,一種具平滑表面的電路基板結構的製造方法,包括:提供具有一黏結層的一載板;貼覆一銅箔於該載板上;形成一光阻層於該銅箔上並實施微影製程於該光阻層,以顯露出一具有電路圖案的該銅箔表面;電鍍一金層於該具有電路圖案的該銅箔表面上;電鍍一鎳層於該金層表面上;形成一銅鍍層於該鎳層上,以形成一圖案化電路結構;移除該光阻層,露出底層的該銅箔;實施一黑化處理於該銅鍍層與該銅箔,以增加表面粗糙度;將一預浸材與具有該圖案化電路結構的載板壓合成一堆疊體;移除該載板與該銅箔露出該金層表面;以及沖壓該預浸材以形成一具平滑表面的電路基板結構。According to another embodiment of the present invention, a method of fabricating a circuit substrate having a smooth surface includes: providing a carrier having a bonding layer; attaching a copper foil to the carrier; forming a photoresist layer thereon Forming a lithography process on the copper foil to expose a surface of the copper foil having a circuit pattern; plating a gold layer on the surface of the copper foil having the circuit pattern; plating a nickel layer on the gold Forming a copper plating layer on the nickel layer to form a patterned circuit structure; removing the photoresist layer to expose the underlying copper foil; performing a blackening treatment on the copper plating layer and the copper foil, To increase the surface roughness; compressing a prepreg and the carrier having the patterned circuit structure into a stack; removing the carrier and the copper foil to expose the surface of the gold layer; and stamping the prepreg to form A circuit board structure with a smooth surface.

為使本發明能更明顯易懂,下文特舉實施例,並配合所附圖式,作詳細說明如下:In order to make the invention more apparent, the following detailed description of the embodiments and the accompanying drawings are as follows:

以下以各實施例詳細說明並伴隨著圖式說明之範例,做為本發明之參考依據。在圖式或說明書描述中,相似或相同之部分皆使用相同之圖號。且在圖式中,實施例之形狀或是厚度可擴大,並以簡化或是方便標示。再者,圖式中各元件之部分將以分別描述說明之,值得注意的是,圖中未繪示或描述之元件,為所屬技術領域中具有通常知識者所知的形式,另外,特定之實施例僅為揭示本發明使用之特定方式,其並非用以限定本發明。The following is a detailed description of the embodiments and examples accompanying the drawings, which are the basis of the present invention. In the drawings or the description of the specification, the same drawing numbers are used for similar or identical parts. In the drawings, the shape or thickness of the embodiment may be expanded and simplified or conveniently indicated. In addition, the components of the drawings will be described separately, and it is noted that the components not shown or described in the drawings are known to those of ordinary skill in the art, and in particular, The examples are merely illustrative of specific ways of using the invention and are not intended to limit the invention.

根據本發明之主要實施例和樣態,提供一種電路基板結構的製造方法,將圖案化電路結構鑲埋於預浸材基底中,使其具平滑的電路表面。於一實施例樣態,提供反向製造程序的電路基板結構的製造方法,將圖案化電路疊層結構的依相反的次序形成於具銅箔的載板上,再將此載板與預浸材基底結合,後續將具銅箔的載板移除,即留下鑲埋於預浸材基底中圖案化電路結構。本發明另一實施例樣態提供一電路基板結構,其具有圖案化電路結構鑲埋於預浸材基底中,使圖案化電路結構的表面與預浸材基底的表面齊高。According to a main embodiment and aspect of the present invention, a method of fabricating a circuit substrate structure is provided, in which a patterned circuit structure is embedded in a prepreg substrate to have a smooth circuit surface. In an embodiment, a method for manufacturing a circuit substrate structure of a reverse manufacturing process is provided. The patterned circuit laminate structure is formed on a carrier plate with a copper foil in an opposite order, and the carrier is pre-impregnated. The material substrate is bonded, and the copper foil carrier is subsequently removed, ie, the patterned circuit structure is embedded in the prepreg substrate. Another embodiment of the present invention provides a circuit substrate structure having a patterned circuit structure embedded in a prepreg substrate such that the surface of the patterned circuit structure is flush with the surface of the prepreg substrate.

圖1-14顯示根據本發明之一具體實施例的製造具平滑表面的電路基板結構的方法於各階段的示意圖。請參閱圖1,首先提供一載板,例如環氧樹脂(FR-4)、苯樹脂、或雙馬來醯胺三氮雜苯樹脂所構成之素面絕緣基板。於所述絕緣基板的表面上分別疊積一層銅箔,成為貼銅層基板並作為本實施例的起始材料。於另一實施例中,可選擇壓貼一圈黏結層102於空白載板100上。接著,貼覆一銅箔104於該載板100上。由於該載板100上具有一圈黏結層102,能使該銅箔104更緊密地貼覆於該載板上,如圖2所示。1-14 show schematic views of various stages of a method of fabricating a circuit substrate structure having a smooth surface in accordance with an embodiment of the present invention. Referring to FIG. 1, a carrier board, such as an epoxy resin (FR-4), a benzene resin, or a bismalelider triazine resin, is first provided. A layer of copper foil was laminated on the surface of the insulating substrate to form a copper-clad layer substrate as a starting material of the present embodiment. In another embodiment, a ring of adhesive layer 102 can be pressed onto the blank carrier 100. Next, a copper foil 104 is attached to the carrier 100. Since the carrier 100 has a ring of adhesive layers 102, the copper foil 104 can be more closely attached to the carrier, as shown in FIG.

請參閱圖3,形成一光阻層106於銅箔104上。例如於一實施例中,可選擇實施刷磨、微蝕等步驟,將板面銅箔做適當的粗化處理,並以適當的溫度及壓力將乾膜光阻106密合貼附於銅箔104的表面。接著,實施微影製程於該光阻層,即實施曝光和顯影步驟,以顯露出一具有電路圖案的銅箔104a表面,如圖4所示。Referring to FIG. 3, a photoresist layer 106 is formed on the copper foil 104. For example, in an embodiment, the steps of brushing, micro-etching, etc. may be performed, the surface copper foil is appropriately roughened, and the dry film photoresist 106 is closely adhered to the copper foil at an appropriate temperature and pressure. The surface of 104. Next, a lithography process is performed on the photoresist layer, that is, an exposure and development step is performed to expose a surface of the copper foil 104a having a circuit pattern, as shown in FIG.

接著,請參閱圖5,形成一披覆層於該具有電路圖案的銅箔表面上。於一實施例中,該披覆層包括一金鍍層108與一鎳鍍層110。於另一實施例中,可選擇電鍍一金鍍層108於該具有電路圖案的該銅箔104a表面上,及電鍍一鎳鍍層110於該金鍍層108表面上,如圖6所示。應注意的是,金鍍層108亦可替選為其他表面處理層,例如包括但並非限定於錫或銀。Next, referring to FIG. 5, a cladding layer is formed on the surface of the copper foil having the circuit pattern. In one embodiment, the cladding layer includes a gold plating layer 108 and a nickel plating layer 110. In another embodiment, a gold plating layer 108 may be plated on the surface of the copper foil 104a having the circuit pattern, and a nickel plating layer 110 may be plated on the surface of the gold plating layer 108, as shown in FIG. It should be noted that the gold plating 108 may alternatively be other surface treatment layers including, for example, but not limited to, tin or silver.

請參閱圖7,形成一銅鍍層於該披覆層上,以形成一圖案化電路結構。於一具體實施例中,形成一厚度大抵為10微米的銅鍍層112於該鎳鍍層110上,以形成一圖案化電路結構115。接著,移除該光阻層106,例如以光阻移除液(例如鹼性溶液,如NaOH水溶液)將乾膜光阻洗除,露出底層的該銅箔104,如圖8所示。Referring to FIG. 7, a copper plating layer is formed on the cladding layer to form a patterned circuit structure. In one embodiment, a copper plating layer 112 having a thickness of substantially 10 microns is formed on the nickel plating layer 110 to form a patterned circuit structure 115. Next, the photoresist layer 106 is removed, for example, the photoresist is removed by a photoresist removal solution (for example, an alkaline solution such as an aqueous NaOH solution) to expose the underlying copper foil 104, as shown in FIG.

請參閱圖9,實施一黑化處理於該銅鍍層112與該銅箔104,以增加表面粗糙度,接著將一預浸材120與具有該圖案化電路結構115的載板100壓合成一堆疊體150,如圖10所示。例如,送入真空壓合機中以適當之溫度及壓力使所述堆疊體150硬化黏合。在進行壓合步驟之前,具有該圖案化電路結構115的載板100可先經過黑化(即氧化)處理,使銅鍍層112與銅箔104的銅表面粗化,以增加該預浸材與具有該圖案化電路結構的載板之間的結合力。應注意的是,為了使壓合步驟順利進行,可選擇將一額外的銅箔130(或其他可移除之材料例如離型膜)置於預浸材120外側,壓合後的堆疊體150如圖11所示。Referring to FIG. 9, a blackening treatment is performed on the copper plating layer 112 and the copper foil 104 to increase the surface roughness, and then a prepreg 120 and the carrier 100 having the patterned circuit structure 115 are pressed into a stack. Body 150 is shown in FIG. For example, the stacked body 150 is hardened and bonded to the vacuum laminator at an appropriate temperature and pressure. Before the embossing step, the carrier 100 having the patterned circuit structure 115 may be subjected to a blackening (ie, oxidation) treatment to roughen the copper surface of the copper plating layer 112 and the copper foil 104 to increase the prepreg and The bonding force between the carriers having the patterned circuit structure. It should be noted that in order for the pressing step to proceed smoothly, an additional copper foil 130 (or other removable material such as a release film) may be placed on the outside of the prepreg 120, and the laminated body 150 after pressing. As shown in Figure 11.

請參閱圖12,移除該載板100與該銅箔104露出該金鍍層108的表面108b,使圖案化電路結構的表面與預浸材基底的表面齊高。於該移除該載板與該銅箔步驟後,更包括補鍍一額外的金鍍層122於該金鍍層上,亦可於一開始就鍍足所需厚度,如圖13所示。接著,請參閱圖14,沖壓該預浸材呈所欲的形狀120a,以形成一具平滑表面的電路基板結構200。Referring to FIG. 12, the carrier 100 and the copper foil 104 are removed to expose the surface 108b of the gold plating layer 108 such that the surface of the patterned circuit structure is flush with the surface of the prepreg substrate. After the step of removing the carrier and the copper foil, an additional gold plating layer 122 is additionally plated on the gold plating layer, and the required thickness can be plated at the beginning, as shown in FIG. Next, referring to FIG. 14, the prepreg is stamped into a desired shape 120a to form a circuit substrate structure 200 having a smooth surface.

本發明雖以各種實施例揭露如上,然其並非用以限定本發明的範圍,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可做些許的更動與潤飾。本發明之保護範圍當視後附之申請專利範圍所界定者為準。The present invention has been disclosed in the above various embodiments, and is not intended to limit the scope of the present invention. Any one of ordinary skill in the art can make a few changes and refinements without departing from the spirit and scope of the invention. . The scope of the invention is defined by the scope of the appended claims.

100...載板100. . . Carrier board

102...黏結層102. . . Bonding layer

104...銅箔104. . . Copper foil

104a...具有電路圖案的該銅箔表面104a. . . The copper foil surface having a circuit pattern

106...光阻層106. . . Photoresist layer

108...金鍍層108. . . Gold plating

108b...金鍍層的表面108b. . . Gold plated surface

110...鎳鍍層110. . . Nickel plating

112...銅鍍層112. . . Copper plating

115...圖案化電路結構115. . . Patterned circuit structure

120...預浸材120. . . Prepreg

120a...所欲形狀的預浸材120a. . . Prepreg of the desired shape

122...額外的金鍍層122. . . Extra gold plating

130...額外的銅箔130. . . Extra copper foil

150...堆疊體150. . . Stack

200...具平滑表面的電路基板結構200. . . Circuit substrate structure with smooth surface

圖1-14顯示根據本發明之一具體實施例的具平滑表面的電路基板結構的製造方法於各階段的結構示意圖。1-14 are schematic views showing the construction of a method of fabricating a circuit substrate having a smooth surface at various stages in accordance with an embodiment of the present invention.

120a...所欲形狀的預浸材120a. . . Prepreg of the desired shape

122...額外的金鍍層122. . . Extra gold plating

200...具平滑表面的電路基板結構200. . . Circuit substrate structure with smooth surface

Claims (7)

一種具平滑表面的電路基板結構的製造方法,包括:提供一載板;貼覆一銅箔於該載板上;形成一光阻層於該銅箔上並實施微影製程於該光阻層,以顯露出一具有電路圖案的該銅箔表面;形成一披覆層於該具有電路圖案的該銅箔表面上;形成一銅鍍層於該披覆層上,以形成一圖案化電路結構;移除該光阻層,露出底層的該銅箔;將一預浸材與具有該圖案化電路結構的載板壓合成一堆疊體;移除該載板與該銅箔;以及沖壓該預浸材以形成一具平滑表面的電路基板結構。 A method for manufacturing a circuit board structure having a smooth surface, comprising: providing a carrier; attaching a copper foil to the carrier; forming a photoresist layer on the copper foil and performing a lithography process on the photoresist layer a surface of the copper foil having a circuit pattern; forming a coating layer on the surface of the copper foil having the circuit pattern; forming a copper plating layer on the coating layer to form a patterned circuit structure; Removing the photoresist layer to expose the underlying copper foil; pressing a prepreg with the carrier having the patterned circuit structure into a stack; removing the carrier and the copper foil; and stamping the prepreg The material is formed into a circuit substrate structure having a smooth surface. 如申請專利範圍第1項所述的具平滑表面的電路基板結構的製造方法,其中該載板上具有一黏結層,使該銅箔更緊密地貼覆於該載板上。 The method of manufacturing a circuit board structure having a smooth surface according to claim 1, wherein the carrier has a bonding layer to more closely adhere the copper foil to the carrier. 如申請專利範圍第1項所述的具平滑表面的電路基板結構的製造方法,其中該披覆層包括一金鍍層與一鎳鍍層。 The method of manufacturing a circuit board structure having a smooth surface according to claim 1, wherein the cladding layer comprises a gold plating layer and a nickel plating layer. 如申請專利範圍第1項所述的具平滑表面的電路基板 結構的製造方法,於壓合步驟之前,更包括實施一黑化處理,以增加該預浸材與具有該圖案化電路結構的載板之間的結合力。 A circuit board having a smooth surface as described in claim 1 The manufacturing method of the structure further comprises performing a blackening treatment before the pressing step to increase the bonding force between the prepreg and the carrier having the patterned circuit structure. 如申請專利範圍第1項所述的具平滑表面的電路基板結構的製造方法,於該移除該載板與該銅箔步驟後,更包括補鍍一額外的金鍍層於該金鍍層上。 The method for manufacturing a circuit board structure having a smooth surface according to claim 1, wherein after the step of removing the carrier and the copper foil, an additional gold plating layer is additionally plated on the gold plating layer. 一種具平滑表面的電路基板結構的製造方法,包括:提供具有一黏結層的一載板;貼覆一銅箔於該載板上;形成一光阻層於該銅箔上並實施微影製程於該光阻層,以顯露出一具有電路圖案的該銅箔表面;電鍍一金層於該具有電路圖案的該銅箔表面上;電鍍一鎳層於該金層表面上;形成一銅鍍層於該鎳層上,以形成一圖案化電路結構;移除該光阻層,露出底層的該銅箔;實施一黑化處理於該銅鍍層與該銅箔,以增加表面粗糙度;將一預浸材與具有該圖案化電路結構的載板壓合成一堆疊體;移除該載板與該銅箔露出該金層表面;以及沖壓該預浸材以形成一具平滑表面的電路基板結構。 A method for manufacturing a circuit substrate structure having a smooth surface, comprising: providing a carrier having a bonding layer; attaching a copper foil to the carrier; forming a photoresist layer on the copper foil and performing a lithography process The photoresist layer is formed to expose a surface of the copper foil having a circuit pattern; a gold layer is plated on the surface of the copper foil having the circuit pattern; a nickel layer is plated on the surface of the gold layer; and a copper plating layer is formed Forming a circuit structure on the nickel layer; removing the photoresist layer to expose the underlying copper foil; performing a blackening treatment on the copper plating layer and the copper foil to increase surface roughness; The prepreg is pressed into a stack with the carrier having the patterned circuit structure; the carrier and the copper foil are removed to expose the surface of the gold layer; and the prepreg is stamped to form a circuit substrate structure having a smooth surface . 如申請專利範圍第6項所述的具平滑表面的電路基板結構的製造方法,於該移除該載板與該銅箔步驟後,更包括補鍍一額外的金鍍層於該金鍍層上。 The method for manufacturing a circuit board structure having a smooth surface according to claim 6, wherein after the step of removing the carrier and the copper foil, an additional gold plating layer is additionally plated on the gold plating layer.
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